Vibration isolating device

Abstract

To provide a vibration isolating device which includes a constitution that enables improvement in responsiveness of a fluid spring.SOLUTION: A vibration isolating device 1 includes: a vibration isolating table 10 on which a vibration isolating object is mounted; a support part 20 which supports the vibration isolating table 10 in a vertical direction; a fluid spring 30 for isolating vibration which presses the support part 20 from a horizontal direction, and has a spring communication passage 33h communicated with a fluid chamber 32 provided inside; a valve 40 which has a valve fluid supply / discharge port 40h for supplying / discharging a fluid to the fluid spring 30 for isolating vibration; and a fixing part 50 which fixes the valve 40. The fixing part 50 has a fixing part fluid passage 51h, the spring communication passage 33h is connected on one side of the fixing part fluid passage 51h, and the valve fluid supply / discharge port 40h is connected to the other side of the fixing part fluid passage 51h.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present technology relates to a vibration isolation device such as a semiconductor manufacturing apparatus, for example.

Background Art

[0002] In a vibration isolation device using a fluid spring, there is a demand for improving the performance of more quickly stopping the shaking of the surface plate accompanying the acceleration and deceleration of the movable stage. For example, in order to improve work efficiency, when the moving speed of a movable member such as a movable stage increases, the impact at the time of stopping becomes large. In order to quickly stop the vibration caused by the impact, it is necessary to improve the vibration damping performance. When vibration damping is performed by a fluid spring, it is necessary to increase the response speed of the fluid spring.

[0003] Japanese Patent Application Laid-Open No. 2005-163915 (Patent Document 1) discloses a configuration related to a fluid spring. For example, when viewed in the horizontal direction, the fluid spring provided between the outer frame and the vibration isolation rubber and the receiver tank are connected by a fluid passage, so that the supply and discharge of the fluid are performed. The fluid passage is composed of a through hole provided in the outer frame and a passage provided outside the outer frame.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] In the configuration of the fluid spring disclosed in Patent Document 1, in order to exert a force on the surface plate at a predetermined pressure, it is necessary for the fluid to be sufficiently supplied to the fluid spring, and it cannot be said that the responsiveness of the fluid spring that requires early operation can be sufficiently exhibited. As a factor, the volume of the pipe portion connecting the valve and the fluid spring (fluid chamber) is considered to affect the responsiveness.

[0006] In the case of the configuration described in Patent Document 1, a long flow path is provided by the piping section. The volume occupied by this flow path affects the responsiveness of the fluid spring. That is, until sufficient fluid is supplied to this flow path, it is difficult for the fluid spring to generate sufficient pressing force because the fluid necessary to sufficiently press an object such as a surface plate is not supplied. In order for the fluid spring to quickly stop the shaking due to an impact on a vibration-damping target such as a surface plate to which an impact is applied by the movement of a moving body such as a stage, a flow path that can quickly fill the fluid spring with fluid is required.

[0007] An object of the present technology is to solve the above problems, and to provide a vibration-damping device having a configuration that enables improvement of the responsiveness of a fluid spring.

Means for Solving the Problems

[0008] [1] The vibration-damping device according to the present technology includes a vibration-damping table on which a vibration-damping target is mounted, a support portion that supports the vibration-damping table in the vertical direction, a vibration-damping fluid spring that presses the support portion from the horizontal direction and has a spring communication path that communicates with a fluid chamber provided inside, a valve having a valve fluid supply / discharge port that supplies or discharges fluid to / from the vibration-damping fluid spring, and a fixing portion that fixes the valve. The fixing portion has a fixing portion fluid passage, the spring communication path is connected to one side of the fixing portion fluid passage, and the valve fluid supply / discharge port is connected to the other side of the fixing portion fluid passage.

[0009] [2] One or more of the valves are provided, and the fixing portion is provided with one or more fixing portion fluid passages that are connected to the valve fluid supply / discharge ports of the respective valves, and the one or more fixing portion fluid passages communicate with the same fluid chamber. The vibration-damping device according to [1].

[0010] [3] In the horizontal direction, the vibration-damping fluid spring, the fixing portion, and the valve are arranged in a pair at symmetric positions so as to sandwich the support portion. The vibration-damping device according to any one of [1] or [2].

Advantages of the Invention

[0011] According to the present technology, by reducing the volume occupied by this passage, it is possible to provide a vibration damping device having a configuration capable of obtaining the responsiveness of a predetermined fluid spring while ensuring the necessary stroke of the piston required for vibration damping.

Brief Description of the Drawings

[0012]

Figure 1

Figure 2

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Figure 8

Modes for Carrying Out the Invention

[0013] Hereinafter, embodiments of the present technology will be described. The same or corresponding parts may be denoted by the same reference numerals, and the description thereof may not be repeated.

[0014] In each of the embodiments described below, when referring to the number, quantity, dimensions, etc., unless otherwise specified, the scope of the present technology is not necessarily limited to such number, quantity, dimensions, etc. In the following embodiments, each component is not necessarily essential to the present technology, unless otherwise specified. The same or corresponding parts are given the same reference numerals, and repeated descriptions may not be repeated. It is initially planned to use the configurations in the embodiments in appropriate combinations.

[0015] In this specification, the descriptions of "comprise", "include", and "have" are in an open - ended form. That is, when a certain configuration is included, other configurations other than the said configuration may or may not be included. Also, the present technology is not necessarily limited to those that necessarily exhibit all the effects mentioned in this embodiment.

[0016] (Vibration isolation device 1) With reference to FIGS. 1 and 2, the configuration of the vibration isolation device 1 of this embodiment will be described. FIG. 1 is a longitudinal sectional view showing the configuration of the vibration isolation device 1, and FIG. 2 is a partial perspective view seen from one valve side of the vibration isolation device 1.

[0017] The vibration isolation device 1 has a bilaterally symmetric form with a virtual plane perpendicular to the direction axis of the pressing direction of the piston 31, including the vertical line VL, as a boundary. In the following description, the bilaterally symmetric vibration isolation device 1 will be described, but it is not limited to the bilaterally symmetric form, and it may be the configuration of a vibration isolation device having either one of the configurations.

[0018] The vibration isolation device 1 includes a flat vibration isolation table 10 on which a vibration isolation target such as a semiconductor manufacturing device is mounted, a support portion 20 provided below the vibration isolation table 10 in the vertical direction, a vibration damping fluid spring 30 that presses the support portion 20 from the horizontal direction, a valve 40, and a fixing portion 50 that fixes the valve 40. The vibration damping fluid spring 30 is provided so as to be able to press the support portion 20 in a pair so as to be symmetric with respect to a virtual plane including the vertical line VL as a boundary. One vibration damping fluid spring 30 is connected to at least one valve 40, but can also be connected to a plurality of valves.

[0019] The support portion 20 includes a support plate 22 provided on the vibration isolation table 10 and a connecting portion 21 that extends downward from the support plate 22 and is connected to the vibration damping fluid spring 30. The support portion 20 provides at least horizontal support to the vibration isolation table 10 by the vibration damping fluid spring 30. The fixing portion 50 includes a side wall portion 51 that fixes the valve 40 and a mounting wall 52 that supports the side wall portion 51.

[0020] As will be described later, the valve 40 functions as a valve for switching a flow path through which a fluid flows in order to control the supply and / or discharge of the fluid to / from the fluid chamber 32, and is a device controlled by the control unit 100. Air is used as the fluid, but it is not limited to air, and an inert gas such as nitrogen or a liquid can also be used. The valve 40 has a supply port through which the fluid can be supplied to the fluid chamber 32. The valve 40 only needs to be able to supply the fluid to the fluid chamber 32. In the present embodiment, it includes an intake port (not shown) connected to a fluid supply source such as a compressor and a discharge port (not shown) connected to an exhaust passage (not shown). The supply port of the valve 40 is connected to the fixing portion fluid passage 51h.

[0021] The valve 40 can be fixed to the side wall portion 51 by fixing the valve 40 to the surface of the side wall portion 51, or by providing a bottomed hole in the thickness direction of the side wall portion 51 and embedding the valve 40 in this hole to fix the valve 40 to the side wall portion 51. Known fixing methods such as fastening and adhesion can be used to fix the valve 40.

[0022] The forms of the vibration isolation table 10, the support part 20, and the fixing part 50 described above are merely examples and are not limited to these forms.

[0023] The vibration damping fluid spring 30 includes a base part 33 as a fluid chamber component in which an opening 33p is defined, a diaphragm 34 as an elastic membrane part covering the opening 33p of the base part 33, a piston 31 connected to the diaphragm 34 on the side opposite to the opening 33p, a fluid chamber 32 defined by the base part 33 and the diaphragm 34, and a spring communication passage 33h provided in the base part 33 for supplying and / or discharging fluid into the fluid chamber 32. The connecting part 21 of the support part 20 is connected to the side of the piston 31 opposite to the side connected to the diaphragm 34.

[0024] The base part 33 includes a circular wall surface part 33a and a cylindrical standing wall part 33b provided so as to surround the periphery of the wall surface part 33a. The spring communication passage 33h is provided in the wall surface part 33a. The opening 33p is defined at the surrounded end part 33t of the standing wall part 33b on the side opposite to the wall surface part 33a. The periphery of the diaphragm 34 is fixed to the end part 33t of the standing wall part 33b by fixing means (not shown).

[0025] In the present embodiment, in order to ensure a predetermined responsiveness, since the fluid chamber 32 maintains a predetermined capacity, it is preferable that the base part 33 has a strength capable of maintaining the volume of the fluid chamber 32. The base part 33 maintains the volume of the fluid chamber 32 according to the application. Since the wall surface part 33a maintains the standing wall part 33b and is a part that connects to the side wall part 51 to maintain the vibration damping fluid spring 30, the thickness and material are appropriately selected and used according to the pressure applied to the fluid chamber 32 and the like. For the spring communication passage 33h, the diameter as a flow path is specified according to the flow rate and flow velocity of the fluid passing through.

[0026] When fluid flows into the fluid chamber 32 from the spring communication passage 33h, the diaphragm 34 expands and deforms toward the piston 31 side, and the piston 31 is moved in a direction away from the wall surface part 33a.

[0027] A fixing part fluid passage 51h is provided in the side wall part 51. One end side of the fixing part fluid passage 51h is directly connected to the spring communication passage 33h. A valve 40 is fixed to the surface of the side wall part 51 opposite to the base part 33. The valve 40 has a valve fluid supply / discharge port 40h for supplying fluid to the vibration damping fluid spring 30. The valve fluid supply / discharge port 40h of the valve 40 is directly connected to the other end side of the fixing part fluid passage 51h.

[0028] The fixing part fluid passage 51h preferably communicates from the valve 41 side of the side wall part 51 to the vibration damping fluid spring 30 side at the position where the base part 33 is connected to the side wall part 51, that is, at the position where the base part 33 is located with respect to the side wall part 51 in the vertical direction and the horizontal direction. The fixing part fluid passage 51h preferably opens at the center of the bottom surface of the fluid chamber 32 and is preferably coaxial with the pressing direction of the vibration damping fluid spring 30.

[0029] For the sake of responsiveness, the fixing part fluid passage 51h is preferably linear, but may be inclined or curved with respect to the pressing direction as long as sufficient responsiveness can be ensured. For example, the opening on the valve side of the fixing part fluid passage 51h may be located within the range of plane symmetry with the side wall part 51 as the reference plane with respect to the range where the base part 33 is connected in the side wall part 51. According to the required responsiveness, the fixing part fluid passage 51h can be appropriately set within a range where the path length is sufficiently short.

[0030] In the above description, "directly connected" means that no other connecting member is interposed. Note that interposing a leakage suppressing member such as a sealing material to prevent fluid from leaking to the outside means that it is included in the directly connected configuration. The vibration damping fluid spring 30 and the valve 40 are connected to the side wall part 51 without interposing an intervening member such as a connecting member, so that the path length of the flow path can be shortened and a path length that can ensure sufficient responsiveness can be obtained.

[0031] In the present embodiment, the side wall portion 51 is not limited in terms of material and thickness as long as it can hold the vibration control fluid spring 30 and the valve 40 in the horizontal direction. Further, the fixed portion fluid passage 51h is provided so as to communicate with the spring communication passage 33h, and the diameter as a flow passage is specified according to the flow rate and flow velocity of the passing fluid.

[0032] In the present embodiment, the center lines CL of the through holes of the valve fluid supply / discharge port 40h, the fixed portion fluid passage 51h, and the spring communication passage 33h are arranged coaxially in the horizontal direction.

[0033] (Control system) With reference to FIG. 3, a control system for introducing or discharging fluid into the fluid chamber 32 of the vibration isolation device 1 having the above-described configuration will be described. FIG. 3 is a block diagram showing the control of introducing or discharging fluid into the fluid chamber 32 of the vibration isolation device 1.

[0034] A control unit 100 on the main body device side is connected to the valve 40, and the switching operation of the valve 40 is controlled. An air supply system 200 is connected to the valve 40, and the introduction of fluid into the valve 40 is controlled by the control unit 100. An exhaust system 300 is connected to the valve 40, and the exhaust of fluid from the valve 40 is controlled by the control unit 100.

[0035] (Function and effect) As described above, according to the vibration isolation device 1 in the present embodiment, the valve fluid supply / discharge port 40h of the valve 40 is directly connected to the side wall portion 51 of the fixing portion 50 that fixes the vibration control fluid spring 30, and as a supply path for passing fluid, only the fixed portion fluid passage 51h and the spring communication passage 33h are used, and the structure is configured with the minimum piping without intervening other pipelines, thereby minimizing the volume of the passage.

[0036] By adopting this configuration, it is possible to obtain a sufficient response speed required for the vibration control fluid spring as a vibration control actuator. For example, the vibration isolation device 1 of the present embodiment can be suitably used for the vibration isolation table of a semiconductor manufacturing apparatus incorporating a high-speed stage.

[0037] (Embodiment 2) Referring to FIG. 4, another form of the vibration isolator will be described. FIG. 4 is a partial longitudinal sectional view showing the configuration of the vibration isolator 1A according to Embodiment 2. The basic configuration is the same as that of the vibration isolator 1 in Embodiment 1 described above, but the positions of the through holes of the valve fluid supply / discharge port 40h, the fixed part fluid passage 51h, and the spring communication passage 33h are provided at positions deviated from the horizontal center line CL of the piston 31.

[0038] The spring communication passage 33h is provided at a position shifted upward with respect to the center line CL, and the fixed part fluid passage 51h is provided so as to incline upward as it moves away from the piston 31.

[0039] For example, when the arrangement position of the valve 40 is provided at a position deviated from the horizontal center line CL due to design constraints, the configuration such as the vibration isolator 1A in the present embodiment is selected.

[0040] Even with such a configuration, it is possible to directly connect the valve fluid supply / discharge port 40h of the valve 40 to the side wall portion 51 of the fixing portion 50 that fixes the vibration damping fluid spring 30, and the same operational effects as those in Embodiment 1 described above can be obtained.

[0041] (Other Embodiments) For example, referring to FIGS. 5 to 8, the configuration of the vibration isolator according to still other embodiments will be described. FIGS. 5 to 7 are first to third schematic views showing variations in the arrangement of the valve 40, and FIG. 8 is a partial longitudinal sectional view for explaining the configuration of the vibration isolator that changes the capacity of the fluid chamber 32.

[0042] FIG. 5 is a schematic view seen from the valve 40 when the center lines CL of the through holes of the valve fluid supply / discharge port 40h, the fixed part fluid passage 51h, and the spring communication passage 33h of the vibration isolator 1 shown in Embodiment 1 are arranged coaxially in the horizontal direction, and one valve 40 is provided.

[0043] The case of providing one valve 40 is not the only option. As shown in Fig. 6, it is also possible to adopt a configuration in which two valves 40 are provided. As shown in Fig. 7, it is also possible to adopt a configuration in which four valves 40 are provided, and five or more valves 40 may be provided.

[0044] Furthermore, as shown in Fig. 8, in the fluid chamber 32 of the base portion 33, in order to reduce the volume of the fluid chamber 32, a spacer 80 may be arranged in contact with the wall surface portion 33a. The spacer 80 is provided with a communication hole 80h for communicating the spring communication passage 33h and the fluid chamber 32. The form of this communication hole 80h may be constituted by a single passage like the spring communication passage 33h, or may be branched into a plurality of branches toward the fluid chamber 32 as shown in Fig. 8.

[0045] The valve 40 has a structure in which it is directly connected to the fixing portion 50 to which the vibration damping fluid spring 30 is fixed without an intervening member such as an attachment. Therefore, the response speed at which the vibration damping fluid spring 30 operates by the fluid supplied from the valve actuated by the signal from the control unit 100 is fast, and the responsiveness as the vibration damping action of the vibration damping fluid spring 30 is excellent.

[0046] Furthermore, the fluid existing in the flow path from the valve 40 to the fluid chamber 32, together with the fluid existing in the fluid chamber 32, will exhibit spring characteristics with respect to the force applied from the vibration isolation table 10 to the piston 31. Therefore, the smaller the amount of fluid existing in the flow path from the valve 40 to the fluid chamber 32, the better the vibration damping performance can be exhibited with respect to the vibration isolation table 10. Therefore, it is advantageous for quickly stopping the vibration caused by a stage driven at a high acceleration such as 1G, 2G, 3G, etc.

[0047] Note that the structure in which the valve 40 is fixed to the fixing portion 50 to which the vibration damping fluid spring 30 is fixed is used for vibration damping as described above and is used together with a vibration damping actuator (not shown) such as a fluid spring or a Lorentz motor provided in the vertical direction of the vibration isolation table 10, but it can also be used for a vibration damping fluid spring.

[0048] Although the embodiments of the present technology have been described above, each of the embodiments disclosed this time should be considered to be illustrative in all respects and not restrictive. The scope of the present technology is indicated by the claims, and it is intended that all modifications within the meaning and scope equivalent to the claims be included.

Description of Reference Numerals

[0049] 1 Vibration damping device, 1A Vibration damping device, 10 Vibration damping table, 20 Support portion, 21 Connecting portion, 22 Support plate, 30 Fluid spring for vibration control, 31 Piston, 32 Fluid chamber, 33 Base portion, 33a Wall surface portion, 33b Upright wall portion, 33h Communication path, 33h Spring communication path, 33p Opening, 33t End portion, 34 Diaphragm, 40 Valve, 40h Valve fluid supply / discharge port, 50 Fixing portion, 51 Side wall portion, 51h Fixing portion fluid passage, 52 Mounting wall, 80 Spacer, 80h Communication hole, 100 Control portion, 200 Air supply system, 300 Exhaust system.

Claims

1. a vibration isolation table on which an object to be vibration-isolated is mounted; a support portion that supports the vibration isolation table in the vertical direction; a vibration damping fluid spring that presses the support portion from the horizontal direction and has a spring communication passage communicating with a fluid chamber provided therein; a valve having a valve fluid supply / discharge port for supplying or discharging fluid to / from the vibration damping fluid spring; a fixing portion for fixing the valve; comprising: the fixing portion has a fixing portion fluid passage; one side of the fixing portion fluid passage is connected to the spring communication passage; the other side of the fixing portion fluid passage is connected to the valve fluid supply / discharge port; a vibration isolation device.

2. one or more of the valves are provided; the fixing portion is provided with one or more fixing portion fluid passages connected to the valve fluid supply / discharge ports of the respective valves; one or more of the fixing portion fluid passages communicate with the same fluid chamber; the vibration isolation device according to Claim 1.

3. in the horizontal direction, the vibration damping fluid spring, the fixing portion, and the valve are arranged in a pair at symmetric positions so as to sandwich the support portion; the vibration isolation device according to Claim 1.

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