Substrate treatment apparatus

Abstract

To provide a substrate treatment apparatus that can securely seal an opening provided at an upper part of a container body of a treatment container with a lid.SOLUTION: A substrate treatment apparatus comprises a treatment container which is constituted in a depressurizable manner, and houses a substrate to be treated. The treatment container has a container body which has an opening on an upper part, and a lid 12 which can clog the opening, and further comprises an opening / closing mechanism 20 which opens / closes the opening by the lid. The opening / closing mechanism has: a first shaft part 100 which is provided at one end part of the container body, and extends in a horizontal direction; a hinge part 110 which is connected to the first shaft part, and supports the lid on a tip side part which is a portion on the opposite side of the first shaft part side; and a drive mechanism 130 which rotates the hinge part about the first shaft part. The hinge part has a second shaft part 122 extending in parallel with the first shaft part on the tip side part. The lid is pivotally supported by the second shaft part rotatably about the second shaft part independently of rotation of the hinge part about the first shaft part.SELECTED DRAWING: Figure 3

Description

Technical Field

[0001] The present disclosure relates to a substrate processing apparatus.

Background Art

[0002] Patent Document 1 discloses an opening / closing mechanism of a lid of a processing chamber of a vacuum processing apparatus. In this opening / closing mechanism, the lid is rotatably attached to the chamber body via a hinge provided on one side thereof, and the hinge serves as a rotation axis. Further, a cylinder mechanism is attached to the other side adjacent to the side where the hinge is provided, and the lid is opened and closed by advancing and retracting this cylinder mechanism.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The technology according to the present disclosure surely seals an opening provided in the upper part of the container body of a processing container of a substrate processing apparatus that processes a substrate in a reduced-pressure atmosphere with a lid.

Means for Solving the Problems

[0005] One aspect of the present disclosure is a substrate processing apparatus that processes a substrate in a reduced-pressure atmosphere. The apparatus is configured to be capable of reducing pressure and includes a processing chamber for accommodating the substrate to be processed. The processing chamber has a chamber body having an opening at the top and a lid that can close the opening, and further includes an opening / closing mechanism for opening and closing the opening with the lid. The opening / closing mechanism is provided at one end of the chamber body and has a first shaft portion extending in the horizontal direction, a hinge portion connected to the first shaft portion and supporting the lid at a tip side portion that is a portion opposite to the first shaft portion side, and a drive mechanism for rotating the hinge portion about the first shaft portion. The hinge portion has a second shaft portion extending parallel to the first shaft portion at the tip side portion, and the lid is pivotally supported by the second shaft portion so as to be rotatable about the second shaft portion independently of the rotation of the hinge portion about the first shaft portion. When the hinge portion rotates about the first shaft portion, the hinge portion is supported at the tip side portion by engagement between a portion different from the second shaft portion at the tip side portion of the hinge portion, and rotates about the first shaft portion together with the hinge portion.

Advantages of the Invention

[0006] According to the present disclosure, the opening provided at the top of the chamber body of the processing chamber of the substrate processing apparatus for processing a substrate in a reduced-pressure atmosphere can be reliably sealed with the lid.

Brief Description of the Drawings

[0007]

Figure 1

Figure 2

Figure 3

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Figure 8

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Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Embodiments for Carrying Out the Invention

[0008] In the manufacturing process of semiconductor devices and the like, various processes such as film forming processes for forming a desired film such as a metal film are performed on a substrate such as a semiconductor wafer (hereinafter referred to as "wafer"). This type of process is performed by a substrate processing apparatus, for example, in a reduced pressure atmosphere (that is, in a vacuum atmosphere). The substrate processing apparatus is configured to be able to reduce pressure and includes a processing container for accommodating the substrate to be processed. The processing container has a container body having an opening at the upper part and a lid body for closing the opening.

[0009] By the way, for the purpose of maintenance inside the processing container, etc., an opening / closing mechanism for opening and closing the opening of the container body with a lid may be provided. The opening / closing mechanism opens and closes the opening, for example, by rotating the lid about a horizontal axis on one end of the container body. However, when the lid is inclined with respect to the container body due to tolerances or the like when trying to close the opening with the lid, this inclination may not be eliminated by the above-described opening / closing mechanism. If the inclination remains without being eliminated, it may not be possible to reach the desired degree of vacuum when evacuating the inside of the processing container. This is the same even when a sealing member such as an O-ring for sealing between the container body and the lid is provided.

[0010] Therefore, the technology according to the present disclosure surely seals an opening provided in the upper part of the container body of a processing container of a substrate processing apparatus that performs processing on a substrate in a reduced-pressure atmosphere with a lid.

[0011] Hereinafter, the configuration of the substrate processing apparatus according to the present embodiment will be described with reference to the drawings. In this specification, elements having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted.

[0012] <Film forming apparatus> FIG. 1 is a diagram schematically showing an outline of the configuration of a film forming apparatus as a substrate processing apparatus according to the present embodiment, and shows a part of the above configuration in cross section. FIG. 2 is a top view of the film forming apparatus of FIG. 1.

[0013] The film forming apparatus 1 in FIG. 1 performs a film forming process on a substrate in a reduced-pressure atmosphere. Specifically, for example, a metal film is formed by sputtering on a wafer W as a substrate. This film forming apparatus 1 includes a processing container 10.

[0014] The processing container 10 is configured to be depressurized and accommodates a wafer W to be processed, and has a container body 11 and a lid 12. The container body 11 and the lid 12 are formed of aluminum or the like and are connected to the ground potential.

[0015] The container body 11 is formed to have an opening 11a at the upper part, and more specifically, it is formed in a bottomed cylindrical shape with an opening 11a at the upper part. At the bottom of the container body 11, an exhaust device V for decompressing the sealed space in the processing container 10 is connected via an APC valve (not shown). On the side wall of the container body 11, a loading / unloading port (not shown) for the wafer W is formed, and a gate valve for opening and closing the loading / unloading port is provided at the loading / unloading port.

[0016] The lid 12 can close the opening 11a of the container body 11 and is attached to the upper side of the container body 11. The shape of the lid 12 is, for example, a dome shape. Also, the lid 12 is attached to the upper side of the container body 11 via an opening / closing mechanism 20. The opening / closing mechanism 20 opens and closes the opening 11a of the container body 11 with the lid 12. The configuration of the opening / closing mechanism 20 will be described later. Note that an O-ring 13 as a sealing member for sealing between the container body 11 and the lid 12 is provided.

[0017] In the processing container 10, a mounting table 30 on which the wafer W is horizontally placed on the upper surface is provided. The mounting table 30 may be provided with at least one of a heater (not shown) for heating the wafer W and a cooling mechanism for cooling the wafer W.

[0018] The mounting table 30 may be connected to a mounting table moving mechanism 31. The mounting table moving mechanism 31 moves the mounting table 30 while keeping the surface of the wafer W horizontal. The mounting table moving mechanism 31 moves the mounting table 30 so that the wafer W placed on the mounting table 30 moves in one direction (the X direction in FIG. 4) in the horizontal plane.

[0019] For example, the mounting table moving mechanism 31 has an articulated arm 32 and a driving mechanism 33. At one end of the articulated arm 32, the mounting table 30 is attached, and at the other end, the driving mechanism 33 is connected. The drive mechanism 33 generates a driving force for moving one end of the articulated arm 32 in one direction in the horizontal plane (the X direction in FIG. 4; hereinafter sometimes referred to as the device width direction) to move the mounting table 30 in the device width direction. Further, the drive mechanism 33 generates a driving force for moving one end of the articulated arm 32 in the vertical direction (the Z direction in FIG. 4) to move the mounting table 30 in the vertical direction. The drive mechanism 33 has, for example, a motor to generate the above driving force.

[0020] Furthermore, a slit member 40 may be provided in the processing container 10. The slit member 40 is a member having a slit 40a. The slit member 40 is provided so as to extend horizontally above the space where the wafer W moves by the mounting table moving mechanism 31.

[0021] The slit 40a is formed so as to penetrate the slit member 40 in the vertical direction. In plan view, the slit 40a has a rectangular shape that is long in a direction (the Y direction in FIG. 4; hereinafter sometimes referred to as the device depth direction) orthogonal to the device width direction (the X direction in FIG. 4), which is the moving direction of the wafer W by the mounting table moving mechanism 31. The length of the slit 40a in the device width direction (the X direction in FIG. 4) is smaller than the diameter of the wafer W, and the length of the slit 40a in the device depth direction (the Y direction in FIG. 4) is larger than the diameter of the wafer W.

[0022] Also, above the slit member 40 in the processing container 10, a target holder 50 made of a conductive material is provided. The target holder 50 holds the target 60 so that the target 60 is disposed in the processing container 10. This target holder 50 is attached to the lid 12. A through hole 12a is formed at the attachment position of the target holder 50 on the lid 12. An insulating member 51 is provided on the inner wall surface of the lid 12 so as to surround the through hole 12a. The target holder 50 is attached to the lid 12 via the insulating member 51 so as to close the through hole 12a.

[0023] The target holder 50 holds the target 60 such that, for example, the target 60 is positioned diagonally above the slit 40a of the slit member 40. Further, the target holder 50 holds the target 60 facing forward such that the target 60 faces the slit 40a, that is, the target 60 faces the wafer W to be film-formed through the slit 40a. Further, a power supply 52 is connected to the target holder 50, and a negative DC voltage is applied from the power supply 52. Instead of the negative DC voltage, an AC voltage may be applied.

[0024] Furthermore, a magnet 70 is provided at a position on the back side of the target holder 50 and outside the processing container 10. The magnet 70 forms a magnetic field so as to leak to the front side of the target 60 held by the target holder 50, and is connected to a moving mechanism 71. The moving mechanism 71 swings the magnet 70, for example, along the depth direction of the apparatus (Y direction in FIG. 4). The moving mechanism 71 has a drive source (not shown) such as a motor that generates a driving force for the above-described swinging of the magnet 70.

[0025] A gas introduction member 80 is supported by the lid 12. The gas introduction member 80 supplies gas from a gas supply source (not shown) into the processing container 10.

[0026] Further, as shown in FIG. 2, the film forming apparatus 1 is provided with a detection unit 90 for detecting the completion of the closing operation of the lid 12 by the opening / closing mechanism 20, that is, for determining the stop timing of the opening operation. Specifically, the detection unit 90 detects the state of the position related to the vertical direction (Z direction in the figure) of a convex portion provided at a hinge portion (to be described later) of the opening / closing mechanism 20. The detection unit 90 also serves to limit the lid 12 from opening beyond a desired angle.

[0027] Furthermore, the film forming apparatus 1 is provided with a mechanical stopper MS to prevent the lid 12 from further opening and colliding with the container body 11 when the lid 12 opens beyond a desired angle due to a failure of the detection unit 90 or the like.

[0028] Furthermore, as shown in FIG. 1, the film forming apparatus 1 includes a control unit U. The control unit U processes computer-executable instructions for causing the film forming apparatus 1 to execute various processes described in the present disclosure. The control unit U can be configured to control each element of the film forming apparatus 1 so as to execute the various processes described herein. In one embodiment, part or all of the control unit U may be included in the film forming apparatus 1. The control unit U may include a processing unit, a storage unit, and a communication interface. The control unit U is realized by, for example, a computer. The processing unit can be configured to read a program that provides logic or routines that enable various control operations from the storage unit and perform various control operations by executing the read program. This program may be stored in the storage unit in advance or may be acquired via a medium when necessary. The acquired program is stored in the storage unit and read from the storage unit by the processing unit and executed. The medium may be various computer-readable storage media or may be a communication line connected to the communication interface. The storage media may be temporary or non-temporary. The processing unit may be a CPU (Central Processing Unit). The storage unit may include a RAM (Random Access Memory), a ROM (Read Only Memory), an HDD (Hard Disk Drive), an SSD (Solid State Drive), or a combination thereof. The communication interface may communicate with the film forming apparatus 1 via a communication line such as a LAN (Local Area Network).

[0029] <Opening and closing mechanism 20> Subsequently, the configuration of the opening and closing mechanism 20 will be described with reference to FIGS. 1 and 2 and using FIGS. 3 and 4. FIG. 3 is a partially enlarged view of FIG. 1. FIG. 4 is a rear view of the back hinge portion described later.

[0030] As shown in FIGS. 1 to 3, the opening and closing mechanism 20 has a first shaft portion 100, a hinge portion 110, and a drive mechanism 130.

[0031] The first shaft portion 100 is provided at an end of the container body 11 on one side in the device width direction (the positive X direction in the figure) so as to extend in the device depth direction (the Y direction in the figure) which is horizontal. The first shaft portion 100 is formed, for example, in a columnar shape (specifically, a cylindrical shape). Further, the first shaft portion 100 is provided above a position away from the opening 11a in the container body 11 on one side in the device width direction (the positive X direction in the figure) such that its central axis extends in the device depth direction (the Y direction in the figure). As shown in FIG. 2, for example, the front end side (the negative Y direction in the figure) of the first shaft portion 100 is connected to the drive mechanism 130, and the rear end side (the positive Y direction in the figure) of the first shaft portion 100 is supported by the support portion 131 such that the first shaft portion 100 can rotate about its central axis.

[0032] The hinge portion 110 is connected to the first shaft portion 100. Specifically, the first shaft portion 100 is connected to the base portion 111 which is a portion on the first shaft portion 100 side. Further, the hinge portion 110 supports the lid body 12 at the tip side portion 112 which is a portion opposite to the first shaft portion 100 side, that is, the base portion 111 side.

[0033] A plurality of hinge portions 110 are provided, for example, so as to be spaced apart from each other in the device depth direction (the Y direction in the figure). In the example of the figure, two hinge portions 110 are provided: one that supports the front side (the negative Y direction in the figure) of the lid body 12 and one that supports the rear side (the positive Y direction in the figure) of the lid body 12. In this specification, the former may be referred to as the front hinge portion 1101 and the latter as the rear hinge portion 1102.

[0034] Each hinge portion 110 is a flat member. As described above, the first shaft portion 100 is connected to the base portion 111 of each hinge portion 110. Specifically, as shown in FIG. 3, a hole 121 penetrating in the depth direction of the apparatus (Y direction in the figure) is provided in the base portion 111 of each hinge portion 110, and the first shaft portion 100 is inserted into the hole 121 and fixed to the base portion 111 by fitting. Since the hinge portion 110 and the first shaft portion 100 are connected in this way, that is, fixed, when the first shaft portion 100 rotates about its central axis, each hinge portion 110 also rotates about the central axis.

[0035] Further, the hinge portion 110 has a second shaft portion 122 extending in parallel with the first shaft portion 100 at the tip side portion 112. The second shaft portion 122 is provided, for example, for each hinge portion 110. The second shaft portion 122 is formed in a columnar shape and is provided so that its central axis extends in the depth direction of the apparatus (Y direction in the figure). The second shaft portion 122 is fixed to the hinge portion 110. Therefore, when the hinge portion 110 rotates about the central axis of the first shaft portion 100, the second shaft portion 122 also rotates about the central axis.

[0036] A recess 150 in which the tip side portion 112 of the lid body 12 provided with the second shaft portion 122 fits is provided in the lid body 12. The recess 150 is recessed in the direction in which the hinge portion 110 extends. The recess 150 is formed by notching the front side (negative Y direction in the figure) and the back side (positive Y direction in the figure) surfaces of the end portion of the lid body 12 on the first shaft portion 100 side from the end on the first shaft portion 100 side in the direction in which the hinge portion 110 extends.

[0037] The drive mechanism 130 rotates the hinge portion 110 about the first shaft portion 100. Specifically, the drive mechanism 130 rotates the first shaft portion 100 about the central axis of the first shaft portion 100, which is a horizontal shaft, thereby rotating the hinge portion 110 about the central axis. The drive mechanism 130 has a drive source (not shown) such as a motor that generates a driving force for driving the rotation of the first shaft portion 100, that is, the rotation of the hinge portion 110. Further, the drive source of the drive mechanism 130 may be connected to the first shaft portion 100 via a speed reducer.

[0038] Independently of the rotation of the hinge portion 110 about the first shaft portion 100 by this drive mechanism 130, the lid 12 is pivotally supported by the second shaft portion 122 so as to be rotatable about the second shaft portion 122. Further, when the hinge portion 110 rotates about the first shaft portion 100, the lid 12 is supported by the distal end side portion 112 of the hinge portion 110 by engagement with a portion of the distal end side portion 112 of the hinge portion 110 that is different from the second shaft portion 122, and rotates about the first shaft portion 100 together with the hinge portion 110.

[0039] Specifically, (A) the lid 12 is pivotally supported by the second shaft portion 122 so as to be rotatable about the second shaft portion 122 with the distal end side portion 112 of the corresponding hinge portion 110 received in the recess 150 of the lid 12. Further, (B) the lid 12 is supported by the hinge portion 110 by engagement between the back surface 151 of the recess 150 and the front end surface 123 of the distal end side portion 112 of the hinge portion 110 facing the back surface 151.

[0040] More specifically, a gap, that is, a clearance, is provided between each surface such as the front end surface 123 of the distal end side portion 112 of the hinge portion 110 and the surface of the recess 150 of the lid 12 that faces the respective surfaces. Therefore, as in the above (A), the lid 12 is rotatable about the central axis of the second shaft portion 122 with the distal end side portion 112 of the corresponding hinge portion 110 received in the recess 150 of the lid 12. Further, when the lid 12 rotates about the central axis of the second shaft portion 122, the gap between the front end surface 123 of the hinge portion 110 and the back surface 151 of the recess 150 disappears, and the lid 12 comes into contact with and engages with the back surface 151, whereby the lid 12 is supported by the hinge portion 110.

[0041] Note that the lid 12 is pivotally supported on the second shaft portion 122 via a bearing (not shown). For example, a grease-free bush is used for the bearing.

[0042] When the lid 12 is in the closed state, the front end surface 123 of the hinge portion 110 may have different inclination directions with respect to the vertical direction (the Z direction in the figure), which is the direction orthogonal to the extending direction of the hinge portion 110, between the portion 124 on the container body 11 side and the portion 125 on the opposite side, as viewed in the axial direction (the Y direction in the figure) of the first shaft portion 100. In this case, further, the area of the portion 124 on the container body 11 side may be larger than that of the portion 125 on the opposite side. Hereinafter, the portion 124 may be referred to as the large area portion 124, and the portion 125 may be referred to as the small area portion 125.

[0043] Further, as shown in FIG. 4, a convex portion 126 is provided at a position offset from the first shaft portion 100 in the axial direction view of the first shaft portion 100 on the back hinge portion 1102. The convex portion 126 rotates and moves up and down in the same manner when the back hinge portion 1102 rotates about the first shaft portion 100. The convex portion 126 is provided at a position satisfying the following (X) and (Y). (X) The convex portion 126 does not interfere with the rotation of the back hinge portion 1102. (Y) When the lid 12 is opened from the state of closing the opening 11a to a desired angle (for example, 180°) via the back hinge portion 1102, the height of the convex portion 126 during rotation is the lowest at the end.

[0044] The state of the height of the convex portion 126 is detected by the detection unit 90 described above. The convex portion 126 may be formed, for example, in a columnar shape and supported by the back hinge portion 1102 so as to be rotatable about the horizontal central axis of the convex portion 126.

[0045] <Detection unit 90> Next, the configuration of the detection unit 90 will be described with reference to FIGS. 5 and 6. FIG. 5 is a rear view of the detection unit 90. FIG. 6 is a side view of the detection unit 90. Note that in FIG. 5, the illustration of the key guide 230 described later is omitted.

[0046] As shown in FIGS. 5 and 6, the detection unit 90 includes a key 200, a key switch 210, and an elastic member 220.

[0047] The key 200 moves up and down following the convex portion 126 of the back hinge portion 1102, and includes a contact block 201 and a key body 202. The contact block 201 is a member that contacts the convex portion 126. The contact block 201 moves up and down together with the contacted convex portion 126 at least when the convex portion 126 of the back hinge portion 1102 is below a predetermined height. The lower end portion of the key body 202 is connected to the contact block 201 and moves up and down together with the contact block 201. The upper portion of the key body 202 is inserted into a hole (described later) of the key switch 210.

[0048] The key switch 210 includes a hole 211 and a sensor 212 as a detection unit. The hole 211 is for inserting the key 200 (specifically, the key body 202) and is formed to extend in the vertical direction (Z direction in the figure). The sensor 212 detects the insertion and removal of the key 200 (specifically, the key body 202) into the hole 211. For example, when at least a part of the key body 202 is inserted into the hole 211, the sensor 212 outputs an OFF signal, and when the entire key body 202 is removed from the hole 211, the sensor 212 outputs an ON signal. Further, the detection of the insertion of the key body 202 into the hole 211 by the sensor 212 is performed optically, for example.

[0049] The elastic member 220 biases the key 200 toward the key switch 210. Specifically, the elastic member 220 biases the key 200 so that the key body 202 of the key 200 is inserted into the hole 211 of the key switch 210.

[0050] The detection unit 90 may further have a key guide 230. The key guide 230 guides the insertion of the key body 202 into the hole 211.

[0051] The detection result by such a detection unit 90 (specifically, the detection result by the sensor 212 of the key switch 210) is output to the control unit U. Based on the detection result of the detection unit 90 (the detection result by the sensor 212), the control unit U stops the opening operation of the lid body 12 by the opening and closing mechanism 20.

[0052] <Sequence during the opening operation of the lid body 12> Next, the sequence executed by the film forming apparatus 1 during the opening operation of the lid body 12 will be described. FIG. 7 is a flowchart showing the main steps of the above sequence. FIG. 8 is a diagram showing the state of the opening and closing mechanism 20 during the above processing sequence. FIG. 9 is a diagram showing the state of the detection unit 90 during the above processing sequence. The lid body 12 is opened, for example, during maintenance of the film forming apparatus 1.

[0053] (Step S1: Atmospheric release) When the lid body 12 is opened, as shown in FIG. 7, first, the inside of the processing container 10 is opened to the atmosphere. Specifically, the exhaust of the inside of the processing container 10 by the exhaust device V is stopped, and the atmosphere is introduced into the processing container 10.

[0054] (Step S2: Start of opening operation) Next, the opening operation of the lid body 12 is started. Specifically, the drive mechanism 130 is driven, and rotation around the first shaft portion 100 of the hinge portion 110 for opening the lid body 12 is started. When it starts, the tip surface 123 of the hinge portion 110 comes into contact with the inner side surface 151 of the recess 150 of the lid body 12. Specifically, the large area portion 124 of the tip surface 123 of the hinge portion 110 comes into contact with the inner side surface 151 of the recess 150 of the lid body 12. As a result, the tip side portion 112 of the hinge portion 110 engages with the recess 150 of the lid body 12, and the lid body 12 is supported by the tip side portion 112 of the hinge portion 110 and rotates about the first shaft portion 100 together with the hinge portion 110. As a result, the lid body 12 is gradually opened.

[0055] When the rotation of the hinge portion 110 about the first shaft portion 100 continues and the lid body 12 is opened to about 90°, as shown in FIG. 8, due to the contact between the small area portion 125 of the tip surface 123 of the hinge portion 110 and the inner side surface 151 of the recess 150 of the lid body 12, the tip side portion 112 of the hinge portion 110 engages with the recess 150 of the lid body 12.

[0056] (Step S3: Detection by the sensor 212) After that, the rotation of the hinge portion 110 about the first shaft portion 100 continues. When the lid body 12 is opened to the allowable angle (for example, 180°), as shown in FIG. 9, the sensor 212 detects that the convex portion 126 provided on the inner hinge portion 1102 and the driven key 200 are pulled out from the hole 211 of the key switch 210. Specifically, when the lid body 12 is opened to near 180°, as the inner hinge portion 1102 rotates, the convex portion 126 descends and contacts the contact block 201, and the contact block 201 also descends. As a result, the key body 202 connected to the contact block 201 is pulled out from the hole 211 of the key switch 210, and this is detected by the sensor 212, and an ON signal is output to the control unit U.

[0057] (Step S4) When the control unit U receives the ON signal from the sensor 212, the opening operation of the lid body 12 is stopped. Specifically, the driving by the driving mechanism 130 is stopped, and the rotation of the hinge portion 110 about the first shaft portion 100 for opening the lid body 12 is stopped.

[0058] Thus, the sequence during the opening operation of the lid 12 is completed.

[0059] <Sequence during the closing operation of the lid 12> Next, the sequence executed by the film forming apparatus 1 during the closing operation of the lid 12 will be described. FIG. 10 is a flowchart showing the main steps of the above sequence. FIG. 11 is a diagram showing the state of the opening / closing mechanism 20 during the above processing sequence. FIGS. 12 and 13 are diagrams showing the state of the lid 12 when the closing operation is completed.

[0060] (Step S11: Start of closing operation) When the lid 12 is being closed, as shown in FIG. 10, first, the closing operation of the lid 12 is started. Specifically, the drive mechanism 130 is driven, and rotation about the first shaft portion 100 of the hinge portion 110 for closing the lid 12 is started. At that time, due to the contact between the small area portion 125 of the tip surface 123 of the hinge portion 110 and the inner side surface 151 of the recess 150 of the lid 12, the tip side portion 112 of the hinge portion 110 and the recess 150 of the lid 12 are engaged. Since the lid 12 is supported by the hinge portion 110, the lid 12 is closed as the hinge portion 110 rotates. Also, when the rotation of the hinge portion 110 for closing the lid 12 is started, the convex portion 126 rises as the inner hinge portion 1102 rotates, and the contact block 201 also rises due to the biasing force from the elastic member 220. As a result, the key body 202 connected to the contact block 201 is inserted into the hole 211 of the key switch 210 again, which is detected by the sensor 212, and an OFF signal is output to the control unit U.

[0061] The rotation about the first shaft portion 100 of the hinge portion 110 continues. When the lid 12 is closed to about 90°, as shown in FIG. 11, due to the contact between the large area portion 124 of the tip surface 123 of the hinge portion 110 and the inner side surface 151 of the recess 150 of the lid 12, the tip side portion 112 of the hinge portion 110 and the recess 150 of the lid 12 are engaged.

[0062] (Step S12: Detection of reaching the closing angle) After that, if the rotation about the first shaft portion 100 of the hinge portion 110 continues, it is detected that the lid body 12 has been closed. Specifically, for example, it is detected by an encoder (not shown) of the drive mechanism 130 that the hinge portion 110 has reached 0°. Also, it is detected by an opening / closing sensor (not shown) provided in the processing container 10 that the lid body 12 has been closed. The opening / closing sensor is, for example, one of a light emitting portion that emits predetermined light and a light receiving portion that receives the predetermined light is provided on the lid body 12, and the other is provided on the container main body 11, and based on the light receiving result of the light receiving portion, it detects that the lid body 12 has been closed. The opening / closing sensor may detect that the lid body has been closed by physical contact. Specifically, the opening / closing sensor may detect that the lid body 12 has been closed based on whether the lid body 12 has contacted a button provided on the container main body 11 or whether the container main body 11 has contacted a button provided on the lid body 12.

[0063] (Step S13: Closing operation stop) When it is detected that the lid body 12 has been closed, the closing operation of the lid body 12 is stopped. Specifically, the drive by the drive mechanism 130 is stopped, and the rotation about the first shaft portion 100 of the hinge portion 110 for closing the lid body 12 is stopped.

[0064] (Step S14: Exhaust start) After that, the exhaust in the processing container 10 is started. Specifically, the exhaust of the processing container 10 by the exhaust device V is started. When the closing operation in step S13 described above is stopped, as shown in FIGS. 12 and 13, the lid body 12 may tilt with respect to the container main body 11. Specifically, the lower surface of the lid body 12 may tilt with respect to the upper surface of the container main body 11. If left as it is, the gap between the lid body 12 and the container main body 11 around the opening 11a becomes non-uniform in the circumferential direction of the opening 11a, and the amount by which the O-ring 13 is crushed when the inside of the processing container 10 is exhausted becomes non-uniform in the circumferential direction, and the opening 11a cannot be sealed by the lid body 12.

[0065] In contrast, in the present embodiment, the lid 12 is rotatable about the second shaft portion 122 independently of the rotation about the first shaft portion 100. Therefore, even if the lid 12 is tilted with respect to the container body 11 when the closing operation in step S13 stops, the lid 12 rotates about the second shaft portion 122 due to the negative pressure in the processing container 10 caused by exhaust or the like, and the tilt is reduced. Accordingly, the non-uniformity in the circumferential direction of the opening 11a in the gap between the lid 12 and the container body 11 around the opening 11a is reduced, and the non-uniformity in the circumferential direction of the amount by which the O-ring 13 is crushed is reduced. Thus, the opening 11a can be more reliably sealed with the lid 12.

[0066] Note that after the start of exhaust in the processing container 10, when the inside of the processing container 10 reaches a predetermined degree of vacuum, the sequence during the closing operation of the lid 12 is completed.

[0067] <Main effects of the present embodiment> As described above, according to the present embodiment, the opening 11a can be more reliably sealed with the lid 12.

[0068] Further, in the present embodiment, since the lid 12 is rotatable about the second shaft portion 122, it is possible to suppress the loads due to the negative pressure in the processing container 10 and the weight of the lid 12 from acting on the drive source and the speed reducer of the drive mechanism 130.

[0069] Furthermore, in the present embodiment, a detection unit 90 using a key switch 210 is used as a mechanism for restricting the lid 12 from opening beyond a desired angle (hereinafter referred to as an opening angle restriction mechanism). As an opening angle restriction mechanism different from the present embodiment, a mechanism similar to the mechanical stopper MS of the present embodiment can be considered. However, in the form of using the detection unit 90 and the mechanical stopper MS in combination as in the present embodiment, since the situation where the lid 12 abuts against the mechanical stopper MS is limited, the mechanical stopper MS can be simplified and miniaturized. Even if the film forming apparatus is miniaturized or its footprint is reduced, the detection unit 90 and the mechanical stopper MS can be mounted thereon. On the other hand, in the form of using only the mechanical stopper, since the lid 12 repeatedly abuts against the mechanical stopper, it is necessary to make the mechanical stopper large. It is difficult to mount such a large mechanical stopper on an apparatus in which miniaturization or footprint reduction is achieved.

[0070] Furthermore, the detection unit 90 is for safely opening the lid 12. In the present embodiment, the key switch 210 is used for the detection unit 90. The key switch 210 is widely used as a safety interlock and corresponds to a "sufficiently verified" component in Category 1 of the safety category (ISO 13849-1). Therefore, according to the present embodiment, a high safety category can be ensured.

[0071] As described above, the front end surface 123 of the hinge portion 110 may have different inclination directions with respect to the vertical direction when viewed in the axial direction of the first shaft portion 100 between the portion 124 on the container body 11 side and the portion 125 on the opposite side when the lid 12 is in the closed state, and the portion 124 on the container body 11 side may have a larger area than the portion 125 on the opposite side. Since the largest load is applied when opening the lid 12 that was in close contact with the container body 11 to the front end surface 123 of the hinge portion 110 with which the lid 12 abuts, by receiving this load with the above-described portion 124 having a large area, it is possible to suppress damage to the hinge portion 110 without increasing the front end surface 123 of the hinge portion 110.

[0072] <Another example of the opening and closing mechanism> FIG. 14 is a diagram showing another example of the opening and closing mechanism. The opening and closing mechanism 20A in FIG. 14 has an elastic member 300 between it and the hinge portion 110A in the axial view of the first shaft portion 100. Specifically, the opening and closing mechanism 20A has an elastic member 300 between the inner side surface 151 of the recess 150 of the lid body 12 and the tip surface 123A of the tip side portion 112A of the hinge portion 110A. In the example of the figure, the tip side portion 112A of the hinge portion 110A has a cut portion 310 recessed from the tip surface 123. One end portion of the elastic member 300 is housed in the cut portion 310 in a state of being housed in the cut portion 310, and the other end portion of the elastic member 300 is connected to the inner side surface 151 of the recess 150 of the lid body 12.

[0073] Providing this elastic member 300 has the following effects. That is, when the lid body 12 is opened or closed to about 90°, it switches between a state where the inner side surface 151 of the recess 150 of the lid body 12 abuts against the large area portion 124 of the tip surface 123 of the hinge portion 110A and a state where the inner side surface 151 of the recess 150 of the lid body 12 abuts against the small area portion 125 of the tip surface 123 of the hinge portion 110. By providing the elastic member 300, when switching as described above, it is possible to suppress the lid body 12 from rotating rapidly around the second shaft portion 122. As a result, it is possible to suppress the impact caused by the rapid rotation of the lid body 12 from occurring in the hinge portion 110A and the like.

[0074] <Modification example> In the above example, the convex portion 126 was provided on the inner side hinge portion 1102, but such a convex portion 126 may be provided on the front side hinge portion 1101, or may be provided on both the front side hinge portion 1101 and the inner side hinge portion 1102. Note that the convex portion 126 was provided at a position satisfying the aforementioned (X), (Y), but it may be provided at a position satisfying the aforementioned (X) and the following (Y´). When the lid 12 closes the opening 11a and is opened to a desired angle (e.g., 180°) via the rear hinge portion 1102, the height of the convex portion 126 during rotation is lowest at the end.

[0075] The embodiments disclosed herein should be considered illustrative in all respects and not restrictive. The above embodiments may be omitted, replaced, or modified in various forms without departing from the scope and gist of the appended claims. For example, the constituent elements of the above embodiments can be arbitrarily combined. From such arbitrary combinations, the actions and effects of each constituent element involved in the combination can be naturally obtained, and other actions and other effects obvious to those skilled in the art from the description in this specification can also be obtained.

[0076] Also, the effects described in this specification are merely illustrative or exemplary and not limiting. That is, the technology according to the present disclosure can exhibit other effects obvious to those skilled in the art from the description in this specification, together with or instead of the above effects.

[0077] Note that the following configurations also belong to the technical scope of the present disclosure. (1) A substrate processing apparatus for processing a substrate under a reduced-pressure atmosphere, configured to be capable of reducing pressure and including a processing container for accommodating a substrate to be processed, wherein the processing container has a container body having an opening at the upper part and a lid capable of closing the opening, and further includes an opening / closing mechanism for opening and closing the opening with the lid, wherein the opening / closing mechanism includes a first shaft portion provided at one end of the container body and extending in the horizontal direction, a hinge portion connected to the first shaft portion and supporting the lid at a tip side portion which is a portion opposite to the first shaft portion side, and a drive mechanism for rotating the hinge portion about the first shaft portion. The hinge portion has a second shaft portion extending parallel to the first shaft portion at the tip side portion, and the lid The second shaft portion is pivotally supported by the second shaft portion so as to be rotatable about the second shaft portion independently of the rotation of the hinge portion about the first shaft portion. When the hinge portion rotates about the first shaft portion, it is supported by a portion of the distal end side portion of the hinge portion different from the second shaft portion by engagement therewith, and rotates about the first shaft portion together with the hinge portion, a substrate processing apparatus. (2) The lid body has a recess recessed in a direction in which the hinge portion extends at an end portion on the hinge portion side, is pivotally supported by the second shaft portion so as to be rotatable about the second shaft portion in a state where the distal end side portion of the hinge portion is accommodated in the recess, The substrate processing apparatus according to (1), wherein the distal end side portion of the hinge portion is supported by engagement between the inner side surface of the back of the recess and the front end surface of the distal end side portion of the hinge portion facing the inner side surface. (3) The front end surface When the lid body is in the closed state, the portion on the container body side and the portion on the opposite side thereof have different inclination directions with respect to a direction orthogonal to the direction in which the hinge portion extends in a view in the axial direction of the first shaft portion, The substrate processing apparatus according to (2), wherein the area of the portion on the container body side is larger than that of the portion on the opposite side. (4) The opening / closing mechanism has an elastic member between the hinge portion and the lid body in a view in the axial direction of the first shaft portion, the substrate processing apparatus according to any one of (1) to (3). (5) The opening / closing mechanism has an elastic member between the inner side surface of the back of the recess of the lid body and the front end surface of the distal end side portion of the hinge portion, the substrate processing apparatus according to (2) or (3). (6) The hinge portion has a convex portion provided at a position offset from the first shaft portion in a view in the axial direction of the first shaft portion, a detection unit that detects the state of the height of the convex portion, The substrate processing apparatus according to any one of (1) to (5), further comprising a control unit that stops the opening operation of the lid body by the opening / closing mechanism based on a detection result by the detection unit. (7) The detection unit A key that moves up and down following a convex portion that moves up and down when the hinge portion rotates about the first shaft portion, a key switch provided with a hole into which the key is inserted and a detection unit that detects insertion and removal of the key into and from the hole, and the control unit stops an opening operation of the lid body by the opening and closing mechanism based on a detection result by the detection unit, the substrate processing apparatus according to (6).

Explanation of Signs

[0078] 1 Film forming apparatus 10 Processing container 11 Container body 11a Opening 12 Lid body 20, 20A Opening and closing mechanism 100 First shaft portion 110, 110A Hinge portion 112, 112A Tip side portion 122 Second shaft portion 130 Driving mechanism W Wafer

Claims

1. A substrate processing apparatus for processing a substrate under a reduced-pressure atmosphere, comprising: a processing container configured to be depressurized and accommodating a substrate to be processed; the processing container having a container body having an opening at an upper portion and a lid capable of closing the opening; further comprising an opening / closing mechanism for opening and closing the opening with the lid; the opening / closing mechanism including: a first shaft portion provided at one end of the container body and extending in a horizontal direction; a hinge portion connected to the first shaft portion and supporting the lid at a tip side portion which is a portion on the side opposite to the first shaft portion side; a drive mechanism for rotating the hinge portion about the first shaft portion; the hinge portion having a second shaft portion extending in parallel with the first shaft portion at the tip side portion; the lid being: pivotally supported by the second shaft portion so as to be rotatable about the second shaft portion independently of the rotation of the hinge portion about the first shaft portion; when the hinge portion rotates about the first shaft portion, being supported at the tip side portion of the hinge portion by engagement between a portion of the tip side portion of the hinge portion different from the second shaft portion and rotating about the first shaft portion together with the hinge portion, a substrate processing apparatus.

2. The lid is: at an end portion on the hinge portion side, having a recess recessed in a direction in which the hinge portion extends; pivotally supported by the second shaft portion so as to be rotatable about the second shaft portion with the tip side portion of the hinge portion received in the recess; being supported at the tip side portion of the hinge portion by engagement between a back side surface of the recess and a front end surface of the tip side portion of the hinge portion facing the back side surface, the substrate processing apparatus according to claim 1.

3. The front end surface is such that: when the lid is in a closed state, a portion on the container body side and a portion on the opposite side thereof have different inclination directions with respect to a direction orthogonal to the direction in which the hinge portion extends in a view in the axial direction of the first shaft portion, and the portion on the container body side has a larger area than the portion on the opposite side, the substrate processing apparatus according to claim 2.

4. The opening / closing mechanism has an elastic member between the hinge portion and the lid in a view in the axial direction of the first shaft portion, the substrate processing apparatus according to any one of claims 1 to 3.

5. The opening / closing mechanism has an elastic member between the back side surface of the recess of the lid and the front end surface of the tip side portion of the hinge portion, the substrate processing apparatus according to claim 2 or 3.

6. The hinge portion has a convex portion provided at a position offset from the first shaft portion in a view in the axial direction of the first shaft portion. a detection unit that detects the state of the height of the convex portion; The substrate processing apparatus according to any one of claims 1 to 3, further comprising: a control unit that stops the opening operation of the lid body by the opening and closing mechanism based on the detection result by the detection unit.

7. The detection unit a key that moves up and down following the convex portion that moves up and down when the hinge portion rotates about the first shaft portion; a key switch provided with a hole into which the key is inserted and a detection unit that detects insertion and removal of the key into and from the hole; The substrate processing apparatus according to claim 6, wherein the control unit stops the opening operation of the lid body by the opening and closing mechanism based on the detection result by the detection unit.

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