Flow passage member
The integration of a ceramic substrate within a metal container enhances heat exchange efficiency and protection in flow path members, addressing substrate vulnerability and heat transfer inefficiencies.
Patent Information
- Application Number
- JP2023220920
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2023-12-27
- Publication Date
- 2025-07-09
AI Technical Summary
Conventional flow path members fail to adequately protect substrates and optimize heat exchange efficiency between fluids and objects.
A flow path member comprising a ceramic substrate housed in a metal container, where the substrate is in contact with the container's inner wall surface, enhancing heat transfer and protection.
Improves heat exchange efficiency while protecting the substrate from damage and reducing fluid leakage.
Smart Images

Figure 2025103493000001_ABST
Abstract
Description
Technical Field
[0001] The disclosed embodiments relate to a flow path member.
Background Art
[0002] Conventionally, there has been known a flow path member having a substrate made of ceramics and provided with a flow path through which a fluid can flow inside (see Patent Document 1).
[0003] Moreover, Patent Document 2 discloses a jig in which a substrate such as a ceramic tube is housed in a container.
Prior Art Documents
Patent Documents
[0004]
Patent Document 1
Patent Document 2
Summary of the Invention
Problems to be Solved by the Invention
[0005] In the above - described conventional technology, there is room for further improvement in terms of protecting the substrate and improving the heat exchange efficiency between the fluid flowing in the flow path of the substrate and the object.
[0006] One aspect of the embodiment has been made in view of the above, and an object thereof is to provide a flow path member capable of protecting a substrate and improving the heat exchange efficiency between a fluid flowing in a flow path of the substrate and an object.
Means for Solving the Problems
[0007] A flow path member according to one aspect of the embodiment has a substrate and a container. The substrate is made of ceramics and has a flow path inside. The container is a metal container that houses the substrate. The substrate is in contact with the inner wall surface of the container in at least a part of a region on the outer peripheral surface.
Advantages of the Invention
[0008] According to one aspect of the embodiment, while protecting the substrate, it is possible to improve the heat exchange efficiency between the fluid flowing in the flow path of the substrate and the object.
Brief Description of the Drawings
[0009]
Figure 1
Figure 2
Figure 3
Figure 4
Figure 5
Figure 6
Figure 7
Modes for Carrying Out the Invention
[0010] Hereinafter, with reference to the accompanying drawings, embodiments of the flow path member disclosed in the present application will be described. Note that the present disclosure is not limited by the embodiments shown below. Also, each embodiment can be appropriately combined within a range that does not conflict with the processing content. Further, in the following embodiments, the same parts are denoted by the same reference numerals, and overlapping descriptions are omitted.
[0011] Also, in the embodiments shown below, expressions such as "constant", "orthogonal", "perpendicular", or "parallel" may be used, but these expressions do not necessarily require strict "constant", "orthogonal", "perpendicular", or "parallel". That is, each of the above expressions allows for deviations such as manufacturing accuracy and installation accuracy.
[0012] First, the configuration of the flow path member according to the embodiment will be described with reference to FIGS. 1 to 3. FIG. 1 is a schematic perspective view of the flow path member according to the embodiment. FIG. 2 is a schematic plan view of the flow path member according to the embodiment. FIG. 3 is a schematic cross-sectional view taken along the line III-III shown in FIG. 2. In FIG. 3, a cross-section perpendicular to the flow direction of the fluid flowing in the flow path of the flow path member is shown.
[0013] As shown in FIGS. 1 to 3, the flow path member 1 includes a base body 10 and a container 20. The flow path member 1 is used, for example, as a heat exchanger that performs heat exchange with an object.
[0014] The base body 10 is a member made of ceramics. The base body 10 has a flow path 11 inside. The base body 10 has an inlet 11a and an outlet 11b at the bottom that communicate with the flow path 11. An inlet pipe 12 for introducing fluid into the flow path 11 is connected to the inlet 11a. The inlet pipe 12 passes through the container 20 and extends outside the container 20. An outlet pipe 13 for discharging fluid from the flow path 11 is connected to the outlet 11b. The outlet pipe 13 passes through the container 20 and extends outside the container 20. The fluid introduced into the flow path 11 from the inlet pipe 12 flows through the flow path 11 and is discharged outside the container 20 from the outlet pipe 13. The fluid introduced into the flow path 11 may be a liquid or a gas. The flow path 11 may have a branch. Also, the base body 10 may have a plurality of inlets 11a and a plurality of outlets 11b. Also, there may be a plurality of sets of the inlet 11a and the inlet pipe 12, and a plurality of sets of the outlet 11b and the outlet pipe 13, respectively.
[0015] Note that the inlet pipe 12 and the outlet pipe 13 may be fixed to the base body 10 or the container 20 with a brazing material such as a metal paste, an inorganic adhesive such as a glass paste, an organic adhesive such as an epoxy, or may be fixed with an O-ring.
[0016] The base body 10 may have a square tube shape in a cross-sectional view perpendicular to the flow direction of the fluid flowing in the flow path 11. When the cross-section of the base body 10 is a square tube shape, the outer peripheral surface of the base body 10 is composed of, for example, a first surface 101 which is the upper surface in FIG. 3, a second surface 102 which is the lower surface located on the opposite side of the first surface 101, and two side surfaces 103, 104 connecting the first surface 101 and the second surface 102. Here, an example in the case where the cross-section of the base body 10 has a square tube shape is shown, but the cross-sectional shape of the base body 10 is not limited to the illustrated example. Further, the external shape of the base body 10 is not limited to the rectangular parallelepiped shape shown in the figure, and may be, for example, a cylindrical shape.
[0017] Examples of the ceramics constituting the base body 10 include aluminum oxide-based ceramics, silicon carbide-based ceramics, silicon nitride-based ceramics, aluminum nitride-based ceramics, or yttrium oxide-based ceramics. Further, as the material constituting the inflow pipe 12 and the outflow pipe 13, for example, the same ceramics as the base body 10 can be used. Also, as the material constituting the inflow pipe 12 and the outflow pipe 13, the same metal as the container 20 described later may be used.
[0018] The container 20 is a metal container that houses the base body 10. By housing the base body 10 in the container 20, the base body 10 can be protected from impacts, and even if the base body 10 is damaged, the possibility that the fluid flowing in the flow path 11 of the base body 10 leaks to the outside of the container 20 can be reduced.
[0019] Examples of the metal constituting the container 20 include aluminum or stainless steel. When the container 20 is made of aluminum, anodizing treatment may be performed on the surface of the container 20. In other words, the container 20 may have a layer of aluminum oxide on the surface of the container 20, and the inside of the layer of aluminum oxide may be aluminum.
[0020] On the outer wall surface of such a container 20, an external component 2, which is an object for heat exchange, may be in contact. The external component 2 may be in contact with the outer wall surface of the container 20 via a bonding material 201 such as silicone resin. Then, heat exchange is performed between the fluid flowing in the flow path 11 of the base body 10 and the external component 2, thereby realizing the flow path member 1 that functions as a heat exchanger. Even when an object such as the external component 2 is not in contact with the outer wall surface of the container 20, heat exchange can be performed between the container 20 and a gas such as air existing around the container 20. The same applies when a liquid exists around the container 20.
[0021] Here, in the embodiment, the base body 10 is in contact with the inner wall surface of the container 20 in at least a partial region of the outer peripheral surface. In other words, at least a part of the outer peripheral surface of the base body 10 is in surface contact with the inner wall surface of the container 20. Specifically, the base body 10 may be in contact with the inner wall surface of the container 20 on a side surface 103 corresponding to the installation position of the external component 2 on the outer wall surface of the container 20. "Contacting the inner wall surface of the container 20" means that the base body 10 is in direct or indirect contact with the inner wall surface of the container 20. When in direct contact with the inner wall surface of the container 20, the base body 10 may simply be pressed against the inner wall surface of the container 20, or may be fixed to the inner wall surface of the container 20 by fixing means such as screws. When in indirect contact with the inner wall surface of the container 20, the base body 10 may be joined to the inner wall surface of the container 20 by a bonding material 15 such as silicone resin, grease, or metal paste.
[0022] By the base body 10 accommodated in the container 20 being in contact with the inner wall surface of the container 20, heat can be smoothly transferred between the fluid flowing in the flow path 11 of the base body 10 and the external component 2 through the contact surface between the base body 10 and the inner wall surface of the container 20. Therefore, according to the embodiment, while protecting the base body 10, the heat exchange efficiency between the fluid flowing in the flow path 11 of the base body 10 and the external component 2 can be improved.
[0023] In addition, in the embodiment, the base body 10 may be in contact with the inner wall surface of the container 20 in the first region of the outer peripheral surface, be separated from the inner wall surface of the container 20 in the second region excluding the first region of the outer peripheral surface, and form a space 21 between the inner wall surface of the container 20. When the space 21 is formed between the outer peripheral surface of the base body 10 and the inner wall surface of the container 20, even if the base body 10 is damaged, the fluid leaking from the flow path 11 of the base body 10 can be stored in the space 21. Note that, for example, air, an inert gas such as nitrogen or argon, or a vacuum may be supplied to the space 21.
[0024] Further, in the embodiment, the area ratio of the second region in contact with the space 21 on the outer peripheral surface of the base body 10 is preferably 1 (%) or more and 95 (%) or less. Thereby, the heat exchange efficiency with the external component 2 can be improved, and the storage amount of the fluid in the space 21 can be maintained. That is, when the area ratio of the second region is larger than 95 (%), the area ratio of the first region in contact with the inner wall surface of the container 20 relatively decreases, so that the heat transfer through the contact surface between the base body 10 and the inner wall surface of the container 20 is restricted, and the heat exchange efficiency with the external component 2 may decrease. Further, when the area ratio of the second region is smaller than 1 (%), the space 21 is reduced, so that the storage amount of the fluid in the space 21 may decrease. The area ratio of the second region may be, for example, 70% or more and 90% or less. With such a configuration, it is possible to maintain the heat exchange efficiency and the storage amount of the fluid in the space 21.
[0025] <Another Embodiment> Next, various embodiments of the flow path member 1 according to the embodiment will be described. In the following various embodiments, the same reference numerals are given to the same parts as those in the embodiment, and redundant descriptions are omitted.
[0026] FIG. 4 is a schematic cross-sectional view of the flow path member 1 according to another embodiment 1. In FIG. 4, a cross-section perpendicular to the flow direction of the fluid flowing in the flow path 11 of the flow path member 1 is shown.
[0027] As shown in FIG. 4, the flow path member 1 according to another Embodiment 1 is different from the above-described embodiment in that it has a sensor 30. The sensor 30 is located on the outer peripheral surface of the base body 10. The sensor 30 may be configured to detect leakage of fluid from the flow path 11. When the fluid flowing in the flow path 11 of the base body 10 is a liquid or a gas heavier than the atmosphere in the space 21, since the fluid leaking from the flow path 11 goes downward of the base body 10, the sensor 30 may be located on the lower surface 102 of the base body 10. Alternatively, the sensor 30 may be disposed on the inner wall surface of the container 20 located below the base body 10. Examples of the sensor 30 include various sensors such as an electric sensor using a change in resistance value and an optical sensor using a change in light reflectance. Note that when the sensor 30 detects leakage, it may have a function of notifying the user of the flow path member 1 or the like of the leakage by wire or wirelessly. Further, the sensor 30 may have a built-in power source, or may be supplied with power from outside the sensor.
[0028] Thus, for example, by positioning the sensor 30 on the outer peripheral surface of the base body 10, it is possible to detect leakage of fluid from the flow path 11.
[0029] In the above-described another Embodiment 1, the case where the sensor 30 is disposed on the lower surface 102 of the base body 10 is illustrated, but the arrangement position of the sensor 30 is not limited thereto. For example, when the fluid flowing in the flow path 11 of the base body 10 is a gas lighter than the atmosphere in the space 21, since the fluid leaking from the flow path 11 goes upward of the base body 10, the sensor 30 may be located on the upper surface 101 of the base body 10. The sensor 30 may be located between the base body 10 and the container 20. Also, a plurality of sensors 30 may be arranged.
[0030] FIG. 5 is a schematic cross-sectional view of the flow path member 1 according to another Embodiment 2. In FIG. 5, a cross-section perpendicular to the flow direction of the fluid flowing in the flow path 11 of the flow path member 1 is shown.
[0031] As shown in FIG. 5, the flow path member 1 according to another embodiment 2 is mainly different from the above-described embodiment in that a discharge pipe 22 (an example of an opening) is provided in the container 20. The discharge pipe 22 is connected to the bottom of the container 20 and communicates with the space 21.
[0032] In this way, by providing the discharge pipe 22 in the container 20, even if the base body 10 is damaged, the fluid leaking from the flow path 11 of the base body 10 to the space 21 can be discharged to the outside of the container 20 through the discharge pipe 22.
[0033] A storage part capable of storing the discharged fluid may be provided at the outlet of the discharge pipe 22. Further, the discharge pipe 22 may be fixed to the container 20 with a brazing material such as a metal paste, an inorganic adhesive such as a glass paste, an organic adhesive such as an epoxy, or the like, or may be fixed with an O-ring. Furthermore, the discharge pipe 22 may be fixed to the container 20 by welding. As the material constituting the discharge pipe 22, for example, the same ceramics as the base body 10 can be used. Also, as the material constituting the discharge pipe 22, the same metal as the container 20 may be used.
[0034] In the flow path member 1 according to another embodiment 2, a sensor 40 may be provided. The sensor 40 may be located in the discharge pipe 22. The sensor 40 detects a leak of fluid from the flow path 11. Examples of the sensor 40 include various sensors such as an electric sensor using a change in resistance value and an optical sensor using a change in light reflectance.
[0035] In this way, by positioning the sensor 40 in the discharge pipe 22, a leak of fluid from the flow path 11 can be detected in the discharge pipe 22. Note that a sensor 30 (see FIG. 4) may be disposed between the base body 10 and the container 20, and at the same time, a sensor 40 may be disposed in the discharge pipe 22. The sensor 30 and the sensor 40 may be of the same type or different types of sensors.
[0036] FIG. 6 is a schematic cross-sectional view of the flow path member 1 according to another Embodiment 3. In FIG. 6, a cross-section perpendicular to the flow direction of the fluid flowing in the flow path 11 of the flow path member 1 is shown.
[0037] As shown in FIG. 6, in the flow path member 1 according to another Embodiment 3, the container 20 may be configured to be separable into two members. Specifically, the flow path member 1 may be separable into a container main body portion 25 and a lid portion 26. The container main body portion 25 may have a carry-in / outlet 25a for carrying the base body 10 in and out. The lid portion 26 can close the carry-in / outlet 25a. Note that a sealing member such as an O-ring may be inserted between the container main body portion 25 and the lid portion 26.
[0038] In this way, since the container 20 is separable into two members including the container main body portion 25 and the lid portion 26, the base body 10 can be carried in and out of the container 20, so the maintainability of the base body 10 is high.
[0039] Note that the inflow pipe 12 and the outflow pipe 13 may be fixed to the lid portion 26 with a brazing material such as a metal paste, an inorganic adhesive such as a glass paste, an organic adhesive such as an epoxy, or the like, or may be fixed with an O-ring. Further, the inflow pipe 12 and the outflow pipe 13 may be fixed to the lid portion 26 by welding.
[0040] In the above-described another Embodiment 3, the case where the container 20 is configured to be separable into two members is exemplified, but the container 20 may be separable into at least two or more members including the container main body portion 25 and the lid portion 26.
[0041] FIG. 7 is a schematic cross-sectional view of the flow path member 1 according to another Embodiment 4. In FIG. 7, a cross-section perpendicular to the flow direction of the fluid flowing in the flow path 11 of the flow path member 1 is shown.
[0042] As shown in Fig. 7, in the flow path member 1 according to another embodiment 4, the base body 10 is in contact with the inner wall surface of the container 20 in all regions of the outer peripheral surface. Specifically, the first surface 101, the second surface 102, and the side surfaces 103 and 104 constituting the outer peripheral surface of the base body 10 are joined to the inner wall surface of the container 20 by the joining material 15, and no space 21 is formed between the base body 10 and the inner wall surface of the container 20. Thereby, even if the base body 10 is damaged, the possibility that the fluid flowing in the flow path 11 of the base body 10 leaks to the outside of the container 20 can be reduced.
[0043] Note that the joining material 15 may be a porous body. Thereby, even if the base body 10 is damaged, the fluid leaking from the flow path 11 of the base body 10 can be absorbed by the porous joining material 15. As the porous body, the porosity may be 10% by volume or more and 90% by volume or less. The porous body may be an organic sponge-like one or a pumice-like inorganic porous body. Also, as the joining material 15, a dense joining material 15 and a porous joining material 15 may be used respectively. For example, a dense joining material 15 may be arranged on the side surface 103 located near the external component 2, and a porous joining material 15 may be arranged on the other surfaces. The thickness of the joining material 15 located on the side surface 103 may be 1 mm or less. With such a configuration, the heat exchange efficiency with the external component 2 is high. As in the example of Fig. 7, when the joining material 15 which is a porous body is used, it may have a portion where the distance between the base body 10 and the container 20 is 1 mm or more and 50 mm or less. With such a configuration, while the heat exchange efficiency is enhanced, even if there is a large amount of fluid leakage, it is easy to absorb.
[0044] As described above, the flow path member (as an example, the flow path member 1) according to the embodiment has a base body (as an example, the base body 10) and a container (as an example, the container 20). The base body is made of ceramics and has a flow path (as an example, the flow path 11) inside. The container is a metal container that houses the base body. The base body is in contact with the inner wall surface of the container in at least a part of the region of the outer peripheral surface. Thereby, while protecting the base body, the heat exchange efficiency between the fluid flowing in the flow path of the base body and the object can be improved.
[0045] The embodiments of the present invention have been described above. However, the present invention is not limited to the above embodiments, and various modifications are possible without departing from the spirit thereof. For example, in the above-described embodiment, an example in which the flow path member 1 is used as a heat exchanger has been shown. However, the flow path member 1 may be applied to various products other than heat exchangers. For example, the flow path member 1 may be used as a reactor for reacting fluids. In this case, a temperature control device such as a heater or a Peltier element may be provided outside the container 20, and heat exchange may be performed between the fluid flowing in the flow path of the base body and the temperature control device.
[0046] Further, the base body 10 may be provided with a heater on its inside or outer surface. With such a configuration, the temperature of the fluid flowing through the flow path 11 can be controlled, and heat can be transmitted through the bonding material 15 to adjust the temperature of the external component 2.
[0047] Further effects and other embodiments can be easily derived by those skilled in the art. Therefore, the broader aspects of the present invention are not limited to the specific details and representative embodiments presented and described as above. Accordingly, various modifications can be made without departing from the spirit or scope of the general inventive concept defined by the appended claims and their equivalents.
Explanation of Reference Numerals
[0048] 1 Flow path member 2 External component 10 Base body 11 Flow path 11a Inlet 11b Outlet 12 Inflow pipe 13 Outflow pipe 15, 201 Bonding material 20 Container 21 Space 22 Discharge pipe 25 Container main body 25a Loading / unloading opening 26 Lid 30, 40 Sensor 101 Upper surface 102 Lower surface 103 and 104 sides
Claims
1. It comprises a substrate made of ceramics and having a flow path inside, a metal container for housing the substrate, and has, the substrate is, in contact with the inner wall surface of the container in at least a part of the outer peripheral surface region, a flow path member.
2. The substrate is, in contact with the inner wall surface of the container in a first region of the outer peripheral surface, separated from the inner wall surface of the container in a second region excluding the first region of the outer peripheral surface, and forms a space between the inner wall surface of the container, The flow path member according to Claim 1.
3. On the outer peripheral surface of the substrate, the area ratio of the second region in contact with the space is 1 (%) or more and 95 (%) or less, The flow path member according to Claim 2.
4. It has a sensor located on the outer peripheral surface of the substrate for detecting leakage of fluid from the flow path, The flow path member according to Claim 1.
5. The container is, has an opening communicating with the space, The flow path member according to Claim 2.
6. It has a sensor located at the opening for detecting leakage of fluid from the flow path, The flow path member according to Claim 5.
7. The container is, separable into at least two or more members including a container body portion having an inlet / outlet for carrying in the substrate and a lid portion for closing the inlet / outlet, The flow path member according to Claim 1.
Citation Information
Patent Citations
Jig and apparatus for inspecting leak of ceramic tube
JP2007040775A
Passage member, heat exchanger and electronic component device using the same, and semiconductor manufacturing apparatus
JP2016171343A