Substrate working device

Abstract

To suppress deflection of a substrate in mounting of an electronic component.SOLUTION: A substrate working device includes: a substrate holding device that holds a substrate at a working position; a mounting unit that is disposed above the substrate holding device and mounts a component on an upper surface of the substrate held by the substrate holding device; and a screw fastening unit that is disposed below the substrate holding device and performs screw fastening on the component mounted on the upper surface of the substrate from below the substrate. The screw fastening unit includes: a work head that acquires a screw and fastens the screw while keeping an upward posture facing a lower surface of the substrate held by the substrate holding device; and a moving mechanism that moves the work head to a screw mounting position.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a substrate working device.

Background Art

[0002] In the production process of electronic devices, an automatic machine that performs the operation of mounting components on the surface of a substrate is used. Patent Document 1 discloses a substrate assembly device in which the housing of the device is divided into upper and lower two stages, and a first robot that performs operations from above on the surface of the substrate and a second robot that performs operations from below on the back surface of the substrate are provided. The first robot mounts components on the surface of the substrate. The second robot is a vertically articulated robot provided with a driver at its tip, and performs the operation of screwing components onto the substrate by picking up screws from a screw supply device installed in the lower stage of the housing and screwing the screws from the back surface of the substrate.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] The robot that performs the screwing operation picks up screws from the screw supply device with the tip of the driver facing downward, and then performs the screwing of the components with the tip of the driver facing upward. Each time screwing is performed, the tip of the robot (driver) changes its posture between downward and upward, so the work takes time. In order to improve the working efficiency of the entire device, it is desirable to shorten the time required for the screwing operation.

[0005] The technology disclosed in this specification aims to shorten the time required for the screwing operation.

Means for Solving the Problems

[0006] This specification discloses a substrate working apparatus. The substrate working apparatus includes a substrate holding device that holds a substrate at a working position, a mounting unit that is disposed above the substrate holding device and mounts components on the upper surface of the substrate held by the substrate holding device, and a screwing unit that is disposed below the substrate holding device and performs screwing from below the substrate to the components mounted on the upper surface of the substrate. The screwing unit includes a working head that acquires a screw and performs screwing while remaining in an upward-facing posture facing the lower surface of the substrate held by the substrate holding device, and a moving mechanism that moves the working head to a screw mounting position.

Effect of the Invention

[0007] According to the technology disclosed in this specification, the time required for the screwing operation can be shortened.

Brief Description of the Drawings

[0008]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Figure 16

Figure 17

Figure 18

Embodiments for Carrying Out the Invention

[0009] Hereinafter, embodiments according to the present invention will be described with reference to the drawings, but the present invention is not limited thereto. The components of the embodiments described below can be combined as appropriate. In some cases, some components may not be used.

[0010] In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described while referring to this XYZ orthogonal coordinate system. The direction parallel to the X-axis within a predetermined plane is defined as the X-axis direction, the direction parallel to the Y-axis orthogonal to the X-axis within the predetermined plane is defined as the Y-axis direction, and the direction parallel to the Z-axis orthogonal to each of the X-axis and the Y-axis is defined as the Z-axis direction. The rotational or tilting direction centered on the X-axis is defined as the θX direction, the rotational or tilting direction centered on the Y-axis is defined as the θY direction, and the rotational or tilting direction centered on the Z-axis is defined as the θZ direction. The predetermined plane is the XY plane. The direction parallel to the predetermined plane includes one or both of the X-axis direction and the Y-axis direction. The Z-axis direction is the direction orthogonal to the predetermined plane. In the present embodiment, the predetermined plane is parallel to the horizontal plane, and the Z-axis direction is the vertical direction. Note that the predetermined plane may be inclined with respect to the horizontal plane.

[0011] [Substrate Working Device] FIG. 1 is a perspective view showing a substrate working device 100 according to the present embodiment. As shown in FIG. 1, the substrate working device 100 includes a base frame 114, a component supply device 200 that supplies components C, an installation portion 102 where the component supply device 200 is installed, a substrate transfer device 103 that transfers the substrate P to the working position, a substrate holding device 104 that holds the substrate P at the working position, a mounting unit 10 disposed above the substrate holding device 104, a screw tightening unit 20 disposed below the substrate holding device 104, and a control device 120 that controls the substrate working device 100. The mounting unit 10 mounts the component C on the upper surface of the substrate P held by the substrate holding device 104. The screw tightening unit 20 performs screw tightening on the component C mounted on the upper surface of the substrate P from below the substrate P.

[0012] The component supply device 200 includes a feeder that sequentially supplies a plurality of components C. The installation portion 102 includes a feeder bank where the feeder is installed. The installation portion 102, the substrate transfer device 103, and the mounting unit 10 are supported by the base frame 114. A component supply position PJa is defined in the component supply device 200. The component supply position PJa is the position where a component supply process for supplying the component C from the component supply device 200 to the mounting head 106 is performed.

[0013] The substrate transfer device 103 transfers the substrate P to the working position PJb. The working position PJb is the position where the component mounting operation and the screw tightening operation of mounting the component C on the substrate P are performed. The substrate transfer device 103 has a transfer belt capable of transferring the substrate P. A pair of transfer belts are provided in the Y-axis direction. One transfer belt supports the +Y-side end of the back surface of the substrate P, and the other transfer belt supports the -Y-side end of the back surface of the substrate P. The transfer belt includes an endless belt and transfers the substrate P in the X-axis direction by rotating while supporting the substrate P.

[0014] The substrate holding device 104 holds the end of the substrate P in the transfer path of the substrate transfer device 103. The substrate holding device 104 holds the substrate P at the working position PJb. The substrate held by the substrate holding device 104 stops at the working position PJb. The substrate holding device 104 includes a clamp mechanism that sandwiches the end of the substrate P. The substrate holding device 104 holds the two ends of the substrate P in the Y-axis direction by sandwiching them from above and below. The substrate holding device 104 holds the substrate P such that the front surface and the back surface of the substrate P are parallel to the XY plane. The front surface of the substrate P is the surface facing upward. The back surface of the substrate P is the surface facing downward. Hereinafter, the expressions "above" and "below" of the substrate P mean the directions based on the substrate P held at the working position PJb.

[0015] [Mounting Unit] The mounting unit 10 includes a mounting head 106 that mounts the component C on the front surface of the substrate P held by the substrate holding device 104, a mounting head moving mechanism 107 that is capable of moving the mounting head 106 in the XY plane, and a nozzle moving device 140 provided on the mounting head 106 and capable of moving the nozzle 30 in the Z-axis direction and the θZ direction with respect to the mounting head 106.

[0016] The mounting head 106 mounts the component C on the surface of the substrate P held by the substrate holding device 104. The mounting head 106 has a nozzle 30 that releasably holds the component C. The mounting head 106 is movable within the XY plane including the component supply position PJa and the working position PJb. The mounting head 106 holds the component C supplied from the component supply device 200 with the nozzle 30 and mounts it on the surface of the substrate P disposed at the working position PJb.

[0017] The mounting head moving mechanism 107 moves the mounting head 106 above the substrate P and above the component supply device 200. The mounting head moving mechanism 107 is capable of moving the mounting head 106 within the XY plane including the component supply position PJa and the working position PJb.

[0018] The mounting head moving mechanism 107 includes an X-axis guide rail 107a that guides the mounting head 106 in the X-axis direction, a Y-axis guide rail 107b that guides the X-axis guide rail 107a in the Y-axis direction, an X drive unit 109 that generates power for moving the mounting head 106 in the X-axis direction, and a Y drive unit 110 that generates power for moving the mounting head 106 in the Y-axis direction.

[0019] The mounting head 106 is supported by the X-axis guide rail 107a. The X drive unit 109 includes an actuator such as a motor and generates power for moving the mounting head 106 supported by the X-axis guide rail 107a in the X-axis direction. By the operation of the X drive unit 109, the mounting head 106 moves in the X-axis direction while being guided by the X-axis guide rail 107a.

[0020] The X-axis guide rail 107a is supported by the Y-axis guide rail 107b. The Y drive unit 110 includes an actuator such as a motor and generates power for moving the X-axis guide rail 107a supported by the Y-axis guide rail 107b in the Y-axis direction. By the operation of the Y drive unit 110, the X-axis guide rail 107a moves in the Y-axis direction while being guided by the Y-axis guide rail 107b. When the X-axis guide rail 107a moves in the Y-axis direction, the mounting head 106 moves in the Y-axis direction.

[0021] FIG. 2 is a diagram schematically showing the mounting head 106 according to the present embodiment. The mounting head 106 has a nozzle 30 that releasably holds the component C. The nozzle 30 holds the component C supplied from the component supply device 200 at the component supply position PJa. After holding the component C at the component supply position PJa, the nozzle 30 transports it to the work position PJb and mounts it on the substrate P. After the component C is mounted on the substrate P at the work position PJb, the nozzle 30 releases the component C. Thereby, the component C is mounted on the substrate P.

[0022] The mounting head 106 has a nozzle moving device 140 that can move the nozzle 30 in the Z-axis direction and the θZ direction. The nozzle moving device 140 includes a Z driving unit 150 that moves the nozzle 30 in the Z-axis direction and a θZ driving unit 160 that rotates the nozzle 30 in the θZ direction. The Z driving unit 150 includes an actuator such as a motor and generates power for moving the nozzle 30 in the Z-axis direction. The θZ driving unit 160 includes an actuator such as a motor and generates power for moving the nozzle 30 in the θZ direction.

[0023] The nozzle 30 can be moved in four directions, namely, the X-axis direction, the Y-axis direction, the Z-axis direction, and the θZ direction, by the mounting head moving mechanism 107 and the nozzle moving device 140. Note that the nozzle 30 may be movable in six directions, namely, the X-axis direction, the Y-axis direction, the Z-axis direction, the θX direction, the θY direction, and the θZ direction.

[0024] FIG. 3 is a diagram showing a nozzle 30 according to the present embodiment. The nozzle 30 shown in FIG. 3 is a gripping nozzle that holds a component C therebetween. The nozzle 30 includes a nozzle body 35 and a holding portion 32 that is supported by the nozzle body 35 and holds the component C therebetween. The holding portion 32 includes a fixed arm 32A, a movable arm 32B, and a drive portion 33 that is capable of moving the movable arm 32B. The movable arm 32B is supported by the nozzle body 35 via a hinge mechanism 34. The movable arm 32B is rotatable about the rotation axis of the hinge mechanism 34. With the component C disposed between the fixed arm 32A and the movable arm 32B, the component C is held by the holding portion 32 when the movable arm 32B moves so as to approach the fixed arm 32A. The component C is released from the holding portion 32 when the movable arm 32B moves away from the fixed arm 32A. Note that the nozzle 30 may be a suction nozzle that suction-holds the component C.

[0025] [Component recognition device] As shown in FIG. 1, the substrate working device 100 includes a component recognition device 111. The component recognition device 111 is supported by a base frame 114. The component recognition device 111 measures the three-dimensional shape of the component C held by the nozzle 30. The measurement data of the component recognition device 111 includes three-dimensional data indicating the three-dimensional shape of the component C. The component recognition device 111 measures the three-dimensional shape of the component C held by the nozzle 30 based on the phase shift method. The component recognition device 111 includes an ejection device that ejects a pattern light of light and dark, and an imaging device that images the component C onto which the pattern light is projected, and calculates the three-dimensional shape of the component C based on the image data of the component C imaged by the imaging device. The three-dimensional data indicating the three-dimensional shape of the component C measured by the component recognition device 111 includes the three-dimensional data of the leads and screw holes. The control device 120 performs position control of the mounting unit 10 and the like based on the measurement result of the component recognition device 111.

[0026] The component C mounted on the substrate P by the mounting unit 10 includes components screwed to the substrate P. The component C screwed to the substrate P includes, for example, a connector component. The mounting unit 10 mounts the component C on the upper surface of the substrate P such that the XY positions of the screw holes of the component C coincide with the XY positions of the screw insertion holes formed in the substrate P. In the embodiment, the screw tightening unit 20 can perform screw tightening on the component C mounted by the mounting unit 10 on the upper surface of the substrate P.

[0027] [Screw tightening unit] Next, the screw tightening unit 20 according to the present embodiment will be described. FIG. 4 is a perspective view showing the screw tightening unit 20 according to the present embodiment.

[0028] The screw tightening unit 20 is supported by the base frame 114. The screw tightening unit 20 is disposed below the substrate transfer device 103 and the substrate holding device 104. The base frame 114 includes an upper frame 114A and a lower frame 114B. The upper frame 114A is provided on the lower frame 114B. The upper frame 114A is disposed at both ends in the X-axis direction of the lower frame 114B. The upper frame 114A is wall-shaped along the YZ plane and has a gate shape in which openings serving as the loading port and the unloading port of the substrate P are formed. As shown in FIG. 1, the mounting unit 10 is supported by the upper frame 114A. The lower frame 114B has both end portions 114C in the X-axis direction and a central portion 114D provided in a concave shape with respect to the both end portions 114C. The substrate transfer device 103 and the substrate holding device 104 are provided so as to pass above the central portion 114D and straddle the both end portions 114C. The screw tightening unit 20 is provided in the central portion 114D. The screw tightening unit 20 is disposed below the holding position of the substrate P by the substrate holding device 104 (that is, the working position PJb). The screw tightening unit 20 performs screw tightening (screwing) of the component C mounted on the upper surface of the substrate P from below the substrate P held by the substrate holding device 104 in the mounting of the component C.

[0029] FIG. 5 is a perspective view showing the screw tightening unit 20 according to the present embodiment. FIG. 6 is a top view showing the screw tightening unit 20 according to the present embodiment.

[0030] The screw tightening unit 20 includes a work head 21 and a moving mechanism 22 that moves the work head 21 to a screw mounting position. The screw tightening unit 20 further includes a screw supply device 23 and a feeding mechanism 24 that feeds a screw to the work head 21 via a feed path 25 (see the two-dot chain line). The screw mounting position is the position where the screw hole of the component C is arranged. The work head 21 performs screw tightening using a driver tool 80. The work head 21 holds the driver tool 80 in an upward posture facing the lower surface of the substrate P held by the substrate holding device 104. The screw tightening unit 20 arranges a screw SC at the tip of the driver tool 80 and performs screw tightening on the component C through the screw insertion hole of the substrate P.

[0031] In the present embodiment, the work head 21 acquires the screw SC and performs screw tightening while remaining in an upward posture facing the lower surface of the substrate P held by the substrate holding device 104. Therefore, in the screw tightening unit 20, it is not necessary to switch the direction (posture) of the tip of the driver tool 80 up and down during the acquisition of the screw SC and during the screw tightening operation. The screw tightening unit 20 according to the embodiment does not include a mechanism for changing the direction (upward, downward) of the driver tool 80.

[0032] (Moving mechanism) The moving mechanism 22 can move the work head 21 in a direction parallel to the XY plane on the lower surface side of the substrate P. The moving mechanism 22 moves the work head 21 so that the XY coordinates of the driver tool 80 coincide with the XY coordinates of the screw hole of the component C, which is the screw mounting position.

[0033] The moving mechanism 22 according to the embodiment is an orthogonal robot (XY robot) that moves the work head 21 within the XY plane. The moving mechanism 22 includes a head support member 40 that supports the work head 21. The moving mechanism 22 includes an X-axis drive unit 41 and a Y-axis drive unit 42 that move the work head 21 in the X-axis direction and the Y-axis direction, which are orthogonal to each other, within a plane along the lower surface of the substrate P. The moving mechanism 22 includes an X-axis guide unit 43 that guides the head support member 40 in the X-axis direction, and a Y-axis guide unit 44 that guides the X-axis guide unit 43 in the Y-axis direction.

[0034] The head support member 40 supports the work head 21. The head support member 40 is movable in each of the X-axis direction and the Y-axis direction while supporting the work head 21. The head support member 40 is supported by the X-axis guide unit 43.

[0035] The X-axis guide unit 43 has an X-beam 43A and an X-linear guide 43B. The X-beam 43A is long in the X-axis direction. The +X side end and the -X side end of the X-beam 43A are supported by the Y-axis guide unit 44. The X-linear guide 43B is fixed to the X-beam 43A and is a guide rail that extends linearly in the X-axis direction. A linear slider 43C fixed to the head support member 40 is slidably attached to the X-linear guide 43B. The head support member 40 is guided in the X-axis direction by the X-linear guide 43B.

[0036] The X-axis drive unit 41 generates power for moving the head support member 40 in the X-axis direction. The X-axis drive unit 41 is an actuator and includes an electric motor in the embodiment. The power generated by the X-axis drive unit 41 is transmitted to the head support member 40 via a power transmission mechanism. In the examples of FIGS. 5 and 6, the power transmission mechanism is a lead screw 41A. The lead screw 41A extends linearly in the X-axis direction. The +X side end and the -X side end of the lead screw 41A are rotatably supported by the X beam 43A, respectively. The X-axis drive unit 41 is provided at the -X side end of the X beam 43A and rotates the lead screw 41A connected to the output shaft via a belt pulley mechanism 41B. A nut member (not shown) fixed to the head support member 40 is attached to the lead screw 41A. By the rotation of the lead screw 41A, the nut member meshing with the lead screw 41A is sent in the X-axis direction. As a result, by the operation of the X-axis drive unit 41, the head support member 40 moves in the X-axis direction while being guided by the X-axis guide unit 43. When the head support member 40 moves in the X-axis direction, the work head 21 moves in the X-axis direction. The position of the work head 21 in the X-axis direction is defined by the driving amount of the X-axis drive unit 41.

[0037] The Y-axis guide unit 44 has a pair of Y linear guides 44A. The pair of Y linear guides 44A are guide rails that extend linearly along the Y-axis direction. The pair of Y linear guides 44A support the +X side end and the -X side end of the X beam 43A, respectively. Linear sliders (not shown) fixed to the X beam 43A are slidably attached to the pair of Y linear guides 44A, respectively. The X beam 43A is guided in the Y-axis direction by the pair of Y linear guides 44A.

[0038] The Y-axis drive unit 42 generates power for moving the head support member 40 in the Y-axis direction. The Y-axis drive unit 42 is an actuator and includes an electric motor in the embodiment. The power generated by the Y-axis drive unit 42 is transmitted to the X-beam 43A via a power transmission mechanism. The power transmission mechanism includes a lead screw 42A and a belt pulley mechanism 42B in the examples of FIGS. 5 and 6. The lead screw 42A is disposed between a pair of Y linear guides 44A and extends linearly in the Y-axis direction. The +Y side end and the -Y side end of the lead screw 42A are rotatably supported by support portions (not shown) fixed to the base frame 114, respectively. The Y-axis drive unit 42 is supported by the base frame 114 and is connected to the +Y side end of the lead screw 42A via the belt pulley mechanism 42B. A nut member 42C fixed to the X-beam 43A is attached to the lead screw 42A. By the rotation of the lead screw 42A, the nut member 42C meshing with the lead screw 42A is fed in the Y-axis direction. As a result, by the operation of the Y-axis drive unit 42, the X-beam 43A moves in the Y-axis direction while being guided by the Y-axis guide portion 44. The head support member 40 moves in the X-axis direction while being guided by the X-axis guide portion 43. When the X-beam 43A moves in the Y-axis direction, the working head 21 moves in the Y-axis direction. The position of the working head 21 in the Y-axis direction is defined by the driving amount of the Y-axis drive unit 42.

[0039] (Working head) FIG. 7 is a perspective view showing the working head 21 according to the present embodiment. FIG. 8 is a front view showing the working head 21 according to the present embodiment.

[0040] The working head 21 is supported by the head support member 40. The working head 21 includes a tool portion 50 for tightening the screw SC, a delivery portion 60, a Z-axis drive unit 51, a θZ drive unit 52, and a pneumatic portion 53. The tool portion 50, the delivery portion 60, the Z-axis drive unit 51, the θZ drive unit 52, and the pneumatic portion 53 are supported by the head support member 40.

[0041] The tool part 50 has a mounting part 71 that can detachably attach a driver tool 80 engaged with a screw. The tool part 50 holds the driver tool 80 at the mounting part 71. The tool part 50 holds the driver tool 80 in a posture where the tip part faces upward. The mounting part 71 detachably holds the base end part of the driver tool 80 (the end part on the side opposite to the tip part that engages with the screw SC). Thereby, the tool part 50 can exchange a plurality of types of driver tools 80 with different tip shapes. The tool part 50 is provided on the movable plate 72.

[0042] The θZ drive part 52 generates power for rotating the driver tool 80 in the θZ direction. The θZ drive part 52 is an actuator and includes an electric motor in the embodiment. The θZ drive part 52 rotates the driver tool 80 mounted on the mounting part 71 in the θZ direction around the central axis of the driver tool 80. The θZ drive part 52 is provided on the lower surface side of the movable plate 72. The output shaft of the θZ drive part 52 is connected to the mounting part 71. The θZ drive part 52 rotates the driver tool 80 in the θZ direction around the central axis by the rotation of the output shaft. By rotating the driver tool 80 with a screw attached thereto in the θZ direction, screwing is performed.

[0043] The Z-axis drive unit 51 generates power to move the driver tool 80 in the Z direction. The Z-axis drive unit 51 is an actuator and includes an electric motor in the embodiment. The Z-axis drive unit 51 is fixed to the head support member 40. The output shaft of the Z-axis drive unit 51 is connected to the Z screw shaft 73. The Z screw shaft 73 extends linearly along the Z-axis direction. The vicinity of the +Z side end and the -Z side end of the Z screw shaft 73 are rotatably supported by support portions 73A fixed to the head support member 40, respectively. A nut member fixed to the movable plate 72 is attached to the Z screw shaft 73. By the rotation of the Z screw shaft 73, the movable plate 72 is fed in the Z-axis direction. The movable plate 72 is provided with a linear slider 74A. The linear slider 74A is slidably attached to a Z linear guide 74 fixed to the head support member 40. The Z linear guide 74 is a guide rail that extends linearly along the Z-axis direction. By the operation of the Z-axis drive unit 51, the tool unit 50 (driver tool 80), the θZ drive unit 52, and the movable plate 72 move in the Z-axis direction along the Z linear guide 74. The position of the driver tool 80 in the Z-axis direction is defined by the driving amount of the Z-axis drive unit 51. The Z-axis drive unit 51 can move the driver tool 80 up and down between a position where the tip of the driver tool 80 is disposed below the delivery portion 60 and a position where the tip of the driver tool 80 is disposed above the delivery portion 60.

[0044] (Driver tool) FIG. 9 is a cross-sectional view showing the driver tool 80 according to the present embodiment. The driver tool 80 has a driver 81 and a holding cylinder 82 provided around the driver 81. The driver 81 is disposed inside the holding cylinder 82. The holding cylinder 82 has an upper end opening 82A at the upper end. An annular rib 82B protruding toward the center of the holding cylinder 82 is formed on the inner peripheral surface slightly below the upper end portion of the holding cylinder 82. The inner diameter of the formed portion of the rib 82B is smaller than the outer diameter of the head of the screw SC and larger than the outer diameter of the driver 81. The inner diameter of the range from the rib 82B to the upper end opening 82A of the holding cylinder 82 is larger than the outer diameter of the head of the screw SC. The holding cylinder 82 can hold the screw SC when the head of the screw SC fits into the rib 82B. The screw SC is held with the shaft portion facing upward and the head fitting into the rib 82B. As a result, the head of the screw SC is disposed directly above the tip of the driver 81.

[0045] The lower end of the holding cylinder 82 is inserted into the case portion 83. The holding cylinder 82 has a lower end opening 82C at the lower end. The driver 81 passes through the lower end opening 82C and is supported by a bearing disposed in the case portion 83 so as to be relatively rotatable about the Z axis. The lower end portion of the driver 81 is supported by the mounting portion 71. The driver 81 rotates in the θZ direction integrally with the mounting portion 71 when the mounting portion 71 is rotated in the θZ direction by the θZ driving portion 52. The case portion 83 and the holding cylinder 82 do not rotate.

[0046] The lower end opening 82C of the holding cylinder 82 communicates the inside of the holding cylinder 82 with the inside of the case portion 83. A connector 83A for connection to the pneumatic portion 53 is provided in the case portion 83. A negative pressure is supplied to the holding cylinder 82 from the pneumatic portion 53 via the case portion 83. The holding cylinder 82 sucks air from the upper end opening 82A by the negative pressure. The holding cylinder 82 is blocked by the head of the screw SC at the portion of the annular rib 82B. The holding cylinder 82 can suck and fix the screw SC fitted into the rib 82B so that it does not move by the negative pressure.

[0047] The holding cylinder 82 and the driver 81 are relatively movable in the Z-axis direction. The holding cylinder 82 is biased upward by a spring member 84 disposed within the case portion 83. The spring member 84 is a compression coil spring. The lower end portion of the spring member 84 is supported by a spring receiver 85 fixed to the case portion 83.

[0048] When the driver tool 80 moves upward by the Z-axis drive unit 51, first, the holding cylinder 82 comes into contact with the lower surface of the substrate P. When the driver tool 80 continues to move upward, the holding cylinder 82 maintains its position without moving due to the reaction force from the substrate P compressing the spring member 84. While the spring member 84 is being compressed, the driver 81 and the case portion 83 continue to move upward, so the tip of the driver 81 engages with the screw SC held by the rib 82B of the holding cylinder 82 and moves upward through the inner peripheral side of the rib 82B as it is. As a result, a screw is attached to the tip of the driver 81 and further inserted into the screw hole of the component C. Note that the driver 81 moves upward while being rotated by the θZ drive unit 52. Therefore, when the driver 81 contacts the head of the screw SC, the rotational phases of the engagement groove of the head of the screw SC and the tip of the driver 81 match, and the engagement groove and the tip engage with each other.

[0049] (Delivery section) FIG. 10 is a schematic diagram showing the function of the delivery section 60 according to the present embodiment. The delivery section 60 is disposed above the head support member 40 as shown in FIG. 7. The delivery section 60 is connected to the delivery mechanism 24 via the delivery path 25. The delivery section 60 receives the screw SC sent from the delivery path 25. The delivery section 60 sets the received screw SC at the tip of the driver tool 80 of the tool section 50. Therefore, the delivery section 60 is disposed above the driver tool 80 disposed at the screw setting position ES (see FIG. 10). Note that FIG. 7 shows a state where the driver tool 80 is disposed at the rising position when performing screw tightening. Therefore, in FIG. 7, the tip of the driver tool 80 is located above the delivery section 60.

[0050] As shown in FIG. 7, the delivery unit 60 includes a holding unit 61 that removably holds the screw SC, a driving unit 62 that moves the holding unit 61 to the delivery position, and a connection unit 63 that is connected to the delivery path 25. The end of the delivery path 25 is connected to the connection unit 63. The holding unit 61 receives the screw SC sent from the delivery path 25 via the connection unit 63. The holding unit 61 is connected to the pneumatic unit 53 by an air tube (not shown). The holding unit 61 holds the screw SC by the pressure supplied from the pneumatic unit 53. By stopping the pressure supply, the holding of the screw SC is released. The driving unit 62 movably holds the holding unit 61 via a bracket 62A. The driving unit 62 is an actuator, for example, an air cylinder. The driving unit 62 is connected to the pneumatic unit 53 by an air tube (not shown). The driving unit 62 moves the holding unit 61 by the pressure supplied from the pneumatic unit 53. The driving unit 62 reciprocates the holding unit 61 between the delivery position A2 and the retracted position A1 by the forward and backward movement of the piston rod. As shown in FIG. 10, the delivery position A2 is the position where the screw SC is delivered to the driver tool 80. The retracted position A1 is the position where the holding unit 61 is retracted when the tool unit 50 (driver tool 80) moves upward by the Z-axis driving unit 51 for screw tightening.

[0051] As shown in FIG. 10, the holding unit 61 has a holding chamber 64 for the screw SC. The holding chamber 64 is a space adapted to the shape of the screw SC, and the lower end of the holding chamber 64 opens to the lower surface of the holding unit 61. The lower surface opening of the holding chamber 64 is vertically opposed to the opening of the connection unit 63. The connection unit 63 is disposed directly below the holding unit 61 at the retracted position A1 and is supported by the head support member 40. The connection unit 63 is a cylindrical connector to which the end of the delivery path 25 is connected. The connection unit 63 is connected to the delivery path 25 at its lower end and receives the screw SC from the lower end opening. The connection unit 63 delivers the received screw SC from the upper end opening to the holding chamber 64. The holding unit 61 receives the screw SC into the holding chamber 64 from the lower surface side.

[0052] The screw SC is sent from the feeding path 25 into the holding chamber 64 in a posture with the shaft portion facing the front side in the advancing direction and the head portion facing the rear side in the advancing direction. The upper part of the holding chamber 64 is a small-diameter portion 64A into which the shaft portion of the screw SC is inserted. The holding portion 61 has an air passage 65 connected to the small-diameter portion 64A. The air passage 65 is connected to the pneumatic portion 53. The holding portion 61 holds the screw SC in the holding chamber 64 by sucking the shaft portion of the screw SC received in the holding chamber 64 by the negative pressure supplied to the air passage 65. Although the lower surface of the holding chamber 64 is open, the screw SC is held without falling from the holding chamber 64 while being sucked by the negative pressure.

[0053] The holding portion 61 holding the screw SC moves from the retracted position A1 to the delivery position A2 by the driving portion 62. At the delivery position A2, the lower surface opening of the holding chamber 64 faces the upper end opening 82A of the holding cylinder 82 of the driver tool 80 vertically. The holding of the screw SC is released by stopping the supply of negative pressure from the pneumatic portion 53 to the air passage 65, and the holding portion 61 drops the screw SC from the holding chamber 64. At this time, the screw tightening unit 20 supplies positive pressure to the air passage 65 by the pneumatic portion 53. The positive pressure enables the screw SC to drop smoothly from the air passage 65. The screw SC enters the upper end opening 82A of the holding cylinder 82 while keeping the head portion facing downward and is held so as to fit into the annular rib 82B. Thereby, the holding portion 61 arranges the screw SC at the tip of the driver tool 80 at the delivery position A2. While tightening the screw with the driver tool 80, the screw SC to be used next is supplied from the feeding mechanism 24 to the holding chamber 64. By supplying the screw SC to be used next to the holding chamber 64 during the screw tightening, it is possible to shorten the time required for the screw tightening.

[0054] After the screw SC is placed, the holding part 61 is moved by the driving part 62 from the delivery position A2 to the retracted position A1. The retracted position A1 is outside the movable range of the tool part 50 (driver tool 80). With the holding part 61 in the retracted position A1, the tool part 50 performs the screw tightening operation by the driver tool 80. Thereby, the screw tightening unit 20 can acquire the screw SC and perform the screw tightening operation without changing the posture (direction) of the driver tool 80.

[0055] As shown in FIG. 7, the pneumatic part 53 supplies pressure to the delivery part 60. The pneumatic part 53 is provided on the head support member 40 and moves together with the head support member 40. The pneumatic part 53 is connected to a pneumatic source such as an air pump (not shown). The pneumatic part 53 supplies pressure to the holding part 61 and the tool part 50 (driver tool 80). The pneumatic part 53 detects the holding and release of the screw SC in the holding part 61 based on the rise of the negative pressure supplied into the holding part 61. The pneumatic part 53 detects the holding and release of the screw SC in the holding cylinder 82 based on the rise of the negative pressure supplied into the holding cylinder 82. These pressure fluctuations in the pneumatic part 53 are monitored by the control device 120.

[0056] (Delivery mechanism) FIG. 11 is a perspective view showing the screw supply device 23 and the delivery mechanism 24 according to the embodiment. FIG. 12 is a cross-sectional view of the main part of the delivery mechanism 24 according to the embodiment. FIG. 12 shows the XZ cross-section passing through the nozzle part 91 of the delivery mechanism 24.

[0057] The screw supply device 23 and the delivery mechanism 24 are supported by the base frame 114. The screw supply device 23 and the delivery mechanism 24 are arranged outside the moving range of the working head 21 by the moving mechanism 22. The screw supply device 23 and the delivery mechanism 24 are arranged on the -Y direction side with respect to the moving mechanism 22. The screw supply device 23 and the delivery mechanism 24 are arranged above the moving mechanism 22. The screw supply device 23 and the delivery mechanism 24 are arranged side by side in the X-axis direction.

[0058] The screw supply device 23 stores a large number of screws SC and supplies them one by one to the screw extraction position B1. The screw supply device 23 includes a screw storage portion provided with a screw inlet, a stirring mechanism for stirring the screws SC accommodated in the screw storage portion, a rail portion for aligning the screws SC accommodated in the screw storage portion in a row and sending them out, and a cutting portion for cutting out the screws SC one by one from the row of screws SC advancing on the rail portion and moving them to the screw extraction position B1.

[0059] The sending mechanism 24 pressure-feeds the screw SC to the sending path 25 by air pressure. The sending mechanism 24 includes a nozzle portion 91, a suction driving portion 92 for moving the nozzle portion 91, and an inlet holding portion 93 for holding the inlet of the sending path 25. In FIG. 11, the illustration of the sending path 25 is omitted. The nozzle portion 91 is connected to a switching valve 94 via a pneumatic tube or the like. The switching valve 94 is connected to a pneumatic source such as a pneumatic pump (not shown). The switching valve 94 can selectively supply positive pressure and negative pressure to the nozzle portion 91 and can stop the pressure supply. When negative pressure is supplied to the nozzle portion 91, the screw SC disposed at the screw extraction position B1 is adsorbed. When positive pressure is supplied to the nozzle portion 91, the adsorbed screw SC is sent out from the sending position B2 to the sending path 25.

[0060] The suction driving portion 92 reciprocates the nozzle portion 91 between the screw extraction position B1 and the sending position B2 to the sending path 25. The suction driving portion 92 includes a lifting driving portion 92A and a horizontal driving portion 92B. The lifting driving portion 92A supports the nozzle portion 91 via a nozzle holding member 95 and linearly moves the nozzle portion 91 vertically. The horizontal driving portion 92B supports the nozzle portion 91 and the lifting driving portion 92A and linearly moves the nozzle portion 91 and the lifting driving portion 92A in the X-axis direction between the screw extraction position B1 and the sending position B2. Both the lifting driving portion 92A and the horizontal driving portion 92B are actuators, for example, air cylinders. The lifting driving portion 92A and the horizontal driving portion 92B operate by the pressure supply from the switching valve 94.

[0061] As shown in FIG. 12, the nozzle portion 91 has an opening for suction and discharge facing downward and is held by the nozzle holding member 95. The nozzle portion 91 moves between the screw removal position B1 and the feeding position B2 by the horizontal drive portion 92B in a state where it is arranged at the rising position by the lifting drive portion 92A. The nozzle portion 91 moves downward from a position above the screw removal position B1 and comes into contact with the head of the screw SC arranged at the screw removal position B1. The nozzle portion 91 adsorbs the head of the screw SC by negative pressure and moves upward to take out one screw SC from the screw supply device 23.

[0062] The nozzle portion 91 that has adsorbed the head of the screw SC moves downward from a position above the feeding position B2 and inserts the screw SC into the inlet opening of the inlet holding portion 93. The inlet holding portion 93 is a cylindrical connector to which the end of the feed path 25 is connected. The nozzle portion 91 feeds positive pressure into the feed path 25 through the inlet holding portion 93, and conveys the screw SC to the delivery portion 60 of the work head 21 by air pressure. The nozzle portion 91 sends out the screw SC into the inlet of the feed path 25 with the shaft portion of the screw SC facing forward in the advancing direction.

[0063] The feed path 25 is a pipe with both ends open. The feed path 25 is composed of, for example, a flexible air tube. One end of the feed path 25 is connected to the delivery mechanism 24, and the other end is connected to the work head 21. As described above, one end of the feed path 25 is held by the inlet holding portion 93 of the delivery mechanism 24. The other end of the feed path 25 is held by the connection portion 63 of the delivery portion 60. The feed path 25 has flexibility to deform as the work head 21 moves. The inner diameter of the feed path 25 is designed to be a size corresponding to the maximum outer diameter of the screw SC, that is, the outer diameter of the head of the screw SC. The feed path 25 has an inner diameter slightly larger than the maximum outer diameter of the screw SC so that the posture of the screw SC being pressure-fed by air pressure does not change midway. Therefore, the screw SC is sent into the holding chamber 64 without changing its orientation while the shaft portion is arranged forward in the advancing direction and the head is arranged rearward in the advancing direction.

[0064] [Control device] FIG. 13 is a functional block diagram showing an example of the control device 120 according to the present embodiment. The control device 120 controls the substrate working device 100. The control device 120 includes a computer system. The computer system includes an arithmetic unit including a processor such as a CPU (Central Processing Unit), a storage device including a non-volatile memory such as a ROM (Read Only Memory) or a storage and a volatile memory such as a RAM (Random Access Memory), and an input / output interface including an input / output circuit capable of inputting and outputting signals and data.

[0065] The control device 120 has a control unit 121 and a storage unit 122.

[0066] The storage unit 122 stores a production program indicating the operating conditions of the substrate working device 100. The production program includes data used for the mounting process of the component C. The production program includes mounting position data indicating the mounting position where the component C is mounted on the surface of the substrate P, screw mounting position data indicating the position of the screw hole of the mounted component C, and thickness data indicating the thickness of the substrate P on which the component C is mounted.

[0067] Based on the production program stored in the storage unit 122, the control unit 121 outputs control signals to the substrate transfer device 103, the substrate holding device 104, the mounting unit 10, the component supply device 200, the component recognition device 111, and the screw tightening unit 20. Based on the production program, the control unit 121 outputs control signals to each of the X-axis drive unit 41, Y-axis drive unit 42, Z-axis drive unit 51, θZ drive unit 52, pneumatic unit 53, feeding mechanism 24, and screw supply device 23 of the screw tightening unit 20.

[0068] The mounting unit 10 sequentially mounts a plurality of components C on the substrate P by the mounting head 106 based on the production program. The screwing unit 20 sequentially performs screwing operations on the components C mounted on the substrate P based on the production program. That is, the mounting head 106 holds the component C with the nozzle 30 at the component supply position PJa, then moves to the working position PJb, and mounts it on the substrate P. The screwing unit 20 obtains the screw SC directly below the screw mounting position of the mounted component C and sets it on the driver tool 80. The screwing unit 20 moves the driver tool 80 upward to insert the screw SC into the screw hole, and rotates the driver 81 to perform screwing. The mounting head 106 maintains the state of holding the component C from above until the screwing operation on the component C mounted on the upper surface of the substrate P is completed. The mounting head 106 supports the external force applied to the component C during the screwing operation. Regarding screwing, the necessary screwing torque is managed based on the production program, and screwing is performed on the machine side based on the set value. The screwing torque is calculated from the current value of the θZ drive unit 52 which is an electric motor.

[0069] After the mounting unit 10 mounts the component C on the surface of the substrate, it moves to the component supply position PJa and holds a new component C with the nozzle 30. The mounting head 106 holds the new component C with the nozzle 30 at the component supply position PJa, then moves to the working position PJb, and mounts it on the substrate P. The screwing unit 20 moves to the screw mounting position of the newly mounted component and performs the screwing operation. In this way, the mounting unit 10 and the screwing unit 20 cooperate to sequentially perform the mounting and screwing of a plurality of components C. Therefore, when the time required for the screwing operation of the screwing unit 20 is shortened, the timing for the mounting unit 10 to start mounting the next component C can be advanced. As a result, the overall working efficiency of the substrate working device 100 is improved.

[0070] [Component Mounting Method] Next, the component mounting method according to this embodiment will be described. FIG. 14 is a flowchart showing an example of the component mounting method according to this embodiment.

[0071] The control unit 121 outputs a control signal to the substrate transfer device 103 so that the substrate P is transferred to the working position PJb. The substrate transfer device 103 transfers the substrate P to the working position PJb (step S1).

[0072] Next, the control unit 121 outputs a control signal to the substrate holding device 104 so as to hold the substrate P transferred to the working position PJb. The substrate holding device 104 holds the substrate P transferred to the working position PJb (step S2).

[0073] The control unit 121 controls the mounting unit 10 to mount the component C at the mounting position on the surface of the substrate P (step S3). The mounting unit 10 mounts the component C at the mounting position specified by the production program.

[0074] The control unit 121 controls the screw tightening unit 20 to perform a screw tightening operation on the component C mounted at the mounting position on the surface of the substrate P (step S4). At this time, the control unit 121 controls the mounting unit 10 so as to maintain the state in which the component C is held at the mounting position.

[0075] If the mounted component C is not the target of the screw tightening operation, the control unit 121 skips step S4 and proceeds to the next step S5.

[0076] The control unit 121 determines whether or not the mounting of a plurality of components C has been completed based on the production program (step S5). If there is a component C that is scheduled to be mounted but has not been mounted, the control unit 121 determines that the mounting of the component C has not been completed, and performs the processes of steps S3 and S4 on the next component C. When the mounting and screw tightening of all the components C scheduled to be mounted have been completed, the control unit 121 determines that the mounting of the component C has been completed, and outputs a control signal to the substrate transfer device 103 so that the substrate P is carried out.

[0077] (Screw tightening operation) FIG. 15 is a flowchart showing the flow of the screw tightening operation in step S4. FIG. 16 is a schematic diagram showing the screw tightening operation by the screw tightening unit 20.

[0078] In the screw tightening operation in step S4, the control unit 121 controls the screw tightening unit 20 based on the production program so that the driver tool 80 is disposed directly below the screw mounting position (step S11). The screw mounting position is the position of the screw hole CH (see FIG. 16) of the component C. The screw tightening unit 20 moves the work head 21 in the XY plane by the moving mechanism 22 and disposes the driver tool 80 directly below the screw mounting position.

[0079] The control unit 121 controls the screw supply device 23 and the feeding mechanism 24 so as to send out the screw SC to the work head 21 (step S12). As shown in FIG. 12, the screw supply device 23 disposes one screw SC at the screw extraction position B1. The feeding mechanism 24 sucks the screw SC disposed at the screw extraction position B1 by supplying negative pressure to the nozzle portion 91. The feeding mechanism 24 moves the nozzle portion 91 to the feeding position B2 by the suction driving unit 92. The feeding mechanism 24 feeds the adsorbed screw SC into the feed path 25 by supplying positive pressure to the nozzle portion 91. The feeding mechanism 24 conveys the screw SC to the work head 21 through the feed path 25 by the positive pressure supplied from the nozzle portion 91.

[0080] The control unit 121 controls the work head 21 (delivery unit 60) so as to acquire and hold the screw SC sent from the feeding mechanism 24 (step S13). The control unit 121 controls the pneumatic unit 53 so as to supply negative pressure to the air passage 65 of the holding unit 61. As shown in FIG. 10, the holding unit 61 receives the screw SC sent from the feeding mechanism 24 into the holding chamber 64 at the retracted position A1. When the shaft portion of the screw SC reaches the small diameter portion 64A of the holding chamber 64, the screw SC is held by the negative pressure supplied to the small diameter portion 64A through the air passage 65.

[0081] When the screw SC is not disposed in the holding chamber 64, the pneumatic section 53 is at a pressure corresponding to the atmospheric pressure by only sucking air. However, when the shaft portion of the screw SC reaches the small-diameter portion 64A, the negative pressure rapidly increases. The control unit 121 can detect that the screw SC is held by the holding portion 61 based on the change in the pressure value (rise of negative pressure) supplied from the pneumatic section 53 to the air passage 65.

[0082] The control unit 121 controls the delivery section 60 so as to set the screw SC in the holding cylinder 82 of the driver tool 80 and retract the holding section 61 (step S14). The control unit 121 moves the holding section 61 holding the screw SC to the delivery position A2 by the drive section 62. The control unit 121 controls the pneumatic section 53 to supply negative pressure into the holding cylinder 82 of the driver tool 80 while stopping the supply of negative pressure to the air passage 65 of the holding section 61. The holding section 61 releases the holding of the screw SC due to the stop of the negative pressure supply. The screw SC falls from the lower opening of the holding chamber 64 into the upper end opening 82A of the holding cylinder 82 by the action of gravity. Since the head of the screw SC is close to the center of gravity and is on the lower side, it falls in the same posture and fits into the annular rib 82B of the holding cylinder 82, closing the opening inside the rib 82B. The screw SC is fixed to the rib 82B because the head closing the rib 82B is sucked by the negative pressure.

[0083] When the inner opening of the rib 82B is open, the pneumatic section 53 is at a pressure corresponding to the atmospheric pressure by only sucking air. However, when the head of the screw SC closes the inner opening of the rib 82B, the negative pressure rapidly increases. The control unit 121 can detect that the screw is correctly set in the holding cylinder 82 based on the change in the pressure value (rise of negative pressure) of the pneumatic section 53. After the screw SC is set, the control unit 121 moves the holding section 61 from the delivery position A2 to the retracted position A1 by the drive section 62.

[0084] The control unit 121 controls the work head 21 to move the tool unit 50 upward while rotating the driver 81 (step S15). The control unit 121 outputs a control signal to rotate the driver 81 by the θZ drive unit 52. The θZ drive unit 52 rotates the driver 81 around the central axis extending in the Z-axis direction. The control unit 121 outputs a control signal to move the tool unit 50 upward (+Z direction) by the Z-axis drive unit 51. The Z-axis drive unit 51 moves the movable plate 72 upward by rotating the Z-screw shaft 73. The driver tool 80 (driver 81 and holding cylinder 82) attached to the movable plate 72 and the θZ drive unit 52 move upward integrally. When the driver tool 80 moves upward, as shown in Fig. 16(A), the upper end of the holding cylinder 82 contacts the lower surface of the substrate P held at the work position PJb.

[0085] Even after the holding cylinder 82 contacts the lower surface of the substrate P, the control unit 121 continues the upward movement by the Z-axis drive unit 51. The driver 81 and the case part 83 continue to move upward together with the movable plate 72. The holding cylinder 82 maintains its position in the Z-axis direction by compressing the spring member 84 even when the case part 83 moves further upward. Thereby, as shown in Fig. 16(B), the driver 81 moves upward within the holding cylinder 82 and contacts the head of the screw SC fitted in the rib 82B. The rotational phases of the engagement groove of the head of the screw SC and the tip of the driver 81 match, and the tip engages with the engagement groove. Thereby, the screw SC is attached to the tip of the driver 81. When the driver 81 moves further upward, as shown in Fig. 16(C), the screw is inserted into the screw hole CH of the component C through the screw insertion hole TH of the substrate P.

[0086] The control unit 121 controls the work head 21 to perform screw tightening of the screw SC inserted into the screw hole CH (step S16). The control unit 121 controls the θZ drive unit 52 and the Z-axis drive unit 51 to apply an upward force toward the screw hole CH while rotating the driver 81. The control unit 121 controls the mounting unit 10 that holds the component C so as to support the upward external force acting on the component C. As a result, as shown in FIG. 16(D), the screw SC meshes with the screw hole CH and is tightened, so that the component C is screwed to the substrate P. The control unit 121 determines that the screw tightening is completed, for example, when the rotational torque of the θZ drive unit 52 reaches a predetermined value, and stops the θZ drive unit 52 and the Z-axis drive unit 51.

[0087] After the completion of the screw tightening, the control unit 121 controls the Z-axis drive unit 51 to move the tool unit 50 downward (step S17). The control unit 121 moves the movable plate 72 downward until the upper end of the holding cylinder 82 reaches the screw setting position ES below the holding portion 61 of the delivery portion 60. Thereby, the screw tightening operation of one screw SC is completed.

[0088] When a plurality of screw mounting positions are set for one component C (when there are a plurality of screw holes CH in the component C), the control unit 121 repeats the processes from step S11 to step S17. When all the screw tightening operations for the component C are completed, the screw tightening operation in step S4 is completed.

[0089] [Expansion tool] In the present embodiment, the screw tightening unit 20 can perform other operations than the above-described screw tightening operation. Specifically, the mounting portion 71 of the tool unit 50 can mount an expansion tool used for other operations than screw tightening instead of the driver tool 80. That is, the mounting portion 71 can not only replace a plurality of types of driver tools 80 having different tip shapes, but also mount other tools (expansion tools) than the driver tool 80.

[0090] FIG. 17 is a perspective view showing a driver tool 80 according to an embodiment. FIG. 18 is a perspective view showing an example of an extension tool according to an embodiment. As shown in FIG. 18, in the embodiment, the extension tool includes a support 300 that contacts and supports the lower surface of the substrate P. The support 300 has a rod-like shape and has a support surface 301 facing the lower surface of the substrate P at the tip of the support 300. The base end portion of the support 300 can be attached to the attachment portion 71. As shown in FIGS. 17 and 18, the driver tool 80 and the support 300 (extension tool) have attachment portions AT of the same shape. The attachment portion AT is provided at the base end portion of each of the driver tool 80 and the support 300 and is detachable from the attachment portion 71 of the work head 21.

[0091] When the support 300 as an extension tool is attached to the attachment portion 71 instead of the driver tool 80, the work head 21 functions as a support head that supports the lower surface of the substrate P. The screw tightening unit 20 can perform a support operation for the substrate P associated with component mounting. The support operation for the substrate P is an operation of supporting the lower surface of the substrate P from below so that the substrate P does not bend and deform when the component C is mounted on the upper surface of the substrate P by the mounting unit 10. The substrate P may be elastically deformed (bent) so that the central portion sags due to its own weight while being held at the work position PJb by the substrate holding device 104. When the mounting unit 10 mounts the component C, the screw tightening unit 20 supports the substrate P from below by the support 300 so that the height of the mounting position of the component C on the substrate P approaches the target height position of component mounting specified in the production program (the Z-axis direction position where the component C is arranged by the mounting unit 10).

[0092] When performing substrate support, the moving mechanism 22 moves the work head 21 so as to place the support tool 300 at a support position corresponding to the mounting position of the component C as the component mounting of the mounting unit 10 is carried out. The support position is the XY-axis coordinates that coincide with or are near the mounting position of the component C to be mounted, and can be specified in advance by the production program. In the case of a double-sided mounting substrate or the like, when there are already mounted components or structures that cannot be contacted on the opposite side of the mounting position on the substrate P, a position near the mounting position shifted from the mounting position is specified as the support position.

[0093] The work head 21 arranges the support surface 301 at the upper end of the support tool 300 at the support height position by the Z-axis drive unit 51. The support height position is calculated based on the Z coordinate of the target height position of the component mounting and the thickness data of the substrate P included in the production program. The support height position is the height position of the support surface 301 in a state where the target height (Z-axis coordinate) when mounting the component C by the mounting head 106 and the height (Z-axis coordinate) of the upper surface of the substrate P coincide within an allowable range. Thereby, even when the substrate P is deformed, the component C is accurately installed at the mounting position on the upper surface of the substrate P, so that displacement of the component C is suppressed.

[0094] The extension tool may include various tools used for operations performed along with the component mounting operation, in addition to the support tool 300. The extension tool may be, for example, a hand tool for clinching, a hand tool for lead cutting, a hand tool for soldering, or the like.

[0095] [Effect] As described above, according to the present embodiment, the substrate working device 100 includes a substrate holding device 104 that holds the substrate P at the working position, a mounting unit 10 that is disposed above the substrate holding device 104 and mounts the component C on the upper surface of the substrate P held by the substrate holding device 104, and a screw tightening unit 20 that is disposed below the substrate holding device 104 and performs screw tightening on the component C mounted on the upper surface of the substrate P from below the substrate P. The screw tightening unit 20 includes a working head 21 that acquires the screw SC and performs screw tightening while remaining in an upward posture facing the lower surface of the substrate P held by the substrate holding device 104, and a moving mechanism 22 that moves the working head 21 to the screw mounting position. Thereby, the screw SC can be acquired and the screw tightened while keeping the driver 81 upward without alternately changing the posture of the driver 81 between downward and upward. Since there is no time required for posture change, the time required for the screw tightening operation can be shortened. In particular, when the installation space of the screw tightening unit is minimized as much as possible for miniaturization of the device, a large operation such as changing the posture of the driver 81 by 180 degrees between downward and upward is likely to require special measures such as restricting the posture change position or operating at a low speed to avoid interference, and the working time is likely to become long. In the embodiment, since the posture change that is likely to increase the working time is not required, the time required for the screw tightening operation can be effectively shortened.

[0096] In the present embodiment, the screw tightening unit 20 further includes a feeding mechanism 24 that feeds the screw SC to the working head 21 via the feed path 25. Thereby, the working head 21 can acquire the screw SC without moving the working head 21 to the screw SC acquisition position. Therefore, since the movement for acquiring the screw SC is not required, the time required for the screw tightening operation can be further shortened.

[0097] In the present embodiment, the feeding mechanism 24 pressure-feeds the screw SC to the feed path 25 by air pressure. Thereby, by sending compressed air (positive pressure) into the feed path 25, the screw SC can be easily sent to the working head 21.

[0098] In this embodiment, the working head 21 includes a tool part 50 for tightening the screw SC, and a delivery part 60 for acquiring the screw SC from the delivery path 25 and setting it in the tool part 50. Thereby, the delivery part 60 can set the screw SC without the tool part 50 operating to set the screw SC at the tip of the driver 81. Since there is no need to move or retract the tool part 50 (driver 81), immediately after the screw is set by the delivery part 60, the tightening operation of the screw SC can be started promptly. As a result, the time required for the screw tightening operation can be effectively shortened.

[0099] In this embodiment, the working head 21 has a mounting part 71 that can detachably mount a driver tool 80 that engages with the screw. Thereby, screw tightening of various types of screws SC can be easily performed by replacing the driver tool 80. For example, it is not necessary to provide a dedicated tool part 50 for each type of screw SC or to replace the working head 21.

[0100] In this embodiment, the mounting part 71 can mount an extension tool used for operations other than screw tightening instead of the driver tool 80. Thereby, the screw tightening unit 20 can be given the expandability to perform operations other than screw tightening. By mounting the extension tool, for example, the screw tightening unit 20 can perform operations that would otherwise be performed by another unit on a substrate P that does not require screw tightening. Therefore, when performing operations on various substrates P with different specifications in mass production of multiple varieties in small quantities, there is no need to prepare a separate replacement unit for other operations, and no major preparatory work for replacing the screw tightening unit 20 with a replacement unit is required.

[0101] In this embodiment, the expansion tool includes a support tool 300 that contacts and supports the lower surface of the substrate P. The moving mechanism 22 moves the work head 21 so as to place the support tool 300 at a support position corresponding to the mounting position of the component C as the component C of the mounting unit 10 is mounted. Thereby, when mounting a component C that does not require screw tightening, such as a surface mount component, the substrate P can be supported by the screw tightening unit 20 equipped with the support tool 300. Since the deflection deformation due to the weight of the substrate P can be suppressed by the support, the positional accuracy in component mounting can be improved.

[0102] In this embodiment, the moving mechanism 22 includes an X-axis drive unit 41 and a Y-axis drive unit 42 that move the work head 21 in the X-axis direction and the Y-axis direction that are orthogonal to each other within a plane along the lower surface of the substrate P. The work head 21 includes a tool unit 50 that tightens the screw SC, and a Z-axis drive unit 51 that moves the tool unit 50 in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction. Thereby, the moving mechanism 22 of the screw tightening unit 20 can be configured by a so-called orthogonal robot (XY robot). Compared with, for example, a vertically articulated robot, an orthogonal robot does not require trajectory calculation of joint positions for interference avoidance and can be operated at high speed. In the case of this embodiment where the acquisition and tightening of the screw SC can be performed in the upward posture during the screw tightening operation, the movement in the Z-axis direction only needs to be a simple linear reciprocating motion. Therefore, it is only necessary to provide the Z-axis drive unit 51 in the work head 21, and there is no need to provide a mechanism for changing the posture in the θX direction or the θY direction, so that a screw tightening unit 20 that can operate at high speed with a simpler configuration can be constructed. Thereby, the time required for the screw tightening operation can be effectively shortened.

[0103] [Other Embodiments] In the above-described embodiment, the screwing unit 20 is provided with a feeding mechanism 24 that feeds the screw SC to the working head 21 via the feeding path 25, but this is not limiting. The feeding mechanism 24, the feeding path 25, and the delivery unit 60 may not be provided. In this case, the screwing unit 20 may move to a screw acquisition position set at a predetermined position within the apparatus and perform an acquisition operation of setting the screw SC on the driver tool 80. The screw acquisition position is set above the holding cylinder 82 of the driver tool 80. A holding device that holds a plurality of screws SC in a posture where the heads of the screws SC face downward may be provided at the screw acquisition position. The holding device holds the screw SC releasably by pneumatic pressure, magnetic attraction, or mechanical gripping. The holding device, for example, takes out the screw SC from the screw supply device 23 and holds it at the screw acquisition position. The working head 21 moves to the screw acquisition position and acquires the screw SC from the holding device.

[0104] Also, in the above-described embodiment, the feeding mechanism 24 pressure-feeds the screw SC to the feeding path 25 by pneumatic pressure, but the screw SC may be pressure-fed to the feeding path 25 by negative pressure suction from the outlet side of the feeding path 25 (i.e., the delivery unit 60). In this case, the feeding mechanism 24 only needs to take out the screw SC from the screw supply device 23 and set it at the inlet of the feeding path 25. Further, the screw SC may be pressure-fed from the screw supply device 23 without providing the feeding mechanism 24.

[0105] Also, in the above-described embodiment, an example where the delivery unit 60 acquires the screw SC from the feeding path 25 and sets it on the tool unit 50 is shown, but the delivery unit 60 may only acquire and release the screw SC from the feeding path 25, and move the tool unit 50 to the position of the delivery unit 60 to receive the screw SC.

[0106] Also, in the above-described embodiment, an example where the working head 21 is provided with a mounting portion 71 on which the driver tool 80 can be detachably mounted is shown, but the mounting portion 71 may not be provided. For example, the entire tool unit 50 may be replaceable. Further, a plurality of driver tools 80 may be provided on the tool unit 50 so that the driver tool 80 used for the screwing operation can be selected.

[0107] In addition, in the above-described embodiment, an example in which the moving mechanism 22 of the screw tightening unit 20 is an orthogonal robot including the X-axis drive unit 41 and the Y-axis drive unit 42 has been shown. However, the moving mechanism 22 may be other than an orthogonal robot. The moving mechanism 22 may be, for example, a vertically articulated robot or a horizontally articulated robot. Even in that case, since it is not necessary to alternately change the posture of the work head 21 between downward and upward, the time required for the screw tightening work can be shortened accordingly.

Explanation of Signs

[0108] 10... Mounting unit, 20... Screw tightening unit, 21... Working head, 22... Moving mechanism, 23... Screw supply device, 24... Feeding mechanism, 25... Feeding path, 30... Nozzle, 32... Holding part, 32A... Fixed arm, 32B... Movable arm, 33... Driving part, 34... Hinge mechanism, 35... Nozzle body, 40... Head support member, 41... X-axis driving part, 41A... Screw shaft, 41B... Belt pulley mechanism, 42... Y-axis driving part, 42A... Screw shaft, 42B... Belt pulley mechanism, 42C... Nut member, 43... X-axis guide part, 43A... X beam, 43B... X linear guide, 43C... Linear slider, 44... Y-axis guide part, 44A... Y linear guide, 50... Tool part, 51... Z-axis driving part, 52... θZ driving part, 53... Pneumatic part, 60... Delivery part, 61... Holding part, 62... Driving part, 62A... Bracket, 63... Connection part, 64... Holding chamber, 64A... Small diameter part, 65... Air passage, 71... Mounting part, 72... Movable plate, 73A... Support part, 73... Z screw shaft, 74... Z linear guide, 74A... Linear slider, 80... Driver tool, 81... Driver, 82... Holding cylinder, 82A... Upper end opening, 82B... Rib, 82C... Lower end opening, 83... Case part, 83A... Connector, 84... Spring member, 85... Spring receiver, 91... Nozzle part, 92... Suction driving part, 92A... Lifting driving part, 92B... Horizontal driving part, 93... Inlet holding part, 94... Changeover valve, 95... Nozzle holding member, 100... Substrate working device, 102... Installation part, 103... Substrate transfer device, 104... Substrate holding device, 106... Mounting head, 107... Mounting head moving mechanism, 107a... X-axis guide rail, 107b... Y-axis guide rail, 109... X driving part, 110... Y driving part, 111... Component recognition device, 114... Base frame, 114A... Upper frame, 114B... Lower frame, 114C... Both ends, 114D... Central part, 120... Control device, 121... Control part, 122... Memory part, 140... Nozzle moving device, 150... Z driving part, 160... θZ driving part, 200... Component supply device, 300... Support tool, 301... Support surface, A1... Retracted position, A2... Delivery position, AT... Attachment part, B1... Screw extraction position, B2... Feeding position, C... Component, CH... Screw hole, ES... Screw setting position, P... Substrate, PJa... Component supply position, PJb... Working position, TH... Screw insertion hole.

Claims

1. a substrate holding device for holding a substrate at a working position; a mounting unit disposed above the substrate holding device for mounting components on the upper surface of the substrate held by the substrate holding device; a screw tightening unit disposed below the substrate holding device for performing screw tightening on the components mounted on the upper surface of the substrate from below the substrate, comprising: the screw tightening unit includes: a working head that acquires a screw and performs screw tightening while remaining in an upward-facing posture facing the lower surface of the substrate held by the substrate holding device; a moving mechanism for moving the working head to a screw mounting position; a substrate working device.

2. the screw tightening unit further includes a feeding mechanism for feeding screws to the working head through a feeding path; the substrate working device according to claim 1.

3. the feeding mechanism pneumatically pressure-feeds the screws into the feeding path; the substrate working device according to claim 2.

4. the working head has a tool part for tightening the screw and a transfer part for acquiring the screw from the feeding path and setting it to the tool part; the substrate working device according to claim 2.

5. the working head has a mounting part for detachably mounting a driver tool that engages with the screw; the substrate working device according to claim 1.

6. the mounting part is capable of mounting an extension tool used for other operations than screw tightening instead of the driver tool; the substrate working device according to claim 5.

7. the extension tool includes a support for contacting and supporting the lower surface of the substrate; the moving mechanism moves the working head so as to dispose the support at a support position corresponding to the component mounting position as the components are mounted by the mounting unit; the substrate working device according to claim 6.

8. the moving mechanism includes an X-axis driving part and a Y-axis driving part for moving the working head in the X-axis direction and the Y-axis direction orthogonal to each other within a plane along the lower surface of the substrate; the working head includes a tool part for tightening the screw and a Z-axis driving part for moving the tool part in the Z-axis direction orthogonal to the X-axis direction and the Y-axis direction; the substrate working device according to any one of claims 1 to 7.

Images