Resist composition, method for producing resist pattern, compound, and resin containing structural unit derived from compound

Abstract

To provide a resist composition, a resin and the like which allow a resist pattern having good CD uniformity to be produced.SOLUTION: The resist composition contains a resin containing a structural unit represented by formula (I) [where X1 represents a single bond, *-O-**, *-CO-O-** or the like; L1 represents a single bond or a substituted / unsubstituted hydrocarbon group, and -CH2- contained in the group may be substituted with -O-, -S-, -SO2- or -CO-; Ar represents an aromatic hydrocarbon group having an iodine atom, and the group may have a substituent other than an iodine atom; A1 represents a hydrocarbon group, the group may have a substituent, and -CH2- contained in the hydrocarbon group may be substituted with -O-, -CO-, -S- or -SO2-; R1 represents an H atom or an acid-labile group; and R2 represents a halogen atom, a haloalkyl group or the like].SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition, a method for producing a resist pattern using the resist composition, a compound, and a resin containing a structural unit derived from the compound, and the like.

Background Art

[0002] Patent Document 1 describes resist compositions containing resins having the following structural units, respectively. TIFF2025104294000001.tif43123 Patent Document 2 describes a resist composition containing a resin having the following structural unit. TIFF2025104294000002.tif4334 Patent Document 3 describes a resist composition containing a resin having the following structural unit. TIFF2025104294000003.tif3930 Patent Document 4 describes a resist composition containing a resin having the following structural unit. TIFF2025104294000004.tif2360

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Patent Document 2

Patent Document 3

Patent Document 4

Summary of the Invention

Problems to be Solved by the Invention

[0004] An object of the present invention is to provide a resist composition that forms a resist pattern having better CD uniformity (CDU) than a resist pattern formed from the above resist composition.

Means for Solving the Problems

[0005] The present invention includes the following inventions. 〔1〕A resist composition containing a resin containing a structural unit represented by formula (I). TIFF2025104294000005.tif40117[In formula (I), R 0 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X 1 represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR 3 -**, *-NR 3 -CO-O-**, *-O-CO-NR 3 -** or *-Ax-Ph-Ay-**. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R 0 is bonded. L 1 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms having an iodine atom, and the aromatic hydrocarbon group may have a substituent other than an iodine atom. A 1represents a hydrocarbon group having 1 to 20 carbon atoms, which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. R 1 represents a hydrogen atom or an acid-labile group. R 2 represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, or R 1 combines with to form a cyclic hydrocarbon group having 3 to 12 carbon atoms. The hydrocarbon group and the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the haloalkyl group and the hydrocarbon group may be replaced by -O- or -CO-, -S-, -SO2-. m2 represents any integer from 0 to 4, and when m2 is 2 or more, a plurality of R 2 may be the same as or different from each other. m3 represents 0 or 1. m4 represents any integer from 1 to 4, and when m4 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. [2] X 1 is a single bond or a group represented by formula (X 1 -1) to formula (X 1 -10) as described in [1] of the resist composition. TIFF2025104294000006.tif44166 [In formula (X 1 -1) to formula (X 1 -10), *, ** are bonding sites, and * represents the bonding site with the carbon atom to which R 0 is bonded. Rx represents a halogen atom, a hydroxy group, a fluoroalkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms or an alkoxy group having 1 to 6 carbon atoms. mx represents any integer from 0 to 4. X 20 represents -O- or -NR 3 -. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. [3] X1 is a single bond or a group represented by formula (X 1 -1’), formula (X 1 -3’) to formula (X 1 -10’) as described in [1] or [2]. TIFF2025104294000007.tif43120[In formula (X 1 -1’), formula (X 1 -3’) to formula (X 1 -10’), *, ** are bonding sites, and ** represents the bonding site with L 1 .] [4] L 1 is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-- or -CO-). The resist composition according to any one of [1] to [3]. [5] The acid-labile group represents a group represented by formula (5a), or OR 1 and R 2 together form a group having an acetal ring structure. The resist composition according to any one of [1] to [4]. TIFF2025104294000008.tif33102[In formula (5a), L 10 represents a single bond or an alkanediyl group having 1 to 6 carbon atoms. m51 and m52 each independently represent 0 or 1. R aa1 and R aa2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms. X a represents a single bond, an oxygen atom, a sulfur atom or a methylene group. R aa3 represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2 and R aa3is bonded to each other, -C-(X a ) m52 - together represents a group forming a ring having 3 to 20 carbon atoms. The -CH2- contained in the hydrocarbon group and the group forming the ring may be replaced by -O- or -S-, and the hydrocarbon group and the group forming the ring may have a substituent. * represents a bonding site with an oxygen atom.] 〔6〕A 1 is ***-X 01 -L 01 - or ***-L 01 -X 01 -, and X 01 represents -O-, -CO-, -S- or -SO2-, L 01 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, *** represents a bonding site with Ar The resist composition according to any one of 〔1〕~〔5〕. 〔7〕X 01 is an oxygen atom The resist composition according to 〔6〕. 〔8〕L 01 is an alkanediyl group having 1 to 6 carbon atoms The resist composition according to 〔6〕 or 〔7〕. 〔9〕The group represented by formula (5a) is the group represented by formula (5a-A), The resist composition according to any one of 〔5〕~〔8〕. TIFF2025104294000009.tif3172[In formula (5a-A), R aa1A and R aa2A each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, X a represents a single bond, an oxygen atom, a sulfur atom or a methylene group. R aa3A represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2A and R aa3A are bonded to each other, -C-X a - together represents a group forming a ring having 3 to 20 carbon atoms. The -CH2- contained in the hydrocarbon group and the group forming the ring may be replaced by -O- or -S-, and the hydrocarbon group and the group forming the ring may have a substituent. * represents a bonding site with an oxygen atom. 〔10〕The resist composition according to any one of 〔5〕~〔8〕, wherein the group represented by formula (5a) is a group represented by formula (5a-B). TIFF2025104294000010.tif2560 [In formula (5a-B), R aa1B , R aa2B and R aa3B each independently represents a hydrocarbon group having 1 to 20 carbon atoms, or R aa2B and R aa3B are bonded to each other, and together with the carbon atom to which R aa2B and R aa3B are bonded, form an alicyclic hydrocarbon group having 3 to 20 carbon atoms. The -CH2- contained in the hydrocarbon group and the alicyclic hydrocarbon group may be replaced by -O- or -S-, and the hydrocarbon group and the alicyclic hydrocarbon group may have a substituent. * represents a bonding site with an oxygen atom. 〔11〕The resist composition according to any one of 〔1〕~〔10〕, wherein the resin further contains at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). TIFF2025104294000011.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), L a01 , L a1 and L a2 each independently represents -O- or *-O-(CH2) k1 -CO-O-, k1 represents an integer of 1 to 7, and * represents a bonding site with -CO-. R a01 , R a4 and R a5Each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1’ represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1’ represents any integer from 0 to 3. TIFF2025104294000012.tif32118[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17 represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO-, or -NR a18 -. R a18represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and the -CH2- contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5. When na1 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4. When na11 is 2 or more, the plurality of R a17 may be the same as or different from each other. mc represents any integer from 0 to 2.] TIFF2025104294000013.tif4558[In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH2) h3 -CO-L 54 -, h3 represents any integer from 1 to 4, and * represents the bonding site with L 51 L 51 L 52 L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1’ represents any integer from 0 to 3.] TIFF2025104294000014.tif3479[In formula (a1-6), R a61 ​represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a62 , R a63 and R a64 each independently represent an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents the bonding site to -Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 -, or *-CO-O-L a62 -, where * represents the bonding site to -Ar, and L a61 and L a62 each independently represent an alkanediyl group having 1 to 4 carbon atoms. Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent. The resist composition according to any one of [1] to

[11] , wherein the resin further contains a structural unit represented by formula (a2-A). TIFF2025104294000015.tif30128[In formula (a2-A), R a2 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a27 represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group. A a21represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a2 represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5, and when nA2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, the plurality of R a27 may be the same as or different from each other. mc represents any integer from 0 to 2.]

[13] Further, a resist composition according to any one of [1] to

[12] , comprising an acid generator, wherein the acid generator contains a salt represented by formula (B1). TIFF2025104294000016.tif1395[In formula (B1), L b1 represents a single bond or an optionally substituted (nb1 + 1)-valent hydrocarbon group, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a single bond or an optionally substituted divalent hydrocarbon group having 1 to 24 carbon atoms, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents an optionally substituted methyl group or an optionally substituted cyclic hydrocarbon group having 3 to 24 carbon atoms, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation.] The resist composition according to any one of [1] to

[13] , further containing a salt that generates an acid having a lower acidity than the acid generated from the acid generator. 〔15〕(1) A step of applying the resist composition according to any one of [1] to

[14] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for manufacturing a resist pattern including the above steps. 〔16〕A resin containing a structural unit represented by the above formula (I). 〔17〕A compound represented by the formula (I0). TIFF2025104294000017.tif38115 [In the formula (I0), all symbols have the same meanings as described above respectively.]

Effects of the Invention

[0006] By using the resist composition of the present invention, a resist pattern can be manufactured with good CD uniformity (CDU).

Modes for Carrying Out the Invention

[0007] In this specification, the “(meth)acrylic monomer” means “at least one of an acrylic monomer and a methacrylic monomer”. Expressions such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in this specification, those that can take both a linear structure and a branched structure may be either of them. For -CH2- contained in a hydrocarbon group etc., it may be -O-, -S-, -CO-, -SO-, -NR X-When replaced by -(X is any sign) or -SO2-, the same examples apply to each group, and the number of carbon atoms before replacement is defined as the number of carbon atoms in a hydrocarbon group or the like. The "combined group" means a group formed by combining two or more of the exemplified groups, and the valences of these groups may be appropriately changed depending on the bonding form. "Derived from" or "induced from" means that the polymerizable C=C bond contained in the molecule becomes a single bond (-C-C-) by polymerization. When stereoisomers exist, all stereoisomers are included. The "acid-labile group" means a group having a leaving group, and when contacted with an acid (e.g., trifluoromethanesulfonic acid, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., hydroxy group or carboxy group, etc.). The base-labile group means a group that, when contacted with a base (e.g., trimethylamine, tetramethylammonium hydroxide, etc.), the leaving group is eliminated to form a hydrophilic group (e.g., carboxy group or hydroxy group, etc.). Depending on the number of substituents and the like, any position and number of hydrogen atoms contained in each group may be replaced by a bonding site. The number of carbon atoms in the substituent is not included in the number of carbon atoms of the group to be substituted. In this specification, the "solid content of the resist composition" means the total of the components excluding the solvent (E) described below from the total amount of the resist composition.

[0008] 〔Resist Composition〕 The resist composition of the present invention contains a resin (hereinafter sometimes referred to as "resin (A)") containing a structural unit represented by formula (I) (hereinafter sometimes referred to as "structural unit (I)"). Furthermore, it may contain an acid generator (hereinafter sometimes referred to as "acid generator (B)"). The resist composition of the present invention may further contain a resin other than resin (A). The resist composition of the present invention preferably contains a quencher (hereinafter sometimes referred to as "quencher (C)") such as a salt that generates an acid with a lower acidity than the acid generated from the acid generator, and preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0009] <Resin (A)> Resin (A) is a resin containing structural unit (I). 〈Structural unit (I)〉 Structural unit (I) is represented by the following formula. TIFF2025104294000018.tif40117[In formula (I), all symbols have the same meanings as described above respectively.]

[0010] In formula (I), R 0 Examples of the alkyl group of include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, etc. Preferably, it is an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and still more preferably a methyl group or an ethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R 0 Examples of the halogen atom of include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 0 Examples of the alkyl group having a halogen atom of include a fluorinated alkyl group, a chlorinated alkyl group, a brominated alkyl group, an iodinated alkyl group, etc. Specifically, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, a periodomethyl group, etc. are included. R 0 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. R 3 The alkyl group of is the same as the alkyl group of. 0 Examples of the alkyl group of include the same alkyl groups as those of.

[0011] In formula (I), X1 In the case of a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025104294000019.tif3351[In formula (X10), Ax represents the bonding species with the carbon atom to which R 0 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Ay represents the bonding species that binds to L 1 and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Rx represents a halogen atom, a hydroxy group, a C1-C6 fluoroalkyl group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents any integer from 0 to 4, and when mx is an integer of 2 or more, the plurality of Rx may be the same as or different from each other.] When either Ax or Ay is a single bond, the other is preferably one or more selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR 3 -. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. X 1 Examples of [include, for example, a single bond, and groups represented by the following formula (X 1 -1) to formula (X 1 -10). * represents the bonding position with the carbon atom to which R 0 is bonded. ** represents the bonding position that binds to L 1 . TIFF2025104294000020.tif44166[In Formula (X 1 -1) to Formula (X 1 -10), all symbols have the same meanings as described above respectively.] In Formula (X 1 -1) to Formula (X 1 -10), specific examples of the groups represented thereby include the following groups. TIFF2025104294000021.tif87163Among them, X 1 is preferably a single bond or a group represented by any of Formula (X 1 -1’) and Formula (X 1 -3’) to Formula (X 1 -10’), more preferably a single bond or a group represented by any of Formula (X 1 -1’), Formula (X 1 -4’), Formula (X 1 -5’), Formula (X 1 -6’) and Formula (X 1 -10’), and even more preferably a single bond, a group represented by Formula (X 1 -1’), a group represented by Formula (X 1 -5’) or a group represented by Formula (X 1 -6’).

[0012] L 1 Examples of the hydrocarbon group in L include chain hydrocarbon groups such as alkanediyl groups, alicyclic hydrocarbon groups which are monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.), and aromatic hydrocarbon groups, and groups formed by combining two or more of these groups (for example, hydrocarbon groups formed from alicyclic hydrocarbon groups and chain hydrocarbon groups) may also be used.Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms of the chain hydrocarbon group is preferably from 1 to 18, more preferably from 1 to 12, still more preferably from 1 to 9, even more preferably from 1 to 6, and even more preferably from 1 to 4.

[0013] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups. The bonding site can be at any position. TIFF2025104294000022.tif47169 As the monocyclic alicyclic hydrocarbon group, cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, and cyclooctane-1,5-diyl group are preferable. As the polycyclic alicyclic hydrocarbon group, norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, and adamantane-2,6-diyl group are preferable. The number of carbon atoms of the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, and still more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10. Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, and a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group. In the combination, two or more of the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may be combined with each other. Also, any of the groups may be bonded to X 1 . Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (for example, *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), and a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-). Examples of a group combining an aromatic hydrocarbon group and an aliphatic hydrocarbon group include a group in which an aromatic hydrocarbon group is bonded to an aliphatic hydrocarbon group (e.g., *-aliphatic hydrocarbon group-aromatic hydrocarbon group-), a group in which an aliphatic hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group-aliphatic hydrocarbon group-), a group in which an aromatic hydrocarbon group and an aliphatic hydrocarbon group are bonded to an aliphatic hydrocarbon group (e.g., *-aliphatic hydrocarbon group-aromatic hydrocarbon group-aliphatic hydrocarbon group-), and the like. Examples of a group combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group include a group in which an aromatic hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-aromatic hydrocarbon group-), a group in which an alicyclic hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed (e.g., the following groups (the bonding site is at an arbitrary position)), and the like. TIFF2025104294000023.tif22166 Examples of a group combining an alicyclic hydrocarbon group, an aliphatic hydrocarbon group, and an aromatic hydrocarbon group include a group in which an aromatic hydrocarbon group and an aliphatic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-aromatic hydrocarbon group-aliphatic hydrocarbon group-), a group in which an alicyclic hydrocarbon group and an aliphatic hydrocarbon group are bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group-alicyclic hydrocarbon group-aliphatic hydrocarbon group-), and the like. * is X 1 represents the bonding site with.

[0014] L 1 In the hydrocarbon group having 1 to 36 carbon atoms in L, -CH2- may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms in L is replaced by -O-, -S-, -SO2- or -CO-, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the hydrocarbon group. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkoxy group (a group in which any -CH2- contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which any -CH2 contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which any -CH2-CH2- contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which any -CH2- contained in an alkyl group is replaced by -CO-), and an alkylsulfonyl group (a group in which any -CH2- contained in an alkyl group is replaced by -SO2-), an alkylcarbonyloxy group (a group in which any -CH2-CH2- in the alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which any -CH2-CH2-CH2- in the alkyl group is replaced by -O-CO-O-), an alkanedioxy group (a group in which any -CH2- in the alkanedioxy group is replaced by -O-), an alkanedioxycarbonyl group (a group in which any -CH2-CH2- in the alkanedioxy group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which any -CH2-CH2- in the alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), an oxy group (a group in which -CH2- in the methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- in the methylene group is replaced by -CO-), a thio group (a group in which -CH2- in the methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- in the methylene group is replaced by -SO2-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyl oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like can be mentioned.

[0015] Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, octyloxy group, 2-ethylhexyloxy group, nonyloxy group, decyloxy group, undecyloxy group and the like. The carbon number of the alkoxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group, etc. The number of carbon atoms of the alkylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The alkoxycarbonyl group, alkylcarbonyl group, and alkylcarbonyloxy group represent groups in which a carbonyl group or a carbonyloxy group is bonded to the above-described alkyl group or alkoxy group. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group, etc. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl group, propionyl group, and butyryl group, etc. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group, etc. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy group, etc. The number of carbon atoms of the alkoxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group may be 2 to 17, preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group and the alkoxycarbonyloxy group may each be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 27 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanediyl-oxy group, butanediyl-oxy group, pentanediyl-oxy group and the like. The number of carbon atoms of the alkanediyl-oxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 28 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyl-oxy group include alkanediyl-carbonyl-oxy groups having 2 to 27 carbon atoms, such as a methylene-carbonyl-oxy group, an ethylene-carbonyl-oxy group, a propanediyl-carbonyl-oxy group, and a butanediyl-carbonyl-oxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group may be 2 to 17, preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl-oxy group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 27 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms in the alkanediyl-sulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 27 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propylene thio group. The number of carbon atoms in the alkanediylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 27 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 26 carbon atoms, such as a phenyloxy group.

[0016] Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. -O- or -CO- in the groups represented below may be replaced by -S- or -SO2-, respectively. The bonding site can be at any position. Examples of the group in which -CH2- contained in the group formed by condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025104294000025.tif26164

[0017] L 1 Examples of the substituent that L may have include a halogen atom and a cyano group. L 1When it is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, an alkanediyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L 1 When -CH2- contained in the chain hydrocarbon group contained in 1 is replaced by -O-, -CO-, -S- or -SO2-, L 1 substantially has substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. L 1 The substituent that L may have is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and even more preferably a methyl group or a fluorine atom.

[0018] L 1is preferably a single bond, an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-). More preferably, it is a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted aromatic hydrocarbon group having 6 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-). Even more preferably, it is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an optionally substituted aromatic hydrocarbon group having 6 to 14 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-).

[0019] Also, L1 is a single bond, *-L 12 - or *-L 12 -X 13 -L 13 -(L 12 represents a linear hydrocarbon group having 1 to 8 carbon atoms which may have a substituent, a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or a group combining a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. * represents X 1 represents the bonding site with X 13 represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents L 12 represents the bonding site with L 13 represents a single bond or a linear hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. It is also preferable that it is). In this case, L 1 is a single bond, a linear hydrocarbon group having 1 to 4 carbon atoms or *-L 4 -CO-O-(L 4 represents a linear hydrocarbon group having 1 to 4 carbon atoms, a cyclic hydrocarbon group having 3 to 18 carbon atoms, or a group combining a cyclic hydrocarbon group having 3 to 18 carbon atoms and a linear hydrocarbon group having 1 to 4 carbon atoms, the cyclic hydrocarbon group may have a substituent, -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the linear hydrocarbon group may be replaced by -O- or -CO-. * represents X 1 represents the bonding site with X). It is also preferable that it is a single bond or a methylene group In addition, the combinations of the chain hydrocarbon group and the cyclic hydrocarbon group (alicyclic hydrocarbon group or aromatic hydrocarbon group) here include *-chain hydrocarbon group - alicyclic hydrocarbon group or aromatic hydrocarbon group -, *-alicyclic hydrocarbon group or aromatic hydrocarbon group - chain hydrocarbon group -, *-chain hydrocarbon group - alicyclic hydrocarbon group or aromatic hydrocarbon group - chain hydrocarbon group -, etc. * represents X 1 represents the bonding site with L 12 L 13 and L 4 L 12 For the cyclic hydrocarbon group and the chain hydrocarbon group in L 13 L L 4 is preferably a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-). 4 -1), the group represented by the formula (L 4 -2), the formula (L4 a group represented by -3), or formula (L 4 -4), and more preferably a group represented by formula (L 4 -2) is even more preferred. * represents a bonding site. TIFF2025104294000026.tif3099 In the above formula (L 4 -1), formula (L 4 -2), formula (L 4 -3) or formula (L 4 -4), each group is more preferably a group represented by the following formula (L 4 -1’), formula (L 4 -2’), formula (L 4 -3’) or formula (L 4 -4’). TIFF2025104294000027.tif3199

[0020] Examples of the aromatic hydrocarbon group in Ar include, in the divalent case, arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. Examples of the aromatic hydrocarbon group in the trivalent case include benzene triyl group, naphthalene triyl group, anthracene triyl group, biphenyl triyl group, phenanthrene triyl group, etc. Examples of the aromatic hydrocarbon group in the tetravalent case include benzene tetrayl group, naphthalene tetrayl group, anthracene tetrayl group, biphenyl tetrayl group, phenanthrene tetrayl group, etc. Examples of the aromatic hydrocarbon group in the pentavalent case include benzene pentayl group, naphthalene pentayl group, anthracene pentayl group, biphenyl pentayl group, phenanthrene pentayl group, etc. Examples of the aromatic hydrocarbon group in the hexavalent case include benzene hexayl group, naphthalene hexayl group, anthracene hexayl group, biphenyl hexayl group, phenanthrene hexayl group, etc. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, still more preferably 6 to 10, and even more preferably 6.

[0021] The number of iodine atoms in Ar is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. Examples of substituents other than iodine atoms that Ar may have include a hydroxy group, a carboxy group, a halogen atom other than an iodine atom, a cyano group, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyl group having 2 to 13 carbon atoms, an alkylcarbonyloxy group having 2 to 13 carbon atoms, or a group formed by combining these. Examples of halogen atoms other than iodine atoms include a fluorine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a nonyl group. Examples of the alkoxy group having 1 to 12 carbon atoms include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and a dodecyloxy group. The alkoxycarbonyl group having 2 to 13 carbon atoms, the alkylcarbonyl group having 2 to 13 carbon atoms, and the alkylcarbonyloxy group having 2 to 13 carbon atoms represent a group in which a carbonyl group or a carbonyloxy group is bonded to the above-described alkyl group or alkoxy group. Examples of the alkoxycarbonyl group having 2 to 13 carbon atoms include a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group having 2 to 13 carbon atoms include an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group having 2 to 13 carbon atoms include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The substituent is preferably an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, a hydroxy group, a carboxy group or a halogen atom, more preferably an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a hydroxy group or a halogen atom, and even more preferably an alkyl group having 1 to 3 carbon atoms, an alkoxy group having 1 to 3 carbon atoms, a hydroxy group or a halogen atom. Ar is preferably an aromatic hydrocarbon group having 6 to 14 carbon atoms which may have a substituent, more preferably an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent, even more preferably an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent, and even more preferably a phenylene group which may have a substituent. The substituent is preferably a hydroxy group, a carboxy group, a halogen atom, an alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms, more preferably a hydroxy group, a halogen atom, an alkyl group having 1 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, and even more preferably a hydroxy group, a halogen atom, an alkyl group having 1 to 3 carbon atoms or an alkoxy group having 1 to 3 carbon atoms.

[0022] A 1 Examples of the hydrocarbon group include linear or branched chain hydrocarbon groups (e.g., alkanediyl groups, etc.), monocyclic or polycyclic alicyclic hydrocarbon groups, and aromatic hydrocarbon groups, and those obtained by combining two or more of these groups may also be used. Examples of the chain hydrocarbon group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and Examples of the branched alkanediyl group include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, etc. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, still more preferably 1 to 4, and still more preferably 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025104294000028.tif47168Specifically, monocyclic alicyclic hydrocarbon groups which are cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclooctane-1,5-diyl group, etc. and Polycyclic alicyclic hydrocarbon groups such as a spiro ring having a cycloalkyl group, a norbornyl group or an adamantyl group each having a cycloalkyl group spiro-bonded thereto, such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a spirocyclohexane-1,2’-cyclopentane, a spiroadamantane-2,3’-cyclopentane group, etc. are included. The number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 16, still more preferably 3 to 12, and even more preferably 3 to 10. Examples of the aromatic hydrocarbon group include aromatic hydrocarbon groups such as arylene groups such as a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, etc. The number of carbon atoms in the aromatic hydrocarbon group is preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10.

[0023] Examples of the group formed by combining two or more groups include a group formed by combining an alicyclic hydrocarbon group and an alkanediyl group, a group formed by combining an aromatic hydrocarbon group and an alkanediyl group, and a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. In the combination, two or more of the chain hydrocarbon group, alicyclic hydrocarbon group, and aromatic hydrocarbon group may be combined. Also, any group may be bonded to the benzene ring. Examples of the group formed by combining an alicyclic hydrocarbon group and an alkanediyl group include, for example, -divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent alicyclic hydrocarbon group-, etc. Examples of the group formed by combining an aromatic hydrocarbon group and an alkanediyl group include, for example, -divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-alkanediyl group-, -alkanediyl group-divalent aromatic hydrocarbon group-, etc. Examples of the group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include -aromatic hydrocarbon group-alicyclic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-, -alicyclic hydrocarbon group-aromatic hydrocarbon group-alicyclic hydrocarbon group-, etc.

[0024] A 1 In A, when -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is defined as the total number of carbon atoms of the hydrocarbon group. Also, the number may be one or two or more, but is preferably one to three. Examples of the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include the same groups as those in which -CH2- contained in the hydrocarbon group of L 1 is replaced by -O-, -CO-, -S- or -SO2-. A 1 Examples of the substituent that the hydrocarbon group of A may have include the same groups as those exemplified as the substituent that the aromatic hydrocarbon group of Ar may have (including an iodine atom).

[0025] A 1 is preferably a hydrocarbon group having 1 to 20 carbon atoms (the hydrocarbon group may have a substituent, and one of -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-). More preferably, A 1 is***-L 011 -X 01 -L 012 - is (X 01 represents -O-, -CO-, -S- or -SO2-. 011 and L 012 each independently represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms. 011 and L 012 The total number of carbon atoms with A is 0 to 18. *** represents a bonding site with a benzene ring. 1 is***-X 01 -L 01 -or***-L 01 -X 01 - is (X 01 represents -O-, -CO-, -S- or -SO2-. 01 represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms. *** represents S + It is more preferable that A represents the bonding site with the benzene ring to which it is bonded. 1 It is preferred that the group has no substituents other than the substitution with -O-, -CO-, -S- or -SO2-. L 011 , L 012 and L 01 The hydrocarbon group having 1 to 18 carbon atoms (the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) may be a hydrocarbon group having 1 to 18 carbon atoms, 1 Examples of the groups include the same groups as those listed in the above. X 01 is preferably -O- or -S-, and more preferably -O-. L 011 , L 012 and L 01is each independently preferably a single bond or a hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably a single bond or a chain hydrocarbon group having 1 to 9 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), still more preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), even more preferably a single bond or an alkanediyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and even still more preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, a single bond, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, a carbonyl group, a carbonyloxy group, a carbonyloxymethylene group, an ethyleneoxy group, a methylenecarbonyloxymethylene group, an ethyleneoxycarbonyl group are preferable, and a single bond, a methylene group, a carbonyl group are more preferable.

[0026] R 2 Examples of the halogen atom of 2 include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like. R 2The C1-C12 haloalkyl group represents an alkyl group having 1 to 12 carbon atoms and a halogen atom, and examples thereof include a C1-C12 fluoroalkyl group, a C1-C12 chloroalkyl group, a C1-C12 bromoalkyl group, and a C1-C12 iodoalkyl group. Examples of the haloalkyl group include a C1-C12 perfluoroalkyl group (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, a nonafluorobutyl group, etc.), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. R 2 Examples of the C1-C18 hydrocarbon group of 2 include chain hydrocarbon groups such as alkyl groups and alkanediyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. The alkyl group is a straight-chain or branched alkyl group, and examples thereof include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, and a dodecyl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and Examples of the branched alkanediyl group include an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, etc. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms in the chain hydrocarbon group is preferably from 1 to 12, more preferably from 1 to 9, still more preferably from 1 to 6, even more preferably from 1 to 4, and even more preferably from 1 to 3. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and examples thereof include the groups represented below. The bonding site can be at any position. TIFF2025104294000029.tif46168Specifically, examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, and a cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include cycloalkyl groups such as a decahydronaphthyl group, an adamantyl group, a norbornyl group, a spirocyclohexane-1,2’-cyclopentane, and a spiroadamantane-2,3’-cyclopentane group, a norbornyl group or an adamantyl group, and a spiro ring having a cycloalkyl group bonded thereto by spiro bonding. The number of carbon atoms in the alicyclic hydrocarbon group is preferably from 3 to 18, more preferably from 3 to 16, and still more preferably from 3 to 12. Examples of the aromatic hydrocarbon group include a phenyl group, a naphthyl group, a biphenyl group, an anthryl group, a phenanthryl group, and a binaphthyl group. The number of carbon atoms in the aromatic hydrocarbon group is preferably from 6 to 18, more preferably from 6 to 14, and still more preferably from 6 to 10.

[0027] Examples of the group formed by combination include a group combining an aromatic hydrocarbon group and an aliphatic hydrocarbon group (e.g., aromatic hydrocarbon group - alkane diyl group - *, alkyl group - aromatic hydrocarbon group - *, alkyl group - aromatic hydrocarbon group - alkane diyl group - *, and -CH2- contained in the alkane diyl group and alkyl group may be replaced by -O-, -CO-, -S- or -SO2-), a group combining an alicyclic hydrocarbon group and an aliphatic hydrocarbon group (e.g., alicyclic hydrocarbon group - alkane diyl group - *, alkyl group - alicyclic hydrocarbon group - *, alkyl group - alicyclic hydrocarbon group - alkane diyl group - *, and -CH2- contained in the alkane diyl group and alkyl group may be replaced by -O-, -CO-, -S- or -SO2-), and a group combining an aromatic hydrocarbon group and an alicyclic hydrocarbon group (e.g., aromatic hydrocarbon group - alicyclic hydrocarbon group - *, alicyclic hydrocarbon group - aromatic hydrocarbon group - *). * represents a bonding site. Examples of the aromatic hydrocarbon group - alkane diyl group - * include aralkyl groups such as benzyl group and phenethyl group. Examples of the alkyl group - aromatic hydrocarbon group - * include tolyl group, xylyl group, cumenyl group and the like. Examples of the alicyclic hydrocarbon group - alkane diyl group - * include cycloalkylalkyl groups such as cyclohexylmethyl group, cyclohexylethyl group, 1-(adamantan-1-yl)methyl group, 1-(adamantan-1-yl)-1-methylethyl and the like. Examples of the alkyl group - alicyclic hydrocarbon group - * include cycloalkyl groups having an alkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, 2-alkyladamantan-2-yl group and the like. Examples of the aromatic hydrocarbon group - alicyclic hydrocarbon group - * include phenylcyclohexyl group and the like. Examples of the alicyclic hydrocarbon group - aromatic hydrocarbon group - * include cyclohexylphenyl group and the like. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups and aliphatic hydrocarbon groups may be combined respectively. Also, any group may be bonded to the benzene ring.

[0028] R 2 When -CH2- contained in the haloalkyl group or hydrocarbon group represented by is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement shall be the total number of carbon atoms of the haloalkyl group or the hydrocarbon group. Also, the number may be one or two or more. Examples of groups in which -CH2- contained in a haloalkyl group and a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is-CO-replaced group), alkanediylcarbonyloxy group (where any -CH2-CH2- at any position in the alkanediyl group is replaced by -CO-O-), alkanediylthio group (where any -CH2- at any position in the alkanediyl group is replaced by -S-), alkanediylsulfonyl group (where any -CH2- at any position in the alkanediyl group is replaced by -SO2-), cycloalkoxy group, cycloalkylalkoxy group, alkoxycarbonyloxy group, aromatic hydrocarbon group-carbonyl-oxy group, aromatic hydrocarbon group-carbonyl group, aromatic hydrocarbon group-oxy group, haloalkoxy group (where any -CH2- at any position in the haloalkyl group is replaced by -O-), haloalkoxycarbonyl group (where any -CH2-CH2- at any position in the haloalkyl group is replaced by -O-CO-), haloalkylcarbonyl group (where any -CH2- at any position in the haloalkyl group is replaced by -CO-), haloalkylcarbonyloxy group (where any -CH2-CH2- at any position in the haloalkyl group is replaced by -CO-O-), a group formed by combining two or more of these groups, etc. can be mentioned. As the group in which -CH2- contained in the haloalkyl group and the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, L 1 The groups similar to the groups in which -CH2- contained in the hydrocarbon group of L is replaced by -O-, -CO-, -S- or -SO2- or the groups in which one or more hydrogen atoms contained in those groups are replaced by halogen atoms can be mentioned. Also, as the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S- or -CO-, L 1 The groups similar to the groups in which -CH2- contained in the hydrocarbon group of L is replaced by -O-, -CO-, -S- or -SO2- can be mentioned.

[0029] R 2 The substituents that the hydrocarbon group of R may have include a halogen atom and a cyano group. R 2 By replacing -CH2- contained in R with -O-, -S-, -CO or -SO2, substantially, R 2can have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, etc. Further, R 2 When it is a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with an alkyl group, the alkyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. R 2 is preferably a halogen atom, an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), a haloalkyl group having 1 to 4 carbon atoms, more preferably an iodine atom, a fluorine atom, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 4 carbon atoms, a carboxyl group or a fluoroalkyl group having 1 to 4 carbon atoms, and even more preferably an iodine atom, a fluorine atom, a hydroxy group, a methoxy group, an ethoxy group, a carboxyl group or a perfluoroalkyl group having 1 to 3 carbon atoms. R 2 When R 1 combines with R 2 to form a cyclic hydrocarbon group having 3 to 12 carbon atoms, examples of the group are the same as the groups exemplified as the hydrocarbon group of R 2 Examples of the substituent of the cyclic hydrocarbon group are also the same as the substituents of the hydrocarbon group of R Further, R 2 may together with OR 1 form a cyclic hydrocarbon group, or OR 1 and R 2 may together form a group having an acetal ring structure. OR 1 and R 2 When they together form a cyclic hydrocarbon group, examples of the group include the group represented by formula (3a) (hereinafter, sometimes referred to as "group (3a)") and the like. TIFF2025104294000030.tif4260[In formula (3a), R ab1 and R ab2 each independently represent a hydrogen atom, an alkyl group having 1 to 8 carbon atoms, or an alicyclic hydrocarbon group having 3 to 20 carbon atoms, or Rab1 and R ab2 are bonded to each other to form an alicyclic hydrocarbon group having 3 to 20 carbon atoms together with the carbon atoms to which they are bonded, and the -CH2- contained in the alkyl group and the alicyclic hydrocarbon group may be replaced by -O- or -CO-. m31 and m32 each independently represent 0 or 1. * represents the bonding site with the benzene ring.] R ab1 and R ab2 Examples of the alkyl group and the alicyclic hydrocarbon group of R aa1 and R aa2 and R aa3 include the same groups as those of R Examples of the group (3a) include groups represented below. * represents the bonding site with the oxygen atom. TIFF2025104294000031.tif40114OR 1 When R 2 and R 1 together form a group having an acetal ring structure, examples include groups represented below. In this case, the acetal ring structure is fused with the benzene ring. The benzene ring here may have a substituent. * represents the bonding site with A 2 Examples of the substituent include the same groups as those exemplified as the substituent of R TIFF2025104294000032.tif40141

[0030] R 1 The acid-labile group of R TIFF2025104294000033.tif33102[In formula (5a), all symbols have the same meaning as described above.]

[0031] R aa1 and R aa2 The hydrocarbon group of R Raa3 The cyclic hydrocarbon group contained in represents an alicyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R aa1 and R aa2 Examples of the alkyl group of include a methyl group, an ethyl group, a propyl group, an n-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group, an n-octyl group and the like. R aa1 R aa2 and R aa3 The number of carbon atoms of the alkyl group of is preferably 1 to 6, more preferably 1 to 4, and still more preferably 1 to 3. R aa1 and R aa2 Examples of the alkenyl group of include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group. R aa1 R aa2 and R aa3 The alicyclic hydrocarbon group of may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include, for example, a decahydronaphthyl group, an adamantyl group, a norbornyl group and the following group (* represents a bonding site). R aa1 R aa2 and R aa3 The number of carbon atoms of the alicyclic hydrocarbon group of is preferably 3 to 16, more preferably 3 to 12. TIFF2025104294000034.tif9159R aa1 R aa2 and R aa3 Examples of the aromatic hydrocarbon group of include aryl groups such as a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a phenanthryl group and the like. R aa1 R aa2 and R aa3The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 14, more preferably 6 to 10.

[0032] R aa1 and R aa2 In R and R, examples of the group formed by combining two or more kinds of groups include the group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl group or cycloalkylalkyl group such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornil group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl group such as benzyl group, aromatic hydrocarbon group having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon group having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl group such as phenylcyclohexyl group, etc.

[0033] R aa2 and R aa3 When R and R are bonded to each other to form a ring together with the carbon atom etc. to which they are bonded, examples of -C(R)(R)-(X)- (R) include the following groups. The alicyclic hydrocarbon group preferably has 3 to 16 carbon atoms, more preferably 3 to 12 carbon atoms. * represents the bonding site with the oxygen atom or L. aa1 )(R aa2 )-(X a ) m52 -(R aa3 ) 10 represents the bonding site with the oxygen atom or L. TIFF2025104294000035.tif34164R aa1 R aa2 and R aa3 Examples of the hydrocarbon group contained in R and R and the substituent that the ring formed by bonding R and R to each other may have include hydroxy group, thiol group, halogen atom, cyano group, nitro group, etc. aa2 and R aa3 The substituent that the ring formed by bonding R and R to each other may have includes hydroxy group, thiol group, halogen atom, cyano group, nitro group, etc.

[0034] In formula (5a), *-C(R aa1 )(R aa2 )-(X) m52 -R aa3 Examples of the partial structure include the following groups. * represents the bonding site with an oxygen atom or L 10 . TIFF2025104294000036.tif76170

[0035] L 10 Examples of the alkanediyl group of include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, and a heptane-1,7-diyl group. L 10 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group, or an ethylene group. The group represented by formula (5a) is more preferably a group represented by formula (5a-A) or formula (5a-B). TIFF2025104294000037.tif35101[In formula (5a-A) and formula (5a-B), all symbols have the same meanings as described above.] R aa1A 、R aa1B 、R aa2A 、R aa2B 、R aa3A 、R aa3B represent groups which, as long as the upper limit of the number of carbon atoms allows, represent the same groups as those listed for R aa1 、R aa2 and R aa3 . When Ar is an aromatic hydrocarbon group having 6 carbon atoms which may have a substituent, the bonding position of A 1 to Ar may be any of the ortho, meta, and para positions with respect to the bonding position of L 1 . Among them, when m1 is 1, A 1 is preferably bonded to the para or meta position with respect to the bonding position of L 1 , more preferably bonded to the para position. When m1 is 2, A 1is L 1 For the bonding position of 1 , one is preferably bonded to the ortho or meta position, one is preferably bonded to the ortho or meta position, and more preferably two are bonded to the meta position. When m1 is 3, A 1 is L 1 For the bonding position of 1 , two are preferably bonded to the ortho or meta position, one is preferably bonded to the para or meta position, more preferably two are bonded to the meta position, and one is bonded to the para position. When m1 is 4, X 01 is L 1 For the bonding position of 1 , two are preferably bonded to the ortho or meta position, two are preferably bonded to the para or meta position, more preferably two are bonded to the ortho position, and two are bonded to the meta position. m1 is preferably 1, 2, 3, 4 or 5, more preferably 1, 2, 3 or 4, and even more preferably 1, 2 or 4. m2 is preferably 0, 1 or 2, and more preferably 0 or 2. OR 1 The bonding position of 1 to the benzene ring may be any of the ortho, meta and para positions with respect to the bonding position of A 1 1 . Among them, the bonding position of 1 to the benzene ring is preferably the ortho or para position with respect to the bonding position of A 1 1 . 1 is preferably the ortho or para position with respect to the bonding position of A R 2 The bonding position of 2 to the benzene ring may be any of the ortho, meta and para positions with respect to the bonding position of A 1 2 .

[0036] Examples of the structural unit (I) include the following structural units. TIFF2025104294000038.tif182153

[0037] TIFF2025104294000039.tif225165

[0038] TIFF2025104294000040.tif242165

[0039] TIFF2025104294000041.tif249152

[0040] TIFF2025104294000042.tif221154

[0041] TIFF2025104294000043.tif212159

[0042] TIFF2025104294000044.tif216150

[0043] TIFF2025104294000045.tif250144

[0044] TIFF2025104294000046.tif247151

[0045] TIFF2025104294000047.tif224161

[0046] TIFF2025104294000048.tif212156

[0047] TIFF2025104294000049.tif216163

[0048] TIFF2025104294000050.tif245154

[0049] TIFF2025104294000051.tif136147

[0050] TIFF2025104294000052.tif101153

[0051] TIFF2025104294000053.tif249155

[0052] TIFF2025104294000054.tif227155

[0053] TIFF2025104294000055.tif218162

[0054] TIFF2025104294000056.tif242160

[0055] TIFF2025104294000057.tif216151

[0056] TIFF2025104294000058.tif101164

[0057] In the structural units represented by Formula (I-1) to Formula (I-280), R in Formula (I) 0 Structural units in which the methyl group corresponding to is a hydrogen atom or the like or the hydrogen atom is replaced by a methyl group or the like can also be cited as specific examples of the structural unit (I). Among them, the structural units represented by Formula (I-1) to Formula (I-16), Formula (I-33) to Formula (I-40), Formula (I-45) to Formula (I-64), Formula (I-85) to Formula (I-116), Formula (I-125) to Formula (I-196), and Formula (I-205) to Formula (I-272) are preferred. The content rate of the structural unit (I) is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, based on all the structural units in the resin (A). Also, it is 100 mol% or less, preferably 90 mol% or less, more preferably 80 mol% or less, still more preferably 70 mol% or less. Specifically, 1 to 90 mol% is cited, preferably 1 to 80 mol%, more preferably 3 to 70 mol%.

[0058] <Compound (I0)> The structural unit (I) is derived from a compound represented by Formula (I0) (hereinafter sometimes referred to as "compound (I0)"). TIFF2025104294000059.tif38115[In Formula (I0), all the symbols have the same meanings as described above.]

[0059] <Production method of compound (I0)> In compound (I0), X 1 is of the formula (X 1 -1), the formula (X 1-3’), formula (X 1 -4’) and (X 1 -8), a compound represented by any of them (hereinafter sometimes referred to as compound (I1)) can be obtained by reacting a compound represented by formula (I1-a) with carbonyldiimidazole in a solvent and then further reacting with a compound represented by formula (I-b). When R 1 is a hydrogen atom, it can be further produced by acid treatment. TIFF2025104294000060.tif63153 (In the formula, all symbols have the same meanings as described above. X 1A is a single bond, -O-, -Ar 1 - or -CO-O-Ar 1 -*, Ar 1 represents a 1,4-phenylene group. * represents the bonding site with the carbon atom of the carbonyl group.)

[0060] Examples of the solvent include tetrahydrofuran, chloroform, and acetonitrile. Examples of the acid include hydrochloric acid, p-toluenesulfonic acid, and trifluoromethanesulfonic acid. The reaction temperature is usually 0°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours. Examples of the compound represented by formula (I1-a) include compounds represented by the following formula, and they can be easily obtained from the market. TIFF2025104294000061.tif35166

[0061] Examples of the compound represented by formula (I-b) include compounds represented by the following formula, and they can be easily obtained from the market and can also be easily produced by known production methods. TIFF2025104294000062.tif160163

[0062] In compound (I0), X 1 is -O-, formula (X 1 -2’) or formula (X 1A compound represented by the group represented by (I2 - a) and a compound represented by (I - b) can be obtained by reacting them in a solvent in the presence of a base. TIFF2025104294000063.tif44163 (In the formula, all symbols have the same meanings as described above. X 1B represents a single bond, -Ar 1 - or -CO - O - Ar 1 -*. * represents the bonding site with the oxygen atom.)

[0063] Examples of the solvent include tetrahydrofuran, chloroform, and acetonitrile. Examples of the base include potassium hydroxide. The reaction temperature is usually 0°C to 80°C, and the reaction time is usually 0.5 hours to 24 hours. Examples of the compound represented by the formula (I2 - a) include compounds represented by the following formula, and they can be easily obtained from the market. TIFF2025104294000064.tif35161

[0064] In the compound (I0), X 1 is a group represented by the formula (X 1 - 6') or the formula (X 1 - 7') (compound represented by the formula (I3)) can be obtained by reacting the compound represented by the formula (I2 - a) with carbonyldiimidazole in a solvent and then further reacting with the compound represented by the formula (I - b). TIFF2025104294000065.tif43158 (In the formula, all symbols have the same meanings as described above. X 1B represents -Ar 1 - or -CO - O - Ar 1 -*. * represents the bonding site with the oxygen atom.) Examples of the solvent include tetrahydrofuran, chloroform, and acetonitrile. The reaction temperature is usually 0°C to 80°C, and the reaction time is usually 0.5 hours to 24 hours.

[0065] In compound (I0), X 1 is a single bond or *-CO-O-*, and L 1 is a single bond (hereinafter sometimes referred to as compound (I4)) can be obtained by reacting a compound represented by formula (I4-a) with a compound represented by formula (I4-b) under a base catalyst. TIFF2025104294000066.tif31153 (wherein all symbols have the same meanings as described above. X 1´ represents a single bond or *-CO-O-*. * represents the bonding site with the carbon atom to which R 0 is bonded.)

[0066] Examples of the base include sodium hydride and potassium carbonate. Examples of the solvent include tetrahydrofuran, chloroform, and acetonitrile. The reaction temperature is usually 0°C to 80°C, and the reaction time is usually 0.5 hour to 24 hours. Examples of the compound represented by formula (I4-a) include compounds represented by the following formula, and can be easily obtained from the market. TIFF2025104294000067.tif33123

[0067] Examples of the compound represented by formula (I4-b) include compounds represented by the following formula, and can be easily obtained from the market. TIFF2025104294000068.tif161164

[0068] In compound (I0), L 1is a group formed by combining an alkanediyl group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (however, -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-). A compound can be produced by replacing the compound represented by formula (I1-a) or the compound represented by formula (I2-a) with the compound represented by the following when synthesizing the compound represented by formula (I1) to formula (I3). TIFF2025104294000069.tif30151

[0069] The resin (A) may be an oligomer or polymer containing one kind of structural unit (I), or may be a copolymer containing two or more kinds of structural units (I). Further, the resin (A) may be a polymer containing one or more structural units other than the structural unit (I) in addition to the structural unit (I). Examples of the structural unit other than the structural unit (I) include a structural unit having an acid-labile group other than the structural unit (I) (hereinafter sometimes referred to as "structural unit (a1)"), a structural unit having a halogen atom which is a structural unit other than the structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having no acid-labile group (hereinafter sometimes referred to as "structural unit (s)"), a structural unit having a non-leaving hydrocarbon group (hereinafter sometimes referred to as "structural unit (a5)"), and other constitutional units known in the art. Here, the acid-labile group means a group having a leaving group, and the leaving group is eliminated by contact with an acid to form a hydrophilic group (for example, a hydroxy group or a carboxy group).

[0070] 〈Structural unit (a1)〉 The structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile group contained in the resin (A) etc. is preferably a group represented by formula (1) (hereinafter also referred to as group (1)) and / or a group represented by formula (2) (hereinafter also referred to as group (2)). TIFF2025104294000070.tif2298[In formula (1), Ra1 , R a2 and R a3 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site.] TIFF2025104294000071.tif2278[In formula (2), R a1’ and R a2’ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0071] R a1 , R a2 and R a3 Examples of the alkyl group for R R a1 , R a2 and R a3Examples of the alkenyl group in [the compound] include ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, and nonenyl group. R a1 , R a2 and R a3 The alicyclic hydrocarbon group in [the compound], R a1 , R a2 and R a3 can be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, and cyclooctyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group, and the following group (* represents the bonding site), etc. The number of carbon atoms of the alicyclic hydrocarbon group in R TIFF2025104294000072.tif10159R a1 , R a2 and R a3 is preferably 3 to 16. Examples of the aromatic hydrocarbon group in [the compound], R include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, and phenanthryl group. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and Ra2 When -C(R a1 )(R a2 )(R a3 ) is formed by the mutual connection of each other to form an alicyclic hydrocarbon group, the following groups can be mentioned. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025104294000073.tif27139

[0072] R a1’ 、R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. The alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and the group formed by combining these are the same as the groups mentioned for R a1 、R a2 and R a3 . R a2’ and R a3’ When they are mutually connected to form a heterocyclic group together with the carbon atom to which they are bonded and X, -C(R a1’ )(R a2’ )-X-R a3’ The following groups can be mentioned. * represents the bonding site. TIFF2025104294000074.tif19124R a1’ and R a2’ Among them, at least one is preferably a hydrogen atom. na’ is preferably 0.

[0073] Examples of the group (1) include the following groups. In formula (1), R a1 、R a2 and R a3 are alkyl groups, ma = 0, and na = 1. As the group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 、R a2together with the carbon atom to which they are attached form an adamantyl group, and R a3 is an alkyl group, ma = 0, and na = 1 group. In formula (1), R a1 and R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1 group. Specific examples of the group (1) include the following groups. * represents the bonding site. TIFF2025104294000075.tif151162

[0074] Specific examples of the group (2) include the following groups. * represents the bonding site. TIFF2025104294000076.tif55153

[0075] The monomer (a1) is preferably a monomer having an acid-labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid-labile group. Among the (meth)acrylic monomers having an acid-labile group, those having an alicyclic hydrocarbon group with 5 to 20 carbon atoms are preferably mentioned. If a resin (A) having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

[0076] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one or two structural units selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025104294000077.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meaning as above.]

[0077] R a01 , R a4 and R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a01 , R a4 and R a5 Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , Ra4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 、L a1 and L a2 is preferably an oxygen atom or *-O-(CH2) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 、R a03 and R a04 Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining these in R a1 、R a2 and R a3 are the same groups as those exemplified for R R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and groups combining these in R a1 、R a2 and R a3 are the same groups as those exemplified for R R a02 、R a03 、and R a04 The alkyl group in R R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, still more preferably a methyl group. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, still more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a02 、R a03 、R a04 、Ra6 and R a7 The number of carbon atoms of the alicyclic hydrocarbon group of is preferably 5 to 12, more preferably 5 to 10. R a02 、R a03 、R a04 、R a6 and R a7 The number of carbon atoms of the aromatic hydrocarbon group of is preferably 6 to 12, more preferably 6 to 10. For the group combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and alicyclic hydrocarbon group is 18 or less. For the group combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and R a7 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, and even more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1’ is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1’ is preferably 0 or 1.

[0078] Examples of the structural unit (a1-0) include structural units represented by any of formula (a1-0-1) to formula (a1-0-24) and structural units in which the methyl group corresponding to R in the structural unit (a1-0) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-0-1) to formula (a1-0-10), formula (a1-0-13), formula (a1-0-14), formula (a1-0-19) to formula (a1-0-24) are preferred. a01 Examples of the structural unit (a1-1) include structural units derived from the monomers described in JP-A-2010-204646. Among them, structural units represented by any of formula (a1-1-1) to formula (a1-1-7) and structural units in which the methyl group corresponding to R in the structural unit (a1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group are preferred, and structural units represented by any of formula (a1-1-1) to formula (a1-1-4) are more preferred. TIFF2025104294000078.tif119159

[0079] Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. a4 Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. TIFF2025104294000079.tif38168

[0080] Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. a5 Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. TIFF2025104294000080.tif92164

[0081] When the resin (A) contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content rate thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and still more preferably 50 mol% or more, based on all the structural units of the resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin (A) contains the structural unit (a1-0), the content rate thereof is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 25 mol% or more, still even more preferably 30 mol% or more, and still more preferably 35 mol% or more, based on all the structural units such as the resin (A). Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, it is 5 to 80 mol%, preferably 5 to 75 mol%, more preferably 10 to 70 mol%, still more preferably 10 to 65 mol%, and even more preferably 10 to 60 mol%. When the resin (A) contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of the resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and still even more preferably 20 to 70 mol%.

[0082] Examples of the structural unit having the group (2) in the structural unit (a1) include a structural unit represented by the formula (a1-4) (hereinafter, may be referred to as "structural unit (a1-4)"). TIFF2025104294000081.tif31118[In the formula (a1-4), all the symbols have the same meanings as described above.]

[0083] R a1 and R a17 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R a01 are the same as those exemplified by R of the formula (a1-0). R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a17Examples of the alkoxy group in [substance] include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a17 Examples of the alkoxyalkyl group in [substance] include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, still more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a17 Examples of the alkoxyalkoxy group in [substance] include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, still more preferably a methoxyethoxy group or an ethoxyethoxy group. R a17 Examples of the alkylcarbonyl group in [substance] include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and still more preferably an acetyl group. R a17 Examples of the alkylcarbonyloxy group in [substance] include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and still more preferably an acetyloxy group. Ra17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0084] A a11 Examples of the alkanediyl group of A include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms of the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, yet even more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of the alkyl group of R include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group and tert-butyl group. A a11 When -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NR a18 -, the number of carbon atoms before replacement is defined as the number of carbon atoms of the alkanediyl group. A a11The -CH2- contained in the alkanediyl group is replaced by -O-, -CO- or -NR a18 The groups replaced by - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group (where -CH2- contained in the methyl group is replaced by -NR a18 -), an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group (where any -CH2- at any position contained in the alkyl group is replaced by -NR a18 -), a peptide group (where -CH2-CH2- contained in the ethylene group is replaced by -CO-NR a18 -), an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediyl-carbonyl group, an alkanediyl-carbonyl-oxy group, an alkanediyl-sulfonyl group, an alkanediyl-thio group, an alkanediyl-amino group (where any -CH2- at any position contained in the alkanediyl group is replaced by -NR a18 -), etc. These replaced groups include those similar to those exemplified herein within the range allowed by the upper limit of the number of carbon atoms. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group, etc. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, A a11 The -CH2- contained in the alkanediyl group is replaced by -O-, -CO- or -NR a18 The groups replaced by - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a12 -CO-O-, *-O-CO-Aa12 -O-, *-O-A a12 -CO-O-, *-CO-O-A a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 - may be mentioned. Among them, *-CO-O-, *-CO-O-A a12 -CO-O-, *-O-A a12 -CO-O-, *-CO-NR a18 - is preferred. Here, A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a1 is bonded. The alkanediyl group of A a12 may include the same alkanediyl group as A a11 within the range allowed by the upper limit of the number of carbon atoms. A a11 is preferably a single bond, *-CO-O- or *-CO-O-A a12 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0085] R a34 、R a35 and R a36 The hydrocarbon groups in include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these. Examples of the alkyl group include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, etc. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents the bonding site). Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, phenanthryl group and the like. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group and the like), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group and the like), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group and the like), aryl-cycloalkyl groups such as phenylcyclohexyl group and the like. In particular, R a36 Examples thereof include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms formed by R and R bonding to each other together with the -C-O- to which they are bonded include, for example, the following groups. * represents the bonding site, and one is the bonding site with R a34 TIFF2025104294000083.tif15105

[0086] R a34 is preferably a hydrogen atom.​ R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, more preferably a methyl group or an ethyl group. R a36 's hydrocarbon group is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group formed by combining these, more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aralkyl group having 7 to 18 carbon atoms. R a36 The alkyl group and the alicyclic hydrocarbon group in are preferably unsubstituted. R a36 The aromatic hydrocarbon group in preferably has an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0087] -OC(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) is eliminated by contact with an acid (for example, p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 In the case of a benzene ring, it may be bonded to any of the o-position, m-position or p-position with respect to the bonding position of A a11 . Among them, it is preferable that at least one is bonded to the o-position or p-position, and more preferably bonded to the p-position. In the case of a naphthalene ring, when the bonding position of A a11 is at the 1-position, it may be bonded to any of the 2nd to 8th positions, and when the bonding position of A a11 is at the 2nd position, it may be bonded to any of the 1st and 3rd to 8th positions. Among them, when the bonding position of A a11 is at the 1st position, it is preferable that at least one is bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. When the bonding position of A a11 is at the 2nd position, it is preferable that it is bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0088] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-42) and the hydrogen atom corresponding to R in the structural unit (a1-4) a1 are replaced by a halogen atom, a haloalkyl group or an alkyl group, and more preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-5), formula (a1-4-10), formula (a1-4-13), formula (a1-4-14), formula (a1-4-19), and formula (a1-4-20). TIFF2025104294000084.tif228165

[0089] When the resin (A) contains the structural unit (a1-4), its content is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 7 to 70 mol%, still more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol% based on the total of all the structural units of the resin (A).

[0090] Examples of the structural unit derived from the (meth)acrylic monomer having the group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025104294000085.tif4558[In formula (a1-5), all the symbols have the same meanings as described above.] R a8 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R are the same as those exemplified for R of formula (a1-0). a01 In formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 ​Among them, it is preferable that one is -O- and the other is -S-. For s1, 1 is preferable. For s1', any integer from 0 to 2 is preferable. Z a1 is preferably a single bond or *-CH2-CO-O-.

[0091] Examples of the structural unit (a1-5) include structural units derived from the monomers described in JP-A-2010-61117. Among them, the structural units represented by Formula (a1-5-1) to Formula (a1-5-4) are preferable, and the structural unit represented by Formula (a1-5-1) or Formula (a1-5-2) is more preferable. When the resin (A) contains the structural unit (a1-5), the content thereof is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, even more preferably 10 mol% or more, still even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on all the structural units of the resin (A). Also, it is 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferable, 3 to 45 mol% is more preferable, 5 to 40 mol% is still more preferable, and 5 to 30 mol% is even more preferable.

[0092] Examples of the structural unit having the group (1) in the structural unit (a1) include the structural unit represented by Formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025104294000087.tif3479[In Formula (a1-6), all the symbols have the same meanings as described above.]

[0093] R a61Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include R of formula (a1-0). a01 Those similar to those exemplified by etc. can be mentioned. R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 、R a63 、R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group and the like. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and even more preferably a methyl group or an ethyl group. R a62 、R a63 and R a64 Examples of the cyclic hydrocarbon group in include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, and more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group and the like. Examples of the substituent which the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group and the like. R a62 and R a63 Examples of the ring formed by R a62 and R a63When -C(R a62 )(R a63 )(R a64 ) are bonded to each other to form a ring, the following groups can be mentioned. * represents the bonding site with an oxygen atom. The number of carbon atoms in the ring is preferably 3 to 16, more preferably 3 to 12. TIFF2025104294000088.tif33111

[0094] L a61 and L a62 Examples of the alkanediyl group having 1 to 4 carbon atoms in L L a61 and L a62 are each independently preferably a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, more preferably a single bond. X a62 is preferably a single bond or *-O-L 1 -, more preferably a single bond.

[0095] Examples of the aromatic hydrocarbon group having 6 to 20 carbon atoms in Ar include a phenylene group, a 1-naphthylene group, a 2-naphthylene group, a 1-anthrylene group, a 9-anthrylene group, a biphenylene group, a 1-phenanthrylene group, and a 2-phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group, or a methacryloyloxy group.

[0096] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, and a perfluorohexyl group. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group preferably has 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group preferably has 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group preferably has 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. Preferred substituents include a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms. More preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group. Even more preferred are a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, more preferably a phenylene group which may have a hydroxy group.

[0097] Examples of the structural unit (a1-6) include structural units represented by formula (a1-6-1) to formula (a1-6-44). Structural units represented by formula (a1-6-1) to formula (a1-6-9) are preferred, structural units represented by formula (a1-6-1), formula (a1-6-2), formula (a1-6-4), formula (a1-6-5), formula (a1-6-7), or formula (a1-6-8) are more preferred, and structural units represented by formula (a1-6-1) or formula (a1-6-2) are even more preferred. In the following structural units, R a61A structural unit in which a hydrogen atom corresponding to is replaced with a methyl group or the like, and in the following structural unit, R a61 A structural unit in which a methyl group corresponding to a61 is replaced with a hydrogen atom or the like is also included as the structural unit (a1-6). TIFF2025104294000089.tif152164

[0098] When the resin (A) contains the structural unit (a1-6), its content is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, still more preferably 10 mol% or more, even more preferably 20 mol% or more, still even more preferably 30 mol% or more, and even more preferably 40 mol% or more, based on all the structural units of the resin (A). Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, still more preferably 7 to 70 mol%, even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0099] In addition, examples of the structural unit (a1) also include the following structural units. TIFF2025104294000091.tif33167

[0100] When the resin (A) contains structural units represented by the formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of the resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferable, 15 to 90 mol% is more preferable, 20 to 85 mol% is still more preferable, 20 to 70 mol% is even more preferable, and 20 to 60 mol% is particularly preferable.

[0101] Further, examples of the structural unit (a1) also include the following structural units. TIFF2025104294000092.tif51120 When the resin (A) contains structural units represented by the formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more with respect to all the structural units of the resin (A). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferable, 15 to 55 mol% is more preferable, 20 to 50 mol% is still more preferable, 20 to 45 mol% is even more preferable, and 20 to 40 mol% is particularly preferable.

[0102] 〈Structural unit (s)〉 The structural unit(s) is / are derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer from which the structural unit(s) is / are derived, a monomer having no acid-labile group known in the resist field can be used. Preferably, the structural unit(s) has / have a hydroxy group, a carboxyl group or a lactone ring. By using a resin having a structural unit having a hydroxy group or a carboxyl group and no acid-labile group (hereinafter sometimes referred to as "structural unit (a2)") and / or a structural unit having a lactone ring and no acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved.

[0103] 〈Structural unit (a2)〉 The structural unit (a2) is a structural unit represented by the formula (a2) and has an alcoholic hydroxy group, a phenolic hydroxy group or a carboxy group. TIFF2025104294000093.tif4095[In the formula (a2), R a2 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A a21 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a28 -. R a28 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. L a21 represents a single bond or a hydrocarbon group having 1 to 28 carbon atoms, the hydrocarbon group may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-. L a22 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms which may have a fluorine atom, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. Na2 represents any integer from 1 to 5. When Na2 is 2 or more, a plurality of Ls a22 may be the same as or different from each other.]

[0104] R a2 Examples of the halogen atom in R include a fluorine atom, an iodine atom, a chlorine atom, a bromine atom, etc. R a2 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R a2 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0105] A a21Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group. The number of carbon atoms in the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, even more preferably 1 to 3, and even more preferably 1 or 2. R a28 Examples of the alkyl group include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, and tert-butyl group. A a21 When the -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28 -, the number of carbon atoms before replacement is regarded as the number of carbon atoms of the alkanediyl group. A a21 Examples of the group in which the -CH2- contained in the alkanediyl group of A is replaced by -O-, -CO- or -NR a28 - include hydroxy group, carboxy group, carbonyl group, oxy group, amino group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylamino group, peptide group, alkanediyl-oxy group, alkanediyl-oxycarbonyl group, alkanediyl-carbonyl group, alkanediyl-carbonyl-oxy group, alkanediyl-sulfonyl group, alkanediyl-thio group, alkanediyl-amino group, etc. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as methylamino group, ethylamino group, propylamino group, butylamino group, pentylamino group, hexylamino group, octylamino group and the like. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as methyleneamino group, ethyleneamino group, propyleneamino group and the like. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Among them, A a21 Examples of the group in which -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NR a28 - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a22 -CO-O-, *-O-CO-A a22 -O-, *-O-A a22 -CO-O-, *-CO-O-A a22 -O-CO-, *-O-CO-A a22 -O-CO-, *-CO-NR a28 -. Among them, *-CO-O-, *-CO-O-A a22 -CO-O-, *-O-A a22 -CO-O-, *-CO-NR a28 - are preferred. Here, A a22 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a2 is bonded. The alkanediyl group of A a22 includes alkanediyl groups similar to A a21 within the range allowed by the upper limit of the number of carbon atoms. A a21 is a single bond, *-CO-O- or *-CO-O-A a22It is preferably -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-.

[0106] L a21 The hydrocarbon group in L is a (na2 + 1)-valent hydrocarbon group, and examples thereof include linear or branched chain hydrocarbon groups, monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.) alicyclic hydrocarbon groups, and cyclic hydrocarbon groups such as aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. L a21 Examples of the chain hydrocarbon group of L include divalent to hexavalent chain hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, alkanepentayl groups, and alkanexayl groups. Examples of the alkanediyl group include, for example, the same alkanediyl groups as A a21 Examples of the alkanetriyl group include methanetriyl group, ethanetriyl group, propanetriyl group, butanetriyl group, pentanetriyl group, hexanetriyl group, heptanetriyl group, octanetriyl group, nonanetriyl group, decanetriyl group, undecanetriyl group, dodecanetriyl group, tridecanetriyl group, tetradecanetriyl group, pentadecanetriyl group, hexadecanetriyl group, and heptadecanetriyl group. Examples of the alkanetetrayl group include methanetetrayl group, ethanetetrayl group, propanetetrayl group, butanetetrayl group, pentanetetrayl group, hexanetetrayl group, heptanetetrayl group, octanetetrayl group, nonanetetrayl group, decanetetrayl group, undecanetetrayl group, dodecanetetrayl group, tridecanetetrayl group, tetradecanetetrayl group, pentadecanetetrayl group, hexadecanetetrayl group, and heptadecanetetrayl group. ​Examples of the alkanpentyl group include a methanepentyl group, an ethanepentyl group, a propanepentyl group, a butanepentyl group, a pentanepentyl group, a hexanepentyl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4. L a21 Examples of the monocyclic and polycyclic alicyclic hydrocarbon groups in L include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025104294000094.tif46168For example, divalent to hexavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkatriyl group, a cycloalkanetetrayl group, a cycloalkanpentyl group, a cycloalkanehexyl group, and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, a cyclooctane-1,5-diyl group, a cyclopropanetriyl group, a cyclobutanetriyl group, a cyclopentanetriyl group, a cyclohexanetriyl group, a cycloheptanetriyl group, a cyclooctanetriyl group, a cyclodecanetriyl group, a cyclopropanetetrayl group, a cyclobutanetetrayl group, a cyclopentanetetrayl group, a cyclohexanetetrayl group, a cycloheptanetetrayl group, a cyclooctanetetrayl group, a cyclodecanetetrayl group, and Examples of the polycyclic alicyclic hydrocarbon group include norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetril group, adamantanetril group, decahydronaphthalenetril group, bicyclo[3.3.0]octanetril group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site, and the like. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, even more preferably 3 to 12, still even more preferably 6 to 12, and particularly preferably 6 to 10. L a21 Examples of the aromatic hydrocarbon group in [X] include divalent to hexavalent aromatic hydrocarbon groups such as an arylene group, an arenetricyl group, an arenetetrayl group, an arenepentayl group, an arenexayl group, and the like. Specifically, examples include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, a phenanthrylene group, a benzenetricyl group, a naphthalenetricyl group, an anthracenetricyl group, a biphenylenetricyl group, a phenanthrenetricyl group, a benzenetetrayl group, a naphthalenetetrayl group, an anthracenetetrayl group, a biphenylenetetrayl group, a phenanthrenetetrayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site, and the like. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, even more preferably 6 to 12, and still even more preferably 6 to 10. Examples of the group formed by combining two or more groups include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, and the like. In the combination, two or more alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to A a21 and L a22 as well. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-),An alkanediylthio group (a group in which any -CH2- at any position contained in the alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyloxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. may be mentioned. Further, a group in which one or more hydrogen atoms of these groups are replaced at the bonding site, etc. may also be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and the like. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, and the like. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as a methoxycarbonyl group, an ethoxycarbonyl group, and a butoxycarbonyl group. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as an acetyl group, a propionyl group, and a butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as an acetyloxy group, a propionyloxy group, and a butyryloxy group. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as a butoxycarbonyloxy group. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as a methylsulfonyl group, an ethylsulfonyl group, and a propylsulfonyl group. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 27 carbon atoms, such as a methyleneoxy group, an ethyleneoxy group, a propanediioxy group, a butanediioxy group, and a pentanediioxy group. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 28 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 27 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-thio group include alkanediyl-thio groups having 1 to 27 carbon atoms, such as a methylene-thio group, an ethylene-thio group, and a propanediyl-thio group. The number of carbon atoms in the alkanediyl-thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 27 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms in the alkanediyl-sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0107] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 28 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0108] Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. Among the groups represented below, groups in which -O- is replaced by -S- and -CO- is replaced by -SO2- are also included. The bonding site can be at any position. Examples of the group in which -CH2- contained in the combined group is replaced by -O-, -S-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025104294000096.tif26164L a21 The hydrocarbon group in [group name] may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, an alkyl group having 1 to 16 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), an acryloyloxy group, or a methacryloyloxy group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L a21The hydrocarbon group in [ID] can have a substituent such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include an alkyl fluoride group, an alkyl chloride group, an alkyl bromide group, an alkyl iodide group, etc. For example, a chloromethyl group, a bromomethyl group, an iodomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluorobutyl group, etc. can be mentioned. The number of carbon atoms of the haloalkyl group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. L a21 The hydrocarbon group in [ID] can have a substituent such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl, etc. A haloalkyl group having 1 to 4 carbon atoms is preferred, and a haloalkyl group having 1 to 3 carbon atoms is more preferred. L a21 The hydrocarbon group of [ID] can have a substituent such as an alkyl group substantially by including a branched structure. a21 Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 12, more preferably 1 to 10, still more preferably 1 to 8, even more preferably 1 to 6, still even more preferably 1 to 4, and even more preferably 1 to 3. L a21 L is formed by a group in which -CH2- contained in the hydrocarbon group of [ID] is replaced by -O- or -CO- or the like. a21It can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, a thiol group, a sulfonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxyalkyl group, an alkoxyalkoxy group, an acryloyloxy group, a methacryloyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 12, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. The number of carbon atoms of the alkoxycarbonyl group, the alkylcarbonyl group, and the alkylcarbonyloxy group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 to 3. The number of carbon atoms of the alkoxyalkyl group and the alkoxyalkoxy group is preferably 2 to 12, more preferably 2 to 8, still more preferably 2 to 6, and even more preferably 2 to 4. Examples of the above groups also include those similar to those exemplified in this specification. L a21 As substituents that the hydrocarbon group in L may have, a halogen atom, a haloalkyl group having 1 to 8 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is preferable, a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 10 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) is more preferable, a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 4 carbon atoms, a hydroxy group, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms is still more preferable, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group is even more preferable, and a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, a methoxy group, or an ethoxyethoxy group is still even more preferable. Also, L a21 When the alkanediyl group of L is replaced by -O-, -CO-, etc., for example, *-L a23 -X a21 -(La23 represents an alkanediyl group having 1 to 8 carbon atoms, and X a21 represents -O-, -O-CO-, -CO-O- or -O-CO-O-, and * represents the bonding site with A a21 . It is also preferable that it is (). L a21 is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (however, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (however, -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (however, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), and it is preferably an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (however, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (however, -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (however, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-).

[0109] L a22Examples of the chain hydrocarbon group having 1 to 12 carbon atoms include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, 1-methylpropane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, 1-dimethylpropane-1,3-diyl group, pentane-2,4-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, etc. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, and even more preferably 1 to 4. Examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO- include the same ones as those exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. L a22 The fluorine atom that L has may be one or two or more. na2 is preferably any integer from 1 to 4, and more preferably any integer from 1 to 3. L a21 Examples of the structural unit (a2) when L is a single bond or a chain hydrocarbon group include, for example, the following structural units. Among the following structural units, the structural units in which the methyl group corresponding to R a2 is replaced by a hydrogen atom or the like are also suitable structural units of the structural unit (a2) in the same manner as the following structural units. When the resin (A) contains the above structural unit, its content is 1 mol% or more, preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more, based on all the structural units of the resin (A). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%.

[0110] When producing a resist pattern from the resist composition of the present invention, when using a high-energy ray such as a KrF excimer laser (248 nm), an electron beam, or EUV (extreme ultraviolet light) as the exposure light source, as the structural unit (a2), a structural unit (a2) having a phenolic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-A) described later. Also, when using an ArF excimer laser (193 nm) or the like, as the structural unit (a2), a structural unit (a2) having an alcoholic hydroxy group is preferable, and it is more preferable to use the structural unit (a2-1) described later. The structural unit (a2) may contain one kind alone or two or more kinds.

[0111] In the structural unit (a2), L a21 When it is a cyclic hydrocarbon group, examples of the structural unit having a phenolic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-A) (hereinafter sometimes referred to as "structural unit (a2-A)"). TIFF2025104294000098.tif30128[In the formula (a2-A), all the symbols have the same meanings as described above.] R a2 and A a21include the same groups as those exemplified by formula (a2), respectively. R a27 Examples of the halogen atom of a27 include a fluorine atom, a chlorine atom, an iodine atom, a bromine atom, and the like. R a27 Examples of the alkyl group having 1 to 6 carbon atoms which may have a halogen atom of a27 include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, still more preferably a methyl group or an ethyl group, and even more preferably a methyl group. R a27 Examples of the alkoxy group of a27 include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, and a tert-butoxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a27 Examples of the alkoxyalkyl group of a27 include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and still more preferably a methoxymethyl group. R a27Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. R a27 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, more preferably an acetyl group. R a27 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, more preferably an acetyloxy group. R a27 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group, still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. nA2 is preferably 1, 2, 3, or 4, more preferably 1, 2, or 3, still more preferably 1 or 2. na21 is preferably 0, 1, 2, or 3, more preferably 0, 1, or 2, still more preferably 0 or 1. mc is preferably 0 or 1. -X a2 -OH, in the case of a benzene ring, may be bonded to any of the o-position, m-position, or p-position with respect to the bonding position of A a21 . Among them, at least one is preferably bonded to the m-position or p-position, more preferably bonded to the m-position. In the case of a naphthalene ring, A a21When the bonding position of is the 1st position, it may be bonded to any of the 2nd to 8th positions, A a21 When the bonding position of is the 2nd position, it may be bonded to the 1st position and any of the 3rd to 8th positions. Among them, A a21 When the bonding position of is the 1st position, at least one is preferably bonded to the 3rd to 6th positions, and more preferably bonded to the 3rd or 4th position. A a21 When the bonding position of is the 2nd position, it is preferably bonded to the 4th to 7th positions, and more preferably bonded to the 5th or 6th position.

[0112] Examples of the structural unit (a2-A) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577. Examples of the structural unit (a2-A) include structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), and in the structural units represented by formula (a2-2-1) to formula (a2-2-32), formula (a2-3-1) to formula (a2-3-24), R in the structural unit (a2-A) a2 Examples include structural units in which the methyl group corresponding to is replaced by a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. TIFF2025104294000099.tif107170

[0113] When the structural unit (a2-A) is contained in the resin (A), the content of the structural unit (a2-A) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more with respect to all the structural units. Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, even more preferably 60 mol% or less, still even more preferably 50 mol% or less, still more preferably 45 mol% or less, and even more preferably 40 mol% or less. Specifically, it is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol%. The structural unit (a2-A) can be incorporated into the resin (A) by polymerizing a compound that induces the structural unit (a2-A) (for example, a compound (a2-A') in which the -CH2-C(-R a2 )- of the structural unit (a2-A) is in the state of CH2=C(-R a2 ) of the double bond before cleavage, etc.). Also, for example, after polymerization using the structural unit (a1-4), it can be incorporated into the resin (A) by treatment with an acid such as p-toluenesulfonic acid. Further, after polymerization using acetoxystyrene or the like, the structural unit (a2-A) can be incorporated into the resin (A) by treatment with an alkali such as tetramethylammonium hydroxide.

[0114] In the structural unit (a2), when L a21 is a cyclic hydrocarbon group, examples of the structural unit having an alcoholic hydroxy group or a carboxy group include a structural unit represented by the formula (a2-B) (hereinafter sometimes referred to as "structural unit (a2-B)"), a structural unit represented by the formula (a2-C) (hereinafter sometimes referred to as "structural unit (a2-C)"), and a structural unit represented by the formula (a2-D) (hereinafter sometimes referred to as "structural unit (a2-D)"). In formulas (a2-B) and (a2-C), R a2 represents the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). L a25 represents -O- or *-O-(CH2) k2 -CO-O-, k2 represents any integer from 1 to 7. * represents the bonding site with -CO-. X a2 represents a single bond or -CO-. R a25 and R a26 each independently represent a hydrogen atom, a methyl group, or a hydroxy group. nB2 represents any integer from 1 to 5. When nB2 is 2 or more, the plurality of X a2 may be the same as or different from each other. nB22 represents any integer from 0 to 8. When nB22 is 2 or more, the plurality of R a27 may be the same as or different from each other. nC22 represents any integer from 0 to 10. When nC22 is 2 or more, the plurality of R a27 may be the same as or different from each other.] L a25 is preferably -O-, -O-(CH2) f1 -CO-O- (where f1 represents any integer from 1 to 4), more preferably -O-. R a2 is preferably a methyl group. X a2 is preferably a single bond. R a25 is preferably a hydrogen atom. R a26 is preferably a hydrogen atom or a hydroxy group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nB2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. nB22 is preferably any integer from 0 to 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. nC22 is preferably any integer from 0 to 6, more preferably any integer from 0 to 3, and even more preferably 0 or 1.

[0115] Examples of the structural unit (a2-B) and the structural unit (a2-C) include structural units derived from the monomers described in JP-A-2010-204646, the following structural units, and methyl groups or hydrogen atoms corresponding to R in the following structural units a2 which are replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. Among them, the structural units represented by any of the formulas (a2-B-1) to (a2-B-5) and the formulas (a2-C-1) to (a2-C-9) are preferable. When the resin (A) contains the structural unit (a2-B) or the structural unit (a2-C), the content thereof is 1 mol% or more, preferably 2 mol% or more, based on all the structural units of the resin (A). Further, it is 45 mol% or less, preferably 40 mol% or less, more preferably 35 mol% or less, even more preferably 20 mol% or less, and still more preferably 10 mol% or less. Specifically, 1 to 45 mol% is mentioned, preferably 1 to 40 mol%, more preferably 1 to 35 mol%, even more preferably 1 to 20 mol%, and still more preferably 1 to 10 mol%.

[0116] TIFF2025104294000103.tif51106[In formula (a2-D), R a2 and A a21 each represent the same meaning as in formula (a2). R a27 represents the same meaning as in formula (a2-A). R a21 and R a22 each independently represent an alkyl fluoride group having 1 to 4 carbon atoms. L a24 represents a single bond or an alkanediyl group having 1 to 3 carbon atoms, and the alkanediyl group may be substituted with a fluorine atom. nD2 represents any integer from 1 to 5. When nD2 is 2 or more, the groups within multiple parentheses may be the same as or different from each other. nD22 represents any integer from 0 to 4. When nD22 is 2 or more, multiple a27 Rs may be the same as or different from each other. However, 1 ≦ nD2 + nD22 ≦ 5.] R a21 and R a22 As the alkyl fluoride groups of R and R, independently, a trifluoromethyl group, a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, etc. may be mentioned. R a21 and R a22 are preferably a trifluoromethyl group. L a24 As the alkanediyl group of L, a methylene group, an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-2,2-diyl group, etc. may be mentioned. L a24 is preferably a single bond or a methylene group. R a27is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and still more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group. nD2 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, still more preferably 1 or 2, and even more preferably 1. Further, preferably, nD2 is 1 and the group in parentheses is bonded to the para position. nD22 is preferably any integer from 0 to 3, more preferably any integer from 0 to 2, still more preferably 0 or 1, and even more preferably 0.

[0117] As the structural unit (a2-D), a structural unit represented by the following formula (a2-D1) (hereinafter sometimes referred to as "structural unit (a2-D1)") is more preferable. TIFF2025104294000104.tif51108[In formula (a2-D1), R a2 、A a21 、R a27 、nD2 and nD22 represent the same meanings as in formula (a2-D).] In formula (a2-D1), R a2 is preferably a hydrogen atom or a methyl group. A a21 is preferably a single bond.

[0118] Examples of the structural unit (a2-D) include the structural units described below. TIFF2025104294000105.tif62167In the structural units represented by formula (a2-D-1) to formula (a2-D-8), a structural unit in which the hydrogen atom corresponding to R a2 is replaced with a methyl group or the like, and in the structural units represented by formula (a2-D-9) to formula (a2-D-16), Ra2 A structural unit in which a methyl group corresponding to a2 is replaced by a hydrogen atom or the like can also be cited as a specific example of the structural unit (a2-D). Among them, the structural units represented by the formulas (a2-D-1) to (a2-D-8) are preferable, the structural units represented by the formulas (a2-D-1) to (a2-D-4) are more preferable, and the structural unit represented by the formula (a2-D-1) is even more preferable.

[0119] When the resin (A) contains the structural unit (a2-D), the content is preferably 3 mol% or more, more preferably 5 mol% or more, and even more preferably 10 mol% or more with respect to all the structural units of the resin (A). Also, it is preferably 80 mol% or less, more preferably 75 mol% or less, even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 10 to 70 mol%, and even more preferably 10 to 65 mol%.

[0120] 〈Structural unit (a3)〉 The lactone ring of the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantane lactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, the structural unit represented by the following formula (a3-2)) can be cited.

[0121] The structural unit (a3) is preferably a structural unit represented by the formula (a3-1), the formula (a3-2), the formula (a3-3), or the formula (a3-4). These may be contained alone or in combination of two or more. TIFF2025104294000106.tif51164[In the formulas (a3-1), (a3-2), (a3-3), and (a3-4), L a4 、L a5 and L a6 are each independently -O- or *-O-(CH2) k3-CO-O- (where k3 represents any integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 represents -O-. L a8 and L a9 each independently represent an alkanediyl group having 1 to 6 carbon atoms. * represents the bonding site with the carbonyl group. R a18 、R a19 、R a20 and R a24 each independently represent a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 、R a23 and R a25 each independently represent a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents any integer from 0 to 5. q1 represents any integer from 0 to 3. r1 represents any integer from 0 to 3. w1 represents any integer from 0 to 8. When p1, q1, r1, and / or w1 is 2 or more, the plurality of R a21 、R a22 、R a23 and / or R a25 may be the same as or different from each other.]

[0122] R a21 、R a22 、R a23 and R a25Examples of the aliphatic hydrocarbon group in [the compound] include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, and tert-butyl group. R a18 、R a19 、R a20 and R a24 Examples of the halogen atom and the alkyl group which may have a halogen atom in [the compound] include the same ones as those exemplified by R a01 and the like in the formula (a1-0). L a8 and L a9 Examples of the alkanediyl group in [the compound] include methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. L a4 ~L a6 are each independently preferably -O- or, in *-O-(CH2) k3 -CO-O-, a group in which k3 is any integer from 1 to 4, more preferably -O- and *-O-CH2-CO-O-, and still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. R a18 、R a19 、R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 、R a23 and R a25Each is independently, preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently, preferably any integer from 0 to 2, more preferably 0 or 1. w1 is preferably any integer from 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)'. TIFF2025104294000107.tif4051 (wherein R a24 , L a7 represents the same meaning as above.)

[0123] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2) and formula (a3-4-1) to formula (a3-4-12), and, in the said structural units, structural units in which the methyl groups corresponding to R a18 , R a19 , R a20 and R a24 are replaced by hydrogen atoms are preferred. When the resin (A) contains the structural unit (a3), the total content rate is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (A). Further, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 3 to 70 mol%, more preferably 3 to 65 mol%, still more preferably 5 to 65 mol%, even more preferably 5 to 60 mol%, and still even more preferably 10 to 60 mol%. Further, the content rate of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and still more preferably 10 mol% or more, based on all the structural units of the resin (A). Further, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 60 mol% is more preferable, 3 to 55 mol% is still more preferable, 5 to 55 mol% is still more preferably, 5 to 50 mol% is even more preferably, and 10 to 50 mol% is still even more preferably.

[0124] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025104294000109.tif2770 [In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R42 represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-.

[0125] R 42 The aliphatic hydrocarbon group represented by R includes a linear or branched chain hydrocarbon group, a monocyclic or polycyclic alicyclic hydrocarbon group, and a group formed by combining these. Examples of the chain hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group and octadecyl group; and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include monocyclic alicyclic hydrocarbon groups which are monocyclic cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group and cyclooctyl group; and polycyclic alicyclic hydrocarbon groups which are polycyclic cycloalkyl groups such as decahydronaphthyl group, adamantyl group, norbornyl group and the following group (* represents the bonding site). Examples of the group formed by combination include a group formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group - alicyclic hydrocarbon group, -alicyclic hydrocarbon group - alkyl group, -alkanediyl group - alicyclic hydrocarbon group - alkyl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane - 1,3 - diyl group, butane - 1,4 - diyl group, pentane - 1,5 - diyl group and hexane - 1,6 - diyl group; and branched alkanediyl groups such as propane - 1,2 - diyl group, butane - 1,3 - diyl group, 2 - methylpropane - 1,2 - diyl group, 1 - methylbutane - 1,4 - diyl group and 2 - methylbutane - 1,4 - diyl group. The terminal of the branched alkanediyl group may be a methyl group. R42 Examples of the halogen atom included in the aliphatic hydrocarbon group include a fluorine atom, a chlorine atom, a bromine atom, or an iodine atom. R 42 Examples of the group in which -CH2- of the aliphatic hydrocarbon group included in is replaced by -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits.

[0126] As the structural unit (a4), R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and an example of the structural unit (a4) in which R 42 is an aliphatic hydrocarbon group having a fluorine atom includes a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025104294000111.tif3092[In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms and having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms and having a fluorine atom. R 42frepresents a hydrogen atom or a fluorine atom.

[0127] L 41 Examples of the alkanediyl group in L include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, etc., and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,2-diyl group, butane-1,3-diyl group, 2-methylpropane-1,3-diyl group and 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42f Examples of the alkanediyl group having a fluorine atom in L include linear alkanediyl groups having a fluorine atom such as methylene group having a fluorine atom, ethylene group having a fluorine atom, propane-1,3-diyl group having a fluorine atom, butane-1,4-diyl group having a fluorine atom, pentane-1,5-diyl group having a fluorine atom, hexane-1,6-diyl group having a fluorine atom, heptane-1,7-diyl group having a fluorine atom, octane-1,8-diyl group having a fluorine atom; branched alkanediyl groups having a fluorine atom such as ethane-1,1-diyl group having a fluorine atom, propane-1,1-diyl group having a fluorine atom, propane-1,2-diyl group having a fluorine atom, propane-2,2-diyl group having a fluorine atom, pentane-2,4-diyl group having a fluorine atom, 2-methylpropane-1,3-diyl group having a fluorine atom, 2-methylpropane-1,2-diyl group having a fluorine atom, pentane-1,4-diyl group having a fluorine atom, 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42fExamples of the cycloalkanediyl group having a fluorine atom in [L] include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, and a cyclooctane-1,5-diyl group having a fluorine atom. Examples of the polycyclic cycloalkanediyl group having a fluorine atom include a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, and an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms in the alkanediyl group and the cycloalkanediyl group having a fluorine atom in [L] may be 1 or more, and is preferably 2 or more. L 42f The alkanediyl group and the cycloalkanediyl group having a fluorine atom in [L] are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0128] L 42fExamples of the perfluoroalkanediyl group in [specific context] include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42f Examples of the perfluorocycloalkanediyl group in [specific context] include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like.

[0129] L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. L 42f is preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and even more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms.

[0130] Examples of the structural unit (a4-1) include the structural units shown below and the R in the structural unit (a4-1) in the following structural units. 41Examples thereof include structural units in which a methyl group corresponding thereto is replaced with a hydrogen atom. TIFF2025104294000112.tif55167 The structural unit represented by formula (a4-2) is the structural unit shown below. TIFF2025104294000113.tif33101 [In formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced with -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced with -O- or -CO-. However, at least one of 43f L 43f and 43f R 43f has a fluorine atom, and the upper limit of the total carbon number of

[0131] L 43f and 43f R 43f and 43f is 21.] 43f Examples of the aliphatic hydrocarbon group in 43f L 42 and

[0132] R 43f include linear or branched chain hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. Examples of the aliphatic hydrocarbon group in TIFF2025104294000114.tif14120 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represents a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represents -O-, -CO-, -CO-O- or -O-CO-. However, the total number of carbon atoms of L 45f , L 46f , L 47f , X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f .

[0133] In the group represented by formula (L43f-1), examples of the divalent aliphatic hydrocarbon group represented by L 45f , L 46f and L 47f include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic hydrocarbon group, and a divalent aliphatic hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic hydrocarbon group. Specifically, examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. s is preferably 0.

[0134] Examples of the group represented by formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f . TIFF2025104294000115.tif47140

[0135] R43f is preferably an aliphatic hydrocarbon group having a fluorine atom. The structural unit represented by the formula (a4-2) in this case includes, for example, the structural units represented by the formula (a4-2A) or (formula a4-2B). TIFF2025104294000116.tif41157[In the formulas (a4-2A) and (a4-2B), R 41 and L 43f represent the same as those in the formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or** -CO-O-, and ** represents the bonding site with A 43f and. R 43fB represents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in the formula (a4-2A), the total number of carbon atoms of L 43f and R 43fA is 21 or less, and in the formula (a4-2B), the total number of carbon atoms of L 43f , A 43f , X 43 and R 43fB is 21 or less, and at least one of A 43f and R 43fB has at least one fluorine atom. R 43fA The aliphatic hydrocarbon group of is an aliphatic hydrocarbon group similar to the aliphatic hydrocarbon group exemplified by R 42 as long as the upper limit of the number of carbon atoms permits. R 43fA is preferably an alkyl group having 1 to 13 carbon atoms and having a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms and having a fluorine atom, or a group combining them, *-(CF2) n43f -R 42’(* represents the bonding site with the carbonyl group. n43f represents an integer from 1 to 6. R 42’ is more preferably a hydrogen atom, a fluorine atom, or a perfluorocycloalkyl group having 3 to 12 carbon atoms. A 43f and R 43fB 's aliphatic hydrocarbon group, as long as the upper limit of the number of carbon atoms permits, is an aliphatic hydrocarbon group similar to the aliphatic hydrocarbon group exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, or a combination thereof which may have a fluorine atom, more preferably a divalent chain hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fB 's aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group, an alicyclic hydrocarbon group, or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms, or a combination thereof which may have a fluorine atom, and even more preferably a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a heptyl group, a perfluoroheptyl group, an octyl group, a perfluorooctyl group and other fluoroalkyl groups, a cyclopropylmethyl group, a cyclopropyl group, a cyclobutylmethyl group, a cyclopentyl group, a cyclohexyl group, a perfluorocyclohexyl group, an adamantyl group, an adamantylmethyl group, an adamantyldimethyl group, a norbornyl group, a norbornylmethyl group, a perfluoroadamantyl group, a perfluoroadamantylmethyl group, etc.

[0136] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025104294000117.tif15170

[0137] As the structural unit represented by formula (a4-2A), there are the following structural units and the R in the structural unit represented by formula (a4-2A) in the following structural units 41 and the structural unit in which the methyl group corresponding to is replaced by a hydrogen atom can be mentioned. TIFF2025104294000118.tif99167

[0138] As the structural unit represented by formula (a4-2B), there are the following structural units and the R in the structural unit represented by formula (a4-2B) in the following structural units 41 and the structural unit in which the methyl group corresponding to is replaced by a hydrogen atom can be mentioned. TIFF2025104294000119.tif111163

[0139] As the structural unit (a4), there is also the structural unit represented by formula (a4-3). TIFF2025104294000120.tif3589[In formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of 44f L 44f and R 44f has a fluorine atom, and L44f The upper limit of the total carbon number is 21.

[0140] L 44f and R 44f Examples of the aliphatic hydrocarbon group in L 44f and R 44f include linear or branched chain aliphatic hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these, etc. 44f and R 44f As long as the upper limit of the total carbon number of L 42 and R allows, examples of the aliphatic hydrocarbon group of R in formula (a4) include the same groups as the aliphatic hydrocarbon groups exemplified above. L 44f is preferably an alkanediyl group having 1 to 14 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and is more preferably a group represented by -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 - or -(CH2) j4 -CO-O-(CH2) j5 - (where j1 to j5 each independently represent an integer of 1 to 6). Further preferably, it is an alkanediyl group having 1 to 4 carbon atoms (wherein one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, still more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0141] Examples of the structural unit represented by formula (a4-3) include the following structural units and structural units represented by the following formulas, in which the methyl group corresponding to R in structural unit (a4-3) is replaced by a hydrogen atom. 41 For example, the structural unit in which the methyl group corresponding to R in structural unit (a4-3) is replaced by a hydrogen atom. TIFF2025104294000121.tif85170

[0142] Examples of the structural unit (a4) also include the structural unit represented by formula (a4-A). TIFF2025104294000122.tif3686 [In formula (a4-A), all symbols have the same meaning as described above.]

[0143] R 1 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1 R is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0144] L1 Examples of the aliphatic hydrocarbon group in [description] include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentayl group. Examples of the alkanediyl group include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, and a heptadecane-1,17-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,1-diyl group, a propane-1,2-diyl group, a propane-2,2-diyl group, a pentane-2,4-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0145] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF2025104294000123.tif45164For example, alicyclic hydrocarbon groups such as cycloalkanediyl groups can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group and polycyclic alicyclic hydrocarbon groups such as spiro rings having a cycloalkanediyl group, norbornyl group or adamantyl group each spiro-bonded to a norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, spirocyclohexane-1,2'-cyclopentane-diyl group, spiroadamantane-2,3'-cyclopentane-diyl group, etc. can be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12.

[0146] Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more types of alicyclic hydrocarbon groups and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 11 and it may be bonded. Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), and the like. * represents the bonding site with X. 11

[0147] L 1 In the aliphatic hydrocarbon group having 1 to 28 carbon atoms in L, -CH2- may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When -CH2- contained in the aliphatic hydrocarbon group having 1 to 28 carbon atoms in L is replaced by -O-, -S-, -SO2- or -CO-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the aliphatic hydrocarbon group. Examples of the group in which -CH2- contained in the aliphatic hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, a group formed by combining two or more of these groups, and the like. These replaced groups include the same groups as those exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified in this specification within the range allowed by the upper limit of the number of carbon atoms.

[0148] L 1 The aliphatic hydrocarbon group in [group name] may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms (the -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, and the like. The haloalkyl groups having 1 to 4 carbon atoms include fluoroalkyl groups having 1 to 4 carbon atoms, chloroalkyl groups having 1 to 4 carbon atoms, bromoalkyl groups having 1 to 4 carbon atoms, iodoalkyl groups having 1 to 4 carbon atoms, and the like. Examples of the haloalkyl group include perfluoroalkyl groups having 1 to 4 carbon atoms (such as trifluoromethyl group, pentafluoroethyl group, heptafluoropropyl group, nonafluorobutyl group, etc.), 2,2,2-trifluoroethyl group, 3,3,3-trifluoropropyl group, 4,4,4-trifluorobutyl group, 3,3,4,4,4-pentafluorobutyl group, chloromethyl group, bromomethyl group, iodomethyl group, and the like. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, and the like. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. When -CH2- contained in the alkyl group is replaced by -O- or -CO-, the total number of carbon atoms of the alkyl group is the number of carbon atoms before replacement. Examples of the replaced group include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, alkoxycarbonyloxy group, and the like. L 1 Examples of the substituent that the aliphatic hydrocarbon group in L may have include halogen atom, haloalkyl group having 1 to 3 carbon atoms, alkyl group having 1 to 6 carbon atoms, alicyclic hydrocarbon group having 3 to 10 carbon atoms, or aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Fluorine atom, iodine atom, perfluoroalkyl group having 1 to 3 carbon atoms, or alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-) are more preferred. Fluorine atom, iodine atom, trifluoromethyl group, methyl group, hydroxy group, or methoxy group are still more preferred. L1 is, when it does not form an alkyl fluoride group and an alicyclic hydrocarbon group of R 3 a chain hydrocarbon group having 1 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), preferably, a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), more preferably, a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), even more preferably.

[0149] R 2Examples of the C1-C8 fluoroalkyl group in include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The number of carbon atoms of the fluoroalkyl group is preferably 1-6, more preferably 1-5, still more preferably 1-4, and even more preferably 1-3. R 3 When the C1-C6 fluoroalkyl group in, as long as the upper limit of the number of carbon atoms permits, the C1-C6 fluoroalkyl groups exemplified in the examples of the fluoroalkyl group of R 2 are similarly exemplified. R 2 is preferably a C1-C6 fluoroalkyl group, more preferably a C1-C3 fluoroalkyl group, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group when R 3 is a C1-C6 fluoroalkyl group. R2 is, when R 3 is a hydrogen atom, preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, and still more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 is bonded to L 1 to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, R 3 is bonded to L 1 Examples of the group formed by the bond include groups represented by the following formulas. Among the following formulas, * and ** represent the bonding sites, and the two **, one represents the bonding site with the hydroxy group and the other represents the bonding site with R 2 and L 1A is, L 1 is a part of the hydrocarbon group of L , and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. TIFF2025104294000124.tif22138R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and still more preferably 1.

[0150] Examples of the structural unit (a4-A) include the following structural units and the like. In the following structural units, structural units in which the methyl group corresponding to R 1 is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and structural units in which the hydrogen atom corresponding to R 1 is replaced with a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025104294000125.tif192167

[0151] When the resin (A) has the structural unit (a4), its content is preferably 1 to 97 mol%, more preferably 2 to 95 mol%, and still more preferably 3 to 90 mol% based on all the structural units of the resin (A).

[0152] <Structural unit (a5)> Examples of the non-detachable hydrocarbon group in the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) preferably has a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by formula (a5-1). TIFF2025104294000126.tif3351[In formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with aliphatic hydrocarbon groups having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0153] R 52 The alicyclic hydrocarbon group in R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group. L 55Examples of the divalent saturated hydrocarbon group in [compound name] include a divalent chain saturated hydrocarbon group and a divalent alicyclic saturated hydrocarbon group, preferably a divalent chain saturated hydrocarbon group. Examples of the divalent chain saturated hydrocarbon group include alkane diyl groups such as a methylene group, an ethylene group, a propane diyl group, a butane diyl group, and a pentane diyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic divalent alicyclic saturated hydrocarbon group include cycloalkane diyl groups such as a cyclopentane diyl group and a cyclohexane diyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include an adamantane diyl group and a norbornane diyl group.

[0154] L 55 Examples of the group in which -CH2- contained in the divalent saturated hydrocarbon group represented by [compound name] is replaced by -O- or -CO- include the groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025104294000127.tif18164[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents the bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms of L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms of L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms of L x8 , L x9 and W x1 is 15 or less. L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0155] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025104294000128.tif37147 Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025104294000129.tif23130 Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025104294000130.tif16147 Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025104294000131.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0156] Examples of the structural unit (a5-1) include the following structural units and the structural units in the following structural units where the methyl group corresponding to R in the structural unit (a5-1) is replaced by a hydrogen atom. 51 are mentioned. TIFF2025104294000132.tif104151 When the resin (A) has the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, still more preferably 3 to 15 mol% with respect to all the structural units of the resin (A).

[0157] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably, a structural unit having a cyclic structure (sultone ring) containing -SO2-O-.

[0158] Examples of the sultone ring include the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and examples include the rings represented by formula (T 1 -1) and formula (T 1 -2). The sultone ring may contain, in addition to -SO2-O-, a hetero atom as an atomic group constituting the ring, like the ring represented by formula (T 1 -2). Examples of the hetero atom include an oxygen atom, a sulfur atom or a nitrogen atom, and preferably an oxygen atom. TIFF2025104294000133.tif2977

[0159] The sultone ring may have a substituent, and examples of the substituent include a halogen atom or an alkyl group having 1 to 12 carbon atoms which may have a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms.

[0160] Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group. Preferably, it is an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. Preferably, a trifluoromethyl group is included. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group and an ethoxycarbonyl group is bonded to a carbonyl group. Preferably, an alkoxycarbonyl group having 6 or less carbon atoms is included, and more preferably a methoxycarbonyl group is included. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.

[0161] From the viewpoint that the production of the monomer leading to the structural unit (a6) is easy, a sultone ring having no substituent is preferable. As the sultone ring, a ring represented by the following formula (T1') is preferred. TIFF2025104294000134.tif2666[In formula (T1'), X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. R 41 Examples of R include the same as the substituents of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferred. ma is preferably 0 or 1, more preferably 0.

[0162] Examples of the ring represented by formula (T1') include the following rings. The bonding site is at an arbitrary position. Among them, those in which the bonding site is at the 1-position or 3-position are preferred. TIFF2025104294000135.tif45147

[0163] The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group and the like. Among them, the monomer that leads to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

[0164] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025104294000136.tif3878[In the formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. A xx represents an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O-, -CO- or -N(R d )-. X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents the same meaning as described above. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.]

[0165] Examples of the halogen atom of R x include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group of R x include, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group and an n-hexyl group, etc., preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. R xExamples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0166] A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and a combination of two or more of these groups may also be used. Specifically, linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; Branched alkanediyl groups such as a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group; Monocyclic divalent alicyclic saturated hydrocarbon groups which are cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl group; Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, and the like. A x The bonding position to the sultone ring of x can be any position, but the position at the 1-position is preferred.

[0167] Examples of the structural unit (a6-0) include the following structural units. TIFF2025104294000137.tif78129

[0168] Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8), and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7), and (a6-8) are more preferred. When the resin (A) has the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and even more preferably 3 to 30 mol% with respect to all the structural units of the resin (A).

[0169] <Structural unit (a7)> The resin (A) etc. may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain, or a structural unit having a sulfonio group and an organic anion in the side chain.

[0170] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by formula (a7-A). TIFF2025104294000138.tif26123[In formula (a7-A), R a7represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-, *-CO-O-, *-O-CO-O-**, *-CO-NR a71 -**, *-NR a71 -CO-O-**, *-O-CO-NR a71 -** or *-Ax-Ph-Ay-**. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one type of bond species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71 and L a72 each independently represent a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, and *** represents the bonding site with L a71 RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation. R a7 Examples of the alkyl group having 1 to 6 carbon atoms in R include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R a7 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a7 ​Examples of the alkyl group having 1 to 6 carbon atoms and a halogen atom include trifluoromethyl group, difluoromethyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, perfluorohexyl group, trichloromethyl group, dichloromethyl group, triiodomethyl group, diiodomethyl group, tribromomethyl group, dibromomethyl group and the like. R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0171] X a71 When it is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025104294000139.tif3351[In the formula (X10), all symbols represent the same meaning as described above.] When either one of Ax and Ay is a single bond, the other is preferably at least one selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond and an amide bond. When either of Ax and Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Rx is preferably, among others, a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group or an ethyl group. mx is preferably 0, 1 or 2. X a71 Examples of include, for example, a single bond, the above-described formula (X 10-1) to formula (X 10 The groups represented by -10) are exemplified. * is -R a7 represents the bonding site with the carbon atom to which it is bonded. ** is, L a71 represents the bonding site with. X 20 is -O- or -NR a71 represents -. TIFF2025104294000140.tif43162 [Formula (X 10 -1) to formula (X 10 -10), all symbols have the same meaning as described above.] Formula (X 10 -1) to formula (X 10 -10) Specific examples of the groups represented by include the following groups. TIFF2025104294000141.tif78162 Among them, X 10 is a single bond and formula (X 10 -1), formula (X 10 -3') to formula (X 10 -10') is preferably a group represented by any of them, a single bond or formula (X 10 -1), formula (X 10 -4'), formula (X 10 -5'), formula (X 10 -6) and formula (X 10 -10') is more preferably a group represented by any of them, a single bond, a group represented by formula (X 10 -1), a group represented by formula (X 10 -5'), or a group represented by formula (X 10 -6') is even more preferably.

[0172] L a71 As the hydrocarbon group of, a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group obtained by combining two or more of these groups, with one hydrogen atom removed, X a71 and X a72 groups that bind to. Also, L a72 As the hydrocarbon group of, a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group obtained by combining two or more of these groups, with one hydrogen atom removed, X a72 and RA -Groups that bind thereto can be mentioned. L a71 and L a72 Examples of the chain hydrocarbon group of L and L include groups in which one hydrogen atom of an alkyl group or an alkenyl group is removed. The alkyl group may be linear or branched, and specifically includes a methyl group, an ethyl group, a propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decanyl group, an undecanyl group, a dodecanyl group, a tridecanyl group, a tetradecanyl group, a pentadecanyl group, a heptadecanyl group, and the like. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, and a nonenyl group. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 20, and even more preferably 1 to 10. L a71 and L a72 Examples of the alicyclic hydrocarbon group of L and L include groups in which one hydrogen atom of a monocyclic or polycyclic cycloalkyl group is removed. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentane group, a cyclohexane group, a cyclopentyl group, a cyclooctyl group, and the like. L a71 and L a72Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4.4.0]decanyl group and a steroid group (steroid skeleton). Examples of the spiro-bonded ring in which two rings are spiro-bonded include a spirocycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. Further, a double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula may be mentioned. TIFF2025104294000142.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 12, more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 7 to 12. L a71 and L a72 Examples of the aromatic hydrocarbon group of and include an aryl group from which one hydrogen atom has been removed. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorene group. The number of carbon atoms of the aromatic hydrocarbon group is preferably 5 to 14, more preferably 5 to 10. L a71 and L a72 When -CH2- contained in the hydrocarbon group of and is replaced by -O-, -CO-, -S-, or -SO2-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. L a71 and L a72Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group, a carboxy group, a thiol group, a carbonyl group, an oxy group, a thio group, a sulfonyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L a71 and L a72 Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group and the group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include those similar to those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. L a71 and L a72 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring and a thiophene ring, respectively. L a71 and L a72 Examples of the group combining two or more of the chain hydrocarbon group, the alicyclic hydrocarbon group and the aromatic hydrocarbon group include the group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The above combined groups are included. The group combining the alicyclic hydrocarbon group and the aromatic hydrocarbon group may be a condensed ring. L a71 and L a72 Examples of the substituent that the hydrocarbon group may have include a halogen atom, a cyano group and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom and the like. L a71 and L a72 When the group is a combination of an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent possessed by the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L b1‘ and L b2‘ When the -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of is replaced by -O-, -CO-, -S- or -SO2-, L b1‘ and L b2‘ The hydrocarbon group of may substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like. ZA in formula (a7-A) + is the same as the cation Z1 in the salt represented by formula (B1) described later + and the like can be mentioned.

[0173] Examples of the structural unit represented by formula (a7-A) include the following structural units, R a7 structural units in which the group corresponding to the methyl group of is replaced by a hydrogen atom, a halogen atom (for example, a fluorine atom) or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group, etc.) and the structural units described in International Publication No. 2012 / 050015. ZA + represents an organic cation. TIFF2025104294000143.tif205163

[0174] TIFF2025104294000144.tif167157

[0175] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by formula (a7-B). TIFF2025104294000145.tif27104[In formula (a7-B), R a7represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A II1 represents a single bond or a divalent linking group. R II1 represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R II2 and R II3 each independently represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R II2 and R II3 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. A - represents an organic anion. R a7 Examples of the halogen atom and the alkyl group which may have a halogen atom of R include the same halogen atom and the alkyl group which may have a halogen atom as those in formula (a7-A). R II1 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by R include a phenylene group and a naphthylene group. R II2 and R II3 Examples of the hydrocarbon group represented by R include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group formed by combining these are the same as those described above. A II1 Examples of the divalent linking group represented by A include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S- or -CO-. Examples of the divalent saturated hydrocarbon group include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. can be mentioned. Examples of those in which -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- include the following divalent groups. However, the number of carbon atoms before -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- is 17 or less respectively. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R II2 and represents the bonding site with R. TIFF2025104294000146.tif123161[wherein X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.]

[0176] Examples of the structural unit containing the cation in formula (a7-B) include the structural unit represented below and a group corresponding to the methyl group of R a7 wherein the group corresponding to the methyl group of R is replaced with a hydrogen atom, a halogen atom (e.g., fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., trifluoromethyl group), etc. TIFF2025104294000147.tif75163

[0177] A - Examples of the organic anion represented by A include sulfonate anions, sulfonylimide anions, and sulfonylmethide anions. A - The organic anion represented by A is preferably a sulfonate anion, and more preferably an anion contained in the salt represented by formula (B1) described later. Examples of the sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion are the same as those exemplified as the anion of the acid generator (B).

[0178] Examples of the structural unit represented by formula (a7-B) include the structural unit represented below. TIFF2025104294000148.tif95157

[0179] When the resin (A) contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more. The content rate of the total structural unit (a7) is preferably 1 to 30 mol%, more preferably 2 to 25 mol%, still more preferably 3 to 20 mol%, and even more preferably 3 to 15 mol% with respect to all the structural units of the resin (A).

[0180] The resin (A) is preferably a resin composed of a plurality of structural units (I), a resin composed of the structural unit (I) and the structural unit (a1), a resin composed of the structural unit (I), the structural unit (a2-A), and the structural unit (a1), a resin composed of the structural unit (I), the structural unit (a1), and the structural unit (s), a resin composed of the structural unit (I), the structural unit (a2-A), and the structural unit (s), a resin composed of the structural unit (I), the structural unit (a2-A), the structural unit (a1), and the structural unit (s), a resin composed of the structural unit (I), the structural unit (a2-A), the structural unit (a1), the structural unit (s), and the structural unit (a4) and / or the structural unit (a5), a resin composed of the structural unit (I) and the structural unit (a2-A), or a resin composed only of the structural unit (I), the structural unit (a2-A), and the structural unit (a4). More preferably, it is a resin composed of a plurality of structural units (I), a resin composed of the structural unit (I), the structural unit (a2-A), the structural unit (a1), and the structural unit (s), a resin composed of the structural unit (I) and the structural unit (a2-A), a resin composed of the structural unit (I), the structural unit (a2-A), and the structural unit (a1), or a resin composed of the structural unit (I), the structural unit (a2-A), and the structural unit (s). When the resist composition of the present invention does not contain the acid generator (B) described later, the resin (A) preferably further contains the structural unit (a7).

[0181] The structural unit (a1) preferably contains at least one selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1), the structural unit (a1-2), the structural unit (a1-4), the structural unit (a1-5), and the structural unit (a1-6). More preferably, it is at least one selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1), the structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group), the structural unit (a1-4), and the structural unit (a1-6). The structural unit(s) is preferably at least one selected from the group consisting of structural unit (a2) and structural unit (a3). The structural unit (a2) is preferably structural unit (a2-A) or structural unit (a2-1). The structural unit (a3) is preferably at least one selected from the group consisting of the structural unit represented by formula (a3-1), the structural unit represented by formula (a3-2), and the structural unit represented by formula (a3-4), and more preferably the structural unit represented by formula (a3-4).

[0182] Each structural unit constituting the resin (A) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers that lead to these structural units. The content of each structural unit of the resin (A) can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weight of the resin (A) is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more), 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less), but oligomers having a weight average molecular weight of less than 2,000 may be included. In this specification, the weight average molecular weight is a value determined by gel permeation chromatography. Gel permeation chromatography can be measured under the analysis conditions described in the examples.

[0183] <Resins other than resin (A)> The resist composition of the present invention may be used in combination with a resin other than the resin (A). The resin other than the resin (A) is a resin that does not contain the structural unit (I). Examples of such resins include resins having a structural unit having an acid-labile group and not containing the structural unit (I) (hereinafter sometimes referred to as "resin (A2)"), resins composed only of the structural unit (a4), and resins composed of the structural unit (a4) and the structural unit (a5) (hereinafter, resins composed only of the structural unit (a4) and resins composed of the structural unit (a4) and the structural unit (a5) may be collectively referred to as "resin (X)"). Examples of the structural units that the resin (X) may further have include a structural unit (a2), a structural unit (a3), and structural units derived from other known monomers. Among them, the resin (X) is preferably a resin composed only of the structural unit (a4) and / or the structural unit (a5). When the resin (X) contains the structural unit (a4), in the resin (X), the content of the structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Further, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and still more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less. Specifically, it is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and still more preferably 80 to 100 mol%. Further, the structural unit (a4):structural unit (a5) is 0:100 to 100:0, preferably 10:90 to 90:10, and more preferably 30:70 to 70:30 or 40:60 to 60:40. Each structural unit constituting the resin (A2) and the resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using monomers that induce these structural units. The content of each structural unit of the resin (X) can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weights of the resin (A2) and the resin (X) are each independently preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less), but oligomers having a weight average molecular weight of less than 6,000 may be included. The measuring means for the weight average molecular weights of the resin (A2) and the resin (X) is the same as that for the resin (A). When the resist composition of the present invention contains the resin (A2), its content is usually 1 to 2,500 parts by mass (more preferably 10 to 1,000 parts by mass) with respect to 100 parts by mass of the resin (A). When the resist composition contains the resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and even more preferably 1 to 8 parts by mass with respect to 100 parts by mass of the resin (A).

[0184] The content of the resin (A) in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. When the resist composition contains resins other than the resin (A), the total content of the resin (A) and the resins other than the resin (A) is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less with respect to the solid content of the resist composition. The solid content of the resist composition and the content of the resin relative thereto can be measured by known analytical means such as liquid chromatography or gas chromatography.

[0185] <Acid generator (B)> The acid generator (B) may be either a nonionic compound or an ionic compound. Examples of the nonionic compound include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), and the like. Examples of the ionic compound include onium salts containing an onium cation (e.g., diazonium salt, phosphonium salt, sulfonium salt, iodonium salt). Examples of the anion of the onium salt include sulfonic acid anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion, among others. Alternatively, the acid generator (B) may be one of the structural units constituting the resin contained in the resist composition of the present invention, such as the structural unit (a7) described below.

[0186] As the acid generator (B), compounds that generate an acid upon irradiation, as described in JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, and the like, can be used. Also, compounds produced by known methods may be used. The acid generator (B) may be used alone or in combination of two or more. The acid generator (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid-labile group.

[0187] A preferred form of the acid generator (B) includes a salt represented by the formula (B1) (hereinafter sometimes referred to as "acid generator (B1)"). JPEG2025104294000149.jpg1392[wherein all the symbols are the same as described above.] L b1As the (nb1 + 1)-valent hydrocarbon group, from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining two or more of these groups, nb1 hydrogen atoms are removed, and 1 or more L b2 groups that bind to it are mentioned. The number of carbon atoms of the hydrocarbon group is preferably 1 to 48, more preferably 1 to 42, still more preferably 1 to 36, even more preferably 1 to 30, and even still more preferably 1 to 24. As the chain hydrocarbon group, a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group is mentioned. The alkyl group may be linear or branched, and specifically, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. are mentioned. As the alkenyl group, ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group are mentioned. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, still more preferably 1 to 20, even more preferably 1 to 18, even still more preferably 1 to 12, and even still more preferably 1 to 10. As the alicyclic hydrocarbon group, a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group is mentioned. As the monocyclic cycloalkyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, etc. are mentioned. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4,4,0]decanyl group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. In addition, a double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group represented by the following formula can be given. TIFF2025104294000150.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, further preferably 3 to 18, still more preferably 3 to 12, still further preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms of the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, further preferably 6 to 18, still more preferably 6 to 12, and still further preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group represented by the following formula can be given. As for the carbon number of the aromatic hydrocarbon group, it is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, still even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, the carbon number before replacement is taken as the carbon number of the hydrocarbon group. L b1Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -O-CO-), an alkanedioylcarbonyl group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -CO-), an alkanedioylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -CO-O-), and the like. Examples of these replaced groups include those similar to the above within the range allowed by the upper limit of the number of carbon atoms. L b1Among the hydrocarbon groups, examples of groups in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters (sultones), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding positions of the alicyclic hydrocarbon groups mentioned in the following formulas can be at arbitrary positions. TIFF2025104294000152.tif48165L b1 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of groups in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025104294000153.tif1324L b1 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of groups in which -CH2- is replaced by -O- or -S- include a furan ring or a thiophene ring, respectively. Examples of groups in which -CH2- contained in a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. Examples of groups combining two or more of a chain hydrocarbon group, an alicyclic hydrocarbon group and an aromatic hydrocarbon group include a group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, a group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, a group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and a group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The above combined groups can be mentioned. The group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L b2Examples of the divalent hydrocarbon group include a group formed by removing one hydrogen atom from a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, and a group combining two or more of these groups, and is a group that binds to Y b1 Examples of the divalent chain hydrocarbon group, divalent alicyclic hydrocarbon group, divalent aromatic hydrocarbon group, and divalent group combining two or more of these groups of L L b2 are groups formed by removing one hydrogen atom from the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and group combining two or more of these groups exemplified by L b1 respectively within the range allowed by the number of carbon atoms. L b1 and L b2 Examples of the substituents that the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L b1 and L b2 When L b1 and L b2 are groups combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Further, when -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of L b1 and L b2 is replaced by -O-, -CO-, -S-, or -SO2-, the hydrocarbon groups of L L b1 and L b2 may substantially have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, and a sulfonyl group. Y b1 Examples of the cyclic hydrocarbon group of Y Y b1 include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group. b1Examples thereof include the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified above. When it has no substituent, it may be a monovalent alicyclic hydrocarbon group or aromatic hydrocarbon group. Y b1 Examples of the substituent that the methyl group of may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms which may have a halogen atom, a cyano group, and a nitro group (in the hydrocarbon group, -CH2- contained therein may be replaced by -O-, -S-, -CO- or -SO2-). Y b1 In the hydrocarbon group that the cyclic hydrocarbon group of may have, the number of carbon atoms b1 is not included in the number of hydrocarbon groups of the cyclic hydrocarbon group of. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, L b1 Examples of the same groups as the chain hydrocarbon group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by are included. Also, Y b1 Examples of the group in which -CH2- contained in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent is replaced by -O-, -S-, -CO- or -SO2- include, within the range allowed by the upper limit of the number of carbon atoms, L b1 Examples of the same groups as the groups exemplified by the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-. Also, Y b1 The hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art.

[0188] The anion of the salt represented by the formula (B1) is preferably an anion represented by the following formula (B1-A1) or an anion represented by the formula (B1-A2). TIFF2025104294000154.tif30124[In the formula (B1-A1), L b2 and Y b1 have the same meanings as in the formula (I-A). Q b1 、Q b2 、Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. When z1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O- or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. nb2 represents any integer from 1 to 3. When nb2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] Q b1 、Q b2 、Q b3 and Q b4 Examples of the alkyl group of include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 、Q b2 、Q b3 and Q b4 Examples of the perfluoroalkyl group of include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 is Q b1 and Q b2 Preferably, at least one of them contains a fluorine atom or a perfluoroalkyl group, more preferably a fluorine atom or a perfluoroalkyl group, still more preferably a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 is preferably independently a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0189] L b3 As the hydrocarbon group in, within the range allowed by the upper limit of the number of carbon atoms, L of formula (I-A) b1 The same hydrocarbon groups as the examples of can be mentioned. In formula (B1-A1), L b3is preferably a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an optionally substituted aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-), or a group obtained by combining two or more of these groups, and more preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1). When -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO-, the number thereof is preferably 1 to 4, and preferably, one -CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO-O-. JPEG2025104294000155.jpg1582[In the formula (Lb3-1), nb2 represents the same meaning as in the formula (B1-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 and represents the bonding site with. In the formula (Lb3-1), L b31 The chain hydrocarbon group of is, as long as the upper limit of the number of carbon atoms permits, L b1Examples thereof include the same groups as the chain hydrocarbon groups exemplified above. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of, as long as the upper limit of the number of carbon atoms permits, the same groups as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified by L b1 Examples thereof include the same groups as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified above. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group of may have and W b3 The substituents that the alicyclic hydrocarbon group and the aromatic hydrocarbon group of may have are the same groups as the substituents exemplified as the substituents that the hydrocarbon group of L b1 Examples thereof include the same groups as the substituents exemplified above. L b31 Is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b3 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of are preferably the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below. In the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below, * and ** represent the bonding sites, * represents the bonding site with X 1 Or L b31 Represents the bonding site with, ** represents a hydrogen atom, a substituent or the bonding site with L b2 Represents the bonding site with, and at least one ** represents the bonding site with L b2 Represents the bonding site with. In addition, in the alicyclic hydrocarbon group represented below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, it preferably forms an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring (sultone) or an acetal ring. In formula (B1-A1), L b2is a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), preferably a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 either one of which represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent bonding sites, and ** represents the bonding site with Y b1 However, L b21 X 2 and L b22 The total number of carbon atoms of is 12 or less.) is more preferable. In formula (B1-A1), Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (the -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and still more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is preferably a group represented by the following formula (Y1) to formula (Y36). In formula (Y1) to formula (Y36), R Yb represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms among the substituents which the cyclic hydrocarbon group of Y b1 may have, R Yc represents a hydrogen atom or a substituent which the cyclic hydrocarbon group of Y b1 may have, and * represents L b2represents a binding site with. The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula are not particularly shown in the following formula, but may have other substituents that the cyclic hydrocarbon group of Y b1 may have. TIFF2025104294000157.tif83158

[0190] As the anion in the salt represented by the formula (B1), anions represented by the formulas (B1-A1-1) to (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" etc. according to the formula number] are preferable, and anions represented by any of the formulas (B1-A1-1) to (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formulas (B1-A1-24) to (B1-A1-33), formulas (B1-A1-36) to (B1-A1-40), and formulas (B1-A1-47) to (B1-A1-85) are more preferable. TIFF2025104294000158.tif216161

[0191] TIFF2025104294000159.tif249150

[0192] TIFF2025104294000160.tif254162

[0193] Here, R i2 ~R i7 are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8 is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as above. Examples of the anion represented by formula (B1-A1) include the anions described in JP-A-2010-204646.

[0194] Preferred anions in the salt represented by formula (B1) include the anions represented by formulae (B1a-1) to (B1a-70). Among them, anions represented by any of formulae (B1a-1) to (B1a-3), formulae (B1a-7) to (B1a-19), and formulae (B1a-22) to (B1a-70) are preferred. TIFF2025104294000161.tif185163

[0195] TIFF2025104294000162.tif252166

[0196] TIFF2025104294000163.tif69165

[0197] The anion represented by formula (B1-A2) is represented by the following formula. TIFF2025104294000164.tif23100[In formula (B1-A2), L b2 and Y b1 have the same meanings as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents any integer from 1 to 5. When nb4 is 2 or more, a plurality of -L b2 -Y b1 may be the same as or different from each other. nb3 represents any integer from 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied.]

[0198] In formula (B1-A2), the hydrocarbon group of L b2 and Y b1Examples of the cyclic hydrocarbon group include, within the range permitted by the upper limit of the number of carbon atoms, L in formula (B1) b2 Examples of the hydrocarbon group of b1 and examples of the cyclic hydrocarbon group of Y b2 are the same as those of the hydrocarbon group of L b1 For the hydrocarbon group of L b2 the methyl group of Y b1 and the substituents that the cyclic hydrocarbon group may have, examples are the same as those of the hydrocarbon group of L These hydrocarbon groups, methyl group and cyclic hydrocarbon group may have one substituent or a plurality of substituents. L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), more preferably *-CO-O-L b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with the benzene ring to which SO3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.) and still more preferably *-CO-O-. Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and Y in formula (B1-A1) b1 or L b1It is more preferable that it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified above. Specifically, it is preferably a group represented by the above-described formulas (Y1) to (Y36), and more preferably a group represented by the above-described formulas (Y1) to (Y19).

[0199] In formula (B1-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 is preferably bonded at the m-position substitution of the benzene ring with respect to the bonding position of SO3 - in the following structure. TIFF2025104294000165.tif28107[In the above formula, L b2 and Y b1 and R b1 and nb3 have the same meanings as in formula (B1-A2).] In formula (B1-A2), when n4b is 2 or more, a plurality of L b2 and Y b1 preferably represent the same group as each other.

[0200] Examples of the alkyl group having 1 to 6 carbon atoms for R b1 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, and more preferably 1 to 3. Examples of the halogen atom for R b1 include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the group in which -CH2- contained in the alkyl group is replaced by -O- or -CO- include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, oxy group, and carbonyl group. These replaced groups include those similar to the groups exemplified in the present specification as long as the upper limit of the number of carbon atoms permits. R b1is, independently of each other, preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. nb3 is any integer from 0 to 4 (that is, nb3 - 1 represents any integer from 0 to 3), preferably any integer from 0 to 3, and more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, it is preferable that nb3 is 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When n3b is 2, one of R b1 is preferably a halogen atom and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms, and one of R b1 is more preferably a fluorine atom or an iodine atom and the other is more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms.

[0201] Examples of the anion (B1 - A2) include the following anions. Among them, the anions represented by formula (B2a - 1) to formula (B2a - 20) are preferable, and the anions represented by formula (B2a - 1) to formula (B2a - 11), formula (B2a - 16) to formula (B2a - 20) are more preferable. In the following anions, some of R b1 are omitted and may contain substituents not shown in the figure. TIFF2025104294000166.tif94161

[0202] In another form of the acid generator (B), an anion in which the anion represented by the formula (B1) is replaced with a sulfonamide anion, a sulfonylmethide anion, or a carboxylic acid anion is also preferably used as the acid generator (B). Examples of the sulfonamide anion and the sulfonylmethide anion include those represented by the following formulas. TIFF2025104294000167.tif1289[In the formula (B1-A3), A 1 represents a nitrogen atom or a carbon atom. L b2 ’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 ’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom, and when nb5 is 3, A 1 represents a carbon atom. A plurality of -L b2 ’-Y b1 ’ may be the same as or different from each other, and a plurality of R b2 may be the same as or different from each other, and two -SO2-L b2 ’-Y b1 ’ may combine together to form a ring.] In the formula (B1-A3), L b2 ’ and Y b1 ’s hydrocarbon group, cyclic hydrocarbon group, and their substituents are the same groups as L b2 and Y b1 in the formula (B1-A1). In the formula (B1-A3), L b2’ is a single bond, *-L b23 -X 2 - or *-L b23 -X 2 -W 2 -X3 -(L b23 represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, and X 2 and X 3 each independently represent -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-, and W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents a bonding site with SO2.) is preferable. In formula (B1-A3), Y b1’ is preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent or a phenyl group which may have a substituent, and more preferably a trifluoromethyl group or a group represented by formula (Y1) to formula (Y36) in formula (B1-A1). nb5 is preferably 2 or 3. In formula (B1-A3), when two SO2-L b2’ -Y b1’ together form a ring containing A 1 for example, an anion represented by formula (B1-A3’) can be mentioned. TIFF2025104294000168.tif21122[In formula (B1-A3’), A 1 and nb5 have the same meanings as in formula (B1-A3). Y b1 and L b2 have the same meanings as in formula (B1). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 3 to 12 carbon atoms which may have a fluorine atom.] W b4 The disulfonylimide ring or the disulfonylmethide ring of W preferably has 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced by a fluorine atom.

[0203] Examples of the anion represented by formula (B1-A3) include the following. Among them, the anions represented by formula (B3a-1) and formula (B3a-2) are preferred. TIFF2025104294000169.tif132161

[0204] TIFF2025104294000170.tif57166Examples of the carboxylic acid anion include the following. TIFF2025104294000171.tif41155

[0205] Z1 + Examples of the organic cation of include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryliodonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter may be referred to as "cation (b2-1)" etc. according to the formula number) are included. TIFF2025104294000172.tif82159[In formula (b2-1) to formula (b2-5), R b4 ~R b6 each independently represents a chain hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. Rb4 and R b5 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent any integer from 0 to 5. When m2 is 2 or more, the plurality of R b7 may be the same or different, and when n2 is 2 or more, the plurality of R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted with an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may combine with each other to form a ring including -CH-CO- to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S-, ...

Claims

1. A resist composition containing a resin containing a structural unit represented by formula (I). [In formula (I), R ０ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, and * represents the binding site with the carbon atom to which R ０ is attached. L １ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO ２ - or -CO-. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms and having an iodine atom, and the aromatic hydrocarbon group may have a substituent other than the iodine atom. A １ represents a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO ２ -. R １ represents a hydrogen atom or an acid-labile group. R ２ represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, or R １ combines with to form a cyclic hydrocarbon group having 3 to 12 carbon atoms. The hydrocarbon group and the cyclic hydrocarbon group may have substituents, and -CH 2 - in the haloalkyl group and the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO ２ -. m2 represents any integer from 0 to 4, and when m2 is 2 or more, the plurality of Rs ２ may be the same as or different from each other. m3 represents 0 or 1. m4 represents any integer from 1 to 4, and when m4 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.]

2. X １ is a single bond or a group represented by any of the groups represented by formula (X １ -1) to formula (X １ -10): The resist composition according to claim 1. [Formula (X １ -1) to formula (X １ -10), *, ** are binding sites, and * represents the binding site with the carbon atom to which R is attached. ０ represents the binding site with the carbon atom to which R is attached. Rx represents a halogen atom, a hydroxy group, a C1-C6 perfluoroalkyl group, a C1-C18 alkyl group, or a C1-C6 alkoxy group. mx represents any integer from 0 to 4. X ２０ represents -O- or -NR ３ -. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.

3. X １ is a single bond or a group represented by formula (X １ -1'), formula (X １ -3') to formula (X １ -10') according to claim 2 of the resist composition. [Formula (X １ -1'), Formula (X １ -3') to Formula (X １ -10'), among them, *, ** are binding sites, and ** represents the binding site with L 1 represents the binding site with.]

4. L １ is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (wherein -CH 2 - included in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH 2 - included in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - included in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). The resist composition according to claim 1 or 2.

5. The acid-labile group represents a group represented by the formula (5a) or OR １ and R ２ The resist composition according to claim 1 or 2, wherein together form a group having an acetal ring structure. [In formula (5a), L １０ represents a single bond or an alkanediyl group having 1 to 6 carbon atoms. m51 and m52 each independently represent 0 or 1. R ａａ１ and R ａａ２ each independently represents a hydrogen atom or a hydrocarbon group having 1 to 20 carbon atoms. X ａ represents a single bond, an oxygen atom, a sulfur atom or a methylene group. R ａａ３ represents a hydrocarbon group having 1 to 20 carbon atoms, or R ａａ２ and R ａａ３ are bonded to each other and, together with -C-(X ａ ), ｍ５２ represent a group forming a ring having 3 to 20 carbon atoms. The -CH contained in the hydrocarbon group and the group forming the ring ２ - may be replaced by -O- or -S-, and the hydrocarbon group and the group forming the ring may have a substituent. * represents the bonding site with an oxygen atom.]

6. A １ is ***-X ０１ -L ０１ - or ***-L ０１ -X ０１ - and X ０１ represents -O-, -CO-, -S- or -SO ２ -. L ０１ represents a single bond or a hydrocarbon group having 1 to 18 carbon atoms, The resist composition according to claim 1 or 2, wherein *** represents the bonding site with Ar.

7. X ０１ The resist composition according to claim 6, wherein X is an oxygen atom.

8. L ０１ The resist composition according to claim 6, wherein L is an alkanediyl group having 1 to 6 carbon atoms.

9. The resist composition according to claim 5, wherein the group represented by formula (5a) is the group represented by formula (5a-A). [In formula (5a-A), R ａａ１A and R ａａ２A each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, X ａ represents a single bond, an oxygen atom, a sulfur atom or a methylene group. R ａａ３A represents a hydrocarbon group having 1 to 20 carbon atoms, or R ａａ２A and R ａａ３A are bonded to each other and together with -C-X ａ - represent a group forming a ring having 3 to 20 carbon atoms. The -CH contained in the hydrocarbon group and the group forming the ring ２ - may be replaced by -O- or -S-, and the hydrocarbon group and the group forming the ring may have substituents. * represents the bonding site with an oxygen atom.]

10. The resist composition according to claim 5, wherein the group represented by formula (5a) is the group represented by formula (5a-B). [In formula (5a-B), R ａａ１Ｂ , R ａａ２Ｂ and R ａａ３Ｂ each independently represents a hydrocarbon group having 1 to 20 carbon atoms, or R ａａ２Ｂ and R ａａ３Ｂ are bonded to each other, and together with the carbon atom to which R ａａ２Ｂ and R ａａ３Ｂ is bonded, form an alicyclic hydrocarbon group having 3 to 20 carbon atoms. The -CH contained in the hydrocarbon group and the alicyclic hydrocarbon group ２ - may be replaced by -O- or -S-, and the hydrocarbon group and the alicyclic hydrocarbon group may have substituents. * represents the bonding site with an oxygen atom.]

11. The resist composition according to claim 1 or 2, wherein the resin further contains at least one selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1), and formula (a1-2), L a01 , L ａ１ and L ａ２ each independently represents -O- or *-O-(CH ２ ), ｋ１ -CO-O-, k1 represents any integer from 1 to 7, and * represents the bonding site with -CO-. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 , R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1' represents any integer from 0 to 14. n1 represents any integer from 0 to 10. n1' represents any integer from 0 to 3.] [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ１８ -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and -CH 2 - contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5, and when na1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] na11 represents any integer from 0 to 4, and when na11 is 2 or more, a plurality of Rs ａ１７ may be the same as or different from each other. mc represents any integer from 0 to 2. [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of 1 to 4, and * represents the bonding site with L 51 . L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents any integer from 1 to 3. s1' represents any integer from 0 to 3. ] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ , R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents the bonding site with Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 - or *-CO-O-L a62 -, where * represents the bonding site with Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an optionally substituted aromatic hydrocarbon group having 6 to 20 carbon atoms. ]

12. The resin further comprises The resist composition according to claim 1 or 2, which contains a structural unit represented by formula (a2-A). [In formula (a2-A), R ａ２ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ２７ represents a halogen atom, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ２１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ２８ -. R ａ２８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ２ represents a single bond or a carbonyl group. nA2 represents any integer from 1 to 5. When nA2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na21 represents any integer from 0 to 4, and when na21 is 2 or more, a plurality of Rs ａ２７ may be the same as or different from each other. mc represents any integer from 0 to 2. ]

13. Further comprising an acid generator, The resist composition according to claim 1 or 2, wherein the acid generator contains a salt represented by formula (B1). [In formula (B1), L b1 represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or substituents, and -CH 2 - included in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and the -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 ＋ represents an organic cation.

14. The resist composition according to claim 1 or 2, further containing a salt that generates an acid having a lower acidity than the acid generated from the acid generator.

15. (1) A step of applying the resist composition according to claim 1 or 2 onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for manufacturing a resist pattern, comprising the steps.

16. A resin containing a structural unit represented by formula (I). [In formula (I), R ０ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents an optionally substituted phenylene group. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. * and ** represent binding sites, and * represents the binding site with the carbon atom to which R ０ is bound. L １ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or a substituent, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO ２ - or -CO-. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms having an iodine atom, and the aromatic hydrocarbon group may have a substituent other than the iodine atom. A １ represents a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and -CH contained in the hydrocarbon group 2 - may be replaced by -O-, -CO-, -S- or -SO ２ -. R １ represents a hydrogen atom or an acid-labile group. R ２ represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms, or a hydrocarbon group having 1 to 18 carbon atoms, or R １ combines with to form a cyclic hydrocarbon group having 3 to 12 carbon atoms. The hydrocarbon group and the cyclic hydrocarbon group may have substituents, and -CH 2 - in the haloalkyl group and the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO ２ -. m2 represents any integer from 0 to 4, and when m2 is 2 or more, the plurality of Rs ２ may be the same as or different from each other. m3 represents 0 or 1. m4 represents any integer from 1 to 4. When m4 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. ]

17. A compound represented by formula (I0). [In formula (I0), R ０ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents an optionally substituted phenylene group. Ax and Ay each independently represent one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, and * represents the binding site with the carbon atom to which R ０ is attached. L １ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or substituents, and the -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO ２ - or -CO-. Ar represents an aromatic hydrocarbon group having 6 to 18 carbon atoms and having an iodine atom, and the aromatic hydrocarbon group may have a substituent other than the iodine atom. A １ represents a hydrocarbon group having 1 to 20 carbon atoms, the hydrocarbon group may have a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO ２ -. R １ represents a hydrogen atom or an acid-labile group. R ２ represents a halogen atom, a haloalkyl group having 1 to 12 carbon atoms or a hydrocarbon group having 1 to 18 carbon atoms, or R １ combines with to form a cyclic hydrocarbon group having 3 to 12 carbon atoms. The hydrocarbon group and the cyclic hydrocarbon group may have substituents, and -CH 2 - in the haloalkyl group and the hydrocarbon group may be replaced by -O-, -CO-, -S-, -SO ２ -. m2 represents any integer from 0 to 4, and when m2 is 2 or more, the plurality of Rs ２ may be the same as or different from each other. m3 represents 0 or 1. m4 represents any integer from 1 to 4, and when m4 is 2 or more, the groups within the plurality of parentheses may be the same as or different from each other. ]

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