Resist composition and method for producing resist pattern

Abstract

To provide a resist composition from which a resist pattern having good line edge roughness can be produced.SOLUTION: The resist composition contains: a first resin containing a structural unit represented by formula (I) and a structural unit represented by formula (III); a second resin containing a structural unit represented by formula (III); and an acid generator. [In the formulae, X1 represents a single bond, -O-, -CO-O- or the like; X2 represents a single bond or -CO-O-; L1 and L2 each represent a single bond or a substituted / unsubstituted hydrocarbon group, and -CH2- contained in the group may be substituted with -O-, -S-, -SO2- or -CO-; RA represents a saturated hydrocarbon group; and X3 represents a single bond or -CO-.]SELECTED DRAWING: None

Description

Technical Field

[0001] The present invention relates to a resist composition and a method for producing a resist pattern using the resist composition, etc.

Background Art

[0002] Patent Document 1 describes a resist composition containing a resin including the following structural unit and an acid generator. TIFF2025104295000001.tif40134

[0003] Patent Document 2 describes a resist composition containing a resin including the following structural unit and an acid generator. TIFF2025104295000002.tif3259

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Patent Document 2

Summary of the Invention

Problems to be Solved by the Invention

[0005] An object of the present invention is to provide a resist composition that forms a resist pattern having better line edge roughness (LER) than a resist pattern formed from the above resist composition.

Means for Solving the Problems

[0006] The present invention includes the following inventions. [1] A first resin including a structural unit represented by formula (I) and a structural unit represented by formula (III), a second resin including a structural unit represented by formula (III), and A resist composition containing an acid generator. TIFF2025104295000003.tif3786[In formula (I), R 0 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X 1 represents a single bond, *-O-*, *-CO-O-*, *-O-CO-O-*, *-CO-NR 3 -*, *-NR 3 -CO-O-*, *-O-CO-NR 3 -* or *-Ax-Ph-Ay-*. R 3 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond and a carbonate ester bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R 0 is bonded. L 1 represents a single bond or a hydrocarbon group having 1 to 36 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. R A represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2, and when u1 is 2, a plurality of R A are the same or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2.] TIFF2025104295000004.tif4097[In formula (III), R 4 represents a hydrogen atom, a halogen atom or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X 2represents a single bond or *-CO-O-. * represents R 4 represents the bonding site with the carbon atom to which it is bonded. L 2 represents a single bond or an optionally substituted hydrocarbon group having 1 to 28 carbon atoms, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. X 3 represents a single bond, -C(CF3)2- or -CO-. mk represents any integer from 1 to 4. [2] X 1 is a single bond or a group represented by formula (X 1 -1) to formula (X 1 -10), the resist composition according to [1]. TIFF2025104295000005.tif45167 [In formula (X 1 -1) to formula (X 1 -10), *, ** are bonding sites, and * represents the bonding site with the carbon atom to which R 0 is bonded. Rx represents a halogen atom, a hydroxy group, a C1-C6 fluoroalkyl group, a C1-C18 alkyl group or a C1-C6 alkoxy group. mx represents any integer from 0 to 4. X 20 represents -O- or -NR 3 -. R 3 represents a hydrogen atom or a C1-C6 alkyl group. [3] X 1 is a single bond or a group represented by formula (X 1 -1’), formula (X 1 -3’) to formula (X 1 -10’), the resist composition according to [1] or [2]. TIFF2025104295000006.tif43120 [In formula (X 1 -1’), formula (X 1 -3’) to formula (X 1 -10’), *, ** are bonding sites, and ** represents L1 represents a binding site with [4] L 1 is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (in the chain hydrocarbon group, -CH2- may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (in the chain hydrocarbon group, -CH2- may be replaced by -O- or -CO-, and in the alicyclic hydrocarbon group, -CH2- may be replaced by -O- or -CO-). The resist composition according to any one of [1] to [3]. [5] The resist composition according to any one of [1] to [4], wherein the structural unit represented by formula (III) is the structural unit represented by formula (III-C). TIFF2025104295000007.tif4553 [In formula (III-C), R 4 , X 2 , X 3 and mk represent the same meaning as in formula (III). L 25 is a single bond or *-(L 26 -X 21 ) nb -, where * represents the binding site with X 2 and represents. L 26 represents an alkanediyl group having 1 to 8 carbon atoms. X 21 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. nb represents 0 or 1. [6] The resist composition according to any one of [1] to [5], wherein the second resin further contains a structural unit having an acid-labile group. [7] The resist composition according to [6], wherein the structural unit having an acid-labile group contains at least one structural unit selected from the group consisting of the structural unit represented by formula (a1-0), the structural unit represented by formula (a1-1), the structural unit represented by formula (a1-2), the structural unit represented by formula (a1-4), the structural unit represented by formula (a1-5), and the structural unit represented by formula (a1-6). TIFF2025104295000008.tif44144[In formulas (a1-0), (a1-1), and (a1-2), L a01 、L a1 and L a2 each independently represents -O- or *-O-(CH2) k1 -CO-O-, k1 represents an integer from 1 to 7, and * represents the bonding site with -CO-. R a01 、R a4 and R a5 each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 、R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R a6 and R a7 each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1’ represents an integer from 0 to 14. n1 represents an integer from 0 to 10. n1’ represents an integer from 0 to 3.] TIFF2025104295000009.tif32118[In formula (a1-4), R a1 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a17represents a halogen atom, a hydroxy group, a carboxy group, an optionally halogenated alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A a11 represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH2- contained in the alkanediyl group may be replaced by -O-, -CO- or -NR a18 -. R a18 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a1 represents a single bond or a carbonyl group. R a34 and R a35 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and -CH2- contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents any integer from 1 to 5. When na1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4. When na11 is 2 or more, the plurality of R a17 may be the same as or different from each other. mc represents any integer from 0 to 2.] TIFF2025104295000010.tif4558[In formula (a1-5), R a8 represents an optionally halogenated alkyl group having 1 to 6 carbon atoms, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH2) h3 -CO-L54 represents -, h3 represents an integer from 1 to 4, and * represents the bonding site with L 51 represents the bonding site with L L 51 L 52 L 53 and L 54 each independently represents -O- or -S- s1 represents an integer from 1 to 3 s1’ represents an integer from 0 to 3.] TIFF2025104295000011.tif3479[In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom R a62 R a63 and R a64 each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a62 and R a63 are bonded to each other to form a ring having 3 to 20 carbon atoms together with the carbon atom to which they are bonded X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents the bonding site with Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms X a62 represents a single bond, *-O-L a61 - or *-CO-O-L a62 -, where * represents the bonding site with Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms Ar represents an aromatic hydrocarbon group having 6 to 20 carbon atoms which may have a substituent.] [8] The resist composition according to any one of [1] to [7], wherein the acid generator contains a salt represented by formula (B1). TIFF2025104295000012.tif1395[In formula (B1), L b1represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb1 represents any integer from 1 to 6. When nb1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. Z1 + represents an organic cation. The resist composition according to any one of [1] to [8], further containing a salt that generates an acid having a lower acidity than the acid generated from the [9] acid generator.

[10] (1) A step of applying the resist composition according to any one of [1] to [9] onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for manufacturing a resist pattern including the above steps.

Advantages of the Invention

[0007] By using the resist composition of the present invention, a resist pattern can be manufactured with good line edge roughness (LER).

Embodiments for Carrying Out the Invention

[0008] In this specification, the term “(meth)acrylic monomer” means “at least one of acrylic monomers and methacrylic monomers”. Expressions such as “(meth)acrylate” and “(meth)acrylic acid” also represent the same meaning. Among the groups described in this specification, those that can take both a linear structure and a branched structure may be either of them. When -CH2- contained in a hydrocarbon group or the like is replaced by -O-, -S-, -CO-, -SO-, -NR X -(X is an arbitrary symbol) or -SO2-, the same examples shall apply to each group, and the carbon number before replacement shall be regarded as the carbon number of the hydrocarbon group or the like. The “combined group” means a group formed by bonding two or more of the exemplified groups, and the valences of these groups may be appropriately changed depending on the bonding form. “Derived from” or “derived” means that the polymerizable C═C bond contained in the molecule becomes a single bond (-C-C- group) by polymerization. When stereoisomers exist, all stereoisomers are included. The acid-labile group means, as described later, a group that, when contacted with an acid (for example, trifluoromethanesulfonic acid), the acid-labile group dissociates to form a carboxy group or a hydroxy group. The base-labile group means, as described later, a group that, when contacted with a base (for example, trimethylamine, tetramethylammonium hydroxide, etc.), the leaving group dissociates to form a hydrophilic group (for example, a carboxy group or a hydroxy group, etc.). Each group may have any position and number of hydrogen atoms contained in the group replaced at the bonding site depending on the number of substituents and the like. The carbon number in the substituent is not included in the carbon number of the group to be substituted. In this specification, the “solid content of the resist composition” means the total of the components excluding the solvent (E) described later from the total amount of the resist composition.

[0009] [Resist Composition] The resist composition of the present invention contains a first resin containing a structural unit represented by formula (I) and a structural unit represented by formula (III), a second resin containing a structural unit represented by formula (III), and an acid generator (hereinafter sometimes referred to as “acid generator (B)”). The resist composition of the present invention preferably contains a quencher such as a salt that generates an acid having a lower acidity than the acid generated from the acid generator (hereinafter sometimes referred to as "quencher (C)"), and preferably contains a solvent (hereinafter sometimes referred to as "solvent (E)").

[0010] <Resin> The resist composition of the present invention contains two or more resins, and at least a first resin (hereinafter sometimes referred to as "resin (A1)") containing a structural unit represented by formula (I) and a structural unit represented by formula (III), and a second resin (hereinafter sometimes referred to as "resin (A2)") containing a structural unit represented by formula (III). Both resin (A1) and resin (A2) are resins containing an acid-labile group, and are hereinafter sometimes referred to as "resin (A)". Resin (A) may contain resins other than resin (A1) and (A2) as described later. Resin (A2) preferably contains a structural unit having an acid-labile group in addition to the structural unit represented by formula (III).

[0011] 〈Resin (A1)〉 Resin (A1) contains a structural unit represented by formula (I) (hereinafter sometimes referred to as "structural unit (I)"). TIFF2025104295000013.tif3786[In formula (I), all symbols have the same meanings as described above.]

[0012] In formula (I), R 0 Examples of the alkyl group of include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, and an n-hexyl group, etc. Preferably, it is an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and still more preferably a methyl group or an ethyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, more preferably 1 to 3, and still more preferably 1 or 2. R 0Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 0 Examples of the alkyl group having a halogen atom of 0 include a fluorinated alkyl group, a chlorinated alkyl group, a brominated alkyl group, an iodinated alkyl group, etc. Specifically, a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a perchloromethyl group, a perbromomethyl group, a periodomethyl group, etc. may be mentioned. R 0 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0013] R 3 The alkyl group of 3 is the same as the alkyl group of R 0 0 .

[0014] In formula (I), when X 1 is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025104295000014.tif3351[In formula (X10), Ax represents the bonding species with the carbon atom to which R 0 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Ay represents the bonding species that binds to L 1 and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer of any one of 0 to 4. When mx is an integer of 2 or more, a plurality of Rx may be the same as or different from each other. When either Ax or Ay is a single bond, the other is preferably at least one selected from the group consisting of an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate ester bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR 3 -. Among others, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. X 1 For example, it includes a single bond and groups represented by the following formula (X 1 -1) to formula (X 1 -10). * represents the bonding position with the carbon atom to which -R 0 is bonded. ** represents the bonding position with L 1 is bonded. TIFF2025104295000015.tif45167 [In formula (X 1 -1) to formula (X 1 -10), all symbols represent the same meanings as described above respectively. Specific examples of the groups represented by formula (X 1 -1) to formula (X 1 -10) include the following groups. TIFF2025104295000016.tif88166 Among others, X 1 is preferably a single bond or a group represented by formula (X 1 -1), formula (X 1 -3’), or formula (X 1 -10’), and more preferably a single bond or a group represented by formula (X 1 -1), formula (X 1 -4’), formula (X 1 -5’), formula (X 1-6') and a group represented by formula (X 1 -10') is more preferably a single bond, a group represented by formula (X 1 -1), a group represented by formula (X 1 -5') or a group represented by formula (X 1 -6') is even more preferable.

[0015] L 1 Examples of the hydrocarbon group in include chain hydrocarbon groups such as alkanediyl groups, alicyclic hydrocarbon groups which are monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.), and aromatic hydrocarbon groups, and groups formed by combining two or more of these groups (for example, hydrocarbon groups formed from alicyclic hydrocarbon groups and chain hydrocarbon groups). Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. The number of carbon atoms of the chain hydrocarbon group may be 1 to 24, preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 9, even more preferably 1 to 6, and even more preferably 1 to 4.

[0016] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following groups, etc. The bonding site can be at any position. TIFF2025104295000017.tif47169 As the monocyclic alicyclic hydrocarbon group, cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group are preferable. As the polycyclic alicyclic hydrocarbon group, norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group are preferable. The number of carbon atoms of the alicyclic hydrocarbon group may be 3 to 24, preferably 3 to 18, more preferably 3 to 16, and still more preferably 3 to 12. Examples of the aromatic hydrocarbon group include arylene groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, etc. The number of carbon atoms of the aromatic hydrocarbon group may be 6 to 24, preferably 6 to 18, more preferably 6 to 14, and still more preferably 6 to 10. Examples of the group combined with two or more kinds include a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group combining an alicyclic hydrocarbon group, a chain hydrocarbon group and an aromatic hydrocarbon group, etc. In the combination, two or more kinds of alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and chain hydrocarbon groups may be combined respectively. Also, any group may be bonded to X 1 may be. Examples of a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group include a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group, and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - chain hydrocarbon group - alicyclic hydrocarbon group - chain hydrocarbon group - etc.), and the like. Examples of a group combining an aromatic hydrocarbon group and a chain hydrocarbon group include a group in which an aromatic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - aromatic hydrocarbon group - etc.), a group in which a chain hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group - chain hydrocarbon group - etc.), a group in which an aromatic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group - aromatic hydrocarbon group - chain hydrocarbon group - etc.), and the like. Examples of a group combining an alicyclic saturated hydrocarbon group and an aromatic hydrocarbon group include a group in which an aromatic hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group - aromatic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group is bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group - alicyclic hydrocarbon group - etc.), a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed (e.g., the following groups (the bonding site is at an arbitrary position), etc.), and the like. As a group combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, examples include a group in which an aromatic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-aromatic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an aromatic hydrocarbon group (e.g., *-aromatic hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), and the like. * represents X 1 and represents the bonding site with.

[0017] L 1 The -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms of L may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When the -CH2- contained in the hydrocarbon group having 1 to 36 carbon atoms of L is replaced by -O-, -S-, -SO2- or -CO-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2 at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), and an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyloxy group (a group in which any -CH2-CH2- in the alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which any -CH2-CH2-CH2- in the alkyl group is replaced by -O-CO-O-), an alkanedioxy group (a group in which any -CH2- in the alkanedioxy group is replaced by -O-), an alkanedioxycarbonyl group (a group in which any -CH2-CH2- in the alkanedioxy group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which any -CH2-CH2- in the alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which any -CH2- in the alkanediyl group is replaced by -SO2-), an alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in the methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in the methylene group is replaced by -SO2-), a cycloalkoxy group, a cycloalkylalkoxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, and the like can be mentioned.

[0018] Examples of the alkoxy group include alkoxy groups having 1 to 35 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, and the like. The number of carbon atoms of the alkoxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 35 carbon atoms, such as methylthio group, ethylthio group, propylthio group, butylthio group, pentylthio group, hexylthio group, octylthio group, 2-ethylhexylthio group, nonylthio group, decylthio group, undecylthio group and the like. The number of carbon atoms of the alkylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 35 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 36 carbon atoms, such as acetyl group, propionyl group and butyryl group and the like. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 35 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 16 carbon atoms, such as butoxycarbonyloxy group and the like. The number of carbon atoms of the alkoxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group may be 2 to 17, preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group and the alkoxycarbonyloxy group may each be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 35 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group, butylsulfonyl group, pentylsulfonyl group, hexylsulfonyl group, octylsulfonyl group, 2-ethylhexylsulfonyl group, nonylsulfonyl group, decylsulfonyl group, undecylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxy group include alkanediyl-oxy groups having 1 to 35 carbon atoms, such as methylene-oxy group, ethylene-oxy group, propanediyl-oxy group, butanediyl-oxy group, pentanediyl-oxy group and the like. The number of carbon atoms of the alkanediyl-oxy group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl-oxycarbonyl group include alkanediyl-oxycarbonyl groups having 2 to 35 carbon atoms, such as a methylene-oxycarbonyl group, an ethylene-oxycarbonyl group, a propanediyl-oxycarbonyl group, and a butanediyl-oxycarbonyl group. Examples of the alkanediyl-carbonyl group include alkanediyl-carbonyl groups having 2 to 36 carbon atoms, such as a methylene-carbonyl group, an ethylene-carbonyl group, a propanediyl-carbonyl group, a butanediyl-carbonyl group, and a pentanediyl-carbonyl group. Examples of the alkanediyl-carbonyloxy group include alkanediyl-carbonyloxy groups having 2 to 35 carbon atoms, such as a methylene-carbonyloxy group, an ethylene-carbonyloxy group, a propanediyl-carbonyloxy group, and a butanediyl-carbonyloxy group. The number of carbon atoms in the alkanediyl-oxycarbonyl group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyl group may be 2 to 17, preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms in the alkanediyl-carbonyloxy group may be 2 to 17, preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl-sulfonyl group include alkanediyl-sulfonyl groups having 1 to 35 carbon atoms, such as a methylene-sulfonyl group, an ethylene-sulfonyl group, and a propylene-sulfonyl group. The number of carbon atoms in the alkanediyl-sulfonyl group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylthio group include alkanediylthio groups having 1 to 35 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propylene thio group. The number of carbon atoms in the alkanediylthio group may be 1 to 17, preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 35 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 35 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl oxy group include aromatic hydrocarbon group-carbonyl oxy groups having 7 to 35 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 35 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 34 carbon atoms, such as a phenyloxy group.

[0019] Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. -O- or -CO- in the groups represented below may be replaced by -S- or -SO2- respectively. The bonding site can be at any position. Examples of the group in which -CH2- contained in the group formed by condensation of an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025104295000020.tif26164

[0020] L 1 Examples of the substituent that L may have include a halogen atom and a cyano group. L 1In the case of a group combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group with a chain hydrocarbon group, an alkanediyl group can be a substituent of the alicyclic hydrocarbon group or the aromatic hydrocarbon group. Also, L 1 When -CH2- contained in the chain hydrocarbon group contained in 1 is replaced with -O-, -CO-, -S- or -SO2-, L 1 substantially can have substituents such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group and the like. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. L 1 The substituent that L may have is preferably an alkyl group having 1 to 4 carbon atoms, a hydroxy group or a halogen atom, more preferably an alkyl group having 1 to 4 carbon atoms or a halogen atom, and even more preferably a methyl group or a fluorine atom.

[0021] L 1is preferably a single bond, an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-). More preferably, it is a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted aromatic hydrocarbon group having 6 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-). Even more preferably, it is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an optionally substituted aromatic hydrocarbon group having 6 to 14 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-).

[0022] Also, L 1 is a single bond, an alkanediyl group having 1 to 8 carbon atoms, or *-L 12 -W 11 -L 13 -X 13 -L 14 (L 12 and L 13 are a single bond or an alkanediyl group having 1 to 8 carbon atoms which may have a substituent, W 11 represents a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-. * represents the bonding site with X 1 and X 13 represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents the bonding site with W 11 and). In this case, L 1 is a single bond, an alkanediyl group having 1 to 4 carbon atoms or **-W 14 -X 13 -L 15 (*, W 14 and X 13 have the same meanings as described above. L 15 represents an alkanediyl group having 1 to 4 carbon atoms). It is also preferable that it is a single bond or a methylene group W 11 The cyclic hydrocarbon group in and L 11 -L 15 Examples of the chain hydrocarbon group in include the same groups as those exemplified above within the range where the upper limit of the number of carbon atoms permits L 12 is preferably a single bond, a methylene group or an ethylene group L 13 is preferably a single bond or a methylene group L 14 and L 15 are preferably methylene groups W 11is a monocyclic or polycyclic cyclic hydrocarbon group having 6 to 12 carbon atoms (the cyclic hydrocarbon group may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), preferably a polycyclic alicyclic hydrocarbon group having 7 to 11 carbon atoms (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), more preferably a methylene group, a group represented by the following formula (W 11 -1), a group represented by the formula (W 11 -2), a group represented by the formula (W 11 -3), or a group represented by the formula (W 11 -4), even more preferably a group represented by the formula (W 11 -2). * represents a bonding site. TIFF2025104295000021.tif3598 [In the formula, * represents a bonding site. X 14 represents -CH2-, -O-, -S-.] The group represented by the above formula (W 11 -1), the formula (W 11 -2), the formula (W 11 -3) or the formula (W 11 -4) is more preferably a group represented by the following formula (W 11 -1’), the formula (W 11 -2’), the formula (W 11 -3’) or the formula (W 11 -4’). TIFF2025104295000022.tif3598

[0023] L 1 The cyclic ether bonded to is a group represented by the following formula (IC). TIFF2025104295000023.tif2972 [In the formula (IC), s1, t1, R A and u1 represent the same meanings as described above. * represents the bonding site with L 1 .] s1 is preferably 1, t1 is preferably 1, and the sum of s1 and t1 is preferably 2. The group represented by formula (IC) is preferably a group represented by the following. TIFF2025104295000024.tif2594[In the formula, all symbols represent the same meaning as in formula (IC).]

[0024] In the group represented by formula (IC), when u1 is 1 and R A is L 1 the group bonded to the carbon atom adjacent to is represented by the following formula (IC-1). TIFF2025104295000025.tif3165[In formula (IC-1), all symbols represent the same meaning as in formula (IC).] R A Examples of the saturated hydrocarbon group of R R A include chain saturated hydrocarbon groups such as alkyl groups, alicyclic saturated hydrocarbon groups, and groups combining two or more of these. Examples of the alkyl group of R include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, octyl group, nonyl group, etc. The number of carbon atoms in the chain saturated hydrocarbon group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0025] Examples of the structural unit (I) include, for example, the following structural units. TIFF2025104295000026.tif170167

[0026] In the structural units represented by Formula (I-1) to Formula (I-18), the methyl group corresponding to R in Formula (I) 0 is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group, and the structural unit and R 1 in which the hydrogen atom corresponding to is replaced by a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (I). Among them, the structural units represented by Formula (I-1) to Formula (I-4), Formula (I-9), and Formula (I-12) to Formula (I-18) are preferred, the structural units represented by Formula (I-1), Formula (I-4), Formula (I-9), and Formula (I-12) to Formula (I-15) are more preferred, and the structural units represented by Formula (I-1), Formula (I-9), and Formula (I-12) to Formula (I-15) are even more preferred.

[0027] The structural unit (I) is derived from a compound represented by Formula (I’) (hereinafter sometimes referred to as “compound (I’)”). TIFF2025104295000027.tif3790[In Formula (I’), the symbols have the same meanings as described above.] The compound (I’) may be a commercially available product or may be produced by a known method.

[0028] The resin (A1) contains a structural unit represented by Formula (III) (hereinafter sometimes referred to as “structural unit (III)”). TIFF2025104295000028.tif3381[In Formula (III), all the symbols have the same meanings as described above.]

[0029] R 4 Examples of the alkyl group having 1 to 6 carbon atoms, the halogen atom, and the alkyl group having 1 to 6 carbon atoms having a halogen atom in R 1 are the same as those of R R 4is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group. L 2 Examples of the hydrocarbon group in 2 include chain hydrocarbon groups, alicyclic hydrocarbon groups which are monocyclic or polycyclic (including spiro rings, condensed rings, bridged rings, etc.), and cyclic hydrocarbon groups such as aromatic hydrocarbon groups. A group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as alkanediyl groups, alkanetriyl groups, alkanetetrayl groups, and alkanepentayl groups. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, and 2-methylbutane-1,4-diyl group. Examples of the alkanetriyl group include a methanetriyl group, an ethanetriyl group, a propanetriyl group, a butanetriyl group, a pentanetriyl group, a hexanetriyl group, a heptanetriyl group, an octanetriyl group, a nonanetriyl group, a decanetriyl group, an undecanetriyl group, a dodecanetriyl group, a tridecanetriyl group, a tetradecanetriyl group, a pentadecanetriyl group, a hexadecanetriyl group, a heptadecanetriyl group, and the like. Examples of the alkanetetrayl group include a methanetetrayl group, an ethanetetrayl group, a propanetetrayl group, a butanetetrayl group, a pentanetetrayl group, a hexanetetrayl group, a heptanetetrayl group, an octanetetrayl group, a nonanetetrayl group, a decanetetrayl group, an undecanetetrayl group, a dodecanetetrayl group, a tridecanetetrayl group, a tetradecanetetrayl group, a pentadecanetetrayl group, a hexadecanetetrayl group, a heptadecanetetrayl group, and the like. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced with a bonding site. The number of carbon atoms in the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0030] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups and the like. The bonding site can be at any position. TIFF2025104295000029.tif46168 For example, divalent to pentavalent alicyclic hydrocarbon groups such as a cycloalkanediyl group, a cycloalkanetriyl group, a cycloalkanetetrayl group, a cycloalkanepentayl group, and the like can be mentioned. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, cyclopropanetriyl group, cyclobutanetriyl group, cyclopentanetriyl group, cyclohexanetriyl group, cycloheptanetriyl group, cyclooctanetriyl group, cyclodecanetriyl group, cyclopropanetetrayl group, cyclobutanetetrayl group, cyclopentanetetrayl group, cyclohexanetetrayl group, cycloheptanetetrayl group, cyclooctanetetrayl group, cyclodecanetetrayl group, etc. and polycyclic alicyclic hydrocarbon groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, decahydronaphthalenediyl group, bicyclo[3.3.0]octanediy group, norbornanetriyl group, adamantanetriyl group, decahydronaphthalenetriyl group, bicyclo[3.3.0]octanetriyl group, norbornanetetrayl group, adamantanetetrayl group, decahydronaphthalenetetrayl group, bicyclo[3.3.0]octanetetrayl group, etc. may be mentioned. In addition, groups in which one or more hydrogen atoms of the above-mentioned groups are replaced by bonding sites, etc. may also be mentioned. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 20, more preferably 3 to 18, still more preferably 3 to 16, and even more preferably 3 to 12. Examples of the aromatic hydrocarbon group include divalent to pentavalent aromatic hydrocarbon groups such as arylene group, arenetriyl group, arenetetrayl group, arenepentayl group, etc. Specifically, aromatic hydrocarbon groups such as phenylene group, naphthylene group, anthrylene group, biphenylene group, phenanthrylene group, benzenetriyl group, naphthalenetriyl group, anthracenetriyl group, biphenylenetriyl group, phenanthrenetriyl group, benzenetetrayl group, naphthalenetetrayl group, anthracenetetrayl group, biphenylenetetrayl group, phenanthrenetetrayl group, etc. may be mentioned. In addition, groups in which one or more of the hydrogen atoms of the above-described base are replaced with a bonding site, etc. may also be mentioned. The number of carbon atoms of the aromatic hydrocarbon group is preferably 6 to 20, more preferably 6 to 18, still more preferably 6 to 14, and even more preferably 6 to 10.

[0031] Examples of the group formed by combining two or more types include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an aromatic hydrocarbon group and a chain hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group, a group formed by combining an alicyclic hydrocarbon group, a chain hydrocarbon group, and an aromatic hydrocarbon group, etc. In the combination, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the chain hydrocarbon group may each be combined with two or more types. Also, any group may be bonded to X 2 and may be bonded. Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, a group in which one or more alicyclic hydrocarbon groups are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-(alicyclic hydrocarbon group-) mk etc.), a group in which one or more chain hydrocarbon groups are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-(chain hydrocarbon group-) mk etc.), a group in which one or more alicyclic hydrocarbon groups and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-(alicyclic hydrocarbon group-chain hydrocarbon group-) mk , *-chain hydrocarbon group-alicyclic hydrocarbon group-(chain hydrocarbon group-) mk etc.), a group in which one or more chain hydrocarbon groups and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-(chain hydrocarbon group-alicyclic hydrocarbon group-) mk , *-alicyclic hydrocarbon group-chain hydrocarbon group-(alicyclic hydrocarbon group-) mk etc.), a group in which one or more alicyclic hydrocarbon groups, a chain hydrocarbon group, and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-(chain hydrocarbon group-alicyclic hydrocarbon group-) mk , *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-(alicyclic hydrocarbon group-) mkgroups such as an alicyclic hydrocarbon group, a group in which one or more linear hydrocarbon groups and alicyclic hydrocarbon groups and linear hydrocarbon groups are bonded to the alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-(linear hydrocarbon group-alicyclic hydrocarbon group-linear hydrocarbon group-) mk *-alicyclic hydrocarbon group-linear hydrocarbon group-alicyclic hydrocarbon group-(linear hydrocarbon group-) mk and the like can be mentioned. Examples of the group combining an aromatic hydrocarbon group and a linear hydrocarbon group include a group in which one or more aromatic hydrocarbon groups are bonded to the linear hydrocarbon group (for example, *-linear hydrocarbon group-(aromatic hydrocarbon group-) mk and the like), a group in which one or more linear hydrocarbon groups are bonded to the aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-(linear hydrocarbon group-) mk and the like), a group in which one or more aromatic hydrocarbon groups and linear hydrocarbon groups are bonded to the linear hydrocarbon group (for example, *-linear hydrocarbon group-(aromatic hydrocarbon group-linear hydrocarbon group-) mk *-linear hydrocarbon group-aromatic hydrocarbon group-(linear hydrocarbon group-) mk and the like can be mentioned. Examples of the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group include a group in which one or more aromatic hydrocarbon groups are bonded to the alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-(aromatic hydrocarbon group-) mk and the like), a group in which one or more alicyclic hydrocarbon groups are bonded to the aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-(alicyclic hydrocarbon group-) mk and the like), a group in which an alicyclic hydrocarbon group and an aromatic hydrocarbon group are condensed (for example, the following groups (the bonding site is an arbitrary position) and the like) and the like can be mentioned. TIFF2025104295000030.tif22166 Examples of the group combining an alicyclic hydrocarbon group, a linear hydrocarbon group, and an aromatic hydrocarbon group include a group in which one or more aromatic hydrocarbon groups and linear hydrocarbon groups are bonded to the alicyclic hydrocarbon group (for example, *-alicyclic hydrocarbon group-aromatic hydrocarbon group-(linear hydrocarbon group-) mk and the like), a group in which one or more alicyclic hydrocarbon groups and linear hydrocarbon groups are bonded to the aromatic hydrocarbon group (for example, *-aromatic hydrocarbon group-alicyclic hydrocarbon group-(linear hydrocarbon group-) mk and the like can be mentioned. * is X2 Represents the binding site to

[0032] L 2 In the hydrocarbon group having 1 to 28 carbon atoms of L, -CH2- may be replaced by -O-, -S-, -SO2- or -CO-. L 2 When -CH2- contained in the hydrocarbon group having 1 to 28 carbon atoms of L is replaced by -O-, -S-, -SO2- or -CO-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. Examples of groups in which -CH2- contained in a hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group (a group in which -CH2- contained in a methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in an ethyl group is replaced by -O-CO-), a thiol group (a group in which -CH2- contained in a methyl group is replaced by -S-), an alkoxy group (a group in which -CH2- at any position contained in an alkyl group is replaced by -O-), an alkylthio group (a group in which -CH2- at any position contained in an alkyl group is replaced by -S-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-), an alkylsulfonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -SO2-), an alkylcarbonyl group (a group in which -CH2- at any position contained in an alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in an alkyl group is replaced by -O-CO-O-), an oxy group (a group in which -CH2- contained in a methylene group is replaced by -O-), a carbonyl group (a group in which -CH2- contained in a methylene group is replaced by -CO-), a thio group (a group in which -CH2- contained in a methylene group is replaced by -S-), a sulfonyl group (a group in which -CH2- contained in a methylene group is replaced by -SO2-), an alkanedioxy group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -O-CO-), an alkanediylcarbonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -CO-), an alkanediylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in an alkanediyl group is replaced by -CO-O-), an alkanediylsulfonyl group (a group in which -CH2- at any position contained in an alkanediyl group is replaced by -SO2-),An alkanediylthio group (a group in which any -CH2- in the alkanediyl group is replaced by -S-), a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, an aromatic hydrocarbon group-carbonyl-oxy group, an aromatic hydrocarbon group-carbonyl group, an aromatic hydrocarbon group-oxy group, a group formed by combining two or more of these groups, etc. may be mentioned. Further, a group in which one or more hydrogen atoms of these groups are replaced at the bonding site, etc. may also be mentioned. Examples of the alkoxy group include alkoxy groups having 1 to 27 carbon atoms, such as a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, an octyloxy group, a 2-ethylhexyloxy group, a nonyloxy group, a decyloxy group, an undecyloxy group, etc. The number of carbon atoms of the alkoxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkylthio group include alkylthio groups having 1 to 27 carbon atoms, such as a methylthio group, an ethylthio group, a propylthio group, a butylthio group, etc. The number of carbon atoms of the alkylthio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkoxycarbonyl group include alkoxycarbonyl groups having 2 to 27 carbon atoms, such as methoxycarbonyl group, ethoxycarbonyl group, butoxycarbonyl group and the like. Examples of the alkylcarbonyl group include alkylcarbonyl groups having 2 to 28 carbon atoms, such as acetyl group, propionyl group and butyryl group. Examples of the alkylcarbonyloxy group include alkylcarbonyloxy groups having 2 to 27 carbon atoms, such as acetyloxy group, propionyloxy group, butyryloxy group and the like. Examples of the alkoxycarbonyloxy group include alkoxycarbonyloxy groups having 2 to 26 carbon atoms, such as butoxycarbonyloxy group. The number of carbon atoms of the alkoxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkylcarbonyloxy group and the alkoxycarbonyloxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3, respectively. Examples of the alkylsulfonyl group include alkylsulfonyl groups having 1 to 27 carbon atoms, such as methylsulfonyl group, ethylsulfonyl group, propylsulfonyl group and the like. The number of carbon atoms of the alkylsulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanedioxy group include alkanedioxy groups having 1 to 27 carbon atoms, such as methyleneoxy group, ethyleneoxy group, propanedioxy group, butanedioxy group, pentanedioxy group and the like. The number of carbon atoms of the alkanedioxy group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl oxycarbonyl group include alkanediyl oxycarbonyl groups having 2 to 27 carbon atoms, such as a methylene oxycarbonyl group, an ethylene oxycarbonyl group, a propane diyl oxycarbonyl group, and a butane diyl oxycarbonyl group. Examples of the alkanediyl carbonyl group include alkanediyl carbonyl groups having 2 to 28 carbon atoms, such as a methylene carbonyl group, an ethylene carbonyl group, a propane diyl carbonyl group, a butane diyl carbonyl group, and a pentane diyl carbonyl group. Examples of the alkanediyl carbonyl oxy group include alkanediyl carbonyl oxy groups having 2 to 27 carbon atoms, such as a methylene carbonyl oxy group, an ethylene carbonyl oxy group, a propane diyl carbonyl oxy group, and a butane diyl carbonyl oxy group. The number of carbon atoms of the alkanediyl oxycarbonyl group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl carbonyl group is preferably 2 to 12, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. The number of carbon atoms of the alkanediyl carbonyl oxy group is preferably 2 to 11, more preferably 2 to 6, still more preferably 2 to 4, and even more preferably 2 or 3. Examples of the alkanediyl thio group include alkanediyl thio groups having 1 to 27 carbon atoms, such as a methylene thio group, an ethylene thio group, and a propane diyl thio group. The number of carbon atoms of the alkanediyl thio group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediyl sulfonyl group include alkanediyl sulfonyl groups having 1 to 27 carbon atoms, such as a methylene sulfonyl group, an ethylene sulfonyl group, and a propylene sulfonyl group. The number of carbon atoms of the alkanediyl sulfonyl group is preferably 1 to 11, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3.

[0033] Examples of the cycloalkoxy group include cycloalkoxy groups having 3 to 27 carbon atoms, such as a cyclohexyloxy group. Examples of the cycloalkylalkoxy group include cycloalkylalkoxy groups having 4 to 27 carbon atoms, such as a cyclohexylmethoxy group. Examples of the aromatic hydrocarbon group-carbonyl-oxy group include aromatic hydrocarbon group-carbonyl-oxy groups having 7 to 27 carbon atoms, such as a benzoyloxy group. Examples of the aromatic hydrocarbon group-carbonyl group include aromatic hydrocarbon group-carbonyl groups having 7 to 27 carbon atoms, such as a benzoyl group. Examples of the aromatic hydrocarbon group-oxy group include aromatic hydrocarbon group-oxy groups having 6 to 27 carbon atoms, such as a phenyloxy group.

[0034] Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the following groups. Among the groups represented below, groups in which -O- is replaced by -S- and -CO- is replaced by -SO2- are also included. The bonding site can be at any position. Examples of the group in which -CH2- contained in the combined group is replaced by -O-, -S-, -CO- or -SO2- also include the following groups. The bonding site can be at any position. TIFF2025104295000032.tif26164L 2 The hydrocarbon group in [group name] may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 12 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L 2The hydrocarbon group in [substance] can have a substituent such as a haloalkyl group by having a halogen atom as a substituent. Examples of the haloalkyl group include a chloromethyl group, a bromomethyl group, a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. A haloalkyl group having 1 to 4 carbon atoms is preferred, and a haloalkyl group having 1 to 3 carbon atoms is more preferred. L 2 Since the hydrocarbon group of [substance] contains a branched structure, L 2 can have a substituent such as an alkyl group. Examples of the alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, a 2-ethylhexyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 10, more preferably 1 to 8, still more preferably 1 to 6, even more preferably 1 to 4, and even more preferably 1 to 3. L 2 Due to the group in which -CH2- contained in the hydrocarbon group of [substance] is replaced by -O- or -CO-, L 2 can have a substituent such as a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group. L 2 Preferred substituents that the hydrocarbon group in [substance] may have include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, or an alkyl group having 1 to 6 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). More preferred are a fluorine atom, an iodine atom, a haloalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). Even more preferred are a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group.

[0035] L 2is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 8 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 20 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), preferably an optionally substituted chain hydrocarbon group having 1 to 10 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining an optionally substituted chain hydrocarbon group having 1 to 6 carbon atoms and an optionally substituted cyclic hydrocarbon group having 3 to 18 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-), more preferably an optionally substituted chain hydrocarbon group having 1 to 9 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or an optionally substituted cyclic hydrocarbon group having 3 to 16 carbon atoms (provided that -CH2- contained in the cyclic hydrocarbon group may be replaced by -O- or -CO-), still more preferably a chain hydrocarbon group having 1 to 9 carbon atoms (provided that -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms (provided that -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-or an aromatic hydrocarbon group having 6 to 10 carbon atoms (provided that the aromatic hydrocarbon group may have one or more halogen atoms, one or more alkyl groups having 1 to 3 carbon atoms, one or more haloalkyl groups having 1 to 3 carbon atoms, or one or more alkoxy groups having 1 to 3 carbon atoms).), more preferably a chain hydrocarbon group having 1 to 6 carbon atoms or an aromatic hydrocarbon group having 6 carbon atoms (the aromatic hydrocarbon group may have one or more halogen atoms, one or more alkyl groups having 1 to 3 carbon atoms, or one or more alkoxy groups having 1 to 3 carbon atoms).), even more preferably. Also, L 2 is *-L 22 (-)mk or *-L 22 (-X 23 -L 23 -)mk (L 22 represents a chain hydrocarbon group having 1 to 10 carbon atoms which may have a substituent, a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or a group combining a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with X 2 X 23 represents **-CO-O-, **-O-CO-, **-O-CO-O- or **-O-, and ** represents the bonding site with L 22 L 23 represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-.) is also preferable. Combinations of the chain hydrocarbon group and the cyclic hydrocarbon group include *-chain hydrocarbon group - alicyclic hydrocarbon group or aromatic hydrocarbon group -, *-alicyclic hydrocarbon group or aromatic hydrocarbon group - chain hydrocarbon group -, *-chain hydrocarbon group - alicyclic hydrocarbon group or aromatic hydrocarbon group - chain hydrocarbon group -, etc. * represents the bonding site with X 2 X Examples of the substituent that each group may have include L 2Groups similar to those listed as substituents which may be possessed are listed. L 22 Examples of the cyclic hydrocarbon group of L 2 include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group formed by condensing these, etc., and groups similar to those exemplified by L L 22 and L 23 Examples of the chain hydrocarbon group of L 2 include groups similar to those exemplified by L L 22 is preferably a chain hydrocarbon group having 1 to 9 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), or a group formed by combining a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent and a chain hydrocarbon group having 1 to 4 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-); more preferably a chain hydrocarbon group having 1 to 9 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-) or a cyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O- or -CO-); still more preferably a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-) or a cyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O- or -CO-). L 23is preferably a chain hydrocarbon group having 1 to 4 carbon atoms which may have a single bond or a substituent, more preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms, even more preferably a single bond, a methylene group or an ethylene group, and even more preferably a single bond or a methylene group. mk is preferably any integer from 1 to 3, and preferably 1 or 2.

[0036] L 2 As the structural unit (III) formed of a chain hydrocarbon group, for example, the following structural units and the like can be mentioned. TIFF2025104295000033.tif114162

[0037] L 2 When L is an alicyclic hydrocarbon group or a group combining an alicyclic hydrocarbon group and a chain hydrocarbon group, examples of the structural unit (III) include the following structural units and the like. TIFF2025104295000034.tif4895[In formulas (III-A) and (III-B), R 4 、X 3 and mk represent the same meanings as in formula (III). L 24 represents -O- or *-O-(CH2) k2 -CO-O-. k2 represents any integer from 1 to 7, and * represents the bonding site with -CO-. R 24 represents an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. ml represents any integer from 0 to 4, satisfies 1≦mk + ml≦5, and when ml is 2 or more, the plurality of Rs 24 may be the same or different from each other. R 25 and R 26Each independently represents a hydrogen atom, a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. R 27 represents a halogen atom, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. mn represents any integer from 0 to 6, and when mn is 2 or more, a plurality of Rs 27 may be the same or different from each other.

[0038] In Formula (III-A) and Formula (III-B), R 24 , R 25 , R 26 and R 27 The alkyl group having 1 to 6 carbon atoms, the alkoxy group having 1 to 6 carbon atoms, the alkoxyalkyl group having 2 to 12 carbon atoms, the alkoxyalkoxy group having 2 to 12 carbon atoms, the alkylcarbonyl group having 2 to 4 carbon atoms, the alkylcarbonyloxy group having 2 to 4 carbon atoms, the acryloyloxy group or the methacryloyloxy group of are groups exemplified by L 2 as long as the upper limit of the number of carbon atoms allows. R 24 is more preferably a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a methoxy group or an ethoxyethoxy group. R 25 is preferably a hydrogen atom, a hydroxy group or a carboxy group. R 26 is preferably a hydrogen atom, a hydroxy group or a carboxy group, and preferably a hydrogen atom. R 27A methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group is more preferable, and a methoxy group or an ethoxyethoxy group is even more preferable. ml and mn are each preferably 0. L 24 is -O- or k2 is 1 to 4 *-O-(CH2) k2 -CO-O- is preferable, and more preferably -O-. mk is preferably 1 to 3, and more preferably 1 or 2.

[0039] Examples of the structural unit (III-A) and the structural unit (III-B) include structural units derived from the monomers described in JP-A-2010-204646 and the following structural units. R in the structural unit (III-A) and the structural unit (III-B) 4 Examples thereof include structural units in which the methyl group corresponding to is replaced with a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group. TIFF2025104295000035.tif91160

[0040] TIFF2025104295000036.tif99136

[0041] L 2 When is an aromatic hydrocarbon group or a group combining a chain hydrocarbon group and an aromatic hydrocarbon group, examples of the structural unit (III) include the following structural units. TIFF2025104295000037.tif3173[In formula (III-C), R 4 、X 2 、X 3 and mk represent the same meanings as in formula (III). R 24 and ml represent the same meanings as in formula (III-A). L 25 is a single bond or *-(L 26 -X 21 ) nb - represents, and * is X 2represents the binding site with []. L 26 represents an alkanediyl group having 1 to 8 carbon atoms. X 21 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. nb represents 0 or 1.

[0042] In formula (III-C), R 24 includes the same groups as those exemplified in formula (III-A). In formula (III-C), R 24 is preferably a halogen atom, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxymethoxy group, and even more preferably a fluorine atom, an iodine atom, a methyl group, a methoxy group or an ethoxyethoxy group.

[0043] ml is preferably 0, 1 or 2, more preferably 0 or 1. In formula (III-C), at least one of -X 3 -OH is preferably bonded to the meta-position or para-position of the benzene ring, more preferably to the meta-position. When two -X 3 -OH are bonded to the phenyl group, each -X 3 -OH is preferably bonded to the meta-position and para-position.

[0044] Examples of the structural unit (III-C) include structural units derived from monomers described in JP-A-2010-204634 and JP-A-2012-12577, and structural units exemplified below. In the structural units represented below, structural units in which the methyl group corresponding to R 4 in the structural unit (III-C) is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or another alkyl group are included. TIFF2025104295000038.tif172168

[0045] The structural unit (III) is derived from a compound represented by the formula (III’) (hereinafter sometimes referred to as “compound (III’)”). TIFF2025104295000039.tif3377[In the formula (III’), R 4 , X 2 , L 2 , X 3 and mk represent the same meanings as described above.] The compound (III’) may be a commercially available product or may be produced by a known method.

[0046] The content of the structural unit (I) in the resin (A1) is preferably 5 mol% or more, more preferably 1 mol% or more, still more preferably 3 mol% or more, and even more preferably 5 mol% or more, based on all the structural units of the resin (A1). Further, it is preferably 90 mol% or less, more preferably 80 mol% or less, still more preferably 70 mol% or less. Also, 1 to 90 mol% is preferable, 3 to 80 mol% is more preferable, and 5 to 70 mol% is still more preferable. The content of the structural unit (III) in the resin (A1) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 20 mol% or more, and even more preferably 30 mol% or more, based on all the structural units of the resin (A1). Further, it is preferably 99 mol% or less, more preferably 97 mol% or less, still more preferably 95 mol% or less. Also, 5 to 99 mol% is preferable, 10 to 97 mol% is more preferable, and 20 to 95 mol% is still more preferable. In the resin (A1), the total content of the structural unit (I) and the structural unit (III) is preferably 20 mol% or more, more preferably 30 mol% or more, still more preferably 40 mol% or more, even more preferably 50 mol% or more, and still even more preferably 60 mol% or more, based on the total of all the structural units of the resin (A1). Further, 100 mol% or less can be mentioned. Specifically, 20 to 100 mol% is preferable, 30 to 100 mol% is more preferable, 40 to 100 mol% is still more preferable, 50 to 100 mol% is even more preferable, and 60 to 100 mol% is still even more preferable. The composition ratio of structural unit (I) and structural unit (III) in resin (A1) is preferably in the range of 1:99 to 90:10, more preferably 5:95 to 70:30.

[0047] Each of the structural units (I) and (III) constituting the resin (A1) may be only one kind or a combination of two or more kinds. The resin (A1) may contain a structural unit having an acid-labile group (however, excluding structural units (I) and (III)), but in the resin (A1), the content of the structural unit having an acid-labile group is preferably 60 mol% or less, more preferably 55 mol% or less, based on all the structural units of the resin (A1). The resin (A1) may contain a structural unit having no acid-labile group (however, excluding structural units (I) and (III)) and the like. In the resin (A1), the content of the structural unit having no acid-labile group and the like is preferably 80 mol% or less, more preferably 70 mol% or less, further preferably 60 mol% or less, still more preferably 50 mol% or less, and even more preferably 40 mol% or less, based on the total of all the structural units of the resin (A1). The resin (A1) can be produced by combining one or more of each of the compound (I') and the compound (III'), and further optionally combining one or more of monomers having no acid-labile group described below, by a known polymerization method (for example, radical polymerization method). The weight average molecular weight of the resin (A1) is preferably 5,000 or more (more preferably 6,000 or more, still more preferably 7,000 or more), 80,000 or less (more preferably 50,000 or less, still more preferably 30,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. The weight average molecular weight is determined as a conversion value based on standard polystyrene by gel permeation chromatography analysis, and the detailed analysis conditions of this analysis are described in detail in the examples of the present application. Note that the structural units (I) and (III) may constitute dimers, trimers, or compounds having a weight average molecular weight of less than 2,000.

[0048] 〈Resin (A2)〉 Resin (A2) does not contain structural unit (I) and is a resin containing the above-mentioned structural unit (III). Resin (A2) preferably further contains structural units other than structural unit (III), and more preferably contains a structural unit having an acid-labile group (hereinafter sometimes referred to as "structural unit (a1)"). Examples of the structural units other than structural unit (III) and structural unit (a1) include a structural unit having no acid-labile group (hereinafter sometimes referred to as "structural unit (s)"), a structural unit other than structural unit (a1) and structural unit (s) (for example, a structural unit having a halogen atom described later (hereinafter sometimes referred to as "structural unit (a4)"), a structural unit having a non-leaving hydrocarbon group described later (hereinafter sometimes referred to as "structural unit (a5)"), and structural units derived from other monomers known in the art, etc.). The content of structural unit (III) in resin (A2) is preferably 5 mol% or more, more preferably 10 mol% or more, still more preferably 15 mol% or more, and even more preferably 20 mol% or more with respect to all the structural units constituting resin (A2). Also, it is preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less. Among structural unit (III), structural unit (III-C) is preferably 5 to 80 mol%, more preferably 10 to 70 mol%, still more preferably 15 to 65 mol%, and even more preferably 20 to 65 mol% with respect to all the structural units constituting resin (A2).

[0049] 〈Structural unit (a1)〉 Structural unit (a1) is derived from a monomer having an acid-labile group (hereinafter sometimes referred to as "monomer (a1)"). The acid-labile group contained in resin (A), etc. is preferably a group represented by formula (1) (hereinafter also referred to as "group (1)") and / or a group represented by formula (2) (hereinafter also referred to as "group (2)"). TIFF2025104295000040.tif2298[In formula (1), R a1 , R a2 and R a3each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, or R a1 and R a2 are bonded to each other to form, together with the carbon atom to which they are bonded, an alicyclic hydrocarbon group having 3 to 20 carbon atoms, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. ma and na each independently represent 0 or 1, and at least one of ma and na represents 1. * represents a bonding site.] TIFF2025104295000041.tif2278[In formula (2), R a1’ and R a2’ each independently represent a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, R a3’ represents a hydrocarbon group having 1 to 20 carbon atoms, or R a2’ and R a3’ are bonded to each other to form, together with the carbon atom to which they are bonded and X, a heterocyclic group having 3 to 20 carbon atoms, and the -CH2- contained in the hydrocarbon group and the heterocyclic group may be replaced by -O- or -S-, and the hydrocarbon group and the heterocyclic group may have a halogen atom. X represents an oxygen atom or a sulfur atom. na’ represents 0 or 1. * represents a bonding site.]

[0050] R a1 、R a2 and R a3 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, etc. R a1 、R a2 and R a3 Examples of the alkenyl group in include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group. Ra1 , R a2 and R a3 The alicyclic hydrocarbon groups in R a1 , R a2 and R a3 can be either monocyclic or polycyclic. Examples of monocyclic alicyclic hydrocarbon groups include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, etc. Examples of polycyclic alicyclic hydrocarbon groups include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents the bonding site). R TIFF2025104295000042.tif10159R a1 , R a2 and R a3 Examples of the aromatic hydrocarbon groups in R Examples of the combined groups include groups combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group, etc.), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc.), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group, etc.), aryl-cycloalkyl groups such as phenylcyclohexyl group, etc. Preferably, ma is 0 and na is 1. R a1 and R a2 When R a1 (R a2 (R a3) includes the following groups. The alicyclic hydrocarbon group preferably has 3 to 12 carbon atoms. * represents the bonding site with -O-. TIFF2025104295000043.tif27139

[0051] R a1’ , R a2’ and R a3’ Examples of the hydrocarbon group in include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these groups. Alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these groups are R a1 , R a2 and R a3 Examples of the groups include the same groups as those listed in the above. R a2’ and R a3’ When they are bonded to each other to form a heterocycle together with the carbon atom to which they are attached and X, -C(R a1’ )(R a2’ )-XR a3’ Examples of the group include the following: * represents a binding site. TIFF2025104295000044.tif19124R a1’ and R a2’ At least one of these is preferably a hydrogen atom. na' is preferably 0. R a1 , R a2 , R a3 , R a1 , R a2’ and R a3’ The halogen atom which may be contained includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom.

[0052] Examples of the group (1) include the following groups. In formula (1), R a1 , R a2 and R a3 is an alkyl group, ma = 0, and na = 1. As the group, a tert-butoxycarbonyl group is preferable. In formula (1), R a1 and R a2 together with the carbon atom to which they are attached form an adamantyl group, R a3 is an alkyl group, ma = 0, and na = 1 group. In formula (1), R a1 and R a2 are each independently an alkyl group, R a3 is an adamantyl group, ma = 0, and na = 1 group. Specific examples of the group (1) include the following groups. * represents a bonding site. TIFF2025104295000045.tif151162

[0053] Specific examples of the group (2) include the following groups. * represents a bonding site. TIFF2025104295000046.tif55153

[0054] The monomer (a1) is preferably a monomer having an acid-labile group and an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer having an acid-labile group. Among the (meth)acrylic monomers having an acid-labile group, preferably those having an alicyclic hydrocarbon group having 5 to 20 carbon atoms can be mentioned. If a resin (A) or the like having a structural unit derived from a monomer (a1) having a bulky structure such as an alicyclic hydrocarbon group is used in the resist composition, the resolution of the resist pattern can be improved.

[0055] Examples of the structural unit derived from the (meth)acrylic monomer having the group (1) include a structural unit represented by formula (a1-0) (hereinafter, sometimes referred to as structural unit (a1-0)), a structural unit represented by formula (a1-1) (hereinafter, sometimes referred to as structural unit (a1-1)), or a structural unit represented by formula (a1-2) (hereinafter, sometimes referred to as structural unit (a1-2)). Preferably, it is at least one structural unit selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1) and the structural unit (a1-2), more preferably at least one or two structural units selected from the group consisting of the structural unit (a1-1) and the structural unit (a1-2). These may be used alone or in combination of two or more. TIFF2025104295000047.tif44144 [In formula (a1-0), formula (a1-1) and formula (a1-2), all symbols have the same meaning as above.]

[0056] R a01 , R a4 and R a5 The halogen atom in the formula (I) includes a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R a01 , R a4 and R a5 Examples of the alkyl group which may have a halogen atom in the above formula include a trifluoromethyl group, a difluoromethyl group, a methyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, an ethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a propyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a butyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a pentyl group, a hexyl group, a perfluorohexyl group, a chloromethyl group, a bromomethyl group, and an iodomethyl group. The number of carbon atoms in the alkyl group is preferably 1 to 4, more preferably 1 to 3, and even more preferably 1 or 2. The alkyl group is preferably a methyl group or an ethyl group, and more preferably a methyl group. R a01 , Ra4 and R a5 is preferably a hydrogen atom or a methyl group, more preferably a methyl group. L a01 L a1 and L a2 is preferably an oxygen atom or *-O-(CH2) k01 -CO-O- (wherein k01 is preferably any integer from 1 to 4, more preferably 1), and more preferably an oxygen atom. R a02 R a03 and R a04 Examples of the alkyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof for R a1 R a2 and R a3 in a3 are the same as those exemplified for the groups of R R a6 and R a7 Examples of the alkyl group, alkenyl group, alicyclic hydrocarbon group, aromatic hydrocarbon group, and combinations thereof for R a1 R a2 and R a3 in a3 are the same as those exemplified for the groups of R R a02 R a03 and R a04 The alkyl group for R R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group or an ethyl group, and still more preferably a methyl group. R a6 and R a7 is preferably an alkyl group having 1 to 6 carbon atoms, more preferably a methyl group, an ethyl group, an isopropyl group, or a t-butyl group, and still more preferably an ethyl group, an isopropyl group, or a t-butyl group. R a02 R a03 R a04 Ra6 and R a7 The number of carbon atoms of the alicyclic hydrocarbon group of is preferably 5 to 12, more preferably 5 to 10. R a02 、R a03 、R a04 、R a6 and R a7 The number of carbon atoms of the aromatic hydrocarbon group of is preferably 6 to 12, more preferably 6 to 10. For the group combining an alkyl group and an alicyclic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and alicyclic hydrocarbon group is 18 or less. For the group combining an alkyl group and an aromatic hydrocarbon group, it is preferable that the total number of carbon atoms of these alkyl group and aromatic hydrocarbon group is 18 or less. R a02 and R a03 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a phenyl group or a naphthyl group which may have a halogen atom. R a04 is preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom or an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, a cyclohexyl group or an adamantyl group which may have a halogen atom. R a6 and R a7 are preferably an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkenyl group having 2 to 6 carbon atoms which may have a halogen atom or an aromatic hydrocarbon group having 6 to 12 carbon atoms which may have a halogen atom, more preferably a methyl group, an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group, a phenyl group or a naphthyl group which may have a halogen atom, still more preferably an ethyl group, an isopropyl group, a t-butyl group, an ethenyl group or a phenyl group which may have a halogen atom. m1’ is preferably any integer from 0 to 3, more preferably 0 or 1. n1 is preferably any integer from 0 to 3, more preferably 0 or 1. n1’ is preferably 0 or 1.

[0057] Examples of the structural unit (a1-0) include structural units represented by any of formula (a1-0-1) to formula (a1-0-24) and structural units in which the methyl group corresponding to R in the structural unit (a1-0) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-0-1) to formula (a1-0-10), formula (a1-0-13), formula (a1-0-14), formula (a1-0-19) to formula (a1-0-24) are preferred. a01 Examples of the structural unit (a1-1) include structural units derived from the monomers described in JP-A-2010-204646. Among them, structural units represented by any of formula (a1-1-1) to formula (a1-1-7) and structural units in which the methyl group corresponding to R in the structural unit (a1-1) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group are preferred, and structural units represented by any of formula (a1-1-1) to formula (a1-1-4) are more preferred. TIFF2025104295000048.tif119160

[0058] Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. a4 Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. TIFF2025104295000049.tif38168

[0059] Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. a5 Examples of the structural unit (a1-2) include structural units represented by any of formula (a1-2-1) to formula (a1-2-20) and structural units in which the methyl group corresponding to R in the structural unit (a1-2) is replaced with a hydrogen atom, a halogen atom, a haloalkyl group, or another alkyl group. Structural units represented by any of formula (a1-2-2), formula (a1-2-5), formula (a1-2-6), and formula (a1-2-10) to formula (a1-2-20) are preferred. TIFF2025104295000050.tif96164

[0060] When the resin (A2) contains the structural unit (a1-0) and / or the structural unit (a1-1) and / or the structural unit (a1-2), the total content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A2). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 95 mol%, preferably 15 to 90 mol%, more preferably 20 to 85 mol%, still more preferably 25 to 70 mol%, and even more preferably 30 to 70 mol%. When the resin (A2) contains the structural unit (a1-0), the content thereof is 5 mol% or more, preferably 10 mol% or more, more preferably 15 mol% or more, still more preferably 20 mol% or more, even more preferably 25 mol% or more, still even more preferably 30 mol% or more, and even more preferably 35 mol% or more, based on all the structural units such as the resin (A2). Also, it is 80 mol% or less, preferably 75 mol% or less, more preferably 70 mol% or less, still more preferably 65 mol% or less, and even more preferably 60 mol% or less. Specifically, it is 5 to 80 mol%, preferably 5 to 75 mol%, and more preferably 10 to 70 mol%. When the resin (A2) contains the structural unit (a1-1) and / or the structural unit (a1-2), the total content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A2). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is 10 to 90 mol%, preferably 15 to 85 mol%, more preferably 15 to 80 mol%, still more preferably 20 to 80 mol%, even more preferably 20 to 75 mol%, and still even more preferably 20 to 70 mol%.

[0061] Examples of the structural unit having the group (2) in the structural unit (a1) include the structural unit represented by the formula (a1-4) (hereinafter sometimes referred to as "structural unit (a1-4)"). TIFF2025104295000051.tif32118[In the formula (a1-4), all the symbols have the same meanings as described above.]

[0062] R a1 and R a17 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R a01 are the same as those exemplified by R of the formula (a1-0). R a1 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group. R a17Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably an alkoxy group having 1 to 3 carbon atoms, still more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. R a17 Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably an alkoxyalkyl group having 2 to 4 carbon atoms, still more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. R a17 Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably an alkoxyalkoxy group having 2 to 4 carbon atoms, still more preferably a methoxyethoxy group or an ethoxyethoxy group. R a17 Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 4 carbon atoms, more preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and still more preferably an acetyl group. R a17 Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 4 carbon atoms, more preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and still more preferably an acetyloxy group. Ra17 is preferably a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 4 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 4 carbon atoms or an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group or an ethoxy methoxy group, and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group or an ethoxyethoxy group.

[0063] A a11 Examples of the alkanediyl group of include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, etc., and branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group, heptane-1,6-diyl group, octane-1,7-diyl group, nonane-1,8-diyl group, decane-1,9-diyl group, undecane-1,10-diyl group, etc. The number of carbon atoms of the alkanediyl group is preferably 1 to 10, more preferably 1 to 8, even more preferably 1 to 6, still more preferably 1 to 4, even still more preferably 1 to 3, and even more preferably 1 or 2. R a18 Examples of the alkyl group of include methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group and tert-butyl group. A a11 When -CH2- contained in the alkanediyl group of is replaced by -O-, -CO- or -NR a18 -, the number of carbon atoms before replacement is taken as the number of carbon atoms of the alkanediyl group. A a11The -CH2- contained in the alkanediyl group is replaced by -O-, -CO- or -NR a18 Examples of the group replaced by - include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an amino group (where -CH2- contained in the methyl group is replaced by -NR a18 -), an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylamino group (where any -CH2- at an arbitrary position contained in the alkyl group is replaced by -NR a18 -), a peptide group (where -CH2-CH2- contained in the ethylene group is replaced by -CO-NR a18 -), an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediyl-carbonyl group, an alkanediyl-carbonyl-oxy group, an alkanediyl-sulfonyl group, an alkanediyl-thio group, an alkanediyl-amino group (where any -CH2- at an arbitrary position contained in the alkanediyl group is replaced by -NR a18 -), etc. These replaced groups include those similar to those exemplified herein, within the range allowed by the upper limit of the number of carbon atoms. Examples of the alkylamino group include alkylamino groups having 1 to 11 carbon atoms, such as a methylamino group, an ethylamino group, a propylamino group, a butylamino group, a pentylamino group, a hexylamino group, an octylamino group, etc. The number of carbon atoms of the alkylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. Examples of the alkanediylamino group include alkanediylamino groups having 1 to 11 carbon atoms, such as a methyleneamino group, an ethyleneamino group, a propyleneamino group, etc. The number of carbon atoms of the alkanediylamino group is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. For example, A a11 The -CH2- contained in the alkanediyl group is replaced by -O-, -CO- or -NR a18 Examples of the group replaced by - include *-O-, *-CO-O-, *-O-CO-, *-CO-O-A a12 -CO-O-, *-O-CO-Aa12 -O-, *-O-A a12 -CO-O-, *-CO-O-A a12 -O-CO-, *-O-CO-A a12 -O-CO-, *-CO-NR a18 - are mentioned. Among them, *-CO-O-, *-CO-O-A a12 -CO-O-, *-O-A a12 -CO-O-, *-CO-NR a18 - are preferred. Here, A a12 represents an alkanediyl group having 1 to 8 carbon atoms, and * represents the bonding site with the carbon atom to which R a1 is bonded. The alkanediyl group of A a12 includes alkanediyl groups similar to A a11 within the range allowed by the upper limit of the number of carbon atoms. A a11 is preferably a single bond, *-CO-O- or *-CO-O-A a12 -CO-O-, more preferably a single bond, *-CO-O- or *-CO-O-CH2-CO-O-, and even more preferably a single bond or *-CO-O-. na1 is preferably 1, 2, 3 or 4, more preferably 1, 2 or 3, and even more preferably 1 or 2. na11 is preferably 0, 1, 2 or 3, more preferably 0, 1 or 2, and even more preferably 0 or 1. mc is preferably 0 or 1.

[0064] R a34 、R a35 and R a36 The hydrocarbon groups in include alkyl groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups combining these. Examples of the alkyl group include methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, etc. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group and the like. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group and the following groups (* represents the bonding site). Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, naphthyl group, anthryl group, biphenyl group, phenanthryl group and the like. Examples of the combined group include a group formed by combining the above-mentioned alkyl group and alicyclic hydrocarbon group (for example, alkylcycloalkyl groups or cycloalkylalkyl groups such as methylcyclohexyl group, dimethylcyclohexyl group, methylnorbornyl group, cyclohexylmethyl group, adamantylmethyl group, adamantyldimethyl group, norbornylethyl group and the like), aralkyl groups such as benzyl group, aromatic hydrocarbon groups having an alkyl group (p-methylphenyl group, p-tert-butylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group and the like), aromatic hydrocarbon groups having an alicyclic hydrocarbon group (p-cyclohexylphenyl group, p-adamantylphenyl group and the like), aryl-cycloalkyl groups such as phenylcyclohexyl group and the like. In particular, R a36 Examples include an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these. R a35 and R a36 Examples of the divalent hydrocarbon group having 2 to 20 carbon atoms formed by R and R bonding to each other together with the -C-O- to which they are bonded include, for example, the following groups. * represents the bonding site, and one side is the bonding site with R a34 TIFF2025104295000053.tif15105

[0065] R a34 is preferably a hydrogen atom.​ R a35 is preferably a hydrogen atom, an alkyl group having 1 to 12 carbon atoms or an alicyclic hydrocarbon group having 3 to 12 carbon atoms, more preferably a methyl group or an ethyl group. R a36 The hydrocarbon group of is preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms or a group formed by combining these, more preferably an alkyl group having 1 to 18 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aralkyl group having 7 to 18 carbon atoms. R a36 The alkyl group and the alicyclic hydrocarbon group in are preferably unsubstituted. R a36 The aromatic hydrocarbon group in preferably has an aromatic ring having an aryloxy group having 6 to 10 carbon atoms.

[0066] -O-C(R a34 )(R a35 )-O-R a36 in the structural unit (a1-4) eliminates upon contact with an acid (for example, p-toluenesulfonic acid) to form a hydroxy group or a carboxy group. -X a1 -O-C(R a34 )(R a35 )-O-R a36 In the case of a benzene ring, it may be bonded to any of the o-position, m-position or p-position with respect to the bonding position of A a11 . Among them, it is preferable that at least one is bonded to the o-position or p-position, and more preferably bonded to the p-position. In the case of a naphthalene ring, when the bonding position of A a11 is at the 1-position, it may be bonded to any of the 2-position to 8-position, and when the bonding position of A a11 is at the 2-position, it may be bonded to any of the 1-position and 3-position to 8-position. Among them, when the bonding position of A a11 is at the 1-position, it is preferable that at least one is bonded to the 3-position to 6-position, and more preferably bonded to the 3-position or 4-position. When the bonding position of A a11 is at the 2-position, it is preferable that it is bonded to the 4-position to 7-position, and more preferably bonded to the 5-position or 6-position.

[0067] Examples of the structural unit (a1-4) include structural units derived from monomers described in JP-A-2010-204646. Preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-42) and the R in the structural unit (a1-4) a1 include structural units in which the hydrogen atom corresponding to is replaced with a halogen atom, a haloalkyl group, or an alkyl group. More preferably, the structural units represented by formula (a1-4-1) to formula (a1-4-5), formula (a1-4-10), formula (a1-4-13), formula (a1-4-14), formula (a1-4-19), and formula (a1-4-20) are included. TIFF2025104295000054.tif191169

[0068] When the resin (A2) contains the structural unit (a1-4), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on the total of all the structural units of the resin (A2). Also, 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 65 mol% or less. Specifically, it is preferably 10 to 95 mol%, more preferably 15 to 90 mol%, still more preferably 20 to 85 mol%, even more preferably 20 to 70 mol%, and still even more preferably 20 to 65 mol%.

[0069] Examples of the structural unit derived from a (meth)acrylic monomer having the group (2) include the structural unit represented by formula (a1-5) (hereinafter sometimes referred to as "structural unit (a1-5)"). TIFF2025104295000055.tif4558[In formula (a1-5), all the symbols have the same meanings as described above.]

[0070] R a8 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R are the same as those exemplified by the formula (a1-0) a01 and the like. In the formula (a1-5), R a8 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. L 51 is preferably an oxygen atom. L 52 and L 53 Among them, it is preferable that one is -O- and the other is -S-. s1 is preferably 1. s1' is preferably any integer from 0 to 2. Z a1 is preferably a single bond or *-CH2-CO-O-.

[0071] Examples of the structural unit (a1-5) include, for example, the structural units derived from the monomers described in JP-A-2010-61117. Among them, the structural units represented by the formula (a1-5-1) to the formula (a1-5-4) are preferable, and the structural unit represented by the formula (a1-5-1) or the formula (a1-5-2) is more preferable. When the resin (A2) contains the structural unit (a1-5), its content is 1 mol% or more, preferably 2 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, even more preferably 10 mol% or more, still even more preferably 20 mol% or more, and even more preferably 25 mol% or more, based on all the structural units of the resin (A). Also, it is 80 mol% or less, preferably 70 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 45 mol% or less, still even more preferably 40 mol% or less, and even more preferably 30 mol% or less. Specifically, 1 to 50 mol% is preferable, 3 to 45 mol% is more preferable, 5 to 40 mol% is still more preferable, and 5 to 30 mol% is even more preferable.

[0072] Examples of the structural unit having the group (1) in the structural unit (a1) include the structural unit represented by the formula (a1-6) (hereinafter sometimes referred to as "structural unit (a1-6)"). TIFF2025104295000057.tif3479[In the formula (a1-6), all the symbols have the same meanings as described above.]

[0073] R a61 Examples of the halogen atom and the alkyl group having 1 to 6 carbon atoms which may have a halogen atom in R a01 are the same as those exemplified above. R a61 is preferably a hydrogen atom, a methyl group or a trifluoromethyl group. R a62 、R a63 、R a64 and R a65 Examples of the alkyl group in include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group and the like. The alkyl group is preferably an alkyl group having 1 to 4 carbon atoms, more preferably an alkyl group having 1 to 3 carbon atoms, and still more preferably a methyl group or an ethyl group. Ra62 , R a63 and R a64 Examples of the cyclic hydrocarbon group in R and R include an alicyclic hydrocarbon group and an aromatic hydrocarbon group. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, etc. Examples of the polycyclic alicyclic hydrocarbon group include a decahydronaphthyl group, an adamantyl group, a norbornyl group, etc. The number of carbon atoms of the alicyclic hydrocarbon group is preferably 3 to 16, more preferably 3 to 12. Examples of the aromatic hydrocarbon group include a phenylene group, a naphthylene group, etc. Examples of the substituent that the cyclic hydrocarbon group may have include a halogen atom, a hydroxy group, an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group, etc. R a62 and R a63 Examples of the ring formed by R and R bonding to each other include an adamantane ring, a cyclopentane ring, a cyclohexane ring, etc. Specifically, examples of -C(R)(R)(R) when R and R bond to each other to form a ring include the following groups. * represents the bonding site with an oxygen atom. The number of carbon atoms of the ring is preferably 3 to 16, more preferably 3 to 12. a62 and R a63 when R and R bond to each other to form a ring a62 (R a63 (R a64 ) include the following groups. * represents the bonding site with an oxygen atom. The number of carbon atoms of the ring is preferably 3 to 16, more preferably 3 to 12. TIFF2025104295000058.tif33109

[0074] L a61 and L a62Examples of the C1-C4 alkanediyl group include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. L a61 and L a62 are each independently preferably a methylene group or an ethylene group. X a61 is preferably a single bond or -CO-O-*, more preferably a single bond. X a62 is preferably a single bond or *-O-L a61 -, more preferably a single bond.

[0075] Examples of the C6-C20 aromatic hydrocarbon group of Ar include a phenylene group, a naphthylene group, an anthrylene group, a biphenylene group, and a phenanthrylene group. Examples of the substituent that the aromatic hydrocarbon group may have include a halogen atom, a hydroxy group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a C2-C12 alkoxyalkyl group, a C2-C12 alkoxyalkoxy group, a C2-C4 alkylcarbonyl group, a C2-C4 alkylcarbonyloxy group, an acryloyloxy group, or a methacryloyloxy group.

[0076] Examples of the halogen atom include a fluorine atom, an iodine atom, a chlorine atom, and a bromine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. The alkyl group is preferably a C1-C4 alkyl group, more preferably a methyl group or an ethyl group, and even more preferably a methyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, an isopropoxy group, a butoxy group, a sec-butoxy group, a tert-butoxy group, a pentyloxy group, and a hexyloxy group. The alkoxy group is preferably an alkoxy group having 1 to 4 carbon atoms, more preferably a methoxy group or an ethoxy group, and even more preferably a methoxy group. Examples of the alkoxyalkyl group include a methoxymethyl group, an ethoxyethyl group, a propoxymethyl group, an isopropoxymethyl group, a butoxymethyl group, a sec-butoxymethyl group, and a tert-butoxymethyl group. The alkoxyalkyl group is preferably an alkoxyalkyl group having 2 to 8 carbon atoms, more preferably a methoxymethyl group or an ethoxyethyl group, and even more preferably a methoxymethyl group. Examples of the alkoxyalkoxy group include a methoxymethoxy group, a methoxyethoxy group, an ethoxymethoxy group, an ethoxyethoxy group, a propoxymethoxy group, an isopropoxymethoxy group, a butoxymethoxy group, a sec-butoxymethoxy group, and a tert-butoxymethoxy group. The alkoxyalkoxy group is preferably an alkoxyalkoxy group having 2 to 8 carbon atoms, more preferably a methoxyethoxy group or an ethoxyethoxy group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group. The alkylcarbonyl group is preferably an alkylcarbonyl group having 2 to 3 carbon atoms, and more preferably an acetyl group. Examples of the alkylcarbonyloxy group include an acetyloxy group, a propionyloxy group, and a butyryloxy group. The alkylcarbonyloxy group is preferably an alkylcarbonyloxy group having 2 to 3 carbon atoms, and more preferably an acetyloxy group. Examples of the substituent include a halogen atom, a hydroxy group, an alkyl group having 1 to 4 carbon atoms, an alkoxy group having 1 to 4 carbon atoms, or an alkoxyalkoxy group having 2 to 8 carbon atoms. More preferred examples include a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, an ethoxy group, an ethoxyethoxy group, or an ethoxymethoxy group. Even more preferred examples include a fluorine atom, an iodine atom, a hydroxy group, a methyl group, a methoxy group, or an ethoxyethoxy group. Ar is preferably a phenylene group which may have a substituent, more preferably a phenylene group which may have a hydroxy group.

[0077] Examples of the structural unit (a1-6) include structural units represented by Formula (a1-6-1) to Formula (a1-6-44), etc. Structural units represented by Formula (a1-6-1) to Formula (a1-6-9) are preferable, structural units represented by Formula (a1-6-1), Formula (a1-6-2), Formula (a1-6-4), Formula (a1-6-5), Formula (a1-6-7) or Formula (a1-6-8) are more preferable, and structural units represented by Formula (a1-6-1) or Formula (a1-6-2) are even more preferable. In the following structural units, the hydrogen atom corresponding to R a61 replaced by a methyl group or the like, and in the following structural units, the methyl group corresponding to R a61 replaced by a hydrogen atom or the like are also included as the structural unit (a1-6). TIFF2025104295000059.tif227164

[0078] When the resin (A2) contains the structural unit (a1-6), its content is 3 mol% or more, preferably 5 mol% or more, more preferably 7 mol% or more, even more preferably 10 mol% or more, still more preferably 20 mol% or more, still even more preferably 30 mol% or more, and even more preferably 40 mol% or more with respect to all the structural units of the resin (A2). Also, 80 mol% or less is included, preferably 75 mol% or less, more preferably 70 mol% or less, even more preferably 65 mol% or less. Specifically, it is preferably 3 to 80 mol%, more preferably 5 to 75 mol%, even more preferably 7 to 70 mol%, still even more preferably 7 to 65 mol%, and particularly preferably 10 to 60 mol%.

[0079] Examples of the structural unit (a1) also include the following structural units. TIFF2025104295000060.tif33167

[0080] When the resin (A2) contains structural units represented by the formulas (a1-7-1) to (a1-7-7), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A2). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 95 mol% is preferable, 15 to 90 mol% is more preferable, 20 to 85 mol% is still more preferable, 20 to 70 mol% is even more preferably, and 20 to 60 mol% is particularly preferable.

[0081] In addition, as the structural unit (a1), the following structural units are also included. TIFF2025104295000061.tif51120 When the resin (A2) contains structural units represented by the formulas (a1-8-1) to (a1-8-3), the content thereof is 10 mol% or more, preferably 15 mol% or more, more preferably 20 mol% or more, still more preferably 25 mol% or more, even more preferably 30 mol% or more, still even more preferably 40 mol% or more, and even more preferably 50 mol% or more, based on all the structural units of the resin (A2). Also, it is 95 mol% or less, preferably 90 mol% or less, more preferably 85 mol% or less, still more preferably 80 mol% or less, even more preferably 75 mol% or less, still even more preferably 70 mol% or less, and even more preferably 60 mol% or less. Specifically, 10 to 60 mol% is preferable, 15 to 55 mol% is more preferable, 20 to 50 mol% is still more preferable, 20 to 45 mol% is even more preferably, and 20 to 40 mol% is particularly preferable.

[0082] 〈Structural unit(s)〉 The structural unit(s) is / are derived from a monomer having no acid-labile group (hereinafter sometimes referred to as "monomer(s)"). As the monomer from which the structural unit(s) is / are derived, a monomer having no acid-labile group known in the resist field can be used. The structural unit(s) preferably has a lactone ring. If a resin having a structural unit having a lactone ring and no acid-labile group (hereinafter sometimes referred to as "structural unit (a3)") is used in the resist composition of the present invention, the resolution of the resist pattern and the adhesion to the substrate can be improved.

[0083] 〈Structural unit (a3)〉 The lactone ring of the structural unit (a3) may be a monocyclic ring such as a β-propiolactone ring, a γ-butyrolactone ring, or a δ-valerolactone ring, or may be a condensed ring of a monocyclic lactone ring and another ring. Preferably, a γ-butyrolactone ring, an adamantanlactone ring, or a bridged ring containing a γ-butyrolactone ring structure (for example, a structural unit represented by the following formula (a3-2)) can be mentioned. The structural unit (a3) is preferably a structural unit represented by formula (a3-1), formula (a3-2), formula (a3-3), or formula (a3-4). These may be contained alone or in combination of two or more. TIFF2025104295000062.tif48155[In formula (a3-1), formula (a3-2), formula (a3-3), and formula (a3-4), L a4 、L a5 and L a6 each independently represents a group represented by -O- or *-O-(CH2) k3 -CO-O-(where k3 represents an integer from 1 to 7). L a7 represents -O-, *-O-L a8 -O-, *-O-L a8 -CO-O-, *-O-L a8 -CO-O-L a9 -CO-O- or *-O-L a8 -O-CO-L a9 -O-. L a8 and L a9 each independently represents an alkanediyl group having 1 to 6 carbon atoms. * indicates the bond position to the carbonyl group. R a18 , R a19 , R a20 and R a24 each independently represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom, or a halogen atom. X a3 represents -CH2- or an oxygen atom. R a21 represents an aliphatic hydrocarbon group having 1 to 4 carbon atoms. R a22 , R a23 and R a25 each independently represents a carboxy group, a cyano group, or an aliphatic hydrocarbon group having 1 to 4 carbon atoms. p1 represents an integer of 0 to 5. q1 represents an integer of 0 to 3. r1 represents an integer of 0 to 3. w1 represents an integer of 0 to 8. When p1, q1, r1 and / or w1 are 2 or more, multiple R a21 , R a22 , R a23 and / or R a25 may be the same or different.]

[0084] R a21 , R a22 , R a23 and R a25 Examples of the aliphatic hydrocarbon group in include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, and a tert-butyl group. R a18 , R a19 , R a20 and R a24 Examples of the halogen atom and the alkyl group optionally having a halogen atom in the formula (a1-0) include R a01 The same examples as those exemplified above are included. L a8 and L a9 Examples of the alkanediyl group in L include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, a 2-methylbutane-1,4-diyl group, and the like. L a4 ~L a6 are each independently preferably -O- or, *-O-(CH2) k3 -CO-O- in which k3 is an integer of any one of 1 to 4, more preferably -O- and, *-O-CH2-CO-O-, still more preferably an oxygen atom. L a7 is preferably -O- or *-O-L a8 -CO-O-, more preferably -O-, -O-CH2-CO-O- or -O-C2H4-CO-O-. R a18 , R a19 , R a20 and R a24 are preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, still more preferably a hydrogen atom or a methyl group. R a21 is preferably a methyl group. R a22 , R a23 and R a25 are each independently preferably a carboxy group, a cyano group or a methyl group. p1, q1 and r1 are each independently preferably an integer of any one of 0 to 2, more preferably 0 or 1. w1 is preferably an integer of any one of 0 to 2, more preferably 0 or 1. In particular, formula (a3-4) is preferably formula (a3-4)'. TIFF2025104295000063.tif3848 (wherein R a24, L a7 represents the same meaning as described above.)

[0085] Examples of the structural unit (a3) include structural units derived from the monomers described in JP-A-2010-204646, the monomers described in JP-A-2000-122294, and the monomers described in JP-A-2012-41274. Examples of the structural unit (a3) include structural units represented by any of formula (a3-1-1), formula (a3-1-2), formula (a3-2-1), formula (a3-2-2), formula (a3-3-1), formula (a3-3-2), and formula (a3-4-1) to formula (a3-4-12), and in the above structural units, R in formula (a3-1) to formula (a3-4) a18 , R a19 , R a20 and R a24 and structural units in which the methyl groups corresponding to R are replaced by hydrogen atoms are preferred. TIFF2025104295000064.tif108163

[0086] When the resin (A2) contains the structural unit (a3), the total content thereof is 1 mol% or more, preferably 3 mol% or more, more preferably 5 mol% or more, still more preferably 10 mol% or more, based on all the structural units of the resin (A2). Further, it is 70 mol% or less, preferably 65 mol% or less, more preferably 60 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, still even more preferably 25 mol% or less, and still even more preferably 20 mol% or less. Specifically, it is 1 to 70 mol%, preferably 1 to 65 mol%, more preferably 1 to 60 mol%, and still more preferably 3 to 60 mol%. Further, the content ratio of the structural unit (a3-1), the structural unit (a3-2), the structural unit (a3-3), or the structural unit (a3-4) is preferably 1 mol% or more, more preferably 3 mol% or more, still more preferably 5 mol% or more, and even more preferably 10 mol% or more, respectively, based on all the structural units of the resin (A). Also, it is preferably 60 mol% or less, more preferably 55 mol% or less, still more preferably 50 mol% or less, even more preferably 40 mol% or less, still even more preferably 30 mol% or less, even more preferably 25 mol% or less, and even more preferably 20 mol% or less. Specifically, 1 to 60 mol% is preferable, 3 to 50 mol% is more preferable, and 5 to 50 mol% is still more preferable.

[0087] 〈Structural unit (a4)〉 The structural unit represented by the formula (a4) is shown below. TIFF2025104295000065.tif2770[In the formula (a4), R 41 represents a hydrogen atom or a methyl group. R 42 represents an aliphatic hydrocarbon group having a halogen atom with 1 to 48 carbon atoms, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-.

[0088] R 42 The aliphatic hydrocarbon group represented by includes a linear or branched chain hydrocarbon group, a monocyclic or polycyclic alicyclic hydrocarbon group, and a group formed by combining these. Examples of the chain hydrocarbon group include linear alkyl groups such as methyl group, ethyl group, propyl group, butyl group, pentyl group, hexyl group, heptyl group, octyl group, decyl group, dodecyl group, pentadecyl group, hexadecyl group, heptadecyl group, and octadecyl group, and branched alkyl groups such as isopropyl group and isobutyl group. Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include a monocyclic alicyclic hydrocarbon group which is a monocyclic cycloalkyl group such as a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group; and a polycyclic alicyclic hydrocarbon group which is a polycyclic cycloalkyl group such as a decahydronaphthyl group, an adamantyl group, a norbornyl group and the following group (* represents the bonding site). Examples of the group formed by the combination of include a group formed by combining one or more alkyl groups or one or more alkanediyl groups with one or more alicyclic hydrocarbon groups, such as -alkanediyl group-alicyclic hydrocarbon group, -alicyclic hydrocarbon group-alkyl group, -alkanediyl group-alicyclic hydrocarbon group-alkyl group, etc. Examples of the alkanediyl group include a linear alkanediyl group such as a methylene group, an ethylene group, a propane-1,3-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group; and a branched alkanediyl group such as a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a 1-methylbutane-1,4-diyl group, a 2-methylbutane-1,4-diyl group. The terminal of the branched alkanediyl group may be a methyl group. R 42 Examples of the halogen atom of the aliphatic hydrocarbon group contained in include a fluorine atom, a chlorine atom, a bromine atom or an iodine atom. R 42 Examples of the group in which -CH2- of the aliphatic hydrocarbon group contained in is replaced by -O- or -CO- include a hydroxy group, a carboxy group, a carbonyl group, an oxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanediyl-oxy group, an alkanediyl-oxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, a cycloalkoxy group, a cycloalkylalkoxy group, and a group formed by combining two or more of these groups. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits.

[0089] As the structural unit (a4), R 42 is preferably an aliphatic hydrocarbon group having a fluorine atom, and R 42 Examples of the structural unit (a4) in which is an aliphatic hydrocarbon group having a fluorine atom include a structural unit represented by the formula (a4-1) (hereinafter sometimes referred to as "structural unit (a4-1)"), a structural unit represented by the formula (a4-2) (hereinafter sometimes referred to as "structural unit (a4-2)"), a structural unit represented by the formula (a4-3) (hereinafter sometimes referred to as "structural unit (a4-3)"), and a structural unit represented by the formula (a4-A) (hereinafter sometimes referred to as "structural unit (a4-A)"). The structural unit represented by the formula (a4-1) is the structural unit shown below. TIFF2025104295000067.tif3092 [In the formula (a4-1), R 41 represents a hydrogen atom or a methyl group. L 41 represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. L 42f represents an alkanediyl group having 1 to 8 carbon atoms and having a fluorine atom or a cycloalkanediyl group having 3 to 12 carbon atoms and having a fluorine atom. R 42f represents a hydrogen atom or a fluorine atom.]

[0090] L 41 Examples of the alkanediyl group in include linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, and a butane-1,4-diyl group, and branched alkanediyl groups such as an ethane-1,1-diyl group, a propane-1,2-diyl group, a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, and a 2-methylpropane-1,2-diyl group. The terminal of the branched alkanediyl group may be a methyl group. L 42fExamples of the alkanediyl group having a fluorine atom in [X] include linear alkanediyl groups having a fluorine atom such as a methylene group having a fluorine atom, an ethylene group having a fluorine atom, a propane-1,3-diyl group having a fluorine atom, a butane-1,4-diyl group having a fluorine atom, a pentane-1,5-diyl group having a fluorine atom, a hexane-1,6-diyl group having a fluorine atom, a heptane-1,7-diyl group having a fluorine atom, an octane-1,8-diyl group having a fluorine atom; branched alkanediyl groups having a fluorine atom such as an ethane-1,1-diyl group having a fluorine atom, a propane-1,1-diyl group having a fluorine atom, a propane-1,2-diyl group having a fluorine atom, a propane-2,2-diyl group having a fluorine atom, a pentane-2,4-diyl group having a fluorine atom, a 2-methylpropane-1,3-diyl group having a fluorine atom, a 2-methylpropane-1,2-diyl group having a fluorine atom, a pentane-1,4-diyl group having a fluorine atom, a 2-methylbutane-1,4-diyl group having a fluorine atom. The terminal of the branched alkanediyl group may be a methyl group which may have a fluorine atom. L 42f Examples of the cycloalkanediyl group having a fluorine atom in [X] include monocyclic cycloalkanediyl groups such as a cyclobutane-1,3-diyl group having a fluorine atom, a cyclopentane-1,3-diyl group having a fluorine atom, a cyclohexane-1,4-diyl group having a fluorine atom, a cyclohexene-3,6-diyl group having a fluorine atom, a cyclooctane-1,5-diyl group having a fluorine atom, and polycyclic cycloalkanediyl groups having a fluorine atom such as a norbornane-1,4-diyl group having a fluorine atom, a norbornane-2,5-diyl group having a fluorine atom, a 5-norbornene-2,3-diyl group having a fluorine atom, an adamantane-1,5-diyl group having a fluorine atom, an adamantane-2,6-diyl group having a fluorine atom. L 42f The number of fluorine atoms in the alkanediyl group and cycloalkanediyl group having a fluorine atom in [X] may be 1 or more, and is preferably 2 or more. L42f The alkanediyl group and the cycloalkanediyl group having a fluorine atom in are preferably a perfluoroalkanediyl group and a perfluorocycloalkanediyl group, respectively.

[0091] L 42f Examples of the perfluoroalkanediyl group in include a difluoromethylene group, a perfluoroethylene group, a perfluoroethylfluoromethylene group, a perfluoropropane-1,3-diyl group, a perfluoropropane-1,2-diyl group, a perfluoropropane-2,2-diyl group, a perfluorobutane-1,4-diyl group, a perfluorobutane-2,2-diyl group, a perfluorobutane-1,2-diyl group, a perfluoropentane-1,5-diyl group, a perfluoropentane-2,2-diyl group, a perfluoropentane-3,3-diyl group, a perfluorohexane-1,6-diyl group, a perfluorohexane-2,2-diyl group, a perfluorohexane-3,3-diyl group, a perfluoroheptane-1,7-diyl group, a perfluoroheptane-2,2-diyl group, a perfluoroheptane-3,4-diyl group, a perfluoroheptane-4,4-diyl group, a perfluorooctane-1,8-diyl group, a perfluorooctane-2,2-diyl group, a perfluorooctane-3,3-diyl group, a perfluorooctane-4,4-diyl group, and the like. L 42f Examples of the perfluorocycloalkanediyl group in include a perfluorocyclohexanediyl group, a perfluorocyclopentanediyl group, a perfluorocycloheptanediyl group, a perfluoroadamantanediyl group, and the like. L 41 is preferably a single bond or an alkanediyl group having 1 to 3 carbon atoms, more preferably a single bond, a methylene group or an ethylene group, and still more preferably a single bond or a methylene group. L 42fis preferably a perfluoroalkanediyl group having 1 to 8 carbon atoms or a perfluorocycloalkanediyl group having 3 to 12 carbon atoms, more preferably a perfluoroalkanediyl group having 1 to 6 carbon atoms, and still more preferably a perfluoroalkanediyl group having 1 to 3 carbon atoms. Examples of the structural unit (a4-1) include the structural units shown below and the structural units in the structural unit (a4-1) in the following structural units where the methyl group corresponding to R 41 is replaced by a hydrogen atom. TIFF2025104295000068.tif55167

[0092] The structural unit represented by the formula (a4-2) is the structural unit shown below. TIFF2025104295000069.tif33101[In the formula (a4-2), R 41 represents a hydrogen atom or a methyl group. L 43f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. R 43f represents a saturated hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 43f and R 43f has a fluorine atom, and the upper limit of the total number of carbon atoms of L 43f and R 43f is 21.]

[0093] Examples of the aliphatic hydrocarbon group in L 43f and R 43f include linear or branched chain hydrocarbon groups and monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these, etc. Examples of the aliphatic hydrocarbon group in L 43f and R 43f are as follows for L 43f and R 43fAs long as the upper limit of the total carbon number permits, R in formula (a4) 42 Examples of the aliphatic hydrocarbon group of 42 include the same groups as the exemplified aliphatic hydrocarbon groups.

[0094] L 43f As the aliphatic hydrocarbon group of 43f , an alkanediyl group having 1 to 6 carbon atoms or a group represented by formula (L43f-1) is preferable. TIFF2025104295000070.tif14120 [In formula (L43f-1), s represents 0 or 1. L 45f and L 46f each independently represent a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. L 47f represents a single bond or a divalent aliphatic hydrocarbon group having 1 to 5 carbon atoms which may have a fluorine atom. X 46f and X 47f each independently represent -O-, -CO-, -CO-O- or -O-CO-. However, the total carbon number of L 45f L 46f L 47f X 46f and X 47f is 7 or less. * and ** are bonding sites, and ** is the bonding site with -O-CO-R 43f .

[0095] In the group represented by formula (L43f-1), L 45f L 46f and L 47fExamples of the divalent aliphatic hydrocarbon group represented by include a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic hydrocarbon group, and a divalent aliphatic hydrocarbon group formed by combining an alkanediyl group and a divalent alicyclic hydrocarbon group. Specifically, examples include a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a 1-methylpropane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, and the like. s is preferably 0.

[0096] Examples of the group represented by the formula (L43f-1) include the following groups. In the following examples, * and ** each represent a bonding site, and ** is the bonding site with -O-CO-R 43f and. TIFF2025104295000071.tif47140

[0097] R 43f is preferably an aliphatic hydrocarbon group having a fluorine atom. Examples of the structural unit represented by the formula (a4-2) in this case include the structural units represented by the formula (a4-2A) or (formula a4-2B). TIFF2025104295000072.tif41157[In the formula (a4-2A) and the formula (a4-2B), R 41 and L 43f represent the same as those in the formula (a4-2). R 43fA represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms and having a fluorine atom. A 43f represents a divalent aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. X 43 represents **-O-CO- or **-CO-O-, and ** represents the bonding site with A 43f and. R 43fBrepresents an aliphatic hydrocarbon group having 1 to 17 carbon atoms which may have a fluorine atom. However, in formula (a4-2A), L 43f and R 43fA have a total carbon number of 21 or less, and in formula (a4-2B), L 43f , A 43f , X 43 and R 43fB have a total carbon number of 21 or less, and at least one of A 43f and R 43fB has at least one fluorine atom. R 43fA 's aliphatic hydrocarbon group includes, as long as the upper limit of the carbon number allows, the same aliphatic hydrocarbon groups as those exemplified by R 42 . R 43fA is preferably an alkyl group having 1 to 13 carbon atoms with a fluorine atom, a cycloalkyl group having 3 to 12 carbon atoms with a fluorine atom, or a group combining them, *-(CF2) n43f -R 42’ (* represents the bonding site with the carbonyl group. n43f represents any integer from 1 to 6. R 42’ represents a hydrogen atom or a fluorine atom.) or a perfluorocycloalkyl group having 3 to 12 carbon atoms is more preferable. A 43f and R 43fB 's aliphatic hydrocarbon group includes, as long as the upper limit of the carbon number allows, the same aliphatic hydrocarbon groups as those exemplified by R 42 in formula (a4). A 43f is preferably a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group or a group combining them which may have a fluorine atom, more preferably a divalent chain hydrocarbon group having a fluorine atom, and even more preferably a fluoroalkanediyl group having 1 to 6 carbon atoms. R 43fBThe aliphatic hydrocarbon group which may have a fluorine atom is preferably a chain hydrocarbon group, an alicyclic hydrocarbon group or a combination thereof which may have a fluorine atom, more preferably an alkyl group having 1 to 12 carbon atoms, a cycloalkyl group having 3 to 12 carbon atoms or a combination thereof which may have a fluorine atom, and trifluoromethyl group, difluoromethyl group, methyl group, perfluoroethyl group, 2,2,2-trifluoroethyl group, 1,1,2,2-tetrafluoroethyl group, ethyl group, perfluoropropyl group, 2,2,3,3,3-pentafluoropropyl group, propyl group, perfluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, butyl group, perfluoropentyl group, 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, pentyl group, hexyl group, perfluorohexyl group, heptyl group, perfluoroheptyl group, octyl group, perfluorooctyl group and other alkyl fluoride groups, cyclopropylmethyl group, cyclopropyl group, cyclobutylmethyl group, cyclopentyl group, cyclohexyl group, perfluorocyclohexyl group, adamantyl group, adamantylmethyl group, adamantyldimethyl group, norbornyl group, norbornylmethyl group, perfluoroadamantyl group, perfluoroadamantylmethyl group and the like are more preferable.

[0098] In formula (a4-2B), *-A f43 -X 43 -R f43B An example of the structure that the group represented by can take is the following structure (* is the bonding site with the carbonyl group). TIFF2025104295000073.tif14170

[0099] Examples of the structural unit represented by formula (a4-2A) include the following structural units and the structural units in which the methyl group corresponding to R in the structural unit represented by formula (a4-2A) below is replaced by a hydrogen atom. 41 are mentioned. TIFF2025104295000074.tif99167

[0100] Examples of the structural unit represented by the formula (a4-2B) include the following structural units and structural units in which the methyl group corresponding to R in the following structural units is replaced by a hydrogen atom. 41 Examples thereof include a structural unit in which the methyl group corresponding to R in the structural unit represented by the formula (a4-2B) is replaced by a hydrogen atom. TIFF2025104295000075.tif111163

[0101] Examples of the structural unit (a4) also include a structural unit represented by the formula (a4-3). TIFF2025104295000076.tif3589[In the formula (a4-3), R 41 represents a hydrogen atom or a methyl group. L 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-. R 44f represents an aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a fluorine atom, and -CH2- contained in the aliphatic hydrocarbon group may be replaced by -O- or -CO-. However, at least one of L 44f and R 44f has a fluorine atom, and the upper limit of the total carbon number of L 44f and R 44f is 21.]

[0102] Examples of the aliphatic hydrocarbon group in L 44f and R 44f include linear or branched chain aliphatic hydrocarbon groups, monocyclic or polycyclic alicyclic hydrocarbon groups, and groups formed by combining these. Examples of the aliphatic hydrocarbon group in L 44f and R 44f include, as long as the upper limit of the total carbon number allows, groups similar to the aliphatic hydrocarbon groups exemplified as the aliphatic hydrocarbon group of R 44f and R 44f in the formula (a4). 42 Examples of the aliphatic hydrocarbon group of R L 44fis preferably an alkanediyl group having 1 to 14 carbon atoms (wherein -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-), and -(CH2) j1 -, -(CH2) j2 -O-(CH2) j3 - or -(CH2) j4 -CO-O-(CH2) j5 - (where j1 to j5 each independently represent an integer of 1 to 6). More preferably, it is an alkanediyl group having 1 to 4 carbon atoms (one -CH2- contained in the alkanediyl group may be replaced by -O-, and one -CH2-CH2- contained in the alkanediyl group may be replaced by -CO-O- or -O-CO-). R 44f is preferably an aliphatic hydrocarbon group having 1 to 10 carbon atoms having a fluorine atom, more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, an alicyclic hydrocarbon group having 3 to 10 carbon atoms having a fluorine atom, or a group combining them, still more preferably an alkyl group having 1 to 10 carbon atoms having a fluorine atom, and even more preferably an alkyl group having 1 to 6 carbon atoms having a fluorine atom.

[0103] Examples of the structural unit represented by the formula (a4-3) include structural units represented by the following structural units and the following formulas, in which the methyl group corresponding to R in the structural unit (a4-3) is replaced by a hydrogen atom. 41 TIFF2025104295000077.tif86170

[0104] Examples of the structural unit (a4) also include a structural unit represented by the formula (a4-A). TIFF2025104295000078.tif3686 [In the formula (a4-A), all symbols have the same meaning as described above.]

[0105] R 1 ​The alkyl group having 1 to 6 carbon atoms in includes a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R 1 Examples of the halogen atom in include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. R 1 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, and a dibromomethyl group. R 1 R is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0106] L 1 Examples of the aliphatic hydrocarbon group in include a chain hydrocarbon group, a monocyclic or polycyclic (including a spiro ring, a condensed ring, a bridged ring, etc.) alicyclic hydrocarbon group, and a group formed by combining two or more of these groups (for example, a hydrocarbon group formed from an alicyclic hydrocarbon group and a chain hydrocarbon group) may also be used. Examples of the chain hydrocarbon group include divalent to pentavalent chain hydrocarbon groups such as an alkanediyl group, an alkanetriyl group, an alkanetetrayl group, and an alkanepentayl group. Examples of the alkanediyl group include linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group, tridecane-1,13-diyl group, tetradecane-1,14-diyl group, pentadecane-1,15-diyl group, hexadecane-1,16-diyl group, and heptadecane-1,17-diyl group, and branched alkanediyl groups such as ethane-1,1-diyl group, propane-1,1-diyl group, propane-1,2-diyl group, propane-2,2-diyl group, pentane-2,4-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group. Examples also include groups in which one or more hydrogen atoms of the above-described groups are replaced with a bonding site. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 18, more preferably 1 to 12, still more preferably 1 to 10, even more preferably 1 to 9, still even more preferably 1 to 8, still more preferably 1 to 6, still even more preferably 1 to 5, and particularly preferably 1 to 4.

[0107] Examples of the monocyclic or polycyclic alicyclic hydrocarbon group include the following alicyclic hydrocarbon groups. The bonding site can be at any position. TIFF2025104295000079.tif45164 For example, alicyclic hydrocarbon groups such as cycloalkanediyl groups. Specifically, monocyclic alicyclic hydrocarbon groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group, and Examples of the polycyclic alicyclic hydrocarbon group include a spiro ring having a cycloalkanediyl group such as a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, a decahydronaphthalenediyl group, a bicyclo[3.3.0]octanediyl group, a spirocyclohexane-1,2'-cyclopentane-diyl group, a spiroadamantane-2,3'-cyclopentane-diyl group, etc., a norbornyl group or an adamantyl group, each having a cycloalkanediyl group spiro-bonded thereto. The number of carbon atoms of the alicyclic hydrocarbon group is preferably from 3 to 20, more preferably from 3 to 18, still more preferably from 3 to 16, and even more preferably from 3 to 12.

[0108] Examples of the group formed by combining two or more of them include a group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group. In the combination, two or more alicyclic hydrocarbon groups and two or more chain hydrocarbon groups may be combined respectively. Also, any of the groups may be bonded to X 11 . Examples of the group formed by combining an alicyclic hydrocarbon group and a chain hydrocarbon group include, for example, a group in which an alicyclic hydrocarbon group is bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group is bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), a group in which a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which an alicyclic hydrocarbon group, a chain hydrocarbon group and an alicyclic hydrocarbon group are bonded to a chain hydrocarbon group (e.g., *-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-), a group in which a chain hydrocarbon group, an alicyclic hydrocarbon group and a chain hydrocarbon group are bonded to an alicyclic hydrocarbon group (e.g., *-alicyclic hydrocarbon group-chain hydrocarbon group-alicyclic hydrocarbon group-chain hydrocarbon group-), etc. * represents the bonding site to X 11 .

[0109] L 1 In the aliphatic hydrocarbon group having 1 to 28 carbon atoms of L, -CH2- may be replaced by -O-, -S-, -SO2- or -CO-. L 1 When -CH2- contained in the aliphatic hydrocarbon group of L is replaced by -O-, -S-, -SO2- or -CO-, the number of carbon atoms before replacement is defined as the number of carbon atoms of the aliphatic hydrocarbon group. Examples of the group in which -CH2- contained in the aliphatic hydrocarbon group is replaced by -O-, -S-, -SO2- or -CO- include a hydroxy group, a carboxy group, a thiol group, an alkoxy group, an alkylthio group, an alkoxycarbonyl group, an alkylsulfonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, an oxy group, a carbonyl group, a thio group, a sulfonyl group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group, an alkanediylsulfonyl group, an alkanediylthio group, a cycloalkoxy group, a cycloalkylalkoxy group, an alkoxycarbonyloxy group, a group formed by combining two or more of these groups, etc. These replaced groups include those similar to the groups exemplified in this specification as long as the upper limit of the number of carbon atoms allows. Examples also include a group in which one or more hydrogen atoms of the above-described group are replaced by a bonding site. Examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include those similar to the groups exemplified in this specification as long as the upper limit of the number of carbon atoms allows.

[0110] L 1 The aliphatic hydrocarbon group in may have one or more substituents. Examples of the substituent include a halogen atom, a haloalkyl group having 1 to 4 carbon atoms, an alkyl group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms (in the alkyl group or the alicyclic hydrocarbon group, -CH2- may be replaced by -O- or -CO-). Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. The haloalkyl group having 1 to 4 carbon atoms includes a fluoroalkyl group having 1 to 4 carbon atoms, a chloroalkyl group having 1 to 4 carbon atoms, a bromoalkyl group having 1 to 4 carbon atoms, an iodoalkyl group having 1 to 4 carbon atoms, etc. Examples of the haloalkyl group include a perfluoroalkyl group having 1 to 4 carbon atoms (such as a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, a nonafluorobutyl group, etc.), a 2,2,2-trifluoroethyl group, a 3,3,3-trifluoropropyl group, a 4,4,4-trifluorobutyl group, a 3,3,4,4,4-pentafluorobutyl group, a chloromethyl group, a bromomethyl group, an iodomethyl group, etc. The number of carbon atoms of the haloalkyl group is preferably 1 to 3, more preferably 1 or 2. Examples of the alkyl group having 1 to 12 carbon atoms include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, etc. The number of carbon atoms of the alkyl group is preferably 1 to 9, more preferably 1 to 6, still more preferably 1 to 4, and even more preferably 1 to 3. When -CH2- contained in the alkyl group is replaced by -O- or -CO-, the total number of carbon atoms before replacement is defined as the total number of carbon atoms of the alkyl group. Examples of the replaced group include a hydroxy group, a carboxy group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkoxycarbonyloxy group, etc. L 1Examples of the substituent that the aliphatic hydrocarbon group in [Compound Name] may have include a halogen atom, a haloalkyl group having 1 to 3 carbon atoms, an alkyl group having 1 to 6 carbon atoms, an alicyclic hydrocarbon group having 3 to 10 carbon atoms, or an aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the alkyl group or the alicyclic hydrocarbon group may be replaced by -O- or -CO-). Preferred are a fluorine atom, an iodine atom, a perfluoroalkyl group having 1 to 3 carbon atoms, or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-). More preferred are a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, a hydroxy group, or a methoxy group. L 1 is R 3When it does not form an alkyl fluoride group and an alicyclic hydrocarbon group, it may have a substituent and has 1 to 12 carbon atoms. A chain hydrocarbon group (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). It is preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 3 to 12 carbon atoms which may have a substituent, or a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms which may have a substituent and an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-). It is more preferably a chain hydrocarbon group having 1 to 8 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent, a group formed by combining a chain hydrocarbon group having 1 to 6 carbon atoms and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining an alicyclic hydrocarbon group having 5 to 12 carbon atoms, a chain hydrocarbon group having 1 to 6 carbon atoms, and an alicyclic hydrocarbon group having 5 to 12 carbon atoms which may have a substituent (the -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-). It is even more preferable.

[0111] R 2Examples of the C1-C8 fluoroalkyl group include difluoromethyl group, trifluoromethyl group, 1,1-difluoroethyl group, 2,2-difluoroethyl group, 2,2,2-trifluoroethyl group, perfluoroethyl group, 1,1,2,2-tetrafluoropropyl group, 1,1,2,2,3,3-hexafluoropropyl group, perfluoroethylmethyl group, 1-(trifluoromethyl)-1,2,2,2-tetrafluoroethyl group, perfluoropropyl group, 1,1,2,2-tetrafluorobutyl group, 1,1,2,2,3,3-hexafluorobutyl group, 1,1,2,2,3,3,4,4-octafluorobutyl group, perfluorobutyl group, 1,1-bis(trifluoro)methyl-2,2,2-trifluoroethyl group, 2-(perfluoropropyl)ethyl group, 1,1,2,2,3,3,4,4-octafluoropentyl group, perfluoropentyl group, 1,1,2,2,3,3,4,4,5,5-decafluoropentyl group, 1,1-bis(trifluoromethyl)-2,2,3,3,3-pentafluoropropyl group, perfluoropentyl group, 2-(perfluorobutyl)ethyl group, 1,1,2,2,3,3,4,4,5,5-decafluorohexyl group, 1,1,2,2,3,3,4,4,5,5,6,6-dodecafluorohexyl group, perfluoropentylmethyl group, perfluorohexyl group, perfluoroheptyl group, perfluorooctyl group. The carbon number of the fluoroalkyl group is preferably 1-6, more preferably 1-5, still more preferably 1-4, and even more preferably 1-3. R 3 When the C1-C6 fluoroalkyl group in is, as long as the upper limit of the carbon number permits, the C1-C6 fluoroalkyl groups exemplified in the examples of the fluoroalkyl group of R 2 are similarly exemplified. R 2 is preferably a C1-C6 fluoroalkyl group, more preferably a C1-C3 fluoroalkyl group, still more preferably a trifluoromethyl group, a perfluoroethyl group or a perfluoropropyl group, and even more preferably a trifluoromethyl group when R 3 is a C1-C6 fluoroalkyl group. R2 is, when R 3 is a hydrogen atom, preferably an alkyl fluoride group having 1 to 6 carbon atoms, more preferably an alkyl fluoride group having 1 to 5 carbon atoms, and even more preferably an alkyl fluoride group having 3 to 5 carbon atoms. R 3 is bonded to L 1 to form an alicyclic hydrocarbon group having 3 to 6 carbon atoms, R 3 is bonded to L 1 Examples of the group formed by the bond include groups represented by the following formulae. In the following formulae, * and ** represent bonding sites, and the two ** represent, one represents the bonding site with a hydroxy group, and the other represents the bonding site with R 2 and L 1A is a part of the hydrocarbon group of L 1 and represents a single bond or an alkanediyl group having 1 to 4 carbon atoms. TIFF2025104295000080.tif22138R 3 is preferably a hydrogen atom or an alkyl fluoride group having 1 to 3 carbon atoms. mi is preferably any integer from 1 to 3, more preferably 1 or 2, and even more preferably 1.

[0112] Examples of the structural unit (a4-A) include the following structural units and the like. In the following structural units, structural units in which the methyl group corresponding to R 1 is replaced by a hydrogen atom, a halogen atom, a haloalkyl group or an alkyl group other than a methyl group, and structural units in which the hydrogen atom corresponding to R 1 is replaced by a halogen atom, a haloalkyl group or an alkyl group can also be cited as specific examples of the structural unit (a4-A). TIFF2025104295000081.tif192167

[0113] When the resin (A2) has the structural unit (a4), its content is preferably 1 to 20 mol%, more preferably 2 to 15 mol%, and even more preferably 3 to 10 mol% based on all the structural units of the resin (A2).

[0114] <Structural unit (a5)> Examples of the non-detachable hydrocarbon group contained in the structural unit (a5) include groups having a linear, branched or cyclic hydrocarbon group. Among them, the structural unit (a5) preferably has a group having an alicyclic hydrocarbon group. Examples of the structural unit (a5) include a structural unit represented by the formula (a5-1). TIFF2025104295000082.tif3351[In the formula (a5-1), R 51 represents a hydrogen atom or a methyl group. R 52 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms, and the hydrogen atoms contained in the alicyclic hydrocarbon group may be substituted with an aliphatic hydrocarbon group having 1 to 8 carbon atoms. L 55 represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O- or -CO-.]

[0115] R 52 The alicyclic hydrocarbon group in R may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, and a cyclohexyl group. Examples of the polycyclic alicyclic hydrocarbon group include an adamantyl group and a norbornyl group. Examples of the aliphatic hydrocarbon group having 1 to 8 carbon atoms include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, a hexyl group, an octyl group, and a 2-ethylhexyl group. Examples of the alicyclic hydrocarbon group having a substituent include a 3-methyladamantyl group. R 52 is preferably an unsubstituted alicyclic hydrocarbon group having 3 to 18 carbon atoms, more preferably an adamantyl group, a norbornyl group or a cyclohexyl group.

[0116] L 55Examples of the divalent saturated hydrocarbon group in [compound name] include divalent chain saturated hydrocarbon groups and divalent alicyclic saturated hydrocarbon groups, preferably divalent chain saturated hydrocarbon groups. Examples of the divalent chain saturated hydrocarbon group include alkane diyl groups such as methylene group, ethylene group, propane diyl group, butane diyl group, and pentane diyl group. The divalent alicyclic saturated hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic divalent alicyclic saturated hydrocarbon group include cycloalkane diyl groups such as cyclopentane diyl group and cyclohexane diyl group. Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include adamantane diyl group and norbornane diyl group.

[0117] L 55 Examples of the group in which -CH2- contained in the divalent saturated hydrocarbon group represented by [compound name] is replaced by -O- or -CO- include the groups represented by formula (L1-1) to formula (L1-4). In the following formulas, * and ** each represent a bonding site, and * represents a bonding site with an oxygen atom. TIFF2025104295000083.tif18164[In formula (L1-1), X x1 represents *-O-CO- or *-CO-O- (* represents the bonding site with L x1 .). L x1 represents a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. L x2 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. However, the total number of carbon atoms of L x1 and L x2 is 16 or less. In formula (L1-2), L x3 represents a divalent aliphatic saturated hydrocarbon group having 1 to 17 carbon atoms. L x4 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 16 carbon atoms. However, the total number of carbon atoms of L x3 and L x4 is 17 or less. In formula (L1-3), L x5 represents a divalent aliphatic saturated hydrocarbon group having 1 to 15 carbon atoms. L x6 and L x7 each independently represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 14 carbon atoms. However, the total number of carbon atoms of L x5 , L x6 and L x7 is 15 or less. In formula (L1-4), L x8 and L x9 each represent a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 12 carbon atoms. W x1 represents a divalent alicyclic saturated hydrocarbon group having 3 to 15 carbon atoms. However, the total number of carbon atoms of L x8 , L x9 and W x1 is 15 or less.

[0118] L x1 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x2 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond. L x3 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x4 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x5 is preferably a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x6 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a methylene group or an ethylene group. L x7 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms. L x8 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. L x9 is preferably a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 8 carbon atoms, more preferably a single bond or a methylene group. W x1 is preferably a divalent alicyclic saturated hydrocarbon group having 3 to 10 carbon atoms, more preferably a cyclohexanediyl group or an adamantanediyl group.

[0119] Examples of the group represented by the formula (L1-1) include the following divalent groups. TIFF2025104295000084.tif36146 Examples of the group represented by the formula (L1-2) include the following divalent groups. TIFF2025104295000085.tif23130 Examples of the group represented by the formula (L1-3) include the following divalent groups. TIFF2025104295000086.tif16147 Examples of the group represented by the formula (L1-4) include the following divalent groups. TIFF2025104295000087.tif13168L 55 is preferably a single bond or a group represented by the formula (L1-1).

[0120] Examples of the structural unit (a5-1) include the following structural units and the structural units in which the methyl group corresponding to R in the following structural units in the structural unit (a5-1) is replaced by a hydrogen atom. 51 are mentioned. TIFF2025104295000088.tif104151 When the resin (A2) has the structural unit (a5), its content is preferably 1 to 30 mol%, more preferably 2 to 20 mol%, and even more preferably 3 to 15 mol% with respect to all the structural units of the resin (A2).

[0121] 〈Structural unit (a6)〉 The structural unit (a6) is a structural unit having a -SO2- group, and preferably has a -SO2- group in the side chain. The structural unit having a -SO2- group may have a linear structure having a -SO2- group, a branched structure having a -SO2- group, or a cyclic structure (monocyclic and polycyclic structures) having a -SO2- group. Preferably, it is a structural unit having a cyclic structure having a -SO2- group, and more preferably, it is a structural unit having a cyclic structure (sultone ring) containing -SO2-O-.

[0122] Examples of the sultone ring include the following formula (T 1 -1), formula (T 1 -2), formula (T 1 -3) and formula (T 1 -4). The bonding site can be at any position. The sultone ring may be monocyclic, but is preferably polycyclic. The polycyclic sultone ring means a bridged ring containing -SO2-O- as an atomic group constituting the ring, and examples include the rings represented by formula (T 1 -1) and formula (T 1 -2). The sultone ring may further contain a hetero atom in addition to -SO2-O- as an atomic group constituting the ring, like the ring represented by formula (T 1 -2). Examples of the hetero atom include an oxygen atom, a sulfur atom or a nitrogen atom, and preferably an oxygen atom. TIFF2025104295000089.tif3077

[0123] The sultone ring may have a substituent, and examples of the substituent include a halogen atom or an alkyl group having 1 to 12 carbon atoms which may have a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms, and an alkylcarbonyl group having 2 to 4 carbon atoms, etc. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, a butyl group, a pentyl group, a hexyl group, an octyl group, and a decyl group, preferably an alkyl group having 1 to 6 carbon atoms, and more preferably a methyl group. Examples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, and a triiodomethyl group, and preferably a trifluoromethyl group. Examples of the alkyl group having a hydroxy group include a hydroxymethyl group and a hydroxyalkyl group such as a 2-hydroxyethyl group. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group, a pentyloxy group, a hexyloxy group, a heptyloxy group, an octyloxy group, a decyloxy group, and a dodecyloxy group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a p-methylphenyl group, a p-tert-butylphenyl group, a p-adamantylphenyl group, a tolyl group, a xylyl group, a cumyl group, a mesityl group, a biphenyl group, a phenanthryl group, a 2,6-diethylphenyl group, and a 2-methyl-6-ethylphenyl group. Examples of the aralkyl group include a benzyl group, a phenethyl group, a phenylpropyl group, a naphthylmethyl group, and a naphthylethyl group. Examples of the alkoxycarbonyl group include a group in which an alkoxy group such as a methoxycarbonyl group or an ethoxycarbonyl group is bonded to a carbonyl group, preferably an alkoxycarbonyl group having 6 or less carbon atoms, and more preferably a methoxycarbonyl group. Examples of the alkylcarbonyl group include an acetyl group, a propionyl group, and a butyryl group.

[0124] From the viewpoint of easy production of the monomer leading to the structural unit (a6), a sultone ring having no substituent is preferred. As the sultone ring, a ring represented by the following formula (T1’) is preferable. TIFF2025104295000090.tif2666[In formula (T1’), X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group, a halogen atom, a hydroxy group, a cyano group, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 12 carbon atoms, an aralkyl group having 7 to 12 carbon atoms, a glycidyloxy group, an alkoxycarbonyl group having 2 to 12 carbon atoms or an alkylcarbonyl group having 2 to 4 carbon atoms. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. The bonding site is at an arbitrary position.] X 11 is preferably an oxygen atom or a methylene group, more preferably a methylene group. R 41 Examples of R include the same ones as the substituents of the sultone ring, and an alkyl group having 1 to 12 carbon atoms which may have a halogen atom or a hydroxy group is preferable. ma is preferably 0 or 1, more preferably 0.

[0125] Examples of the ring represented by formula (T1’) include the following rings. The bonding site is at an arbitrary position. Among them, those in which the bonding site is at the 1-position or the 3-position are preferable. TIFF2025104295000091.tif45147-The structural unit having a -SO2- group preferably further has a group derived from a polymerizable group. Examples of the polymerizable group include a vinyl group, an acryloyl group, a methacryloyl group, an acryloyloxy group, a methacryloyloxy group, an acryloylamino group, a methacryloylamino group, an acryloylthio group, a methacryloylthio group and the like. Among them, the monomer leading to the structural unit (a6) is preferably a monomer having an ethylenically unsaturated bond, more preferably a (meth)acrylic monomer.

[0126] The structural unit (a6) is preferably a structural unit represented by the formula (a6-0). TIFF2025104295000092.tif3879[In the formula (a6-0), R x represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. A xx represents an oxygen atom, -N(R c )- or a sulfur atom. A x represents a single bond or a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the saturated hydrocarbon group may be replaced by -O-, -CO- or -N(R d )-. X 11 represents an oxygen atom, a sulfur atom or a methylene group. R 41 represents the same meaning as described above. ma represents any integer from 0 to 9. When ma is 2 or more, a plurality of R 41 may be the same or different. R c and R d each independently represent a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.)

[0127] Examples of the halogen atom of R x include a fluorine atom, a chlorine atom, a bromine atom and an iodine atom. Examples of the alkyl group of R x include, for example, a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group and an n-hexyl group, etc., preferably an alkyl group having 1 to 4 carbon atoms, more preferably a methyl group or an ethyl group. R xExamples of the alkyl group having a halogen atom include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluorosec-butyl group, a perfluorotert-butyl group, a perfluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a tribromomethyl group, a triiodomethyl group, and the like. R x is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom, a methyl group or an ethyl group, and still more preferably a hydrogen atom or a methyl group.

[0128] A x Examples of the divalent saturated hydrocarbon group of A include a linear alkanediyl group, a branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and those obtained by combining two or more of these groups may also be used. Specifically, linear alkanediyl groups such as a methylene group, an ethylene group, a propane-1,3-diyl group, a propane-1,2-diyl group, a butane-1,4-diyl group, a pentane-1,5-diyl group, a hexane-1,6-diyl group, a heptane-1,7-diyl group, an octane-1,8-diyl group, a nonane-1,9-diyl group, a decane-1,10-diyl group, an undecane-1,11-diyl group, a dodecane-1,12-diyl group, a tridecane-1,13-diyl group, a tetradecane-1,14-diyl group, a pentadecane-1,15-diyl group, a hexadecane-1,16-diyl group, a heptadecane-1,17-diyl group, an ethane-1,1-diyl group, a propane-1,1-diyl group, and a propane-2,2-diyl group; Branched alkanediyl groups such as a butane-1,3-diyl group, a 2-methylpropane-1,3-diyl group, a 2-methylpropane-1,2-diyl group, a pentane-1,4-diyl group, and a 2-methylbutane-1,4-diyl group; Monocyclic divalent alicyclic saturated hydrocarbon groups that are cycloalkanediyl groups such as a cyclobutane-1,3-diyl group, a cyclopentane-1,3-diyl group, a cyclohexane-1,4-diyl group, and a cyclooctane-1,5-diyl group; Examples of the polycyclic divalent alicyclic saturated hydrocarbon group include a norbornane-1,4-diyl group, a norbornane-2,5-diyl group, an adamantane-1,5-diyl group, an adamantane-2,6-diyl group, and the like. A x The bonding position to the sultone ring of x can be any position, but the position at the 1-position is preferred.

[0129] Examples of the structural unit (a6-0) include the following structural units. TIFF2025104295000093.tif79129

[0130] Among them, the structural units represented by formula (a6-1), formula (a6-2), formula (a6-6), formula (a6-7), formula (a6-8) and formula (a6-12) are preferred, and the structural units represented by formula (a6-1), formula (a6-2), formula (a6-7) and (a6-8) are more preferred. When the resin (A2) has the structural unit (a6), its content is preferably 1 to 50 mol%, more preferably 2 to 40 mol%, and still more preferably 3 to 30 mol% based on all the structural units of the resin (A2).

[0131] <Structural unit (a7)> The resin (A) etc. may further contain a structural unit that decomposes upon exposure to generate an acid (hereinafter sometimes referred to as "structural unit (a7)"). Specific examples of the structural unit (a7) include the structural units described in JP-A-2016-79235, and it is preferably a structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain or a structural unit having a sulfonio group and an organic anion in the side chain.

[0132] The structural unit having a sulfonate group or a carboxylate group and an organic cation in the side chain is preferably a structural unit represented by formula (a7-A). TIFF2025104295000094.tif26123[In formula (a7-A), R a7represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X a71 represents a single bond, *-O-*, *-CO-O-*, *-O-CO-O-*, *-CO-NR a71 -*, *-NR a71 -CO-O-*, *-O-CO-NR a71 -* or *-Ax-Ph-Ay-*. R a71 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent bonding sites, and * represents the bonding site with the carbon atom to which R a7 is bonded. L a71 and L a72 each independently represent a hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. X a72 represents ***-CO-O-, ***-O-CO-, ***-O-CO-O-, ***-O-, where *** represents the bonding site with L a71 . na7 represents any integer from 0 to 2. When na7 is 2, the groups within the plurality of parentheses may be the same or different from each other. RA - represents a sulfonate anion or a carboxylate anion. ZA + represents an organic cation.

[0133] R a7 and R a71 The alkyl groups having 1 to 6 carbon atoms in include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. R a7 Examples of the halogen atom in R include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. R a7 Examples of the alkyl group having 1 to 6 carbon atoms and having a halogen atom in R include a trifluoromethyl group, a difluoromethyl group, a perfluoroethyl group, a 2,2,2-trifluoroethyl group, a 1,1,2,2-tetrafluoroethyl group, a perfluoropropyl group, a 2,2,3,3,3-pentafluoropropyl group, a perfluorobutyl group, a 1,1,2,2,3,3,4,4-octafluorobutyl group, a perfluoropentyl group, a 2,2,3,3,4,4,5,5,5-nonafluoropentyl group, a perfluorohexyl group, a trichloromethyl group, a dichloromethyl group, a triiodomethyl group, a diiodomethyl group, a tribromomethyl group, a dibromomethyl group, etc. R a7 is preferably a hydrogen atom or an alkyl group having 1 to 4 carbon atoms, more preferably a hydrogen atom or an alkyl group having 1 to 3 carbon atoms, still more preferably a hydrogen atom, a methyl group or an ethyl group, and even more preferably a hydrogen atom or a methyl group.

[0134] X a71 When X is a group represented by *-Ax-Ph-Ay-**, it is preferably a linking group represented by the following formula (X10). TIFF2025104295000095.tif3251[In formula (X10), Ax represents a bonding species that binds to the carbon atom to which R a7 is bonded, and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Ay represents a bonding species that binds to L a71 and represents one or more bonding species selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. Rx represents a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms, an alkyl group having 1 to 18 carbon atoms, or an alkoxy group having 1 to 6 carbon atoms. mx represents an integer from 0 to 4. When mx is an integer of 2 or more, the plurality of Rx may be the same as or different from each other. When either Ax or Ay is a single bond, the other is preferably at least one selected from the group consisting of an ether bond, a thioether bond, an ester bond, a carbonate ester bond, and an amide bond. When either Ax or Ay is an amide bond, it is preferably a bond represented by -CO-NR a71 -. The bonding position of Ay in the phenylene group is preferably the m-position or the p-position with respect to the bonding position of Ax, and more preferably the p-position. Among them, Rx is preferably a fluorine atom, an iodine atom, a trifluoromethyl group, a methyl group, or an ethyl group. mx is preferably 0, 1, or 2. X a71 Examples of X include a single bond and groups represented by the following formula (X 10 -1) to formula (X 10 -10). * represents the bonding site with the carbon atom to which -R a7 is bonded. ** represents the bonding site with L a71 . X 20 represents -O- or -NR a71 -. TIFF2025104295000096.tif43162 [In formula (X 10 -1) to formula (X 10 -10), all symbols represent the same meaning as above. Specific examples of the groups represented by formula (X 10 -1) to formula (X 10 -10) include the following groups. TIFF2025104295000097.tif78162 Among them, X a71 is preferably a single bond or a group represented by formula (X 10 -1’), formula (X 10 -3’) to formula (X 10 -10’), and more preferably a single bond or a group represented by formula (X 10 -1’), formula (X 10 -4’), formula (X 10-5’), formula (X 10 -6’) and formula (X 10 -10’), and it is more preferably a group represented by any of them. A single bond, a group represented by formula (X 10 -1’), a group represented by formula (X 10 -5’) or a group represented by formula (X 10 -6’) is even more preferable.

[0135] L a71 As the hydrocarbon group of, a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, with one hydrogen atom removed, X a71 and X a72 and the group that binds to X a72 As the hydrocarbon group of, a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining two or more of these groups, with one hydrogen atom removed, X a72 and RA - and the group that binds to are mentioned. L a71 and L a72 As the chain hydrocarbon group of, a group with one hydrogen atom removed from an alkyl group or an alkenyl group is mentioned. As the alkyl group, it may be linear or branched. Specifically, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, sec-butyl group, iso-butyl group, tert-butyl group, pentyl group, hexyl group, heptyl group, octyl group, nonyl group, decyl group, undecyl group, dodecyl group, tridecyl group, tetradecyl group, pentadecyl group, heptadecyl group, etc. are mentioned. As the alkenyl group, ethenyl group, propenyl group, isopropenyl group, butenyl group, isobutenyl group, tert-butenyl group, pentenyl group, hexenyl group, heptenyl group, octenyl group, isooctenyl group, nonenyl group, etc. are mentioned. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 20, more preferably 1 to 18, and even more preferably 1 to 10. L a71 and L a72Examples of the alicyclic hydrocarbon group include a group obtained by removing one hydrogen atom from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cycloheptyl group, a cyclohexyl group, a cyclopentyl group, a cyclooctyl group, and the like. L a71 and L a72 Examples of the polycyclic cycloalkyl group of L and L include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4.4.0]decanyl group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one or more cycloalkyl groups selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group and a cycloalkyl group having 5 to 8 carbon atoms are spiro-bonded. A double bond may be formed between two carbon atoms contained in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025104295000098.tif28158 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 18, more preferably 3 to 12, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 18, and more preferably 7 to 12. L a71 and L a72 Examples of the aromatic hydrocarbon group of L and L include a group obtained by removing one hydrogen atom from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, a fluorenyl group, and the like. The number of carbon atoms in the aromatic hydrocarbon group is preferably 5 to 14, more preferably 6 to 14, and even more preferably 6 to 10. L a71and L a72 When -CH2- contained in the hydrocarbon group of a72 is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement shall be regarded as the number of carbon atoms of the hydrocarbon group. L a71 and L a72 Among the hydrocarbon groups of a71 and a72 , examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group, a carboxy group, a thiol group, a carbonyl group, an oxy group, a thio group, a sulfonyl group, an alkoxy group, an alkoxycarbonyl group, an alkylcarbonyl group, an alkylcarbonyloxy group, an alkanedioxy group, an alkanedioxycarbonyl group, an alkanediylcarbonyl group, an alkanediylcarbonyloxy group and the like. These replaced groups include those similar to the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms allows. L a71 and L a72 Among the hydrocarbon groups of a71 and a72 , examples of the group in which -CH2- contained in the alicyclic hydrocarbon group and the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include those similar to those exemplified in this specification within the range where the upper limit of the number of carbon atoms allows. L a71 and L a72 Among the hydrocarbon groups of a71 and a72 , -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. L a71 and L a72 Examples of the group combining two or more of the chain hydrocarbon group, alicyclic hydrocarbon group and aromatic hydrocarbon group of a71 and a72 include the group combining the above chain hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above chain hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above chain hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L a71 and L a72 Examples of the substituent that the hydrocarbon group of L and L may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, an iodine atom, etc. L a71 and L a72 When is a group formed by combining an alicyclic hydrocarbon group or an aromatic hydrocarbon group and a chain hydrocarbon group, the chain hydrocarbon group may be substantially regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. Also, L a71 and L a72 When -CH2- of the chain hydrocarbon group contained in the hydrocarbon group of is replaced by -O-, -CO-, -S- or -SO2-, the hydrocarbon group of L a71 and L a72 can substantially have substituents such as a hydroxy group, a carboxy group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, a sulfonyl group, etc. na7 is preferably 0 or 1. ZA in formula (a7-A) + is the same as those of the cation in the salt represented by formula (B1) etc.

[0136] In formula (a7-A), L a71 and L a72 When the hydrocarbon group of is a saturated hydrocarbon group, in formula (a7-B) described later, A b7 may contain the same groups as those exemplified as the divalent linking group of. Examples of the structural unit represented by formula (a7-A) also include the structural unit represented by formula (a7-A1). TIFF2025104295000099.tif30138 [In formula (a7-A1), R a7 、X a71 、L a71 、X a72 、na7、RA - and ZA + represent the same meaning as above. z7 represents any integer from 0 to 6. Q a7 、Q b7 、R z71 and R z72 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. When z7 is 2 or more, a plurality of R z71 and R z72 may be the same as or different from each other.] Q a7 、Q b7 、R z71 and R z72 Examples of the perfluoroalkyl group having 1 to 6 carbon atoms or the alkyl group having 1 to 6 carbon atoms in Q a7 include the same groups as those exemplified by R

[0137] Examples of the structural unit represented by formula (a7-A) include, for example, the following structural units, a group corresponding to the methyl group of R a7 wherein the hydrogen atom, a halogen atom (for example, a fluorine atom), or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom (for example, a trifluoromethyl group, etc.) is replaced, and the structural units described in International Publication No. 2012 / 050015. ZA + represents an organic cation. TIFF2025104295000100.tif244163

[0138] TIFF2025104295000101.tif131157

[0139] The structural unit having a sulfonio group and an organic anion in the side chain is preferably a structural unit represented by formula (a7-B). TIFF2025104295000102.tif27104[In formula (a7-B), R a7 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. A b7 represents a single bond or a divalent linking group. R b71represents a divalent aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent. R b72 and R b73 each independently represent a hydrocarbon group having 1 to 18 carbon atoms which may have a substituent, and R b72 and R b73 may be bonded to each other to form a ring together with the sulfur atom to which they are bonded. A - represents an organic anion. R a7 Examples of the halogen atom of R and the alkyl group which may have a halogen atom include the same halogen atom and alkyl group which may have a halogen atom as those in formula (a7-A). R b71 Examples of the divalent aromatic hydrocarbon group having 6 to 18 carbon atoms represented by include a phenylene group, a naphthylene group, and the like. R b72 and R b73 Examples of the hydrocarbon group represented by include an alkyl group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group formed by combining these. Examples of the alkyl group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and the group formed by combining these are the same as those described above. A b7 Examples of the divalent linking group represented by include a divalent saturated hydrocarbon group having 1 to 18 carbon atoms, and -CH2- contained in the divalent saturated hydrocarbon group may be replaced by -O-, -S- or -CO-. Examples of the divalent saturated hydrocarbon group include a divalent chain saturated hydrocarbon group such as a linear or branched alkanediyl group, a monocyclic or polycyclic divalent alicyclic saturated hydrocarbon group, and combinations thereof may also be used. Specifically, linear alkanediyl groups such as methylene group, ethylene group, propane-1,3-diyl group, propane-1,2-diyl group, butane-1,4-diyl group, pentane-1,5-diyl group, hexane-1,6-diyl group, heptane-1,7-diyl group, octane-1,8-diyl group, nonane-1,9-diyl group, decane-1,10-diyl group, undecane-1,11-diyl group, dodecane-1,12-diyl group; branched alkanediyl groups such as butane-1,3-diyl group, 2-methylpropane-1,3-diyl group, 2-methylpropane-1,2-diyl group, pentane-1,4-diyl group, 2-methylbutane-1,4-diyl group; divalent monocyclic alicyclic saturated hydrocarbon groups which are monocyclic cycloalkanediyl groups such as cyclobutane-1,3-diyl group, cyclopentane-1,3-diyl group, cyclohexane-1,4-diyl group, cyclooctane-1,5-diyl group; divalent polycyclic alicyclic saturated hydrocarbon groups which are polycyclic cycloalkanediyl groups such as norbornane-1,4-diyl group, norbornane-2,5-diyl group, adamantane-1,5-diyl group, adamantane-2,6-diyl group, etc. can be mentioned. Examples of those in which -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- include the following divalent groups. However, the number of carbon atoms before -CH2- contained in the saturated hydrocarbon group is replaced by -O-, -S- or -CO- is 17 or less respectively. In the following formula, * and ** represent bonding sites, and * represents the bonding site with R b71 and represents the bonding site with R. TIFF2025104295000103.tif123162[In the formula, X 3 represents a divalent saturated hydrocarbon group having 1 to 16 carbon atoms. X 4 represents a divalent saturated hydrocarbon group having 1 to 15 carbon atoms. X 5 represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms. X 6 represents a divalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 7 represents a trivalent saturated hydrocarbon group having 1 to 14 carbon atoms. X 8represents a divalent saturated hydrocarbon group having 1 to 13 carbon atoms.

[0140] Examples of the structural unit containing the cation in formula (a7-B) include the structural unit represented below and a group corresponding to the methyl group of R a7 in which the hydrogen atom, halogen atom (e.g., fluorine atom) or alkyl group having 1 to 6 carbon atoms which may have a halogen atom (e.g., trifluoromethyl group, etc.) is replaced with a group such as those mentioned above. TIFF2025104295000104.tif75163

[0141] A - Examples of the organic anion represented by A include sulfonate anion, sulfonylimide anion, sulfonylmethide anion, and carboxylate anion, etc. A - The organic anion represented by A is preferably a sulfonate anion, and more preferably the same as the anion exemplified by the acid generator (B). Examples of the sulfonylimide anion, sulfonylmethide anion, and carboxylate anion include the same as the anion exemplified by the acid generator (B).

[0142] Examples of the structural unit represented by formula (a7-B) include the structural unit represented below and the like. TIFF2025104295000105.tif95157 When the resin (A) contains the structural unit (a7), the structural unit (a7) may be contained alone or in combination of two or more. The total content ratio of the structural unit (a7) is preferably 1 to 30 mol%, more preferably 1 to 25 mol%, still more preferably 2 to 20 mol%, even more preferably 3 to 15 mol%, and even more preferably 3 to 10 mol% based on all the structural units of the resin (A1).

[0143] When the resin (A) contains the structural unit (a7), the structural unit (a7) may be contained alone or in two or more kinds. The content rate of the total structural unit (a7) is preferably 1 to 30 mol%, more preferably 2 to 25 mol%, still more preferably 3 to 20 mol%, and even more preferably 3 to 15 mol% with respect to all the structural units of the resin (A).

[0144] The resin (A2) is preferably a resin containing the structural unit (III), a resin composed of the structural unit (III) and the structural unit (I) having a structure different from that of the resin (A1), a resin composed of the structural unit (III) and the structural unit (a1), or a resin composed of the structural unit (III), the structural unit (a1), and the structural unit (s), that is, a copolymer of the compound (III') and the monomer (I') (provided that either the compound (III') or the monomer (I') is different from the resin (A1) constituent component), a copolymer of the compound (III') and the monomer (a1), or a copolymer of the compound (III'), the monomer (a1), and the monomer (s). The structural unit (a1) is preferably at least one selected from the group consisting of the structural unit (a1-0), the structural unit (a1-1), the structural unit (a1-2) (preferably the structural unit having a cyclohexyl group or a cyclopentyl group), the structural unit (a1-4), the structural unit (a1-5), and the structural unit (a1-6), and more preferably at least one selected from the group consisting of the structural unit (a1-0), the structural unit (a1-2), and the structural unit (a1-6). The structural unit (s) is preferably at least one selected from the group consisting of the structural unit (a2) and the structural unit (a3). The structural unit (a2) may contain the above-described structural unit (III). The structural unit (a2) is preferably a structural unit represented by the formula (a2-1) or a structural unit represented by the formula (a2-A). The structural unit (a3) is preferably at least one selected from the group consisting of the structural unit represented by the formula (a3-1), the structural unit represented by the formula (a3-2), and the structural unit represented by the formula (a3-4).

[0145] Each structural unit constituting the resin (A2) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers leading to these structural units. The content ratio of each structural unit of the resin (A2) can be adjusted by the amount of monomers used in the polymerization. The weight average molecular weight of the resin (A2) is preferably 2,000 or more (more preferably 2,500 or more, still more preferably 3,000 or more), 50,000 or less (more preferably 30,000 or less, still more preferably 15,000 or less), but may contain oligomers having a weight average molecular weight smaller than this. In this specification, the weight average molecular weight is the value determined by gel permeation chromatography under the conditions described in the examples.

[0146] The content ratio (mass ratio) of the resin (A1) and the resin (A2) in the solid content of the resist composition of the present invention is, for example, 0.1:10 to 5:10, preferably 0.2:10 to 4:10, more preferably 0.3:10 to 3:10, still more preferably 0.5:10 to 2:10.

[0147] <Resins other than the resins (A1) and (A2)> The resist composition of the present invention may contain a resin other than the above-described resins (A1) and (A2), for example, a resin having at least one selected from a structural unit derived from an acid-stable monomer and a structural unit derived from a known monomer used in the art. For example, a resin containing the structural unit (a4) or the structural unit (a5) (hereinafter sometimes referred to as resin (X)) etc. are mentioned. As the resin (X), among others, a resin containing the structural unit (a4) is preferable, and examples include a resin consisting only of the structural unit (a4) or a resin containing the structural unit (a4) and the structural unit (a5). Structural units that the resin (X) may further have include the structural unit (a2), the structural unit (a3), and structural units derived from other known monomers. When the resin (X) contains the structural unit (a4), in the resin (X), the content of the structural unit (a4) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. When the resin (X) contains the structural unit (a5), the content of the structural unit (a5) is 20 mol% or more, preferably 30 mol% or more, more preferably 40 mol% or more, and still more preferably 45 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less, preferably 80 mol% or less, more preferably 70 mol% or less, still more preferably 60 mol% or less, and even more preferably 55 mol% or less. Specifically, it is 20 to 100 mol%, preferably 20 to 80 mol%, more preferably 30 to 70 mol%, still more preferably 40 to 60 mol%, and even more preferably 45 to 55 mol%. Further, when the resin (X) contains the structural unit (a4) and the structural unit (a5), the total content of the structural unit (a4) and the structural unit (a5) is 40 mol% or more, preferably 60 mol% or more, more preferably 70 mol% or more, and still more preferably 80 mol% or more, based on the total of all the structural units of the resin (X). Further, it is 100 mol% or less. Specifically, it is 40 to 100 mol%, preferably 60 to 100 mol%, more preferably 70 to 100 mol%, and still more preferably 80 to 100 mol%. Each of the structural units constituting the resin (X) may be used alone or in combination of two or more, and can be produced by a known polymerization method (for example, radical polymerization method) using the monomers that induce these structural units. The content of each structural unit possessed by the resin (X) can be adjusted by the amount of the monomers used in the polymerization. The weight average molecular weight of resin (X) is preferably 6,000 or more (more preferably 7,000 or more) and 80,000 or less (more preferably 60,000 or less). The measuring means for the weight average molecular weight of resin (X) is the same as that for resins (A1) and (A2). When the resist composition contains resin (X), its content is preferably 1 to 60 parts by mass, more preferably 1 to 50 parts by mass, still more preferably 1 to 40 parts by mass, even more preferably 1 to 30 parts by mass, and even still more preferably 1 to 8 parts by mass, based on 100 parts by mass in total of resins (A1) and (A2).

[0148] When the resist composition of the present invention contains resins other than resins (A1), (A2), and resin (X), their content ratios are usually 0.1 to 50% by mass, preferably 0.5 to 30% by mass, and more preferably 1 to 20% by mass, based on the total amount of resins (A1) and (A2) contained in the resist composition of the present invention.

[0149] The total content ratio of all resins in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. Also, the total content ratio of resins (A1) and (A2) in the resist composition is preferably 80% by mass or more and 99% by mass or less, more preferably 90% by mass or more and 99% by mass or less, based on the solid content of the resist composition. The solid content of the resist composition and the content ratio of the resin thereto can be measured by known analysis means such as liquid chromatography or gas chromatography.

[0150] <Acid generator (B)> The acid generator (B) may be either a nonionic compound or an ionic compound. Examples of nonionic compounds include sulfonate esters (e.g., 2-nitrobenzyl ester, aromatic sulfonate, oxime sulfonate, N-sulfonyloxyimide, sulfonyloxy ketone, diazonaphthoquinone 4-sulfonate), sulfones (e.g., disulfone, ketosulfone, sulfonyldiazomethane), and the like. Representative examples of ionic compounds include onium salts containing an onium cation (e.g., diazonium salt, phosphonium salt, sulfonium salt, iodonium salt). Examples of anions of onium salts include sulfonic acid anion, benzenesulfonyl anion, sulfonylimide anion, sulfonylmethide anion, and carboxylic acid anion, among others. Alternatively, the acid generator (B) may be one of the structural units constituting the resin contained in the resist composition of the present invention, such as the above-described structural unit (a7).

[0151] As the acid generator (B), compounds that generate an acid upon irradiation, as described in, for example, JP-A-63-26653, JP-A-55-164824, JP-A-62-69263, JP-A-63-146038, JP-A-63-163452, JP-A-62-153853, JP-A-63-146029, U.S. Patent No. 3,779,778, U.S. Patent No. 3,849,137, German Patent No. 3914407, European Patent No. 126,712, etc., can be used. Further, compounds produced by known methods may also be used. The acid generator (B) may be used alone or in combination of two or more. The acid generator (B) may be an acid generator having an acid-labile group. For example, the compound or resin serving as the acid generator may contain a partial structure that becomes an acid-labile group.

[0152] A preferred form of the acid generator (B) includes a salt represented by formula (B1) (hereinafter sometimes referred to as "acid generator (B1)"). JPEG2025104295000106.jpg1392[In formula (B1), all symbols are the same as described above.]

[0153] L b1 As the (nb1 + 1)-valent hydrocarbon group of L, a group obtained by removing nb1 hydrogen atoms from a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, or a group combining two or more of these groups, and having one or more L b2 bonding groups can be mentioned. The number of carbon atoms of the hydrocarbon group is preferably 1 to 48, more preferably 1 to 42, still more preferably 1 to 36, even more preferably 1 to 30, and even still more preferably 1 to 24. Examples of the chain hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an alkyl group or an alkenyl group. The alkyl group may be linear or branched, and specifically includes a methyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group, an iso-butyl group, a tert-butyl group, a pentyl group, a hexyl group, a heptyl group, an octyl group, a nonyl group, a decyl group, an undecyl group, a dodecyl group, a tridecyl group, a tetradecyl group, a pentadecyl group, a heptadecyl group, etc. Examples of the alkenyl group include an ethenyl group, a propenyl group, an isopropenyl group, a butenyl group, an isobutenyl group, a tert-butenyl group, a pentenyl group, a hexenyl group, a heptenyl group, an octenyl group, an isooctenyl group, a nonenyl group. The number of carbon atoms of the chain hydrocarbon group is preferably 1 to 36, more preferably 1 to 24, still more preferably 1 to 20, even more preferably 1 to 18, even still more preferably 1 to 12, and even still more preferably 1 to 10. Examples of the alicyclic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from a monocyclic or polycyclic cycloalkyl group. Examples of the monocyclic cycloalkyl group include a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group, etc. Examples of the polycyclic cycloalkyl group include a cycloalkyl group having a crosslinked structure, a cycloalkyl group in which two or more rings are condensed, or a cycloalkyl group in which two rings are spiro-bonded. Examples of the cycloalkyl group having a crosslinked structure include a norbornyl group and an adamantyl group. Examples of the cycloalkyl group in which two or more rings are condensed include a bicyclo[4.4.0]decanyl group and a steroid group (steroid skeleton). Examples of the cycloalkyl group in which two rings are spiro-bonded include a spirocyclic cycloalkyl group in which one cycloalkyl group selected from the group consisting of a cyclopentyl group, a cyclohexyl group, a norbornyl group, and an adamantyl group is spiro-bonded to a cycloalkyl group having 5 to 8 carbon atoms. Also, a double bond may be formed between two carbon atoms included in the alicyclic hydrocarbon group. More specifically, examples of the alicyclic hydrocarbon group include those represented by the following formula. TIFF2025104295000107.tif26168 When the alicyclic hydrocarbon group is a monocyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 3 to 24, more preferably 3 to 20, still more preferably 3 to 18, even more preferably 3 to 12, even more preferably 3 to 10, and even more preferably 3 to 8. When the alicyclic hydrocarbon group is a polycyclic cycloalkyl group, the number of carbon atoms in the alicyclic hydrocarbon group is preferably 6 to 24, more preferably 6 to 20, still more preferably 6 to 18, even more preferably 6 to 12, and even more preferably 7 to 12. Examples of the aromatic hydrocarbon group include a group obtained by removing nb1 hydrogen atoms from an aryl group. Examples of the aryl group include a phenyl group, a naphthyl group, an anthryl group, a biphenyl group, and a fluorenyl group. More specifically, examples of the aromatic hydrocarbon group include those represented by the following formula. For the number of carbon atoms in the aromatic hydrocarbon group, it is preferably 4 to 24, more preferably 4 to 20, still more preferably 4 to 18, even more preferably 5 to 14, still even more preferably 5 to 10, and even more preferably 6 to 10. L b1 When -CH2- contained in the hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2-, the number of carbon atoms before replacement is taken as the number of carbon atoms of the hydrocarbon group. L b1Among the hydrocarbon groups, examples of the group in which -CH2- contained in the chain hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include a hydroxy group (a group in which -CH2- contained in the methyl group is replaced by -O-), a carboxy group (a group in which -CH2-CH2- contained in the ethyl group is replaced by -O-CO-), a carbonyl group (a group in which -CH2- contained in the methylene group is replaced by -CO-), an oxy group (a group in which -CH2- contained in the methylene group is replaced by -O-), an alkoxy group (a group in which -CH2- at any position contained in the alkyl group is replaced by -O-), an alkoxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-), an alkylcarbonyl group (a group in which -CH2- at any position contained in the alkyl group is replaced by -CO-), an alkylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkyl group is replaced by -CO-O-), an alkoxycarbonyloxy group (a group in which -CH2-CH2-CH2- at any position contained in the alkyl group is replaced by -O-CO-O-), an alkanedioxy group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -O-), an alkanedioxycarbonyl group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -O-CO-), an alkanedioylcarbonyl group (a group in which -CH2- at any position contained in the alkanedioyl group is replaced by -CO-), an alkanedioylcarbonyloxy group (a group in which -CH2-CH2- at any position contained in the alkanedioyl group is replaced by -CO-O-), and the like. Examples of these replaced groups include the same ones as above within the range allowed by the upper limit of the number of carbon atoms. L b1Among the hydrocarbon groups, examples of the group in which -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -CO-, -S- or -SO2- include groups containing structures such as cyclic ethers, cyclic ketones, cyclic esters (lactones), cyclic thioethers, cyclic acetals, cyclic sulfonic acid esters ( sultones), etc. Specifically, alicyclic hydrocarbon groups represented by the following formulas can be mentioned. The bonding position of the alicyclic hydrocarbon group mentioned in the following formulas can be any position. TIFF2025104295000109.tif48165L b1 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include groups derived from a furan ring or a thiophene ring, respectively. Specifically, aromatic hydrocarbon groups represented by the following formulas can be mentioned. TIFF2025104295000110.tif1324L b1 Among the hydrocarbon groups, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-. Examples of the group in which -CH2- is replaced by -O- or -S- include a furan ring or a thiophene ring, respectively. Examples of the group in which -CH2- contained in the group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2- include the same groups as those exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. Examples of the group combining two or more of the linear hydrocarbon group, alicyclic hydrocarbon group and aromatic hydrocarbon group include the group combining the above linear hydrocarbon group and the above alicyclic hydrocarbon group, the group combining the above linear hydrocarbon group and the above aromatic hydrocarbon group, the group combining the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group, and the group combining the above linear hydrocarbon group, the above alicyclic hydrocarbon group and the above aromatic hydrocarbon group. The above combined groups can be mentioned. The group combining an alicyclic hydrocarbon group and an aromatic hydrocarbon group may be a condensed ring. L b2The divalent hydrocarbon group is a divalent chain hydrocarbon group, a divalent alicyclic hydrocarbon group, a divalent aromatic hydrocarbon group, or a group formed by removing one hydrogen atom from the group consisting of two or more of these groups, b1 Examples of such groups include groups that bond to the L b2 The divalent chain hydrocarbon group, the divalent alicyclic hydrocarbon group, the divalent aromatic hydrocarbon group, and the divalent group consisting of two or more of these groups are each, within the range permitted by the number of carbon atoms, L b1 Examples of the alkyl group include groups in which one hydrogen atom has been removed from the chain hydrocarbon groups, alicyclic hydrocarbon groups, and aromatic hydrocarbon groups exemplified above, and groups in which two or more of these groups have been combined. L b1 and L b2 The substituents which the hydrocarbon group may have include a halogen atom, a cyano group, and a nitro group. Examples of the halogen atom include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. L b1 and L b2 When L is a group in which an alicyclic hydrocarbon group or an aromatic hydrocarbon group is combined with a chain hydrocarbon group, the chain hydrocarbon group may be regarded as a substituent that the alicyclic hydrocarbon group or the aromatic hydrocarbon group has. b1 and L b2 The -CH2- of the chain hydrocarbon group contained in the hydrocarbon group is replaced with -O-, -CO-, -S- or -SO2-, thereby forming L b1 and L b2 The hydrocarbon group may substantially have a substituent such as a hydroxy group, a carboxyl group, an alkoxy group, an alkylcarbonyl group, an alkoxycarbonyl group, an alkylcarbonyloxy group, a thiol group, or a sulfonyl group. L b1 and L b2 The number of substituents that may be possessed by the group is not particularly limited, and the group may have a plurality of substituents. Y b1 Examples of the cyclic hydrocarbon group include an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a combination of an alicyclic hydrocarbon group and an aromatic hydrocarbon group. Y b1 The alicyclic hydrogen group and aromatic hydrocarbon group of b1Examples thereof include the same as the alicyclic hydrocarbon group and the aromatic hydrocarbon group exemplified above, and in the case of having no substituent, a monovalent alicyclic hydrocarbon group and an aromatic hydrocarbon group may be used. Y b1 Examples of the substituent that the methyl group of may have include a halogen atom, a cyano group, a hydroxy group, and a nitro group. Y b1 Examples of the substituent that the cyclic hydrocarbon group of may have include a halogen atom, a cyano group, a nitro group, or a hydrocarbon group having 1 to 18 carbon atoms that may have a halogen atom, a cyano group, and a nitro group (the -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-). Y b1 In the hydrocarbon group that the cyclic hydrocarbon group of may have, the number of carbon atoms b1 is not included in the number of hydrocarbon groups of the cyclic hydrocarbon group of. Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent include a chain hydrocarbon group, an alicyclic hydrocarbon group, an aromatic hydrocarbon group, and a group combining these groups. Examples of the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups include, within the range allowed by the upper limit of the number of carbon atoms, L b1 Examples of the same groups as the chain hydrocarbon group, the alicyclic hydrocarbon group, the aromatic hydrocarbon group, and a group combining two or more of these groups exemplified by L b1 Examples of the group in which -CH2- contained in the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent is replaced by -O-, -S-, -CO-, or -SO2- include, within the range allowed by the upper limit of the number of carbon atoms, L b1 Examples of the same groups as the groups exemplified by the group in which -CH2- contained in the hydrocarbon group is replaced by -O-, -S-, -CO-, or -SO2-. Also, Y b1 Examples of the hydrocarbon group having 1 to 18 carbon atoms that the cyclic hydrocarbon group of may have as a substituent may constitute a protecting group or a leaving group (an acid-labile group or a base-labile group) generally used in the art.

[0154] The anion of the salt represented by the formula (B1) is preferably an anion represented by the following formula (B1-A1) or an anion represented by the formula (B1-A2). TIFF2025104295000111.tif30124[In the formula (I-A1), L b2 and Y b1 have the same meanings as in the formula (I-A). Q b1 、Q b2 、Q b3 and Q b4 each independently represents a hydrogen atom, a fluorine atom, a perfluoroalkyl group having 1 to 6 carbon atoms, or an alkyl group having 1 to 6 carbon atoms. z1 represents any integer from 0 to 6. When z1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. X 1 represents -O-CO-, -CO-O-, -O-CO-O-, or -O-. L b3 represents a single bond or an (nb2 + 1)-valent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO-, or -SO2-. nb2 represents any integer from 1 to 3. When nb2 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other.] Q b1 、Q b2 、Q b3 and Q b4 Examples of the alkyl group of include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, a sec-butyl group, a tert-butyl group, a pentyl group, and a hexyl group. Q b1 、Q b2 、Q b3 and Q b4 Examples of the perfluoroalkyl group of include a trifluoromethyl group, a perfluoroethyl group, a perfluoropropyl group, a perfluoroisopropyl group, a perfluorobutyl group, a perfluoro sec-butyl group, a perfluoro tert-butyl group, a perfluoropentyl group, and a perfluorohexyl group. Q b1 and Q b2 is preferably at least one of Q b1 and Q b2 contains a fluorine atom or a perfluoroalkyl group, more preferably is a fluorine atom or a perfluoroalkyl group, still more preferably is a fluorine atom or a trifluoromethyl group, and even more preferably both are fluorine atoms. Q b3 and Q b4 are each independently preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b3 is preferably a hydrogen atom, a fluorine atom or a perfluoroalkyl group having 1 to 3 carbon atoms, and Q b4 is preferably a hydrogen atom or a fluorine atom. z1 is preferably any integer from 0 to 3, and more preferably 0, 1 or 2. X 1 is preferably -O-CO- or -CO-O-.

[0155] L b3 As the hydrocarbon group in, within the range allowed by the upper limit of the number of carbon atoms, the L of formula (I-A) b1 is exemplified by the same hydrocarbon groups as those exemplified for. In formula (B1-A1), L b3is a single bond, an optionally substituted chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), an optionally substituted alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-), an optionally substituted aromatic hydrocarbon group having 6 to 10 carbon atoms (wherein -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-), or a group formed by combining two or more of these groups, preferably a single bond, a chain hydrocarbon group having 1 to 6 carbon atoms or a group represented by the following formula (Lb3-1). When -CH2- contained in the chain hydrocarbon group is replaced by -O- or -CO-, the number thereof is preferably 1 to 4, and it is preferable that one -CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO- or -CO-O-, or one -CH2-CH2-CH2- contained in the chain hydrocarbon group is replaced by -O-CO-O-. TIFF2025104295000112.tif1582[In the formula (Lb3-1), nb2 represents the same meaning as in the formula (I-A1). L b31 represents a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms, -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-, and the chain hydrocarbon group may have a substituent. W b3 represents an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 10 carbon atoms, -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-, -CH2- contained in the aromatic hydrocarbon group may be replaced by -O- or -S-, and the alicyclic hydrocarbon group and the aromatic hydrocarbon group may have a substituent. * and ** represent bonding sites, and * represents the bonding site with X 1 and is represented.] In the formula (Lb3-1), L b31 The chain hydrocarbon group of is, as long as the upper limit of the number of carbon atoms permits, L b1Examples thereof include groups similar to the chain hydrocarbon groups exemplified above. In formula (Lb3-1), W b3 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of, as long as the upper limit of the number of carbon atoms permits, are b1 Examples thereof include groups similar to the alicyclic hydrocarbon groups and the aromatic hydrocarbon groups exemplified above. In formula (Lb3-1), L b31 The substituents that the chain hydrocarbon group of may have and W b3 The substituents that the alicyclic hydrocarbon group and the aromatic hydrocarbon group of may have are b1 Examples thereof include groups similar to the substituents exemplified as the substituents that the hydrocarbon group of may have. L b31 Is preferably a single bond or an alkanediyl group having 1 to 6 carbon atoms (the -CH2- contained in the alkanediyl group may be replaced by -O- or -CO-). Among them, W b3 The alicyclic hydrocarbon group and the aromatic hydrocarbon group of are preferably the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below. In the alicyclic hydrocarbon group and the aromatic hydrocarbon group represented below, * and ** represent bonding sites, * represents the bonding site with X 1 Or L b31 Represents the bonding site with, and ** represents a hydrogen atom, a substituent or the bonding site with L b2 Represents the bonding site with, and at least one ** represents the bonding site with L b2 Represents the bonding site with. Further, in the alicyclic hydrocarbon group represented below, the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. When the -CH2- contained in the alicyclic hydrocarbon group is replaced by -O-, -S-, -CO- or -SO2-, it is preferable that an ether ring, an ester ring (lactone), a carbonate ester ring, a sulfonic acid ester ring ( sultone) or an acetal ring is formed. TIFF2025104295000113.tif37165 In formula (B1-A1), L b2is preferably a single bond or a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), a single bond, -O-, -O-CO-, -CO-O-, -O-CO-O- or *-L b21 -X 2 -L b22 -**(L b21 and L b22 One of them represents a chain hydrocarbon group having 1 to 6 carbon atoms, and the other represents a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms. X 2 represents -O-, -CO-O-, -O-CO- or -O-CO-O-. * and ** represent bonding sites, and ** represents the bonding site with Y b1 But L b21 X 2 and L b22 The total number of carbon atoms of is 12 or less.) is more preferable. In formula (B1-A1), Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and still more preferably an alicyclic hydrocarbon group having 3 to 16 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 10 carbon atoms which may have a substituent. Specifically, it is preferably a group represented by the following formula (Y1) to formula (Y36). In formula (Y1) to formula (Y36), R Yb represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms among the substituents that the cyclic hydrocarbon group of Y b1 may have, R Yc represents a hydrogen atom or a substituent that the cyclic hydrocarbon group of Y b1 may have, * represents L b2represents a binding site with. The alicyclic hydrocarbon group and aromatic hydrocarbon group represented by the following formula are not particularly illustrated in the following formula, but may have substituents that the cyclic hydrocarbon group of Y b1 may also have. TIFF2025104295000114.tif83158

[0156] As the anion in the salt represented by the formula (B1), anions represented by the formulas (B1-A1-1) to (B1-A1-85) [hereinafter, may be referred to as "anion (B1-A1-1)" etc. according to the formula number] are preferable, and an anion represented by any of the formulas (B1-A1-1) to (B1-A1-4), formula (B1-A1-9), formula (B1-A1-10), formulas (B1-A1-24) to (B1-A1-33), formulas (B1-A1-36) to (B1-A1-40), and formulas (B1-A1-47) to (B1-A1-85) is more preferable. TIFF2025104295000115.tif216161

[0157] TIFF2025104295000116.tif249151

[0158] TIFF2025104295000117.tif254162

[0159] Here, R i2 ~R i7 are, independently of each other, for example, an alkyl group having 1 to 4 carbon atoms, preferably a methyl group or an ethyl group. R i8 is, for example, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, preferably an alkyl group having 1 to 4 carbon atoms, an alicyclic hydrocarbon group having 5 to 12 carbon atoms, or a group formed by combining these, more preferably a methyl group, an ethyl group, a cyclohexyl group, or an adamantyl group. L A41 is a single bond or an alkanediyl group having 1 to 4 carbon atoms. Q b1 and Q b2 represent the same meaning as described above. Examples of the anion represented by formula (B1-A1) include specifically the anions described in JP-A-2010-204646.

[0160] Examples of the anion in the preferably salt represented by formula (B1) include the anions represented by formula (B1a-1) to formula (B1a-70). Among them, the anions represented by any of formula (B1a-1) to formula (B1a-3), formula (B1a-7) to formula (B1a-19), and formula (B1a-22) to formula (B1a-70) are preferred. TIFF2025104295000118.tif185163

[0161] TIFF2025104295000119.tif252166

[0162] TIFF2025104295000120.tif69165

[0163] The anion represented by formula (B1-A2) is represented by the following formula. TIFF2025104295000121.tif23100[In formula (B1-A2), L b2 and Y b1 have the same meaning as in formula (B1). R b1 represents a halogen atom or an alkyl group having 1 to 6 carbon atoms, and -CH2- contained in the alkyl group may be replaced by -O- or -CO-. nb4 represents any integer from 1 to 5. When nb4 is 2 or more, a plurality of -L b2 -Y b1 may be the same as or different from each other. nb3 represents any integer from 0 to 4. When nb3 is 2 or more, a plurality of R b1 may be the same as or different from each other. However, 1 ≦ nb4 + nb3 ≦ 5 is satisfied.]

[0164] In formula (B1-A2), the hydrocarbon group of L b2 and Y b1Examples of the cyclic hydrocarbon group include, within the range permitted by the upper limit of the number of carbon atoms, L in formula (B1). b2 Examples of the hydrocarbon group of b1 and examples of the cyclic hydrocarbon group of Y b2 are the same as those of the hydrocarbon group of L b1 Examples of the substituents that the hydrocarbon group of L b2 the methyl group of Y b1 and the cyclic hydrocarbon group may have are the same as those of the substituents that the hydrocarbon group of L These hydrocarbon groups, methyl group and cyclic hydrocarbon group may have one substituent or a plurality of substituents. L b2 is preferably a chain hydrocarbon group having 1 to 12 carbon atoms (wherein -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-), more preferably *-CO-O-L b41 -(L b41 is a single bond or a chain hydrocarbon group having 1 to 6 carbon atoms, and -CH2- contained in the chain hydrocarbon group may be replaced by -O- or -CO-. * represents the bonding site with the benzene ring to which SO3 - is bonded. L b41 is preferably a single bond or a chain hydrocarbon group having 1 to 3 carbon atoms.) and even more preferably *-CO-O-. Y b1 is preferably a cyclic hydrocarbon group having 3 to 20 carbon atoms which may have a substituent (wherein -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-), more preferably an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent (wherein -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O-, -CO-, -S- or -SO2-) or an aromatic hydrocarbon group having 6 to 18 carbon atoms which may have a substituent, and Y in formula (B1-A1) b1 or L b1It is more preferable that it is an alicyclic hydrocarbon group or an aromatic hydrocarbon group exemplified above. Specifically, it is preferably a group represented by the above-described formulas (Y1) to (Y36), and more preferably a group represented by the above-described formulas (Y1) to (Y19).

[0165] In formula (B1-A2), nb4 is preferably any integer from 1 to 4, more preferably any integer from 1 to 3, still more preferably 1 or 2, and even more preferably 2. When nb4 is 1 or 2, -L b2 -Y b1 is preferably bonded at the m-position substitution of the benzene ring with respect to the bonding position of SO3 - in the following structure. TIFF2025104295000122.tif28107[In the above formula, L b2 and Y b1 and R b1 and nb3 have the same meanings as in formula (B1-A2).] In formula (B1-A2), when n4b is 2 or more, a plurality of L b2 and Y b1 preferably represent the same group as each other.

[0166] Examples of the alkyl group having 1 to 6 carbon atoms for R b1 include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, and hexyl group. The number of carbon atoms of the alkyl group is preferably 1 to 4, and more preferably 1 to 3. Examples of the halogen atom for R b1 include fluorine atom, chlorine atom, bromine atom, iodine atom and the like. Examples of the group in which -CH2- contained in the alkyl group is replaced by -O- or -CO- include hydroxy group, carboxy group, alkoxy group, alkoxycarbonyl group, alkylcarbonyl group, alkylcarbonyloxy group, oxy group, carbonyl group and the like. These replaced groups include the same ones as the groups exemplified in this specification within the range where the upper limit of the number of carbon atoms permits. R b1is preferably, independently of each other, a halogen atom or an alkyl group having 1 to 4 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), more preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms (wherein -CH2- contained in the alkyl group may be replaced by -O- or -CO-), and even more preferably a fluorine atom, an iodine atom, a hydroxy group, a methoxy group or a methyl group. nb3 is any integer from 0 to 4 (that is, nb3 - 1 represents any integer from 0 to 3), preferably any integer from 0 to 3, and more preferably any integer from 0 to 2. In one embodiment, nb3 is preferably 0. In another embodiment, nb3 is preferably 1 or 2. When nb3 is 1, R b1 is preferably a halogen atom, and R b1 is more preferably a fluorine atom or an iodine atom. When n3b is 2, one of R b1 is preferably a halogen atom and the other is preferably a halogen atom or an alkyl group having 1 to 4 carbon atoms, and one of R b1 is more preferably a fluorine atom or an iodine atom and the other is preferably a fluorine atom, an iodine atom or an alkyl group having 1 to 3 carbon atoms.

[0167] Examples of the anion (B1 - A2) include the following anions. Among them, the anions represented by formula (B2a - 1) to formula (B2a - 20) are preferred, and the anions represented by formula (B2a - 1) to formula (B2a - 11), formula (B2a - 16) to formula (B2a - 20) are more preferred. The following anions have some R b1 omitted and may contain substituents not shown. TIFF2025104295000123.tif94161

[0168] In another form of the acid generator (B), an anion obtained by replacing the anion represented by the formula (B1) with a sulfonimide anion, a sulfonylmethide anion, or a carboxylic acid anion is also preferably used as the acid generator (B). Examples of the sulfonimide anion and the sulfonylmethide anion include those represented by the following formulas. TIFF2025104295000124.tif1289[In the formula (B1-A3), A 1 represents a nitrogen atom or a carbon atom. L b2 ’ represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a substituent, and -CH2- contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO2-. Y b1 ’ represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH2- contained in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO2- or -CO-. nb5 represents 2 or 3. When nb5 is 2, A 1 represents a nitrogen atom, and when nb5 is 3, A 1 represents a carbon atom. A plurality of -L b2 ’-Y b1 ’ may be the same as or different from each other, and a plurality of R b2 may be the same as or different from each other, and two -SO2-L b2 ’-Y b1 ’ may combine together to form a ring.] In the formula (B1-A3), L b2 ’ and Y b1 ’s hydrocarbon group, cyclic hydrocarbon group, and their substituents are the same groups as L b2 and Y b1 in the formula (B1-A1). In the formula (B1-A3), L b2’ is a single bond, *-L b23 -X 2 -, or *-L b23 -X 2 -W 2 -X3 -(L b23 represents an alkanediyl group having 1 to 6 carbon atoms which may have a fluorine atom, and X 2 and X 3 each independently represent -O-, -CO-O-, -O-CO-, -O-CO-O- or -O-, and W 2 represents an alicyclic hydrocarbon group having 3 to 12 carbon atoms, and the -CH2- contained in the alicyclic hydrocarbon group may be replaced by -O- or -CO-, and * represents the bonding site with SO2.) is preferred. In formula (B1-A3), Y b1’ is preferably a trifluoromethyl group, an alicyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or a phenyl group which may have a substituent, and more preferably a trifluoromethyl group or a group represented by formula (Y1) to formula (Y36) in formula (B1-A1). nb5 is preferably 2 or 3. In formula (B1-A3), when two SO2-L b2’ -Y b1’ together form a ring containing A 1 , for example, an anion represented by formula (B1-A3’) can be mentioned. TIFF2025104295000125.tif21122 [In formula (B1-A3’), A 1 , nb5 has the same meaning as in formula (B1-A3). Y b1 , L b2 has the same meaning as in formula (B1). W b4 represents a disulfonylimide ring or a disulfonylmethide ring having 3 to 12 carbon atoms which may have a fluorine atom.] The disulfonylimide ring or disulfonylmethide ring of W b4 preferably has 3 to 6 carbon atoms, and the hydrogen atom of the methylene group contained in the ring is preferably replaced by a fluorine atom.

[0169] Examples of the anion represented by formula (B1-A3) include the following. Among them, the anions represented by formula (B3a-1) and formula (B3a-2) are preferred. TIFF2025104295000126.tif132161

[0170] TIFF2025104295000127.tif57165Examples of the carboxylic acid anion include the following. TIFF2025104295000128.tif41155

[0171] Z1 + Examples of the organic cation of include organic onium cations, organic sulfonium cations, organic iodonium cations, organic ammonium cations, benzothiazolium cations, and organic phosphonium cations, etc. Among these, organic sulfonium cations and organic iodonium cations are preferred, and arylsulfonium cations or aryl iodonium cations are more preferred. Specifically, cations represented by any of formula (b2-1) to formula (b2-5) (hereinafter, may be referred to as "cation (b2-1)" etc. according to the formula number) are included. TIFF2025104295000129.tif83159[In formula (b2-1) to formula (b2-5), R b4 ~R b6 each independently represents a linear hydrocarbon group having 1 to 30 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms, or an aromatic hydrocarbon group having 6 to 36 carbon atoms, and the hydrogen atom contained in the linear hydrocarbon group may be substituted with a hydroxy group, an alkoxy group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 12 carbon atoms, or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the alicyclic hydrocarbon group may be substituted with a halogen atom, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, or a glycidyloxy group, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted with a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 18 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. Rb4 and R b5 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b7 and R b8 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms or an alkoxy group having 1 to 12 carbon atoms. m2 and n2 each independently represent an integer of any one of 0 to 5. When m2 is 2 or more, a plurality of R b7 may be the same or different, and when n2 is 2 or more, a plurality of R b8 may be the same or different. R b9 and R b10 each independently represents a chain hydrocarbon group having 1 to 36 carbon atoms or an alicyclic hydrocarbon group having 3 to 36 carbon atoms. R b9 and R b10 may combine with each other to form a ring together with the sulfur atom to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b11 represents a hydrogen atom, a chain hydrocarbon group having 1 to 36 carbon atoms, an alicyclic hydrocarbon group having 3 to 36 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms. R b12 represents a chain hydrocarbon group having 1 to 12 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms or an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the chain hydrocarbon group may be substituted by an aromatic hydrocarbon group having 6 to 18 carbon atoms, and the hydrogen atom contained in the aromatic hydrocarbon group may be substituted by an alkoxy group having 1 to 12 carbon atoms or an alkylcarbonyloxy group having 1 to 12 carbon atoms. R b11 and R b12 may combine with each other to form a ring including the -CH-CO- to which they are attached, and the -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b13~R b18 and R b21 ~R b26 each independently represents a halogen atom, a hydroxy group, an aliphatic hydrocarbon group having 1 to 12 carbon atoms, a fluorinated alkyl group having 1 to 12 carbon atoms, or an alkoxy group having 1 to 12 carbon atoms. R b13 and R b14 and R b21 and R b22 may be bonded to each other to form a ring containing a sulfur atom together with the benzene ring to which they are bonded, and -CH2- contained in the ring may be replaced by -O-, -S- or -CO-. R b27 ~R b29 each independently represents a hydrogen atom or a group containing an acid-labile group. L b31 and L b41 ~L b43 each independently represents a sulfur atom or an oxygen atom. o2, p2, s2, and t2 each independently represents an integer of any one of 0 to 5. q2 and r2 each independently represents an integer of any one of 0 to 4. u2 represents 0 or 1. When o2 is 2 or more, a plurality of R b13 are the same or different, when p2 is 2 or more, a plurality of R b14 are the same or different, when q2 is 2 or more, a plurality of R b15 are the same or different, when r2 is 2 or more, a plurality of R b16 are the same or different, when s2 is 2 or more, a plurality of R b17 are the same or different, when t2 is 2 or more, a plurality of R b18 are the same or different. u3 represents an integer of any one of 1 to 3 and satisfies 1 ≦ u3 + q23 ≦ 5. u4 and u5 each independently represents an integer of any one of 0 to 3 and satisfy 0 ≦ u4 + o21 ≦ 5 and 0 ≦ u5 + p22 ≦ 5. o21, p22, q23, r24, t25, and s26 each independently represents an integer of any one of 0 to 4. When u3, u4, and u5 are each 2 or more, the groups in parentheses are each the same or different. When o21, p22, q23, r24, t25, and s26 are each 2 or more, the plurality of Rs b21 ~R b26 are each the same or different. When u3, u4, and u5 are each 2 or more, the groups in parentheses are each the same or different.] When u2 is 0, any one of o2, p2, q2, and r2 is 1 or more, and at least one of R b13 ~R b16 is preferably a halogen atom. When u2 is 1, any one of o2, p2, s2, t2, q2, and r2 is 1 or more, and at least one of R b13 ~R b18 is preferably a halogen atom. Furthermore, when u2 is 0, r2 is preferably 1 or more, and more preferably 1. Also, when u2 is 0 and r2 is 1 or more, R b16 is preferably a halogen atom.

[0172] The aliphatic hydrocarbon group represents a chain hydrocarbon group and an alicyclic hydrocarbon group. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, sec-butyl group, tert-butyl group, pentyl group, hexyl group, octyl group, and 2-ethylhexyl group. In particular, the chain hydrocarbon group of R b9 ~R b12 is preferably C1-C12. The alicyclic hydrocarbon group may be either monocyclic or polycyclic. Examples of the monocyclic alicyclic hydrocarbon group include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cycloheptyl group, cyclooctyl group, and cyclodecyl group. Examples of the polycyclic alicyclic hydrocarbon group include decahydronaphthyl group, adamantyl group, norbornyl group, and the following groups. TIFF2025104295000130.tif11157 In particular, R b9 ~R b12 The alicyclic hydrocarbon group of ~R preferably has 3 to 18 carbon atoms, more preferably 4 to 12 carbon atoms.

[0173] Examples of the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group include a methylcyclohexyl group, a dimethylcyclohexyl group, a 2-methyladamantan-2-yl group, a 2-ethyladamantan-2-yl group, a 2-isopropyladamantan-2-yl group, a methylnorbornil group, an isobornyl group, etc. In the alicyclic hydrocarbon group in which a hydrogen atom is substituted with an aliphatic hydrocarbon group, the total number of carbon atoms of the alicyclic hydrocarbon group and the aliphatic hydrocarbon group is preferably 20 or less. The alkyl fluoride group represents an alkyl group having 1 to 12 carbon atoms and having a fluorine atom, and examples thereof include a fluoromethyl group, a difluoromethyl group, a trifluoromethyl group, a perfluorobutyl group, etc. The number of carbon atoms of the alkyl fluoride group is preferably 1 to 9, more preferably 1 to 6, and still more preferably 1 to 4.

[0174] Examples of the aromatic hydrocarbon group include aryl groups such as a phenyl group, a biphenyl group, a naphthyl group, and a phenanthryl group. The aromatic hydrocarbon group may have a chain hydrocarbon group or an alicyclic hydrocarbon group, and examples of the aromatic hydrocarbon group having a chain hydrocarbon group (such as a tolyl group, a xylyl group, a cumenyl group, a mesityl group, a p-ethylphenyl group, a p-tert-butylphenyl group, a 2,6-diethylphenyl group, a 2-methyl-6-ethylphenyl group, etc.) and the aromatic hydrocarbon group having an alicyclic hydrocarbon group (such as a p-cyclohexylphenyl group, a p-adamantylphenyl group, etc.) are included. When the aromatic hydrocarbon group has a chain hydrocarbon group or an alicyclic hydrocarbon group, a chain hydrocarbon group having 1 to 18 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms are preferable. Examples of the aromatic hydrocarbon group in which a hydrogen atom is substituted with an alkoxy group include a p-methoxyphenyl group, etc. Examples of the chain hydrocarbon group in which a hydrogen atom is substituted with an aromatic hydrocarbon group include aralkyl groups such as benzyl group, phenethyl group, phenylpropyl group, trityl group, naphthylmethyl group, and naphthylethyl group.

[0175] Examples of the alkoxy group include methoxy group, ethoxy group, propoxy group, butoxy group, pentyloxy group, hexyloxy group, heptyloxy group, octyloxy group, decyloxy group, and dodecyloxy group. Examples of the alkylcarbonyl group include acetyl group, propionyl group, and butyryl group. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, and iodine atom. Examples of the alkylcarbonyloxy group include methylcarbonyloxy group, ethylcarbonyloxy group, propylcarbonyloxy group, isopropylcarbonyloxy group, butylcarbonyloxy group, sec-butylcarbonyloxy group, tert-butylcarbonyloxy group, pentylcarbonyloxy group, hexylcarbonyloxy group, octylcarbonyloxy group, and 2-ethylhexylcarbonyloxy group.

[0176] R b4 and R b5 The ring formed by R TIFF2025104295000131.tif24142

[0177] R b9 and R b10The ring formed together with [group] may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring includes 3-membered rings to 12-membered rings, preferably 3-membered rings to 7-membered rings. For example, thiolan-1-ium ring (tetrahydrothiophenium ring), thian-1-ium ring, 1,4-oxathian-4-ium ring and the like can be mentioned. R b11 and R b12 The ring formed together with [group] may be any of monocyclic, polycyclic, aromatic, non-aromatic, saturated and unsaturated rings. This ring includes 3-membered rings to 12-membered rings, preferably 3-membered rings to 7-membered rings. Oxocycloheptane ring, oxocyclohexane ring, oxonorbornane ring, oxoadamantane ring and the like can be mentioned. R b27 ~R b29 Examples of the group containing an acid-labile group of [group] to [group] include -R c30 , -CO-O-R c30 or -L c10 -CO-O-R c30 wherein L c10 represents an alkanediyl group having 1 to 6 carbon atoms, and R c30 represents an acid-labile group. ) and the like can be mentioned. R b27 ~R b29 Examples of the acid-labile group of [group] to [group] include the group represented by the aforementioned formula (1) and / or the group represented by formula (2).

[0178] Among cations (b2-1) to (b2-5), preferably, cation (b2-1), cation (b2-4) or cation (b2-5). Examples of cation (b2-1) include the following cations. TIFF2025104295000132.tif149164 Examples of cation (b2-2) include the following cations. TIFF2025104295000133.tif18150 Examples of cation (b2-3) include the following cations. TIFF2025104295000134.tif26140 Examples of cation (b2-4) include the following cations. TIFF2025104295000135.tif123164 As the cation (b2-5), the following cations can be mentioned. TIFF2025104295000136.tif115157

[0179] The acid generator (B) is a combination of the above-mentioned anion and the above-mentioned organic cation, and these can be arbitrarily combined. As the acid generator (B), preferably, an anion represented by any of the formulas (B1a-1) to (B1a-3), formulas (B1a-7) to (B1a-19), formulas (B1a-22) to (B1a-70) or formulas (B2a-1) to (B2a-11), formulas (B2a-16) to (B2a-20), formulas (B3a-1) to (B3a-20), and a combination with the cation (b2-1), cation (b2-2), cation (b2-3), cation (b2-4) or cation (b2-5) can be mentioned.

[0180] As the acid generator (B), preferably, those represented by the formulas (B1-1) to (B1-105), formulas (B2-1) to (B2-20) and formulas (B3-1) to (B3-20), formulas (B3-1) to (B3-28) can be mentioned. Among them, those containing an arylsulfonium cation are preferable, and those represented by the formulas (B1-1) to (B1-3), formulas (B1-5) to (B1-7), formulas (B1-11) to (B1-14), formulas (B1-20) to (B1-26), formula (B1-29), formulas (B1-31) to (B1-105) and formulas (B2-1) to (B2-20), formulas (B3-1) to (B3-28) are particularly preferable. TIFF2025104295000137.tif174168

[0181] TIFF2025104295000138.tif254164

[0182] TIFF2025104295000139.tif254165

[0183] TIFF2025104295000140.tif254160

[0184] TIFF2025104295000141.tif249163

[0185] TIFF2025104295000142.tif250151

[0186] TIFF2025104295000143.tif186160

[0187] In the resist composition of the present invention, the content of the acid generator is preferably 1 part by mass or more and 45 parts by mass or less, more preferably 1 part by mass or more and 40 parts by mass or less, and still more preferably 3 parts by mass or more and 35 parts by mass or less with respect to 100 parts by mass of the resin (A). The resist composition of the present invention may contain one kind of the acid generator (B) alone or a plurality of kinds.

[0188] <Solvent (E)> The content of the solvent (E) in the resist composition is usually 90% by mass or more and 99.9% by mass or less, preferably 92% by mass or more and 99% by mass or less, and more preferably 94% by mass or more and 99% by mass or less. The content of the solvent (E) can be measured by known analytical means such as liquid chromatography or gas chromatography. Examples of the solvent (E) include glycol ether esters such as ethyl cellosolve acetate, methyl cellosolve acetate, and propylene glycol monomethyl ether acetate; glycol ethers such as propylene glycol monomethyl ether; esters such as ethyl lactate, butyl acetate, amyl acetate, and ethyl pyruvate; ketones such as acetone, methyl isobutyl ketone, 2-heptanone, and cyclohexanone; cyclic esters such as γ-butyrolactone; and the like. One kind of the solvent (E) may be used alone, or two or more kinds may be used.

[0189] <Quencher (C)> Examples of the quencher (C) include salts that generate an acid with a lower acidity than the acid generated from the acid generator (acid generator (B)), and basic nitrogen-containing organic compounds. The content of the quencher (C) is preferably about 0.01 to 15% by mass, more preferably about 0.01 to 10% by mass, still more preferably about 0.1 to 8% by mass, and even more preferably about 0.1 to 7% by mass, based on the solid content of the resist composition.

[0190] The acidity of the salt that generates an acid with a lower acidity than the acid generated from the acid generator is represented by the acid dissociation constant (pKa). The salt that generates an acid with a lower acidity than the acid generated from the acid generator is a salt having an acid dissociation constant of the acid generated from the salt usually -3 < pKa, preferably -1 < pKa < 7, and more preferably 0 < pKa < 5. Examples of the salt that generates an acid with a lower acidity than the acid generated from the acid generator include salts represented by the following formula, salts represented by formula (D) described in JP-A-2015-147926 (hereinafter sometimes referred to as "weak acid inner salt (D)"), and salts described in JP-A-2012-229206, JP-A-2012-6908, JP-A-2012-72109, JP-A-2011-39502, and JP-A-2011-191745. As the salt that generates an acid with a lower acidity than the acid generated from the acid generator, preferably, it is a salt that generates a carboxylic acid with a lower acidity than the acid generated from the acid generator (a salt having a carboxylic acid anion), more preferably a weak acid inner salt (D), and still more preferably, among the weak acid inner salts (D), a diphenyliodonium salt containing a phenyl group substituted with a carboxylic acid anion. TIFF2025104295000144.tif96153

[0191] As the weak acid inner salt (D), a diphenyliodonium salt having an iodonium cation to which two phenyl groups are bonded and a carboxylate anion substituted for at least one of the two phenyl groups bonded to the iodonium cation is preferable. Specifically, salts represented by the following formulae may be mentioned.

[0192] TIFF2025104295000145.tif1980[In formula (D), R D1 and R D2 each independently represents a hydrocarbon group having 1 to 12 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 7 carbon atoms, an acyloxy group having 2 to 7 carbon atoms, an alkoxycarbonyl group having 2 to 7 carbon atoms, a nitro group or a halogen atom. m’ and n’ each independently represent any integer from 0 to 4. When m’ is 2 or more, the plurality of Rs D1 may be the same or different, and when n’ is 2 or more, the plurality of Rs D2 may be the same or different.] R D1 and R D2 Examples of the hydrocarbon group include chain hydrocarbon groups, alicyclic hydrocarbon groups, aromatic hydrocarbon groups, and groups formed by combining these. Examples of the chain hydrocarbon group include alkyl groups such as methyl group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, pentyl group, hexyl group, nonyl group and the like. The alicyclic hydrocarbon group may be either monocyclic or polycyclic, and may be either saturated or unsaturated. Examples thereof include cycloalkyl groups such as cyclopropyl group, cyclobutyl group, cyclopentyl group, cyclohexyl group, cyclononyl group, cyclododecyl group, norbornyl group, adamantyl group and the like. Examples of the aromatic hydrocarbon group include aryl groups such as phenyl group, 1-naphthyl group, 2-naphthyl group, 2-methylphenyl group, 3-methylphenyl group, 4-methylphenyl group, 4-ethylphenyl group, 4-propylphenyl group, 4-isopropylphenyl group, 4-butylphenyl group, 4-t-butylphenyl group, 4-hexylphenyl group, 4-cyclohexylphenyl group, anthryl group, p-adamantylphenyl group, tolyl group, xylyl group, cumenyl group, mesityl group, biphenyl group, phenanthryl group, 2,6-diethylphenyl group, 2-methyl-6-ethylphenyl group, etc. Examples of the group formed by combining these include alkyl-cycloalkyl groups, cycloalkyl-alkyl groups, aralkyl groups (e.g., phenylmethyl group, 1-phenylethyl group, 2-phenylethyl group, 1-phenyl-1-propyl group, 1-phenyl-2-propyl group, 2-phenyl-2-propyl group, 3-phenyl-1-propyl group, 4-phenyl-1-butyl group, 5-phenyl-1-pentyl group, 6-phenyl-1-hexyl group, etc.). Examples of the alkoxy group include methoxy group, ethoxy group, etc. Examples of the acyl group include acetyl group, propanoyl group, benzoyl group, cyclohexanecarbonyl group, etc. Examples of the acyloxy group include groups in which an oxy group (-O-) is bonded to the above acyl group. Examples of the alkoxycarbonyl group include groups in which a carbonyl group (-CO-) is bonded to the above alkoxy group. Examples of the halogen atom include fluorine atom, chlorine atom, bromine atom, etc. R D1 and R D2 are each independently preferably an alkyl group having 1 to 8 carbon atoms, a cycloalkyl group having 3 to 10 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, an acyl group having 2 to 4 carbon atoms, an acyloxy group having 2 to 4 carbon atoms, an alkoxycarbonyl group having 2 to 4 carbon atoms, a nitro group or a halogen atom. m' and n' are each independently preferably any integer from 0 to 2, and more preferably 0. When m' is 2 or more, a plurality of RD1 may be the same or different, and when n' is 2 or more, a plurality of R D2 may be the same or different.

[0193] More specifically, the following salts can be mentioned. TIFF2025104295000146.tif72165

[0194] Examples of the basic nitrogen-containing organic compounds include amines and ammonium salts. Examples of the amines include aliphatic amines and aromatic amines. Examples of the aliphatic amines include primary amines, secondary amines, and tertiary amines. Examples of the amine include 1-naphthylamine, 2-naphthylamine, aniline, diisopropylaniline, 2-, 3- or 4-methylaniline, 4-nitroaniline, N-methylaniline, N,N-dimethylaniline, diphenylamine, hexylamine, heptylamine, octylamine, nonylamine, decylamine, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4'-diamino-1,2-diphenylethane, 4,4'-diamino-3,3'-dimethyldiphenylmethane, 4,4'-diamino-3,3'-diethyldiphenylmethane, 2,2'-methylenebisaniline, imidazole, 4-methylimidazole, pyridine, 4-methylpyridine, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethane, 1,2-di(2-pyridyl)ethene, 1,2-di(4-pyridyl)ethene, 1,3-di(4-pyridyl)propane, 1,2-di(4-pyridyloxy)ethane, di(2-pyridyl)ketone, 4,4'-dipyridylsulfide, 4,4'-dipyridyldisulfide, 2,2'-dipyridylamine, 2,2'-dipicolylamine, bipyridine, etc. Aromatic amines such as diisopropylaniline are preferred, and 2,6-diisopropylaniline is more preferred. Examples of the ammonium salt include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylammonium hydroxide, 3-(trifluoromethyl)phenyltrimethylammonium hydroxide, tetra-n-butylammonium salicylate, and choline.

[0195] <Other Components> The resist composition of the present invention may contain, if necessary, components other than the above-described components (hereinafter sometimes referred to as "other components (F)"). There is no particular limitation on the other components (F), and additives known in the resist field, such as sensitizers, dissolution inhibitors, surfactants, stabilizers, dyes, etc. can be used.

[0196] <Preparation of Resist Composition> The resist composition of the present invention can be prepared by mixing the resin (A1), resin (A2), and acid generator (B) of the present invention, and, if necessary, a salt that generates an acid having a lower acidity than the acid generated from the acid generator, a resin other than the resin (A1) and resin (A2), a quencher (C), a solvent (E), and other components (F). The mixing order is arbitrary and is not particularly limited. The temperature during mixing can be appropriately selected from 10 to 40°C according to the type of resin, etc. and the solubility of the resin, etc. in the solvent (E). The mixing time can be appropriately selected from 0.5 to 24 hours according to the mixing temperature. Note that the mixing means is also not particularly limited, and stirring and mixing, etc. can be used. After mixing the respective components, it is preferable to filter using a filter having a pore size of about 0.003 to 0.2 μm.

[0197] <Method for Producing Resist Pattern> The method for producing a resist pattern of the present invention is (1) A step of applying the resist composition of the present invention onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) Exposing the composition layer, (4) Heating the composition layer after exposure, and (5) Developing the composition layer after heating.

[0198] To apply the resist composition onto a substrate, it can usually be done by using an apparatus such as a spin coater. Examples of the substrate include inorganic substrates such as silicon wafers and organic substrates with a resist film formed on the surface. Before applying the resist composition, the substrate may be cleaned, or an antireflection film or the like may be formed on the substrate. By drying the applied composition, the solvent is removed to form a composition layer. Drying is performed, for example, by evaporating the solvent using a heating device such as a hot plate (so-called pre-bake), or by using a decompression device. The heating temperature is preferably 50 to 200 °C, and the heating time is preferably 10 to 180 seconds. Also, the pressure during vacuum drying is preferably about 1 to 1.0×10 5 Pa. The obtained composition layer is usually exposed using an exposure machine. The exposure machine may be an immersion exposure machine. As the exposure light source, those that emit laser light in the ultraviolet region such as KrF excimer laser (wavelength 248 nm), ArF excimer laser (wavelength 193 nm), F2 excimer laser (wavelength 157 nm), those that convert the laser light from a solid laser light source (such as YAG or semiconductor laser) into harmonic laser light in the far ultraviolet region or vacuum ultraviolet region and emit it, those that irradiate electron beams, those that irradiate extreme ultraviolet light (EUV), etc., can be used. In this specification, irradiating these radiations may be collectively referred to as "exposure" in some cases. During exposure, usually, exposure is performed through a mask corresponding to the required pattern. When the exposure light source is an electron beam, exposure may be performed by direct drawing without using a mask. The composition layer after exposure is heat-treated (so-called post-exposure bake) to promote the deprotection reaction at the acid-labile groups. The heating temperature is usually about 50 to 200°C, preferably about 70 to 150°C. Chemical treatment (silylation) may be performed to adjust the hydrophilicity or hydrophobicity of the resin on the surface side of the composition after heating. Also, before development, the steps of coating, drying, exposing, and heating the resist composition may be repeated on the composition layer after exposure. The composition layer after heating is usually developed using a developing solution with a developing apparatus. Examples of the developing method include the dip method, paddle method, spray method, dynamic dispense method, and the like. The developing temperature is preferably, for example, 5 to 60°C, and the developing time is preferably, for example, 5 to 300 seconds. By selecting the type of developing solution as follows, a positive resist pattern or a negative resist pattern can be manufactured. When manufacturing a positive resist pattern from the resist composition of the present invention, an alkaline developing solution is used as the developing solution. The alkaline developing solution may be various alkaline aqueous solutions used in this field. For example, aqueous solutions of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as choline) can be mentioned. The alkaline developing solution may contain a surfactant. It is preferable to wash the resist pattern with ultrapure water after development and then remove the water remaining on the substrate and the pattern. When manufacturing a negative resist pattern from the resist composition of the present invention, a developing solution containing an organic solvent (hereinafter sometimes referred to as an "organic-based developing solution") is used as the developing solution. Examples of the organic solvent contained in the organic-based developing solution include ketone solvents such as 2-hexanone and 2-heptanone; glycol ether ester solvents such as propylene glycol monomethyl ether acetate; ester solvents such as butyl acetate; glycol ether solvents such as propylene glycol monomethyl ether; amide solvents such as N,N-dimethylacetamide; and aromatic hydrocarbon solvents such as anisole. In the organic developer, the content of the organic solvent is preferably 90% by mass or more and 100% by mass or less, more preferably 95% by mass or more and 100% by mass or less, and still more preferably substantially only the organic solvent. Among them, as the organic developer, a developer containing butyl acetate and / or 2-heptanone is preferable. In the organic developer, the total content of butyl acetate and 2-heptanone is preferably 50% by mass or more and 100% by mass or less, more preferably 90% by mass or more and 100% by mass or less, and still more preferably substantially only butyl acetate and / or 2-heptanone. The organic developer may contain a surfactant. Further, the organic developer may contain a small amount of water. During development, development may be stopped by replacing with a solvent of a different type from the organic developer. It is preferable to wash the resist pattern after development with a rinse solution. The rinse solution is not particularly limited as long as it does not dissolve the resist pattern, and a solution containing a general organic solvent can be used, preferably an alcohol solvent or an ester solvent. After washing, it is preferable to remove the rinse solution remaining on the substrate and the pattern.

[0199] <Usage> The resist composition of the present invention is suitable as a resist composition for KrF excimer laser exposure, a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure, or a resist composition for EUV exposure, particularly a resist composition for ArF excimer laser exposure, a resist composition for electron beam (EB) exposure, or a resist composition for EUV exposure, and is useful for fine processing of semiconductors.

Examples

[0200] The present invention will be described more specifically with reference to examples. In the examples, “%” and “parts” representing the content or the amount used are based on mass unless otherwise specified. The weight average molecular weight is a value determined by gel permeation chromatography under the following conditions. Apparatus: Model HLC-8120GPC (manufactured by Tosoh Corporation) Column: TSKgel Multipore H XL -M x 3 + guard column (manufactured by Tosoh Corporation) Eluent: Tetrahydrofuran Flow rate: 1.0 mL / min Detector: RI detector Column temperature: 40 °C Injection volume: 100 μl Molecular weight standard: Standard polystyrene (manufactured by Tosoh Corporation) Also, the structure of the compound was confirmed by measuring the molecular ion peak using mass spectrometry (LC is Agilent model 1100, MASS is Agilent LC / MSD model). In the following examples, the value of this molecular ion peak is indicated by "MASS".

[0201] Synthesis of resin The compounds (monomers) used in the synthesis of the resin are shown below. TIFF2025104295000147.tif101144 Hereinafter, these compounds are referred to as "monomer (a1-2-6)" etc. according to the formula number.

[0202] Synthesis Example 1 [Synthesis of Resin A1-1] As monomers, monomer (I-1) and monomer (a1-4-2) were used, and they were mixed so that the molar ratio [monomer (I-1): monomer (a1-4-2)] was 60:40. Further, 1.5 mass times of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol% respectively based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Then, 2.0 mass times of an aqueous p-toluenesulfonic acid solution (2.5 wt%) was added to the polymerization reaction solution based on the total mass of all monomers, and after stirring for 12 hours, liquid separation was performed. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered, whereby the weight average molecular weight was about 3.9×10 3Resin A1-1 was obtained in a yield of 58%. This resin A1-1 has the following structural units. TIFF2025104295000148.tif2887

[0203] Synthesis Example 2 [Synthesis of Resin A1-2] As monomers, monomer (I-1) and monomer (a1-4-2) were used and mixed so that the molar ratio [monomer (I-1): monomer (a1-4-2)] was 40:60. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol%, respectively, based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5 wt%) 2.0 times the mass of the total monomers was added to the polymerization reaction solution, and after stirring for 12 hours, liquid separation was performed. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered, whereby a resin A1-2 having a weight average molecular weight of about 4.2×10 3 was obtained in a yield of 55%. This resin A1-2 has the following structural units. TIFF2025104295000149.tif2887

[0204] Synthesis Example 3 [Synthesis of Resin A1-3] As monomers, monomer (I-1) and monomer (a1-4-2) were used and mixed so that the molar ratio [monomer (I-1): monomer (a1-4-2)] was 20:80. Further, 1.5 mass times of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol%, respectively, with respect to the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5 wt%) at 2.0 mass times with respect to the total mass of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery, and the resin A1-3 having a weight average molecular weight of about 4.8×10 3 was obtained at a yield of 50%. This resin A1-3 has the following structural units. TIFF2025104295000150.tif2888

[0205] Synthesis Example 4 [Synthesis of Resin A1-4] As monomers, monomer (I-1) and monomer (a1-4-2) were used and mixed so that the molar ratio [monomer (I-1): monomer (a1-4-2)] was 8:92. Further, 1.5 mass times of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol%, respectively, with respect to the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5 wt%) at 2.0 mass times with respect to the total mass of all monomers was added to the polymerization reaction solution, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery, and the resin A1-4 having a weight average molecular weight of about 5.6×10 3 was obtained at a yield of 43%. This resin A1-4 has the following structural units. TIFF2025104295000151.tif2887

[0206] Synthesis Example 5 [Synthesis of Resin A1-5] As monomers, monomer (I-9) and monomer (a1-4-2) were used and mixed so that the molar ratio [monomer (I-9): monomer (a1-4-2)] was 20:80. Further, 1.5 times the mass of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol%, respectively, based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5 wt%) 2.0 times the mass of the total monomers was added to the polymerization reaction solution, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery with a weight average molecular weight of about 4.8×10 3 Resin A1-5 was obtained in a yield of 58%. This resin A1-5 has the following structural units. JPEG2025104295000152.jpg30104

[0207] Synthesis Example 6 [Synthesis of Resin A1-6] As monomers, monomer (I-13) and monomer (a1-4-2) were used and mixed so that their molar ratio [monomer (I-13): monomer (a1-4-2)] was 20:80. Further, 1.5 mass times of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol% respectively based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, 2.0 mass times of an aqueous solution of p-toluenesulfonic acid (2.5 wt%) was added to the polymerization reaction solution based on the total mass of all monomers, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered to obtain resin A1-6 having a weight average molecular weight of about 5.0×10 3 and having a yield of 60%. This resin A1-6 has the following structural units. TIFF2025104295000153.tif3889

[0208] Synthesis Example 7 [Synthesis of Resin A1-7] As monomers, monomer (a3-4-2), monomer (I-1) and monomer (a1-4-2) were used and mixed so that their molar ratio [monomer (a3-4-2): monomer (I-1): monomer (a1-4-2)] was 35:10:55. Further, 1.5 mass times of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol% respectively based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, 2.0 mass times of an aqueous solution of p-toluenesulfonic acid (2.5 wt%) was added to the polymerization reaction solution based on the total mass of all monomers, stirred for 12 hours, and then separated. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered to obtain resin A1-7 having a weight average molecular weight of about 5.0×10 3 and having a yield of 50%. This resin A1-7 has the following structural units. JPEG2025104295000154.jpg38130

[0209] Synthesis Example 8 [Synthesis of Resin A1-8] As monomers, monomer (I-1) and monomer (III-C-1) were used and mixed so that the molar ratio [monomer (I-1): monomer (III-C-1)] was 20:80. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added at 3.3 mol% and 9.9 mol%, respectively, based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Then, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery. Resin A1-8 having a weight average molecular weight of about 4.4×10 3 was obtained in a yield of 68%. This resin A1-8 has the following structural units. JPEG2025104295000155.jpg3287

[0210] Synthesis Example 9 [Synthesis of Resin A1-9] As monomers, monomer (I-1) and monomer (III-B-6) were used and mixed so that the molar ratio [monomer (I-1): monomer (III-B-6)] was 35:65. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added at 3.3 mol% and 9.9 mol%, respectively, based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Then, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery. Resin A1-9 having a weight average molecular weight of about 4.9×10 3 was obtained in a yield of 71%. This resin A1-9 has the following structural units. JPEG2025104295000156.jpg3087

[0211] Synthesis Example 10 [Synthesis of Resin A1-10] As monomers, monomer (I-13) and monomer (III-C-27a) were used, and they were mixed so that the molar ratio [monomer (I-13): monomer (III-C-27a)] was 35:65. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added at 3.3 mol% and 9.9 mol%, respectively, with respect to the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery. A resin A1-10 having a weight average molecular weight of about 4.9×10 3 was obtained with a yield of 55%. This resin A1-10 has the following structural units. JPEG2025104295000157.jpg3691

[0212] Synthesis Example 11 [Synthesis of Resin A1-11] As monomers, monomer (I-13) and monomer (III-C-12) were used, and they were mixed so that the molar ratio [monomer (I-13): monomer (III-C-12)] was 20:80. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added at 3.3 mol% and 9.9 mol%, respectively, with respect to the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was obtained by filtration and recovery. A resin A1-11 having a weight average molecular weight of about 4.4×10 3 was obtained with a yield of 54%. This resin A1-11 has the following structural units. TIFF2025104295000158.tif3891

[0213] Synthesis Example 12 [Synthesis of Resin A1-12] As monomers, monomer (I-1) and monomer (III-C-33) were used and mixed so that the molar ratio [monomer (I-1): monomer (III-C-33)] was 60:40. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3 mol% and 9 mol%, respectively, based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered to obtain resin A1-12 having a weight average molecular weight of about 5.0×10 3 in a yield of 66%. This resin A1-12 has the following structural units. TIFF2025104295000159.tif2891

[0214] Synthesis Example 13 [Synthesis of Resin A1-13] As monomers, monomer (I-13) and monomer (III-C-33) were used and mixed so that the molar ratio [monomer (I-13): monomer (III-C-33)] was 60:40. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 3.3 mol% and 9.9 mol%, respectively, based on the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered to obtain resin A1-13 having a weight average molecular weight of about 4.8×10 3 in a yield of 66%. This resin A1-13 has the following structural units. TIFF2025104295000160.tif3891

[0215] Synthesis Example 14 [Synthesis of Resin A1-14] As monomers, monomer (I-1) and monomer (III-C-35) were used and mixed so that the molar ratio [monomer (I-1): monomer (III-C-35)] was 70:30. Further, 1.5 mass times of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 5 mol% and 15 mol%, respectively, based on the total monomer amount, and these were heated at 75 °C for about 5 hours. Then, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered to obtain resin A1-14 having a weight average molecular weight of about 3.9×10 3 in a yield of 58%. This resin A1-14 has the following structural units. TIFF2025104295000161.tif2891

[0216] Synthesis Example 15 [Synthesis of Resin A1-15] As monomers, monomer (I-1) and monomer (III-A-8) were used and mixed so that the molar ratio [monomer (I-1): monomer (III-A-8)] was 70:30. Further, 1.5 mass times of methyl isobutyl ketone was mixed with this monomer mixture based on the total mass of all monomers. To the obtained mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 5 mol% and 15 mol%, respectively, based on the total monomer amount, and these were heated at 75 °C for about 5 hours. Then, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered to obtain resin A1-15 having a weight average molecular weight of about 3.9×10 3 in a yield of 96%. This resin A1-15 has the following structural units. JPEG2025104295000162.jpg3591

[0217] Synthesis Example 16 [Synthesis of Resin A1-16] As monomers, monomer (I-1) and monomer (III-C-33) were used and mixed so that the molar ratio [monomer (I-1): monomer (III-C-33)] was 70:30. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 5 mol% and 15 mol% respectively with respect to the total monomer amount, and these were heated at 75 °C for about 5 hours. Thereafter, the polymerization reaction solution was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered, whereby resin A1-16 having a weight average molecular weight of about 3.9×10 3 was obtained at a yield of 58%. This resin A1-16 has the following structural units. TIFF2025104295000163.tif2891

[0218] Synthesis Example 17 [Synthesis of Resin A2-1] As monomers, monomer (a1-1-3), monomer (a1-2-5), monomer (III-B-1), monomer (a3-4-2) and monomer (a1-4-2) were used and mixed so that the molar ratio [monomer (a1-1-3): monomer (a1-2-5): monomer (III-B-1): monomer (a3-4-2): monomer (a1-4-2)] was 20:35:3:12:30. Further, 1.5 times the mass of methyl isobutyl ketone with respect to the total mass of all monomers was mixed into this monomer mixture. To the resulting mixture, azobisisobutyronitrile and azobis(2,4-dimethylvaleronitrile) were added as initiators at 1.2 mol% and 3.6 mol% respectively with respect to the total monomer amount, and these were heated at 73 °C for about 5 hours. Thereafter, an aqueous solution of p-toluenesulfonic acid (2.5 wt%) 2.0 times the mass of the total monomers was added to the polymerization reaction solution, and after stirring for 12 hours, liquid separation was carried out. The recovered organic layer was poured into a large amount of n-heptane to precipitate the resin, and the resin was filtered and recovered, whereby resin A2-1 having a weight average molecular weight of about 5.4×10 3 was obtained at a yield of 65%. This resin A2-1 has th...

Claims

1. A first resin containing a structural unit represented by formula (I) and a structural unit represented by formula (III), a second resin containing a structural unit represented by formula (III), and a resist composition containing an acid generator. [In formula (I), R ０ represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. X １ represents a single bond, *-O-**, *-CO-O-**, *-O-CO-O-**, *-CO-NR ３ -**, *-NR ３ -CO-O-**, *-O-CO-NR ３ -** or *-Ax-Ph-Ay-**. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. Ph represents a phenylene group which may have a substituent. Ax and Ay each independently represent one or more bond types selected from the group consisting of a single bond, an ether bond, a thioether bond, an ester bond, an amide bond, and a carbonate bond. * and ** represent binding sites, and * represents the binding site with the carbon atom to which R ０ is attached. L １ represents a hydrocarbon group having 1 to 36 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO ２ - or -CO-. R Ａ represents a saturated hydrocarbon group having 1 to 12 carbon atoms. u1 represents any integer from 0 to 2. When u1 is 2, the plurality of Rs Ａ are either identical or different. s1 represents 1 or 2. t1 represents 0 or 1. However, the sum of s1 and t1 is 1 or 2. ] [In formula (III), R ４ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. X ２ represents a single bond or *-CO-O-. * represents the bonding site with the carbon atom to which R ４ is bonded. L ２ represents a hydrocarbon group having 1 to 28 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -SO ２ - or -CO-. X ３ represents a single bond, -C(CF ３ ) ２ - or -CO-. mk represents an integer of any one of 1 to 4. ]

2. X １ is a single bond or a group represented by any of the groups represented by formula (X １ -1) to formula (X １ -10): The resist composition according to claim 1. [Formula (X １ -1) to formula (X １ -10), *, ** are binding sites, * represents the binding site with the carbon atom to which R is attached. ０ represents the binding site with the carbon atom to which R is attached. Rx represents a halogen atom, a hydroxy group, a C1-6 fluorinated alkyl group, a C1-18 alkyl group, or a C1-6 alkoxy group. mx represents an integer of any one of 0 to 4. X ２０ represents -O- or -NR ３ -. R ３ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms.]

3. X １ is a single bond or a group represented by formula (X １ -1'), formula (X １ -3') to formula (X １ -10') according to claim 2. [Formula (X １ -1'), Formula (X １ -3') to Formula (X １ -10'), in *, ** are binding sites, and ** represents the binding site with L 1 .

4. L １ is a single bond, a chain hydrocarbon group having 1 to 4 carbon atoms (wherein -CH 2 - included in the chain hydrocarbon group may be replaced by -O- or -CO-), or a group formed by combining a chain hydrocarbon group having 1 to 4 carbon atoms and an alicyclic hydrocarbon group having 3 to 18 carbon atoms (wherein -CH 2 - included in the chain hydrocarbon group may be replaced by -O- or -CO-, and -CH 2 - included in the alicyclic hydrocarbon group may be replaced by -O- or -CO-). The resist composition according to claim 1 or 2.

5. The resist composition according to claim 1, wherein the structural unit represented by formula (III) is a structural unit represented by formula (III-C). [In formula (III-C), R ４ , X ２ , X ３ and mk represent the same meaning as in formula (III). L ２５ represents a single bond or *-(L ２６ -X ２１ ) ｎｂ -, where * represents the bonding site with X ２ . L ２６ represents an alkanediyl group having 1 to 8 carbon atoms. X ２１ represents -O-, -CO-O-, -O-CO- or -O-CO-O-. nb represents 0 or 1. ]

6. The resist composition according to claim 1, wherein the second resin further contains a structural unit having an acid-labile group.

7. The resist composition according to claim 6, wherein the structural unit having an acid-labile group contains at least one structural unit selected from the group consisting of a structural unit represented by formula (a1-0), a structural unit represented by formula (a1-1), a structural unit represented by formula (a1-2), a structural unit represented by formula (a1-4), a structural unit represented by formula (a1-5), and a structural unit represented by formula (a1-6). [In formula (a1-0), formula (a1-1), and formula (a1-2), L a01 , L ａ１ and L ａ２ each independently represents -O- or *-O-(CH ２ ), ｋ１ -CO-O-, k1 represents any integer from 1 to 7, and * represents the bonding site with -CO-. R a01 , R ａ４ and R ａ５ each independently represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a02 、 R a03 and R a04 each independently represents an alkyl group having 1 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group combining these, and the alkyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. R ａ６ and R ａ７ each independently represents an alkyl group having 1 to 8 carbon atoms, an alkenyl group having 2 to 8 carbon atoms, an alicyclic hydrocarbon group having 3 to 18 carbon atoms, an aromatic hydrocarbon group having 6 to 18 carbon atoms, or a group formed by combining these, and the alkyl group, the alkenyl group, the alicyclic hydrocarbon group, and the aromatic hydrocarbon group may have a halogen atom. m1' represents an integer of any one of 0 to 14. n1 represents an integer of any one of 0 to 10. n1' represents an integer of any one of 0 to 3. ] [In formula (a1-4), R ａ１ represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R ａ１７ represents a halogen atom, a hydroxy group, a carboxy group, an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, an alkoxy group having 1 to 6 carbon atoms, an alkoxyalkyl group having 2 to 12 carbon atoms, an alkoxyalkoxy group having 2 to 12 carbon atoms, an alkylcarbonyl group having 2 to 4 carbon atoms, an alkylcarbonyloxy group having 2 to 4 carbon atoms, an acryloyloxy group or a methacryloyloxy group. A ａ１１ represents a single bond or an alkanediyl group having 1 to 12 carbon atoms, and -CH ２ - in the alkanediyl group may be replaced by -O-, -CO- or -NR ａ１８ -. R ａ１８ represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X ａ１ represents a single bond or a carbonyl group. R a34 and R a35 each independently represents a hydrogen atom or a hydrocarbon group having 1 to 12 carbon atoms, and R a36 represents a hydrocarbon group having 1 to 20 carbon atoms, or R a35 and R a36 are bonded to each other to form a divalent hydrocarbon group having 2 to 20 carbon atoms together with the -C-O- to which they are bonded, and -CH 2 - contained in the hydrocarbon group and the divalent hydrocarbon group may be replaced by -O- or -S-. na1 represents an integer of any one of 1 to 5. When na1 is 2 or more, the groups in the plurality of parentheses may be the same as or different from each other. na11 represents any integer from 0 to 4, and when na11 is 2 or more, a plurality of Rs ａ１７ may be the same as or different from each other. mc represents an integer of any one of 0 to 2. ] [In formula (a1-5), R a8 represents an alkyl group having 1 to 6 carbon atoms which may have a halogen atom, a hydrogen atom or a halogen atom. Z a1 represents a single bond or *-(CH 2 ) h3 -CO-L 54 -, h3 represents an integer of any one of 1 to 4, and * represents the bonding site with L 51 . L 51 , L 52 , L 53 and L 54 each independently represents -O- or -S-. s1 represents an integer of any one of 1 to 3. s1' represents an integer of any one of 0 to 3. ] [In formula (a1-6), R a61 represents a hydrogen atom, a halogen atom, or an alkyl group having 1 to 6 carbon atoms which may have a halogen atom. R a6２ , R a63 and R a6４ each independently represents an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 18 carbon atoms which may have a substituent, or R a6２ and R a63 are bonded to each other to form, together with the carbon atoms to which they are attached, a ring having 3 to 20 carbon atoms. X a61 represents a single bond, -CO-O-*, or -CO-NR a65 -*, where * represents the bonding site with Ar, and R a65 represents a hydrogen atom or an alkyl group having 1 to 6 carbon atoms. X a62 represents a single bond, *-O-L a61 -, or *-CO-O-L a62 -, where * represents the bonding site with Ar, and L a61 and L a62 each independently represents an alkanediyl group having 1 to 4 carbon atoms. Ar represents an optionally substituted C6-20 aromatic hydrocarbon group. ]

8. The resist composition according to claim 1, wherein the acid generator contains a salt represented by formula (B1). [In formula (B1), L b1 represents a (nb1 + 1)-valent hydrocarbon group which may have a single bond or substituents, and the -CH 2 - contained in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. L b2 represents a divalent hydrocarbon group having 1 to 24 carbon atoms which may have a single bond or a substituent, and -CH 2 - in the hydrocarbon group may be replaced by -O-, -S-, -CO- or -SO 2 -. Y b1 represents a methyl group which may have a substituent or a cyclic hydrocarbon group having 3 to 24 carbon atoms which may have a substituent, and -CH 2 - in the cyclic hydrocarbon group may be replaced by -O-, -S-, -SO 2 - or -CO-. nb1 represents an integer of any one of 1 to 6. When nb1 is 2 or more, the groups in a plurality of parentheses may be the same as or different from each other. Z1 ＋ represents an organic cation.]

9. The resist composition according to claim 1, further containing a salt that generates an acid having a lower acidity than the acid generated from the acid generator.

10. (1) A step of applying the resist composition according to any one of claims 1 to 9 onto a substrate, (2) A step of drying the applied resist composition to form a composition layer, (3) A step of exposing the composition layer, (4) A step of heating the exposed composition layer, and (5) A step of developing the heated composition layer, A method for manufacturing a resist pattern including the above steps.

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