Component replacement system and component replacement device

Abstract

To reduce an installation area of a system in the manufacture of a semiconductor device.SOLUTION: A component replacement system for replacing a consumable component includes a component accommodating device and a component replacement device. The component accommodating device accommodates a consumable component before use. The component replacement device is connected to a processing device and the component accommodating device, and replaces a consumable component after use installed in the processing device with a consumable component before use housed in the component accommodating device. Further, the component replacement device moves to the position of the processing device to which the consumable component to be replaced is attached so as to be connected to the processing device. Further, the component accommodating device moves to the position of the component replacement device connected to the processing device to which the consumable component to be replaced is attached so as to be connected to the component replacement device.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] Various aspects and embodiments of the present disclosure relate to a component replacement system and a component replacement device.

Background Art

[0002] Inside a processing apparatus that processes a substrate, there are consumable parts that are consumed as the substrate is processed. When the consumption amount of such consumable parts exceeds a predetermined consumption amount, they are replaced with the consumable parts before use. In the replacement of consumable parts, the processing of the substrate in the processing apparatus is stopped, and the container of the processing apparatus is opened to the atmosphere. Then, the used consumable parts are manually taken out, and the consumable parts before use are attached. Then, the container is closed again, the inside of the container is evacuated, and the processing of the substrate is restarted.

[0003] As described above, in the replacement of consumable parts, since the inside of the processing apparatus is opened to the atmosphere, evacuation of the inside of the processing apparatus after the replacement of the consumable parts is required, and the processing stop time becomes long. In addition, since there are also large parts among the consumable parts, manual replacement may take time.

[0004] To avoid this, an exchange station having a consumable part before use and an exchange handler for replacing the consumable part is known (see, for example, Patent Document 1 below). In such an exchange station, the processing apparatus and the exchange station are connected, and after the inside of the exchange station is evacuated, a shut-off valve between the processing apparatus and the exchange station is opened. Then, the used consumable parts are taken out from the processing apparatus by the exchange handler in the exchange station and replaced with the consumable parts before use mounted in the exchange station. Thereby, it becomes possible to replace the consumable parts without opening the inside of the processing apparatus to the atmosphere, and the processing stop time can be shortened. In addition, since the replacement of the consumable parts is performed by the exchange handler instead of manually, the replacement of the consumable parts can be performed in a short time.

Prior Art Documents

Patent Documents

[0005] Patent Document 1 Japanese Patent Application Laid-Open No. 2017-85072 Summary of the Invention Problems to be Solved by the Invention

[0006] The present disclosure provides a component replacement system and a component replacement device capable of reducing the installation area of a system in the manufacture of a semiconductor device. Means for Solving the Problems

[0007] One aspect of the present disclosure is a component replacement system for replacing a consumable component, including a component storage device and a component replacement device. The component storage device stores the consumable component before use. The component replacement device is connected to a processing device and the component storage device, and exchanges the used consumable component attached in the processing device with the unused consumable component stored in the component storage device. Further, the component replacement device moves to the position of the processing device to which the consumable component to be replaced is attached and connects to the processing device. Further, the component storage device moves to the position of the component replacement device connected to the processing device to which the consumable component to be replaced is attached and connects to the component replacement device. Effects of the Invention

[0008] According to various aspects and embodiments of the present disclosure, the installation area of a system in the manufacture of a semiconductor device can be reduced. Brief Description of the Drawings

[0009]

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DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the component replacement system and the component replacement device will be described in detail with reference to the drawings. Note that the disclosed component replacement system and component replacement device are not limited by the following embodiments.

[0011] By the way, in the mass production process of products, since the substrate is processed by a plurality of processing devices, the replacement of consumable parts will be performed in the processing devices installed in different locations. Therefore, the replacement station equipped with the consumable parts before use needs to move to the location of the processing device where the replacement of the consumable parts is required.

[0012] When only one consumable part before use is accommodated in the replacement station, the replacement station immediately after the replacement of the consumable part cannot start the next replacement operation until the consumable part before use is replenished. Therefore, the processing device having the consumable part that has reached the replacement time has to wait for the replacement of the consumable part, resulting in a decrease in the throughput of the processing. On the other hand, when a plurality of consumable parts before use are accommodated in the replacement station, the replacement of the consumable parts can be continued until the accommodated consumable parts before use are exhausted, so that the decrease in the throughput of the processing can be suppressed.

[0013] However, when the number of consumable parts accommodated in the replacement station increases, the replacement station becomes larger. As a result, it is necessary to widen the width of the passage through which the replacement station moves, and the installation area of the entire semiconductor device manufacturing system increases.

[0014] Therefore, the present disclosure provides a technique capable of reducing the installation area of a system in the manufacture of a semiconductor device.

[0015] [Configuration of Manufacturing System 10] FIG. 1 is a system configuration diagram showing an example of a manufacturing system 10 according to an embodiment of the present disclosure. The manufacturing system 10 is an example of a component replacement system. In one embodiment, the manufacturing system 10 includes a control device 20, a plurality of processing groups 30, a plurality of component replacement devices 50, a plurality of component storage devices 60, and a plurality of jig storage devices 70. The control device 20 communicates with each of the processing group 30, the component replacement device 50, the component storage device 60, and the jig storage device 70, and controls each of the processing group 30, the component replacement device 50, the component storage device 60, and the jig storage device 70.

[0016] Each processing group 30 has a vacuum transfer chamber 31, a plurality of processing devices 40-1 to 40-6, a plurality of load lock chambers 32, and an atmospheric transfer chamber 33. Hereinafter, when collectively referring to each of the plurality of processing devices 40-1 to 40-6 without distinction, it is described as a processing device 40.

[0017] A plurality of processing devices 40 and a plurality of load lock chambers 32 are connected to the vacuum transfer chamber 31. In the present embodiment, six processing devices 40 are connected to the vacuum transfer chamber 31, but five or less processing devices 40 may be connected to the vacuum transfer chamber 31, or seven or more processing devices 40 may be connected to the vacuum transfer chamber 31. Also, in the present embodiment, two load lock chambers 32 are connected to the vacuum transfer chamber 31, but one load lock chamber 32 may be connected to the vacuum transfer chamber 31, or three or more load lock chambers 32 may be connected to the vacuum transfer chamber 31.

[0018] Each processing apparatus 40 performs processing such as etching and film formation on the substrate W, for example, in a low-pressure environment. In each processing apparatus 40, consumable parts that are consumed according to the processing on the substrate W are attached. Each processing apparatus 40 and the vacuum transfer chamber 31 are partitioned by a gate valve 400. Further, each processing apparatus 40 is provided with a gate valve 401 for carrying out the used consumable parts and carrying in the consumable parts before use. Each processing apparatus 40 may be an apparatus that executes the same process in the manufacturing process, or may be an apparatus that executes different processes.

[0019] Each load lock chamber 32 has a gate valve 320 and a gate valve 321, and switches the internal pressure from a pressure of a predetermined degree of vacuum to atmospheric pressure, or from atmospheric pressure to a pressure of a predetermined degree of vacuum. The load lock chamber 32 and the vacuum transfer chamber 31 are partitioned by a gate valve 320. Further, the load lock chamber 32 and the atmospheric transfer chamber 33 are partitioned by a gate valve 321.

[0020] A robot arm 310 is disposed in the vacuum transfer chamber 31. The inside of the vacuum transfer chamber 31 is maintained at a predetermined degree of vacuum. In the present embodiment, the robot arm 310 takes out the substrate W before processing from the load lock chamber 32 depressurized to a predetermined degree of vacuum and conveys it into one of the processing apparatuses 40. Further, the robot arm 310 takes out the substrate W after processing from the processing apparatus 40 and conveys it into another processing apparatus 40 or the load lock chamber 32.

[0021] In the atmospheric transfer chamber 33, a robot arm 330 is provided. Further, in the atmospheric transfer chamber 33, a plurality of load ports 331 to which containers (for example, FOUP: Front Opening Unified Pod) capable of accommodating a plurality of substrates W before or after processing are connected are provided. The robot arm 330 takes out the substrate W before processing from the container connected to the load port 331 and transfers it into the load lock chamber 32. Further, the robot arm 330 takes out the substrate W after processing from the load lock chamber 32 and transfers it into the container connected to the load port 331. Note that the atmospheric transfer chamber 33 may be provided with an alignment unit that adjusts the orientation of the substrate W taken out from the container connected to the load port 331.

[0022] Each component replacement device 50 has a robot arm and a moving mechanism for replacing consumable parts, and moves to the position of the processing device 40 having the consumable parts that need to be replaced in accordance with an instruction from the control device 20 and connects to the processing device 40. Each component storage device 60 has a plurality of consumable parts before use and a moving mechanism, and moves to the position of the component replacement device 50 connected to the processing device 40 having the consumable parts that need to be replaced in accordance with an instruction from the control device 20 and connects to the component replacement device 50. Each jig storage device 70 has a jig and a moving mechanism for replacing consumable parts, and moves to the position of the component replacement device 50 connected to the processing device 40 having the consumable parts that need to be replaced in accordance with an instruction from the control device 20 and connects to the component replacement device 50.

[0023] The robot arm of the component replacement device 50 takes out a jig for replacing consumable parts from the jig storage device 70, uses the jig to remove the used consumable parts from the processing device 40, and stores the removed consumable parts in the component storage device 60. Then, the robot arm of the component replacement device 50 takes out the consumable parts before use from the component storage device 60 and attaches the taken-out consumable parts to the processing device 40. Thereby, in the processing device 40, the used consumable parts and the consumable parts before use are exchanged.

[0024] In this way, in the manufacturing system 10 of the present embodiment, the component replacement device 50 that replaces consumable parts and the component storage device 60 that houses a plurality of consumable parts move separately to the location of the processing device 40 having consumable parts that need to be replaced. As a result, compared with the replacement station including the component replacement device 50 and the component storage device 60, the component replacement device 50 and the component storage device 60 can be miniaturized. Therefore, the width of the passage through which the component replacement device 50 and the component storage device 60 move can be narrowed. Thereby, the installation area of the entire manufacturing system 10 can be reduced.

[0025] [Configuration of Processing Device 40] FIG. 2 is a schematic cross-sectional view showing an example of the processing device 40. In the present embodiment, the processing device 40 includes a chamber 41, a gas supply unit 44, an RF (Radio Frequency) power supply unit 45, and an exhaust system 46.

[0026] The chamber 41 has a support portion 42 and an upper electrode shower head assembly 43. The support portion 42 is disposed in the lower region of the processing space 41s in the chamber 41. The upper electrode shower head assembly 43 is disposed above the support portion 42 and can function as a part of the top plate of the chamber 41.

[0027] The support portion 42 is configured to support the substrate W in the processing space 41s. In the present embodiment, the support portion 42 includes a lower electrode 421 and an electrostatic chuck 422. The electrostatic chuck 422 is disposed on the lower electrode 421 and is configured to support the substrate W on the upper surface of the electrostatic chuck 422. An edge ring 423 is provided on the upper surface of the peripheral portion of the lower electrode 421. The edge ring 423 is disposed so as to surround the electrostatic chuck 422 and the substrate W on the upper surface of the peripheral portion of the lower electrode 421. The edge ring 423 is an example of a consumable part.

[0028] The bottom of the chamber 41, the lower electrode 421, and the electrostatic chuck 422 are formed with through holes for passing the lift pins 47. The lift pins 47 are lifted and lowered by a drive unit 470 when the substrate W is loaded and unloaded. Thereby, the unprocessed substrate W carried into the chamber 41 can be received from the robot arm 310 and placed on the electrostatic chuck 422, and the processed substrate W can be passed to the robot arm 310 and carried out of the chamber 41.

[0029] The upper electrode shower head assembly 43 is configured to supply one or more types of gas from the gas supply unit 44 into the processing space 41s. In the present embodiment, the upper electrode shower head assembly 43 includes an electrode support portion 43d and an upper electrode 43e. The upper electrode 43e is fixed to the electrode support portion 43d by a fixing member 43f such as a screw. The electrode support portion 43d has a gas inlet 43a and a gas diffusion chamber 43b, and the gas supply unit 44 and the gas diffusion chamber 43b are in fluid communication via the gas inlet 43a.

[0030] A plurality of gas outlets 43c are formed in the electrode support portion 43d and the upper electrode 43e, and the gas diffusion chamber 43b and the processing space 41s are in fluid communication via the plurality of gas outlets 43c. In the present embodiment, the upper electrode shower head assembly 43 is configured to supply one or more types of gas from the gas inlet 43a into the processing space 41s via the gas diffusion chamber 43b and the plurality of gas outlets 43c.

[0031] The gas supply unit 44 includes a plurality of gas sources 440a to 440c, a plurality of flow controllers 441a to 441c, and a plurality of valves 442a to 442c. The gas source 440a is, for example, a source of a processing gas, the gas source 440b is, for example, a source of a cleaning gas, and the gas source 440c is, for example, a source of an inert gas. In the present embodiment, the inert gas is, for example, nitrogen gas. The flow controllers 441a to 441c may include, for example, mass flow controllers or pressure-controlled flow controllers. Further, the gas supply unit 44 may include one or more flow modulation devices that modulate or pulse the flow rate of one or more processing gases.

[0032] The RF power supply unit 45 is configured to supply RF power, for example, one or more RF signals, to one or more electrodes such as the lower electrode 421, the upper electrode shower head assembly 43, or both the lower electrode 421 and the upper electrode shower head assembly 43. In the present embodiment, the RF power supply unit 45 includes two RF generation units 450a, 450b, and two matching circuits 451a, 451b. The RF power supply unit 45 in the present embodiment is configured to supply a first RF signal from the RF generation unit 450a to the lower electrode 421 via the matching circuit 451a. The RF spectrum includes a part of the electromagnetic spectrum in the range of 3 [Hz] to 3000 [GHz]. Regarding an electronic material process such as a semiconductor process, the frequency of the RF spectrum used for plasma generation is preferably in the range of 100 [kHz] to 3 [GHz], more preferably in the range of 200 [kHz] to 150 [MHz]. For example, the frequency of the first RF signal may be in the range of 27 [MHz] to 100 [MHz].

[0033] Also, the RF power supply unit 45 in the present embodiment is configured to supply a second RF signal from the RF generation unit 450b to the lower electrode 421 via the matching circuit 451b. For example, the frequency of the second RF signal may be within the range of 400 [kHz] to 13.56 [MHz]. Alternatively, the RF power supply unit 45 may have a DC (Direct Current) pulse generation unit instead of the RF generation unit 450b.

[0034] Furthermore, although not shown, other embodiments are considered here. For example, in the RF power supply unit 45 of an alternative embodiment, the RF generation unit may be configured to supply a first RF signal to the lower electrode 421, and another RF generation unit may be configured to supply a second RF signal to the lower electrode 421. Furthermore, another RF generation unit may be configured to supply a third RF signal to the upper electrode shower head assembly 43. In addition, in other alternative embodiments, a DC voltage may be applied to the upper electrode shower head assembly 43. Also, in various embodiments, the amplitude of one or more RF signals (i.e., the first RF signal, the second RF signal, etc.) may be pulsed or modulated. Amplitude modulation may include pulsing the amplitude of the RF signal between an on state and an off state, or between a plurality of different on states. Also, the phase matching of the RF signal may be controlled, and the phase matching of the amplitude modulation of a plurality of RF signals may be synchronized or asynchronous.

[0035] The exhaust system 46 is connected to, for example, an exhaust port 41e provided at the bottom of the chamber 41. The exhaust system 46 may include a vacuum pump such as a pressure valve, a turbo molecular pump, a roughing pump, or a combination thereof.

[0036] [Component replacement device 50] FIG. 3 is a schematic cross-sectional view showing an example of the component replacement device 50. FIG. 4 is a view showing an example of the A-A cross-section of the component replacement device 50 illustrated in FIG. 3. The component replacement device 50 includes an upper container 510, a lower container 511, and a moving mechanism 56. The upper container 510 is provided with an opening 512a connected to the processing device 40 and a gate valve 513a for opening and closing the opening 512a. Further, the upper container 510 is provided with an opening 512b connected to the component storage device 60 and a gate valve 513a for opening and closing the opening 512b, as shown in FIG. 4 for example. Further, the upper container 510 is provided with an opening 512c connected to the jig storage device 70 and a gate valve 513c for opening and closing the opening 512c. The opening 512a is an example of a first component transfer port, and the gate valve 513a is an example of a first gate valve. Further, the opening 512b is an example of a second component transfer port, and the gate valve 513b is an example of a second gate valve.

[0037] An operation robot 52a, an operation robot 52b, and a transfer robot 53 are provided inside the upper container 510. Hereinafter, the operation robot 52a and the operation robot 52b will be collectively referred to as the operation robot 52 without distinguishing between them.

[0038] The operation robot 52a has an operation arm 520a, and the operation robot 52b has an operation arm 520b. End effectors are attached to the tips of the operation arm 520a and the operation arm 520b. The operation robot 52a and the operation robot 52b perform operations such as sensing inside the processing device 40, removing consumable parts, and attaching consumable parts by the end effectors attached to the tips of the operation arm 520a and the operation arm 520b.

[0039] The transfer robot 53 has a transfer arm 530. A holding member for holding consumable parts is attached to the tip of the transfer arm 530. The transfer robot 53 holds the consumable parts removed by the operation robot 52 using the holding member attached to the tip of the transfer arm 530. Then, the transfer robot 53 carries out the held consumable parts from the processing device 40 and accommodates the consumable parts carried out from the processing device 40 into the parts storage device 60. Also, the transfer robot 53 carries out the consumable parts before use from inside the parts storage device 60 using the holding member attached to the tip of the transfer arm 530. Then, the transfer robot 53 carries the consumable parts before use carried out from the parts storage device 60 into the processing device 40. The consumable parts before use carried into the processing device 40 are attached into the processing device 40 by end effectors attached to the tips of the operation arm 520a and the operation arm 520b.

[0040] Inside the lower container 511, an exhaust device 554, a gas supply device 556, a communication unit 557, a control unit 558, and a storage unit 559 are provided. The communication unit 557 is, for example, a wireless communication circuit and performs wireless communication with the control device 20, the parts storage device 60, and the jig storage device 70. A sensor 551 is provided on the outer wall of the parts replacement device 50. The sensor 551 senses the periphery of the parts replacement device 50 and outputs the result of the sensing to the control unit 558. In the present embodiment, the sensor 551 is, for example, an image sensor and outputs an image around the parts replacement device 50 to the control unit 558. The sensor 551 is an example of a first sensor.

[0041] The exhaust device 554 is connected to the space inside the upper container 510 via a valve 552. The exhaust device 554 sucks the gas inside the upper container 510 via the valve 552 and discharges the sucked gas to the outside of the parts replacement device 50. Thereby, the inside of the upper container 510 can be depressurized to a predetermined degree of vacuum.

[0042] In addition, the exhaust device 554 is connected to the opening 512a via the valve 553a and the pipe 550a. After the component replacement device 50 and the processing device 40 are connected, the exhaust device 554 exhausts the air at the connection portion between the component replacement device 50 and the processing device 40 via the pipe 550a and the valve 553a. Thereby, before the gate valve 513a is opened, the connection portion between the component replacement device 50 and the processing device 40 can be decompressed to a predetermined degree of vacuum.

[0043] FIGS. 5 and 6 are enlarged cross-sectional views showing an example of the connection portion between the processing device 40 and the component replacement device 50. A convex portion 410 is provided on the side surface of the chamber 41 of the processing device 40 connected to the component replacement device 50. Further, a concave portion 514 having a shape corresponding to the convex portion 410 is provided on the side surface of the component replacement device 50 connected to the processing device 40. When the processing device 40 and the component replacement device 50 are connected, the convex portion 410 and the concave portion 514 are fitted as shown in FIG. 6, for example, to support the alignment between the processing device 40 and the component replacement device 50.

[0044] In addition, a seal member 515 such as an O-ring is disposed on the side surface of the component replacement device 50 so as to surround the opening 512a. Thereby, the airtightness of the space 90 surrounded by the chamber 41, the gate valve 401, the opening 512a, and the gate valve 513a can be enhanced. After the processing device 40 and the component replacement device 50 are connected, the gas in the space 90 is exhausted via the pipe 550a, so that the space 90 can be decompressed to a predetermined degree of vacuum. When the space 90 is decompressed, the connection between the processing device 40 and the component replacement device 50 becomes stronger. When the connection between the processing device 40 and the component replacement device 50 is released, the pressure in the space 90 is returned to atmospheric pressure by opening a valve (not shown) connected to the pipe 550a.

[0045] Returning to FIG. 4, the description will be continued. The exhaust device 554 is connected to the opening 512b via the valve 553b and the pipe 550b. After the component replacement device 50 and the component storage device 60 are connected, the exhaust device 554 exhausts the air at the connection portion between the component replacement device 50 and the component storage device 60 via the pipe 550b and the valve 553b. Thereby, before the gate valve 513b is opened, the connection portion between the component replacement device 50 and the component storage device 60 can be depressurized to a predetermined degree of vacuum. Note that the connection portion between the component replacement device 50 and the component storage device 60 is also provided with the concave and convex portions illustrated in FIGS. 5 and 6, and the alignment between the component replacement device 50 and the component storage device 60 is supported by such concave and convex portions.

[0046] Also, as shown in FIG. 4 for example, the exhaust device 554 is connected to the opening 512c via the valve 553c and the pipe 550c. After the component replacement device 50 and the jig storage device 70 are connected, the exhaust device 554 exhausts the air at the connection portion between the component replacement device 50 and the jig storage device 70 via the pipe 550c and the valve 553c. Thereby, before the gate valve 513c is opened, the connection portion between the component replacement device 50 and the jig storage device 70 can be depressurized to a predetermined degree of vacuum. Note that the connection portion between the component replacement device 50 and the jig storage device 70 is also provided with the concave and convex portions illustrated in FIGS. 5 and 6, and the alignment between the component replacement device 50 and the jig storage device 70 is supported by the concave and convex portions.

[0047] A gas supply device 556 is connected to the upper container 510 via a valve 555. The gas supply device 556 supplies an inert gas such as nitrogen gas into the upper container 510 via the valve 555. The control unit 558 controls the valve 555 to supply gas into the upper container 510, thereby maintaining the pressure inside the upper container 510 higher than the pressure inside the processing device 40. Thereby, it is possible to suppress the particles inside the processing device 40 from entering the upper container 510. The valve 555 is an example of a pressure adjustment mechanism.

[0048] Note that the inert gas may be supplied to the connection portion between the component replacement device 50 and the processing device 40. As a result, a gas flow from the connection portion between the component replacement device 50 and the processing device 40 into the processing device 40 and a gas flow from the connection portion between the component replacement device 50 and the processing device 40 into the component replacement device 50 are generated. Thereby, it is possible to suppress the intrusion of particles in the processing device 40 into the upper container 510 and to suppress the intrusion of particles in the upper container 510 into the processing device 40. The opening and closing of the valves 552, 553a to 553c, and 555 are controlled by the control unit 558.

[0049] The storage unit 559 is a ROM (Read Only Memory), HDD (Hard Disk Drive), SSD (Solid State Drive), etc., and stores data, programs, etc. used by the control unit 558. The control unit 558 is a processor such as a CPU (Central Processing Unit) or a DSP (Digital Signal Processor), and controls each part of the component replacement device 50 by reading and executing the programs in the storage unit 559.

[0050] The control unit 558 moves the component replacement device 50 to the position of the processing device 40 instructed by the control device 20, for example, by controlling the moving mechanism 56 using the sensing result by the sensor 551. The control unit 558 is an example of a first control unit, and the moving mechanism 56 is an example of a first moving mechanism.

[0051] The moving mechanism 56 has a main body 560 and wheels 561. Inside the main body 560, a power source such as a battery, a power source, and a steering mechanism are provided. The wheels 561 rotate by the power source inside the main body 560 and move the component replacement device 50 in the direction controlled by the steering mechanism inside the main body 560. Note that the moving mechanism 56 may move the component replacement device 50 by a method other than the wheels 561, such as a walking type, as long as the component replacement device 50 can be moved.

[0052] [Component Storage Device 60] FIG. 7 is a schematic cross-sectional view showing an example of the component storage device 60. The component storage device 60 includes an upper container 610, a lower container 611, and a moving mechanism 66. The upper container 610 is provided with an opening 612 connected to the component replacement device 50 and a gate valve 613 for opening and closing the opening 612. Inside the upper container 610, a stage 63 and a driving unit 64 are provided. On the stage 63, a cassette 62 in which a plurality of consumable parts 80 before use are vertically arranged and stored is placed. Inside the cassette 62, a space for storing at least one consumable part 80 after use is prepared. In the present embodiment, a plurality of types of consumable parts 80 are stored in the cassette 62. The consumable parts 80 are, for example, edge rings 423, upper electrodes 43e, and the like.

[0053] The stage 63 is moved up and down by the driving unit 64. Thereby, the transfer robot 53 in the component replacement device 50 connected to the component storage device 60 can take out the consumable parts 80 before use from inside the cassette 62 through the opening 612 and can store the consumable parts 80 after use in the cassette 62. When all the consumable parts 80 in the cassette 62 become consumable parts 80 after use, the cassette 62 is exchanged as a whole for a cassette 62 in which the consumable parts 80 before use are stored.

[0054] Inside the lower container 611, an exhaust device 652, a gas supply device 654, a communication unit 655, a control unit 656, and a storage unit 657 are provided. The communication unit 655 is, for example, a wireless communication circuit and performs wireless communication with the control device 20 and the component replacement device 50. A sensor 650 is provided on the outer wall of the component storage device 60. The sensor 650 senses the periphery of the component storage device 60 and outputs the result of the sensing to the control unit 656. In the present embodiment, the sensor 650 is, for example, an image sensor and outputs an image around the component storage device 60 to the control unit 656. The sensor 650 is an example of a second sensor.

[0055] The exhaust device 652 is connected to the space inside the upper container 610 via the valve 651. The exhaust device 652 sucks the gas inside the upper container 610 via the valve 651 and discharges the sucked gas to the outside of the component housing device 60. Thereby, the inside of the upper container 610 can be decompressed to a predetermined degree of vacuum.

[0056] The gas supply device 654 is connected to the upper container 610 via the valve 653. The gas supply device 654 supplies an inert gas such as nitrogen gas into the upper container 610 via the valve 653. By supplying gas into the upper container 610, the inside of the upper container 610 can be maintained at a pressure higher than the pressure inside the upper container 510 of the component replacement device 50. Thereby, it is possible to suppress the intrusion of particles inside the upper container 510 of the component replacement device 50 into the upper container 610.

[0057] Note that the inert gas may be supplied to the connection portion between the component housing device 60 and the component replacement device 50. Thereby, a gas flow from the connection portion between the component housing device 60 and the component replacement device 50 into the upper container 610 and a gas flow from the connection portion between the component housing device 60 and the component replacement device 50 into the upper container 510 are generated. Thereby, it is possible to suppress the intrusion of particles inside the component replacement device 50 into the upper container 610 and to suppress the intrusion of particles inside the upper container 610 into the upper container 510. The opening and closing of the valve 651 and the valve 653 are controlled by the control unit 656.

[0058] The storage unit 657 is a ROM, HDD, SSD, etc., and stores data, programs, etc. used by the control unit 656. The control unit 656 is a processor such as a CPU or a DSP, and controls each part of the component housing device 60 by reading and executing the program in the storage unit 657.

[0059] The control unit 656 moves the component storage device 60 to the position of the component replacement device 50 connected to the processing device 40 instructed by the control device 20 by controlling the movement mechanism 66 using, for example, the sensing results from the sensor 650. The control unit 656 is an example of a second control unit, and the movement mechanism 66 is an example of a second movement mechanism.

[0060] The movement mechanism 66 has a main body 660 and wheels 661. Inside the main body 660, a power source such as a battery, a power source, and a steering mechanism are provided. The wheels 661 rotate by the power source inside the main body 660 and move the component storage device 60 in a direction controlled by the steering mechanism inside the main body 660. Note that as long as the movement mechanism 66 can move the component storage device 60, the component storage device 60 may be moved by a method other than the wheels 661, such as a walking type.

[0061] [Fixture storage device 70] FIG. 8 is a schematic cross-sectional view showing an example of the fixture storage device 70. The fixture storage device 70 has an upper container 710, a lower container 711, and a movement mechanism 76. The upper container 710 is provided with an opening 712 connected to the component replacement device 50 and a gate valve 713 for opening and closing the opening 712. Inside the upper container 710, a stage 73 and a drive unit 74 are provided. A cassette 72 in which a plurality of end effectors 81 and a plurality of holding members 82 are vertically arranged and accommodated is placed on the stage 73.

[0062] The stage 73 is lifted and lowered by the drive unit 74. Thereby, the operation robot 52 in the component replacement device 50 connected to the fixture storage device 70 can attach the end effector 81 in the cassette 72 to the tip of the operation arm 520a through the opening 712. Also, the transfer robot 53 can attach the holding member 82 in the cassette 72 to the tip of the transfer arm 530 through the opening 712.

[0063] Inside the lower container 711, an exhaust device 752, a gas supply device 754, a communication unit 755, a control unit 756, and a storage unit 757 are provided. The communication unit 755 is, for example, a wireless communication circuit and performs wireless communication with the control device 20 and the component replacement device 50. A sensor 750 is provided on the outer wall of the jig storage device 70. The sensor 750 senses the surroundings of the jig storage device 70 and outputs the sensing result to the control unit 756. In the present embodiment, the sensor 750 is, for example, an image sensor and outputs an image of the surroundings of the jig storage device 70 to the control unit 756.

[0064] The exhaust device 752 is connected to the space inside the upper container 710 via a valve 751. The exhaust device 752 sucks the gas inside the upper container 710 via the valve 751 and discharges the sucked gas to the outside of the jig storage device 70. Thereby, the inside of the upper container 710 can be depressurized to a predetermined degree of vacuum.

[0065] The gas supply device 754 is connected to the upper container 710 via a valve 753. The gas supply device 754 supplies an inert gas such as nitrogen gas into the upper container 710 via the valve 753. By supplying gas into the upper container 710, the inside of the upper container 710 can be maintained at a pressure higher than the pressure inside the upper container 510 of the component replacement device 50. Thereby, it is possible to suppress the intrusion of particles inside the upper container 510 into the upper container 710.

[0066] Note that the inert gas may be supplied to the connection portion between the jig storage device 70 and the component replacement device 50. Thereby, a gas flow from the connection portion between the jig storage device 70 and the component replacement device 50 into the upper container 710 and a gas flow from the connection portion between the jig storage device 70 and the component replacement device 50 into the upper container 510 are generated. Thereby, it is possible to suppress the intrusion of particles inside the component replacement device 50 into the upper container 710 and to suppress the intrusion of particles inside the upper container 710 into the upper container 510. The opening and closing of the valve 751 and the valve 753 are controlled by the control unit 756.

[0067] The storage unit 757 is a ROM, HDD, SSD, etc., and stores data, programs, etc. used by the control unit 756. The control unit 756 is a processor such as a CPU or DSP, and controls each part of the jig storage device 70 by reading and executing the programs in the storage unit 757.

[0068] For example, the control unit 756 controls the moving mechanism 76 using the sensing results from the sensor 750, thereby moving the jig storage device 70 to the position of the component replacement device 50 connected to the processing device 40 instructed by the control device 20.

[0069] The moving mechanism 76 has a main body 760 and wheels 761. Inside the main body 760, a power source such as a battery, a power source, and a steering mechanism, etc. are provided. The wheels 761 rotate by the power source inside the main body 760, and move the jig storage device 70 in the direction controlled by the steering mechanism inside the main body 760. Note that as long as the moving mechanism 76 can move the jig storage device 70, the jig storage device 70 may be moved by a method other than the wheels 761, such as a walking type.

[0070] [Procedure for replacing consumable parts 80] Next, with reference to FIGS. 9 to 18, the procedure for replacing the consumable parts 80 will be described.

[0071] First, the component replacement device 50, the component storage device 60, and the jig storage device 70 move to the position of the processing device 40 having the consumable parts 80 to be replaced in accordance with the instructions of the control device 20. Then, the component replacement device 50 is connected to the processing device 40 having the consumable parts 80 to be replaced, and the component storage device 60 and the jig storage device 70 are connected to the component replacement device 50. Then, the processing device 40, the component replacement device 50, the component storage device 60, and the jig storage device 70 adjust their internal pressures and open the gate valves.

[0072] Then, as shown in FIG. 9 for example, a sensing end effector 81 is attached to the tips of the operating arm 520a of the operating robot 52a and the operating arm 520b of the operating robot 52b. The sensing end effector 81 is, for example, an image sensor, a distance sensor, or the like. A used consumable part 80 (the edge ring 423 in the example of FIG. 9) is attached inside the processing device 40, and a pre - use consumable part 80 (the edge ring 423' in the example of FIG. 9) is stored in the cassette 62 of the parts storage device 60.

[0073] Next, as shown in FIG. 10 for example, the operating robots 52a and 52b use the end effector 81 such as an image sensor to sense the used edge ring 423 inside the processing device 40. The sensing result is output to the control unit 558 in the parts replacement device 50. Based on the sensing result, the control unit 558 determines whether the edge ring 423 can be replaced by the operating robots 52a and 52b. If it is determined that the edge ring 423 cannot be replaced by the operating robots 52a and 52b, the control unit 558 notifies the operator of the manufacturing system 10 or the like to that effect. For example, when a large amount of reaction by - products (so - called deposits) are attached to the edge ring 423 or the edge ring 423 is deformed, etc., the control unit 558 determines that the edge ring 423 cannot be replaced by the operating robots 52a and 52b. The control unit 558 is an example of a determination unit.

[0074] If it is determined that the edge ring 423 can be replaced, as shown in FIG. 11 for example, an end effector 81 for removing the edge ring 423 is attached to the tips of the operating arm 520a and the operating arm 520b. Also, a holding member 82 for holding the edge ring 423 is attached to the tip of the transfer arm 530 of the transfer robot 53.

[0075] Next, as shown in, for example, FIG. 12, the tips of the operation arms 520a and 520b enter the processing device 40, and the edge ring 423 in the processing device 40 is removed by the operation arms 520a and 520b. When the edge ring 423 is removed, as shown in, for example, FIG. 13, the edge ring 423 is sandwiched between the end effector 81 at the tip of the operation arm 520a and the end effector 81 at the tip of the operation arm 520b. Then, as the operation arms 520a and 520b rise, the edge ring 423 is lifted, and the edge ring 423 is removed from the lower electrode 421.

[0076] Then, as shown in, for example, FIG. 14, a holding member 82 attached to the tip of the transfer arm 530 is inserted between the lifted edge ring 423 and the lower electrode 421. Then, as the operation arms 520a and 520b descend, the edge ring 423 is placed on the holding member 82. Then, as shown in, for example, FIG. 15, the end effectors 81 at the tips of the operation arms 520a and 520b are separated from the edge ring 423.

[0077] Next, as shown in, for example, FIG. 16, the transfer robot 53 accommodates the used edge ring 423 on the holding member 82 in the cassette 62 of the component storage device 60. Then, the transfer robot 53 takes out the edge ring 423' before use from the cassette 62 and carries it into the processing device 40 as shown in, for example, FIG. 17. Before the edge ring 423' before use is taken out from the cassette 62, the end effectors 81 at the tips of the operation arms 520a and 520b and the holding member 82 at the tip of the transfer arm 530 may be cleaned. Thereby, it is possible to prevent deposits peeled off from the used edge ring 423 from becoming particles and adhering to the edge ring 423 before use via the end effector 81 or the holding member 82. Cleaning may be, for example, gas purge by injection of an inert gas.

[0078] Then, the edge ring 423 is sandwiched by the end effector 81 at the tip of the operation arm 520a and the end effector 81 at the tip of the operation arm 520b. Then, as the operation arms 520a and 520b rise, the edge ring 423 is lifted from the holding member 82 at the tip of the transfer arm 530. Then, the holding member 82 retracts from between the lifted edge ring 423' and the lower electrode 421, and as the operation arms 520a and 520b descend, the edge ring 423 is attached to the lower electrode 421.

[0079] Then, as shown in FIG. 18 for example, the end effector 81 at the tip of the operation arm 520a and the end effector 81 at the tip of the operation arm 520b are separated from the edge ring 423. Then, the end effector 81 and the holding member 82 are retracted into the cassette 72. Then, the gate valves of the processing device 40, the component replacement device 50, the component storage device 60, and the jig storage device 70 are closed. Then, the connections between the processing device 40 and the component replacement device 50, between the component replacement device 50 and the component storage device 60, and between the component replacement device 50 and the jig storage device 70 are respectively released.

[0080] When the upper electrode 43e is replaced as a consumable part 80, first, the holding member 82 mounted at the tip of the transfer arm 530 is inserted below the upper electrode 43e. Then, as the transfer arm 530 rises, the holding member 82 contacts the lower surface of the upper electrode 43e. Then, the fixing member 43f such as a screw is removed by the end effector 81 mounted at the tips of the operation arms 520a and 520b. As a result, the upper electrode 43e is carried out of the processing device 40 by the transfer arm 530 by the holding member 82 and stored in the component storage device 60.

[0081] Then, the upper electrode 43e before use is carried out from within the component storage device 60 and carried into the processing device 40, and is conveyed to the position of the lower surface of the electrode support portion 43d. Then, the fixing member 43f is attached by the end effector 81 attached to the tips of the operation arm 520a and the operation arm 520b, so that the upper electrode 43e is fixed to the electrode support portion 43d. In this way, the upper electrode 43e is replaced.

[0082] [Configuration of the control device 20] FIG. 19 is a block diagram showing an example of the control device 20. The control device 20 includes a storage unit 21, a control unit 22, a wireless communication unit 23, and a wired communication unit 24. The wireless communication unit 23 is, for example, a wireless communication circuit, and performs wireless communication with each of the component replacement device 50, the component storage device 60, and the jig storage device 70 via the antenna 25. The wired communication unit 24 is, for example, a NIC (Network Interface Card) or the like, and communicates with each processing group 30. Note that the control device 20 may perform wireless communication with each processing group 30.

[0083] The storage unit 21 is a ROM, HDD, SSD, or the like, and stores data, programs, etc. used by the control unit 22. A management table 210 as shown in FIG. 20 is stored in the storage unit 21.

[0084] FIG. 20 is a diagram showing an example of the management table 210. In the management table 210, an individual table 212 is stored for each processing device ID 211 that identifies each processing device 40. In the individual table 212, a component ID, an exchange date and time, an RF integrated time, and a next exchange time are stored. The component ID is information that identifies each consumable component 80. The exchange date and time is the date and time when the consumable component 80 was exchanged. The RF integrated time is information indicating the integrated time of the processing performed in the processing device 40 using the RF signal. The next exchange time is the date and time when the consumable component 80 is to be exchanged next.

[0085] The control unit 22 is a processor such as a CPU or a DSP, and controls the entire control device 20 by reading and executing a program in the storage unit 21.

[0086] [Processing of Control Device 20] FIGS. 21 and 22 are flowcharts showing an example of the processing of the control device 20. FIG. 21 illustrates an example of the processing of the control device 20 when selecting the component replacement device 50, the component storage device 60, and 70 to move to the position of the processing device 40 having the consumable part 80 to be replaced. FIG. 22 illustrates an example of the processing of the control device 20 after moving the component replacement device 50, the component storage device 60, and 70 to the position of the processing device 40 for which the consumable part 80 is to be replaced. The processing illustrated in FIGS. 21 and 22 is realized by the control unit 22 of the control device 20 executing a program read from the storage unit 21. Note that FIG. 22 illustrates the processing between the control device 20, one processing device 40, and one component replacement device 50.

[0087] In the processing illustrated in FIG. 21, first, the control unit 22 determines whether there is a consumable part 80 whose replacement time has arrived within a predetermined time from the current time (S100). The control unit 22 determines whether there is a consumable part 80 whose replacement time has arrived within a predetermined time from the current time, for example, by referring to the "next replacement time" column of the management table 210. If there is no consumable part 80 whose replacement time has arrived within a predetermined time from the current time (S100: No), the control unit 22 executes the processing shown in step S100 again.

[0088] On the one hand, if there is a consumable part 80 whose replacement time is due within a predetermined time from the current time (S100), the component replacement device 50, the component storage device 60, and the jig storage device 70 for which the replacement operation has not been assigned are identified. Then, the control unit 22 instructs the identified component replacement device 50, component storage device 60, and jig storage device 70 to move to the position of the processing device 40 having the consumable part 80 whose replacement time is due within a predetermined time (S101). Then, the control unit 22 executes the process shown in step S100 again.

[0089] In the process illustrated in FIG. 22, first, the control unit 22 determines whether or not a process using RF power has been executed in the processing device 40 (S200). If the process using RF power has not been executed (S200: No), the control unit 22 executes the process shown in step S200 again.

[0090] On the other hand, if the process using RF power has been executed (S200: Yes), the control unit 22 updates all the "RF integrated times" in the individual table 212 corresponding to the processing device ID 211 of the processing device 40 in which the process using RF power has been performed within the management table 210. Then, the control unit 22 estimates the "next replacement time" for all the consumable parts 80 in the individual table 212 in which the "RF integrated time" has been updated, and updates the "next replacement time" of all the consumable parts 80 in the individual table 212 at the estimated "next replacement time" (S201). As a result, the "next replacement time" corresponding to each consumable part 80 is updated according to the actual processing time using RF power.

[0091] Next, the control unit 22 determines whether or not the processing of the last lot before the replacement time of the consumable part 80 has ended based on the updated "next replacement time" (S202). If the processing of the last lot before the replacement time of the consumable part 80 has not ended in the processing device 40 (S202: No), the control unit 22 executes the process shown in step S200 again.

[0092] On the other hand, when the processing of the last lot before the replacement time of the consumable part 80 is completed in the processing device 40 (S202: Yes), the control unit 22 instructs the processing device 40 to prepare for the replacement of the consumable part 80 (S203). In the preparation for replacing the consumable part 80, processes such as exhausting the processing gas in the chamber 41, cleaning the chamber 41, and adjusting the pressure in the chamber 41 are executed.

[0093] Next, the control unit 22 determines whether or not it has received a connection notification from the component replacement device 50 (S204). Note that the component replacement device 50 has started moving to the position of the processing device 40 having the consumable part 80 to be replaced by the process illustrated in FIG. 21. When the connection notification has not been received from the component replacement device 50 (S204: No), the control unit 22 executes the process shown in step S204 again.

[0094] On the other hand, when the connection notification is received from the component replacement device 50 (S204: Yes), the control unit 22 instructs the component replacement device 50 to exhaust the gas in the space 90 at the connection part between the processing device 40 and the component replacement device 50 (S205). The control unit 558 of the component replacement device 50 controls the valve 553a and the exhaust device 554a to exhaust the gas in the space 90 at the connection part between the processing device 40 and the component replacement device 50.

[0095] Next, the control unit 22 determines whether or not the pressure P in the processing device 40 has reached a predetermined pressure P1 based on the measured value of the sensor included in the processing device 4 (S206). When the pressure P in the processing device 40 has not reached the pressure P1 (S206: No), the control unit 22 executes the process shown in step S206 again.

[0096] When the pressure P inside the processing device 40 reaches the pressure P1 (S206: Yes), the control unit 22 sends a gate opening request to the component replacement device 50 to request the opening of the gate valve 513a (S207). Then, the control unit 22 determines whether it has received a gate opening notification indicating that the opening of the gate valve 513a has been completed from the component replacement device 50 (S208). If the gate opening notification has not been received (S208: No), the control unit 22 executes the process shown in step S208 again.

[0097] On the other hand, when the gate opening notification is received (S208: Yes), the control unit 22 controls the processing device 40 to open the gate valve 401 (S209). Then, the control unit 22 sends an exchange start instruction to the component replacement device 50 to instruct the start of the replacement of the consumable component 80 (S210).

[0098] Note that after the exchange start instruction is sent in step S210, the component replacement device 50 starts the replacement of the consumable component 80. At this time, the control unit 22 may control the processing device 40 to clean the inside of the chamber 41 between the time when the used consumable component 80 is carried out and the time when the unused consumable component 80 is carried in. Thereby, deposits and the like that are peeled off from the consumable component 80 and fall into the chamber 41 when the used consumable component 80 is carried out can be removed before the unused consumable component 80 is carried in.

[0099] Next, the control unit 22 determines whether it has received an exchange completion notification indicating that the replacement of the consumable component 80 has been completed from the component replacement device 50 (S211). If the exchange completion notification has not been received from the component replacement device 50 (S211: No), the control unit 22 executes the process shown in step S211 again.

[0100] On the other hand, when the control unit 22 receives a component replacement completion notification from the component replacement device 50 (S211: Yes), the control unit 22 controls the processing device 40 to close the gate valve 401 (S212). Then, the control unit 22 transmits a replacement confirmation notification to the component replacement device 50 (S213). Then, the control unit 22 instructs the component replacement device 50 to stop exhausting the gas in the space 90 at the connection part between the processing device 40 and the component replacement device 50 (S214). The control unit 558 of the component replacement device 50 controls the valve 553a and the exhaust device 554a to stop exhausting the gas in the space 90 at the connection part between the processing device 40 and the component replacement device 50, and returns the inside of the space 90 to atmospheric pressure.

[0101] Next, the control unit 22 deletes the record including the "component ID" of the used consumable component 80 after replacement in the individual table 212 in the management table 210. Then, the control unit 22 newly creates in the management table 210 a record including the "component ID" of the unused consumable component 80 replaced with the used consumable component 80 (S215). In the newly created record, the current date and time is registered in the column of "replacement date and time", and 0 is registered in the column of "RF integrated time".

[0102] Then, the control unit 22 estimates the replacement time of the unused consumable component 80 after replacement, and registers the estimated replacement time in the "next RF integrated time" of the newly created record (S216). Then, the control unit 22 executes the process shown in step S200 again.

[0103] [Processing of Component Replacement Device 50] FIGS. 23 and 24 are flowcharts showing an example of the processing of the component replacement device 50. The component replacement device 50 starts the processing illustrated in FIGS. 23 and 24, for example, when instructed by the control device 20 to move to the position of the processing device 40 having the consumable component 80 to be replaced and starts moving to the position of the processing device 40. The processing illustrated in FIGS. 23 and 24 is realized by the control unit 558 executing the program read from the storage unit 559.

[0104] First, the control unit 558 starts adjusting the pressure inside the upper container 510 by controlling the valve 552 and the exhaust device 554 to start exhausting the gas inside the upper container 510 (S300). Then, the control unit 558 determines whether the component replacement device 50 is connected to the processing device 40 based on the sensing result by the sensor 551 (S301). When the component replacement device 50 is not connected to the processing device 40 (S301: No), the control unit 558 executes the process shown in step S301 again.

[0105] On the other hand, when the component replacement device 50 is connected to the processing device 40 (S301: Yes), the control unit 558 determines whether the component replacement device 50 is connected to the component storage device 60 and the jig storage device 70 (S302). The control unit 558 determines whether the component replacement device 50 is connected to the component storage device 60 and the jig storage device 70, for example, by determining whether it has received a connection notification indicating that the component storage device 60 and the jig storage device 70 are connected to the component replacement device 50. When the component replacement device 50 is not connected to the component storage device 60 and the jig storage device 70 (S302: No), the control unit 558 executes the process shown in step S302 again.

[0106] On the other hand, when the component replacement device 50 is connected to the component storage device 60 and the jig storage device 70 (S302: Yes), the control unit 558 controls the valve 555 and the gas supply device 556 to supply an inert gas into the upper container 510. Then, the control unit 558 determines whether the pressure P inside the upper container 510 has reached a predetermined pressure P2 (S303). In the present embodiment, the pressure P2 is higher than the pressure P1 inside the processing device 40 that is adjusted when replacing the consumable part 80. When the pressure P inside the upper container 510 has not reached the pressure P2 (S303: No), the control unit 558 executes the process shown in step S303 again.

[0107] On the other hand, when the pressure P in the upper container 510 reaches the pressure P2 (S303: Yes), the control unit 558 opens the gate valve 513b between the component storage device 60 and the jig storage device 70 (S304). Then, the control unit 558 controls the operation robots 52a and 52b to insert the tips of the operation arms 520a and 520b into the cassette 72 of the jig storage device 70. Then, the control unit 558 attaches the sensing end effector 81 to the tips of the operation arms 520a and 520b (S305). Then, the control unit 558 transmits a connection notification indicating that the component exchange device 50 is connected to the processing device 40 to the control device 20 via the communication unit 557 (S306).

[0108] Next, the control unit 558 determines whether a gate opening request is received from the control device 20 via the communication unit 557 (S307). If no gate opening request is received (S307: No), the control unit 558 executes the process shown in step S307 again. On the other hand, if a gate opening request is received (S307: Yes), the control unit 558 opens the gate valve 513a between the component exchange device 50 and the processing device 40 (S308).

[0109] Next, the control unit 558 determines whether an exchange start instruction is received from the control device 20 via the communication unit 557 (S309). If no exchange start instruction is received (S309: No), the control unit 558 executes the process shown in step S309 again. On the other hand, if an exchange start instruction is received (S309: Yes), the control unit 558 controls the operation arms 520a and 520b with the sensing end effector 81 attached to their tips to sense inside the processing device 40 (S310). In step S309, information indicating the state of the consumable part 80 inside the processing device 40 is acquired, and alignment (teaching) between the reference position in the component exchange device 50 and the reference position in the processing device 40 is performed, etc.

[0110] Next, based on the result of the sensing in step S309, the control unit 558 determines whether the replacement of the consumable part 80 instructed from the control device 20 is possible (S311). If it is determined that the replacement of the consumable part 80 is not possible because a large amount of deposit adheres to the consumable part 80 or the consumable part 80 is deformed (S311: No), the control unit 558 notifies the control device 20 of an error via the communication unit 557 (S312). Then, the processing shown in this flowchart ends. When an error is notified, the control device 20 notifies the operator of the manufacturing system 10 of the error. The operator instructs the worker to manually replace the consumable part 80. When an error is notified from the control device 20, the operator may acquire the sensing result from the component replacement device 50. Then, the operator may execute the replacement operation of the consumable part 80 by remotely operating the operation robot 52a, the operation robot 52b, and the transfer robot 53 using the sensing result.

[0111] On the other hand, when it is determined that the replacement of the consumable part 80 is possible (S311: Yes), the control unit 558 controls the operation robot 52a and the operation robot 52b to remove the sensing end effector 81 from the tips of the operation arms 520a and 520b. Then, the control unit 558 attaches an end effector 81 for attaching and detaching the consumable part 80 to the tips of the operation arms 520a and 520b (S312 in FIG. 24). Then, the control unit 558 controls the transfer robot 53 to attach the holding member 82 to the tip of the transfer arm 530 (S313).

[0112] Next, the control unit 558 inserts the tips of the operation arms 520a and 520b into the processing device 40, and controls the operation arms 520a and 520b with the end effector 81 attached to the tips to remove the used consumable part 80 (S313).

[0113] Next, the control unit 558 controls the transfer robot 53 to insert the holding member 82 at the tip of the transfer arm 530 under the consumable part 80 removed by the operation arms 520a and 520b. Then, the operation robots 52a and 52b are controlled to hold the removed consumable part 80 by the holding member 82. Then, the control unit 558 controls the transfer robot 53 to carry out the used consumable part 80 from within the processing device 40 (S315). Then, the control unit 558 controls the transfer robot 53 to store the used consumable part 80 in the cassette 62 of the part storage device 60.

[0114] Next, the control unit 558 controls the transfer robot 53 to take out the consumable part 80 before use from the cassette 62 of the part storage device 60 and carry it into the processing device 40 (S316). Then, the control unit 558 controls the operation robots 52a and 52b to lift the consumable part 80 before use held by the holding member 82. Then, the control unit 558 controls the transfer robot 53 to retract the transfer arm 530 from within the processing device 40. Then, the control unit 558 controls the operation robots 52a and 52b to attach the consumable part 80 before use (S317). Then, the control unit 558 controls the operation robots 52a and 52b to retract the operation arms 520a and 520b from within the processing device 40.

[0115] Next, the control unit 558 closes the gate valves 513a, 513b, and 513c (S318). Then, the control unit 558 controls the valve 552 and the exhaust device 554 to stop the exhaust of the gas in the upper container 510, and controls the valve 555 and the gas supply device 556 to stop the supply of the inert gas into the upper container 510. Also, the control unit 558 controls the valves 553a, 553b, and 553c to stop the exhaust of the gas at the connection part with the component replacement device 50. Then, the control unit 558 transmits, via the communication unit 557, an exchange completion notification indicating that the replacement of the consumable component 80 is completed to the control device 20, the component storage device 60, and the jig storage device 70 (S319). Then, the processing shown in this flowchart ends.

[0116] [Processing of the Component Storage Device 60] FIG. 25 is a flowchart showing an example of the processing of the component storage device 60. The component storage device 60 starts the processing illustrated in FIG. 25, for example, when instructed by the control device 20 to move to the position of the processing device 40 having the consumable component 80 to be replaced and starts moving to the position of the processing device 40. The processing illustrated in FIG. 25 is realized by the control unit 656 executing the program read from the storage unit 657.

[0117] First, the control unit 656 starts adjusting the pressure in the upper container 610 by controlling the valve 651 and the exhaust device 652 to start exhausting the gas in the upper container 610 (S400). Then, the control unit 656 determines whether the component storage device 60 is connected to the component replacement device 50 based on the sensing result by the sensor 650 (S401). If the component storage device 60 is not connected to the component replacement device 50 (S401: No), the control unit 656 executes the processing shown in step S401 again.

[0118] On the other hand, when the component storage device 60 is connected to the component replacement device 50 (S401: Yes), the control unit 656 transmits a connection notification indicating that the component storage device 60 is connected to the component replacement device 50 to the component replacement device 50 (S402). Then, the control unit 656 controls the valve 653 and the gas supply device 654 to supply an inert gas into the upper container 610. Then, the control unit 656 determines whether or not the pressure P in the upper container 610 has reached a predetermined pressure P3 (S403). In the present embodiment, the pressure P3 is higher than the pressure P2 in the component replacement device 50 that is adjusted when replacing the consumable component 80. When the pressure P in the upper container 610 has not reached the pressure P3 (S403: No), the control unit 656 executes the process shown in step S403 again.

[0119] On the other hand, when the pressure P in the upper container 610 has reached the pressure P3 (S403: Yes), the control unit 656 opens the gate valve 613 (S404). Then, the control unit 656 controls the drive unit 64 in accordance with the loading of the used consumable component 80 and the unloading of the consumable component 80 before use by the transfer robot 53 of the component replacement device 50, and raises and lowers the cassette 62 (S405).

[0120] Next, the control unit 656 determines whether or not it has received a replacement completion notification from the component replacement device 50 via the communication unit 655 (S406). When the replacement completion notification has not been received (S406: No), the control unit 656 executes the process shown in step S405 again. On the other hand, when the replacement completion notification has been received (S406: Yes), the control unit 656 closes the gate valve 613 (S406). Then, the control unit 656 controls the valve 651 and the exhaust device 652 to stop the exhaust of the gas in the upper container 610, and controls the valve 653 and the gas supply device 654 to stop the supply of the inert gas into the upper container 610. Then, the process shown in this flowchart ends.

[0121] [Processing of the jig storage device 70] The processing of the jig storage device 70 can be described with reference to FIG. 25, and thus the description will be given while referring to FIG. 25. When the jig storage device 70 is instructed by the control device 20 to move to the position of the processing device 40 having the consumable parts 80 to be replaced and starts moving to the position of the processing device 40, the processing illustrated in FIG. 25 is started. The processing illustrated in FIG. 25 is realized by executing a program read by the control unit 756 from the storage unit 757.

[0122] First, the control unit 756 starts adjusting the pressure in the upper container 710 by controlling the valve 751 and the exhaust device 752 to start exhausting the gas in the upper container 710 (S400). Then, the control unit 756 determines whether the jig storage device 70 is connected to the component replacement device 50 based on the sensing result by the sensor 750 (S401). When the jig storage device 70 is not connected to the component replacement device 50 (S401: No), the control unit 756 executes the process shown in step S401 again.

[0123] On the other hand, when the jig storage device 70 is connected to the component replacement device 50 (S401: Yes), the control unit 756 sends a connection notification indicating that the jig storage device 70 is connected to the component replacement device 50 to the component replacement device 50 (S402). Then, the control unit 756 controls the valve 753 and the gas supply device 754 to supply an inert gas into the upper container 710. Then, the control unit 756 determines whether the pressure P in the upper container 710 has reached a predetermined pressure P3 (S403). When the pressure P in the upper container 710 has not reached the pressure P3 (S403: No), the control unit 756 executes the process shown in step S403 again.

[0124] On the other hand, when the pressure P in the upper container 710 has reached the pressure P3 (S403: Yes), the control unit 756 opens the gate valve 713 (S404). Then, the control unit 756 controls the drive unit 74 in accordance with the insertion and extraction of the end effector 81 and the holding member 82 by the transfer robot 53 of the component replacement device 50, and raises and lowers the cassette 72 (S405).

[0125] Next, the control unit 756 determines whether it has received a replacement completion notification from the component replacement device 50 via the communication unit 755 (S406). If it has not received the replacement completion notification (S406: No), the control unit 756 executes the process shown in step S405 again. On the other hand, if it has received the replacement completion notification (S406: Yes), the control unit 756 closes the gate valve 713 (S406). Then, the control unit 756 controls the valve 751 and the exhaust device 752 to stop exhausting the gas in the upper container 710, and controls the valve 753 and the gas supply device 754 to stop supplying the inert gas into the upper container 710. Then, the process shown in this flowchart ends.

[0126] The above describes one embodiment. As described above, the present embodiment is a manufacturing system 10 for replacing the consumable part 80, which includes a component replacement device 50 and a component storage device 60. The component storage device 60 stores the consumable part 80 before use. The component replacement device 50 is connected to the processing device 40 and the component storage device 60, and exchanges the used consumable part 80 installed in the processing device 40 with the unused consumable part 80 stored in the component storage device 60. Further, the component replacement device 50 moves to the position of the processing device 40 where the consumable part 80 to be replaced is attached, and connects to the processing device 40. In addition, the component storage device 60 moves to the position of the component replacement device 50 connected to the processing device 40 where the consumable part 80 to be replaced is attached, and connects to the component replacement device 50. Thereby, the installation area of the manufacturing system 10 of the semiconductor device can be reduced.

[0127] Also, the component replacement device 50 in the above-described embodiment has an operation robot 52 and a transfer robot 53. The transfer robot 53 transfers the consumable part 80 between the processing device 40 and the component storage device 60 via the component replacement device 50. The operation robot 52 removes the used consumable part 80 from the processing device 40, places it on the transfer robot 53, and attaches the unused consumable part 80 placed on the transfer robot 53 into the processing device 40. Thereby, the used consumable part 80 and the unused consumable part 80 can be exchanged.

[0128] In addition, the manufacturing system 10 in the above-described embodiment further includes a jig storage device 70. The jig storage device 70 houses an end effector 81 attached to the tip of the operation robot 52, travels autonomously to the position of the component replacement device 50 connected to the processing device 40 to which the consumable part 80 to be replaced is attached, and connects to the component replacement device 50. The operation robot 52 takes out and mounts the end effector 81 used for replacing the consumable part 80 to be replaced from the jig storage device 70, and uses the mounted end effector 81 to replace the consumable part 80 to be replaced. By replacing the end effector 81 attached to the tip of the operation robot 52, it becomes possible to replace different types of consumable parts 80 with one operation robot 52.

[0129] Also, in the above-described embodiment, the end effector 81 includes a sensor. Before replacing the consumable part 80, the operation robot 52 senses the state inside the processing device 40 using the sensor attached to the tip. The component replacement device 50 has a control unit 558 that determines whether the consumable part 80 can be replaced based on the sensing result by the operation robot 52, causes the operation robot 52 to execute the replacement of the consumable part 80 when the replacement of the consumable part 80 is possible, and notifies the operator to that effect when the replacement of the consumable part 80 is not possible. Thereby, the replacement of the consumable part 80 becomes possible.

[0130] In addition, in the above-described embodiment, the jig storage device 70 houses a holding member 82 attached to the tip of the transfer robot 53. The transfer robot 53 takes out and mounts the holding member 82 suitable for replacing the consumable part 80 to be replaced from the jig storage device 70, and uses the mounted holding member 82 to transfer the consumable part 80 to be replaced. By replacing the holding member 82 attached to the tip of the transfer robot 53, it becomes possible to replace different types of consumable parts 80 with one transfer robot 53.

[0131] In addition, in the above-described embodiment, the component storage device 60 stores at least one or more of a plurality of types of consumable parts 80 before use. Thereby, the replacement of the consumable parts 80 can be performed quickly.

[0132] Moreover, the component replacement device 50 in the above-described embodiment has a valve 555 that controls the pressure within the component replacement device 50. When the replacement of the used consumable part 80 mounted within the processing device 40 is performed, the valve 555, which is mounted within the processing device 40, controls the pressure within the component replacement device 50 such that the pressure within the component replacement device 50 becomes higher than the pressure within the processing device 40. Thereby, it is possible to suppress the intrusion of particles within the processing device 40 into the component replacement device 50.

[0133] In addition, in the above-described embodiment, the component replacement device 50 includes a moving mechanism 56, a sensor 551, and a control unit 558, and the component storage device 60 includes a moving mechanism 66, a sensor 650, and a control unit 656. The moving mechanism 56 has a power source and moves the component replacement device 50. The sensor 551 senses the surroundings of the component replacement device 50. The control unit 558 controls the moving mechanism 56 using the sensing result by the sensor 551, thereby moving the component replacement device 50 to the position of the processing device 40 to which the consumable part 80 to be replaced is attached. The moving mechanism 66 has a power source and moves the component storage device 60. The sensor 650 senses the surroundings of the component storage device 60. The control unit 656 controls the moving mechanism 66 using the sensing result by the sensor 650, thereby moving the component storage device 60 to the position of the component replacement device 50 connected to the processing device 40 to which the consumable part 80 to be replaced is attached. Thereby, the component replacement device 50 and the component storage device 60 can move independently.

[0134] Also, the above-described embodiment is a component replacement device 50 for replacing the consumable component 80, and includes an opening 512a, an opening 512b, a transfer robot 53, and a moving mechanism 56. The opening 512a is connected to the processing device 40 via a gate valve 513a. The opening 512b is connected to a component storage device 60 that stores the consumable component 80 before use via a gate valve 513b. The operation robot 52 exchanges the used consumable component 80 installed in the processing device 40 with the unused consumable component 80 stored in the component storage device 60. The moving mechanism 56 moves the component replacement device 50 to the position of the processing device 40 to which the consumable component 80 to be replaced is attached. Also, the component replacement device 50 and the component storage device 60 can move independently of each other. Thereby, the installation area of the semiconductor device manufacturing system 10 can be reduced.

[0135] [Others] Note that the technology disclosed in the present application is not limited to the above-described embodiment, and various modifications are possible within the scope of the gist.

[0136] For example, in the above-described embodiment, a plurality of types of consumable components 80 are stored in the cassette 62 of the component storage device 60, but the disclosed technology is not limited to this. As another form, a plurality of the same type of consumable component 80 may be stored in the cassette 62. And the component storage device 60 may be prepared for each type of consumable component 80 stored in the cassette 62. Thereby, the consumable components 80 having substantially the same replacement cycle are stored in the cassette 62, and the gate valve 613 of the component storage device 60 is prevented from being opened unnecessarily. Thereby, the adhesion of particles to the unused consumable component 80 in the cassette 62 can be suppressed.

[0137] Also, in the above-described embodiments, the operation robot 52 and the transfer robot 53 of the component replacement device 50 come into contact with the consumable parts 80 before use and the consumable parts 80 after use, but the disclosed technology is not limited to this. As another form, in the component replacement device 50, an operation robot 52 and a transfer robot 53 that come into contact with the consumable parts 80 before use and an operation robot 52 and a transfer robot 53 that come into contact with the consumable parts 80 after use may be provided separately. Thereby, it is possible to prevent deposits and the like peeled off from the consumable parts 80 after use from becoming particles and adhering to the consumable parts 80 before use via the operation robot 52 or the transfer robot 53.

[0138] Also, in the above-described embodiments, the cassette 62 of the component storage device 60 stores the consumable parts 80 before use and the consumable parts 80 after use, but the disclosed technology is not limited to this. As another form, the inside of the cassette 62 may be partitioned into a space for storing the consumable parts 80 before use and a space for storing the consumable parts 80 after use. Thereby, it is possible to prevent deposits and the like peeled off from the consumable parts 80 after use from becoming particles and adhering to the consumable parts 80 before use.

[0139] Also, in the above-described embodiments, the component replacement device 50, the component storage device 60, and the jig storage device 70 start exhausting the inside of the device after receiving an instruction from the control device 20, but the disclosed technology is not limited to this. For example, the component replacement device 50, the component storage device 60, and the jig storage device 70 may perform exhausting so that the pressure inside the device becomes a predetermined pressure P even before receiving an instruction from the control device 20. Thereby, it is possible to start replacing the consumable parts 80 more quickly.

[0140] Also, in the component replacement device 50, the component storage device 60, and the jig storage device 70 of the above-described embodiment, the gas exhausted by the exhaust device is discharged to the outside of each device, but the disclosed technology is not limited to this. For example, each device and a gas treatment device for treating the exhaust gas provided outside each device may be connected by a flexible hose, and the gas exhausted from each device may be sent to the gas treatment device. Thereby, the recycling of the gas exhausted from each device is promoted.

[0141] Also, in the component replacement device 50, the component storage device 60, and the jig storage device 70 of the above-described embodiment, the gas in each device is exhausted by the exhaust device in each device, but the disclosed technology is not limited to this. For example, each device may be connected to an exhaust device provided outside each device via a flexible hose, and the gas in each device may be exhausted by the exhaust device. Thereby, the component replacement device 50, the component storage device 60, and the jig storage device 70 can be miniaturized.

[0142] Also, in the above-described embodiment, the used consumable parts 80 are carried out of the processing device 40 and the unused consumable parts 80 are carried into the processing device 40 by the same component replacement device 50. However, the disclosed technology is not limited to this. For example, a component replacement device 50 for carrying out the used consumable parts 80 from the processing device 40 and a component replacement device 50 for carrying the unused consumable parts 80 into the processing device 40 may be prepared separately. Thereby, it is possible to prevent the deposit or the like peeled from the used consumable parts 80 from becoming particles and adhering to the unused consumable parts 80.

[0143] Also, in this case, the component replacement device 50 for carrying the consumable parts 80 before use into the processing device 40 may be connected to the vacuum transfer chamber 31 or the atmospheric transfer chamber 33. The component replacement device 50 connected to the vacuum transfer chamber 31 passes the consumable parts 80 before use to the robot arm 310 in the vacuum transfer chamber 31. The robot arm 310 carries the received consumable parts 80 before use into the processing device 40 where the consumable parts 80 need to be replaced. Also, the component replacement device 50 connected to the atmospheric transfer chamber 33 passes the consumable parts 80 before use to the robot arm 330 in the atmospheric transfer chamber 33. The robot arm 330 carries the consumable parts 80 before use into the load lock chamber 32. The consumable parts 80 before use carried into the load lock chamber 32 are carried into the processing device 40 where the consumable parts 80 need to be replaced by the robot arm 310 in the vacuum transfer chamber 31. When the component replacement device 50 is connected to the atmospheric transfer chamber 33, it is not necessary to provide an exhaust device in the component replacement device 50, the component storage device 60, and the jig storage device 70, and each device can be miniaturized.

[0144] Also, in each of the above-described embodiments, when the component replacement device 50 is connected to the processing device 40, the battery in the moving mechanism 56 may be charged by the power supply from the processing device 40. Also, the component storage device 60 and the jig storage device 70 may charge the batteries in the moving mechanisms 66 and 76 via the component replacement device 50 connected to the processing device 40.

[0145] It should be considered that the embodiments disclosed this time are illustrative in all respects and not restrictive. Indeed, the above-described embodiments can be embodied in various forms. Also, the above embodiments may be omitted, replaced, or changed in various forms without departing from the scope and spirit of the appended claims.

Explanation of Reference Numerals

[0146] W substrate 10 Manufacturing system 20 Control device 210 Management table 30 Processing group 31 Vacuum transfer chamber 32 Load Lock Chamber 33 Atmosphere Conveyance Chamber 331 Load Port 40 Processing Apparatus 41 Chamber 42 Support Section 421 Lower Electrode 422 Electrostatic Chuck 423 Edge Ring 43 Upper Electrode Shower Head Assembly 44 Gas Supply Section 45 RF Power Supply Section 46 Exhaust System 50 Component Replacement Device 510 Upper Container 511 Lower Container 513 Gate Valve 52 Manipulator Robot 520 Manipulator Arm 53 Transfer Robot 530 Transfer Arm 56 Moving Mechanism 60 Component Storage Device 610 Upper Container 611 Lower Container 613 Gate Valve 62 Cassette 66 Moving Mechanism 70 Fixture Storage Device 710 Upper Container 711 Lower Container 713 Gate Valve 72 Cassette 76 Moving Mechanism 80 Consumable Parts 81 End Effector 82 Holding Member

Claims

1. A component replacement device that moves to the position of a processing device for processing a substrate in response to a first instruction from a control device received by wireless communication and connects to the processing device, and A component storage device that moves to the position of the component replacement device connected to the processing device in response to a second instruction from the control device received by wireless communication and connects to the component replacement device comprising The component replacement device is a component replacement system that exchanges a component to be replaced mounted in the processing device with a component stored in the component storage device.

2. The component replacement device A transfer arm that transfers components between the processing device and the component storage device via the component replacement device, and An operation arm that removes a component to be replaced from the processing device and places it on the transfer arm, and attaches the component placed on the transfer arm to the processing device The component replacement system according to claim 1, having.

3. Further comprising a jig storage device that houses an end effector mounted at the tip of the operation arm and connects to the component replacement device, The operation arm takes out and mounts an end effector used for replacing a component to be replaced from the jig storage device, and uses the mounted end effector to replace the component to be replaced. The component replacement system according to claim 2.

4. The end effector includes a sensor, Before replacing the component, the operation arm senses the state inside the processing device using a sensor mounted at the tip, The component replacement device has a determination unit that determines whether or not component replacement is possible based on the sensing result by the operation arm, and causes the operation arm to execute component replacement when component replacement is possible, and notifies to that effect when component replacement is not possible. The component replacement system according to claim 3.

5. The jig storage device houses a holding member mounted at the tip of the transfer arm, The transfer arm takes out a holding member suitable for replacing a component to be replaced from the jig storage device, and uses the taken-out holding member to transfer the component to be replaced. The component replacement system according to claim 3 or 4.

6. The component storage device stores at least one or more of a plurality of types of components. The component replacement system according to any one of claims 1 to 5.

7. The component storage device stores a plurality of components of a single type. The component replacement system according to any one of claims 1 to 5.

8. The component replacement device has a pressure adjustment mechanism for controlling the pressure within the component replacement device, and when replacement of a component to be replaced mounted within the processing device is performed, the pressure adjustment mechanism controls the pressure within the component replacement device such that the pressure within the component replacement device becomes higher than the pressure within the processing device. The component replacement system according to any one of claims 1 to 7.

9. The component replacement device has a first receiving unit that receives the first instruction, a first moving mechanism having a power source and moving the component replacement device, a first sensor that senses the surroundings of the component replacement device, and a first control unit that moves the component replacement device to the position of the processing device where the component to be replaced is mounted by controlling the first moving mechanism using the sensing result by the first sensor in response to the first instruction. The component replacement system according to any one of claims 1 to 8.

10. The component storage device has a second receiving unit that receives the second instruction, a second moving mechanism having a power source and moving the component storage device, a second sensor that senses the surroundings of the component storage device, and a second control unit that moves the component storage device to the position of the component replacement device by controlling the second moving mechanism using the sensing result by the second sensor in response to the second instruction. The component replacement system according to any one of claims 1 to 9.

11. A component replacement device, comprising: a receiving unit that receives a first instruction from a control device by wireless communication; a first component transfer port connected to a processing device via a first gate valve; a second component transfer port connected to a component storage device via a second gate valve; a transfer arm that exchanges a component to be replaced mounted within the processing device and a component stored within the component storage device; and a moving mechanism that moves the component replacement device to the position of the processing device where the component to be replaced is mounted in response to the first instruction. The component replacement device.

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