Sheet peeling device and sheet peeling method

Abstract

To provide a sheet peeling device and a sheet peeling method that can peel, from an adherend, an adhesive sheet on which a change specific to predetermined energy is caused over a wide area.SOLUTION: A sheet peeling device comprises: sheet holding means 10 that holds an adhesive sheet AS pasted to an outer peripheral surface WK1 of an adherend WK; peeling means 20 that applies tensile force to the adhesive sheet AS held by the sheet holding means 10 to peel the adhesive sheet AS from the adherend WK; and energy providing means 30 that provides predetermined energy UV to the adhesive sheet AS. The adhesive sheet AS is configured to cause a change specific to the predetermined energy UV upon provision of the predetermined energy UV, and is pasted to one surface WK2 of the adherend WK and further goes round to be pasted to the other surface WK3. The energy providing means 30 provides the predetermined energy UV to the adhesive sheet AS from the side of one surface WK2 and the side of the other surface WK3 of the adherend WK.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to a sheet peeling device and a sheet peeling method.

Background Art

[0002] A sheet peeling device for peeling an adhesive sheet attached to an annular outer peripheral surface of an adherend from the adherend is known (see, for example, Patent Document 1).

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0004] In the tape peeling system 70 (sheet peeling device) described in Patent Document 1, since ultraviolet rays (predetermined energy) are irradiated on the protective tape 27 (adhesive sheet) only from one surface side of the peripheral edge portion (outer peripheral surface) of the wafer W (adherend), although the adhesive sheet on one surface side undergoes curing (changes specific to the predetermined energy), the adhesive sheet on the other surface side does not undergo changes specific to the predetermined energy, resulting in inconvenience.

[0005] An object of the present invention is to provide a sheet peeling device and a sheet peeling method capable of peeling an adhesive sheet that has undergone changes specific to a predetermined energy over a wide area from an adherend.

Means for Solving the Problems

[0006] The present invention employs the configuration described in the claims.

Effects of the Invention

[0007] According to the present invention, predetermined energy is applied to an adhesive sheet attached so as to wrap around one surface and the other surface of an adherend. Therefore, the adhesive sheet that has undergone a change specific to the predetermined energy over a wide area can be peeled off from the adherend.

Brief Description of the Drawings

[0008]

Figure 1

Embodiments for Carrying Out the Invention

[0009] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In this embodiment, the X-axis, Y-axis, and Z-axis are orthogonal to each other. The X-axis and Y-axis are axes in a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. Further, in this embodiment, based on the case when viewed from the direction of arrow VD parallel to the Y-axis, when the direction is indicated without specifying the figure, "up" is the arrow direction of the Z-axis, "down" is the opposite direction, "left" is the arrow direction of the X-axis, "right" is the opposite direction, "front" is the arrow direction of the Y-axis, and "rear" is the opposite direction.

[0010] A sheet peeling device EA for implementing the sheet peeling method of the present invention includes a sheet holding means 10 that performs a sheet holding step of holding an adhesive sheet AS attached to the outer peripheral surface WK1 of an adherend WK, a peeling means 20 that applies tension to the adhesive sheet AS held by the sheet holding means 10 and performs a peeling step of peeling the adhesive sheet AS from the adherend WK, and an energy applying means 30 that performs an energy applying step of applying ultraviolet rays UV as predetermined energy to the adhesive sheet AS. The adhesive sheet AS is configured to cause a decrease in adhesive force as a change specific to the ultraviolet rays UV when the ultraviolet rays UV are applied, and is attached so as to wrap around one surface WK2 and the other surface WK3 of the adherend WK. Note that the adherend WK of the present embodiment has a circular shape centered on the adherend center WKC. On the outer edge of the other surface WK3, an annular convex portion CV is provided, and a cover sheet CS that causes a decrease in adhesive force as a change peculiar to the ultraviolet ray UV is applied on the other surface WK3 side including the annular convex portion CV is attached, and an adhesive sheet AS is attached so as to partially overlap on the cover sheet CS.

[0011] The sheet holding means 10 includes a support member 11 that directly or indirectly supports each member constituting the sheet holding means 10, a support roller 12 that supports a strip-shaped peeling sheet PS, a guide roller 13 that guides the peeling sheet PS, a sheet support base 14 that is supported by a slide shaft 14B slidable in a guide block 14A and is biased in a direction away from the guide block 14A by a coil spring 14C as a biasing means, a pressing member 15 that is supported by an output shaft 15B of a linear motor 15A as a driving device and has a pressing surface 15C for pressing the adhesive sheet AS, a cutter blade 16 as a cutting means supported by an output shaft 16B of a linear motor 16A as a driving device, a receiving member 17 supported by a slider 17B of a linear motor 17A as a driving device, a pressing member 18 attached to an output shaft 18B of a rotation motor 18A as a driving device supported by the receiving member 17, and a heating device 19 such as a coil heater or a heating side of a heat pipe for heating the pressing member 15. Note that the peeling sheet PS of the present embodiment is a heat-sensitive adhesive sheet whose adhesive force is improved by applying heat as a predetermined energy, and the peeling sheet PS is pressed and attached to the adhesive sheet AS by the pressing surface 15C heated by the heating device 19, so that the adhesive sheet AS is held via the peeling sheet PS.

[0012] The peeling means 20 includes a linear motor 21 as a driving device, a rotation motor 22 as a driving device supported by a slider 21A of the linear motor 21, a support table 23 having a support surface 23A supported by an output shaft 22A of the rotation motor 22 and capable of being suction-held by a decompression means (holding means) such as a decompression pump or a vacuum ejector (not shown), an imaging means such as a camera or a projector, and various sensors such as an optical sensor and an ultrasonic sensor. It is provided with an edge detector 24 capable of detecting the peeling start edge AS1 of the adhesive sheet AS, and applies tension to the adhesive sheet AS via a peeling sheet PS attached to the adhesive sheet AS, and peels the adhesive sheet AS from the adherend WK. Note that the support table 23 of the present embodiment is configured to rotate about a table center 23C by a rotation motor 22.

[0013] The energy applying means 30 is a relative movement means and includes a linear motor 31 as a driving device, a bracket 32 supported by an output shaft 31A of the linear motor 31, and an energy applying device 33 such as a light emitting diode or a mercury lamp supported by the bracket 32. As shown in FIG. 1(C), the energy applying device 33 includes a first applying device 33A that applies ultraviolet rays UV to the adhesive sheet AS from one surface WK2 side of the adherend WK, and a second applying device 33B that applies ultraviolet rays UV to the adhesive sheet AS from the other surface WK3 side of the adherend WK, and is configured to apply ultraviolet rays UV to the adhesive sheet AS from one surface WK2 side and the other surface WK3 side of the adherend WK. Note that the energy applying means 30 of the present embodiment is configured to apply ultraviolet rays UV having a predetermined light amount set in advance as energy in an amount that causes the adhesive sheet AS to have a decrease in adhesive force and in an amount that does not cause the cover sheet CS to have a decrease in adhesive force with respect to the adhesive sheet AS. In addition, in the present embodiment, a relative movement means for relatively moving the adherend WK and the energy applying device 33 is configured by the linear motor 31, the bracket 32C, the rotation motor 22, and the support table 23.

[0014] The operation of the above-described sheet peeling device EA will be described. First, with respect to the sheet peeling device EA in which each member is arranged at the initial position shown by the solid line in FIG. 1(A), a user of the sheet peeling device EA (hereinafter simply referred to as "user") inputs a signal for starting automatic operation via an operation means (not shown) such as an operation panel or a personal computer. Next, the user or a conveying means (not shown) such as an articulated robot or a belt conveyor places the adherend WK with the adhesive sheet AS attached to the outer peripheral surface WK1 on the support table 23 so that the adherend center WKC of the adherend WK overlaps with the table center 23C as shown in FIG. 1(A). Then, the peeling means 20 drives a decompression means (not shown) and starts adsorption and holding on the support surface 23A.

[0015] Thereafter, the energy applying means 30 drives the linear motor 31 to move the energy applying device 33 forward, drives the first applying device 33A and the second applying device 33B to emit ultraviolet rays UV, and then the peeling means 20 drives the rotation motor 22 and the edge detector 24 to rotate the adherend WK in the direction of arrow RD1. As a result, as shown in FIG. 1(B), the cover sheet CS and the adhesive sheet AS passing between the first and second applying devices 33A and 33B are irradiated with ultraviolet rays UV, and the adhesive force of the adhesive sheet AS decreases without the adhesive force of the cover sheet CS decreasing. Also, the peeling start edge AS1 is detected by the edge detector 24. Next, when ultraviolet rays UV of a desired light amount are applied to the cover sheet CS and the adhesive sheet AS, the energy applying means 30 stops driving the first and second applying devices 33A and 33B, then drives the linear motor 31 to return the energy applying device 33 to the initial position. Then, based on the detection result of the edge detector 24, when the rear part in the rotation direction of the peeling start edge AS1 is located to the right of the pressing member 15, the peeling means 20 stops driving the rotation motor 22 (see FIG. 1(D)).

[0016] Next, the sheet holding means 10 drives the linear motor 17A. As shown in FIG. 1(B), the receiving member 17 is pressed against the seat support base 14, and the seat support base 14 is moved rearward together with the receiving member 17, and the tip of the peeling sheet PS is positioned on the receiving member 17. Then, the sheet holding means 10 drives the rotation motor 18A. As shown by the two-dot chain line in FIG. 1(B), after the tip of the peeling sheet PS is sandwiched and held between the pressing member 18 and the receiving member 17, the linear motor 17A is driven. As shown in FIG. 1(D), the receiving member 17 is returned to the initial position to draw out the peeling sheet PS by a predetermined length.

[0017] Next, the sheet holding means 10 drives the linear motion motor 15A. As shown by the two-dot chain line in FIG. 1(D), the heating device 19 is driven to heat the pressing member 15, and the pressing member 15 presses the peeling sheet PS against the rear portion in the rotation direction of the peeling start edge AS1. Then, the peeling sheet PS is heated and attached to the adhesive sheet AS. Then, the sheet holding means 10 drives the linear motion motor 16A. As shown by the two-dot chain line in FIG. 1(D), the cutter blade 16 is inserted into the concave groove 14D to cut the peeling sheet PS. Then, the linear motion motors 15A and 16A are driven to return the pressing member 15 and the cutter blade 16 to the initial positions.

[0018] Next, the peeling means 20 drives the linear motor 21 and the rotation motor 22. As shown in FIG. 1(E), while rotating the adherend WK in the direction of arrow RD1, the adherend WK is moved to the right. As a result, tension is applied to the adhesive sheet AS via the peeling sheet PS, and the adhesive sheet AS is peeled off from the adherend WK. At this time, since ultraviolet rays UV are applied to the cover sheet CS so as not to cause a decrease in adhesive force, the cover sheet CS is not peeled off from the adherend WK.

[0019] Thereafter, as shown by the two-dot chain line in FIG. 1(E), when the entire adhesive sheet AS is peeled off from the adherend WK and the user or conveying means (not shown) holds the adhesive sheet AS, the peeling means 20 stops driving the linear motor 21 and the rotation motor 22. Next, when the sheet holding means 10 drives the rotation motor 18A to return the pressing member 18 to the initial position, the user or conveying means (not shown) conveys the held adhesive sheet AS to a non-illustrated disposal position. Then, when the peeling means 20 stops driving a decompression means (not shown) and releases the suction holding on the support surface 23A, after the user or conveying means (not shown) conveys the adherend WK to the next process, the peeling means 20 drives the linear motor 21 to return the support table 23 to the initial position, and thereafter the same operation as described above is repeated.

[0020] According to the above-described embodiment, since ultraviolet rays UV are applied to the adhesive sheet AS pasted so as to also penetrate into one surface WK2 and the other surface WK3 of the adherend WK from the one surface WK2 side and the other surface WK3 side, the adhesive sheet AS causing a decrease in adhesive force over a wide area can be peeled off from the adherend WK.

[0021] The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described for those means and steps. Moreover, they are not limited at all to the configurations and steps of merely one embodiment shown in the above-described embodiment. For example, the sheet holding means may be any means that can hold an adhesive sheet pasted on the outer peripheral surface of the adherend, and is not limited as long as it is within the technical scope in light of the common general knowledge in the art at the time of filing (the same applies to other means and steps).

[0022] After peeling the adhesive sheet AS from the adherend WK, the sheet holding means 10 may cut the peeling sheet PS, or may cut the peeling sheet PS before attaching the peeling sheet PS to the adherend WK, or may employ a single-sheet peeling sheet PS, or may not cut the peeling sheet PS, or may not have the cutting means 16, or may hold and pull out the peeling sheet PS while irradiating the adhesive sheet AS with ultraviolet rays UV. Instead of or in combination with the receiving member 17, the rotation motor 18A, and the pressing member 18, a configuration for holding the peeling sheet PS by gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. may be adopted. For example, the peeling sheet PS may be attached to the adhesive sheet AS attached to the outer peripheral surface WK1 of the adherend WK by a driving device such as a multi-joint robot. The peeling sheet PS may be attached to the front portion in the rotation direction of the peeling start edge AS1. Depending on where the peeling start edge AS1 is located, the position where the peeling sheet PS is attached can be determined, and the direction in which the peeling means 20 rotates the adherend WK can be determined. The pressing surface 15C may have any shape, such as a concave arc shape, a convex arc shape, a V shape, an inverted V shape, a U shape, an inverted U shape, a concavo-convex rectangular shape, a linear shape, or other shapes.

[0023] As the peeling means 20, a support table 23 that cannot perform adsorption and holding on the support surface 23A may be adopted, or a gripping means such as a chuck motor or a chuck cylinder, Coulomb force, an adhesive (adhesive sheet, adhesive tape), a pressure-sensitive adhesive (pressure-sensitive adhesive sheet, pressure-sensitive adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, a driving device, etc. may be used to hold the adherend WK. There may also be a pressing member that sandwiches and holds the adherend WK with the support table 23. In the embodiment, with the sheet holding means 10 stationary, the adherend WK is separated from the sheet holding means 10 and the adherend WK is rotated to peel the adhesive sheet AS from the adherend WK. However, with the adherend WK stationary, the sheet holding means 10 may be separated from the adherend WK and the sheet holding means 10 may be rotationally moved around the adherend WK to peel the adhesive sheet AS from the adherend WK. Also, while moving the sheet holding means 10 to the left, the adherend WK may be separated from the sheet holding means 10 and the adherend WK may be rotated to peel the adhesive sheet AS from the adherend WK. Or, while moving the sheet holding means 10 to the left and rotationally moving the sheet holding means 10 around the adherend WK, the adherend WK may be separated from the sheet holding means 10 to peel the adhesive sheet AS from the adherend WK. Instead of the linear motor 21, the rotation motor 22, and the support table 23, a driving device such as an articulated robot or other devices may relatively move the sheet holding means 10 and the adherend WK to peel the adhesive sheet AS from the adherend WK.

[0024] The energy applying means 30 can apply various types of energy as predetermined energy, such as electromagnetic waves like ultraviolet rays, infrared rays, visible light, sound waves, X-rays or gamma rays, heating media like hot water or hot air, cooling media like cold water or cold air, etc. Any energy applying means can be used as long as it can cause a change specific to that energy in the adhesive sheet AS considering the characteristics, properties, nature, material, composition, and structure of the adhesive sheet AS. It may be provided at a location other than the position shown in the above embodiment. As long as it is a position where predetermined energy can be applied to the adhesive sheet AS from one surface WK2 side and the other surface WK3 side of the adherend WK, it can be provided anywhere. It may further include a cover that surrounds part or all of the adherend WK or the energy applying device 33 so that ultraviolet rays UV do not leak. It may also be configured to irradiate the adhesive sheet AS with ultraviolet rays UV all at once without relatively moving the adherend WK and the energy applying device 33. It may not be provided with the linear motion motor 31 and the bracket 32. At least one of the first applying device 33A and the second applying device 33B may be provided in a plurality on a circumference centered on the adherend center WKC when the adherend WK is rotated. The first applying device 33A and the second applying device 33B may irradiate ultraviolet rays UV with the same light amount or different light amounts. It may also be configured to apply an amount of energy to the cover sheet CS that causes a change specific to that energy in the cover sheet CS. It may be configured to condense ultraviolet rays UV onto the adhesive sheet AS and not irradiate the cover sheet CS with ultraviolet rays UV. The energy applying device 33 may be provided with a third applying device 33C that applies ultraviolet rays UV to the adhesive sheet AS from the outer peripheral surface WK1 side of the adherend WK as shown by the two-dot chain line in FIG. 1(C). The energy applying device 33 may be composed only of the first applying device 33A. After applying ultraviolet rays UV to one surface WK2, either the first applying device 33A or the adherend WK may be turned upside down, and then ultraviolet rays UV may be applied to the other surface WK3. Considering the thickness of the adherend WK, it may be provided with a driving device that moves the energy applying device 33 in the thickness direction (vertical direction) of the adherend WK.The relative movement means may move the energy application device 33 away from and closer to the adherend center WKC in the direction according to the size of the adherend WK. Alternatively or in combination with the rotation motor 22 and the support table 23, the relative movement means may be provided with a drive device that moves the energy application device 33 along the circumferential direction of the outer peripheral surface WK1.

[0025] The adhesive sheet AS may be attached to the adherend WK such that one edge portion and the other edge portion in the circumferential direction of the outer peripheral surface WK1 overlap, or the adhesive sheet AS may be attached to the adherend WK such that one edge contacts the other edge, or the adhesive sheet AS may be attached to the adherend WK such that one edge and the other edge are separated. The planar shape may be any shape such as a straight shape, a curved shape, or a refracted shape. The surface shape of the adhesive sheet AS attached to the outer peripheral surface WK1 of the adherend WK may be the same as or different from the shape of the outer peripheral surface WK1 of the adherend WK. The change specific to the predetermined energy caused by the adhesive sheet AS may be any change such as curing, softening, shrinking, expanding, vaporizing, liquefying, solidifying, discoloring, oxidizing, penetrating, fixing, decreasing the adhesive force, or increasing the adhesive force.

[0026] The peeling sheet PS may be a pressure-sensitive adhesive sheet or a heat-sensitive adhesive sheet. In addition to the adhesive sheet, for example, in addition to adhesive tapes, adhesive sheets, and adhesive tapes, those in which an adhesive medium such as an adhesive or an adhesive is laminated on a base material such as metal, resin, or rubber may also be used. As the predetermined energy, any energy such as electromagnetic waves such as ultraviolet rays, infrared rays, visible light, sound waves, X-rays, or gamma rays, heating media such as hot water or hot air, or cooling media such as cold water or cold air may be applied to improve the adhesive force, or the adhesive force may not be improved by the predetermined energy.

[0027] The adherend WK may have a convex portion CV provided at the outer edge of one surface WK2, or may have convex portions CV provided at both the outer edge of one surface WK2 and the outer edge of the other surface WK2, or may have convex portions CV provided at portions other than the outer edge of one surface WK2, portions other than the outer edge of the other surface WK2, etc. Alternatively, no convex portion CV may be provided on one surface WK2 or the other surface WK2. A cover sheet CS may be attached to a region that does not include the convex portion CV, or a cover sheet CS may be attached to at least one of one surface WK2 and the other surface WK3, or no cover sheet CS may be attached. The change specific to the predetermined energy caused by the cover sheet CS may be any change such as curing, softening, shrinking, expanding, vaporizing, liquefying, solidifying, discoloring, oxidizing, penetrating, fixing, decreasing adhesive strength, or increasing adhesive strength. The cover sheet CS does not have to cause a change specific to the predetermined energy by applying the predetermined energy, and does not have to be attached to the adherend WK.

[0028] In the present invention, the materials, types, shapes, etc. of the adhesive sheet AS, the peeling sheet PS, the cover sheet CS, and the adherend WK are not particularly limited. For example, the adhesive sheet AS, the peeling sheet PS, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. Also, the adhesive sheet AS, the peeling sheet PS, and the cover sheet CS may be of an adhesive form such as pressure-sensitive adhesiveness or heat-sensitive adhesiveness. When a heat-sensitive adhesive adhesive sheet AS, peeling sheet PS, or cover sheet CS is employed, it may be adhered by an appropriate method such as providing heating means such as an appropriate coil heater or the heating side of a heat pipe for heating the adhesive sheet AS, peeling sheet PS, or cover sheet CS. Further, such an adhesive sheet AS, peeling sheet PS, or cover sheet CS may be, for example, a single-layer one having only an adhesive layer, a two-layer one in which a base material and an adhesive layer are laminated, a three-layer or more-layer one in which one or more intermediate layers are laminated between the base material and the adhesive layer, a three-layer or more-layer one in which one or more cover layers are laminated on the upper surface of the base material, one in which the base material, intermediate layer, or cover layer is detachably provided, a single-layer double-sided adhesive sheet composed only of an adhesive layer, a double-sided adhesive sheet in which adhesive layers are laminated on both outermost surfaces of one or more intermediate layers, or the like, and may be of any type. Furthermore, as the adherend WK, for example, it may be a single object such as food, a resin container, a semiconductor wafer such as a silicon semiconductor wafer or a compound semiconductor wafer, a circuit board, an information recording substrate such as an optical disk, a glass plate, a steel plate, pottery, a wooden board, or resin, or it may be a composite formed of two or more of them, and members and articles in any form can also be targeted. Note that the adhesive sheet AS or the cover sheet CS may be, for example, any sheet, film, tape, etc., such as a label for information description, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a resin sheet for forming a recording layer.

[0029] The drive equipment in the above-described embodiment may employ, individually, electric equipment such as a rotary motor, a linear motor, a linear motor, a single-axis robot, a so-called multi-joint robot having two or three or more joints, or an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. Alternatively, a combination of these electric equipment and actuators, either directly or indirectly, may be employed. Further, equipment capable or incapable of torque control, speed control, etc. with respect to the output portions of these electric equipment and actuators may be employed.

[0030] In the above-described embodiment, some object (hereinafter referred to as "object A") and an object that moves relative to the object A (hereinafter referred to as "object B"), that is, the relatively moving objects A and B, may be such that object B moves relative to object A which does not move, or object A moves relative to object B which does not move, or both object A and object B may move. As long as the results achieved by the movement are the same, either object A or object B may move. When a rotating member such as a roller is employed, a driving device for rotationally driving the rotating member may be provided. The surface of the rotating member or the rotating member itself may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. Instead of a roller, other members such as a shaft or blade that rotates or does not rotate may be employed. When a pressing means or pressing member such as a pressing roller or pressing head that presses an object to be pressed is employed, in addition to or in combination with those exemplified above, in addition to a roller, round bar, blade material, brush-shaped member, a means by spraying a gas such as air or gas may be employed. The pressing member may be composed of a deformable member such as rubber, resin, or sponge, or may be composed of a member that does not deform. When a peeling means or peeling member such as a peeling plate or peeling roller that peels an object to be peeled is employed, in addition to or in combination with those exemplified above, members such as a plate-shaped member, round bar, or roller may be employed. The peeling member may be composed of a deformable member such as rubber or resin, or may be composed of a member that does not deform. When a support (holding) means or support (holding) member that supports (holds) a supported member (held member) is employed, a configuration that supports (holds) the supported member with a gripping means such as a chuck motor or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, driving device, etc. may be adopted. When a cutting means or cutting member that cuts a member to be cut or forms a notch or cutting line in the member to be cut is employed, in addition to or in combination with those exemplified above, a cutter blade, laser cutter, ion beam, thermal power, heat, water pressure, heating wire, spraying of gas or liquid, etc. may be adopted for cutting,It may be possible to move and cut by combining appropriate driving devices, or when biasing means are employed, they may be constituted by springs, rubber, resin, driving devices, etc.

Explanation of Signs

[0031] EA…Sheet peeling device 10…Sheet holding means 20…Peeling means 30…Energy imparting means AS…Adhesive sheet CS…Cover sheet UV…Ultraviolet rays (predetermined energy) WK…Adherend WK1…Outer peripheral surface WK2…One surface WK3…The other surface

Claims

1. Sheet holding means for holding an adhesive sheet attached to the outer peripheral surface of an adherend; Peeling means for applying tension to the adhesive sheet held by the sheet holding means and peeling the adhesive sheet from the adherend; Energy applying means for applying predetermined energy to the adhesive sheet, comprising: The adhesive sheet is configured to undergo a change specific to the predetermined energy upon application of the predetermined energy, and is attached so as to wrap around both one surface and the other surface of the adherend; The energy applying means applies the predetermined energy to the adhesive sheet from one surface side and the other surface side of the adherend. A sheet peeling device characterized by this.

2. The adherend has a cover sheet attached thereto that undergoes a change specific to the predetermined energy upon application of the predetermined energy; The energy applying means applies an amount of energy to the cover sheet such that the cover sheet does not undergo a change specific to the predetermined energy. The sheet peeling device according to claim 1, characterized by this.

3. A sheet holding step of holding an adhesive sheet attached to the outer peripheral surface of an adherend; A peeling step of applying tension to the adhesive sheet held in the sheet holding step and peeling the adhesive sheet from the adherend; An energy applying step of applying predetermined energy to the adhesive sheet, implementing: The adhesive sheet is configured to undergo a change specific to the predetermined energy upon application of the predetermined energy, and is attached so as to wrap around both one surface and the other surface of the adherend; In the energy applying step, the predetermined energy is applied to the adhesive sheet from one surface side and the other surface side of the adherend. A sheet peeling method characterized by this.

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