Environment test device

Abstract

To provide an environment test device capable of rapidly putting a test object into / out of a test chamber.SOLUTION: An environment test device 100 includes a test chamber 101 for performing an actuation test under a low-temperature environment with respect to a test object WK. Two conveyance shafts 130 are mutually extended in parallel in order to put in / out the test object WK in the test chamber 101. Each one of the conveyance shafts 130 is extended in a rod-shape and arranged in a state where a pin-shape pressure body 133 is projected on an outer front surface. Each one of the pressure bodies 133 is formed to have a length to be brought into contact with a side surface of a work pallet 200 on which the test object WK is placed in an upward erecting state. The conveyance shaft 130 is supported so as to be reciprocatively rotated around an axial line by each rotation mechanism 135 and also to advance / retreat in an axial direction by an advance / retreat mechanism 136.SELECTED DRAWING: Figure 1

Description

Technical Field

[0001] The present invention relates to an environmental test apparatus that includes a test chamber for accommodating a test object and forming a sealed space, and performs a test on the test object in the environment within the test chamber.

Background Art

[0002] Conventionally, there has been an environmental test apparatus that includes a test chamber for accommodating a test object and forming a sealed space, and performs a test on the test object in the environment within the test chamber. For example, Patent Document 1 below discloses an inspection apparatus that arranges an electronic component as a test object in a low-temperature bath as a test chamber having an atmosphere of 0°C or lower and inspects the operation of this electronic component.

Prior Art Documents

Patent Documents

[0003]

Patent Document 1

[0004] However, in the inspection apparatus described in Patent Document 1 above, since the test object is taken in and out of the low-temperature bath using a chain conveyor, there is a problem that the test object cannot be taken in and out quickly and the work efficiency is low.

Summary of the Invention

[0005] The present invention has been made to address the above problems, and an object thereof is to provide an environmental test apparatus capable of quickly taking a test object in and out of a test chamber.

[0006] To achieve the above object, the present invention is characterized by an environmental testing device having a test chamber for accommodating test objects and for testing the test objects in the environment of the test chamber, the device comprising: an access port provided in the test chamber for loading and unloading the test objects; a pushing body for pushing the test objects toward the access port; a conveying shaft formed in an elongated rod shape and having the pushing body on its outer periphery; a rotating mechanism for rotating the conveying shaft about its axis; and an advancing / retracting mechanism for moving the conveying shaft toward and away from the access port. Here, the environment in the test chamber refers to at least one of the temperature, humidity, pressure, and gas concentration in the test chamber.

[0007] According to this, the environmental testing device allows the test object to be quickly taken in and out of the test chamber, since the conveying shaft supporting the pressing body that presses the test object rotates around its axis using a rotation mechanism and moves forward and backward relative to the loading and unloading port using a forward and backward mechanism.

[0008] Another feature of the present invention is that the environmental testing device is provided with two or more conveying shafts.

[0009] According to this, since the environmental testing device is provided with two or more transport shafts, the test object can be stably taken in and out of the loading / unloading opening by the two or more transport shafts.

[0010] Another feature of the present invention is that the environmental testing device further comprises a closing body for freely closing the access opening.

[0011] According to this, the environmental testing device is equipped with a closing body that can freely close the access opening, thereby preventing changes to the environment within the test chamber and enabling stable and accurate environmental testing.

[0012] Another feature of the present invention is that in the environmental testing device, the conveying shaft is always positioned in a state spanning the loading / unloading opening, and the closure body has a conveying shaft fitting portion into which the portion of the conveying shaft spanning the loading / unloading opening fits.

[0013] According to this, since the environmental test apparatus has a conveyance shaft fitting portion into which a portion of the closing body straddling the loading / unloading port on the conveyance shaft fits, the closing body can be opened and closed with the conveyance shaft straddling the loading / unloading port without removing the conveyance shaft from the loading / unloading port, and the loading / unloading operation of the object to be tested can be efficiently performed.

[0014] Another feature of the present invention is that, in the environmental test apparatus, the conveyance shaft is made of a material having a lower thermal conductivity than the materials constituting the portions before and after the portion straddling the loading / unloading port.

[0015] According to this, since the portion of the conveyance shaft straddling the loading / unloading port in the environmental test apparatus is made of a material having a lower thermal conductivity than the materials constituting the portions before and after the portion straddling the loading / unloading port, heat transfer between the inside and the outside of the test chamber can be suppressed, and the accuracy of the environmental test can be efficiently improved.

[0016] Another feature of the present invention is that, in the environmental test apparatus, further, there is a work support body that supports the object to be tested at positions before and after the loading / unloading port, and the conveyance shaft is provided in a non-contact state with respect to the object to be tested.

[0017] According to this, since the conveyance shaft in the environmental test apparatus is provided in a non-contact state with respect to the object to be tested, it is possible to prevent the position of the object to be tested from changing as the conveyance shaft moves, and the conveyance accuracy of the object to be tested and the accuracy of the environmental test can be improved.

Brief Description of the Drawings

[0018]

Figure 1

Figure 2

Figure 3

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Figure 10

Embodiments for Carrying Out the Invention

[0019] Hereinafter, an embodiment of the environmental test apparatus according to the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing an outline of the external configuration of the main part of the environmental test apparatus 100 according to the present invention from the input side of the object under test WK. Further, FIG. 2 is a perspective view showing an outline of the external configuration of the main part of the environmental test apparatus 100 shown in FIG. 1 from the discharge side of the object under test WK. Further, FIG. 3 is a block diagram of a control system for controlling the operation of the environmental test apparatus 100 shown in FIG. 1. In FIG. 1, in order to clarify the shape of the transport bearing 105, a part of one of the two transport shafts 130 is omitted and shown.

[0020] This environmental test apparatus 100 is an apparatus for arranging an object under test WK composed of an electronic circuit board in an atmosphere of 0°C or lower and confirming the electrical operation of the object under test WK. In this specification, since the configuration and operation for confirming the operation of the object under test WK are not directly related to the present invention, the description thereof will be omitted as appropriate.

[0021] (Configuration of Environmental Test Apparatus 100) The environmental test apparatus 100 includes a test chamber 101. The test chamber 101 is a container that hermetically houses the object under test WK and generates a low-temperature environment, and is formed in a box shape extending in the horizontal direction. More specifically, the test chamber 101 is configured by assembling metal plates in a rectangular parallelepiped shape extending in the horizontal direction. In this case, the inner wall surface of the test chamber 101 is covered with a heat insulating material (not shown), and leakage of the cold air inside the test chamber 101 to the outside is suppressed.

[0022] This test chamber 101 is respectively provided with a cooling device (not shown) for setting the interior of the test chamber 101 to a predetermined temperature environment and a work test device (not shown) for performing a predetermined electrical test on the object under test WK disposed in the test chamber 101. Here, the cooling device is a mechanical device for supplying cold air into the test chamber 101, and is configured to include a compressor, a condenser, an expansion mechanism, an evaporator, a blower, etc. which are not shown. Further, the work test device includes, in addition to connection terminals electrically connected to the object under test WK, an approach mechanism for connecting or disconnecting these connection terminals to / from the object under test WK, etc.

[0023] Regarding these cooling device and work test device, since they are not directly related to the present invention, detailed descriptions thereof are omitted. Further, in the test chamber 101, an input side opening 102 and an output side opening 103 are respectively formed in both longitudinal side surfaces 101a, 101b.

[0024] Here, the longitudinal direction of the test chamber 101 is the direction in which the object under test WK is conveyed horizontally with respect to the test chamber 101. Further, the width direction of the test chamber 101 is the direction orthogonal to the longitudinal direction within the same plane.

[0025] The input side opening 102 is an opening for putting the object under test WK into the test chamber 101, and is formed to open in a rectangular shape in one of the two longitudinal side surfaces 101a, 101b of the test chamber 101, i.e., side surface 101a. This input side opening 102 is configured to be openable and closable by an input side closing body 110 described later. Further, an input side work support 140 is provided in front of the input side opening 102.

[0026] The discharge-side opening 103 is an opening for taking out the object under test WK in the test chamber 101 to the outside of the test chamber 101, and is formed by opening in a rectangular shape in the other side surface 101b of the two side surfaces 101a and 101b in the longitudinal direction of the test chamber 101. This discharge-side opening 103 is configured to be openable and closable by a discharge-side closing body 120 described later. Further, a discharge-side work support 150 is provided behind the discharge-side opening 103. In addition, an indoor-side work support 104 and a conveyance bearing 105 are respectively provided inside the test chamber 101.

[0027] The indoor-side work support 104 is a component for guiding the work pallet 200 on which the object under test WK is placed in the test chamber 101 from the input-side opening 102 side to the discharge-side opening 103 side while supporting it. Specifically, the indoor-side work support 104 is formed of a metal material in a rod shape with an L-shaped cross section. This indoor-side work support 104 is attached in a horizontal posture extending between the input-side opening 102 and the discharge-side opening 103 on the inner surfaces of the two side surfaces 101c and 101d facing each other in the width direction of the test chamber 101. That is, in the width direction of the test chamber 101, two indoor-side work supports 104 are configured as a pair. In FIGS. 1 and 2, only a part of one of the pair of indoor-side work supports 104 is shown.

[0028] The conveyance bearing 105 is a component for receiving two conveyance shafts 130 described later from below in the test chamber 101 and preventing each conveyance shaft 130 from dropping downward. More specifically, the conveyance bearing 105 is formed as a plate-like body extending in the width direction of the test chamber 101 so as to be able to receive the two conveyance shafts 130 respectively. This conveyance bearing 105 is provided at positions adjacent to the input-side opening 102 and the discharge-side opening 103 in the test chamber 101, respectively. Further, two sliding fitting portions 105a are formed on the upper surface of each conveyance bearing 105 along the longitudinal direction of the test chamber 101.

[0029] The sliding fitting portion 105a is a portion that slidably receives the two transport shafts 130, and is formed in a groove shape into which the lower half of each transport shaft 130 is fitted. This transport shaft bearing 105 may be made of any material as long as it can slidably support the transport shaft 130, but it is preferably made of a material with a low thermal conductivity such as a resin material. Note that this transport shaft bearing 105 may receive the transport shafts 130 in a state of being in contact with each transport shaft 130, or may receive the transport shafts 130 in a state of receiving a load (i.e., a supporting state) from each transport shaft 130.

[0030] The input side closing body 110 is a component for closing the input side opening 102, and is formed in a plate shape of a size that can cover the input side opening 102. In the present embodiment, the input side closing body 110 is configured by attaching resin-made plate-like bodies to both surfaces of a metal-made plate state. This input side closing body 110 is supported in a state where it can be slidably displaced in the vertical direction on the outer surface of the side surface of the test chamber 101 where the input side opening 102 opens. More specifically, the input side closing body 110 is supported by a closing body drive mechanism 111.

[0031] The closing body drive mechanism 111 is a mechanical device for slidably displacing the input side closing body 110 in the vertical direction with respect to the input side opening 102, and mainly includes a guide body 112, a vertical drive device 113, and a coupler 114.

[0032] The guide body 112 is a component for guiding the input side closing body 110 in the vertical direction and pressing the input side closing body 110 against the side surface 101a. Specifically, the guide body 112 is configured by forming two long hole-shaped guide grooves 112a in series in a metal-made plate-like body extending in the vertical direction shown in the figure. In this case, the two guide grooves 112a are each formed to linearly extend in the vertical direction and have an approaching portion 112b whose lower end portion is bent toward the side surface 101a side.

[0033] These two guide grooves 112a are through holes into which two rollers 110a provided on both side surfaces of the input-side closing body 110 are rotatably or slidably fitted. And this guide body 112 is attached to both sides of the input-side opening 102 on the outer surface of the side surface 101a respectively. That is, the guide bodies 112 are configured in a pair in the width direction of the test chamber 101 with respect to the input-side closing body 110.

[0034] Therefore, when the roller 110a is located at a position other than the approaching portion 112b in the guide groove 112a, the guide body 112 guides the input-side closing body 110 to be located at a position separated from the side surface 101a (see FIG. 1). Also, as shown in FIG. 4, when the roller 110a is located at the approaching portion 112b in the guide groove 112a, the guide body 112 guides the input-side closing body 110 to be located at a position approaching and adhering to the side surface 101a.

[0035] The vertical drive device 113 is an actuator for displacing the input-side closing body 110 in the vertical direction, and its operation is controlled by a control device 160 described later. In this embodiment, the vertical drive device 113 is constituted by an air cylinder. This vertical drive device 113 is attached to the upper surface of the test chamber 101 and is connected to the input-side closing body 110 via a coupler 114. Note that the vertical drive device 113 may be constituted by an actuator capable of moving the input-side closing body 110 up and down, so it can also be constituted by an actuator other than an air cylinder, for example, a hydraulic cylinder or an electric motor.

[0036] The connector 114 is a hinge-like joint that rotatably connects the input-side closing body 110 to the tip of the piston of the vertical drive device 113. Specifically, the connector 114 is formed in a hinge shape that rotatably connects the tip of the piston of the vertical drive device 113 and the upper surface of the input-side closing body 110. Thereby, when the input-side closing body 110 descends to close the input-side opening 102, the connector 114 displaces the input-side closing body 110 toward the side surface 101a, and when the input-side closing body 110 ascends to open the input-side opening 102, the connector 114 allows the input-side closing body 110 to displace to the side away from the side surface 101a. Further, two conveying shaft fitting portions 115 are respectively formed at the lower end of the input-side closing body 110.

[0037] Each conveying shaft fitting portion 115 is a portion for avoiding physical interference with the two conveying shafts 130 when the input-side closing body 110 descends to close the input-side opening 102. Specifically, each conveying shaft fitting portion 115 is formed in an inverted U shape that opens downward so that each conveying shaft 130 can enter and fit.

[0038] In this case, the upper end portion of each conveying shaft fitting portion 115 is formed in a concave curved surface shape that closely adheres to the convex curved surface shape of each conveying shaft 130, suppressing a decrease in airtightness when the input-side closing body 110 closes the input-side opening 102. Further, each conveying shaft fitting portion 115 extends in the vertical direction and a long hole-shaped adjustment hole 115a is formed. The vertical position can be adjusted for the input-side closing body 110 by a bolt 115b passing through the adjustment hole 115a. Also, each conveying shaft fitting portion 115 may be made of any material as long as it is formed in a shape that allows the conveying shaft 130 to escape, but it is preferably made of a material with a low thermal conductivity such as a resin material. Further, each conveying shaft fitting portion 115 can be directly formed instead of being configured to be attached to the input-side closing body 110.

[0039] The discharge-side closing body 120 is a component for closing the discharge-side opening 103, similar to the input-side closing body 110, and is formed in a plate shape with a size capable of covering the discharge-side opening 103. In the present embodiment, the discharge-side closing body 120 is configured by attaching plate-shaped bodies made of resin to both sides of a plate-shaped metal body. This discharge-side closing body 120 is supported in a state where it can be slidably displaced in the vertical direction on the outer surface of the side surface where the discharge-side opening 103 in the laboratory 101 opens. More specifically, the discharge-side closing body 120 is supported by a closing body drive mechanism 121.

[0040] The closing body drive mechanism 121 is a mechanical device for slidably displacing the discharge-side closing body 120 in the vertical direction with respect to the discharge-side opening 103, similar to the closing body drive mechanism 111, and mainly includes a guide body 122, a vertical drive device 123, and a coupler 124.

[0041] The guide body 122 is a component for guiding the discharge-side closing body 120 in the vertical direction and pressing the discharge-side closing body 120 against the side surface 101b, similar to the guide body 112. Specifically, the guide body 122 is configured by forming two elongated adjustment holes 125a in series in a plate-shaped metal body extending in the vertical direction as shown in the figure. In this case, the two guide grooves 122a are each formed to linearly extend in the vertical direction and have an approaching portion 122b whose lower end portion is bent toward the side surface 101b.

[0042] These two guide grooves 112a are through holes into which rollers 120a provided in pairs on both side surfaces of the discharge-side closing body 120 are rotatably or slidably fitted. And this guide body 122 is attached to both sides of the discharge-side opening 103 on the outer surface of the side surface 101b respectively. That is, the guide body 122 is configured by a pair of two guide bodies 122 in the width direction of the laboratory 101 with respect to the discharge-side closing body 120.

[0043] Therefore, similar to the guide body 112, when the roller 120a is located at a position other than the approaching portion 122b in the guide groove 122a, the guide body 122 guides the discharge-side closing body 120 to be located at a position separated from the side surface 101b (see FIG. 2). Further, when the roller 120a is located at the approaching portion 122b in the guide groove 122a, the guide body 122 guides the discharge-side closing body 120 to be located at a position approaching and adhering to the side surface 101b.

[0044] Similar to the vertical drive device 113, the vertical drive device 123 is an actuator for displacing the discharge-side closing body 120 in the vertical direction, and its operation is controlled by the control device 160. In the present embodiment, the vertical drive device 123 is constituted by an air cylinder. This vertical drive device 123 is attached to the upper surface of the test chamber 101 and is connected to the discharge-side closing body 120 via a coupler 124. Note that the vertical drive device 123 may be constituted by an actuator capable of moving the discharge-side closing body 120 vertically, and thus may be constituted by an actuator other than an air cylinder, for example, a hydraulic cylinder or an electric motor.

[0045] Similar to the coupler 114, the coupler 124 is a hinge-like joint that rotatably connects the discharge-side closing body 120 to the tip of the piston of the vertical drive device 123. Specifically, the coupler 124 is formed in a hinge shape that rotatably connects the tip of the piston of the vertical drive device 123 and the upper surface of the discharge-side closing body 120. Thereby, when the discharge-side closing body 120 descends to close the discharge-side opening 103, the coupler 124 displaces the discharge-side closing body 120 toward the side surface 101b, and when the discharge-side closing body 120 ascends to open the discharge-side opening 103, the coupler 124 allows the discharge-side closing body 120 to be displaced to the side separated from the side surface 101b. Further, two conveyance shaft fitting portions 125 are respectively formed at the lower end portion of the discharge-side closing body 120.

[0046] Each transport shaft fitting portion 125 is a portion for avoiding physical interference with the two transport shafts 130 when the discharge-side closing body 120 descends to close the discharge-side opening 103, similar to the respective transport shaft fitting portions 115. Specifically, each transport shaft fitting portion 125 is formed in an inverted U shape that opens downward so that the respective transport shafts 130 can enter and fit therein.

[0047] In this case, the upper end portion of each transport shaft fitting portion 125 is formed in a concave curved surface shape that closely adheres to the convex curved surface shape of each transport shaft 130, suppressing a decrease in airtightness when the discharge-side closing body 120 closes the discharge-side opening 103. Further, each transport shaft fitting portion 125 has an adjustment hole 125a formed in a long hole shape extending in the vertical direction, and is configured such that the vertical position of the discharge-side closing body 120 can be adjusted by a bolt 125b passing through the adjustment hole 125a. Also, each transport shaft fitting portion 125 may be made of any material as long as it is formed in a shape that allows the transport shaft 130 to escape, but it is preferably made of a material with a low thermal conductivity such as a resin material. Further, each transport shaft fitting portion 125 can be formed directly instead of being configured to be attached to the discharge-side closing body 120.

[0048] The transport shaft 130 is a component for taking the object under test WK in and out of the test chamber 101, and is formed in a rod shape extending in the longitudinal direction of the test chamber 101. In this case, the transport shaft 130 is formed to have a length that penetrates the test chamber 101 in the longitudinal direction. Also, in the present embodiment, the transport shaft 130 is formed in a round rod shape with a circular cross-sectional shape. This transport shaft 130 is composed of main body portions 131a, 131b, 131c and heat insulating portions 132a, 132b.

[0049] The main body parts 131a to 131c are parts that ensure the rigidity of the conveying shaft 130 and are composed of metal pipe materials. Among these main body parts 131a to 131c, the main body part 131a is mainly the part arranged inside the test chamber 101, and the main body part 131a is mainly the part arranged outside the input side opening 102 with respect to the test chamber 101. The main body part 131b is mainly the part arranged outside the discharge side opening 103 with respect to the test chamber 101. And these main body parts 131a to 131c are connected via two heat insulation parts 132a and 132b to form a single conveying shaft 130.

[0050] The heat insulation parts 132a and 132b are parts for suppressing heat conduction between the main body part 131a and the main body parts 131b and 131c, and are composed of materials with relatively low heat conductivity compared to the materials constituting the main body parts 131a to 131c. In this embodiment, the heat insulation parts 132a and 132b are composed of resin pipe materials. These heat insulation parts 132a and 132b are arranged such that the heat insulation part 132a is between the main body part 131a and the main body part 131b, and the heat insulation part 132b is between the main body part 131a and the main body part 131c. That is, the heat insulation part 132a is arranged at a position straddling the input side opening 102 in the test chamber 101, and the heat insulation part 132b is arranged at a position straddling the discharge side opening 103 in the test chamber 101.

[0051] Two conveying shafts 130 are provided in parallel with each other at a position below the indoor side work supports 104 provided in pairs in the test chamber 101. In this case, the two conveying shafts 130 are respectively fitted into two sliding fitting parts 105a formed on the upper surface of the conveying bearing 105. That is, the two conveying shafts 130 are provided at positions where they do not contact the object under test WK conveyed on the indoor side work support 104. Pushing bodies 133 are respectively formed on the outer peripheral surfaces of these two conveying shafts 130.

[0052] The pusher 133 is a part for pushing the work pallet 200 on which the test object WK is placed, and is made up of a thin round pin. In this case, the pusher 133 may be made of a material with low thermal conductivity such as a resin material, or may be made of a metal material with emphasis on rigidity.

[0053] The pushing body 133 is provided on the outer peripheral surface of each conveying shaft 130 in a state where it stands outward in the radial direction. In this case, the pushing body 133 is formed to a length that allows it to come into contact with the side surface of the work pallet 200 on which the test object WK is placed in an upward standing state. The pushing body 133 is also provided downstream of the pushing portion on the side surface of the work pallet 200 in the conveying direction (pushing direction) of the work pallet 200.

[0054] The number of push bodies 133 provided corresponds to the number of work pallets 200 to be transported simultaneously. In this embodiment, four push bodies 133 are formed on each of the two transport shafts 130. The end of each transport shaft 130 that protrudes from the discharge-side opening 103 is supported by a shaft support 134.

[0055] The shaft support 134 is a component that supports the two conveying shafts 130 so that they can rotate freely around their respective axes, and is made of a metal material formed into a plate shape. One end of each of the conveying shafts 130 passes through the shaft support 134, and a rotation mechanism 135 is attached in a state connected to each of these passed-through ends.

[0056] The rotation mechanism 135 is a mechanical device for rotating each of the conveying shafts 130 around its axis. Specifically, the rotation mechanism 135 is configured by connecting the tip of a piston of an air cylinder that reciprocates up and down to the conveying shaft 130 via a hinge-like joint. In other words, the rotation mechanism 135 can rotate the conveying shaft 130 back and forth around its axis by moving the piston of the air cylinder up and down.

[0057] As a result, as shown in Fig. 5, the pusher body 133 can selectively assume two posture states: an upright posture standing upward and an inclined posture inclined outward on each of the conveying shafts 130 that form a pair in the width direction of the test chamber 101. It goes without saying that the inclined postures of the pair of pusher bodies 133 may be postures in which at least one of the pair of conveying shafts 130 is inclined inward.

[0058] This rotation mechanism 135 is provided for each of the two conveying shafts 130. Also, the air cylinder that constitutes the rotation mechanism 135 is controlled to operate by the control device 160. Note that the actuator that rotationally drives the conveying shaft 130 in the rotation mechanism 135 can also be constituted by an actuator other than an air cylinder, for example, a hydraulic cylinder or an electric motor. The shaft support 134 is supported by the advancing and retracting mechanism 136.

[0059] The advancing and retracting mechanism 136 is a mechanical device for reciprocally displacing the shaft support 134 along the longitudinal direction of the test chamber 101. In the present embodiment, the advancing and retracting mechanism 136 is mainly constituted by a linear guide actuator including a guide 137 and an actuator 138.

[0060] The guide 137 is a component that supports the shaft support 134 and holds it so as to be reciprocally slidable along the longitudinal direction of the test chamber 101. Specifically, the guide 137 includes a feed screw mechanism extending along the longitudinal direction of the test chamber 101 and a housing covering this feed screw mechanism, respectively. Here, the feed screw mechanism is connected to the upper surface of the shaft support 134 and holds this shaft support 134 so as to be reciprocally slidable along the longitudinal direction of the test chamber 101. This guide 137 is supported by a support member (not shown) in the environmental test device 100.

[0061] The actuator 138 is a drive source for reciprocally displacing the transport shaft 130 along the axial direction of the transport shaft 130 (the longitudinal direction of the test chamber 101). More specifically, the actuator 138 is constituted by an electric motor for driving a feed screw mechanism in the guide 137. The operation of this actuator 138 is controlled by the control device 160. Further, this actuator 138 is supported by a support member on the guide 137.

[0062] The input-side work support 140 is a component for guiding the object under test WK with respect to the test chamber 101. Specifically, the input-side work support 140 is constituted by a pair of rod-shaped bodies having an L-shaped cross section, and slidably supports a work pallet 200 on which the object under test WK is placed by these two rod-shaped bodies. This input-side work support 140 is formed at the same height position as the above-described indoor-side work support 104.

[0063] In this case, one end of the input-side work support 140 extends to a position immediately before the input-side opening 102 of the test chamber 101, but is not connected to the tip of the indoor-side work support 104 while being separated therefrom. On the other hand, on the other end side of the input-side work support 140, a work supply device (not shown) for supplying the work pallet 200 on which the object under test WK is placed onto the input-side work support 140 is provided. This input-side work support 140 has leg members and is installed on the floor surface on which the environmental test device 100 is installed.

[0064] The discharge-side work support 150 is a component for guiding the object under test WK discharged from the test chamber 101 to the next process. Specifically, the discharge-side work support 150 is constituted by a pair of rod-shaped bodies having an L-shaped cross section, similarly to the input-side work support 140, and slidably supports a work pallet 200 on which the object under test WK is placed by these two rod-shaped bodies. This discharge-side work support 150 is formed at the same height position as the above-described indoor-side work support 104 and the input-side work support 140.

[0065] In this case, one end of the discharge-side work support 150 extends to a position immediately before the discharge-side opening 103 of the test chamber 101, but is not connected to and spaced apart from the tip of the chamber-side work support 104. Meanwhile, a work discharge device (not shown) is provided at the other end of the discharge-side work support 150, which supplies the work pallet 200 on which the test object WK is placed to the next process. This discharge-side work support 150 has leg members and is installed on the floor on which the environmental testing device 100 is installed.

[0066] The control device 160 is configured by a microcomputer including a CPU, ROM, RAM, etc., and controls the operation of the vertical movement drive device 113, the vertical movement drive device 123, the rotation mechanism 135, and the advance / retract mechanism 136 (actuator 138). The control device 160 also controls the operation of the cooling device and the workpiece testing device. In other words, the control device 160 comprehensively controls the operation of the entire environmental testing device 100. In this case, the control device 160 is equipped with an operation panel 161 consisting of a liquid crystal touch display for inputting instructions from an operator and for displaying the operating status of the control device 160, and performs an environmental test on the test object WK by executing a control program (not shown) in accordance with instructions from the operator.

[0067] The environmental testing device 100 is equipped with a power supply unit for supplying power taken from a power source to various electrical devices such as the vertical movement drive device 113, the vertical movement drive device 123, the rotation mechanism 135, the advance / retreat mechanism 136 (actuator 138), the cooling device, the work testing device, and the control device 160, as well as a defroster for defrosting the cooling device, but these are not directly related to the present invention and therefore will not be described here.

[0068] The work pallet 200 is a component for stably holding the test object WK that is being taken in and out of the test chamber 101, and is formed in a flat plate shape on which the test object WK can be placed. The work pallet 200 is mainly composed of a main body portion 201, a placement portion 202, and a pressure receiving portion 203.

[0069] The main body portion 201 is a portion disposed on each of the above-described indoor work support 104, input work support 140, and discharge work support 150, and is formed by shaping a material with a low thermal conductivity, such as a resin material, into a flat plate shape. In the present embodiment, the main body portion 201 is formed into a rectangular frame-shaped body having a rectangular through-hole in plan view.

[0070] The placement portion 202 is a portion on which the object under test WK is placed and supported, and is formed to protrude on the upper surface of the main body portion 201. Specifically, the placement portion 202 is formed in a resin block shape having concave portions into which the four corners of the object under test WK are respectively fitted, and is attached on the upper surface of the main body portion 201.

[0071] The pressure-receiving portion 203 is a portion against which the pressing body 133 is pressed, and is formed by shaping a material having wear resistance, such as a metal material, into a plate shape. This pressure-receiving portion 203 is attached at the position on the main body portion 201 placed on each of the indoor work support 104, input work support 140, and discharge work support 150 where the pressing body 133 is pressed.

[0072] (Operation of the environmental test apparatus 100) Next, the operation of the environmental test apparatus 100 configured as described above will be described with reference to FIGS. 6 to 12. In FIGS. 6 to 12, only the configurations directly necessary for explaining the operation of the environmental test apparatus 100 are illustrated, and the configurations not directly related to the operation explanation are appropriately omitted from the illustration. This environmental test apparatus 100 is installed on the floor surface in a printed wiring board manufacturing factory, which is the object under test WK.

[0073] An operator conducting an environmental test on a test object WK activates the control device 160 by turning on a power switch (not shown) on the environmental testing device 100. This causes the control device 160 to start operation by executing a control program pre-stored in a storage device such as a ROM, and enters a standby state where it waits for instructions from the operator. In this case, the control device 160 sets the test chamber 101 to a basic state. Here, the basic state refers to a closed state in which the test chamber 101 is closed by closing the input-side blocking body 110 and the discharge-side blocking body 120, with the heat insulating section 132a of the pair of conveying shafts 130 positioned directly below the input-side opening 102 and the heat insulating section 132b positioned directly below the discharge-side opening 103.

[0074] First, the control device 160 controls the operation of the vertical movement drive device 113 and the vertical movement drive device 123 to raise the input-side blocking body 110 and the discharge-side blocking body 120, respectively, to open the input-side opening 102 and the discharge-side opening 103, and also controls the operation of the rotation mechanism 135 to tilt the pushing bodies 133 on the pair of conveying shafts 130. Next, the control device 160 controls the operation of the advance / retract mechanism 136 (actuator 138) to advance and retract the pair of conveying shafts 130, thereby positioning the heat insulating section 132a on each conveying shaft 130 so that it is located directly below the input-side opening 102 and the heat insulating section 132b so that it is located directly below the discharge-side opening 103.

[0075] Next, the control device 160 controls the operation of the vertical movement drive device 113 and the vertical movement drive device 123 to lower the input-side blocking body 110 and the discharge-side blocking body 120, respectively, to block the input-side opening 102 and the discharge-side opening 103, respectively. In this case, the conveying shaft fitting portions 115, 125 of the input-side blocking body 110 and the discharge-side blocking body 120 are fitted into the upper half of the conveying shaft 130, respectively. Furthermore, the input-side blocking body 110 and the discharge-side blocking body 120 are strongly pressed against the side surfaces 101a, 101b of the test chamber 101, respectively, as the rollers 110a, 120a are guided by the approach portions 112b, 122b formed at the lower ends of the guide grooves 112a, 122a, respectively.

[0076] As a result, as shown in FIG. 6, the laboratory 101 becomes a closed state in which leakage of cold air inside the laboratory 101 to the outside is suppressed and high airtightness is ensured. Note that the closed state of the laboratory 101 may be a completely airtight state, or may be an airtight state that allows slight air circulation between the inside and outside of the laboratory 101.

[0077] Next, the operator sets the inside of the laboratory 101 to a temperature environment for performing an environmental test on the object under test WK. Specifically, the operator operates the operation panel 161 to set the temperature inside the laboratory 101 for the control device 160. Thereby, the control device 160 controls the operation of the cooling device to introduce cooling air into the laboratory 101 as cold air and cool the inside of the laboratory 101. In the present embodiment, the control device 160 sets the inside of the laboratory 101 to -40°C.

[0078] Next, when the inside of the laboratory 101 is set to a predetermined temperature environment, the operator supplies the object under test WK to the laboratory 101. Specifically, the operator instructs the control device 160 via the operation panel 161 to start a series of operations for the environmental test of the object under test WK. In response to this instruction, the control device 160 starts operating by executing a control program stored in advance in a storage device such as a ROM. Specifically, the control device 160 waits for the supply of the object under test WK to the input-side work support 140.

[0079] Next, the operator starts the operation of the work supply device and starts supplying the object under test WK to the input-side work support 140. In this case, as shown in FIG. 7(A), the work supply device supplies the work pallet 200 on which the object under test WK is placed to the input area E1 of the object under test WK on the input-side work support 140. Here, the input area E1 is an area on the work supply device side of the input-side work support 140.

[0080] When the control device 160 detects the supply of the object under test WK to the input-side work support 140 with a sensor (not shown), it executes positioning processing of the object under test WK into the test chamber 101. Specifically, as shown in FIG. 7(B), the control device 160 controls the operations of the vertical drive device 113 and the vertical drive device 123 to raise the input-side closing body 110 and the discharge-side closing body 120, respectively, to open the input-side opening 102 and the discharge-side opening 103, respectively.

[0081] Next, as shown in FIG. 7(C), the control device 160 controls the operation of the rotation mechanism 135 to set each push body 133 on the pair of transfer shafts 130 in an upright posture, and then controls the operation of the advance / retreat mechanism 136 (actuator 138) to displace the transfer shafts 130 toward the test chamber 101 side. As a result, the work pallet 200 placed on the input-side work support 140 slides on the input-side work support 140 as the pair of push bodies 133 press the pressure receiving portion 203 and is displaced toward the test chamber 101 side.

[0082] In this case, the work pallet 200 transfers from the input-side work support 140 onto the indoor-side work support 104 in the regions before and after the input-side opening 102. Further, as shown in FIG. 8(A), the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) so as to position the work pallet 200 in a predetermined test area E2 where an environmental test is performed in the test chamber 101. As a result, the work pallet 200 is positioned in the test area E2 where an environmental test is performed in the test chamber 101.

[0083] Next, the control device 160 controls the operation of the rotation mechanism 135 to set each push body 133 on the pair of transfer shafts 130 in an inclined posture. Then, the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) to displace the transfer shafts 130 toward the work supply device side. In this case, the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) so that the heat insulation portion 132a on the transfer shaft 130 is positioned directly below the input-side opening 102 and the heat insulation portion 132b is positioned directly below the discharge-side opening 103.

[0084] Then, the control device 160 controls the operation of the vertical movement drive device 113 and the vertical movement drive device 123 to lower the input-side blocking body 110 and the discharge-side blocking body 120, respectively, to block the input-side opening 102 and the discharge-side opening 103, respectively. In other words, the environmental testing device 100 can minimize the time that the input-side blocking body 110 and the discharge-side blocking body 120 are open, thereby suppressing the leakage of cold air and the intrusion of moisture within the test chamber 101. As a result, the test chamber 101 is kept in a closed state in which leakage of cold air within the test chamber 101 to the outside is suppressed and high airtightness is ensured.

[0085] Next, the control device 160 controls the operation of the workpiece testing device to perform an environmental test on the test object WK. Here, the environmental test is to check the electrical operation of the test object WK in an atmosphere of -40°C. The test contents of this environmental test are set appropriately according to the specifications of the test object WK and are well known, so a description thereof will be omitted.

[0086] Next, when the environmental test of the test object WK is completed, the control device 160 removes the test object WK from the test chamber 101. Specifically, as shown in FIG. 8(B), the control device 160 controls the operation of the vertical movement drive device 113 and the vertical movement drive device 123 to raise the input side blocking body 110 and the discharge side blocking body 120, respectively, and open the input side opening 102 and the discharge side opening 103, respectively. Note that in this case, a new test object WK is supplied to the input area E1 during the environmental test of the test object WK in the test chamber 101.

[0087] Next, the control device 160 controls the operation of the rotation mechanism 135 to set each of the push bodies 133 on the pair of conveying shafts 130 in an upright position, and then controls the operation of the advancing and retreating mechanism 136 (actuator 138) to displace the conveying shafts 130 toward the workpiece discharge device. As a result, the pair of push bodies 133 press the pressure receiving portion 203, causing the work pallet 200 placed on the indoor-side workpiece support body 104 to slide on the indoor-side workpiece support body 104 and displace toward the discharge-side opening 103.

[0088] In this case, the work pallet 200 moves from the indoor work support 104 onto the discharge-side work support 150 in the regions before and after the discharge-side opening 103. Further, the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) so as to position the work pallet 200 at the gripping position of the work pallet 200 by the work discharge control device on the discharge-side work support 150. Thereby, as shown in FIG. 8(C), the work pallet 200 is positioned in the discharge area E3 which is the gripping position of the work pallet 200 by the work discharge control device on the discharge-side work support 150. In this case, the work pallet 200 arranged in the loading area E1 is positioned in the standby area E4 immediately before the test area E2 in the test chamber 101.

[0089] Next, the control device 160 controls the operation of the rotation mechanism 135 to incline each pusher 133 on the pair of transport shafts 130. Next, the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) to displace the transport shaft 130 toward the work supply device side. In this case, since each pusher 133 is in an inclined posture, the transport shaft 130 does not displace the work pallets 200 respectively placed on the indoor work support 104 and the discharge-side work support 150.

[0090] Then, as shown in FIG. 9(A), the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) so that the heat insulation part 132a on the transport shaft 130 is positioned directly below the loading-side opening 102 and the heat insulation part 132b is positioned directly below the discharge-side opening 103. Thereby, a state is achieved in which a new object under test WK can be arranged in the loading area E1. Therefore, as shown in FIG. 9(B), when a new work pallet 200 is immediately arranged in the loading area E1 by the work supply device, the control device 160 controls the operation of the rotation mechanism 135 to set each pusher 133 on the transport shaft 130 to the upright posture, and then controls the operation of the advance / retreat mechanism 136 (actuator **********) to displace the transport shaft 130 toward the work discharge device side.

[0091] That is, as shown in FIG. 9(C), the control device 160 transfers the work pallet 200 existing in the loading area E1 to the standby area E4, and transfers the work pallet 200 existing in the standby area E4 to the test area E2. Next, as shown in FIG. 10, the control device 160 controls the operation of the rotation mechanism 135 to incline each pressing body 133 on the transfer shaft 130, and then controls the operation of the advance / retreat mechanism 136 (actuator 138) to displace the transfer shaft 130 toward the work supply device side. In this case, the control device 160 controls the operation of the advance / retreat mechanism 136 (actuator 138) such that the heat insulation part 132a on the transfer shaft 130 is positioned directly below the input side opening 102 and the heat insulation part 132b is positioned directly below the discharge side opening 103.

[0092] Then, the control device 160 controls the operations of the vertical drive device 113 and the vertical drive device 123 to lower the input side closing body 110 and the discharge side closing body 120 respectively, to close the test chamber 101, and then executes an environmental test on the object under test WK in the test area E2. On the other hand, in the emptied loading area E1, a new work pallet 200 is supplied by the work supply device. Also, in the discharge area E3, the work pallet 200 on which the object under test WK that has undergone the environmental test is placed is removed from the discharge side work support 150. The object under test WK removed from the discharge side work support 150 is guided to the next process.

[0093] After this, each time the control device 160 executes an environmental test on the object under test WK in the test area E2, it performs operations such as supplying the work pallet 200 to the loading area E1, transferring the work pallet 200 in the loading area E1 to the standby area E4, transferring the work pallet 200 in the standby area E4 to the test area E2, transferring the work pallet 200 in the test area E2 to the discharge area E3, and removing the work pallet 200 in the discharge area. Thereby, the control device 160 can intermittently supply the object under test WK into the test chamber 101 and perform an environmental test.

[0094] As can be understood from the above operation description, according to the above embodiment, the transport shaft 130 that supports the pushing body 133 for pushing the object under test WK rotates around its axis by the rotation mechanism 135 and moves forward and backward with respect to the input side opening 102 and the discharge side opening 103 by the forward and backward mechanism 136 (actuator 138). Therefore, the object under test WK can be quickly taken in and out of the test chamber 101. In particular, in the environmental test apparatus 100 that performs a low-temperature test, suppressing the leakage of cold air in the test chamber 101 and the entry of moisture into the test chamber 101 can greatly improve the efficiency and accuracy of the test work.

[0095] Furthermore, in implementing the present invention, it is not limited to the above embodiment, and various modifications are possible without departing from the object of the present invention.

[0096] For example, in the above embodiment, the test chamber 101 is provided with an input side opening 102 and a discharge side opening 103, respectively, and is configured such that the object under test WK passes through the test chamber 101 in one direction. That is, the input side opening 102 and the discharge side opening 103 correspond to the access ports in the present invention. However, the test chamber 101 can also be configured to take in and out the object under test WK through an access port formed by one opening. In this case, since there is one access port, the input side closing body 110 and the discharge side closing body 120 can be constituted by one closing body that opens and closes one access port. Also, in this case, since the transport shaft 130 moves back and forth with respect to the test chamber 101 to take in and out the work pallet 200, it is preferable to provide the pushing body 133 so as to sandwich the work pallet 200 on both sides in the reciprocating displacement direction of the transport shaft 130 with respect to the work pallet 200.

[0097] In addition, in the above-described embodiment, the environmental test apparatus 100 is configured to support the work pallet 200 by including the indoor-side work support 104, the input-side work support 140, and the discharge-side work support 150. However, the environmental test apparatus 100 can also be configured to directly support the work pallet 200 by the transport shaft 130 while omitting the indoor-side work support 104, the input-side work support 140, and the discharge-side work support 150. In this case, the work pallet 200 will always reciprocate and displace integrally with the transport shaft 130. Further, when the transport shaft 130 rotates around its axis, it will slide relative to the work pallet 200.

[0098] In addition, in the above-described embodiment, the indoor-side work support 104, the input-side work support 140, and the discharge-side work support 150 are respectively arranged before and after the input-side opening 102 and the discharge-side opening 103 and configured to be unconnected to each other. However, the indoor-side work support 104, the input-side work support 140, and the discharge-side work support 150 can also be integrally connected and configured as one work support. In this case, the input-side closing body 110 and the discharge-side closing body 120 may be provided with concave fitting portions such as the transport shaft fitting portions 115 and 125 in order to avoid physical interference with the integrated work support.

[0099] In addition, in the above-described embodiment, the transport shaft 130 is configured to have a non-contact arrangement relationship with respect to the work pallet 200. Thereby, the environmental test apparatus 100 can prevent the position of the work pallet 200 from changing as the transport shaft 130 moves, and can improve the transport accuracy of the object under test WK and the accuracy of the environmental test. However, the transport shaft 130 can also be configured to have a contact arrangement relationship with respect to the work pallet 200.

[0100] Furthermore, in the above embodiment, the environmental testing apparatus 100 is configured to include two conveying shafts 130 in the width direction of the work pallet 200. This allows the environmental testing apparatus 100 to stably convey the work pallet 200 in the conveying direction. However, the environmental testing apparatus 100 may be configured to include at least one conveying shaft 130. Note that the environmental testing apparatus 100 can improve the stability of conveying the work pallet 200 by configuring it to include at least two or more conveying shafts 130.

[0101] In the above embodiment, the conveying shaft 130 is configured with three main body portions 131a, 131b, and 131c and two heat insulating portions 132a and 132b. In this case, the heat insulating portions 132a and 132b are configured with a material (resin material) having a lower thermal conductivity than the material (metal material) configuring the main body portions 131a to 131c. Therefore, the conveying shaft 130 can suppress the transfer of heat between the inside and outside of the test chamber 101, thereby efficiently improving the accuracy of the environmental test. However, the conveying shaft 130 can also be formed into a single rod shape using a single material such as a metal material or a resin material.

[0102] In the above embodiment, the test chamber 101 is configured to be freely openable and closable, and includes the input-side blocking body 110 and the discharge-side blocking body 120. However, the test chamber 101 can also be configured to be always open by omitting the input-side blocking body 110 and the discharge-side blocking body 120.

[0103] In the above embodiment, the input side blocking body 110 and the discharge side blocking body 120 are formed as plates that can be displaced in the vertical direction. However, the input side blocking body 110 and the discharge side blocking body 120 may be configured to slide horizontally, or may be configured to open and close like a door, with one side of the input side blocking body 110 and the discharge side blocking body 120 as the center of rotation. The input side blocking body 110 and the discharge side blocking body 120 may be configured from a single material, such as only a metal material or only a resin material, or may be configured from one or more sheets.

[0104] In addition, in the above embodiment, the input-side closing body 110 and the discharge-side closing body 120 are configured to include the conveyance shaft fitting portions 115 and 125, respectively. Thereby, the input-side closing body 110 and the discharge-side closing body 120 can open and close the input-side closing body 110 and the discharge-side closing body 120 in a state where the conveyance shaft 130 straddles the input-side opening 102 and the discharge-side opening 103 without removing the conveyance shaft 130 from the input-side opening 102 and the discharge-side opening 103, respectively, and the work of taking in and out the object under test WK can be efficiently performed. However, the input-side closing body 110 and the discharge-side closing body 120 can also be configured by omitting the conveyance shaft fitting portions 115 and 125, respectively. In this case, the input-side closing body 110 and the discharge-side closing body 120 can be closed until the lower end portions come into contact with the conveyance shaft 130 or a position immediately before contact. Further, the input-side closing body 110 and the discharge-side closing body 120 can also be made of a material that elastically deforms when contacting the conveyance shaft 130.

[0105] In addition, in the above embodiment, the rotation mechanism 135 is configured to reciprocally rotate the pusher 133 around the axis of the conveyance shaft 130. However, the rotation mechanism 135 can also rotate the pusher 133 in one direction around the axis of the conveyance shaft 130.

[0106] In addition, in the above embodiment, the reciprocating mechanism 136 is constituted by a linear guide actuator. However, the reciprocating mechanism 136 only needs to be configured so that the conveyance shaft 130 can be reciprocally displaced in the conveyance direction of the object under test WK. Therefore, the reciprocating mechanism 136 can be constituted by a belt feed mechanism, a linear guide feed mechanism, an air cylinder, a hydraulic cylinder, or the like instead of the feed screw mechanism.

[0107] In addition, in the above embodiment, the environmental test apparatus 100 is configured to place the object under test WK on the work pallet 200 and perform conveyance and environmental testing. However, the environmental test apparatus 100 can also be configured to directly perform conveyance and environmental testing without using the work pallet 200 for the object under test WK.

[0108] In addition, in the above-described embodiment, the environmental test apparatus 100 is configured to perform an environmental test on the object under test WK in an atmosphere of -40°C. However, the environmental test apparatus 100 may be configured to perform an environmental test on the object under test WK in a high-temperature atmosphere, or may be configured to perform a test in an environment other than the temperature environment, for example, at least one environment among humidity, pressure, and gas concentration.

Explanation of Reference Numerals

[0109] WK... Object under test, E1... Loading area, E2... Test area, E3... Discharge area, E4... Standby area, 100... Environmental test apparatus, 101... Test chamber, 101a, 101b, 101c, 101d... Sides, 102... Loading-side opening, 103... Discharge-side opening, 104... Indoor work support, 105... Conveyor bearing, 105a... Sliding fitting part, 110... Loading-side closing body, 110a... Roller, 111... Closing body drive mechanism, 112... Guide body, 112a... Guide groove, 112b... Approaching part, 113... Up-and-down drive device, 114... Connecting tool, 115... Conveyor shaft fitting part, 115a... Adjustment hole, 115b... Bolt, 120... Discharge-side closing body, 120a... Roller, 121... Closing body drive mechanism, 122... Guide body, 122a... Guide groove, 122b... Approaching part, 123... Up-and-down drive device, 124... Connecting tool, 125... Conveyor shaft fitting part, 125a... Adjustment hole, 125b... Bolt, 130... Conveyor shaft, 131a, 131b, 131c... Main body part, 132a, 132b... Heat insulation part, 133... Pushing body, 134... Shaft support, 135... Rotation mechanism, 136... Forward and backward movement mechanism, 137... Guide, 138... Actuator, 140... Loading-side work support, 150... Discharge-side work support, 160... Control device, 161... Operation panel, 200... Work pallet, 201... Main body part, 202... Placing part, 203... Pressure receiving part.

Claims

1. An environmental test apparatus that includes a test chamber for accommodating a test object and performs a test on the test object in the environment within the test chamber, an access opening provided to open into the test chamber for inserting and removing the test object, a pushing body for pushing the test object toward the access opening side, a transport shaft formed to extend in a rod shape and having the pushing body on an outer peripheral portion thereof, a rotation mechanism for rotating the transport shaft around an axis, and a reciprocating mechanism for reciprocating the transport shaft with respect to the access opening. The environmental test apparatus is characterized by comprising these components.

2. In the environmental test apparatus according to Claim 1, the transport shaft, is provided in two or more numbers. The environmental test apparatus is characterized by this.

3. In the environmental test apparatus according to Claim 1, further, it is provided with a closing body that can freely open and close the access opening. The environmental test apparatus is characterized by this.

4. In the environmental test apparatus according to Claim 3, the transport shaft, is arranged in a state of always straddling the access opening, and the closing body, has a transport shaft fitting portion into which the portion of the transport shaft straddling the access opening fits. The environmental test apparatus is characterized by this.

5. In the environmental test apparatus according to Claim 4, the transport shaft, is made of a material having a lower thermal conductivity than the materials constituting the portions before and after the portion straddling the access opening. The environmental test apparatus is characterized by this.

6. In the environmental test apparatus according to Claim 1, further, it has a work support for supporting the test object at positions before and after with respect to the access opening, and the transport shaft is provided in a non-contact state with respect to the test object. The environmental test apparatus is characterized by this.

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