Flat panel manufacturing system and robot control device used for the same

Abstract

To provide a flat panel manufacturing system capable of preventing a collision in the vicinity of an opening part of a chamber in which a transfer robot is disposed by appropriately causing a tip end of a holding part that holds a workpiece in the transfer robot to enter the opening part, and provide a robot control device used for the flat panel manufacturing system.SOLUTION: A flat panel manufacturing system 1 includes: marks 41 and 42 disposed between a first chamber TC and a second chamber PC; a sensor device 30 disposed in a holding part 22 of a transport robot 20; detection means 120 that detects the marks 41 and 42 by the sensor device 30 when the holding part 22 is caused to enter an opening par 50 of the first chamber TC; and entry determination means 140 that determines whether or not the holding unit 22 is caused to enter the opening part 50 based on a detection situation of the marks 41 and 42.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a flat panel manufacturing system and a robot controller used therein. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, although Patent Document 1 specifies the upper end position of the opening between the transfer chamber and the load lock chamber, it does not take into consideration the positional relationship between the lateral direction (width direction) of the opening and the transfer device.

[0007] Therefore, the present invention aims to provide a flat panel manufacturing system and a robot control device used therein that can prevent collisions near the opening of a chamber in which a transport robot is located by appropriately inserting the tip of the holding part that holds the workpiece on the transport robot into the opening. [Means for solving the problem]

[0008] A flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels and includes a transport robot that transports workpieces, a first chamber in which the transport robot is located, and a second chamber that is located adjacent to the first chamber and faces the opening of the first chamber, and further includes a marker that is located between the first chamber and the second chamber to correspond to the opening of the first chamber, a sensor device that is located on a holding unit of the transport robot that holds the workpiece, a robot control means that controls the operation of the transport robot, a detection means that detects the marker using the sensor device when the robot control means operates the holding unit of the transport robot from the first chamber toward the second chamber to enter the opening of the first chamber, and an entry determination means that determines whether or not to allow the holding unit of the transport robot to enter the opening of the first chamber based on the detection status of the marker by the detection means.

[0009] According to this aspect, a mark is placed between the first chamber and the second chamber to correspond to the opening of the first chamber, and a sensor device is placed on the holding unit of the transfer robot that holds the workpiece. When the holding unit of the transfer robot is operated from the first chamber toward the second chamber to enter the opening of the first chamber, the detection means detects the mark using the sensor device and determines whether or not to enter the holding unit of the transfer robot into the opening of the first chamber based on the detection status of the mark. This makes it possible to appropriately determine whether or not to enter when the holding unit of the transfer robot is operated from the first chamber toward the second chamber to enter the opening of the first chamber, thereby preventing a collision near the opening.

[0010] In the above aspect, the robot control means may cause the holding part of the transport robot to enter the opening of the first chamber if the entry determination means determines that entry should be allowed, and may stop the transport robot due to an inclination abnormality if the entry determination means determines that entry should not be allowed.

[0011] According to this aspect, if the entry determination means determines that entry should be allowed, the holding part of the transport robot is allowed to enter the opening of the first chamber, and if the entry determination means determines that entry should not be allowed, the transport robot is stopped due to an abnormal tilt, thereby more appropriately preventing collisions near the opening.

[0012] In the above aspect, the device may further include a tilt calculation means for calculating the direction in which the holding part of the transport robot enters the opening of the first chamber and the tilt relative to the opening based on the mark detected by the detection means, and the entry determination means may determine whether or not to allow the holding part of the transport robot to enter the opening of the first chamber based on the tilt calculated by the tilt calculation means.

[0013] According to this aspect, the tilt calculation means calculates the direction in which the holder of the transport robot enters the opening of the first chamber and the tilt of the opening, based on the mark detected by the detection means.The entry determination means then determines whether or not to allow the holder of the transport robot to enter the opening of the first chamber, based on the tilt calculated by the tilt calculation means.Therefore, when the holder of the transport robot is moved from the first chamber toward the second chamber to enter the opening of the first chamber, it is possible to appropriately determine whether or not to allow entry, and more appropriately prevent collisions near the opening.

[0014] In the above aspect, the entry determination means may operate the transport robot by the robot control means so that, if the inclination is less than a threshold value, the holding part of the transport robot moves from the first chamber toward the second chamber to enter the opening of the first chamber, and if the inclination is greater than or equal to the threshold value, the robot control means operates the transport robot so that the entry direction of the holding part of the transport robot is changed.

[0015] According to this aspect, the entry determination means allows the transport robot to enter the opening of the first chamber if the inclination is less than the threshold value, and operates the transport robot so that the entry direction of the transport robot is changed if the inclination is greater than or equal to the threshold value, thereby allowing the transport robot to enter the opening appropriately while preventing collisions near the opening.

[0016] In the above embodiment, the indicia may be located within the first chamber.

[0017] According to this aspect, the marker is placed inside the first chamber, allowing the transport robot to pass through the opening of the first chamber more appropriately while preventing collisions near the opening of the first chamber.

[0018] A robot control device according to one embodiment of the present invention is a robot control device that controls the operation of a transport robot used in a flat panel manufacturing system that manufactures flat panels, and includes: a robot control means that controls the operation of the transport robot; a detection means that, when the robot control means operates the holding unit of the transport robot that holds the workpiece to enter the opening of the first chamber from the first chamber in which the transport robot is located toward a second chamber that is located adjacent to the first chamber and faces the opening of the first chamber, detects a marker that is located between the first chamber and the second chamber so as to correspond to the opening of the first chamber using a sensor device that is located on the holding unit of the transport robot; and an entry determination means that determines whether or not to allow the holding unit of the transport robot to enter the opening of the first chamber based on the detection status of the marker by the detection means.

[0019] According to this aspect, when the holder of the transfer robot is moved from the first chamber toward the second chamber to enter the opening of the first chamber, the detection means detects a mark placed between the first chamber and the second chamber corresponding to the opening of the first chamber using a sensor device disposed on the holder of the transfer robot, and determines whether or not to enter the holder of the transfer robot into the opening of the first chamber based on the detection status of the mark. As a result, when the holder of the transfer robot is moved from the first chamber toward the second chamber to enter the opening of the first chamber, it is possible to appropriately determine whether or not to enter, thereby preventing a collision near the opening. [Effects of the Invention]

[0020] According to the present invention, it is possible to provide a flat panel manufacturing system and a robot control device used therein that can prevent collisions near the opening of a chamber in which a transport robot is located by appropriately inserting the tip of the holding part that holds the workpiece on the transport robot into the opening. [Brief explanation of the drawings]

[0021] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a sensor device 30 is arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] 1 is a schematic diagram showing a state in which the transfer robot 20 enters the gate 50 (opening) from the transfer chamber TC toward the process chamber PC. [Figure 7] 1 is a flowchart showing the flow of processing in a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0022] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0023] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0024] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0025] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0026] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0027] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transported by the transport robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with a plurality of pins so that the workpiece W is supported by the pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0028] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0029] As described with reference to FIGS. 1 and 2 , the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1 and transfers a workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is, for example, a horizontal articulated robot intended to transfer glass substrates, and is a clean transfer robot used for transfers in clean environments in the manufacturing of semiconductor devices and flat panel displays, the medical and food industries, and the like. In this embodiment, the transfer robot 20 is, for example, a two-axis or three-axis cylindrical coordinate system, and has a hand holder 21 and fingers 22 as end effectors. The transfer of the workpiece W (e.g., a glass substrate) while held by the fingers 22 will be described as an example.

[0030] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0031] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0032] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0033] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0034] At this time, the finger 22 holding the workpiece W must pass through the gates (openings) that are the entrances and exits to the transfer chamber TC and the load lock chamber LLC, which are the boundaries between the transfer chamber TC and the load lock chamber LLC, and the gates (openings) that are the entrances and exits to the transfer chamber TC and the process chamber PC, which are the boundaries between the transfer chamber TC and the process chamber PC, while avoiding collisions.

[0035] The robot control device 100 can properly determine the gate (opening) of the transfer chamber TC and allow the finger 22 holding the workpiece W to pass through the gates (openings) that serve as entrances and exits to the transfer chamber TC and the load lock chamber LLC and the gates (openings) that serve as entrances and exits to the transfer chamber TC and the process chamber PC. In other words, it is important to properly determine the gate (opening) of the transfer chamber TC, and a method for using a sensor device to determine the gate (opening) of the transfer chamber TC and properly move the finger 22 into the gate (opening) of the transfer chamber TC will be described below.

[0036] 4 is a schematic diagram showing a state in which a sensor device 30 is disposed on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 4, the sensor device 30 is disposed at the tip of a finger 22 attached to a hand holder 21 in the transfer robot 20. The sensor device 30 disposed at the tip of the finger 22 is calibrated, and the robot control device 100 is aware of the position of the sensor device 30 (the positions of two sensors 31 and 32, which will be described later), and is also able to understand the position of a simulated pin (mark) detected by the sensor device 30 (robot coordinate system).

[0037] The sensor device 30 includes two sensors 31 and 32, which may be, for example, a camera and an optical sensor.

[0038] The two sensors 31 and 32 are attached to the back surface of the sensor device 30. The sensor device 30 is placed and held on the tip of the finger 22 of the transfer robot 20, so that the two sensors 31 and 32 can sense the downward direction.

[0039] Specifically, each of the two sensors 31 and 32 may have a camera and an optical sensor, and the camera may detect the XY coordinate position (position on a plane perpendicular to the vertical direction) and the optical sensor may detect the Z coordinate position (position in the vertical direction). Alternatively, each of the two sensors 31 and 32 may have a stereo camera, and the stereo camera may detect the XYZ coordinates.

[0040] Furthermore, the sensor device 30 may also include a control unit and a communication unit, and may notify the robot control device 100 of information detected (acquired) by the two sensors 31 and 32, for example.

[0041] [Robot control device configuration] 5 is a functional block diagram showing the functions of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a detection means 120, an inclination calculation means 130, and an entry determination means 140, and controls the operation of the transfer robot 20.

[0042] The robot control device 100 moves the hand holder 21 (fingers 22) holding the sensor device 30 from the transfer chamber TC toward the process chamber PC, and detects the gate (opening) of the transfer chamber TC using the two sensors 31, 32 of the sensor device 30. Then, based on the result of the detection, the robot control device 100 operates the transfer robot 20, taking into consideration the inclination between the moving direction of the hand holder 21 (fingers 22) of the transfer robot 20 and the gate (opening) of the transfer chamber TC.

[0043] 3, the robot control device 100 is connected to the transfer robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a function for operating the transfer robot 20 in consideration of the direction of travel of the hand holder 21 (fingers 22) in the transfer robot 20 and the inclination of the gate (opening) of the transfer chamber TC, but it also has other configurations and functions.

[0044] The robot control means 110 operates the transfer robot 20. For example, the transfer robot 20 is in a state where the sensor device 30 is held by the fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20. The two sensors 31 and 32 attached to the sensor device 30 are configured to be able to detect a dummy pin (marker) placed in the transfer chamber TC so as to correspond to the gate (opening) of the transfer chamber TC.

[0045] The dummy pins (markers) are arranged in the transfer chamber TC at a height lower than the height at which the fingers 22 pass, so as not to collide with the fingers 22. Details of the dummy pins (markers) will be described later.

[0046] When the robot control means 110 operates the hand holder 21 (finger 22: holding part) of the transport robot 20 from the transfer chamber TC (first chamber) toward the process chamber PC (second chamber) and causes it to enter the gate (opening) of the transfer chamber TC (first chamber), the detection means 120 detects a dummy pin (marker) using two sensors 31, 32 in the sensor device 30.

[0047] Based on the dummy pin detected by the detection means 120, the inclination calculation means 130 calculates the direction in which the finger 22 of the transport robot 20 enters the gate of the transfer chamber TC and the inclination of the gate.

[0048] The entry determination means 140 determines whether or not the finger 22 of the transport robot 20 should enter the gate of the transfer chamber TC based on the inclination calculated by the inclination calculation means 130.

[0049] For example, if the inclination calculated by the inclination calculation means 130 is less than a threshold value (e.g., 90 degrees ± 0.1 degrees to 2 degrees), the entry determination means 140 determines that the finger 22 should enter the gate of the transfer chamber TC, and the robot control means 110 operates the hand holder 21 (finger 22) of the transport robot 20 from the transfer chamber TC toward the process chamber PC.

[0050] On the other hand, if the inclination calculated by the inclination calculation means 130 is equal to or greater than the threshold value, the entry determination means 140 determines that the fingers 22 should not enter the gate of the transfer chamber TC, and causes the robot control means 110 to operate the transfer robot 20 so that the entry direction of the fingers 22 of the transfer robot 20 is changed. Specifically, the robot control means 110 rotates the hand holder 21 of the transfer robot 20 so that the direction of travel of the hand holder 21 (fingers 22) becomes 90 degrees with respect to the gate of the transfer chamber TC (so that it is at least less than the threshold value (for example, 90 degrees ±0.1 degrees to 2 degrees)).

[0051] [About the operation of the transport robot] 6 is a schematic diagram showing the transfer robot 20 entering the gate 50 (opening) from the transfer chamber TC toward the process chamber PC. As shown in Fig. 6, two dummy pins (markers) 41 and 42 are arranged in the transfer chamber TC so as to correspond to the gate 50 of the transfer chamber TC. In addition, a sensor device 30 is arranged at the tip of the finger 22 of the transfer robot 20, and two sensors 31 and 32 are attached to the sensor device 30.

[0052] For example, two dummy pins (markers) 41 and 42 are arranged in the transfer chamber TC near both ends of the gate 50 of the transfer chamber TC and parallel to the gate 50 of the transfer chamber TC. In other words, if a line segment 43 is drawn connecting the dummy pins 41 and 42, the line segment 43 will be parallel to the gate 50.

[0053] The hand holder 21 of the transfer robot 20 moves from the transfer chamber TC toward the process chamber PC with the sensor device 30 held at the tip of the finger 22. Then, just before the tip of the finger 22 reaches the gate 50, the two sensors 31 and 32 detect the two dummy pins 41 and 42, respectively. Specifically, as the tip of the finger 22 approaches the gate 50 and the tip of the finger 22, holding the sensor device 30, is about to pass above the two dummy pins 41 and 42, the sensor 31 detects the dummy pin 41, and the sensor 32 detects the dummy pin 42.

[0054] In this way, when two dummy pins 41, 42 are detected by two sensors 31, 32 respectively, the information is notified from the sensor device 30 to the robot control device 100, and the robot control means 110 may stop the hand holder 21 (fingers 22) of the transport robot 20.

[0055] The robot control device 100 can grasp the position of the gate 50 of the transfer chamber TC based on the two dummy pins 41, 42 detected by the two sensors 31, 32. Specifically, it can calculate the line segment 43 connecting the dummy pins 41 and 42, and can grasp the opening direction (inclination) of the gate 50 of the transfer chamber TC, which is parallel to the line segment 43.

[0056] Then, the robot control device 100 determines how the hand holder 21 (fingers 22) of the transfer robot 20 will enter the gate 50 of the transfer chamber TC. Typically, it is preferable that the hand holder 21 (fingers 22) of the transfer robot 20 enter the gate 50 of the transfer chamber TC in a direction perpendicular to the gate 50.

[0057] Therefore, the robot control device 100 determines whether the inclination between the moving direction of the hand holder 21 (fingers 22) of the transfer robot 20 and the line segment 43 is less than a threshold value (for example, 90 degrees ±0.1 degrees to 2 degrees). If it is less than the threshold value, the hand holder 21 (fingers 22) of the transfer robot 20 may be allowed to move from the transfer chamber TC toward the process chamber PC. On the other hand, if it is equal to or greater than the threshold value, the hand holder 21 of the transfer robot 20 may be rotated so that the inclination between the moving direction of the hand holder 21 (fingers 22) and the line segment 43 becomes 90 degrees, and is at least less than the threshold value (for example, 90 degrees ±0.1 degrees to 2 degrees), and then the hand holder 21 (fingers 22) of the transfer robot 20 may be allowed to move from the transfer chamber TC toward the process chamber PC.

[0058] Furthermore, if the inclination between the direction of travel of the hand holder 21 (finger 22) in the transport robot 20 and the line segment 43 is greater than or equal to a threshold value, it may be determined that the inclination is abnormal and the transport robot 20 may be stopped, or an operating terminal such as a teaching pendant may be notified that the inclination is abnormal.

[0059] In addition, for example, if two dummy pins 41, 42 are not detected by two sensors 31, 32 respectively (if neither is detected or only one is detected) before the tip of finger 22 reaches gate 50, it may be determined that there is an abnormal tilt, and the transport robot 20 may be stopped as described above, or an operating terminal such as a teaching pendant may be notified that there is an abnormal tilt.

[0060] [Robot control method] Next, a method for controlling the operation of the transfer robot 20 when the hand holder 21 (fingers 22) of the transfer robot 20 enters the gate 50 of the transfer chamber TC will be specifically described in detail.

[0061] 7 is a flowchart showing the processing flow of a robot control method M100 executed by a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 7, the robot control method M100 includes steps S110 to S160, and each step is executed by a processor included in the robot control device 100.

[0062] In step S110, the robot control device 100 causes the hand holder 21 (fingers 22) of the transfer robot 20, with the sensor device 30 held at the tip of the finger 22, to proceed from the transfer chamber TC toward the process chamber PC.

[0063] In step S120, the sensor device 30 detects two dummy pins 41, 42 that are arranged in the transfer chamber TC so as to correspond to the gate 50 of the transfer chamber TC. As a specific example, when the tip of the finger 22 is about to pass above the two dummy pins 41, 42, the two sensors 31, 32 that are attached to the sensor device 30 so as to be capable of sensing in the downward direction detect the two dummy pins 41, 42. Then, the robot control device 100 acquires information about the two dummy pins 41, 42 from the sensor device 30.

[0064] In step S130, the robot controller 100 calculates the inclination of the gate 50 and the moving direction of the hand holder 21 (fingers 22) of the transfer robot 20 based on the positions of the two dummy pins 41, 42. As a specific example, the robot controller 100 calculates a line segment 43 connecting the dummy pins 41 and 42, and calculates the inclination of the approach direction of the hand holder 21 (fingers 22) of the transfer robot 20 with respect to the line segment 43. Because the line segment 43 is parallel to the opening direction of the gate 50 of the transfer chamber TC, the inclination of the approach direction of the hand holder 21 (fingers 22) of the transfer robot 20 with respect to the line segment 43 can be calculated as the inclination of the approach direction of the hand holder 21 (fingers 22) of the transfer robot 20 with respect to the gate 50.

[0065] In step S140, the robot control device 100 determines whether the inclination of the approach direction of the hand holder 21 (fingers 22) of the transfer robot 20 relative to the gate 50 is less than a threshold value (for example, 90 degrees ±0.1 to 2 degrees). If it is less than the threshold value, the process proceeds to step S150 ("Yes" in step S140), and if it is not less than the threshold value, the process proceeds to step S160 ("No" in step S140).

[0066] In step S150, the robot control device 100 causes the hand holder 21 (fingers 22) of the transfer robot 20 to proceed from the transfer chamber TC toward the process chamber PC, thereby causing the hand holder 21 (fingers 22) to enter the gate 50.

[0067] In step S160, the robot control device 100 rotates the hand holder 21 of the transfer robot 20 to correct the inclination of the approach direction of the hand holder 21 (fingers 22) of the transfer robot 20 relative to the gate 50 to 90 degrees. Then, the process proceeds to step S150, and the robot control device 100 causes the hand holder 21 (fingers 22) of the transfer robot 20 to advance from the transfer chamber TC toward the process chamber PC, thereby causing it to enter the gate 50.

[0068] As described above, in the flat panel manufacturing system 1, transfer robot system 10, robot control device 100, and robot control method M100 according to one embodiment of the present invention, two dummy pins 41, 42 are arranged in the transfer chamber TC so as to correspond to the gate 50 of the transfer chamber TC, and the sensor device 30 is held by the finger 22 of the transfer robot 20. When the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC and enters the gate 50 of the transfer chamber TC, the detection means 120 detects the two dummy pins 41, 42 using the two sensors 31, 32 of the sensor device 30. Based on the two dummy pins 41, 42 detected by the detection means 120, the tilt calculation means 130 calculates the tilt between the moving direction of the hand holder 21 (fingers 22) of the transfer robot 20 and the arrangement direction (line segment 43) of the two dummy pins 41, 42. Then, the entry determination means 140 determines whether or not to allow the fingers 22 of the transfer robot 20 to enter the gate 50 of the transfer chamber TC based on the tilt calculated by the tilt calculation means 130. If the tilt is less than the threshold value, the entry determination means 140 determines that the fingers 22 should enter the gate 50 of the transfer chamber TC, and causes the robot control means 110 to operate the hand holder 21 (fingers 22) of the transfer robot 20 from the transfer chamber TC toward the process chamber PC. If the tilt is equal to or greater than the threshold value, the entry determination means 140 determines that the fingers 22 should not enter the gate 50 of the transfer chamber TC, and causes the robot control means 110 to operate the transfer robot 20 so that the entry direction of the fingers 22 of the transfer robot 20 is changed. This makes it possible to appropriately determine whether or not to enter the gate 50 of the transfer chamber TC when the hand holder 21 (fingers 22) of the transport robot 20 is operated from the transfer chamber TC toward the process chamber PC, thereby preventing a collision near the opening.

[0069] In this embodiment, the two dummy pins 41 and 42 are used as markers, but the markers are not limited to this and may be, for example, a dummy line parallel to the gate 50. That is, a dummy line equivalent to the line segment 43 as shown in FIG. 6 may be set in advance.

[0070] Furthermore, the dummy pins or dummy lines serving as markers are not limited to being arranged parallel to the gate 50, and may be arranged, for example, perpendicular to the gate 50. The sensor device 30 detects the markers arranged perpendicular to the gate 50, and the robot control device 100 determines whether the inclination between the moving direction of the hand holders 21 (fingers 22) of the transport robot 20 and the direction along the markers (direction perpendicular to the gate 50) is less than a threshold value (for example, 0 degrees ± 0.1 degrees to 2 degrees).

[0071] In this embodiment, the dummy pins and dummy lines serving as markers are arranged inside the transfer chamber TC to allow the finger 22 to properly pass through the gate 50 of the transfer chamber TC, but the dummy pins and dummy lines serving as markers may also be arranged on the process chamber PC side. If the dummy pins and dummy lines are arranged on the process chamber PC side, the finger 22 can properly enter the gate (entrance) of the process chamber PC.

[0072] In addition, in this embodiment, the two sensors 31 and 32 are attached to the back surface of the sensor device 30 and are capable of sensing in the downward direction, but the sensing direction may be upward, downward, in the approach direction, or downward in the direction of travel depending on the type of marker (the shape of the dummy pin or dummy line, etc., and their positions).

[0073] Specifically, when detecting a mark from a position far away from gate 50 (a position quite close), a sensor may be attached, for example, to the surface of sensor device 30 facing the traveling direction so that sensing is possible in the traveling direction of hand holder 21 (fingers 22) of transport robot 20. Furthermore, sensor device 30 is not limited to being held at the tip end of finger 22, but may be held, for example, at the center or base end of finger 22. Furthermore, sensor device 30 may be attached to hand holder 21, or a configuration in which the sensor is attached directly to hand holder 21 is also possible.

[0074] Furthermore, when detecting the mark from a position far away from the gate 50 (a position quite close), the hand holder 21 (fingers 22) of the transport robot 20 may be stopped at that position. This allows the hand holder 21 (fingers 22) of the transport robot 20 to reliably stop just before the gate 50 of the transfer chamber TC, and then detects the mark to determine how to approach the gate 50 of the transfer chamber TC, thereby ensuring greater safety and preventing collisions near the gate 50.

[0075] Furthermore, the number of sensors attached to the sensor device 30 is not limited to two, but may be one or three or more depending on the type of marker (shape of the dummy pin, dummy line, etc., and their position), the type of sensor, and the attachment position, etc.

[0076] Furthermore, the sensors attached to the sensor device 30 are not limited to cameras and optical sensors, but may be, for example, LiDAR or other sensors, or a combination of these, as long as they can appropriately detect the marker depending on the type of marker (the shape of the marker, such as a simulated pin or a simulated line, and their positions).

[0077] In this embodiment, the situation has been described as an example in which the hand holder 21 (fingers 22) of the transport robot 20 moves from the transfer chamber TC toward the process chamber PC and enters the gate 50 of the transfer chamber TC, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transport robot 20 moves from the transfer chamber TC toward the load lock chamber LLC and enters the gate (opening) of the transfer chamber TC, which is the boundary between the transfer chamber TC and the load lock chamber LLC.

[0078] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0079] 1...flat panel manufacturing system, 10...transport robot system, 20...transport robot, 21...hand holder, 22...finger, 30...sensor device, 31, 32...sensor, 41, 42...dummy pin (marker), 43...line segment, 50...gate, 100...robot control device, 110...robot control means, 120...detection means, 130...calculation means, 140...entry determination means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...work, M100...robot control method, S110 to S160...each step of robot control method M100

Claims

1. A flat panel manufacturing system for manufacturing flat panels, comprising: a transfer robot that transfers a workpiece; a first chamber in which the transfer robot is disposed; and a second chamber that is disposed adjacent to the first chamber so as to face an opening of the first chamber, a mark disposed between the first chamber and the second chamber so as to correspond to an opening of the first chamber; a sensor device disposed on a holder of the transport robot that holds the workpiece; a robot control means for controlling the operation of the transport robot; a detection means for detecting the mark using the sensor device when the robot control means operates the holding unit of the transfer robot from the first chamber toward the second chamber to enter the opening of the first chamber; and an entry determination means for determining whether or not to allow the holder of the transfer robot to enter the opening of the first chamber based on a detection state of the mark by the detection means. Flat panel manufacturing system.

2. The robot control means When the entry determination means determines that the robot should enter the first chamber, the holding unit of the transport robot enters the opening of the first chamber; When the entry determination means determines that the robot should not enter, the transfer robot is stopped as it is determined that the robot is inclined abnormally. The flat panel manufacturing system of claim 1 .

3. a tilt calculation unit that calculates a tilt between an approach direction in which the holder of the transfer robot approaches the opening of the first chamber and the opening based on the mark detected by the detection unit, the entry determination means determines whether or not to allow the holder of the transfer robot to enter the opening of the first chamber based on the tilt calculated by the tilt calculation means. The flat panel manufacturing system of claim 1 .

4. The entry determination means When the tilt is less than a threshold value, the robot control means operates a holding part of the transfer robot from the first chamber toward the second chamber and causes the holding part to enter an opening of the first chamber; When the tilt is equal to or greater than a threshold value, the robot control means operates the transport robot so that the approach direction of the holding unit of the transport robot is changed. The flat panel manufacturing system according to claim 3 .

5. the indicia is disposed within the first chamber; The flat panel manufacturing system of claim 1 .

6. A robot control device for controlling the operation of a transport robot used in a flat panel manufacturing system for manufacturing flat panels, a robot control means for controlling the operation of the transport robot; a detection means for detecting a mark disposed between the first chamber and the second chamber corresponding to the opening of the first chamber by a sensor device disposed on the holding part of the transport robot when the robot control means operates a holding part of the transport robot that holds a workpiece to enter the opening of the first chamber from a first chamber in which the transport robot is disposed toward a second chamber disposed adjacent to the first chamber so as to face the opening of the first chamber; and an entry determination means for determining whether or not to allow the holder of the transfer robot to enter the opening of the first chamber based on a detection state of the mark by the detection means. Robot control device.

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