X-ray diffraction measurement device and program

Abstract

To provide an X-ray diffraction measurement device for simplifying a process of generating measurement data for a diffraction ring.SOLUTION: A device includes: an X-ray tube 11 for irradiating a measuring object with X-rays; a control part 30 for switching an output value of the X-ray irradiation by the X-ray tube 11 to a value equal to or greater than a specified value and to a value less than the specified value; a detector substrate 12 capable of detecting X-rays diffracted by the measuring object irradiated with X-rays from the X-ray tube 11; a reading part 31 for intermittently reading detection values from the detector substrate 12 a plurality of times; and an instruction part 32 for instructing the control part 30 to switch the timing of the plurality of times of reading by the reading part 31 to synchronize with the timing of the irradiation of X-rays by the X-ray tube 11.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to an X-ray diffraction measurement device and a program. [Background technology]

[0002] For example, the X-ray diffraction measurement device described in Patent Document 1 below is a system that irradiates an object to be measured with X-rays and acquires measurement data of the diffraction ring by detecting the X-rays diffracted by the object to be measured. Furthermore, the X-ray diffraction measurement device can analyze the physical properties of the object to be measured based on the measurement data of the diffraction ring thus acquired.

[0003] In the above-mentioned X-ray diffraction measurement device, measurement data of the diffraction ring is generated by removing pedestal noise, which is a measurement value when X-rays are not irradiated, from a measurement value when X-rays are irradiated (hereinafter referred to as "X-ray measurement value").

[0004] Specifically, before X-ray irradiation begins, the average value of pedestal noise obtained multiple times is calculated, and after X-ray irradiation begins, X-ray measurement values are obtained multiple times while X-rays are being irradiated, and the obtained multiple X-ray measurement values are integrated. From this integrated value, the value obtained by multiplying the average value of pedestal noise by the number of times the X-ray measurement values have been integrated is removed to generate diffraction ring measurement data.

[0005] Pedestal noise refers to environmental noise such as detector temperature, sensor drive, switching noise (e.g., chip switching, switching of various power supplies), and / or various light sources (e.g., laser light, light sources in the measurement environment). [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Publication No. 2022-081823 Summary of the Invention [Problem to be solved by the invention]

[0007] In the X-ray diffraction measurement device described above, the timing of acquiring the X-ray measurement values and pedestal noise, and the timing of turning the X-ray tube on and off must be controlled separately, which makes the process of generating diffraction ring measurement data complicated.

[0008] In view of the above-mentioned problems, an object of the present invention is to provide an X-ray diffraction measurement device and a program that simplify the process of generating measurement data of diffraction rings. [Means for solving the problem]

[0009] In order to solve the above problems, the X-ray diffraction measurement device of the present invention includes an X-ray tube that irradiates an object to be measured with X-rays, a control unit that controls switching the output value of the X-ray irradiation by the X-ray tube between a predetermined value or more and a predetermined value or less, a detector board that can detect X-rays diffracted by the object to be measured irradiated with X-rays from the X-ray tube, a readout unit that intermittently reads out the detected values from the detector board multiple times, and an instruction unit that instructs the control unit to perform switching control so that the timing of the multiple readouts by the readout unit and the timing of the X-ray irradiation by the X-ray tube are synchronized.

[0010] The instruction unit also instructs the control unit to perform switching control so that the timing of some of the multiple readouts by the readout unit coincides with the timing at which the X-ray tube irradiates X-rays.

[0011] The part may be an even-numbered or odd-numbered time.

[0012] The device further includes a generation unit that removes environmental noise, which is the detection value read by the readout unit either before or after the X-ray measurement value, from each X-ray measurement value, which is the detection value read out by the readout unit in synchronization with the timing at which the X-ray tube irradiates X-rays, and generates measurement data of the diffraction ring by accumulating each X-ray measurement value from which the environmental noise has been removed.

[0013] Moreover, the generating unit removes the environmental noise from the X-ray measurement value every time the reading unit reads out the X-ray measurement value and the environmental noise.

[0014] Furthermore, the control unit transmits a pulse signal to the X-ray tube, and the X-ray tube is controlled in accordance with the pulse signal.

[0015] Furthermore, the program of the present invention causes a computer to function as a control unit that controls switching of the output value of X-ray irradiation from the X-ray tube between a predetermined value or more and a predetermined value or less, a readout unit that intermittently reads out detection values multiple times from a detector substrate that can detect X-rays diffracted by the object to be measured irradiated with X-rays from the X-ray tube, and an instruction unit that instructs the control unit to perform switching control so that the timing of the multiple readouts by the readout unit is synchronized with the timing of X-ray irradiation from the X-ray tube. [Effects of the Invention]

[0016] The X-ray diffraction measurement device and program according to the present invention can simplify the process of generating measurement data of diffraction rings. [Brief explanation of the drawings]

[0017] [Figure 1] 1 is a block diagram showing an example of the overall configuration of an X-ray diffraction measurement apparatus according to an embodiment of the present invention. [Figure 2] 2 is a block diagram showing an example of a schematic functional configuration of a portion of the X-ray diffraction measurement apparatus shown in FIG. 1. FIG. [Figure 3] 10 is a graph showing an example of synchronous control of X-ray output and sensor readout, where (a) is a graph showing the timing of X-ray output, and (b) is a graph showing the timing of sensor readout. [Figure 4] 2 is a flowchart showing an example of a process for generating measurement data of diffraction rings by the X-ray diffraction measurement apparatus shown in FIG. [Figure 5] FIG. 10 is a diagram schematically illustrating a process for removing pedestal noise from X-ray measurement values. [Figure 6] FIG. 10 is a diagram schematically illustrating a process of integrating X-ray measurement values from which pedestal noise has been removed. DETAILED DESCRIPTION OF THE INVENTION

[0018] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. To facilitate understanding of the description, the same components in the drawings will be denoted by the same reference numerals as much as possible, and duplicate descriptions will be omitted where appropriate.

[0019] === Implementation form === <Overall structure> FIG. 1 is a block diagram that schematically shows an example of the overall configuration of an X-ray diffraction measurement apparatus 1 according to an embodiment of the present invention (hereinafter referred to as "this embodiment").

[0020] As shown in Figure 1, the X-ray diffraction measurement apparatus 1 includes a measurement head 10, an xy stage 15, a zψ stage 16, a first stage controller 17, a second stage controller 18, a pulse power supply unit 19, a detector readout board 20, a readout board power supply 21, a control and analysis PC 22, and a cooling chiller 23.

[0021] The measurement head 10 is a device that emits X-rays toward a measurement object such as a gear or a shaft and measures the X-rays diffracted from the measurement object. The measurement head 10 also includes an X-ray tube 11, a detector substrate 12, and a water-cooling jig 13.

[0022] The X-ray tube 11 has a function of generating X-rays and irradiating the generated X-rays toward an object to be measured. The X-ray tube 11 is also connected to a pulse power supply unit 19, which controls the on / off switching of the X-rays.

[0023] Furthermore, in this embodiment, the X-ray tube 11 may be, for example, a cold cathode X-ray tube (pulse X-ray tube). A cold cathode X-ray tube is an X-ray tube that uses a carbon nano-needle structure as a cold cathode. Because a filament and a heater are not required, the time required to switch X-ray irradiation from on to off or from off to on is fast, at approximately 1 to 5 milliseconds. Note that the X-ray tube 11 can be in not only two states, on and off, but also can change the output value of the X-rays irradiated in the on state.

[0024] The detector substrate 12 is capable of detecting X-rays diffracted by a measurement object irradiated with X-rays. The detector substrate 12 is provided with a detection sensor (not shown) that detects the X-rays, and the detection sensor detects the diffraction intensity of the X-rays as an electric charge. The analog value is read out by the detector readout substrate 20 and converted into a digital signal (imaged).

[0025] The detector substrate 12 in this embodiment may be a SOIPIX type detector substrate, which is a detector substrate provided with an SOI (Silicon on Insulator) sensor as the detection sensor.

[0026] The water-cooling jig 13 is connected to a cooling chiller 23 that stores cooling water, and cooling water is circulated from the cooling chiller 23 by a pump (not shown). In this way, the water-cooling jig 13 cools the X-ray tube 11 and the detector board 12. The water-cooling jig 13 also serves to fix the X-ray tube 11 and the detector board 12.

[0027] Furthermore, the water-cooling jig 13 and the cooling chiller 23 may be replaced with a Peltier cooling jig (not shown) and a PID control panel (not shown) having a Peltier element power supply. Furthermore, the water-cooling jig 13 and the cooling chiller 23 may be omitted (however, in this case, a separate jig for fixing the X-ray tube 11 and the detector board 12 is required).

[0028] The xy stage 15 is a stage on which the measurement object is placed, and can be moved in the x-axis and y-axis directions by a first stage controller 17. The zψ stage 16 is a stage on which the measurement head 10 is mounted, and can be moved in the z-axis and angle ψ directions by a second stage controller 18.

[0029] The X-ray shielding box B is a housing that does not transmit X-rays, and contains the measurement head 10, the xy stage 15, and the zψ stage 16. The X-ray shielding box B also has a door (not shown), and the user can place the measurement object on the xy stage 15 by opening the door.

[0030] The pulse power supply unit 19 has a boost circuit and a drive board (not shown), and performs pulse control to switch X-rays on and off or change the output value of the X-ray tube 11. The boost circuit may be, for example, a Cockcroft-Walton circuit. The boost circuit boosts the supply voltage from a power supply (not shown) and applies it to the X-ray tube 11, and the drive board receives control signals from, for example, the detector readout board 20 and sends output control signals to the X-ray tube 11.

[0031] The detector readout board 20 transmits a drive signal to the detector board 12, reads out the analog output, which is the detection value of the detector board 12, and converts it into a digital signal (image).

[0032] The control and analysis PC 22 analyzes the structure and characteristics (e.g., stress components, half-width, and retained austenite) of the object to be measured based on the measured X-ray values converted into digital signals by the detector readout board 20. The control and analysis PC 22 also sends commands to each stage controller 17, 18 to control the measurement position and measurement posture. Furthermore, the control and analysis PC 22 instructs the detector readout board 20 on the detection time, number of detections, and number of measurements.

[0033] FIG. 2 is a block diagram schematically showing an example of a partial functional configuration of the X-ray diffraction measurement apparatus 1 shown in FIG. 2, the pulse power supply unit 19 includes, as a functional configuration, a control unit 30. The detector readout board 20 also includes, as a functional configuration, a readout unit 31, an instruction unit 32, a processing unit 33, and a data transmission unit 34. The control and analysis PC 22 also includes, as a functional configuration, a data receiving unit 35, a generating unit 36, an analyzing unit 37, a counting unit 38, a display unit 39, a board control unit 40, and a storage unit 41.

[0034] The control unit 30 controls the on / off switching of the X-ray irradiation by the X-ray tube 11. Specifically, the control unit 30 transmits a pulse signal to the X-ray tube 11, and the X-ray tube 11 follows the pulse signal to control the on / off switching of the X-ray tube 11.

[0035] The readout unit 31 transmits a drive signal to the detector board 12 and intermittently reads out the detection value of the detector board 12 (hereinafter simply referred to as the "detection value") multiple times.

[0036] The instruction unit 32 instructs the control unit 30 to perform switching control so that the timing of reading out the detection values by the readout unit 31 is synchronized with the timing of irradiating X-rays by the X-ray tube 11. Specifically, the instruction unit 32 instructs the control unit 30 to perform on / off switching control of the X-ray tube 11 so that the timing of even-numbered readouts of the detection values by the readout unit 31 coincides (or approximately coincides) with the timing when the X-ray tube 11 turns on and irradiates the object to be measured with X-rays. Note that this instruction is output as a digital I / O signal as a drive signal.

[0037] As a result, the detection value read by the reading unit 31 on an even number of times becomes the detection value of the X-rays diffracted from the object to be measured, i.e., the X-ray measurement value, and the detection value read by the reading unit 31 on an odd number of times becomes environmental noise, i.e., pedestal noise.

[0038] The processing unit 33 converts the analog detection value read by the reading unit 31 into a digital signal.

[0039] The data transmitting unit 34 transmits the detected value converted into a digital signal by the processing unit 33 .

[0040] The data receiving unit 35 receives the detected value transmitted from the data transmitting unit 34 .

[0041] The generating unit 36 generates each X-ray measurement value X i From these X-ray measurements X i The pedestal noise P i and remove each pedestal noise P i Each X-ray measurement value D i By integrating these, the measurement data of the diffraction ring D I Generate.

[0042] The generating unit 36 also reads the X-ray measurement value X i and pedestal noise P i Each time you read out the X-ray measurement X i Pedestal noise P i Remove.

[0043] The analysis unit 37 analyzes the measurement data D of the diffraction ring generated by the generation unit 36. I The stress components, half-value width, amount of retained austenite, etc. of the object to be measured are calculated by analyzing the above.

[0044] The display unit 39 inputs commands to be sent to the instruction unit 32 and each stage controller 17, 18 on the screen of the control and analysis PC 22. Furthermore, the display unit 39 displays various data stored in the memory unit 41. Furthermore, the substrate control unit 40 controls the instruction unit 32. Furthermore, the memory unit 41 stores the above-mentioned X-ray measurement value X i , pedestal noise P i , X-ray measurement value D i , diffraction ring measurement data D I Various data such as the stress component, half-value width, and amount of retained austenite of the object to be measured are stored.

[0045] <Motion control> Fig. 4 is a flowchart showing an example of processing for generating measurement data of diffraction rings by the X-ray diffraction measurement apparatus 1 shown in Fig. 1. The content and order of the processing shown in Fig. 4 can be changed as appropriate.

[0046] (Step SP1) The control unit 30 of the pulse power supply unit 19 turns off the X-ray tube 11 . Thereafter, the process proceeds to step SP2.

[0047] (Steps SP2, SP3) In step SP2, the counting unit 38 of the control and analysis PC 22 counts the diffraction ring measurement data D I Number of acquisitions k i Set the count to 0. In step SP3, the counting unit 38 counts the X-ray measurement value D (of the measurement result by the reading unit 31). i Number of times n i Set the count to 0. Thereafter, the process proceeds to step SP4.

[0048] Here, Fig. 3 is a graph showing an example of synchronous control of X-ray output and sensor readout. Fig. 3(a) is a graph showing the timing of X-ray output (irradiation), and Fig. 3(b) is a graph showing the timing of sensor readout (readout by the readout unit 31). The following steps SP4 to SP7 will be explained using Fig. 3.

[0049] (Step SP4) The "pedestal acquisition" shown in FIG. 3(b) is performed. At this time, the state is "standby" (X-ray tube 11 off) shown in FIG. 3(a). This "pedestal acquisition" is performed when the readout unit 31 of the detector readout board 20 sends a drive signal to the detector board 12 and the detector board 12 detects the pedestal noise P i The time required for pedestal acquisition is, for example, 100 milliseconds. Thereafter, the process proceeds to step SP5.

[0050] (Step SP5) The control unit 30 of the pulse power supply unit 19 turns on the X-ray tube 11 . 3(a) is performed at the timing of "data transfer" in FIG. 3(b). This "data transfer" is performed when the processing unit 33 transfers the pedestal noise P i is converted into digital signal data, and the data transmitting unit 34 of the detector readout board 20 transmits the data to the data receiving unit 35 of the control and analysis PC 22. Also, "boosting" refers to boosting the voltage when the control unit 30 of the pulse power supply unit 19 turns on the X-ray tube 11. The timing of the start of data transfer (i.e., the end of pedestal acquisition) and the timing of the start of voltage boosting may or may not coincide. However, if they do not coincide, the start of voltage boosting must be after the end of pedestal acquisition. When the boosting is completed, the process proceeds to step SP6.

[0051] (Step SP6) The reading unit 31 reads the X-ray measurement value X i Read out the data. More specifically, "irradiation" in FIG. 3(a) is performed at the timing when "acquisition of X-ray measurement values" in FIG. 3(b) starts. This "irradiation" refers to the X-ray tube 11 irradiating the measurement object with X-rays. Also, "acquisition of X-ray measurement values" refers to the readout unit 31 of the detector readout board 20 sending a drive signal to the detector board 12, and the X-ray measurement values X detected by the detector board 12. i The time required to acquire the X-ray measurement value is the same as the time required to acquire the pedestal, for example, 100 milliseconds. Thereafter, the process proceeds to step SP7.

[0052] (Step SP7) The control unit 30 of the pulse power supply unit 19 turns off the X-ray tube 11 . 3(a) is performed at the timing of "data transfer" in FIG. 3(b). This "data transfer" means that the processing unit 33 transfers the X-ray measurement value X read out in step SP6.i This refers to digitizing the i and the data transmission unit 34 of the detector readout board 20 transmitting the data to the data reception unit 35 of the control analysis PC 22. Also, "voltage reduction" refers to the voltage reduction when the control unit 30 of the pulse power supply unit 19 turns off the X-ray tube 11. Note that the timing of the start of this data transfer (i.e., the end of X-ray measurement value acquisition) coincides with the timing of the start of voltage reduction. The period from when the voltage reduction ends and the X-ray tube 11 turns off until the data transfer ends is defined as step SP7. And steps SP4 - SP7 are taken as one cycle. After that, the process proceeds to step SP8.

[0053] (Step SP8) The generation unit 36 of the control analysis PC 22 performs a process of removing the pedestal noise P i from the X-ray measurement value X i Figure 5 schematically shows the process of removing the pedestal noise P i from the X-ray measurement value X i Originally, the X-ray measurement value X i contains pedestal noise. By removing it as shown in Figure 5, a more accurate X-ray measurement value D i is obtained. After that, the process proceeds to step SP9.

[0054] (Step SP9) When the number of acquisitions of the X-ray measurement value D I required to obtain the measurement data D i of one diffraction ring, which is set in advance by the user, is n times, the next step branches depending on whether n i = n. If n i < n, the process proceeds to step SP10. If n i = n, the process proceeds to step SP11.

[0055] (Step SP10) The count unit 38 of the detector readout board 20 counts n​i Perform the process of setting it to +1. After that, the process proceeds to step SP4 (perform the cycle of steps SP4 - SP7 again).

[0056] (Step SP11) Figure 6 schematically shows the process of integrating the X-ray measurement values D i (X i - P i ) obtained n times. The generation unit 36 of the control analysis PC22 calculates as shown in Figure 6 and uses this as the measurement data D of the diffraction ring I and perform the process. After that, the process proceeds to step SP12.

[0057] (Step SP12) When the required number of the measurement data D of the diffraction ring, which is set in advance by the user, is k, the next step branches depending on whether the acquisition count k I = k. i If k < k, the process proceeds to step SP13, and if k i = k, the process ends. i

[0058] (Step SP13) The counting unit 38 of the detector readout board 20 performs the process of setting it to k i + 1. After that, the process proceeds to step SP3.

[0059] Also, "set in advance by the user" in steps SP9 and SP12 above means that the user sets it using the control analysis PC22 and transmits that information to the detector readout board 20.

[0060] <<Function and Effect>> According to this embodiment, the instruction unit 32 instructs the control unit 30 to control the on / off switching of the X-ray tube 11 so that the timing of even-numbered readouts of the detection values by the readout unit 31 is synchronized with the timing when the X-ray tube 11 is turned on and irradiates the object to be measured with X-rays. This simplifies the processing. It also makes it possible to unify the PC software that adjusts each timing.

[0061] In this embodiment, each X-ray measurement value X i From these X-ray measurements X i The pedestal noise P i and remove each pedestal noise P i Each X-ray measurement value D i By integrating these, the measurement data of the diffraction ring D I This improves measurement accuracy compared to the conventional method of measuring multiple pedestal noises together in advance. Furthermore, since the continuous X-ray irradiation time is short, the cooling mechanism (water cooling jig 13 and Peltier cooling jig 14) that was previously required can be omitted, and further, the life of the X-ray tube 11 can be extended, power consumption can be reduced, and the user's exposure dose can be reduced. Furthermore, since the cooling mechanism can be omitted, portability is improved.

[0062] In this embodiment, the generation unit 36 generates the X-ray measurement value X i and pedestal noise P i Each time you read out the X-ray measurement X i Pedestal noise P i That is, the reading by the reading unit 31 and the processing by the generating unit 36 are performed in parallel. I The time required to generate the

[0063] However, when using a thermo-negative X-ray tube with a conventional tube, it takes about 20 seconds to irradiate X-rays because the supply voltage from the power supply unit connected to the tube needs to be increased in stages and the cathode filament inside the tube needs to be heated by a heater. Therefore, when using a conventional thermo-negative X-ray tube, it is necessary to repeatedly turn the tube on and off to obtain the X-ray measurement value X. i Acquisition of pedestal noise P i Rather than alternating between acquiring and n is first obtained, then the tube is turned on to emit X-rays, and the X-ray measurement X i However, doing so would require less time than acquiring the pedestal noise P n Acquisition of X-ray measurements X i There is a large time lag in obtaining the X-ray measurement value X i The pedestal noise P actually contained in i This may change the value of the measurement, resulting in a decrease in measurement accuracy. However, in this embodiment, the X-ray tube 11 is a cold cathode X-ray tube, so the time required for voltage increase is only a few milliseconds. i Acquisition of pedestal noise P i Furthermore, since the voltage boosting can be completed during the data transfer from the detector readout board 20 to the control and analysis PC 22, the overall processing efficiency can be improved.

[0064] === Variations === The present invention is not limited to the above-described embodiments. In other words, designs that are produced by those skilled in the art with appropriate design modifications to the above-described specific examples are also included within the scope of the present invention as long as they include the features of the present invention. Furthermore, the elements of the above-described embodiments and the following modifications can be combined to the extent technically possible, and such combinations are also included within the scope of the present invention as long as they include the features of the present invention.

[0065] For example, in the above embodiment, it was explained that the instruction unit 32 instructs the control unit 30 to perform switching control so that the timing of the even-numbered readout of the detection value by the readout unit 31 and the timing of the X-ray tube 11 irradiating the object to be measured with X-rays are approximately the same. Also, it was explained that the generation unit 36 removes pedestal noise read out by the readout unit 31 one value before each X-ray measurement value from each X-ray measurement value, which is the measurement result read out by the readout unit 31 on the even numbered readout. However, the above "even-numbered time" may be changed to "odd-numbered time". Also, the above "one value before" may be changed to "one value after". Furthermore, the division does not have to be limited to even-numbered and odd-numbered reads, as long as the timing of some of the multiple reads by the readout unit 31 is synchronized with the timing of the X-ray irradiation by the X-ray tube 11.

[0066] In the above embodiment, the control unit 30 performs pulse control to switch on and off the X-ray tube 11. However, the control unit 30 is not limited to on and off, as long as it switches the output value of X-ray irradiation by the X-ray tube 11 between a predetermined value or more and a value less than a predetermined value (including 0 kV, i.e., the off state). For example, the voltage may be switched between 20 kV and 30 kV, which further reduces the time required for voltage increase and decrease.

[0067] Furthermore, of the configuration shown in Figure 1, the water-cooling jig 13, the Peltier cooling jig 14, the xy stage 15, the zψ stage 16, the first stage controller 17, the second stage controller 18, the cooling chiller 23, the PID control panel 24, and the Peltier element power supply 25 can be omitted, and the X-ray shielding box B can be replaced with an X-ray shielding cover with an installation handle, thereby making it a handheld system. [Explanation of symbols]

[0068] 1: X-ray diffraction measurement device, 11: X-ray tube, 12: detector board, 30: control unit, 31: readout unit, 32: instruction unit, 36: generation unit

Claims

1. an X-ray tube that irradiates an object to be measured with X-rays; a control unit that controls switching an output value of X-ray irradiation by the X-ray tube between a predetermined value or more and a predetermined value or less; a detector substrate capable of detecting X-rays diffracted by the object to be measured when the object is irradiated with X-rays from the X-ray tube; a readout unit that intermittently reads out detection values from the detector substrate multiple times; an instruction unit that instructs the control unit to perform switching control so that the timing of the multiple readouts by the readout unit and the timing of the X-ray irradiation by the X-ray tube are synchronized; An X-ray diffraction measurement apparatus comprising:

2. 2. The X-ray diffraction measurement apparatus according to claim 1, wherein the instruction unit instructs the control unit to perform switching control so that the timing of some of the multiple readouts by the readout unit coincides with the timing of the X-ray tube irradiating X-rays.

3. 3. The X-ray diffraction measurement apparatus according to claim 2, wherein the part is an even-numbered or odd-numbered time.

4. 4. The X-ray diffraction measurement apparatus according to claim 1, further comprising a generation unit that generates measurement data of a diffraction ring by removing environmental noise, which is the detection value read by the readout unit either before or after the X-ray measurement value, from each X-ray measurement value, which is the detection value read out by the readout unit in synchronization with the timing of X-ray irradiation by the X-ray tube, and integrating each X-ray measurement value from which the environmental noise has been removed.

5. 5. The X-ray diffraction measurement apparatus according to claim 4, wherein the generation unit removes the environmental noise from the X-ray measurement value every time the reading unit reads out the X-ray measurement value and the environmental noise.

6. 2. The X-ray diffraction measurement apparatus according to claim 1, wherein the control unit transmits a pulse signal to the X-ray tube, and the X-ray tube is controlled in response to the pulse signal.

7. Computer, a control unit that controls switching the output value of X-ray irradiation by the X-ray tube between a predetermined value or more and a predetermined value or less; a readout unit that intermittently reads out detection values multiple times from a detector substrate that can detect X-rays diffracted by the object to be measured irradiated with X-rays from the X-ray tube; an instruction unit that instructs the control unit to perform switching control so that the timing of the multiple readouts by the readout unit and the timing of the X-ray irradiation by the X-ray tube are synchronized; A program characterized by functioning as

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