Transport package for charged particle gun and method for maintaining charged particle gun

Abstract

To provide a transport package that allows the start-up and performance evaluation of a charged particle gun outside a charged particle beam device.SOLUTION: A transport package for a charged particle gun includes a mounting unit capable of mounting a charged particle gun, a vacuum exhaust system capable of creating a vacuum inside the charged particle gun with the charged particle gun mounted on the mounting unit, and an evaluation system capable of evaluating at least one of the performance of the charged particle gun and the performance of a charged particle beam irradiated from the charged particle gun with the charged particle gun mounted on the mounting unit. The mounting unit, the vacuum exhaust system, and the evaluation system can be moved together with the charged particle gun mounted on the mounting unit.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transport package for a charged particle gun and a method for maintaining a charged particle gun. [Background technology]

[0002] The charged particle beam device includes a charged particle gun equipped with a charged particle source for generating a charged particle beam. When the charged particle beam device is, for example, a scanning electron microscope (SEM), the scanning electron microscope includes an electron gun equipped with an electron source for generating an electron beam.

[0003] When replacement or maintenance is performed on the charged particle source of this type of charged particle gun, all or part of the charged particle gun is removed from the charged particle beam device. After the replacement or maintenance is performed, the charged particle gun must be readjusted and its performance checked in a vacuum state in the charged particle beam device.

[0004] For example, Patent Document 1 discloses a test device equipped with a chamber for installing an ion source that is the subject of maintenance work. In this test device, a test is performed to evaluate the performance of the ion source with the inside of the chamber evacuated to a vacuum. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 2667205 Summary of the Invention [Problem to be solved by the invention]

[0006] Patent Document 1 focuses on evaluating the performance of the ion source in a vacuum-evacuated state, but does not mention starting up the ion gun or checking the performance of the ion gun, which are necessary during maintenance of the ion gun.

[0007] When maintenance of a charged particle gun is started, it takes time to restore the charged particle beam to its original state where it can be controlled, resulting in downtime of the charged particle beam equipment. When performing maintenance to replace a charged particle source and install a new charged particle source, it takes a long time to release the atmospheric pressure, remove the charged particle gun from the charged particle beam equipment, prepare a new charged particle gun, bake the new charged particle gun in a vacuum state, and create an ultra-high vacuum inside the new charged particle gun.

[0008] The primary objective of the present application is to provide a transport package that enables the startup and performance evaluation of a charged particle beam gun outside of a charged particle beam device, thereby shortening the time required to restart the charged particle beam device and improving the availability of the charged particle beam device.

[0009] Other objects and novel features will become apparent from the description of this specification and the accompanying drawings. [Means for solving the problem]

[0010] A transport package for a charged particle gun according to one embodiment includes a mounting unit capable of mounting a charged particle gun, a vacuum exhaust system capable of creating a vacuum inside the charged particle gun with the charged particle gun mounted on the mounting unit, and evaluation equipment capable of evaluating at least one of the performance of the charged particle gun and the performance of a charged particle beam emitted from the charged particle gun with the charged particle gun mounted on the mounting unit. The mounting unit, the vacuum exhaust system, and the evaluation equipment can be moved together with the charged particle gun mounted on the mounting unit.

[0011] A maintenance method for a charged particle gun according to one embodiment includes the steps of: (a) transporting a transport package including a second charged particle gun, the interior of which is maintained in a vacuum state, to the vicinity of a first charged particle beam device; (b) after step (a), exchanging the first charged particle gun provided in the first charged particle beam device for the second charged particle gun; (c) after step (b), installing the first charged particle gun in the transport package; (d) after step (c), creating a vacuum state inside the first charged particle gun in the transport package; and (e) after step (d), performing a performance evaluation of the first charged particle beam irradiated from the first charged particle gun or a performance evaluation of the first charged particle gun in the transport package.

[0012] A maintenance method for a charged particle gun according to one embodiment includes the steps of: (a) transporting a first transport package having a second charged particle gun, the interior of which is maintained in a vacuum state, and one or more transport packages other than the first transport package to the vicinity of a first charged particle beam device; (b) after step (a), installing the first charged particle gun provided in the first charged particle beam device in any one of the one or more transport packages; (c) after step (b), loading the second charged particle gun from the first transport package onto the first charged particle beam device; (d) after step (c), creating a vacuum state inside the first charged particle gun in the transport package in which the first charged particle gun is installed, among the one or more transport packages; and (e) after step (d), performing a performance evaluation of the first charged particle beam irradiated from the first charged particle gun or a performance evaluation of the first charged particle gun in the transport package in which the first charged particle gun is installed. [Effects of the Invention]

[0013] According to one embodiment, a transport package can be provided that allows startup and performance evaluation of a charged particle beam gun outside of a charged particle beam device. In addition, this transport package can shorten the time required to restart the charged particle beam device, thereby improving the availability of the charged particle beam device. [Brief explanation of the drawings]

[0014] [Figure 1] FIG. 2 is a schematic diagram showing a transport package for the charged particle gun in the first embodiment. [Figure 2] 2 is a schematic diagram showing a facility section and a vacuum exhaust facility according to the first embodiment. FIG. [Figure 3] 2 is a schematic diagram showing the electrical connection relationship between the electron gun, the installation unit, and the evaluation equipment in the first embodiment. FIG. [Figure 4] FIG. 2 is a schematic diagram showing a protective cover according to the first embodiment. [Figure 5] 4 is a flowchart showing a maintenance method for a charged particle gun performed using a transportation package according to the first embodiment. FIG. [Figure 6] 10 is a flowchart showing a maintenance method for a charged particle gun performed using a transport package in Modification 1. FIG. [Figure 7] FIG. 10 is a schematic diagram showing a transport package for a charged particle beam device and a charged particle gun in Modification 2. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, embodiments will be described in detail with reference to the drawings. In all drawings for explaining the embodiments, components having the same functions are designated by the same reference numerals, and repeated explanations thereof will be omitted. In the following embodiments, explanations of the same or similar parts will not be repeated unless particularly necessary.

[0016] In the following description of the embodiments, an example is shown in which the present disclosure is applied to a scanning electron microscope (SEM) that uses an electron beam as a charged particle beam device (charged particle beam device). However, this embodiment should not be construed as being limiting, and the present disclosure may also be applied to, for example, devices that use charged particle beams such as ion beams, or general observation devices.

[0017] Examples of electron beam (charged particle beam) performance include electron beam current, current stability, electron beam energy, electron beam fluctuation, flare, gas adsorption on the electron source, and X-rays.

[0018] The evaluation equipment may evaluate the performance of an electron gun (charged particle gun), such as the degree of vacuum, vibration characteristics, and voltage resistance.

[0019] Furthermore, the evaluation equipment refers to at least either a detector or a measuring instrument. The physical quantities measured by the detector or measuring instrument are not limited to the above-mentioned examples of the performance of the electron beam or the performance of the electron gun. Furthermore, the location of the evaluation equipment may be inside or outside a vacuum.

[0020] Examples of detectors include Faraday cups, photomultiplier tubes, and precision resistors. Examples of measuring instruments include ammeters, voltmeters, and testers. Furthermore, in this application, components or equipment with measurement functions, such as circuits or electronic computing devices, are also considered measuring instruments. In addition, in this application, devices that display some physical quantity are also included in the measuring instrument.

[0021] In this application, evaluation refers to the act of measuring one or more physical quantities, or the act of displaying the measurement results or values. Examples of physical quantities that can be evaluated include current values and voltage values. The evaluation in this application is not limited to the performance of the electron beam or the performance of the electron gun described above. Note that the physical quantities listed here are merely examples, and physical quantities other than those listed here may also be used.

[0022] The evaluation in this application is not limited to direct evaluation of a desired physical quantity, but also includes indirect evaluation.

[0023] Direct evaluation is the direct evaluation of a desired physical quantity. In direct evaluation, the physical quantity at the time of detection and the physical quantity after evaluation do not change. For example, an example of direct evaluation is measurement of the current amount of an electron beam using a Faraday cup and an ammeter. In this case, the physical quantity at the time of detection is the current amount, and the physical quantity after evaluation is also the current amount.

[0024] Indirect evaluation means calculating a desired physical quantity from another physical quantity, and refers to a case where the physical quantity at the time of detection and the physical quantity after evaluation are converted at least once in the process from detection to evaluation.

[0025] An example of indirect evaluation is a method in which the amount of electron beam current is converted to a current value by measuring the voltage change using a precision resistor. In this case, the current is detected as a current, and a separate physical quantity, the voltage value, is evaluated along the way and then converted to a current amount. Another example of indirect evaluation is a method in which a phosphor or a photomultiplier tube is used to convert the output voltage value into the amount of electron beam current. In this case, the physical quantity, the amount of light emitted by the phosphor, is evaluated as a voltage, and this voltage value is converted into a separate current value, the amount of current. In this way, an indirect evaluation is one in which one or more physical quantities are converted. Note that in indirect evaluation, the physical quantity at the time of detection and the physical quantity after evaluation may be the same.

[0026] In the evaluation of this patent, the detector and measuring instrument do not need to be directly connected at all times, nor do they need to be continuously connected. For example, when evaluating an electron beam by measuring the voltage drop across a precision resistor, test pins are prepared in advance in the evaluation equipment, and the voltage value is evaluated by applying a tester to the test pins during evaluation. As another example, the detected physical quantities may be temporarily stored in a logger or personal computer, and the amount of current, etc., may be evaluated later based on the processed results.

[0027] Furthermore, the physical quantity obtained by the evaluation may be displayed in any form, for example, by displaying values in real time, by displaying them as one-dimensional data on a logger, or by displaying them in two or more dimensions on a personal computer. Furthermore, the physical quantity obtained by the evaluation may be amplified by an amplifier or the like at a stage downstream of the detector.

[0028] (Embodiment 1) <Transport package for charged particle gun> 1, the various structures provided in the transport package 100 in the first embodiment will be described below. In the first embodiment, a scanning electron microscope (SEM device) is exemplified as an example of the charged particle device that is the target of the transport package 100. The charged particle gun provided in the charged particle device is, for example, an electron gun, the charged particle source provided in the charged particle gun is, for example, an electron source, and the charged particle beam irradiated from the charged particle gun is, for example, an electron beam.

[0029] As shown in FIG. 1, the transport package 100 includes an installation section 103 , a vacuum pumping facility 104 , and an evaluation facility 105 .

[0030] The installation unit 103 is capable of installing an electron gun (charged particle gun) 102. The vacuum exhaust equipment 104 is capable of creating a vacuum inside the electron gun 102 while the electron gun 102 is installed in the installation unit 103. The evaluation equipment 105 is capable of evaluating the performance of the electron gun 102 or the performance of the electron beam (charged particle beam) irradiated from the electron gun 102 while the electron gun 102 is installed in the installation unit 103.

[0031] In this specification, the phrase "the electron gun 102 is installed in the transport package 100" may be used, but this means "the electron gun 102 is installed in the installation section 103."

[0032] In the transport package 100, with the electron gun 102 installed in the installation unit 103, the installation unit 103, the vacuum pumping equipment 104, and the evaluation equipment 105 can be moved together. In order to move these together, the transport package 100 may be equipped with a moving equipment 101. The moving equipment 101 is, for example, a dolly, and has casters 106 for making the dolly movable. Other examples of the moving equipment 101 include a hovercraft or a conveyor. The transport package 100 may be equipped with a vibration isolation equipment such as an air suspension.

[0033] The mobile facility 101 can be equipped with an installation unit 103, a vacuum exhaust facility 104, and an evaluation facility 105. For example, an operator can operate the mobile facility 101 to move the installation unit 103, the vacuum exhaust facility 104, and the evaluation facility 105 while the electron gun 102 is installed in the installation unit 103. For example, the mobile facility 101 can move the transport package 100 to the vicinity of a first SEM device, or move the transport package 100 from the first SEM device to the vicinity of a second SEM device.

[0034] The relationship between the installation unit 103 and the vacuum pumping equipment 104 will be described below with reference to Fig. 2. As shown in Fig. 2, the vacuum pumping equipment 104 has piping 111, piping 112, a turbomolecular pump 113, a diaphragm pump 114, an ion pump power supply 115, and a backup battery 116.

[0035] The installation section 103 and the turbomolecular pump 113 are in communication with each other via a pipe 111. The turbomolecular pump 113 and the diaphragm pump 114 are in communication with each other via a pipe 112. Although not shown, the pipe 111 is in communication with the interior of the installation section 103, and when the electron gun 102 is installed in the installation section 103, the pipe 111 can be in communication with the interior of the electron gun 102 via the interior of the installation section 103.

[0036] The inside of the electron gun 102 installed in the installation section 103 is evacuated by a diaphragm pump 114, and ―1The inside of the electron gun 102 installed in the installation section 103 is evacuated by a turbo molecular pump 113, and the inside of the electron gun 102 is evacuated to a vacuum of, for example, 10 Pa. ―4 The pressure is reduced to a vacuum of less than 100 Pa.

[0037] It should be noted that both the turbo molecular pump 113 and the diaphragm pump 114 are not necessarily required, and if only one of them can create a certain degree of vacuum inside the electron gun 102, then only one of them may be provided in the vacuum exhaust system 104.

[0038] As shown in FIG. 3 (to be described later), the electron gun 102 has an ion pump 301. The ion pump power supply 115 is used to drive the ion pump 301. When the electron gun 102 is installed in the installation section 103, the ion pump power supply 115 is electrically connected to the ion pump by a cable or the like (not shown). The electron gun 102 may also be equipped with a getter pump. An example of the getter pump is a NEG (Non-Evaporable Getter) pump.

[0039] By driving the ion pump 301 under the control of the ion pump power supply 115, the inside of the electron gun 102 can be evacuated to a vacuum. By using the ion pump 301, the inside of the electron gun 102 can be evacuated to a lower pressure than when the turbomolecular pump 113 and the diaphragm pump 114 are used. ―8 The chamber is placed in a vacuum state (extremely high vacuum state) of less than 1 Pa. If the ion pump 301 is operable, the diaphragm pump 114 and turbo molecular pump 113 are not necessarily required, and only the ion pump power supply 115 may be provided.

[0040] The backup battery 116 is electrically connected to the ion pump power supply 115. Even when the main power supply for the ion pump is stopped, the ion pump can be driven by using the backup battery 116 and the ion pump power supply 115. This allows the inside of the electron gun 102 to be maintained in an extremely high vacuum state.

[0041] The electron gun 102, the installation unit 103, and the evaluation equipment 105 will be described below with reference to FIG. 3. As shown in FIG. 3, the evaluation equipment 105 has a driving mechanism 200 for a heating mechanism 306, a high-voltage power supply 201, and a power supply 202. The power supply 202 is, for example, a constant-current power supply or a constant-voltage power supply. The driving mechanism 200 is, for example, a baking power supply. In addition to the baking power supply, the driving mechanism 200 may also be a transformer such as a variac that transforms the output voltage, or a voltage regulator.

[0042] The electron gun 102 has a housing 300, an ion pump 301, an electron source (charged particle source) 302, an accelerating electrode 303, a beam focusing mechanism 305, a heating mechanism 306, and a valve 307. The ion pump 301, the electron source 302, the accelerating electrode 303, and the beam focusing mechanism 305 are provided inside the housing 300. The heating mechanism 306 and the valve 307 are provided outside the housing 300. The heating mechanism 306 is a heater, for example, an electric heater. The heater may be covered with a heat insulating material or the like to improve heating efficiency. These heat insulating mechanisms that improve heating efficiency are also included in the heating mechanism 306. The temperature adjustment mechanism also is included in the heating mechanism.

[0043] It should be noted that the electron gun 102 in FIG. 3 is an example, and the beam focusing mechanism 305 and the heating mechanism 306 are not necessarily required.

[0044] In this specification, the phrase "inside the electron gun 102" may be used, but this means "inside the housing 300."

[0045] When the electron gun 102 is installed in the installation section 103, the driving mechanism 200 is electrically connected to the heating mechanism 306 by a cable or the like (not shown). By driving the heating mechanism 306 under the control of the driving mechanism 200, the temperature of the entire electron gun 102 can be adjusted.

[0046] When the electron gun 102 is installed on the installation section 103, the high-voltage power supply 201 is electrically connected to the electron source 302 and the acceleration electrode 303 by a cable or the like (not shown). Under the control of the high-voltage power supply 201, the electron source 302 generates an electron beam (charged particle beam) 304, and the acceleration electrode 303 applies a strong electric field to the electron beam 304, which is then accelerated and emitted from the electron gun 102.

[0047] When the electron gun 102 is installed in the installation section 103, the power supply 202 is electrically connected to the beam focusing mechanism 305 by a cable or the like (not shown). The beam focusing mechanism 305 is a condenser lens such as an electromagnet having a coil, or an electrostatic lens using electrodes. By controlling the power supply 202 to drive the beam focusing mechanism 305, a magnetic field is generated from the beam focusing mechanism 305, and the electron beam 304 can be focused by the magnetic field. Furthermore, it is not necessary for the beam focusing mechanism 305 to focus the electron beam 304.

[0048] The installation unit 103 has a detector 117 and a measuring instrument 118. The measuring instrument 118 is electrically connected to the detector 117. When the electron beam 304 is detected by the detector 117, the measuring instrument 118 can measure the characteristics of the electron beam 304.

[0049] A Faraday cup is an example of the detector 117. An ammeter is an example of the measuring instrument 118. When a Faraday cup and an ammeter are used, the amount of electron beam 304 that reaches the Faraday cup can be measured as a current value by the ammeter.

[0050] Detector 117 may be an electron beam detector instead of a Faraday cup. Examples of electron beam detectors include phosphors, photomultiplier tubes, and semiconductor detectors. Detector 117 may also include signal amplification using an amplifier.

[0051] The locations of the detector 117 and the measuring instrument 118 are not necessarily limited to those shown in Fig. 3. For example, the detector 117 and the measuring instrument 118 can be placed at the end of the electron beam 304 after it has been bent by a lens or a deflector, thereby enabling the characteristics of the electron beam 304 to be evaluated. The number of detectors 117 may be one or more, and multiple detectors 117 may be placed in different locations.

[0052] The valve 307 can be controlled to open or close between the electron gun 102 and the installation unit 103. The form of the valve 307 is not particularly limited, but it may be, for example, a pneumatic vacuum valve. The pneumatic vacuum valve has an air inlet that opens when compressed air is supplied, and an air inlet that closes when compressed air is supplied. By allocating the air supply direction, the pneumatic vacuum valve can be switched between the open and closed states. When a pneumatic vacuum valve is used as the valve 307, the vacuum exhaust equipment 104 or the evaluation equipment 105 is equipped with a compressor for supplying compressed air.

[0053] When the valve 307 is in an open state, the inside of the electron gun 102 can be evacuated by the vacuum pumping equipment 104. Furthermore, when the valve 307 is in an open state, the electron beam 304 emitted from the electron gun 102 can reach the inside of the installation part 103 and can reach the detector 117.

[0054] When removing the electron gun 102 from the installation part 103, the valve 307 is closed. This allows the electron gun 102 to be replaced while the inside of the electron gun 102 is maintained in a vacuum state.

[0055] Incidentally, when transporting the electron gun 102 in a room where air cleanliness is ensured, such as a clean room, or when transporting the electron gun 102 in and out of the room, there is a risk that foreign matter such as floating microparticles may adhere to the electron gun 102, the installation unit 103, the vacuum pumping equipment 104, and the evaluation equipment 105. To prevent such adhesion of foreign matter, the transport package 100 may be provided with a protective cover 107.

[0056] 4, the protective cover 107 can cover the installation unit 103, the vacuum exhaust facility 104, and the evaluation facility 105, and can be attached to and detached from the installation unit 103, the vacuum exhaust facility 104, and the evaluation facility 105. When the electron gun 102 is installed in the installation unit 103, the protective cover 107 can also cover the electron gun 102. It is also possible to use a protective cover 107 that also covers all or part of the moving facility 101.

[0057] <Charged particle gun maintenance method> 5, a method for maintaining a charged particle gun using the transport package 100 will be described below. The method for maintaining a charged particle gun includes steps S1 to S13 shown in FIG.

[0058] An example will be given in which maintenance is performed on the electron guns 102 of a first SEM device and a second SEM device located at a location distant from the first SEM device.

[0059] First, a transport package 100 equipped with a replacement electron gun 102, the interior of which is maintained in a vacuum state, is transported near the first SEM device. This replacement electron gun 102 is an electron gun that has undergone steps S1 to S9, which will be described later. Next, the electron gun 102 equipped in the first SEM device is replaced with the replacement electron gun 102. Steps S1 to S13 are performed on the replaced electron gun 102 of the first SEM device.

[0060] In step S1, the electron gun 102 is placed in the transport package 100 (the placement section 103).

[0061] In step S2, it is determined whether or not maintenance is required for the electron gun 102 installed in the installation section 103. If maintenance is required (YES), the process proceeds to step S3, where maintenance is performed on the electron gun 102. If maintenance is not required (NO), the next step is step S6.

[0062] The maintenance method of the first embodiment is basically performed on electron guns 102 that require maintenance. However, it is sometimes difficult to determine whether an electron gun 102 really requires maintenance, and it is desirable to check the current performance of the electron gun 102. In such cases, "NO" is selected in step S2, and the process proceeds to step S6. Such cases will be described in detail later.

[0063] In step S4, the inside of the electron gun 102 is evacuated. First, the inside of the electron gun 102 is evacuated by the diaphragm pump 114, and the pressure inside the electron gun 102 is reduced from atmospheric pressure to 100°C. ―1 Next, the inside of the electron gun 102 is evacuated by the turbo molecular pump 113, and the pressure inside the electron gun 102 becomes 10 Pa or less. ―1 Pa to 10 ―4 Become Pa.

[0064] In step S5, the heating mechanism 306 is driven under the control of the driving mechanism 200, thereby performing a baking process on the entire electron gun 102. The baking process is performed at a heating temperature of 100° C. or higher for a predetermined time.

[0065] In step S6, the ion pump 301 is driven under the control of the ion pump power supply 115, thereby evacuating the inside of the electron gun 102 to create an ultra-high vacuum state inside the electron gun 102 (step S7).

[0066] In step S8, the electron beam 304 is started up. The electron source 302 generates the electron beam 304 under the control of the high-voltage power supply 201, and the electron beam 304 is accelerated by applying a strong electric field from the acceleration electrode 303. As a result, the electron gun 102 irradiates the electron beam 304.

[0067] In step S9, the performance of the electron beam 304 is evaluated.

[0068] As an example of performance evaluation, measurement of the amount of electron beam 304 will be described. When the electron beam 304 emitted from the electron gun 102 is detected by the detector 117, the characteristics of the electron beam 304 are measured by the measuring instrument 118. For example, when the amount of the electron beam 304 is measured as a characteristic of the electron beam 304, it can be determined whether the amount of the electron beam 304 meets the specification criteria. The criteria for determination may be, in addition to the current value, the stability of the current, the energy of the electron beam 304, the amount of fluctuation of the electron beam 304, or changes in the degree of vacuum.

[0069] As another example of performance evaluation, the focusing performance of the electron beam 304 is confirmed. The power supply 202 controls the beam focusing mechanism 305 to drive it, causing the beam focusing mechanism 305 to generate a magnetic field. The electron beam 304 is focused by the magnetic field. This makes it possible to determine whether the focusing performance of the electron beam 304 meets the specification standards. The optical axis of the electron beam 304 can also be adjusted. Furthermore, it is possible to maintain the electron gun 102 in a vacuum state until step S10, allowing the electron gun 102 to be stored in a state where its performance has been confirmed.

[0070] If the result of the performance evaluation in step S9 satisfies the specification standard, step S10 is performed. After step S9, the valve 307 is closed, so that the inside of the evaluated electron gun 102 is maintained in an ultra-high vacuum state.

[0071] In step S10, the transport package 100 equipped with the evaluated electron gun 102 is transported to the vicinity of the second SEM apparatus that requires maintenance. The electron gun 102 equipped in the second SEM apparatus is replaced with the evaluated electron gun 102. Thereafter, the second SEM apparatus is restarted (step S11).

[0072] For the electron gun 102 provided in the second SEM apparatus, steps S1 to S9 are carried out to evaluate its performance until the next maintenance. After that, the evaluated electron gun 102 can be provided to another SEM apparatus that needs to replace its electron gun 102, facilitating a prompt restart of operation.

[0073] In step S12, the second SEM device performs optical axis readjustment to align the electron beam 304 with the optical axis of the electron gun 102. The optical axis adjustment is also performed in step S9, but when the evaluated electron gun 102 is mounted on the second SEM device, misalignment of the optical axis may occur due to changes in weight balance, etc., so the optical axis adjustment is performed again within the second SEM device to also check. After that, the second SEM device can be used as usual (step S13).

[0074] As described above, in the first embodiment, the electron gun 102 can be started up and its performance evaluated in the transport package 100 located outside the SEM apparatus. Therefore, the performance and safety of the electron gun 102 can be confirmed before it is attached to the SEM apparatus.

[0075] Since steps S1 to S9 can be performed near the SEM apparatus, the electron gun 102 can be replaced quickly. Furthermore, steps S1 to S9 do not necessarily have to be performed near the SEM apparatus, but may be performed at a location some distance away from the SEM apparatus. Because the transport package 100 is movable, the evaluated electron gun 102 can be quickly transported to the vicinity of the SEM apparatus where the electron gun 102 needs to be replaced, and the electron gun 102 can be replaced. This reduces the time required to restart the SEM apparatus, improving the operating rate of the SEM apparatus.

[0076] Furthermore, steps S1 to S9 may be performed in a service station or an assembly manufacturing line that is located in a place physically separated from the SEM apparatus.

[0077] <<When maintenance is not required>> For example, there may be a case where the SEM device has some kind of malfunction and it is suspected that maintenance of the electron gun 102 is required. In such a case, the current performance of the electron gun 102 can be checked in a short time in the transport package 100 to confirm whether maintenance of the electron gun 102 is really required. In such a case, "NO" is selected in step S2, and the process proceeds to step S6.

[0078] In step S6, the valve 307 is kept closed, and the inside of the electron gun 102 is not released to atmospheric pressure but is kept in a vacuum state. Therefore, the ion pump 301 is driven in step S6 without using the turbo molecular pump 113 or the like, and the inside of the electron gun 102 is made into an ultra-high vacuum state in step S7. After the valve 307 is opened, the electron beam 304 is quickly started up in step S8, and the performance of the electron beam 304 is evaluated in step S9. In this way, the current performance of the electron gun 102 can be evaluated in a short time because steps S3 to S5 are not performed.

[0079] If the performance evaluation results do not satisfy the specification standards, it can be determined that maintenance is necessary, and steps S3 to S9 are performed on that electron gun 102. If the performance evaluation results satisfy the specification standards, it can be determined that maintenance is not necessary, and the valve 307 can be closed, and the electron gun 102 can be returned to the original SEM device and used.

[0080] One example of improving the operating rate of an SEM device is to mount the electron gun 102 on the SEM device while the high-voltage power supply 201 and a cable connecting the high-voltage power supply 201 and the electron gun 102 are attached to the electron gun 102. This makes it possible to skip the axis adjustment process after mounting the electron gun 102 on the SEM device. Furthermore, after the electron gun 102 has been mounted on the SEM device, it becomes possible to immediately obtain an observation image using the SEM device.

[0081] In the first embodiment, the high-voltage power supply 201 is exemplified, but the power supply is not limited to the high-voltage power supply 201. Furthermore, the cable does not have to be limited to the cable connecting the high-voltage power supply 201 and the electron gun 102, but all cables connected to the electron gun 201 are included.

[0082] (Variation 1) A maintenance method for a charged particle gun in Modification 1 of Embodiment 1 will be described below with reference to Fig. 6. In the following description, differences from Fig. 5 of Embodiment 1 will be mainly described, and explanations of points that overlap with Embodiment 1 will be omitted.

[0083] In variant 1, when an electron gun 102 is mounted on an SEM device and it is determined that there is some abnormality in the electron gun 102, the electron gun 102 is mounted on a transport package 100, and maintenance of the electron gun 102, baking processing, and performance evaluation of the electron gun 102 or performance evaluation of the electron beam 304 are performed.

[0084] 6, in step S61, it is determined whether maintenance is required for the electron gun 102 installed in the SEM apparatus. If maintenance is required (YES), the process proceeds to step S62, where the electron gun 102 is installed in the transport package 100. Thereafter, the process proceeds to step S3, where maintenance of the electron gun 102 is performed.

[0085] On the other hand, if maintenance is not required (NO), the process proceeds to step S63, where the electron gun 102 is installed in the transport package 100. After that, the process proceeds to step S6, where the ion pump 301 is driven to perform a performance evaluation of the electron gun 102 or the performance evaluation of the electron beam 304.

[0086] In FIG. 6, it is possible to carry out only the necessary maintenance based on an abnormality that occurs when the electron gun 102 is mounted on the SEM device, thereby shortening the work time.

[0087] (Variation 2) A transport package for a charged particle gun and a maintenance method for a charged particle gun according to Modification 2 of Embodiment 1 will be described below with reference to Fig. 7. In the following description, differences from Embodiment 1 will be mainly described, and explanations of points that overlap with Embodiment 1 will be omitted.

[0088] In the charged particle gun maintenance method of the second modification, when the electron gun 403 that is thought to require maintenance is removed from the SEM apparatus and the evaluated electron gun 102 is loaded into the SEM apparatus, two or more transport packages are used.

[0089] 7, the SEM device 401 includes a housing 402 for the SEM device 401 and an electron gun 403. A transport package 100 and one or more transport packages 400 different from the transport package 100 are prepared. The configuration of the transport package 100 is as described in the first embodiment. It is desirable that the configuration of the transport package 400 be the same as that of the transport package 100, but it may be different from that of the transport package 100.

[0090] In the second modification, first, a transport package 100 equipped with an evaluated electron gun 102 whose interior is maintained in a vacuum state, and one or more transport packages 400 are transported near an SEM device 401. Next, an electron gun 403 equipped in the SEM device 401 is installed in one of the one or more transport packages 400. Next, the electron gun 102 is mounted from the transport package 100 into a housing 402 of the SEM device 401. Thereafter, steps S1 to S13 of FIG. 5 are performed in the transport package 400 equipped with the electron gun 403, among the one or more transport packages 400.

[0091] In this way, in variant example 2, by using two or more transport packages 100, 400, it is possible to reduce the work time compared to work performed using only one transport package 100 as in embodiment 1.

[0092] In the second modification, the configuration of the transport package 400 is the same as that of the transport package 100, but the configuration of part of one or more transport packages 400 may differ from that of the transport package 100. For example, some of the transport packages 400 may be used exclusively for transporting electron guns. In this case, the part of the transport packages 400 may include the installation section 103 and the vacuum pumping equipment 104, but may not include the evaluation equipment 105.

[0093] The present invention has been specifically described above based on the above embodiment, but the present invention is not limited to the above embodiment and can be modified in various ways without departing from the spirit of the present invention.

[0094] For example, in the above embodiment, an SEM device is given as an example of a charged particle device equipped with a charged particle gun, but such a charged particle device may also be a transmission electron microscope (TEM), a scanning transmission electron microscope (STEM), or an FIB-SEM device capable of irradiating a focused ion beam (FIB). [Explanation of symbols]

[0095] 100 Transport Packages 101 Mobile Equipment 102 Electron gun (charged particle gun) 103 Installation section 104 Vacuum exhaust equipment 105 Evaluation Facilities 106 Caster 107 Protective Cover 111, 112 Piping 113 Turbomolecular Pump 114 Diaphragm Pump 115 Ion pump power supply 116 Backup Battery 117 Detector 118 Measuring Instruments 200 Drive mechanism for heating mechanism 201 High voltage power supply 202 Power supply (constant current power supply or constant voltage power supply) 300 cabinets 301 Ion Pump 302 Electron Source (Charged Particle Source) 303 Accelerating electrode 304 Electron Beam (Charged Particle Beam) 305 Beam focusing mechanism 306 Heating mechanism 307 Valve 400 Transport Packages 401 SEM equipment (charged particle beam equipment) 402 SEM equipment housing 403 Electron Gun (Charged Particle Gun)

Claims

1. an installation section in which a charged particle gun can be installed; a vacuum exhaust facility capable of creating a vacuum inside the charged particle gun while the charged particle gun is installed in the installation section; evaluation equipment capable of evaluating at least one of the performance of the charged particle gun or the performance of the charged particle beam irradiated from the charged particle gun in a state in which the charged particle gun is installed in the installation section; Equipped with A transport package for the charged particle gun, which can move the installation section, the vacuum exhaust facility, and the evaluation facility together in a state where the charged particle gun is installed in the installation section.

2. 2. The transport package for a charged particle gun according to claim 1, A transport package for a charged particle gun, further comprising a moving facility capable of mounting the installation unit, the vacuum exhaust facility, and the evaluation facility, and capable of moving the installation unit, the vacuum exhaust facility, and the evaluation facility while the charged particle gun is installed on the installation unit.

3. 2. The transport package for a charged particle gun according to claim 1, The vacuum pumping equipment is a transport package for a charged particle gun, which has at least one of a diaphragm pump, a turbomolecular pump, an ion pump, and a getter pump that can evacuate the inside of the charged particle gun.

4. 2. The transport package for a charged particle gun according to claim 1, the charged particle gun has a heating mechanism, the evaluation equipment has a drive mechanism for the heating mechanism; when the charged particle gun is installed in the installation part, the driving mechanism is electrically connected to the heating mechanism; A transport package for a charged particle gun, which can adjust the temperature of the entire charged particle gun by driving the heating mechanism through control of the driving mechanism.

5. 2. The transport package for a charged particle gun according to claim 1, the charged particle gun has an ion pump; the vacuum pumping facility has an ion pump power supply; When the charged particle gun is installed in the installation section, the ion pump power supply is electrically connected to the ion pump, A transport package for a charged particle gun, which can evacuate the inside of the charged particle gun by driving the ion pump through control of the ion pump power supply.

6. 2. The transport package for a charged particle gun according to claim 1, A transport package for a charged particle gun, wherein the charged particle gun has a getter pump.

7. 2. The transport package for a charged particle gun according to claim 1, the charged particle gun has a charged particle source and an acceleration electrode; the evaluation equipment includes a high voltage power supply; when the charged particle gun is installed in the installation section, the high-voltage power supply is electrically connected to the charged particle source and the acceleration electrode; A transport package for a charged particle gun, in which the charged particle beam is generated from the charged particle source by controlling the high-voltage power supply, the charged particle beam is accelerated by applying a strong electric field to the acceleration electrode, and the charged particle beam is irradiated from the charged particle gun.

8. 8. The transport package for a charged particle gun according to claim 7, the installation unit has a detector that detects the charged particle beam and a measuring instrument electrically connected to the detector; A transport package for a charged particle gun, wherein when the charged particle beam emitted from the charged particle gun is detected by the detector, the measuring instrument can measure characteristics of the charged particle beam.

9. 8. The transport package for a charged particle gun according to claim 7, the charged particle gun has a beam focusing mechanism that focuses the charged particle beam, the evaluation equipment has a constant current power supply or a constant voltage power supply; when the charged particle gun is installed in the installation part, the constant current power supply or the constant voltage power supply is electrically connected to the beam focusing mechanism; A transport package for a charged particle gun, which can generate a magnetic field from the beam focusing mechanism by controlling the constant current power supply or the constant voltage power supply, and can focus the charged particle beam using the magnetic field.

10. 2. The transport package for a charged particle gun according to claim 1, the charged particle gun has a valve that can be controlled to be opened or closed between an inside of the charged particle gun and an inside of the installation section, A transport package for a charged particle gun, in which, when the valve is in an open state, the inside of the charged particle gun can be evacuated by the vacuum exhaust equipment, allowing the charged particle beam emitted from the charged particle gun to reach the inside of the installation section.

11. 2. The transport package for a charged particle gun according to claim 1, a protective cover capable of covering the installation unit, the vacuum exhaust facility, and the evaluation facility and detachable from the installation unit, the vacuum exhaust facility, and the evaluation facility; A transport package for a charged particle gun, wherein the protective cover also covers the charged particle gun when the charged particle gun is installed in the installation part.

12. (a) transporting a transport package including a second charged particle gun, the interior of which is maintained in a vacuum state, to the vicinity of a first charged particle beam device; (b) after the step (a), exchanging the first charged particle gun provided in the first charged particle beam device with the second charged particle gun; (c) after step (b), installing the first charged particle gun in the transport package; (d) after step (c), creating a vacuum inside the first charged particle gun in the transport package; (e) after step (d), performing a performance evaluation of the first charged particle beam irradiated from the first charged particle gun or a performance evaluation of the first charged particle gun in the transport package; A method for maintaining a charged particle gun, comprising:

13. (a) transporting a first transport package having a second charged particle gun, the interior of which is maintained in a vacuum state, and one or more transport packages other than the first transport package to the vicinity of a first charged particle beam device; (b) after step (a), installing a first charged particle gun provided in the first charged particle beam device in any one of the one or more transport packages; (c) after step (b), loading the second charged particle gun from the first transport package onto the first charged particle beam device; (d) after step (c), creating a vacuum inside the first charged particle gun in the transport package in which the first charged particle gun is installed, among the one or more transport packages; (e) after step (d), performing a performance evaluation of the first charged particle beam irradiated from the first charged particle gun or a performance evaluation of the first charged particle gun in the transport package in which the first charged particle gun is installed; A method for maintaining a charged particle gun, comprising:

14. 14. The maintenance method for a charged particle gun according to claim 12, further comprising: (f) after step (e), transporting the transport package in which the first charged particle gun is installed to the vicinity of a second charged particle device; (g) after step (f), replacing the first charged particle gun with a third charged particle gun provided in the second charged particle device; Further comprising: A maintenance method for a charged particle gun, wherein steps (f) and (g) are performed when the result of the performance evaluation of the first charged particle beam performed in step (e) satisfies a specification standard.

15. 15. The maintenance method for a charged particle gun according to claim 14, (h) after the step (g), performing an optical axis adjustment in the second charged particle beam device to align the first charged particle beam with the optical axis of the first charged particle gun; The method for maintaining a charged particle gun further comprises:

16. 14. The maintenance method for a charged particle gun according to claim 12, further comprising: The transport package comprises: an installation section in which a charged particle gun can be installed; a vacuum exhaust facility capable of creating a vacuum inside the charged particle gun while the charged particle gun is installed in the installation section; evaluation equipment capable of evaluating at least one of the performance of the charged particle gun or the performance of the charged particle beam irradiated from the charged particle gun in a state in which the charged particle gun is installed in the installation section; Equipped with The transport package can move the installation unit, the vacuum exhaust facility, and the evaluation facility together in a state where the charged particle gun is installed on the installation unit.

17. 17. The method for maintaining a charged particle gun according to claim 16, A maintenance method for a charged particle gun, wherein the transport package is capable of carrying the installation unit, the vacuum exhaust equipment, and the evaluation equipment, and further comprises moving equipment that can move the installation unit, the vacuum exhaust equipment, and the evaluation equipment while the charged particle gun is installed on the installation unit.

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