Charged particle beam device

Abstract

To provide a charged particle beam device capable of easily introducing a specimen.SOLUTION: A charged particle beam device includes: a specimen holder 300 which holds a specimen; an optical system for irradiating the specimen with a charged particle beam; a main-body part which comprises a holder support part 230 having an insertion port 232 for inserting and extracting the specimen holder 300; and a housing which houses the main-body part. The housing has a recessed part 110 and an opening part 120, letting the specimen holder 300 access the insertion port 232, formed in the bottom 112 of the recessed part 110, and the housing further has a lighting device 150 lighting up the bottom 112 of the recessed part 110.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a charged particle beam device. [Background technology]

[0002] In charged particle beam devices such as transmission electron microscopes, scanning transmission electron microscopes, scanning electron microscopes, and focused ion beam devices, the body may be entirely or partially covered with a cover to reduce noise from the external environment.

[0003] For example, Patent Document 1 discloses a scanning electron microscope that includes a main body cover that houses a vacuum exhaust system and various circuits, a stage cover that houses a sample stage, and a column cover that houses a column. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Patent No. 6535811 Summary of the Invention [Problem to be solved by the invention]

[0005] In the above-described charged particle beam device, the sample is placed in a sample chamber maintained in a vacuum state. In such a charged particle beam device, it is required that the sample can be easily introduced into the sample chamber. [Means for solving the problem]

[0006] One aspect of the charged particle beam device according to the present invention is a sample holder for holding a sample; a main body including an optical system for irradiating the sample with a charged particle beam and a holder support having an insertion opening through which the sample holder can be inserted and removed; a housing that houses the main body; Including, the housing is formed with a recess and an opening at the bottom of the recess for allowing the sample holder to access the insertion opening; The housing has an illumination device that illuminates the bottom of the recess.

[0007] In such a charged particle beam device, the bottom of the recess can be illuminated, which improves visibility when inserting the sample holder into the insertion port through the opening, making it easy to introduce the sample into the device. [Brief explanation of the drawings]

[0008] [Figure 1] FIG. 1 is a diagram showing an example of the configuration of a transmission electron microscope. [Figure 2] FIG. 1 is a perspective view schematically showing a transmission electron microscope. [Figure 3] FIG. 1 is a front view schematically showing a transmission electron microscope. [Figure 4] FIG. 1 is a cross-sectional view schematically showing a main part of a transmission electron microscope. [Figure 5] FIG. 1 is a plan view schematically showing a lighting device. [Figure 6] 10A and 10B are diagrams for explaining the operation of a lighting device. [Figure 7] 10A and 10B are diagrams for explaining the operation of a lighting device. [Figure 8] FIG. 2 is a plan view schematically showing an operation unit. [Figure 9] FIG. 3 is a cross-sectional view schematically showing an operation unit. [Figure 10] FIG. 4 is a plan view schematically showing the operation unit in a normal mode. [Figure 11] FIG. 4 is a plan view schematically showing an operation unit in a maintenance mode. [Figure 12] FIG. 2 is a diagram showing a schematic diagram of a sample holder. [Figure 13] FIG. 4 is a plan view schematically showing a holder support portion. [Figure 14] FIG. 6 is a diagram illustrating an insertion opening of a holder support part. [Figure 15] 10 is a flowchart showing an example of a procedure for introducing a sample into a sample chamber. [Figure 16]FIG. 10 is a perspective view schematically showing a modified example of a transmission electron microscope. DETAILED DESCRIPTION OF THE INVENTION

[0009] Preferred embodiments of the present invention will be described in detail below with reference to the drawings. Note that the embodiments described below do not unduly limit the content of the present invention as defined in the claims. Furthermore, not all of the configurations described below are necessarily essential components of the present invention.

[0010] Furthermore, the following describes a case where the charged particle beam device according to the present invention is a transmission electron microscope that irradiates a sample with an electron beam, but the charged particle beam device according to the present invention may also be a device that irradiates a sample with a charged particle beam other than an electron beam (such as an ion beam).

[0011] 1. Transmission Electron Microscopy 1.1. Configuration of a transmission electron microscope First, a transmission electron microscope according to one embodiment of the present invention will be described with reference to the drawings. Figure 1 is a diagram showing an example of the configuration of a transmission electron microscope 2 according to one embodiment of the present invention.

[0012] As shown in FIG. 1, the transmission electron microscope 2 includes a housing 100, a main body 200, a sample holder 300, a control unit 400, and a vacuum exhaust system 500.

[0013] The housing 100 houses a main body 200 of the transmission electron microscope 2, a control unit 400, and a vacuum pumping system 500.

[0014] The main body 200 includes an electron gun 210, an irradiation optical system 220 for irradiating the sample S with electrons emitted from the electron gun 210, a holder support 230 having an insertion port through which the sample holder 300 can be inserted and removed, an imaging optical system 240 for forming an image of the electrons that have passed through the sample S, an imaging device 250 for capturing a transmission electron microscope image (TEM image) formed by the electrons that have passed through the sample S, and a detector 260 for detecting the electrons that have passed through the sample S to obtain a scanning transmission electron microscope image (STEM image). The electron gun 210, the irradiation optical system 220, and the imaging optical system 240 constitute an electron tube 204. The main body 200 is supported by a vibration isolation table 270. The interior of the electron tube 204, including the sample chamber 202, is maintained in a vacuum state.

[0015] In the main body 200, the irradiation optical system 220 focuses the electron beam to form an electron probe and deflects the electron beam. This allows the electron probe to scan the sample S. In the transmission electron microscope 2, a STEM image can be acquired by detecting electrons transmitted through the sample S with the detector 260 while the electron probe is scanned across the sample S. In addition, in the transmission electron microscope 2, the irradiation optical system 220 irradiates the sample S with a parallel electron beam, the imaging optical system 240 forms a TEM image using the electrons transmitted through the sample S, and the imaging device 250 captures the TEM image, thereby acquiring a TEM image.

[0016] The configuration of the main body 200 is not particularly limited, and may include, for example, various detectors, various spectroscopes, various manipulators, etc. For example, the main body 200 may include an X-ray detector that detects characteristic X-rays generated from the sample S by irradiating the sample S with an electron beam.

[0017] The main body 200 has a sample chamber 202 in which a sample S is placed. The sample S placed in the sample chamber 202 is supported by a sample holder 300. The sample holder 300 is inserted into an insertion opening of the holder support part 230. The sample holder 300 can be inserted into and removed from the insertion opening of the holder support part 230. Therefore, the sample holder 300 can be attached to and detached from the holder support part 230.

[0018] The control unit 400 controls each part of the transmission electron microscope 2. The control unit 400 includes, for example, a processor such as a CPU (Central Processing Unit) and a storage device (memory) such as a RAM (Random Access Memory) and a ROM (Read Only Memory). The storage device stores programs and data for performing various controls. The functions of the control unit 400 can be realized by executing the programs with the processor. The control unit 400 may be realized, for example, by a general-purpose circuit such as a microcontroller or microprocessor that operates according to a program, or by a dedicated circuit such as an ASIC (Application Specific Integrated Circuit).

[0019] The vacuum exhaust system 500 evacuates the space inside the column 204 including the sample chamber 202, the space in which the imaging device 250 and the detector 260 are disposed, and the like. The vacuum exhaust system 500 is also used for pre-evacuation when the sample holder 300 is introduced into the sample chamber 202. The vacuum exhaust system 500 is controlled by the control unit 400. Note that the computer functioning as the control unit 400 and the vacuum exhaust system 500 may be located outside the housing 100.

[0020] 1.2. Housing FIG. 2 is a perspective view that schematically shows the housing 100. As shown in FIG. 2, the housing 100 has a rectangular parallelepiped shape. The housing 100 includes a plurality of metal plates. The metal plates are metal plates. The housing 100 covers the main body 200 with the plurality of metal plates. Therefore, the main body 200 cannot be seen from outside the housing 100. Note that the housing 100 may include a plurality of resin plates, and the main body 200 may be covered with the plurality of resin plates.

[0021] FIG. 3 is a front view schematically showing the transmission electron microscope 2. As shown in FIG.

[0022] 2 and 3, a recess 110 is formed in the housing 100. The recess 110 is provided on a side surface 102 of the housing 100. The side surface 102 is a surface that forms the front surface of the housing 100. An opening 120 is formed in a bottom 112 of the recess 110. The opening 120 is a hole through which the sample holder 300 can access the insertion opening of the holder support part 230.

[0023] The housing 100 is equipped with an operation unit 130 that accepts user operations. The operation unit 130 is provided on a side surface 102 of the housing 100. That is, the operation unit 130 and the recess 110 are provided on the same side surface 102. When the operation unit 130 accepts a user operation, the control unit 400 executes processing in accordance with the user operation.

[0024] 4 is a cross-sectional view schematically showing the main part of the transmission electron microscope 2. Note that FIG. 4 is a cross-sectional view taken along line IV-IV in FIG.

[0025] The recess 110 has, for example, a truncated cone shape. The recess 110 has a truncated cone shape in which the cross-sectional area increases from the bottom 112 of the recess 110 toward the opening 114 of the recess 110. Therefore, the diameter of the opening 114 of the recess 110 is larger than the diameter of the bottom 112 of the recess 110. An opening 120 is formed in the bottom 112 of the recess 110.

[0026] The housing 100 includes a first metal plate 140 (an example of a first member) and a second metal plate 142 (an example of a second member). The first metal sheet 140 includes a first metal sheet 142 (an example of a third member) and a third metal sheet 144 (an example of a third member). The first metal sheet 140 is a cylindrical member whose inner surface is a truncated cone surface. The inner surface of the first metal sheet 140 defines the side surface 113 of the recess 110. When viewed from a direction along a perpendicular line P perpendicular to the bottom 112 of the recess 110, that is, in a plan view viewed from the opening 114 side of the recess 110 (hereinafter simply referred to as "plan view"), the first metal sheet 140 overlaps with the second metal sheet 142.

[0027] The second metal sheet 142 defines the bottom 112 of the recess 110. The second metal sheet 142 is a flat plate, and the surface of the second metal sheet 142 defines the bottom 112 of the recess 110. An opening 120 is formed in the second metal sheet 142. The opening 120 is a through-hole that penetrates the second metal sheet 142. The sample holder 300 can access the insertion port 232 of the holder support part 230 from the opening 120.

[0028] A gap 141 is provided between the first metal sheet 140 and the second metal sheet 142. In other words, the first metal sheet 140 and the second metal sheet 142 are not in contact with each other. The gap 141 surrounds the bottom 112 of the recess 110. In a plan view, the shape of the gap 141 is a circle surrounding the bottom 112 of the recess 110.

[0029] The third metal plate 144 constitutes the side surface 102 of the housing 100. The first metal plate 140 is connected to the third metal plate 144. The opening 114 of the recess 110 is formed in the third metal plate 144. The third metal plate 144 is a flat plate, and has a through hole that becomes the opening 114 formed therein.

[0030] The housing 100 includes an illumination device 150 that illuminates the bottom 112 of the recess 110. This allows the opening 120 formed in the bottom 112 of the recess 110 and the insertion slot 232 of the holder support portion 230 to be illuminated.

[0031] The lighting device 150 includes a plurality of light-emitting elements 152. The plurality of light-emitting elements 152 are arranged on the second metal sheet 142. The plurality of light-emitting elements 152 are arranged between the first metal sheet 140 and the second metal sheet 142. The plurality of light-emitting elements 152 are arranged deep in the gap 141. In a plan view, the plurality of light-emitting elements 152 are arranged on the back side of the first metal sheet 140 and cannot be seen from the outside. In other words, the first metal sheet 140 functions as a shielding member that shields the plurality of light-emitting elements 152 so that the user cannot see them from the outside.

[0032] Although not shown, multiple light-emitting elements 152 may be arranged between the second metal plate 142 and the third metal plate 144, and the third metal plate 144 may function as a shielding member that shields the multiple light-emitting elements 152.

[0033] Light emitted from each of the plurality of light-emitting elements 152 passes through the gaps 141 and is irradiated onto the bottom 112 of the recess 110. Therefore, the bottom 112 of the recess 110 is illuminated by the light leaking from the gaps 141. In this way, the lighting device 150 uses the plurality of light-emitting elements 152 arranged at positions that are not visible to the user to illuminate the bottom 112 of the recess 110 with the light leaking from the gaps 141. In other words, the lighting device 150 indirectly illuminates the bottom 112 of the recess 110.

[0034] The light emitting element 152 is, for example, a light emitting diode (LED). The light emitting element 152 is not particularly limited as long as it is an element that can emit light, and may be a laser diode (LD). The lighting device 150 can change the color and intensity of the light. The lighting device 150 is controlled by the control unit 400.

[0035] Fig. 5 is a plan view schematically showing the lighting device 150. In Fig. 5, the bottom 112 of the recess 110 is indicated by a dashed line.

[0036] The plurality of light-emitting elements 152 are arranged around the bottom 112 of the recess 110. The plurality of light-emitting elements 152 are arranged, for example, at equal intervals. In the example shown in Fig. 5, the plurality of light-emitting elements 152 are arranged in a hexagonal shape surrounding the bottom 112 of the recess 110. In the lighting device 150, the plurality of light-emitting elements 152 arranged around the bottom 112 of the recess 110 illuminate the bottom 112 of the recess 110 isotropically.

[0037] Although not shown, the plurality of light-emitting elements 152 may be arranged in a polygonal or circular shape surrounding the bottom 112 of the recess 110. The plurality of light-emitting elements 152 may also be arranged in a circular shape, for example, with the center of the bottom 112 of the recess 110 as its center and with a radius larger than that of the bottom 112 of the recess 110.

[0038] In the example shown in FIG. 5, the lighting device 150 has a plurality of light-emitting elements 152, including a first light-emitting element 152a, a second light-emitting element 152b, a third light-emitting element 152c, a fourth light-emitting element 152d, a fifth light-emitting element 152e, and a sixth light-emitting element 152f.

[0039] The first light-emitting element 152a and the second light-emitting element 152b face each other, and the bottom 112 of the recess 110 is located between the first light-emitting element 152a and the second light-emitting element 152b. In plan view, the first light-emitting element 152a and the second light-emitting element 152b are arranged on an imaginary line passing through the center of the bottom 112 of the recess 110. In other words, the first light-emitting element 152a and the second light-emitting element 152b are arranged symmetrically with the bottom 112 of the recess 110 in between.

[0040] The third light-emitting element 152c and the fourth light-emitting element 152d are arranged in the same manner as the first light-emitting element 152a and the second light-emitting element 152b. That is, the third light-emitting element 152c and the fourth light-emitting element 152d face each other, and the bottom 112 of the recess 110 is located between the third light-emitting element 152c and the fourth light-emitting element 152d. The fifth light-emitting element 152e and the sixth light-emitting element 152f are arranged in the same manner as the first light-emitting element 152a and the second light-emitting element 152b.

[0041] The pair of the first light emitting element 152a and the second light emitting element 152b, the pair of the third light emitting element 152c and the fourth light emitting element 152d, and the pair of the fifth light emitting element 152e and the sixth light emitting element 152f are arranged at intervals of 60°.

[0042] 5, the first light-emitting element 152a has a thin and long shape, but the shape is not particularly limited. Similarly to the first light-emitting element 152a, the shapes of the second light-emitting element 152b, the third light-emitting element 152c, the fourth light-emitting element 152d, the fifth light-emitting element 152e, and the sixth light-emitting element 152f are also not particularly limited.

[0043] The first light-emitting element 152a has a plurality of light-emitting portions that can emit light of different colors (wavelengths). Therefore, the first light-emitting element 152a can emit light of various colors. The second light-emitting element 152b, the third light-emitting element 152c, the fourth light-emitting element 152d, the fifth light-emitting element 152e, and the sixth light-emitting element 152f can also emit light of various colors, similar to the first light-emitting element 152a.

[0044] 6 and 7 are diagrams for explaining the operation of the lighting device 150. Note that Fig. 6 shows a state in which the lighting device 150 illuminates the bottom 112 of the recessed portion 110, and Fig. 7 shows a state in which the lighting device 150 does not illuminate the bottom 112 of the recessed portion 110.

[0045] 6, lighting device 150 illuminates bottom 112 of recess 110 with light leaking from gap 141, so the light appears to be ring-shaped. Bottom 112 of recess 110 is illuminated with this ring-shaped light.

[0046] 4, light emitted by light-emitting element 152 passes through gap 141 and is irradiated onto bottom 112 and side surface 113 of recess 110. Side surface 113 of recess 110 is a truncated cone surface whose cross-sectional area increases from bottom 112 of recess 110 toward opening 114 of recess 110. Therefore, the intensity of light irradiated onto side surface 113 of recess 110 gradually decreases from bottom 112 of recess 110 toward opening 114 of recess 110. This allows a gradation of brightness to be created in the outline of the ring-shaped light.

[0047] Furthermore, because recess 110 is shaped like a truncated cone, the light leaking from gap 141 takes on a ring shape, making it possible to isotropically illuminate bottom 112 of recess 110. For example, if recess 110 is shaped like a truncated pyramid, corners will form in recess 110, creating areas that are shaded and not illuminated by light, making it difficult to isotropically illuminate the bottom of recess 110.

[0048] FIG. 8 is a plan view schematically showing the operation unit 130. As shown in FIG.

[0049] The operation unit 130 includes a display unit 132 that displays the state of the main body unit 200, and a touch panel 134 that accepts user operations. The display unit 132 and the touch panel 134 are provided on the side surface 102 of the housing 100.

[0050] Display unit 132 includes display 132a, display 132b, and display 132c. Display 132a displays an icon indicating that an electron beam is being generated. Display 132b displays an icon indicating that the electron tube 204 is in a baking state. Display 132c displays an icon indicating that the liquid nitrogen tank is in a baking state. The liquid nitrogen tank is a tank that contains liquid nitrogen for cooling used in a cold trap that maintains a high vacuum inside the electron tube 204. During normal use, an icon indicating the status of main body unit 200 is displayed on display unit 132 depending on the status of main body unit 200.

[0051] The display unit 132 is controlled by the control unit 400. The control unit 400 controls the display devices 132a, 132b, and 132c based on the state of the main body unit 200.

[0052] The touch panel 134 includes an IN button 136a and an OUT button 136b. The IN button 136a is a button for starting pre-evacuation. The OUT button 136b is a button for venting the pre-evacuation chamber to the atmosphere.

[0053] Touch panel 134 further includes six buttons (button 138a, button 138b, button 138c, button 138d, button 138e, and button 138f) for device maintenance.

[0054] Button 138a is a button that opens the inside of the lens barrel 204 to the atmosphere. When button 138a is pressed, the control unit 400 opens a valve located between the inside of the lens barrel 204 and the outside. This opens the inside of the lens barrel 204 to the atmosphere. Button 138b is a button that puts the inside of the lens barrel 204 into a vacuum state. By pressing button 138b, the control unit 400 controls the vacuum exhaust system 500 so that the inside of the lens barrel 204 is evacuated to a vacuum. Button 138d is a button that turns on the main power of the main body unit 200. Button 138e is a button that turns off the main power of the main body unit 200. Button 138f is a button that resets the computer that functions as the control unit 400. Button 138c is a button that enables buttons 138a, 138b, 138d, 138e, and 138f.

[0055] 9 is a cross-sectional view schematically showing the operation unit 130. FIG. 9 is a cross-sectional view taken along line IX-IX in FIG.

[0056] As shown in FIG. 9 , the display 132a includes a transparent plate 30, an electrostatic panel 32, an optical waveguide 34, a light-emitting element 36, and a control board 38. The transparent plate 30 is, for example, an acrylic plate, and has an icon printed thereon indicating the generation of electron beams. The electrostatic panel 32 is disposed on the rear side of the transparent plate 30. The electrostatic panel 32 is, for example, transparent. The light-emitting element 36 is disposed on the rear side of the electrostatic panel 32. Light emitted by the light-emitting element 36 is guided through the optical waveguide 34 to illuminate the transparent plate 30. When the light-emitting element 36 is lit, the icon printed on the transparent plate 30 is illuminated, making the icon visible. On the other hand, when the light-emitting element 36 is turned off, the icon is invisible. The light-emitting element 36 is mounted on the control board 38. The light-emitting element 36 is controlled by a control unit 400.

[0057] The display 132b and the display 132c are configured in the same manner as the display 132a.

[0058] The IN button 136a includes a transparent plate 30, an electrostatic touch sensor 31 incorporated in an electrostatic panel 32, an optical waveguide 34, a light-emitting element 36, and a control board 38. The transparent plate 30, the electrostatic panel 32, the optical waveguide 34, and the control board 38 are common to the display 132a. The transparent plate 30 has the name of the button printed thereon. The light-emitting element 36 lights up, making the name of the button printed on the transparent plate 30 visible. The IN button 136a can be switched on and off by the touch sensor 31 accepting a touch operation.

[0059] The other buttons on touch panel 134, namely, OUT button 136b, button 138a, button 138b, button 138c, button 138d, button 138e, and button 138f, have the same configuration as IN button 136a.

[0060] In the above description, the buttons on the touch panel 134 are electrostatic buttons, but the buttons on the touch panel 134 may be pressure-sensitive buttons.

[0061] FIG. 10 is a plan view that schematically shows the operation unit 130 in the normal mode, and FIG. 11 is a plan view that schematically shows the operation unit 130 in the maintenance mode.

[0062] 10, IN button 136a and OUT button 136b are visible and button operation is enabled. In contrast, buttons on touch panel 134 other than IN button 136a and OUT button 136b are invisible and button operation is disabled. This makes it possible to prevent accidental operation of buttons used during maintenance by mistake during normal operation.

[0063] In the example shown in FIG. 10, the indicators 132a, 132b, and 132c are turned off, but depending on the state of the main body 200, the indicators 132a, 132b, and 132c are turned on.

[0064] To switch from the normal mode shown in FIG. 10 to the maintenance mode shown in FIG. 11, first touch any of the unlit buttons on touch panel 134, or touch multiple unlit buttons simultaneously. This lights up light-emitting element 36 of button 138c, making operation of button 138c valid. Next, perform a touch operation by touching button 138c for a certain period of time. This makes buttons 138a, 138b, 138d, 138e, and 138f visible, as shown in FIG. 11, making operation of these buttons valid.

[0065] The method for activating the button 138c is not limited to this. For example, 34 may have a sensor that detects the approach of a user, and when the sensor detects the user, the light emitting element 36 of the button 138c may light up, making operation of the button 138c valid.

[0066] 1.3. Specimen holder and holder support Fig. 12 is a diagram schematically showing the sample holder 300. The sample holder 300 shown in Fig. 12 is rotated by 90° from the sample holder 300 shown in Fig. 4.

[0067] As shown in FIGS. 4 and 12, the sample holder 300 includes a sample holding portion 310, a shaft 320, a grip 330, a guide pin 340, and a shielding plate 350.

[0068] The sample holder 310 holds the sample S. The sample holder 310 is provided at the tip of the shaft 320. The sample holder 310 has, for example, a leaf spring and a sample stage, and the sample grid to which the sample S is fixed can be fixed to the sample stage by the leaf spring. Note that the method for holding the sample S in the sample holder 310 is not particularly limited.

[0069] An O-ring 322 is attached to the shaft 320 to provide an airtight seal between the sample holder 300 and the inner surface of the insertion port 232. The grip 330 is provided at the rear end of the shaft 320. The grip 330 is the part of the sample holder 300 that is held by the user.

[0070] The guide pin 340 guides the sample holder 300 when the sample S held by the sample holder 300 is introduced into the sample chamber 202. The shielding plate 350 is attached to the grip 330. The shielding plate 350 is used to detect the insertion state of the sample holder 300.

[0071] Fig. 13 is a plan view schematically showing the holder support part 230. Fig. 14 is a diagram for explaining the insertion opening 232 of the holder support part 230.

[0072] The insertion port 232 connects the outside of the main body 200 with the sample chamber 202. A guide groove 234 is formed on the inner wall of the insertion port 232. By moving the guide pin 340 of the sample holder 300 along the guide groove 234, the sample S held in the sample holding portion 310 can be introduced into the sample chamber 202.

[0073] 14, the guide groove 234 includes a first portion 234a, a second portion 234b, and a third portion 234c. The first portion 234a is provided along the central axis of the insertion opening 232. The second portion 234b connects the first portion 234a and the third portion 234c. The second portion 234b is provided within an angular range of 90° around the central axis of the insertion opening 232. The third portion 234c is provided along the central axis of the insertion opening 232.

[0074] The holder support part 230 has a gate valve 236 and a switch 238 for opening and closing the gate valve 236. The gate valve 236 is provided in the insertion port 232. The gate valve 236 is a valve that separates the sample chamber 202 from the outside (atmospheric side) of the main body part 200. The switch 238 is provided in the second part 234b of the guide groove 234. The switch 238 is switched on and off when the guide pin 340 of the sample holder 300 passes through the second part 234b of the guide groove 234.

[0075] As shown in FIG. 13, the holder support part 230 has a sensor 239 that detects that the sample S has been introduced into the sample chamber 202.

[0076] A receiving portion 235 for receiving the shielding plate 350 is provided near the entrance of the insertion opening 232. The receiving portion 235 is a hole that receives the shielding plate 350. When the sample S held by the sample holder 300 is placed in the sample chamber 202, the shielding plate 350 is inserted into the receiving portion 235. The sensor 239 detects that the sample S has been introduced into the sample chamber 202 by the shielding plate 350 being inserted into the receiving portion 235.

[0077] The sensor 239 includes a light-emitting element 239a, such as a light-emitting diode or a laser, and a photodetector 239b that detects light emitted by the light-emitting element 239a. When the sample S is placed in the sample chamber 202, the shielding plate 350 is inserted into the receiving portion 235. This positions the shielding plate 350 between the light-emitting element 239a and the photodetector 239b. As a result, the light emitted by the light-emitting element 239a is blocked by the shielding plate 350, and the intensity of the light detected by the photodetector 239b decreases. In this way, it is possible to detect whether the sample S has been introduced into the sample chamber 202 from a change in the intensity of the light detected by the photodetector 239b.

[0078] 2. Processing of the control section 2.1. Device Status Indication Process The control unit 400 controls the lighting device 150 based on the state of the main body unit 200. The control unit 400 controls at least one of the color and intensity of light based on the state of the main body unit 200. This allows the user to easily know the state of the main body unit 200. This reduces the possibility that the user will proceed with operations despite the fact that there is an abnormality in the main body unit 200, thereby damaging the main body unit 200.

[0079] For example, when the main body 200 is off, i.e., when the vacuum exhaust system 500 is not operating and no electron beam is being emitted, the control unit 400 turns off the illumination device 150. When the vacuum exhaust system 500 starts operating, the control unit 400 causes the light emitted by the illumination device 150 to blink, and when a predetermined degree of vacuum is reached inside the microscope tube 204, the control unit 400 turns on the illumination device 150 in white. Therefore, the transmission electron microscope 2 can easily determine whether the main body 200 is available for use.

[0080] The control unit 400 lights the illumination device 150 in yellow when the inside of the lens barrel 204 is open to the atmosphere (vented). Therefore, in the transmission electron microscope 2, it is easy to know whether the inside of the lens barrel 204 is open to the atmosphere. When the lens barrel 204 of the main body 200 is in a baking state, the control unit 400 lights the illumination device 150 in orange. Therefore, in the transmission electron microscope 2, it is easy to know whether the lens barrel 204 is in a baking state.

[0081] If an error occurs in the computer functioning as the control unit 400, the control unit 400 lights up the illumination device 150 in red. Therefore, the transmission electron microscope 2 can notify the user that the main body 200 cannot be controlled correctly.

[0082] The above-described process in which the control unit 400 controls the lighting device 150 based on the state of the main body 200 is an example, and is not limited to this. The control unit 400 controls at least one of the color and intensity of light based on the state of the main body 200.

[0083] 2.2. Processing to indicate the insertion status of the sample holder The control unit 400 controls the illumination device 150 based on the insertion state of the sample holder 300. Here, in order to introduce the sample S into the sample chamber 202, preliminary evacuation must be performed, and the sample holder 300 must be inserted stepwise into the insertion port 232 of the holder support part 230.

[0084] In the transmission electron microscope 2, the insertion state of the sample holder 300 is detected using a switch 238, a sensor 239, a vacuum gauge that detects the degree of vacuum in the preliminary exhaust chamber, and the like. Based on these detection results, the control unit 400 controls the illumination device 150. The control unit 400 controls at least one of the color and intensity of the light based on the insertion state of the sample holder 300. This allows the user to know the insertion state of the sample holder 300 from changes in the color and intensity of the light emitted by the illumination device 150. Below, the processing of the control unit 400 will be explained while explaining the procedure for introducing the sample S into the sample chamber 202.

[0085] FIG. 15 is a flowchart showing an example of a procedure for introducing the sample S into the sample chamber 202.

[0086] When introducing the sample S into the sample chamber 202, the user first checks whether the main body 200 is in a state where the sample S can be introduced (S10). If the sample S can be introduced, the illumination device 150 lights up in white. This allows the user to easily know that the main body 200 is in a state where the sample S can be introduced.

[0087] Next, the user carries the tip of the sample holder 300 through the opening 120 formed in the bottom 112 of the recess 110 to the insertion opening 232 of the holder support part 230, and aligns the guide pin 340 with the guide groove 234 (S20). At this time, since the bottom 112 of the recess 110 is illuminated by the lighting device 150, the user can easily align the guide pin 340 with the guide groove 234.

[0088] Next, with the guide pin 340 aligned with the guide groove 234, the sample holder 300 is pushed into the insertion port 232, and the sample holding part 310 is moved into the pre-evacuation chamber (S30). By pushing the sample holder 300 into the insertion port 232, the guide pin 340 is guided by the first part 234a of the guide groove 234, and the sample holder 300 moves inside the insertion port 232. When the guide pin 340 reaches the second part 234b, the sample holder 300 stops. As a result, the sample holding part 310 is positioned in the pre-evacuation chamber, which is the space between the gate valve 236 and the O-ring 322 of the sample holder 300.

[0089] Next, the pre-evacuation chamber is pre-evacuated (S40). The pre-evacuation starts when the user presses the IN button 136a. In the pre-evacuation, the pre-evacuation chamber is evacuated by the vacuum exhaust system 500. The control unit 400 operates the vacuum exhaust system 500 based on the operation information from the IN button 136a. This starts the pre-evacuation.

[0090] When pre-evacuation starts, the control unit 400 causes the lighting device 150 to blink in blue. When the IN button 136a is pressed, the control unit 400 determines that pre-evacuation has started and causes the lighting device 150 to blink in blue. When the pre-evacuation chamber pressure falls below a predetermined pressure, the control unit 400 causes the lighting device 150 to light up in blue. The control unit 400 determines that the pre-evacuation chamber pressure falls below a predetermined pressure based on, for example, the measurement results of a pressure gauge (vacuum gauge) that measures the pressure (degree of vacuum) in the pre-evacuation chamber.

[0091] In this way, when pre-evacuation is complete, the illumination device 150 switches from flashing blue to lighting blue, allowing the user to easily know that pre-evacuation is complete.

[0092] Next, the gate valve 236 is opened (S50). The user rotates the sample holder 300 by 90° around the shaft 320 as the rotation axis. As a result, the guide pin 340 is guided by the second portion 234b of the guide groove 234 and reaches the third portion 234c. At this time, the guide pin 340 hits the switch 238, turning the switch 238 ON. When the switch 238 is turned ON, the control unit 400 opens the gate valve 236.

[0093] Next, the sample holder 300 is pushed in to move the sample holding part 310 to the sample chamber 202. The user pushes the sample holder 300 in when the guide pin 340 reaches the third portion 234c. This causes the guide pin 340 to be guided by the third portion 234c, and the sample holder 300 moves inside the insertion opening 232. As a result, the sample holding part 310 moves into the sample chamber 202. Through the above steps, the sample S held by the sample holding part 310 can be introduced into the sample chamber 202.

[0094] When the sample S is placed in the sample chamber 202, the shielding plate 350 of the sample holder 300 is positioned between the light-emitting element 239a and the photodetector 239b. This allows the sensor 239 to detect that the sample S has been introduced into the sample chamber 202. When the sensor 239 detects that the sample S has been introduced into the sample chamber 202, the control unit 400 causes the illumination device 150 to flash blue several times and then light up blue. The illumination device 150 lighting up blue allows the user to know that the sample S has been placed in the sample chamber 202.

[0095] In the above description, the control unit 400 blinks or lights up the illumination device 150 based on the insertion state of the sample holder 300. However, the control unit 400 may change at least one of the color and intensity of light emitted by the illumination device 150 based on the insertion state of the sample holder 300. Here, changing the intensity of light emitted by the illumination device 150 includes changing the brightness of the light, switching between blinking, lighting, and turning off, changing the blinking cycle, changing the number of blinks, and changing the blinking pattern.

[0096] In addition, in the above, the insertion state of the sample holder 300 is detected by the switch 238, the sensor 239, and a pressure gauge (vacuum gauge) that measures the pressure in the preliminary exhaust chamber, but the means for detecting the insertion state of the sample holder 300 are not limited to these.

[0097] 2.3. Energy Saving Mode When no operation is performed on the touch panel 134 for a predetermined period of time, the control unit 400 reduces the intensity of the light emitted by the lighting device 150. For example, the control unit 400 reduces the intensity of the light emitted by the lighting device 150 to 50%. When a touch operation is performed on the touch panel 134 while the light intensity is reduced, the control unit 400 returns the intensity of the light emitted by the lighting device 150 to the original intensity.

[0098] 3. Effects The transmission electron microscope 2 includes a sample holder 300, a main body 200 equipped with a holder support part 230 having an insertion opening 232 through which the sample holder 300 can be inserted and removed, and a housing 100 that houses the main body 200. The housing 100 also has an opening 120 formed in a recess 110 and a bottom 112 of the recess 110, through which the sample holder 300 can access the insertion opening 232. The housing 100 also has an illumination device 150 that illuminates the bottom 112 of the recess 110. Therefore, in the transmission electron microscope 2, the bottom 112 of the recess 110 can be illuminated, thereby improving visibility when inserting the sample holder 300 into the insertion opening 232 through the opening 120. Therefore, in the transmission electron microscope 2, the sample S can be easily introduced into the sample chamber 202.

[0099] 1, in the main body 200, the microscope barrel 204 including the sample chamber 202 is narrower than the vibration isolation table 270 and the like. Therefore, in the transmission electron microscope 2, a recess 110 is provided in the rectangular parallelepiped housing 100, allowing the sample holder 300 to be inserted into the insertion opening 232. However, the lighting in the room in which the transmission electron microscope 2 is installed may not be able to illuminate the bottom 112 of the recess 110. In the transmission electron microscope 2, the housing 100 has an illumination device 150, which can illuminate the bottom 112 of the recess 110 and improve visibility.

[0100] In the transmission electron microscope 2, the shape of the recess 110 is a truncated cone whose cross-sectional area increases from the bottom 112 of the recess 110 toward the opening 114 of the recess 110. In this case, the bottom 112 of the recess 110 is easily visible from any direction. Therefore, for example, in the transmission electron microscope 2, the insertion opening 232 is easily visible regardless of the user's height, dominant hand, or posture. For example, even when the user inserts the specimen holder 300 while seated or while standing, the insertion opening 232 is easily visible without being shaded by the housing 100.

[0101] In the transmission electron microscope 2, the housing 100 includes a first metal sheet 140 that defines the side surface 113 of the recess 110 and a second metal sheet 142 that defines the bottom 112 of the recess 110 and has an opening 120 formed therein. A gap 141 is provided between the first metal sheet 140 and the second metal sheet 142, and the bottom 112 of the recess 110 is illuminated by light leaking through the gap 141. Therefore, in the transmission electron microscope 2, the bottom 112 of the recess 110 can be indirectly illuminated. For example, if light emitted from multiple light-emitting elements 152 is directly irradiated onto the bottom 112 of the recess 110, the light may directly enter the user's eyes and be dazzling, depending on the user's posture or standing position. In the transmission electron microscope 2, the bottom 112 of the recess 110 is illuminated by light leaking through the gap 141, so that the light can be prevented from directly entering the user's eyes.

[0102] In the transmission electron microscope 2, the illumination device 150 includes a plurality of light-emitting elements 152, and light emitted from the plurality of light-emitting elements 152 passes through the gap 141 and is irradiated onto the bottom 112 of the recess 110. Therefore, in the transmission electron microscope 2, the bottom 112 of the recess 110 can be indirectly illuminated.

[0103] In the transmission electron microscope 2, the plurality of light emitting elements 152 are arranged around the bottom 112 of the recess 110. Therefore, in the transmission electron microscope 2, the bottom 112 of the recess 110 can be illuminated isotropically.

[0104] The transmission electron microscope 2 includes a first light-emitting element 152a and a second light-emitting element 152b, and the bottom 112 of the recess 110 is located between the first light-emitting element 152a and the second light-emitting element 152b. Therefore, the transmission electron microscope 2 can illuminate the bottom 112 of the recess 110 isotropically, compared to when the bottom 112 of the recess 110 is illuminated with a single light-emitting element.

[0105] In the transmission electron microscope 2, the housing 100 includes a first metal plate 140 as a shielding member that shields the multiple light-emitting elements 152. Therefore, in the transmission electron microscope 2, it is possible to prevent light from directly entering the user's eyes, and it is possible to make the bottom 112 of the recess 110 more easily visible.

[0106] The transmission electron microscope 2 includes a control unit 400 that controls the illumination device 150 based on the insertion state of the sample holder 300. Therefore, in the transmission electron microscope 2, when the sample S is introduced into the sample chamber 202, the insertion state of the sample holder 300 can be grasped without looking away from the sample holder 300. Therefore, in the transmission electron microscope 2, it is possible to prevent the sample holder 300 from coming into contact with the housing 100 or the like due to the user looking away from the sample holder 300, which could result in damage to the sample S or the sample holder 300.

[0107] In the transmission electron microscope 2, at least one of the color and intensity of the light emitted by the illumination device 150 is controlled based on the insertion state of the specimen holder 300. Therefore, in the transmission electron microscope 2, when the specimen S is introduced into the specimen chamber 202, the insertion state of the specimen holder 300 can be grasped without taking one's eyes off the specimen holder 300.

[0108] In the transmission electron microscope 2, when preliminary evacuation is completed for introducing the sample S into the sample chamber 202, at least one of the color and intensity of the light emitted by the illumination device 150 is changed. Therefore, in the transmission electron microscope 2, when introducing the sample S into the sample chamber 202, it is possible to know that preliminary evacuation has been completed without taking one's eyes off the sample holder 300.

[0109] The transmission electron microscope 2 includes a control unit 400 that controls the illumination device 150 based on the state of the main body 200. Therefore, the state of the main body 200 can be easily grasped in the transmission electron microscope 2. Furthermore, in the transmission electron microscope 2, when the sample S is introduced into the sample chamber 202, the state of the main body 200 can be grasped without taking your eyes off the sample holder 300.

[0110] In the transmission electron microscope 2, the housing 100 includes a touch panel 134 that accepts user operations. The touch panel 134 is disposed on the side surface 102 on which the recess 110 of the housing 100 is formed. Therefore, in the transmission electron microscope 2, the recess 110 and the touch panel 134 are disposed on the same side surface of the housing 100, making it easy to operate the touch panel 134 when introducing the sample S into the sample chamber 202.

[0111] 4. Variations 4.1. First Variant In the above embodiment, the control unit 400 controls the illumination device 150, the main body 200, and the vacuum exhaust system 500. However, the control unit that controls the main body 200 and the vacuum exhaust system 500 may be separate from the control unit that controls the illumination device 150. That is, the transmission electron microscope 2 may have a computer that functions as a control unit that controls the main body 200 and the vacuum exhaust system 500, and a computer that functions as a control unit that controls the illumination device 150. In this case, information on the insertion state of the sample holder 300 and information on the state of the main body 200 may be sent from the control unit that controls the main body 200 to the control unit that controls the illumination device 150.

[0112] 4.2. Second Variant 16 is a perspective view that schematically shows a modified example of the transmission electron microscope 2. The transmission electron microscope 2 may be provided with a liquid receiver 160 as shown in FIG.

[0113] The liquid receptacle 160 is detachably attached to the housing 100, for example, by magnetic force. If the sample holder 300 is a sample holder for a cryo-electron microscope equipped with a tank containing a coolant such as liquid nitrogen or liquid helium, there is a risk that the coolant will spill from the sample holder 300 and the user will be splashed with the coolant when the sample S is introduced into the sample chamber 202. The transmission electron microscope 2 can use the liquid receptacle 160 to catch any coolant that spills from the sample holder 300, thereby preventing the user from being splashed with the coolant. In addition, any coolant that spills from the tank of the sample holder 300 can be collected.

[0114] 4.3. Third Variant In the above-described embodiment, as shown in FIG. 5 , the illumination device 150 illuminates the bottom 112 of the recess 110 using a plurality of light-emitting elements 152 surrounding the periphery of the bottom 112 of the recess 110. However, the configuration of the illumination device 150 is not limited to this. For example, the illumination device 150 may illuminate the bottom 112 of the recess 110 by combining one light-emitting element with a plurality of mirrors that reflect the light emitted by the one light-emitting element. Alternatively, the illumination device 150 may illuminate the bottom 112 of the recess 110 by combining a plurality of light-emitting elements with a plurality of mirrors. Alternatively, the illumination device 150 may include a light-emitting element and an optical waveguide such as an optical fiber, and may illuminate the bottom 112 of the recess 110 by propagating light emitted by a light-emitting element disposed at a position away from the bottom 112 of the recess 110 using the optical waveguide.

[0115] 4.4. Fourth Variant In the above-described embodiment, the charged particle beam device according to the present invention is described as a transmission electron microscope, but the charged particle beam device according to the present invention can also be applied to other charged particle beam devices equipped with an optical system for irradiating a sample with a charged particle beam such as an electron beam or an ion beam. For example, the charged particle beam device according to the present invention can be applied to a scanning electron microscope, an Auger electron spectrometer, or The charged particle beam device according to the present invention may be an electron probe microanalyzer. Also, the charged particle beam device according to the present invention may be a focused ion beam device that irradiates a sample with an ion beam.

[0116] The above-described embodiment and modifications are merely examples, and the present invention is not limited to these. For example, the embodiments and modifications can be combined as appropriate.

[0117] The present invention is not limited to the above-described embodiments, and various modifications are possible. For example, the present invention includes configurations that are substantially identical to the configurations described in the embodiments. A substantially identical configuration means, for example, a configuration with the same function, method, and result, or a configuration with the same purpose and effect. The present invention also includes configurations in which non-essential parts of the configurations described in the embodiments are replaced. The present invention also includes configurations that achieve the same effects or purposes as the configurations described in the embodiments. The present invention also includes configurations in which publicly known technology is added to the configurations described in the embodiments. [Explanation of symbols]

[0118] 2...transmission electron microscope, 30...transparent plate, 31...touch sensor, 32...electrostatic panel, 34...optical waveguide section, 36...light emitting element, 38...control board, 100...casing, 102...side surface, 110...recess, 112...bottom, 113...side surface, 114...opening, 120...opening, 130...operation section, 132...display section, 132a...display, 132b...display, 132c...display, 134...touch panel panel, 136a...IN button, 136b...OUT button, 138a...button, 138b...button, 138c...button, 138d...button, 138e...button, 138f...button, 140...first metal plate, 141...gap, 142...second metal plate, 144...third metal plate, 150...lighting device, 152...light-emitting element, 152a...first light-emitting element, 152b...second light-emitting element, 152c...third 3 light-emitting element, 152d...fourth light-emitting element, 152e...fifth light-emitting element, 152f...sixth light-emitting element, 160...liquid receiver, 200...main body, 202...sample chamber, 204...optical tube, 210...electron gun, 220...irradiation optical system, 230...holder support part, 232...insertion port, 234...guide groove, 234a...first part, 234b...second part, 234c...third part, 235...receiving part, 23 6...gate valve, 238...switch, 239...sensor, 239a...light emitting element, 239b...photodetector, 240...imaging optical system, 250...imaging device, 260...detector, 270...vibration isolation table, 300...sample holder, 310...sample holding part, 320...shaft, 322...O-ring, 330...grip, 340...guide pin, 350...shield, 400...control part, 500...vacuum exhaust system

Claims

1. a sample holder for holding a sample; a main body including an optical system for irradiating the sample with a charged particle beam and a holder support having an insertion opening through which the sample holder can be inserted and removed; a housing that houses the main body; Including, the housing is formed with a recess and an opening at the bottom of the recess for allowing the sample holder to access the insertion opening; The housing has an illumination device that illuminates the bottom of the recess.

2. In claim 1, The charged particle beam device, wherein the recess has a truncated cone shape whose cross-sectional area increases from the bottom of the recess toward the opening of the recess.

3. In claim 1 or 2, The housing includes: a first member defining a side surface of the recess; a second member defining a bottom of the recess and having the opening; Including, A gap is provided between the first member and the second member, The bottom of the recess is illuminated by light leaking through the gap.

4. In claim 3, the lighting device includes a plurality of light-emitting elements; The light emitted from the plurality of light-emitting elements passes through the gap and is irradiated onto the bottom of the recess.

5. In claim 1 or 2, the lighting device includes a plurality of light-emitting elements; The plurality of light-emitting elements are arranged around the bottom of the recess.

6. In claim 1 or 2, the lighting device includes a first light-emitting element and a second light-emitting element, a bottom of the recessed portion positioned between the first light-emitting element and the second light-emitting element;

7. In claim 1 or 2, the lighting device includes a plurality of light-emitting elements; The housing includes a shielding member that shields the plurality of light-emitting elements.

8. In claim 1 or 2, a control unit that controls the illumination device based on an insertion state of the sample holder;

9. In claim 8, The control unit controls at least one of the color and intensity of light emitted by the illumination device based on the insertion state of the sample holder.

10. In claim 9, The control unit changes at least one of the color and intensity of the light emitted by the illumination device when preliminary evacuation for introducing the sample into the sample chamber is completed.

11. In claim 1 or 2, A charged particle beam device comprising: a control unit that controls the illumination device based on a state of the main body unit.

12. In claim 1 or 2, the housing includes a touch panel that accepts user operations; The touch panel is provided on the side of the housing where the recess is formed.

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