Positioning method, press-fitting device, pin processing method, exposure device and article manufacturing method

Abstract

To provide a positioning method that can improve accuracy in positioning a second member with respect to a first member by tiling a pin in a desired direction.SOLUTION: A positioning method, which positions a second member with respect to a first member, by butting the second member against a pin press-fitted into a hole formed in the first member, includes: a deforming step of deforming the pin; a press-fitting step of press-fitting the pin deformed in the deforming step into the hole; and a positioning step of butting the second member against the pin press-fitted into the hole in the press-fitting step. A center position in a longitudinal direction of a region where the pin is deformed in the deforming step is at a side at which the second member is butted against a central shaft of the pin.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a positioning method, a press-fitting device, a pin processing method, an exposure device, and an article manufacturing method. [Background technology]

[0002] In a manufacturing process for manufacturing an article by combining multiple members, there is a method for using pins to position a second member relative to a first member and fix the relative positions of the first and second members. Patent Document 1 discloses a pin driving device that automatically presses positioning pins into holes. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-54937 Summary of the Invention [Problem to be solved by the invention]

[0004] When a positioning pin is press-fitted into a hole, the possibility of the pin coming out of the hole can be reduced by using a crimped and deformed pin. This crimping is performed by applying force from the outer periphery of the pin to the center of the pin using a tool or the like to deform the pin. When a crimped pin is press-fitted into a hole, the pin may tilt. This pin tilt varies depending on the conditions when the pin is crimped, and if the pin tilt direction is not the desired direction, the second component may not be positioned correctly relative to the first component.

[0005] Therefore, an object of the present invention is to provide a positioning method that can improve the positioning accuracy of a second member relative to a first member by tilting a pin in a desired direction. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, one aspect of the present invention provides a positioning method for positioning a second member relative to a first member by abutting the second member against a pin that is pressed into a hole provided in the first member, the positioning method including a deformation process for deforming the pin, a press-fit process for pressing the pin deformed in the deformation process into the hole, and a positioning process for abutting the second member against the pin that has been pressed into the press-fit process, wherein the longitudinal center position of the area where the pin is deformed in the deformation process is on the side of the central axis of the pin where the second member is abutted.

[0007] Further objects and other aspects of the present invention will become apparent from the following description of the embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0008] According to the present invention, it is possible to provide a positioning method that can improve the positioning accuracy of a second member relative to a first member by tilting a pin in a desired direction. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 2 is a schematic view of a pin press-fitting device according to the first embodiment. [Figure 2] FIG. 10 is a schematic diagram illustrating a state in which a second member is positioned relative to a first member using a pin. [Figure 3] FIG. 10 is a schematic diagram illustrating a case where a second member abuts against a first member. [Figure 4] FIG. 2 is a schematic diagram of a crimped pin in the first embodiment. [Figure 5] FIG. 10 is a diagram showing an example of the angle of the pin scratches. [Figure 6] FIG. 10 is a diagram illustrating an example of the amount of tilt of a pin. [Figure 7] FIG. 10 is a diagram showing an example of the position of pin scratches in the Z-axis direction. [Figure 8] FIG. 10 is a flowchart showing a process for positioning a second member relative to a first member using a pin in the first embodiment. [Figure 9] FIG. 10 is a schematic view of a pin press-fitting device according to a second embodiment. [Figure 10] FIG. 10 is a flowchart showing a process for positioning a second member relative to a first member using a pin according to the second embodiment. [Figure 11] 10 is an example of a crimped pin in the third embodiment. [Figure 12] FIG. 13 is a flowchart showing a process for positioning a second member relative to a first member using a pin in the fourth embodiment. [Figure 13] FIG. 10 is a flowchart showing a method for manufacturing an article according to a fifth embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, embodiments of the present invention will be described with reference to the drawings. Note that the following embodiments do not limit the scope of the invention claimed. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and the embodiments may be combined in any manner. Furthermore, in the drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0011] In addition, in this specification and drawings, directions are basically shown using an XYZ coordinate system in which the vertical direction is the Z axis and the horizontal plane perpendicular to the vertical direction is the XY plane, with each axis being orthogonal to each other. However, if an XYZ coordinate system is shown in each drawing, that coordinate system takes precedence.

[0012] Specific configurations of each embodiment will be described below.

[0013] First Embodiment Fig. 1 is a schematic diagram of a pin press-fitting device 100 according to this embodiment. As shown in Fig. 1(a), the pin press-fitting device 100 includes a crimping device 110, a press-fitting device 120, a control unit 130, and a storage unit 140. The control unit 130 controls each part of the crimping device 110 and the press-fitting device 120.

[0014] The crimping device 110 includes a supply unit 111, a first transport unit 112, a pin holding unit 113, a pin fixing unit 114, a first drive unit 115a, a first tool 116a, a second drive unit 115b, and a second tool 116b. The first transport unit 112 is, for example, an articulated robot, and includes a gripping unit (robot hand) at its tip that can grip the pin 10 and a rotating unit that can rotate the pin 10. The supply unit 111 stores multiple pins 10. The multiple pins 10 may include, for example, multiple types of pins with different diameters. When the supply unit 111 supplies multiple types of pins, the multiple types of pins are managed by type. The first transport unit 112 transports the desired pin 10 supplied from the supply unit 111 to the pin holding unit 113. The pin 10 is to be press-fit into a predetermined hole provided in the first member 20. The desired pin 10 is, for example, a pin having a diameter corresponding to the diameter of the hole into which it will be press-fitted, or a pin of a desired length.

[0015] FIG. 1(b) is a diagram showing a method for holding the pin 10. The pin holding portion 113 holds the pin 10. This holding may be performed, for example, by clamping the pin 10 or by vacuum-adsorbing the pin 10 by sucking gas, and the holding method is not particularly limited. The height of the pin holding portion 113 is adjustable according to the length of the pin 10 to be held, and by changing the height of the pin 10, the position where the pin 10 is crimped (deformed) can be adjusted. The pin 10 held by the pin holding portion 113 has its upper portion fixed by the pin fixing portion 114. The pin fixing portion 114 fixes the pin 10 by clamping it. In this embodiment, applying force to a predetermined area of ​​the pin 10 to deform the pin 10 may be expressed as "crimping."

[0016] Then, the pin 10, whose position is fixed by the pin holding portion 113 and the pin fixing portion 114, is crimped and deformed at a position between the portion held by the pin holding portion 113 and the portion fixed by the pin fixing portion 114. This crimping is performed by the first tool 116a and the second tool 116b applying force from the outer periphery of the pin 10 to the center of the pin 10 to deform the pin. Specifically, the crimping is performed by sandwiching the pin 10 between the first tool 116a and the second tool 116b. When crimping, the first tool 116a is driven by the first driving portion 115a, and the second tool 116b is driven by the second driving portion 115b.

[0017] The first tool 116a and the second tool 116b are made of a hard material (e.g., tool steel) capable of crimping the pin 10, and apply force to the pin 10 with their tips to create scratches (indentations) in the pin 10, thereby crimping and deforming the pin 10. The first tool 116a and the second tool 116b are, for example, cylindrical members cut at an angle to form pointed tips. The first driving unit 115a and the second driving unit 115b include, for example, air cylinders, and the pin 10 is clamped between the first tool 116a and the second tool 116b by the force of the air cylinder, thereby crimping the pin 10. Note that the pin 10 may be crimped by one of the first tool 116a and the second tool 116b being fixed and the other being driven.

[0018] The pin 10 that has been deformed by crimping is press-fitted into a hole provided in the first member 20 by a press-fitting device 120. The press-fitting device 120 includes a second transport unit (press-fitting unit) 121 and a member holding unit 122. The second transport unit 121 transports the pin 10 that has been deformed by crimping by the crimping device 110 from the crimping device 110, and presses the pin 10 by a predetermined amount into a hole provided in the first member 20 held by the member holding unit 122. The member holding unit 122 includes, for example, an abutting unit (such as a pin or a step) for positioning the first member 20, and a fixing unit (such as a tap or a clamp) for fixing the position of the first member 20. The second transport unit 121 is, for example, an articulated robot, and includes, at its tip, a gripping unit (robot hand) capable of gripping the pin 10 and a rotating unit capable of rotating the pin 10. The press-fitting device 120 includes an imaging unit or sensor (not shown) that detects the position of a hole into which the pin 10 is to be press-fitted, and the second transport unit 121 presses the pin 10 in accordance with the detected hole position. This imaging unit or sensor may be included in the second transport unit 121. In this manner, the pin 10 is press-fitted into the first member 20. The robot hand may have an elongated shape, for example, so that the pin 10 can be press-fitted in a narrow space. The robot hand may also include a structure that serves as a stopper for the pin 10 to prevent the position where the pin 10 is held from shifting when the pin 10 is press-fitted. The robot hand is fixed to the arm of the second transport unit 121 by a fixing unit, for example, an electromagnet, vacuum suction, or a screw.

[0019] 2 is a schematic diagram showing the use of a pin 10 to position the second member 30 relative to the first member 20. The pin 10 is press-fitted into the first member 20, and the second member 30 can be positioned relative to the first member 20 by abutting the second member 30 against the press-fitted pin 10. Then, by fixing the relative positions of the first member 20 and the positioned second member 30, the second member 30 can be fixed at a desired position.

[0020] 2(a) is a diagram showing a case where the pin 10 press-fitted into the hole 21 provided in the first member 20 is not tilted. The pin 10 and the hole 21 each have a tolerance, and the pin 10 has a shape error within the tolerance range, and the hole 21 also has a shape error within the tolerance range. If the difference between the diameter of the pin 10 and the diameter of the hole 21 is small, the pin 10 press-fitted into the hole 21 will not tilt. In such a case, the second member 30 is correctly positioned relative to the first member 20.

[0021] FIG. 2(b) illustrates a case in which the pin 10 press-fitted into the hole 21 of the first member 20 is tilted toward the side opposite to the side against which the second member 30 abuts (the -Y direction). As shown in FIG. 2(b), the pin 10 press-fitted into the hole 21 may be tilted due to a shape error within the tolerance range of the pin 10 and a shape error within the tolerance range of the hole 21. In the example of FIG. 2(b), the pin 10 is tilted toward the side opposite to the side against which the second member 30 abuts. Therefore, after abutment, the pin 10 does not tilt toward the side against which it abuts (the +Y direction). Therefore, in this case, the positioning of the second member 30 relative to the first member 20 deviates from the desired position more than when the members are not tilted, as in FIG. 2(a). However, the relative positions of the first member 20 and the second member 30 do not change after abutment. Therefore, positioning is performed relatively accurately.

[0022] FIG. 2(c) shows a case where the pin 10 press-fitted into the hole 21 of the first member 20 is tilted toward the side against which the second member 30 abuts (the +Y direction side). Similar to FIG. 2(b), FIG. 2(c) shows the pin 10 press-fitted into the hole 21 tilted due to a shape error within the tolerance range of the pin 10 and a shape error within the tolerance range of the hole 21. In the example of FIG. 2(c), the pin 10 is tilted toward the side against which the second member 30 abuts, and therefore, after abutment, the pin 10 may tilt toward the side opposite to the abutment side (the -Y direction side). Therefore, after abutment with the second member 30, the relative positions of the first member 20 and the second member 30 change, and positioning is not performed correctly.

[0023] FIG. 3 is a schematic diagram of a case where a second member 30 is butted against a first member 20. As shown in FIG. 3, multiple pins 10 are press-fitted into the first member 20, and the second member 30 is butted against the press-fitted pins 10 to position the second member 30 relative to the first member 20. For example, when the multiple pins 10 are in the state shown in FIG. 2(a), the positions of the multiple pins 10 do not move after the butting, and the second member 30 is correctly positioned at the desired position. Also, for example, when the multiple pins 10 are in the state shown in FIG. 2(b) and have the same amount of tilt, the tilt of the pins 10 may cause the position of the second member 30 to deviate from the desired position. However, the positions of the multiple pins 10 do not move after the butting, and the second member 30 is correctly positioned as shown in FIG. 3(a).

[0024] When the multiple pins 10 are in the state shown in Fig. 2(c), the positions of the multiple pins 10 may shift after the second member 30 is abutted against them. This movement of the pins 10 does not always occur, and one pin 10 may not move, while the other pin 10 may move and tilt toward the opposite side from the side where it is abutted against. In such a case, the second member 30 is positioned in an inclined state relative to the first member 20 as shown in Fig. 3(b), and therefore the second member 30 is not positioned correctly.

[0025] That is, in order to correctly position the second member 30 relative to the first member 20, the pin 10 must not be tilted or must be tilted in the desired direction (the side opposite to the side against which it is abutted). However, as described above, the pin 10 may be tilted due to the tolerance between the pin 10 and the hole 21. Therefore, in practice, in order to correctly position the second member 30 relative to the first member 20, the pin 10 must be tilted in the desired direction (the side opposite to the side against which the second member 30 is abutted).

[0026] The inclination of the pin 10 varies depending on the conditions under which the pin 10 is crimped. However, in conventional pin processing methods (crimping methods), the pin 10 is crimped under conditions that do not take into account the direction in which the pin 10 will tilt after press-fitting, which can result in the pin 10 being tilted in an undesired direction. For example, conventionally, the pin 10 is crimped near the position where its diameter is greatest. In such cases, the worker must adjust the inclination of the pin 10 using a tool or the like to adjust the position of the second member 30. Here, multiple positioning pins 10 may be press-fit into a single first member 20. In such cases, the worker must adjust the inclination of the multiple pins 10 as needed, which takes time.

[0027] Therefore, in this embodiment, the pin 10 is crimped under conditions that allow the pin 10 to be tilted in a desired direction. Since the tilt direction of the pin 10 depends on the crimping position when the pin 10 is crimped, in this embodiment, the position of the pin 10 on the side where the second member 30 abuts is crimped to tilt the pin 10 in the desired direction (the side opposite to the side where the second member 30 abuts).

[0028] FIG. 4 is a schematic diagram of a crimped pin 10 according to this embodiment. In this embodiment, as shown in FIG. 4(a), a first tool 116a and a second tool 116b are used to crimp the pin 10, creating a scratch 11 around a position offset from the central axis (axis in the longitudinal direction) 13 of the pin 10. Then, the pin 10 is press-fitted so that the longitudinal center position of the deformed region (scratch 11, recess) of the pin 10 is on the side of the central axis 13 against which the second member 30 abuts. In this case, on cross section AA', where the position in the Z-axis direction coincides with the position of the scratch 11, the position of the scratch 11 is recessed as shown in FIG. 4(b). Then, on cross section B-B', where the position in the Z-axis direction is offset from the position of the scratch 11, regions 12 on the +Z and −Z sides of the scratch 11 bulge as shown in FIG. 4(c). The deformation (bulge) of region 12 increases the resistance between pin 10 and the object (hole 21) into which pin 10 is press-fitted, making it difficult for pin 10 to come out of hole 21. Note that central axis 13 of pin 10 is, for example, the central axis of pin 10 before it is deformed (before it is crimped).

[0029] In the example of FIG. 4 , the scratch 11 is formed on the +Y direction side of the central axis 13. Therefore, when the pin 10 is press-fitted into the first member 20, the bulge of the region 12 causes a greater resistance between the pin 10 and the first member 20 (hole 21) on the +Y direction side of the pin 10 than on the −Y direction side. Therefore, the +Y direction side of the pin 10 is less likely to be press-fitted into the first member 20, and the −Y direction side of the pin 10 is more likely to be press-fitted into the first member 20. As a result, the length of the pin 10 press-fitted on the −Y direction side is longer than on the +Y direction side, and the pin 10 tilts toward the −Y direction, resulting in the state shown in FIG. 2( b). In this way, in this embodiment, the crimping position is set on the side of the pin 10 where the second member 30 abuts, so the pin 10 can be tilted in the opposite direction from the abutting direction, and the pin 10 can be correctly positioned relative to the first member 20.

[0030] The position (position in the Y-axis direction) at which the pin 10 is crimped may be adjusted by adjusting the positions of the first tool 116a and the second tool 116b in the Y-axis direction using the first driving unit 115a and the second driving unit 115b. Alternatively, the position of the pin 10 in the Y-axis direction when the pin 10 is crimped may be adjusted by a driving mechanism (not shown) included in the pin holding unit 113.

[0031] Here, it is preferable to tilt the pins 10 in a desired direction and also to tilt the pins 10 by a desired amount. For example, even if multiple pins 10 are tilted in a desired direction as shown in FIG. 2(b), if the multiple pins 10 have different tilt amounts, the second member 30 may be positioned at an angle relative to the first member 20 as shown in FIG. 3(b). Therefore, the second member 30 will not be positioned correctly. The amount of tilt of the pins 10 depends on the angle between the first tool 116a and the second tool 116b, the crimping position of the pins 10 in the Z-axis direction (crimping height), and the strength of the crimping force (size of the flaw 11).

[0032] First, the relationship between the tilt amount of the pin 10 and the angle between the first tool 116a and the second tool 116b will be described with reference to Fig. 5 and Fig. 6. Fig. 5 is a diagram showing an example of the angle of the flaw 11 on the pin 10. Fig. 6 is a diagram showing an example of the tilt amount of the pin 10.

[0033] Fig. 5(a) shows an example in which the pin 10 is crimped without tilting the first tool 116a and the second tool 116b, and the flaw 11 is not tilted relative to the Y axis. Fig. 5(b) shows an example in which the pin 10 is crimped with the first tool 116a and the second tool 116b tilted, and the +Y side of the flaw 11 is closer to the -Z direction than the -Y side of the flaw 11. Fig. 5(c) shows an example in which the pin 10 is crimped with the first tool 116a and the second tool 116b tilted, and the -Y side of the flaw 11 is closer to the -Z direction than the +Y side of the flaw 11.

[0034] When the pin 10 is crimped as shown in FIG. 5(a), the bulge of the region 12 causes the pin 10 to tilt toward the -Y direction as shown in FIG. 6(a). When the pin 10 is crimped as shown in FIG. 5(b), the +Y end of the region 12 is closer to the -Z direction than when the pin 10 is crimped as shown in FIG. 5(a). Therefore, when the pin 10 is press-fitted into the first member 20, resistance due to the region 12 occurs at an earlier stage of the press-fit. As a result, the pin 10 tilts toward the -Y direction as shown in FIG. 6(b) compared to when the pin 10 is crimped as shown in FIG. 6(a). When the pin 10 is crimped as shown in FIG. 5(c), the +Y end of the region 12 is closer to the +Z direction than when the pin 10 is crimped as shown in FIG. 5(a). Therefore, resistance due to the region 12 occurs at a later stage of the press-fit when the pin 10 is press-fitted into the first member 20. As a result, the pin 10 does not tilt as much as in FIG. 6(a). In this way, by adjusting the angle of the flaw 11, i.e., the angle between the first tool 116a and the second tool 116b, the amount of tilt of the pin 10 can be adjusted. The angles of the first tool 116a and the second tool 116b are adjusted, for example, by the first driving unit 115a and the second driving unit 115b rotating the first tool 116a and the second tool 116b around their central axes (axial lengths). The tilt of the pin 10 is adjusted, for example, so that the central axis 13 is tilted by approximately 30 μm or less.

[0035] Next, the relationship between the tilt amount of the pin 10 and the crimping position (crimping height) of the pin 10 in the Z-axis direction will be described with reference to Fig. 7. Fig. 7 is a diagram showing an example of the position of the flaw 11 of the pin 10 in the Z-axis direction.

[0036] Figure 7(a) shows an example in which the pin 10 was crimped without adjusting the positions of the first tool 116a and the second tool 116b in the Z-axis direction. Figure 7(b) shows an example in which the pin 10 was crimped by adjusting the positions of the first tool 116a and the second tool 116b in the Z-axis direction further toward the -Z direction than in Figure 7(a), and the flaw 11 is on the -Z direction side. Figure 7(c) shows an example in which the pin 10 was crimped by adjusting the positions of the first tool 116a and the second tool 116b in the Z-axis direction further toward the +Z direction than in Figure 7(a), and the flaw 11 is on the +Z direction side.

[0037] When the pin 10 is crimped as shown in FIG. 7(a), the bulge of the region 12 causes the pin 10 to tilt toward the -Y direction as shown in FIG. 6(a). When the pin 10 is crimped as shown in FIG. 7(b), the region 12 is closer to the -Z direction than when the pin 10 is crimped as shown in FIG. 7(a). Therefore, when the pin 10 is press-fitted into the first member 20, resistance due to the region 12 occurs at an earlier stage of the press-fit. As a result, the pin 10 tilts toward the -Y direction as shown in FIG. 6(b) compared to FIG. 6(a). When the pin 10 is crimped as shown in FIG. 7(c), the region 12 is closer to the +Z direction than when the pin 10 is crimped as shown in FIG. 7(a). Therefore, resistance due to the region 12 occurs at a later stage of the press-fit when the pin 10 is press-fitted into the first member 20. As a result, the pin 10 does not tilt as much as in FIG. 6(a). In this way, by adjusting the position of flaw 11 in the Z-axis direction, that is, the crimping position (crimping height) of pin 10 in the Z-axis direction, it is possible to adjust the tilt amount of pin 10. The crimping position (crimping height) may be adjusted, for example, by adjusting the height position of pin holding unit 113. Alternatively, it may be adjusted by adjusting the positions of first tool 116a and second tool 116b in the Z-axis direction using first driving unit 115a and second driving unit 115b.

[0038] Next, the relationship between the amount of tilt of pin 10 and the strength of the force used when crimping (the size of scratch 11) will be described. When the strength of the force used when crimping is strong, scratch 11 becomes larger and the bulge of region 12 also becomes larger. This increases the resistance caused by region 12 when pin 10 is press-fitted into first member 20. Therefore, by increasing (increasing) the strength of the force used when crimping (the size of scratch 11), the amount of tilt of pin 10 increases. Note that when the tool is driven by an air cylinder, the strength of the force used when crimping can be adjusted by adjusting the air pressure.

[0039] FIG. 8 is a flowchart illustrating a process for positioning the second member 30 relative to the first member 20 using the pin 10 according to this embodiment. First, the control unit 130 determines the conditions for crimping the pin 10 (determining step, S110). This determination is based on the direction in which the second member 30 is abutted, and determines the conditions for achieving a desired tilt direction and a desired amount of tilt after the pin 10 is press-fitted into the first member 20. The conditions include, for example, at least one of the position (Y-axis direction, Z-axis direction) at which the pin 10 is crimped, the angle of the tool used for crimping, and the strength of the force used for crimping. For example, if pins have the same shape but different hardness due to differences in material, the strength of the force used for crimping must be different. The conditions for the position (Y-axis direction, Z-axis direction) at which the pin 10 is crimped are synonymous with the conditions for the position (Y-axis direction, Z-axis direction) of the tool when the pin 10 is crimped or the conditions for the position of the pin 10; in other words, they are synonymous with the position of a predetermined area to which force is applied from the tool. Furthermore, the angle of the tool when crimping is synonymous with the angle of the predetermined area to which force is applied from the tool. The determination in the determination step may be made by the control unit 130 based on design information stored in the storage unit 140 (including, for example, information on the direction in which the second member 30 is abutted). Alternatively, the control unit 130 may make the determination based on condition information stored in the storage unit 140 and input in advance by the user.

[0040] Information is input by the user using, for example, an input device or display device (not shown). The input device is a device for inputting characters and data, and includes various keyboards, mice, touch panels, etc. The display device is a device for displaying information required for operation and processing results, and includes a CRT or LCD monitor, etc. Alternatively, information may be input by the user via communication from another information processing device.

[0041] Next, based on the conditions determined in the determination step, the control unit 130 controls to adjust at least one of the position of the pin 10 and the tool settings (angle, position, strength of force used when crimping) (adjustment step, S120). Next, the pin 10 is crimped in the state adjusted in the adjustment step (deformation step, S130). Then, the pin 10 crimped in the deformation step is press-fitted into the first member 20 (press-fitting step, S140). In the press-fitting step, the pin 10 may not be press-fitted properly (the torque detected by the second transport unit 121 may be an abnormal value) due to a difference in shape between the pin 10 and the hole 21 into which it is to be press-fitted. In this case, the control unit 130 stops the press-fitting and performs the determination step, adjustment step, and deformation step again on another pin, and then performs the press-fitting step. The abnormal pin 10 for which the press-fitting was stopped is transported, for example, to a disposal box. Furthermore, if the pin 10 continues to be unable to be pressed in normally, there is a possibility that deformation or wear has occurred in the second transport unit 121. In this case, the robot hand of the second transport unit 121 may be replaced by a replacement unit (not shown).

[0042] In the press-fitting process, the control unit 130 controls the rotation of the pin 10 about the central axis 13 when the second transport unit 121 transports the pin 10 so that the pin 10 is tilted in the desired direction. This control is performed based on design information (including, for example, information on the direction in which the second member 30 is abutted) stored in the storage unit 140. Specifically, this control is performed according to the direction in which the second member 30 is abutted and the position of the area in which the pin 10 is deformed by the tool. Note that in the press-fitting process, the position and angle at which the pin 10 is pressed in are also controlled.

[0043] Next, the second member 30 is abutted against the pins 10 press-fitted into the holes of the first member 20 in the press-fitting step, thereby positioning the second member 30 relative to the first member 20 (positioning step, S150). Note that this positioning step may be performed after the press-fitting of a predetermined number of pins 10 has been completed.

[0044] Here, if the user has prepared a program for the crimping conditions and adjustments for each pin in advance, the determination step may be omitted, and the adjustment step and deformation step may be carried out according to the program. Also, after the press-fitting step, a determination step may be carried out in which the pin 10 is pulled with a predetermined force in a direction to remove it from the first member 20 to check whether the press-fitting has been carried out correctly, and if the pin can be pulled out, the press-fitting has not been carried out correctly, and if the pin cannot be pulled out, the press-fitting has been carried out correctly.

[0045] The determining step and the adjusting step do not have to be performed individually for all pins 10. For example, if the pins 10 are of the same type, they may be adjusted in the adjusting step to the conditions initially determined in the determining step, and the determining step and the adjusting step may not be performed while crimping is being performed on the same type of pins 10. Also, it is not necessary to change all of the conditions, and other parameters may be determined and adjusted while the tool angle (angle of the flaw 11) is set to a constant value.

[0046] As described above, in this embodiment, the inclination of the pin 10 used to position the second member 30 relative to the first member 20 when the pin 10 is press-fit into the first member 20 is adjusted by adjusting the conditions for crimping the pin 10. Therefore, the inclination direction and amount of the pin 10 can be set to a desired direction and amount, and the accuracy of positioning the second member 30 relative to the first member 20 using the pin 10 can be improved.

[0047] Furthermore, the moving speeds of the first tool 116a and the second tool 116b when they crimp (sandwich) the pin 10 may also be adjusted as a condition for crimping the pin 10.

[0048] The control unit 130 includes a processing unit, a bus, a ROM, a RAM, and a storage device, and each component functions according to a program. The processing unit is a processing device that performs control calculations according to the program and controls each component connected to the bus. This processing unit can be configured using a CPU, a PLD such as an FPGA, an ASIC, a computer with a built-in program, or a combination of all or part of these. The ROM is a memory for reading data only and stores programs and data. The RAM is a memory for reading and writing data and is used to store programs and data. The RAM is used for temporary storage of data such as the results of CPU calculations. The storage device is also used to store programs and data. The storage device is also used as a temporary storage area for the operating system (OS) program and data of the control unit 130. The storage device has slower data input / output speeds than RAM, but is capable of storing large amounts of data. The storage device is preferably a non-volatile storage device that can store data as permanent data so that the data can be referenced for a long period of time. The storage device is mainly composed of a magnetic storage device (HDD) or a solid state drive (SSD), but may also be a device that reads and writes data from and to external media such as CDs, DVDs, and memory cards. The control unit 130 may be configured as a separate unit (in a separate housing) from the other parts of the pin press-fitting device 100.

[0049] While the first and second conveying units 112 and 121 are different in this embodiment, they may be the same conveying unit. While the control unit 130 controls both the crimping device 110 and the press-fitting device 120 in this embodiment, they may each have a control unit. The determining step may be performed by a separate information processing device rather than the control unit 130. While the first and second driving units 115a and 115b are separate in this embodiment, they may be a single driving unit. While the pin 10 is crimped while held by the pin holding unit 113 in this embodiment, the pin 10 may be crimped while being held by the first conveying unit 112. Furthermore, the pin 10 may be held (held) by the same holding unit (conveying unit) from the deformation step to the press-fitting step, and the pin 10 may be deformed and press-fitted. This facilitates the determination of the rotation angle of the pin 10 around the central axis 13, i.e., the position of the area deformed in the deformation step.

[0050] The positioning of the second member 30 relative to the first member 20 using the pin 10 of this embodiment is used, for example, to position components within an apparatus for processing substrates such as semiconductor wafers and glass plates. These apparatuses include, for example, projection exposure apparatuses, lithography apparatuses, imprinting apparatuses, planarization apparatuses, ion implantation apparatuses, development apparatuses, etching apparatuses, film formation apparatuses, annealing apparatuses, sputtering apparatuses, and vapor deposition apparatuses. Positioning accuracy is particularly important in apparatuses that include optical systems. For example, exposure apparatuses use multiple positioning pins 10 for positioning components. When multiple pins 10 are used, using the pin 10 of this embodiment can significantly reduce the time required to correct the tilt direction of the pin 10. For example, an exposure apparatus includes a first member 20 and a second member 30. The second member 30 is in contact with the pin 10, which is press-fitted into a hole in the first member 20, and the pin 10 has a scratch (indentation) 11. The indentation 11 causes the area of ​​the pin 10 near the indentation 11 to expand. The center position in the longitudinal direction of this bulging region of the pin 10 is on the side of the central axis 13 of the pin 10 where the second member 30 is in contact.

[0051] Second Embodiment This embodiment differs from the first embodiment in the method for determining the conditions for crimping the pin 10. FIG. 9 is a schematic diagram of a pin press-fitting device 200 according to this embodiment. The pin press-fitting device 200 includes a pin measurement unit 210 that measures the shape of the pin 10 and a hole measurement unit 220 that measures the shape of the hole into which the pin 10 will be press-fitted. The pin measurement unit 210 and the hole measurement unit 220 may be, for example, a sensor that measures the shape of an object by imaging or a sensor that measures the shape of an object using a laser. The pin measurement unit 210 may also be an optical micrometer. In this case, the pin 10 is inserted into the pin measurement unit 210 (optical micrometer) by the first transport unit 112, and the shape of the pin 10 is measured. The shape information of the pin 10 or hole to be measured includes, for example, information about the diameter and roundness. The roundness information also includes information about the deflection of the pin 10 and the bending of the hole.

[0052] 10 is a flowchart showing the process of positioning the second member 30 relative to the first member 20 using the pin 10 in this embodiment. First, the pin measurement unit 210 and the hole measurement unit 220 measure the shape of the pin 10 and the shape of the hole into which the pin 10 will be press-fitted (measurement step, S210). Next, the control unit 130 determines the conditions for crimping the pin 10 (determination step, S220). This determination is based on the results of the measurement step and the direction in which the second member 30 is abutted, and determines the conditions under which the pin 10 will have a desired tilt direction and a desired amount of tilt after being press-fitted into the first member 20.

[0053] In the measurement process, for example, if the diameter of the pin 10 is small and the diameter of the hole is large, the crimping conditions are determined to increase the resistance between the pin 10 and the first member 20, specifically, to increase the bulge of the region 12. For example, the crimping force is increased to increase the bulge of the region 12. Furthermore, in such cases, the pin 10 may tilt significantly, so the amount of tilt is adjusted to reduce the amount of tilt based on the measurement results. For example, the pin 10 is crimped so that the resistance caused by the bulge of the region 12 increases in the later stages of press-fitting. Furthermore, the rotation of the pin 10 around the central axis 13 may be adjusted based on the roundness. Furthermore, in the measurement process, if the pin 10 is bent or the hole is curved, the pin 10 will tilt due to these shapes. Therefore, the crimping conditions are determined taking into account the direction and amount of tilt of the pin 10 due to the shape of the pin 10 and the hole. The control unit 130 determines the conditions for crimping based on, for example, a table or a formula that indicates the relationship between the measurement results of the pin 10, the measurement results of the hole, and the amount of tilt when the pin 10 is press-fitted.

[0054] The conditions include, for example, at least one of the position (Y-axis direction, Z-axis direction) where the pin 10 is crimped, the angle of the tool when crimping, and the strength of the force when crimping. Note that the condition of the position (Y-axis direction, Z-axis direction) where the pin 10 is crimped is synonymous with the condition of the position (Y-axis direction, Z-axis direction) of the tool when crimping the pin 10 or the condition of the position of the pin 10. In other words, it is synonymous with the position of the predetermined area to which the force is applied from the tool. Furthermore, the angle of the tool when crimping is synonymous with the angle of the predetermined area to which the force is applied from the tool. The determination in the determination step may be made by the control unit 130 based on design information stored in the storage unit 140 (including, for example, information on the direction in which the second member 30 is abutted). Alternatively, the control unit 130 may make the determination based on condition information stored in the storage unit 140 and input in advance by the user.

[0055] Next, based on the conditions determined in the determination step, the control unit 130 controls to adjust at least one of the position of the pin 10 and the tool settings (angle, position, strength of force when crimping) (adjustment step, S230). Next, the pin 10 is crimped in the state adjusted in the adjustment step (deformation step, S240). Then, the pin 10 crimped in the deformation step is press-fitted into the first member 20 (press-fitting step, S250). In the press-fitting step, the control unit 130 controls the rotation of the pin 10 about the central axis 13 when the second transport unit 121 transports the pin 10 so that the pin 10 is tilted in a desired direction. This control is performed based on design information stored in the storage unit 140 (including, for example, information on the direction in which the second member 30 is abutted).

[0056] Next, the second member 30 is abutted against the pins 10 press-fitted into the holes of the first member 20 in the press-fitting step, thereby positioning the second member 30 relative to the first member 20 (positioning step, S260). Note that this positioning step may be performed after the press-fitting of a predetermined number of pins 10 has been completed.

[0057] According to this embodiment, the conditions for crimping are determined in accordance with the measurement results, which increases the possibility of press-fitting the pin 10 in the desired direction and with the desired inclination.

[0058] In the present embodiment, an example has been shown in which the pin measurement unit 210 is disposed at a position where it can detect the pin 10 held in the pin holding unit 113, and the hole measurement unit 220 is disposed at a position where it can detect the hole provided in the first member 20 held in the member holding unit 122. However, the arrangement of the pin measurement unit 210 and the hole measurement unit 220 is not limited to this example. By having the pin measurement unit 210 detect the pin 10 held in the pin holding unit 113, it is possible to determine the conditions for crimping depending on the holding state, for example, even if the pin 10 is not held correctly in the pin holding unit 113 but is held at an angle.

[0059] The shapes of the pin 10 and the hole may also be measured outside the pin press-fitting device 200. In this case, the information on the shapes of the pin 10 and the hole measured outside is stored in the memory unit 140, and the control unit 130 determines the conditions for crimping based on the information stored in the memory unit 140.

[0060] In this embodiment, an example is shown in which the conditions for crimping are determined using the measurement results of both the pin measurement unit 210 and the hole measurement unit 220, but it is also possible to use the measurement results of at least one of the pin measurement unit 210 and the hole measurement unit 220 (information on the shape of at least one of them).

[0061] <Third embodiment> This embodiment differs from the first embodiment in the position where the pin 10 is crimped. FIG. 11 shows an example of a crimped pin 10 in this embodiment. In this embodiment, crimping is performed using one tool instead of two tools, and the scratch 11 is made as shown in FIG. 11(a). In this case, on cross section CC', where the position in the Z-axis direction coincides with the position of the scratch 11, the position of the scratch 11 is recessed as shown in FIG. 11(b). On cross section D-D', where the position in the Z-axis direction is shifted from the position of the scratch 11, regions 12 on the +Z direction side and the −Z direction side of the scratch 11 bulge as shown in FIG. 11(c).

[0062] As described above, this region 12 generates resistance when the pin 10 is press-fitted into the first member 20. In this embodiment, as in the first embodiment, the tilt direction and tilt amount of the pin 10 can be set to a desired state by adjusting conditions including the position (Y-axis direction, Z-axis direction) at which the pin 10 is crimped, the angle of the tool used when crimping, and the strength of the force used when crimping.

[0063] <Fourth embodiment> This embodiment differs from the first embodiment in the method of determining the crimping conditions. In this embodiment, the crimping conditions are not determined, and the pin 10 is crimped under fixed conditions. As shown in FIG. 4( a), the pin 10 is crimped by making a notch 11 in the pin 10 using a first tool 116a and a second tool 116b, centered at a position offset from the central axis 13 of the pin 10. In other words, the pin 10 is crimped so that the longitudinal center position of the region where the pin 10 is deformed is shifted from the position where the diameter of the pin 10 is maximum before the pin 10 is deformed. In other words, the pin 10 is crimped so that the longitudinal center position of the region where the pin 10 is deformed is on the side where the second member 30 abuts relative to the central axis 13 of the pin 10.

[0064] The control unit 130 then controls the second conveying unit (press-fitting unit) 121 to adjust the position and angle of the pin 10 when the pin 10 is press-fitted into the first member 20 so that the pin 10 is inclined in a desired direction. That is, the control unit 130 controls (adjusts) the second conveying unit (press-fitting unit) 121 so that the center position in the longitudinal direction of the deformed region of the pin 10 is on the side against which the second member 30 abuts with respect to the central axis 13 of the pin 10. More preferably, the control unit 130 controls the second conveying unit (press-fitting unit) 121 to adjust the position and angle of the pin 10 when the pin 10 is press-fitted into the first member 20 so that the pin 10 is inclined at a desired inclination amount. This adjustment may be performed based on design information stored in the storage unit 140 (including, for example, information on the direction against which the second member 30 abuts) or based on condition information stored in the storage unit 140 and input in advance by the user.

[0065] FIG. 12 is a flowchart illustrating the process of positioning the second member 30 relative to the first member 20 using the pin 10 according to this embodiment. First, the pin 10 is caulked (deformation step, S310). Next, the control unit 130 determines the conditions for press-fitting the pin 10 (determination step, S320). This determination is based on the direction in which the second member 30 is abutted, and determines the conditions for achieving a desired tilt direction and a desired amount of tilt after the pin 10 is press-fitted into the first member 20. These conditions are, for example, the position and angle of the pin 10 when press-fitting the pin 10, in other words, the position and angle of the second conveyance unit 121. Information is input by the user using, for example, an input device or display device (not shown). The input device is a device for inputting characters and data, such as a keyboard, mouse, or touch panel. The display device is a device for displaying information required for operation, processing results, and the like, such as a CRT or LCD monitor. Alternatively, information may be input by the user via communication from another information processing device.

[0066] Next, the pin 10 is press-fitted into the first member 20 under the conditions determined in the determination step (press-fitting step, S330). Next, the second member 30 is abutted against the pin 10 press-fitted into the hole of the first member 20 in the press-fitting step, thereby positioning the second member 30 relative to the first member 20 (positioning step, S340).

[0067] In this embodiment, the pin 10 is crimped under certain conditions, so there is no need to perform an adjustment process, and the time required to crimp the pin 10 can be reduced.

[0068] Fifth Embodiment This embodiment relates to a method for manufacturing an article, characterized in that the article is manufactured using the above-described method for processing the pin 10.

[0069] 13 is a flowchart of a method for manufacturing an article according to this embodiment. First, a deformation step is performed to deform the pin 10 (S410). Next, a press-fit step is performed to press-fit the pin 10 deformed in the deformation step into a hole provided in the first member 20 (S420). Next, a positioning step is performed to position the second member 30 relative to the first member 20 by abutting the second member 30 against the pin 10 press-fitted in the press-fit step (S430).

[0070] Next, a fixing step is performed (S440) in which the first member 20 and the second member 30 are fixed together and processed into a third member including the first member 20 and the second member 30. Then, a manufacturing step (S450) is performed in which an article including the third member processed in the fixing step is manufactured.

[0071] Here, the center position in the longitudinal direction of the region where the pin 10 is deformed by the deformation process is on the side where the second member 30 abuts with respect to the central axis 13 of the pin 10. According to this manufacturing method, an article can be manufactured with higher positioning accuracy of the second member 30 relative to the first member 20 than conventional methods.

[0072] The disclosure of the present specification includes the following positioning method, press-fitting device, pin processing method, exposure device, and article manufacturing method.

[0073] [Item 1] A positioning method for positioning a second member relative to a first member by abutting the second member against a pin press-fitted into a hole provided in the first member, a deformation step of deforming the pin; a press-fitting step of press-fitting the pin deformed in the deformation step into the hole; a positioning step of abutting the second member against the pin press-fitted in the press-fitting step; Including, A positioning method, characterized in that the center position in the longitudinal direction of the region where the pin is deformed by the deformation step is on the side where the second member abuts with respect to the central axis of the pin.

[0074] [Item 2] 2. The positioning method according to item 1, wherein the pin is pressed in during the pressing step in accordance with the direction in which the second member is abutted and the position of the area in which the pin is deformed during the deformation step.

[0075] [Item 3] a determining step of determining conditions for deforming the pin in the deforming step, 3. The positioning method according to item 1 or 2, wherein the determining step is based on design information or information input in advance by a user.

[0076] [Item 4] a determining step of determining conditions for deforming the pin in the deforming step, 4. The positioning method according to any one of items 1 to 3, wherein the determination step is performed based on at least one of the results of measuring the shape of the pin and the results of measuring the shape of the hole.

[0077] [Item 5] a determining step of determining conditions for deforming the pin in the deforming step, 5. The positioning method according to any one of items 1 to 4, wherein the conditions include at least one of a position of the pin when deforming the pin, a position of a tool when deforming the pin, an angle of the tool when deforming the pin, and a strength of a force when deforming the pin.

[0078] [Item 6] a determining step of determining conditions for deforming the pin in the deforming step; an adjustment step of performing an adjustment based on the conditions determined in the determination step, The positioning method according to any one of items 1 to 5, wherein the adjustment step adjusts at least one of the position of the pin, the position of the tool when deforming the pin, the angle of the tool when deforming the pin, and a setting of the tool.

[0079] [Item 7] 7. The positioning method according to any one of items 1 to 6, wherein the pin is held by the same holding portion in the deformation step and the press-fitting step.

[0080] [Item 8] A press-fitting device that presses a pin for abutting a second member into a hole provided in a first member in order to position the second member relative to the first member, a holding portion that holds the pin; a tool for deforming the pin held by the holding portion; a press-fitting portion that presses the pin deformed by the tool into the hole, A press-fitting device characterized in that the longitudinal center position of the area where the pin is deformed by the application of force from the tool is on the side where the second member is abutted relative to the central axis of the pin.

[0081] [Item 9] a control unit that controls at least one of a position of the pin, a position of the tool, and a drive of the tool; a pin measuring unit for measuring the shape of the pin, 9. The press-fitting device according to item 8, wherein deformation of the pin by the tool is controlled based on the measurement result of the pin measurement unit.

[0082] [Item 10] a control unit that controls at least one of a position of the pin, a position of the tool, and a drive of the tool; a hole measurement unit for measuring the shape of the hole, 10. The press-fitting device according to item 8 or 9, characterized in that deformation of the pin by the tool is controlled based on the measurement result of the hole measurement unit.

[0083] [Item 11] a control unit that controls at least one of a position of the pin, a position of the tool, and a drive of the tool; a memory unit that stores information on the shape of at least one of the pin and the hole that has been measured in advance; 11. The press-fitting device according to any one of items 8 to 10, wherein the control unit controls the deformation of the pin by the tool based on the shape information stored in the storage unit.

[0084] [Item 12] 12. The press-fitting device according to any one of items 8 to 11, wherein the press-fitting unit adjusts the position of the pin according to the direction in which the second member is abutted and the position of the area in which the pin is deformed by the tool, and presses in the pin.

[0085] [Item 13] A press-fitting device that presses a pin for abutting a second member into a hole provided in a first member in order to position the second member relative to the first member, a press-fitting portion for press-fitting the pin, including a pre-deformed region, into the hole; a control unit that controls the press-fitting unit, a center position in the longitudinal direction of the deformed region is shifted from a position where the diameter of the pin is maximum before the pin is deformed, The control unit controls the press-fitting unit so that the longitudinal center position of the deformed area is on the side where the second member abuts relative to the central axis of the pin.

[0086] [Item 14] A pin machining method for machining a pin for butting a second member before press-fitting the pin into a hole provided in a first member in order to position the second member relative to the first member, a deformation step of deforming the pin, A pin processing method, characterized in that the longitudinal center position of the area of ​​the pin deformed by the deformation process is on the side of the central axis of the pin where the second member is abutted.

[0087] [Item 15] An exposure apparatus including a first member and a second member, the second member is in contact with a pin press-fitted into a hole provided in the first member, the pin includes a bulged region; An exposure apparatus, wherein the center position in the longitudinal direction of the region is on the side of the central axis of the pin that is in contact with the second member.

[0088] [Item 16] a deformation step of deforming the pin; a press-fitting step of press-fitting the pin deformed in the deformation step into a hole provided in a first member; a positioning step of positioning the second member relative to the first member by abutting the second member against the pin press-fitted in the press-fitting step; a fixing step of fixing the first member and the second member together to form a third member including the first member and the second member; a manufacturing process for manufacturing an article including the third member processed in the fixing process; Including, A method for manufacturing an article, characterized in that the longitudinal center position of the area deformed by the deformation process is on the side of the central axis of the pin where the second member is abutted.

[0089] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention.

Claims

1. A positioning method for positioning a second member relative to a first member by abutting the second member against a pin press-fitted into a hole provided in the first member, a deformation step of deforming the pin; a press-fitting step of press-fitting the pin deformed in the deformation step into the hole; a positioning step of abutting the second member against the pin press-fitted in the press-fitting step; Including, A positioning method, characterized in that the center position in the longitudinal direction of the region deformed by the deformation step is on the side of the central axis of the pin against which the second member is abutted.

2. 2. The positioning method according to claim 1, wherein the pin is pressed in during the press-fitting step depending on a direction in which the second member is abutted and a position of a region in the pin that is deformed during the deformation step.

3. a determining step of determining conditions for deforming the pin in the deforming step, 2. The positioning method according to claim 1, wherein said determining step is based on design information or information input in advance by a user.

4. a determining step of determining conditions for deforming the pin in the deforming step, 2. The positioning method according to claim 1, wherein the determining step is performed based on at least one of a result of measuring the shape of the pin and a result of measuring the shape of the hole.

5. a determining step of determining conditions for deforming the pin in the deforming step, 2. The positioning method according to claim 1, wherein the conditions include at least one of a position of the pin when the pin is deformed, a position of a tool when the pin is deformed, an angle of the tool when the pin is deformed, and a strength of a force when the pin is deformed.

6. a determining step of determining conditions for deforming the pin in the deforming step; an adjustment step of performing an adjustment based on the conditions determined in the determination step, 2. The positioning method according to claim 1, wherein the adjusting step adjusts at least one of the position of the pin, the position of the tool when deforming the pin, the angle of the tool when deforming the pin, and the setting of the tool.

7. 2. The positioning method according to claim 1, wherein the pin is held by the same holding portion in the deformation step and the press-fitting step.

8. A press-fitting device that presses a pin for abutting a second member into a hole provided in a first member in order to position the second member relative to the first member, a holding portion that holds the pin; a tool for deforming the pin held by the holding portion; a press-fitting portion that presses the pin deformed by the tool into the hole, A press-fitting device characterized in that the longitudinal center position of the area where the pin is deformed by the application of force from the tool is on the side where the second member is abutted relative to the central axis of the pin.

9. a control unit that controls at least one of a position of the pin, a position of the tool, and driving of the tool; a pin measuring unit for measuring the shape of the pin, 9. The press-fitting device according to claim 8, wherein deformation of the pin by the tool is controlled based on the measurement result of the pin measurement unit.

10. a control unit that controls at least one of a position of the pin, a position of the tool, and driving of the tool; a hole measurement unit for measuring the shape of the hole, 9. The press-fitting device according to claim 8, wherein deformation of the pin by the tool is controlled based on the measurement result of the hole measurement unit.

11. a control unit that controls at least one of a position of the pin, a position of the tool, and driving of the tool; a memory unit that stores information on the shape of at least one of the pin and the hole that has been measured in advance; 9. The press-fitting device according to claim 8, wherein the control unit controls the deformation of the pin by the tool based on the shape information stored in the storage unit.

12. 9. The press-fitting device according to claim 8, wherein the press-fitting unit adjusts the position of the pin depending on the direction in which the second member is abutted and the position of the area in which the pin is deformed by the tool, and presses in the pin.

13. A press-fitting device that presses a pin for abutting a second member into a hole provided in a first member in order to position the second member relative to the first member, a press-fitting portion for press-fitting the pin, including a pre-deformed region, into the hole; a control unit that controls the press-fitting unit, a center position in the longitudinal direction of the deformed region is shifted from a position where the diameter of the pin is maximum before the pin is deformed, The control unit controls the press-fitting unit so that the longitudinal center position of the deformed region is on the side where the second member abuts relative to the central axis of the pin.

14. A pin machining method for machining a pin for butting a second member before press-fitting the pin into a hole provided in a first member in order to position the second member relative to the first member, comprising: a deformation step of deforming the pin, A pin processing method, characterized in that the longitudinal center position of the region of the pin deformed by the deformation process is on the side of the central axis of the pin where the second member is abutted.

15. An exposure apparatus including a first member and a second member, The second member is in contact with a pin press-fitted into a hole provided in the first member, the pin includes a bulged region; An exposure apparatus, wherein the center position in the longitudinal direction of the region is on the side of the central axis of the pin that is in contact with the second member.

16. a deformation step of deforming the pin; a press-fitting step of press-fitting the pin deformed in the deformation step into a hole provided in a first member; a positioning step of positioning the second member relative to the first member by abutting the second member against the pin press-fitted in the press-fitting step; a fixing step of fixing the first member and the second member together to form a third member including the first member and the second member; a manufacturing step of manufacturing an article including the third member processed in the fixing step; Including, A method for manufacturing an article, characterized in that the longitudinal center position of the region deformed by the deformation process is on the side of the central axis of the pin against which the second member is abutted.

Images