Mounting head and component mounting device

Abstract

To provide a mounting head in which protection of piping arranged around a component suction nozzle is improved, and a component mounting device including the same.SOLUTION: A mounting head includes: a plurality of component suction nozzles that suck a component by bringing a suction hole into contact with the component; a manifold having an air flow path through which air to be supplied to the suction hole of each suction nozzle flows; a plurality of valves that are attached to the manifold and switch a flow of air; a plurality of piping through which air to be supplied from the manifold to the component suction nozzle flows and that communicates the air flow path and the component suction nozzle; a shaft holding unit that holds a plurality of shafts to which each component suction nozzle is connected and being arranged side by side in a first direction intersecting an up-and-down direction so as to be able to move up and down; and a bumper a part of which is disposed below the valve, and which is disposed outside in a second direction intersecting the first direction relative to the piping.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a mounting head and a component mounting apparatus including the same. [Background technology]

[0002] Conventionally, there is known a component mounting apparatus in which components are held by the nozzle of a mounting head and mounted on a board (see, for example, Patent Document 1). The mounting head in Patent Document 1 is provided with a bumper to reduce collisions between mounting heads. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-218278 Summary of the Invention [Problem to be solved by the invention]

[0004] However, the bumpers provided on the mounting heads in Patent Document 1 are intended to prevent collisions between mounting heads, and are therefore located around the head cover. As such, they are far from the periphery of the component suction nozzles that pick up components, and are therefore insufficient to protect the piping that supplies air, which is located around the component suction nozzles.

[0005] An object of the present disclosure is to solve the above-mentioned problems and to provide a mounting head that improves protection of piping arranged around the component suction nozzle, and a component mounting device equipped with the same. [Means for solving the problem]

[0006] In order to achieve the above-mentioned object, the mounting head of the present disclosure comprises a plurality of component suction nozzles that place suction holes against components to suck up the components, a manifold having an air flow path through which air flows to supply air to the suction holes of each suction nozzle, a plurality of valves attached to the manifold and switching the air flow, a plurality of pipes through which air flows from the manifold to the component suction nozzles and which connect the air flow path of the manifold to the component suction nozzles, a shaft holding section that holds a plurality of shafts connected to each of the component suction nozzles and arranged in a first direction intersecting the lifting and lowering direction so that each of the shafts can be raised and lowered, and a bumper that is partially positioned below the valves and is positioned outside the pipes in a second direction intersecting the first direction.

[0007] The component mounting device of the present disclosure also includes the above-described mounting head, a component supply unit that supplies components to the component suction nozzle of the mounting head, and a board transport mechanism that transports the board on which the components are to be mounted by the mounting head. [Effects of the Invention]

[0008] According to the present disclosure, it is possible to provide a mounting head that improves protection of piping arranged around a component suction nozzle, and a component mounting device including the same. [Brief explanation of the drawings]

[0009] [Figure 1] 1 is a schematic plan view of a component mounting apparatus according to an embodiment; [Figure 2] FIG. 1 is a perspective view of a mounting head according to an embodiment; [Figure 3] FIG. 1 is a perspective view of a mounting head according to an embodiment; [Figure 4] Schematic cross-sectional view of a mounting head according to an embodiment. [Figure 5] 1 is a schematic perspective view of a mounting head according to an embodiment; [Figure 6] 1 is a schematic side view of a first nozzle unit and a second nozzle unit according to an embodiment; [Figure 7] FIG. 1 is a schematic cross-sectional view showing a peripheral configuration of a manifold according to an embodiment. [Figure 8]FIG. 10 is a schematic front view showing a state in which a connecting member is attached to the mounting head of the embodiment. [Figure 9] FIG. 1 is a schematic perspective view showing a manifold and its surrounding configuration according to an embodiment. [Figure 10] FIG. 1 is a schematic perspective view showing a manifold and its surrounding configuration according to an embodiment. [Figure 11] FIG. 1 is a schematic diagram showing the connection relationship of air flow paths in a mounting head according to an embodiment; [Figure 12] 1 is a schematic perspective view of a bumper according to an embodiment; [Figure 13] FIG. 1 is a schematic front view showing a configuration around a bumper according to an embodiment; [Figure 14] An explanatory diagram showing the bumper, connectors, and cables. [Figure 15] 1 is a schematic diagram showing wiring fixed to the rear surface of a bumper according to an embodiment; [Figure 16] Cross section of line AA in Figure 15 [Figure 17] FIG. 1 is an explanatory diagram of a state in which the fixing member side of the mounting head of the embodiment is placed on a flat surface. [Figure 18] FIG. 1 is an explanatory diagram of a state in which the head cover side of the mounting head of the embodiment is placed on a flat surface. [Figure 19] FIG. 1 is an explanatory diagram showing a state in which the mounting head of the embodiment is placed on a flat surface in an upright position. DETAILED DESCRIPTION OF THE INVENTION

[0010] (Regarding aspects of the present disclosure) A mounting head according to a first aspect of the present disclosure includes a plurality of component suction nozzles that place suction holes against components to suck up the components, a manifold having an air flow path through which air flows to supply air to the suction holes of each suction nozzle, a plurality of valves attached to the manifold for switching the air flow, a plurality of pipes through which air flows from the manifold to the component suction nozzles and which connect the air flow path of the manifold to the component suction nozzles, a shaft holding unit that holds a plurality of shafts connected to each of the component suction nozzles and arranged in a first direction intersecting the lifting direction so that each of the shafts can be raised and lowered, and a bumper that is partially positioned below the valves and partially positioned outside the pipes in a second direction intersecting the first direction.

[0011] According to the mounting head of the first aspect, a portion of the bumper is disposed below the valve and outward from the piping in the second direction intersecting the first direction, thereby reducing damage to the piping due to contact with other components. In this way, the bumper can protect the piping.

[0012] According to a second aspect of the present disclosure, the mounting head of the first aspect is provided with a plurality of wires connected to each valve via a connector, and the plurality of wires are arranged along the piping side of the bumper and fixed to the bumper.

[0013] According to a third aspect of the present disclosure, in the mounting head of the second aspect, the connector is attachable and detachable to the lower part of the valve from below the valve, and the bumper extends in the first direction below the connector attached to the valve.

[0014] According to a fourth aspect of the present disclosure, in the mounting head of the third aspect, the bumper has a first arm and a second arm extending downward in the lifting direction and outward in the second direction, and a plate portion extending along the first direction and connecting the lower end of the first arm and the lower end of the second arm.

[0015] According to a fifth aspect of the present disclosure, in the mounting head of the fourth aspect, the upper portion of the first arm and the upper portion of the second arm are each detachably fixed to the manifold.

[0016] According to a sixth aspect of the present disclosure, the mounting head of any one of the first to fifth aspects is provided with a fixing member that fixes the mounting head to a component mounting device, and when the fixing member is placed so that it is in contact with a flat surface, the outer side of the bumper is in contact with the flat surface.

[0017] A component mounting device of a seventh aspect of the present disclosure includes a mounting head of any one of the first to eleventh aspects, a component supply unit that supplies components to the component suction nozzle of the mounting head, and a substrate transport mechanism that transports a substrate on which components are mounted by the mounting head.

[0018] (Embodiment) Hereinafter, exemplary embodiments of a mounting head and a component mounting device according to the present disclosure will be described with reference to the accompanying drawings. The present disclosure is not limited to the specific configurations of the following embodiments, and configurations based on similar technical concepts are included in the present disclosure. The configurations, shapes, etc. described below are examples for explanatory purposes and can be modified as appropriate depending on the specifications of the mounting head and the component mounting device.

[0019] In the following, corresponding elements in each drawing are given the same reference numerals, and redundant explanations will be omitted. In the following, two axes that are orthogonal to each other in a horizontal plane are defined as the X-axis direction in the substrate transport direction and the Y-axis direction orthogonal to the substrate transport direction, and the height direction orthogonal to the horizontal plane is defined as the Z-axis direction.

[0020] (Component mounting equipment) First, the configuration of a component mounting apparatus 2 will be described with reference to Fig. 1. Fig. 1 is a schematic plan view showing a component mounting apparatus 2 according to an embodiment.

[0021] The component mounting device 2 has a function of performing a component mounting operation of mounting components (electronic components) such as dies and IC chips onto the boards W1 and W2, which are supplied from the component supply units 4 and 6. The component mounting device 2 constitutes a component mounting system that mounts components onto the boards W1 and W2.

[0022] The component mounting apparatus 2 of this embodiment has the function of processing two boards W1 and W2 in parallel using two component supply units 4 and 6 and two mounting heads 26A and 26B. The component mounting apparatus 2 is not limited to processing multiple boards in parallel, and may also be used to process only one board individually.

[0023] Board transport mechanisms 10 and 12 are arranged along the X-axis direction in the center of base 8. Board transport mechanisms 10 and 12 each transport boards W1 and W2 carried in from upstream in the X-axis direction and position them at a predetermined mounting work position. Board transport mechanisms 10 and 12 each carry out boards W1 and W2 downstream after component mounting work has been completed.

[0024] Component supply units 4 and 6 are arranged on both sides of the board transport mechanisms 10 and 12 in the Y-axis direction. Each of the component supply units 4 and 6 has multiple tape feeders 14 and 16 arranged side by side along the X-axis direction. Tape feeders 14 and 16 are attached to carriages 15 and 17, respectively, and feed carrier tapes containing components by pitch to sequentially supply the components to predetermined component supply positions.

[0025] 1, Y-axis beams 18 and 20 equipped with Y-axis linear drive mechanisms are arranged along the Y-axis direction on both sides of the base 8 in the X-axis direction. The Y-axis beams 18 and 20 are equipped with linear rails extending in the Y-axis direction, and X-axis beams 22 and 24 are engaged therewith so as to be able to slide freely in the Y-axis direction.

[0026] The X-axis beams 22 and 24 are each equipped with moving tables 22T and 24T that move along linear rails (not shown) extending in the X-axis direction, and an X-axis linear drive mechanism (not shown) that moves the moving tables 22T and 24T along the linear rails. Mounting heads 26A and 26B are attached to the moving tables 22T and 24T. The mounting heads 26A and 26B are detachable from the moving tables 22T and 24T.

[0027] The first mounting head 26A engaged with the X-axis beam 22 is a head that picks up components supplied from the component supply unit 4 and mounts them on the boards W1 and W2. The second mounting head 26B engaged with the X-axis beam 24 is a head that picks up components supplied from the component supply unit 6 and mounts them on the boards W2 and W1.

[0028] The Y-axis beams 18 and 20 and the X-axis beams 22 and 24 constitute a head moving mechanism that moves the mounting heads 26A and 26B within the XY plane.

[0029] Component recognition cameras 28, 30 are provided between the component supply units 4, 6 and the board transport mechanisms 10, 12, respectively. Mounting heads 26A, 26B that have picked up components from the component supply units 4, 6 move above component recognition cameras 28, 30, thereby acquiring images of the components held by mounting heads 26A, 26B. Recognition processing of the acquired images detects any misalignment of the components while they are held by mounting heads 26A, 26B.

[0030] Mounting heads 26A and 26B are respectively equipped with head cameras 32 and 34 that move integrally. Head cameras 32 and 34 are attached to mounting heads 26A and 26B with their imaging optical axes facing downward, and capture images of boards W1 and W2 facing downward from above. The captured images are processed to detect misalignment of boards W1 and W2, i.e., misalignment of the mounting points. Then, based on the detection results of the component misalignment and the mounting point misalignment, position correction is performed during component mounting. The position correction includes rotational alignment, which aligns the rotational position of the component around the θ axis to the correct direction.

[0031] The component mounting apparatus 2 further includes a main body control unit 36. The main body control unit 36 ​​is a control unit that controls each component of the component mounting apparatus 2. The main body control unit 36 ​​is configured, for example, by a microcomputer that includes a processor and a memory that stores a computer program executed by the processor.

[0032] (Mounting head) Next, the detailed configuration of the mounting heads 26A and 26B will be described with reference to Figure 2 and subsequent drawings. Because the two mounting heads 26A and 26B have a similar structure, in the following description they will be collectively referred to as "mounting head 26," and only one mounting head 26 will be described.

[0033] 2 and 3 are perspective views of the mounting head 26. Fig. 4 is a schematic cross-sectional view of the mounting head 26, and Fig. 5 is a schematic perspective view of the mounting head 26.

[0034] 2 to 5, the mounting head 26 is provided with a head cover 38 that covers the top of the mounting head 26. A main board 39 for controlling the entire mounting head 26 is disposed inside the head cover 38. The main board 39 is electrically connected to the main body control unit 36 ​​shown in FIG. 1, and is also referred to as the "head control unit."

[0035] The mounting head 26 further includes a first nozzle unit 40 and a second nozzle unit 50 as units for picking up components.

[0036] Each of the nozzle units 40 and 50 is a unit that is configured with a plurality of component suction nozzles and a drive mechanism for driving the nozzles. The first nozzle unit 40 has a plurality of component suction nozzles 41 (41A to 41H) arranged along the X-axis direction, and the second nozzle unit 50 has a plurality of component suction nozzles 51 (51A to 51H) arranged along the X-axis direction.

[0037] In this embodiment, the component suction nozzle 41 includes eight component suction nozzles 41A to 41H, and the component suction nozzle 51 includes eight component suction nozzles 51A to 51H. The number of component suction nozzles 41, 51 in each of the nozzle units 40, 50 is not limited to eight, and may be any number.

[0038] The first nozzle unit 40 and the second nozzle unit 50 are arranged in the Y-axis direction, which is perpendicular to the X-axis direction, to form two rows of nozzle units. One mounting head 26 is equipped with 8 nozzles x 2 rows = a total of 16 component suction nozzles 41, 51. Note that the nozzle units 40, 50 are not limited to being arranged in two rows, and may be arranged in only one row, for example.

[0039] The other members of the nozzle units 40, 50 also have the same number of component suction nozzles 41, 51, and will be represented in the same manner as "XX (XXA to XXH)" in the following explanation and drawings.

[0040] FIG. 6 is a schematic side view of the first nozzle unit 40 and the second nozzle unit 50. As shown in FIG.

[0041] The first nozzle unit 40 has a drive mechanism for driving the component suction nozzles 41, which includes a plurality of shafts 45 (45A to 45H), a plurality of pulleys 46 (46A to 46H), and a plurality of air connections 47 (47A to 47H).

[0042] The mounting head 26 further includes a motor unit 60 in addition to the first nozzle unit 40 and the second nozzle unit 50. The motor unit 60 includes a plurality of lift motors 42 (42A to 42H) and a plurality of output shafts 43 (43A to 43H), a plurality of lift motors 52 (52A to 52H) and a plurality of output shafts 53 (53A to 53H), and brackets 63 and 64, which will be described later.

[0043] The lifting motor 42 is a linear motor that raises and lowers the output shaft 43 in the Z-axis direction (arrow Z1). Offset blocks 44 (44A to 44H) are connected to the lower end of the output shaft 43. The offset blocks 44 are blocks that offset the positions of the output shaft 43 and the shaft 45 in the horizontal direction. The output shaft 43 is connected to the upper surface of the offset block 44, and the shaft 45 is connected to the lower surface of the offset block 44.

[0044] The shaft 45 is a shaft for raising and lowering the component suction nozzle 41, and is connected to the component suction nozzle 41. The output shaft 43 and the shaft 45 rise and fall together (arrow Z1), causing the component suction nozzle 41 attached to the lower end of the shaft 45 to rise and fall (arrow Z2).

[0045] A pulley 46 is attached to the middle of the shaft 45. Each pulley 46 is engaged with a belt connected to a rotary motor 100 shown in FIG. 5, and when the rotary motor 100 rotates the belt, the pulleys 46 rotate together around the Z-axis direction. Accordingly, the shafts 45 and the component suction nozzles 41 rotate together. Note that any structure may be used for transmitting power to the pulleys 46 via the belt, and for example, the structure described in Japanese Patent No. 4,894,841 may be used.

[0046] Air connection part 47 is a connecting member for supplying air to suction holes 48 (48A to 48H) of component suction nozzle 41. Connection hoses 72 (72A to 72H) shown in FIG.

[0047] Similarly, second nozzle unit 50 has a plurality of shafts 55 (55A-55H), a plurality of pulleys 56 (56A-56H), and a plurality of air connections 57 (57A-57H) as a drive mechanism for driving a plurality of component suction nozzles 51. Offset blocks 54 (54A-54H) are provided between shaft 55 and output shaft 53.

[0048] As the output shaft 53 and the shaft 55 move up and down together (arrow Z3), the component suction nozzles 51 connected to the shaft 55 move up and down together (arrow Z4). The lower end of the component suction nozzle 51 is provided with suction holes 58 (58A-58H), and air is supplied to the suction holes 58 via an air connection 57. Connection hoses 82 (82A-82H) shown in FIG. 4 are connected to the air connection 57. Each of the pulleys 56 attached to the middle of the shaft 55 engages with a belt connected to a rotary motor 102 shown in FIG. 5. When the rotary motor 102 rotates the pulleys 56, the shafts 55 and the component suction nozzles 51 rotate together around the Z-axis. The connection hoses 72 and 82 are, for example, resin tubes.

[0049] The offset block 44 offsets the position of the shaft 45 in the Y-axis direction relative to the lift motor 42 and the output shaft 43 away from the second nozzle unit 50 (arrow Y1). The offset block 54 offsets the position of the shaft 55 in the Y-axis direction relative to the lift motor 52 and the output shaft 53 away from the first nozzle unit 40 (arrow Y2).

[0050] The first bracket 63 is a member that holds the plurality of lift motors 42 and the plurality of lift motors 52 at a first height position. The second bracket 64 is a member that holds the plurality of lift motors 42 and the plurality of lift motors 52 at a second height position that is lower than the first height position. The two brackets 63, 64 are also used as members for attaching a support frame 90, which will be described later.

[0051] The mounting head 26 further includes a shaft holding portion 66 that holds the shafts 45 and 55 so that they can be raised and lowered. The configuration of the shaft holding portion 66 will be described later.

[0052] As shown in FIG. 4, the mounting head 26 includes, as components related to the first nozzle unit 40, a manifold 70, connection hoses 72 (72A to 72H), valves 74 (74A to 74H), and valves 76 (76A to 76H).

[0053] Manifold 70 is a member for supplying air to component suction nozzles 41. Manifold 70 has multiple internal flow paths for the flow of air, and is equipped with multiple valves 74, 76 of two types that communicate with the internal flow paths.

[0054] The valves 74 and 76 are components that switch the communication state between the internal flow paths of the manifold 70, thereby switching the type of air supplied to the component suction nozzles 41. A pair of one valve 74 and one valve 76 constitutes one valve device 69. The valve 74 is located downstream, and the valve 76 is located upstream. One valve device 69 is provided for each shaft 45, in other words, for each component suction nozzle 41.

[0055] In this embodiment, the manifold 70 allows three types of air to flow: positive pressure air, negative pressure air, and atmospheric pressure air. By opening and closing the valves 74 and 76, it is possible to selectively supply one of the three types of air to the component suction nozzle 41. The valves 74 and 76 are, for example, solenoid valves, and more specifically, three-port solenoid valves.

[0056] Similarly, for the second nozzle unit 50, the mounting head 26 includes a manifold 80, connection hoses 82 (82A to 82H), valves 84 (84A to 84H), and valves 86 (86A to 86H).

[0057] FIG. 7 is a schematic vertical cross-sectional view showing the peripheral configuration of the manifolds 70 and 80. As shown in FIG.

[0058] 7, manifold 70 has a plurality of air flow paths 71 therein, and valves 74, 76 are attached so as to communicate with air flow paths 71. Each of valves 74 is electrically connected to I / O board 73 via connectors 75 (75A to 75H) and wiring (not shown). Each of valves 76 is also electrically connected to I / O board 73 via connectors 77 (77A to 77H) and wiring (not shown).

[0059] A sensor board 78 is also electrically connected to the I / O board 73. The sensor board 78 is a board on which a flow sensor is mounted for measuring the flow rate of air flowing through the internal flow passages of the manifold 70. The sensor board 78 is attached to the manifold 70, and in particular, to the second main surface 70B opposite to the first main surface 70A on which the valves 74 and 76 are attached.

[0060] The I / O board 73 is fixed to the upper surface (third surface) of the manifold 70 via a fixing member 79.

[0061] Similarly, manifold 80 has a plurality of air flow paths 81, and valves 84 and 86 are attached so as to communicate with air flow paths 81. Valves 84 are each electrically connected to I / O board 83 via connectors 85 (85A to 85H) and wiring (not shown), and valves 86 are each electrically connected to I / O board 83 via connectors 87 (87A to 87H) and wiring (not shown).

[0062] The I / O board 83 is fixed to the upper surface of the manifold 80 via a fixing member 89. The I / O board 83 is further electrically connected to a sensor board 88 on which a flow rate sensor is mounted.

[0063] The I / O board 73 is electrically connected to the main board 39 shown in Figures 2 and 3 via wiring (not shown). The I / O board 83 is not connected to the main board 39, but is electrically connected to the I / O board 73 via wiring (not shown).

[0064] According to the above configuration, the wiring (16 wirings in total) of the valves 74, 76 and the wiring (1 wirings in total) of the sensor board 78 are collected and connected to the I / O board 73, and the wiring (16 wirings in total) of the valves 84, 86 and the wiring (1 wirings in total) of the sensor board 88 are collected and connected to the I / O board 83. In this state, by connecting the I / O board 83 to the I / O board 73 and connecting the I / O board 73 to the main board 39, the main board 39 can control the opening and closing of all the valves 74, 76, 84, 86 and obtain the measured values ​​of the flow rate sensors on the sensor boards 78, 88.

[0065] Furthermore, when performing maintenance on the valves 74, 76, 84, 86 or the sensor boards 78, 88, etc., it is sufficient to individually plug and unplug the wires between the I / O board 73 and the connectors 75, 77 and the wires between the I / O board 83 and the connectors 85, 87. Therefore, compared to when the wires are directly connected to the main board 39, there is no need to plug and unplug unrelated wires or remove components such as the head cover 38, improving workability during maintenance.

[0066] In this embodiment, communication on each line is performed by serial communication.

[0067] Returning to FIG. 4, the mounting head 26 further includes a support frame 90 .

[0068] The support frame 90 is a frame for supporting the components of the mounting head 26, including the nozzle units 40 and 50. The support frame 90 is detachably attached to the movable tables 22T and 24T of the component mounting apparatus 2, for example, with bolts. The hook members 91 are provided to temporarily hook the mounting head 26 to the movable tables 22T and 24T when attaching the mounting head 26 to the movable tables 22T and 24T. The locations for attaching the hook members 91 are located at the outermost positions in the X-axis direction on the support frame 90. Providing the hook members 91 in this manner makes it easier for workers to attach the mounting head 26 to the movable tables 22T and 24T. The support frame 90 of this embodiment supports the components of the mounting head 26, including the nozzle units 40 and 50, in a cantilevered manner on one side in the Y-axis direction via attachment members 92, 94, and 96, which will be described later.

[0069] The support frame 90 has three types of mounting members: a first mounting member 92, a second mounting member 94, and a third mounting member 96.

[0070] All three types of mounting members 92, 94, 96 are provided to protrude from the support frame 90 to one side in the Y-axis direction. The mounting members 92, 94, 96 may also be referred to as "support posts" as they cantilever the components of the mounting head 26, including the nozzle units 40 and 50.

[0071] The first mounting member 92 is attached to the first bracket 63 of the motor unit 60, the second mounting member 94 is attached to the second bracket 64 of the motor unit 60, and the third mounting member 96 is attached to blocks 106 and 108, which will be described later.

[0072] With this structure, high rigidity can be achieved by supporting the box-shaped motor unit 60 and the shaft holding portion 66 in a cantilevered manner by the mounting members 92, 94, and 96. This eliminates the need to provide high rigidity to the multiple lift motors 42, 52 themselves (FIG. 6), and obviates the need to add members (such as rigid plates) to the lift motors 42, 52 to maintain high rigidity, leading to a reduction in the weight and size of the mounting head 26.

[0073] As shown in FIG. 5, the mounting head 26 further includes rotation motors 100 and 102 .

[0074] Rotary motors 100 and 102 are motors for rotating shafts 45 and 55, respectively, shown in Figure 6 etc. Rotary motor 100 rotates multiple shafts 45 in synchronization via a belt and pulley 46 (not shown), and rotary motor 102 rotates multiple shafts 55 in synchronization via another belt and pulley 56 (not shown).

[0075] As shown in FIG. 5, two rotary motors 100, 102 are supported by blocks 106, 108 of the shaft holder 66.

[0076] The shaft holding portion 66 includes a first block 104, a shaft case 105 (FIGS. 6 and 7), and second blocks 106 and 108.

[0077] The first block 104 is a block that holds the shafts 45, 55 shown in FIG. 6 and other figures so that they can be inserted therethrough. The first block 104 holds a plurality of shaft cases 105, through which the shafts 45, 55 are individually inserted. The shaft cases 105 are cylindrical members that extend vertically, and a rotor 105A having a spline structure that guides the shafts 45, 55 in the Z-axis direction is built into the shaft case 105 (see FIG. 7). The rotor 105A is mounted within the shaft case 105 in a state that allows it to rotate around the Z-axis direction. Therefore, the shaft holding portion 66 supports the shafts 45, 55 so that they can move in the Z-axis direction and rotate around the Z-axis direction.

[0078] The second blocks 106 and 108 are blocks for supporting the rotary motors 100 and 102, respectively. The second blocks 106 and 108 are each disposed outside the first block 104 in the X-axis direction. A third mounting member 96, which protrudes from the support frame 90, is attached to the second blocks 106 and 108.

[0079] As shown in FIG. 5, the mounting head 26 further includes connecting members 110 and 112 .

[0080] The connecting members 110, 112 are members that connect the motor unit 60 and the shaft holding portion 66 to each other. The connecting members 110, 112 extend in the Z-axis direction so as to connect the motor unit 60 and the shaft holding portion 66 that are separated from each other in the Z-axis direction.

[0081] By providing the connecting members 110, 112, as will be described later, it is possible to suppress bending of the tip end of the mounting head 26 that occurs when multiple shafts 45 or multiple shafts 55 are lowered simultaneously, leading to improved mounting accuracy. The connecting members 110, 112 may also be called "suspenders."

[0082] In this embodiment, the upper ends of the connecting members 110 , 112 are attached to the second bracket 64 of the motor unit 60 , and the lower ends of the connecting members 110 , 112 are attached to the second blocks 106 , 108 of the shaft holding portion 66 .

[0083] 7, mounting head 26 further includes manifold mounting members 200 for mounting manifold 70 to first block 104, and manifold mounting members 202 for mounting manifold 80 to first block 104. At least two manifold mounting members 200, 202 are provided at different height positions. Manifold mounting members 200, 202 have, for example, screw holes, and manifolds 70, 80 are detachably mounted to first block 104 by screws 204, respectively.

[0084] (manifold) Next, the peripheral configuration of manifolds 70, 80 will be described with reference to Figure 9 and subsequent drawings. Note that, since manifold 70 and manifold 80 and their peripheral configurations have similar structures, the following description will mainly illustrate and describe manifold 70 and its peripheral configuration.

[0085] 9 and 10 are perspective views showing the manifold 70 and its surrounding structure, respectively.

[0086] 9 and 10, the manifold 70 has three surfaces: a first main surface 70A (first side surface), a second main surface 70B (second side surface), and a third surface 70C (top surface). The first main surface 70A is a surface for attaching the valves 74 and 76, the second main surface 70B is a surface for attaching the sensor substrate 78, and the third surface 70C is a surface for attaching a fixing member 79 (FIG. 10) that fixes the I / O substrate 73.

[0087] 9 and 10, the I / O board 73 is accommodated in a board accommodation box 154. A fixing member 79 shown in FIG. 10 fixes the board accommodation box 154 to the third surface 70C of the manifold 70, thereby fixing the I / O board 73 to the manifold 70.

[0088] (Air flow path) Next, the air flow path 71 of the manifold 70 will be described with reference to Fig. 11. Fig. 11 is a diagram showing the connection relationship of the air flow path Ap of the mounting head 26.

[0089] 11, the mounting head 26 includes a negative pressure source 212, a positive pressure source 214, and an air flow path Ap that is open to the atmosphere and through which air flows. The air flow path 71 is a flow path in the air flow path Ap that is arranged within the manifold 70. The air flow path Ap includes a negative pressure flow path Ap1 that connects the negative pressure source 212 and the valve 74, a positive pressure flow path Ap2 that connects the positive pressure source 214 and the valve 76, a connection flow path 167 that connects the valve 74 and the valve 76, a terminal flow path Ap3 that connects the valve 74 and the component suction nozzle 41, and a port F that is open to the atmosphere.

[0090] The air flow path 71 in the manifold 70 has a terminal flow path 161, a negative pressure inlet flow path 163, a connecting flow path 167, and a positive pressure inlet flow path 175, in addition to a negative pressure flow path 172 and a positive pressure flow path 174. The negative pressure flow path 172 and the negative pressure inlet flow path 163 are part of the negative pressure flow path Ap1, and are flow paths formed within the manifold 70. The positive pressure flow path 174 and the positive pressure inlet flow path 175 are part of the positive pressure flow path Ap2, and are flow paths formed within the manifold 70. The end P2 of the positive pressure flow path 174 is blocked with a plug.

[0091] Port A is the most upstream end of terminal flow path 161 and is a connection port that connects terminal flow path 161 to valve 74. Terminal flow path 161 communicates with connection portion 186 (FIG. 7) of manifold 70. Terminal flow path Ap3 is a flow path that runs from valve 74 to component suction nozzle 41. Terminal flow path 161, which is the upstream portion of terminal flow path Ap3, is formed inside manifold 70, and port A is the starting point of terminal flow path 161.

[0092] An air filter 188 is disposed between the terminal flow path 161 and the connecting portion 186. The connecting hose 72 (FIG. 4) described above is connected to the connecting portion 186, and air flowing through the terminal flow path 161 is supplied to the component suction nozzle 41. In this manner, the terminal flow path Ap3 includes the terminal flow path 161 and the connecting hose 72.

[0093] Ports B and C both communicate with port A via valve 74. Port B communicates with negative pressure flow path 172 via negative pressure inlet flow path 163, and is supplied with negative pressure air. Negative pressure inlet flow path 163 is a flow path for drawing the negative pressure supplied to negative pressure flow path 172 into valve 74, with one end connected to port B and the other end connected to negative pressure flow path 172. Port B communicates with port D above via connection flow path 167. Connection flow path 167 is a flow path for connecting two valves 74 and 76 that make up valve device 69 to each other, with one end connected to port C and the other end connected to port D.

[0094] Ports E and F both communicate with port D via valve 76. Port E communicates with positive pressure flow path 174 via positive pressure inlet flow path 175, and positive pressure air is supplied to port E. Positive pressure inlet flow path 175 is a flow path for drawing the positive pressure supplied to positive pressure flow path 174 into valve 76, and one end is connected to port E and the other end is connected to positive pressure flow path 174. Port F is a groove formed in the first main surface 70A in the X-axis direction, and is open to atmospheric pressure.

[0095] The valve 74 switches between connecting port A to port B and connecting port C. When port A is connected to port B, negative pressure air is supplied from the negative pressure source 212, one of the air supply sources, to the component suction nozzle 41 connected to the end of the terminal flow path 161 via port B and the negative pressure intake flow path 163. When port A is connected to port C, air upstream of the valve 74 is supplied to the component suction nozzle 41 via port C, the connecting flow path 167, and port D.

[0096] Valve 76 switches port D between a state where it is connected to port E and a state where it is connected to port F. When port D is connected to port E, positive pressure air is supplied from positive pressure source 214, one of the air supply sources, to the downstream side of port D via port E and positive pressure intake flow path 175. When port D is connected to port F, the air pressure in connection flow path 167 downstream of port D, terminal flow path 161, and component suction nozzle 41 becomes atmospheric pressure via port F, which is open to atmospheric pressure.

[0097] According to the above configuration, (1) when both valves 74 and 76 are in the OFF position, valve 74 connects port A to port B, so that negative-pressure air is supplied to the component suction nozzle 41, and air is sucked into the component suction nozzle 41. (2) When both valves 74 and 76 are in the ON position, valve 74 connects port A to port C, and valve 76 connects port D to port E, so that positive-pressure air is supplied to the component suction nozzle 41, and air is ejected from the component suction nozzle 41. (3) When valve 74 is in the ON position and valve 76 is in the OFF position, valve 74 connects port A to port C, and valve 76 connects port D to port F, so that the component suction nozzle 41 is open to the atmosphere, and the air pressure inside it becomes atmospheric pressure.

[0098] In this way, by switching the connection state between the ports through the operation of the two valves 74, 76, it is possible to supply (connect) one type of air selected from three types of air: negative pressure air, positive pressure air, and atmospheric pressure air to each of the multiple component suction nozzles 41.

[0099] 9 and 10, in the manifold 70, the valves 74 and 76 are attached to the first main surface 70A, the sensor board 78 is attached to the second main surface 70B, and the I / O board 73 is attached to the third surface 70C. By using each surface of the manifold 70 to attach each component in this way, the space around the manifold 70 can be used effectively, leading to a reduction in the size of the mounting head 26.

[0100] Furthermore, by arranging the I / O board 73 above the valves 74, 76 and the sensor board 78, and by arranging the main board 39 above the I / O board 73, the main board 39, I / O board 73, valves 74, 76, and sensor board 78 are positioned in that order from top to bottom. This allows for easy attachment and detachment of each wire.

[0101] (bumper) Next, bumpers 232, 262 that protect connecting hoses 72, 82, respectively, will be described with reference to Figures 2, 3, 7 and 12. Figure 12 is a schematic perspective view of bumpers 232, 262.

[0102] The bumpers 232, 262 are protective materials that prevent the connection hoses 72, 82 from colliding with other components, and are buffer materials that reduce the impact when the bumpers 232, 262 collide with other components. The bumpers 232, 262 are provided to protect not only the connection hoses 72, 82, but also the sides of the mounting head 26 on which important components such as the valves 74, 76, 84, 86 and manifolds 70, 80 are concentrated, and in particular to protect the mounting head 26 when it is removed from the component mounting apparatus 2. The bumpers 232, 262 are, for example, metal plates. Note that the bumpers 232 and 262 have the same configuration, so the configuration of the bumper 232 will be described below and a description of the bumper 262 will be omitted.

[0103] The bumper 232 is disposed so as to surround the upper portion of the connection hose 72, which is part of the flow path that supplies air to each of the component suction nozzles 41 arranged in the X-axis direction. The bumper 232 is secured to the first block 104 of the shaft holder 66 by co-tightening via the manifold mounting member 200 of the manifold 70.

[0104] The bumper 232 has a first arm 234 and a second arm 236 whose upper parts are detachably fixed to the manifold mounting member 200, and a plate portion 238 that connects the lower ends of the first arm 234 and the second arm 236.

[0105] The first arm 234 has a first plate 242 that extends inward in the X-axis direction and is pressed against and detachably fixed to the manifold mounting member 200, a second plate 244 that is bent from the first plate 242 and extends outward in the Y-axis direction, a third plate 246 that extends downward in the Z-axis direction and outward (diagonally downward) in the Y-axis direction from the outer tip of the second plate 244, and a fourth plate 248 that extends outward in the Y-axis direction from the outer tip of the third plate 246. Mounting holes 243 for the manifold mounting member 200 are arranged in the first plate 242, and the first plate 242 is screwed to the first block 104 of the shaft holding portion 66 together with the manifold 70.

[0106] Similarly, second arm 236 has a first plate 252 that extends inward in the X-axis direction and is pressed against and detachably fixed to manifold mounting member 200, a second plate 254 that is bent from first plate 252 and extends outward in the Y-axis direction, a third plate 256 that extends downward in the Z-axis direction and outward (diagonally downward) in the Y-axis direction from the outer tip of second plate 254, and a fourth plate 258 that extends outward in the Y-axis direction from the outer tip of third plate 256. Mounting holes 253 for mounting to manifold mounting member 200 are arranged in first plate 252, and first plate 252 is screwed to first block 104 of shaft holding portion 66 together with manifold 70.

[0107] The plate portion 238 extends along the X-axis direction and connects to the outer end of the fourth plate 248 of the first arm 234 and the outer lower end of the fourth plate 258 of the second arm 236. The plate portion 238 is located on the outer side in the Y-axis direction of the connection hoses 72 arranged in the X-axis direction, and therefore prevents the connection hoses 72 from coming into contact with other components.

[0108] The wiring fixed to the bumper 232 will be described with reference to Figures 13 to 16. Figure 13 is a schematic front view showing the configuration around the bumper 232. Figure 14 is an explanatory diagram showing the bumper 232, connectors 75A-75H, and cables 282, 284. Figure 15 is a schematic view showing the wiring fixed to the back surface of the bumper 232. Figure 16 is a cross-sectional view taken along line AA in Figure 15.

[0109] Connectors 75A-75H connected to valves 74A-74H, respectively, can be inserted and removed in the Z-axis direction. For example, when replacing one of valves 74A-74H during maintenance, the connector of the valve to be replaced can be removed downward. Wiring connected to each connector 75A-75H is fixed to bumper 232.

[0110] Of the eight connectors 75A-75H, wiring 284A-284D connected to half (four connectors 75A-75D) are fixed to one side of plate portion 238 of bumper 232 by bundling member 272 and bundled into one cable 282. Cable 282 extends along the inside of third plate 246, is fixed to third plate 246 by bundling member 276, and is connected to I / O board 73.

[0111] Of the eight connectors 75A-75H, wiring 284E-284H connected to half (four connectors 75E-75H) are fixed to the other side of plate portion 238 of bumper 232 by bundling member 274 and bundled into a single cable 284. Cable 284 extends along the inside of third plate 256, is fixed to third plate 256 by bundling member 278, and is connected to I / O board 73.

[0112] By fixing the cables 282, 284 along the bumper 232, the posture of the cables 282, 284 is stabilized, and the cables 282, 284 are prevented from moving violently even when the mounting head 26 moves at high speed. This makes it possible to reduce malfunctions, such as broken wires, caused by vibration of the cables 282, 284. Furthermore, because many cables 282, 284 are fixed along the bumper 232, the cables 282, 284 do not stand out from the outside, and are less likely to get in the way during maintenance of the mounting head 26. This improves the workability of maintaining the mounting head 26.

[0113] Furthermore, because the wiring connected to each of the connectors 75A-75H is fixed to the bumper 232, the relative positions of the connectors 75A-75H are maintained even when the connectors 75A-75H are removed from the valves 74A-74H and the bumper 232 is removed from the manifold 70, as shown in Fig. 14. Therefore, when reattaching the connectors 75A-75H to the valves 74A-74H after maintenance is completed, the worker does not need to worry about which connector to attach to which valve, thereby improving assembly efficiency.

[0114] Next, reference is made to Fig. 21. Fig. 21 is a schematic cross-sectional view of the mounting head 26 with the hooking member 91 side placed on a flat surface Sf.

[0115] The mounting head 26 is designed to be removed from the component mounting apparatus 2 for maintenance, replacement, etc., but because the mounting head 26 is a precision device that needs to be handled carefully, component mounting apparatus manufacturers recommend placing the removed mounting head 26 on a dedicated stand. However, in locations where a stand cannot be prepared in time, the mounting head 26 may be placed on a flat surface Sf such as the floor or a workbench. The mounting head 26 of this embodiment is provided with head protection members such as bumpers 262, 232 and guards 311, 313, so that important parts of the mounting head 26 can be protected when removed from the component mounting apparatus 2.

[0116] 17, when the hook member 91 side of the mounting head 26 is placed on a flat surface Sf, the bumper 262 at the bottom of the mounting head 26 comes into contact with the flat surface Sf, and the mounting head 26 is supported by the hook member 91 and the bumper 262. This makes it possible to prevent the connection hose 82 from being pinched between the mounting head 26 and the flat surface Sf and being deformed or damaged.

[0117] Furthermore, when an operator holds the gripping portion 292 to raise the mounting head 26, the bumper 262 serves as a fulcrum to raise the mounting head 26, thereby preventing the connection hose 82 from being deformed and damaged at this time as well.

[0118] As shown in Figure 18, when the head cover 38 side of the mounting head 26 is placed on a flat surface Sf, the head cover 38 supports the mounting head 26, preventing the connection hose 72 from being pinched between the mounting head 26 and the flat surface Sf and being deformed or damaged.

[0119] Furthermore, when the head cover 38 side of the mounting head 26 is placed on a flat surface Sf and the worker holds the gripping portion 292 to raise the mounting head 26, the bumper 232 serves as a fulcrum to raise the mounting head 26, thereby preventing the connection hose 72 from being deformed and damaged.

[0120] Please refer to Figures 2, 13, and 19. Figure 19 is an explanatory diagram of a state in which the mounting head 26 is placed in an upright position on a flat surface Sf. The pair of left and right guards 311 and 313 are fixed to the first block 104 by guard mounting members 315 and 317, respectively. The guard mounting members 315 and 317 are, for example, bolts and nuts. The guards 311 and 313 are annular, approximately rectangular plate materials, and are made of, for example, metal.

[0121] The guards 311 and 313 are disposed on either side of the first nozzle unit 40 and the second nozzle unit 50, spaced apart in the X-axis direction. The guards 311 and 313 protect the component suction nozzle 41, the shafts 45 and 55 that hold the component suction nozzle 41, and the shaft holder 66 from contacting other members in the X-axis direction.

[0122] Furthermore, the lower ends 311a and 313a of the guards 311 and 313 respectively protrude downward from the lower end of the component suction nozzle 41, which is positioned at the standby height. For example, the lower ends 311a and 313a of the guards 311 and 313 respectively protrude downward from the lower end of the component suction nozzle 41 by approximately 0.5 mm. Therefore, when the mounting head 26 is placed upright on a flat surface Sf, the lower ends 311a and 313a of the guards 311 and 313 respectively contact the flat surface Sf, so that the lower end of the component suction nozzle 41 floats without contacting the flat surface Sf. This prevents the lower end of the component suction nozzle 41 from being deformed by contact with the flat surface Sf.

[0123] (effect) As described above, the mounting head 26 of this embodiment includes a plurality of component suction nozzles 41, 51 that place their suction holes 48 against components to pick up the components; manifolds 70, 80 with air passages through which air flows to the suction holes 48 of each of the component suction nozzles 41, 51; a plurality of valves 74, 84 attached to the manifolds 70, 80 and used to switch the air flow; a plurality of connection hoses 72, 82 through which air flows from the manifolds 70, 80 to the component suction nozzles 41, 51 and which connect the air passages of the manifolds 70, 80 to the component suction nozzles 41, 51; a shaft holder 66 that holds a plurality of shafts 45, 55 connected to each of the component suction nozzles 41, 51 and arranged side by side in the X-axis direction, which intersects the lifting and lowering direction, so that the shafts 45, 55 can be raised and lowered; and bumpers 232, 262 whose plate portions 238 are positioned below the valves 74, 84 and are positioned outside the connecting hoses 72, 82 in the Y-axis direction, which intersects the X-axis direction.

[0124] According to this configuration, the bumpers 232, 262 protect the connection hoses 72, 82, thereby reducing the risk of the connection hoses 72, 82 coming into contact with other members and being damaged.

[0125] In addition, the mounting head 26 of the embodiment is provided with multiple wirings connected to each valve 74, 84 via connectors 75, 85, and the multiple wirings are arranged along the connection hose 72, 82 side of the bumpers 232, 262 and fixed to the bumpers 232, 262.

[0126] According to this configuration, the connectors 75, 85 can be attached to and detached from the valves 74, 84 while maintaining the relative positions of the connectors 75, 85, thereby improving the efficiency of maintenance of the valves 74, 84.

[0127] In addition, in the mounting head 26 of this embodiment, the connectors 75, 85 are attachable to and detachable from the lower portions of the valves 74, 84, and the bumpers 232, 262 extend below the connectors 75, 85 attached to the valves 74, 84 along the X-axis direction.

[0128] With this configuration, the valves 74, 84 are not hidden by the bumpers 232, 262 in the Y-axis direction, allowing the worker to check the operating status of the valves 74, 84. Furthermore, the worker can directly access the valves 74, 84, improving the efficiency of maintenance work.

[0129] In addition, in the mounting head 26 of the embodiment, the bumpers 232, 262 have a first arm 234 and a second arm 236 that extend downward in the Z-axis direction and outward in the Y-axis direction, and a plate portion 238 that extends along the X-axis direction and connects the lower end of the first arm 234 and the lower end of the second arm 236.

[0130] Furthermore, in the mounting head 26 of this embodiment, the upper portions of the first arm 234 and the second arm 236 are detachably fixed to the manifolds 70 and 80, respectively. This allows the worker to easily attach and detach the bumpers 232 and 262.

[0131] Furthermore, the mounting head 26 of this embodiment includes a hooking member 91 that hooks the mounting head 26 to the component mounting apparatus 2. When the hooking member 91 is placed so as to abut against the flat surface Sf, the outer side of the bumper 262 abuts against the flat surface Sf.

[0132] With this configuration, the mounting head 26 can be supported by the hook member 91 and the bumper 262, preventing deformation and damage to the connection hose 82. Furthermore, when the mounting head 26 is raised from a lying position to an upright position, the bumper 262 serves as a fulcrum, preventing deformation and damage to the connection hose 82 at this time as well.

[0133] As described above, the component mounting apparatus 2 of the embodiment includes a mounting head 26, a component supply unit 4 that supplies components to the component suction nozzle 41 of the mounting head 26, and a substrate transport mechanism 10 that transports the substrate W1 on which the components are mounted by the mounting head 26.

[0134] According to this configuration, the mounting head 26 is used in which the connection hoses 72, 82 are protected, so that damage to the connection hoses 72, 82 is reduced, and a component mounting apparatus 2 with high productivity can be realized.

[0135] (others) Although the present disclosure has been described above using the above-mentioned embodiments, the present disclosure is not limited to the above-mentioned embodiments.

[0136] Although the present disclosure has been fully described in connection with the preferred embodiments with reference to the accompanying drawings, various variations and modifications will be apparent to those skilled in the art. Such variations and modifications should be understood to be included within the scope of the present disclosure as defined by the appended claims, unless they depart therefrom. Furthermore, changes in the combination and order of elements in each embodiment may be made without departing from the scope and spirit of the present disclosure. [Industrial Applicability]

[0137] The present disclosure is applicable to any mounting head and component mounting device including the same. [Explanation of symbols]

[0138] 2. Component mounting equipment 4, 6 Parts Supply Department 10, 12 Substrate transport mechanism 26 Mounting head 26A 1st mounting head 26B Second mounting head 36 Main unit control section 39 Main board 40 No. 1 nozzle unit 41 Parts suction nozzle 42 Lifting motor 43 Output shaft 44 offset block 45 shaft 50 Second nozzle unit 51 Parts suction nozzle 52 Lifting motor 53 Output shaft 54 Offset Block 55 shaft 60 Motor unit 61, 62 Motor case 63 First Bracket 64 Second Bracket 66 Shaft holder 70 Manifold 71 Air flow path 73 I / O board 74, 76 valves 78 Sensor board 80 Manifold 81 Air flow path 83 I / O board 84, 86 valves 88 Sensor board 90 Support Frame 92 First mounting member 94 Second mounting member 96 Third mounting member 100 RPM motor 102 Rotary motor 104 Block 1 105 Shaft case 106, 108 Block 2 110 First connecting member 112 Second connecting member 161 Terminal Channel 182 Flow Sensor 192 Flow Sensor 200, 202 Manifold mounting member 204 Screw 212 Negative pressure source 214 positive pressure source 222 Connector 224 Integrated Circuits 232 Bumper 234 First Arm 236 Second Arm 238 Plate section 242 Plate 1 244 Second Plate 246 Third Plate 248 4th Plate 252 Plate 1 254 Second Plate 256 Third Plate 258 4th Plate 262 Bumper 272, 274, 276, 278 Binding members 282, 284 Cable 292 Gripping part 311, 313 Guard 311a, 313a bottom end 315, 317 Guard mounting member

Claims

1. a plurality of component suction nozzles that suction holes of the component to suck the component; a manifold having an air flow path through which air flows to be supplied to the suction holes of each of the component suction nozzles; a plurality of valves attached to the manifold for switching the flow of air; a plurality of pipes through which air flows from the manifold to the component suction nozzles, and which connect the air flow paths of the manifold to the component suction nozzles; a shaft holding unit configured to liftably hold a plurality of shafts, each of which is connected to one of the component suction nozzles and arranged in a first direction intersecting the lifting direction; a bumper, a portion of which is disposed below the valve and disposed outside the piping in a second direction intersecting the first direction; Mounting head.

2. a plurality of wires connected to each of the valves via connectors; The plurality of wirings are arranged along the piping side of the bumper and fixed to the bumper. The mounting head according to claim 1 .

3. the connector is detachable from the lower part of the valve from below the valve, The bumper extends along the first direction below the connector attached to the bulb. The mounting head according to claim 2 .

4. The bumper is a first arm and a second arm extending downward in the lifting direction and outward in the second direction; a plate portion extending along the first direction and connecting a lower end of the first arm and a lower end of the second arm; The mounting head according to claim 1 .

5. an upper portion of the first arm and an upper portion of the second arm are each detachably fixed to the manifold; The mounting head according to claim 4 .

6. a hook member for hooking the mounting head to a component mounting device; When the hook member is placed so as to contact a flat surface, the outer side of the bumper contacts the flat surface. The mounting head according to claim 2 .

7. The mounting head according to any one of claims 1 to 6; a component supply unit that supplies components to the component suction nozzle of the mounting head; a substrate transport mechanism that transports a substrate on which components are to be mounted by the mounting head. Component mounting equipment.

Images