Sensor

Abstract

To provide a sensor capable of improving characteristics.SOLUTION: A sensor comprises a sensor element. The sensor element includes a first element including a first detection section, and a second element including a second detection section. The first detection section includes a first resistance member and a first conductive member. The second detection section includes a second resistance member. A second temperature of the first resistance member when first electric power is supplied to the first conductive member is higher than a first temperature. A second difference is smaller than a first difference. The first difference is an absolute value of a difference between a first change rate of a first electrical resistance of the first resistance member with respect to temperature at the first temperature and a second change rate of a second electrical resistance of the second resistance member with respect to temperature at the first temperature. The second difference is an absolute value of a difference between the second change rate and a second temperature state change rate of the first electrical resistance of the first resistance member with respect to temperature at the second temperature.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION An embodiment of the present invention relates to a sensor. [Background technology]

[0002] For example, there are sensors using MEMS (Micro Electro Mechanical Systems) elements, etc. Improvement of the characteristics of sensors is desired. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-75597 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments provide sensors that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, a sensor includes a sensor element. The sensor element includes a first element including a first detection unit and a second element including a second detection unit. The first detection unit includes a first resistive element and a first conductive element. The second detection unit includes a second resistive element. A second temperature of the first resistive element when a first power is supplied to the first conductive element is higher than a first temperature. The second difference is smaller than the first difference. The first difference is an absolute value of a difference between a first rate of change of a first electrical resistance of the first resistive element with respect to temperature at the first temperature and a second rate of change of a second electrical resistance of the second resistive element with respect to temperature at the first temperature. The second difference is an absolute value of a difference between a second rate of change of a temperature state of the first electrical resistance of the first resistive element with respect to temperature at the second temperature and the second rate of change. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. [Figure 2] 2A and 2B are schematic plan views illustrating the sensor according to the first embodiment. [Figure 3] 3A and 3B are schematic plan views illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic cross-sectional view illustrating the sensor according to the second embodiment. [Figure 5] 5A and 5B are schematic plan views illustrating a part of the sensor according to the second embodiment. [Figure 6] FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the third embodiment. [Figure 7] 7A and 7B are schematic views illustrating the sensor according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic cross-sectional view illustrating the sensor according to the first embodiment. 2(a), 2(b), 3(a), and 3(b) are schematic plan views illustrating the sensor according to the first embodiment. 1, a sensor 110 according to the embodiment includes a sensor element 10E. The sensor element 10E includes a first element 10A and a second element 10B. The first element 10A includes a first detection unit 11E. The second element 10B includes a second detection unit 12E.

[0009] The first detection unit 11E includes a first resistance member 11 and a first conductive member 21. The second detection unit 12E includes a second resistance member 12. The second detection unit 12E may include a second conductive member 22.

[0010] Fig. 2(a) is a plan view in a plane including the first conductive member 21. Fig. 2(b) is a plan view in a plane including the first resistance member 11. Fig. 3(a) is a plan view in a plane including the second conductive member 22. Fig. 3(b) is a plan view in a plane including the second resistance member 12.

[0011] 2(a), 2(b), 3(a), and 3(b), in an embodiment, the sensor 110 may include a control unit 70. The control unit 70 may be provided separately from the sensor 110.

[0012] For example, a first power P1 is supplied to the first conductive member 21. For example, the first power P1 of the first conductive member 21 is supplied from the control unit 70. The temperature of the first conductive member 21 increases based on the first power P1 (voltage V1). The temperature information is based on, for example, Joule heat. As the temperature of the first conductive member 21 increases, the temperature of the first detection unit 11E increases.

[0013] The temperature before the rise is defined as a first temperature T1. A second temperature T2 of the first resistance member 11 when the first power P1 is supplied to the first conductive member 21 is higher than the first temperature T1. The first temperature T1 may be, for example, the temperature of the first resistance member 11 when the first power P1 is not supplied to the first conductive member 21.

[0014] The first electrical resistance of the first resistance member 11 varies depending on the temperature of the first detection unit 11E (first resistance member 11). As described above, the temperature of the first resistance member 11, which increases due to the first power P1, varies depending on the detection target (e.g., the detection target gas) present around the first element 10A. For example, the degree of heat dissipation in the first detection unit 11E varies depending on the concentration of the detection target gas. For example, the degree of heat dissipation also varies depending on the type of detection target gas. Therefore, the temperature of the first resistance member 11 depends on the detection target. The first electrical resistance of the first resistance member 11 varies depending on the detection target. Information about the detection target can be obtained by detecting the first electrical resistance. The sensor 110 is, for example, a thermal conduction type gas sensor.

[0015] The detection target may include, for example, at least one selected from the group consisting of carbon dioxide, hydrogen, nitrogen, and carbon monoxide.

[0016] In the embodiment, the detected value of the first electrical resistance of the first resistance member 11 is corrected by the detected value of the second electrical resistance of the second resistance member 12. By the correction, the detection target can be detected with higher accuracy.

[0017] For example, the first electrical resistance of the first resistance member 11 changes due to the influence of the ambient temperature of the sensor 110. For example, the influence of the ambient temperature is suppressed by correction based on the detected value of the second electrical resistance of the second resistance member 12.

[0018] In one example, the first power P1 is not supplied to the second conductive member 22. Alternatively, the second conductive member 22 is not provided in the second detection unit 12E.

[0019] The first temperature T1 is lower than the second temperature T2 when it is increased. The first temperature T1 is, for example, room temperature. The second temperature T2 is, for example, a high temperature. The rate of change of the electrical resistance of the resistance member with respect to temperature varies depending on the temperature.

[0020] In the embodiment, the absolute value of the difference between the first rate of change of the first electrical resistance of the first resistance member 11 with respect to temperature at the first temperature T1 and the second rate of change of the second electrical resistance of the second resistance member 12 with respect to temperature at the first temperature T1 is defined as the first difference Δ1.

[0021] The absolute value of the difference between the second temperature state change rate of the first electrical resistance of the first resistance member 11 with respect to the temperature at the second temperature T2 and the second change rate is defined as a second difference Δ2.

[0022] In the embodiment, the second difference Δ2 is set to be smaller than the first difference Δ1. This enables, for example, correction with higher accuracy. The detection target can be detected with higher accuracy. For example, a higher S / N ratio can be obtained. According to the embodiment, for example, a sensor with improved characteristics can be provided.

[0023] For example, in the reference example, at a first temperature T1 (room temperature), the second electrical resistance of the second resistance member 12 is set to be substantially the same as the first electrical resistance of the first resistance member 11. In this reference example, the rate of change of the electrical resistance of the first resistance member 11 with respect to temperature at a high second temperature T2 often does not match the rate of change of the electrical resistance of the second resistance member 12 with respect to temperature at the first temperature T1, which is room temperature. In the reference example, the accuracy of the correction is insufficient.

[0024] In this embodiment, the second difference Δ2 is set to be smaller than the first difference Δ1, thereby achieving highly accurate correction.

[0025] In the embodiment, the first electrical resistance value of the first resistance member 11 at the first temperature T1 may be different from the second electrical resistance value of the second resistance member 12 at the first temperature T1. For example, the second electrical resistance value is set to be lower than the first electrical resistance value. This makes it easier to obtain a small second difference Δ2.

[0026] In the embodiment, the second electrical resistance value of the second resistance member 12 at the first temperature T1 may be 0.3 to 0.95 times the first electrical resistance value of the first resistance member 11 at the first temperature T1.

[0027] The first resistance value of the first resistance member 11 at the first temperature T1 may be, for example, 6 kΩ or more and 12 kΩ or less, and the second resistance value of the second resistance member 12 at the first temperature T1 is, for example, 1.8 kΩ or more and 12 kΩ or less.

[0028] In the embodiment, the first temperature T1 may be, for example, not less than -10°C and not more than 80°C. As already explained, the second temperature T2 is higher than the first temperature T1. The absolute value of the difference between the second temperature T2 and the first temperature T1 may be, for example, not less than 30°C and not more than 300°C.

[0029] The ratio of the absolute value of the difference between the second difference Δ2 and the first difference Δ1 to the first difference Δ1 may be, for example, 0.5 or more. This ratio may be, for example, 1 or less. Highly accurate correction is possible.

[0030] For example, the control unit 70 may be configured to perform the following first operation. In the first operation, the control unit 70 supplies a first power P1 to the first conductive member 21. In the first operation, the control unit 70 is configured to detect a difference between a first detected value DV1 (see FIG. 2(b)) of the first electrical resistance of the first resistance member 11 in the first operation and a second detected value DV2 (see FIG. 3(b)) of the second electrical resistance of the second resistance member 12 in the first operation. The first detected value DV1 corresponds to a detection target around the first detection unit 11E. The first detected value DV1 is corrected by the second detected value DV2.

[0031] For example, the first detection value DV1 and the second detection value DV2 may be input to a differential circuit included in the control unit 70. The output of the differential circuit may be used as the detection result of the detection object.

[0032] 1, the first element 10A may include a first base region 41a, a first fixing portion 31S, and a first support portion 31C. The first fixing portion 31S is fixed to a portion of the first base region 41a. The first support portion 31C is supported by the first fixing portion 31S. The first support portion 31C supports the first detection portion 11E. A first gap g1 is provided between another portion of the first base region 41a and the first detection portion 11E.

[0033] In this example, the first element 10A further includes a first opposing fixing portion 31aS and a first opposing support portion 31aC. The first opposing fixing portion 31aS is fixed to another portion of the first base region 41a. The first opposing support portion 31aC is supported by the first opposing fixing portion 31aS. The first opposing support portion 31aC supports the first detection portion 11E. For example, the first detection portion 11E is provided between the first support portion 31C and the first opposing support portion 31aC.

[0034] As shown in Figures 2(a) and 2(b), the first element 10A may include a first cross fixing portion 31bS, a first cross supporting portion 31bC, a first cross opposing fixing portion 31cS, and a first cross opposing supporting portion 31cC. The first cross fixing portion 31bS is fixed to another portion of the first base region 41a. The first cross supporting portion 31bC is supported by the first cross fixing portion 31bS. The first cross supporting portion 31bC supports the first detecting portion 11E.

[0035] The first intersecting opposing fixed portion 31cS is fixed to another part of the first base region 41a. The first intersecting opposing support portion 31cC is supported by the first intersecting opposing fixed portion 31cS. The first intersecting opposing support portion 31cC supports the first detection portion 11E.

[0036] The direction from a part of the first base region 41a to the first fixed portion 31S is defined as the Z-axis direction (first direction). The direction from the first support portion 31C to the first opposing support portion 31aC intersects with the Z-axis direction. The direction from the first cross support portion 31bC to the first cross opposing support portion 31cC intersects with the Z-axis direction. The direction from the first cross support portion 31bC to the first cross opposing support portion 31cC intersects with the direction from the first support portion 31C to the first opposing support portion 31aC.

[0037] At least one of the first support portion 31C, the first opposing support portion 31aC, the first cross support portion 31bC, and the first cross opposing support portion 31cC may have a meander structure.

[0038] 1, the second element 10B may include a second base region 41b, a second fixing portion 32S, and a second support portion 32C. The second fixing portion 32S is fixed to a portion of the second base region 41b. The second support portion 32C is supported by the second fixing portion 32S. The second support portion 32C supports the second detection portion 12E. A second gap g2 is provided between another portion of the second base region 41b and the second detection portion 12E.

[0039] In this example, the second element 10B further includes a second opposing fixing portion 32aS and a second opposing support portion 32aC. The second opposing fixing portion 32aS is fixed to another portion of the second base region 41b. The second opposing support portion 32aC is supported by the second opposing fixing portion 32aS. The second opposing support portion 32aC supports the second detection portion 12E. For example, the second detection portion 12E is provided between the second support portion 32C and the second opposing support portion 32aC.

[0040] As shown in FIGS. 3(a) and 3(b), the second element 10B may include a second cross fixing portion 32bS, a second cross supporting portion 32bC, a second cross opposing fixing portion 32cS, and a second cross opposing supporting portion 32cC. The second cross fixing portion 32bS is fixed to another portion of the second base region 41b. The second cross supporting portion 32bC is supported by the second cross fixing portion 32bS. The second cross supporting portion 32bC supports the second detecting portion 12E.

[0041] The second intersecting opposing fixed portion 32cS is fixed to another part of the second base region 41b. The second intersecting opposing support portion 32cC is supported by the second intersecting opposing fixed portion 32cS. The second intersecting opposing support portion 32cC supports the second detection portion 12E.

[0042] The direction from the portion of the second base region 41b to the second fixed portion 32S may be along the Z-axis direction. The direction from the second support portion 32C to the second opposing support portion 32aC intersects with the direction from the portion of the second base region 41b to the second fixed portion 32S. The direction from the second cross support portion 32bC to the second cross opposing support portion 32cC intersects with the direction from the portion of the second base region 41b to the second fixed portion 32S. The direction from the second cross support portion 32bC to the second cross opposing support portion 32cC intersects with the direction from the second support portion 32C to the second opposing support portion 32aC.

[0043] At least one of the second support portion 32C, the second opposing support portion 32aC, the second cross support portion 32bC, and the second cross opposing support portion 32cC may have a meander structure.

[0044] 1, the first substrate region 41a is a part of the substrate 41. The second substrate region 41b may be another part of the substrate 41. The first substrate region 41a may be one substrate 41, and the second substrate region 41b may be another substrate.

[0045] In this example, the base 41 may include a substrate 41s and an insulating layer 41i. The insulating layer 41i is provided on the substrate 41s. The substrate 41s includes a semiconductor substrate or the like. The substrate 41s may include a part of the circuit included in the control unit 70.

[0046] 1, the first detection unit 11E may include a first insulating member 18A. The first insulating member 18A is provided around the first resistance member 11 and the first conductive member 21. The second detection unit 12E may include a second insulating member 18B. The second insulating member 18B is provided around the second resistance member 12. The second insulating member 18B may be provided around the second conductive member 22.

[0047] In the embodiment, the first resistance member 11 and the second resistance member 12 may satisfy at least one of the first condition, the second condition, and the third condition.

[0048] As shown in FIG. 1, under the first condition, the first length L1 of the first resistance member 11 is different from the second length L2 of the second resistance member 12.

[0049] As shown in FIGS. 2(b) and 3(b), under the second condition, the first width W1 of the first resistance member 11 is different from the second width W2 of the second resistance member 12.

[0050] As shown in FIG. 1, under the third condition, the first thickness t1 of the first resistance member 11 is different from the second thickness t2 of the second resistance member 12.

[0051] At least one of the first to third conditions makes it easy to obtain a small second difference Δ2.

[0052] For example, in the first condition, the first length L1 may be longer than the second length L2. For example, in the second condition, the first width W1 may be smaller than the second width W2. For example, in the third condition, the first thickness t1 is thinner than the second thickness t2. A small second difference Δ2 is easily obtained.

[0053] In the above first to third conditions, the material of the first resistance member 11 may be the same as the material of the second resistance member 12. Using the same material facilitates manufacturing. For example, at least one of the first resistance member 11 and the second resistance member 12 may contain TiN.

[0054] The first material of the first resistance member 11 may be different from the second material of the second resistance member 12. This makes it easier to obtain a small second difference Δ2.

[0055] In the embodiment, the first temperature coefficient of resistance of the first resistor 11 may be either positive or negative. The second temperature coefficient of resistance of the second resistor 12 may be either positive or negative. A small second difference Δ2 is easily obtained.

[0056] For example, the first resistance member 11 includes at least one selected from the group consisting of Ti, TiN, Pt, Au, and Al. The second resistance member 12 includes at least one selected from the group consisting of Ti, TiN, Pt, Au, and Al. In one example, the first resistance member 11 includes TiN, and the second resistance member 12 includes Ti.

[0057] In the sensor 110, the first resistive element 11 may be one of a plurality of resistive elements included in a bridge circuit. The second resistive element 12 may be another of a plurality of resistive elements included in the bridge circuit. As will be described later, the bridge circuit may be, for example, a quarter-bridge circuit. The bridge circuit may be, for example, a half-bridge circuit.

[0058] As shown in FIG. 2(b), the first detection unit 11E may include a first conductive layer 15a and a second conductive layer 15b. The first resistance member 11 is provided between the first conductive layer 15a and the second conductive layer 15b. As shown in FIG. 3(b), the second detection unit 12E may include a third conductive layer 15c and a fourth conductive layer 15d. The second resistance member 12 is provided between the third conductive layer 15c and the fourth conductive layer 15d.

[0059] (Second embodiment) FIG. 4 is a schematic cross-sectional view illustrating the sensor according to the second embodiment. 5A and 5B are schematic plan views illustrating a part of the sensor according to the second embodiment. 4, in the sensor 120 according to the embodiment, the sensor element 10E further includes a third element 10C in addition to the first element 10A and the second element 10B. Except for this, the configuration of the sensor 120 may be similar to the configuration of the sensor 110.

[0060] The third element 10C includes a third detection unit 13E. The third detection unit 13E includes a third resistance member 13. A third temperature T3 of the first resistance member 11 when the second power is supplied to the first conductive member 21 is higher than the first temperature T1. The third temperature T3 may be different from the second temperature T2.

[0061] As already explained, the rate of change of the first electrical resistance of the first resistance member 11 with respect to temperature at the first temperature T1 is the first rate of change. Meanwhile, the rate of change of the third electrical resistance of the third resistance member 13 with respect to temperature at the first temperature T1 is the third rate of change. The absolute value of the difference between the first rate of change and the third rate of change is the third difference Δ3.

[0062] The rate of change of the first electrical resistance of the first resistance member 11 with respect to temperature at the third temperature T3 is defined as a third temperature state rate of change. The absolute value of the difference between the third temperature state rate of change and the third rate of change is defined as a fourth difference Δ4. In this embodiment, the fourth difference Δ4 is ​​smaller than the third difference Δ3.

[0063] As a result, for example, the detected value of the first electrical resistance of the first resistance element 11 is corrected with high accuracy by the detected value of the third electrical resistance of the third resistance element 13. By this correction, the detection target can be detected with higher accuracy.

[0064] In the sensor 120, for example, the first electrical resistance value of the first resistive element 11 at the first temperature T1 is different from the second electrical resistance value of the second resistive element 12 at the first temperature T1. For example, the first electrical resistance value is different from the third electrical resistance value of the third resistive element 13 at the first temperature T1. For example, the second electrical resistance value may be different from the third electrical resistance value.

[0065] For example, the second electrical resistance value may be lower than the first electrical resistance value. For example, the third electrical resistance value may be lower than the first electrical resistance value.

[0066] In the sensor 120, at least one of correction using the second element 10B and correction using the third element 10C may be performed.

[0067] The sensor 120 may further include a controller 70 (see, for example, FIGS. 5(a) and 5(c)). The controller 70 is configured to perform at least one of a first operation and a second operation. The first operation may be the operation described with respect to the sensor 110.

[0068] In the first operation, the control unit 70 supplies a first power P1 to the first conductive member 21. In the first operation, the control unit 70 detects the difference between a first detected value DV1 (see FIG. 2(b)) of the first electrical resistance of the first resistance member 11 in the first operation and a second detected value DV2 (see FIG. 3(b)) of the second electrical resistance of the second resistance member 12 in the first operation. The first detected value DV1 corresponds to the detection target around the first detection unit 11E.

[0069] In the second operation, the control unit 70 supplies a second power to the first conductive member 21. In the second operation, the control unit 70 detects the difference between a first detected value DV1 of the first electrical resistance of the first resistance member 11 in the second operation and a third detected value DV3 (see FIG. 5(b)) of the third electrical resistance of the third resistance member 13 in the second operation. In the second operation, the first detected value DV1 also depends on the object to be detected.

[0070] The third detection unit 13E of the third element 10C may include a third conductive member 23. Fig. 5(a) is a plan view in a plane including the third conductive member 23. Fig. 5(b) is a plan view in a plane including the third resistance member 13.

[0071] 4, the third element 10C may include a third base region 41c, a third fixing portion 33S, and a third support portion 33C. The third fixing portion 33S is fixed to a portion of the third base region 41c. The third support portion 33C is supported by the third fixing portion 33S. The third support portion 33C supports the third detection portion 13E. A third gap g3 is provided between another portion of the third base region 41c and the third detection portion 13E.

[0072] In this example, the third element 10C further includes a third opposing fixing portion 33aS and a third opposing support portion 33aC. The third opposing fixing portion 33aS is fixed to another portion of the third base region 41c. The third opposing support portion 33aC is supported by the third opposing fixing portion 33aS. The third opposing support portion 33aC supports the third detection unit 13E. For example, the third detection unit 13E is provided between the third support portion 33C and the third opposing support portion 33aC.

[0073] As shown in Figures 5(a) and 5(b), the third element 10C may include a third cross fixing portion 33bS, a third cross supporting portion 33bC, a third cross opposing fixing portion 33cS, and a third cross opposing supporting portion 33cC. The third cross fixing portion 33bS is fixed to another portion of the third base region 41c. The third cross supporting portion 33bC is supported by the third cross fixing portion 33bS. The third cross supporting portion 33bC supports the third detecting portion 13E.

[0074] The third intersecting opposing fixing portion 33cS is fixed to another part of the third base region 41c. The third intersecting opposing supporting portion 33cC is supported by the third intersecting opposing fixing portion 33cS. The third intersecting opposing supporting portion 33cC supports the third detecting portion 13E.

[0075] The direction from the portion of the third base region 41c to the third fixed portion 33S may be along the Z-axis direction. The direction from the third support portion 33C to the third opposing support portion 33aC intersects with the direction from the portion of the third base region 41c to the third fixed portion 33S. The direction from the third cross support portion 33bC to the third cross opposing support portion 33cC intersects with the direction from the portion of the third base region 41c to the third fixed portion 33S. The direction from the third cross support portion 33bC to the third cross opposing support portion 33cC intersects with the direction from the third support portion 33C to the third opposing support portion 33aC.

[0076] At least one of the third support portion 33C, the third opposing support portion 33aC, the third cross support portion 33bC, and the third cross opposing support portion 33cC may have a meander structure.

[0077] 4, the third detection unit 13E may include a third insulating member 18C. The third insulating member 18C is provided around the third resistive member 13 and the third conductive member .

[0078] In the embodiment, the first resistance member 11 and the third resistance member 13 may satisfy at least one of the fourth condition, the fifth condition, and the sixth condition.

[0079] In the fourth condition, the first length L1 of the first resistance member 11 is different from the third length L3 of the third resistance member 13 (see FIG. 4).

[0080] In the fifth condition, the first width W1 of the first resistance member 11 is different from the third width W3 of the third resistance member 13 (see FIG. 5(b)).

[0081] In the sixth condition, the first thickness t1 of the first resistance member 11 is different from the third thickness t3 of the third resistance member 13 (see FIG. 4).

[0082] At least one of the fourth to sixth conditions makes it easy to obtain a small fourth difference Δ4.

[0083] For example, in the fourth condition, the first length L1 may be longer than the third length L3. For example, in the fifth condition, the first width W1 may be smaller than the third width W3. For example, in the sixth condition, the first thickness t1 may be thinner than the third thickness t3. A small fourth difference Δ4 is ​​easily obtained.

[0084] In the above fourth to sixth conditions, the material of the first resistance member 11 may be the same as the material of the third resistance member 13. Using the same material facilitates manufacturing. For example, at least one of the first resistance member 11 and the third resistance member 13 may contain TiN.

[0085] The first material of the first resistance member 11 may be different from the third material of the third resistance member 13. This makes it easier to obtain a small fourth difference Δ4.

[0086] 5(b), the third detection unit 13E may include a fifth conductive layer 15e and a sixth conductive layer 15f. The third resistance member 13 is provided between the fifth conductive layer 15e and the sixth conductive layer 15f.

[0087] (Third embodiment) FIG. 6 is a schematic cross-sectional view illustrating the sensor according to the third embodiment. 6, the sensor 130 according to the embodiment includes a plurality of sensor elements 10E. The sensor 130 may further include a control unit 70. The plurality of sensor elements 10E may include, for example, an element 10Ea, an element 10Eb, and an element 10Ec. Each of the plurality of sensor elements 10E may have, for example, the same configuration as the sensor element 10E in the sensor 110. For example, the second difference Δ2 is smaller than the first difference Δ1.

[0088] In the sensor 130, the control unit 70 may be configured to perform at least one of a first detection operation and a second detection operation.

[0089] In the first sensing operation, the control unit 70 supplies a first power P1 to the first conductive member 21 included in one of the plurality of sensor elements 10E (e.g., element 10Ea). The control unit 70 detects a first value corresponding to the difference between the electrical resistance of the first resistive member 11 included in the one of the plurality of sensor elements and the electrical resistance of the second resistive member 12 included in the one of the plurality of sensor elements 10E. For example, the operation described with respect to the sensor 110 is performed.

[0090] In the second detecting operation, the control unit 70 supplies a first power P1 in the second detecting operation to the first conductive member 21 included in another one of the plurality of sensor elements 10E. The control unit 70 detects a second value corresponding to the difference between the electrical resistance of the first resistive member 11 included in the other one of the plurality of sensor elements 10E and the electrical resistance of the second resistive member 12 included in the other one of the plurality of sensor elements 10E.

[0091] For example, the first power P1 in the first detection operation may be different from the first power P1 in the second detection operation. For example, by processing the first value and the second value, the concentrations of multiple types of target substances contained in the target gas may be detected. For example, there may be simultaneous equations that represent the relationships between the concentrations of the multiple types of target substances and the detection values. The processing of the first value and the second value may include calculations to solve the simultaneous equations.

[0092] In an embodiment, the control unit 70 may be configured to output a value obtained by calculation based on the first value and the second value. The value obtained by calculation may include values ​​corresponding to the respective concentrations of multiple types of detection target substances contained in the detection target.

[0093] In the embodiment, the electrical resistance of the first conductive member 21 included in one of the plurality of sensor elements 10E (e.g., element 10Ea) may be different from the electrical resistance of the first conductive member 21 included in another of the plurality of sensor elements 10E (e.g., element 10Eb). The voltage applied to the first conductive member 21 included in one of the plurality of sensor elements 10E (e.g., element 10Ea) may be the same as the voltage applied to the first conductive member 21 included in another of the plurality of sensor elements 10E (e.g., element 10Eb). The power supplied to the first conductive member 21 included in one of the plurality of sensor elements 10E is different from the power supplied to the first conductive member 21 included in another of the plurality of sensor elements 10E.

[0094] The number of the plurality of sensor elements 10E may be three. In this case, the control unit 70 may be configured to perform at least one of the first detection operation, the second detection operation, and the third detection operation. The number of the plurality of sensor elements 10E may be four or more. The number of the plurality of sensor elements 10E may be set according to the number of types of the plurality of detection substances contained in the detection target.

[0095] In the embodiment, the electrical resistance of the first conductive member 21 included in yet another one of the plurality of sensor elements 10E (e.g., element 10Ec) may be different from the electrical resistance of the first conductive member 21 included in one of the plurality of sensor elements 10E (e.g., element 10Ea). The electrical resistance of the first conductive member 21 included in yet another one of the plurality of sensor elements 10E (e.g., element 10Ec) may be different from the electrical resistance of the first conductive member 21 included in another one of the plurality of sensor elements 10E (e.g., element 10Eb).

[0096] The voltage applied to the first conductive member 21 included in one of the plurality of sensor elements 10E (e.g., element 10Ea) may be the same as the voltage applied to the first conductive member 21 included in another of the plurality of sensor elements 10E (e.g., element 10Eb). The voltage applied to the first conductive member 21 included in one of the plurality of sensor elements 10E (e.g., element 10Ea) may be the same as the voltage applied to the first conductive member 21 included in yet another of the plurality of sensor elements 10E (e.g., element 10Ec). The same voltage may be applied to these three elements.

[0097] 7A and 7B are schematic views illustrating the sensor according to the embodiment. 7A, the sensor 140 according to the embodiment includes a first resistive element 11, a second resistive element 12, a first resistive element 17a, and a second resistive element 17b. The first resistive element 11 and the second resistive element 12 may have the configurations described with respect to the sensor 110. For example, the resistance value of the first resistive element 17a and the resistance value of the second resistive element 17b may be substantially the same as the resistance value of the second resistive element 12.

[0098] The second resistance element 12 is electrically connected in series with the first resistance element 11. The second resistance element 17b is electrically connected in series with the first resistance element 17a. A circuit including the first resistance element 11 and the second resistance element 12 is electrically connected in parallel with a circuit including the first resistance element 17a and the second resistance element 17b.

[0099] A voltage V1 is applied to the first conductive member 21. For example, an end of the first resistive member 11 and an end of the first resistive element 17a are set to ground potential. For example, a detection voltage Vs1 is applied to an end of the second resistive member 12 and an end of the second resistive element 17b. A first potential at a first connection point CP1 between the first resistive member 11 and the second resistive member 12 and a second potential at a second connection point CP2 between the first resistive element 17a and the second resistive element 17b are input to a differential circuit 75. An output of the differential circuit 75 corresponds to the result of the detection target. The differential circuit 75 may be included in the control unit 70.

[0100] 7(b), the sensor 141 according to the embodiment includes two first resistive elements 11, two second resistive elements 12, and two first conductive elements 21. Each of the two first resistive elements 11 and each of the two second resistive elements 12 may have the configuration described for the sensor 110.

[0101] A voltage V1 is applied to the two first conductive members 21. In this example, one of the two first resistance members 11 is electrically connected in series with one of the two second resistance members 12. Another of the two first resistance members 11 is electrically connected in series with another of the two second resistance members 12. A first circuit including one of the two first resistance members 11 and one of the two second resistance members 12 is electrically connected in parallel with a second circuit including the other of the two first resistance members 11 and the other of the two second resistance members 12.

[0102] One end of each of the two first resistors 11 and another end of each of the two second resistors 12 are set to ground potential. A detection voltage Vs1 is applied to the other end of each of the two first resistors 11 and one end of each of the two second resistors 12. A first potential at a first connection point CP1 of one of the two first resistors 11 and one of the two second resistors 12, and a second potential at a second connection point CP2 of the other of the two second resistors 12 and the other of the two first resistors 11, are input to a differential circuit 75. An output from the differential circuit 75 corresponds to the result of the detection target.

[0103] In the embodiment, the first resistive element 11 may be one of a plurality of resistive elements included in a bridge circuit, and the second resistive element 12 may be another of a plurality of resistive elements included in the bridge circuit.

[0104] The embodiments may include the following technical solutions. (Technical proposal 1) a first element including a first detection unit; a second element including a second detection unit; a sensor element including the first detection unit includes a first resistive member and a first conductive member; the second detection unit includes a second resistance member, a second temperature of the first resistance member when a first power is supplied to the first conductive member is higher than a first temperature; The second difference is smaller than the first difference, the first difference is an absolute value of a difference between a first rate of change of a first electrical resistance of the first resistance member with respect to temperature at the first temperature and a second rate of change of a second electrical resistance of the second resistance member with respect to temperature at the first temperature; The sensor, wherein the second difference is an absolute value of the difference between a second temperature state rate of change of the first electrical resistance of the first resistance element with respect to temperature at the second temperature and the second rate of change.

[0105] (Technical proposal 2) The sensor described in Technical Solution 1, wherein the first electrical resistance value of the first resistance element at the first temperature is different from the second electrical resistance value of the second resistance element at the first temperature.

[0106] (Technical proposal 3) The sensor according to Technical Solution 2, wherein the second electrical resistance value is lower than the first electrical resistance value.

[0107] (Technical proposal 4) The sensor described in Technical Solution 2, wherein the second electrical resistance value is 0.3 times or more and 0.95 times or less than the first electrical resistance value.

[0108] (Technical proposal 5) the first electrical resistance value is equal to or greater than 6 kΩ and equal to or less than 12 kΩ, The sensor according to any one of Technical Schemes 2 to 4, wherein the second electrical resistance value is 1.8 kΩ or more and 12 kΩ or less.

[0109] (Technical proposal 6) the first temperature is equal to or higher than -10°C and equal to or lower than 80°C, The sensor according to any one of Technical Schemes 1 to 5, wherein the absolute value of the difference between the second temperature and the first temperature is 30°C or more and 300°C or less.

[0110] (Technical proposal 7) The sensor according to any one of Technical Schemes 1 to 6, wherein the ratio of the absolute value of the difference between the second difference and the first difference to the first difference is 0.5 or more.

[0111] (Technical proposal 8) The sensor according to any one of Technical Solutions 1 to 7, wherein the second detection unit further includes a second conductive member.

[0112] (Technical proposal 9) Further comprising a control unit, the control unit is configured to perform a first operation; In the first operation, the control unit supplies the first power to the first conductive member; in the first operation, the control unit is configured to detect a difference between a first detected value of the first electrical resistance of the first resistance member in the first operation and a second detected value of the second electrical resistance of the second resistance member in the first operation; The sensor according to any one of Technical Schemes 1 to 8, wherein the first detection value corresponds to a detection target around the first detection unit.

[0113] (Technical proposal 10) The sensor according to any one of Technical Schemes 1 to 9, wherein at least one of the first resistance member and the second resistance member contains TiN.

[0114] (Technical proposal 11) the first resistance member and the second resistance member satisfy at least one of a first condition, a second condition, and a third condition; In the first condition, a first length of the first resistance member is different from a second length of the second resistance member, In the second condition, a first width of the first resistance member is different from a second width of the second resistance member, The sensor according to any one of Technical Solutions 1 to 10, wherein in the third condition, a first thickness of the first resistance member is different from a second thickness of the second resistance member.

[0115] (Technical proposal 12) In the first condition, the first length is longer than the second length, In the second condition, the first width is smaller than the second width, The sensor described in Technical Proposal 11, wherein, under the third condition, the first thickness is thinner than the second thickness.

[0116] (Technical proposal 13) the sensor element further includes a third element including a third detection unit; the third detection unit includes a third resistance member, a third temperature of the first resistance member when a second power is supplied to the first conductive member is higher than the first temperature; The fourth difference is smaller than the third difference, the third difference is an absolute value of a difference between the first rate of change and a third rate of change of the third electrical resistance of the third resistance element with respect to temperature at the first temperature, The sensor described in Technical Solution 1, wherein the fourth difference is the absolute value of the difference between the third temperature state change rate of the first electrical resistance of the first resistance element at the third temperature and the third change rate.

[0117] (Technical proposal 14) a first electrical resistance value of the first resistance member at the first temperature is different from a second electrical resistance value of the second resistance member at the first temperature; the first electrical resistance value is different from the third electrical resistance value of the third resistance member at the first temperature; The sensor according to Technical Solution 13, wherein the second electrical resistance value is different from the third electrical resistance value.

[0118] (Technical proposal 15) Further comprising a control unit, the control unit is configured to perform at least one of a first operation and a second operation; In the first operation, the control unit supplies the first power to the first conductive member; In the first operation, the control unit detects a difference between a first detected value of the first electrical resistance of the first resistance member in the first operation and a second detected value of the second electrical resistance of the second resistance member in the first operation; The first detection value is determined according to a detection target around the first detection unit, In the second operation, the control unit supplies the second power to the first conductive member; The sensor described in Technical Proposal 13 or 14, wherein in the second operation, the control unit detects the difference between the first detection value of the first electrical resistance of the first resistance element in the second operation and the third detection value of the third electrical resistance of the third resistance element in the second operation.

[0119] (Technical proposal 16) Further comprising a control unit, A plurality of the sensor elements are provided, the control unit is configured to perform a first detection operation and a second detection operation; In the first detecting operation, the control unit supplies the first power in the first detecting operation to the first conductive member included in one of the plurality of sensor elements, and detects a first value corresponding to a difference between an electrical resistance of the first resistive member included in the one of the plurality of sensor elements and an electrical resistance of the second resistive member included in the one of the plurality of sensor elements; In the second detection operation, the control unit supplies the first power in the second detection operation to the first conductive member included in another one of the plurality of sensor elements, and detects a second value corresponding to the difference between the electrical resistance of the first resistive member included in the other one of the plurality of sensor elements and the electrical resistance of the second resistive member included in the other one of the plurality of sensor elements.

[0120] (Technical proposal 17) The sensor described in Technical Solution 16, wherein the electrical resistance of the first conductive member included in the one of the plurality of sensor elements is different from the electrical resistance of the first conductive member included in the other of the plurality of sensor elements.

[0121] (Technical proposal 18) The sensor according to Technical Solution 16 or 17, wherein the control unit is configured to output a value obtained by calculation based on the first value and the second value.

[0122] (Technical proposal 19) The sensor described in Technical Proposal 18, wherein the value obtained by the calculation includes values ​​corresponding to the respective concentrations of multiple types of detection target substances contained in the detection target.

[0123] (Technical proposal 20) The first element is a first substrate region; a first fixing portion fixed to a part of the first base region; a first support portion supported by the first fixed portion and supporting the first detection portion; Including, a first gap is provided between another part of the first substrate region and the first detection unit; The second element is a second substrate region; a second fixing portion fixed to a part of the second base region; a second support portion supported by the second fixed portion and supporting the second detection portion; Including, The sensor according to any one of Technical Schemes 1 to 19, wherein a second gap is provided between another part of the second substrate region and the second detection portion.

[0124] According to the embodiment, a sensor capable of improving characteristics can be provided.

[0125] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the elements included in the sensor, such as the substrate, detection unit, and control unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0126] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0127] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor described above as an embodiment of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0128] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0129] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0130] 10A-10C: 1st to 3rd elements, 10E: Sensen element, 10Ea-10Ec: element, 11-13: 1st to 3rd resistance members, 11E-13E: 1st to 3rd detection parts, 15c-15f: 1st to 6th conductive layers, 17a, 17b: 1st and 2nd resistance elements, 18A-18C: 1st to 3rd insulation members, 21-23: 1st to 3rd conductive members, 31C-33C: 1st to 3rd support members, 31S-33S: 1st to 3rd fixing members, 31aC-33aC: 1st to 3rd opposing support members, 31aS-33aS: 1st to 3rd opposing fixing members, 31bC-33bC: 1st-3rd cross-supporting portions, 31bS-33bS: 1st-3rd cross-fixing portions, 31cC-33cC: 1st-3rd cross-opposite supporting portions, 31cS-33cS: 1st-3rd cross-opposite fixing portions, 41: Base, 41a-41c: 1st-3rd base regions, 41i: Insulation layer, 41s: Substrate, 70: Control portion, 75: Differential circuit, 110, 120, 130, 140, 141: Sensing, DV1-DV3: 1st-3rd detection values, L1-L3: 1st-3rd lengths, P1: 1st power, W1-W3: 1st-3rd widths, g1~g3: 1st to 3rd gap, V1: voltage, t1~t3: 1st to 3rd thickness

Claims

1. a first element including a first detection unit; a second element including a second detection unit; a sensor element including the first detection unit includes a first resistive member and a first conductive member, the second detection unit includes a second resistance member, a second temperature of the first resistance member when a first power is supplied to the first conductive member is higher than a first temperature; The second difference is less than the first difference, the first difference is an absolute value of a difference between a first rate of change of a first electrical resistance of the first resistance element with respect to temperature at the first temperature and a second rate of change of a second electrical resistance of the second resistance element with respect to temperature at the first temperature; The second difference is an absolute value of the difference between a second temperature state rate of change of the first electrical resistance of the first resistive element with respect to temperature at the second temperature and the second rate of change.

2. The sensor of claim 1 , wherein a first electrical resistance value of the first resistive element at the first temperature is different from a second electrical resistance value of the second resistive element at the first temperature.

3. The sensor of claim 2 , wherein the second electrical resistance value is lower than the first electrical resistance value.

4. Further comprising a control unit, the control unit is configured to perform a first operation; In the first operation, the control unit supplies the first power to the first conductive member; in the first operation, the control unit is configured to detect a difference between a first detected value of the first electrical resistance of the first resistance member in the first operation and a second detected value of the second electrical resistance of the second resistance member in the first operation; 4. The sensor according to claim 1, wherein the first detection value corresponds to a detection target around the first detection unit.

5. the first resistance member and the second resistance member satisfy at least one of a first condition, a second condition, and a third condition; In the first condition, a first length of the first resistance member is different from a second length of the second resistance member, In the second condition, a first width of the first resistance member is different from a second width of the second resistance member, The sensor of claim 1 , wherein in the third condition, a first thickness of the first resistive element is different from a second thickness of the second resistive element.

6. the sensor element further includes a third element including a third detection portion; the third detection unit includes a third resistance member, a third temperature of the first resistance member when a second power is supplied to the first conductive member is higher than the first temperature; The fourth difference is smaller than the third difference, the third difference is an absolute value of a difference between the first rate of change and a third rate of change of the third electrical resistance of the third resistance element with respect to temperature at the first temperature, 2. The sensor according to claim 1, wherein the fourth difference is an absolute value of a difference between a third temperature state rate of change of the first electrical resistance of the first resistance element with respect to temperature at the third temperature and the third rate of change.

7. a first electrical resistance value of the first resistance member at the first temperature is different from a second electrical resistance value of the second resistance member at the first temperature; the first electrical resistance value is different from the third electrical resistance value of the third resistance element at the first temperature; The sensor of claim 6 , wherein the second electrical resistance value is different from the third electrical resistance value.

8. Further comprising a control unit, the control unit is configured to perform at least one of a first operation and a second operation; In the first operation, the control unit supplies the first power to the first conductive member; In the first operation, the control unit detects a difference between a first detected value of the first electrical resistance of the first resistance member in the first operation and a second detected value of the second electrical resistance of the second resistance member in the first operation; The first detection value is determined according to a detection target around the first detection unit, In the second operation, the control unit supplies the second power to the first conductive member; 8. The sensor according to claim 6, wherein in the second operation, the control unit detects a difference between the first detected value of the first electrical resistance of the first resistance element in the second operation and the third detected value of the third electrical resistance of the third resistance element in the second operation.

9. Further comprising a control unit, A plurality of the sensor elements are provided, the control unit is configured to perform a first detection operation and a second detection operation; In the first detecting operation, the control unit supplies the first power in the first detecting operation to the first conductive member included in one of the plurality of sensor elements, and detects a first value corresponding to a difference between an electrical resistance of the first resistive member included in the one of the plurality of sensor elements and an electrical resistance of the second resistive member included in the one of the plurality of sensor elements; 2. The sensor according to claim 1, wherein in the second detection operation, the control unit supplies the first power in the second detection operation to the first conductive member included in another one of the plurality of sensor elements, and detects a second value corresponding to a difference between the electrical resistance of the first resistive member included in the other one of the plurality of sensor elements and the electrical resistance of the second resistive member included in the other one of the plurality of sensor elements.

10. The first element is a first substrate region; a first fixing portion fixed to a portion of the first base region; a first support portion supported by the first fixed portion and supporting the first detection portion; Including, a first gap is provided between another part of the first substrate region and the first detection unit; The second element is a second substrate region; a second fixing portion fixed to a part of the second base region; a second support portion supported by the second fixed portion and supporting the second detection portion; Including, The sensor according to claim 1 , wherein a second gap is provided between another part of the second substrate region and the second detection portion.

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