Luminaire, illumination optical system, exposure apparatus, and production method of article

Abstract

To provide a technique advantageous for illuminating a face to be illuminated.SOLUTION: A luminaire for illuminating a face to be illuminated includes: a first light source part arranged with a plurality of solid light sources on a flat face; a second light source part different from the first light source part; an optical element for complexing light from the first light source part and light from the second light source part; a homogenizer element for homogenizing light from the optical element for illuminating the face to be illuminated; a first optical system for making the second light source part is to the optical element what an image is to a pupil; and a second optical system for making the plurality of solid light sources is to an incident face of the homogenizer element what an image is to a pupil.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to an illumination device, an illumination optical system, an exposure apparatus, and a method for manufacturing an article. [Background technology]

[0002] Exposure apparatuses that expose substrates (glass plates, wafers, etc.) are used in the manufacture of devices (semiconductor devices, magnetic storage media, liquid crystal display elements, etc.), color filters, hard disks, etc. Exposure apparatuses illuminate an original (reticle or mask) on which a pattern is formed with light from a light source, and project the light from the original onto the substrate via a projection optical system, thereby transferring the pattern from the original onto the substrate. In this case, to obtain good patterns with high productivity, it is necessary to increase the brightness (emission brightness) of the light from the light source and to uniformly illuminate the original with the light from the light source.

[0003] Ultra-high pressure mercury lamps have traditionally been used as light sources in exposure equipment. However, ultra-high pressure mercury lamps have issues such as a short lifespan and high energy consumption. Meanwhile, with recent advances in solid-state light source technology, including high-brightness LEDs and LDs, the use of solid-state light sources as light sources in exposure equipment has been considered. However, solid-state light sources such as LEDs have lower light emission brightness than ultra-high pressure mercury lamps. Therefore, a technology has been proposed in which multiple LED elements are arranged in an array to form a light source unit.

[0004] Furthermore, in order to expose a substrate and obtain a good pattern shape, it is particularly important to uniformly illuminate the original with light from the light source. In exposure devices, a lens array (fly's eye lens) has traditionally been used as a homogenizer element to uniformly illuminate the original.

[0005] In this situation, Patent Documents 1 and 2 disclose a technique in which a plurality of LED elements are used to obtain high illumination brightness, and light from the plurality of LED elements is made incident on a homogenizer element. [Prior art documents] [Patent documents]

[0006] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-002212 [Patent Document 2] Patent No. 6529809 Summary of the Invention [Problem to be solved by the invention]

[0007] However, when multiple LED elements are lined up, the light-emitting points (light-emitting locations) of the LED elements become discrete, and they do not function as a surface light source. If the homogenizer element is illuminated with a discrete illuminance distribution, the effect of the homogenizer element in providing uniform illuminance is reduced.

[0008] In Patent Document 1, an optical rod is placed between the LED light-emitting surface and the homogenizer element, and the illuminance distribution on the LED light-emitting surface is essentially blurred to illuminate the homogenizer element, thereby suppressing the reduction in the illuminance uniformity effect caused by the homogenizer element. However, in Patent Document 1, in order to form a distribution close to that of a surface light source, the optical rod needs to be long, which results in an increase in the size of the illumination optical system.

[0009] Patent Document 2 discloses a configuration in which another homogenizer element (lens array) and a collimator lens are placed between the LED light-emitting surface and the homogenizer element. With this configuration, the light-emitting surface of each LED is superimposed on the incident surface of the lens array, so a surface light source can be formed, but the need for another homogenizer element (lens array unit) leads to a complex configuration and increased costs.

[0010] The present invention has been made in view of the above problems of the conventional technology, and has an exemplary object to provide a technology that is advantageous for illuminating a surface to be illuminated. [Means for solving the problem]

[0011] In order to achieve the above-mentioned object, an illumination device according to one aspect of the present invention is an illumination device that illuminates an illuminated surface, and is characterized by having: a first light source unit in which a plurality of solid-state light sources are arranged on a plane; a second light source unit different from the first light source unit; an optical element that combines light from the first light source unit and light from the second light source unit; a homogenizer element that illuminates the illuminated surface and homogenizes light from the optical element; a first optical system that places the second light source unit and the optical element in an image-pupil relationship; and a second optical system that places the plurality of solid-state light sources and the incident surface of the homogenizer element in an image-pupil relationship.

[0012] Further objects and other aspects of the present invention will become apparent from the following description of the embodiments with reference to the accompanying drawings. [Effects of the Invention]

[0013] According to the present invention, for example, it is possible to provide a technique that is advantageous for illuminating a surface to be illuminated. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a schematic diagram showing the configuration of an exposure apparatus according to one aspect of the present invention. [Figure 2] 10 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element and the illuminance distribution on the surface on which the field stop is arranged. FIG. [Figure 3] FIG. 2 is a diagram illustrating a configuration of a light source unit. [Figure 4] 10 is a diagram showing the illuminance distribution in the light source unit illuminated in a substantially conjugate relationship with the homogenizer element. FIG. [Figure 5] 10 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element and the illuminance distribution on the surface on which the field stop is arranged. FIG. [Figure 6] FIG. 2 is a diagram showing part of the configuration of an illumination device in the exposure apparatus as the first embodiment. [Figure 7] FIG. 4 is a diagram illustrating a light distribution of a light source unit. [Figure 8]FIG. 2 is a diagram showing the illuminance distribution on the incident surface of the homogenizer element. [Figure 9] 10 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element and the illuminance distribution on the surface on which the field stop is arranged. FIG. [Figure 10] FIG. 10 is a schematic diagram showing a part of the configuration of an exposure apparatus according to a second embodiment. [Figure 11] FIG. 2 is a diagram illustrating a configuration of an optical element. [Figure 12] 10 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element and the illuminance distribution on the surface on which the field stop is arranged. FIG. [Figure 13] FIG. 10 is a schematic diagram showing a part of the configuration of an exposure apparatus according to a third embodiment. [Figure 14] FIG. 2 is a diagram illustrating a configuration of an optical element. [Figure 15] 10 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element and the illuminance distribution on the surface on which the field stop is arranged. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. Note that the following embodiments do not limit the invention according to the claims. Although multiple features are described in the embodiments, not all of these multiple features are necessarily essential to the invention, and multiple features may be combined arbitrarily. Furthermore, in the accompanying drawings, the same reference numerals are used to designate the same or similar components, and redundant explanations will be omitted.

[0016] 1 is a schematic diagram showing the configuration of an exposure apparatus 100 according to one aspect of the present invention. The exposure apparatus 100 is a lithography apparatus used in, for example, a lithography process, which is a manufacturing process for semiconductor devices, etc., to form a pattern on a substrate. The exposure apparatus 100 exposes a substrate 109 via an original 107 (reticle or mask) and transfers the pattern of the original 107 onto the substrate 109.

[0017] As shown in FIG. 1, the exposure apparatus 100 includes a light source unit 101, a relay optical system 102, a homogenizer element 103, a condenser lens 104, a field stop 105, a relay lens 106, a projection optical system 108, and a substrate stage 111.

[0018] In this embodiment, the light source unit 101, the relay optical system 102, the homogenizer element 103, the condenser lens 104, the field stop 105, and the relay lens 106 constitute an illumination device that illuminates an illuminated surface. Furthermore, the relay optical system 102, the homogenizer element 103, the condenser lens 104, the field stop 105, and the relay lens 106 constitute an illumination optical system that illuminates an illuminated surface using the light source unit 101. Note that in this embodiment, the illuminated surface is typically a surface on which the original 107 is placed, but also includes a surface conjugate to the surface on which the original 107 is placed (a conjugate surface of the illuminated surface).

[0019] In this specification and the accompanying drawings, directions are indicated in an XYZ coordinate system, with the direction parallel to the surface on which the substrate is placed being the XY plane. The directions parallel to the X-axis, Y-axis, and Z-axis in the XYZ coordinate system are the X-direction, Y-direction, and Z-direction, respectively, and rotation around the X-axis, Y-axis, and Z-axis are respectively designated as θX, θY, and θZ.

[0020] The light source unit 101 is a unit in which multiple LEDs are arranged in an array. However, the light source unit 101 may be a unit in which multiple solid-state light sources are arranged on a plane; for example, the LEDs can be replaced with LDs. Thus, the solid-state light source includes at least one of an LED and an LD. Light from the light source unit 101 is guided to a relay optical system 102. The light that passes through (transmits) the relay optical system 102 passes through (transmits) a homogenizer element 103 and is irradiated onto a field stop 105 via a condenser lens 104. The light shaped into a desired illumination area (shape) by the field stop 105 illuminates an original 107 via a relay lens 106.

[0021] The light that has passed through the original 107 is irradiated onto the substrate 109 via a projection optical system 108 that projects the pattern of the original 107 onto the substrate 109, thereby exposing the substrate 109. The substrate 109 is held by a substrate stage 111 that positions the substrate 109 via a substrate chuck 110.

[0022] Here, the effect of homogenizer element 103 will be described. Fig. 2 is a diagram showing the relationship between the illuminance distribution on the incident surface of homogenizer element 103 and the illuminance distribution on the surface on which field stop 105 is arranged. In Fig. 2, homogenizer element 103 is a wavefront division type homogenizer element that is divided into three lenses 21, 22, and 23 as multiple optical elements. In other words, homogenizer element 103 is composed of three lenses 21, 22, and 23. Homogenizer element 103 superimposes the light from each of lenses 21, 22, and 23 on the surface on which field stop 105 is arranged.

[0023] 2, the illuminance distribution at the incident surface of homogenizer element 103, specifically, the incident surface of lens 21, is designated as 21a, the illuminance distribution at the incident surface of lens 22 is designated as 22a, and the illuminance distribution at the incident surface of lens 23 is designated as 23c. Here, the illuminance distributions 21a, 22a, and 23a at the incident surfaces of lenses 21, 22, and 23, respectively, are assumed to be different from one another.

[0024] Light incident on the incident surface of homogenizer element 103, i.e., lenses 21, 22, and 23, passes through condenser lens 104 and is superimposed on field stop 105, illuminating field stop 105. Illuminance distribution 21a on the incident surface of lens 21 becomes illuminance distribution 21b at field stop 105. Similarly, illuminance distribution 22a on the incident surface of lens 22 becomes illuminance distribution 22b at field stop 105, and illuminance distribution 23a on the incident surface of lens 23 becomes illuminance distribution 23b at field stop 105.

[0025] 2, illuminance distributions 21a, 22a, and 23a on the incident surface of homogenizer element 103 are superimposed as illuminance distributions 21b, 22b, and 23b on field stop 105. Therefore, even if there is non-uniformity in the illuminance distribution on the incident surface of homogenizer element 103, by using homogenizer element 103 and condenser lens 104, it is possible to obtain a uniform illuminance distribution on field stop 105 (the surface on which field stop 105 is arranged).

[0026] FIG. 3 is a diagram showing the configuration of the light source unit 101. The light source unit 101 is configured by arranging LED chips 31 (LED elements) in an array, and in FIG. 3, the LED chips 31 are arranged in a 5×5 pattern. However, the arrangement and number of LED chips 31 in the light source unit 101 are not limited. In FIG. 3, light-emitting locations in the LED chips 31 are shown as light-emitting points 32. Because the light-emitting points 32 in each LED chip 31 are small compared to the LED chip 31, the light-emitting points 32 are discrete throughout the light source unit 101.

[0027] 4 is a diagram showing a state in which the illuminance distribution (light-emitting point 32) in the light source unit 101 is illuminated in a substantially conjugate relationship with the homogenizer element 103. In FIG. 4, the homogenizer element 103 is composed of a plurality of lenses 41 arranged in an array. Here, to make it easier to understand the effect of the homogenizer element 103, the arrangement of the lenses 41 in the homogenizer element 103 is the same as the arrangement (5 × 5) of the LED chips 31 in the light source unit 101. Referring to FIG. 4, the light-emitting point 32 in the LED chip 31 illuminates the center 42 of each lens 41 in the homogenizer element 103.

[0028] FIG. 5 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element 103 and the illuminance distribution on the surface on which the field stop 105 is disposed. In FIG. 5, the illuminance distributions on the incident surface of each lens 41 of the homogenizer element 103 are designated as 42a, 42b, 42c, 42d, and 42e. The illuminance distributions 42a to 42e on the incident surface of each lens 41 are superimposed on the field stop 105 (the surface on which the field stop 105 is disposed) by using the homogenizer element 103 and the condenser lens 104. Specifically, the illuminance distributions 42a to 42e on the incident surface of each lens 41 are irradiated onto the center of the field stop 105, superimposed as illuminance distributions 43a, 43b, 43c, 43d, and 43e. Therefore, variations occur in the illuminance distribution across the entire field stop 105.

[0029] First Embodiment 6 is a diagram showing part of the configuration of an illumination device in exposure apparatus 100 as the first embodiment. In this embodiment, as shown in FIG. 6, the illumination device converts the angular distribution of light from light source unit 101 into an illuminance distribution via relay optical system 102, and illuminates the incident surface of homogenizer element 103.

[0030] Fig. 7 is a diagram showing the light distribution of the light source unit 101 configured by arranging LED chips 31. As shown in Fig. 7, the light emitted from an LED generally has the highest light intensity in the vertical direction (0°), and tends to decrease as the angle increases.

[0031] FIG. 8 is a diagram showing an illuminance distribution 81 on the incident surface of the homogenizer element 103. Referring to FIG. 8, in this embodiment, the light source unit 101 (specifically, the light-emitting points 32 of the multiple LED chips 31) and the incident surface of the homogenizer element 103 are illuminated using a relay optical system 102 in an image-pupil relationship. In other words, the relay optical system 102 functions as an optical system that establishes an image-pupil relationship between the light source unit 101 and the incident surface of the homogenizer element 103. As a result, the angular distribution of light from the light source unit 101 is illuminated on the incident surface of the homogenizer element 103, and the illuminance distribution 81 is highest at the center of the homogenizer element 103 and gradually decreases from the center to the periphery. Therefore, in this embodiment, the illuminance distribution 81 on the incident surface of the homogenizer element 103 varies across the entire incident surface, as shown in FIG. 8, but gradually changes at each lens 41, and does not vary locally, as in the illuminance distribution shown in FIG. 4.

[0032] 9 is a diagram showing the relationship between the illuminance distribution on the incident surface of homogenizer element 103 and the illuminance distribution on the surface on which field stop 105 is arranged. Referring to FIG. 9, illuminance distribution 81 on the incident surface of each lens 41 of homogenizer element 103 is superimposed on field stop 105 (the surface on which field stop 105 is arranged) by using homogenizer element 103 and condenser lens 104. Although there are variations in illuminance distribution 81 across the entire incident surface of homogenizer element 103, the variations in illuminance distribution 81 at each lens 41 are gradual. Therefore, illuminance distribution 91 across the entire field stop 105 becomes uniform due to the averaging effect of illuminance distribution 81 at each lens 41.

[0033] The light that uniformly illuminates the field stop 105 illuminates the original 107 via a relay lens 106 at a subsequent stage, and the pattern of the original 107 is projected onto a substrate 109 via a projection optical system 108. At this time, since the original 107 is uniformly illuminated, a uniform pattern is formed (transferred) within the surface of the substrate 109.

[0034] Second Embodiment An exposure apparatus 200 according to the second embodiment will be described with reference to Figure 10. Figure 10 is a schematic diagram showing part of the configuration of the exposure apparatus 200 according to the second embodiment. The exposure apparatus 200 has a similar configuration to the exposure apparatus 100, but differs in that, for example, in order to achieve high illuminance on an illuminated surface such as the original 107, light from a first light source unit LS1 and light from a second light source unit LS2 are combined to illuminate the original 107.

[0035] 10, exposure apparatus 200 has a first light source unit LS1, a second light source unit LS2, a collimator lens 206, an optical element 208, and a collimator lens 210. Exposure apparatus 200 also has a relay optical system 211, a homogenizer element 212, a condenser lens 213, and a field stop 214. Note that the configuration after field stop 214 is the same as that of exposure apparatus 100, and is therefore not shown in FIG.

[0036] In this embodiment, an illumination device that illuminates an illuminated surface includes the first light source unit LS1, the second light source unit LS2, the collimator lenses 206 and 210, the optical element 208, the relay optical system 211, the homogenizer element 212, the condenser lens 213, and the field stop 214. The collimator lenses 206 and 210, the optical element 208, the relay optical system 211, the homogenizer element 212, the condenser lens 213, and the field stop 214 also configure an illumination optical system that illuminates an illuminated surface using the first light source unit LS1 and the second light source unit LS2.

[0037] The second light source unit LS2 is a light source (of a different type) from the first light source unit LS1 and includes a lamp 201 as a diverging light source and an elliptical mirror 202 that condenses the light from the lamp 201. The light-emitting unit of the lamp 201 is disposed at the position of a first focal point of the elliptical mirror 202. The light from the light-emitting unit of the lamp 201 is reflected by the elliptical mirror 202 and forms an image at a second focal point 203 of the elliptical mirror 202. The center of the angular distribution of the light that forms an image at the second focal point 203 is blocked by the lamp 201 after being reflected by the elliptical mirror 202. Therefore, a region 204 where no light is present and a region 205 where light is present exist downstream of the second focal point 203. The angular distribution of the light from the second focal point 203 is converted into an illuminance distribution via a collimator lens 206 and illuminates an optical element 208 disposed at a light combining position 207.

[0038] In this embodiment, the second light source unit LS2 (lamp 201) and the optical element 208 (light combining position 207) are illuminated in an image-pupil relationship using the collimator lens 206. In other words, the collimator lens 206 functions as an optical system (first optical system) that places the second light source unit LS2 and the optical element 208 in an image-pupil relationship.

[0039] The first light source unit LS1 is a light source different (in type) from the second light source unit LS2, and includes an LED array 209 in which a plurality of LED chips (solid-state light sources) are arranged in an array (on a plane). Light from the LED array 209 passes through a collimator lens 210 and illuminates an optical element 208 arranged at a light combining position 207 relative to the light-emitting unit of the lamp 201.

[0040] FIG. 11 is a diagram showing the configuration of optical element 208 arranged at light combining position 207. As described above, there is an area 204 where no light is present in the light from lamp 201. Area 205 where light from lamp 201 is present corresponds to the peripheral area of ​​optical element 208 that surrounds the central area of ​​optical element 208. In other words, light from lamp 201 illuminates the peripheral area of ​​optical element 208 via collimator lens 206. In the peripheral area of ​​optical element 208, transmission areas 215 and 216 that transmit light from lamp 201 (second light source unit LS2) are formed. Transmission areas 215 and 216 are formed, for example, by providing a light-transmitting low-reflection film on the glass surface of the peripheral area of ​​optical element 208.

[0041] Light from the LED array 209 passes through the collimator lens 210 and illuminates the central region of the optical element 208 in an image-pupil relationship. A reflective region 217 that reflects light from the LED array 209 (first light source unit LS1) is formed in the central region of the optical element 208. The reflective region 217 is formed, for example, by providing a highly reflective film that reflects light on the glass surface of the central region of the optical element 208. Note that the highly reflective film may be formed on both sides of the glass surface in the central region of the optical element 208, or on either one of the surfaces. Therefore, the light from the LED array 209 is reflected by the reflective region 217 (central region) of the optical element 208.

[0042] In the optical element 208, the light from the lamp 201 (light that has passed through the transmission areas 215 and 216) and the light from the LED array 209 (light that has been reflected by the reflection area 217) are combined. The light combined in the optical element 208 passes through a relay optical system 211 at the subsequent stage and illuminates a homogenizer element 212 that is arranged between the optical element 208 and a field stop 214 or the original 107 (the illuminated surface).

[0043] FIG. 12 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element 212 and the illuminance distribution on the surface on which the field stop 214 is disposed. The incident surfaces of the LED array 209 and the homogenizer element 212 are in an image-pupil relationship via the collimator lens 210 and the relay optical system 211. In other words, the collimator lens 210 and the relay optical system 211 function as an optical system (second optical system) that makes the incident surfaces of the LED array 209 and the homogenizer element 212 in an image-pupil relationship. Here, as shown in FIG. 12 , light from the LED array 209 illuminates a central region 218 of the homogenizer element 212. Therefore, the light distribution of the light from the LED array 209 is illuminated as an illuminance distribution on the central region 218 of the homogenizer element 212. Furthermore, light from the lamp 201 illuminates a peripheral region 219 of the homogenizer element 212.

[0044] 12, in this embodiment, a local illuminance distribution corresponding to the light-emitting points of LED array 209 as shown in Fig. 5 is not formed on the incident surface of homogenizer element 212, and therefore homogenizer element 212 is illuminated smoothly. Therefore, illuminance distribution 220 formed (superimposed) on the surface on which field stop 214 is arranged via condenser lens 213 is homogenized by the averaging effect obtained by each lens of homogenizer element 212.

[0045] The light that uniformly illuminates the field stop 214 illuminates the original 107 via a relay lens 106 at a subsequent stage, and the pattern of the original 107 is projected onto the substrate 109 via a projection optical system 108. At this time, since the original 107 is uniformly illuminated, a uniform pattern is formed (transferred) within the surface of the substrate 109.

[0046] Third Embodiment An exposure apparatus 300 as a third embodiment will be described with reference to Figure 13. Figure 13 is a schematic diagram showing part of the configuration of the exposure apparatus 300 as the third embodiment. The exposure apparatus 300 has a similar configuration to the exposure apparatus 100, but differs in that, for example, in order to achieve high illuminance on an illuminated surface such as the original 107, light from a first light source unit LS1 and light from a second light source unit LS2 are combined to illuminate the original 107.

[0047] 13, exposure apparatus 300 has a first light source unit LS1, a second light source unit LS2, a collimator lens 306, an optical element 308, and a collimator lens 310. Exposure apparatus 300 also has a relay optical system 311, a homogenizer element 312, a condenser lens 313, and a field stop 314. Note that the configuration subsequent to field stop 314 is the same as that of exposure apparatus 100, and is therefore not shown in FIG.

[0048] In this embodiment, an illumination device that illuminates an illuminated surface is configured by the first light source unit LS1, the second light source unit LS2, the collimator lenses 306 and 310, the optical element 308, the relay optical system 311, the homogenizer element 312, the condenser lens 313, and the field stop 314. In addition, the collimator lenses 306 and 310, the optical element 308, the relay optical system 311, the homogenizer element 312, the condenser lens 313, and the field stop 314 configure an illumination optical system that illuminates an illuminated surface using the first light source unit LS1 and the second light source unit LS2.

[0049] The second light source unit LS2 is a light source (of a different type) from the first light source unit LS1 and includes a lamp 301 as a diverging light source and an elliptical mirror 302 that condenses the light from the lamp 301. The light-emitting unit of the lamp 301 is disposed at the first focal point of the elliptical mirror 302. The light from the light-emitting unit of the lamp 301 is reflected by the elliptical mirror 302 and forms an image at the second focal point 303 of the elliptical mirror 302. The center of the angular distribution of the light that forms an image at the second focal point 303 is blocked by the lamp 301 after being reflected by the elliptical mirror 302. Therefore, a region 304 where no light is present and a region 305 where light is present exist downstream of the second focal point 303. The angular distribution of the light from the second focal point 303 is converted into an illuminance distribution via a collimator lens 306 and illuminates an optical element 308 disposed at a light combining position 307.

[0050] In this embodiment, the second light source unit LS2 (lamp 301) and the optical element 308 (light combining position 307) are illuminated in an image-pupil relationship using the collimator lens 306. In other words, the collimator lens 306 functions as an optical system (first optical system) that places the second light source unit LS2 and the optical element 308 in an image-pupil relationship.

[0051] The first light source unit LS1 is a light source different (in type) from the second light source unit LS2, and includes an LED array 309 in which a plurality of LED chips (solid-state light sources) are arranged in an array (on a plane). Light from the LED array 309 passes through a collimator lens 310 and illuminates an optical element 308 arranged at a light combining position 307 relative to the light-emitting unit of the lamp 301.

[0052] FIG. 14 is a diagram showing the configuration of the optical element 308 arranged at the light combining position 307. As described above, the light from the lamp 301 has an area 304 where no light is present. The area 305 where light from the lamp 301 is present corresponds to the peripheral area of ​​the optical element 308 that surrounds the central area of ​​the optical element 308. In other words, the light from the lamp 301 illuminates the peripheral area of ​​the optical element 308 via the collimator lens 306. In the peripheral area of ​​the optical element 308, reflective areas 315 and 316 that reflect the light from the lamp 301 (second light source unit LS2) are formed. The reflective areas 315 and 316 are formed, for example, by providing a highly reflective film that reflects light on the glass surface of the peripheral area of ​​the optical element 308. Note that the highly reflective film may be formed on both or either of the glass surfaces in the peripheral area of ​​the optical element 308. Thus, light from lamp 301 is reflected by reflective areas 315 and 316 of optical element 308 .

[0053] Light from the LED array 309 passes through the collimator lens 310 and illuminates the central region of the optical element 308 in an image-pupil relationship. A transmission region 317 that transmits light from the LED array 309 (first light source unit LS1) is formed in the central region of the optical element 308. The transmission region 317 is formed, for example, by providing a light-transmitting low-reflection film on the glass surface of the central region of the optical element 308. Therefore, the light from the LED array 309 passes through the transmission region 317 of the optical element 308.

[0054] In the optical element 308, the light from the lamp 301 (light reflected by the reflective areas 315 and 316) and the light from the LED array 309 (light transmitted through the transmissive area 317) are combined. The light combined in the optical element 308 passes through a relay optical system 311 at the subsequent stage and illuminates a homogenizer element 312 that is arranged between the optical element 308 and a field stop 314 or the original 107 (the illuminated surface).

[0055] FIG. 15 is a diagram showing the relationship between the illuminance distribution on the incident surface of the homogenizer element 312 and the illuminance distribution on the surface on which the field stop 314 is disposed. The incident surfaces of the LED array 309 and the homogenizer element 312 are in an image-pupil relationship via the collimator lens 310 and the relay optical system 311. In other words, the collimator lens 310 and the relay optical system 311 function as an optical system (second optical system) that makes the incident surfaces of the LED array 309 and the homogenizer element 312 in an image-pupil relationship. Here, as shown in FIG. 13, light from the LED array 209 illuminates a central region 318 of the homogenizer element 312. Therefore, the light distribution of the light from the LED array 309 is illuminated as an illuminance distribution on the central region 318 of the homogenizer element 312. Furthermore, light from the lamp 301 illuminates a peripheral region 319 of the homogenizer element 312.

[0056] 15, in this embodiment, a local illuminance distribution corresponding to the light-emitting points of LED array 209 as shown in Fig. 5 is not formed on the incident surface of homogenizer element 312, and therefore homogenizer element 312 is illuminated smoothly. Therefore, illuminance distribution 320 formed (superimposed) on the surface on which field stop 314 is arranged via condenser lens 313 is homogenized by the averaging effect obtained by each lens of homogenizer element 312.

[0057] The light that uniformly illuminates the field stop 314 illuminates the original 107 via a relay lens 106 at a subsequent stage, and the pattern of the original 107 is projected onto the substrate 109 via a projection optical system 108. At this time, since the original 107 is uniformly illuminated, a uniform pattern is formed (transferred) within the surface of the substrate 109.

[0058] <Fourth embodiment> The method for manufacturing an article according to an embodiment of the present invention is suitable for manufacturing articles such as semiconductor devices, flat panel displays, liquid crystal display devices, and MEMS. This manufacturing method includes the steps of exposing a substrate coated with a photosensitive agent using the exposure apparatus 100, 200, or 300 described above, and developing the exposed photosensitive agent. The developed photosensitive agent pattern is then used as a mask to perform etching and ion implantation processes on the substrate, forming a circuit pattern on the substrate. These exposure, development, etching, and other processes are repeated to form a circuit pattern consisting of multiple layers on the substrate. In subsequent processes, the substrate on which the circuit pattern has been formed is diced, followed by chip mounting, bonding, and inspection. This manufacturing method may also include other well-known processes (e.g., oxidation, film formation, vapor deposition, doping, planarization, resist stripping, etc.). The method for manufacturing an article according to this embodiment is advantageous over conventional methods in at least one of the performance, quality, productivity, and production cost of the article.

[0059] The disclosure of the present specification includes the following illumination apparatus, illumination optical system, exposure apparatus, and method for manufacturing an article.

[0060] (Item 1) A lighting device that illuminates an illuminated surface, a first light source unit in which a plurality of solid-state light sources are arranged on a plane; a second light source unit different from the first light source unit; an optical element that combines the light from the first light source unit and the light from the second light source unit; a homogenizer element that homogenizes the light from the optical element and illuminates the illumination surface; a first optical system that places the second light source unit and the optical element in an image-pupil relationship; a second optical system that places the plurality of solid-state light sources and the incident surface of the homogenizer element in an image-pupil relationship; A lighting device comprising:

[0061] (Item 2) 2. The lighting device according to item 1, wherein the second light source section includes a divergent light source and an elliptical mirror that condenses light from the divergent light source.

[0062] (Item 3) 3. The illumination device according to item 1 or 2, wherein the homogenizer element is a wavefront division type homogenizer element that is divided into a plurality of optical elements and that superimposes light from each of the plurality of optical elements on the illuminated surface.

[0063] (Item 4) 4. The lighting device according to item 3, wherein the optical element includes a lens.

[0064] (Item 5) 5. The illumination device according to any one of items 1 to 4, wherein the homogenizer element is disposed between the optical element and the illuminated surface.

[0065] (Item 6) The optical element is a reflective region that reflects light from the first light source unit and a transmissive region that transmits light from the second light source unit, The light reflected by the reflective region and the light transmitted through the transmissive region are combined. 6. The lighting device according to any one of items 1 to 5, wherein:

[0066] (Item 7) the reflective region is provided in a central region of the optical element, The transmission region is provided in a peripheral region surrounding the central region of the optical element. 7. The lighting device according to item 6,

[0067] (Item 8) The optical element is a transmission region that transmits light from the first light source unit and a reflection region that reflects light from the second light source unit, The light transmitted through the transmission region and the light reflected through the reflection region are combined. 6. The lighting device according to any one of items 1 to 5, wherein:

[0068] (Item 9) the transmission region is provided in a central region of the optical element, The reflective region is provided in a peripheral region surrounding the central region of the optical element. 9. The lighting device according to item 8, characterized in that

[0069] (Item 10) 10. The lighting device according to any one of items 1 to 9, wherein the solid-state light source includes at least one of an LED and an LD.

[0070] (Item 11) An illumination optical system that illuminates an illuminated surface using a first light source unit in which a plurality of solid-state light sources are arranged on a plane, and a second light source unit different from the first light source unit, an optical element that combines the light from the first light source unit and the light from the second light source unit; a homogenizer element that homogenizes the light from the optical element and illuminates the illumination surface; a first optical system that places the second light source unit and the optical element in an image-pupil relationship; a second optical system that places the plurality of solid-state light sources and the incident surface of the homogenizer element in an image-pupil relationship; An illumination optical system comprising:

[0071] (Item 12) An exposure apparatus that exposes a substrate through an original, An illumination device according to any one of items 1 to 10, which illuminates the original placed on an illumination surface; a projection optical system that projects the pattern of the original onto the substrate; An exposure apparatus comprising:

[0072] (Item 13) An exposure apparatus that exposes a substrate through an original, Item 12. An illumination optical system according to item 11, which illuminates the original placed on an illumination surface; a projection optical system that projects the pattern of the original onto the substrate; An exposure apparatus comprising:

[0073] (Item 14) Item 13. Exposing a substrate using the exposure apparatus according to Item 12; developing the exposed substrate; manufacturing an article from the developed substrate; A method for manufacturing an article, comprising:

[0074] (Item 15) Item 14. Exposing a substrate using the exposure apparatus according to Item 13; developing the exposed substrate; manufacturing an article from the developed substrate; A method for manufacturing an article, comprising:

[0075] The invention is not limited to the above-described embodiments, and various changes and modifications can be made without departing from the spirit and scope of the invention. Accordingly, the following claims are appended to apprise the public of the scope of the invention. [Explanation of symbols]

[0076] 100, 200, 300: exposure device 102, 211, 311: relay optical system 103, 212, 312: homogenizer element 201, 301: lamp 205, 305: collimator lens 208, 308: optical element 209, 309: LED array LS1: first light source section LS2: second light source section

Claims

1. A lighting device that illuminates an illuminated surface, a first light source unit in which a plurality of solid-state light sources are arranged on a plane; a second light source unit different from the first light source unit; an optical element that combines the light from the first light source unit and the light from the second light source unit; a homogenizer element that homogenizes the light from the optical element and illuminates the illumination surface; a first optical system that places the second light source unit and the optical element in an image-pupil relationship; a second optical system that places the plurality of solid-state light sources and the incident surface of the homogenizer element in an image-pupil relationship; A lighting device comprising:

2. 2. The illumination device according to claim 1, wherein the second light source unit includes a divergent light source and an elliptical mirror that condenses light from the divergent light source.

3. 2. The illumination device according to claim 1, wherein the homogenizer element is a wavefront division type homogenizer element that is divided into a plurality of optical elements and that superimposes light from each of the plurality of optical elements onto the illuminated surface.

4. The illumination device of claim 3 , wherein the optical element comprises a lens.

5. 2. The illumination device according to claim 1, wherein the homogenizer element is disposed between the optical element and the illuminated surface.

6. The optical element is a reflective region that reflects light from the first light source unit and a transmissive region that transmits light from the second light source unit, The light reflected by the reflective region and the light transmitted through the transmissive region are combined.

2. The lighting device according to claim 1.

7. the reflective region is provided in a central region of the optical element, The transmission region is provided in a peripheral region surrounding the central region of the optical element.

7. The lighting device according to claim 6.

8. The optical element is a transmission region that transmits light from the first light source unit and a reflection region that reflects light from the second light source unit, The light transmitted through the transmission region and the light reflected through the reflection region are combined.

2. The lighting device according to claim 1.

9. the transmission region is provided in a central region of the optical element, The reflective region is provided in a peripheral region surrounding the central region of the optical element.

9. The lighting device according to claim 8.

10. The lighting device according to claim 1 , wherein the solid-state light source includes at least one of an LED and an LD.

11. 1. An illumination optical system that illuminates an illuminated surface using a first light source unit in which a plurality of solid-state light sources are arranged on a plane, and a second light source unit different from the first light source unit, an optical element that combines the light from the first light source unit and the light from the second light source unit; a homogenizer element that homogenizes the light from the optical element and illuminates the illumination surface; a first optical system that places the second light source unit and the optical element in an image-pupil relationship; a second optical system that places the plurality of solid-state light sources and the incident surface of the homogenizer element in an image-pupil relationship; An illumination optical system comprising:

12. An exposure apparatus that exposes a substrate through an original, an illumination device according to any one of claims 1 to 10, which illuminates the original placed on an illumination surface; a projection optical system that projects the pattern of the original onto the substrate; An exposure apparatus comprising:

13. An exposure apparatus that exposes a substrate through an original, an illumination optical system according to claim 11 that illuminates the original placed on an illumination surface; a projection optical system that projects the pattern of the original onto the substrate; An exposure apparatus comprising:

14. exposing a substrate using the exposure apparatus according to claim 12; developing the exposed substrate; manufacturing an article from the developed substrate; A method for manufacturing an article, comprising:

15. exposing a substrate using the exposure apparatus according to claim 13; developing the exposed substrate; manufacturing an article from the developed substrate; A method for manufacturing an article, comprising:

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