Nozzle unit

Abstract

To provide a nozzle unit capable of simply changing a fluid supply condition.SOLUTION: A nozzle unit (30) for supplying fluid includes a first block (32) having a plurality of first flow channels (39) having different shapes for supplying fluid, and a second block (33) having a second flow channel (43) which is connected to at least one first flow channel among the plurality of first flow channels and is connected to a fluid supply source (51). The first block and the second block are relatively movable and supply the fluid from the first flow channel arranged at a position connected to the second flow channel.SELECTED DRAWING: Figure 6

Description

[Technical Field]

[0001] The present invention relates to a nozzle unit for supplying a fluid. [Background technology]

[0002] In various processing devices that process objects, various fluids, such as liquid, gas, and a two-fluid mixture of liquid and gas, are supplied from a nozzle during processing. For example, Patent Document 1 discloses a cutting device that cuts a workpiece, in which cutting water is supplied from a cutting water supply nozzle toward the cutting point. The supplied cutting water removes chips generated during cutting and cools the cutting point. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2009-255222 Summary of the Invention [Problem to be solved by the invention]

[0004] There is a demand for changing the supply conditions (e.g., flow rate, pressure, etc.) of the fluid used in processing equipment depending on the object being processed and the processing situation. In the past, this demand was met by replacing the nozzle that supplies the fluid or the fluid supply structure connected to the nozzle, which required extensive work.

[0005] An object of the present invention is to provide a nozzle unit that allows for easy change of fluid supply conditions. [Means for solving the problem]

[0006] One aspect of the present invention is a nozzle unit for supplying a fluid, the nozzle unit comprising: a first block having a plurality of first flow paths with different shapes for supplying a fluid; and a second block having a second flow path connected to at least one of the plurality of first flow paths and to a fluid supply source, the first block and the second block being movable relative to each other, and the fluid being supplied from the first flow path arranged at a position connected to the second flow path.

[0007] The nozzle unit is preferably mounted on the processing device and supplies the fluid to a processing tool. In one embodiment, the processing tool is a cutting blade. [Effects of the Invention]

[0008] According to the nozzle unit described above, the fluid supply conditions can be easily changed by moving the first block and the second block relative to each other. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a perspective view of a processing device equipped with a nozzle unit. [Figure 2] FIG. 2 is an exploded perspective view of the nozzle unit. [Figure 3] FIG. 2 is a perspective view of a nozzle unit. [Figure 4] FIG. 10 is a cross-sectional view along the vertical direction of a nozzle unit in which a first flow path is connected to a second flow path. [Figure 5] FIG. 10 is a cross-sectional view along the vertical direction of a nozzle unit in which a first flow path connected to a second flow path is changed. [Figure 6] FIG. 2 is a cross-sectional view of the nozzle unit taken along the horizontal direction. [Figure 7] 5A and 5B are diagrams showing an example of openings of a plurality of first flow paths provided in a nozzle unit. [Figure 8] 10A to 10C are diagrams showing different examples of openings of a plurality of first flow paths provided in a nozzle unit. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, with reference to the accompanying drawings, a nozzle unit 30, which is one embodiment to which the present invention is applied, and a processing apparatus 10, which is an example of a processing apparatus equipped with the nozzle unit 30, will be described. The X-axis, Y-axis, and Z-axis directions shown in each drawing are perpendicular to each other, the X-axis and Y-axis directions are horizontal directions, and the Z-axis direction is a vertical direction. Note that the processing apparatus 10 shown in the drawing is only an example, and the present invention can be applied to various other processing apparatuses. Specific application examples other than the processing apparatus 10 will be described later.

[0011] 1 is a cutting device that performs cutting on a wafer 11, which is a workpiece, using a cutting blade 12, which is a processing tool. The wafer 11 is supported on a ring-shaped frame 14 via a support tape 13, and is transported and cut while supported by the frame 14.

[0012] The processing apparatus 10 is equipped with a chuck table 15 that holds the wafer 11. The chuck table 15 has a holding surface formed of a porous material on the upper surface thereof, and can hold the wafer 11 by suction onto the holding surface by sucking in air using a suction source (not shown) to apply negative pressure. A plurality of clamps 16 that hold the frame 14 are provided on the outer periphery of the chuck table 15.

[0013] An X-axis movement mechanism 18 that moves the chuck table 15 in the X-axis direction is provided inside the base 17 of the processing device 10. The X-axis movement mechanism 18 supports a pedestal 182 by a pair of guide rails 181 extending in the X-axis direction so that the pedestal 182 is movable in the X-axis direction, and a ball screw 183 extending in the X-axis direction is threadedly engaged with the pedestal 182. The chuck table 15 is supported on the pedestal 182. When the ball screw 183 is rotated by a motor 184, the pedestal 182 moves along the guide rails 181, thereby changing the position of the chuck table 15 in the X-axis direction. The X-axis movement mechanism 18 is covered from above by a moving plate 19 and bellows 20 that move in the X-axis direction together with the chuck table 15.

[0014] A gate-shaped column 21 provided on the upper surface of the base 17 is provided with a Y-axis movement mechanism 22 for moving the cutting blade 12 in the Y-axis direction, and a Z-axis movement mechanism 23 for moving the cutting blade 12 in the Z-axis direction.

[0015] Y-axis movement mechanism 22 is provided with a pair of guide rails 221 that are arranged on the sides of column 21 and extend in the Y-axis direction, and Y-axis movement table 222 is supported by guide rails 221 so as to be movable in the Y-axis direction, and ball screw 223 that extends in the Y-axis direction is screwed into Y-axis movement table 222. When ball screw 223 is rotated by motor 224, Y-axis movement table 222 moves along guide rails 221 in the Y-axis direction.

[0016] Z-axis movement mechanism 23 is provided with a pair of guide rails 231 that are arranged on the sides of Y-axis movement table 222 and extend in the Z-axis direction, and Z-axis movement table 232 is supported by guide rails 231 so as to be movable in the Z-axis direction, and ball screw 233 that extends in the Z-axis direction is screwed into Z-axis movement table 232. When ball screw 233 is rotated by motor 234, Z-axis movement table 232 moves along guide rails 231 in the Z-axis direction.

[0017] A spindle housing 24 is supported at the lower end of the Z-axis moving table 232. Inside the spindle housing 24, there are provided a spindle 25 (see FIG. 6) extending in the Y-axis direction and a spindle motor (not shown) that rotates and drives the spindle 25.

[0018] As shown in Fig. 6, the cutting blade 12 is attached to one end of the spindle 25 in the Y-axis direction via a blade mount 26. The cutting blade 12 is ring-shaped, and the outer peripheral edge of the cutting blade 12 protrudes radially outward from the blade mount 26. Note that in Figs. 3 to 5, the spindle 25 and the blade mount 26 are not shown, and only the cutting blade 12 attached to the spindle 25 is shown. When the spindle 25 is driven to rotate by the spindle motor, the cutting blade 12 rotates around the axis of the spindle 25.

[0019] When the Y-axis moving table 222 in the Y-axis moving mechanism 22 moves in the Y-axis direction, the Z-axis moving table 232 and the spindle housing 24 move in the Y-axis direction, thereby changing the position of the cutting blade 12 in the Y-axis direction. When the Z-axis moving table 232 in the Z-axis moving mechanism 23 moves in the Z-axis direction, the spindle housing 24 moves in the Y-axis direction, thereby changing the position of the cutting blade 12 in the Z-axis direction.

[0020] A blade cover 27 that encloses a portion of the cutting blade 12 is attached to one end of the spindle housing 24 in the Y-axis direction. The blade cover 27 has a shape that covers the upper half of the cutting blade 12 and leaves the lower half of the cutting blade 12 exposed, allowing cutting to be performed on the wafer 11 located below the cutting blade 12 using the rotating cutting blade 12 (see FIGS. 4 and 5). During cutting, cutting water (machining fluid) can be supplied from a nozzle unit 30 supported by the blade cover 27 to the machining point where the cutting blade 12 cuts into the wafer 11 and its surroundings.

[0021] The operation of the processing device 10 when cutting the wafer 11 will be described. The wafer 11 before cutting is held by suction on the holding surface of the chuck table 15, and the frame 14 is fixed by the clamp 16. The chuck table 15 is moved in the X-axis direction by the X-axis movement mechanism 18, and the wafer 11 is positioned below the cutting blade 12. The position of the wafer 11 in the X-axis direction is adjusted by the X-axis movement mechanism 18, and the position of the cutting blade 12 in the Y-axis direction is adjusted by the Y-axis movement mechanism 22, and the cutting blade 12 is positioned above the cutting portion of the wafer 11.

[0022] The spindle motor is driven to rotate the cutting blade 12, and the Z-axis movement mechanism 23 moves the cutting blade 12 downward in the Z-axis direction, causing the cutting blade 12 to cut into the wafer 11. When the X-axis movement mechanism 18 moves the chuck table 15 in the X-axis direction while the cutting blade 12 is cutting into the wafer 11, the wafer 11 on the chuck table 15 is cut along a line extending in the X-axis direction by the cutting blade 12. After forming one line, the Y-axis movement mechanism 22 moves the cutting blade 12 in the Y-axis direction, allowing the cutting position to be changed and the next line to be cut. In addition, a rotation mechanism is provided that rotates the chuck table 15 about an axis in the Z-axis direction. By changing the orientation of the wafer 11 by rotating the chuck table 15, multiple intersecting lines can be cut.

[0023] As an example, the wafer 11 is a semiconductor wafer in which semiconductor devices are formed in multiple regions defined by grid-like dividing lines. The processing device 10 performs cutting along the dividing lines using a cutting blade 12 to form bottomed half-cut grooves between the multiple devices or to divide the multiple devices by full cutting.

[0024] 4 to 6, in the processing device 10, cutting water M is supplied from the nozzle unit 30 toward the processing point and its surroundings while the cutting blade 12 is cutting the wafer 11. The cutting water M has the role of washing away processing debris generated during the cutting process and the role of cooling by absorbing heat generated when the cutting blade 12, rotating at high speed, cuts into the wafer 11. The nozzle unit 30 is disposed adjacent to the cutting blade 12 in the X-axis direction, and sprays the cutting water M in a direction generally along the outer periphery of the rotating cutting blade 12.

[0025] In addition to the nozzle unit 30, a tubular side nozzle may be provided that is arranged opposite the side of the cutting blade 12 in the Y-axis direction, and cutting water may be supplied from the side nozzle toward the side of the cutting blade 12 in the Y-axis direction.

[0026] The nozzle unit 30 has a configuration that allows for easy change of cutting water supply conditions during cutting processing. The nozzle unit 30 will be described in detail below, mainly with reference to Figures 2 to 8. The nozzle unit 30 includes a support block 31 supported by the blade cover 27, and a first block 32 and a second block 33 supported via the support block 31. The first block 32 is supported so as to be movable in the Y-axis direction relative to the support block 31, and the second block 33 is fixed to the support block 31, such that the first block 32 and the second block 33 are movable relative to each other in the Y-axis direction.

[0027] The blade cover 27 has a support bracket 34 that protrudes in the Y-axis direction, and a support block 31 is attached to the support bracket 34. By supporting the support block 31 via the support bracket 34, the nozzle unit 30 is positioned adjacent to the cutting blade 12 in the X-axis direction.

[0028] The support block 31 may be fixed to the support bracket 34, or may be supported so as to be movable relative to the support block 31. As an example, an air cylinder, a feed screw mechanism, or the like may be used to support the support block 31 so as to be movable in the Z-axis direction relative to the support bracket 34, and the height of the spray position of the cutting water M from the nozzle unit 30 can be adjusted by moving the support block 31 up and down in the Z-axis direction.

[0029] A guide space 35 extending in the Y-axis direction is formed below the support block 31. As shown in Figures 2, 4, and 5, the guide space 35 is a space having a T-shaped cross section, and the same cross section continues in the Y-axis direction. The lower end of the guide space 35 opens to the lower surface of the support block 31.

[0030] The first block 32 has a guide portion 36 that is inserted into the guide space 35. The guide portion 36 is provided to protrude from the upper surface side of the first block 32 and has a T-shaped cross-sectional shape that corresponds to the guide space 35. The guide portion 36 is slidable in the Y-axis direction along the inner surface of the guide space 35, and the first block 32 is supported movably in the Y-axis direction via the guide space 35 and the guide portion 36. One end of the guide space 35 in the Y-axis direction is open, and a part of the guide portion 36 protrudes from the guide space 35 in the Y-axis direction in response to a change in the position of the first block 32 in the Y-axis direction.

[0031] The first block 32 has a box-shaped base portion 37 located below the guide portion 36, and a nozzle portion 38 protruding obliquely downward from a side surface 371 in the X-axis direction of the base portion 37 (the side surface facing the cutting blade 12). A plurality of first flow paths 39 are formed inside the first block 32. Each first flow path 39 has an inlet-side flow path 40 formed inside the base portion 37 and an outlet-side flow path 41 formed inside the nozzle portion 38, and the inlet-side flow path 40 and the outlet-side flow path 41 are connected to form the first flow path 39.

[0032] The multiple first flow paths 39 are arranged at intervals in the Y-axis direction and form flow paths that are independent of each other. In the illustrated embodiment, the first block 32 has four first flow paths 39. However, the number of first flow paths is not limited to this embodiment and may be two, three, or five or more. However, in order to change the cutting water supply conditions by relative movement between the first block 32 and the second block 33, the first block 32 is provided with two or more first flow paths.

[0033] The inlet-side flow paths 40 constituting each of the first flow paths 39 are cylindrical flow paths extending in the X-axis direction. One end of each inlet-side flow path 40 opens to a side surface 372 of the base portion 37 in the X-axis direction (the side surface opposite to the side surface 371 from which the nozzle portion 38 protrudes), and the other end of each inlet-side flow path 40 connects to an outlet-side flow path 41 inside the base portion 37. The multiple inlet-side flow paths 40 have the same diameter and length and have the same shape.

[0034] The outlet-side flow paths 41 constituting each of the first flow paths 39 are flow paths extending in a direction including an X-axis component and a Z-axis component. One end of the outlet-side flow path 41 is connected to the inlet-side flow path 40 inside the base portion 37, and the other end of the outlet-side flow path 41 is an opening 411 that is an outlet portion that opens into the tip surface 381 of the nozzle portion 38 in the X-axis direction.

[0035] The outlet-side flow paths 41 included in the first flow paths 39 have different shapes. Specific examples of the shapes of the outlet-side flow paths 41 are shown in FIGS. 7 and 8. FIGS. 7 and 8 are front views of the tip surface 381 of the nozzle portion 38, and show the shapes (opening shapes) of the openings 411 of the outlet-side flow paths 41 formed in the tip surface 381. Each outlet-side flow path 41 has a cross-sectional shape that is the same as the shape of the opening 411 shown in FIGS. 7 and 8, and continues to the connection point with the inlet-side flow path 40. Unlike the configuration of this embodiment, the cross-sectional shape of each outlet-side flow path 41 may change midway along the extension direction.

[0036] In the configuration shown in FIG. 7, the openings 411 of the multiple outlet-side flow paths 41 are all circular, but the diameters of the openings 411 are different. In other words, the openings 411 of the multiple outlet-side flow paths 41 are similar in shape, but have different cross-sectional areas (opening areas of the openings 411). Since the cross-sectional areas of the individual outlet-side flow paths 41 of the multiple first flow paths 39 are different, when fluid is supplied from a fluid supply source 51 (described later), the flow rate, water pressure, and spray range of the cutting water M sprayed from each opening 411 can be made different. Note that the opening shapes of the multiple outlet-side flow paths 41, which are similar in shape, are not limited to a circle like the opening 411 shown in the drawing, and may be other shapes (for example, an ellipse, or a polygon such as a rectangle or a triangle).

[0037] 8, the outlet-side flow paths 41 have different inner shapes (contours) of their openings 411, which are, in order from the left side of the drawing, a rhombus, a circle, a vertically long rectangle, and a horizontally long rectangle. Since the openings 411 of the outlet-side flow paths 41 have different inner shapes, when fluid is supplied from a fluid supply source 51 (described later), the cutting water M sprayed from each opening 411 of the first flow paths 39 has different spray ranges. Furthermore, when the opening areas of the individual openings 411 shown in FIG. 8 are different, the flow rates and water pressures of the cutting water M sprayed from each opening 411 can be made different, as in the configuration shown in FIG. 7.

[0038] The shapes of the multiple first flow paths 39 provided in the first block 32 are defined as being different in both cases where the multiple first flow paths 39 have outlet-side flow paths 41 in which the openings 411 have similar shapes but different cross-sectional areas (opening areas of the openings 411) as shown in Figure 7, and where the multiple first flow paths 39 have outlet-side flow paths 41 in which the inner shapes (contours) of the openings 411 are different as shown in Figure 8.

[0039] 7 and 8 show cases where the openings 411, which are outlets of the multiple first flow paths 39, have different shapes. However, the multiple first flow paths 39 may have different flow path structures (cross-sectional areas or inner shapes) at least partially inside the first block 32. That is, FIGS. 7 and 8 do not necessarily show the shapes of the openings 411 on the tip surface 381 of the nozzle portion 38, but may show cross sections of the multiple first flow paths 39 (particularly the outlet-side flow paths 41) inside the first block 32. If the multiple first flow paths 39 have different internal flow path structures, the supply characteristics of the cutting water M sprayed from each opening 411 will be different. In this case, even if the openings 411 have the same shape, the supply characteristics of the cutting water M from the multiple first flow paths 39 can be varied depending on the difference in the internal flow path structure. Thus, regardless of whether the shapes of the openings 411 are the same, a configuration in which at least a portion of the flow path structure inside the first block 32 is different is also included in the concept of the multiple first flow paths 39 having different shapes.

[0040] Furthermore, although not shown, the extension directions of the multiple first flow paths provided in the first block 32 may be different from each other, and the spray direction (spray angle) of the cutting water M sprayed from the opening of each first flow path may be different. For example, in the configurations shown in FIGS. 2 to 5, the outlet-side flow paths 41 of the multiple first flow paths 39 extend parallel to each other. However, as a modified example, the extension directions of the outlet-side flow paths 41 of the multiple first flow paths 39 may be configured to be different from each other. According to the configuration of this modified example, the spray direction of the cutting water M sprayed through the first flow path 39 corresponds to the extension direction of each outlet-side flow path 41. Such an embodiment in which the extension directions of the multiple first flow paths 39 are different is also included in the concept that the shapes of the multiple first flow paths 39 are different.

[0041] In other words, in the present invention, the multiple first flow paths having different shapes have some structural difference, such as a difference in cross-sectional area (size of the flow path) at the outlet portion or the middle portion of the flow path, a difference in inner surface shape (contour) at the outlet portion or the middle portion of the flow path, or a difference in the extension direction of the flow path, and this means that the fluid supply characteristics (flow rate, injection pressure, injection range, injection direction) can be made different from each other depending on the structural difference.

[0042] 2, the first block 32 has a plurality of fitting recesses 42 recessed in the X-axis direction on a side surface 372 of the base portion 37. The fitting recesses 42 have the same shape and are spaced apart in the Y-axis direction at the same intervals as the plurality of first flow paths 39. In the illustrated embodiment, four fitting recesses 42 are provided, corresponding to the number of first flow paths 39.

[0043] The second block 33 is fixed to the side surface of the support block 31 in the X-axis direction. Any fixing method, such as screw fastening, can be used to fix the second block 33 to the support block 31. It is also possible to form the support block 31 and the second block 33 as an integrated structure in advance, without separating them.

[0044] A second flow path 43 is formed in the second block 33. The second flow path 43 penetrates the second block 33 in the X-axis direction. A female thread is formed on the inner periphery of the second flow path 43. As shown in FIG. 2, the second flow path 43 further has a branch flow path 431 that branches off from near the center in the X-axis direction and extends to one side in the Y-axis direction. The branch flow path 431 opens to one side surface of the second block 33 in the Y-axis direction.

[0045] The second block 33 has a support rib 44 that protrudes in the X-axis direction above the second flow path 43. The support rib 44 abuts against a side surface 372 of the base portion 37 when the second block 33 and the first block 32 are combined.

[0046] The second block 33 further includes a mating protrusion 45 that protrudes in the X-axis direction from the support rib 44. Only one mating protrusion 45 is provided, and the mating protrusion 45 selectively fits into one of the four mating recesses 42 depending on the relative position change in the Y-axis direction of the first block 32 with respect to the second block 33 (see FIGS. 4 and 5).

[0047] The relative positions of the first block 32 and the second block 33 in the Y-axis direction are determined by the engagement between the engagement recesses 42 and the engagement protrusions 45. In the illustrated embodiment, the engagement protrusions 45 are selectively engaged with the four engagement recesses 42, thereby holding the first block 32 at four different positions in the Y-axis direction. The engagement recesses 42 and the engagement protrusions 45 are configured to have shapes (e.g., hemispherical) that disengage when a force equal to or greater than a predetermined value is applied in the Y-axis direction. By pushing or pulling the first block 32 in the Y-axis direction with a force equal to or greater than a predetermined value, the engagement between the engagement recesses 42 and the engagement protrusions 45 is disengaged, allowing the first block 32 to move in the Y-axis direction. Note that it is also possible to provide multiple engagement protrusions 45 at the same intervals as the multiple engagement recesses 42, so that multiple engagement protrusions 45 can be simultaneously engaged with the engagement recesses 42.

[0048] When the mating protrusion 45 is mated with the mating recess 42, the first flow path 39 provided on the first block 32 side and the second flow path 43 provided on the second block 33 side are connected in the X-axis direction to form a continuous flow path. More specifically, as shown in FIG. 6 , one end in the X-axis direction of the inlet-side flow path 40 of the first flow path 39, which opens on the side surface 372 of the base portion 37, is connected to one end in the X-axis direction of the second flow path 43 facing the side surface 372. Because the inlet-side flow paths 40 of all of the multiple first flow paths 39 have the same shape, the second flow path 43 can be connected to any of the multiple first flow paths 39 without any hindrance. As described above, by changing the mating recess 42 into which the mating protrusion 45 is mated, the position at which the first block 32 is held in the Y-axis direction is changed, and the first flow path 39 to which the second flow path 43 is connected is changed among the multiple (four) first flow paths 39.

[0049] The connecting member 46 is attached with one of the multiple first flow paths 39 connected to the second flow path 43. As shown in FIG. 2, the connecting member 46 is a bolt including a head 461 with a large diameter and a shaft 462 protruding from the head 461 in the X-axis direction. The shaft 462 is inserted into the second flow path 43 of the second block 33, and a male thread 463 formed on the outer periphery of the shaft 462 is screwed into a female thread on the inner periphery of the second flow path 43. The connecting member 46 is rotated until the head 461 abuts against the side surface of the second block 33 in the X-axis direction (the side surface opposite the side facing the side surface 372 of the first block 32), and then tightened with a predetermined torque. This fastens the first block 32 and the second block 33 together via the connecting member 46. As shown in Figures 4 and 5, the length of the shaft portion 462 in the X-axis direction is longer than the length of the second flow path 43, and the shaft portion 462 penetrates the second flow path 43, protrudes from the second block 33, and is inserted into the inlet side flow path 40 of the first flow path 39 of the first block 32.

[0050] 4 and 5, a ring-shaped seal member 47 is disposed at a position surrounding the connection between the first flow path 39 and the second flow path 43. An O-ring 48 is disposed between the head 461 of the connecting member 46 and the side surface of the second block 33. The periphery of both end portions of the second flow path 43 in the X-axis direction is sealed by the seal member 47 and the O-ring 48.

[0051] When the connecting member 46 is attached in this manner, the first flow path 39 of the first block 32 and the second flow path 43 of the second block 33 are connected via the connecting flow path 49 formed in the connecting member 46, enabling the supply of fluid from the second flow path 43 to the first flow path 39. As shown in FIGS. 4 and 5 , the connecting flow path 49 extends in the axial direction of the shaft portion 462 and has a first opening 491 that opens at the tip of the shaft portion 462. As shown in FIG. 2 , the connecting flow path 49 has a second opening 492 that opens on the outer circumferential surface of the shaft portion 462. A ring-shaped recess 493 that is continuous in the circumferential direction is formed on the outer periphery of the shaft portion 462 in the range in the X-axis direction where the second opening 492 is formed. The male thread portion 463 of the shaft portion 462 is provided in regions on both sides of the recess 493 in the X-axis direction.

[0052] One end of the fluid supply pipe 50 is connected to the branch flow path 431 of the second flow path 43 (see FIG. 2). The other end of the fluid supply pipe 50 is connected to a fluid supply source 51. The fluid supply source 51 is composed of a tank for storing a fluid, a pump for supplying the fluid from the tank to the fluid supply pipe 50 at a predetermined pressure, and the like. The tank of the fluid supply source 51 stores cutting water as a fluid to be used during cutting processing in the processing device 10.

[0053] By attaching the coupling member 46 with the connecting flow path 49 to the second flow path 43 of the second block 33 and connecting the fluid supply pipe 50 to the second flow path 43 of the second block 33, the first flow path 39 of the first block 32 is connected to the fluid supply source 51 via the second flow path 43 of the second block 33. When cutting water, which is a fluid, is supplied from the fluid supply source 51 to the fluid supply pipe 50, the cutting water flows into the second flow path 43. The cutting water that flows into the second flow path 43 fills the recess 493, enters the connecting flow path 49 from the second opening 492, exits from the first opening 491, and proceeds to the first flow path 39. Because the shaft 462 of the coupling member 46 having the connecting flow path 49 penetrates the second flow path 43 and is inserted into the inlet-side flow path 40 of the first flow path 39, cutting water can be reliably supplied to the first flow path 39 without leaking at the boundary between the first flow path 39 and the second flow path 43. The cutting water that has entered the first flow path 39 passes through the outlet flow path 41 connected to the inlet flow path 40 and is sprayed as cutting water M from the opening 411 formed in the tip surface 381 of the nozzle portion 38.

[0054] As shown in FIG. 6 , cutting water M is sprayed from one of the four first flow paths 39, which is connected to the fluid supply source 51 via the second flow path 43. By changing the position of the first block 32 relative to the second block 33 in the Y-axis direction, the first flow path 39 connected to the fluid supply source 51 can be switched, and cutting water M can be sprayed from another first flow path 39. To switch the first flow path 39 connected to the fluid supply source 51, the connecting member 46 is removed from the second block 33 and then the first block 32 is moved in the Y-axis direction. At this time, application of a predetermined force or more disengages the mating protrusion 45 from the mating recess 42. Subsequently, the mating protrusion 45 engages with another mating recess 42, completing the alignment of the next first flow path 39 with the second flow path 43. Therefore, the first flow path 39 and the second flow path 43 can be reliably connected without requiring a complex alignment procedure, and the first flow path 39 to be used can be easily switched. Then, by attaching the connecting member 46, cutting water can be supplied from the fluid supply source 51 to the first flow path 39 after switching the connection with the second flow path 43, and the cutting water M can be sprayed from the opening 411 provided in the first flow path 39.

[0055] 6 omits the coupling member 46 and the connecting flow path 49 to simply illustrate the cutting water supply path from the fluid supply source 51 to the first flow path 39. If the first block 32 and the second block 33 have a configuration that allows them to be fastened together without using the coupling member 46, it is also possible to select a configuration in which the first flow path 39 (inlet-side flow path 40) and the second flow path 43 are simply connected to each other in communication without using the connecting flow path 49, as shown in FIG. 6. Furthermore, if the connecting flow path 49 of the coupling member 46 is not used, the second flow path 43 may not be branched midway, and the fluid supply pipe 50 may be connected to an inlet at the end of the second flow path 43 in the X-axis direction opposite to the end connected to the first flow path 39, as shown in FIG.

[0056] As described above, the multiple first flow paths 39 provided in the first block 32 are different in shape (having structural differences in cross-sectional area, inner surface shape, extension direction of the flow paths, etc.), and based on these differences in shape, each has different fluid supply characteristics. Therefore, in the nozzle unit 30, by relatively moving the first block 32 and the second block 33 in the Y-axis direction to align the first flow path 39 having the desired fluid supply characteristics with the second flow path 43 connected to the fluid supply source 51, it is possible to easily change the shape of the first flow path 39 to be used and correspond to the desired fluid supply conditions without replacing the entire nozzle.

[0057] 4 and 5 show a case where the first flow passage 39 to be connected to the second flow passage 43 is switched using the first block 32 having a plurality of first flow passages 39 with different cross-sectional areas (opening areas of the openings 411) as shown in FIG. 7. FIG. 4 shows a state where the first flow passage 39 having a relatively large cross-sectional area of ​​the outlet-side flow passage 41 (opening area of ​​the openings 411) is selected as the one to be connected to the second flow passage 43, while FIG. 5 shows a state where the first flow passage 39 having a relatively small cross-sectional area of ​​the outlet-side flow passage 41 (opening area of ​​the openings 411) is selected as the one to be connected to the second flow passage 43. As shown in FIG. 4, by selecting the first flow passage 39 having a relatively large cross-sectional area as the first flow passage 39 arranged at the position to be connected to the second flow passage 43, the flow rate of the cutting water M supplied from the nozzle unit 30 can be increased.

[0058] The adjustment to decrease the flow rate of the cutting water M to be supplied can also be achieved, for example, by installing a valve that throttles the flow rate midway in the fluid supply pipe 50. On the other hand, the adjustment to increase the flow rate of the cutting water M to be supplied requires switching to a first flow path 39 with a larger cross-sectional area, because the cross-sectional area of ​​the first flow path 39 becomes a bottleneck that limits the increase in flow rate. Therefore, the nozzle unit 30 of this embodiment, which can easily switch to a first flow path 39 with a different cross-sectional area, is highly useful.

[0059] Furthermore, by changing the connection destination of second flow path 43 from first flow path 39 (see FIG. 4) having a relatively large cross-sectional area (opening area of ​​opening 411) to first flow path 39 (see FIG. 5) having a relatively small cross-sectional area (opening area of ​​opening 411) without changing the flow rate of cutting water supplied from fluid supply source 51, it is possible to change the supply conditions and increase the water pressure of cutting water M sprayed from nozzle unit 30. Since the water pressure is increased by changing the shape of first flow path 39 itself, which sprays cutting water M, the water pressure of cutting water M can be managed more accurately and efficiently than in a configuration in which the flow path area is changed via a valve or the like midway through the flow path.

[0060] When changing the reach of the cutting water M delivered from the nozzle unit 30 or the water pressure distribution of the cutting water M within the reach, a first block 32 having multiple first flow paths 39 with different inner shapes (contours) of the opening 411 is used as shown in Figure 8, and the first flow path 39 that matches the desired fluid supply conditions is connected to the second flow path 43.

[0061] For example, when it is required to supply cutting water M from the nozzle unit 30 over a range extending in the Z-axis direction, the first flow path 39 having the second vertically elongated opening 411 from the right among the four first flow paths 39 shown in FIG. 8 is connected to the second flow path 43. When it is required to supply cutting water M over a range extending in the Y-axis direction from the nozzle unit 30, the first flow path 39 having the rightmost horizontally elongated opening 411 among the four first flow paths 39 shown in FIG. 8 is connected to the second flow path 43. Furthermore, when the first flow path 39 having the leftmost diamond-shaped opening 411 among the four first flow paths 39 shown in FIG. 8 is used, the range over which the cutting water M spreads and the water pressure distribution of the cutting water M after spraying around the opening 411 differ from each other. Therefore, by appropriately selecting the first flow path 39 to be connected to the second flow path 43, it is possible to meet the desired supply conditions of cutting water M.

[0062] As described above, the nozzle unit 30 includes the first block 32 and the second block 33 that are movable relative to each other. The first block 32 is provided with a plurality of first flow paths 39 that have different shapes and that supply cutting water as a fluid. The second block 33 is provided with a second flow path 43 that connects to at least one of the plurality of first flow paths 39 and to the fluid supply source 51. The relative movement of the first block 32 and the second block 33 allows the first flow path 39 that is connected to the second flow path 43 to be changed, and the fluid supply source 51 can be selectively connected to a desired first flow path 39.

[0063] In this way, in the nozzle unit 30, the first flow path 39 connected to the fluid supply source 51 can be changed by moving the first block 32 and the second block 33 relatively in the Y-axis direction, thereby easily changing the supply conditions of the cutting water M. Because the fluid supply pipe 50 is connected to the second flow path 43 of the second block 33, which is fixed to the support block 31, the connection position of the fluid supply pipe 50 with respect to the nozzle unit 30 does not change when changing the first flow path 39 to be used, and the first flow path 39 can be switched with just a simple operation inside the nozzle unit 30.

[0064] From the viewpoint of keeping the cutting water injection position of the nozzle unit 30 relative to the cutting blade 12 constant, it is preferable to have a configuration like the nozzle unit 30 of this embodiment in which the first block 32 moves in the Y-axis direction relative to the second block 33 without moving the second block 33 in the Y-axis direction relative to the blade cover 27. In other words, when changing the first flow path 39 connected to the second flow path 43, it is preferable to change the position of the first flow path 39 without changing the position of the second flow path 43.

[0065] However, the present invention is not limited to the configuration of this embodiment, and the first flow path to which the second flow path is connected can be switched by moving the second block without moving the first block. Alternatively, both the first block and the second block can move, and the first flow path to which the second flow path is connected can be switched depending on the difference in the amount of movement between them.

[0066] When the connecting flow path 49 of the connecting member 46 is used to connect the first flow path 39 and the second flow path 43, as in the nozzle unit 30 of this embodiment, it is expected that an operator will manually attach and detach the connecting member 46. On the other hand, in the case of a configuration in which the first flow path 39 and the second flow path 43 are connected without the connecting flow path 49 of the connecting member 46 (the configuration as shown in FIG. 6), it is also possible to switch the first flow path 39 to be used by relatively moving the first block 32 and the second block 33 in the Y-axis direction using a motor-driven drive mechanism, an air cylinder, or the like.

[0067] The nozzle unit 30 of this embodiment is configured so that the second flow path 43 is connected to only one of the multiple first flow paths 39. However, the nozzle unit may be configured so that the second flow path is simultaneously connected to two or more first flow paths, the number of which is less than the total number of the first flow paths, and so that fluid is simultaneously supplied from two or more first flow paths.

[0068] The nozzle unit 30 may include only one type of first block 32. Alternatively, as shown in FIGS. 7 and 8 , multiple types of first blocks 32 having different shapes of the multiple first flow paths 39 may be prepared, and a nozzle unit system may be configured in which the multiple types of first blocks 32 are interchangeable. By standardizing the fitting structure of the guide portion 36 in the guide space 35 of the support block 31 and the connection structure of the first flow path 39 in the second block 33 (e.g., connection via a connecting member 46) of the first blocks 32 to a common standard, multiple types of first blocks 32 can be established as an interchangeable nozzle unit system. The first blocks 32 have a structure that allows them to be easily replaced by inserting and removing the guide portion 36 into and from the guide space 35 of the support block 31. Therefore, even when multiple types of first blocks 32 are used, the switching operation can be easily performed.

[0069] The above embodiment is applied to a nozzle unit 30 for supplying cutting water to a cutting blade 12, which is a processing tool in a processing device 10, but the nozzle unit of the present invention is not limited to this use and can be applied as a nozzle for supplying fluid in any processing device that supplies fluid.

[0070] For example, in the field of processing equipment, the present invention can be applied to nozzles that supply grinding water to grinding wheels, which are processing tools in grinding machines, to change the grinding water supply conditions. Or, it can be applied to nozzles that supply polishing liquid (slurry) to polishing pads, which are processing tools in polishing machines, to change the polishing liquid supply conditions. It can also be applied to nozzles that supply water-soluble resin to wafers and other objects on which protective films are to be formed, in protective film forming devices, to change the water-soluble resin supply conditions. It can also be applied to nozzles that supply cleaning liquid or drying air to objects to be cleaned, in cleaning devices, to change the cleaning liquid or air supply conditions. It can also be applied to air nozzles that blow air when attaching sheets or tapes to wafers in protective member fixing devices, or to air nozzles in foreign matter removal devices that blow air to remove foreign matter from objects during transport, processing, or before processing, to change the air supply conditions for air blowing. It can also be applied to air nozzles that blow air to remove foreign matter from lenses and objects to be imaged in imaging devices, or to air nozzles that blow air to remove foreign matter from sensors and objects to be inspected in inspection devices. The application examples listed above are merely a portion of the possible applications, and it goes without saying that the present invention can be applied to other processing devices and nozzles for supplying fluids.

[0071] In addition to being installed in finished processing equipment, the nozzle unit of the present invention can also be used as a tool for checking the performance and effectiveness of nozzles during the design stage of equipment. Because the fluid supply conditions can be quickly changed by moving the first block and second block relative to each other, it is possible to more efficiently determine the performance and effectiveness of nozzles than by using methods that involve checking by changing various types of nozzles.

[0072] The embodiments of the present invention are not limited to the above-described embodiments and modifications, and may be variously changed, substituted, or modified without departing from the spirit of the technical idea of ​​the present invention. Furthermore, if the technical idea of ​​the present invention can be realized in a different way due to technological advances or other derived technologies, it may be implemented using that method. Therefore, the claims cover all embodiments that may fall within the scope of the technical idea of ​​the present invention. [Industrial Applicability]

[0073] As described above, according to the nozzle unit of the present invention, the fluid supply conditions can be easily changed by moving the first block and the second block relative to each other and connecting the desired first flow path to the second flow path, and optimized fluid supply can be achieved without much effort in various processing devices that supply fluids for various applications. [Explanation of symbols]

[0074] 10: Processing equipment 11: Wafer 12: Cutting blade (processing tool) 15: Chuck table 18:X-axis direction movement mechanism 22:Y-axis direction movement mechanism 23:Z-axis direction movement mechanism 25: Spindle 27: Blade cover 30: Nozzle unit 31: Support block 32: First Block 33: Second block 37: Base part 38: Nozzle part 39: First flow path 40: Inlet side flow path 41: Outlet side flow path 411 :Aperture 42: Fitting recess 43:Second flow path 45: Fitting protrusion 46: Connecting member 49: Connecting channel 50:Fluid supply pipe 51 :Fluid supply source M: Cutting water (fluid)

Claims

1. A nozzle unit for supplying a fluid, The nozzle unit comprises: a first block having a plurality of first flow paths with different shapes for supplying fluid; a second block having a second flow path connected to at least one of the first flow paths and a fluid supply source; The first block and the second block are movable relative to each other, A nozzle unit that supplies a fluid from the first flow path that is disposed at a position connected to the second flow path.

2. The nozzle unit according to claim 1, wherein the nozzle unit is installed in a processing device and supplies fluid to a processing tool.

3. 3. The nozzle unit according to claim 2, wherein the processing tool is a cutting blade.

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