Flexible contactor and method for manufacturing the same

Abstract

To provide a flexible contactor configured to allow various designs of properties suitable for mechanical and electrical connection and inspection in accordance with respective parts.SOLUTION: A flexible contactor that electrically connects a pad of an object to be inspected and a pad of an inspection device to each other, includes: a first elastic part that contains first conductive particles and is formed to be elastically deformable; and a second elastic part that is connected to the first elastic part in the longitudinal direction, contains second conductive particles, and is formed to be elastically deformable. At least one of physical properties including hardness, elastic modulus, and specific resistance differs between the first elastic part and the second elastic part. The flexible contactor minimizes an amount of deformation in a lateral direction intersecting the longitudinal direction. The first elastic parts are connected to both ends in the longitudinal direction of the flexible contactor, and the hardness and elastic modulus of the first elastic parts are higher than the hardness and elastic modulus of the second elastic part interposed between the first elastic parts.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a flexible contactor that electrically connects a pad of a device under test to a pad of a testing device, and a method for manufacturing the same. [Background technology]

[0002] When testing the performance of a semiconductor device, an interconnect structure is used to electrically connect the terminals of the pads of the device under test to the terminals of the pads of the testing equipment. The interconnect structure attached to the testing equipment contacts the pads of the device under test and transmits electricity, and the defective pads of the device under test are identified based on the returned signal.

[0003] The interconnection structure can transmit a test signal electrically while ensuring contact with a terminal of a pad of a device under test by using elastic force. Conventional interconnection structures use pogo pins, which include a hollow pipe, a spring positioned within the pipe, and at least one terminal that is movable while supported by the spring and the pipe. With this configuration, the pogo pin can transmit a test signal electrically while ensuring contact with a terminal of a pad of a device under test by using elastic force.

[0004] However, as the pitch between terminals of the pads of the device under test becomes smaller, the pogo pins also need to be manufactured in a smaller size. Furthermore, a design that can respond to the trend of miniaturization while simultaneously improving the accuracy of the test operation and preventing deformation and damage due to repeated use is required. Summary of the Invention [Problem to be solved by the invention]

[0005] An object of the present invention is to provide a flexible contactor that can be designed to have various properties suitable for mechanical and electrical connection and testing depending on the location.

[0006] Another object of the present invention is to provide a method for manufacturing a flexible contactor that can be designed in various shapes suitable for connection and inspection depending on the location, and that is configured so that long shapes can be easily manufactured.

[0007] However, the technical objectives to be achieved by this embodiment are not limited to those described above, and other technical objectives may exist. [Means for solving the problem]

[0008] In order to achieve the object of the present invention, a flexible contactor that electrically connects a pad of a test object and a pad of a testing device includes: a first elastic portion containing first conductive particles and formed to be elastically deformable; and a second elastic portion connected in parallel to the first elastic portion in the lengthwise direction, containing second conductive particles and formed to be elastically deformable, and the first elastic portion and the second elastic portion may be characterized in that at least one of physical properties including hardness, elastic modulus, and resistivity is different from each other.

[0009] In addition, to achieve the object of the present invention, a method for manufacturing a flexible contactor that electrically connects a pad of a test object and a pad of a testing device may include the steps of: filling a first liquid elastic portion containing first conductive particles into a first accommodating portion of a first mold; filling a second liquid elastic portion containing second conductive particles into a second accommodating portion of a second mold corresponding to the first accommodating portion; aligning a magnetic force concentrating member having magnetic pads formed at positions corresponding to the first accommodating portion and the second accommodating portion in the first and second molds that are aligned with each other; hardening the first elastic portion and the second elastic portion under preset pressure and temperature conditions; and separating the flexible contactor in which the first elastic portion and the second elastic portion are integrally formed from the first and second molds.

[0010] The above-described solutions are merely exemplary and should not be construed as limiting the present invention. In addition to the exemplary embodiments described above, there may be further embodiments described in the drawings and detailed description of the invention. [Effects of the Invention]

[0011] According to any of the above-mentioned means for solving the problems of the present invention, the hardness, elastic modulus, resistivity, and density of conductive particles suitable for mechanical and electrical connection and inspection can be variously designed depending on the part.

[0012] Furthermore, the flexible contactor according to the present invention can be designed in various shapes suitable for connection and inspection depending on the part, and can be configured to be easily manufactured in a long shape. That is, by extending the length of the contactor by stacking multiple elastic parts, it is possible to effectively manufacture a long-shaped contactor while maintaining a small cross-sectional area.

[0013] Therefore, the flexible contactor of the present invention can improve the accuracy of test operations while responding to the trend toward miniaturization, and can prevent deformation and damage due to repeated use. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a view showing a flexible contactor according to an embodiment of the present invention; [Figure 2] 10 is a view showing a flexible contactor according to another embodiment of the present invention; [Figure 3] 10 is a view showing a flexible contactor according to another embodiment of the present invention; [Figure 4] 10 is a view showing a flexible contactor and a housing according to still another embodiment of the present invention; [Figure 5] 10 is a view showing a flexible contactor and a housing according to still another embodiment of the present invention; [Figure 6]10 is a view showing a flexible contactor and a housing according to still another embodiment of the present invention; [Figure 7] 10 is a view showing a flexible contactor and a housing according to still another embodiment of the present invention; [Figure 8] 10 is a view showing a flexible contactor and a housing according to still another embodiment of the present invention; [Figure 9] 1 is a diagram showing a method for manufacturing a flexible contactor according to the present invention; [Figure 10] 10 is a diagram showing each step of a method for manufacturing the flexible contactor shown in FIG. 9. [Figure 11] 10 is a diagram showing each step of a method for manufacturing the flexible contactor shown in FIG. 9. [Figure 12] 10 is a diagram showing each step of a method for manufacturing the flexible contactor shown in FIG. 9. [Figure 13] 10 is a diagram showing each step of a method for manufacturing the flexible contactor shown in FIG. 9. [Figure 14] 10 is a diagram showing each step of a method for manufacturing the flexible contactor shown in FIG. 9. DETAILED DESCRIPTION OF THE INVENTION

[0015] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0023] The present invention will now be described in detail with reference to the accompanying drawings so that those skilled in the art can easily understand and practice the present invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. In the drawings, parts that are not relevant to the description are omitted in order to clearly explain the present invention, and similar parts are designated by similar reference numerals throughout the specification.

[0016] Throughout the specification, when a part is said to be "connected" to another part, this includes not only "directly connected" but also "electrically connected" with another element interposed therebetween. Furthermore, when a part is said to "comprise" a certain element, this does not mean excluding other elements, but may further include other elements, unless otherwise specified, and should be understood as not precluding the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0017] Hereinafter, an embodiment of the present invention will be described in detail with reference to the accompanying drawings.

[0018] 1 is a diagram showing a flexible contactor according to an embodiment of the present invention. Referring to FIG. 1, a flexible contactor 100 according to an embodiment of the present invention may be configured to include a first elastic portion 110 and a second elastic portion 120. The first elastic portion 110 may contain first conductive particles 111 and be elastically deformable, and the second elastic portion 120 may be connected to the first elastic portion 110 in a longitudinal direction, contain second conductive particles 121, and be elastically deformable.

[0019] The first elastic portion 110 and the second elastic portion 120 may include various types of polymeric materials. The first elastic portion 110 and the second elastic portion 120 may be formed from diene rubbers such as silicone, polybutadiene, polyisoprene, SBR, NBR, etc., and their hydrogen compounds, or may be formed from block copolymers such as styrene-butadiene block copolymer, styrene-isoprene block copolymer, etc., and their hydrogen compounds. Furthermore, the first elastic portion 110 and the second elastic portion 120 may be formed from materials such as chloroprene, urethane rubber, polyethylene-type rubber, epichlorohydrin rubber, ethylene-propylene copolymer, ethylene-propylene-diene copolymer, etc.

[0020] Here, the first elastic portion 110 and the second elastic portion 120 may differ from each other in at least one of physical properties including hardness, Young's modulus, and resistivity. For example, the hardness and modulus of the first elastic portion 110, which directly contacts the terminals of the pads of the device under test and the terminals of the pads of the testing device, may be designed to be higher than those of the second elastic portion 120, which is interposed between the first elastic portion 110. This not only improves the accuracy of the test operation but also prevents deformation or damage to both ends due to repeated use.

[0021] According to an embodiment of the present invention, the first conductive particles 111 and the second conductive particles 121 may differ from each other in at least one of material and size. For example, the first elastic part 110 including the first conductive particles 111 and the second elastic part 120 including the second conductive particles 121 may be designed to have different properties depending on the material and size of the conductive particles contained therein.

[0022] For example, the first conductive particles 111 and the second conductive particles 121 may be made of a single conductive metal material such as ferromagnetic iron, copper, zinc, chromium, nickel, silver, cobalt, or aluminum, or an alloy of two or more of these metal materials. The first conductive particles 111 and the second conductive particles 121 may also be manufactured by coating the surface of a core metal with a highly conductive metal such as gold, silver, rhodium, palladium, platinum, or silver and gold, silver and rhodium, or silver and palladium. Furthermore, the conductive particles 121 may further include MEMS tips, flakes, wires, carbon nanotubes (CNTs), graphene, etc. to improve conductivity.

[0023] Regarding the material of the conductive particles, the flexible contactor 100 according to one embodiment of the present invention may use nickel particles to effectively align the conductive particles, and may use copper particles when it is necessary to improve electrical conductivity. Furthermore, when silica-plated particles are used, it is advantageous for weight reduction. Considering these characteristics, the flexible contactor 100 according to the present invention may select different first conductive particles 111 and second conductive particles 121 for the first elastic portion 110 and the second elastic portion 120 depending on the position (layer).

[0024] Furthermore, regarding the size of the conductive particles, generally, large-sized conductive particles are advantageous in that they are easy to process and have excellent electrical conductivity. In contrast, small-sized conductive particles can be distributed relatively uniformly even inside a member with a small diameter, thereby increasing the hardness or elastic modulus of the member. In consideration of these characteristics, the flexible contactor 100 according to the present invention can distribute small-sized particles in locations (layers) where high hardness is required.

[0025] According to an embodiment of the present invention, the density at which the first conductive particles 111 are distributed in the first elastic portion 110 may be different from the density at which the second conductive particles 121 are distributed in the second elastic portion 120. For example, even if the sizes of the first conductive particles 111 and the second conductive particles 121 are the same, the densities at which they are distributed in the first elastic portion 110 and the second elastic portion 120 may be designed to be different, thereby allowing the hardness or elastic modulus of the first elastic portion 110 and the second elastic portion 120 to be designed to be different.

[0026] Referring to FIG. 1, a flexible contactor 100 according to an embodiment of the present invention may be characterized in that the first elastic portion 110 and the second elastic portion 120 have different cross-sectional shapes as viewed in the longitudinal direction. That is, the cross-sectional area of ​​the first elastic portion 110 as viewed in the longitudinal direction may be designed to be smaller than the cross-sectional area of ​​the second elastic portion 120 as viewed in the longitudinal direction. Since both ends in the longitudinal direction come into contact with a pad of a test object or a testing device, the first elastic portion 110 having a reduced particle size may be disposed to increase hardness. The first elastic portions 110 at both ends in the longitudinal direction may be formed to have a relatively smaller diameter, i.e., a smaller cross-sectional area, to accommodate fine-pitch pads.

[0027] Specifically, by making the diameter of both ends smaller than that of the center, interference with surrounding components can be avoided and leakage current between adjacent pins can be minimized. Furthermore, compared to when both ends are designed with a metallic material, by disposing the first elastic portion 110 containing the first conductive particles 111 at both ends as in the flexible contactor 100 of the present invention, elastic contact with pads and the like can be achieved, thereby suppressing damage to structures such as pads.

[0028] In contrast, the second elastic portion 120, which is disposed in the center where there is no interference from surrounding components, can be formed to have a relatively large diameter, i.e., a wide cross-sectional area, to eliminate contact instability in the electrical connection between the pad under test and the pad under test. That is, by disposing the second elastic portion 120 with larger particles in the center of the flexible contactor 100, the electrical conductivity required during testing can be ensured.

[0029] As described above, the flexible contactor 100 according to an embodiment of the present invention can satisfy various design requirements for probe pins by stacking components having different physical properties, such as the first elastic portion 110 and the second elastic portion 120. In other words, the first elastic portion 110 and the second elastic portion 120 having different physical properties can be arranged in accordance with a section (layer) that requires excellent hardness and a section (layer) that allows elastic deformation.

[0030] 2 and 3 are views showing a flexible contactor according to another embodiment of the present invention. Referring to (a) of Fig. 2, first elastic parts 110 are connected to both ends of the flexible contactor 100 in the longitudinal direction, and the size of the first conductive particles 111 may be smaller than the size of the second conductive particles 121.

[0031] For example, the flexible contactor 100 of FIG. 2 may have first elastic portions 110 including first conductive particles 111 with relatively small particle sizes disposed at both ends in the longitudinal direction, thereby ensuring the required hardness or elastic modulus when the flexible contactor 100 comes into contact with a terminal of a pad under test. The flexible contactor 100 of FIG. 2 may also have second elastic portions 120 including second conductive particles 121 with relatively large particle sizes disposed between the first elastic portions 110, thereby ensuring the required electrical conductivity during testing. In other words, the flexible contactor 100 of FIG. 2 has first elastic portions 110 with small particle sizes disposed at both ends that come into direct contact with the terminals of each pad, and second elastic portions 120 with large particle sizes disposed between the first elastic portions 110, thereby ensuring the required hardness, elastic modulus, electrical conductivity, etc. at each portion during testing.

[0032] 3, in the flexible contactor 100 according to an embodiment of the present invention, either one of the first elastic portion 110 and the second elastic portion 120 may be disposed spaced apart in the longitudinal direction with the other sandwiched therebetween. For example, each of the first elastic portion 110 and the second elastic portion 120 may have a structure in which they are stacked a plurality of times spaced apart from each other. In other words, a configuration in which the first elastic portion 110 and the second elastic portion 120 are alternately stacked in a plurality of layers in the longitudinal direction (vertical direction) is possible.

[0033] The flexible contactor 100 shown in Fig. 3 can adjust the position or size of elastic deformation by alternately arranging the first elastic portions 110 and the second elastic portions 120. Therefore, the flexible contactor 100 shown in Fig. 3, in which the first elastic portions 110 and the second elastic portions 120 are alternately arranged, has a smaller amount of lateral deformation (see Fig. 3(b)) than the flexible contactor 100 shown in Fig. 2, in which all the second elastic portions 120 are arranged in the center, thereby responding to the trend toward miniaturization and improving the accuracy of the test operation.

[0034] That is, the flexible contactor 100 according to the present invention can minimize volume expansion in the end direction (lateral direction) when the flexible contactor 100 is compressed during testing by distributing the positions where elastic deformation occurs at multiple positions. Specifically, referring to (b) of Figure 2 and (b) of Figure 3, when compression is applied to the flexible contactor 100 during testing, the flexible contactor 100 shown in Figure 3 may have a smaller amount of deformation than the flexible contactor 100 shown in Figure 2. Referring to (b) of Figure 3, the amount of deformation (E2) of volume expansion corresponding to the applied compression is smaller than the amount of deformation (E1) shown in (b) of Figure 2.

[0035] As described above, the flexible contactor 100 with minimized deformation can be tightly coupled to a housing that supports the flexible contactor 100 in the lateral direction, and the assembly tolerance with the housing can be effectively managed, thereby improving the accuracy of the test operation and suppressing deformation and damage due to repeated use.

[0036] 4 to 8 are views showing a flexible contactor and a housing according to another embodiment of the present invention. Referring to FIG. 4, the flexible contactor 100 according to the embodiment of the present invention has first elastic parts 110 including first conductive particles 111 having a relatively small particle size arranged not only at both ends in the length direction but also at the center, thereby improving the hardness of the flexible contactor 100.

[0037] According to one embodiment of the present invention, the flexible contactor 100 has improved rigidity by arranging the first elastic portion 110 at the center, and can reduce the amount of lateral deformation when contacting the terminal of the pad under test, thereby responding to the trend toward miniaturization and improving the accuracy of the test operation.

[0038] 5, the flexible contactor 100 according to an embodiment of the present invention is designed to be supported in only one direction (e.g., only from the bottom) within the housing 300, and the cross-sectional area of ​​the first elastic portion 110′ disposed at one end (e.g., the top end) in the longitudinal direction may be designed to be larger than the remaining first elastic portion 110 and second elastic portion 120. For example, the flexible contactor 100 shown in FIG. 5 may be designed such that the first elastic portion 110′ that contacts the terminal of the pad under test has a larger area than the remaining first elastic portion 110 and second elastic portion 120. Therefore, the flexible contactor 100 according to the present invention can eliminate unstable contact with the terminal of the pad under test by increasing the cross-sectional area, i.e., the diameter, of the first elastic portion 110′ that contacts the terminal of the pad under test and thereby increasing the contact surface area.

[0039] 6, the flexible contactor 100 according to an embodiment of the present invention is designed to be supported only in one direction (e.g., only upward) within the housing 300, and the cross-sectional area of ​​the first elastic portion 110′ disposed at the other end (e.g., the bottom end) in the length direction may be designed to be larger than the remaining first elastic portion 110 and second elastic portion 120. For example, the flexible contactor 100 according to FIG. 6 may be designed so that the first elastic portion 110′ that contacts the terminal of the test device pad has a larger area than the remaining first elastic portion 110 and second elastic portion 120. Therefore, the flexible contactor 100 according to the present invention can eliminate unstable contact with the terminal of the test device pad by increasing the cross-sectional area, i.e., the diameter, of the first elastic portion 110′ that contacts the terminal of the test device pad and thereby increasing the contact area.

[0040] 7, the flexible contactor 100 according to an embodiment of the present invention may be designed so that the first elastic portions 110 and the second elastic portions 120 are alternately stacked to form a step. For example, the flexible contactor 100 according to FIG. 7 may be designed so that the cross-sectional area in one direction, i.e., the diameter, gradually decreases as the first elastic portions 110 and the second elastic portions 120 are alternately stacked to form a step. Therefore, the flexible contactor 100 according to the present invention may gradually absorb and reduce the impact applied when the terminals of the pads under test and the terminals of the pads under test come into contact with each other.

[0041] 8, in the flexible contactor 100 according to an embodiment of the present invention, the cross-sectional area, i.e., diameter, of the first elastic portion 110 or the second elastic portion 120 disposed in a partial layer between both ends in the length direction may be designed to be smaller than the remaining first elastic portion 110 and second elastic portion 120. For example, in the flexible contactor 100 according to FIG. 8, the cross-sectional area of ​​the first elastic portion 110' disposed in a partial layer between both ends in the length direction may be designed to be smaller than the remaining first elastic portion 110 and second elastic portion 120. Therefore, the flexible contactor 100 according to FIG. 8 can be assembled by inserting it into the housing 300 in the length direction, making it easy to manufacture an assembly that is supported in both directions. In this case, the housing 300 has protruding rounded portions 301 corresponding to the partial layer, allowing the flexible contactor 100 to be easily inserted.

[0042] The flexible contactor 100 shown in FIGS. 4 to 8 has the first elastic portion 110 and the second elastic portion 120 alternately stacked to sufficiently ensure the hardness, elastic modulus, and electrical conductivity required in the testing process, thereby improving the accuracy of the testing operation. In addition, by distributing the positions where elastic deformation occurs to multiple positions, the volume expansion of the flexible contactor 100 when compressed in the testing process is minimized, allowing it to be tightly coupled to the housing 300, and the assembly tolerance of the housing 300 can be effectively managed.

[0043] Meanwhile, according to an embodiment of the present invention, the first elastic portion 110 and the second elastic portion 120 may be hardened by a phase change and integrally bonded to each other. For example, the first elastic portion 110 and the second elastic portion 120 may be formed to be integrally bonded to each other. For more details, a manufacturing method of the flexible contactor 100 in which the first elastic portion 110 and the second elastic portion 120 are formed to be integrally bonded will be discussed with reference to FIG. 9 and thereafter.

[0044] Figure 9 is a diagram showing a method for manufacturing a flexible contactor according to the present invention, and Figures 10 to 14 are diagrams showing each step of the method for manufacturing the flexible contactor shown in Figure 9. The method for manufacturing a flexible contactor (S100) shown in Figure 9 includes steps that are processed in chronological order according to the embodiments shown in Figures 1 to 8. Therefore, even if content is omitted below, it also applies to the method for manufacturing a flexible contactor (S100) according to the embodiments shown in Figures 1 to 8.

[0045] 10, the manufacturing method (S100) of the flexible contactor includes filling a first elastic portion 110 containing first conductive particles 111 in a first receiving portion 211 of a first mold 210 in step S110, and filling a second elastic portion 120 containing second conductive particles 121 in a second receiving portion 221 corresponding to the first receiving portion 211 of a second mold 220 in step S120. Here, the first mold 210 and the second mold 220 are manufacturing frames made of a metal or resin material for manufacturing the flexible contactor 100. For example, the first mold 210 and the second mold 220 may be made of a non-magnetic metal or resin. Examples include aluminum (Al) and Torlon.

[0046] In step S110, the first elastic portion 110 and the second elastic portion 120 may include first conductive particles 111 and second conductive particles 121. The first conductive particles 111 and the second conductive particles 121 may be arranged in the longitudinal direction of the first elastic portion 110 and the second elastic portion 120. The first conductive particles 111 and the second conductive particles 121 may be in contact with each other to provide conductivity in the longitudinal direction of the first elastic portion 110 and the second elastic portion 120. When pressure is applied to the first elastic portion 110 and the second elastic portion 120 in the longitudinal direction to test an electrical device under test, the first conductive particles 111 and the second conductive particles 121 may become closer to each other, and the electrical conductivity of the first elastic portion 110 and the second elastic portion 120 in the longitudinal direction may become higher.

[0047] 11, in step S130, the flexible contactor manufacturing method (S100) aligns and stacks a first mold and a second mold. For example, in step S130, a plurality of first elastic portions 110 and a plurality of second elastic portions 120 are aligned so as to be alternately stacked, and the thickness and cross-sectional shape of the first receiving portion 211 and the second receiving portion 221 may be variously prepared according to design requirements.

[0048] 10 and 11, the method for manufacturing a flexible contactor according to the present invention (S100) may include filling the first elastic portion 110 and the second elastic portion 120, respectively (S110, S120), and aligning the first mold 210 and the second mold 220 with each other (S130). Alternatively, the method for manufacturing a flexible contactor according to the present invention (S100) may include filling the first receiving portion 211 of the first mold 210 with the first elastic portion 110 (S110), aligning or stacking the second mold 220 with the first mold 210 (S130), and then filling the second receiving portion 221 with the second elastic portion 120 (S120).

[0049] 12, in step S140, magnetic force concentrating members 230, each having a magnetic pad 231 formed thereon, may be aligned on the aligned first mold 210 and second mold 220 at positions corresponding to the first receiving portion 211 and the second receiving portion 221. For example, the magnetic force concentrating member 230 may include a plurality of magnetic pads 231 arranged at regular intervals on the member. Here, the magnetic pads 231 may be made of a magnetic metal such as nickel (Ni), nickel-cobalt alloy (NiCo), or iron (Fe). In this case, the magnetic force concentrating member 230 may be made of a weakly magnetic material, thereby concentrating magnetic force on the magnetic pads 231.

[0050] In step S140, the magnetic force concentrating member 230 may be brought into close contact with the first mold 210 or the second mold 220 so that the first accommodating portion 211 or the second accommodating portion 221 is closed by the magnetic pad 231. For example, the magnetic force concentrating member 230 may be brought into close contact with the upper and lower ends of the first mold 210 in which the first accommodating portion 211 is filled with the first elastic portion 110 or the second mold 220 in which the second accommodating portion 221 is filled with the second elastic portion 120. The magnetic pad 231 is used to concentrate the magnetic force of the flexible contactor 100.

[0051] 13, in step S150, the method for manufacturing a flexible contactor (S100) may harden the first elastic portion 110 and the second elastic portion 120 under preset pressure and temperature conditions. In step S150 of hardening the first elastic portion 110 and the second elastic portion 120, at least one of heat and pressure may be applied to the first elastic portion 110 and the second elastic portion 120 by the magnetic force concentrating member 230.

[0052] For example, the first elastic portion 110 and the second elastic portion 120 may undergo a phase change due to at least one of the applied heat and pressure, and may be integrally bonded to the first elastic portion 110 and the second elastic portion 120. In step S150, the first elastic portion 110 or the second elastic portion 120 may be hardened by applying heat while applying pressure to the magnetic force concentrating member 230 that is in close contact with the first mold 210 or the second mold 220.

[0053] 14 , in step S160, the flexible contactor manufacturing method (S100) can separate the flexible contactor 100, in which the first elastic portion 110 and the second elastic portion 120 are integrally formed, from the first mold 210 and the second mold 220. For example, in step S160, first, the magnetic force concentrating member 230 that is in close contact with the first mold 210 or the second mold 220 is separated from the first mold 210 or the second mold 220. Thereafter, the flexible contactor 100, in which the first elastic portion 110 and the second elastic portion 120 are integrally formed, is separated from the first mold 210 and the second mold 220.

[0054] According to the flexible contactor manufacturing method S100 of the present invention, a multi-layer flexible contactor having a plurality of layers including a first elastic portion 110 and a second elastic portion 120 can be manufactured using a plurality of molds including a first mold 210 and a second mold 220. The flexible contactor manufacturing method (S100) of the present invention has the advantage that the first elastic portion 110 and the second elastic portion 120 can have the same physical properties, and even when the entire contactor is constructed of a single property, it is possible to manufacture contactors with different shapes for each layer compared to the prior art, and it is possible to manufacture long contactors with a fine thickness.

[0055] The flexible contactor manufacturing method (S100) of the present invention can remove a plurality of stacked first molds 210 and second molds 220 one layer at a time, so that the completed flexible contactor 100 can be separated without being damaged, and the flexible contactor 100 can be more easily separated from the first mold 210 and the second mold 220.

[0056] In the above description, steps S110 to S160 may be further divided into additional steps or combined into fewer steps depending on the embodiment of the present invention. Also, some steps may be omitted as necessary, or the order of steps may be reversed.

[0057] The above description of the present invention is for illustrative purposes only, and those skilled in the art will understand that the present invention can be easily modified into other specific forms without changing the technical spirit or essential features of the present invention. Therefore, it should be understood that the above-described embodiments are illustrative in all respects and not limiting. For example, each component described as a single component may be implemented in a distributed form, and similarly, each component described as a distributed component may be implemented in a combined form.

[0058] The scope of the present invention is indicated by the claims that follow rather than by the above detailed description, and all modifications and variations that fall within the meaning and scope of the claims and their equivalents should be interpreted as being included within the scope of the present invention.

Claims

1. A flexible contactor electrically connecting a pad of a device under test to a pad of a testing device, a first elastic portion containing first conductive particles and formed to be elastically deformable; and a second elastic portion connected to the first elastic portion in a longitudinal direction, containing second conductive particles, and formed to be elastically deformable; The first elastic portion and the second elastic portion differ from each other in at least one of physical properties including hardness, elastic modulus, and resistivity, The flexible contactor has a minimal amount of deformation in a lateral direction transverse to the longitudinal direction, the first elastic portion is connected to both ends of the flexible contactor in the length direction, A flexible contactor, characterized in that the hardness and modulus of elasticity of the first elastic portions are higher than the hardness and modulus of elasticity of the second elastic portions interposed between the first elastic portions.

2. The flexible contactor according to claim 1 , wherein the first conductive particles and the second conductive particles are different from each other in at least one of material and size.

3. 2. The flexible contactor of claim 1, wherein the density at which the first conductive particles are distributed in the first elastic portion is different from the density at which the second conductive particles are distributed in the second elastic portion.

4. The flexible contactor according to claim 1 , wherein the first elastic portion and the second elastic portion have different cross-sectional shapes when viewed in the length direction.

5. 2. The flexible contactor of claim 1, wherein the size of the first conductive particles is smaller than the size of the second conductive particles.

6. 2. The flexible contactor according to claim 1, wherein the first elastic portion and the second elastic portion are hardened by a phase change and integrally bonded to each other.

7. A method for manufacturing a flexible contactor that electrically connects a pad of a device under test and a pad of a testing device, comprising: Filling a first container of a first mold with a liquid first elastic portion containing first conductive particles; filling a second receiving portion of the second mold corresponding to the first receiving portion with a liquid second elastic portion containing second conductive particles; aligning magnetic force concentrating members, each having a magnetic pad formed thereon, at positions corresponding to the first receiving portion and the second receiving portion on the first mold and the second mold that are aligned with each other; curing the first elastic portion and the second elastic portion under preset pressure and temperature conditions; and separating the flexible contactor, in which the first elastic portion and the second elastic portion are integrally formed, from the first mold and the second mold; The flexible contactor has a minimal amount of deformation in a lateral direction transverse to the longitudinal direction, the first elastic portion is connected to both ends of the flexible contactor in the length direction, A method for manufacturing a flexible contactor, characterized in that the hardness and modulus of elasticity of the first elastic portion are higher than the hardness and modulus of elasticity of the second elastic portion interposed between the first elastic portions.

8. further comprising aligning the first mold and the second mold with respect to one another; 8. The method for manufacturing a flexible contactor according to claim 7, wherein the step of aligning the first mold and the second mold with each other is performed after the step of filling the first elastic portion and the step of filling the second elastic portion, or after the step of filling the first elastic portion and before the step of filling the second elastic portion.

9. 8. The method for manufacturing a flexible contactor according to claim 7, wherein in the step of hardening the first elastic portion and the second elastic portion, at least one of heat and pressure is applied to the first elastic portion and the second elastic portion by the magnetic force concentrating member.

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