Probe and inspection socket

Abstract

To provide a probe and an inspection socket that ensure reliable electrical conduction between a barrel and a housing and do not require high dimensional accuracy in manufacturing.SOLUTION: The present invention relates to a ground probe 300 to be inserted through a through-hole 40 formed in a housing 11 and defined by a metallic inner peripheral wall, and the probe 300 includes: a probe body 301 having a tubular main barrel 330 extending in the direction of an axis X and plungers 310 and 320 accommodated in the main barrel 330; and a conduction barrel 340 through which the main barrel 330 is inserted in the direction of the axis X, the conduction barrel 340 having a plate spring portion 342 elastically contacting the main barrel 330 and / or the inner peripheral wall.SELECTED DRAWING: Figure 23

Description

[Technical Field]

[0001] The present invention relates to a probe and a testing socket. [Background technology]

[0002] When testing devices that require high-speed transmission, a test socket having three types of pins (probes)—signal pins, power pins, and ground pins—is sometimes used.

[0003] The ground pin electrically connects the ground terminal of the testing device and the ground terminal of the test board to the housing as the ground, and an example of this is described in Patent Document 1, for example.

[0004] As an example other than that disclosed in Patent Document 1, there is a configuration in which the gap between the ground pin and the inner wall defining the through hole through which the ground pin is inserted is made small so that they come into contact with each other, thereby achieving electrical continuity between them. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Patent No. 4550564 Summary of the Invention [Problem to be solved by the invention]

[0006] The ground pin needs to ensure reliable electrical continuity with the ground, but a structure that reduces the gap between the ground pin and the inner wall that defines the through hole raises concerns that contact may become unstable, and requires high dimensional precision for the ground pin and through hole, making it unsuitable for mass production.

[0007] SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a probe and an inspection socket that ensure electrical continuity between the barrel and the housing and that do not require high dimensional precision in their manufacture. [Means for solving the problem]

[0008] In order to solve the above problems, the probe and the inspection socket of the present invention employ the following means. That is, the probe according to the first reference aspect of the present invention is a grounding probe that is formed in a housing and inserted into a through hole defined by a metal inner wall, and comprises a barrel having a cylindrical wall portion extending in the axial direction, and a plunger housed in the barrel, and the barrel has a contact portion where a part of the cylindrical wall portion elastically contacts the inner wall.

[0009] In the probe according to this aspect, the barrel has a contact portion where a part of the cylindrical wall elastically contacts the metal inner circumferential wall, so that even if there is a gap between the barrel and the inner circumferential wall that defines the through hole, the barrel can be reliably brought into contact with the housing, thereby ensuring electrical continuity between the barrel and the housing. Furthermore, because the contact portion elastically contacts the inner peripheral wall, even if the gap between the inner peripheral wall and the barrel is not constant due to dimensional errors of the through hole or barrel, this error can be absorbed, and therefore high dimensional accuracy is not required in forming the through hole or manufacturing the barrel.

[0010] In the probe according to the first reference aspect of the present invention, the contact portion is formed in a plurality of portions in the circumferential direction with respect to the axis.

[0011] According to the probe of this aspect, a plurality of contact portions are formed in the circumferential direction about the axis, so that the number of electrical contact points between the barrel and the housing can be increased. Furthermore, for example, when the contact portions are provided at equal angular intervals in the circumferential direction, the probe and the through-hole can be arranged coaxially.

[0012] In the probe according to the first reference aspect of the present invention, the contact portions are formed at a plurality of locations along the direction of the axis.

[0013] In the probe according to this aspect, the contact portions are formed at multiple locations along the axis, which prevents the axis of the probe from tilting relative to the through hole. Furthermore, even if one through hole is formed across multiple housings, electrical continuity can be established with all of the housings.

[0014] In the probe according to the first reference aspect of the present invention, the contact portion is a cantilevered leaf spring that is cut and raised outward in the radial direction relative to the axis.

[0015] According to the probe of this aspect, the contact portion is a cantilevered leaf spring cut and raised outward in the radial direction relative to the axis, so that the contact portion can be formed with a simple configuration.

[0016] Furthermore, a probe according to a second aspect of the present invention is a grounding probe that is formed in a housing and inserted into a through hole defined by a metal inner wall, and includes a probe body having a cylindrical main barrel extending in an axial direction and a plunger housed in the main barrel, and a conductive barrel through which the main barrel is inserted in the axial direction, wherein the main barrel has an expanded diameter portion in a partial section along the axial direction, and the conductive barrel has a slit along the axial direction, and the conductive barrel is fitted into the expanded diameter portion in an elastically deformed state and fixed to the main barrel.

[0017] In the probe according to this aspect, the main barrel has an expanded diameter portion in a partial section along the axial direction, the conductive barrel has a slit along the axial direction, and the conductive barrel is inserted into the expanded diameter portion in an elastically deformed state and fixed to the main barrel, so that the main barrel and the housing can be reliably brought into contact via the conductive barrel that is elastically deformed so as to expand at the expanded diameter portion, thereby ensuring electrical continuity between the main barrel and the housing. Furthermore, if the diameter of the enlarged portion is the same, a common conductive barrel can be fitted to probe bodies of different lengths.

[0018] Furthermore, a probe according to a first aspect of the present invention is a grounding probe that is formed in a housing and inserted into a through hole defined by a metal inner wall, and includes a probe body having a cylindrical main barrel extending in an axial direction and a plunger housed in the main barrel, and a conductive barrel through which the main barrel is inserted in the axial direction, and the conductive barrel has a contact portion that elastically contacts the main barrel and / or the inner wall.

[0019] In the probe according to this aspect, the conductive barrel has a contact portion that elastically contacts the main barrel and / or the inner circumferential wall, so that even if there is a gap between the main barrel and the inner circumferential wall that defines the through hole, the main barrel can be reliably brought into contact with the housing, thereby ensuring electrical continuity between the main barrel and the housing. Furthermore, because the contact portion elastically contacts the main barrel and / or the inner circumferential wall, even if the gap between the inner circumferential wall and the main barrel is not constant among individual barrels due to dimensional errors of the through hole or the main barrel, this error can be absorbed. As a result, high dimensional accuracy is not required in forming the through hole or manufacturing the main barrel.

[0020] In the probe according to the first aspect of the present invention, the conductive barrel has a slit along the axial direction.

[0021] In the probe according to this aspect, the conductive barrel has a slit along the axial direction, so that the diameter of the conductive barrel can be easily enlarged or reduced by elastic deformation, which allows the conductive barrel to be easily press-fitted into the main barrel or through-hole. Furthermore, even if the inner diameter of the through hole or the outer diameter of the main barrel are not constant among individual pieces due to dimensional errors, these errors can be absorbed, and therefore high dimensional accuracy is not required in forming the through hole or manufacturing the main barrel.

[0022] Furthermore, in the probe according to the first aspect of the present invention, the main barrel has an expanded diameter portion in a section along the axial direction, and the conductive barrel is fitted into the expanded diameter portion in an elastically deformed state and fixed to the main barrel.

[0023] According to the probe of this aspect, the main barrel has an expanded diameter portion in a section along the axial direction, and the conductive barrel is inserted into the expanded diameter portion in an elastically deformed state and fixed to the main barrel, thereby ensuring reliable contact between the main barrel and the conductive barrel.

[0024] In the probe according to the first aspect of the present invention, the contact portion is formed in plurality in the circumferential direction about the axis.

[0025] According to the probe of this aspect, a plurality of contact portions are formed in the circumferential direction about the axis, so that the number of electrical contact points between the barrel and the housing can be increased. Furthermore, for example, when the contact portions are provided at equal angular intervals in the circumferential direction, the probe and the through-hole can be arranged coaxially.

[0026] In the probe according to the first aspect of the present invention, the contact portion is a cantilevered leaf spring.

[0027] According to the probe of this aspect, the contact portion is a cantilevered leaf spring, so that the contact portion can be formed with a simple configuration.

[0028] In the probe according to the first and second aspects of the present invention, the enlarged diameter portion has a tapered shape in which the outer diameter gradually increases along the axial direction.

[0029] According to the probe of this aspect, the enlarged diameter portion has a tapered shape in which the outer diameter gradually increases along the axial direction, and therefore can be easily fitted into the conductive barrel.

[0030] Furthermore, an inspection socket according to a third aspect of the present invention includes the probe according to any one of the first, first, and second aspects, and the housing in which the through hole is formed. [Effects of the Invention]

[0031] According to the present invention, it is possible to provide a probe and an inspection socket that ensure electrical continuity between the barrel and the housing and that do not require high dimensional precision in their manufacture. [Brief explanation of the drawings]

[0032] [Figure 1] 1A and 1B are a front view and a cross-sectional view of an inspection socket equipped with a probe according to a first reference embodiment of the present invention. [Figure 2] FIG. 10 is a front view of a probe according to a first reference embodiment. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III shown in FIG. 2. [Figure 4] FIG. 4 is a vertical cross-sectional view taken along line IV-IV shown in FIG. [Figure 5] FIG. 2 is a front view of the probe housed in the housing. [Figure 6] FIG. 10 is a front view of a probe according to a first modified example of the first reference embodiment. [Figure 7] FIG. 7 is a vertical cross-sectional view taken along line VII-VII shown in FIG. [Figure 8] FIG. 10 is a front view of a probe according to a second modification of the first reference embodiment. [Figure 9] FIG. 2 is a front view of the probe main body according to the first embodiment. [Figure 10] FIG. 2 is a front view of the conductive barrel according to the first embodiment. [Figure 11] FIG. 11 is a cross-sectional view taken along the line XI-XI shown in FIG. [Figure 12] FIG. 10 is a vertical cross-sectional view of the upper housing in which the conductive barrel is installed. [Figure 13] FIG. 10 is a longitudinal cross-sectional view of an upper housing in which a probe is installed. [Figure 14]FIG. 2 is a longitudinal cross-sectional view of a housing in which a probe is installed. [Figure 15] FIG. 10 is a front view of a conductive barrel according to a modified example of the first embodiment. [Figure 16] FIG. 10 is a plan view of a conductive barrel according to another modified example of the first embodiment. [Figure 17] FIG. 10 is a front view of a conductive barrel according to another modified example of the first embodiment. [Figure 18] FIG. 10 is a front view of a conductive barrel according to another modified example of the first embodiment. [Figure 19] FIG. 10 is a front view of a probe main body according to a second embodiment. [Figure 20] FIG. 10 is a front view of a conductive barrel according to a second embodiment. [Figure 21] 21 is a side view of the conductive barrel as seen from the direction A shown in FIG. 20. [Figure 22] FIG. 10 is a vertical cross-sectional view of the upper housing in which the conductive barrel is installed. [Figure 23] FIG. 10 is a longitudinal cross-sectional view of an upper housing in which a probe is installed. [Figure 24] 24 is a view seen from the direction B shown in FIG. 23. [Figure 25] FIG. 10 is a vertical cross-sectional view of a housing in which a conductive barrel according to a first modified example of the second embodiment is installed. [Figure 26] FIG. 10 is a longitudinal sectional view showing a conductive barrel according to a second modification of the second embodiment. [Figure 27] FIG. 10 is a front view of a conductive barrel according to a third embodiment. [Figure 28] FIG. 10 is a vertical cross-sectional view of the upper housing in which the conductive barrel is installed. [Figure 29] FIG. 10 is a longitudinal cross-sectional view of an upper housing in which a probe is installed. [Figure 30] FIG. 2 is a longitudinal cross-sectional view of a housing in which a probe is installed. [Figure 31] FIG. 11 is a plan view of a conductive barrel according to a modified example of the third embodiment. [Figure 32] FIG. 11 is a front view of a conductive barrel according to another modified example of the third embodiment. [Figure 33]FIG. 11 is a front view of a conductive barrel according to another modified example of the third embodiment. [Figure 34] FIG. 10 is a front view of a conductive barrel according to a fourth embodiment. [Figure 35] FIG. 10 is a vertical cross-sectional view of the upper housing in which the conductive barrel is installed. [Figure 36] 10 is a conceptual diagram showing the movement of a conductive barrel due to the insertion of a probe body. FIG. [Figure 37] FIG. 10 is a longitudinal cross-sectional view of an upper housing in which a probe is installed. [Figure 38] FIG. 13 is a front view of a probe according to a first modified example of the fourth embodiment (a longitudinal cross-sectional view of only the conductive barrel). [Figure 39] FIG. 13 is a cross-sectional view of a conductive barrel according to a first modified example of the fourth embodiment. [Figure 40] FIG. 10 is a longitudinal cross-sectional view of an upper housing in which a probe is installed. [Figure 41] FIG. 10 is a front view of a main barrel on which a flange portion is formed in Modification 1. [Figure 42] FIG. 13 is a vertical cross-sectional view of an upper housing in which a conductive barrel according to a second modification of the fourth embodiment is installed. DETAILED DESCRIPTION OF THE INVENTION

[0033] [Reference First Embodiment] A probe and an inspection socket according to a first reference embodiment of the present invention will be described below with reference to the drawings.

[0034] [Inspection socket overview] The inspection socket 10 (hereinafter simply referred to as "socket 10") will be outlined below. As shown in FIG. 1, the socket 10 is a component that provides electrical continuity between a printed wiring board (test board) 20 and an IC package (semiconductor package) 30 during testing of the IC package 30. The socket 10 is mounted on the top surface of a printed wiring board 20 . The IC package 30 is mounted in a recess 12a formed in a movable base 12 of the socket 10.

[0035] The IC package 30 may be of a BGA (Ball Grid Array) type, or may be of an LGA (Land Grid Array) type or a QFP (Quad Flat Package) type.

[0036] The socket 10 includes a probe 100, a housing 11 having an upper housing 11A and a lower housing 11B, and a movable base 12.

[0037] In the socket 10, the housing 11 is disposed on the printed wiring board 20 side, and the movable base 12 is disposed so as to be stacked on top of the housing 11 (upper housing 11A).

[0038] A base spring 13 is interposed between the housing 11 (upper housing 11A) and the movable base 12, and biases the two components in directions separating them from each other. This allows the movable base 12 to elastically move toward and away from the housing 11. In detail, when no load is applied, the movable base 12 moves away from the housing 11, and when the movable base 12 is pressed toward the housing 11, the movable base 12 moves closer to the housing 11.

[0039] The housing 11 has an upper housing 11A and a lower housing 11B, and is configured so that the upper housing 11A is stacked on the lower housing 11B.

[0040] The housing 11 has a through hole 40 defined by the upper housing 11A and the lower housing 11B, and the barrel 130 of the probe 100 is housed in this through hole 40. For ease of explanation, the probe 100 is not shown in the through-hole 40 (the through-hole 40 on the left side) shown in FIG.

[0041] [Probe Details] The detailed structure of the probe 100 will be described below. There are three types of probes 100: signal pins, power pins, and ground pins. The probe 100 of this embodiment relates to a ground probe that electrically connects the ground terminal of the IC package 30 and the ground terminal of the printed wiring board 20 to the housing 11, which serves as the ground.

[0042] As shown in FIG. 2, the probe 100 includes a barrel 130, an upper plunger 110, a lower plunger 120, and a spring (not shown).

[0043] 2 and 3, the barrel 130 has a cylindrical wall portion extending in the direction of the axis X. The barrel 130 is made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) that has been plated (hard Au plating with Ni as the base)). The barrel 130 accommodates the base end portion of the upper plunger 110, the base end portion of the lower plunger 120, and a spring. The upper plunger 110 and the lower plunger 120 are made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) or carbon tool steel plated (hard Au plating with a Ni base), or a Pd alloy). The spring is made of metal (for example, piano wire or SUS wire plated (hard Au plating with a Ni base)). In the case of SUS wire, the Ni plating as a base can be omitted.

[0044] Here, the base end of the upper plunger 110 refers to the end opposite the tip portion that contacts the IC package 30. Also, the base end of the lower plunger 120 refers to the end opposite the tip portion that contacts the printed wiring board 20.

[0045] The upper plunger 110 and the lower plunger 120 are biased by a spring in directions away from each other, and are configured to be slidable relative to the barrel 130. In other words, the probe 100 shown in Fig. 2 is a so-called double-side sliding type probe.

[0046] In the probe 100 configured as above, the barrel 130 is formed with a leaf spring portion 131 . As shown in Figures 2 to 4, the leaf spring portion 131 is a portion that protrudes outward in the radial direction relative to the axis X by cutting and raising a part of the cylindrical wall portion that constitutes the barrel 130, and functions as a cantilevered leaf spring whose fulcrum is connected to the barrel 130.

[0047] In the figure, the leaf spring portion 131 is cut and raised in the direction of the axis X. In other words, when the fulcrum of the leaf spring is the base end, the leaf spring portion 131 is cut and raised so that the tip end and base end are arranged along the direction of the axis X.

[0048] As shown in FIG. 5, when the barrel 130 is housed in the through hole 40 formed in the housing 11, the leaf spring portion 131 elastically contacts the inner circumferential wall that defines the through hole 40. Here, the inner peripheral wall defining the through-hole 40 is made of metal and is electrically connected to ground. The housing 11 may also be made of metal. This allows electrical continuity between the barrel 130 and the housing 11 via the leaf spring portion 131.

[0049] 2, 3 and 5, it is preferable that a plurality of leaf spring portions 131 are formed at equal angular intervals in the circumferential direction about the axis X. This allows the probe 100 and the through-hole 40 to be arranged coaxially.

[0050] Furthermore, it is preferable that the leaf spring portions 131 are formed at a plurality of locations along the direction of the axis X. This makes it possible to prevent the axis X of the probe 100 from tilting with respect to the through-hole 40. Furthermore, even when one through hole 40 is formed across multiple divided housings 11, as in this embodiment, electrical continuity can be achieved with all of the housings 11 (here, both the upper housing 11A and the lower housing 11B).

[0051] The direction in which the tip of the leaf spring portion 131 faces is determined by the direction in which the barrel 130 is inserted into the housing 11 / the direction in which the housing 11 is fitted into the barrel 130.

[0052] Specifically, the top two leaf spring portions 131 shown in Fig. 5 have their tips facing downward so that the barrel 130 can be easily inserted into the upper housing 11A (so that the tips do not get caught on the upper housing 11A). On the other hand, the bottom leaf spring portion 131 shown in Fig. 5 has its tip facing upward so that the lower housing 11B can be easily fitted into the barrel 130 (so that the tips do not get caught on the lower housing 11B).

[0053] [Variation 1] 6 and 7, the leaf spring portion 131 is cut and raised in the circumferential direction relative to the axis X. In other words, when the fulcrum of the leaf spring is the base end, the leaf spring portion 131 is cut and raised so that the tip and base ends are arranged on a plane perpendicular to the axis X.

[0054] [Variation 2] As shown in FIG. 8, the lower plunger 120 and the barrel 130 may be integrated together, and then a leaf spring portion 131 may be formed on the barrel 130 (including the portion corresponding to the lower plunger 120).

[0055] According to this embodiment, the following effects are achieved. That is, barrel 130 has leaf spring portion 131, where a portion of the cylindrical wall elastically contacts the metal inner circumferential wall (the inner circumferential wall that defines through-hole 40), so even if there is a gap between barrel 130 and the inner circumferential wall that defines through-hole 40, barrel 130 can be reliably brought into contact with housing 11. This ensures electrical continuity between barrel 130 and housing 11.

[0056] Furthermore, because the leaf spring portion 131 elastically contacts the inner circumferential wall that defines the through hole 40, even if the gap between the inner circumferential wall that defines the through hole 40 and the barrel 130 is not constant for each individual through hole 40 or barrel 130 due to dimensional errors of the through hole 40 or barrel 130, this error can be absorbed. Therefore, high dimensional accuracy is not required in forming the through hole 40 or manufacturing the barrel 130.

[0057] Furthermore, for example, when the leaf spring portions 131 are provided at equal angular intervals in the circumferential direction, the probe 100 and the through-hole 40 can be arranged coaxially.

[0058] Furthermore, when the leaf spring portions 131 are formed at multiple locations along the direction of the axis X, it is possible to prevent the axis X of the probe 100 from tilting with respect to the through-hole 40. Furthermore, even when one through-hole 40 is formed across the housings 11A and 11B, electrical continuity with the housings 11A and 11B can be achieved.

[0059] [First embodiment] A probe and an inspection socket according to a first embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the probe 200 is accommodated in the housing 11 of the socket 10, similar to the probe 100 according to the first reference embodiment.

[0060] The probe 200 comprises a probe body 201 having a main barrel 230, an upper plunger 210, a lower plunger 220 and a spring (not shown) as shown in FIG. 9, and a conductive barrel 240 as shown in FIG.

[0061] The configurations of the upper plunger 210, the lower plunger 220, and the spring are similar to those of the upper plunger 110, the lower plunger 120, and the spring of the first reference embodiment.

[0062] 9, the main barrel 230 is a cylindrical member extending in the direction of the axis X. The main barrel 230 is made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) that has been plated (hard Au plating with Ni as the base)).

[0063] The main barrel 230 is integrally formed with a flange portion (expanded diameter portion) 232 whose diameter is partially expanded. The flange portion 232 is formed in a partial section of the approximate center portion along the extension direction of the main barrel 230 . The flange portion 232 has a tapered shape in which the outer diameter gradually increases along the X-axis direction.

[0064] 10 and 11, the conductive barrel 240 is a cylindrical member extending in the direction of the axis X, with a slit 241 formed in it. The conductive barrel 240 is made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) that has been plated (hard Au plating with Ni as the base)).

[0065] The slit 241 is formed along the direction of the axis X and from the upper end to the lower end of the conductive barrel 240. Therefore, the cross-sectional shape of the slit 241 is C-shaped regardless of the position (see FIG. 11).

[0066] As shown in FIG. 12, the conductive barrel 240 is inserted into the large diameter portion 41A of the through-hole 40 formed in the upper housing 11A.

[0067] As shown in FIG. 13, by inserting the probe body 201 into the upper housing 11A into which the conductive barrel 240 is press-fitted, the flange portion 232 of the main barrel 230 is press-fitted into the conductive barrel 240.

[0068] At this time, the conductive barrel 240 in which the slit 241 is formed is elastically deformed radially outward by the flange portion 232 of the main barrel 230, so that the conductive barrel 240 and the inner peripheral wall that defines the through hole 40 come into reliable contact with each other. This results in the probe 200 being electrically connected to the housing 11 via the conductive barrel 240 .

[0069] Thereafter, as shown in FIG. 14, the lower housing 11B is attached from below the probe 200, thereby completing the probe 200 in which the main barrel 230 and the conductive barrel 240 are housed in the through-hole 40.

[0070] [Variations] As shown in FIGS. 15 to 18, a plate spring portion 242 may be formed on the conductive barrel 240. The leaf spring portion 242 is a portion that protrudes outward from the conductive barrel 240 in the radial direction relative to the axis X, and functions as a cantilevered leaf spring with a fulcrum connected to the conductive barrel 240 . By forming the leaf spring portion 242, the contact between the conductive barrel 240 and the inner circumferential wall that defines the through-hole 40 is further improved.

[0071] According to this embodiment, the following effects are achieved. That is, the main barrel 230 has a flange portion 232 in a partial section along the direction of the axis X, the conductive barrel 240 has a slit 241 along the direction of the axis X, and the conductive barrel 240 is inserted into the flange portion 232 in an elastically deformed state and fixed to the main barrel 230, so that the main barrel 230 and the housing 11 can be reliably brought into contact with each other via the conductive barrel 240 that has elastically deformed so as to expand at the flange portion 232. This ensures electrical continuity between the main barrel 230 and the housing 11.

[0072] Furthermore, if the diameter of the flange portion 232 is the same, the common conductive barrel 240 can be fitted to probe bodies 201 of different lengths.

[0073] In addition, when a conductive barrel 240 having a leaf spring portion 242 formed thereon is employed as in the modified example, the main barrel 230 can be pressed into the conductive barrel 240 by the elasticity of the conductive barrel 240 having the slit 241 without providing the flange portion 232, and the leaf spring portion 242 can ensure reliable contact between the conductive barrel 240 and the inner wall defining the through hole 40, so the flange portion 232 of the main barrel 230 may be omitted.

[0074] [Second embodiment] A probe and an inspection socket according to a second embodiment of the present invention will be described below with reference to the drawings. As shown in FIG. 1, the probe 300 is accommodated in the housing 11 of the socket 10, similar to the probe 100 according to the first reference embodiment.

[0075] The probe 300 comprises a probe body 301 having a main barrel 330, an upper plunger 310, a lower plunger 320 and a spring (not shown) as shown in FIG. 19, and a conductive barrel 340 as shown in FIGS.

[0076] The configurations of the upper plunger 310, the lower plunger 320, and the spring are similar to those of the upper plunger 110, the lower plunger 120, and the spring of the first reference embodiment.

[0077] 19, the main barrel 330 is a cylindrical member extending in the direction of the axis X. The main barrel 330 is made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) that has been plated (hard Au plating with Ni as the base)).

[0078] 20 and 21, the conductive barrel 340 is a cylindrical member extending in the direction of the axis X, on which a leaf spring portion (contact portion) 342 is formed. The conductive barrel 340 is made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) that has been plated (hard Au plating with Ni as the base)).

[0079] The leaf spring portions 342 are divided into two types: outward leaf spring portions 342o and inward leaf spring portions 342i. 20 , the outward leaf spring portion 342o is a cantilevered leaf spring whose tip is inclined radially outward relative to the axis X. The tip of the outward leaf spring portion 342o is located radially outward from the outer circumferential surface of the conductive barrel 240. 21, the inward leaf spring portion 342i is a cantilevered leaf spring whose tip is tilted radially inward with respect to the axis X. The tip of the inward leaf spring portion 342i is located radially inward of the inner circumferential surface of the conductive barrel 240.

[0080] 20 and 21, the outward leaf spring portions 342o and the inward leaf spring portions 342i are alternately arranged at equal angular intervals in the circumferential direction about the axis X at the upper and lower ends of the conductive barrel 340. In the example shown in the figures, the outward leaf spring portions 342o and the inward leaf spring portions 342i are arranged alternately at 90-degree intervals.

[0081] As shown in FIG. 22, the conductive barrel 340 is inserted into the large diameter portion 41A of the through-hole 40 formed in the upper housing 11A. At this time, the outwardly tilted outward leaf spring portion 342o comes into contact with the inner circumferential wall that defines the through-hole 40.

[0082] As shown in FIGS. 23 and 24, when the probe main body 301 is inserted into the upper housing 11A into which the conductive barrel 340 is press-fitted, the inwardly inclined inward leaf spring portion 342i comes into contact with the main barrel 330. This results in the probe 300 being electrically connected to the housing 11 via the conductive barrel 340 .

[0083] Thereafter, the lower housing 11B is attached from below the probe 300, thereby completing the probe 300 in which the main barrel 330 and the conductive barrel 340 are housed in the through-hole 40 (not shown).

[0084] [Variation 1] As shown in FIG. 25, the conductive barrel 340 may be inserted into a through-hole 40 formed across the large diameter portion 41A of the upper housing 11A and the large diameter portion 41B of the lower housing 11B. In this case, the outward leaf spring portion 342o formed at the upper end of the conductive barrel 340 contacts the inner wall defining the large diameter portion 41A, and the outward leaf spring portion 342o formed at the lower end of the conductive barrel 340 contacts the inner wall defining the large diameter portion 41B.

[0085] [Variation 2] 26, the outward leaf spring portion 342o and the inward leaf spring portion 342i may be formed by cutting out a part of the cylindrical wall portion that forms the conductive barrel 240, as in the leaf spring portion 131 of the first reference embodiment. In this case, it is preferable that a plurality of the outward leaf spring portions 342o and the inward leaf spring portions 342i are formed at equal angular intervals in the circumferential direction with respect to the axis X.

[0086] The direction in which the tips of the outward leaf spring portion 342o and the inward leaf spring portion 342i face is determined by the direction in which the main barrel 330 is inserted into the housing 11 / the direction in which the housing 11 is fitted into the main barrel 330.

[0087] Specifically, the tip of the upper outward leaf spring portion 342o shown in Fig. 26 faces downward so that the conductive barrel 340 can be easily inserted into the upper housing 11A (so that the tip does not get caught on the upper housing 11A). On the other hand, the tip of the lower outward leaf spring portion 342o shown in Fig. 26 faces upward so that the lower housing 11B can be easily fitted into the conductive barrel 340 (so that the tip does not get caught on the lower housing 11B). Furthermore, the tip of the inward leaf spring portion 342i faces upward so that the main barrel 330 can be easily inserted into the conductive barrel 340 (so that the tip does not get caught on the lower housing 11B).

[0088] According to this embodiment, the following effects are achieved. That is, the conductive barrel 340 has a leaf spring portion 342 that elastically contacts the main barrel 330 and the inner circumferential wall that defines the through-hole 40, so that the main barrel 330 can be reliably brought into contact with the housing 11 even if there is a gap between the inner circumferential wall and the main barrel 330. This ensures electrical continuity between the main barrel 330 and the housing 11.

[0089] Furthermore, because the leaf spring portion 342 elastically contacts the inner circumferential wall that defines the through hole 40, even if the gap between the inner circumferential wall that defines the through hole 40 and the main barrel 330 is not constant for each individual through hole 40 due to dimensional errors of the through hole 40 or the main barrel 330, this error can be absorbed. Therefore, high dimensional accuracy is not required in forming the through hole 40 or manufacturing the main barrel 330.

[0090] [Third embodiment] A probe and an inspection socket according to a third embodiment of the present invention will be described below with reference to the drawings. This embodiment differs from the second embodiment in the shape of the conductive barrel, but is otherwise common to both. Therefore, detailed explanations of the common features will be omitted, and only reference numerals in the 400s with the same last two digits will be used.

[0091] 27, the conductive barrel 440 is a cylindrical member extending in the direction of the axis X, on which a slit 441 and a leaf spring portion (contact portion) 442 are formed. The conductive barrel 440 is made of metal (for example, a copper-based material (beryllium copper or phosphor bronze) that has been plated (hard Au plating with Ni as the base)).

[0092] The slit 441 is formed along the direction of the axis X and from the upper end to the lower end of the conductive barrel 440. Therefore, the cross-sectional shape of the slit 441 is C-shaped regardless of the position.

[0093] The leaf spring portion 442 is a portion that protrudes inward from the conductive barrel 440 in the radial direction relative to the axis X, and functions as a cantilevered leaf spring with a fulcrum connected to the conductive barrel 440 . The plate spring portion 442 is formed by cutting and raising a part of the cylindrical wall portion that forms the conductive barrel 440, for example, like the plate spring portion 131 of the first reference embodiment. It is preferable that a plurality of leaf spring portions 442 be formed at equal angular intervals in the circumferential direction with respect to the axis X.

[0094] As shown in FIG. 28, the conductive barrel 440 is press-fitted from the outside into the large diameter portion 41A of the through-hole 40 formed in the upper housing 11A. At this time, the elasticity of the conductive barrel 440 with the slit 441 allows the conductive barrel 440 to be easily pressed into the large diameter portion 41A, and the restoring force of the conductive barrel 440 ensures that the conductive barrel 440 comes into contact with the inner wall defining the through hole 40.

[0095] As shown in FIG. 29, when the probe main body 401 is inserted into the upper housing 11A into which the conductive barrel 440 is press-fitted, the leaf spring portion 442 tilted inward comes into contact with the main barrel 430. This results in the probe 400 being electrically connected to the housing 11 via the conductive barrel 440 .

[0096] Thereafter, as shown in FIG. 30, the lower housing 11B is attached from below the probe 400, thereby completing the probe 400 in which the main barrel 430 and the conductive barrel 440 are housed in the through-hole 40.

[0097] [Variations] The leaf spring portion 442 of the conductive barrel 440 may have the configuration shown in Figures 31 to 33. It goes without saying that other configurations of the conductive barrel 440 that can achieve the same purpose may also be employed.

[0098] According to this embodiment, the following effects are achieved. The conductive barrel 440 has a leaf spring portion 442 that elastically contacts the main barrel 430, so that the main barrel 430 can be reliably brought into contact with the housing 11 even if there is a gap between the inner circumferential wall that defines the through-hole 40 and the main barrel 430. This ensures electrical continuity between the main barrel 430 and the housing 11.

[0099] Furthermore, because the leaf spring portion 442 elastically contacts the main barrel 430, even if the gap between the inner peripheral wall and the main barrel 430 is not constant among individual through-holes 40 or main barrels 430 due to dimensional errors of the through-holes 40 or main barrels 430, this error can be absorbed. Therefore, high dimensional accuracy is not required in forming the through-holes 40 or manufacturing the main barrels 430.

[0100] Furthermore, since the conductive barrel 440 has the slit 441 aligned along the direction of the axis X, the diameter of the conductive barrel 440 can be easily reduced by elastic deformation. This allows the conductive barrel 440 to be easily press-fitted into the through-hole 40.

[0101] Furthermore, even if the inner diameter of the through-hole 40 is not constant among individual pieces due to dimensional errors, this error can be absorbed. Therefore, high dimensional accuracy is not required in forming the through-hole 40.

[0102] [Fourth embodiment] A probe and an inspection socket according to a fourth embodiment of the present invention will be described below with reference to the drawings. This embodiment is different from the second embodiment in the shape of the conductive barrel, but is otherwise common to both. Therefore, detailed explanations of the common features will be omitted, and only reference numerals in the 500s with the same last two digits will be used.

[0103] As shown in FIG. 34, the conductive barrel 540 is a cylindrical member extending in the direction of the axis X, on which a leaf spring portion (contact portion) 542 is formed. The conductive barrel 540 may be made of an insulating material as well as metal, because the main barrel 530 is in direct contact with the housing 11, as will be described later. Examples of metals include copper-based materials (beryllium copper and phosphor bronze) plated (hard Au plating on Ni as the base), and examples of insulating materials include super engineering plastics. When super engineering plastic is used as the material, the conductive barrel 540 is produced by cutting or injection molding.

[0104] The leaf spring portion 542 is a portion that protrudes outward from the conductive barrel 540 in the radial direction relative to the axis X, and functions as a cantilevered leaf spring with a fulcrum connected to the conductive barrel 540 .

[0105] As shown in FIG. 35, the conductive barrel 540 is inserted into the large diameter portion 41A of the through-hole 40 formed in the upper housing 11A.

[0106] The outer diameter of the conductive barrel 540 excluding the leaf spring portion 542 is set to be smaller than the inner diameter of the through hole 40 (large diameter portion 41A), and the overall outer diameter (circumscribed circle) of the conductive barrel 540 including the leaf spring portion 542 is set to be larger than the inner diameter of the through hole 40 (large diameter portion 41A). Therefore, the conductive barrel 540 inserted into the large diameter portion 41A of the through hole 40 is pressed against the inner circumferential wall that defines the through hole 40 by the elasticity of the leaf spring portion 542. Specifically, the conductive barrel 540 is pressed against the inner circumferential wall (left side in the figure) located opposite the inner circumferential wall (right side in the figure) that the leaf spring portion 542 contacts with, with respect to the axis X.

[0107] In this state, when the inner diameter of the small diameter portion 42A of the through-hole 40 and the inner diameter of the conductive barrel 540 are viewed from the direction of the axis X, the relationship is as shown in the upper diagram of FIG. 36, the solid line indicates the inner diameter of the small diameter portion 42A, the broken line indicates the inner diameter of the conductive barrel 540, and the dashed line indicates the outer diameter of the main barrel 530.

[0108] According to this relationship, the inner diameter of small diameter portion 42A and the inner diameter of conductive barrel 540 overlap by a maximum distance d1 in the diametric direction. In other words, when small diameter portion 42A is viewed from above, it is open by a maximum distance d1.

[0109] In this state, as shown in FIG. 37, the probe main body 501 is inserted into the upper housing 11A into which the conductive barrel 540 is inserted.

[0110] In this case, as shown in the middle diagram of Figure 36, by setting each dimension so that the outer diameter Db of the main barrel 530 is larger than the distance d1, the through hole 40, the probe body 501, and the conductive barrel 540 have the following relationship. That is, as shown in the lower diagram of Figure 36, when the probe main body 501 (main barrel 530) is inserted, the conductive barrel 540 moves by the difference between Db and d1. In Figure 36, the movement amount of the conductive barrel 540 is represented by s.

[0111] Because the conductive barrel 540 was pressed against the inner circumferential wall of the large diameter portion 41A (on the left side in FIG. 35) by the leaf spring portion 542, the inserted main barrel 530 comes into contact at contact point P1 with the inner circumferential surface of the conductive barrel 540. At the same time, the main barrel 530, which is receiving force from contact point P1, is pressed against the inner circumferential wall that defines the small diameter portion 42A by the conductive barrel 540 (the elasticity of the leaf spring portion 542), and comes into direct contact with the housing 11 at contact point P2 with the inner circumferential wall that defines the small diameter portion 42A. This results in the construction of the probe 500 which is electrically connected to the housing 11 .

[0112] [Variation 1] As shown in Figures 38 to 40, a slit 541 like that of the third embodiment may be formed in the conductive barrel 540, and the probe 500 in which the conductive barrel 540 is press-fitted into the main barrel 530 may be inserted into the through-hole 40. In this case as well, the main barrel 530 is pressed against the inner circumferential wall that defines the small diameter portion 42A by the conductive barrel 540 (the elasticity of the leaf spring portion 542), and comes into direct contact with the inner circumferential wall that defines the small diameter portion 42A.

[0113] As shown in FIG. 41, a flange portion (enlarged diameter portion) 532 having a partially enlarged diameter may be integrally formed on the main barrel 530.

[0114] [Variation 2] As shown in FIG. 42, the leaf spring portion 542 may be a cantilever leaf spring that protrudes inward in the radial direction relative to the axis X. In this case, the leaf spring portion 542 directly presses the main barrel 530 against the inner circumferential wall that defines the small diameter portion 42A.

[0115] According to this embodiment, the following effects are achieved. The conductive barrel 540 has a leaf spring portion 542 that elastically contacts the inner circumferential wall that defines the through-hole 40, so that the main barrel 530 can be reliably brought into contact with the housing 11 even if there is a gap between the inner circumferential wall and the main barrel 530. This ensures electrical continuity between the main barrel 530 and the housing 11.

[0116] Furthermore, because leaf spring portion 542 elastically contacts the inner circumferential wall that defines through hole 40, even if the gap between the inner circumferential wall and main barrel 530 is not constant among individual through holes 40 or main barrel 530 due to dimensional errors of the through holes 40 or main barrel 530, this error can be absorbed. Therefore, high dimensional accuracy is not required in forming through hole 40 or manufacturing main barrel 530.

[0117] Furthermore, since the main barrel 530 is in direct contact with the inner circumferential wall that defines the through-hole 40, the conductive barrel 540 is not required to be conductive. This allows for a wider range of materials to be selected for the conductive barrel 540, leading to cost reductions. [Explanation of symbols]

[0118] 10 Socket (inspection socket) 11. Housing 11A Upper housing 11B Lower housing 12 Movable base 12a recess 13 Base spring 20 Printed wiring board (test board) 30 IC package (test device) 40 through holes 41A Large diameter section 41B Large diameter section 42A Small diameter section 100 probes 110 Upper plunger 120 Lower plunger 130 barrels 131 Leaf spring part (contact part) 200 probes 201 Probe body 210 Upper plunger 220 Lower plunger 230 Main Barrel 232 Flange 240 Conduction Barrel 241 Slit 242 Leaf spring part (contact part) 300 probes 301 Probe body 310 Upper plunger 320 Lower Plunger 330 main barrel 340 Conduction Barrel 342 Leaf spring part (contact part) 342i Inward leaf spring part (contact part) 342o Outward leaf spring part (contact part) 400 probes 401 Probe body 410 Upper plunger 420 Lower Plunger 430 Main Barrel 440 Conduction Barrel 441 Slit 442 Leaf spring part (contact part) 500 probes 501 Probe body 510 Upper plunger 520 Lower Plunger 530 Main Barrel 532 flange 540 Conductive Barrel 541 Slit 542 Leaf spring part (contact part)

Claims

1. A ground probe that is inserted into a through-hole formed in a housing and defined by a metal inner peripheral wall, a probe body having a cylindrical main barrel extending in an axial direction and a plunger housed in the main barrel; a conductive barrel through which the main barrel is inserted in the axial direction; Equipped with The conductive barrel is a probe having a contact portion that elastically contacts the main barrel and / or the inner peripheral wall.

2. The probe according to claim 1 , wherein the conductive barrel has a slit extending along the axial direction.

3. the main barrel has an expanded diameter portion in a partial section along the axial direction, The probe according to claim 2 , wherein the conductive barrel is fitted to the enlarged diameter portion in an elastically deformed state and fixed to the main barrel.

4. The probe according to claim 1 , wherein the contact portion is formed in a plurality of portions in a circumferential direction with respect to the axis.

5. 5. The probe according to claim 1, wherein the contact portion is a cantilevered leaf spring.

6. A ground probe that is inserted into a through-hole formed in a housing and defined by a metal inner peripheral wall, a probe body having a cylindrical main barrel extending in an axial direction and a plunger housed in the main barrel; a conductive barrel through which the main barrel is inserted in the axial direction; Equipped with the main barrel has an expanded diameter portion in a partial section along the axial direction, the conductive barrel has a slit along the axial direction, The conductive barrel is fitted to the enlarged diameter portion in an elastically deformed state and fixed to the main barrel.

7. 7. The probe according to claim 1, wherein the enlarged diameter portion has a tapered shape in which the outer diameter gradually increases along the axial direction.

8. A probe according to any one of claims 1 to 7; the housing in which the through hole is formed; An inspection socket comprising:

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