Valve mechanism, liquid flow device, liquid discharge device

Abstract

To provide a valve mechanism that can reduce variation in pressure of outflow fluid, a liquid flow device, and a liquid discharge device.SOLUTION: A valve mechanism comprises: a first upstream chamber 24 into which a fluid flows via a first inflow port 31; a first downstream chamber 25 which has a first flexible membrane 26, and communicates with the first upstream chamber 24 via a first communication port 32 downstream of the first upstream chamber 24; a second flexible membrane 27 which partitions the first upstream chamber 24 and the first downstream chamber 25; a first opening / closing part 28 which can open / close the first communication port 32; and a first energization part 29 which energizes the first flexible membrane 26 in a direction in which a volume of the first downstream chamber 25 increases. The first opening / closing part 28 has: a first shank 35 which is provided across the first upstream chamber 24 and the first downstream chamber 25, and can move while following displacement of the first flexible membrane 26 and the second flexible membrane 27; and a first valve part 36 which is connected to the first shank 35, and opens / closes the first communication port 32.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to a valve mechanism, a liquid flow device, and a liquid ejection device. [Background technology]

[0002] For example, as disclosed in Patent Document 1, there is a printer, which is an example of a liquid ejection device, that prints by ejecting ink, which is an example of a liquid, from a recording head, which is an example of a liquid ejection section. The printer is equipped with a pressure control valve, which is an example of a valve mechanism. The pressure control valve includes a valve chamber, a pressure chamber, an on-off valve, and an elastic partition.

[0003] Ink supplied from the ink cartridge is sent to the valve chamber. When the pressure in the pressure chamber drops, the elastic partition deforms, opening the on-off valve. When the on-off valve opens, liquid flows from the valve chamber to the pressure chamber, and liquid is sent from the pressure chamber to the recording head. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-86535 Summary of the Invention [Problem to be solved by the invention]

[0005] The on-off valve of Patent Document 1 is subjected to the pressure in the valve chamber, so if the pressure in the valve chamber changes, there is a risk that the pressure at which the on-off valve opens will vary. [Means for solving the problem]

[0006] A valve mechanism that solves the above problem comprises an upstream chamber into which a fluid flows through an inlet, a downstream chamber having a first flexible membrane and communicating with the upstream chamber through a communication port downstream of the upstream chamber, a second flexible membrane separating the upstream chamber and the downstream chamber, an opening / closing unit that can open and close the communication port, and a biasing unit that biases the first flexible membrane in a direction that increases the volume of the downstream chamber, wherein the opening / closing unit is provided across the upstream chamber and the downstream chamber and has an axis unit that can move in response to displacement of the first flexible membrane and the second flexible membrane, and a valve unit connected to the axis unit that opens and closes the communication port.

[0007] A valve mechanism that solves the above problem comprises an upstream chamber having a first flexible membrane into which a fluid flows through an inlet, a downstream chamber downstream of the upstream chamber and communicating with the upstream chamber through a communication port, a second flexible membrane separating the upstream chamber and the downstream chamber, an opening / closing unit that can open and close the communication port, and a biasing unit that biases the first flexible membrane in a direction that reduces the volume of the upstream chamber, wherein the opening / closing unit is provided across the upstream chamber and the downstream chamber and has an axis unit that can move in response to displacement of the first flexible membrane and the second flexible membrane, and a valve unit connected to the axis unit that opens and closes the communication port.

[0008] A liquid flowing device that solves the above problem comprises a liquid storage section that stores liquid, a liquid flow path connected to the liquid storage section, a pressure fluctuation mechanism that fluctuates the pressure of the liquid flowing through the liquid flow path, and a valve mechanism configured as described above.

[0009] A liquid ejection device that solves the above problem includes a liquid flow device having the above configuration and a liquid ejection section that ejects liquid. [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram of a first embodiment of a liquid ejection device. [Figure 2] FIG. 2 is a schematic cross-sectional view of a first valve mechanism included in the liquid ejection device. [Figure 3] FIG. 3 is a schematic cross-sectional view of a second valve mechanism included in the liquid ejection device. [Figure 4]FIG. 4 is a schematic diagram of a second embodiment of the liquid ejection device. [Figure 5] FIG. 5 is a schematic diagram of a first modified example of the liquid ejection device. [Figure 6] FIG. 6 is a schematic diagram of a second modified example of the liquid ejection device. [Figure 7] FIG. 7 is a schematic diagram of a third modified example of the liquid ejection device. [Figure 8] FIG. 8 is a schematic diagram of a fourth modified example of the liquid ejection device. [Figure 9] FIG. 9 is a schematic diagram of a fifth modified example of the liquid ejection device. [Figure 10] FIG. 10 is a schematic diagram of a sixth modified example of the liquid ejection device. [Figure 11] FIG. 11 is a schematic diagram of a seventh modified example of the liquid ejection device. [Figure 12] FIG. 12 is a schematic diagram of an eighth modified example of the liquid ejection device. [Figure 13] FIG. 13 is a schematic diagram of a ninth modification of the liquid ejection device. [Figure 14] FIG. 14 is a schematic diagram of a tenth modified example of the liquid ejection device. [Figure 15] FIG. 15 is a schematic diagram of a twelfth modification of the liquid ejection device. [Figure 16] FIG. 16 is a schematic diagram of a thirteenth modification of the liquid ejection device. [Figure 17] FIG. 17 is a schematic diagram of a thirteenth modification of the liquid ejection device. [Figure 18] FIG. 18 is a schematic diagram of a fourteenth modification of the liquid ejection device. [Figure 19] FIG. 19 is a schematic diagram of a fifteenth modification of the liquid ejection device. DETAILED DESCRIPTION OF THE INVENTION

[0011] [First embodiment] A first embodiment of the valve mechanism, liquid flow device, and liquid ejection device will be described below with reference to the drawings. The liquid ejection device is an inkjet printer that prints by ejecting ink, which is an example of a liquid, onto a medium such as paper, fabric, vinyl, plastic parts, or metal parts.

[0012] In the drawings, the liquid discharger 11 is placed on a horizontal plane, with the direction of gravity indicated by the Z axis, and directions along the horizontal plane indicated by the X and Y axes. The X, Y, and Z axes are perpendicular to one another. In the following description, the direction parallel to the Z axis is also referred to as the vertical direction Z.

[0013] <Liquid discharge device> As shown in FIG. 1, the liquid ejection device 11 includes a liquid ejection section 12 and a liquid flow device 13.

[0014] The liquid ejection unit 12 is capable of ejecting liquid. The liquid ejection unit 12 is configured to eject liquid onto a medium 14. The liquid ejection unit 12 has a nozzle surface 16 in which one or more nozzles 15 open. The liquid ejection unit 12 ejects liquid from the nozzles 15. A negative pressure is usually maintained inside the liquid ejection unit 12. This is to form a meniscus in the nozzle 15. This allows the liquid ejection unit 12 to eject the liquid appropriately.

[0015] <Liquid flow device> The liquid flowing device 13 causes the liquid to flow, thereby supplying the liquid to the liquid discharger 12. The liquid flowing device 13 may include a liquid storage section 17, a gas flow path 18, a liquid flow path 19, a pressure pump 20 which is an example of a pressure fluctuation mechanism, a first valve mechanism 21 which is an example of a valve mechanism, and a second valve mechanism 22 which is an example of a valve mechanism.

[0016] Liquid is stored in the liquid storage section 17. The liquid storage section 17 is, for example, a tank that can be replenished with liquid. The gas flow path 18 is connected to the liquid storage portion 17. In this embodiment, one end of the gas flow path 18 is connected to the liquid storage portion 17, and the other end is open to the atmosphere.

[0017] The liquid flow path 19 is connected to the liquid storage section 17. The upstream end of the liquid flow path 19 in the supply direction Ds is connected to the liquid storage section 17. The downstream end of the liquid flow path 19 in the supply direction Ds is connected to the liquid discharge section 12. The liquid flow path 19 communicates between the liquid storage section 17 and the liquid discharge section 12. Communication means connecting them in a state where fluids such as liquid and gas can flow. The liquid flow path 19 connects the liquid storage section 17 and the liquid discharge section 12 in a state where liquid can flow. The liquid flow path 19 sends the liquid that flows out of the liquid storage section 17 to the liquid discharge section 12.

[0018] The pressure pump 20 is capable of pressurizing the liquid storage portion 17. For example, the pressure pump 20 may pressurize the liquid storage portion 17 by pumping air into the liquid storage portion 17. When the pressure pump 20 pressurizes the liquid storage portion 17, the pressure of the liquid flowing out of the liquid storage portion 17 increases. In other words, the pressure of the liquid flowing through the liquid flow path 19 varies.

[0019] The first valve mechanism 21 is provided in the liquid flow path 19. The first valve mechanism 21 adjusts the negative pressure in the liquid flow path 19 on the liquid ejection unit 12 side. The second valve mechanism 22 is provided in the gas flow path 18. The second valve mechanism 22 is connected to the liquid storage portion 17. The second valve mechanism 22 is capable of adjusting the pressure in the liquid storage portion 17. The second valve mechanism 22 adjusts the positive pressure in the liquid storage portion 17 by releasing the pressure in the liquid storage portion 17.

[0020] <First valve mechanism> As shown in FIG. 2, the first valve mechanism 21 includes a first upstream chamber 24, which is an example of an upstream chamber, and a first downstream chamber 25, which is an example of a downstream chamber. The first downstream chamber 25 has a first flexible membrane 26. The first valve mechanism 21 includes a second flexible membrane 27, a first opening / closing unit 28, which is an example of an opening / closing unit, and a first biasing unit 29, which is an example of a biasing unit. The first opening / closing unit 28 is movable between a first closed position indicated by a solid line in FIG. 2 and a first open position indicated by a two-dot chain line in FIG. 2. In this embodiment, the state in which the first opening / closing unit 28 is in the first closed position is also referred to as a first closed state, and the state in which the first opening / closing unit 28 is in the first open position is also referred to as a first open state. In FIG. 2, the direction of fluid flow is indicated by an outline arrow.

[0021] The first upstream chamber 24 has a first inlet 31, which is an example of an inlet. The first inlet 31 in this embodiment communicates with the liquid storage section 17 via the liquid flow path 19. A fluid flows into the first upstream chamber 24 via the first inlet 31. The fluid handled by the first valve mechanism 21 in this embodiment is a liquid.

[0022] The first downstream chamber 25 is provided downstream of the first upstream chamber 24. The first downstream chamber 25 communicates with the first upstream chamber 24 downstream of the first upstream chamber 24 via a first communication port 32, which is an example of a communication port. The first downstream chamber 25 has a first outlet 33 through which the fluid flows out. In this embodiment, the first outlet 33 communicates with the liquid discharger 12 via a liquid flow path 19.

[0023] The first flexible membrane 26 forms a part of the wall of the first downstream chamber 25. The first flexible membrane 26 is formed of a flexible member having flexibility, such as a diaphragm. The first flexible membrane 26 is displaced according to the difference in pressure applied to the outer surface and the inner surface. The outer surface of the first flexible membrane 26 is subjected to the differential pressure between atmospheric pressure and the biasing force of the first biasing member 29. The inner surface of the first flexible membrane 26 is subjected to the pressure of the fluid in the first downstream chamber 25. The first flexible membrane 26 in the first closed state shown by the solid line in FIG. 2 is slightly deflected. In the first closed state, the first flexible membrane 26 may be in a state of no deflection or may be in a state of slight deflection. The amount of deflection of the first flexible membrane 26 when the first opening / closing unit 28 is in the first closed state shown by the solid line in FIG. 2 may be smaller than the amount of deflection of the first flexible membrane 26 when the first opening / closing unit 28 is in the first open state shown by the two-dot chain line in FIG. 2.

[0024] The second flexible membrane 27 separates the first upstream chamber 24 and the first downstream chamber 25. The second flexible membrane 27 may be located above the first communication port 32. The second flexible membrane 27 is located between the first communication port 32 and the first flexible membrane 26. The first communication port 32, the second flexible membrane 27, the first flexible membrane 26, and the first biasing portion 29 may be arranged in this order in the first direction D1. The first direction D1 may be a direction opposite to the vertical direction Z.

[0025] The second flexible membrane 27 is displaced according to the difference in pressure applied to the first surface 27a and the second surface 27b. The pressure of the fluid in the first upstream chamber 24 is applied to the first surface 27a. The pressure of the fluid in the first downstream chamber 25 is applied to the second surface 27b. The amount of deflection of the second flexible membrane 27 when the first opening / closing unit 28 is in the first closed state shown by the solid line in FIG. 2 may be smaller than the amount of deflection of the second flexible membrane 27 when the first opening / closing unit 28 is in the first open state shown by the two-dot chain line in FIG.

[0026] The first opening / closing unit 28 may have a first shaft portion 35, which is an example of a shaft portion, and a first valve portion 36, which is an example of a valve portion. The first valve portion 36 may have a first seal portion 37, which is an example of a seal portion. The first opening / closing unit 28 is capable of opening and closing the first communication port 32.

[0027] The first shaft portion 35 is provided across the first upstream chamber 24 and the first downstream chamber 25. The first shaft portion 35 is inserted into the second flexible membrane 27. The longitudinal direction of the first shaft portion 35 may be parallel to the first direction D1. The first shaft portion 35 may be rod-shaped. The first shaft portion 35 may be cylindrical. The diameter of the first shaft portion 35 is smaller than the inner diameter of the first communication port 32.

[0028] The first shaft portion 35 is movable in response to the displacement of the first flexible film 26 and the second flexible film 27. The first shaft portion 35 is fixed to the first flexible film 26 and the second flexible film 27 directly or via a fixing member. One end of the first shaft portion 35 is connected to the first flexible film 26. The other end of the first shaft portion 35 is connected to the first valve portion 36. The first shaft portion 35 moves in response to the displacement of the first flexible film 26, thereby displacing the second flexible film 27 and the first valve portion 36.

[0029] The first valve unit 36 ​​is connected to the first shaft portion 35. The first valve unit 36 ​​can open and close the first communication port 32. The first valve unit 36 ​​can restrict the flow of fluid from the first upstream chamber 24 to the first downstream chamber 25. The first valve unit 36 ​​moves together with the first shaft portion 35. When the first opening / closing unit 28 is in the closed position shown by the solid line in FIG. 2, the first valve unit 36 ​​disconnects the first upstream chamber 24 from the first downstream chamber 25. When the first opening / closing unit 28 is in the open position shown by the two-dot chain line in FIG. 2, the first valve unit 36 ​​connects the first upstream chamber 24 to the first downstream chamber 25.

[0030] The first seal portion 37 can be tightly fitted to the first communication port 32. The first seal portion 37 forms the outer periphery of the first valve portion 36. The first seal portion 37 may be annular. The first seal portion 37 may also be a torus-shaped O-ring.

[0031] The first biasing portion 29 biases the first flexible membrane 26 in a first direction D1 in which the volume of the first downstream chamber 25 increases. The first biasing portion 29 is provided outside the first downstream chamber 25. The first biasing portion 29 pulls the first opening / closing portion 28 via the first flexible membrane 26. The first biasing portion 29 is, for example, a tension spring.

[0032] <Operation of the first valve mechanism> The first valve mechanism 21 reduces the pressure of the fluid that has flowed into the first upstream chamber 24, causing the fluid to flow out of the first downstream chamber 25. The pressure of the fluid flowing out of the first downstream chamber 25 is negative pressure. The pressure of the fluid flowing into the first upstream chamber 24 is higher than the pressure of the fluid flowing out of the first downstream chamber 25. The fluid flowing into the first upstream chamber 24 may be at either negative pressure or positive pressure.

[0033] The first opening / closing portion 28 moves in response to fluctuations in the pressure inside the first downstream chamber 25. When the negative pressure inside the first downstream chamber 25 increases, the first flexible membrane 26 is displaced in a direction that reduces the volume of the first downstream chamber 25, against the biasing force of the first biasing portion 29. The first opening / closing portion 28 is pushed and moves by the first flexible membrane 26. The second flexible membrane 27 is displaced by the first opening / closing portion 28. The second flexible membrane 27 reduces the volume of the first upstream chamber 24 and displaces in a direction that increases the volume of the first downstream chamber 25. The second flexible membrane 27 alleviates the change in volume of the first downstream chamber 25 that accompanies the displacement of the first flexible membrane 26.

[0034] The first opening / closing portion 28 is pushed by the first flexible membrane 26 and moves to the open position. Therefore, the first upstream chamber 24 communicates with the first downstream chamber 25. The fluid is supplied from the first upstream chamber 24 to the first downstream chamber 25.

[0035] When the negative pressure in the first downstream chamber 25 decreases, the first flexible membrane 26 is pulled by the first biasing portion 29 and displaced in a direction that increases the volume of the first downstream chamber 25. The first opening / closing portion 28 and the second flexible membrane 27 move together with the first flexible membrane 26 to the closed position. As a result, the supply of fluid from the first upstream chamber 24 to the first downstream chamber 25 is stopped.

[0036] In the first upstream chamber 24, the pressure-receiving area of ​​the first valve portion 36 may be the same as the pressure-receiving area of ​​the second flexible membrane 27. The area of ​​the first valve portion 36 that comes into contact with the fluid in the first upstream chamber 24 may be substantially the same as the area of ​​the second flexible membrane 27 that comes into contact with the fluid in the first upstream chamber 24. In this case, even if the pressure in the first upstream chamber 24 increases, the first opening / closing portion 28 does not move from the closed position.

[0037] <Second valve mechanism> As shown in FIG. 3 , the second valve mechanism 22 includes a second upstream chamber 39, which is an example of an upstream chamber, and a second downstream chamber 40, which is an example of a downstream chamber. The second upstream chamber 39 has a third flexible membrane 41, which is an example of a first flexible membrane. The second valve mechanism 22 includes a fourth flexible membrane 42, which is an example of a second flexible membrane, a second opening / closing portion 43, which is an example of an opening / closing portion, and a second biasing portion 44, which is an example of a biasing portion. The second opening / closing portion 43 is movable between a second closed position indicated by a solid line in FIG. 3 and a second open position indicated by a two-dot chain line in FIG. 3 . In this embodiment, a state in which the second opening / closing portion 43 is located at the second closed position is also referred to as a second closed state, and a state in which the second opening / closing portion 43 is located at the second open position is also referred to as a second open state.

[0038] The second upstream chamber 39 has a second inlet 46, which is an example of an inlet through which a fluid flows in. The second inlet 46 in this embodiment is connected to the liquid storage section 17 via the gas flow path 18. The fluid flows into the second upstream chamber 39 via the second inlet 46. The fluid handled by the second valve mechanism 22 in this embodiment is a gas.

[0039] The second downstream chamber 40 is provided downstream of the second upstream chamber 39. The second downstream chamber 40 communicates with the second upstream chamber 39 downstream of the second upstream chamber 39 via a second communication port 47, which is an example of a communication port. The second downstream chamber 40 has a second outlet 48 through which the fluid flows out. In this embodiment, the second outlet 48 communicates with the atmosphere via the gas flow path 18. The second outlet 48 may also be directly open to the atmosphere.

[0040] The third flexible membrane 41 forms a part of the wall of the second upstream chamber 39. The third flexible membrane 41 is formed of a flexible member such as a diaphragm. The third flexible membrane 41 is displaced according to the difference in pressure between its outer surface and its inner surface. The outer surface of the third flexible membrane 41 is subjected to the sum of atmospheric pressure and the biasing force of the second biasing member 44. The inner surface of the third flexible membrane 41 is subjected to the pressure of the fluid in the second upstream chamber 39. The third flexible membrane 41 in the second closed state shown by the solid line in FIG. 3 is slightly deflected. In the second closed state, the third flexible membrane 41 may be in a state of no deflection or may be in a state of slight deflection. The amount of deflection of the third flexible membrane 41 when the second opening / closing unit 43 is in the second closed state shown by the solid line in FIG. 3 may be smaller than the amount of deflection of the third flexible membrane 41 when the second opening / closing unit 43 is in the second open state shown by the two-dot chain line in FIG. 3.

[0041] The fourth flexible membrane 42 separates the second upstream chamber 39 and the second downstream chamber 40. The fourth flexible membrane 42 may be located above the second communication port 47. The fourth flexible membrane 42 is located between the second communication port 47 and the third flexible membrane 41. The second biasing portion 44, the third flexible membrane 41, the fourth flexible membrane 42, and the second communication port 47 may be arranged in this order in the second direction D2. The second direction D2 may be a direction opposite to the vertical direction Z.

[0042] The fourth flexible membrane 42 is displaced according to the difference in pressure applied to the third surface 42a and the fourth surface 42b. The pressure of the fluid in the second downstream chamber 40 is applied to the third surface 42a. The pressure of the fluid in the second upstream chamber 39 is applied to the fourth surface 42b. The amount of deflection of the fourth flexible membrane 42 when the second opening / closing unit 43 is in the second closed state shown by the solid line in FIG. 3 may be smaller than the amount of deflection of the fourth flexible membrane 42 when the second opening / closing unit 43 is in the second open state shown by the two-dot chain line in FIG.

[0043] The second opening / closing unit 43 may have a second shaft unit 50, which is an example of a shaft unit, and a second valve unit 51, which is an example of a valve unit. The second valve unit 51 may have a second seal unit 52, which is an example of a seal unit. The second opening / closing unit 43 is capable of opening and closing the second communication port 47.

[0044] The second shaft portion 50 is provided across the second upstream chamber 39 and the second downstream chamber 40. The second shaft portion 50 is inserted into the fourth flexible membrane 42. The longitudinal direction of the second shaft portion 50 may be parallel to the second direction D2. The second shaft portion 50 may be rod-shaped. The second shaft portion 50 may be cylindrical. The diameter of the second shaft portion 50 is smaller than the inner diameter of the second communication port 47.

[0045] The second axis portion 50 is movable in response to the displacement of the third flexible membrane 41 and the fourth flexible membrane 42. The second axis portion 50 is fixed to the third flexible membrane 41 and the fourth flexible membrane 42 directly or via a fixing member. One end of the second axis portion 50 is connected to the third flexible membrane 41. The other end of the second axis portion 50 is connected to the second valve portion 51. The second axis portion 50 moves in response to the displacement of the third flexible membrane 41, thereby displacing the fourth flexible membrane 42 and the second valve portion 51.

[0046] The second valve unit 51 is connected to the second shaft unit 50. The second valve unit 51 can open and close the second communication port 47. The second valve unit 51 can restrict the flow of fluid from the second upstream chamber 39 to the second downstream chamber 40. The second valve unit 51 moves together with the second shaft unit 50. When the second opening / closing unit 43 is in the closed position shown by the solid line in FIG. 3, the second valve unit 51 disconnects the second upstream chamber 39 from the second downstream chamber 40. When the second opening / closing unit 43 is in the open position shown by the two-dot chain line in FIG. 3, the second valve unit 51 connects the second upstream chamber 39 to the second downstream chamber 40.

[0047] The second seal portion 52 can be tightly fitted to the second communication port 47. The second seal portion 52 forms the outer periphery of the second valve portion 51. The second seal portion 52 may be annular. The second seal portion 52 may be a torus-shaped O-ring.

[0048] The second biasing portion 44 biases the third flexible membrane 41 in the second direction D2 in which the volume of the second upstream chamber 39 decreases. The second biasing portion 44 is provided outside the second upstream chamber 39. The second biasing portion 44 presses the second opening / closing portion 43 via the third flexible membrane 41. The second biasing portion 44 is, for example, a compression spring.

[0049] <Operation of the second valve mechanism> The second valve mechanism 22 reduces the pressure of the fluid that has flowed into the second upstream chamber 39 and causes the fluid to flow out of the second downstream chamber 40. The pressure of the fluid flowing into the second upstream chamber 39 is positive pressure. The pressure of the fluid flowing out of the second downstream chamber 40 is lower than the pressure of the fluid flowing into the second upstream chamber 39. The pressure within the second downstream chamber 40 may be negative pressure, atmospheric pressure, or positive pressure.

[0050] The second opening / closing portion 43 moves in response to fluctuations in pressure within the second upstream chamber 39. When the positive pressure within the second upstream chamber 39 increases, the third flexible membrane 41 displaces in a direction that increases the volume of the second upstream chamber 39, against the biasing force of the second biasing portion 44. The second opening / closing portion 43 moves as it is pulled by the third flexible membrane 41. The fourth flexible membrane 42 is displaced in response to the second opening / closing portion 43. The fourth flexible membrane 42 reduces the volume of the second upstream chamber 39 and displaces in a direction that increases the volume of the second downstream chamber 40. The fourth flexible membrane 42 reduces the change in volume of the second upstream chamber 39 that accompanies the displacement of the third flexible membrane 41.

[0051] The second opening / closing portion 43 is pulled by the third flexible film 41 and moves to the open position. As a result, the second upstream chamber 39 communicates with the second downstream chamber 40. The fluid flows from the second upstream chamber 39 to the second downstream chamber 40.

[0052] When the positive pressure in the second upstream chamber 39 decreases, the third flexible membrane 41 is pushed by the second biasing portion 44 and displaced in a direction that reduces the volume of the second upstream chamber 39. The second opening / closing portion 43 and the fourth flexible membrane 42 move together with the third flexible membrane 41 to the closed position. As a result, the outflow of fluid from the second upstream chamber 39 to the second downstream chamber 40 stops.

[0053] In the second downstream chamber 40, the pressure-receiving area of ​​the second valve portion 51 may be the same as the pressure-receiving area of ​​the fourth flexible membrane 42. The area of ​​the second valve portion 51 that is in contact with the fluid in the second downstream chamber 40 may be approximately the same as the area of ​​the fourth flexible membrane 42 that is in contact with the fluid in the second downstream chamber 40. In this case, even if the pressure in the second downstream chamber 40 changes, the second opening / closing portion 43 does not move from the closed position.

[0054] <Operation of the First Embodiment> The operation of this embodiment will be described. The pressure pump 20 pressurizes the liquid storage portion 17. When the pressure in the liquid storage portion 17 increases, the second valve mechanism 22 releases the pressure in the liquid storage portion 17. The pressure in the liquid discharge portion 12 decreases, for example, by discharging the liquid. When the pressure in the liquid discharge portion 12 decreases, the first valve mechanism 21 allows the liquid to flow from the liquid storage portion 17 to the liquid discharge portion 12.

[0055] <Effects of the first embodiment> The effects of this embodiment will be described. (1-1) The pressure in the first upstream chamber 24 acts on the second flexible membrane 27 and the first valve portion 36. The pressure in the first upstream chamber 24 acting on the first valve portion 36 and the pressure in the first upstream chamber 24 acting on the second flexible membrane 27 cancel each other out. Therefore, the first opening / closing portion 28 can be opened and closed by fluctuations in the pressure in the first downstream chamber 25. This reduces variations in the pressure of the outflowing fluid.

[0056] (1-2) The pressure in the second downstream chamber 40 acts on the fourth flexible membrane 42 and the second valve portion 51. The pressure in the second downstream chamber 40 acting on the second valve portion 51 and the pressure in the second downstream chamber 40 acting on the fourth flexible membrane 42 cancel each other out. Therefore, the second opening / closing portion 43 can be opened and closed by fluctuations in the pressure in the second upstream chamber 39. This reduces variations in the pressure of the inflowing fluid.

[0057] (1-3) One end of the first shaft portion 35 is connected to the first flexible membrane 26, and the other end is connected to the first valve portion 36. Therefore, the first valve mechanism 21 can be made smaller than when, for example, the first flexible membrane 26 and the first valve portion 36 are connected midway along the first shaft portion 35.

[0058] (1-4) One end of the second shaft portion 50 is connected to the third flexible membrane 41, and the other end is connected to the second valve portion 51. Therefore, the second valve mechanism 22 can be made smaller than when, for example, the third flexible membrane 41 and the second valve portion 51 are connected midway along the second shaft portion 50.

[0059] (1-5) The first valve portion 36 has a first seal portion 37. The first seal portion 37 can be tightly fitted to the first communication port 32. Therefore, the blocking property of the first communication port 32 can be improved. (1-6) The second valve portion 51 has a second seal portion 52. The second seal portion 52 can be tightly fitted to the second communication port 47. Therefore, the blocking property of the second communication port 47 can be improved.

[0060] (1-7) When first flexible film 26 and second flexible film 27 are bent by a force, they tend to return to a state with less bending. In this regard, first flexible film 26 and second flexible film 27 bend less when first opening / closing unit 28 is in the first closed state. Therefore, when first opening / closing unit 28 is in the first closed state, the states of first flexible film 26 and second flexible film 27 can be stabilized, and variations in the pressure of the outflowing fluid can be reduced.

[0061] (1-8) The third flexible film 41 and the fourth flexible film 42, which have been bent by a force, tend to return to a state with less bending. In this regard, the third flexible film 41 and the fourth flexible film 42 have a smaller amount of bending when the second opening / closing unit 43 is in the second closed state. Therefore, when the second opening / closing unit 43 is in the second closed state, the states of the third flexible film 41 and the fourth flexible film 42 can be stabilized, and variations in the pressure of the inflowing fluid can be reduced.

[0062] (1-9) The same pressure is applied to the second flexible membrane 27 and the first valve portion 36. Therefore, by making the pressure-receiving areas of the second flexible membrane 27 and the first valve portion 36 the same, the forces applied to the second flexible membrane 27 and the first valve portion 36 can be easily canceled out.

[0063] (1-10) The same pressure is applied to the fourth flexible membrane 42 and the second valve portion 51. Therefore, by making the pressure-receiving areas of the fourth flexible membrane 42 and the second valve portion 51 the same, the forces applied to the fourth flexible membrane 42 and the second valve portion 51 can be easily canceled out.

[0064] (1-11) The first valve mechanism 21 is provided in the liquid flow path 19. Therefore, the pressure of the liquid flowing through the liquid flow path 19 can be stabilized. (1-12) The second valve mechanism 22 can adjust the pressure of the liquid storage portion 17. Therefore, the pressure of the liquid sent from the liquid storage portion 17 to the liquid flow path 19 can be stabilized.

[0065] (1-13) When the negative pressure in the first downstream chamber 25 increases, the first valve mechanism 21 sets the first opening / closing unit 28 to the first open state. When the pressurization in the second upstream chamber 39 increases, the second valve mechanism 22 sets the second opening / closing unit 43 to the second open state. Therefore, by using the first valve mechanism 21 and the second valve mechanism 22 in accordance with the fluid pressure, it is possible to stabilize the pressure of the positive pressure fluid and the negative pressure fluid.

[0066] (1-14) In the first valve mechanism 21, if a seal rubber is used instead of the second flexible membrane 27, there is a risk that the seal rubber will hinder the movement of the first opening / closing portion 28. In the second valve mechanism 22, if a seal rubber is used instead of the fourth flexible membrane 42, there is a risk that the seal rubber will hinder the movement of the second opening / closing portion 43. If the movement of the opening / closing portion is hindered, there is a risk that the pressure of the flowing-out or inflowing fluid will vary greatly. In this regard, the first valve mechanism 21 is provided with the second flexible membrane 27 that displaces in accordance with the first opening / closing portion 28. The second valve mechanism 22 is provided with the fourth flexible membrane 42 that displaces in accordance with the second opening / closing portion 43. Therefore, by allowing the opening / closing portion to move using the flexible membrane, it is possible to reduce the pressure variation of the flowing-out or inflowing fluid.

[0067] [Second embodiment] Next, a second embodiment of the valve mechanism, liquid flowing device, and liquid ejection device will be described with reference to the drawings. Note that the second embodiment differs from the first embodiment in the liquid flowing device. Since the second embodiment is otherwise substantially the same as the first embodiment, the same components are designated by the same reference numerals and redundant description will be omitted.

[0068] <Liquid flow device> 4, the liquid flow device 13 may flow a moisturizing solution in addition to flowing the liquid. The moisturizing solution is a liquid for moisturizing the liquid. The moisturizing solution is, for example, a glycerin aqueous solution.

[0069] The liquid flow device 13 may be connected to a liquid supply source 54 and a moisture supply source 55. The moisture supply source 55 contains moisture, i.e., water. The moisture supply source 55 may be a cartridge or a pack that is detachable from the liquid ejection device 11, or may be a tank that can be replenished with liquid.

[0070] The liquid flowing device 13 may have a first tank 57, which is an example of a liquid storage section, and a second tank 58, which is also an example of a liquid storage section. The first tank 57 can store the liquid to be supplied to the liquid discharger 12. The second tank 58 can store the liquid recovered from the liquid discharger 12.

[0071] The second tank 58 may have a moisture-permeable membrane 60. The moisture-permeable membrane 60 divides the interior of the second tank 58 into a liquid chamber 61 and a moisturizer chamber 62. The liquid chamber 61 is capable of containing liquid. Liquid is supplied to the liquid chamber 61 from the liquid supply source 54. The moisturizer chamber 62 is capable of containing moisturizer. Moisture is supplied to the moisturizer chamber 62 from the moisture supply source 55.

[0072] The moisture-permeable membrane 60 is a membrane that allows gas to pass through but does not allow liquid to pass through. Therefore, the moisture-permeable membrane 60 separates the liquid stored in the liquid chamber 61 and the moisturizer stored in the moisturizer chamber 62, preventing them from mixing. The moisture-permeable membrane 60 is a porous membrane with multiple pores formed therein. A meniscus is formed in these pores due to the surface tension of the liquid. This allows the moisture-permeable membrane 60 to allow gas to pass through but does not allow liquid to pass through. The moisturizer moisturizes the liquid by supplying moisture to the liquid through the moisture-permeable membrane 60.

[0073] The liquid flow device 13 may have a liquid supply channel 64 and a moisture supply channel 65. The liquid supply channel 64 is connected to the liquid supply source 54 and the liquid chamber 61. The moisture supply channel 65 is connected to the moisture supply source 55 and the moisture chamber 62.

[0074] The liquid flow device 13 may have a liquid supply valve 67 and a water supply valve 68. The liquid supply valve 67 is located in the liquid supply flow path 64. When the liquid supply valve 67 is open, liquid can be supplied from the liquid supply source 54 to the second tank 58. The water supply valve 68 is located in the water supply flow path 65. When the water supply valve 68 is open, water can be supplied from the water supply source 55 to the second tank 58. Normally, the liquid supply valve 67 and the water supply valve 68 are closed. The liquid supply valve 67 is opened when liquid needs to be supplied to the second tank 58. The water supply valve 68 is opened when water needs to be supplied to the second tank 58.

[0075] The liquid flow device 13 may have an agitator 70. The agitator 70 is attached to the second tank 58. The agitator 70 agitates the moisturizer stored in the moisturizer chamber 62. By the agitator 70 agitating the moisturizer, the concentration of the moisturizer is made uniform. This reduces the risk of the moisturizer concentration becoming too high.

[0076] The agitation unit 70 may have an agitation flow path 72 and an agitation pump 73. The agitation flow path 72 is connected to the moisturizer chamber 62 and the water supply flow path 65. The agitation pump 73 is located in the agitation flow path 72. The agitation pump 73 circulates the moisturizer in the second tank 58 through the agitation flow path 72. This causes the moisturizer to be agitated.

[0077] The liquid flowing device 13 may include a connection flow path 75, a positive pressure flow path 76 which is an example of a liquid flow path, a negative pressure flow path 77 which is an example of a liquid flow path, a first gas flow path 18f, and a second gas flow path 18s. The liquid flowing device 13 may include a liquid delivery unit 78, a pressure pump 20, and a pressure reduction pump 79 which is an example of a pressure fluctuation mechanism. The liquid flowing device 13 may include a plurality of first valve mechanisms 21, a second valve mechanism 22, a negative pressure adjustment valve 80, an upstream valve 81, and a downstream valve 82.

[0078] The connection flow path 75 connects the second tank 58 and the first tank 57. The liquid delivery unit 78 is located in the connection flow path 75. The liquid delivery unit 78 delivers liquid from the second tank 58 to the first tank 57 via the connection flow path 75. The liquid delivery unit 78 delivers the liquid in the supply direction Ds.

[0079] The positive pressure flow path 76 is connected to the first tank 57. The upstream end of the positive pressure flow path 76 in the supply direction Ds is connected to the first tank 57. The downstream end of the positive pressure flow path 76 in the supply direction Ds is connected to the liquid discharger 12. The positive pressure flow path 76 communicates between the first tank 57 and the liquid discharger 12. The positive pressure flow path 76 connects the first tank 57 and the liquid discharger 12 in a state where liquid can flow. The positive pressure flow path 76 sends liquid from the first tank 57 to the liquid discharger 12.

[0080] The upstream valve 81 and the first valve mechanism 21 are provided in the positive pressure flow path 76. The upstream valve 81 is capable of opening and closing the positive pressure flow path 76. The first valve mechanism 21 is provided between the upstream valve 81 and the liquid discharge unit 12. The first valve mechanism 21 provided in the positive pressure flow path 76 has a first inlet 31 that communicates with the first tank 57 and a first outlet 33 that communicates with the liquid discharge unit 12. When the negative pressure in the liquid discharge unit 12 becomes greater than a predetermined negative pressure, the first valve mechanism 21 enters a first open state indicated by the two-dot chain line in FIG. 2. When the first valve mechanism 21 enters the first open state, liquid is supplied from the first tank 57 to the liquid discharge unit 12.

[0081] The negative pressure flow path 77 is connected to the second tank 58. The downstream end of the negative pressure flow path 77 in the recovery direction Dr is connected to the second tank 58. The upstream end of the negative pressure flow path 77 in the recovery direction Dr is connected to the liquid discharger 12. The negative pressure flow path 77 communicates between the liquid discharger 12 and the second tank 58. The negative pressure flow path 77 connects the liquid discharger 12 and the second tank 58 in a state where liquid can flow. The negative pressure flow path 77 sends the liquid recovered from the liquid discharger 12 to the second tank 58.

[0082] The downstream valve 82 and the negative pressure adjustment valve 80 are provided in the negative pressure flow path 77. The downstream valve 82 is capable of opening and closing the negative pressure flow path 77. The negative pressure adjustment valve 80 adjusts the negative pressure on the liquid discharger 12 side. The negative pressure adjustment valve 80 makes the magnitude of the negative pressure on the liquid discharger 12 side smaller than the magnitude of the negative pressure on the second tank 58 side. The pressure of the liquid recovered from the liquid discharger 12 is adjusted by the negative pressure adjustment valve 80. Therefore, the negative pressure applied to the liquid discharger 12 is smaller than the negative pressure in the reduced pressure second tank 58.

[0083] The first gas flow path 18f is connected to the first tank 57. One end of the first gas flow path 18f is connected to the first tank 57, and the other end is open to the atmosphere. A second valve mechanism 22 is provided in the first gas flow path 18f. The second valve mechanism 22 has a second inlet 46 that communicates with the first tank 57, and a second outlet 48 that is open to the atmosphere. The second valve mechanism 22 is connected to the first tank 57. The second valve mechanism 22 is capable of adjusting the pressure of the first tank 57.

[0084] The second gas flow path 18s is connected to the second tank 58. For example, one end of the second gas flow path 18s is connected to the liquid chamber 61, and the other end is open to the atmosphere. A first valve mechanism 21 is provided in the second gas flow path 18s. The first valve mechanism 21 provided in the second gas flow path 18s has a first inlet 31 that is open to the atmosphere and a first outlet 33 that communicates with the liquid chamber 61. The first valve mechanism 21 is connected to the second tank 58. The first valve mechanism 21 is capable of adjusting the pressure of the second tank 58.

[0085] The pressure pump 20 is capable of pressurizing the inside of the first tank 57. The pressure pump 20 varies the pressure of the liquid flowing through the positive pressure flow path 76. The pressure pump 20 may pressurize the inside of the first tank 57 by sending air into the first tank 57. When the pressure inside the first tank 57 is increased by the pressure pump 20, the liquid inside the first tank 57 flows out into the positive pressure flow path 76. When the pressure inside the first tank 57 exceeds a predetermined pressure, the second valve mechanism 22 enters the second open state to release the pressure inside the first tank 57.

[0086] The decompression pump 79 is capable of reducing the pressure inside the second tank 58. The decompression pump 79 varies the pressure of the liquid flowing through the negative pressure flow path 77. The decompression pump 79 may reduce the pressure inside the second tank 58 by drawing air out of the second tank 58. The decompression pump 79 normally reduces the pressure inside the second tank 58 so that a predetermined negative pressure is maintained inside the liquid discharge unit 12. When the negative pressure inside the second tank 58 becomes greater than the predetermined negative pressure, the first valve mechanism 21 is set to the first open state, allowing air to flow into the first tank 57.

[0087] When the decompression pump 79 reduces the pressure inside the second tank 58, liquid flows into the second tank 58. For example, when the decompression pump 79 is driven with the liquid supply valve 67 open, liquid flows into the second tank 58 from the liquid supply source 54 through the liquid supply flow path 64. When the decompression pump 79 is driven with the water supply valve 68 open, liquid flows into the second tank 58 from the water supply source 55 through the water supply flow path 65. When the decompression pump 79 is driven with the liquid supply valve 67 and the water supply valve 68 closed, liquid flows into the second tank 58 from the liquid discharge unit 12 through the negative pressure flow path 77.

[0088] The connection flow path 75, the positive pressure flow path 76, and the negative pressure flow path 77 circulate the liquid and supply the liquid to the liquid discharger 12. When circulating, the liquid flows from the second tank 58 to the first tank 57 through the connection flow path 75. When circulating, the liquid flows from the first tank 57 to the liquid discharger 12 through the positive pressure flow path 76. When circulating, the liquid flows from the liquid discharger 12 to the second tank 58 through the negative pressure flow path 77. The positive pressure flow path 76 is a flow path for supplying the liquid to the liquid discharger 12. The negative pressure flow path 77 is a flow path for recovering the liquid from the liquid discharger 12.

[0089] <Operation of the Second Embodiment> The operation of this embodiment will be described. The pressure of the liquid supplied from the first tank 57 to the liquid discharger 12 is adjusted by the first valve mechanism 21. Therefore, the liquid supplied to the liquid discharger 12 has a pressure lower than the pressure in the pressurized first tank 57.

[0090] The pressure of the liquid recovered from the liquid discharger 12 is adjusted by the negative pressure adjustment valve 80. Therefore, the negative pressure applied to the liquid discharger 12 is smaller than the negative pressure in the second tank 58, which has been reduced in pressure.

[0091] <Effects of the second embodiment> The effects of this embodiment will be described. (2-1) The connection flow path 75 connects the second tank 58 connected to the negative pressure flow path 77 with the first tank 57 connected to the positive pressure flow path 76. Therefore, the liquid recovered from the liquid discharger 12 can be supplied to the liquid discharger 12 again.

[0092] [Example of change] This embodiment can be modified as follows: This embodiment and the following modifications can be combined and implemented within the scope of technical compatibility.

[0093] <First modification example> 5, the liquid ejection device 11 may include an atmosphere release valve 84. The atmosphere release valve 84 may be provided in the gas flow path 18. The atmosphere release valve 84 can open the inside of the liquid storage portion 17 to the atmosphere. The atmosphere release valve 84 can make the pressure on the liquid in the liquid storage portion 17 equal to atmospheric pressure.

[0094] <Second modification example> 6, the liquid ejection device 11 may include a liquid pump 85. The liquid pump 85 may be provided in the liquid flow path 19 between the liquid storage section 17 and the first valve mechanism 21. The liquid pump 85 causes the liquid in the liquid flow path 19 to flow in the supply direction Ds.

[0095] <Third modification example> 7, the liquid discharger 11 may include a relief flow path 86. The second valve mechanism 22 may be provided in the relief flow path 86.

[0096] The relief flow path 86 connects a first connection part 87 and a second connection part 88 in the liquid flow path 19. The first connection part 87 is provided between the liquid storage part 17 and the liquid pump 85 in the supply direction Ds. The second connection part 88 is provided between the liquid pump 85 and the first valve mechanism 21 in the supply direction Ds. The second valve mechanism 22 has a second inlet 46 that communicates with the second connection part 88 via the relief flow path 86. The second valve mechanism 22 has a second outlet 48 that communicates with the first connection part 87 via the relief flow path 86.

[0097] 3 when the pressure at the second connection part 88 exceeds a predetermined pressure. When the second valve mechanism 22 is in the open state, liquid circulates in the liquid flow path 19 between the first connection part 87 and the second connection part 88, and in the relief flow path 86. The second valve mechanism 22 limits the pressure applied to the liquid in the liquid flow path 19.

[0098] <Fourth modified example> 8, the liquid discharger 11 may supply the liquid stored in the liquid storage section 17 to the liquid discharger 12 by a hydraulic head. In this case, the liquid discharger 11 may be configured without the pressure pump 20 and the liquid pump 85.

[0099] <Fifth modification example> 9, the liquid ejection device 11 may include a plurality of positive pressure flow paths 76. The plurality of positive pressure flow paths 76 may merge upstream of the liquid ejection unit 12 in the supply direction Ds. Each of the plurality of positive pressure flow paths 76 may be provided with an upstream valve 81 and a first valve mechanism 21. The plurality of first valve mechanisms 21 may be provided in parallel.

[0100] The liquid ejection device 11 may include a plurality of negative pressure flow paths 77. The negative pressure flow path 77 may branch into a plurality of paths downstream of the liquid ejection unit 12 in the recovery direction Dr. Each of the plurality of negative pressure flow paths 77 may be provided with a downstream valve 82 and a negative pressure adjustment valve 80. The plurality of negative pressure adjustment valves 80 may be provided in parallel.

[0101] The first valve mechanisms 21 provided in the positive pressure flow paths 76 may be open at different pressures. The negative pressure adjustment valves 80 provided in the negative pressure flow paths 77 may be adjusted to different pressures.

[0102] The liquid ejection device 11 may select the first valve mechanism 21 and the negative pressure adjustment valve 80 to be used by opening and closing the upstream valve 81 and the downstream valve 82. For example, when circulating liquid, the liquid ejection device 11 may use a first valve mechanism 21 that produces a low pressure after adjustment and a negative pressure adjustment valve 80 that produces a low negative pressure after adjustment. During circulation, low-pressure liquid may be supplied to the liquid ejection unit 12, and a small negative pressure may be applied to the liquid ejection unit 12.

[0103] For example, when filling the liquid discharger 12 with liquid, the liquid discharger 11 may use a first valve mechanism 21 that produces a large adjusted pressure and a negative pressure adjustment valve 80 that produces a large adjusted negative pressure. That is, when filling, liquid at a large pressure may be supplied to the liquid discharger 12, and a large negative pressure may be applied to the liquid discharger 12.

[0104] <Sixth Change Example> 10, the liquid discharger 11 may include a plurality of atmosphere release valves 84. The atmosphere release valves 84 may be provided in the first gas flow path 18f and the second gas flow path 18s. The atmosphere release valve 84 provided in the first gas flow path 18f can open the inside of the first tank 57 to the atmosphere. The atmosphere release valve 84 provided in the second gas flow path 18s can open the inside of the second tank 58 to the atmosphere.

[0105] <Seventh Change Example> 11 , the liquid storage section 17 may have a moisture-permeable membrane 60. The moisture-permeable membrane 60 may divide the liquid storage section 17 into a liquid chamber 61 and a moisturizing liquid chamber 62. The upstream end of the positive pressure flow path 76 in the supply direction Ds may be connected to the liquid storage section 17. The downstream end of the negative pressure flow path 77 in the recovery direction Dr may be connected to the liquid storage section 17. The liquid pump 85 may be provided in the positive pressure flow path 76 between the liquid storage section 17 and the upstream valve 81. The liquid pump 85 may be provided in the negative pressure flow path 77 between the downstream valve 82 and the liquid storage section 17.

[0106] <Example of change No. 8> As shown in FIG. 12, the liquid ejection device 11 may include a plurality of relief channels 86. A second valve mechanism 22 may be provided in a relief flow path 86 connected to the positive pressure flow path 76. The second valve mechanism 22 circulates the liquid in the relief flow path 86 when the pressure downstream of the liquid pump 85 in the supply direction Ds becomes higher than a predetermined pressure.

[0107] A first valve mechanism 21 may be provided in the relief flow path 86 connected to the negative pressure flow path 77. The first valve mechanism 21 circulates the liquid in the relief flow path 86 when the negative pressure upstream of the liquid pump 85 in the recovery direction Dr becomes greater than a predetermined negative pressure.

[0108] <9th change example> 13, the positive pressure flow path 76 may branch into multiple paths downstream of the relief flow path 86 in the supply direction Ds and merge upstream of the liquid discharger 12 in the supply direction Ds. Each of the branched positive pressure flow paths 76 may be provided with an upstream valve 81 and a first valve mechanism 21. The multiple first valve mechanisms 21 may be provided in parallel.

[0109] The negative pressure flow path 77 may branch into multiple paths downstream of the liquid discharger 12 in the recovery direction Dr and merge upstream of the relief flow path 86 in the recovery direction Dr. Each of the multiple negative pressure flow paths 77 may be provided with a downstream valve 82 and a negative pressure adjustment valve 80. The multiple negative pressure adjustment valves 80 may be provided in parallel.

[0110] <10th Change Example> 14 , the plurality of positive pressure flow paths 76 may be connected to the liquid discharger 12. The plurality of negative pressure flow paths 77 may be connected to the liquid discharger 12. The liquid discharger 12 may include a high-pressure flow path 90, a low-pressure flow path 91, and a plurality of differential pressure flow paths 92.

[0111] The first valve mechanisms 21 provided in the positive pressure flow paths 76 have different pressures at which they open. The negative pressure adjustment valves 80 provided in the negative pressure flow paths 77 have different pressures after adjustment.

[0112] The high-pressure flow path 90 and the low-pressure flow path 91 connect the positive pressure flow path 76 and the negative pressure flow path 77, respectively. A plurality of differential pressure flow paths 92 connect the high-pressure flow path 90 and the low-pressure flow path 91, respectively. The liquid in the high-pressure flow path 90 has a higher pressure than the liquid in the low-pressure flow path 91. Therefore, in the differential pressure flow path 92, the liquid flows from the high-pressure flow path 90 to the low-pressure flow path 91. The nozzle 15 may be provided in the differential pressure flow path 92.

[0113] <11th Change Example> 15, the liquid ejection device 11 may include one positive pressure flow path 76 and multiple negative pressure flow paths 77. The positive pressure flow path 76 is connected to the first tank 57 and a high pressure flow path 90.

[0114] <12th Change Example> 16, the liquid discharger 11 may include a plurality of positive pressure flow paths 76 and one negative pressure flow path 77. The negative pressure flow path 77 is connected to a low pressure flow path 91 and the second tank 58.

[0115] <13th Change Example> 17 , the positive pressure flow path 76 may branch downstream of the upstream valve 81 in the supply direction Ds. Each of the branched positive pressure flow paths 76 may be provided with a first valve mechanism 21. The branched positive pressure flow paths 76 may be connected to a high pressure flow path 90 and a low pressure flow path 91.

[0116] The plurality of negative pressure flow paths 77 may each be connected to a high pressure flow path 90 and a low pressure flow path 91. The plurality of negative pressure flow paths 77 may each be provided with a negative pressure adjustment valve 80. The plurality of negative pressure flow paths 77 may merge upstream of the downstream valve 82 in the recovery direction Dr.

[0117] <14th Change Example> 18, the positive pressure flow path 76 may connect the liquid storage portion 17 and the high pressure flow path 90. The multiple negative pressure flow paths 77 connected to the high pressure flow path 90 and the low pressure flow path 91 may merge upstream of the downstream valve 82 in the recovery direction Dr.

[0118] <15th Change Example> 19 , the positive pressure flow path 76 may branch downstream of the upstream valve 81 in the supply direction Ds and be connected to a high pressure flow path 90 and a low pressure flow path 91. The negative pressure flow path 77 may connect the low pressure flow path 91 and the liquid storage portion 17.

[0119] <Other change examples> The liquid discharger 11 may be configured to include either the first valve mechanism 21 or the second valve mechanism 22. The liquid discharger 11 may supply the liquid by controlling the pressure pump 20, the pressure reduction pump 79, the atmosphere release valve 84, the upstream valve 81, the downstream valve 82, and the like.

[0120] In the first upstream chamber 24, the pressure-receiving area of ​​the second flexible membrane 27 may be different from the pressure-receiving area of ​​the first valve portion 36. In the second downstream chamber 40, the pressure-receiving area of ​​the fourth flexible membrane 42 may be different from the pressure-receiving area of ​​the second valve portion 51. The pressure-receiving areas of the first valve mechanism 21 and the second valve mechanism 22 may be adjusted depending on the attitude, the type of fluid being handled, the ease of deformation of the second flexible membrane 27 or the fourth flexible membrane 42, etc.

[0121] The amount of deflection of the first flexible film 26 when the first opening / closing unit 28 is in the first closed state may be greater than the amount of deflection of the first flexible film 26 when the first opening / closing unit 28 is in the first open state. The amount of deflection of the third flexible film 41 when the second opening / closing unit 43 is in the second closed state may be greater than the amount of deflection of the third flexible film 41 when the second opening / closing unit 43 is in the second open state.

[0122] The amount of deflection of the second flexible film 27 when the first opening / closing unit 28 is in the first closed state may be greater than the amount of deflection of the second flexible film 27 when the first opening / closing unit 28 is in the first open state. The amount of deflection of the fourth flexible film 42 when the second opening / closing unit 43 is in the second closed state may be greater than the amount of deflection of the fourth flexible film 42 when the second opening / closing unit 43 is in the second open state.

[0123] The first seal portion 37 may be provided at the first communication port 32. The second seal portion 52 may be provided at the second communication port 47. The first shaft portion 35 and the second flexible film 27 may be integrally formed. The second shaft portion 50 and the fourth flexible film 42 may be integrally formed.

[0124] The liquid ejection device 11 may be a liquid ejection device that ejects or discharges liquids other than ink. The liquid ejected as minute droplets from the liquid ejection device may be in the form of granules, tears, or strings. The liquid referred to here may be any material that can be ejected from the liquid ejection device. For example, the liquid may be in any liquid phase, including fluids such as high or low viscosity liquids, sols, gel water, other inorganic solvents, organic solvents, solutions, liquid resins, liquid metals, and metal melts. The liquid may refer not only to a single state of matter, but also to solid functional material particles, such as pigments and metal particles, dissolved, dispersed, or mixed in a solvent. Typical examples of liquids include inks and liquid crystals, as described in the above embodiments. Here, ink encompasses various liquid compositions, such as general water-based inks and oil-based inks, as well as gel inks and hot-melt inks. Specific examples of liquid ejection devices include devices that eject liquids containing dispersed or dissolved materials such as electrode materials and color materials used in the manufacture of liquid crystal displays, electroluminescent displays, surface-emitting displays, and color filters. The liquid ejection device may be a device that ejects bioorganic materials used in biochip manufacture, a device used as a precision pipette to eject sample liquids, a textile printing device, a microdispenser, or the like. The liquid ejection device may be a device that ejects lubricating oil with pinpoint accuracy onto precision machinery such as watches and cameras, or a device that ejects transparent resin liquids such as ultraviolet-curing resins onto substrates to form micro-hemispherical lenses, optical lenses, and the like used in optical communication elements. The liquid ejection device may also be a device that ejects etching liquids such as acids or alkalis to etch substrates, etc.

[0125] [Definition] The phrase "at least one" as used herein means "one or more" of the desired options. As an example, the phrase "at least one" as used herein means "only one option" or "both of two options" when the number of options is two. As another example, the phrase "at least one" as used herein means "only one option," "any combination of two options," or "any combination of three or more options" when the number of options is three or more.

[0126] [Note] The technical concepts and effects that can be understood from the above-described embodiment and modified examples will be described below.

[0127] (A) The valve mechanism comprises an upstream chamber into which a fluid flows through an inlet, a downstream chamber having a first flexible membrane and communicating with the upstream chamber through a communication port downstream of the upstream chamber, a second flexible membrane separating the upstream chamber and the downstream chamber, an opening / closing unit capable of opening and closing the communication port, and a biasing unit that biases the first flexible membrane in a direction increasing the volume of the downstream chamber, and the opening / closing unit is provided across the upstream chamber and the downstream chamber and has an axis unit that can move in response to displacement of the first flexible membrane and the second flexible membrane, and a valve unit connected to the axis unit that opens and closes the communication port.

[0128] With this configuration, the pressure in the upstream chamber acts on the second flexible membrane and the valve portion. The pressure in the upstream chamber acting on the valve portion and the pressure in the upstream chamber acting on the second flexible membrane cancel each other out. Therefore, the opening and closing portion can be opened and closed by fluctuations in the pressure in the downstream chamber. This reduces variations in the pressure of the outflowing fluid.

[0129] (B) The valve mechanism includes an upstream chamber having a first flexible membrane into which a fluid flows through an inlet, a downstream chamber downstream of the upstream chamber and communicating with the upstream chamber through a communication port, a second flexible membrane separating the upstream chamber and the downstream chamber, an opening / closing unit capable of opening and closing the communication port, and a biasing unit that biases the first flexible membrane in a direction that reduces the volume of the upstream chamber, and the opening / closing unit is provided across the upstream chamber and the downstream chamber and has an axis unit that can move in response to displacement of the first flexible membrane and the second flexible membrane, and a valve unit connected to the axis unit that opens and closes the communication port.

[0130] With this configuration, the pressure in the downstream chamber acts on the second flexible membrane and the valve portion. The pressure in the downstream chamber acting on the valve portion and the pressure in the downstream chamber acting on the second flexible membrane cancel each other out. Therefore, the opening and closing portion can be opened and closed by fluctuations in the pressure in the upstream chamber. This reduces variations in the pressure of the inflowing fluid.

[0131] (C) In the valve mechanism described in (A) or (B), the shaft portion may be inserted into the second flexible membrane, one end of the shaft portion may be connected to the first flexible membrane, and the other end of the shaft portion may be connected to the valve portion.

[0132] With this configuration, one end of the stem is connected to the first flexible membrane and the other end is connected to the valve portion, which allows the valve mechanism to be made smaller than when, for example, the first flexible membrane and the valve portion are connected midway along the stem.

[0133] (D) In ​​the valve mechanism described in (A) to (C), the valve portion may have a seal portion that can come into close contact with the communication port. According to this configuration, the valve portion has a seal portion that can be tightly fitted to the communication port, thereby improving the sealing performance of the communication port.

[0134] (E) In the valve mechanism described in (A) to (D), the amount of deflection of the first flexible membrane when the opening / closing section is in a closed state may be smaller than the amount of deflection of the first flexible membrane when the opening / closing section is in an open state, and the amount of deflection of the second flexible membrane when the opening / closing section is in a closed state may be smaller than the amount of deflection of the second flexible membrane when the opening / closing section is in an open state.

[0135] The first and second flexible films that have been bent by a force tend to return to a state with less bending. In this regard, with this configuration, the first and second flexible films bend less when the opening / closing unit is in the closed state. Therefore, the states of the first and second flexible films can be stabilized when the opening / closing unit is in the closed state.

[0136] (F) In the valve mechanism described in (A) to (E), the pressure-receiving area of ​​the second flexible membrane and the pressure-receiving area of ​​the valve portion may be the same. With this configuration, the same pressure is applied to the second flexible membrane and the valve portion. Therefore, by aligning the pressure-receiving areas of the second flexible membrane and the valve portion, the forces applied to the second flexible membrane and the valve portion can be easily canceled out.

[0137] (G) A liquid flow device includes a liquid storage section for storing a liquid, a liquid flow path connected to the liquid storage section, a pressure fluctuation mechanism for fluctuating the pressure of the liquid flowing through the liquid flow path, and a valve mechanism described in (A) to (F).

[0138] This configuration can achieve the same effects as the above-described valve mechanism. In the liquid flowing device described in (H) and (G), the valve mechanism may be provided in the liquid flow path.

[0139] According to this configuration, the valve mechanism is provided in the liquid flow path, so that the pressure of the liquid flowing through the liquid flow path can be stabilized. In the liquid flowing device described in (J) and (G), the valve mechanism may be capable of adjusting the pressure of the liquid storage section.

[0140] According to this configuration, the valve mechanism is capable of adjusting the pressure in the liquid reservoir, thereby stabilizing the pressure of the liquid sent from the liquid reservoir to the liquid flow path. In the liquid flowing device described in (K) and (G), when the valve mechanism is a first valve mechanism, the inlet is a first inlet, the upstream chamber is a first upstream chamber, the communication port is a first communication port, the downstream chamber is a first downstream chamber, the opening / closing unit is a first opening / closing unit, the biasing unit is a first biasing unit, the shaft unit is a first shaft unit, and the valve unit is a first valve unit, the liquid flowing device further comprises a second valve mechanism, the second valve mechanism having a third flexible membrane and including a second upstream chamber into which a fluid flows via a second inlet and a second communication port downstream of the second upstream chamber. a second downstream chamber communicating with the second upstream chamber via a fourth flexible membrane separating the second upstream chamber and the second downstream chamber; a second opening / closing unit capable of opening and closing the second communication port; and a second biasing unit biasing the third flexible membrane in a direction that reduces the volume of the second upstream chamber, wherein the second opening / closing unit is provided across the second upstream chamber and the second downstream chamber and has a second shaft unit that is movable in response to displacement of the third flexible membrane and the fourth flexible membrane, and a second valve unit that is connected to the second shaft unit and opens and closes the second communication port.

[0141] According to this configuration, the first valve mechanism opens the opening / closing unit when the negative pressure in the first downstream chamber increases. The second valve mechanism opens the opening / closing unit when the pressurization in the second upstream chamber increases. Therefore, by using the first valve mechanism and the second valve mechanism in accordance with the fluid pressure, it is possible to stabilize the pressures of the positive pressure fluid and the negative pressure fluid.

[0142] (L) A liquid ejection device includes the liquid flow device described in (G) to (K) and a liquid ejection section that ejects liquid. This configuration can achieve the same effects as the above-described valve mechanism. [Explanation of symbols]

[0143] 11...liquid ejection device, 12...liquid ejection portion, 13...liquid flow device, 14...medium, 15...nozzle, 16...nozzle surface, 17...liquid storage portion, 18...gas flow path, 18f...first gas flow path, 18s...second gas flow path, 19...liquid flow path, 20...pressurizing pump which is an example of a pressure fluctuation mechanism, 21...first valve mechanism which is an example of a valve mechanism, 22...second valve mechanism which is an example of a valve mechanism, 24...first upstream chamber which is an example of an upstream chamber, 25...first downstream chamber which is an example of a downstream chamber, 26...first flexible membrane, 27...second flexible membrane, 27a...first surface, 27b...second surface, 28...one of opening / closing portions a first opening / closing portion which is an example of a first opening / closing portion, 29... a first biasing portion which is an example of a biasing portion, 31... a first inlet which is an example of an inlet, 32... a first communication port which is an example of a communication port, 33... a first outlet port, 35... a first shaft portion which is an example of a shaft portion, 36... a first valve portion which is an example of a valve portion, 37... a first seal portion which is an example of a seal portion, 39... a second upstream chamber which is an example of an upstream chamber, 40... a second downstream chamber which is an example of a downstream chamber, 41... a third flexible membrane which is an example of a first flexible membrane, 42... a fourth flexible membrane which is an example of a second flexible membrane, 42a... a third surface, 42b... a fourth surface, 43... a second opening / closing portion which is an example of a opening / closing portion. Closing portion, 44...second biasing portion which is an example of a biasing portion, 46...second inlet which is an example of an inlet, 47...second communication port which is an example of a communication port, 48...second outlet, 50...second shaft portion which is an example of a shaft portion, 51...second valve portion which is an example of a valve portion, 52...second seal portion which is an example of a seal portion, 54...liquid supply source, 55...moisture supply source, 57...first tank which is an example of a liquid storage portion, 58...second tank which is an example of a liquid storage portion, 60...moisture-permeable membrane, 61...liquid chamber, 62...moisturizing liquid chamber, 64...liquid supply flow path, 65...moisture supply flow path, 67...liquid supply valve, 68...moisture Supply valve, 70...mixing section, 72...mixing flow path, 73...mixing pump, 75...connecting flow path, 76...positive pressure flow path which is an example of a liquid flow path, 77...negative pressure flow path which is an example of a liquid flow path, 78...liquid delivery section, 79...pressure reduction pump which is an example of a pressure fluctuation mechanism, 80...negative pressure adjustment valve, 81...upstream valve, 82...downstream valve, 84...atmospheric release valve, 85...liquid pump, 86...relief flow path, 87...first connection section, 88...second connection section, 90...high pressure flow path, 91...low pressure flow path, 92...differential pressure flow path, D1...first direction, D2...second direction, Dr...recovery direction, Ds...supply direction, Z...vertical direction.

Claims

1. an upstream chamber into which a fluid flows via an inlet; a downstream chamber having a first flexible membrane and communicating with the upstream chamber via a communication port downstream of the upstream chamber; a second flexible membrane separating the upstream chamber and the downstream chamber; an opening / closing unit that can open and close the communication port; a biasing portion that biases the first flexible membrane in a direction that increases the volume of the downstream chamber; Equipped with The opening and closing section is a shaft portion provided across the upstream chamber and the downstream chamber and movable in response to displacement of the first flexible film and the second flexible film; a valve portion connected to the shaft portion and configured to open and close the communication port; A valve mechanism comprising:

2. an upstream chamber having a first flexible membrane and receiving fluid through an inlet; a downstream chamber that is downstream of the upstream chamber and communicates with the upstream chamber via a communication port; a second flexible membrane separating the upstream chamber and the downstream chamber; an opening / closing unit that can open and close the communication port; a biasing portion that biases the first flexible membrane in a direction that reduces the volume of the upstream chamber; Equipped with The opening and closing section is a shaft portion provided across the upstream chamber and the downstream chamber and movable in response to displacement of the first flexible film and the second flexible film; a valve portion connected to the shaft portion and configured to open and close the communication port; A valve mechanism comprising:

3. The shaft portion is inserted into the second flexible membrane, one end of the shaft portion is connected to the first flexible film; 3. The valve mechanism according to claim 1, wherein the other end of the shaft portion is connected to the valve portion.

4. 3. The valve mechanism according to claim 1, wherein the valve portion has a seal portion that can be tightly fitted to the communication port.

5. a deflection amount of the first flexible film when the opening / closing unit is in a closed state is smaller than a deflection amount of the first flexible film when the opening / closing unit is in an open state; 3. The valve mechanism according to claim 1, wherein the amount of deflection of the second flexible membrane when the opening / closing unit is in a closed state is smaller than the amount of deflection of the second flexible membrane when the opening / closing unit is in an open state.

6. 3. The valve mechanism according to claim 1, wherein a pressure-receiving area of ​​the second flexible membrane and a pressure-receiving area of ​​the valve portion are the same.

7. a liquid storage section that stores a liquid; a liquid flow path connected to the liquid reservoir; a pressure fluctuation mechanism that fluctuates the pressure of the liquid flowing through the liquid flow path; The valve mechanism according to claim 1; A liquid flowing device comprising:

8. a liquid storage section that stores a liquid; a liquid flow path connected to the liquid reservoir; a pressure fluctuation mechanism that fluctuates the pressure of the liquid flowing through the liquid flow path; The valve mechanism according to claim 2; A liquid flowing device comprising:

9. 9. The liquid flowing device according to claim 7, wherein the valve mechanism is provided in the liquid flow path.

10. 9. The liquid flowing device according to claim 7, wherein the valve mechanism is capable of adjusting the pressure of the liquid reservoir.

11. the valve mechanism is a first valve mechanism, The inlet is a first inlet, The upstream chamber is a first upstream chamber, The communication port is a first communication port, The downstream chamber is a first downstream chamber, The opening / closing unit is a first opening / closing unit, The biasing portion is a first biasing portion, The shaft portion is a first shaft portion, When the valve portion is a first valve portion, Further comprising a second valve mechanism; The second valve mechanism is a second upstream chamber having a third flexible membrane and receiving fluid through a second inlet; a second downstream chamber downstream of the second upstream chamber and communicating with the second upstream chamber via a second communication port; a fourth flexible membrane separating the second upstream chamber and the second downstream chamber; a second opening / closing unit that can open and close the second communication port; a second biasing portion that biases the third flexible membrane in a direction that reduces the volume of the second upstream chamber; Equipped with The second opening / closing unit is a second shaft portion provided across the second upstream chamber and the second downstream chamber and movable in response to displacement of the third flexible membrane and the fourth flexible membrane; a second valve portion connected to the second shaft portion and configured to open and close the second communication port; 8. The liquid flow device according to claim 7, further comprising:

12. The liquid flowing device according to claim 7 or 8; a liquid ejection unit that ejects liquid; A liquid ejection device comprising:

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