Shaft member, shaft arrangement, semiconductor processing system including shaft member, and related method of making shaft member and shaft arrangement

Abstract

To provide a shaft member, a shaft arrangement, and a semiconductor processing system including the shaft member, and a related method of making the shaft member and the shaft arrangement.SOLUTION: A shaft member includes an axially disposed shaft member body having a drive end, an intermediate segment, and a seating end. The drive end defines a locking feature therein, the intermediate segment extends from the drive end of the shaft member body, and the seating end is axially separated from the drive end of the shaft member body by the intermediate segment of the shaft member body. The seating end has one or more angled facets for axially positioning a spider member on the shaft member body. A shaft arrangement, a semiconductor processing system, and a method of making the shaft member are also described.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] [CROSS-REFERENCE TO RELATED APPLICATIONS] This application claims priority to and the benefit of U.S. Provisional Patent Application No. 63 / 571,797, filed March 29, 2024, and entitled "SHAFT MEMBERS, SHAFT ARRANGEEMENTS AND SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING SHAFT MEMBERS, AND RELATED METHODS OF MAKING SHAFT MEMBERS FOR SHAFT ARRANGEMENTS," the contents of which are hereby incorporated by reference in their entirety.

[0002] The present disclosure relates generally to transmitting power in mechanical systems, and more particularly to limiting backlash in mechanical systems employed to transmit power. [Background technology]

[0003] Mechanical systems are commonly employed to transmit power, such as rotation or force, using structures such as shafts and push rods. Shafts are commonly supported for rotational movement using bearings or bushings and typically transmit rotation to the rotating structure through a linkage. Push rods are commonly supported for directional movement, typically using guides or sleeves, and may similarly be connected to the structure being pushed or pulled through a linkage. In some mechanical systems, gaps may exist between various elements within the mechanical system. Such gaps can cause clearance or loss of motion within the mechanism, potentially requiring the part to be oversized relative to an otherwise desired size for the application and / or requiring the movement of the structure to be slowed to accommodate backlash relative to the otherwise desired motion. While generally acceptable for its intended purpose, oversizing and / or slowing down mechanical elements in a mechanical system can limit the performance of the mechanical system.

[0004] Such systems and methods have generally been accepted for their intended purposes. However, there remains a need for improved shaft members, shaft arrangements, and semiconductor processing systems including shaft members, as well as methods of making shafts and shaft arrangements for semiconductor processing systems. The present disclosure provides a solution to this need. Summary of the Invention

[0005] A shaft member is provided. The shaft member includes an axially disposed shaft member body having a drive end, an intermediate segment, and a seating end. The drive end defines a locking feature therein, the intermediate segment extends from the drive end of the shaft member body, and the seating end is axially separated from the drive end of the shaft member body by the intermediate segment of the shaft member body. The seating end has one or more angled facets for axially positioning a spider member on the shaft member body.

[0006] In addition to or in the alternative to one or more of the above-mentioned features, further embodiments of the shaft member may include that the shaft member body is formed from a transparent material, such as a ceramic material like quartz.

[0007] In addition to or in the alternative to one or more of the above features, further embodiments of the shaft member may include the shaft member having a seating end surface axially opposite the drive end of the shaft member body that is substantially perpendicular to the axis.

[0008] In addition to or as an alternative to one or more of the above-mentioned features, further embodiments of the shaft member may include the shaft member defining a throughbore therein, the throughbore extending axially from a seating end face opening defined in the seating end face of the shaft member body to the drive end of the shaft member body.

[0009] In addition to or as an alternative to one or more of the above-mentioned features, further embodiments of the shaft member may include that the seating end of the shaft member body defines a chamfer from the angled facet to the seating end surface. The chamfer from the angled facet to the seating end surface may connect the one or more angled facets to the seating end surface of the shaft member body.

[0010] In addition to or in the alternative to one or more of the above features, further embodiments of the shaft member may include the angled facets being angled relative to the axis at an angled facet angle of about 5 degrees to about 40 degrees, or about 5 degrees to about 30 degrees, or about 5 degrees to about 25 degrees, or about 10 degrees to about 20 degrees. The angled facets may be angled relative to the axis at an angled facet angle of about 5 degrees to about 15 degrees, or about 8 degrees to about 12 degrees, or about 10 degrees, in certain embodiments.

[0011] In addition to or as an alternative to one or more of the features described above, further embodiments of the shaft member may include the one or more angled facets being one of three (3) angled facets defined on the seating end of the shaft member body.

[0012] In addition to or as an alternative to one or more of the above-mentioned features, further embodiments of the shaft member may include that the seating end of the shaft member body defines one or more wedge facets circumferentially offset from the one or more angled facets about the axis of rotation.

[0013] In addition to or in the alternative to one or more of the above-mentioned features, further embodiments of the shaft member may include another wedge facet being substantially parallel to the intermediate segment of the shaft member body.

[0014] In addition to or as an alternative to one or more of the above-described features, further embodiments of the shaft member may include: the one or more wedge facets being one of three (3) wedge facets defined by the seating end of the shaft member body; the one or more beveled facets being one of three (3) beveled facets defined by the seating end of the shaft member body; and each of the wedge facets separating circumferentially adjacent beveled facets of the seating end of the shaft member body.

[0015] In addition to or in the alternative to one or more of the above-mentioned features, further embodiments of the shaft member may include the seating end of the shaft member body defining a wedge facet-to-angle facet chamfer. The wedge facet-to-angle facet chamber may connect one or more wedge facets to one or more angled facets.

[0016] In addition to or as an alternative to one or more of the above-described features, further embodiments of the shaft member may include one or more wedge portions defining a chamfer from the wedge facet to the seating end surface. The chamfer from the wedge facet to the barb end surface may connect the one or more wedge facets to the seating end surface of the seating end of the shaft member body.

[0017] A shaft arrangement is provided. The shaft arrangement includes the shaft member and spider member described above. The shaft member body of the shaft member defines one or more wedge portions circumferentially offset from one or more angled facets. The spider member includes a spider member body having a hub portion extending about an axis and defining a seating socket therein, one or more arm portions extending radially from the hub portion, and one or more seating portions extending axially from the arm portions and radially separated from the hub portion by the arm portions of the spider member body. A shaft end of the spider member body is received in a seating socket defined in the hub portion of the spider member body.

[0018] In addition to or in place of one or more of the features described above, further examples of shaft arrangements may include the seating socket being bounded by one or more angled surfaces, which may be joined to one or more angled facets defined by the seating end of the shaft member body.

[0019] In addition to or in the alternative to one or more of the above-mentioned features, further examples of shaft arrangements may include the seating socket being bounded by three (3) angled facets distributed circumferentially about the axis of rotation, each of the three (3) angled facets being joined to a respective one (1) of the three (3) angled facets defined by the seating end of the shaft member body.

[0020] In addition to or as an alternative to one or more of the above-mentioned features, further examples of shaft arrangements may include the seating socket being bounded by one or more wedge surfaces, which may be joined to one or more wedge facets defined by the seating end of the shaft member body.

[0021] In addition to or in the alternative to one or more of the above-mentioned features, further examples of shaft arrangements may include the seating socket being bounded by three (3) wedge faces distributed circumferentially about the axis of rotation, each of the three (3) wedge facets being joined to a respective one (1) of the three (3) wedge facets defined by the seating end of the shaft member body.

[0022] In addition to or in place of one or more of the above-mentioned features, further examples of the shaft arrangement may include the hub portion having an upper surface defining an upper opening and a lower surface defining a lower opening. The lower opening may be coupled to the upper opening by a seating socket. The lower opening may have a generally circular shape. The upper opening may be bounded by a plurality of linear segments and a linear segment.

[0023] In addition to or as an alternative to one or more of the above-mentioned features, further examples of shaft arrangements may include one or more angled surfaces defining a relief recess therein. The relief recess defined in the angled surface may extend from the upper opening to a location axially intermediate the upper and lower openings of the hub portion of the spider member body.

[0024] In addition to or in place of one or more of the features described above, further examples of shaft arrangements may include a tube member and a lift pin actuator. The tube member may be disposed along the axis of rotation and may extend circumferentially around the shaft member. The lift pin actuator may be seated on the tube member, extend circumferentially around the shaft member, and be axially separated from the tube member by the lift pin actuator.

[0025] In addition to or as an alternative to one or more of the features described above, further examples of shaft arrangements may include a substrate support seated on the spider member and connected to the shaft member therethrough.

[0026] In addition to or in the alternative to one or more of the above-described features, further examples of shaft arrangements may include that one or more of the spider member, the tube member, and the lift pin actuator may be formed from a transparent material, such as a ceramic material like quartz.

[0027] A semiconductor processing system is provided that includes a process fluid source containing a material layer precursor, a chamber arrangement including the above-described shaft member connecting the substrate support to the lift and rotate module, an exhaust source coupled to the chamber arrangement, and a controller operably coupled to the chamber arrangement. The semiconductor processing system may be configured to deposit a material layer, such as a silicon-containing material layer epitaxial to an underlying substrate, on a substrate seated on the substrate support using a flow of the material layer precursor delivered by the process fluid source.

[0028] A method of making a shaft arrangement is provided that includes axially positioning a shaft member body formed from a ceramic material, defining a locking feature on a drive end of the shaft member body, defining an intermediate segment extending axially from the drive end of the shaft member body, and defining a seating end axially separated from the drive end of the shaft member body by grinding one or more angled facets into the shaft member body configured to axially position a spider member on the shaft member body in a 3-2-1 positioning scheme.

[0029] This Summary is provided to introduce a selection of concepts in a simplified form that are described in more detail below in the Detailed Description of Examples of the Disclosure. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter.

[0030] These and other features, aspects, and advantages of the inventions disclosed herein are described below with reference to drawings of certain specific embodiments, which are intended to illustrate, but not to limit, the invention. [Brief explanation of the drawings]

[0031] [Figure 1] FIG. 1 is a schematic diagram of a shaft arrangement including a shaft member according to an embodiment of the present disclosure, showing the shaft member supporting a substrate support within a chamber arrangement of a semiconductor processing system. [Figure 2] FIG. 2 is a schematic diagram of a portion of the semiconductor processing system of FIG. 1 according to an embodiment of the present disclosure, illustrating precursor sources that provide process fluids to the semiconductor processing system to deposit a material layer on a substrate seated on a substrate support. [Figure 3] FIG. 3 is a schematic diagram of a portion of the semiconductor processing system of FIG. 1 showing the arrangement and the shaft member disposed within the chamber arrangement having a single wafer cross-flow configuration according to an embodiment of the present disclosure. [Figure 4] FIG. 4 is a side view of the shaft arrangement of FIG. 1 showing a spider member seated on the shaft member and a lift pin actuator seated on the tube member in accordance with an embodiment of the present disclosure. [Figure 5] FIG. 5 is an exploded view of the shaft arrangement of FIG. 1 showing the spider member disassembled away from the shaft member and the lift pin actuator disassembled away from the tube member in accordance with an embodiment of the present disclosure. [Figure 6] FIG. 6 is a side view and a perspective view of the shaft member of FIG. 1 according to an embodiment of the present disclosure, illustrating wedge facets and angled facets defined on the seating end of the shaft member for seating a spider member on the seating end of the shaft member. [Figure 7] FIG. 7 is a side view and a perspective view of the shaft member of FIG. 1 according to an embodiment of the present disclosure, illustrating wedge facets and angled facets defined on the seating end of the shaft member for seating a spider member on the seating end of the shaft member. [Figure 8] FIG. 8 is a side view and a perspective view of the shaft member of FIG. 1 according to an embodiment of the present disclosure, illustrating wedge facets and angled facets defined on the seating end of the shaft member for seating a spider member on the seating end of the shaft member. [Figure 9] 9A and 9B are top and cross-sectional views, respectively, of the shaft member of FIG. 1 showing facets and through-holes according to an embodiment of the present disclosure. [Figure 10] 10 is a top view and a cross-sectional view of the shaft member of FIG. 1 showing facets and through holes, respectively, in accordance with an embodiment of the present disclosure. [Figure 11] FIG. 11 is a top view of the spider members of the shaft arrangement of FIG. 1, showing the seating portions of each of the spider members connected to the hub portion by the arm portions of the spider members, according to an embodiment of the present disclosure. [Figure 12] FIG. 12 is a cross-sectional side view of the spider member of FIG. 1 according to an embodiment of the present disclosure, illustrating a seating socket having a ramp surface and a wedge slot defined in a hub portion of the spider member body. [Figure 13] FIG. 13 is a top view of a portion of the hub portion of the spider member of FIG. 1 showing an upper opening bounded by linear and arcuate segments according to an embodiment of the present disclosure. [Figure 14] FIG. 14 is a cross-sectional side view of a hub portion of the spider member of FIG. 1 illustrating the wedge surfaces and circumferentially opposed ramp surfaces defined within the seating socket of the spider member in accordance with an embodiment of the present disclosure. [Figure 15] FIG. 15 is another cross-sectional side view of the hub portion of the spider member of FIG. 1 illustrating a wedge surface having a relief slot defined therein according to an embodiment of the present disclosure. [Figure 16] FIG. 16 is a block diagram of a method for making a shaft arrangement illustrating operation of the method according to an exemplary and non-limiting example of the method. DETAILED DESCRIPTION OF THE INVENTION

[0032] It will be appreciated that elements in the figures are illustrated for simplicity and clarity and have not necessarily been drawn to scale. For example, the relative size of some of the elements in the figures may be exaggerated compared to other elements to help to improve understanding of the illustrated embodiments of the present disclosure.

[0033] Reference is now made to the drawings, in which like reference numerals identify similar structural features or aspects of the present disclosure. For purposes of explanation and illustration, and not by way of limitation, a partial view of one example of a shaft member according to the present disclosure is shown in FIG. 1 and is generally designated by the reference character 200. Other examples or embodiments of shaft members, shaft arrangements, and semiconductor processing systems including shaft members according to the present disclosure, as well as methods of making shaft members and shaft arrangements, are provided in FIGS. 2-16, as described below. While the systems and methods of the present disclosure may be used to transmit rotation in a rotating machine, for example, in a semiconductor processing system employing a rotating substrate support during deposition of an epitaxial silicon-containing material layer on a substrate seated on the substrate support, the present disclosure is not limited to material layer deposition or semiconductor processing systems in general.

[0034] Referring to FIG. 1 , a semiconductor processing system 10 is shown including a shaft arrangement 100 having a shaft member 200. The semiconductor processing system 10 generally includes a process fluid source 12, a chamber arrangement 14, an exhaust source 16, and a controller 18. The process fluid source 12 is configured to deliver a process fluid 20 to the chamber arrangement 14. The chamber arrangement 14 connects the process fluid source 12 to an exhaust source 16 and includes a substrate support 22, e.g., a susceptor, configured and adapted to support a substrate 2 during deposition of a material layer 4 thereon. The chamber arrangement 14 further includes the shaft arrangement 100 having the shaft member 200 coupled to the substrate support 22. The exhaust source 16 is in communication with an external environment 24 outside the semiconductor processing system 10 and is configured to deliver residual precursors and / or reaction products 26 emitted by the chamber arrangement 14, and it is contemplated that the exhaust source 16 may include one or more vacuum and abatement devices, such as a scrubber and / or a burn box. It is also contemplated that the controller 18 may be operably coupled to the chamber arrangement 14 via, for example, a wired or wireless link 28 .

[0035] The term "substrate" as used herein may refer to any underlying material(s), including any underlying material(s) that can be modified or upon which a device, circuit, or film can be formed. The substrate may be continuous or discontinuous, rigid or flexible, solid or porous, or a combination thereof. The substrate may be in any form, such as (but not limited to), a powder, a plate, or a workpiece. Substrates in plate form may include wafers of various shapes and sizes, including, for example, 300 millimeter wafers. Substrates may be formed from semiconductor materials, including, for example, silicon (Si), silicon germanium (SiGe), silicon oxide (SiO), gallium arsenide (GaAs), gallium nitride (GaN), and silicon carbide (SiC). The substrate may contain a pattern or may be a patternless substrate, such as a so-called blanket type. As an example, substrates in powder form may have applications in pharmaceutical manufacturing.

[0036] The porous substrate may comprise one or more polymers. Examples of workpieces include medical devices (e.g., stents and syringes), jewelry, tooling equipment, components for battery manufacturing (e.g., anodes, cathodes, or separators), or components of photovoltaic cells. The continuous substrate may extend beyond the boundaries of the process chamber in which the deposition process occurs. In some processes, the continuous substrate may be moved through the process chamber, with the process continuing until the end of the substrate is reached. The continuous substrate may be fed from a continuous substrate feeding system to enable the manufacture and production of the continuous substrate in any suitable form. Non-limiting examples of continuous substrates may include sheets, nonwoven films, rolls, foils, webs, flexible materials, bundles of continuous filaments, or fibers (e.g., ceramic or polymer fibers). The continuous substrate may also include a carrier or sheet carrying one or more discontinuous substrates.

[0037] Referring to FIG. 2 , a process fluid source 12 and an exhaust source 16 are shown in accordance with an embodiment of the present disclosure. In the illustrated embodiment, the process fluid source 12 includes one or more material layer precursor sources 30, a dopant-containing material layer precursor source 32, an etchant source 34, and a carrier / diluent fluid source 36. The one or more material layer precursor sources 30 include a silicon-containing material layer precursor 38 and are coupled to the chamber arrangement 14 and configured to deliver a flow of the silicon-containing material layer precursor 38 to the chamber arrangement 14. It is contemplated that the one or more material layer precursor sources 30 may be coupled to the chamber arrangement 14 via one or more mass flow control devices, for example, a mass flow controller (MFC) device operably associated with the controller. It is also contemplated that the one or more material layer precursor sources 30 may be configured to deliver two or more silicon-containing material layer precursors to the chamber arrangement 14 and remain within the scope of the present disclosure.

[0038] In certain embodiments, the silicon-containing material layer precursor 38 may include a non-halogenated silicon-containing material layer precursor. Non-limiting examples of non-halogenated silicon-containing material layer precursors include silane, disilane, trisilane, and tetrasilane, as well as non-halogenated silicon-containing material layer precursors having four or more silicon atoms per molecule. According to certain embodiments of the present disclosure, the silicon-containing material layer precursor 38 may include a halogenated silicon-containing material layer precursor. Non-limiting examples of halogenated silicon-containing material layer precursors include monochlorosilane, dichlorosilane, and trichlorosilane, as well as chlorinated silicon-containing material layer precursors having four or more silicon atoms per molecule. It is also contemplated that the one or more material layer precursor sources 30 may include a metal-containing material layer precursor 40. In this regard, the one or more material layer precursor sources 30 may be configured to provide a flow of a germanium-containing material layer precursor to the chamber arrangement 14, such as germane (GeH), and / or a gallium-containing material layer precursor to the chamber arrangement 14, such as gallium trichloride (GaCl), while remaining within the scope of the present disclosure.

[0039] The dopant-containing material layer precursor source 32 is similar to one or more of the material layer precursor sources 30 and additionally includes a dopant-containing material layer precursor 42. The dopant-containing material layer precursor source 32 may be further configured to deliver a flow of the dopant-containing material layer precursor 42 to the chamber arrangement 14, for example, via the process fluid 20. In certain embodiments, the dopant-containing material layer precursor 42 may include a p-type dopant, such as boron (B). According to certain embodiments, the dopant-containing material layer precursor 42 may include an n-type dopant, such as phosphorus (P) and / or arsenic (As). As will be understood by those skilled in the art in view of the present disclosure, other dopant-containing material layer precursors and / or dopants may be employed and remain within the scope of the present disclosure.

[0040] The etchant source 34 is also similar to the one or more material layer precursor sources 30, additionally including an etchant 44 and configured to deliver the etchant 44 to the chamber arrangement 14, e.g., via the process fluid 20. In certain embodiments, the etchant 44 may include a halide. Examples of suitable halides include chlorine (Cl), such as chlorine (Cl) gas and hydrochloric acid (HCl), and fluorine (F), such as fluorine (F) gas and hydrofluoric acid (HF). According to certain embodiments, the etchant source 34 may be configured to deliver the etchant 44 to the chamber arrangement 14 independently of the process fluid 20, e.g., as a purge fluid and / or a cleaning fluid.

[0041] The carrier / diluent fluid source 36 may be coupled to the chamber arrangement 14 and configured to deliver a carrier / diluent fluid 46 to the chamber arrangement 14. In this regard, the carrier / diluent fluid source 36 may be configured to co-flow the carrier / diluent fluid 46 with one or more of the aforementioned fluids through the chamber arrangement 14. For example, the carrier / diluent fluid 46 may be co-flowed with one or more of the silicon-containing material layer precursors 38 through the chamber arrangement 14. The carrier / diluent fluid 46 may be co-flowed with the metal-containing material layer precursor 40 through the chamber arrangement 14. The carrier / diluent fluid 46 may also be co-flowed with the etchant 44 through the chamber arrangement 14. The carrier / diluent fluid 46 may also be flowed through the chamber arrangement 14 independently of one or more of the aforementioned fluids, for example, as a purge fluid. Non-limiting examples of suitable carrier / diluent fluids include inert gases such as hydrogen (H2) gas and nitrogen (N2) gas, and noble gases such as argon (Ar), helium (He), and krypton (Kr), as well as mixtures containing one or more of the foregoing carrier / diluent fluids.

[0042] The exhaust source 16 is coupled to the process fluid source 12 by the chamber arrangement 14 and is configured to evacuate the chamber arrangement 14. In this regard, the exhaust source 16 may include one or more vacuum pumps. The one or more vacuum pumps may be configured to maintain a pressure within the chamber arrangement 14 of less than 760 Torr, e.g., between about 760 Torr and 600 Torr, or between about 760 Torr and about 50 Torr, or even between about 760 Torr and about 0.01 Torr. It is also contemplated that the exhaust source 16 may include an abatement device, such as a scrubber and / or a burn box device.

[0043] Referring to Figure 3, chamber arrangement 14 is shown. In the illustrated embodiment, chamber arrangement 14 has a single-wafer cross-flow configuration and includes a chamber body 48, an inlet flange 50, and an exhaust flange 52. As shown and described herein, chamber arrangement 14 also includes an upper heater element array 54, a lower heater element array 56, a pyrometer 58, a lift and rotate module 60, a partition 62, and a shaft arrangement 100. Although shown and described herein as having a particular arrangement and including certain elements, it should be understood and appreciated that chamber arrangement 14 can have a different arrangement and / or include additional elements, or exclude elements shown and described herein, and remain within the scope of the present disclosure.

[0044] The chamber body 48 is formed from a transparent material 64, for example, a material transparent to electromagnetic radiation in the infrared wavelength range, and has an inlet end 66 and a longitudinally opposed outlet end 68. An inlet flange 50 abuts the inlet end 66 of the chamber body 48 and couples a process fluid source 12 (shown in FIG. 1 ) to the chamber body 48. An exhaust flange 52 abuts the outlet end 68 of the chamber body 48 and couples an exhaust source 16 (shown in FIG. 1 ) to the chamber body 48, and is fluidly connected to the inlet flange 50 by an interior 70 of the chamber body 48. In one particular embodiment, the inlet flange 50 may be as shown and described in U.S. Patent No. 11,053,591, issued July 6, 2021 to Ma et al., the contents of which are incorporated herein by reference in their entirety. According to certain embodiments, the exhaust flange 52 may be as shown and described in U.S. Patent No. 10,612,136 to Sreeram et al., issued April 7, 2020, the contents of which are incorporated herein by reference in their entirety. It is contemplated that the chamber body 48 may include one or more external ribs 72. In such embodiments, the one or more external ribs 72 may extend laterally around the exterior surface of the chamber body 48 at a location longitudinally between the inlet end 66 and the outlet end 68 of the chamber body 48. In certain embodiments, the transparent material 64 forming the chamber body 48 may include (or consist of, or consist essentially of) a ceramic material. Non-limiting examples of ceramic materials suitable for forming the chamber body 48 include quartz, fused silica, and sapphire.

[0045] The upper heater element array 54 is supported above the chamber body 48 and configured to transfer heat to the interior 70 of the chamber body 48 via operative association with a power source, for example, through the controller 18 (shown in FIG. 1 ). In certain embodiments, the upper heater element array 54 may include a plurality of filament-type heater elements, such as linear and / or bulbous filament lamps, supported above the chamber body 48. According to certain embodiments, the upper heater element array 54 may include a plurality of linear lamps. In such embodiments, the plurality of linear lamps may be supported above the chamber body 48 and extend laterally between the sidewalls of the chamber body 48.

[0046] It is further contemplated that the plurality of linear lamps, in such embodiments, may be longitudinally spaced apart from one another above the chamber body 48 between the inlet end 66 and the outlet end 68 of the chamber body 48 and may be substantially parallel to one another. The plurality of linear lamps may extend longitudinally between the inlet end 66 and the outlet end 68 of the chamber body 48, and the plurality of linear lamps, in such embodiments, are also contemplated to be laterally spaced apart from one another between laterally opposed sidewalls of the chamber body 48. The lower heater element array 56, similar to the upper heater element array 54, may additionally be supported below the chamber body 48 and may include a plurality of lower linear lamps. In such embodiments, the plurality of lower linear lamps may be supported below the chamber body substantially parallel to one another and substantially orthogonal to one or more upper linear lamps of the upper heater element array 54.

[0047] The divider 62 may be formed from an opaque material 74, for example, a material that is opaque to electromagnetic radiation in the infrared wavelength band, and is supported in the interior 70 of the chamber body 48. It is contemplated that the divider 62 further divides the interior 70 of the chamber body 48 into an upper chamber 76 and a lower chamber 78. It is further contemplated that the divider 62 further defines a partition opening 80 therein, which in turn fluidly connects the upper chamber 76 of the chamber body 48 to the lower chamber 78. In certain embodiments, the opaque material 74 forming the divider 62 may include a ceramic material. In this regard, the opaque material 74 may include, by way of example and not limitation, bulk silicon carbide, bulk graphite coated with silicon carbide, or pyrolytic carbon having a ceramic coating.

[0048] The substrate support 22 is disposed within the interior 70 of the chamber body 48. More specifically, the substrate support 22 is disposed within a partitioned opening 80 and supported for rotation R about an axis of rotation 82, or more generally, an axis defined by a shaft member 200 that is substantially collinear with the axis of rotation 82. In this regard, the substrate support 22 is carried by a shaft arrangement 100 and operably coupled to the lift and rotate module 60 by the shaft member 200. In the illustrated example, a plurality of lift pins 84 are slidably received within the substrate support 22, the plurality of lift pins 84 being movable between retracted and extended positions to seat and remove the substrate 2 from the substrate support 22, the plurality of lift pins 84 then cooperating with a gate valve 86 and a substrate transfer robot 88 to seat the substrate 2 following loading into the chamber body 48, and then to remove and retrieve the substrate 2 following deposition of a material layer 4 thereon. In certain embodiments, the substrate support 22 may be formed from an opaque material 90, such as a material that is opaque to electromagnetic radiation in the infrared wavelength range, such as bulk graphite coated with silicon carbide. According to certain embodiments, the substrate support 22 may be coupled to the shaft member 200 by a spider member 300 and, through thereto, to the lift and rotate module 60. It is also contemplated that the plurality of lift pins 84 may be operatively associated with the lift and rotate module 60 via a lift pin actuator 500 and a tube member 400. In this regard, the lift pin actuator 500 and the tube member 400 may be as shown and described in U.S. Patent Application Publication No. 2023 / 0116427 to Su et al., published April 13, 2023, the contents of which are incorporated herein by reference in their entirety.

[0049] 4 and 5, shaft arrangement 100 is shown. Shaft member 200 is disposed along rotation axis 82 and has spider member 300 seated thereon. Shaft member 200 is further supported for rotation R about rotation axis 82 relative to chamber body 48 (shown in FIG. 3), and in this regard may be operatively associated with lift and rotation module 60 (shown in FIG. 3). Spider member 300 is seated on shaft member 200 and fixed for rotation R about rotation axis 82 relative to shaft member 200, and configured to couple substrate support 22 (shown in FIG. 1). Lift pin actuator 500 extends about rotation axis R and shaft member 200, is rotationally fixed relative to chamber body 48, is translatable along rotation axis 82 relative to shaft member 200 and chamber body 48, and is seated on tube member 400. Tube member 400 is disposed along rotation axis 82 and extends around shaft member 200, and seats lift pin actuator 500 thereon. Tube member 400 is further supported for translational movement T along rotation axis 82, and may be operatively associated with lift and rotate module 60 for actuating a plurality of lift pins 84 (shown in FIG. 3 ).

[0050] The lift pin actuator 500 is fixed relative to the tube member 400 about the rotation axis 82 with respect to rotation R and is configured to drive a plurality of lift pins 84 (shown in FIG. 3 ) through the substrate support 22 during seating and removal of a substrate 2 (shown in FIG. 1 ) from the substrate support 22. In this regard, it is contemplated that the shaft member 200 is supported for rotation R about the rotation axis 82 and is axially fixed along the rotation axis 82 with respect to the chamber body 48 (shown in FIG. 3 ). It is further contemplated that the tube member 400 is axially free for translational movement along the rotation axis 82 and is fixed relative to the chamber body 48 with respect to rotation R about the rotation axis 82. As shown in FIG. 5 , it is contemplated that the tube member 400 is disposed along the rotation axis 82 and supported for translational movement along the rotation axis 82, and the lift pin actuator 500 is seated on the tube member 400 for translational movement with the push tube along the rotation axis 82. Shaft member 200 may be disposed (at least partially) within tube member 400 along rotation axis 82 and supported for rotation about rotation axis 82. Spider member 300 may be seated on shaft member 200 and fixed for rotation R about rotation axis 82 relative to shaft member 200.

[0051] 6-10, a shaft member 200 is shown in accordance with an embodiment of the present disclosure. As shown in FIG. 6, the shaft member 200 is configured and adapted to seat a spider member 300 (shown in FIG. 3) thereon and includes a shaft member body 202. The shaft member body 202 may be formed from a transparent material 204 (shown in FIG. 9), for example, a material transparent to electromagnetic radiation in the infrared wavelength range, and has a drive end 206 and an axially opposed seating end 208 separated from one another by an intermediate segment 210. The drive end 206 may be configured for engagement with the lift and rotate module 60 (shown in FIG. 3) using a locking feature 212, which may include, for example, one or more of a through-hole, an axial slot, and a spline feature.

[0052] The intermediate segment 210 of the shaft member body 202 extends from the drive end 206 of the shaft member body 202 along the rotational axis 82. The intermediate segment 210 further connects the seating end 208 of the shaft member body 202 to the drive end 206 of the shaft member body 202, and it is contemplated that the shaft member body 202 defines a shaft member diameter 214. In certain embodiments, the shaft member diameter 214 may be substantially continuous along the axial length of the intermediate segment 210 of the shaft member body 202. In this regard, the shaft member diameter 214 may be substantially continuous along the axial length of the shaft member body 202 between the locking feature 212 and the seating end 208 of the shaft member body 202. According to certain embodiments, the shaft member diameter 214 may be continuous along both the intermediate segment 210 of the shaft member body 202 and the drive end 206 of the shaft member body 202.

[0053] As shown in FIG. 7 , the seating end 208 of the shaft member body 202 may be separated from the drive end 206 (shown in FIG. 6 ) by an intermediate segment 210 of the shaft member body 202. In this regard, the farthest axial extension of the shaft member diameter 214 may bound the axial end of the intermediate segment 210 and the beginning of the seating end 208 of the shaft member body 202. It is contemplated that the seating end 208 of the shaft member body 202 further has a seating end surface 216, a plurality of angled facets 218, and a plurality of wedge facets 220. The seating end surface 216 may define a planar shape. The seating end surface 216 may be orthogonal to the axis of rotation 82. The seating end surface 216 may also have a generally triangular shape.

[0054] 8 , the seating end face 216 may define a seating end face opening 222 therein. The seating end face opening 222 may extend about the axis of rotation 82. The seating end face opening 222 may further connect a through hole 224 defined in the shaft member body 202 to an environment external to the shaft member body 202. The through hole 224 may extend from the seating end face opening 222 through the seating end 208 of the shaft member body 202 along the axis of rotation 82. In certain embodiments of the present disclosure, the through hole 224 may extend axially through the intermediate segment 210 of the shaft member body 202. According to certain embodiments, through-hole 224 may further extend through drive end 206 of shaft member body 202, with the through-hole further communicating with the external environment outside shaft member body 202 through seating end opening 222 defined in seating end face 216 to a drive end opening defined in the end face of drive end 206 of shaft member body 202. In such embodiments, through-hole 224 may be configured to receive a thermocouple therein to obtain temperature measurements from the underside of substrate support 22 (shown in FIG. 3), for example, to control the temperature of substrate 2 (shown in FIG. 1) during deposition of material layer 4 (shown in FIG. 1) thereon. Examples of suitable thermocouples include those shown and described in U.S. Patent No. 8,262,287, issued September 11, 2012 to Darabnia et al., the contents of which are incorporated herein by reference in their entirety.

[0055] 9, the angled facets 218 are configured to carry a spider member 300 (shown at 3) on the seating end 208 of the shaft member body 202. In this regard, it is contemplated that the angled facets 218 define a plane 240 angled relative to the axis of rotation 82 at an angled facet angle 238. The plane 240 may be further bounded by a parabolic perimeter 242, which extends between (or from) the seating end surface 216 and the intermediate segment 210 of the shaft member body 202. It is contemplated that the parabolic perimeter 242 opens in a direction toward the seating end surface 216 of the seating end 208 of the shaft member body 202, with an apex 244 of the parabolic perimeter 242 being proximate the intermediate segment 210 of the shaft member body 202. In certain embodiments, the beveled facet angle 238 may be between about 5 degrees and about 40 degrees, such as between about 5 degrees and about 30 degrees, or between about 5 degrees and about 25 degrees, or even between about 10 degrees and about 20 degrees. The beveled facets 218 may be angled relative to the axis at a beveled facet angle between about 5 degrees and about 15 degrees, or between about 8 degrees and about 12 degrees, or about 10 degrees, in certain embodiments. Advantageously, beveled facet angles within these ranges may limit the tendency of the spider member 300 (shown in FIG. 3 ) to become stuck at the seating end 208 of the shaft member body 202 due to thermal cycling of the shaft arrangement 100, facilitating removal of the spider member 300 from the shaft member 200, for example, during servicing of the semiconductor processing system 10 (shown in FIG. 1 ).

[0056] In certain embodiments, the angled facet 218 may join the seating end surface 216 with an angled facet-to-seating end surface chamfer 232. The angled facet-to-seating end surface chamfer 232 may extend between the flat surface 240 and the seating end surface 216, such as a blended common area. According to certain embodiments, the angled facet 218 may join the wedge facet 220 circumferentially adjacent to the angled facet 218 with an angled facet-to-wedge facet chamfer 234. In such embodiments, the angled facet-to-wedge facet chamfer 234 may extend continuously along a parabolic perimeter 242 that bounds the flat surface 240 of the angled facet 218. Advantageously, once the angled facets 218 are formed, the angled facet-to-seating end chamfers 232 and angled facet-to-wedge facet chamfers 234 may be cut such that there is clearance between the spider member 300 and the respective chamfers, allowing the spider member 300 to seat on the angled facets 218 of the seating end 208 of the shaft member body 202.

[0057] As shown in FIG. 10 , the facet of the angled facet 218 may be one of three (3) angled facets 218 defined on the seating end 208 of the shaft member body 202. The three (3) angled facets 218 may be circumferentially separated from one another by approximately 120 degrees about the axis of rotation 82. The three (3) angled facets 218 may be separated from one another by three (3) wedge facets 220 in such an embodiment, with circumferentially adjacent angled facets 218 being separated by respective wedge facets 220 of the three (3) wedge facets 220. Advantageously, an embodiment including three wedge facets 220 allows the spider member 300 to be positioned in a 3-2-1 positioning scheme ABC (shown in FIG. 10 ), where the spider member 300 is constrained in six degrees of freedom to limit (or eliminate) backlash within the shaft arrangement 100. Of further advantage, employing three (3) angled facets 218 allows for positioning of the spider member 300 while simplifying the manufacture of the shaft member 200, as the angled facets 218 may be formed using a relatively simple grinding operation rather than a more complex turning process to form a conical structure on the shaft member 200. Although shown and described herein as having three (3) angled facets 218, it should be understood and appreciated that the seating end 208 of the shaft member body 202 may have fewer or additional angled facets 218 and remain within the scope of the present disclosure.

[0058] The wedge facets 220 are configured to rotationally secure the spider member 300 relative to the shaft member 200 for rotating the substrate support 22 (shown in FIG. 1 ) using the lift and rotate module 60 (shown in FIG. 3 ) through the shaft member 200 and spider member 300. In this regard, and as shown in FIG. 8 , the wedge facets 220 may extend axially from the seating end surface 216 toward the intermediate segment 210 of the shaft member body 202. The wedge facets 220 may further terminate axially at the shaft member diameter 214. The wedge facets 220 may be circumferentially offset approximately 180 degrees from the inclination. As shown in FIG. 9 , the wedge facets 220 may define wedge surfaces 230 having a generally triangular shape (when viewed radially) with a corresponding arcuate profile (when viewed axially) around the intermediate segment 210 of the shaft member body 202. In certain embodiments of the present disclosure, the wedge facet 220 may join the seating end surface 216 to a chamfer 236 from the wedge facet to the seating end surface. As will be understood by one of ordinary skill in the art in view of the present disclosure, forming the seating end 208 of the shaft member body 202 with a chamfer 236 from the wedge facet to the seating end surface may improve the reliability of the shaft arrangement 100 (shown in FIG. 1 ) by limiting (or eliminating) the risk of the spider member 300 chipping the shaft member 200 during installation and / or removal of the spider member 300 from the shaft member 200, for example, in instances where the shaft member body 202 is formed from a relatively brittle material, such as a ceramic material like quartz.

[0059] 10 , it is contemplated that the wedge facet 220 may be one of a plurality of wedge facets 220 distributed circumferentially around the seating end 208 of the shaft member body 202. In this regard, it is contemplated that the wedge facet 220 may be one of a plurality of wedge facets 220 each circumferentially separating a pair of angled facets 218, with the plurality of wedge facets 220 and the plurality of angled facets 218 being distributed circumferentially around the axis of rotation 82 on the seating end 208 of the shaft member body 202. In the illustrated example, the wedge facet 220 is one of three (3) wedge facets 220 distributed circumferentially around the axis of rotation 82 on the seating end 208 of the shaft member body 202, with each of the plurality of wedge facets 220 separating an adjacent pair of the three (3) angled facets 218. Advantageously, forming the seating end 208 of the shaft member body 202 with three (3) wedge facets 220 may simplify manufacturing of the shaft member 200 by limiting (or eliminating) the need to define a conical surface on the seating end 208 of the shaft member body 202 with torque transmission features. Instead, the seating end 208 of the shaft member body 202 may transmit torque using a tangential component of the force applied by one or more angled facets 218 relative to the spider member body 302, eliminating the need to define a dedicated torque transmission feature on the seating end 208 of the shaft member body 202.

[0060] 11-15, a spider member 300 is shown. As shown in FIG. 11, the spider member 300 is configured and adapted to couple the substrate support 22 (shown in FIG. 3) to the shaft member 200, and in this regard includes a spider member body 302. The spider member body 302 may be formed from a transparent material 304 (shown in FIG. 12), for example, a material transparent to electromagnetic radiation in the infrared wavelength band, which may be the same as the transparent material 204 forming the shaft member body 202. The spider member body 302 is contemplated to have one or more seating portions 306, one or more arm portions 308, and a hub portion 310. The one or more seating portions 306 are configured to be slidably received within corresponding recesses defined in the lower surface of the substrate support 22 and are radially separated from the hub portion 310 by the arm portions 308 of the spider member body 302. In certain embodiments of the present disclosure, one or more seating portions 306 may extend axially along the axis of rotation 82 and in an axially opposite direction from the hub portion 310 of the spider member body 302. According to certain embodiments, one or more arm portions 306 may be substantially parallel to the axis of rotation 82. It is also contemplated that one or more arm portions 306 may be angled or substantially perpendicular to one or more arm portions 308 of the spider member body 302. As will be understood by those skilled in the art in view of the present disclosure, forming the spider member body 302 such that one or more arm portions 306 are substantially perpendicular to one or more arm portions 308 may simplify manufacturing of the spider member 300.

[0061] It is contemplated that one or more seating portions 306 may be one of a plurality of seating portions 306. In this regard, and as shown in FIG. 11 , one or more seating portions 306 may be one of three (3) seating portions 306 distributed about hub portion 110 and rotational axis 82. Furthermore, each of the plurality of seating portions 306 may be offset from a circumferentially adjacent seating portion 306 by a distinct angle, which may be approximately 120 degrees in certain embodiments of the present disclosure. While shown and described herein as having three (3) seating portions 306, it should be understood and appreciated that spider member body 302 may have fewer or additional seating portions 306 and remain within the scope of the present disclosure.

[0062] As shown in FIG. 12 , arm portions 308 of spider member body 302 connect seating portions 306 of spider member body 302 to hub portion 310 of spider member body 302. Arm portions 308 are contemplated to have a radially outer segment 312 and a radially inner segment 314. Seating portion 306 may protrude from radially outer segment 312 of arm portions 308 of spider member body 302 along rotation axis 82 and be connected therethrough to hub portion 310 of spider member body 302. Radially inner segment 314 of arm portions 308 of spider member body 302 may then connect radially outer segment 312 to hub portion 310 of spider member body 302. Radially inner segment 314 may further protrude radially from an outer peripheral surface 326 of hub portion 310 of spider member body 302. In certain embodiments of the present disclosure, one or more arm portions 308 may be one of a plurality of arm portions 308 of spider member body 302, for example, one of three (3) arm portions 308 of spider member body 302. As will be understood by one of ordinary skill in the art in view of the present disclosure, spider member body 302 may have fewer or additional arm portions 308 and remain within the scope of the present disclosure.

[0063] The hub portion 310 of the spider member body 302 is configured and adapted to seat on the seating end 208 of the shaft member 200. In this regard, the hub portion 310 defines an internal seating socket 322 and is contemplated to have an upper surface 324, an outer peripheral surface 326, and a lower surface 328. The upper surface 324 is disposed along the axis of rotation 82 and defines an upper opening 330. The upper surface 324 is further separated from the lower surface 328 by the outer peripheral surface 326, extends around the upper opening 330 and around the axis of rotation 82, and is generally annular in shape. The outer peripheral surface 326 extends axially from the upper surface 324 along the axis of rotation 82 and joins the radially inner segments 314 of the arm portions 308 of the spider member body 302 with a chamfer or fillet, and may be generally cylindrical in shape. Lower surface 328 extends about rotation axis 82 and defines a lower opening 332 (shown in FIG. 14 ) therein. It is contemplated that either (or both) of upper surface 324 and lower surface 328 may be substantially perpendicular to rotation axis 82 and / or one or more seating portions 306. It is also contemplated that outer peripheral surface 326 may be substantially parallel to rotation axis 82. It is further contemplated that one or more arm portions 308 may be substantially perpendicular to outer peripheral surface 326 of hub portion 310 of spider member body 302.

[0064] As shown in FIG. 13 , the top opening 330 defined in the top surface 324 of the hub portion 310 of the spider member body 302 is bounded by a plurality of linear segments 334 and a plurality of arcuate segments 336. The plurality of arcuate segments 336 may be distributed circumferentially about the axis of rotation 82. The plurality of arcuate segments 336 may further be spaced apart from one another by associated linear segments 334 to bound the top opening 330. The plurality of arcuate segments 336 may additionally correspond in number and curvature to the plurality of wedge facets 220 (shown in FIG. 7 ) of the seating end 208 of the shaft member body 202 (shown in FIG. 6 ), such that the seating end surface 216 (shown in FIG. 7 ) of the shaft member body 202 occupies (at least partially) the top opening 330 when the spider member 300 is seated on the shaft member 200 (shown in FIG. 1 ). The plurality of linear segments 334 may be distributed around the axis of rotation 82, may be tangent to a circumference extending around the axis of rotation 82, and / or may correspond in length to the width of the angled facet 218 (shown in FIG. 7).

[0065] In certain embodiments, one or more linear segments 334 may be interrupted by intermediate arcuate segments 338 extending radially outward from the rotational axis 82, whereby the hub portion 310 sits on the shaft member body 202 at a respective angled facet-to-wedge facet chamfer 234 defined between the plurality of wedge facets 220 and the plurality of angled facets 218 defined by the seating end 208 of the shaft member body 202. In the illustrated example, the top opening 330 is bounded by three (3) linear segments 334 and three (3) arcuate segments 336, each of the arcuate segments 336 being interrupted (e.g., bisected) by a single intermediate arcuate segment 338. As will be understood by one of ordinary skill in the art in view of the present disclosure, the top opening 330 may be bounded by fewer or additional linear segments 334 and / or arcuate segments 336 and remain within the scope of the present disclosure.

[0066] As shown in FIG. 14 , a lower opening 332 of the hub portion 310 is defined in a lower surface 328 of the hub portion 310. The lower opening 332 further extends circumferentially about the rotational axis 82 at a location radially inward of the outer peripheral surface 326 of the hub portion 310 of the spider member body 302 and is connected to the upper opening 330 by a seating socket 322, which may be generally circular in shape. It is contemplated that the upper opening 330 may be bounded by a chamfer 356 from the lower surface to the seating socket. As will be understood by those skilled in the art in view of the present disclosure, forming the spider member body 302 with the chamfer 356 from the lower surface to the seating socket may simplify assembly of the shaft arrangement 100 (shown in FIG. 1 ), for example, by allowing the assembly process to tolerate misalignment of the spider member 300 to the shaft member 200 (shown in FIG. 3 ) during seating of the spider member 300 onto the shaft member 200. In certain embodiments, the lower opening 332 may have a lower opening diameter 340 that is larger than the shaft member diameter 214 (shown in FIG. 8) defined by the intermediate segment 210 (shown in FIG. 6) of the shaft member body 202 (shown in FIG. 6), also simplifying assembly of the shaft arrangement 100.

[0067] As shown in FIG. 15 , the seating socket 322 is configured and adapted for positioning on the angled facets 218 (shown in FIG. 7 ) of the seating end 208 (shown in FIG. 6 ) of the shaft member body 202 (shown in FIG. 6 ) and rotation due to forces applied to the inner surface 342 of the hub portion 310 by the angled facets 218 of the shaft member body 202. In this regard, it is contemplated that the inner surface 342 of the hub portion 310 defines one or more angled surfaces 344 and one or more wedge slots 346. The one or more angled surfaces 344 may further be conjugated to the one or more angled facets 218 defined by the seating end 208 of the shaft member body 202 (e.g., operate as if joined by the aforementioned 3-2-1 positioning scheme of the spider member 300 on the shaft member 200). For example, the one or more angled surfaces 344 may slope toward the upper opening 330 at a slope angle 348 substantially equal to the slope facet angle 238 of the one or more angled facets 218 of the seating end 208 of the shaft member body 202. The one or more angled surfaces 344 may have a sloped surface area 350 substantially equal to the sloped facet area 246 (shown in FIG. 7 ) of the one or more angled facets 218. The one or more angled surfaces 344 may further connect the lower opening 332 to one of multiple linear segments 334 (shown in FIG. 13 ) that bound the upper opening 330.

[0068] In certain embodiments, the relief recess 352 may be defined in one or more of the angled surfaces 344. In such embodiments, the relief recess 352 may extend from an intermediate arcuate segment 338 (shown in FIG. 13 ) that bisects the linear segment 334 (shown in FIG. 13 ) to a location along the one or more angled surfaces 344 that is axially spaced from the lower opening 332. Advantageously, defining the relief recess 352 in the one or more angled surfaces 344 may circumferentially space the triplanar and biplanar contact points of the 3-2-1-positioning scheme of the spider member 300 on the shaft member 200 when the spider member 300 is seated on the seating end 208 of the shaft member 200. In the illustrated example, the inner surface 342 of the hub portion 310 defines three (3) angled surfaces 344, as shown in FIG. 13 . As will be understood by one of ordinary skill in the art in view of the present disclosure, the seating socket 322 may be bounded by alternatively additional angled surfaces 344 and remain within the scope of the present disclosure.

[0069] With continued reference to FIG. 15 , the one or more wedge slots 346 are configured and adapted to slidably receive therein one or more wedge facets 220 (shown in FIG. 7 ) defined by the seating end 208 (shown in FIG. 6 ) of the shaft member body 202 (shown in FIG. 6 ). In this regard, the one or more wedge slots 346 may be circumferentially adjacent to the one or more inclined surfaces 344. The one or more wedge slots 346 may further be joined to the one or more wedge facets 220. In this regard, the one or more wedge slots 346 may be substantially parallel to the outer peripheral surface 326 of the hub portion 310 of the spider member body 302. Furthermore, the one or more wedge slots 346 may further have a wedge slot area 354 substantially equal to that of the wedge surface 230 defined by the one or more wedge facets 220.

[0070] In certain embodiments, one or more wedge slots 346 may extend axially between a lower opening 332 defined in the lower surface 328 of the hub portion 310 and a respective one of the plurality of arcuate segments 336 that bounds the upper opening 330 defined in the upper surface 324 of the hub portion 310 of the spider member body 302. According to certain embodiments, the number of wedge slots 346 defined in the seating socket 322 may match the number of wedge facets 220 (shown in FIG. 7 ) defined by the seating end 208 (shown in FIG. 6 ) of the shaft member body 202 (shown in FIG. 6 ), whereby the wedge facets 220 of the shaft member body 202 cooperate with the wedge slots 346 defined in the hub portion 310 to rotationally secure the shaft member 200 relative to the spider member 300 about the rotation axis 82. In the illustrated example, the interior surface 342 bounding the seating socket 322 defines three (3) wedge slots 346. As will be understood by one of ordinary skill in the art in light of the present disclosure, the interior surface 342 of the hub portion 310 of the spider member body 302 may define fewer or additional wedge slots 346 than shown and described herein and remain within the scope of the present disclosure.

[0071] Referring to FIG. 16 , a method 600 of making a shaft member, for example, shaft member 200 (shown in FIG. 1 ), is shown. As indicated at box 602, method 600 includes axially positioning a shaft member body formed from a ceramic material, for example, positioning shaft member body 202 (shown in FIG. 6 ) formed from transparent material 204 (shown in FIG. 8 ) along rotation axis 82 (shown in FIG. 3 ). As indicated at box 604, method 600 also includes defining a drive end having a locking feature on the end of the shaft member body, for example, defining locking feature 212 (shown in FIG. 6 ) in drive end 206 (shown in FIG. 6 ) of the shaft member body. As indicated at boxes 606 and 608, method 600 further includes defining an intermediate segment extending axially from the drive end of the shaft member, and a seating end axially separated from the drive end on an axially opposite end of the shaft member body, for example, intermediate segment 210 (shown in FIG. 6 ) and seating end 208 (shown in FIG. 6 ). As indicated by box 610, it is contemplated that the seating end is defined by scraping one or more angled facets, for example, one or more angled facets 218 (shown in FIG. 7), at the end of the shaft member body axially opposite the drive end of the shaft member body.

[0072] As indicated by Box 612, in certain embodiments of the present disclosure, defining 610 the one or more angled facets may include grinding three (3) angled facets into the seating end of the shaft member body. As indicated by Box 614, according to certain embodiments, defining 610 the one or more angled facets may include defining one or more wedge facets separating circumferentially adjacent angled facets. As indicated by Box 616, according to certain embodiments, it is contemplated that a through hole, such as through hole 224 (shown in FIG. 8 ), may be defined in the shaft member body extending between the drive end and the seating end of the shaft member body. As indicated by Box 618, it is also contemplated that method 600 may additionally include defining one or more chamfers on the seating end of the shaft member body, e.g., one or more of wedge facet-to-seating end surface chamfer 236 (shown in FIG. 10 ), angled facet-to-seating end surface chamfer 232 (shown in FIG. 10 ), and / or angled facet-to-wedge facet chamfer 234 (shown in FIG. 10 ). Also as indicated by Box 618, in such an embodiment, another of the chamfers may be defined on the seating end of the shaft member body using a sawing or cutting operation and extend axially from a seating end surface substantially perpendicular to the axis, e.g., seating end surface 216 (shown in FIG. 7 ).

[0073] While the present disclosure has been provided in the context of certain embodiments and examples, those skilled in the art will understand that the present disclosure extends beyond the specifically described embodiments to other alternative embodiments and / or uses of the embodiments, and to obvious modifications and equivalents thereof. In addition, while several variations of the embodiments of the present disclosure have been shown and described in detail, other modifications that are within the scope of the present disclosure will be readily apparent to those skilled in the art based on the present disclosure. It is also contemplated that various combinations or subcombinations of the specific features and aspects of the embodiments may be made and still fall within the scope of the present disclosure. It will be understood that various features and aspects of the disclosed embodiments can be combined with or substituted for one another to form various modes of embodiment of the present disclosure. Therefore, it is not intended that the scope of the present disclosure should be limited by the specific embodiments described above.

[0074] The headings provided herein, if any, are for convenience only and do not necessarily affect the scope or meaning of the devices and methods disclosed herein. [Explanation of symbols]

[0075] 200 Shaft member 202 Shaft member body 206 Drive end 208 Seating End 210 Middle Segment 218 Inclined Facets 300 Spider parts

Claims

1. A shaft member body disposed along an axis, a drive end defining a locking feature therein; an intermediate segment extending from the drive end of the shaft member body; a seating end axially separated from the drive end of the shaft member body by the intermediate segment of the shaft member body; A shaft member comprising a shaft member body having A shaft member, the seating end having one or more angled facets configured to axially locate a spider member on the shaft member body.

2. The shaft member of claim 1 , wherein the shaft member body is formed from a ceramic material.

3. The shaft member of claim 1 , wherein the shaft member has a seating end surface substantially perpendicular to the axis.

4. 4. The shaft member of claim 3, wherein the shaft member defines a throughbore therein extending axially from a seating end face opening defined in the seating end face of the shaft member body to the drive end of the shaft member body.

5. The shaft member of claim 3 , wherein the seating end of the shaft member body defines a chamfer from the angled facet to the seating end surface connecting the one or more angled facets to the seating end surface of the shaft member body.

6. 10. The shaft member of claim 1, wherein the angled facets are angled relative to the axis at an angled facet angle that is between about 5 degrees and about 40 degrees, or between about 5 degrees and about 30 degrees, or between about 5 degrees and about 25 degrees, or between about 10 degrees and about 20 degrees, or even between about 8 degrees and about 12 degrees.

7. The shaft member of claim 1 , wherein the one or more angled facets are one of three (3) angled facets defined on the seating end of the shaft member body.

8. The shaft member of claim 1 , wherein the seating end of the shaft member body defines one or more wedge facets circumferentially offset from the one or more angled facets.

9. The shaft member of claim 8 , wherein another of the wedge facets is substantially parallel to the intermediate segment of the shaft member body.

10. 9. The shaft member of claim 8, wherein the one or more wedge facets are one of three (3) wedge facets defined by the seating end of the shaft member body, the one or more angled facets are one of three (3) angled facets defined by the seating end of the shaft member body, each of the wedge facets separating circumferentially adjacent angled facets defined on the seating end of the shaft member body.

11. 9. The shaft member of claim 8, wherein the seating end defines a wedge facet-to-angle facet chamfer connecting the one or more wedge facets to the one or more angled facets defined by the seating end of the shaft member body.

12. The shaft member of claim 8 , wherein the one or more wedge portions define a chamfer from a wedge facet to a seating end surface connecting the one or more wedge facets to a seating end surface of the seating end of the shaft member body.

13. 10. The shaft member of claim 1, wherein the shaft member body defines one or more wedge portions circumferentially offset from the one or more angled facets; 1. A spider member comprising a spider member body, the spider member body comprising: a hub portion extending about said shaft and defining a seating socket therein; one or more arm portions extending radially from the hub portion; one or more seating portions extending axially from the arm portions and radially separated from the hub portion by the arm portions of the spider member body; a spider member including a spider member body having A shaft arrangement comprising: A shaft arrangement wherein the shaft end of the spider member body is received within the seating socket defined in the hub portion of the spider member body.

14. 14. The shaft arrangement of claim 13, wherein the seating socket is bounded by one or more angled surfaces, the one or more angled surfaces joining the one or more angled facets defined by the seating end of the shaft member body.

15. 14. The shaft arrangement of claim 13, wherein the seating socket is bounded by three (3) inclined surfaces distributed circumferentially about the axis of rotation, each of the three (3) inclined facets joining a respective one (1) of three (3) inclined facets defined by the seating end of the shaft member body.

16. 14. The shaft arrangement of claim 13, wherein the seating socket is bounded by one or more wedge surfaces, the one or more wedge surfaces joining the one or more wedge facets defined by the seating end of the shaft member body.

17. 14. The shaft arrangement of claim 13, wherein the seating socket is bounded by three (3) wedge faces distributed circumferentially about the axis of rotation, each of the three (3) wedge facets joining a respective one (1) of three (3) wedge facets defined by the seating end of the shaft member body.

18. 14. The shaft arrangement of claim 13, wherein the hub portion has an upper surface defining an upper opening and a lower surface defining a lower opening, the lower opening being connected to the upper opening by the seating socket and having a generally circular shape, the upper opening being bounded by a plurality of linear segments and linear segments.

19. 20. The shaft arrangement of claim 18, wherein the one or more angled surfaces define a relief recess therein extending from the upper opening to a location axially intermediate the upper and lower openings of the hub portion of the spider member body.

20. a tube member disposed along the rotation axis and extending around the shaft member; a lift pin actuator seated on the tube member and extending around the shaft member; The shaft arrangement of claim 13 , wherein the spider member is axially separated from the tube member along the axis by the lift pin actuator.

21. The shaft arrangement of claim 13 further comprising a substrate support seated on said spider member and connected therethrough to said shaft member.

22. 1. A semiconductor processing system comprising: a process fluid source containing a material layer precursor; 10. A chamber arrangement comprising the shaft member of claim 1, wherein the shaft member connects a substrate support to a lift and rotate module; an exhaust source coupled to the chamber arrangement; a controller operably coupled to the chamber arrangement, the controller configured to deposit a material layer on a substrate seated on the substrate support using the flow of the material layer precursor delivered by the process fluid source; A semiconductor processing system comprising:

23. 1. A method of making a shaft member, comprising: axially disposing a shaft member body formed from a ceramic material; defining a locking feature on a drive end of the shaft member body; defining an intermediate segment extending axially from the drive end of the shaft member body; defining a seating end axially separated from the drive end of the shaft member body by grinding one or more angled facets into the shaft member body configured to axially position a spider member on the shaft member body in a 3-2-1 positioning scheme; A method comprising:

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