Heat treatment container

Abstract

To provide a heat treatment container capable of heating work pieces evenly.SOLUTION: A heat treatment container 1 is provided with: a container body 10 having a work piece arrangement area 11 for arrangement of work pieces 2 and an inner wall 12 surrounding the work piece arrangement area 11; a gas inlet 20 formed in the inner wall 12; a gas outlet 30 formed in the inner wall 12 at a different position from the gas inlet 20; and a separation wall 40 extending along the inner wall 12 and separating the gas inlet 20 and the work piece arrangement area 11 in a direction connecting the gas inlet 20 and the gas outlet 30. A gas passage 80 guiding gas from the gas inlet 20 to the work piece arrangement area 11 is formed between the separation wall 40 and the inner wall 12 along the inner wall 12.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present disclosure relates to a heat treatment vessel for performing heat treatment on a workpiece. [Background technology]

[0002] In the manufacturing process of electronic components such as ceramic capacitors, piezoelectric elements, inductor elements, and semiconductor elements, as well as substrate-like workpieces made of various ceramics or semiconductors (hereinafter referred to as workpieces), one of the manufacturing steps is a heat treatment step in which the workpiece is subjected to drying, annealing, binder removal, firing, etc. As shown in Patent Document 1, for example, in the heat treatment step, the workpiece is placed in a heat treatment container equipped with a gas inlet and a gas outlet. Gas supplied to the heat treatment container through the gas inlet heats the workpiece and is then discharged from the heat treatment container through the gas outlet.

[0003] The heat treatment vessel of Patent Document 1 has a partition plate provided inside the heat treatment vessel. The partition plate is arranged perpendicular to an imaginary line connecting the gas inlet and the gas outlet, and has multiple holes penetrating from one main surface to the other main surface of the partition plate. Gas supplied to the heat treatment vessel through the gas inlet is dispersed in a direction perpendicular to the imaginary line and supplied to the area where the workpiece is placed (hereinafter referred to as the workpiece placement area) through the multiple holes. In this way, the heat treatment vessel of Patent Document 1 rectifies the flow of gas supplied to the workpiece placement area. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-167865 Summary of the Invention [Problem to be solved by the invention]

[0005] In the heat treatment vessel of Patent Document 1, one of the multiple holes formed in the partition plate is located on an imaginary line connecting the gas inlet and the gas exhaust port. Therefore, a portion of the gas supplied to the heat treatment vessel through the gas inlet flows directly from the gas inlet to the workpiece placement area through the hole located on the imaginary line. This results in a relatively low-temperature gas being supplied to the workpiece placement area, causing temperature variations in the workpiece placement area and making it difficult to heat the workpieces uniformly. This not only results in variations in the sintering state and electrical properties of the workpieces, but also in the risk of producing electronic components that do not exhibit the desired electrical properties.

[0006] The present disclosure provides a heat treatment container capable of uniformly heating a workpiece. [Means for solving the problem]

[0007] A heat treatment container according to a first aspect of the present disclosure includes: a container body having a workpiece placement area for placing a workpiece and an inner wall surrounding the workpiece placement area; a gas inlet port formed in the inner wall; a gas exhaust port formed in the inner wall at a position different from the gas inlet port; a partition wall extending along the inner wall and isolating the gas inlet from the workpiece placement area in a direction connecting the gas inlet and the gas exhaust port, A gas flow path is formed between the partition wall and the inner wall along the inner wall, for guiding gas from the gas inlet to the workpiece placement area.

[0008] A heat treatment container according to a first aspect of the present disclosure has a partition extending along the inner wall and separating the gas inlet from the workpiece placement area in a direction connecting the gas inlet and the gas exhaust port. A gas flow path is formed along the inner wall between the partition and the inner wall, conducting gas from the gas inlet to the workpiece placement area. Therefore, gas supplied to the container body through the gas inlet does not flow directly toward the workpiece placement area in a direction connecting the gas inlet and the gas exhaust port, but flows toward the workpiece placement area via the gas flow path. As the gas flows through the gas flow path, its temperature increases. Therefore, gas with a temperature required to heat the workpiece is supplied to the workpiece placement area through the gas flow path. This uniformizes the temperature in the workpiece placement area, allowing the workpiece to be uniformly heated. This prevents variations in the sintering state or electrical properties of the workpieces and enables the production of electronic components with desired electrical properties.

[0009] The partition wall may be installed on a line connecting the gas inlet and the gas exhaust port, at a position that blocks the gas inlet from the workpiece placement area. In this case, the gas supplied to the container body through the gas inlet does not flow directly toward the workpiece placement area along the line connecting the gas inlet and the gas exhaust port. Therefore, gas with a relatively low temperature is less likely to be supplied to the workpiece placement area, and temperature variations in the workpiece placement area can be effectively prevented.

[0010] The partition wall may be curved or bent along the inner wall. In this case, the length of the partition wall along the extending direction is extended according to the degree of curvature or bending of the partition wall, and the length of the partition wall along the extending direction of the gas flow path is extended. This extends the time it takes for the gas that has flowed into the gas flow path to pass through the gas flow path, and effectively increases the temperature of the gas flowing through the gas flow path.

[0011] The partition wall may have a communication passage for directing gas from the gas flow path to the workpiece placement area, the communication passage being located between one end and the other end of the partition wall in the extension direction. In this case, a portion of the gas flowing through the gas flow path flows through the communication passage to the back side of the partition wall (the side facing the gas exhaust port), where gas tends to stagnate, before reaching the outlet of the gas flow path (the end of the gas flow path in the extension direction). This eliminates gas stagnation on the back side of the partition wall, improving the circulation of gas circulating through the workpiece placement area. This allows the gas to flow uniformly through the workpiece placement area, reducing variation in the gas atmosphere in the workpiece placement area. This prevents variation in the sintering state or electrical properties of the workpieces and allows the production of electronic components with desired electrical properties.

[0012] The communication passage may be a through-hole penetrating the partition wall or a groove recessed toward the bottom of the container body, in which case gas can easily flow from the gas flow path to the workpiece placement area through the communication passage.

[0013] The communication passage may guide the gas flowing through the communication passage in a direction non-parallel to an imaginary line connecting the gas inlet and the gas outlet. In this case, the gas released from the communication passage is more easily dispersed in the workpiece placement area, improving the circulation of the gas circulating through the workpiece placement area. This allows the gas to flow uniformly through the workpiece placement area, making it less likely that the gas atmosphere in the workpiece placement area will vary.

[0014] The communication passage may guide the gas flowing through the communication passage obliquely relative to the imaginary line so that the gas flows toward the imaginary line. In this case, the gas flowing through the communication passage is likely to flow to the back side of the partition wall (the side facing the gas exhaust port) where the gas tends to stagnate. This eliminates gas stagnation on the back side of the partition wall, and effectively prevents variations in the gas atmosphere in the workpiece placement area.

[0015] The communication passage may guide the gas flowing through the communication passage in a direction perpendicular to the imaginary line so that the gas flows toward the imaginary line. In this case, the gas flowing through the communication passage is more likely to flow toward the back side of the partition wall (the side facing the gas exhaust port) where the gas tends to stagnate. This eliminates gas stagnation on the back side of the partition wall, effectively preventing variations in the gas atmosphere in the workpiece placement area.

[0016] The communication passage may comprise a first communication passage and a second communication passage, the first communication passage and the second communication passage being located on opposite sides of an imaginary line connecting the gas inlet and the gas outlet, the first communication passage directing the gas flowing through the first communication passage in a direction approaching the imaginary line, and the second communication passage directing the gas flowing through the second communication passage in a direction approaching the imaginary line. In this case, the gas discharged from the first communication passage and the gas discharged from the second communication passage collide around the imaginary line and are agitated (mixed) on the back side of the partition wall (the side facing the gas outlet), where gas tends to stagnate. This eliminates gas stagnation on the back side of the partition wall, effectively preventing variations in the gas atmosphere in the workpiece placement area.

[0017] The first communication passage may guide the gas flowing through the first communication passage in a direction perpendicular to the imaginary line, and the second communication passage may guide the gas flowing through the second communication passage in a direction perpendicular to the imaginary line, with the first and second communication passages being arranged symmetrically with respect to the imaginary line. In this case, the gas is released from the first and second communication passages so as to be directed toward the back side of the partition wall (the periphery of the side facing the gas exhaust port) where the gas is likely to accumulate. This eliminates gas accumulation on the back side of the partition wall, effectively preventing variations in the gas atmosphere in the workpiece placement area.

[0018] The partition wall may be made up of a plurality of partition walls, the plurality of partition walls being spaced apart along the inner wall, and a communication passage for guiding gas from the gas flow path to the workpiece placement area may be formed between adjacent partition walls. In this case, part of the gas flowing through the gas flow path can be supplied through the communication passage to the back side of the partition wall (the side facing the gas exhaust port) where the gas is likely to stagnate.

[0019] The container body may have a protruding portion protruding from the inner wall toward the inside of the container body, and an outer flow passage for guiding gas from the gas flow passage to the workpiece placement area may be formed between an end of the partition wall in the extending direction and the protruding portion. In this case, the outer flow passage can adjust the flow direction of gas flowing from the gas flow passage to the workpiece placement area.

[0020] A heat treatment container according to a second aspect of the present disclosure includes: a container body having a workpiece placement area for placing a workpiece and an inner wall surrounding the workpiece placement area; a gas inlet port provided on the inner wall; a gas exhaust port provided on the inner wall at a position different from the gas inlet port; a pipe that protrudes from the gas inlet into the container body and extends along the inner wall, A gas flow path is formed inside the pipe along the inner wall to guide the gas supplied to the pipe to the workpiece placement area.

[0021] A heat treatment container according to a second aspect of the present disclosure has a tubular body that protrudes from a gas inlet into the container body and extends along the inner wall. A gas flow path is formed along the inner wall of the tubular body to guide gas supplied to the tubular body to a workpiece placement area. Therefore, the gas supplied to the tubular body does not flow directly toward the workpiece placement area along the direction connecting the gas inlet and the gas exhaust port, but flows toward the workpiece placement area via the gas flow path. The temperature of the gas supplied to the tubular body increases as it flows through the gas flow path. Therefore, gas with a temperature required to heat the workpiece is supplied to the workpiece placement area through the gas flow path. This uniformizes the temperature in the workpiece placement area, allowing the workpiece to be uniformly heated. This prevents variations in the sintering state or electrical properties of the workpieces and allows electronic components with desired electrical properties to be manufactured.

[0022] The pipe may have a main body extending along the inner wall and having the gas flow path, and a branch portion connected to the main body, the branch portion having a communication passage for directing gas from the gas flow path to the workpiece placement area. In this case, a portion of the gas flowing through the gas flow path flows through the communication passage to the back side of the main body (the side facing the gas exhaust port), where gas tends to stagnate, before reaching the outlet of the gas flow path (the end of the gas flow path in the extension direction). This eliminates gas stagnation on the back side of the main body, improving the circulation of gas through the workpiece placement area. This allows the gas to flow uniformly through the workpiece placement area, reducing variation in the gas atmosphere in the workpiece placement area. This prevents variation in the sintering state or electrical properties of the workpieces and allows the production of electronic components with desired electrical properties. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a perspective view of a heat treatment container according to the first embodiment. [Figure 2] FIG. 2 is a perspective view showing the internal configuration of the heat treatment container shown in FIG. [Figure 3A] 3A is a partially enlarged perspective view of the heat treatment vessel shown in FIG. [Figure 3B] FIG. 3B is a plan view of the heat treatment container shown in FIG. [Figure 3C] FIG. 3C is a cross-sectional view taken along line IIIC-IIIC shown in FIG. 3B. [Figure 4] FIG. 4 is a partially enlarged plan view of the heat treatment container according to the second embodiment. [Figure 5A] FIG. 5A is a partially enlarged perspective view of a heat treatment container according to a third embodiment. [Figure 5B] FIG. 5B is a partially enlarged plan view of the heat treatment vessel shown in FIG. 5A. [Figure 6] FIG. 6 is a partially enlarged plan view of the heat treatment container according to the fourth embodiment. [Figure 7] FIG. 7 is a partially enlarged plan view of the heat treatment container according to the fifth embodiment. [Figure 8] FIG. 8 is a partially enlarged plan view of the heat treatment container according to the sixth embodiment. [Figure 9A] FIG. 9A is a partially enlarged perspective view of a heat treatment container according to the seventh embodiment. [Figure 9B] FIG. 9B is a partially enlarged plan view of the heat treatment container shown in FIG. 9A. [Figure 10A] FIG. 10A is a partially enlarged perspective view of a heat treatment container according to the eighth embodiment. [Figure 10B] FIG. 10B is a partially enlarged plan view of the heat treatment container shown in FIG. 10A. [Figure 11] FIG. 11 is a partially enlarged plan view of the heat treatment container according to the ninth embodiment. [Figure 12] FIG. 12 is a partially enlarged plan view of the heat treatment container according to the tenth embodiment. [Figure 13A] FIG. 13A is a partially enlarged perspective view of a heat treatment container according to the eleventh embodiment. [Figure 13B] FIG. 13B is a partially enlarged plan view of the heat treatment container shown in FIG. 13A. [Figure 14] FIG. 14 is a partially enlarged plan view of a heat treatment container according to the twelfth embodiment. [Figure 15] FIG. 15 is a perspective view of a heat treatment container according to the thirteenth embodiment. [Figure 16A]FIG. 16A is a plan view of a modified example of the heat treatment container shown in FIG. 3B. [Figure 16B] FIG. 16B is a plan view of a modified example of the heat treatment container shown in FIG. 3B. [Figure 17A] FIG. 17A is a partially enlarged perspective view of a modification of the heat treatment container shown in FIG. 3A. [Figure 17B] FIG. 17B is a partially enlarged perspective view of a modification of the heat treatment container shown in FIG. 3A. [Figure 18] FIG. 18 is a diagram for explaining an embodiment of the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, embodiments of the present disclosure will be described with reference to the drawings. Note that the contents shown in the drawings are merely shown schematically and exemplarily to facilitate understanding of the present disclosure, and the appearance, dimensional ratios, etc. may differ from the actual product. Furthermore, the present disclosure is not limited to the following embodiments.

[0025] (First embodiment) The heat treatment vessel 1 shown in FIG. 1 is a vessel for accommodating workpieces. The heat treatment vessel 1 is placed in a heating furnace (heating space) with the workpieces accommodated therein for a heat treatment process, which is one of the manufacturing processes for electronic components such as ceramic capacitors, piezoelectric elements, inductor elements, and semiconductor elements, as well as substrate-like workpieces made of various ceramics or semiconductors (hereinafter referred to as workpieces). Examples of heat treatment processes include drying, annealing, binder removal, and firing. An example of a heating furnace is a batch-type heating furnace.

[0026] A gas supply pipe 3 and a gas exhaust pipe 4 are connected to the heat treatment vessel 1. Gas is supplied to the heat treatment vessel 1 through the gas supply pipe 3 and exhausted from the heat treatment vessel 1 through the gas exhaust pipe 4. The gas supplied to the heat treatment vessel 1 is not particularly limited, but may be, for example, an inert gas such as nitrogen, helium, or argon, a reducing gas containing hydrogen, or an oxidizing gas containing oxygen and water vapor. The heat treatment vessel 1 is heated by a heat source 5.

[0027] The diameter of the heat treatment vessel 1 is not particularly limited, but is 100 mm to 300 mm. The height of the heat treatment vessel 1 is not particularly limited, but is 6 mm to 30 mm.

[0028] As shown in FIG. 2, the heat treatment container 1 includes a container body 10, a gas inlet 20, a gas outlet 30, a partition wall 40, a lid 50, and a base 60. In FIG. 2 and other figures, the X-axis is the axis extending from the gas inlet 20 to the gas outlet 30. The Z-axis is the axis perpendicular to the bottom surface of the container body 10. The Y-axis is the axis perpendicular to the X-axis and Z-axis. Hereinafter, the positive side of the Z-axis will be referred to as "upward," and the negative side of the Z-axis will be referred to as "downward." Note that upward in the Z-axis direction does not necessarily coincide with upward in the vertical direction. Also, downward in the Z-axis direction does not necessarily coincide with downward in the vertical direction. The direction toward the center of the container body 10 will be referred to as "inward," and the direction away from the center of the container body 10 will be referred to as "outward." The negative side of the X-axis will be referred to as "forward," and the positive side of the X-axis will be referred to as "rearward."

[0029] Furthermore, in the present disclosure, "parallel" does not only refer to strict parallelism, but also includes a state in which there is an error of ±Δθ° (not particularly limited, for example, Δθ=3) or less from strict parallelism. Furthermore, "perpendicular" or "orthogonal" does not only refer to strict perpendicular or orthogonal, but also includes a state in which there is an error of ±Δθ° (not particularly limited, for example, Δθ=3) or less from strict perpendicular or orthogonal.

[0030] Furthermore, in the present disclosure, "equal" or "identical" does not only refer to a state in which the physical quantities of the objects being compared are strictly equal or similar, but also includes a state in which there is an error of ±Δ% or less (not particularly limited, for example, Δ=7, 5, or 3) between the physical quantities of the objects being compared.

[0031] The container body 10 is made of a heat-resistant material. The material constituting the container body 10 is not particularly limited, but may be, for example, ceramics such as alumina, magnesia, zirconia, or silicon carbide, metals such as stainless steel, or carbon. The container body 10 has a workpiece placement area 11, an inner wall 12, a bottom 13, a peripheral wall 14, gas supply holes 15, and gas exhaust holes 16. The bottom 13 forms the bottom of the container body 10. The shape of the bottom 13 is circular in a plan view, but may also be elliptical, rectangular, pentagonal, hexagonal, or other polygonal shapes, or other shapes.

[0032] The peripheral wall 14 is formed along the outer periphery of the bottom 13 and protrudes upward from the bottom 13. The peripheral wall 14 has a ring shape in a plan view. A lid 50 can be attached to the upper surface of the peripheral wall 14.

[0033] The workpiece placement area 11 is an area for placing at least one (in this embodiment, multiple) workpieces 2. In this embodiment, the workpiece placement area 11 is formed on the pedestal 60, and the workpiece 2 is placed on the pedestal 60. However, the workpiece placement area 11 may also be formed on the bottom 13, and the workpiece 2 may also be placed directly on the bottom 13.

[0034] The inner wall 12 forms the inner peripheral surface of the peripheral wall portion 14 and surrounds the work placement area 11. The shape of the inner wall 12 is circular in a plan view, but may be elliptical, rectangular, pentagonal, hexagonal, or other polygonal shape, or may be other shapes.

[0035] Gas inlet 15 is a through-hole that penetrates from the outer peripheral surface to the inner peripheral surface of peripheral wall 14. Gas inlet 15 is provided with, for example, a gas inlet pipe 3 (FIG. 1), and gas is supplied to container body 10 through gas inlet pipe 3. Note that gas inlet pipe 3 is not essential and may be omitted. In this case, gas may be supplied directly to gas inlet 15.

[0036] Gas exhaust hole 16 is a through-hole that penetrates from the outer peripheral surface to the inner peripheral surface of peripheral wall portion 14, and is provided at a position different from gas inlet hole 15. Gas exhaust hole 16 is provided with, for example, a gas exhaust pipe 4 (FIG. 1), and gas is exhausted from container body 10 through gas exhaust pipe 4. Note that gas exhaust pipe 4 is not essential and may be omitted. In this case, gas may be allowed to flow directly through gas exhaust hole 16.

[0037] Gas inlet 20 is formed in inner wall 12 and constitutes one end of gas inlet hole 15 in the extension direction. Gas outlet 30 is formed in inner wall 12 at a position different from gas inlet 20 and constitutes one end of gas outlet hole 16 in the extension direction. As shown in FIG. 3B , an imaginary line L connecting gas inlet 20 and gas outlet 30 (hereinafter referred to as imaginary line) passes through center C of container body 10. Gas inlet 20 and gas outlet 30 face each other along imaginary line L.

[0038] As shown in FIG. 2, the pedestal 60 is made of a flat plate and is disposed on the bottom 13. The shape of the pedestal 60 is circular in plan view, but may be elliptical, rectangular, pentagonal, hexagonal, other polygonal, or other shapes. The thickness of the pedestal 60 is not particularly limited and may be different from the thickness shown in FIG. 2. The pedestal 60 is made of a material that is chemically stable even at high temperatures. The material that constitutes the pedestal 60 is not particularly limited, but may be, for example, ceramics including alumina, magnesia, zirconia, etc. By disposing the pedestal 60 on the bottom 13, it is possible to prevent a reaction between the workpiece 2 and the container body 10.

[0039] The lid 50 is attached to the upper surface of the peripheral wall portion 14 and covers the container body 10 from above. The lid 50 is made of a flat plate. The material of the lid 50 is the same as the material of the container body 10, but may be different. By attaching the lid 50 to the container body 10, an airtight space is formed inside the heat treatment container 1.

[0040] A groove 70 is formed between the outer periphery of the base 60 and the inner wall 12. The groove 70 is a ring-shaped groove that extends along the outer periphery of the base 60. The depth of the groove 70 corresponds to the height of the base 60.

[0041] As shown in FIG. 3A, the partition wall 40 protrudes upward from the bottom 13 and extends along the inner wall 12. In the example shown in FIG. 3A, the partition wall 40 extends along the outer periphery of the base 60 and is located in the groove 70. The material constituting the partition wall 40 is the same as the material constituting the container body 10, but may be different. The partition wall 40 is curved or bent along the inner wall 12. However, as will be described later, the partition wall 40 may extend linearly so as to be perpendicular to an imaginary line connecting the gas inlet port 20 and the gas outlet port 30.

[0042] The shape of the partition wall 40 is arc-shaped (C-shaped) in a plan view, but may also be linear (rectangular), parallelogram, trapezoid, or other polygonal shape. The partition wall 40 is composed of a single partition wall that extends continuously along the inner wall 12. However, as will be described later, the partition wall 40 may also be composed of a plurality of partition walls arranged along the inner wall 12.

[0043] 3C , the height of the partition wall 40 is higher than the height of the base 60 and is equal to the distance between the bottom 13 and the lid 50 or the height of the peripheral wall 14 (inner wall 12). The height position of the upper surface of the partition wall 40 is equal to the height position of the upper surface of the peripheral wall 14. Therefore, the lid 50 attached to the upper surface of the peripheral wall 14 comes into contact with the upper surface of the partition wall 40.

[0044] In the cross section shown in Figure 3C (an XZ cross section taken along an imaginary line connecting the gas inlet port 20 and the gas outlet port 30), the width W1 in a direction perpendicular to the extension direction of the partition wall 40 (hereinafter referred to as the horizontal width of the partition wall 40) is smaller than the width W2 in a direction perpendicular to the extension direction of the peripheral wall portion 14 (hereinafter referred to as the horizontal width of the peripheral wall portion 14), but may be equal to or larger than the horizontal width W2.

[0045] 3B, the lateral width W1 of the partition wall 40 is constant along the extension direction of the partition wall 40, but it does not have to be constant. For example, the lateral width W1 of the partition wall 40 may increase toward the end of the extension direction of the partition wall 40, or may decrease toward the end of the extension direction of the partition wall 40. Alternatively, the partition wall 40 may have a narrow portion where the lateral width W1 of the partition wall 40 is relatively narrow and a wide portion where the lateral width of the partition wall 40 is relatively wide.

[0046] The partition wall 40 is disposed in front of (in front of) the gas inlet port 20 so as to obstruct the flow of gas supplied from the gas inlet port 20 to the container body 10. The partition wall 40 separates the gas inlet port 20 from the workpiece placement area 11 in the direction (X-axis direction) connecting the gas inlet port 20 and the gas exhaust port 30. That is, on the imaginary line L, the partition wall 40 does not have a through-hole that penetrates from one main surface of the partition wall 40 (the main surface on the positive X-axis direction) to the other main surface (the main surface on the negative X-axis direction).

[0047] Therefore, in the direction (X-axis direction) connecting the gas inlet 20 and the gas exhaust port 30, the gas inlet 20 and the workpiece placement area 11 do not communicate with each other. That is, the partition wall 40 separates the gas inlet 20 and the workpiece placement area 11 so that they do not communicate with each other on the imaginary line L. The gas supplied from the gas inlet 20 to the container body 10 flows along the partition wall 40 so as to branch off to one side and the other side in the extension direction of the partition wall 40.

[0048] The partition walls 40 intersect with the imaginary line L and extend on both sides of the imaginary line L in a direction perpendicular to the imaginary line L (Y-axis direction). The partition walls 40 are formed symmetrically (line-symmetrically) with respect to the imaginary line L. However, the partition walls 40 may be formed asymmetrically with respect to the imaginary line L.

[0049] The relationship between an imaginary line R1 connecting one end of the partition wall 40 in the extension direction and the center C of the container body 10 and an imaginary line L connecting the gas inlet port 20 and the gas outlet port 30 is as follows: That is, the angle θ1 between the imaginary line L and the imaginary line R1 is not particularly limited, but may be, for example, 0°<θ1<90°, 10°≦θ1≦80°, or 20°≦θ1≦70°.

[0050] The relationship between an imaginary line R2 connecting the other end of the partition wall 40 in the extension direction and the center C of the container body 10 and an imaginary line L connecting the gas inlet port 20 and the gas outlet port 30 is as follows: That is, the angle θ2 between the imaginary line L and the imaginary line R2 is not particularly limited, but may be, for example, 0°<θ2<90°, 10°≦θ2≦80°, or 20°≦θ2≦70°.

[0051] 3B, the angle θ1 is equal to the angle θ2, but may be smaller than or larger than the angle θ2. The length of the virtual line R1 is equal to the length of the virtual line R2, but may be shorter than or longer than the length of the virtual line R2.

[0052] As shown in FIG. 3A, a gas flow path 80 is formed between the partition wall 40 and the inner wall 12 along the inner wall 12. The gas flow path 80 guides gas from the gas inlet 20 to the workpiece placement area 11. The gas flow path 80 intersects with an imaginary line L and extends on both sides of the imaginary line L in a direction perpendicular to the imaginary line L (the Y-axis direction). The gas flow path 80 is formed symmetrically (line-symmetrically) with respect to the imaginary line L, but may also be formed asymmetrically. In a plan view, the gas flow path 80 is sandwiched between the partition wall 40 and the inner wall 12. Furthermore, as shown in FIG. 3C, in a cross-sectional view, the gas flow path 80 is surrounded by the partition wall 40, the inner wall 12 (peripheral wall portion 14), the bottom portion 13, and the lid 50. The gas supplied from the gas inlet 20 to the container body 10 passes through the gas flow path 80 and is supplied to the workpiece placement area 11.

[0053] The width W3 of the gas flow channel 80 in a direction perpendicular to the extension direction (hereinafter referred to as the lateral width of the gas flow channel 80) is equal to the lateral width W1 of the partition wall 40, but may be narrower or wider than the lateral width W1. As shown in FIG. 3B , the lateral width W3 of the gas flow channel 80 is constant along the extension direction of the gas flow channel 80, but it does not have to be constant. For example, the lateral width W3 of the gas flow channel 80 may increase toward the end of the extension direction of the gas flow channel 80, or may decrease toward the end of the extension direction of the gas flow channel 80. Alternatively, the gas flow channel 80 may have a narrow portion where the lateral width W3 of the gas flow channel 80 is relatively narrow and a wide portion where the lateral width W3 of the gas flow channel 80 is relatively wide.

[0054] The length of the gas flow path 80 along its extension direction corresponds to the length of the partition wall 40 along its extension direction. As described above, no through-holes are formed in the partition wall 40 on the imaginary line L. Therefore, the gas supplied from the gas inlet 20 to the container body 10 does not flow directly from the gas inlet 20 to the workpiece placement area 11 along the imaginary line L (i.e., along the shortest path connecting the gas inlet 20 and the workpiece placement area 11). The gas supplied from the gas inlet 20 to the container body 10 flows along the gas flow path 80, branching off into one side and the other side in the extension direction of the gas flow path 80. Outlets of the gas flow path 80 are formed at one end and the other end of the gas flow path 80 in the extension direction. The gas flowing through the gas flow path 80 flows into the workpiece placement area 11 through the outlet of the gas flow path 80. In other words, in this embodiment, the gas flow path 80 forms a detour for the gas supplied from the gas inlet 20 to the container body 10.

[0055] As shown in FIG. 3B , the heat treatment vessel 1 of this embodiment has a partition wall 40 that extends along the inner wall 12 and separates the gas inlet 20 from the workpiece placement area 11 in the direction (X-axis direction) connecting the gas inlet 20 and the gas exhaust port 30. A gas flow path 80 that guides gas from the gas inlet 20 to the workpiece placement area 11 is formed along the inner wall 12 between the partition wall 40 and the inner wall 12. Therefore, the gas supplied to the vessel body 10 through the gas inlet 20 does not flow directly toward the workpiece placement area 11 in the direction connecting the gas inlet 20 and the gas exhaust port 30, but flows toward the workpiece placement area 11 via the gas flow path 80. The temperature of the gas increases while the gas flows through the gas flow path 80. Therefore, gas having a temperature required to heat the workpiece 2 ( FIG. 2 ) is supplied to the workpiece placement area 11 through the gas flow path 80. This makes the temperature of the workpiece placement area 11 uniform, enabling the workpiece 2 to be uniformly heated. Therefore, it is possible to prevent variations in the sintered state or electrical properties of the workpiece 2, and to manufacture electronic components having desired electrical properties.

[0056] Furthermore, the partition wall 40 is installed at a position on the imaginary line L that blocks the gas inlet port 20 from the workpiece placement area 11. Furthermore, the partition wall 40 separates the gas inlet port 20 from the workpiece placement area 11 on the imaginary line L so that the gas inlet port 20 and the workpiece placement area 11 do not communicate with each other. Therefore, the gas supplied to the container body 10 through the gas inlet port 20 does not head directly toward the workpiece placement area 11 along the direction connecting the gas inlet port 20 and the gas exhaust port 30. Therefore, gas with a relatively low temperature is less likely to be supplied to the workpiece placement area 11, and temperature variations in the workpiece placement area 11 can be effectively prevented.

[0057] Furthermore, the partition wall 40 is curved or bent along the inner wall 12. Therefore, depending on the degree of curvature or bending of the partition wall 40, the length of the partition wall 40 along the extension direction is extended, and the length of the gas flow path 80 along the extension direction is extended. This extends the time it takes for the gas that has flowed into the gas flow path 80 to pass through the gas flow path 80, and the temperature of the gas flowing through the gas flow path 80 can be effectively increased.

[0058] (Second embodiment) 4 has the same configuration as the heat treatment vessel 1 of the first embodiment, except for the following points: The same reference numerals are used to designate parts that are the same as those of the heat treatment vessel 1 of the first embodiment, and detailed descriptions thereof will be omitted.

[0059] The heat treatment container 1A has a partition wall 40A. The partition wall 40A is composed of a first partition wall 41, a second partition wall 42a, and a second partition wall 42b. That is, the partition wall 40A of this embodiment is composed of a plurality of partition walls. The first partition wall 41, the second partition wall 42a, and the second partition wall 42b are discontinuous with each other and are arranged at a distance from each other along the inner wall 12. The distance between the first partition wall 41 and the second partition wall 42a is equal to the distance between the first partition wall 41 and the second partition wall 42b, but may be different.

[0060] The first partition 41, the second partition 42a, and the second partition 42b extend along the inner wall 12. The first partition 41 intersects with the imaginary line L and extends on both sides of the imaginary line L in a direction perpendicular to the imaginary line L (the Y-axis direction). The second partition 42a is located on one side of the imaginary line L in the direction perpendicular to the imaginary line L. The second partition 42b is located on the other side of the imaginary line L in the direction perpendicular to the imaginary line L.

[0061] The length of the first partition wall 41 along its extension direction is longer than the length of the second partition wall 42a or 42b along its extension direction, but may be equal to or shorter than the length. The radius of curvature of the first partition wall 41, the radius of curvature of the second partition wall 42a, and the radius of curvature of the second partition wall 42b are equal to or may be different from each other.

[0062] The partition wall 40A has communication passages 46a and 46b that guide gas from the gas flow path 80 to the workpiece placement area 11. As shown in FIG. 4, the partition wall 40A preferably has multiple (two in this embodiment) communication passages 46a and 46b formed therein. By forming multiple communication passages in the partition wall 40A in this manner, the circulation of gas circulating through the workpiece placement area 11 is improved. However, the partition wall 40A may have a single communication passage formed therein. For example, either the communication passages 46a or 46b may be omitted from the partition wall 40A.

[0063] The communicating passages 46a and 46b are located between one end and the other end of the partition wall 40A in the extension direction. The communicating passage 46a is located between the first partition wall 41 and the second partition wall 42a, more specifically, between one end face 40e1 of the first partition wall 41 in the extension direction and one end face 40e2 of the second partition wall 42a in the extension direction. The communicating passage 46b is located between the first partition wall 41 and the second partition wall 42b, more specifically, between the other end face 40e2 of the first partition wall 41 in the extension direction and one end face 40e1 of the second partition wall 42b in the extension direction.

[0064] The end face 40e1 of the first partition 41 and the end face 40e2 of the second partition 42a extend parallel to the XZ plane. Therefore, the communication passage 46a extends along the imaginary line L. As shown by the arrow in FIG. 4, the communication passage 46a guides the gas from the gas flow path 80 to the workpiece placement area 11 along the imaginary line L.

[0065] The end face 40e2 of the first partition 41 and the end face 40e1 of the second partition 42b extend parallel to the XZ plane. Therefore, the communicating passage 46b extends along the imaginary line L. As shown by the arrow in Figure 4, the communicating passage 46b guides gas from the gas flow path 80 to the workpiece placement area 11 along the imaginary line L. The direction in which the communicating passage 46b guides gas from the gas flow path 80 to the workpiece placement area 11 is the same as the direction in which the communicating passage 46a guides gas from the gas flow path 80 to the workpiece placement area 11.

[0066] The distance W4 in the Y-axis direction between the end face 40e1 of the first partition 41 and the end face 40e2 of the second partition 42a (hereinafter referred to as the width of the communicating passage 46a) is equal to the width W3 of the gas flow path 80, but may be smaller than the width W3 or larger than the width W3.

[0067] The distance W5 in the Y-axis direction between the end face 40e2 of the first partition 41 and the end face 40e1 of the second partition 42b (hereinafter referred to as the width of the communicating path 46b) is equal to the width W4 of the communicating path 46a, but may be different.

[0068] A portion of the gas supplied from the gas inlet 20 to the container body 10 flows into the gas flow path 80, then heads toward the outlet of the gas flow path 80 (the end in the extension direction of the gas flow path 80), and is supplied to the workpiece placement area 11. In addition, a portion of the gas supplied from the gas inlet 20 to the container body 10 flows into the gas flow path 80, then does not head toward the outlet of the gas flow path 80, but is supplied to the workpiece placement area 11 through the communication paths 46a and 46b.

[0069] This embodiment also achieves the same effects as the first embodiment. Additionally, in this embodiment, the partition wall 40A has a communication passage 46a that guides gas from the gas flow path 80 to the workpiece placement area 11. The communication passage 46a is located between one end and the other end of the partition wall 40A in the extension direction. Therefore, a portion of the gas flowing through the gas flow path 80 flows through the communication passage 46a to the back side of the partition wall 40A, where gas tends to stagnate (or where gas does not easily flow), before reaching the outlet of the gas flow path 80 (the end of the gas flow path 80 in the extension direction). The back side of the partition wall 40A refers to the side of the partition wall 40A facing the gas exhaust port 30 (FIG. 2), i.e., the front side of the partition wall 40A. Therefore, gas stagnation is eliminated on the back side of the partition wall 40A, improving the circulation of gas circulating in the workpiece placement area 11. This allows gas to flow uniformly in the workpiece placement area 11, reducing variations in the gas atmosphere in the workpiece placement area 11. Therefore, it is possible to prevent variations in the sintered state or electrical properties of the workpiece 2 (FIG. 2), and to manufacture electronic components having desired electrical properties.

[0070] The partition wall 40A has a plurality of partition walls (first partition wall 41 and second partition wall 42a). The plurality of partition walls are spaced apart along the inner wall 12. A communication passage 46a is formed between adjacent first partition wall 41 and second partition wall 42a to guide gas from the gas flow path 80 to the workpiece placement area 11. Therefore, a portion of the gas flowing through the gas flow path 80 can be supplied to the back side of the partition wall 40A, where gas is likely to stagnate, through the communication passage 46a.

[0071] (Third embodiment) 5A has the same configuration as the heat treatment vessel 1 of the first embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1 of the first embodiment, and detailed descriptions thereof will be omitted.

[0072] As shown in Fig. 5A, the heat treatment container 1B includes a container body 10B and a partition wall 40B. The container body 10B includes protrusions 17a and 17b. The protrusions 17a and 17b protrude from the inner wall 12 toward the inside of the container body 10B. The protrusion shapes of the protrusions 17a and 17b are not limited to those shown in Fig. 5A.

[0073] The partition wall 40B extends in a direction perpendicular to the imaginary line L (Y-axis direction). The partition wall 40B extends linearly along the Y-axis, but may be bent or curved. The partition wall 40B is orthogonal to the imaginary line L and extends on both sides of the imaginary line L in a direction perpendicular to the imaginary line L. The partition wall 40B is formed symmetrically (line symmetrically) with respect to the imaginary line L, but may be formed asymmetrically. A gas flow path 80 is formed between one side surface of the partition wall 40B in the short-side direction (X-axis direction) and the inner wall 12. The gas flow path 80 extends in a direction perpendicular to the imaginary line L (Y-axis direction).

[0074] 5B, an outer flow passage 90a is formed between one end of the partition wall 40B in the extension direction and the protruding portion 17a, for guiding gas from the gas flow passage 80 to the workpiece placement area 11. In addition, an outer flow passage 90b is formed between the other end of the partition wall 40B in the extension direction and the protruding portion 17b, for guiding gas from the gas flow passage 80 to the workpiece placement area 11.

[0075] The outer flow passage 90a is located between one end face 40e1 of the partition wall 40B in the extension direction and the side face 17s of the protrusion 17a. The outer flow passage 90b is located between the other end face 40e2 of the partition wall 40B in the extension direction and the side face 17s of the protrusion 17b.

[0076] The end surface 40e1 of the partition wall 40B and the side surface 17s of the protrusion 17a extend parallel to the XZ plane. Therefore, the outer flow passage 90a extends along the imaginary line L. As shown by the arrow in FIG. 5B, the outer flow passage 90a guides the gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L.

[0077] The end face 40e2 of the partition wall 40B and the side face 17s of the protrusion 17b extend parallel to the XZ plane. Therefore, the outer flow passage 90b extends along the imaginary line L. As shown by the arrow in FIG. 5B, the outer flow passage 90b guides gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L. The direction in which the outer flow passage 90b guides gas from the gas flow passage 80 to the workpiece placement area 11 is the same as the direction in which the outer flow passage 90a guides gas from the gas flow passage 80 to the workpiece placement area 11.

[0078] A distance W6 in the Y-axis direction between the end face 40e1 of the partition wall 40B and the side face 17s of the protrusion 17a (hereinafter referred to as the width of the outer flow path 90a) is equal to the width W3 of the gas flow path 80, but may be smaller than or larger than the width W3. A distance W7 in the Y-axis direction between the end face 40e2 of the partition wall 40B and the side face 17s of the protrusion 17b (hereinafter referred to as the width of the outer flow path 90b) is equal to the width W6 of the outer flow path 90a, but may be different.

[0079] The outer flow passage 90a is continuous with one end of the gas flow passage 80 in the extension direction and extends in a direction perpendicular to the gas flow passage 80. The outer flow passage 90b is continuous with the other end of the gas flow passage 80 in the extension direction and extends in a direction perpendicular to the gas flow passage 80. As shown in FIG. 5B, it is preferable that multiple (two in this embodiment) outer flow passages 90a and 90b are formed in the partition wall 40B. By forming multiple outer flow passages in the partition wall 40B in this manner, the circulation of gas circulating in the workpiece placement area 11 is improved. However, a single outer flow passage may be formed in the partition wall 40B. For example, either one of the outer flow passages 90a and 90b may be omitted from the container body 10B. The gas supplied from the gas inlet 20 to the container body 10B flows into the gas flow passage 80, then flows toward the outer flow passages 90a and 90b, and is supplied to the workpiece placement area 11.

[0080] In this embodiment, the same effects as in the first embodiment can be obtained. Additionally, in this embodiment, the container body 10B has a protrusion 17a that protrudes from the inner wall 12 toward the inside of the container body 10B. An outer flow passage 90a that guides gas from the gas flow passage 80 to the workpiece placement area 11 is formed between the end of the partition wall 40B in the extension direction and the protrusion 17a. Therefore, the outer flow passage 90a can adjust the direction of the gas flow from the gas flow passage 80 to the workpiece placement area 11. In particular, in this embodiment, the outer flow passage 90a extends along the imaginary line L. Therefore, the outer flow passage 90a can adjust the direction of the gas flow from the gas flow passage 80 to the workpiece placement area 11 to the direction along the imaginary line L.

[0081] (Fourth embodiment) 6 has the same configuration as the heat treatment vessel 1B of the third embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1B of the third embodiment, and detailed descriptions thereof will be omitted.

[0082] The heat treatment container 1C has a partition wall 40C. The partition wall 40C has the communicating passages 46a and 46b described in the second embodiment. That is, in this embodiment, not only is the container body 10B provided with the outer flow passages 90a and 90b, but the partition wall 40C also has the communicating passages 46a and 46b. Therefore, a portion of the gas supplied from the gas inlet 20 to the container body 10B flows into the gas flow passage 80, then flows toward the outer flow passages 90a and 90b, and is then supplied to the workpiece placement area 11. Furthermore, a portion of the gas supplied from the gas inlet 20 to the container body 10B flows into the gas flow passage 80, then flows toward the outer flow passages 90a and 90b, and is then supplied to the workpiece placement area 11 through the communicating passages 46a and 46b.

[0083] As shown by the arrows in Fig. 6, the communicating passages 46a and 46b guide gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L. As shown by the arrows in Fig. 6, the outer flow passages 90a and 90b guide gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L. The direction in which the communicating passages 46a and 46b guide gas from the gas flow passage 80 to the workpiece placement area 11 is the same as the direction in which the outer flow passages 90a and 90b guide gas from the gas flow passage 80 to the workpiece placement area 11, but may be different.

[0084] In this embodiment, in addition to the same effects as in the third embodiment, the same effects as in the second embodiment can be obtained.

[0085] (Fifth embodiment) 7 has the same configuration as the heat treatment vessel 1B of the third embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1B of the third embodiment, and detailed descriptions thereof will be omitted.

[0086] 7, the heat treatment container 1D includes a container body 10D and a partition wall 40D. The container body 10D includes protrusions 17aD and 17bD. Side surfaces 17s of the protrusions 17aD and 17bD are inclined with respect to the imaginary line L. More specifically, the side surfaces 17s of the protrusions 17aD and 17bD are inclined so as to move away from the imaginary line L toward the front (the negative X-axis direction). Furthermore, the side surfaces 17s of the protrusions 17aD and 17bD are inclined so as to move away from each other toward the front.

[0087] Furthermore, one end face 40e1 and the other end face 40e2 in the extension direction of the partition wall 40D are inclined with respect to the imaginary line L. More specifically, the end faces 40e1 and 40e2 of the partition wall 40D are inclined so as to move away from the imaginary line L toward the front. Furthermore, the end faces 40e1 and 40e2 of the partition wall 40D are inclined so as to move away from each other toward the front.

[0088] An end face 40e1 of the partition wall 40D and the side face 17s of the protrusion 17aD extend parallel to each other, and an end face 40e2 of the partition wall 40D and the side face 17s of the protrusion 17bD extend parallel to each other.

[0089] 7, the outer flow paths 90a and 90b guide the gas from the gas flow path 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. More specifically, the outer flow paths 90a and 90b guide the gas flowing through the outer flow paths 90a and 90b in a direction oblique to the imaginary line L so that the gas flowing through the outer flow paths 90a and 90b flows in a direction away from the imaginary line L. Therefore, the flow of gas released from the outer flow paths 90a and 90b is inclined so as to move away from the imaginary line L as it flows forward.

[0090] In this embodiment, the same effects as in the third embodiment can be obtained. Additionally, in this embodiment, the outer flow path 90a guides gas from the gas flow path 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. Therefore, the gas released from the outer flow paths 90a and 90b is more easily dispersed in the workpiece placement area 11, improving the circulation of gas circulating in the workpiece placement area 11. This allows the gas to flow uniformly in the workpiece placement area 11, making it less likely that the gas atmosphere in the workpiece placement area 11 will vary.

[0091] (Sixth embodiment) 8 has the same configuration as the heat treatment vessel 1A of the second embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1A of the second embodiment, and detailed descriptions thereof will be omitted.

[0092] As shown in FIG. 8, the heat treatment container 1E has a partition wall 40E. The partition wall 40E has a third partition wall 43a and a third partition wall 43b in addition to a first partition wall 41, a second partition wall 42a, and a second partition wall 42b. The partition wall 40E is generally curved or bent along the inner wall 12 (the same applies to the embodiments described later). The length of the third partition wall 43a along the extension direction is equal to the length of the second partition wall 42a along the extension direction, but may be shorter or longer than that. The length of the third partition wall 43b along the extension direction is equal to the length of the second partition wall 42b along the extension direction, but may be shorter or longer than that.

[0093] A communication path 46a is formed between an end of the second partition wall 42a in the extension direction and an end of the third partition wall 43a in the extension direction. Also, a communication path 46b is formed between an end of the second partition wall 42b in the extension direction and an end of the third partition wall 43b in the extension direction.

[0094] One end face 40e1 of the second partition 42a in the extension direction is inclined so as to approach the imaginary line L as it extends forward (toward the negative X-axis direction). One end face 40e2 of the third partition 43a in the extension direction is inclined so as to approach the imaginary line L as it extends forward. The end face 40e1 of the second partition 42a and the end face 40e2 of the third partition 43a extend parallel to each other. The above-described configuration also applies to the end faces facing each other between the other partitions (the first partition 41 and the second partition 42a).

[0095] One end face 40e2 of the second partition 42b in the extension direction is inclined so as to approach the imaginary line L as it extends forward. One end face 40e1 of the third partition 43b in the extension direction is inclined so as to approach the imaginary line L as it extends forward. The end face 40e2 of the second partition 42b and the end face 40e1 of the third partition 43b extend parallel to each other. The above-described configuration also applies to the end faces facing each other between the other partitions (the first partition 41 and the second partition 42b).

[0096] 8, the communication passages 46a between the first partition wall 41 and the second partition wall 42a guide the gas from the gas flow passage 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. Furthermore, the communication passages 46a between the second partition wall 42a and the third partition wall 43a guide the gas from the gas flow passage 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. Furthermore, these communication passages 46a guide the gas flowing through the communication passages 46a in a direction oblique to the imaginary line L so that the gas flowing through the communication passages 46a approaches the imaginary line L.

[0097] The communication passage 46b between the first partition wall 41 and the second partition wall 42b guides the gas from the gas flow passage 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. The communication passage 46b between the second partition wall 42b and the third partition wall 43b guides the gas from the gas flow passage 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. These communication passages 46b also guide the gas flowing through the communication passages 46b in a direction oblique to the imaginary line L so that the gas flowing through the communication passages 46b approaches the imaginary line L.

[0098] The flow of gas released from communicating passages 46a and 46b inclines toward imaginary line L as it flows forward. As shown in Fig. 8, the angle θ3 that the gas released from communicating passage 46a makes with a line parallel to imaginary line L is not particularly limited, but is within the range of 0°<θ3<90°, 5°≦θ3≦85°, or 10°≦θ3≦80°. The same applies to the angle that the gas released from communicating passage 46b makes with a line parallel to imaginary line L.

[0099] In this embodiment, the same effects as in the second embodiment can be obtained. Additionally, in this embodiment, the communication passage 46a guides the gas flowing through the communication passage 46a in a direction non-parallel to the imaginary line L. Therefore, the gas released from the communication passage 46a is more likely to be dispersed in the workpiece placement area 11, improving the circulation of the gas circulating through the workpiece placement area 11. This allows the gas to flow uniformly in the workpiece placement area 11, making it less likely that the gas atmosphere in the workpiece placement area 11 will vary.

[0100] Furthermore, the communication passage 46a guides the gas flowing through the communication passage 46a in a direction oblique to the imaginary line L so that the gas flows in a direction approaching the imaginary line L. Therefore, the gas flowing through the communication passage 46a is likely to flow to the rear side of the partition wall 40E where the gas tends to stagnate. This eliminates gas stagnation on the rear side of the partition wall 40E, and effectively prevents variations in the gas atmosphere in the workpiece placement area 11.

[0101] The partition wall 40E also has a communication passage 46a and a communication passage 46b. The communication passages 46a and 46b are located on opposite sides of the imaginary line L. The communication passage 46a guides the gas flowing through the communication passage 46a in a direction approaching the imaginary line L, and the communication passage 46b guides the gas flowing through the communication passage 46b in a direction approaching the imaginary line L. Therefore, the gas released from the communication passage 46a and the gas released from the communication passage 46b collide with each other around the imaginary line L and are agitated (mixed) on the back side of the partition wall 40E, where gas tends to stagnate. This eliminates gas stagnation on the back side of the partition wall 40E, effectively preventing variations in the gas atmosphere in the workpiece placement area 11.

[0102] (Seventh embodiment) 9A has the same configuration as the heat treatment vessel 1E of the sixth embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1E of the sixth embodiment, and detailed descriptions thereof will be omitted.

[0103] As shown in Fig. 9A, the heat treatment container 1F includes a container body 10F and a partition wall 40F. The container body 10F includes protrusions 17aF and 17bF. As shown in Fig. 9B, the side surface 17s of the protrusion 17aF is inclined toward the front (the negative X-axis direction) so as to approach the imaginary line L. Similarly, the side surface 17s of the protrusion 17bF is inclined toward the front so as to approach the imaginary line L.

[0104] The partition wall 40F includes a fourth partition wall 44a and a fourth partition wall 44b in addition to the first partition wall 41, the second partition wall 42a, the second partition wall 42b, the third partition wall 43a, and the third partition wall 43b. The length of the fourth partition wall 44a along its extension direction is equal to the length of the second partition wall 42a or the third partition wall 43a along its extension direction, but may be shorter or longer than that length. The length of the fourth partition wall 44b along its extension direction is equal to the length of the second partition wall 42b or the third partition wall 43b along its extension direction, but may be shorter or longer than that length.

[0105] A communication path 46a is formed between an end of the third partition wall 43a in the extension direction and an end of the fourth partition wall 44a in the extension direction. Also, a communication path 46b is formed between an end of the third partition wall 43b in the extension direction and an end of the fourth partition wall 44b in the extension direction.

[0106] One end face 40e1 of the first partition wall 41 in the extension direction and one end face 40e2 of the second partition wall 42a in the extension direction are inclined so as to approach each other toward the front. Therefore, the end face 40e1 of the first partition wall 41 and the end face 40e2 of the second partition wall 42a extend non-parallel. The above-described configuration also applies to the opposing end faces between the other partition walls (the second partition wall 42a, the third partition wall 43a, and the fourth partition wall 44a).

[0107] The other end face 40e2 of the first partition 41 in the extension direction and one end face 40e1 of the second partition 42b in the extension direction are inclined so as to approach each other toward the front. Therefore, the end face 40e2 of the first partition 41 and the end face 40e1 of the second partition 42b extend non-parallel. The above-described configuration also applies to the opposing end faces between the other partitions (the second partition 42b, the third partition 43b, and the fourth partition 44b).

[0108] An outer flow path 90a is formed between the side surface 17s of the protrusion 17aF and one end surface 40e1 of the fourth partition wall 44a in the extension direction. Also, an outer flow path 90b is formed between the side surface 17s of the protrusion 17bF and one end surface 40e2 of the fourth partition wall 44b in the extension direction.

[0109] The side surface 17s of the protrusion 17aF and the end surface 40e1 of the fourth partition 44a are inclined so as to approach each other toward the front, so that the side surface 17s of the protrusion 17aF and the end surface 40e1 of the fourth partition 44a extend non-parallel to each other.

[0110] The side surface 17s of the protrusion 17bF and the end surface 40e2 of the fourth partition 44b are inclined so as to approach each other toward the front, so that the side surface 17s of the protrusion 17bF and the end surface 40e2 of the fourth partition 44b extend non-parallel to each other.

[0111] As shown by the arrows in Figure 9B, the three communication passages 46a and the three communication passages 46b guide the gas from the gas flow path 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. Furthermore, these communication passages 46a and 46b guide the gas flowing through the communication passages 46a and 46b in a direction oblique to the imaginary line L so that the gas flowing through the communication passages 46a and 46b approaches the imaginary line L. Therefore, the flow of gas released from these communication passages 46a and 46b is inclined so as to approach the imaginary line L as it moves forward.

[0112] 9B, the outer flow paths 90a and 90b guide the gas from the gas flow path 80 to the workpiece placement area 11 in a direction inclined with respect to the imaginary line L. The outer flow paths 90a and 90b also guide the gas flowing through the outer flow paths 90a and 90b in a direction oblique to the imaginary line L so that the gas flowing through the outer flow paths 90a and 90b approaches the imaginary line L. Therefore, the flow of gas released from the outer flow paths 90a and 90b is inclined so as to approach the imaginary line L as it moves forward.

[0113] In this embodiment, the same effects as in the sixth embodiment can be obtained. Additionally, in this embodiment, the outer flow passage 90a guides the gas flowing through the outer flow passage 90a in a direction oblique to the imaginary line L so that the gas flowing through the outer flow passage 90a approaches the imaginary line L. Therefore, the gas flowing through the outer flow passage 90a is likely to flow to the rear side of the partition wall 40F, where the gas tends to stagnate. This eliminates gas stagnation on the rear side of the partition wall 40F, and can effectively prevent variations in the gas atmosphere in the workpiece placement area 11.

[0114] (Eighth embodiment) 10A has the same configuration as the heat treatment vessel 1F of the seventh embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1F of the seventh embodiment, and detailed descriptions thereof will be omitted.

[0115] As shown in FIG. 10A, the partition wall 40G has a plurality of (four in this embodiment) pillars 47. The number of pillars 47 may be one to three, or five or more. The pillars 47 have a cylindrical shape and protrude upward from the bottom 13. As shown in FIG. 10B, the four pillars 47 are arranged in the gas flow path 80 and are located between the first partition wall 41 and the inner wall 12. In the direction perpendicular to the imaginary line L (the Y-axis direction), two pillars 47 are located on one side of the imaginary line L, and two pillars 47 are located on the other side of the imaginary line L. Note that no pillars 47 are located in front of the gas inlet port 20.

[0116] In this embodiment, the same effects as those of the seventh embodiment can be obtained. In addition, in this embodiment, at least one pillar 47 is arranged in the gas flow path 80. Therefore, the flow of gas supplied from the gas inlet port 20 to the container body 10 is obstructed by the multiple pillars 47. As a result, compared to the seventh embodiment, the time it takes for the gas that has flowed into the gas flow path 80 to pass through the gas flow path 80 becomes longer, and the temperature of the gas flowing through the gas flow path 80 can be effectively increased.

[0117] (Ninth embodiment) 11 has the same configuration as the heat treatment vessel 1F of the seventh embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1F of the seventh embodiment, and detailed descriptions thereof will be omitted.

[0118] As shown in FIG. 11 , the partition wall 40H includes a fifth partition wall 45a and a fifth partition wall 45b in addition to the first partition wall 41, the second partition wall 42a, the second partition wall 42b, the third partition wall 43a, the third partition wall 43b, the fourth partition wall 44a, and the fourth partition wall 44b. A communication passage 46a is formed between the fourth partition wall 44a and the fifth partition wall 45a. A communication passage 46b is formed between the fourth partition wall 44b and the fifth partition wall 45b. An outer flow passage 90a is formed between the fifth partition wall 45a and the protrusion 17aF. An outer flow passage 90b is formed between the fifth partition wall 45b and the protrusion 17bF.

[0119] The second partition wall 42a and the fourth partition wall 44a are located radially inward of the container body 10 relative to the first partition wall 41, the third partition wall 43a, and the fifth partition wall 45a. These partition walls are arranged alternately in the radial direction of the container body 10. Furthermore, the second partition wall 42b and the fourth partition wall 44b are located radially inward of the container body 10 relative to the first partition wall 41, the third partition wall 43b, and the fifth partition wall 45b. These partition walls are arranged alternately in the radial direction of the container body 10.

[0120] 11, the four communication passages 46a and the four communication passages 46b guide the gas from the gas flow path 80 to the workpiece placement area 11 along a direction inclined with respect to the imaginary line L. These communication passages 46a and 46b guide the gas flowing through the communication passages 46a and 46b in a direction oblique to the imaginary line L so that the gas flowing through the communication passages 46a and 46b approaches the imaginary line L. Therefore, the flow of gas released from these communication passages 46a and 46b is inclined so as to approach the imaginary line L as it moves forward.

[0121] 11, the outer flow paths 90a and 90b guide the gas from the gas flow path 80 to the workpiece placement area 11 in a direction inclined with respect to the imaginary line L. The outer flow paths 90a and 90b guide the gas flowing through the outer flow paths 90a and 90b in a direction oblique to the imaginary line L so that the gas flowing through the outer flow paths 90a and 90b approaches the imaginary line L. Therefore, the flow of gas released from the outer flow paths 90a and 90b is inclined so as to approach the imaginary line L as it moves forward.

[0122] The gas discharged from the communication passage 46a between the second partition wall 42a and the third partition wall 43a is discharged into the work placement area 11 at a gentler angle with respect to the imaginary line L than the gas discharged from the communication passage 46a between the first partition wall 41 and the second partition wall 42a. Also, the gas discharged from the communication passage 46a between the third partition wall 43a and the fourth partition wall 44a is discharged into the work placement area 11 at a steeper angle with respect to the imaginary line L than the gas discharged from the communication passage 46a between the second partition wall 42a and the third partition wall 43a. Also, the gas discharged from the communication passage 46a between the fourth partition wall 44a and the fifth partition wall 45a is discharged into the work placement area 11 at a gentler angle with respect to the imaginary line L than the gas discharged from the communication passage 46a between the third partition wall 43a and the fourth partition wall 44a. Furthermore, the gas discharged from the outer flow path 90a is discharged into the workpiece placement area 11 at a steeper angle with respect to the imaginary line L than the gas discharged from the communication path 46a between the fourth partition wall 44a and the fifth partition wall 45a.

[0123] Furthermore, the gas released from the communication passage 46b between the second partition wall 42b and the third partition wall 43b is released into the work placement area 11 at a gentler angle with respect to the imaginary line L than the gas released from the communication passage 46b between the first partition wall 41 and the second partition wall 42b. Furthermore, the gas released from the communication passage 46b between the third partition wall 43b and the fourth partition wall 44b is released into the work placement area 11 at a steeper angle with respect to the imaginary line L than the gas released from the communication passage 46b between the second partition wall 42b and the third partition wall 43b. Furthermore, the gas released from the communication passage 46b between the fourth partition wall 44b and the fifth partition wall 45b is released into the work placement area 11 at a gentler angle with respect to the imaginary line L than the gas released from the communication passage 46b between the third partition wall 43b and the fourth partition wall 44b. Furthermore, the gas discharged from the outer flow path 90b is discharged into the workpiece placement area 11 at a steeper angle with respect to the imaginary line L than the gas discharged from the communication path 46b between the fourth partition wall 44b and the fifth partition wall 45b.

[0124] This embodiment also provides the same effects as the seventh embodiment. In addition, in this embodiment, the partition wall 40H has more communication passages than the seventh embodiment. Therefore, gas stagnation on the back side of the partition wall 40H is eliminated, and variation in the gas atmosphere in the workpiece placement area 11 can be effectively prevented.

[0125] (Tenth embodiment) 12 has the same configuration as the heat treatment vessel 1E of the sixth embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1E of the sixth embodiment, and detailed descriptions thereof will be omitted.

[0126] 12, the heat treatment container 1I has a partition wall 40I. One end face 40e1 of the first partition wall 41 in the extension direction extends in a direction perpendicular to the imaginary line L (Y-axis direction). One end face 40e2 of the second partition wall 42a in the extension direction extends in a direction perpendicular to the imaginary line L. The end face 40e1 of the first partition wall 41 and the end face 40e2 of the second partition wall 42a extend parallel to each other.

[0127] The other end face 40e1 of the second partition 42a in the extension direction extends in a direction perpendicular to the imaginary line L. The other end face 40e2 of the third partition 43a in the extension direction extends in a direction perpendicular to the imaginary line L. The end face 40e1 of the second partition 42a and the end face 40e2 of the third partition 43a extend in parallel.

[0128] The other end face 40e2 of the first partition 41 in the extension direction extends in a direction perpendicular to the imaginary line L. The other end face 40e1 of the second partition 42b in the extension direction extends in a direction perpendicular to the imaginary line L. The end face 40e2 of the first partition 41 and the end face 40e1 of the second partition 42b extend in parallel.

[0129] The other end face 40e2 of the second partition 42b in the extension direction extends in a direction perpendicular to the imaginary line L. Furthermore, one end face 40e1 of the third partition 43b in the extension direction extends in a direction perpendicular to the imaginary line L. The end face 40e2 of the second partition 42b and the end face 40e1 of the third partition 43b extend parallel to each other.

[0130] As shown by the arrows in Figure 12, the communication passage 46a between the first partition wall 41 and the second partition wall 42a guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46a between the second partition wall 42a and the third partition wall 43a guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46b between the first partition wall 41 and the second partition wall 42b guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46b between the second partition wall 42b and the third partition wall 43b guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L.

[0131] In this embodiment, the same effects as in the sixth embodiment can be obtained. Additionally, in this embodiment, the communicating passage 46a guides the gas flowing through the communicating passage 46a in a direction perpendicular to the imaginary line L so that the gas flowing through the communicating passage 46a moves in a direction approaching the imaginary line L. Therefore, the gas flowing through the communicating passage 46a is more likely to flow to the rear side of the partition wall 40I, where the gas tends to stagnate. This eliminates gas stagnation on the rear side of the partition wall 40I, and can effectively prevent variations in the gas atmosphere in the workpiece placement area 11.

[0132] Furthermore, the communicating passage 46a guides the gas flowing through the communicating passage 46a in a direction perpendicular to the imaginary line L, and the communicating passage 46b guides the gas flowing through the communicating passage 46b in a direction perpendicular to the imaginary line L. The communicating passages 46a and 46b are arranged symmetrically with respect to the imaginary line L. Therefore, the gas is released from the communicating passages 46a and 46b so as to be directed toward the back side of the partition wall 40I, where the gas is likely to accumulate. Therefore, gas accumulation on the back side of the partition wall 40I is eliminated, and variations in the gas atmosphere in the workpiece placement area 11 can be effectively prevented.

[0133] (Eleventh embodiment) 13A has the same configuration as the heat treatment vessel 1I of the tenth embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1I of the tenth embodiment, and detailed descriptions thereof will be omitted.

[0134] 13A, a heat treatment container 1J has a partition wall 40J. In this embodiment, the shapes of the second partition wall 42a and the third partition wall 43a are different from those of the second partition wall 42a and the third partition wall 43a in the tenth embodiment. In addition, the shapes of the second partition wall 42b and the third partition wall 43b are different from those of the second partition wall 42b and the third partition wall 43b in the tenth embodiment.

[0135] That is, the second partition wall 42a is bent at least at one location (one location in this embodiment). Also, the second partition wall 42b is bent at least at one location (one location in this embodiment). The second partition wall 42a may be bent at multiple locations, and the second partition wall 42b may be bent at multiple locations. The third partition walls 43a and 43b have a trapezoidal shape in a plan view.

[0136] 13B, one end face 40e1 of the first partition 41 in the extension direction extends in a direction (Y-axis direction) perpendicular to the imaginary line L. In addition, the side face 40s of the second partition 42a extends in a direction perpendicular to the imaginary line L. The end face 40e1 of the first partition 41 and the side face 40s of the second partition 42a extend parallel to each other.

[0137] The other end face 40e2 of the first partition 41 in the extension direction extends in a direction perpendicular to the imaginary line L. In addition, the side face 40s of the second partition 42b extends in a direction perpendicular to the imaginary line L. The end face 40e2 of the first partition 41 and the side face 40s of the second partition 42b extend in parallel.

[0138] As shown by the arrows in FIG. 13B, the communication passage 46a between the first partition wall 41 and the second partition wall 42a guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46a between the second partition wall 42a and the third partition wall 43a guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46b between the first partition wall 41 and the second partition wall 42b guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46b between the second partition wall 42b and the third partition wall 43b guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L.

[0139] 13B, an outer flow passage 90a between the third partition wall 43a and the protrusion 17a guides gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L. An outer flow passage 90b between the third partition wall 43b and the protrusion 17b guides gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L.

[0140] In this embodiment, the same effects as in the tenth embodiment can be obtained. Additionally, in this embodiment, an outer flow passage 90a that guides gas from the gas flow passage 80 to the workpiece placement area 11 is formed between the third partition wall 43a and the protrusion 17a. Therefore, the outer flow passage 90a can adjust the direction of the gas flow from the gas flow passage 80 to the workpiece placement area 11. In particular, in this embodiment, the outer flow passage 90a extends along the imaginary line L. Therefore, the outer flow passage 90a can adjust the direction of the gas flow from the gas flow passage 80 to the workpiece placement area 11 in the direction along the imaginary line L.

[0141] In addition, in this embodiment, the second partition wall 42a is curved. Therefore, the flow of gas released from the communication passage 46a between the second partition wall 42a and the third partition wall 43a can be adjusted depending on the degree of bending of the second partition wall 42a.

[0142] (Twelfth embodiment) 14 has the same configuration as the heat treatment vessel 1J of the 11th embodiment, except for the following points: The same reference numerals are used to designate parts that overlap with the heat treatment vessel 1J of the 11th embodiment, and detailed descriptions thereof will be omitted.

[0143] 14, the communication passage 46a between the first partition wall 41 and the second partition wall 42a guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46a between the second partition wall 42a and the third partition wall 43a guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46b between the first partition wall 41 and the second partition wall 42b guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L. The communication passage 46b between the second partition wall 42b and the third partition wall 43b guides gas from the gas flow passage 80 to the workpiece placement area 11 along a direction perpendicular to the imaginary line L.

[0144] 14, an outer flow passage 90a between the third partition wall 43a and the protruding portion 17a guides gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L. An outer flow passage 90b between the third partition wall 43b and the protruding portion 17b guides gas from the gas flow passage 80 to the workpiece placement area 11 along the imaginary line L.

[0145] This embodiment also provides the same effects as the eleventh embodiment. Additionally, in this embodiment, the second partition walls 42a and 42b have a parallelogram shape in plan view. The third partition walls 43a and 43b have a trapezoid shape in plan view. By adjusting the shapes of the second partition walls 42a and 42b and the third partition walls 43a and 43b, the direction or flow rate of the gas released from the communicating passage 46a to the workpiece placement area 11 can be adjusted.

[0146] (Thirteenth embodiment) The heat treatment vessel 1L of the thirteenth embodiment shown in FIG. 15 has the same configuration as the heat treatment vessel 1 of the first embodiment, except for the following points. Parts that overlap with the heat treatment vessel 1 of the first embodiment are given the same reference numerals, and detailed descriptions thereof will be omitted. Note that in FIG. 15, the pedestal 60 and the workpiece 2 are omitted to avoid cluttering the drawing.

[0147] The heat treatment vessel 1L has a pipe body 100. The pipe body 100 is composed of a long, thin cylindrical member. The pipe body 100 separates the gas inlet port 20 from the workpiece placement area 11 in the direction connecting the gas inlet port 20 and the gas exhaust port 30 (the X-axis direction). That is, the pipe body 100 has a function similar to that of the partition wall 40 of the first embodiment. The material constituting the pipe body 100 may be the same as the material constituting the partition wall 40. Alternatively, the material constituting the pipe body 100 may be a heat-resistant resin.

[0148] The pipe 100 has a main body 110, branching portions 120a and 120b, and a gas supply portion 130. The gas supply portion 130 passes through the inside of the gas inlet hole 15 and protrudes into the inside of the container body 10 from the gas inlet port 20. The main body 110 is continuously connected to the gas supply portion 130 and extends along the inner wall 12. The main body 110 is curved or bent and formed symmetrically with respect to the imaginary line L. Inside the main body 110, a gas flow path 80 is formed along the inner wall 12. The gas flow path 80 guides the gas supplied to the pipe 100 through the gas supply portion 130 to the workpiece placement area 11.

[0149] The branch portion 120a is continuously connected to the main body portion 110. The branch portion 120a protrudes from the main body portion 110 in a direction perpendicular to the imaginary line L on one side of the extension direction of the main body portion 110. The branch portion 120a has a communication passage 46a that guides gas from the gas flow path 80 to the workpiece placement area 11. The communication passage 46a is formed inside the branch portion 120a. The communication passage 46a guides the gas flowing through the communication passage 46a in a direction perpendicular to the imaginary line L so that the gas flowing through the communication passage 46a approaches the imaginary line L. Note that the branch portion 120a may extend in an oblique direction with respect to the imaginary line L. In this case, the communication passage 46a may guide the gas flowing through the communication passage 46a in an oblique direction with respect to the imaginary line L so that the gas flowing through the communication passage 46a approaches the imaginary line L.

[0150] The branch portion 120b is continuously connected to the main body portion 110. The branch portion 120b protrudes from the main body portion 110 in a direction perpendicular to the imaginary line L on the other side of the extension direction of the main body portion 110. The branch portion 120b has a communication passage 46b that guides gas from the gas flow path 80 to the workpiece placement area 11. The communication passage 46b is formed inside the branch portion 120b. The communication passage 46b guides the gas flowing through the communication passage 46b in a direction perpendicular to the imaginary line L so that the gas flowing through the communication passage 46b approaches the imaginary line L. Note that the branch portion 120b may extend in an oblique direction with respect to the imaginary line L. In this case, the communication passage 46b may guide the gas flowing through the communication passage 46b in an oblique direction with respect to the imaginary line L so that the gas flowing through the communication passage 46b approaches the imaginary line L.

[0151] This embodiment also achieves the same effects as the first embodiment. Additionally, this embodiment includes a tubular body 100 that protrudes from the gas inlet 20 into the container body 10 and extends along the inner wall 12. A gas flow path 80 is formed inside the tubular body 100 along the inner wall 12, guiding the gas supplied to the tubular body 100 to the workpiece placement area 11. Therefore, the gas supplied to the tubular body 100 does not flow directly toward the workpiece placement area 11 along the direction connecting the gas inlet 20 and the gas exhaust port 30 (the X-axis direction), but flows toward the workpiece placement area 11 via the gas flow path 80. The gas temperature increases while the gas supplied to the tubular body 100 flows through the gas flow path 80. Therefore, gas having a temperature required to heat the workpiece 2 (FIG. 2) is supplied to the workpiece placement area 11 through the gas flow path 80. This uniformizes the temperature of the workpiece placement area 11, enabling uniform heating of the workpiece 2. This prevents variations in the sintering state or electrical properties of the workpiece 2, and allows electronic components with desired electrical properties to be manufactured.

[0152] The tube 100 also includes a main body 110 extending along the inner wall 12 and having a gas flow path 80, and a branch portion 120a connected to the main body 110. The branch portion 120a has a communication passage 46a that guides gas from the gas flow path 80 to the workpiece placement area 11. Therefore, a portion of the gas flowing through the gas flow path 80 flows through the communication passage 46a to the back side of the main body 110 (the side facing the gas exhaust port 30), where gas tends to stagnate, before reaching the outlet of the gas flow path 80 (the end of the gas flow path 80 in the extension direction). This eliminates gas stagnation on the back side of the main body 110, improving the circulation of gas circulating through the workpiece placement area 11. This allows the gas to flow uniformly through the workpiece placement area 11, reducing variation in the gas atmosphere in the workpiece placement area 11. This prevents variation in the sintering state or electrical properties of the workpieces, and allows the production of electronic components with desired electrical properties.

[0153] The present disclosure is not limited to the above-described embodiments, and various modifications can be made within the scope of the present disclosure.

[0154] 16A, the partition wall 40 may be made of a porous material (ceramics, etc.). In this case, a portion of the gas flowing through the gas flow path 80 flows through multiple holes in the partition wall 40 to the back side of the partition wall 40 (the side facing the gas exhaust port 30), where the gas is likely to stagnate, before reaching the outlet of the gas flow path 80 (the end in the extension direction of the gas flow path 80). Therefore, gas stagnation is eliminated on the back side of the partition wall 40, and the circulation of the gas circulating in the workpiece placement area 11 is improved.

[0155] 16B, in the second embodiment, the width of the first partition wall 41 may be wider than the width of the second partition wall 42a or 42b. Alternatively, the width of the first partition wall 41 may be narrower than the width of the second partition wall 42a or 42b. The same applies to the partition walls in the sixth to twelfth embodiments.

[0156] As shown in Fig. 17A, in the second embodiment, the communicating paths 46a and 46b may be grooves recessed toward the bottom 13 of the container body 10. Alternatively, as shown in Fig. 17B, in the second embodiment, the communicating paths 46a and 46b may be through-holes that penetrate the partition wall 40A. The same applies to the communicating paths and / or outer flow paths in the third to twelfth embodiments.

[0157] In the first embodiment, multiple layers of partition walls 40 may be provided adjacent to each other along the imaginary line L. For example, the partition walls 40 of the first layer and the partition walls 40 of the second layer may be arranged side by side along the imaginary line L.

[0158] In the above embodiments, the number of communication passages 46a is one (e.g., FIG. 4), two (e.g., FIG. 6), three (e.g., FIG. 9B), or four (e.g., FIG. 11), but the number of communication passages 46a may be five or more. Similarly, in the above embodiments, the number of communication passages 46b is one (e.g., FIG. 4), two (e.g., FIG. 6), three (e.g., FIG. 9B), or four (e.g., FIG. 11), but the number of communication passages 46b may be five or more. Furthermore, the number of communication passages 46a and the number of communication passages 46b may be different.

[0159] The techniques of the first to twelfth embodiments may be applied to each other, and the techniques of the first to twelfth embodiments may be applied to the thirteenth embodiment.

[0160] For example, the technology of the sixth embodiment (FIG. 8) may be applied to the second embodiment (FIG. 4) and the fourth embodiment (FIG. 6) described above, and the communicating passages 46a and / or 46b may be configured so that the gas flowing through the communicating passages 46a and / or 46b flows in a direction approaching the imaginary line L.

[0161] Furthermore, for example, the technology of the seventh embodiment (FIG. 9B) may be applied to the third embodiment (FIG. 5B), fourth embodiment (FIG. 6), fifth embodiment (FIG. 7), eleventh embodiment (FIG. 13B), and twelfth embodiment (FIG. 14), and the outer flow paths 90a and / or 90b may be configured so that the gas flowing through the outer flow paths 90a and / or 90b flows in a direction approaching the imaginary line L.

[0162] Furthermore, for example, the technology of the tenth embodiment (FIG. 12) may be applied to the second embodiment (FIG. 4), fourth embodiment (FIG. 6), sixth embodiment (FIG. 8), seventh embodiment (FIG. 9B), eighth embodiment (FIG. 10B), and ninth embodiment (FIG. 11), and the communicating passages 46a and / or 46b may be configured so that the gas flowing through the communicating passages 46a and / or 46b flows perpendicularly to the direction approaching the imaginary line L.

[0163] Furthermore, for example, the technology of the fifth embodiment (FIG. 7) may be applied to the fourth embodiment (FIG. 6), seventh embodiment (FIG. 9B), eighth embodiment (FIG. 10B), ninth embodiment (FIG. 11), eleventh embodiment (FIG. 13B), and twelfth embodiment (FIG. 14), and the outer flow paths 90a and / or 90b may be configured so that the gas flowing through the outer flow paths 90a and / or 90b flows in a direction away from the imaginary line L.

[0164] Furthermore, for example, the technology of the eighth embodiment (FIG. 10B) may be applied to the first embodiment (FIG. 3B) to the seventh embodiment (FIG. 9B) and the ninth embodiment (FIG. 11) to the twelfth embodiment (FIG. 14), and the partition wall may be provided with at least one pillar 47.

[0165] Furthermore, for example, in the above-mentioned third embodiment (FIG. 5B), fourth embodiment (FIG. 6), fifth embodiment (FIG. 7), seventh embodiment (FIG. 9B), eighth embodiment (FIG. 10B), ninth embodiment (FIG. 11), eleventh embodiment (FIG. 13B), and twelfth embodiment (FIG. 14), the outer flow paths 90a and / or 90b may be configured so that the gas flowing through the outer flow paths 90a and / or 90b approaches the imaginary line L (perpendicular to the imaginary line L).

[0166] In each of the above embodiments, at least one of the communication passage 46a, the communication passage 46b, the outer flow passage 90a, and the outer flow passage 90b may be omitted. [Example]

[0167] The present invention will be described below in more detail with reference to examples, but the present invention is not limited to these examples.

[0168] Example A1 A heat treatment vessel 1 according to the first embodiment shown in FIGS. 1 and 2 was prepared. Carbon was used as the material for forming the heat treatment vessel 1 (vessel body 10, partition wall 40, and lid 50). As shown in FIG. 2, a plurality of ceramic laminated electronic components (laminated inductors) having internal electrodes made of silver were placed as workpieces 2 on a pedestal 60 (workpiece placement area 11). As shown in FIG. 1, a gas (inert gas: nitrogen) was supplied to the vessel body 10 through a gas inlet pipe 3, and the gas was discharged from the vessel body 10 through a gas outlet pipe 4. While this was done, the workpieces 2 were heat-treated (fired) at a firing (sintering) temperature of 900°C.

[0169] The sinterability was evaluated for the workpieces 2 placed at positions A to F in the workpiece placement area 11 shown in FIG. 18. In the evaluation of sinterability, any cross section of the workpiece 2 was observed with an SEM, and the sinterability of the ceramics and internal electrodes of the workpiece 2 was evaluated. The results are shown in Table 1. In Table 1, good sinterability was marked with ◯, and poor sinterability was marked with ×.

[0170] Example A2 The same evaluation as in Example A1 was performed using the heat treatment vessel 1A of the second embodiment shown in Figure 4. However, the sinterability was evaluated only for the workpieces 2 placed at positions A and B in the workpiece placement area 11 shown in Figure 18. The results are shown in Table 1.

[0171] Example A3 The same evaluation as in Example A2 was carried out using a heat treatment container 1B of the third embodiment shown in Figure 5B. The results are shown in Table 1.

[0172] Example A4 The same evaluation as in Example A2 was carried out using a heat treatment container 1C of the fourth embodiment shown in Figure 6. The results are shown in Table 1.

[0173] Example A5 The same evaluation as in Example A2 was carried out using a heat treatment container 1D of the fifth embodiment shown in Figure 7. The results are shown in Table 1.

[0174] Comparative Example A1 A heat treatment vessel was prepared in which the partition wall 40 was omitted from the heat treatment vessel 1 of the first embodiment shown in Figure 2. Using this heat treatment vessel, the same evaluation as in Example A1 was carried out. The results are shown in Table 1.

[0175] Example B1 A heat treatment vessel 1 according to a first embodiment shown in FIGS. 1 and 2 was prepared. Silicon carbide was used as the material for forming the heat treatment vessel 1 (vessel body 10, partition wall 40, and lid 50). As shown in FIG. 2, a plurality of ceramic multilayer electronic components (multilayer capacitors) having internal electrodes made of nickel were placed as workpieces 2 on a pedestal 60 (workpiece placement area 11). A gas (a mixed gas of nitrogen, hydrogen, and water vapor) was supplied to the vessel body 10 through the gas inlet pipe 3 shown in FIG. 1, and the gas was discharged from the vessel body 10 through the gas outlet pipe 4. While this was done, the workpieces 2 were heat-treated (fired) at a firing (sintering) temperature of 1200°C.

[0176] The workpieces 2 placed at positions A to F in the workpiece placement area 11 shown in Figure 18 were evaluated for sinterability and their electrical properties (insulation resistance) were measured. To evaluate the sinterability, any cross section of the workpiece 2 was observed using an SEM, and the sinterability of the ceramics and internal electrodes of the workpiece 2 was evaluated. To measure the electrical properties, input / output terminal electrodes were attached to the workpiece 2 after heat treatment, and the insulation resistance between the terminal electrodes was measured. The results are shown in Table 2A. In Table 2A, good sinterability was marked with a circle, and poor sinterability was marked with an X. In addition, when the insulation resistance was 10 9 If the insulation resistance is 10 Ω or more, it is marked as ◯.9 When the resistance was less than Ω, it was marked as ×.

[0177] Example B2 The same evaluation as in Example B1 was performed using the heat treatment container 1E of the sixth embodiment shown in Figure 8. However, the sinterability was evaluated and the electrical characteristics (insulation resistance) were measured only for the workpieces 2 placed at positions A and B in the workpiece placement area 11 shown in Figure 18. The results are shown in Table 2A.

[0178] Example B3 The same evaluation as in Example B2 was carried out using the heat treatment container 1F of the seventh embodiment shown in Figure 9B. The results are shown in Table 2A.

[0179] Example B4 The same evaluation as in Example B2 was carried out using the heat treatment container 1G of the eighth embodiment shown in Figure 10B. The results are shown in Table 2A.

[0180] Example B5 The same evaluation as in Example B2 was carried out using the heat treatment container 1H of the ninth embodiment shown in Figure 11. The results are shown in Table 2A.

[0181] Example B6 The same evaluation as in Example B2 was carried out using a heat treatment container 1I of the tenth embodiment shown in Figure 12. The results are shown in Table 2B.

[0182] Example B7 The same evaluation as in Example B2 was carried out using the heat treatment container 1J of the eleventh embodiment shown in Figure 13B. The results are shown in Table 2B.

[0183] Example B8 The same evaluation as in Example B2 was carried out using the heat treatment container 1K of the twelfth embodiment shown in Figure 14. The results are shown in Table 2B.

[0184] Comparative Example B1 A heat treatment container was prepared in which the partition wall 40 was omitted from the heat treatment container 1 of the first embodiment shown in Figure 2. Using this heat treatment container, the same evaluation as in Example B1 was carried out. The results are shown in Table 2B.

[0185] [Table 1]

[0186] [Table 2A]

[0187] [Table 2B]

[0188] As shown in Table 1, Table 2A, and Table 2B, it was confirmed that in Examples A1 to A5 and B1 to B8, both the sinterability of the ceramics of the workpiece 2 and the sinterability of the internal electrodes were good. On the other hand, in Comparative Examples A1 and B1, it was confirmed that the sinterability of the ceramics of the workpiece 2 was insufficient at positions A and B. Furthermore, in Comparative Examples A1 and B1, it was confirmed that the sinterability of the internal electrodes of the workpiece 2 was insufficient at position A. From this, it was revealed that by providing a partition wall 40 in the heat treatment vessel 1, as in Examples A1 to A5 and B1 to B8, the temperature in the workpiece placement area 11 becomes uniform, and the workpiece 2 can be heated uniformly. As a result, it was revealed that variation in the sintering state of the workpiece 2 can be prevented.

[0189] As shown in Table 2A, in Examples B2 to B5, the electrical characteristics were poor at Position A, while the electrical characteristics were good at Position B. Furthermore, as shown in Table 2B, in Examples B6 to B8, the electrical characteristics were good at both Positions A and B. Furthermore, in Comparative Example B1, the electrical characteristics were poor at both Positions A and B. From this, it was revealed that when, as in Examples B2 to B5, the communicating passage 46a (see, for example, FIG. 8) guides the gas flowing through the communicating passage 46a in a direction oblique to the imaginary line L so that the gas flowing through the communicating passage 46a approaches the imaginary line L, the gas is more likely to flow to the back side of the partition wall 40E (FIG. 8) where the gas tends to stagnate, and the gas atmosphere in the workpiece placement area 11 is less likely to vary. As a result, it was revealed that it is possible to prevent variation in the electrical characteristics of electronic components and to manufacture electronic components with desired electrical characteristics.

[0190] Furthermore, as in Examples B6 to B8, when the communicating passage 46a (see, for example, FIG. 12) guides the gas flowing through the communicating passage 46a in a direction perpendicular to the imaginary line L so that the gas flowing through the communicating passage 46a moves in a direction approaching the imaginary line L, it becomes clear that the gas flows more easily to the rear side of the partition wall 40I (FIG. 12) where the gas tends to stagnate, and the gas atmosphere in the workpiece placement area 11 becomes even less likely to vary. As a result, it becomes clear that it is possible to prevent variation in the electrical characteristics of electronic components and to manufacture electronic components having desired electrical characteristics.

[0191] This specification discloses the following:

[0192] [1] a container body having a workpiece placement area for placing a workpiece and an inner wall surrounding the workpiece placement area; a gas inlet port formed in the inner wall; a gas exhaust port formed in the inner wall at a position different from the gas inlet port; a partition wall extending along the inner wall and isolating the gas inlet from the workpiece placement area in a direction connecting the gas inlet and the gas exhaust port, a gas flow path formed along the inner wall between the partition wall and the inner wall, the gas flow path directing gas from the gas inlet to the workpiece placement area;

[0193] [2] The heat treatment vessel according to [1] above, wherein the partition wall is installed on a line connecting the gas inlet and the gas exhaust port at a position that blocks the gas inlet and the workpiece placement area.

[0194] [3] The heat treatment container according to the above [1] or [2], wherein the partition wall is curved or bent along the inner wall.

[0195] [4] the partition wall has a communication passage that guides gas from the gas flow path to the workpiece placement area, The heat treatment vessel according to any one of the above [1] to [3], wherein the communication passage is located between one end and the other end of the partition wall in the extending direction.

[0196] [5] The heat treatment vessel according to [4] above, wherein the communication passage is a through-hole penetrating the partition wall or a groove recessed toward the bottom of the vessel body.

[0197] [6] The heat treatment vessel according to [4] or [5] above, wherein the communication passage guides the gas flowing through the communication passage in a direction non-parallel to an imaginary line connecting the gas inlet and the gas outlet.

[0198] [7] The heat treatment vessel according to [6] above, wherein the communication passage guides the gas flowing through the communication passage in a direction oblique to the imaginary line so that the gas flowing through the communication passage approaches the imaginary line.

[0199] [8] The heat treatment vessel according to [6] above, wherein the communication passage guides the gas flowing through the communication passage in a direction perpendicular to the imaginary line so that the gas flowing through the communication passage approaches the imaginary line.

[0200] [9] the communication passage comprises a first communication passage and a second communication passage, the first communication passage and the second communication passage are located on opposite sides of an imaginary line connecting the gas inlet and the gas exhaust port, the first communication passage guides the gas flowing through the first communication passage in a direction approaching the imaginary line, The heat treatment vessel according to any one of the above [4] to [8], wherein the second communication passage guides the gas flowing through the second communication passage in a direction approaching the imaginary line.

[0201]

[10] the first communication passage guides the gas flowing through the first communication passage in a direction perpendicular to the imaginary line, the second communication passage guides the gas flowing through the second communication passage in a direction perpendicular to the imaginary line, The heat treatment vessel according to [9] above, wherein the first communication passage and the second communication passage are arranged symmetrically with respect to the imaginary line.

[0202]

[11] The partition wall is composed of a plurality of partition walls, The partition walls are spaced apart along the inner wall, A heat treatment vessel as described in any of [1] to [4] above, [6] citing anything other than [5] above, [7] to [8] above, [9] citing anything other than [5] above, and

[10] citing anything other than [5] above, wherein a communicating passage is formed between adjacent partition walls to guide gas from the gas flow path to the workpiece placement area.

[0203]

[12] the container body has a protrusion that protrudes from the inner wall toward the inside of the container body, A heat treatment container as described in any one of [1] to

[11] above, wherein an outer flow path is formed between the end of the partition wall in the extension direction and the protrusion, for guiding gas from the gas flow path to the workpiece placement area.

[0204]

[13] a container body having a workpiece placement area for placing a workpiece and an inner wall surrounding the workpiece placement area; a gas inlet port provided on the inner wall; a gas exhaust port provided on the inner wall at a position different from the gas inlet port; a pipe that protrudes from the gas inlet into the container body and extends along the inner wall, A heat treatment vessel in which a gas flow path is formed along the inner wall inside the pipe body to guide gas supplied to the pipe body to the workpiece placement area.

[0205]

[14] the pipe body includes a main body portion extending along the inner wall and having the gas flow path, and a branch portion continuous with the main body portion, The heat treatment vessel according to

[13] above, wherein the branching portion has a communication passage that guides gas from the gas flow path to the workpiece placement area. [Explanation of symbols]

[0206] 1, 1A~1L...Heat treatment container 2. Work 3...Gas supply pipe 4...Gas exhaust pipe 5…Heat source 10, 10B, 10D, 10F...Container body 11...Work placement area 12…Inner wall 13...Bottom 14...Peripheral wall part 15...Gas intake vent 16...Gas exhaust port 17a,17b,17aD,17bD,17aF,17bF...Protrusion 17s…side 20...Gas intake port 30...Gas exhaust port 40,40A~40K…Bulkhead 41...First bulkhead 40e1,40e2…end face 40s…side 42a, 42b…Second bulkhead 43a,43b...Third bulkhead 44a,44b...4th bulkhead 45a,45b…5th bulkhead 46a, 46b…Communication path 47...Column 50…Lid 60...Pedestal 70...Groove 80...Gas flow path 90a, 90b...Outer flow path 100...Tube 110...Main body 120a, 120b...branch 130...Gas supply section

Claims

1. a container body having a workpiece placement area for placing a workpiece and an inner wall surrounding the workpiece placement area; a gas inlet port formed in the inner wall; a gas exhaust port formed in the inner wall at a position different from the gas inlet port; a partition wall extending along the inner wall and isolating the gas inlet from the workpiece placement area in a direction connecting the gas inlet and the gas exhaust port, a gas flow path formed along the inner wall between the partition wall and the inner wall, the gas flow path directing gas from the gas inlet to the workpiece placement area;

2. 2. The heat treatment vessel according to claim 1, wherein the partition wall is installed on a line connecting the gas inlet and the gas exhaust port at a position that blocks the gas inlet from the workpiece placement area.

3. The heat treatment vessel according to claim 1 or 2, wherein the partition wall is curved or bent along the inner wall.

4. the partition wall has a communication passage that guides gas from the gas flow path to the workpiece placement area, 3. The heat treatment vessel according to claim 1, wherein the communication passage is located between one end and the other end of the partition wall in an extending direction.

5. The heat treatment vessel according to claim 4 , wherein the communication passage is a through-hole penetrating the partition wall or a groove recessed toward the bottom of the vessel body.

6. 5. The heat treatment vessel according to claim 4, wherein the communication passage guides the gas flowing through the communication passage in a direction non-parallel to an imaginary line connecting the gas inlet and the gas outlet.

7. The heat treatment vessel according to claim 6 , wherein the communication passage guides the gas flowing through the communication passage in a direction oblique to the imaginary line so that the gas flowing through the communication passage approaches the imaginary line.

8. The heat treatment vessel according to claim 6 , wherein the communication passage guides the gas flowing through the communication passage in a direction perpendicular to the imaginary line so that the gas flows in a direction approaching the imaginary line.

9. the communication passage includes a first communication passage and a second communication passage, the first communication passage and the second communication passage are located on opposite sides of an imaginary line connecting the gas inlet and the gas exhaust port, the first communication passage guides the gas flowing through the first communication passage in a direction approaching the imaginary line, The heat treatment vessel according to claim 4 , wherein the second communication passage guides the gas flowing through the second communication passage in a direction approaching the imaginary line.

10. the first communication passage guides the gas flowing through the first communication passage in a direction perpendicular to the imaginary line, the second communication passage guides the gas flowing through the second communication passage in a direction perpendicular to the imaginary line, The heat treatment vessel according to claim 9 , wherein the first communication passage and the second communication passage are disposed symmetrically with respect to the imaginary line.

11. The partition wall is composed of a plurality of partition walls, The partition walls are spaced apart along the inner wall, 3. The heat treatment vessel according to claim 1, wherein a communication passage for introducing gas from the gas flow passage to the workpiece placement area is formed between adjacent partition walls.

12. the container body has a protrusion that protrudes from the inner wall toward the inside of the container body, 3. The heat treatment vessel according to claim 1, wherein an outer flow passage is formed between the end of the partition wall in the extending direction and the protruding portion, for guiding gas from the gas flow passage to the workpiece placement area.

13. a container body having a workpiece placement area for placing a workpiece and an inner wall surrounding the workpiece placement area; a gas inlet port provided on the inner wall; a gas exhaust port provided on the inner wall at a position different from the gas inlet port; a pipe that protrudes from the gas inlet into the container body and extends along the inner wall, A heat treatment vessel in which a gas flow path is formed along the inner wall inside the pipe body to guide gas supplied to the pipe body to the workpiece placement area.

14. the pipe body includes a main body portion extending along the inner wall and having the gas flow path, and a branch portion continuous with the main body portion, The heat treatment vessel according to claim 13 , wherein the branching portion has a communication passage that guides gas from the gas flow path to the workpiece placement area.

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