Tracked carriage system

Abstract

To provide a tracked carriage system which is capable of performing change in a travel direction of a tracked carriage smoothly.SOLUTION: A tracked carriage system 1 comprises a track part 2 that forms a plurality of routes 5 intersecting via an intersection part 5x and a ceiling travel vehicle 10 that is capable of traveling along the plurality of routes 5 and that selects a travel direction at the intersection part 5X when traveling. The track part 2 includes magnetic plates 24 which is disposed along the plurality of routes 5. The ceiling travel vehicle 10 includes linear motors 31 which generate magnetic force for traveling or stopping between the magnetic plates 24 and wheel parts 32 which contain a support wheel 33 and are capable of changing a rolling motion direction of the support wheel 33 to a travel direction which is selected at the intersection part 5x.SELECTED DRAWING: Figure 7

Description

[Technical Field]

[0001] One aspect of the present invention relates to a rail-guided vehicle system. [Background technology]

[0002] A known track-guided vehicle system includes a track section that forms multiple routes that intersect at intersections, and track-guided vehicles that can travel along the multiple routes, and the track-guided vehicles select a travel direction at the intersections and travel (see, for example, Patent Document 1). In such a track-guided vehicle system, the track-guided vehicles travel along the routes by rotating the travel wheels with a travel drive motor. Furthermore, the track-guided vehicles change their travel direction at the intersections by turning the multiple travel wheels. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] International Publication No. 2018 / 037762 Summary of the Invention [Problem to be solved by the invention]

[0004] In the above-mentioned rail-guided vehicle system, as mentioned above, the traveling direction of the rail-guided vehicle is changed by precisely turning each drive wheel in a predetermined direction, and this change may take time.

[0005] Therefore, an object of one aspect of the present invention is to provide a rail-guided vehicle system that allows the traveling direction of the rail-guided vehicle to be changed smoothly. [Means for solving the problem]

[0006] (1) A rail-guided vehicle system according to one aspect of the present invention comprises a track section that forms multiple routes that intersect via intersections, and a rail-guided vehicle that can run along the multiple routes, and the rail-guided vehicle selects its running direction at the intersection and runs in that direction. The track section has magnets arranged along the multiple routes, and the rail-guided vehicle has a linear motor that generates magnetic force between the magnets and the linear motor for running or stopping, and a wheel section that includes support wheels and can change the rolling direction of the support wheels to the running direction selected at the intersection.

[0007] In this rail-guided vehicle system, when the traveling direction of the rail-guided vehicle needs to be changed, the magnetic force generated between the linear motor and the magnet at the intersection causes the rail-guided vehicle to travel in the selected traveling direction. At this time, the support wheels of the wheel unit change their rolling direction depending on the selected traveling direction. This eliminates the need to precisely rotate the drive wheels in a predetermined direction to change the traveling direction of the rail-guided vehicle, making it possible to smoothly change the traveling direction of the rail-guided vehicle.

[0008] (2) In the rail-guided vehicle system described in (1) above, the wheel unit may be configured with omnidirectional wheels. In this case, the wheel unit can be easily configured using the omnidirectional wheels.

[0009] (3) In the rail-guided vehicle system described in (1) above, the wheel unit may include a steering motor that changes the rolling direction of the support wheels to a selected traveling direction at an intersection. In this case, the wheel unit can be easily configured using the steering motor.

[0010] (4) In the rail-guided vehicle system described in any one of (1) to (3) above, at least some of the multiple routes may intersect with each other via intersections so as to extend in a lattice pattern. In this case, the rail-guided vehicle can travel along a variety of travel routes.

[0011] (5) In the rail guided vehicle system described in any one of (1) to (4) above, the rail guided vehicle may be an overhead traveling vehicle having a traveling section including a linear motor and a wheel section, and a main body section disposed below the rail section and suspended from the traveling section. In this case, the rail guided vehicle system can be configured by employing an overhead traveling vehicle as the rail guided vehicle.

[0012] (6) In the rail-guided vehicle system described in (5) above, the track unit has a running plate unit including a running surface on its upper surface that the support wheels can contact, a top plate unit that is disposed above the running plate unit and suspended from the ceiling, and pillar units that connect the running plate unit and the top plate unit, and magnets may be disposed on the underside of the top plate unit along multiple paths, and the running plate unit may have openings through which connecting units that connect the running unit and the main unit are inserted that extend along the multiple paths. This allows the track unit to be specifically configured when an overhead traveling vehicle is used for the rail-guided vehicle.

[0013] (7) In the track guided vehicle system described in any one of (1) to (6) above, the track guided vehicle has a first roller capable of contacting the track section in a first horizontal direction and a second roller capable of contacting the track section in a second horizontal direction intersecting the first horizontal direction, and the first roller and the second roller may be raised and lowered so that, when the track guided vehicle changes its traveling direction at an intersection, either the first roller or the second roller, depending on the traveling direction, comes into contact with the track section. In this case, when the track guided vehicle changes its traveling direction at an intersection, either the first roller or the second roller can be brought into contact with the track section to guide the travel of the track guided vehicle.

[0014] (8) In the rail guided vehicle system described in any one of (1) to (7) above, the rail guided vehicle may have electromagnets that correct the orientation of the rail guided vehicle, and the electromagnets may be arranged in positions that sandwich magnets arranged along the path of the track section in a horizontal direction perpendicular to the extension direction of the path. In this case, the orientation of the rail guided vehicle can be stabilized by the electromagnets.

[0015] (9) In the rail guided vehicle system described in (1) above, the wheel unit may be configured with free casters. In this case, the wheel unit can be easily configured by using the free casters.

[0016] (10) In the rail-guided vehicle system described in (9) above, the track section may have a running plate section including a running surface on its upper surface that can be contacted by the ball sections serving as support wheels of the free casters, and a recess may be formed on the running surface at a position corresponding to the ball section of the rail-guided vehicle positioned at the intersection, into which a portion of the ball section fits. This allows the recess formed in the running surface to stabilize the orientation of the rail-guided vehicle when it is positioned at the intersection.

[0017] (11) In the track guided vehicle system described in any one of (1) to (10) above, the track guided vehicle may have high-speed wheels that can rotate at a higher speed than the support wheels, and the track section may have running board sections that include a running surface on an upper surface with which the support wheels can come into contact, and high-speed rails that are provided along part of the multiple routes and include a high-speed running surface on an upper surface with which the high-speed wheels can come into contact when the support wheels are not in contact with the running surface. In this case, the high-speed wheels and high-speed rails can be used to run the track guided vehicle at high speed. [Effects of the Invention]

[0018] According to the present invention, it is possible to provide a rail-guided vehicle system that allows the traveling direction of the rail-guided vehicle to be changed smoothly. [Brief explanation of the drawings]

[0019] [Figure 1] FIG. 1 is a perspective view showing an example of a rail guided vehicle system according to an embodiment. [Figure 2] FIG. 2 is a plan view showing the track portion of FIG. [Figure 3] FIG. 3 is a perspective view showing the track unit of FIG. [Figure 4] 4 is another perspective view showing the track unit of FIG. 1. FIG. [Figure 5] FIG. 5 is a perspective view showing the high-speed track unit of FIG. [Figure 6] FIG. 6 is a perspective view showing the high-speed rail of FIG. [Figure 7] 7 is a side view showing the running portion of FIG. 1. FIG. [Figure 8] FIG. 8 is a perspective view showing the running portion of FIG. [Figure 9] FIG. 9 is a side view showing the wheel unit of FIG. [Figure 10] FIG. 10 is a side view showing the overhead traveling vehicle of FIG. [Figure 11] FIG. 11 is a perspective view showing the first roller and the second roller of FIG. [Figure 12] FIG. 12 is a side view showing a running section according to the first modified example. [Figure 13] FIG. 13 is a perspective view showing a running section according to a second modified example. [Figure 14] FIG. 14 is a side view showing a running section according to the third modified example. [Figure 15] 15 is a perspective view showing the running portion of FIG. 14. FIG. [Figure 16] FIG. 16 is an enlarged view of the area enclosed by the frame in FIG. [Figure 17] FIG. 17 is a perspective view showing a running section according to the fourth modified example. [Figure 18] FIG. 18 is a side view showing the half unit. DETAILED DESCRIPTION OF THE INVENTION

[0020] Hereinafter, embodiments will be described with reference to the drawings. In the following description, the same elements will be given the same reference numerals, and duplicated explanations will be omitted. In the following description, one direction along a horizontal plane will be referred to as the X direction, a direction perpendicular to the X direction and along the horizontal plane will be referred to as the Y direction, and a vertical direction will be referred to as the Z direction. For the sake of convenience, the scale of each component will be appropriately changed in the drawings.

[0021] [composition] As shown in Fig. 1, a rail-guided vehicle system 1 according to an embodiment is a grid system for transporting an article M by an overhead traveling vehicle 10, for example, in a clean room of a semiconductor manufacturing factory. The rail-guided vehicle system 1 includes a track section 2, a plurality of overhead traveling vehicles 10, and a controller 3. The article M is, for example, a FOUP (Front Opening Unified Pod) that stores semiconductor wafers, or a reticle pod that stores reticles.

[0022] The track section 2 is provided on or near the ceiling of a building such as a clean room. The track section 2 is provided adjacent to, for example, a processing device, a stocker (automated warehouse), etc. The processing device is, for example, an exposure device, a coater developer, a film forming device, an etching device, etc., and performs various processes on the semiconductor wafers in the article M transported by the overhead traveling vehicle 10. The stocker stores the article M transported by the overhead traveling vehicle 10.

[0023] As shown in Figures 1 and 2, the track section 2 forms multiple routes 5 that intersect at intersections 5X. The routes 5 are paths along which the overhead traveling vehicles 10 travel. The intersections 5X are locations where the multiple routes 5 intersect. The multiple routes 5 intersect at the intersections 5X so as to extend in a grid pattern. That is, in the track section 2, routes 5a extending linearly in the X direction are aligned at predetermined intervals in the Y direction, and routes 5b extending linearly in the Y direction are aligned at predetermined intervals in the X direction, with the routes 5a and 5b intersecting at right angles at the intersections 5X. The track section 2 is configured so as to be divisible by multiple track units 20. The track section 2 is constructed by arranging the track units 20 side by side in the X direction and the Y direction.

[0024] Adjacent track units 20 are connected to one another by connecting portions (not shown). The track units 20 are suspended from a ceiling or the like (not shown) by a plurality of suspension members H (see FIG. 1). The track units 20 are provided in a rectangular (here, square) shape in plan view. An intersection 5X is formed in the center of each track unit 20, and one path 5a and one path 5b intersect via this intersection 5X.

[0025] As shown in Figures 3 and 4, the track unit 20 includes a running plate section 21 having a running surface 21a on its upper surface, a top plate section 22 suspended from the ceiling, and pillar sections 23 connecting the running plate section 21 and the top plate section 22. The running plate section 21 is formed in a rectangular plate shape with its thickness direction in the Z direction. The running surface 21a is a flat surface along the XY plane with which the support wheels 33 (described later) of the overhead traveling vehicle 10 can come into contact (ground contact). The top plate section 22 is formed in a rectangular plate shape with its thickness direction in the Z direction. The top plate section 22 is disposed above the running plate section 21 at a predetermined distance corresponding to the height of the running section 30 (described later). The pillar sections 23 are formed in a columnar shape extending in the Z direction. The pillar sections 23 are erected at the four corners of the running plate section 21.

[0026] Magnetic plates 24 are arranged on the underside of the top plate portion 22 along the multiple paths 5. The magnetic plates 24 constitute magnets. The magnetic plates 24 are driving stators, and are arranged so that a pair of magnetic poles consisting of an N pole and an S pole extends along the paths 5. Specifically, the magnetic plates 24 include a magnetic plate 24x extending in the X direction at the center position in the Y direction on the underside of the top plate portion 22, and a magnetic plate 24y extending in the Y direction at the center position in the X direction. In the illustrated example, the magnetic plates 24 are not provided in the center portion corresponding to the intersections 5X.

[0027] The running plate portion 21 is formed with openings 25, through which connecting portions 41 (described later) of the overhead traveling vehicle 10 are inserted, extending along the multiple paths 5. The openings 25 include an opening 25x extending in the X direction at the center of the running plate portion 21 in the Y direction, and an opening 25y extending in the Y direction at the center of the running plate portion 21 in the X direction. The opening 25x is a wide slit formed along the X direction directly below the magnetic plate 24x on the running plate portion 21. The opening 25y is a wide slit formed along the Y direction directly below the magnetic plate 24y. The opening widths of the openings 25x and 25y are wide enough to allow the connecting portions 41 to pass through.

[0028] As shown in Figures 1, 5, and 6, the multiple track units 20 include a high-speed track unit 20S. The high-speed track unit 20S differs from the above-mentioned track unit 20 in that it further includes a high-speed rail 26. The high-speed rail 26 is a rail that enables high-speed travel of the overhead traveling vehicle 10. The high-speed rail 26 is provided along a portion of the multiple paths 5. The high-speed rail 26 is disposed between the traveling plate portion 21 and the top plate portion 22 and extends in the horizontal direction (the Y direction in the illustrated example). A pair of high-speed rails 26 are provided so as to be parallel to each other. The high-speed rail 26 is provided so as to span a pair of pillar portions 23. The high-speed rail 26 is supported on the traveling plate portion 21 by a support plate 27.

[0029] The high-speed rail 26 includes a high-speed running surface 26a on its upper surface. The high-speed running surface 26a is a surface that can be contacted by high-speed wheels 36 (described later) when support wheels 33 (described later) of the overhead traveling vehicle 10 are not in contact with the running surface 21a. One end and the other end of the high-speed running surface 26a include inclined surfaces 26T. The inclined surface 26T at one end of the high-speed running surface 26a is a surface that rises from one end to the other end, and the inclined surface 26T at the other end of the high-speed running surface 26a is a surface that rises from the other end to the one end. The high-speed running surface 26a other than the inclined surface 26T is a flat surface that follows the XY plane.

[0030] The high-speed rails 26 and support plate 27 can be detachably attached from below through the openings 25 of the traveling plate portion 21. In the illustrated example, the high-speed rails 26 extend in the Y direction, which allows the overhead traveling vehicle 10 to travel at high speed in the Y direction, but this is not limited to this. The high-speed rails 26 may also extend in the X direction, which allows the overhead traveling vehicle 10 to travel at high speed in the X direction.

[0031] As shown in FIGS. 1 and 2, adjacent track units 20 are arranged so that the running surfaces 21a of each running plate portion 21 are positioned on the same plane. Furthermore, track units 20 adjacent in the X direction are arranged so that the magnetic plates 24x of each top plate portion 22 are adjacent in the X direction and the openings 25x of each running plate portion 21 are adjacent in the X direction. Track units 20 adjacent in the Y direction are arranged so that the magnetic plates 24y of each top plate portion 22 are adjacent in the Y direction and the openings 25y of each running plate portion 21 are adjacent in the Y direction. Adjacent high-speed track units 20S are arranged so that the high-speed running surfaces 26a of the high-speed rails 26 are adjacent. In the rail-guided vehicle system 1, the track units 20 can be arranged in any desired order, allowing the layout of the grid-like route 5 to be adjusted or changed as needed.

[0032] As shown in Figures 1, 2, 7, and 8, the overhead traveling vehicle 10 is a rail-guided vehicle that can travel along multiple routes 5. The overhead traveling vehicle 10 travels along multiple routes 5 and transports articles M. The overhead traveling vehicle 10 can travel in a selected traveling direction at an intersection 5X between the X direction (direction along route 5a) and the Y direction (direction along route 5b). The overhead traveling vehicle 10 may also be referred to as a carriage, a transport vehicle, a transport carriage, a traveling carriage, or the like. Multiple overhead traveling vehicles 10 enable high-density transportation of articles M, improving the efficiency of transporting articles M. Note that the rail-guided vehicle system 1 may be equipped with only one overhead traveling vehicle 10.

[0033] The overhead traveling vehicle 10 has a traveling section 30 that travels on a traveling surface 21a along a route 5, and a main body section 50 that is disposed below the track section 2 and suspended from the traveling section 30. The traveling section 30 includes a main body frame 30F, a linear motor 31, and a wheel section 32. The main body frame 30F is a frame that has a rectangular outer shape in a plan view, and various parts are attached to it.

[0034] The linear motor 31 constitutes a drive source for driving the overhead traveling vehicle 10. The linear motor 31 is, for example, an LDM (Linear DC Motor). The linear motors 31 are arranged on the main body frame 30F at a pair of positions facing each other in the X direction with a center portion sandwiched therebetween, and at a pair of positions facing each other in the Y direction with a center portion sandwiched therebetween. The linear motors 31 are located directly below the magnetic plate 24 of the track section 2. The linear motors 31 generate magnetic forces between themselves and the magnetic plate 24 of the track section 2 for traveling or stopping. Specifically, the linear motors 31 are controlled by a bogie controller to generate magnetic forces so that the overhead traveling vehicle 10 travels in a traveling direction selected at the intersection 5X, or generate magnetic forces so that the overhead traveling vehicle 10 stops at a stopping position such as the intersection 5X of the route 5.

[0035] The wheel unit 32 includes support wheels 33 as driven wheels, and is configured so that the rolling direction of the support wheels 33 can be changed to match the running direction selected at the intersection 5X. As shown in FIG. 9 , in this embodiment, the wheel unit 32 is configured as an omnidirectional wheel. The support wheels 33 roll in contact with the running surface 21a. The support wheels 33 include a plurality of barrel-shaped free rollers 33x and a wheel main body 33y that rotatably supports the plurality of free rollers 33x and is also rotatable itself. The wheel main body 33y rotates around an axis G along the X direction when traveling in the Y direction. The free rollers 33x rotate around an axis perpendicular to the axis G when traveling in the X direction. Four wheel units 32 are arranged spaced apart from each other on the main body frame 30F. In the illustrated example, the wheel units 32 are arranged at each of the four corners of the main body frame 30F.

[0036] As shown in FIGS. 7 and 8, the traveling unit 30 further includes auxiliary wheels 35, high-speed wheels 36, guide rollers 37, and correction electromagnets 38. The auxiliary wheels 35 are driven wheels that roll in contact with the traveling surface 21a when the wheel unit 32 passes over (passes through) the opening 25. The auxiliary wheels 35 rotate around an axis along the horizontal direction. The lower ends of the auxiliary wheels 35 may be set higher than the lower ends of the wheel unit 32. In other words, when the support wheels 33 of the wheel unit 32 are rolling in contact with the traveling surface 21a, the auxiliary wheels 35 do not need to roll away from the traveling surface 21a (do not need to come into contact with the traveling surface 21a). A plurality of auxiliary wheels 35 are provided on the lower outer edge of the main frame 30F. In the illustrated example, the auxiliary wheels 35 are provided in pairs (eight in total) at a predetermined distance below each of the wheel sections 32 adjacent in the X direction and each of the wheel sections 32 adjacent in the Y direction.

[0037] The high-speed wheels 36 are wheels that can rotate at a higher speed than the support wheels 33 of the wheel unit 32. The high-speed wheels 36 are driven wheels that roll in contact with the high-speed running surface 26a when the support wheels 33 are not in contact with the running surface 21a. The high-speed wheels 36 rotate around axes along the horizontal direction. A plurality of high-speed wheels 36 are provided on the upper part of the outer edge of the main body frame 30F. In the example shown, the high-speed wheels 36 are provided on the main body frame 30F at positions adjacent to the outer sides of each wheel unit 32 in the X direction and at positions adjacent to the outer sides in the Y direction. The guide rollers 37 are rollers that guide the running of the overhead traveling vehicle 10. The guide rollers 37 rotate around axes along the Z direction. The guide rollers 37 are arranged at the four corners of the main body frame 30F.

[0038] The correcting electromagnets 38 are electromagnets that correct the orientation of the overhead traveling vehicle 10. The correcting electromagnets 38 are arranged on the main frame 30F close to one side and the other side in the Y direction of each of a pair of linear motors 31 that face each other in the X direction. The correcting electromagnets 38 are also arranged on the main frame 30F close to one side and the other side in the X direction of each of a pair of linear motors 31 that face each other in the Y direction. As a result, the correcting electromagnets 38 are arranged in positions that sandwich the magnetic plate 24 arranged along the path 5 in a horizontal direction perpendicular to the extension direction of the path 5. The correcting electromagnets 38 are controlled by the bogie controller, and when the overhead traveling vehicle 10 is positioned on the intersection 5X (when the center position of the overhead traveling vehicle 10 and the intersection 5X coincide), they generate a magnetic force of the same magnetic polarity as the magnetic polarity of the magnetic plate 24, causing the correcting electromagnets 38 to repel the magnetic plate 24, thereby stabilizing the orientation of the overhead traveling vehicle 10.

[0039] As shown in Figures 1 and 10, the main body 50 is attached to the lower part of the running part 30 via a connecting part 41. The connecting part 41 is a columnar member extending along the Z direction. The connecting part 41 may have a grid-like structure. The main body 50 has a frame 12. The frame 12 includes a cylindrical frame 12b and has a shape that is open at the bottom. The main body 50 is formed with dimensions that fit into one square on the path 5 in a plan view (see Figure 2). An overhead traveling vehicle 10 can pass other overhead traveling vehicles 10 traveling on adjacent paths 5. The main body 50 is rotatable around a rotation axis in the Z direction relative to the running part 30. The main body 50 includes a transfer device 18 arranged inside the frame 12. The transfer device 18 is, for example, rectangular in a plan view. The cylindrical frame 12b is open at a portion in the circumferential direction. When moving horizontally, the transfer device 18 passes through the opening in the cylindrical frame 12b.

[0040] The transfer device 18 moves horizontally relative to the main body 50 to transfer an article M between the load port (mounting table). The transfer device 18 is provided below the top plate of the frame 12. The main body 50, including the transfer device 18, can rotate about a rotation axis extending in the Z direction by a rotation drive unit such as an electric motor (not shown). The transfer device 18 includes an article holding unit 13 that holds the article M below the track 2, an elevation drive unit 14 that raises and lowers the article holding unit 13 in the vertical direction, and a slide mechanism 11 that slides the elevation drive unit 14 in the horizontal direction. The slide mechanism 11 is supported on the underside of the cylindrical frame 12b. A rotation drive unit 16 is provided between the slide mechanism 11 and the elevation drive unit 14 to rotate the elevation drive unit 14 relative to the slide mechanism 11 about a rotation axis extending in the Z direction. The rotation drive unit 16 is provided below the slide mechanism 11. The lifting drive unit 14 is provided below the rotation drive unit 16. The article holder 13 is provided below the lifting drive unit 14 via a plurality of hanging members 13b. The load port is the transfer destination or source of the overhead traveling vehicle 10, and is the point where the article M is handed over to or from the overhead traveling vehicle 10.

[0041] The article holding unit 13 holds the article M by suspending it by gripping the flange portion Ma of the article M. The article holding unit 13 is, for example, a chuck having claw portions 13a that are movable horizontally. The article holding unit 13 holds the article M by inserting the claw portions 13a below the flange portion Ma of the article M and raising the article holding unit 13. The article holding unit 13 is connected to a hanging member 13b such as a wire or a belt.

[0042] Lifting drive unit 14 is, for example, a hoist, which lowers article holding unit 13 by letting out hanging member 13b and raises article holding unit 13 by reeling in hanging member 13b. Lifting drive unit 14 is controlled by a cart controller and lowers or raises article holding unit 13 at a predetermined speed. Lifting drive unit 14 is also controlled by the cart controller and maintains article holding unit 13 at a target height.

[0043] The slide mechanism 11 has multiple movable plates stacked in the Z direction, for example. By rotating the main body 50, the slide mechanism 11 moves the rotation drive unit 16, the lift drive unit 14, and the article holder 13 attached to the lowest movable plate in any direction in a horizontal plane. The direction of movement of the movable plates in the slide mechanism 11 is determined by the rotation angle of the main body 50 relative to the running unit 30. In the main body 50, the orientation of the transfer device 18 and the frame 12 is set so that the direction of movement of the movable plates coincides with the position of the opening of the frame 12.

[0044] The rotation drive unit 16 includes, for example, an electric motor, and rotates the lift drive unit 14 (and the article holder 13) within a predetermined angular range around a rotation axis extending in the Z direction. The rotation drive unit 16 can orient the laterally protruding article holder 13 (or the article M held by the article holder 13) in a desired direction. The slide mechanism 11 and the rotation drive unit 16 are controlled by a cart controller. Note that even when the movable plate of the slide mechanism 11 is stored without moving (the state shown by the solid line in Figure 10), the lift drive unit 14 can be rotated by the rotation drive unit 16. In this case, for example, the rotation axis of the lift drive unit 14 coincides with the rotation axis of the main body unit 50.

[0045] A cover (not shown) may be attached to the outer surface of the cylindrical frame 12b. In this case, the cover surrounds the transfer device 18 and the article M held by the transfer device 18. The cover is cylindrical with an open bottom end, and has a cutout at the portion where the movable plate of the slide mechanism 11 protrudes (the above-mentioned open portion).

[0046] Returning to FIG. 1, the controller 3 is a computer including a CPU (Central Processing Unit), ROM (Read Only Memory), RAM (Random Access Memory), etc. The controller 3 can be configured as software in which a program stored in the ROM is loaded onto the RAM and executed by the CPU, for example. The controller 3 may also be configured as hardware including electronic circuits, etc. The controller 3 may be configured as a single device or multiple devices. When configured as multiple devices, these devices are connected via a communication network such as the Internet or an intranet to logically constitute a single controller 3.

[0047] The controller 3 controls the multiple overhead traveling vehicles 10. The controller 3 selects one of the multiple overhead traveling vehicles 10 capable of transporting the article M, and assigns a transport command to the selected overhead traveling vehicle 10. The transport command includes a travel command to cause the overhead traveling vehicle 10 to travel to the load port, and a command to grab the article M placed at the load port or a command to unload the held article M to the load port.

[0048] As shown in FIGS. 7 and 11, the overhead traveling vehicle 10 has a plurality of first rollers 51 and a plurality of second rollers 52. The first rollers 51 and the second rollers 52 rotate around an axis along the Z axis. The first rollers 51 and the second rollers 52 are supported by support members 55 that are provided in a grid pattern around the connecting portion 41 so that they can be raised and lowered. The first rollers 51 are rollers that can come into contact with the inner surface of the opening 25 of the running plate portion 21 in the track portion 2 in the X direction (first horizontal direction). The second rollers 52 are rollers that can come into contact with the inner surface of the opening 25 of the running plate portion 21 in the track portion 2 in the Y direction (second horizontal direction).

[0049] When the overhead traveling vehicle 10 changes its traveling direction at the intersection 5X, the first roller 51 and the second roller 52 move up and down so that one of the first roller 51 and the second roller 52, depending on the traveling direction, comes into contact with the inner surface of the opening 25. In the example shown, when the overhead traveling vehicle 10 travels in the Y direction at the intersection 5X, the first roller 51 moves up (the second roller 52 moves down), and the first roller 51 moves into contact with the inner surface of the opening 25 and rolls. On the other hand, when the overhead traveling vehicle 10 travels in the X direction at the intersection 5X, the second roller 52 moves up (the first roller 51 moves down), and the second roller 52 moves into contact with the inner surface of the opening 25 and rolls. The mechanism for moving the first roller 51 and the second roller 52 up and down is not particularly limited, and various known mechanisms may be used.

[0050] [Example of operation] In the rail-guided vehicle system 1 configured as described above, when the overhead traveling vehicle 10 travels straight along the path 5a (or path 5b) without changing its traveling direction at the intersection 5X, it uses the magnetic force generated between the linear motor 31 and the magnetic plate 24 as a propulsion force to proceed in the X direction (or Y direction) without stopping at the intersection 5X. At that time, the free rollers 33x (or wheel main body 33y) of the wheel unit 32 come into contact with and roll on the running surface 21a. Furthermore, when the wheel unit 32 passes over the opening 25y (or opening 25x), the auxiliary wheels 35 come into contact with and roll on the running surface 21a instead of the free rollers 33x (or wheel main body 33y), thereby preventing the running unit 30 from sagging.

[0051] In the rail-guided vehicle system 1, when the overhead traveling vehicle 10 changes its traveling direction from the path 5a (or path 5b) to the path 5b (or path 5a) at the intersection 5X and travels, it first uses the magnetic force generated between the linear motor 31 and the magnetic plate 24 as a propulsion force to travel in the X direction (Y direction) to the intersection 5X and stops (standby). At that time, the free rollers 33x (or wheel main body 33y) of the wheel unit 32 come into contact with the traveling surface 21a and roll. When the overhead traveling vehicle 10 is stopped, the correcting electromagnet 38 generates a magnetic force of the same magnetic polarity as that of the magnetic plate 24, causing the correcting electromagnet 38 to repel the magnetic plate 24, stabilizing the orientation of the overhead traveling vehicle 10.

[0052] Then, the overhead traveling vehicle 10 advances in the Y direction (or X direction), which is the changed traveling direction, using the magnetic force generated between the linear motor 31 and the magnetic plate 24 as a propulsion force. At this time, the wheel main body 33y (or free roller 33x) of the wheel unit 32 comes into contact with the traveling surface 21a and rolls. Also, the first roller 51 (or the second roller 52) rises, and the first roller 51 (or the second roller 52) comes into contact with the inner surface of the opening 25 and rolls, thereby guiding the traveling of the overhead traveling vehicle 10.

[0053] In the rail guided vehicle system 1, when the overhead traveling vehicle 10 travels at high speed along the route 5, the high speed wheels 36 come into contact with the high speed running surface 26a of the high speed rail 26 of the high speed track unit 20S. Then, the overhead traveling vehicle 10 generates a strong magnetic force between itself and the magnetic plate 24 by the linear motor 31, and uses this magnetic force as a propulsion force to travel at high speed along the high speed rail 26. At this time, the high speed wheels 36 come into contact with and roll on the high speed running surface 26a, while the support wheels 33 of the wheel section 32 do not come into contact with the running surface 21a.

[0054] [Effect] As described above, in the rail-guided vehicle system 1, when the traveling direction of the overhead traveling vehicle 10 is changed, the magnetic force generated between the linear motor 31 and the magnetic plate 24 at the intersection 5X causes the overhead traveling vehicle 10 to travel in the selected traveling direction. At this time, in the wheel unit 32, either the free roller 33x or the wheel main body 33y rolls depending on the selected traveling direction; that is, the support wheel 33 changes its rolling direction depending on the selected traveling direction. Therefore, for example, there is no need to turn the drive wheel to change the traveling direction of the overhead traveling vehicle 10, and the traveling direction can be switched quickly, making it possible to smoothly change the traveling direction of the overhead traveling vehicle 10.

[0055] In the rail guided vehicle system 1, the wheel unit 32 is configured by an omnidirectional wheel. In this case, the wheel unit 32 can be easily configured by using the omnidirectional wheel.

[0056] In the rail guided vehicle system 1, at least some of the multiple routes 5 intersect via intersections 5X so as to extend in a grid pattern. In this case, the overhead traveling vehicle 10 can travel along a variety of travel routes.

[0057] In the rail guided vehicle system 1, the overhead traveling vehicle 10 has a traveling section 30 including a linear motor 31 and a wheel section 32, and a main body section 50 that is disposed below the track section 2 and suspended from the traveling section 30. In this case, the rail guided vehicle system 1 can be configured by employing the overhead traveling vehicle 10 as the rail guided vehicle.

[0058] In the rail-guided vehicle system 1, the track section 2 has a running plate section 21, a top plate section 22, and pillar sections 23. A magnetic plate 24 is disposed on the underside of the top plate section 22, and openings 25 are formed in the running plate section 21 so as to extend along the multiple paths 5. This allows the track section 2 to be specifically configured when an overhead traveling vehicle 10 is employed as the rail-guided vehicle.

[0059] In the rail-guided vehicle system 1, the overhead traveling vehicle 10 has a first roller 51 and a second roller 52. When the overhead traveling vehicle 10 changes its traveling direction at the intersection 5X, one of the first roller 51 and the second roller 52, depending on the traveling direction, rises and falls to come into contact with the track section 2. In this case, when the overhead traveling vehicle 10 changes its traveling direction at the intersection 5X, one of the first roller 51 and the second roller 52 can be brought into contact with the track section 2 to guide the traveling of the overhead traveling vehicle 10.

[0060] In the rail guided vehicle system 1, the overhead traveling vehicle 10 has a correction electromagnet 38, and the correction electromagnet 38 is disposed at a position sandwiching the magnetic plate 24 in the X direction or the Y direction. In this case, the correction electromagnet 38 and the magnetic plate 24 are made to repel each other, thereby stabilizing the orientation of the overhead traveling vehicle 10.

[0061] In the track guided vehicle system 1, the overhead traveling vehicle 10 has high-speed wheels 36 that can rotate at a higher speed than the support wheels 33. The high-speed track units 20S of the track section 2 have high-speed rails 26 that include high-speed running surfaces 26a on their upper surfaces with which the high-speed wheels 36 can come into contact. In this case, the high-speed wheels 36 and the high-speed rails 26 can be used to make the overhead traveling vehicle 10 travel at high speeds. Furthermore, since the high-speed running surfaces 26a include inclined surfaces 26T at one end and the other end, the high-speed wheels 36 can easily come into contact with the high-speed running surfaces 26a (making it easier to ride up the high-speed rails 26).

[0062] [Variations] The following describes modifications, focusing on differences from the above embodiment.

[0063] Fig. 12 is a side view showing a running section 130 according to the first modified example. As shown in Fig. 12, the running section 130 according to the first modified example differs from the running section 30 (see Fig. 7) in that one auxiliary wheel 35 (four in total) is provided between adjacent wheel sections 32. In a rail guided vehicle system 1 equipped with such a running section 130, it is also possible to smoothly change the running direction of the overhead traveling vehicle 10.

[0064] FIG. 13 is a perspective view showing a traveling section 230 according to a second modified example. As shown in FIG. 13, the traveling section 230 according to the second modified example differs from the traveling section 30 (see FIG. 8) in that the traveling section 230 does not include the auxiliary wheels 35 and the correcting electromagnets 38, and eight wheel units 32 are arranged spaced apart from one another on the main body frame 30F. The wheel units 32 are provided in pairs at one end and the other end of the main body frame 30F in the Y direction, spaced apart in the X direction. Furthermore, the wheel units 32 are provided in pairs at one end and the other end of the main body frame 30F in the X direction, spaced apart in the Y direction. In a rail-guided vehicle system 1 equipped with such a traveling section 230, the traveling direction of the overhead traveling vehicle 10 can also be changed smoothly.

[0065] Fig. 14 is a side view showing a running unit 330 according to a third modified example. Fig. 15 is a perspective view showing the running unit 330 of Fig. 14. Fig. 16 is an enlarged view of the area within the frame line W of Fig. 14. As shown in Figs. 14, 15, and 16, the running unit 330 according to the third modified example differs from the running unit 30 (see Fig. 8) in that it does not include the auxiliary wheels 35 and the correcting electromagnets 38, and includes wheel units 332 instead of the wheel units 32.

[0066] The wheel unit 332 is configured by a free caster and includes a ball unit 333 as a support wheel that is a driven wheel. The ball unit 333 is spherical and supported so as to be rotatable in all directions. The ball unit 333 rolls in contact with the running surface 21a. Eight wheel units 332 are arranged spaced apart from one another on the outer edge of the main body frame 30F. In the example shown, a pair of wheel units 332 are arranged spaced apart in the Y direction at each of one end and the other end of the main body frame 30F in the X direction, and a pair of wheel units 332 are arranged spaced apart in the X direction at each of one end and the other end of the Y direction.

[0067] A recess H1 into which a lower portion (part) of the ball portion 333 fits is formed on the running surface 21a at a position corresponding to the ball portion 333 of the overhead traveling vehicle 10 positioned at the intersection 5X. The recess H1 is a circular recess having a diameter smaller than the diameter of the ball portion 333 in a plan view. Here, the recess H1 is a very small countersink. A plurality of recesses H1 (eight in this case) are provided on the running surface 21a corresponding to the ball portion 333. As a result, when the overhead traveling vehicle 10 is positioned at the intersection 5X, the lower portion of the ball portion 333 of the overhead traveling vehicle 10 fits into the recess H1, which is a recess formed in the running surface 21a.

[0068] Even in a rail-guided vehicle system 1 equipped with such a traveling section 330, it is possible to smoothly change the traveling direction of the overhead traveling vehicle 10. Furthermore, in the third modified example, the wheel section 332 is configured with a free caster. This allows the wheel section 332 to be easily configured using the free caster. In the third modified example, a recessed section H1 is formed in the running surface 21a. This allows the recessed section H1 to stabilize the orientation of the overhead traveling vehicle 10 when the overhead traveling vehicle 10 is located at the intersection 5X.

[0069] Fig. 17 is a perspective view showing a running unit 430 according to the fourth modification. As shown in Fig. 17, the running unit 430 according to the fourth modification differs from the running unit 30 (see Fig. 8) in that the running unit 430 does not include the auxiliary wheels 35, the high-speed wheels 36, the guide rollers 37, and the correcting electromagnets 38, and includes wheel units 432 instead of the wheel units 32.

[0070] The wheel unit 432 includes a support wheel 433 and a steering motor 434. The support wheel 433 is a driven wheel that rotates around an axis in a predetermined direction along the horizontal direction. The support wheel 433 rolls in contact with the running surface 21a. The steering motor 434 is controlled by, for example, a bogie controller, and horizontally turns the support wheel 433 in the running direction selected at the intersection 5X, thereby changing the rolling direction of the support wheel 433. Four wheel units 432 are arranged spaced apart from each other on the main body frame 30F. In the example shown, the wheel units 432 are arranged at the four corners of the main body frame 30F. The support wheel 433 and the steering motor 434 are not particularly limited, and various known configurations can be adopted.

[0071] In the rail guided vehicle system 1 equipped with such a traveling unit 430, it is also possible to smoothly change the traveling direction of the overhead traveling vehicle 10. Furthermore, in the fourth modified example, the wheel unit 432 includes a steering motor 434. In this case, the wheel unit 432 can be simply configured using the steering motor 434.

[0072] In the above embodiment and modified example, the traveling vehicle is an overhead traveling vehicle, but the traveling vehicle may be a rail-guided vehicle that travels on a track installed on the ground. In the above embodiment, a grid system is used as the rail-guided vehicle system 1, but the rail-guided vehicle system 1 is not limited to a grid system. For example, an AGV (Automated Guided Vehicle) or various known systems may be used as the overhead traveling vehicle system. In the above embodiment and modified example, the traveling surface 21a and the high-speed traveling surface 26a are horizontal surfaces, but the traveling surface 21a and the high-speed traveling surface 26a may be inclined surfaces that are inclined relative to a horizontal surface.

[0073] In the above embodiment and modified example, as shown in FIG. 18 , half units 521 may be provided between adjacent track units 20 on the track section 2. The half units 521 include plate-like members that can be connected to the running plate sections 21 of adjacent track units 20. The upper surfaces of the half units 521 form running surfaces 521a on which the wheel sections 32 contact and roll. The running surfaces 521a are provided so as to be flush with the running surfaces 21a of adjacent track units 20. By using such half units 521, the spacing between the multiple track units 20 can be adjusted as desired. This allows, for example, the spacing between the centers of the multiple track units 20 to be aligned with the spacing between the load ports (article mounting tables) of multiple processing equipment in a clean room in a plan view. As a result, the transport capacity can be increased.

[0074] In the above embodiment and modified example, the wheel units 32, 332, 432 may be rotationally driven. In this case, the driving force of the overhead traveling vehicle 10 is improved, and the acceleration of the overhead traveling vehicle 10 can be improved, shortening the required traveling time and increasing the transport capacity. Furthermore, when the traveling surface 21a and the high-speed traveling surface 26a are inclined upward, the upward gradient can be increased.

[0075] In the above embodiment and modified example, the layout of the high-speed rails 26 (high-speed track units 20S) is not particularly limited, and they may be arranged in appropriate positions, or there may be no high-speed rails 26. By arranging the high-speed rails 26 in desired positions, it is possible to form desired routes that allow high-speed travel on multiple routes 5.

[0076] The components in the above-described embodiments and modifications are not limited to the materials and shapes described above, and various materials and shapes can be applied. The components in the above-described embodiments and modifications can be applied as desired to the components in other embodiments and modifications. Some of the components in the above-described embodiments and modifications can be omitted as appropriate without departing from the spirit of one aspect of the present invention. [Explanation of symbols]

[0077] 1...railed vehicle system, 2...track section, 5, 5a, 5b...route, 5X...intersection, 10...ceiling travelling vehicle (railed vehicle) 24, 24x, 24y magnetic plate (magnet), 21...travelling plate section, 21a, 521a...travelling surface, 22...top plate section, 23...column section, 25, 25x, 25y...opening, 26...high-speed rail, 26a...high-speed travelling surface, 30, 130, 230, 330, 43 0...running part, 31...linear motor, 32, 332, 432...wheel part, 33, 433...support wheel, 33x...free roller (support wheel), 33y...wheel body (support wheel), 35...high-speed wheel, 38...correction electromagnet (electromagnet), 50...main body, 51...first roller, 52...second roller, 333...ball part (support wheel), 434...steering motor, H1...recess.

Claims

1. A rail-guided vehicle system comprising: a track section that forms a plurality of routes that intersect via an intersection; and rail-guided vehicles that can travel along the plurality of routes, wherein the rail-guided vehicles select a traveling direction at the intersection and travel, the track portion has a plurality of magnets arranged along the path, The rail-guided vehicle is a linear motor that generates a magnetic force between the linear motor and the magnet for running or stopping the vehicle; a wheel unit including support wheels, the wheel unit being capable of changing the rolling direction of the support wheels to a selected traveling direction at the intersection.

2. The rail guided vehicle system according to claim 1 , wherein the wheel unit is configured by an omnidirectional wheel.

3. 2. The rail guided vehicle system according to claim 1, wherein the wheel unit includes a steering motor that changes the rolling direction of the support wheels in a selected traveling direction at the intersection.

4. The rail guided vehicle system according to claim 1 or 2, wherein at least some of the plurality of paths intersect at the intersections so as to extend in a lattice pattern.

5. 3. The rail guided vehicle system according to claim 1 or 2, wherein the rail guided vehicle is an overhead traveling vehicle having a running section including the linear motor and the wheel section, and a main body section disposed below the rail section and suspended from the running section.

6. The track portion is a running plate portion including a running surface on an upper surface thereof that can come into contact with the support wheel; a top plate portion disposed above the running plate portion and suspended from the ceiling; a column portion connecting the running plate portion and the top plate portion, the magnets are arranged along a plurality of the paths on the underside of the top plate; 6. The rail-guided vehicle system according to claim 5, wherein the running plate portion has openings through which connecting portions that connect the running portion and the main body portion are inserted, the openings extending along the plurality of paths.

7. The rail-guided vehicle is a first roller capable of contacting the track portion in a first horizontal direction; a second roller that can contact the track portion in a second horizontal direction that intersects with the first horizontal direction, 3. The rail-guided vehicle system according to claim 1, wherein when the rail-guided vehicle changes its traveling direction at the intersection, the first roller and the second roller move up and down so that one of the first roller and the second roller, depending on the traveling direction, abuts against the track portion.

8. the rail-guided vehicle has an electromagnet that corrects the orientation of the rail-guided vehicle, 3. The rail guided vehicle system according to claim 1, wherein the electromagnets are arranged at positions sandwiching the magnets arranged along the path of the track section in a horizontal direction perpendicular to the extension direction of the path.

9. The rail guided vehicle system according to claim 1 , wherein the wheel section is constituted by a free caster.

10. The track portion has a running plate portion including a running surface on an upper surface thereof that can be contacted by a ball portion as the support wheel of the free caster, 10. The rail guided vehicle system according to claim 9, wherein a recess into which a part of the ball portion fits is formed on the running surface at a position corresponding to the ball portion of the rail guided vehicle located at the intersection.

11. the rail-guided vehicle has high-speed wheels that can rotate at a higher speed than the support wheels, The track portion is a running plate portion including a running surface on an upper surface thereof that can come into contact with the support wheel; 3. The rail guided vehicle system according to claim 1, further comprising: a high-speed rail provided along a portion of a plurality of paths and including a high-speed running surface on an upper surface with which the high-speed wheels can come into contact when the support wheels are not in contact with the running surface.

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