Conveyance system

Abstract

To provide a conveyance system which does not scatter dust even when an automatic conveyance device is travelling.SOLUTION: In a conveyance system 2, a plurality of holes 16 are formed in a travel panel 10 so as not to hinder the travel of an automatic conveyance device 8, and dust is discharged through the plurality of holes 16 to prevent dust from accumulating on the travel panel 10.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a transfer system in which a travel panel along which an automatic transfer device travels is disposed on the top plate of a processing device including a plurality of processing devices. [Background technology]

[0002] A wafer has multiple devices such as ICs and LSIs formed on its surface, separated by planned dividing lines. The back side is ground using a grinding machine to form the wafer to the desired thickness, and then the wafer is divided into individual device chips using a cutting machine and laser processing machine. Each of the divided device chips is used in electrical equipment such as mobile phones and personal computers.

[0003] The present applicant has also developed a transport system in which a travel path is arranged using the top plate of a processing device including processing devices such as grinding devices, cutting devices, and laser processing devices, and a wafer storage device that stores multiple wafers, and an automatic transport device travels between the processing devices to transport wafers from the wafer storage device to each processing device or to transport consumables (see, for example, Patent Document 1). [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-013892 Summary of the Invention [Problem to be solved by the invention]

[0005] Processing equipment including machining devices are installed in clean rooms, but when an automatic transport device travels between processing equipment, dust accumulated on the travel path scatters, causing a problem of reduced accuracy in the clean room.

[0006] An object of the present invention is to provide a conveying system in which dust is not scattered even when an automatic conveying device travels. [Means for solving the problem]

[0007] According to the present invention, there is provided the following transport system that solves the above-mentioned problems: "A conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on the top plate of a processing device including a plurality of processing devices, A conveying system is provided in which a plurality of holes are formed in the traveling panel so as not to interfere with the travel of the automatic conveying device, and dust is discharged through the plurality of holes to prevent dust from accumulating on the traveling panel.

[0008] Preferably, the processing apparatus including the plurality of processing devices is arranged in a clean room, and dust is discharged through the plurality of holes formed in the running panel by an air flow supplied from the ceiling of the clean room and discharged from the floor of the clean room.

[0009] It is desirable that a filter be disposed under the traveling panel so that dust discharged through the plurality of holes is captured by the filter. [Effects of the Invention]

[0010] The transport system of the present invention comprises: A conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, A plurality of holes are formed in the traveling panel so as not to obstruct the traveling of the automatic transport device, and dust is discharged through the plurality of holes to prevent dust from accumulating on the traveling panel, so that dust does not scatter even when the automatic transport device travels. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a perspective view of a transport system according to the present invention; DETAILED DESCRIPTION OF THE INVENTION

[0012] Hereinafter, preferred embodiments of a transport system according to the present invention will be described with reference to the drawings.

[0013] As shown in FIG. 1, in the transfer system 2, a travel panel 10 on which an automatic transfer device 8 travels is disposed on a top plate 6 of a processing device 4 including a plurality of processing devices.

[0014] The processing equipment 4 includes a storage device 4a for storing articles and first, second, and third processing devices 4b, 4c, and 4d to which the articles in the storage device 4a are transported by an automatic transport device 8. Examples of articles stored in the storage device 4a include workpieces such as semiconductor wafers to be processed in the first to third processing devices 4b to 4d, and processing tools used when processing in any of the first to third processing devices 4b to 4d. Examples of processing tools used when processing in any of the first to third processing devices 4b to 4d include cutting blades used when cutting the workpieces, and grinding wheels with grinding stones used when grinding the workpieces to thin them. In this embodiment, one storage device 4a and three processing devices 4b to 4d are provided as the processing equipment 4, but the number and combination of processing devices 4 can be set as desired.

[0015] Traveling panels 10 are arranged on the top plate 6 of the processing device 4. In this embodiment, four traveling panels 10 (first to fourth traveling panels 10a to 10d) are arranged. The first traveling panel 10a connects the top plate 6 of the storage device 4a to the top plate 6 of the first processing device 4b. The second traveling panel 10b connects the top plate 6 of the first processing device 4b to the top plate 6 of the second processing device 4c, and the third traveling panel 10c connects the top plate 6 of the second processing device 4c to the top plate 6 of the third processing device 4d. Furthermore, the fourth traveling panel 10d connects the top plate 6 of the third processing device 4d to the top plate 6 of the storage device 4a. The number of traveling panels 10 can be determined appropriately depending on the number and arrangement of the processing devices 4.

[0016] The traveling panel 10 (first to fourth traveling panels 10a to 10d) includes a main section 12 having a traveling path along which the automatic conveying device 8 travels, and a fall prevention wall 14 for preventing the automatic conveying device 8 from falling from the main section 12.

[0017] The shape of the main part 12 of the traveling panel 10 can be any shape depending on the positional relationship between the processing devices 4 to be connected and the traveling route of the automatic transport device 8, etc. However, for convenience, the present embodiment shows a rectangular main part 12. Although not shown, a traveling guide line for guiding the traveling of the automatic transport device 8 is formed on the upper surface of the main part 12.

[0018] A plurality of holes 16 are formed in the main portion 12 of the traveling panel 10 so as not to interfere with the travel of the automatic conveying device 8. The plurality of holes 16 penetrate the main portion 12 of the traveling panel 10. The size of the holes 16 is such that the wheels of the automatic conveying device 8 do not get caught in the holes 16 and the automatic conveying device 8 can travel smoothly along the traveling panel 10 (for example, φ10 mm). Dust generated in the conveying system 2 due to the travel of the automatic conveying device 8 (for example, dust generated by wear of the wheels of the automatic conveying device 8) is discharged below the traveling panel 10 through the plurality of holes 16. Therefore, in this embodiment, dust is prevented from accumulating on the upper surface of the traveling panel 10. A filter (not shown) for capturing dust discharged from the plurality of holes 16 may be provided below the traveling panel 10.

[0019] Furthermore, a delivery opening 18 is formed in the main portion 12 of the traveling panel 10 to allow the passage of the following cassettes of the automatic conveying device 8. Although not shown, a delivery opening corresponding in position and size to the delivery opening 18 of the traveling panel 10 is also formed in the top plate 6 of the processing device 4. Articles are delivered between the automatic conveying device 8 and the processing device 4 through the delivery opening 18 of the traveling panel 10 and the delivery opening of the top plate 6 of the processing device 4.

[0020] The automatic conveying device 8 that travels on the traveling panel 10 is equipped with drive wheels arranged on the left and right, directional casters arranged in front and behind the drive wheels, a sensor that reads the travel guide line of the traveling panel 10, a cassette that stores the items to be transported, and a lifting means for raising and lowering the cassette (none of which are shown).

[0021] The transport system 2 described above is installed in a clean room. Although not shown, air supply holes are formed in the ceiling of the clean room, and air exhaust holes are formed in the floor of the clean room. Clean air is supplied to the clean room through the air supply holes, and air within the clean room is exhausted through the air exhaust holes. Therefore, an air flow from the ceiling to the floor is formed in the clean room. This air flow can promote the exhaust of dust through the multiple holes 16 formed in the traveling panel 10.

[0022] Next, an example of transporting a workpiece such as a semiconductor wafer in the transport system 2 will be described.

[0023] In the conveyance system 2, first, workpieces are transferred from the storage device 4a to the automatic conveyance device 8. At this time, the automatic conveyance device 8 stops at the transfer opening 18 of the traveling panel 10 installed above the storage device 4a. Next, a cassette is lowered from the automatic conveyance device 8 through the transfer opening 18 of the traveling panel 10 and the transfer opening of the top plate 6 of the storage device 4a, and the cassette is sent into the storage device 4a. Once the cassette is positioned at a predetermined position within the storage device 4a, the workpieces are stored in the cassette by the transport means (e.g., a robot hand) of the storage device 4a. Then, the cassette containing the workpieces is raised, and the cassette is removed from the storage device 4a. In this manner, the workpieces are transferred from the storage device 4a to the automatic conveyance device 8.

[0024] After the workpieces are transferred from the storage device 4a to the automatic transfer device 8, the automatic transfer device 8 transfers the workpieces to the first processing device 4b, where they are subjected to the required processing. During this process, the automatic transfer device 8 travels along the main portion 12 of the traveling panel 10 while using a sensor to read the travel guide lines on the traveling panel 10, moving from the storage device 4a to the first processing device 4b. When the automatic transfer device 8 arrives at a predetermined position above the first processing device 4b (where the transfer opening 18 of the traveling panel 10 is formed), a cassette is lowered from the automatic transfer device 8 through the transfer opening 18 of the traveling panel 10 and the transfer opening on the top plate 6 of the first processing device 4b, and the cassette is fed into the first processing device 4b. Next, once the cassette is positioned at a predetermined position within the first processing device 4b, the workpieces are removed from the cassette by a transport means (e.g., a robot hand) of the first processing device 4b. After the workpiece is subjected to the required processing in the first processing device 4b, the processed workpiece is placed in a cassette by the conveying means. Once the processed workpiece is placed in the cassette, the cassette is raised and removed from the first processing device 4b.

[0025] After the required processing is performed on the workpiece in the first processing device 4b, the workpiece is transported by the automatic transport device 8 to the second processing device 4c, where the required processing is performed on the workpiece. The steps for transporting the workpiece to the second processing device 4c are substantially the same as the steps for transporting the workpiece to the first processing device 4b, and therefore a description thereof will be omitted.

[0026] After the required processing is performed on the workpiece in the second processing device 4c, the workpiece is transported to the third processing device 4d by the automatic transport device 8, where the required processing is performed on the workpiece. After that, the automatic transport device 8 transports the workpiece to the storage device 4a, where the processed workpiece is stored.

[0027] As described above, the conveyance system 2 is installed in a clean room, but dust is generated due to the movement of the automatic conveyance device 8, etc. When the generated dust falls on the upper surface of the traveling panel 10, the dust is discharged from the multiple holes 16 formed in the main part 12 of the traveling panel 10. Therefore, in this embodiment, dust is prevented from accumulating on the upper surface of the traveling panel 10, and therefore dust is not scattered even when the automatic conveyance device 8 moves.

[0028] Furthermore, if an air flow from the ceiling to the floor is formed in the clean room in which the conveying system 2 is installed, the air flow will further promote the discharge of dust through the plurality of holes 16. Furthermore, if a filter is provided below the traveling panel 10 and the dust discharged from the plurality of holes 16 is captured by the filter, scattering of dust can be more reliably prevented.

[0029] As described above, in this embodiment, dust is not scattered even when the automatic conveying device 8 travels, so the problem of dust accumulated on the traveling panel 10 being scattered when the automatic conveying device 8 travels between processing devices 4, which reduces the accuracy of the clean room, is resolved. [Explanation of symbols]

[0030] 2:Transport system 4: Processing equipment 6: Top plate 8: Automatic transport device 10: Travel panel 10a: First traveling panel 10b: Second traveling panel 10c: Third running panel 10d: Fourth running panel 12: Main section 14: Fall prevention wall 16: Hole 18: Delivery point

Claims

1. A conveyance system in which a traveling panel on which an automatic conveyance device travels is arranged on a top plate of a processing device including a plurality of processing devices, The traveling panel has a plurality of holes formed therein so as not to interfere with the travel of the automatic transport device, and dust is discharged through the plurality of holes, preventing dust from accumulating on the traveling panel.

2. 2. The conveying system according to claim 1, wherein the processing apparatus including a plurality of processing devices is arranged in a clean room, and dust is discharged through the plurality of holes formed in the traveling panel by an air flow supplied from the ceiling of the clean room and discharged from the floor of the clean room.

3. 3. The conveying system according to claim 2, wherein a filter is disposed below said traveling panel, and dust discharged through said plurality of holes is captured by said filter.

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