Container for irregular rectangular reticle

Abstract

To provide a container for an irregular rectangular reticle.SOLUTION: In a container for an irregular rectangular reticle comprising a single pod and a double pod, the length and width of the pod of the single pod and an outer pod of a double pod are from 1.25 to 2.5 times the length and width of the irregular rectangular reticle. The length and width of an inner pod of the double pod is 1.05 to 2.0 times the length and width of the irregular rectangular reticle. The outer pod includes a gas diffuser including a fluid pathway and a gas diffusion element. The fluid pathway delivers gas to the gas diffusion element and purges toward a lid of the inner pod. A central region of the outer pod and the inner pod are provided with viewing windows at corresponding locations to allow viewing of the irregular rectangular reticle contained in a container and its pellicle portion.SELECTED DRAWING: Figure 1B

Description

[Technical Field]

[0001] The present invention relates to a reticle container, particularly to an extreme ultraviolet reticle transport container for semiconductor devices, and more particularly to a non-scalene rectangular reticle container for storing an extreme ultraviolet reticle having a non-scalene rectangular structure. [Background technology]

[0002] As feature sizes and resolutions continue to shrink at new manufacturing process nodes, the density and number of devices on cutting-edge semiconductor reticles have rapidly increased. Extreme ultraviolet (EUV) lithography (EUV) technology has become a crucial technology for the semiconductor industry. Extreme ultraviolet (EUV) refers to light with wavelengths less than 13.5 nanometers. EUV-based exposure tools, known as EUV exposure / lithography tools (collectively referred to as EUV tools), use extremely small wavelengths of light to print microchips, enabling the continued miniaturization of integrated circuits. To further shrink device nodes and achieve smaller features, the development of high-numerical aperture (NA) extreme ultraviolet (High-NA) EUV lithography technology, which expands the numerical aperture from 0.33 to 0.55 or greater, is crucial.

[0003] The development of high-numerical aperture (NA) exposure tools aims to achieve higher-resolution imaging capabilities, improving precision, sharper images, and enabling the printing of more microchips, thereby enhancing the production capacity and yield of cutting-edge processes. As expected, the development of high-numerical aperture (NA) EUV tools will enable the linewidth of semiconductor processes to continue shrinking. However, the optical characteristics of high-numerical aperture (NA) EUV light will further reduce the exposure imaging area on the wafer compared to standard NA exposure imaging, potentially even halving the exposure imaging area. Reticle development requires increasing the reticle size to a size large enough to effectively cover the wafer's exposure imaging area. Therefore, to achieve finer nanometer-level and even angstrom-level processes compatible with NA EUV lithography technology, the size of conventional equilateral rectangular reticles must be improved to larger non-scalene rectangular reticles. Not only does it require changing the structural design of the irregular-sides rectangular reticle, but it also requires overturning the structural design of the original rectangular reticle pod, and proposing an effective reticle transport solution for large irregular-sides rectangular reticle pods in a new technology field is undoubtedly a major technological leap forward for cutting-edge processes. Summary of the Invention [Means for solving the problem]

[0004] The present invention provides a scalene rectangular reticle container for storing a scalene rectangular reticle. The scalene rectangular reticle container includes an outer pod having a length and a width, each including a shell and a door that can be opened and closed relative to each other and that define a storage space, and an inner pod having a lid and a base that can be opened and closed relative to each other, each having a length and a width, located within the storage space of the outer pod and for storing the scalene rectangular reticle. The length of the outer pod is 1.25 to 2.5 times the length of the scalene rectangular reticle, and the width of the outer pod is 1.25 to 2.5 times the width of the scalene rectangular reticle. The length of the inner pod is 1.05 to 2.0 times the length of the scalene rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the scalene rectangular reticle.

[0005] The present invention also provides a trapezoidal rectangular reticle container for storing a trapezoidal rectangular reticle. The trapezoidal rectangular reticle container includes an outer pod including a shell and a door, each having a length and a width, that can be opened and closed relative to each other and that define a storage space; a lid and a base, each having a length and a width, that can be opened and closed relative to each other; an inner pod located within the storage space of the outer pod for storing the trapezoidal rectangular reticle; a fluid path provided in the outer pod that connects the shell and the door; and a gas diffusion element, the fluid path including a gas diffuser that sends gas to the gas diffusion element and purges it toward the lid of the inner pod. The length of the outer pod is 1.25 to 2.5 times the length of the trapezoidal rectangular reticle, and the width of the outer pod is 1.25 to 2.5 times the width of the trapezoidal rectangular reticle. The length of the inner pod is 1.05 to 2.0 times the length of the trapezoid reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the trapezoid reticle.

[0006] The present invention also provides a scalene rectangular reticle container for storing a scalene rectangular reticle. The scalene rectangular reticle container includes an outer pod including a shell and a door, each having a length and a width, that define a storage space and that can be opened and closed relative to each other; a lid and a base, each having a length and a width, that can be opened and closed relative to each other; an inner pod located within the storage space of the outer pod for storing the scalene rectangular reticle; and at least two observation windows provided on the door and the base, respectively, at corresponding positions. The base has a central region, and the observation window is located within the central region, the length and width of the central region being 0.9 times the length of the scalene rectangular reticle and 0.9 times the width of the scalene rectangular reticle, respectively. The observation window on the door is located so as to cover at least a portion of the central region of the base, and the observation windows on the door and the base are used to directly observe the scalene rectangular reticle and its pellicle. The length of the outer pod is 1.25 to 2.5 times the length of the trapezoidal rectangular reticle, the width of the outer pod is 1.25 to 2.5 times the width of the trapezoidal rectangular reticle, the length of the inner pod is 1.05 to 2.0 times the length of the trapezoidal rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the trapezoidal rectangular reticle.

[0007] The present invention also provides a container for a trapezoidal rectangular reticle, the container comprising a shell and a door, the door and the shell opening and closing opposite to each other to define a storage space, the door and the shell having the same length and width, the storage space being used to store the trapezoidal rectangular reticle, the length and the width being 1.25 to 2.5 times the length of the trapezoidal rectangular reticle, respectively.

[0008] For a better understanding of the present invention, reference may be made to the following drawings and description. Non-limiting and non-exhaustive embodiments are described with reference to the following drawings. It should be noted that the components in the drawings are not necessarily drawn to actual size, but are instead drawn with the focus on explaining the structure and principles. [Brief explanation of the drawings]

[0009] [Figure 1A] 1A and 1B are diagrams showing an embodiment of a trapezoidal rectangular reticle container of the present invention. [Figure 1B] 1 is an exploded view of a trapezoidal reticle container of the present invention; [Figure 1C] FIG. [Figure 1D] FIG. 2 is a view showing a portion of an edge of a door. [Figure 1E] FIG. 10 shows the automatic locking means provided by the shell and door. [Figure 1F] FIG. 10 shows a resilient retaining element. [Figure 2A] FIG. 1 is a top view of the outer pod. [Figure 2B] FIG. 1 is a top view of the inner pod. [Figure 3A] 10A and 10B are diagrams showing an observation means for the irregular rectangular reticle container of the present invention; [Figure 3B] FIG. 10 is a diagram showing the installation range of the observation window of the inner pod. [Figure 4A] FIG. 10 is a diagram showing the configuration of the top surface of the door of the outer pod. [Figure 4B] FIG. 10 shows the bottom configuration of the outer pod door. [Figure 4C] 10A and 10B are diagrams showing the configuration of the top surface of the base of the inner pod. [Figure 4D] FIG. 10 shows the bottom configuration of the base of the inner pod. [Figure 4E] FIG. 10 is a partial cross-sectional view of the door and base when they are joined together. [Figure 5A] 1 illustrates an environmental control means for a trapezoidal reticle container of the present invention. [Figure 5B] FIG. 2 is a diagram showing the configuration of the inside of the shell. [Figure 5C] FIG. 2 is a diagram showing the configuration of the top surface of the door. [Figure 6A] A partial cross-sectional view of the shell and door (before joining). [Figure 6B] A partial cross-sectional view of the shell and door (when joined). [Figure 7A] FIG. 1 shows an inner pod with a filtering means. [Figure 7B] FIG. 10 is a schematic top view showing the overlapping relationship between the gas diffusion element and the filtering means. [Figure 8A] 10A and 10B are diagrams showing the top configuration of the lid of the inner pod. [Figure 8B] FIG. 2 is a diagram showing the internal configuration of the inner pod. [Figure 8C] 10 is an enlarged view showing that the protrusions on the shell correspond to the recesses in the lid when the shell and the lid are joined together. FIG. [Figure 9] FIG. 2 is a schematic diagram showing a support structure for the base. [Figure 10] FIG. 10 is a schematic view showing another embodiment of the support structure of the base. [Figure 11] FIG. 10 is a schematic view showing another embodiment of the support structure of the base. DETAILED DESCRIPTION OF THE INVENTION

[0010] The present invention will now be described more fully with reference to the drawings, illustrating specific embodiments. However, the claimed subject matter may be specifically embodied in a variety of different forms, and therefore the construction of the claimed subject matter of the coverage or application is not limited to the specific embodiments disclosed herein. The specific embodiments are merely exemplary. Likewise, the present invention is intended to provide a reasonably broad scope for the subject matter of the application or coverage claims.

[0011] As used herein, the term "in one embodiment" does not necessarily refer to the same specific embodiment, and the term "in some other / specific embodiments" as used herein does not necessarily refer to a different specific embodiment. The claimed subject matter is intended to include all or any combination of the specific embodiments. As used herein, the term "couple" includes "directly connected" or "indirectly coupled."

[0012] Please also refer to Figures 1A and 1B. Figure 1A shows an embodiment of a scalene rectangular reticle container (1) of the present invention. Figure 1B is a 3D exploded view of the scalene rectangular reticle container (1). The scalene rectangular reticle container (1) is a scalene rectangular double pod, including a scalene rectangular outer pod (10) and an inner pod (20). In one embodiment, the scalene rectangular reticles stored in the reticle container (1) are 6 inch x 12 inch reticles or reticles with an aspect ratio of approximately 1:1.86 to 2.5, but the present invention is not limited thereto. The outer pod (10) has structural characteristics that make it compatible with an overhead guided vehicle system (OHT system) in a factory, allowing reticles stored in the outer pod (10) and inner pod (20) to be transferred between factory facilities.

[0013] The outer pod 10 includes a shell 102 and a door 104. The shell 102 is surrounded by multiple walls and defines a space with an opening, which may be a downward-facing opening or a side opening. The door 104 is used to cover the opening of the shell 102. The top of the shell 102 is provided with structural features compatible with the OHT system and a handle for an operator to grasp. In this embodiment, the opening of the shell 102 faces downward, and the top surface of the door 104 is provided with a carrying means for placing the inner pod 20 on the top surface. Of course, the outer pod may also be designed with the opening of the shell 102 facing sideways, and the shell 102 is provided with a carrying means for placing the inner pod 20 within the space. Regardless of the design of the outer pod, the outer pod includes a shell (102) and a door (104) that can be opened and closed from opposite sides, the shell (102) having a length and a width, and the door (104) cooperating with an opening in the shell (102) to define a storage space.

[0014] The inner pod (20) includes a cover (202) and a base (204) that can be opened and closed opposite each other, and the cover (202) and the base (204) each have a length and a width. The inner pod (20) is located within the storage space of the outer pod (10) and is used to store a non-trapezoidal rectangular reticle (not shown).

[0015] It should be noted that in order to distinguish from the design structure of a conventional equilateral rectangular reticle, the size of the scaleneous rectangular reticle needs to be redefined due to its relatively large size. The scaleneous rectangular reticle container of the present invention has scaleneous structural features, in which the length of the outer pod (10) is the length of the scaleneous rectangular reticle multiplied by 1.25 to 2.5, the width of the outer pod (10) is the width of the scaleneous rectangular reticle multiplied by 1.25 to 2.5, the length of the inner pod (20) is the length of the scaleneous rectangular reticle multiplied by 1.05 to 2.0, and the width of the inner pod (20) is the width of the scaleneous rectangular reticle multiplied by 1.05 to 2.0.

[0016] The top surface of the door 104 is provided with three dynamic coupling pins 106 that can be connected to the bottom of the inner pod 20. The top surface of the door 104 is also provided with a sealing means that can seal the storage space defined by the shell 102 and the door 104 to a considerable extent. The top surface of the door 104 is also provided with a sealing ring 108. FIG. 1C shows that a portion of the sealing ring 108 is embedded in the structure of the door 104, and the exposed portion of the sealing ring 108 can contact the bottom surface of the shell 102 to form a seal. The shell 102 or the door 104 is also provided with observation means that allow the identification device to observe the status within the storage space from below the door 104, as will be described in detail below. The shell 102 and the door 104 further include automatic locking means. A plurality of guide slots (109, guiding slots) are formed on the four sides of the door (104), and FIG. 1D shows an enlarged view of the guide slots (109) having inclined surfaces (110) and recesses (111) below the inclined surfaces (110).

[0017] 1E shows a cross-sectional view of the guide slot 109 when the shell 102 and the door 104 are joined. A spring- and slider-shaped elastic locking member 112 is located on the edge of the sidewall of the shell 102 (at a location corresponding to the guide slot 109 in FIG. 1B), but the present invention is not limited to this. The elastic locking member 112 can be moved between a fully released state and a compressed state. When the shell 102 approaches the door 104, the slider of the elastic locking member 112 first contacts the top end of the inclined surface 110 and is guided by the inclined surface 110. As the shell 102 and the door 104 approach each other, the slider of the elastic locking member 112 slides downward along the inclined surface 110 and is pushed sideways, compressing the spring. After passing the bottom of the inclined surface 110, it is released into the recess 111, thereby locking the shell 102 and the door 104 together. The shape of the elastic locking member 112 can be appropriately designed to reduce interference when the slider enters the recess 111 from the inclined surface 110. When attempting to unlock, the elastic locking member 112 can be manipulated to disengage from the recess 111, allowing the shell 102 to be removed from the door 104.

[0018] The door (104) is equipped with environmental control means, such as humidity and pressure control. FIG. 1B shows that the top of the door (104) is equipped with multiple gas holes (113), which can be gas injection holes or intake holes depending on the setting. The bottom of the door (104) also has corresponding gas holes, which are connected to the facility's gas system. In FIG. 5B, the door (104) further includes multiple gas valve assemblies (V) corresponding to the gas holes (113) for controlling the opening and closing of the air flow, respectively.

[0019] The inner pod (20) is primarily composed of machined parts and includes a lid (202) and a base (204). The lid (202) is composed of a top and side walls and is provided with gas filtering means for diffusing the gas filled in the outer pod (10) into the inner pod (20). The lid (202) has a displacement restriction means on the inside that limits the horizontal and vertical displacement of the reticle. The top surface of the base (204) is provided with a support means that supports the bottom of the reticle and limits its lateral displacement. The base (204) is also provided with an observation means that allows the identification device to observe the state of the bottom of the reticle from below the base (204). The lid (202) is also provided with an elastic restriction means. As shown in FIG. 1B, the lid (202) is provided with multiple elastic retaining elements (206) around its periphery, the details of which are shown in FIG. 1F. Each elastic retaining element (206) is composed of a fixed end and a curved arm. When the lid (202) approaches the base (204), the curved arm of the elastic retaining element (206) slides downward along the periphery of the base (204) until the bottom surface of the lid (202) contacts the top surface of the base (204). The elastic retaining elements (206) are molded elements and have considerable elasticity. The elastic retaining elements (206) around the periphery of the lid (202) can abut against the periphery of the base (204), preventing horizontal displacement of the lid (202) relative to the base (204).

[0020] In this embodiment, the irregular rectangular reticle container has a double pod design, so that when the outer pod (10) houses the inner pod (20), the length of the outer pod (10) is essentially parallel to the length of the inner pod (20), and of course, the width of the outer pod (10) is essentially parallel to the width of the inner pod (20).

[0021] In another embodiment, the trapezoidal rectangular reticle container of the present invention is a single pod for storing a trapezoidal rectangular reticle. The trapezoidal rectangular reticle container includes a shell and a door. The door and shell open and close oppositely to define a storage space, and the door and shell have the same length and width, and the storage space is used to store a trapezoidal rectangular reticle. To distinguish it from the single-pod design structure of conventional trapezoidal rectangular reticle pods, the trapezoidal rectangular reticle container of the present invention has the structural characteristics of a single pod, in which the length and width of the door and shell are respectively 1.25 to 2.5 times the length of the trapezoidal rectangular reticle.

[0022] Figure 2A shows the measurement definitions of the length (10L) and width (10W) of the outer pod (10). Figure 2B shows the measurement definitions of the length (20L) and width (20W) of the inner pod (20). The length (10L) of the outer pod (10) extends between a pair of handles on the shell (102), and the length (20L) of the inner pod (20) extends between a pair of flanges on the lid (202).

[0023] In a specific embodiment, the length and width of the shell (102) are 19-21 inches and 12-14 inches, respectively, and the length and width of the door are 16-18.9 inches and 11-13.9 inches, respectively, but the invention is not limited thereto and the size range design can be adjusted depending on the requirements of the application.

[0024] In a specific embodiment, the length and width of the cover (202) are 14 to 16 inches and 7 to 9 inches, respectively, and the length and width of the base (204) are 12 to 15 inches and 6 to 8.9 inches, respectively, but the present invention is not limited thereto, and the size range design can be adjusted according to the requirements of the application.

[0025] FIG. 3A shows a schematic diagram of the observation means provided in the reticle container, including an observation means for the outer pod and an observation means for the inner pod. When a reticle (R) is placed in the inner pod of the reticle container, a reticle pellicle (P) that protects the reticle pattern is attached to the bottom of the reticle and maintains an appropriate distance from the base of the inner pod. Because the pattern size of a non-scalene rectangular reticle is larger than that of a conventional equilateral rectangular reticle, the size of the reticle pellicle must also be increased accordingly. The reticle pellicle is composed of a frame and a film. Since the central region of the film lacks frame support, significant deformation may occur in the central region of a large film. Therefore, the observation means are provided primarily in the central regions of the outer pod and the inner pod to enable observation of the deformation state of the reticle pellicle. The observation means of the outer pod includes a first observation window (OB1), and the observation means of the inner pod includes a second observation window (OB2), which are in a corresponding relationship with each other, so that an identification device (such as a lens) located below the reticle container can read the state of the central region of the reticle pellicle (P) through the first observation window (OB1) and the second observation window (OB2).

[0026] FIG. 3B schematically illustrates the installation range of the second observation window (OB2). The range is enclosed by a rectangle defined by a length (L1) and a width (W1), and the center of the rectangle overlaps with the center of the inner pod base. In one embodiment, the length (L1) of the range is substantially equal to the length of the irregular rectangular reticle multiplied by 0.9, and the width (W1) of the range is substantially equal to the width of the irregular rectangular reticle multiplied by 0.9. At least a portion of the second observation window (OB2) must be within the range. As for the first observation window (OB1), its projection range must essentially overlap with at least a portion of the second observation window (OB2). The first observation window (OB1) and the second observation window (OB2) may be circular, rectangular, polygonal, or other irregular shapes.

[0027] 4A and 4B, a circular central observation window 50A is provided in the center of the door 104. Another rectangular observation window 50B is further provided between the center and the periphery of the door 104. A corresponding observation window 50E is also provided in the base 204. The range of the observation window 50B can exclude the range of the central observation window 50A. The observation window 50B of the door 104 is mainly used to observe the scalene rectangular reticle, pellicle frame, and pellicle portion within the base 204 through the observation window 50E of the base 204.

[0028] 4C and 4D, the base 204 is provided with a circular central observation window 50C. The central observation window 50C of the base 204 corresponds to the central observation window 50A of the door 104 and is used to observe the central region of the reticle pellicle for deformation or sagging. The base 204 is also provided with other observation windows 50D, 50E, and 50F, four of which are located at the boundaries between the reticle mounting surface 2041 and the four platforms 2042. These observation windows 50D serve as reticle pre-alignment system (RPAS) windows, allowing a reader on the load port to capture multiple alignment marks on a non-scalene rectangular reticle through these observation windows 50D.

[0029] In another embodiment, the observation window (50D) may be located near the width of the base (204). The platform (2042) is located near the long side of the base (204) and defines, together with the surrounding surface (2043), multiple pellicle frame recesses (2044). These pellicle frame recesses (2044) prevent interference between the pellicle frame and the base (204). Other observation windows (50E, 50F) are located at the corners of the reticle mounting surface (2041). The observation window (50E) is elliptical, while the observation window (50F) is circular, and the two are completely different sizes. They are used to observe the reticle, pellicle frame, and pellicle. The bottom surface of the base (204) shown in Figure 4D is provided with an inner positioning assembly (51A) and an outer positioning assembly (51B) surrounding the central observation window (50C) or central position. The inner positioning assembly (51A) and the outer positioning assembly (51B) each consist of three groove elements for fitting a dynamic coupling pin, such as dynamic coupling pin (106) of FIG. 4A or other dynamic coupling pin included in the load port.

[0030] The present invention also integrates an observation window with a support mechanism. Figure 4E shows a partial cross-sectional view of the door 104 and base 204 when they are connected. When the base 204 is placed on the dynamic coupling pin 106 of the door 104, a reinforcing support element 1041 is provided on the inside of the bottom of the door 104 to support the inner pod 20. Specifically, the reinforcing support element 1041 of the door 104 can brace the center of the base 204. As shown in the cross-sectional view, the reinforcing support element 1041 is a hollow columnar structure protruding from the inside of the door 104. The central observation window 50A can be integrated with the reinforcing support element 1041 using any known method. In this embodiment, the central observation window 50A is confined within the unroofed space of the hollow columnar structure. The central observation window 50C of the base 204 corresponds to the reinforcing support element 1041. When the base 204 is placed on the door 104, the central observation window 50A of the door 104 aligns with the central observation window of the base 204, or the two overlap projectively. Essentially, the three dynamic coupling pins 106 on the door 104 are sufficient to support the base 204, and the reinforcing support element 1041 can function as an additional support means. Even if the base 204 has tolerances or deformations that cause it to slightly collapse in the center, the reinforcing support element 1041 can support the central region of the base 204.

[0031] In addition to the door (104) and base (204) having observation windows at corresponding positions, in another embodiment, when the opening of the shell faces a side, the shell (102) and base (204) have observation windows at corresponding positions. The base (204) has a central region, and the observation window is located within the central region, and the length and width of the central region are 0.9 times the length of the scalene rectangular reticle and 0.9 times the width of the scalene rectangular reticle, respectively. The observation window of the shell (102) covers at least a portion of the central region of the base (204), and the observation windows of the shell (102) and the base (204) are used to directly observe portions of the scalene rectangular reticle and the pellicle.

[0032] The present invention also includes an improved environmental control within the container. Conventional reticle containers provide environmental control by filling the sealed outer pod with an inert gas (such as nitrogen) called XCDA through a gas port on the outer pod door. After the environment within the outer pod reaches a predetermined pressure, the gas diffuses into the inner pod through a filtering element in the inner pod. However, as the size of the reticle transport pod increases, the time required for the gas to enter the inner pod also increases. Therefore, the reticle container of the present invention provides an improved means for increasing the efficiency of gas diffusion.

[0033] 5A is a schematic diagram illustrating an environmental control means for a reticle container according to the present invention, further comprising a gas diffuser within the outer pod (10). The gas diffuser includes at least one fluid path (60) communicating between the shell (102) and the door (104) and at least one gas diffusion element (62). One end of the fluid path (60) or manifold is coupled to the gas valve assembly (V) of the door (104) for receiving gas. The other end of the fluid path (60) is coupled to the gas diffusion element (62), which delivers gas to the gas diffusion element (62) for purging toward the lid (202) of the inner pod (20). The gas diffusion element (62) is essentially located at the top of the storage space of the outer pod (10) and includes a gas diffusion interface that allows gas to diffuse toward the top of the lid (202) of the inner pod (20). When there is a pressure difference between the external and internal environments of the inner pod (20), gas is forced to flow into the inner pod (20) through the filtering element, thereby achieving microenvironmental control of the inner pod (20).

[0034] 5B and 5C show specific embodiments of the environmental control means. FIG. 5B shows that a gas diffusion element (62) is provided on the inside of the top of the shell (102), and a fluid path (60) is distributed from one end of the gas diffusion element (62) along the inner wall of the shell (102) to a gas hole at the bottom of the door (104). In this embodiment, the fluid path (60) and the gas diffusion element (62) are arranged in pairs on the inside of the top of the shell (102), and the fluid path (60) and the shell (102) can be integrally molded. The fluid path (60) has a receiving port (601). A gas chamber can be provided within the fluid path (60) or connected between the fluid path (60) and the gas diffusion element (62) to collect gas and then supply it to the gas diffusion element (62). In other embodiments, the gas chamber may be configured to collect gas from multiple receiving ports 601 or multiple fluid paths 60 and supply it to one or more gas diffusion elements 62. The fluid paths 60 extend from the receiving ports 601 along the sidewall to the top of the shell 102. In other embodiments, the fluid paths 60 are removable tubes. The gas diffusion elements 62 are removably fixed to the top of the shell 102. The gas diffusion elements 62 are elongated bars parallel to the long sides of the shell 102, and both ends of the gas diffusion elements 62 are respectively connected to two fluid paths 60. In other embodiments, the gas diffusion elements 62 may have other shapes. It should be understood that the number and combination of fluid paths 60 and gas diffusion elements 62 are not limited to this embodiment.

[0035] FIG. 5C shows that the top surface of the door (104) is provided with multiple gas holes (113A, 113B), four of which are intake openings (113A) and two of which are exhaust openings (113B). The four receiving ports (601) of the shell (102) correspond to the four intake openings (113A). When the shell (102) and the door (104) are connected, the receiving ports (601) can receive gas from the intake openings (113A). Therefore, after the gas enters the outer pod (10), it is guided to the top of the shell (102) and then diffuses downward from the top. The lid (202) of the inner pod (20) is provided with a filtering element, which helps to concentrate a large amount of gas above the lid (202) and diffuse it into the inner pod (20) through the filtering means of the lid (202), thereby improving the efficiency of environmental control.

[0036] 6A and 6B show partial cross-sectional views of another embodiment of the environmental control means. A sealing member such as a washer 602 is provided at the junction between the gas hole 113A of the door 104 and the fluid path 60. The sealing member has elasticity and can be configured to seal the receiving port 601 by adhering to the top surface of the door 104 when the shell 102 and the door 104 are joined. In another possible embodiment, the washer 602 can be attached to the gas intake 113A.

[0037] FIG. 7A shows a filter means 80 provided in the inner pod lid, and specific embodiments are shown in FIGS. 8A and 8B. The filter means 80 includes multiple hollow portions 90 and a filter element 92. Gas can pass through the hollow portions 90 to reach the filter element 92. The filter element 92 may be a filter membrane or a porous material. Depending on the pressure difference, gas can diffuse through the filter element 92 into the inner pod 20 or escape from the inner pod 20. FIG. 7B shows the relationship between the gas diffusion element 62 and the filter means 80 from a top view. To ensure rapid gas entry into the inner pod 20, the effective areas of the paired gas diffusion element 62 and filter means 80 must overlap. The length of the gas diffusion element 62 or diffusion tube may be longer than the length of the filtering means 80 or filtering membrane to ensure that the purge area fully covers the area of ​​the filtering means 80 and improve diffusion efficiency, although the invention is not limited thereto.

[0038] The present invention further includes tri-axle positioning members and directional positioning recesses to enhance the positioning and stability of the inner pod.

[0039] Figure 8A shows a specific embodiment in which a displacement limiting means is provided on the top surface of the cover (202). A total of eight recesses (94, dents) are formed around the periphery of the cover (202), with two recesses (94) on each side of the cover (202). As can be seen from the cross section shown in Figure 8C, one end of the elastic retaining element (206) is fixedly connected to the bottom of the recesses (94).

[0040] Referring again to FIG. 5B, the displacement limiting means further includes a plurality of positioning protrusions 64 provided on the inner top of the shell 102. These protrusions 64 are configured to correspond to the recesses 94. When the shell 102 and the door 104 are joined, these protrusions 64 fit into the corresponding recesses 94. As shown in FIG. 8C, one side edge of each protrusion 64 contacts the inclined surface of the recess 94 to form a restriction, and the horizontal and vertical directions of the inner pod cover are restricted by these protrusions 64. That is, the three axes X, Y, and Z shown in FIG. 8A are uniformly restricted. FIG. 5B also shows that a central pressing element 66 is further provided in the center of the inside of the shell 102 to press the center of the hollow portion 90 and prevent deflection of the hollow portion 90. The top center of the inner pod (20) can be restricted by the upper central pressing element (66) and the lower reinforcing support element (1041), thereby improving the stability of the inner pod (20).

[0041] The irregular-sided rectangular reticle accommodated in the reticle container 1 of the present invention is a 6-inch by 12-inch reticle, which is significantly larger than a conventional square reticle. When the base 204 of the inner pod 20 places an irregular-sided rectangular reticle on it, the support points tend to be uneven, which can cause the 6-inch by 12-inch reticle to deform or warp. To address this issue, referring to FIG. 9, which is a schematic diagram of the support structure of the base 204, the base 204 of the inner pod 20 further includes a plurality of corner supports 21 and at least two auxiliary supports 22, each of which is located at a corner of the base 204, with each auxiliary support 22 located between adjacent corner supports 21. The two auxiliary supports 22 are located on the long sides of the inner pod 20.

[0042] As described above, the number of corner supports (21) is, for example, four, and each of the corner supports (21) functions as a main support (21) for the scalene rectangular reticle. Auxiliary supports (22) made of a cushioning material are used on both sides of the long sides of the scalene rectangular reticle to provide auxiliary support for the scalene rectangular reticle. When the scalene rectangular reticle (R) is placed on the base (204), the auxiliary supports (22) first come into contact with the scalene rectangular reticle (first contact), and as they are pressed down by the weight of the scalene rectangular reticle, the auxiliary supports (22) deform and slowly come into contact with the four corner supports (21) (second contact), providing more uniform support for the scalene rectangular reticle.

[0043] In another embodiment, the two auxiliary supports (22) may have a top height lower than the four corner supports (21) and may be provided on both sides of the long sides of the scalene rectangular reticle. When the scalene rectangular reticle is placed on the base (204), the four corner supports (21) first come into contact with the scalene rectangular reticle, and the auxiliary supports (22) do not come into direct contact with the scalene rectangular reticle. If the scalene rectangular reticle becomes deformed due to long-term storage, the auxiliary supports (22) will come into contact with the scalene rectangular reticle, thereby preventing excessive deformation of the scalene rectangular reticle.

[0044] In another embodiment, the two auxiliary supports (22) may be inclined or arc-surfaced auxiliary supports, and are provided on both sides of the long sides of the scalene rectangular reticle, i.e., each auxiliary support (22) contacts the long sides of the scalene rectangular reticle with its inclined or arc-surface. When the scalene rectangular reticle is placed on the base (204), the auxiliary supports (22) first contact the scalene rectangular reticle with their inclined or arc-surface (first contact). As the scalene rectangular reticle is pressed down by its weight, the chamfered edge of the bottom of the scalene rectangular reticle slowly slides down along the inclined surfaces of the inclined or arc-surfaced auxiliary supports and contacts the four corner supports (21) (second contact), thereby providing uniform support for the reticle.

[0045] In another embodiment, the four corner supports (21) and the two auxiliary supports (22) are both inclined or arc-surfaced auxiliary supports, i.e., each corner support (21) and auxiliary support (22) has an inclined or arc-surfaced contact with the long and short sides of the scalene rectangular reticle. When the scalene rectangular reticle is placed on the base (204), the chamfered edges of the four corner supports (21) and the two auxiliary supports (22) slowly slide down along the inclined surfaces of the inclined or arc-surfaced auxiliary supports to position the reticle, thereby providing more uniform reticle support.

[0046] 10 is a schematic diagram showing another embodiment of the support structure of the base (204). The main support (21) functions as the main support for the scalene rectangular reticle and is provided on both sides of the long sides of the scalene rectangular reticle. Four auxiliary supports (22) are provided at the corners of the base (204), made of a cushioning material, and function as auxiliary support for the scalene rectangular reticle. When the scalene rectangular reticle (R) is placed on the base (204), the four auxiliary supports (22) at the corners first come into contact with the scalene rectangular reticle (first contact). As they are pressed down by the weight of the reticle, the four cushioning auxiliary supports (22) deform, and the reticle slowly comes into contact with the main support (21) (second contact), providing more uniform reticle support.

[0047] 11 is a schematic diagram showing another embodiment of the support structure of the base (204). A plurality of main supports (21) are provided at two corners and a long side of the base (204) and are distributed in a triangular shape. A plurality of auxiliary supports (22) and a plurality of main supports (21) are disposed at corresponding positions, and similarly, a plurality of auxiliary supports (22) are provided at two corners and a long side of the base (204) and are distributed in a triangular shape. The three support points formed by the plurality of main supports (21) function as primary support for a non-scalene rectangular reticle. The three support points formed by the plurality of auxiliary supports (22) are made of a cushioning material and function as secondary support for a non-scalene rectangular reticle. When a scalene rectangular reticle (R) is placed on the base (204), the multiple auxiliary supports (22) first come into contact with the reticle (first contact), and as they are pushed down by the weight of the reticle, the cushioning multiple auxiliary supports (22) deform and slowly come into contact with the multiple main supports (21) at the other three support points (second contact), thereby providing more uniform support for the reticle.

[0048] Materials for the corner support or primary support (21) include, but are not limited to, polyetheretherketone (PEEK), polyetherimide (PEI), polyamideimide (PAI), polyimide (PI), and mixtures thereof. Materials for the secondary support (22) include, but are not limited to, polyethylene (PE), polypropylene (PP), polyethylene terephthalate (PET), thermoplastic elastomer (TPR), thermoplastic polyester elastomer (TPEE), fluoroelastomer (FKM), and silicone elastomer (LSR). The materials for the corner support (21) and secondary support (22) may be interchangeable as described above, or the materials for the corner support (21) and secondary support (22) may be the same. Any combination of materials for the corner support (21) and secondary support (22) may be used in variations of the embodiments of Figures 9-11 described above and are within the scope of protection of the present invention.

[0049] However, it should be understood that each specific embodiment of the present invention is for illustrative purposes only, and various modifications can be made without departing from the scope and spirit of the claims of the present invention, and such modifications should equally fall within the scope of protection of the present invention. Therefore, each specific embodiment described herein is not intended to limit the present invention, and the true scope and spirit of the present invention are disclosed in the claims that follow. [Explanation of symbols]

[0050] 1 Reticle Container 10 outer pod 102 Shell 104 doors 1041 Reinforcement support elements 106 Dynamic Coupling Pin 108 Seal Ring 109 Guide Slot 110 Slope 111 Hole 112 Elastic locking member 113 Gas vent 113A Waste intake 113B Waste discharge port 20 inner pods 21 Corner supports, main supports 22 Auxiliary supports 202 Lid 204 Foundation 2041 Placement surface 2042 units 2043 Surrounding Surface 2044 Pellicle frame evacuation groove 206 Elastic Retaining Element 50A Central observation window 50B Observation window 50C Central observation window 50D observation window 50E Observation window 50F observation window 51A Internal positioning assembly 51B outer positioning assembly 60 Fluid Path 601 Receiving Port 602 Washer 62 Gas diffusion element 64 Protrusion 66 Central pressing element 80 Filtration means 90 Hollow part 92 Filtration element 94 dent 10L length 10W width 20L length 20W width L1 length L2 width OB1 First observation window OB2 Second observation window P Reticle Pellicle R reticle V Gas Valve Assembly

Claims

1. 1. A scalene rectangular reticle container for containing a scalene rectangular reticle, comprising: an outer pod including a shell and a door that are opposed to each other and openable and define a storage space, each having a length and a width; an inner pod including a cover and a base that can be opened and closed relative to each other, each having a length and a width, the inner pod being located within the storage space of the outer pod and configured to store the irregular rectangular reticle; Equipped with the length of the outer pod is 1.25 to 2.5 times the length of the irregular rectangular reticle, and the width of the outer pod is 1.25 to 2.5 times the width of the irregular rectangular reticle; the length of the inner pod is 1.05 to 2.0 times the length of the irregular rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the irregular rectangular reticle. Container for scalene rectangular reticle.

2. The shell and the base are provided with observation windows at corresponding positions, the base has a central region, the observation window is located within the central region, and the length and width of the central region are the length of the irregular rectangular reticle multiplied by 0.9 and the width of the irregular rectangular reticle multiplied by 0.9, respectively. the observation window of the shell covers at least a portion of the central region of the base, and the observation window of the shell and the observation window of the base are used to directly observe the non-scalene rectangular reticle and its pellicle portion; 2. The irregular rectangular reticle container according to claim 1.

3. The door and the base are provided with observation windows at corresponding positions, the base has a central region, the observation window is located within the central region, and the length and width of the central region are the length of the irregular rectangular reticle multiplied by 0.9 and the width of the irregular rectangular reticle multiplied by 0.9, respectively. the observation window of the door covers at least a portion of the central region of the base, and the observation window of the door and the observation window of the base are used to directly observe the non-scalene rectangular reticle and its pellicle portion; 2. The irregular rectangular reticle container according to claim 1.

4. 2. The container for a trapezoidal rectangular reticle according to claim 1, wherein the door and the base are provided with observation windows at corresponding positions for directly observing the trapezoidal rectangular reticle, the pellicle frame, and the pellicle portion.

5. 10. The container for a non-trapezoidal rectangular reticle of claim 1, wherein said base further comprises a plurality of reticle pre-alignment system windows for capturing a plurality of alignment marks on a non-trapezoidal rectangular reticle.

6. The irregularly-sided rectangular reticle container according to claim 1 , wherein the base further comprises a plurality of pellicle frame retraction grooves.

7. The trapezoidal rectangular reticle container of claim 1 , wherein the base further comprises an inner positioning assembly, an outer positioning assembly, or a combination thereof.

8. 2. The irregular rectangular reticle container of claim 1, wherein a reinforcing support element is provided on the inside bottom of said door for supporting said inner pod.

9. 2. The container for irregularly shaped rectangular reticles as described in claim 1, wherein a plurality of three-axis positioning members are provided inside the shell, a directional positioning groove is provided on the periphery of the lid, and the plurality of three-axis positioning members are arranged corresponding to the positions of the directional positioning grooves and abut against each other to position them.

10. 2. The irregular rectangular reticle container of claim 1, wherein the door is provided with a guide slot, and the shell is provided with an elastic locking member, which is guided along the guide slot to position and lock.

11. 2. The container for irregularly shaped rectangular reticles as described in claim 1, wherein the base of the inner pod further comprises a plurality of corner supports and at least two auxiliary supports, the plurality of corner supports being respectively located at corners of the base, and each auxiliary support being located between adjacent corner supports.

12. The irregular rectangular reticle container of claim 11 , wherein the two auxiliary supports are located on the long side of the inner pod.

13. 1. A scalene rectangular reticle container for containing a scalene rectangular reticle, comprising: an outer pod including a shell and a door that are opposed to each other and openable and define a storage space, each having a length and a width; an inner pod including a cover and a base that can be opened and closed relative to each other, each having a length and a width, the inner pod being located within the storage space of the outer pod and configured to store the irregularly shaped rectangular reticle; a gas diffuser disposed within the outer pod, the gas diffuser including at least one fluid path communicating between the shell and the door and at least one gas diffusion element, the fluid path directing gas to the gas diffusion element for purging toward the lid of the inner pod; Equipped with the length of the outer pod is 1.25 to 2.5 times the length of the irregular rectangular reticle, and the width of the outer pod is 1.25 to 2.5 times the width of the irregular rectangular reticle; the length of the inner pod is 1.05 to 2.0 times the length of the trapezoidal rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the trapezoidal rectangular reticle. Container for scalene rectangular reticle.

14. 14. The irregular rectangular reticle container of claim 13, wherein the gas diffusion element is provided on the inside of the top of the shell, and the fluid path is distributed from one end of the gas diffusion element along the inner wall of the shell to a gas hole at the bottom of the door.

15. The trapezoidal rectangular reticle container of claim 13 further comprising a gas chamber disposed between the fluid path and the gas diffusion element.

16. 15. The irregular rectangular reticle container of claim 14, wherein a seal member is provided at a junction between the gas hole of the door and the fluid path.

17. 14. The irregularly sized rectangular reticle container according to claim 13, wherein the lid is provided with a filter element, and the gas purging range of the gas diffusion element is larger than the installation range of the filter element.

18. The door and the base are provided with observation windows at corresponding positions, the base has a central region, the observation window is located within the central region, and the length and width of the central region are the length of the irregular rectangular reticle multiplied by 0.9 and the width of the irregular rectangular reticle multiplied by 0.9, respectively; 14. The container for a trapezoidal rectangular reticle of claim 13, wherein the observation window of the door covers at least a portion of the central region of the base, and the observation window of the door and the observation window of the base are used to directly observe the trapezoidal rectangular reticle and its pellicle thin film.

19. 14. The trapezoidal rectangular reticle container of claim 13, wherein the base further comprises a plurality of reticle pre-alignment system windows for capturing a plurality of alignment marks on a trapezoidal rectangular reticle.

20. The trapezoid reticle container of claim 13 , wherein the base further comprises an inner positioning assembly, an outer positioning assembly, or a combination thereof.

21. 14. The irregular rectangular reticle container of claim 13, wherein a reinforcing support element is provided on the inside bottom of the door to support the inner pod.

22. 1. A scalene rectangular reticle container for containing a scalene rectangular reticle, comprising: an outer pod including a shell and a door that are opposed to each other and openable and define a storage space, each having a length and a width; an inner pod including a cover and a base that can be opened and closed relative to each other, each having a length and a width, the inner pod being located within the storage space of the outer pod and configured to store the irregularly shaped rectangular reticle; At least two observation windows are provided on the door and the base, respectively, at corresponding positions; Equipped with the base has a central region, the observation window is located within the central region, and the length and width of the central region are the length of the irregular rectangular reticle multiplied by 0.9 and the width of the irregular rectangular reticle multiplied by 0.9, respectively; the observation window of the door is positioned to cover at least a portion of the central region of the base, and the observation window of the door and the observation window of the base are used to directly observe the non-scalene rectangular reticle and a portion of its pellicle; the length of the outer pod is 1.5 to 2.5 times the length of the irregular rectangular reticle, and the width of the outer pod is 1.5 to 2.5 times the width of the irregular rectangular reticle; the length of the inner pod is 1.05 to 2.0 times the length of the irregular rectangular reticle, and the width of the inner pod is 1.05 to 2.0 times the width of the irregular rectangular reticle. Container for scalene rectangular reticle.

23. 23. The trapezoidal rectangular reticle container of claim 22, wherein the base further comprises a plurality of reticle pre-alignment system windows for capturing a plurality of alignment marks on a trapezoidal rectangular reticle.

24. 23. The irregular rectangular reticle container of claim 22, further comprising a gas diffuser disposed within the outer pod, the gas diffuser including a fluid path communicating between the shell and the door and a gas diffusion element, the fluid path being used to supply purging gas toward the lid of the inner pod through the gas diffusion element.

25. 25. The irregular rectangular reticle container of claim 24, wherein the gas diffusion element is provided on the inside top of the shell, and the fluid path is distributed from one end of the gas diffusion element along the inner wall of the shell to a gas hole at the bottom of the door.

26. 25. The trapezoidal rectangular reticle container of claim 24, further comprising a gas chamber disposed between the fluid path and the gas diffusion element.

27. 26. The irregular rectangular reticle container of claim 25, wherein a seal member is provided at a junction between the gas hole in the door and the fluid path.

28. 1. A scalene rectangular reticle container for containing a scalene rectangular reticle, comprising: A shell and a door that opens and closes opposite to the shell, defines a storage space for storing a non-scalene rectangular reticle, and has the same length and width as the shell; Equipped with the length and the width are each 1.25 to 2.5 times the length of the irregular rectangular reticle; Container for scalene rectangular reticle.

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