Jig device for supporting attachment and detachment of heater unit, heater unit attachment / detachment system, and high-pressure annealing device that can be attached to / detached from heater unit

Abstract

To provide a scheme in which a heater unit of a high-pressure annealing device can be vertically moved below an external chamber while being supported by a jig device, and the heater unit can be attached to / detached from the high-pressure annealing device.SOLUTION: A jig device that supports attachment and detachment of a heater unit comprises a heater support plate on which the heater unit is placed on an upper surface part and which supports the heater unit, and a jig support plate which is brought into contact with and supported by a door of a high-pressure annealing device or by a door support arm of a lifting device. The heater unit is placed on the jig device, and the jig device is vertically movable through the lifting device.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present invention relates to a jig device that supports the attachment and detachment of a heater unit, a heater unit attachment and detachment system, and a high-pressure annealing apparatus to which a heater unit can be attached and detached, and more particularly to a technology that can attach or detach a heater unit of a high-pressure annealing apparatus by supporting the heater unit of the high-pressure annealing apparatus through a jig device and raising and lowering it below an external chamber. [Background technology]

[0002] Semiconductors are manufactured through multiple processes, and during the ion implantation process, high collision energy can cause damage to the wafer interface. The annealing process restores the damage to the wafer surface by supplying process gases while changing the temperature of the damaged wafer.

[0003] Recently, a high-pressure hydrogen annealing process has been applied to remove defects on the semiconductor surface through high-pressure hydrogen or deuterium.

[0004] Such a high-pressure annealing apparatus employs a dual-chamber structure including an inner chamber in which the annealing process is carried out in a high-pressure environment, and an outer chamber that maintains a pressure corresponding to the high pressure of the inner chamber and protects the inner chamber.

[0005] In addition, a heater unit is provided surrounding the inner chamber for heating the inner chamber during the annealing process.

[0006] The heater unit needs to be separated for maintenance and repair work on the high-pressure annealing equipment. However, due to the structural limitations of the high-pressure annealing equipment, the heater unit is separated by opening the top of the outer chamber and lifting it through the open top of the outer chamber.

[0007] When the heater unit is mounted in the high pressure annealing apparatus, the heater unit is lowered through the open top of the outer chamber to mount the heater unit.

[0008] In this detachable heater unit method, a working space corresponding to the size of the heater unit is required above the outer chamber, which causes a problem that the overall size of the high pressure annealing apparatus becomes considerably large.

[0009] In addition, a separate crane must be provided to lift and lower the heater unit, and if the heater unit comes into contact with the outer chamber or inner chamber when the heater unit is lifted and lowered, the high-pressure annealing apparatus may be damaged.

[0010] Furthermore, in order to install the heater unit at a precise position between the outer chamber and the inner chamber, precise control of the crane that raises and lowers the heater unit is required, which results in problems such as an inability to ensure stability and a long work speed. Summary of the Invention [Problem to be solved by the invention]

[0011] The present invention aims to solve the above-mentioned problems of the prior art and proposes a method for supporting a heater unit of a high-pressure annealing apparatus using a jig device and raising and lowering the heater unit below an outer chamber, thereby enabling the heater unit to be attached to or detached from the high-pressure annealing apparatus.

[0012] In particular, the upper part of the outer chamber is opened for maintenance and repair of the high-pressure annealing device, and the heater unit is raised and lowered through the open upper part of the outer chamber, thereby solving various problems associated with the attachment and detachment of the heater unit.

[0013] When a method of attaching and detaching a heater unit through the open top of the outer chamber is applied, a working space corresponding to the size of the heater unit is required above the outer chamber, which solves the problem that the overall size of the high-pressure annealing apparatus becomes considerably large.

[0014] In addition, it aims to solve the problem of needing a separate crane to lift and lower the heater unit, and the problem of damage to the high-pressure annealing device if the heater unit comes into contact with the outer chamber or inner chamber when the heater unit is lifted and lowered.

[0015] Furthermore, in order to install the heater unit at a precise position between the outer chamber and the inner chamber, precise control of the crane that raises and lowers the heater unit is required, which results in an unreliable stability and a long working speed.

[0016] The objects of the present invention are not limited to those described above, and other objects and advantages of the present invention not mentioned above can be understood from the following description. [Means for solving the problem]

[0017] In order to achieve the above technical objectives, one embodiment of a jig device supporting the installation and removal of a heater unit according to the present invention includes a heater support plate on whose upper surface a heater unit is placed and which supports the heater unit, and a jig support plate which is supported in contact with a door of a high-pressure annealing device or a door support arm of an elevator device, and the heater unit can be raised and lowered by the elevator device after being placed.

[0018] Preferably, the heater unit may further include a plurality of placement guide bars arranged to protrude upward from the upper surface of the heater support plate, guiding placement of the heater unit on the heater support plate and supporting the heater unit in close contact with a side surface of a lower end thereof to prevent the heater unit from coming off.

[0019] For example, the placement guide bar may include a first placement guide bar and a second placement guide bar, and a distance between the first placement guide bar and the second placement guide bar may be adjusted so that a lower end of the heater unit is inserted and placed between the first placement guide bar and the second placement guide bar.

[0020] For example, the heater support plate may be in a plate shape, and the length in the longitudinal direction may be greater than the diameter of the lower end surface of the heater unit and less than the diameter of the door insertion space provided at the lower end of the outer chamber.

[0021] For example, the heater support plate may have a width and length adjustable so that heater fastening through-holes, excluding heater fastening through-holes that function as alignment holes, among a plurality of heater fastening through-holes into which a plurality of heater fastening fasteners for fixing and mounting the heater unit to the outer chamber are fastened, are open and not blocked.

[0022] For example, the heater support plate may be in the form of a disk, and the diameter thereof may be larger than the diameter of the heater unit and smaller than the diameter of a door insertion space provided at the lower end of the outer chamber.

[0023] For example, the heater support plate may be provided with a plurality of fastening working spaces formed to be recessed inward and open at portions corresponding to a plurality of heater fastening through holes into which a plurality of heater fastening fasteners for fixing and mounting the heater unit to the outer chamber are fastened.

[0024] For example, the heater support plate may further include an alignment pin protruding upward from the upper surface thereof and inserted into an alignment hole formed in the heater unit.

[0025] For example, the heater unit may further include a plurality of heater unit detection sensors arranged at a plurality of positions spaced apart from each other on the heater support plate to measure the distance between the heater unit and the heater support plate or the degree of pressure applied by the heater unit.

[0026] The heater support plate and the jig support plate may further include a plurality of jig legs connecting the heater support plate and the jig support plate, and the height of the jig legs may be adjusted according to the size of the required working space.

[0027] In addition, one embodiment of the heater unit installation / detachment system according to the present invention includes a jig device on which a heater unit of a high-pressure annealing apparatus is placed, and an elevator device that raises and lowers the jig device, and the jig device supports the heater unit and raises and lowers the heater unit below the outer chamber of the high-pressure annealing apparatus, thereby supporting the installation or detachment of the heater unit.

[0028] As an example, the lifting device can lift and lower the door of the high pressure annealing device.

[0029] For example, the lifting device may include a door support arm on which the door is placed, lift the door support arm, and the jig device may be attached to the door support arm from which the door has been removed.

[0030] For example, the jig device may include a plurality of heater unit detection sensors arranged at a plurality of positions spaced apart from each other on a heater support plate on which the heater units are placed, and measuring the distance between the heater units and the heater support plate or the degree of pressure applied by the heater units, and may further include a controller that determines the operating state of the jig device or the placement state of the heater units based on detection signals from the plurality of heater unit detection sensors.

[0031] In addition, one embodiment of a high-pressure annealing apparatus with a detachable heater unit according to the present invention may include: an inner chamber that provides an internal space for performing a heat treatment process on a treatment object, the internal space being adjusted to a first pressure; an outer chamber that is integrally formed with an open lower portion and a closed upper portion and a side portion connected to each other, providing an external space that houses the inner chamber while being separated from the inner chamber, the external space being adjusted to a second pressure; and a heater unit that is selectively attached to the outer chamber and can be pulled out to the open lower portion of the outer chamber, the heater unit being disposed between the inner chamber and the outer chamber and having a heater mounting part that is fastened to the outer chamber, the heater mounting part being selectively fastened to the outer chamber through a heater fastening means.

[0032] For example, the heater mounting portion of the heater unit may include a heater flange protruding outward from a lower end of a heater body, and with an upper surface of the heater flange in contact with a portion of the outer chamber, a heater fastening fastener of the heater fastening means may penetrate from a lower surface to an upper surface of the heater flange and be fastened to the outer chamber, thereby selectively mounting the heater unit in the outer chamber. [Effects of the Invention]

[0033] According to the present invention, the heater unit of the high-pressure annealing apparatus can be supported by a jig device and raised and lowered below the outer chamber, and the heater unit can be attached to or detached from the high-pressure annealing apparatus, which greatly improves the stability, speed, and ease of maintenance and repair work on the high-pressure annealing apparatus.

[0034] In particular, in the present invention, the heater unit is pulled out below the outer chamber using an elevator that raises and lowers the door, so no additional space is required to pull out the heater unit, and the work space required for maintenance and repair of the high-pressure annealing apparatus can be significantly reduced.

[0035] Furthermore, in the present invention, the heater unit is raised and lowered with the jig device attached to the elevator device that raises and lowers the door, so no separate crane device or the like is required to raise and lower the heater unit.

[0036] The effects of the present invention are not limited to those mentioned above, and other effects not mentioned will be clearly understood by those skilled in the art from the following description. [Brief explanation of the drawings]

[0037] [Figure 1] 1 is a perspective view showing an embodiment of a high-pressure annealing apparatus to which a heater unit attachment / detachment system according to the present invention is applied. [Figure 2] 1 is a cross-sectional view showing an embodiment of a high-pressure annealing apparatus to which a heater unit attachment / detachment system according to the present invention is applied. [Figure 3] 1 is a diagram showing an embodiment of a heater unit attachment / detachment system according to the present invention; [Figure 4] 1 is a diagram showing an embodiment of a jig device of a heater unit attaching / detaching system according to the present invention; [Figure 5] 10 is a diagram showing the size of an embodiment of a heater support plate and a heater unit of a jig device according to the present invention. FIG. [Figure 6] 1 is a diagram showing an embodiment in which a jig device according to the present invention is attached to a door. [Figure 7] 10A and 10B are diagrams showing another embodiment of a jig device of the heater unit attaching / detaching system according to the present invention. [Figure 8] 10A and 10B are diagrams showing the sizes of heater support plates and heater units of a jig device according to another embodiment of the present invention; [Figure 9] 10A and 10B are diagrams illustrating an embodiment of an operation for separating a heater unit in a high pressure annealing apparatus through a heater unit attachment / detachment system according to the present invention. [Figure 10]10A and 10B are diagrams illustrating an embodiment of an operation for separating a heater unit in a high pressure annealing apparatus through a heater unit attachment / detachment system according to the present invention. [Figure 11] 10A and 10B are diagrams illustrating an embodiment of an operation for separating a heater unit in a high pressure annealing apparatus through a heater unit attachment / detachment system according to the present invention. DETAILED DESCRIPTION OF THE INVENTION

[0038] DETAILED DESCRIPTION OF THE INVENTION For the purposes of explaining the invention, its operating advantages, and objects attained by its practice, the following description will be made by way of example and with reference to preferred embodiments thereof.

[0039] First, the terms used in this application are intended to describe specific embodiments only and are not intended to limit the present invention, and singular expressions can include plural expressions unless the context clearly indicates otherwise. Furthermore, in this application, terms such as "include" or "have" are intended to specify the presence of features, numbers, steps, operations, components, parts, or combinations thereof described in the specification, and should be understood not to preclude the presence or possibility of addition of one or more other features, numbers, steps, operations, components, parts, or combinations thereof.

[0040] When describing the present invention, if it is determined that a detailed description of related known structures or functions may obscure the gist of the present invention, the detailed description thereof will be omitted.

[0041] The present invention provides a technology that allows the heater unit of the high-pressure annealing apparatus to be mounted or dismounted from the high-pressure annealing apparatus by lifting it up and down below the outer chamber while being supported by a jig device.

[0042] Hereinafter, the present invention will be described with reference to examples of the present invention.

[0043] FIG. 1 is a perspective view showing one embodiment of a high-pressure annealing apparatus to which the heater unit detachment system of the present invention is applied, and FIG. 2 is a cross-sectional view showing one embodiment of a high-pressure annealing apparatus to which the heater unit detachment system of the present invention is applied.

[0044] The high pressure annealing apparatus 10 to which the present invention is applied may have a double chamber structure including an inner chamber 50 and an outer chamber 30 .

[0045] The annealing process can be performed in a high-pressure environment in the inner chamber 50. For example, the inner chamber 50 may be made of a non-metallic material, preferably quartz. The material of the inner chamber 50 may be changed as needed.

[0046] The inner chamber 50 may be an integrated chamber that is open at the bottom and has a connected top and side portions. The inner chamber 50 may provide an inner space 51 for performing a heat treatment process on a treatment object. A door 70 may be selectively fastened to the open bottom of the inner chamber 50, and the inner space 51 of the inner chamber 50 may be sealed by fastening the door 70.

[0047] The processing object may be located in the internal space 51 of the internal chamber 50. The processing object may be wafers, which may be stacked in multiple layers on a wafer boat (not shown) and placed on the internal space 51 of the internal chamber 50.

[0048] A first gas may be a heat treatment gas supplied to the inner space 51 of the inner chamber 50. For example, the first gas may be selected from various heat treatment gases such as hydrogen, deuterium, ammonia, oxygen, chlorine, and nitrogen.

[0049] As the first gas is supplied to the internal chamber 50, the internal space 51 of the internal chamber 50 is filled with the first gas, and as a result, the internal space 51 of the internal chamber 50 may rise to a first pressure. Here, the first pressure is a pressure higher than atmospheric pressure and may be selectively adjusted within a range from several atmospheres (atm) to several hundred atmospheres (atm).

[0050] The outer chamber 30 may be provided to surround the inner chamber 50 while being spaced apart from the inner chamber 50 by a certain distance.

[0051] The outer chamber 30 may be made of a metal material, and the material of the outer chamber 30 may be changed as appropriate depending on the situation. The outer chamber 30 may be an integrated chamber that is open at the bottom and has a closed top portion and a connected side portion. The outer chamber 30 may have the shape of an integrated dome or cup in which the top surface and side wall are connected as one unit.

[0052] The outer chamber 30 may provide an outer space 31 that accommodates the inner chamber 50. More specifically, the outer space 31 may be the space excluding the area occupied by the inner chamber 50 from the inner space provided by the outer chamber 30.

[0053] The outer chamber 30 can maintain the outer space 31 at a pressure corresponding to the high pressure of the inner chamber 50, thereby protecting the inner chamber 50. To this end, a second gas may be supplied to the outer space 31 of the outer chamber 30, and the second gas may be a protective gas. For example, the second gas may be selected from various inert gases such as nitrogen.

[0054] As the second gas is supplied to the outer chamber 30, the outer space 31 of the outer chamber 30 is filled with the second gas, and as a result, the outer space 31 of the outer chamber 30 may rise to a second pressure. Here, the second pressure may be adjusted to maintain a set stable pressure range compared to the first pressure. The second pressure may be adjusted to be the same as the first pressure, or to be slightly higher or lower than the first pressure. For example, the stable pressure range may be set in consideration of the material strength of the inner chamber 50 and the heat treatment process profile. Preferably, the second pressure range may be set in consideration of the pressure change between the inner chamber 50 and the outer chamber 30 and the temperature change of the inner chamber 50 that the inner chamber 50 can withstand without damage.

[0055] A heater unit 110 may be disposed between the inner chamber 50 and the outer chamber 30. More specifically, the heater unit 110 may be disposed outside the inner chamber 50 above the outer space 31 of the outer chamber 30.

[0056] The heater unit 110 can increase the temperature of the internal space 51 of the internal chamber 50 .

[0057] The heater unit 110 may include a heating element (not shown) that generates heat, an insulating element (not shown) that prevents heat loss, and a heater body 111 to which the heating element and the insulating element are attached and support them. For example, the heater body 111 may be made of a material that is not deformed by heat and formed to cover at least a portion of the inner chamber 50, and a thermal coil may be attached to the heater body 111 as the heating element. For example, one side of the thermal coil may face the inner chamber 50, and the insulating element may be provided on the heater body 111 to cover the remaining portion except for one side of the thermal coil. The structure in which a thermal coil is used as the heating element in the heater unit 110 is one example, and various methods of generating heat other than a thermal coil may be applied to the heater unit 110.

[0058] The heater unit 110 includes a heater mounting portion, and the heater mounting portion can be mounted to the outer chamber 30 through a heater fastening means.

[0059] For example, the heater mounting portion may include a heater flange 120 that protrudes outward from the lower end of the heater body 111 and extends to contact a portion of the outer chamber 30, and the heater fastening means may include a heater fastening fastener 150 that fixes the heater flange 120 to a portion of the outer chamber 30.

[0060] For example, a heater unit fastening hole 35 for mounting the heater unit 110 may be provided at the lower end of the outer chamber 30, and a heater fastening through hole 130 may be provided in the heater flange 120 corresponding to the heater unit fastening hole 35 of the outer chamber 30.

[0061] Preferably, a plurality of heater unit fastening holes 35 may be provided at the lower end of the outer chamber 30, spaced apart from one another along the periphery, and a plurality of heater fastening through holes 130 may be provided at the heater flange 120, spaced apart from one another along the periphery.

[0062] With the lower end of the outer chamber 30 and the upper surface of the heater flange 120 of the heater unit 110 in contact with each other, the heater fastening fastener 150 may pass through the heater fastening through-hole 130 of the heater flange 120 and be fastened to the heater unit fastening hole 35 of the outer chamber 30. The heater unit 110 may be fixed and attached to the outer chamber 30 through the heater fastening fastener 150.

[0063] In this embodiment, fastening fasteners such as rivets and bolts are used as the heater fastening means. However, this is only one example, and various fastening methods such as clamps can be used as the heater fastening means.

[0064] A sealing member is installed between the lower end of the outer chamber 30 and the heater flange 120 of the heater unit 110 to prevent leakage of the second gas supplied to the outer space 31 of the outer chamber 30.

[0065] The internal chamber 50 may be placed on an internal chamber support plate 60. As an example, a central portion of the internal chamber support plate 60 may be open corresponding to the cross-sectional area of ​​the open lower end of the internal chamber 50.

[0066] For example, a support plate fastening hole 140 may be formed on the lower surface of the heater flange 120 of the heater unit 110, and a support plate fastening through hole 65 may be formed in the inner chamber support plate 60 corresponding to the support plate fastening hole 140.

[0067] Preferably, a plurality of support plate fastening holes 140 may be provided on the lower surface of the heater flange 120, spaced apart from one another along the periphery, and a plurality of support plate fastening through holes 65 may be provided on the inner chamber support plate 60, spaced apart from one another along the periphery.

[0068] With the lower surface of the heater flange 120 and the upper surface of the inner-chamber support plate 60 in contact with each other, the support plate fastening fasteners 61 may pass through the support plate fastening through-holes 65 of the inner-chamber support plate 60 and be fastened to the support plate fastening holes 140 of the heater flange 120. The inner-chamber support plate 60 may be fixed and attached to the heater flange 120 of the heater unit 110 through the support plate fastening fasteners 61.

[0069] A sealing member may be installed between the inner chamber support plate 60 and the heater flange 120 of the heater unit 110, and a sealing member may be installed between the inner chamber 50 and the inner chamber support plate 60, thereby preventing leakage of the second gas supplied to the inner space 51 of the inner chamber 50. In addition, a buffer member may be installed between the heater unit 110 and the inner chamber 50, preventing damage to the inner chamber 50.

[0070] The above-described coupling structure of the inner chamber 50, the heater unit 110, and the outer chamber 30 may be modified as appropriate depending on the situation. For example, the inner chamber support plate 60 that supports the inner chamber 50 may be coupled to the outer chamber 30.

[0071] An object to be treated can be placed on the door 70. The door 70 is inserted into the door insertion space 40 provided at the lower end of the outer chamber 30 while moving up and down, so that the object to be treated can be placed in the inner space 51 of the inner chamber 50 and the inner space 51 of the inner chamber 50 can be sealed.

[0072] The lifting device 200 can raise and lower the door 70 .

[0073] As an example, the lifting device 200 may include a support frame 210, a door support arm 230, a lifting driver 250, and the like.

[0074] The support frame 210 is disposed vertically and can support and guide the vertical movement of the door support arm 230 .

[0075] The door support arm 230 is supported at one side by the support frame 210 and can move up and down along the support frame 210. The door 70 can be placed on the door support arm 230.

[0076] The lift driver 250 may provide power for lifting and lowering the door support arm 230. For example, the support frame 210 may be provided with a belt, chain, etc., the door support arm 230 may be coupled to the belt, chain, etc., and the lift driver 250 may rotate the belt, chain, etc. to lift and lower the door support arm 230. Alternatively, the support frame 210 may be provided with a rail, one side of the door support arm 230 may be coupled to the rail, and the lift driver 250 may provide power for lifting and lowering the door support arm 230 along the rail. In addition, the lift device 200 may include various types of configurations for lifting and lowering the door support arm 230.

[0077] FIG. 3 is a diagram showing an embodiment of a heater unit attaching / detaching system according to the present invention.

[0078] In this embodiment, the heater unit attachment / detachment system 100 is described as being applied to the high-pressure annealing apparatus 10 of Figures 1 and 2, but is not limited thereto, and the heater unit attachment / detachment system 100 can be applied to various high-pressure annealing apparatuses 10 in which the bottom of the outer chamber 30 is open.

[0079] In the embodiments of Figures 1 and 2, the outer chamber 30 is illustrated and described as an integrated chamber in which the bottom is open and the closed top and side portions are connected, but the heater unit attachment / detachment system 100 can also be applied to a case in which the bottom of the outer chamber is open and the top can be selectively opened.

[0080] The heater unit attachment / detachment system 100 can either extract the heater unit 110 from the high-pressure annealing apparatus 10 or attach the heater unit 110 to the high-pressure annealing apparatus 10 .

[0081] The heater unit mounting / removing system 100 may include a jig device 300, a lifting device 200, a controller 500, and the like.

[0082] The jig device 300 is attached to the lifting device 200 and can support the heater unit 110 while being raised and lowered by the lifting device 200. For example, the jig device 300 can detect the placement state of the heater unit 110 while guiding the placement of the heater unit 110.

[0083] The controller 500 controls the lifting device 200 to raise and lower the jig device 300. For example, the controller 500 can receive a placement detection signal of the heater unit 110 from the jig device 300 and determine the placement state of the heater unit 110 on the jig device 300.

[0084] With this configuration, the heater unit mounting / dismounting system 100 can mount / dismount the heater unit 110 below the high-pressure annealing apparatus 10 by supporting the heater unit 110 through the jig device 300 and raising / lowering the jig device 300 using the lifting device 200.

[0085] In this embodiment, the jig device 300 is attached to the upper surface of the door 70 with the door 70 attached to the door support arm 230 of the lifting device 200, but this is only one embodiment, and the jig device 300 may also be attached to the door support arm 230 from which the door 70 has been removed.

[0086] Figure 4 is a diagram showing one embodiment of a jig device of the heater unit attachment / detachment system of the present invention, Figure 5 is a diagram showing the size of one embodiment of the heater support plate and heater unit of the jig device of the present invention, and Figure 6 is a diagram showing one embodiment of the jig device of the present invention attached to a door.

[0087] The jig apparatus 300 may include a heater support plate 310, a jig leg 330, a jig support plate 350, and the like.

[0088] The lower end surface of the heater unit 110 may be placed on the upper surface of the heater support plate 310. For example, the heater flange 120 of the heater unit 110 may be placed on the upper surface of the heater support plate 310.

[0089] The heater support plate 310 may have mounting guide bars 311 and 315 on its upper surface.

[0090] The placement guide bars 311 and 315 guide the lower end surface of the heater unit 110 to be properly placed on the heater support plate 310, and also support the side of the lower end of the heater unit 110 in close contact with the side, thereby preventing the heater unit 110 from coming off.

[0091] The mounting guide bars 311 , 315 may include a first mounting guide bar 311 and a second mounting guide bar 315 .

[0092] The first and second placement guide bars 311 and 315 are spaced apart from each other, and the lower end of the heater unit 110 can be inserted and placed between the first and second placement guide bars 311 and 315. The distance between the first and second placement guide bars 311 and 315 can be adjusted depending on the size of the lower end of the heater unit 110.

[0093] The placement guide bars 311 and 315 may have a predetermined height so as to stably support the heater unit 110 placed on the heater support plate 310 .

[0094] For example, a plurality of mounting guide bars 311 and 315 may be provided on the upper surface of the heater support plate 310 .

[0095] Referring to Figure 5, Figure 5(a) shows the bottom of the high-pressure annealing apparatus, Figure 5(b) shows the top of the heater support plate, and Figure 5(c) shows a cross section of the heater support plate.

[0096] The longitudinal length of the heater support plate 310 may be larger than the diameter of the heater flange 120 of the heater unit 110 and smaller than the diameter of the door insertion space 40 provided at the lower end of the outer chamber 30 .

[0097] For example, the heater support plate 310 may have a plate-like shape, and both ends in the longitudinal direction may be formed in an arc shape corresponding to the cross-sectional shape of the door insertion space 40 .

[0098] Preferably, the heater support plate 310 may have a width and length adjustable so as not to block any of the heater fastening through-holes 130 provided in the heater flange 120 of the heater unit 110 other than the heater fastening through-holes functioning as alignment holes 130a and 130b.

[0099] Mounting guide bars 311 and 315 may be provided on both sides of the upper surface of the heater support plate 310 in the longitudinal direction.

[0100] First mounting guide bars 311a, 311b and second mounting guide bars 315a, 315b may be provided on both longitudinal sides of heater support plate 310. First mounting guide bars 311a, 311b and second mounting guide bars 315a, 315b may be spaced apart by a distance D2, which corresponds to the width D1 of the lower end of heater flange 120. That is, the distance D2 between first mounting guide bars 311a, 311b and second mounting guide bars 315a, 315b may be the same as or slightly greater than the width D1 of the lower end of heater flange 120.

[0101] The spaces between the first placement guide bars 311a and 311b and the second placement guide bars 315a and 315b may be placement spaces 313a and 313b in which the heater flange 120 of the heater unit 110 is placed.

[0102] An alignment means may be provided on the upper surface of the heater support plate 310. The alignment means may include alignment pins 320. For example, alignment pins 320a and 320b may be provided between the first mounting guide bars 311a and 311b and the second mounting guide bars 315a and 315b on both sides of the heater support plate 310 in the longitudinal direction.

[0103] When the heater unit 110 is placed on the heater support plate 310, the alignment pins 320a and 320b are inserted into and fastened to the alignment holes 130a and 130b formed in the heater flange 120 of the heater unit 110, thereby guiding the heater unit 110 to an accurate placement position on the heater support plate 310.

[0104] For example, the heater fastening through-holes 130 formed in the heater flange 120 may function as alignment holes. Alternatively, the heater flange 120 may be provided with alignment holes separate from the heater fastening through-holes 130.

[0105] The alignment means may include a light emitter. As an example, a light emitter (not shown) may be provided on the alignment pin 320. The light emitter may emit light vertically upward. Preferably, the light emitter may emit light having a color that allows the light path to be visually recognized.

[0106] The mounting position of the jig device 300 can be aligned by mounting the jig device 300 so that the light emitted from the light emitter is aligned with the alignment holes 130a and 130b provided on the heater flange 120 of the heater unit 110.

[0107] The heater support plate 310 may be provided with a heater unit detection sensor 370. The heater unit detection sensor 370 can detect whether the heater unit 110 is placed on the heater support plate 310.

[0108] For example, the heater unit detecting sensors 370a and 370b may be provided between the first mounting guide bars 311a and 311b and the second mounting guide bars 315a and 315b on both sides of the heater support plate 310 in the longitudinal direction, respectively.

[0109] For example, the heater unit detecting sensors 370a and 370b may include a pressure sensor that measures the degree of contact pressure and an optical sensor that emits light and receives reflected light, and may detect the position of the heater unit 110 placed on the heater support plate 310 relative to the heater flange 120. The heater unit detecting sensors 370a and 370b may detect the distance between the upper surface of the heater support plate 310 and the heater flange 120 of the heater unit 110 or the degree of pressure of the heater flange 120 against the heater support plate 310.

[0110] The controller 500 can determine whether the heater unit 110 is placed on the heater support plate 310 based on the detection signals of the heater unit detection sensors 370a, 370b. If the comparison result of the detection signals shows that the separation distances are the same or similar within an error range, or the pressure levels are the same or similar within an error range, the controller 500 can determine that the heater unit 110 is properly placed on the heater support plate 310. On the other hand, if the comparison result of the detection signals shows that the separation distances or pressure levels differ beyond the error range, the controller 500 can determine that the heater unit 110 is improperly placed on the heater support plate 310.

[0111] Additionally, the controller 500 can provide information on the placement status of the heater unit 110 .

[0112] The zig leg 330 is connected to the lower surface of the heater support plate 310 to support the heater support plate 310 .

[0113] A plurality of jig legs 330 may be provided to distribute the load of the heater support plate 310 and stably support it.

[0114] For example, two ziglegs 330 may be provided on each of the longitudinal sides of the heater support plate 310. Of course, the number and positions of the ziglegs 330 may be changed depending on the situation.

[0115] The height of the zigleg 330 may be adjusted. For example, the zigleg 330 may include a first zigleg 331 and a second zigleg 335. The height of the zigleg 330 may be adjusted by selectively connecting the first zigleg 331 and the second zigleg 335. For example, the height of the zigleg 330 may be adjusted depending on the size of the required workspace.

[0116] An upper side of the first jig leg 331 may be connected to a first upper fastening bar 333 , and a lower side of the first jig leg 331 may be connected to a first lower fastening bar 350 .

[0117] For example, a plurality of first jig legs 331 may be connected to the first upper fastening bar 333 and the first lower fastening bar 350 at intervals.

[0118] An upper side of the second jig leg 335 may be connected to a second upper fastening bar 339 , and a lower side of the second jig leg 335 may be connected to a second lower fastening bar 337 .

[0119] For example, a plurality of second jig legs 335 may be connected to the second upper fastening bar 339 and the second lower fastening bar 337 at intervals.

[0120] When the first gig leg 331 and the second gig leg 335 are combined, the first upper fastening bar 333 and the second lower fastening bar 337 may be connected to each other. The second upper fastening bar 339 of the second gig leg 335 may be connected to the lower surface of the heater support plate 310. The first lower fastening bar 350 of the first gig leg 331 may function as a jig support plate 350. If necessary, a separate jig support plate may be provided, and the first lower fastening bar 350 of the first gig leg 331 may be connected to the jig support plate.

[0121] When only the first zig leg 331 is provided without the second zig leg 335 , the first upper fastening bar 333 may be connected to the lower surface of the heater support plate 310 .

[0122] 6, the jig apparatus 300 can be attached to the door 70. The jig support plate 350 of the jig apparatus 300 can be attached to the top surface of the door 70.

[0123] For example, a jig mounting groove 75 may be provided on the top surface of the door 70, and the jig support plate 350 may be inserted into the jig mounting groove 75.

[0124] As another example, a jig mounting groove (not shown) may be provided in the door support arm 230, and the jig support plate 350 of the jig device 300 may be inserted into the jig mounting groove of the door support arm 230 from which the door 70 has been removed.

[0125] In this embodiment, two jig support plates 350 are illustrated corresponding to the jig legs 330 connected to both sides of the heater support plate 310, but the number and shape of the jig support plates 350 can be adjusted depending on the number and positions of the jig legs 330.

[0126] The jig device 300 can be attached to the upper surface of the door 70 or attached to the door support arm 230 from which the door 70 has been removed, and the jig device 300 can be raised and lowered by the lifting device 200.

[0127] The jig device according to the present invention can be modified in various ways. As an example of a modified jig device, FIG. 7 shows another embodiment of the jig device for the heater unit attachment / detachment system according to the present invention, and FIG. 8 shows the size of another embodiment of the heater support plate and heater unit of the jig device according to the present invention.

[0128] In describing the embodiment of FIGS. 7 and 8, the description of the same parts as those of the jig device embodiment described above will be omitted or will be briefly described.

[0129] The jig apparatus 400 may include a heater support plate 410, a jig leg 430, a jig support plate 450, and the like.

[0130] The heater support plate 410 may be formed in a shape corresponding to the shape of the lower end surface of the heater unit 110 .

[0131] As an example, the heater support plate 410 may be in the form of a disk, and the diameter of the heater support plate 410 may be larger than the diameter of the heater flange 120 of the heater unit 110 and smaller than the diameter of the door insertion space 40 provided at the lower end of the outer chamber 30.

[0132] The heater support plate 410 may have a fastening working space 420 that is recessed and opened inward at portions corresponding to the plurality of heater fastening through-holes 130 formed in the heater flange 120 of the heater unit 110. When the heater unit 110 is placed on the jig device 400 through the fastening working space 420, the heater fastening fasteners 150 fastened in the heater fastening through-holes 130 may be exposed without being hidden by the heater support plate 410.

[0133] A space may be formed corresponding to the shape of the heater fastening fastener 150, and preferably, the space may be formed at a level that allows easy fastening and unfastening of the heater fastening fastener 150.

[0134] A plurality of mounting guide bars 411, 415 may be provided on the upper surface of the heater support plate 410, spaced apart from each other along the circumference.

[0135] The mounting guide bars 411 , 415 may include a first mounting guide bar 411 and a second mounting guide bar 415 .

[0136] The first placement guide bar 411 and the second placement guide bar 415 are spaced apart from each other, and the lower end of the heater unit 110 can be inserted and placed between the first placement guide bar 411 and the second placement guide bar 415. The distance between the first placement guide bar 411 and the second placement guide bar 415 can be adjusted depending on the size of the lower end of the heater unit 110.

[0137] The zig leg 430 may be connected between the heater support plate 410 and the jig support plate 450. One side of the zig leg 430 may be connected to the lower surface of the heater support plate 410, and the other side may be connected to the upper surface of the jig support plate 450.

[0138] A plurality of the jig legs 430 may be provided at intervals to distribute and support the load of the heater support plate 410 .

[0139] The jig support plate 450 may be attached to the door 70 or the door support arm 230 of the lifting device 200 .

[0140] For example, the jig support plate 450 may be formed in a circular ring shape to which the other sides of the plurality of jig legs 430 are all connected. The jig support plate 450 may be inserted into a jig mounting groove 75 provided on the top surface of the door 70 or a jig mounting groove provided on the door support arm 230.

[0141] In this way, the jig device can be changed into various shapes that can stably support the heater unit while bearing the load of the heater unit.

[0142] Hereinafter, the operation of the heater unit attachment / detachment system according to the present invention will be described with reference to an embodiment.

[0143] 9 to 11 show an embodiment of the operation of separating a heater unit from a high pressure annealing apparatus using the heater unit attachment / detachment system according to the present invention.

[0144] The embodiments of Figures 9 to 11 are cases where the jig device of Figures 4 to 6 is applied, and even when the jig device of Figures 7 and 8 is applied as another embodiment, the operation can be inferred from this embodiment, so a description thereof will be omitted.

[0145] This embodiment is based on the premise that the inner chamber 50 is removed from the high-pressure annealing apparatus 10.

[0146] FIG. 9 shows an example in which the jig device 300 is mounted on the door 70 and raised by the lifting device 200.

[0147] The jig device 300 can be mounted on the door 70. As described above, the jig support plate 350 can be inserted into the jig mounting groove 75 of the door 70, and the jig device 300 can be mounted.

[0148] The mounting position of the jig device 300 on the door 70 can be adjusted so that the alignment pin 320 of the jig device 300 corresponds to the heater fastening fastener 150 fastened in the heater fastening through-hole 130 that functions as an alignment hole.

[0149] As an example, the mounting position of the jig device 300 can be adjusted so that the light emitted from the light emitter (not shown) of the jig alignment means provided on the alignment pin 320 coincides with the heater fastening through hole 130, which functions as an alignment hole.

[0150] In this manner, when the jig device 300 is adjusted and mounted on the door 70, the heater fastening fasteners 150 fastened to the heater fastening through-holes 130 functioning as alignment holes can be removed. At this time, the heater fastening fasteners 150 fastened to the heater fastening through-holes 130 other than the heater fastening fasteners 150 fastened to the heater fastening through-holes 130 functioning as alignment holes remain fastened.

[0151] By lifting the door 70 using the lifting device 200 , the jig device 300 attached to the door 70 can be lifted toward the door insertion space 40 provided at the lower end of the outer chamber 30 .

[0152] For example, while the jig device 300 is being raised, the controller 500 may receive sensing signals from the heater unit sensing sensors 370 and determine the stability of the operating state based on the received sensing signals.

[0153] As an example, the plurality of heater unit detection sensors 370 emit light toward the lower surface of the heater unit 110 and receive reflected light, and the controller 500 can determine whether the jig device 300 is normally rising toward the heater unit 110 based on the comparison of the detection signals of the plurality of heater unit detection sensors 370.

[0154] If the comparison of the plurality of sensing signals indicates that the separation distances are the same or similar within an error range, the controller 500 can determine that the jig device 300 is normally rising toward the heater unit 110 .

[0155] If the difference in the separation distance exceeds the error range as a result of comparing the plurality of sensing signals, the controller 500 can determine that the jig device 300 is abnormally rising toward the heater unit 110 .

[0156] - Additionally, the controller 500 can provide information on operating conditions.

[0157] FIG. 10 shows an example in which the jig device 300 is raised and the heater unit 110 is placed on the heater support plate 310 of the jig device 300.

[0158] The jig device 300 is elevated by the lifting device 200, and the heater support plate 310 of the jig device 300 may be inserted into the door insertion space 40 provided at the lower end of the outer chamber 30. The heater flange 120 of the heater unit 110 may be placed on the upper surface of the heater support plate 310.

[0159] The heater flange 120 of the heater unit 110 may be placed in the space between the first placement guide bar 311 and the second placement guide bar 315 provided on the upper surface of the heater support plate 310. The heater flange 120 of the heater unit 110 may be guided by the first placement guide bar 311 and the second placement guide bar 315, and the upper surface of the heater support plate 310 may come into contact with the lower surface of the heater unit 110.

[0160] The alignment pins 320 of the jig device 300 are inserted and fastened to the alignment holes 130 formed in the heater flange 120 of the heater unit 110, thereby ensuring the accuracy of the mounting position of the heater unit 110 on the jig device 300.

[0161] For example, the placement state of the heater unit 110 on the heater support plate 310 is detected through a plurality of heater unit detection sensors 370 provided in the jig device 300, and the controller 500 can determine the placement state based on this.

[0162] If the comparison result of the plurality of sensing signals shows that the separation distances are the same or similar within an error range, or the pressure levels are the same or similar within an error range, the controller 500 may determine that the heater unit 110 is normally placed on the jig device 300. If the comparison result of the plurality of sensing signals shows that the separation distances or pressure levels differ beyond an error range, the controller 500 may determine that the heater unit 110 is abnormally placed on the jig device 300.

[0163] Additionally, the controller 500 can provide information on the placement status of the heater unit 110 .

[0164] As shown in FIG. 10, with the heater unit 110 placed and supported on the jig device 300, the remaining heater fastening fasteners 150 fastened in the heater fastening through-holes 130 may be removed.

[0165] In particular, as described above, the heater support plate 310 has a width and length adjusted so that heater fastening through-holes 130 formed in the heater flange 120 of the heater unit 110 are not blocked except for those that function as alignment holes 130a and 130b. The heater support plate 310 is spaced a sufficient distance from the door 70 via the jig leg 330, so that the heater fastening fasteners 150 fastened to the heater fastening through-holes 130 of the heater unit 110 can be easily removed.

[0166] When all the heater fastening fasteners 150 fastened so that the heater unit 110 can be supported by the outer chamber 30 are removed, the heater unit 110 is completely placed on the jig device 300 and supported.

[0167] FIG. 11 shows an example in which the jig device 300 is lowered and the heater unit 110 placed on the jig device 300 is pulled out from the high-pressure annealing device 10.

[0168] With the heater unit 110 fully supported by the jig device 300, the door 70 is lowered using the lifting device 200, and the heater unit 110 placed on the jig device 300 can be pulled downward from the door insertion space 40 provided at the lower end of the outer chamber 30.

[0169] For example, while the jig device 300 is being lowered, the controller 500 receives sensing signals from the heater unit sensing sensors 370 and can determine the stability of the operating state based on the received sensing signals.

[0170] As an example, the plurality of heater unit detection sensors 370 detect the degree of pressure applied by the heater unit 110, and the controller 500 can determine whether the jig device 300 on which the heater unit 110 is placed is descending normally based on the comparison of the detection signals of the plurality of heater unit detection sensors 370.

[0171] If the comparison of the plurality of sensing signals reveals that the pressure levels are the same or similar within an error range, the controller 500 can determine that the heater unit 110 is properly placed on the jig device 300 and is being lowered.

[0172] If the pressure levels differ beyond the error range as a result of comparing the plurality of sensing signals, the controller 500 can determine that the heater unit 110 is abnormally placed on the jig device 300 and is being lowered.

[0173] Additionally, the controller 500 can provide information on operating conditions.

[0174] The lifting device 200 can lower the jig device 300 on which the heater unit 110 is placed until the entire heater unit 110 is completely pulled out below the outer chamber 30.

[0175] According to the present invention, the heater unit of the high-pressure annealing apparatus can be supported by a jig device and raised and lowered below the outer chamber, and the heater unit can be attached to or detached from the high-pressure annealing apparatus, which can greatly improve the stability, speed, and ease of maintenance and repair work on the high-pressure annealing apparatus.

[0176] In particular, in the present invention, the heater unit is pulled out below the outer chamber using an elevator that raises and lowers the door, so no additional space is required to pull out the heater unit, and the work space required for maintenance and repair of the high-pressure annealing apparatus can be significantly reduced.

[0177] Furthermore, in the present invention, the heater unit is raised and lowered with the jig device attached to the elevator device that raises and lowers the door, so no separate crane device or the like is required to raise and lower the heater unit.

[0178] The above description merely exemplifies the technical concept of the present invention, and various modifications and variations may be made by those skilled in the art without departing from the essential characteristics of the present invention. Therefore, the embodiments described herein are for illustrative purposes only, and are not intended to limit the technical concept of the present invention. The scope of protection of the present invention should be interpreted in accordance with the following claims, and all technical concepts within the scope equivalent thereto should be construed as being within the scope of the present invention. [Explanation of symbols]

[0179] 10 High-pressure annealing equipment 30 Outer Chamber 50 Inner Chamber 60 Inner chamber support plate 70 doors 100 Heater unit detachable system 110 Heater Unit 120 heater flange 200 Lifting device 230 Door support arm 300, 400 jig device 310, 410 heater support plate 311, 411 First mounting guide bar 315, 415 Second mounting guide bar 320 alignment pin 330, 430 Zigglegg 350, 450 jig support plate 370 Heater unit detection sensor 500 Controller

Claims

1. a heater support plate on whose upper surface a heater unit is placed and which supports the heater unit; and a jig support plate that is supported in contact with a door of the high-pressure annealing apparatus or a door support arm of the lifting apparatus; A jig device for supporting attachment and detachment of a heater unit, wherein the heater unit is placed on the jig device and is raised and lowered by the lifting device.

2. 10. The jig device for supporting installation and removal of a heater unit according to claim 1, further comprising a plurality of installation guide bars disposed to protrude upward from an upper surface of the heater support plate, to guide installation of the heater unit on the heater support plate, and to support the heater unit in close contact with a side surface of a lower end of the heater unit, thereby preventing the heater unit from being removed.

3. The mounting guide bar is a first mounting guide bar and a second mounting guide bar; 3. The jig device for supporting installation and removal of a heater unit according to claim 2, wherein a distance between the first and second placement guide bars is adjusted so that a lower end of the heater unit is inserted and placed between the first and second placement guide bars.

4. The heater support plate is 2. The jig device for supporting installation and removal of a heater unit according to claim 1, wherein the jig device is plate-shaped and the length in the longitudinal direction is greater than the diameter of the lower end surface of the heater unit and less than the diameter of a door insertion space provided at the lower end of the outer chamber.

5. The heater support plate is 5. The jig device for supporting attachment and detachment of a heater unit according to claim 4, wherein the widths of the heater fastening through holes, excluding the heater fastening through holes that function as alignment holes, among the heater fastening through holes into which the heater fastening fasteners for fixing and mounting the heater unit to the outer chamber are fastened, are adjusted so as to be open and not blocked.

6. The heater support plate is 2. The jig device for supporting installation and removal of a heater unit according to claim 1, wherein the jig device is in the form of a disk, and the diameter of the jig device is larger than the diameter of the heater unit and smaller than the diameter of a door insertion space provided at the lower end of the outer chamber.

7. The heater support plate has:

7. The jig device for supporting installation and removal of a heater unit according to claim 6, wherein a plurality of fastening work spaces are provided, the fastening work spaces being formed so that portions corresponding to a plurality of heater fastening through-holes into which a plurality of heater fastening fasteners for fixing and mounting the heater unit to the outer chamber are fastened are recessed inward and opened.

8. 10. The jig device for supporting installation and removal of a heater unit according to claim 1, further comprising an alignment pin protruding upward from an upper surface of the heater support plate and inserted into an alignment hole formed in the heater unit.

9. 10. The jig device for supporting installation and removal of a heater unit according to claim 1, further comprising a plurality of heater unit detection sensors disposed at a plurality of positions spaced apart from each other on the heater support plate to measure a distance between the heater unit and the heater support plate or a pressure applied by the heater unit.

10. a plurality of jig legs connecting the heater support plate and the jig support plate; 2. The jig device according to claim 1, wherein the height of the jig leg is adjustable according to the size of a required working space.

11. The jig device of claim 1 on which a heater unit of a high-pressure annealing device is mounted; a lifting device that lifts and lowers the jig device, The heater unit attachment / detachment system supports the heater unit by lifting and lowering the heater unit below an outer chamber of the high-pressure annealing apparatus while supporting the heater unit with the jig device, thereby supporting attachment or detachment of the heater unit.

12. The lifting device is The heater unit attachment / detachment system according to claim 11, characterized in that the door of the high-pressure annealing apparatus is raised and lowered.

13. The lifting device is a door support arm on which the door is placed, the door support arm being raised and lowered; The jig device is The heater unit attachment / detachment system according to claim 12, wherein the door is attached to the door support arm from which the door has been removed.

14. The jig device is a plurality of heater unit detecting sensors disposed at a plurality of positions spaced apart from each other on a heater support plate on which the heater units are mounted, the sensors measuring a distance between the heater units and the heater support plate or a pressure applied by the heater units; The heater unit mounting / detaching system according to claim 11, further comprising a controller that determines an operating state of a jig device or a placement state of the heater unit based on detection signals from the plurality of heater unit detection sensors.

15. an inner chamber that provides an inner space for performing a heat treatment process on a treatment object, the inner space being adjusted to a first pressure; an outer chamber that is formed integrally with an open lower portion and a closed upper portion and a side portion connected to provide an outer space that accommodates the inner chamber while being spaced apart from the inner chamber, and the outer space is adjusted to a second pressure; and a heater unit selectively attached to the outer chamber and removable downward from the open outer chamber, the heater unit comprising a heater mounting part disposed between the inner chamber and the outer chamber and fastened to the outer chamber, the heater mounting part being selectively fastened to the outer chamber through a heater fastening means.

16. The heater mounting portion of the heater unit is The heater body includes a heater flange protruding outward from the lower end thereof, 16. The high-pressure annealing apparatus according to claim 15, wherein the heater unit is selectively attached to the outer chamber by passing a heater fastening fastener of the heater fastening means through a lower surface to an upper surface of the heater flange and fastening it to the outer chamber while the upper surface of the heater flange is in contact with a portion of the outer chamber.

Images