Method, system, and medium relating to system drift verification

Abstract

To provide a method, a system, and a medium relating to system drift verification.SOLUTION: A method includes performing a first measurement using one or more modified measurement parameters to generate a first measurement result of the modified measurement parameters, performing a second measurement using the one or more modified measurement parameters in response to the measurement using the modified measurement parameters to generate a second measurement result of the modified measurement parameters, and comparing the second measurement result to the first measurement result, and the modified measurement parameters are different from the original measurement parameters. The comparison of the first measurement result to the second measurement result is used to verify system drift.SELECTED DRAWING: Figure 2

Description

[Technical Field]

[0001] The present invention relates to testing techniques, and more particularly to methods, systems, and media related to system drift verification. [Background technology]

[0002] A network analyzer is a necessary instrument for characterizing the behavior of electronic or semiconductor devices and elements in radio frequency (RF), microwave, or other fields. The analyzer measures S-parameters, which describe how a device under test (DUT) (i.e., the aforementioned device or element) reflects and transmits signals. To ensure measurement accuracy, the analyzer must undergo a calibration process with an error network. Once calibration is complete, the user can measure the device under test. However, after a certain period of measurement, failed measurement results may appear. There are many causes for failed measurement results, such as poor contact, equipment damage, operator error, or system drift.

[0003] In many cases, failed measurement results are usually likely to be caused by "system drift," so customers always want to check for "system drift" from the beginning. However, traditional drift verification techniques can be time-consuming, requiring periodic repeated measurements and system drift correction to be performed on the measurement data. A more efficient and automated drift verification method is needed, minimizing time and effort while maintaining measurement accuracy. Summary of the Invention [Problem to be solved by the invention]

[0004] The present invention has been made to solve the above-mentioned problems, and provides a method, a system, and a medium related to system drift verification. [Means for solving the problem]

[0005] According to one or more embodiments of the present disclosure, a method for verifying system drift in a probe system is implemented by a controller coupled to a signal generating and analyzing assembly. The signal generating and analyzing assembly is coupled to a device under test (DUT) by the probe assembly. The method includes performing a first measurement using at least one modified measurement parameter to generate a first measurement result for the at least one modified measurement parameter; performing a second measurement using the at least one modified measurement parameter in response to the measurement using the at least one modified measurement parameter to generate a second measurement result for the at least one modified measurement parameter; and comparing the second measurement result to the first measurement result. The at least one modified measurement parameter differs from at least one original measurement parameter, and the at least one original measurement parameter is pre-configured in the signal generating and analyzing assembly. The comparison result between the first measurement result and the second measurement result is used to verify system drift.

[0006] According to one or more embodiments of the present disclosure, a method for operating a probe system is applied to a controller connected to a signal generating and analyzing assembly. The signal generating and analyzing assembly is connected to a device under test (DUT) by the probe assembly. The method includes accepting a selection operation, displaying a comparison result between a first measurement result and a second measurement result, and verifying the comparison result by providing a set boundary. A first measurement is performed using at least one modified measurement parameter, and the selection operation is used to replace at least one original measurement parameter with at least one modified measurement parameter, where the at least one modified measurement parameter differs from the at least one original measurement parameter. The at least one original measurement parameter is preset in the signal generating and analyzing assembly. A first measurement result is generated in response to the first measurement of the at least one modified measurement parameter, and a second measurement result is generated in response to the second measurement of the at least one modified measurement parameter, and the comparison result between the first measurement result and the second measurement result is used to verify system drift. The set boundary is displayed on a display.

[0007] According to one or more embodiments of the present disclosure, there is provided a probe system configured to measure a device under test (DUT) on a wafer. The probe system is capable of performing system drift verification. The probe system includes a chuck, a probe assembly, a signal generation and analysis assembly, and a controller. The chuck defines a support surface configured to support a wafer including the DUT. The probe assembly defines probe tips and is configured to physically contact a surface of the DUT. The signal generation and analysis assembly is configured to at least one of transmit a measurement signal to the DUT and receive a result signal from the DUT. The controller is connected to the signal generation and analysis assembly and is programmed to execute the method described above.

[0008] According to one or more embodiments of the present disclosure, a non-transitory computer-readable storage medium includes computer-executable instructions that, when executed, direct the probe system to perform the above-described method.

[0009] In order to make the above-mentioned features and advantages of the present invention more clearly understandable, the following detailed description will be given with reference to the accompanying drawings, in which: [Brief explanation of the drawings]

[0010] [Figure 1] FIG. 1 is a schematic diagram illustrating a probe system according to an embodiment of the present disclosure. [Figure 2] 1 is a flowchart illustrating a system drift verification method according to an embodiment of the present disclosure. [Figure 3] FIG. 2 is a schematic diagram illustrating measurement parameters according to an embodiment of the present disclosure. [Figure 4] FIG. 2 is a schematic diagram illustrating measurement parameters according to an embodiment of the present disclosure. [Figure 5] FIG. 2 is a schematic diagram illustrating measurement parameters according to an embodiment of the present disclosure. [Figure 6] FIG. 10 is a schematic diagram illustrating a movement operation according to an embodiment of the present disclosure. [Figure 7] 1 is a flowchart illustrating an operation method according to an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE INVENTION

[0011] Reference will now be made in detail to the presently preferred embodiments of the present disclosure, which are illustrated in the drawings and described below. Wherever possible, the same reference numbers are used in the drawings and the description to refer to the same or like parts.

[0012] 1 is a schematic diagram illustrating a probe system 10 according to one embodiment of the present disclosure. As shown in FIG. 1, the probe system 10 includes (but is not limited to) a probe assembly 20, a chuck 30, a positioning assembly 50, a controller 60, a signal generation and analysis assembly 70, and an optical imaging device 80.

[0013] The probe assembly 20 includes, but is not limited to, a probe 22. The probe 22 has one or more probe tips 24 and is used to probe a device under test (DUT) 44. In one embodiment, the DUT 44 is a semiconductor device being tested, such as a wafer, an integrated circuit (IC), or a printed circuit board (PCB). The semiconductor device being tested includes an unpackaged semiconductor device having one or more pads 48 configured to be mechanically and electrically contacted by the probe tip 24. In one embodiment, the DUT 44 may be a calibration standard (circuit), another circuit, element, or device. In one embodiment, the probe tip 24 is configured to physically contact the surface of the DUT 44.

[0014] The positioning assembly 50 may be a robotic arm, a height adjustable platform, a slide rail, a turntable, a screw, or a combination of various mechanical components. The positioning assembly 50 may drive a connecting element (e.g., the probe assembly 20) mounted thereon to raise, lower, move, or rotate the probe 22. In one embodiment, the positioning assembly 50 is electrically driven by the controller 60. For example, the controller 60 may send commands, and the positioning assembly 50 may be driven by the commands to raise, lower, move, or rotate the probe assembly 20 or the probe 22.

[0015] The chuck 30 defines a support surface 32, and a substrate 40 having a device under test 44 formed thereon can be placed directly on the chuck 30. In one embodiment, the support surface of the chuck 30 is configured to support a wafer including the device under test 44.

[0016] The controller 60 (e.g., having processing circuitry) may be a hardware device or circuitry, such as a computer, workstation, tablet, smartphone, server, wearable device, smart assistant, central processing unit (CPU), microcontroller, programmable controller, application-specific integrated circuit (ASIC), chip, or other similar component or combination of components. The controller 60 implements the methods of the embodiments of the present disclosure by retrieving and executing one or more program codes or computer-executable instructions from a memory (not shown).

[0017] In one embodiment, the probe assembly 20 is used to establish a connection with the controller 60 and communicate test information.

[0018] In one embodiment, the storage device includes a volatile or non-volatile computer-readable storage medium. The storage device may be removable, non-removable, or a combination of both. Exemplary storage devices include solid-state storage devices, hard drives, disk drives, etc. The controller 60 implements the methods of the embodiments of the present disclosure by retrieving and executing one or more program codes or computer-executable instructions from the storage device.

[0019] The signal generating and analyzing assembly 70 is connected to the probe assemblies 20 and the controller 60. The signal generating and analyzing assembly 70 may be a vector network analyzer (VNA) or other instrument for verifying other parameters, including scattering parameters (S-parameters), admittance parameters (Y-parameters), mixing parameters (h-parameters / g-parameters), transmission parameters (ABCD-parameters), impedance parameters (Z-parameters), scattering-transmission parameters (T-parameters), etc. The signal generating and analyzing assembly 70 is connected to the device under test 44 via one or more probe assemblies 20 by cables or connectors. In one embodiment, the signal generating and analyzing assembly 70 is configured to transmit test signals and receive measurement signals via one or more probes 22.

[0020] In one embodiment, the controller 60 sends one or more instructions or commands to the signal generating and analyzing assembly 70. These instructions or commands relate to driving or triggering one or more functions of the signal generating and analyzing assembly 70 and / or sending one or more parameters to configure the signal generating and analyzing assembly 70. In one embodiment, these instructions or commands are implemented by executing corresponding program code or computer readable instructions.

[0021] The optical imaging device 80 may be an optical detection device. The optical imaging device 80 is configured to collect optical images of one or more areas of the probe system 10. In one embodiment, the optical imaging device 80 is configured to detect defects on the device under test 44. The optical imaging device 80 may use a variety of optical techniques to identify various defects that may affect the functionality and performance of the device under test 44.

[0022] The circuitry can also be configured to form a complete system with the device under test 44 to evaluate the device under test 44. For example, if the device under test 44 is a microprocessor, the probe system 10 can include the support circuitry of a personal computer motherboard. When powered on, the device under test 44 experiences an electrical environment that resembles its end-use environment. This allows system drift testing to be performed on unpackaged DUT devices. Using a probe system with such programmable patterns in a wafer production test environment enables self-testing.

[0023] To facilitate understanding of the operation process of the embodiments of the present disclosure, several examples are provided below to describe the use flow of the probe system 10 in the embodiments of the present disclosure. Below, the methods described in the embodiments of the present disclosure are described together with each device, element, and module of the probe system 10. Each process of the method can be adjusted according to the actual implementation scenario, and the present disclosure is not limited thereto.

[0024] FIG. 2 is a flowchart illustrating a system drift verification method according to one embodiment of the present disclosure. As shown in FIG. 2, the controller 60 causes the signal generation and analysis assembly 70 to perform a first measurement using at least one corrected measurement parameter via the probe assembly 20, generating a first measurement result of the at least one corrected measurement parameter (step S210). Specifically, the probe assembly 20 measures the corrected measurement parameter by contacting the device under test. Alternatively, the measurement of the corrected measurement parameter can be performed over-the-air (OTA). The measurement in step S210 is a baseline measurement and is used as a reference or gold sample for future or subsequent measurements. The type of corrected measurement parameter includes any one or combination of a frequency range, a start frequency of the frequency range, a stop frequency of the frequency range, a frequency point, the number of frequency points, and whether drift correction is enabled or disabled. The frequency point is located within the frequency range. That is, the frequency of the frequency point is greater than or equal to the start frequency and less than or equal to the stop frequency. The first measurement of the corrected measurement parameters may be, for example, one or more S-parameters. In one embodiment, the first measurement may be stored as a drift reference data set. The drift reference data set may further include the corrected measurement parameters.

[0025] However, at least one modified measurement parameter is different from at least one original measurement parameter, and the one or more original measurement parameters are pre-configured in the signal generating and analyzing assembly 70. That is, the original measurement parameters are parameters that are preset in the signal generating and analyzing assembly 70.

[0026] In one embodiment, the controller 60 can perform measurements using one or more original measurement parameters during a calibration process of the signal generation and analysis assembly 70. The calibration process is used to eliminate errors in the vector network analyzer, cables, connectors, and / or adapters. This ensures that measurements using the original measurement parameters are error-free. That is, after the calibration process, the original measurement parameters are preset in the signal generation and analysis assembly 70. During the calibration process, the device under test 44 may be one or more calibration standards (circuits). Typical calibration kits include short, open, load, and through. The calibration method may be SOLT (short-open-load-through) or TRL (through-reflect-line). The controller 60 or the signal generation and analysis assembly 70 can detect the completion of the calibration process and perform measurements using one or more modified measurement parameters after the calibration process is completed. That is, the one or more measurement parameters used for the measurement in step S210 are different from the one or more measurement parameters set in the signal generation and analysis assembly 70 after the calibration process, which is a process that precedes the measurement in step S210.

[0027] As shown in FIG. 2 , the controller 60 causes the signal generation and analysis assembly 70 to perform a second measurement via the probe assembly 20 using at least one modified measurement parameter, and generates a second measurement result of the at least one modified measurement parameter in response to the second measurement of the at least one modified measurement parameter (step S220). Specifically, the probe assembly 20 can contact the same device under test as the device under test used in the measurement of step S210 when the same modified measurement parameters were used. Alternatively, the measurement using the same modified measurement parameters can be performed over-the-air (OTA), similar to the measurement of step S210. After step S210, system drift may exist, and the same modified measurement parameters are used for drift verification. The second measurement result of the modified measurement parameters may be, for example, one or more S-parameters. In one embodiment, the second measurement result can be stored as a drift dataset. The drift dataset can further include the modified measurement parameters.

[0028] In a first embodiment, the modified measurement parameters include disabling correction for system drift verification, while the original measurement parameters include enabling correction for system drift verification. Performance may change due to temperature changes, component aging, mechanical interference, and the like. These performance changes cause measurement drift (also known as system drift or drift) and affect the accuracy and reliability of measurements. The signal generation and analysis assembly 70 provides a correction function for the drift. The controller 60 calculates a mathematical correction for the measurement data of the signal generation and analysis assembly 70 and generates error terms or compensation data used for drift correction. The correction function corrects the measurement data using the error terms or compensation data to obtain correction data corresponding to the measurement data. Enabling drift correction means that the correction function of the signal generation and analysis assembly 70 is applied, activated, or triggered when drift is detected. Disabling drift correction, on the other hand, means that the correction function of the signal generation and analysis assembly 70 is terminated, disabled, prohibited, or blocked, and is not applied, activated, or triggered when drift is detected.

[0029] Except for disabling drift correction, the values ​​of other types of measurement parameters used in steps S210 and S220 may be the same as the values ​​of other types of original measurement parameters. For example, FIG. 3 is a schematic diagram illustrating measurement parameters according to one embodiment of the present disclosure. As shown in FIG. 3, the frequency range from the start frequency to the stop frequency used in steps S210 and S220 is the same as the frequency range from the start frequency to the stop frequency used in the original measurement parameters. The frequency points and the number of frequency points (e.g., N is a positive integer) used in steps S210 and S220 are the same as the frequency points and the number of frequency points (e.g., N is a positive integer) used in the original measurement parameters. However, because system drift verification correction is disabled, the number of sweeps required is reduced by a predetermined number compared to when system drift verification correction is enabled. For example, the signal generation and analysis assembly 70 can apply a two-port error correction algorithm even to a single-port data set. When a user just wants to measure S11 after performing two-port calibration, the signal generation and analysis assembly 70 needs to measure all the original S-parameters to complete one calibrated S11. This is how the correction function works, and all four S-parameters need to be measured even if the user only requests S11. Therefore, applying the system drift verification correction disable can shorten the measurement time of steps S210 and S220 by reducing the number of measurement sweeps compared to enabling the system drift verification correction.

[0030] In a second embodiment, the modified measurement parameters include one or more frequency points used in the measurement, and the number of frequency points in the modified measurement parameters is less than the number of frequency points in the original measurement parameters. For example, FIG. 4 is a schematic diagram illustrating measurement parameters according to one embodiment of the present disclosure. As shown in FIG. 4, the number of frequency points used in steps S210 and S220 (e.g., X is a positive integer less than N, and N is a positive integer) is less than the number of frequency points used in the original measurement parameters (e.g., N is a positive integer). Furthermore, the one or more frequency points used in steps S210 and S220 may be different from the one or more frequency points used in the original measurement parameters. Except for the frequency points, the frequency range from the start frequency to the stop frequency used in steps S210 and S220 is the same as the frequency range from the start frequency to the stop frequency used in the original measurement parameters. Additionally, steps S210 and S220 also apply a system drift verification correction. However, because there are fewer frequency points, the measurement time is reduced.

[0031] In a third embodiment, the modified measurement parameters include disabling drift correction, and the original measurement parameters include enabling drift correction. The modified measurement parameters also include one or more frequency points used in the measurement, and the number of frequency points in the modified measurement parameters is less than the number of frequency points in the original measurement parameters. For example, FIG. 4 is a schematic diagram illustrating measurement parameters according to one embodiment of the present disclosure. As shown in FIG. 4, the number of frequency points used in steps S210 and S220 (e.g., X is a positive integer less than N, and N is a positive integer) is less than the number of frequency points used in the original measurement parameters (e.g., N is a positive integer). The one or more frequency points used in steps S210 and S220 may be different from the one or more frequency points used in the original measurement parameters. Except for the frequency points, the frequency range from the start frequency to the stop frequency used in steps S210 and S220 is the same as the frequency range from the start frequency to the stop frequency used in the original measurement parameters. Furthermore, in steps S210 and S220, the system drift verification correction is prohibited. However, since there are fewer frequency points and the system drift verification correction is prohibited, the measurement time is reduced.

[0032] In a fourth embodiment, the modified measurement parameters include disabling drift correction and the original measurement parameters include enabling drift correction. The modified measurement parameters further include one or more frequency points used in the measurement, where the number of frequency points in the modified measurement parameters is less than the number of frequency points in the original measurement parameters. The modified measurement parameters further include a first frequency range used in the measurement, where the first frequency range is smaller than the second frequency range in the original measurement parameters.

[0033] For example, FIG. 5 is a schematic diagram illustrating measurement parameters according to one embodiment of the present disclosure. As shown in FIG. 5, the frequency range of the measurement parameters used in steps S210 and S220 (i.e., the first frequency range) is different from the frequency range of the original measurement parameters (i.e., the second frequency range). The start frequency of the frequency range of the measurement parameters used in steps S210 and S220 is different from the start frequency of the frequency range of the original measurement parameters, and the stop frequency of the frequency range of the measurement parameters used in steps S210 and S220 is different from the stop frequency of the frequency range of the original measurement parameters. In addition, the number of frequency points used in steps S210 and S220 (e.g., Y is a positive integer less than N, and N is a positive integer) is less than the number of frequency points used in the original measurement parameters (e.g., N is a positive integer). In addition, one or more frequency points used in steps S210 and S220 may be different from one or more frequency points used in the original measurement parameters. In addition, in steps S210 and S220, the correction of the system drift verification is prohibited. Because the frequency range is relatively small, the frequency points are few, and the correction of the system drift verification is prohibited, the measurement time is reduced.

[0034] In one embodiment, the controller 60 copies a parameter set. The parameter set includes one or more original measurement parameters of the signal generation and analysis assembly 70. For example, the parameter set includes any one or combination of a frequency range, a start frequency of the frequency range, a stop frequency of the frequency range, a frequency point, the number of frequency points, and whether drift correction is enabled or disabled. The controller 60 replaces the original measurement parameters in the parameter set with at least one modified measurement parameter to generate a new parameter set including the modified measurement parameters. For example, in the second or third embodiment, one or more frequency points are replaced. For example, in the fourth embodiment, the start frequency or the stop frequency is replaced. The controller 60 then transmits the new parameter set to the signal generation and analysis assembly 70. The signal generation and analysis assembly 70 then performs measurements using the modified measurement parameters.

[0035] In one embodiment, the number of sweeps performed using at least one modified measurement parameter is reduced compared to the number of sweeps performed using at least one original measurement parameter. The number of sweeps performed may be reduced by disabling drift correction, reducing the number of frequency points, and / or reducing the frequency range.

[0036] As shown in FIG. 2 , the controller 60 compares the second measurement result with the first measurement result (S230). Specifically, the comparison result between the first measurement result and the second measurement result is used to verify system drift. The controller 60 can examine the difference between the first measurement result and the second measurement result. The comparison result can be the difference in amplitude between the first measurement result and the second measurement result. The controller 60 can set a boundary or threshold for the difference to verify whether the system is drifting. For example, if the difference in amplitude is within the set boundary, the controller 60 determines that drift or system drift exists or is detected. If the difference in amplitude is not within the set boundary, the controller 60 determines that drift or system drift does not exist or is not detected. In one embodiment, the absolute value of the measurement result is used to determine the accuracy of the first measurement result and the second measurement result. If the first measurement result is incorrect, the difference in amplitude is not used to compare with the set boundary.

[0037] When responding to the detection of system drift, the signal generation and analysis assembly 70 performs the correction function by enabling correction for system drift verification, but when responding to the detection of system drift, the signal generation and analysis assembly 70 does not perform the correction function by disabling correction for system drift verification.

[0038] In a fifth embodiment, the controller 60 can send movement commands for the probe assembly 20 to the positioning assembly 50. The movement commands can be commands to raise, lower, or move a set distance and / or commands to rotate a set angle. The positioning assembly 50 raises, lowers, moves, and / or rotates the probe assembly 20 in accordance with the movement commands. In one embodiment, the controller 60 can send movement commands for the chuck 30 to the chuck translation structure. The chuck translation structure raises, lowers, moves, and / or rotates the chuck 30 in accordance with the movement commands. The chuck translation structure can include an actuator, an electric actuator, a stepping motor, a piezoelectric actuator, a rack and pinion assembly, a ball screw and nut assembly, a linear actuator, a linear motor, and / or a rotary actuator.

[0039] For example, Figure 6 is a schematic diagram illustrating a movement operation according to one embodiment of the present disclosure. As shown in Figure 6, the device under test 44 may be a first die 441 and a second die 442. The movement command is used to move the probe assembly 20 from a position where the probe tip 24 contacts the first crystal grain 441 to a position where the probe tip 24 contacts the second crystal grain 442.

[0040] The movement of the probe assembly 20 is performed in response to a measurement using the modified measurement parameters. For example, the measurement using the modified measurement parameters is performed when a movement command is sent. The drift verification is performed when the probe 22 is lifted in the air. Thus, the time spent moving is used to verify the drift of the system, saving time. In one embodiment, the modified measurement parameters of the first, second, third, or fourth embodiment are applied during the movement of the probe assembly 20.

[0041] FIG. 7 is a flowchart illustrating a method of operating the probe system 10 according to one embodiment of the present disclosure. As shown in FIG. 7, the controller 60 accepts a selection operation (step S710). More specifically, measurements are performed using the modified measurement parameters, as described in step S210. The selection operation is used to replace the original measurement parameters with the modified measurement parameters, which differ from the original measurement parameters. As described above, the modified measurement parameters differ from the original measurement parameters in the system drift verification correction settings, frequency range, start frequency, stop frequency, or frequency point, which are preset in the signal generation and analysis assembly 70. The controller 60 can provide verification options related to the first, second, third, fourth, and / or fifth embodiments described above on the user interface. By referring to the description of the first, second, third, fourth, and / or fifth embodiments described above, the description of the modified measurement parameters of the first, second, third, fourth, and / or fifth embodiments will be omitted.

[0042] An input device (not shown, e.g., a keyboard, mouse, or touch panel) accepts a selection operation of one of the verification options on the user interface. The selection operation includes the selection of the value of the modified measure parameter, e.g., the start frequency, the stop frequency, or the frequency point.

[0043] Thereafter, based on the selection operation, measurements are performed using the corrected measurement parameters as described in steps S210 and S220.

[0044] The controller 60 displays the comparison result between the first measurement result and the second measurement result (step S720). Specifically, the first measurement result is generated in response to a measurement using the modified measurement parameters, and the second measurement result is generated in response to a measurement using the modified measurement parameters. The comparison result between the first measurement result and the second measurement result is used to verify system drift. For example, an amplitude difference between the first measurement result and the second measurement result may be displayed, or the detection of system drift may be displayed. In one embodiment, the comparison result between the first measurement result and the second measurement result may be displayed using a display or a speaker (not shown).

[0045] The controller 60 verifies the comparison result by providing the set boundary (step S730). More specifically, the set boundary is displayed on the display. As described above, the set boundary is used to verify whether system drift has occurred. For example, if the comparison result is the difference in amplitude between the first measurement result and the second measurement result, and the difference in amplitude is within the set boundary, system drift is detected. The comparison result is also displayed on the display together with the set boundary, allowing the user to view the verification result of system drift.

[0046] 7 are described in detail in the above embodiments and implementation methods. Therefore, these details will not be repeated below. In addition to being realized in the form of a circuit, the steps and implementation details in the embodiments of the present disclosure can also be implemented in the form of software by a processing unit. The embodiments of the present disclosure are not limited thereto.

[0047] Based on the above description, the present disclosure also provides a non-transitory computer-readable storage medium, as shown in FIGS. 1-7. The non-transitory computer-readable storage medium includes one or more computer-executable instructions. The computer-executable instructions direct the probe system 10 to perform any of the method embodiments described above. When present, the computer-readable storage medium is also referred to herein as a non-transitory computer-readable storage medium. This non-transitory computer-readable storage medium includes definitions, storage, and / or retention of computer-executable instructions, programs, and / or code. These computer-executable instructions direct the probe system 10 and / or its controller 60 to perform any suitable portion or subset of the method embodiments described above. Examples of such non-transitory computer-readable storage media include CD-ROMs, magnetic disks, hard disks, flash storage devices, etc.

[0048] Based on the above, the method, system, and medium related to system drift verification according to the embodiments of the present disclosure can, for example, inhibit correction for system drift verification, or replace measurement parameters such as start frequency, stop frequency, or frequency point, thereby reducing the number of sweeps and reducing the frequency point or moving time interval used, thereby effectively shortening the measurement time for drift verification and improving the efficiency of the test process.

[0049] The present invention is disclosed by the above-mentioned embodiments, but the present invention is not limited thereto. Those skilled in the art can make some changes and modifications without departing from the spirit of the present invention. Therefore, the scope of protection of the present invention shall be defined by the scope of the patent application to be attached later. [Explanation of symbols]

[0050] 10: Probe System 20: Probe assembly 22: Probe 24: Probe tip 30: Zipper 32: Support surface 40: Circuit board 44: Device under test 48: Pad 50: Positioning assembly 60: Controller 70: Network analyzer 70: Signal Generation and Analysis Assembly 80: Optical Imaging Device 441: First Die 442: Second Die S210, S220, S230, S710, S720, S730: Step

Claims

1. 1. A method for verifying system drift in a probe system, comprising: a controller (60) connected to a signal generation and analysis assembly (70), the signal generation and analysis assembly (70) being connected to a device under test (DUT) (44) by a probe assembly (20); The method comprises: performing a first measurement with at least one modified measurement parameter to generate a first measurement result of the at least one modified measurement parameter, the at least one modified measurement parameter differing from at least one original measurement parameter, the at least one original measurement parameter being preset in the signal generating and analyzing assembly (70); responsive to the measurement with the at least one modified measurement parameter, performing a second measurement with the at least one modified measurement parameter to generate a second measurement result of the at least one modified measurement parameter; comparing the second measurement result with the first measurement result, and a comparison result between the first measurement result and the second measurement result is used to verify system drift. A method characterized by:

2. 10. The method of claim 1, the at least one modified measurement parameter includes inhibiting a correction used to verify system drift; The at least one original measurement parameter includes enabling a correction used to verify the system drift. A method characterized by:

3. 3. The method of claim 2, The at least one modified measurement parameter further includes at least one frequency point used in the measurement; The number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter. A method characterized by:

4. 3. The method of claim 2, the at least one modified measurement parameter further comprises a first frequency range used for measurement; The first frequency range is smaller than a second frequency range of the at least one original measurement parameter. A method characterized by:

5. 10. The method of claim 1, The at least one modified measurement parameter includes at least one frequency point used in the measurement, and the number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter. A method characterized by:

6. 10. The method of claim 1, and transmitting a movement command for the probe assembly (20), the movement of the probe assembly (20) being performed by the movement command being responsive to the measurement with the at least one modified measurement parameter. A method characterized by:

7. 10. The method of claim 1, The first measurement or the second measurement of the at least one modified measurement parameter comprises: copying a parameter set, said parameter set including said at least one original measurement parameter of said signal generating and analyzing assembly (70); replacing a measurement parameter in a parameter set with the at least one modified measurement parameter to generate a new parameter set including the at least one modified measurement parameter; transmitting the new parameter set. A method characterized by:

8. 10. The method of claim 1, a comparison result between the first measurement result and the second measurement result is an amplitude difference between the first measurement result and the second measurement result; Comparing the second measurement result with the first measurement result includes: determining that a system drift has been detected if the difference in amplitude is within a set boundary; and determining that system drift is not detected if the amplitude difference is not within a set boundary. A method characterized by:

9. 10. The method of claim 1, The number of sweeps performed using the at least one modified measurement parameter is reduced compared to the number of sweeps performed using the at least one original measurement parameter. A method characterized by:

10. A method of operating a probe system (10), comprising: a controller (60) connected to a signal generating and analyzing assembly (70), said signal generating and analyzing assembly (70) being connected to a device under test (44) by a probe assembly (20); The operation method includes: receiving a selection operation, performing a measurement with at least one modified measurement parameter, said selection operation being used to replace at least one original measurement parameter with said at least one modified measurement parameter, said at least one modified measurement parameter being different from said at least one original measurement parameter, said at least one original measurement parameter being preset in said signal generating and analyzing assembly (70); presenting a comparison between a first measurement result and a second measurement result, the first measurement result being generated in response to a first measurement of the at least one modified measurement parameter and the second measurement result being generated in response to a second measurement of the at least one modified measurement parameter, the comparison between the first measurement result and the second measurement result being used to verify system drift; and verifying the comparison result by providing a set boundary, and presenting the set boundary on a display. A method characterized by:

11. 11. The operating method according to claim 10, The at least one modified measurement parameter includes disabling a correction used to verify system drift, and the at least one original measurement parameter includes enabling a correction used to verify system drift. A method characterized by:

12. 11. The operating method according to claim 10, The at least one modified measurement parameter further includes at least one frequency point used in the measurement, and the number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter; or The at least one modified measurement parameter further includes a first frequency range used for measurement, the first frequency range being smaller than a second frequency range of the at least one original measurement parameter. A method characterized by:

13. 11. The operating method according to claim 10, The at least one modified measurement parameter includes at least one frequency point used in the measurement, and the number of the at least one frequency point of the at least one modified measurement parameter is less than the number of frequency points of the at least one original measurement parameter. A method characterized by:

14. 11. The operating method according to claim 10, and transmitting a probe assembly (20) movement command, the probe assembly (20) moving in response to a measurement using the at least one modified measurement parameter and performing movement of the probe assembly (20) based on the movement command. A method characterized by:

15. A probe system (10) configured to test a device under test (44) on a wafer, capable of performing system drift verification, and including a chuck (30), a probe assembly (20), a signal generation and analysis assembly (70), and a controller (60); The chuck (30) defines a support surface configured to support a wafer including the device under test (DUT) (44); The probe assembly (20) defines a probe tip (24) configured to physically contact a surface of the device under test (44); the signal generating and analyzing assembly (70) having at least one of a configuration for transmitting a measurement signal to the device under test (44) and a configuration for receiving a result signal from the device under test (44); The controller (60) is connected to the signal generating and analyzing assembly (70) and is programmed to carry out the method of claim 1. A system characterized by:

16. A probe system (10) according to claim 15, The probe system (10) further includes a positioning assembly (50) and an optical imaging device (80); the positioning assembly (50) is configured to selectively change the relative orientation of the probe tip (24) and the chuck (30); the optical imaging device (80) is configured to collect an optical image of at least one region of the probe system (10); The signal generation and analysis assembly (70) is a network analyzer (70). A system characterized by:

17. 1. A non-transitory computer-readable storage medium, comprising:

10. The method of claim 1, further comprising: providing a probe system (10) for detecting a temperature difference between the probe system and the target object; A medium characterized by:

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