Processing system and transfer method

Abstract

To provide a processing system and transfer method for efficiently replacing a consumption member in a processing chamber.SOLUTION: A processing system PS comprises: a chamber in which a consumable member is installed; a storage module SM for storing the consumable member; a position detection sensor for detecting a position of the consumable member; vacuum transfer modules TM1, TM2 that are connected to the chamber and the storage module and have transfer robots TR1, TR2 for transferring the consumable member between the chamber and the storage module; and a control unit CU. The control unit executes: a process (a) of controlling the transfer robots to transfer the consumable member installed in the chamber to the storage module; a process (b) of detecting the position of the consumable member being transferred to the storage module using the position detection sensor; and a process (c) of controlling the transfer robots to transfer a new consumable member different from the consumable member from the storage module to the chamber at a position adjusted based on the position of the consumable member detected in the process (b).SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to a processing system and a transport method. [Background technology]

[0002] BACKGROUND ART There is known a technique for replacing a focus ring that is disposed so as to surround a substrate in a processing chamber where plasma processing is performed (see, for example, Patent Documents 1 to 3). [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2012-216614 [Patent Document 2] Japanese Patent Application Publication No. 2018-010992 [Patent Document 3] Japanese Patent Application Laid-Open No. 2011-054933 Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure provides a technique for efficiently replacing consumable parts in a processing chamber. [Means for solving the problem]

[0005] A processing system according to one aspect of the present disclosure comprises a chamber in which a consumable item is attached, a storage module that stores the consumable item, a position detection sensor that detects the position of the consumable item, a vacuum transport module connected to the chamber and the storage module and having a transport robot that transports the consumable item between the chamber and the storage module, and a control unit, wherein the control unit is configured to perform the following steps: (a) controlling the transport robot to transport the consumable item attached to the chamber to the storage module; (b) detecting the position of the consumable item to be transported to the storage module using the position detection sensor; and (c) controlling the transport robot to correct the position of a new consumable item different from the consumable item from the storage module to the chamber based on the position of the consumable item detected in step (b). [Effects of the Invention]

[0006] According to the present disclosure, consumable parts in a processing chamber can be replaced efficiently. [Brief explanation of the drawings]

[0007] [Figure 1] FIG. 1 is a diagram illustrating an example of a processing system according to an embodiment. [Figure 2] Schematic cross-sectional view showing an example of a process module [Figure 3] A front cross-sectional view showing an example of a storage module [Figure 4] A side cross-sectional view showing an example of a storage module. [Figure 5] Diagram for explaining the reference position for each process module [Figure 6] FIG. 10 is a diagram illustrating an example of a method for transporting an edge ring according to an embodiment. [Figure 7] FIG. 10 is a diagram showing an example of a method for storing an edge ring according to an embodiment. [Figure 8] Schematic diagram showing an example of storage module installation [Figure 9] A diagram showing a position detection sensor attached to the fork of a transport robot DETAILED DESCRIPTION OF THE INVENTION

[0008] Hereinafter, non-limiting exemplary embodiments of the present disclosure will be described with reference to the accompanying drawings. In all the accompanying drawings, the same or corresponding reference numerals are used to designate the same or corresponding components or consumable components, and redundant descriptions will be omitted.

[0009] [Processing System] An example of a processing system according to an embodiment will be described with reference to Fig. 1. As shown in Fig. 1, the processing system PS is a system capable of performing various processes, such as plasma processing, on a substrate. The substrate may be, for example, a semiconductor wafer.

[0010] The processing system PS includes vacuum transfer modules TM1 and TM2, process modules PM1 to PM12, load lock modules LL1 and LL2, an atmospheric transfer module LM, a storage module SM, and the like.

[0011] Each of the vacuum transfer modules TM1 and TM2 has a substantially rectangular shape in a plan view. The vacuum transfer module TM1 has two opposing side surfaces to which process modules PM1 to PM6 are connected. Of the other two opposing side surfaces of the vacuum transfer module TM1, one side surface is connected to load lock modules LL1 and LL2, and the other side surface is connected to a path (not shown) for connection to the vacuum transfer module TM2. The side surface of the vacuum transfer module TM1 to which the load lock modules LL1 and LL2 are connected is angled in accordance with the two load lock modules LL1 and LL2. The vacuum transfer module TM2 has two opposing side surfaces to which process modules PM7 to PM12 are connected. Of the other two opposing side surfaces of the vacuum transfer module TM2, one side surface is connected to a path (not shown) for connection to the vacuum transfer module TM1, and the other side surface is connected to a storage module SM. The vacuum transfer modules TM1 and TM2 each have a vacuum chamber, and transfer robots TR1 and TR2 are disposed inside the vacuum transfer module TM1, respectively.

[0012] The transfer robots TR1 and TR2 are configured to be rotatable, extendable, and elevating. The transfer robots TR1 and TR2 place substrates on forks at their tips to transport the substrates between the load lock modules LL1 and LL2 and the process modules PM1 to PM12. The transfer robots TR1 and TR2 place consumable parts on the forks to transport the consumable parts between the process modules PM1 to PM12 and the storage module SM. The consumable parts are replaceable parts that are installed in the process modules PM1 to PM12 and are consumed by various processes, such as plasma processing, performed in the process modules PM1 to PM12. The consumable parts include, for example, an edge ring 113, a cover ring 114, and a top plate 121 of the upper electrode 12, which will be described later.

[0013] Each of the process modules PM1 to PM12 has a processing chamber and a stage (mounting table) disposed therein. After a substrate is placed on the stage, each of the process modules PM1 to PM12 reduces the pressure inside, introduces a processing gas, applies RF power to generate plasma, and performs plasma processing on the substrate using the plasma. The vacuum transfer modules TM1 and TM2 are separated from the process modules PM1 to PM12 by a gate valve G1 that can be opened and closed. An edge ring 113, a cover ring 114, etc. are disposed on the stage. An upper electrode 12 for applying RF power is disposed above the stage, facing the stage.

[0014] The load-lock modules LL1 and LL2 are located between the vacuum transfer module TM1 and the atmospheric transfer module LM. The load-lock modules LL1 and LL2 have internal pressure-variable chambers whose interiors can be switched between vacuum and atmospheric pressure. The load-lock modules LL1 and LL2 have stages located inside. When transferring substrates from the atmospheric transfer module LM to the vacuum transfer module TM1, the load-lock modules LL1 and LL2 maintain atmospheric pressure inside the modules, receive the substrates from the atmospheric transfer module LM, and then reduce the pressure inside the modules before transferring the substrates into the vacuum transfer module TM1. When transferring substrates from the vacuum transfer module TM1 to the atmospheric transfer module LM, the load-lock modules LL1 and LL2 maintain vacuum inside the modules, receive the substrates from the vacuum transfer module TM1, and then increase the pressure inside the modules to atmospheric pressure before transferring the substrates into the atmospheric transfer module LM. The load-lock modules LL1 and LL2 and the vacuum transfer module TM1 are separated by a gate valve G2 that can be freely opened or closed. The load-lock modules LL1 and LL2 and the atmospheric transfer module LM are separated by a gate valve G3 that can be freely opened or closed.

[0015] The atmospheric transfer module LM is disposed opposite the vacuum transfer module TM1. The atmospheric transfer module LM may be, for example, an Equipment Front End Module (EFEM). The atmospheric transfer module LM is a rectangular parallelepiped atmospheric transfer chamber equipped with an FFU (Fan Filter Unit) and maintained at atmospheric pressure. Two load lock modules LL1 and LL2 are connected to one longitudinal side of the atmospheric transfer module LM. Load ports LP1 to LP5 are connected to the other longitudinal side of the atmospheric transfer module LM. A container (not shown) that can accommodate multiple substrates (e.g., 25 substrates) is placed on the load ports LP1 to LP5. The container may be, for example, a Front-Opening Unified Pod (FOUP). A transfer robot (not shown) that transfers substrates is disposed within the atmospheric transfer module LM. The transfer robot transfers substrates between the FOUP and the internal pressure variable chambers of the load lock modules LL1 and LL2.

[0016] The storage module SM is detachably connected to the vacuum transfer module TM2. The storage module SM has a storage chamber and stores consumable parts. The storage module SM is connected to the vacuum transfer module TM2, for example, when replacing consumable parts in the process modules PM1 to PM12, and is detached from the vacuum transfer module TM2 after replacement of the consumable parts is complete. This allows for effective use of the area around the processing system PS. However, the storage module SM may be always connected to the vacuum transfer module TM2. The storage module SM has a position detection sensor that detects the position of the consumable parts stored in the storage chamber. The consumable parts are transferred between the process modules PM1 to PM12 and the storage module SM by transfer robots TR1 and TR2. The vacuum transfer module TM2 and the storage module SM are separated by a gate valve G4 that can be opened and closed.

[0017] The processing system PS is provided with a control unit CU. The control unit CU controls each part of the processing system, such as the transfer robots TR1 and TR2 provided in the vacuum transfer modules TM1 and TM2, the transfer robot provided in the atmospheric transfer module LM, and the gate valves G1 to G4. The control unit CU also acquires detection values ​​from position detection sensors provided in the storage module SM, and calculates the reference position of each of the process modules PM1 to PM12 based on the acquired detection values. The reference position will be described later. The control unit CU may be, for example, a computer. The control unit CU includes a CPU (Central Processing Unit), RAM (Random Access Memory), ROM (Read Only Memory), an auxiliary storage device, etc. The CPU operates based on a program stored in the ROM or the auxiliary storage device, and controls each part of the processing system PS.

[0018] 1, the storage module SM is connected to the opposite side of the vacuum transfer module TM1 across the vacuum transfer module TM2, but the present disclosure is not limited to this. For example, the storage module SM may be connected in place of at least one of the process modules PM1 to PM12.

[0019] [Plasma Processing Apparatus] An example of a plasma processing apparatus used as the process modules PM1 to PM12 included in the processing system PS of FIG. 1 will be described with reference to FIG.

[0020] The plasma processing apparatus 1 includes a chamber 10, a gas supply unit 20, an RF power supply unit 30, an exhaust unit 40, an elevation mechanism 50, and a control unit 100.

[0021] The chamber 10 includes a support 11 and an upper electrode 12. The support 11 is disposed in a lower region of a processing space 10s within the chamber 10. The upper electrode 12 is disposed above the support 11 and can function as part of the top plate of the chamber 10.

[0022] The support 11 supports the substrate W in the processing space 10s. The support 11 includes a lower electrode 111, an electrostatic chuck 112, an edge ring 113, a cover ring 114, an insulator 115, and a base 116. The electrostatic chuck 112 is disposed on the lower electrode 111. The electrostatic chuck 112 supports the substrate W on its upper surface. The edge ring 113 is disposed around the substrate W on the peripheral upper surface of the lower electrode 111 to improve uniformity of plasma processing. The cover ring 114 is disposed on the outer periphery of the edge ring 113 to protect the upper surface of the insulator 115 from plasma. The edge ring 113 and the cover ring 114 each have an annular shape. The insulator 115 is disposed on the base 116 to surround the lower electrode 111. The base 116 is fixed to the bottom of the chamber 10 and supports the lower electrode 111 and the insulator 115.

[0023] The upper electrode 12 and the insulating member 13 constitute a chamber 10. The upper electrode 12 supplies one or more types of processing gases from a gas supply unit 20 to a processing space 10s. The upper electrode 12 includes a top plate 121 and a support 122. The bottom surface of the top plate 121 defines the processing space 10s. The top plate 121 has a plurality of gas discharge holes 121a formed therein. Each of the plurality of gas discharge holes 121a penetrates the top plate 121 in the thickness direction (vertical direction). The support 122 detachably supports the top plate 121. A gas diffusion chamber 122a is provided inside the support 122. A plurality of gas holes 122b extend downward from the gas diffusion chamber 122a. The plurality of gas holes 122b are respectively connected to the plurality of gas discharge holes 121a. A gas inlet 122c is formed in the support 122. The upper electrode 12 supplies one or more process gases from the gas inlet 122c through the gas diffusion chamber 122a, the plurality of gas holes 122b, and the plurality of gas outlet holes 121a to the processing space 10s.

[0024] The gas supply unit 20 includes one or more gas sources 21 and one or more flow controllers 22. The gas supply unit 20 supplies one or more types of process gases from the respective gas sources 21 to the gas inlet 122c via the respective flow controllers 22. The flow controllers 22 may include, for example, mass flow controllers or pressure-controlled flow controllers. Furthermore, the gas supply unit 20 may include one or more flow modulation devices that modulate or pulse the flow rates of one or more process gases.

[0025] The RF power supply unit 30 includes two RF power sources (a first RF power source 31a and a second RF power source 31b) and two matchers (a first matcher 32a and a second matcher 32b). The first RF power source 31a supplies a first RF power to the lower electrode 111 via the first matcher 32a. The frequency of the first RF power may be, for example, 3 Hz to 3000 GHz. The second RF power source 31b supplies a second RF power to the lower electrode 111 via the second matcher 32b. The frequency of the second RF power may be, for example, 400 kHz to 13.56 MHz. Note that a DC power source may be used instead of the second RF power source 31b.

[0026] The exhaust unit 40 is connected to an exhaust port 10e provided at the bottom of the chamber 10. The exhaust unit 40 includes a pressure valve, a vacuum pump, and the like.

[0027] A loading / unloading port 10p is formed in a sidewall of the chamber 10. The substrate W is transferred through the loading / unloading port 10p between the processing space 10s and the outside of the chamber 10. The loading / unloading port 10p is opened and closed by a gate valve G1.

[0028] The lifting mechanism 50 includes a first lifting mechanism 51 and a second lifting mechanism 52 .

[0029] The first lifting mechanism 51 includes a plurality of support pins 511 and a motor 512. The support pins 511 are inserted into through holes H1 formed in the lower electrode 111 and the electrostatic chuck 112 and are capable of protruding and retracting from the upper surface of the electrostatic chuck 112. The support pins 511 protrude from the upper surface of the electrostatic chuck 112, thereby supporting the substrate W with their upper ends in contact with the bottom surface of the substrate W. The motor 512 raises and lowers the support pins 511. The motor 512 may be a motor such as a DC motor, a stepping motor, or a linear motor, a piezoelectric actuator, an air-driven mechanism, or the like. The first lifting mechanism 51 raises and lowers the support pins 511, for example, when transferring the substrate W between the transport robots TR1 and TR2 and the support unit 11.

[0030] The second lifting mechanism 52 includes a plurality of support pins 521 and a motor 522. The support pins 521 are inserted into through holes H2 formed in the insulator 115 and are capable of protruding and retracting from the upper surface of the insulator 115. The support pins 521 protrude from the upper surface of the insulator 115, thereby supporting the edge ring 113 with their upper ends abutting the bottom surface of the edge ring 113. The motor 522 raises and lowers the support pins 521. The motor 522 may be a motor such as a DC motor, a stepping motor, or a linear motor, a piezoelectric actuator, or an air-driven mechanism. The second lifting mechanism 52 raises and lowers the support pins 521, for example, when transferring the edge ring 113 between the transfer robots TR1 and TR2 and the support unit 11.

[0031] Although not shown, the support part 11 may be provided with a lifting mechanism for raising and lowering the cover ring 114. The lifting mechanism includes a plurality of support pins provided at positions capable of contacting the bottom surface of the cover ring 114, and a motor for raising and lowering the plurality of support pins.

[0032] The control unit 100 controls each unit of the plasma processing apparatus 1. The control unit 100 includes, for example, a computer 101. The computer 101 includes, for example, a CPU 101a, a storage unit 101b, a communication interface 101c, and the like. The CPU 101a can be configured to perform various control operations based on programs stored in the storage unit 101b. The storage unit 101b includes at least one memory type selected from the group consisting of auxiliary storage devices such as RAM, ROM, HDD (Hard Disk Drive), SSD (Solid State Drive), and the like. The communication interface 101c may communicate with the plasma processing apparatus 1 via a communication line such as a LAN (Local Area Network).

[0033] [Storage module] An example of the storage module SM included in the processing system PS of FIG. 1 will be described with reference to FIGS.

[0034] The storage module SM has a chamber 70 installed on a frame 60, with a machine room 90 above the chamber 70. The chamber 70 can reduce the pressure inside by an exhaust unit 72 connected to an exhaust port 71 provided at the bottom. In addition, N2 gas, for example, is supplied to the chamber 70 as a purge gas, thereby adjusting the pressure inside the chamber 70. The machine room 90 is, for example, at atmospheric pressure.

[0035] A storage 75 having a stage 73 and a basket 74 provided below the stage 73 is installed within the chamber 70. The storage 75 can be raised and lowered by a ball screw 76. A line sensor 91 that detects the position, orientation, etc. of the consumable parts, and a motor 77 that drives the ball screw 76 are installed within the machine room 90. A window 93 made of quartz or the like is installed between the chamber 70 and the machine room 90 so that the line sensor 91 can receive light from a light emitting unit 92, which will be described later.

[0036] The stage 73 carries a consumable part. The stage 73 has a light-emitting unit 92 facing the line sensor 91. The stage 73 is rotatable in the θ direction and rotates the placed consumable part, such as an edge ring 113, in a predetermined direction. That is, the stage 73 aligns (positions) the edge ring 113. In the alignment, the orientation flat (OF) of the edge ring 113 is aligned in a predetermined direction. The stage 73 may also be movable in the horizontal direction (X and Y directions) and configured to move the placed consumable part in the horizontal direction. In the alignment, the center position of the edge ring 113 may be aligned.

[0037] The line sensor 91 detects the amount of light emitted from the light-emitting unit 92 and outputs the detected amount of light to the control unit CU. The control unit CU detects the orientation flat of the edge ring 113 by utilizing the fact that the detected amount of light changes depending on the presence or absence of an orientation flat of the edge ring 113. The control unit CU detects the orientation of the edge ring 113 based on the detected orientation flat. The line sensor 91 is, for example, a line sensor such as a CCD (Charge Coupled Device) or a CMOS (Complementary Metal Oxide Semiconductor).

[0038] Furthermore, the control unit CU calculates information (hereinafter referred to as "position information") regarding the horizontal position of the edge ring 113 based on the amount of light detected by the line sensor 91. The position information includes the reference positions of the process modules PM1 to PM7. For example, as shown in FIG. 5, the reference positions are the central positions P1(x1, y1) to P12(x 12 ,y 12 5 shows the center position O(0,0) of the stage 73 and center positions P1(x1,y1) to P4(x4,y4) of the edge rings 113 attached to the process modules PM1 to PM4 when they are placed on the stage 73. The control unit CU also generates correspondence information that associates the position information with information for identifying the process modules PM1 to PM12 to which the edge rings 113 are attached (hereinafter referred to as "identification information"). The correspondence information is stored, for example, in an auxiliary storage device of the control unit CU.

[0039] The basket 74 is provided below the stage 73. A cassette 78 is placed inside the basket 74. The cassette 78 can be removed from the basket 74. The cassette 78 stores a plurality of edge rings 113 at intervals in the vertical direction. The cassette 78 is open on the front side and the back side of the storage module SM. Note that while FIG. 3 shows a case where two cassettes 78 are placed inside the basket 74, it is also possible to place, for example, one cassette 78 inside the basket 74.

[0040] In addition to the stage 73 and the basket 74, the storage 75 has a guide 79 on its side that is supported by a ball screw 76. The ball screw 76 connects the upper and lower surfaces of the chamber 70, passes through the upper surface of the chamber 70, and is connected to a motor 77 in the machine room 90. The through-hole in the upper surface of the chamber 70 is sealed so that the ball screw 76 can rotate. The ball screw 76 can be rotated by the motor 77 to move the storage 75 in the vertical direction (Z-axis direction).

[0041] The storage module SM is detachably connected to the vacuum transfer module TM2 via gate valve G4. A fork of the transfer robot TR2 of the vacuum transfer module TM2 can be inserted into the chamber 70 via gate valve G4. The fork, for example, carries the edge ring 113 into the cassette 78, carries the edge ring 113 out of the cassette 78, places the edge ring 113 on the stage 73, and removes the edge ring 113 from the stage 73. The door 80 is opened and closed, for example, when removing the cassette 78 from the chamber 70 or when placing the cassette 78 into the chamber 70.

[0042] The light-emitting unit 94 and the number detection sensor 95 detect the number of edge rings 113 placed on the cassette 78 when the storage 75 moves the cassette 78 from the bottom side of the chamber 70 to an upper position, such as a position facing the gate valve G4. The light-emitting unit 94 is, for example, an LED (Light Emitting Diode), a semiconductor laser, or the like. The number detection sensor 95 detects the amount of light emitted from the light-emitting unit 94 and outputs the detected amount of light to the control unit CU. Based on the detected amount of light, the control unit CU counts the number of times the light emitted from the light-emitting unit 94 is blocked by the edge ring 113, thereby detecting the number of edge rings 113. The number detection sensor 95 is, for example, a photodiode, a phototransistor, or the like. The number detection sensor 95 may also be, for example, a line sensor such as a CCD or CMOS.

[0043] In the above example, the control unit CU calculates the position information of the edge ring 113 based on the amount of light detected by the line sensor 91 in the storage module SM. However, the present disclosure is not limited to this. For example, a position detection sensor including an inner circumference sensor that detects the inner circumference position of the edge ring 113 and an outer circumference sensor that detects the outer circumference position of the edge ring 113 may be used. In this case, the control unit CU calculates the position information of the edge ring 113 based on the outer circumference position of the edge ring 113 detected by the inner circumference sensor and the outer circumference position of the edge ring 113 detected by the outer circumference sensor. Furthermore, for example, another optical sensor or camera may be used instead of the line sensor 91. The other optical sensor or camera may be installed in the storage module SM like the line sensor 91, or may be installed to sense or capture the transport path of the edge ring 113 (from the storage module SM to each of the process modules PM1 to PM12). When a camera is used, the control unit CU calculates the position information of the edge ring 113 based on the image captured by the camera, for example, by using image processing technology.

[0044] [Edge ring transport method] An example of a method for transporting the edge ring 113 according to the embodiment will be described with reference to Fig. 6. Hereinafter, the replacement of the edge ring 113 installed in the process module PM7 of the processing system PS shown in Fig. 1 will be described as an example. Note that the edge rings 113 installed in the process modules PM1 to PM6 and PM8 to PM12 can also be replaced using a similar method.

[0045] The edge ring transport method of the embodiment is performed, for example, after the processing system PS is started up and before processing by the processing system PS (process modules PM1 to PM12). Also, the edge ring transport method of the embodiment is performed, for example, after the storage module SM is connected to the vacuum transport module TM2 and before processing by the processing system PS (process modules PM1 to PM12). However, the edge ring transport method of the embodiment may be performed at a timing different from the above.

[0046] First, the control unit CU controls the transfer robot TR2 to transfer the edge ring 113 in the process module PM7 to the storage module SM, and places it on the stage 73 in the storage module SM (step S1).

[0047] Next, the control unit CU calculates position information of the edge ring 113 based on the detection value of the line sensor 91 in the storage module SM (step S2). The position information includes a reference position of the process module PM7. The reference position may be, for example, the center position P7(x7, y7) of the edge ring 113 attached to the process module PM7 when the center position O(0,0) of the stage 73 is used as a reference. The control unit CU also generates correspondence information that associates the position information with identification information of the process module PM7 to which the edge ring 113 was attached. The correspondence information is stored, for example, in an auxiliary storage device of the control unit CU.

[0048] Subsequently, the control unit CU controls the transfer robot TR2 to transfer the edge ring 113 placed on the stage 73 back into the process module PM7, and place it on the lower electrode 111 (step S3).

[0049] Next, the control unit CU executes various processes such as plasma processing in the process module PM7 with the edge ring 113 attached in the process module PM7 (step S4). When various processes are executed in the process module PM7, the edge ring 113 in the process module PM7 is gradually worn down.

[0050] Next, the control unit CU performs a wear level determination to determine whether the edge ring 113 in the process module PM7 needs to be replaced (step S5). For example, the control unit CU determines whether the edge ring 113 needs to be replaced based on the RF integrated time, the RF integrated power, the integrated value of a specific step of the recipe, and the like. The RF integrated time is the integrated value of the time during which RF power is supplied to the process module PM7 during a specific plasma process. The RF integrated power is the integrated value of the RF power supplied to the process module PM7 during a specific plasma process. The integrated value of a specific step of the recipe is the integrated value of the time during which RF power is supplied or the integrated value of the RF power in a step of the process performed in the process module PM7 in which the edge ring 113 is removed. The RF integrated time, the RF integrated power, and the integrated value of a specific step of the recipe are values ​​calculated from the point in time when the edge ring 113 was replaced, such as when the apparatus was installed or when maintenance was performed.

[0051] When determining whether or not the edge ring 113 needs to be replaced based on the RF integration time, the control unit CU determines that the edge ring 113 needs to be replaced if the RF integration time reaches a threshold. On the other hand, the control unit CU determines that the edge ring 113 does not need to be replaced if the RF integration time does not reach the threshold. The threshold is a value determined based on the type of material, etc., of the edge ring 113 through preliminary experiments, etc.

[0052] When determining whether or not the edge ring 113 needs to be replaced based on the RF integrated power, the control unit CU determines that the edge ring 113 needs to be replaced if the RF integrated power reaches a threshold. On the other hand, the control unit CU determines that the edge ring 113 does not need to be replaced if the RF integrated power does not reach the threshold. The threshold is a value determined based on the type of material, etc., of the edge ring 113 through preliminary experiments, etc.

[0053] When determining whether the edge ring 113 needs to be replaced based on the integrated value of a specific step of the recipe, the control unit CU determines that the edge ring 113 needs to be replaced if the RF integrated time or RF integrated power in the specific step reaches a threshold. In contrast, the control unit CU determines that the edge ring 113 does not need to be replaced if the RF integrated time or RF integrated power in the specific step does not reach the threshold. When determining whether the edge ring 113 needs to be replaced based on the integrated value of a specific step of the recipe, the timing to replace the edge ring 113 can be calculated based on the step in which RF power is applied and the edge ring 113 is scraped. Therefore, the timing to replace the edge ring 113 can be calculated with particularly high accuracy. The threshold is a value determined based on the type of material, etc., of the edge ring 113 through preliminary experiments, etc.

[0054] In step S5, if the control unit CU determines that the edge ring 113 in the process module PM7 needs to be replaced, the control unit CU advances the process to step S6. On the other hand, in step S5, if the control unit CU determines that the edge ring 113 in the process module PM7 does not need to be replaced, the control unit CU returns the process to step S4.

[0055] Next, the control unit CU performs a replacement feasibility determination to determine whether the state of the processing system PS is such that the edge ring 113 can be replaced (step S6). For example, the control unit CU determines that the edge ring 113 can be replaced when no substrates are being processed in the process module PM7 in which the edge ring 113 is to be replaced. In contrast, the control unit CU determines that the edge ring 113 cannot be replaced when substrates are being processed in the process module PM7. The control unit CU may also determine that the edge ring 113 can be replaced when, for example, processing of substrates from the same lot as the substrates being processed in the process module PM7 in which the edge ring 113 is to be replaced has been completed. In this case, the control unit CU determines that the edge ring 113 cannot be replaced until processing of substrates from the same lot as the substrates being processed in the process module PM7 has been completed.

[0056] In step S6, if the control unit CU determines that the state of the processing system PS is such that the edge ring 113 can be replaced, the process proceeds to step S7. On the other hand, in step S7, if the control unit CU determines that the state of the processing system PS is such that the edge ring 113 cannot be replaced, the control unit CU performs step S6 again.

[0057] Subsequently, the control unit CU controls the transfer robot TR2 to transfer the used edge ring 113 in the process module PM7 to the storage module SM and store it in the cassette 78 (step S7). A method for storing the used edge ring 113 in the cassette 78 will be described in detail later.

[0058] Next, the control unit CU controls the transfer robot TR2 to transfer the unused edge ring 113 stored in the cassette 78 to the process module PM7 and place it on the lower electrode 111 in the process module PM7 (step S8). At this time, the control unit CU controls the transfer robot TR2 to correct the position of the edge ring 113 based on the correspondence information generated in advance in step S2 and place the edge ring 113 on the lower electrode 111 in the process module PM7. For example, when the destination of the edge ring 113 is the process module PM7, the control unit CU refers to the correspondence information generated in step S2 and corrects the position based on the position information corresponding to the identification information indicating the process module PM7, and places the edge ring 113 on the lower electrode 111. Then, the process ends. Note that in step S8, the case where the unused edge ring 113 stored in the cassette 78 is transferred to the process module PM7 has been described, but the present invention is not limited to this. For example, an unused edge ring 113 stored in a cassette 78 may be placed on the stage 73, its center position may be determined by the line sensor 91, and the position may be corrected based on the position information corresponding to the identification information, before the edge ring 113 is placed on the lower electrode 111. This further improves the transport accuracy of the edge ring 113.

[0059] As described above, according to the embodiment, the control unit CU transports the edge ring 113 in the process module PM7 to the storage module SM and measures the reference position of the process module PM7 using the line sensor 91 in the storage module SM. Then, the control unit CU controls the transfer robot TR2 to correct the position based on the measured reference position of the process module PM7, transport the unused edge ring 113 to the process module PM7, and place it on the lower electrode 111. This allows the edge ring 113 to be placed accurately on the lower electrode 111 in the process module PM7. Therefore, it is no longer necessary to teach the transfer robot TR2 for each process module, and the time required for teaching can be reduced.

[0060] When the unused edge ring 113 is transported to the process module PM7 and placed on the lower electrode 111, the control unit CU may perform the following position correction.

[0061] First, the control unit CU controls the transfer robot TR2 to transfer the used edge ring 113 in the process module PM7 to the storage module SM and place it on the stage 73 in the storage module SM. Next, the control unit CU calculates position information of the used edge ring 113 based on the detection value of the line sensor 91. The position information includes a deviation a, which is a vector quantity. The deviation a is, for example, an assembly error in the process module PM7.

[0062] Subsequently, the control unit CU controls the transfer robot TR2 to store the used edge ring 113 placed on the stage 73 in the cassette 78.

[0063] Next, the control unit CU controls the transfer robot TR2 to place the unused edge ring 113 stored in the cassette 78 on the stage 73. Next, the control unit CU calculates position information of the unused edge ring 113 based on the detection value of the line sensor 91. The position information includes the deviation b, which is a vector quantity.

[0064] Next, the control unit CU controls the transport robot TR2 to receive the unused edge ring 113 placed on the stage 73, transport the unused edge ring 113 to the process module PM7, and place it on the lower electrode 111 in the process module PM7.

[0065] At this time, the control unit CU controls the transfer robot TR2 to place the unused edge ring 113 on the lower electrode 111 so as to absorb the amount of positional deviation calculated based on the positional information of the used edge ring 113 and the positional information of the unused edge ring 113. The amount of positional deviation may be, for example, the difference (ba) between the deviations a and b. This allows the unused edge ring 113 to be placed at a desired position on the lower electrode 111 in the process module PM7.

[0066] Furthermore, the control unit CU may control the transfer robot TR2 to receive the unused edge ring 113 placed on the stage 73 so as to absorb the amount of positional deviation calculated based on the positional information of the used edge ring 113 and the positional information of the unused edge ring 113. This allows the unused edge ring 113 to be placed at a desired position on the lower electrode 111 in the process module PM7.

[0067] Furthermore, the control unit CU may control the transfer robot TR2 to receive the unused edge ring 113 placed on the stage 73, while moving the stage 73 so as to absorb the amount of positional deviation calculated based on the positional information of the used edge ring 113 and the positional information of the unused edge ring 113. In this way, the unused edge ring 113 can be placed at a desired position on the lower electrode 111 in the process module PM7.

[0068] [How to store the edge ring] 4 and 7, an example of a method for storing the edge ring 113 of the embodiment will be described. The method for storing the edge ring 113 of the embodiment can be used, for example, when loading and unloading the edge ring 113 into and from the cassette 78 of the storage module SM in steps S7 and S8 of the method for transporting the edge ring 113 of the embodiment.

[0069] Hereinafter, a case will be described in which the used edge ring 113b used in the process module PM7 is stored in the cassette 78, and the unused edge ring 113a stored in the cassette 78 is transported to the process module PM7 for replacement.

[0070] In the initial state, the gate valve G4 and the door 80 of the storage module SM are closed, and the pressure inside the chamber 70 is regulated by an inert gas such as N2 gas. A cassette 78 is placed inside the storage 75. As shown in FIG. 7(a), six shelves 78a to 78f are arranged in multiple stages inside the cassette 78, and unused edge rings 113a are stored on the upper five shelves 78a to 78e, respectively. The bottom shelf 78f is empty.

[0071] First, the control unit CU raises the storage 75 to a first position. The first position is, for example, a position where the lowest shelf 78f of the cassettes 78 in the storage 75 faces the gate valve G4.

[0072] When the storage 75 moves to the first position, the control unit CU controls the exhaust unit 72 to reduce the pressure in the chamber 70 to be lower than the pressure in the vacuum transfer module TM2. For example, the control unit CU adjusts the pressure in the chamber 70 to less than 50 mTorr (6.7 Pa) and the pressure in the vacuum transfer module TM2 to 50 mTorr (6.7 Pa) to 100 mTorr (13.3 Pa).

[0073] Next, the control unit CU opens the gate valve G4. At this time, since the pressure inside the chamber 70 is lower than the pressure inside the vacuum transfer module TM2, an airflow is formed from the vacuum transfer module TM2 toward the exhaust port 71 provided at the bottom of the chamber 70.

[0074] Next, the control unit CU controls the transfer robot TR2 to store the used edge ring 113b used in the process module PM7 on the lowest shelf 78f of the cassette 78, as shown in FIG. 7B. At this time, contaminants such as particles may be attached to the used edge ring 113b. However, the used edge ring 113b is placed on the lowest shelf 78f. This prevents the contaminants attached to the used edge ring 113b from adhering to the unused edge rings 113a stored on the shelves 78a to 78e above the shelf 78f. Furthermore, an airflow is generated within the chamber 70, flowing from the vacuum transfer module TM2 toward the exhaust port 71 located at the bottom of the chamber 70. As a result, contaminants attached to the used edge ring 113b are discharged from the exhaust port 71 by the airflow flowing toward the exhaust port 71. As a result, contaminants adhering to the used edge ring 113b are prevented from adhering to the unused edge rings 113a stored on the shelves 78a to 78e above the shelf 78f. In this way, even when unused edge rings 113a and used edge rings 113b are mixed in the cassette 78, contamination of the unused edge rings 113a can be prevented.

[0075] Next, the control unit CU moves the storage 75 down to the second position. The second position is, for example, a position where the second shelf 78e from the bottom of the cassettes 78 in the storage 75 faces the gate valve G4.

[0076] When the storage 75 moves to the second position, the control unit CU controls the transfer robot TR2 to retrieve the unused edge ring 113a from the shelf 78e and transfer the unused edge ring 113a to the process module PM7, as shown in FIG. 7C. Then, the control unit CU closes the gate valve G4.

[0077] In this manner, the used edge ring 113b used in the process module PM7 is replaced with an unused edge ring 113a. When subsequently replacing the used edge rings 113b used in other process modules PM1 to PM6, PM8 to PM12 with unused edge rings 113a, the replacement can be performed in order from the bottom of the cassette 78, as in the method described above. This prevents contamination of the unused edge rings 113a.

[0078] [Storage module installation example] An example of installation of the storage module SM will be described with reference to FIGS. 1, 3, 4 and 8. FIG.

[0079] The storage module SM is connected to the side of the vacuum transfer module TM2 opposite to the side to which the vacuum transfer module TM1 is connected. The storage module SM includes the frame 60, the chamber 70, and the machine room 90, as described above.

[0080] The frame 60 supports the chambers 70. For example, the frame 60 is configured to be able to support two chambers 70 arranged side by side in the short direction of the vacuum transfer module TM2. The example in FIG. 8 shows a case where one chamber 70 is installed on the frame 60. The frame 60 forms a passage 60a below the chamber 70. This allows workers to pass through the passage 60a below the chamber 70 to enter and exit areas below the vacuum transfer modules TM1, TM2, process modules PM1 to PM12, etc. This improves the ease of maintenance of the vacuum transfer modules TM1, TM2, process modules PM1 to PM12, etc.

[0081] The chamber 70 is installed on a frame 60. A door 80 is provided on the surface of the chamber 70 opposite to the surface connected to the vacuum transfer module TM2. The door 80 is opened and closed, for example, when removing a cassette 78 from the chamber 70 or when installing the cassette 78 into the chamber 70.

[0082] The machine room 90 is provided in the upper part of the chamber 70. In the example of Fig. 8, the machine room 90 is provided in a partial area in the upper part of the chamber 70, and a passage 90a is formed by the remaining area in the upper part of the chamber 70. This allows workers to pass through the passage 90a above the chamber 70 to enter and exit above the vacuum transfer modules TM1, TM2, process modules PM1 to PM12, etc. This improves the ease of maintenance of the vacuum transfer modules TM1, TM2, process modules PM1 to PM12, etc.

[0083] The embodiments disclosed herein should be considered to be illustrative in all respects and not restrictive, and the above-described embodiments may be omitted, substituted, or modified in various ways without departing from the scope and spirit of the appended claims.

[0084] In the above embodiment, the edge ring is transported between the storage module and the process module. However, the present disclosure is not limited to this. For example, the present disclosure can be similarly applied to the case where, instead of the edge ring, another consumable member attached to the process module, such as a cover ring, a top plate of an upper electrode, or an electrostatic chuck (ESC), is transported. The edge ring may also be a jig for position adjustment.

[0085] In the above embodiment, the case where the line sensor 91, which is an example of a position detection sensor, is installed in the storage module SM has been described, but the present disclosure is not limited to this. The position detection sensor may be installed in a position different from the storage module SM, such as the fork FK1 at the tip of the transport robot TR1, the fork at the tip of the transport robot TR2, the gate valves G1 to G4, or the vacuum transport modules TM1 and TM2.

[0086] FIG. 9 illustrates a position detection sensor attached to the fork FK1 of the transfer robot TR1. FIG. 9(a) is a plan view of the fork FK1 holding the edge ring 113, and FIG. 9(b) is a cross-sectional view taken along line 9B-9B in FIG. 9(a). As shown in FIG. 9(a), the fork FK1 has a generally U-shape in plan view. The fork FK1 includes three pads PD and a capacitance sensor CS. The pads PD have, for example, a truncated cone shape and are arranged along the inner periphery of the edge ring 113. The pads PD hold the edge ring 113 by abutting the upper surface of the truncated cone shape against the lower surface of the edge ring 113. The capacitance sensor CS is embedded, for example, in the base end of the fork FK1. A conductor CD is provided in the edge ring 113 at a position whose center coincides with the center of the capacitance sensor CS in plan view when the edge ring 113 is installed at a predetermined position (e.g., the center position) of the fork FK1. The conductor CD is made of, for example, aluminum. When the edge ring 113 is held by the fork FK1, the capacitance sensor CS detects capacitance according to its positional relationship with the conductor CD provided on the edge ring 113 and outputs the detected value (detection result) to the control unit CU. The control unit CU calculates position information of the edge ring 113 based on the detected value by the capacitance sensor CS. The capacitance sensor CS and the conductor CD are examples of a position detection sensor. [Explanation of symbols]

[0087] 10 Chambers 91 Line sensor CU control unit PM1~PM12 Process Modules SM Storage Module TM1, TM2 vacuum transfer module TR1, TR2 transport robot

Claims

1. a chamber within which the consumable component is mounted; a storage module for storing the consumable component; a position detection sensor for detecting the position of the consumable member; a vacuum transfer module connected to the chamber and the storage module, the vacuum transfer module having a transfer robot that transfers the consumable parts between the chamber and the storage module; A control unit; Equipped with The control unit (f) detecting the position of a used consumable component attached to the chamber by the position detection sensor; (g) detecting the position of an unused consumable component stored in the storage module by the position detection sensor; (h) transferring the unused consumable component from the storage module to the chamber; configured to run step (h) includes correcting the position of the unused consumable component to be transferred from the storage module to the chamber based on the position of the used consumable component detected in step (f) and the position of the unused consumable component detected in step (g); Processing system.

2. the storage module is detachable from the vacuum transfer module; The processing system of claim 1 .

3. the storage module has an exhaust port for reducing the pressure inside; The control unit (d) further performing the step of reducing the pressure inside the storage module through the exhaust port to a pressure lower than the pressure inside the vacuum transfer module, and connecting the inside of the storage module to the inside of the vacuum transfer module. The processing system according to claim 1 or 2.

4. the position detection sensor detects the horizontal position of the consumable member; The processing system according to any one of claims 1 to 3.

5. the storage module is capable of storing a plurality of the consumable parts at intervals in the vertical direction; The control unit (e) before step (h), further performing the step of storing the used consumable item at a position lower than the unused consumable items stored inside the storage module. The processing system according to any one of claims 1 to 4.

6. the consumable member has an annular shape, the position detection sensor includes an inner circumference sensor that detects the position of at least the inner circumference of the consumable member; The processing system according to any one of claims 1 to 5.

7. the position detection sensor includes a camera; The processing system according to any one of claims 1 to 6.

8. the consumable member is provided inside the chamber and includes an edge ring placed on an upper surface of a mounting table on which a substrate is placed so as to surround the periphery of the substrate; The processing system according to any one of claims 1 to 7.

9. The position detection sensor is provided in the storage module. The processing system according to any one of claims 1 to 8.

10. the position detection sensor is provided on a transport path of the consumable component from the storage module to the chamber; The processing system according to any one of claims 1 to 9.

11. 1. A method for transporting a consumable item in a processing system including a chamber in which a consumable item is attached, a storage module that stores the consumable item, a position detection sensor that detects a position of the consumable item, and a vacuum transport module that is connected to the chamber and the storage module and has a transport robot that transports the consumable item between the chamber and the storage module, the method comprising: (f) detecting the position of a used consumable component attached to the chamber by the position detection sensor; (g) detecting the position of an unused consumable component stored in the storage module by the position detection sensor; (h) transferring the unused consumable component from the storage module to the chamber; and step (h) includes correcting the position of the unused consumable component to be transferred from the storage module to the chamber based on the position of the used consumable component detected in step (f) and the position of the unused consumable component detected in step (g); Transportation method.

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