Information processing device, optical device, information processing method, method of using optical device, and information processing program

Abstract

To provide an information processing device, an optical device, an information processing method, a method of using the optical device, and an information processing program capable of managing the position of a defect with high precision.SOLUTION: An information processing device 10 includes a size acquisition unit 11 for acquiring a size SZ of a defect region 52 contained within a sample 50, a defect coordinate determination unit 12 for determining representative position coordinates of the defect region 52 on the basis of multiple distinct information processing operations performed on the basis of the size SZ of the defect region 52, and a storage unit 13 for storing the defect region 52 associated with the representative position coordinates.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present disclosure relates to an information processing device, an optical device, an information processing method, a method for using an optical device, and an information processing program. [Background technology]

[0002] Patent Document 1 describes a technique for detecting defects present in a sample. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Publication No. 2020-085839 Summary of the Invention [Problem to be solved by the invention]

[0004] It is necessary to accurately control the location of defects in the sample.

[0005] The object of the present disclosure has been made to solve such problems, and is to provide an information processing device, an optical device, an information processing method, a method for using an optical device, and an information processing program that are capable of managing the position of defects with high precision. [Means for solving the problem]

[0006] The information processing device according to the present disclosure includes a size acquisition unit that acquires the size of a defect area contained in a sample, and a defect coordinate determination unit that determines representative position coordinates of the defect area by different information processing based on the size.

[0007] The information processing device may further include a storage unit that stores the defect area in association with the representative position coordinates.

[0008] In the above-mentioned information processing device, the defect coordinate determination unit may, as the information processing, when the size is equal to or smaller than a predetermined threshold, set the brightness peak position in the defective area as the representative position coordinate of the defective area, and when the size is larger than the predetermined threshold, set the centroid position of the defective area as the representative position coordinate of the defective area.

[0009] In the information processing device, when the size is equal to or smaller than the predetermined threshold, the defect coordinate determination section may determine the brightness peak position corrected based on the size as the representative position coordinate of the defect area.

[0010] In the information processing device, when the size is equal to or smaller than the predetermined threshold, the defect coordinate determination unit may determine the brightness peak position as the representative position coordinate of the defect area by using a correction value in which the size is used as a parameter, and the larger the size, the greater the correction amount.

[0011] In the above information processing device, the defect coordinate determination unit may, as information processing, when the size is equal to or smaller than a first threshold, set the brightness peak position in the defective area as the representative position coordinate of the defective area, when the size is greater than a second threshold that is greater than the first threshold, set the centroid position of the defective area as the representative position coordinate of the defective area, and when the size is greater than the first threshold and equal to or smaller than the second threshold, set the position obtained by correcting the brightness peak position based on the centroid position and the size as the representative position coordinate of the defective area.

[0012] In the information processing device, when the size is greater than the first threshold value and equal to or less than the second threshold value, the defect coordinate determination unit may use a correction value having the centroid position and the size as parameters, and the larger the size, the larger the correction amount, to correct the brightness peak position, and use the corrected position as the representative position coordinate of the defect area.

[0013] In the information processing apparatus, the defect coordinate determining section may perform correction with an amount of correction such that the larger the size, the closer the position to the centroid position.

[0014] In the information processing apparatus, the defect coordinate determining section may perform correction with an amount of correction such that the smaller the size, the closer the position to the brightness peak position.

[0015] In the information processing device, when the size is equal to or smaller than the first threshold, the defect coordinate determination unit may determine the brightness peak position corrected based on the size as the representative position coordinate of the defect area.

[0016] The optical device according to the present disclosure includes an optical system that illuminates a sample with illumination light and collects detection light from the illuminated sample, a detector that detects the detection light, and the information processing device described above.

[0017] The information processing method according to the present disclosure includes a step of having a size acquisition unit acquire the size of a defect area contained in a sample, and a step of having a defect coordinate determination unit determine representative position coordinates of the defect area by different information processing based on the size.

[0018] The information processing method may further include a step of storing the defect area in association with the representative position coordinates in a storage unit.

[0019] In the above information processing method, in the step of causing the defect coordinate determination unit to determine, as the information processing, if the size is equal to or smaller than a predetermined threshold, the defect coordinate determination unit may determine the brightness peak position in the defective area as the representative position coordinate of the defective area, and if the size is larger than the predetermined threshold, the defect coordinate determination unit may determine the centroid position of the defective area as the representative position coordinate of the defective area.

[0020] In the above information processing method, in the step of causing the defect coordinate determination unit to determine, if the size is equal to or less than the predetermined threshold, the defect coordinate determination unit may determine the brightness peak position corrected based on the size as the representative position coordinate of the defect area.

[0021] In the above information processing method, in the step of causing the defect coordinate determination unit to determine, if the size is equal to or smaller than the predetermined threshold, the defect coordinate determination unit may be configured to determine the brightness peak position as the representative position coordinate of the defect area by using a correction value that uses the size as a parameter, the correction amount being larger the larger the size.

[0022] In the above information processing method, in the step of causing the defect coordinate determination unit to determine, as information processing, if the size is equal to or smaller than a first threshold, the defect coordinate determination unit may determine the brightness peak position in the defective area as the representative position coordinate of the defective area; if the size is greater than a second threshold that is greater than the first threshold, the defect coordinate determination unit may determine the centroid position of the defective area as the representative position coordinate of the defective area; and if the size is greater than the first threshold and equal to or smaller than the second threshold, the defect coordinate determination unit may determine a position obtained by correcting the brightness peak position based on the centroid position and the size as the representative position coordinate of the defective area.

[0023] In the above information processing method, in the step of causing the defect coordinate determination unit to determine, when the size is greater than the first threshold value and equal to or less than the second threshold value, the defect coordinate determination unit may determine, as the representative position coordinate of the defect area, a position obtained by correcting the brightness peak position using a correction value having the centroid position and the size as parameters, the correction amount increasing as the size increases.

[0024] In the information processing method, in the step of causing the defect coordinate determination unit to determine the defect coordinate, the defect coordinate determination unit may be caused to make correction by an amount of correction such that the larger the size, the closer the position to the centroid position.

[0025] In the information processing method, in the step of causing the defect coordinate determination unit to determine the defect coordinate, the defect coordinate determination unit may be caused to make correction by an amount of correction such that the smaller the size, the closer the position to the brightness peak position.

[0026] In the above information processing method, in the step of causing the defect coordinate determination unit to determine, if the size is equal to or less than the first threshold, the defect coordinate determination unit may be caused to set the brightness peak position corrected based on the size as the representative position coordinate of the defect area.

[0027] A method of using an optical device according to the present disclosure includes the steps of illuminating a sample with illumination light and collecting detection light from the illuminated sample with an optical system, detecting the detection light with a detector, and performing the information processing method described in claim 10 or 11.

[0028] The information processing program of the present disclosure causes a computer to execute the following: acquire the size of a defect area contained in a sample with a size acquisition unit; and determine representative position coordinates of the defect area with a defect coordinate determination unit through different information processing based on the size. [Effects of the Invention]

[0029] According to the present disclosure, the position of a defect can be managed with high accuracy. [Brief explanation of the drawings]

[0030] [Figure 1] 1 is a block diagram illustrating an information processing device according to a first embodiment. [Figure 2] 1 is a block diagram illustrating an information processing device according to a first embodiment. [Figure 3] 3 is a diagram illustrating an image of a defect included in a sample captured by the information processing device according to the first embodiment. FIG. [Figure 4] FIG. 10 is a diagram illustrating an example of a low-smoothing image of a defect. [Figure 5]FIG. 10 is a diagram illustrating a highly smoothed image of a defect. [Figure 6] 3 is a diagram illustrating an example of a defective area and the size of the defective area in the information processing device according to the first embodiment. FIG. [Figure 7] 1 is a graph illustrating detected coordinate errors in the information processing device according to the first embodiment, where the horizontal axis indicates the size of the defective area and the vertical axis indicates the detected coordinate errors. [Figure 8] FIG. 2 is a flowchart illustrating an information processing method according to the first embodiment. [Figure 9] FIG. 2 is a flowchart illustrating an information processing method according to the first embodiment. [Figure 10] 1 is a block diagram illustrating an information processing device according to a first embodiment. [Figure 11] FIG. 10 is a configuration diagram illustrating an optical device according to a second embodiment. [Figure 12] FIG. 10 is a flowchart illustrating a method of using the optical device according to the second embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0031] Hereinafter, a specific configuration of this embodiment will be described with reference to the drawings. The following description shows a preferred embodiment of the present disclosure, and the scope of the present disclosure is not limited to the following embodiment. In the following description, parts with the same reference numerals indicate substantially the same content.

[0032] <Embodiment 1> An information processing device and an information processing method according to embodiment 1 will be described. The information processing device of this embodiment may be applied to an optical device including an inspection device that inspects a sample for defects, etc., and a review device that displays an image of the sample. That is, the information processing device of this embodiment may be connected to the above-mentioned optical device or incorporated into the optical device. The inspection device may include an image correction device, a review device, a storage device, etc. The review device may include an image correction device, an inspection device, a storage device, etc. The information processing device may perform image processing on images input to the image correction device, images detected by the inspection device, images stored in the storage device, etc.

[0033] 1 and 2 are block diagrams illustrating an information processing device 10 according to the first embodiment. As shown in FIG. 1, the information processing device 10 includes a size acquisition unit 11 and a defect coordinate determination unit 12. As shown in FIG. 2, the information processing device 10 may further include a storage unit 13 in addition to the size acquisition unit 11 and the defect coordinate determination unit 12. Note that the information processing device 10 may be connected to a storage device (not shown) provided outside the information processing device 10 in a state capable of communicating information with the storage device. The information processing device 10 may cause the storage device to function in the same manner as the storage unit 13.

[0034] Fig. 3 is a diagram illustrating an image G50 of a defect 51 contained in a sample 50 captured by the information processing device 10 according to the first embodiment. Fig. 4 is a diagram illustrating a low-smoothing image of the defect. Fig. 5 is a diagram illustrating a high-smoothing image of the defect. Fig. 6 is a diagram illustrating a defect area 52 and a size SZ of the defect area 52 in the information processing device 10 according to the first embodiment.

[0035] As shown in FIGS. 3 to 6 , the size acquisition unit 11 acquires the size SZ of a defect area 52 included in the sample 50. Specifically, the size acquisition unit 11 acquires the size SZ of a defect area 52 included in the sample 50 from an image G50 obtained by capturing a defect 51 included in the sample 50. The size acquisition unit 11 acquires the size SZ of the defect area 52, for example, using the following procedure. Note that the procedure for acquiring the size SZ of the defect area 52 does not exclude other procedures as long as the size SZ of the defect area 52 including the defect 51 can be acquired according to a predetermined standard. For example, the size acquisition unit 11 does not exclude acquiring the size SZ of the defect area 52, such as a size SZ of a predetermined range from the maximum bright point of the defect 51, or a size SZ of a predetermined range from the center of gravity of the defect 51 on the image G50. Note that the defect area 52 may be synonymous with the defect 51. Therefore, in the following description, the defect area 52 may be appropriately read as the defect 51.

[0036] The procedure for obtaining the size SZ of the defect area 52 in this embodiment is as follows. First, as shown in FIG. 4, an image of a defect 51 included in a sample 50 is subjected to low smoothing to obtain a low-smoothing image of the defect 51. Low smoothing involves slight blurring, i.e., a process of blurring the focus to a lesser extent than high smoothing. Next, as shown in FIG. 5, an image of a defect 51 included in a sample 50 is subjected to high smoothing to obtain a high-smoothing image of the defect 51. High smoothing involves, for example, smoothing that is higher than low smoothing. In other words, it involves a process of blurring the focus to a greater extent than low smoothing. In this way, multiple images with different blurring methods are prepared for an image G50 of a defect 51 included in a sample 50.

[0037] Next, the size acquisition unit 11 acquires the difference in luminance between the high-smoothing image and the low-smoothing image.

[0038] 6, the size acquisition unit 11 acquires a defective area 52 in which a portion where the difference between the low-smoothing image and the high-smoothing image is higher than a predetermined threshold is defined as a boundary line 53. In other words, the size acquisition unit 11 acquires the area surrounded by the boundary line 53 as the defective area 52. In FIG. 6, the boundary line 53 is shown overlapping the image in FIG. 3.

[0039] Next, the size acquisition unit 11 acquires the smallest frame portion 54 among the frame portions 54 of a predetermined shape that contain the defective area 52. The shape of the frame portion 54 includes, for example, a rectangle. Note that the shape of the frame portion 54 is not limited to a rectangle, and may be any shape such as a circle, an ellipse, or a triangle. The size acquisition unit 11 acquires a predetermined length of the frame portion 54 as the size SZ of the defective area 52. For example, if the frame portion 54 is rectangular, the diagonal line may be used as the size SZ of the defective area 52. If the frame portion 54 is circular, the diameter may be used as the size SZ of the defective area 52. In certain cases, such as an ellipse or a triangle, the frame portion 54 may be used as the size SZ of the defective area 52, but a specific length may be used as the size SZ of the defective area 52.

[0040] The defect coordinate determination unit 12 determines the representative position coordinate of the defective area 52 by performing a plurality of different information processing operations based on the size SZ of the defective area 52. For example, as the information processing operation, if the size SZ of the defective area 52 is equal to or smaller than a predetermined threshold, the defect coordinate determination unit 12 determines the brightness peak position P1 in the defective area 52 as the representative position coordinate of the defective area 52. On the other hand, as the information processing operation, if the size SZ of the defective area 52 is larger than the predetermined threshold, the defect coordinate determination unit 12 determines the centroid position P2 of the defective area 52 as the representative position coordinate of the defective area 52.

[0041] Here, the centroid position may be the center position of frame portion 54 or the center position of defective area 52. Information processing in which brightness peak position P1 in defective area 52 is used as the representative position coordinate of defective area 52 is called brightness peak processing. Information processing in which centroid position P2 of defective area 52 is used as the representative position coordinate of defective area 52 is called centroid processing. Therefore, defect coordinate determination unit 12 switches between brightness peak processing and centroid processing using a predetermined threshold as the boundary.

[0042] The storage unit 13 stores various information (various data) used by the information processing device 10. The storage unit 13 may store the image G50, or stores information on the defective area 52, the boundary line 53, and the frame portion 54. The storage unit 13 stores the defective area 52 in association with the representative position coordinates.

[0043] When the size SZ of the defective area 52 is equal to or smaller than a predetermined threshold, the representative position coordinates of the defective area 52 may differ due to differences between optical devices. For example, it is conceivable that the representative position coordinates of the defective area 52 may differ between optical devices due to the influence of the aberration of the objective lens of the optical device, the environmental conditions due to the imaging time and imaging location of G50, etc. Therefore, as follows, when the size SZ of the defective area 52 is equal to or smaller than a predetermined threshold, the defect coordinate determination unit 12 determines the brightness peak position P1 corrected based on the size SZ of the defective area 52 as the representative position coordinates of the defective area 52.

[0044] 7 is a graph illustrating detection coordinate errors in the information processing device 10 according to the first embodiment, with the horizontal axis representing the size SZ of the defective area 52 and the vertical axis representing the detection coordinate error. As indicated by the black dots (●) in FIG. 7, for example, the detection error ΔX in the X-axis direction and the detection error ΔY in the Y-axis direction between the representative position coordinates (brightness peak coordinates) of the defective area 52 in the image G50 captured by the optical device (#1) and the representative position coordinates (brightness peak coordinates) of the defective area 52 in the image G50 captured by the optical device (#2) vary depending on the size SZ of the defective area 52. For example, the detection errors ΔX and ΔY may increase depending on the size SZ of the defective area 52. Here, the horizontal and vertical directions of the image G50 in FIG. 6 are defined as the X-axis and Y-axis directions, respectively. Furthermore, for example, the detection errors ΔX and ΔY may be values ​​obtained by subtracting the representative position coordinates (brightness peak coordinates) of the defect area 52 in the image G50 captured by the optical device (#2) from the representative position coordinates (brightness peak coordinates) of the defect area 52 in the image G50 captured by the optical device (#1).

[0045] The defect coordinate determination unit 12 uses the following equations (1) and (2) as correction equations for the representative position coordinates (brightness peak coordinates) for the optical device (#1) to correct them to approach the representative position coordinates for the optical device (#2).

[0046] ΔX=(Ax)×exp[(Dsz) / (Bx)]+Constx (1) ΔY=(Ay)×exp[(Dsz) / (By)]+Consty (2)

[0047] Here, Dsz indicates the size SZ of the defective area 52. Ax, Ay, Bx, and By are correction coefficients. Constx and Consty are constants. Ax, Ay, Bx, By, Constx, and Consty may be values ​​greater than or equal to 0 or negative values. The above equations (1) and (2) use the size SZ of the defective area 52 as a parameter. Furthermore, the above equations (1) and (2) are correction equations such that the larger the size SZ of the defective area 52, the larger the amount of correction. The correction coefficients and constants can be found by fitting equations (1) and (2) to the measurement points (black dots ●) in Figure 7.

[0048] If there is a detection error due to an instrumental difference between the representative position coordinates (brightness peak coordinates) of the defect area 52 in the image G50 captured by the optical device (#1) and the representative position coordinates (brightness peak coordinates) of the defect area 52 in the image G50 captured by the optical device (#2), for example, the detection errors ΔX and ΔY are added (i.e., corrected) to the representative position coordinates (brightness peak coordinates) of the defect area 52 in the image G50 captured by the optical device (#1), and the result is used as the brightness peak coordinates, which are then used as the representative position coordinates of the defect area 52. This reduces the difference between the representative position coordinates of the images G50 captured by the optical device (#1) and the optical device (#2). Therefore, the position of the defect 51 can be managed with high precision.

[0049] In this way, when the size SZ of the defective area 52 is equal to or smaller than a predetermined threshold, the defect coordinate determination unit 12 determines the brightness peak position P1 corrected based on the size SZ of the defective area 52 as the representative position coordinate of the defective area 52. Specifically, when the size SZ of the defective area 52 is equal to or smaller than a predetermined threshold, the defect coordinate determination unit 12 may determine the brightness peak position corrected using a correction value using the size SZ of the defective area 52 as a parameter as the representative position coordinate of the defective area 52. Here, the correction value includes, for example, correction values ​​such as those shown in equations (1) and (2) that increase in amount as the size SZ of the defective area 52 increases. Note that the correction formulas used to determine the correction values ​​are not limited to equations (1) and (2). For example, linear and quadratic formulas for the size SZ of the defective area 52 are not excluded. Furthermore, instead of using the correction formulas, correction values ​​experimentally determined in advance from measured values ​​may be compiled in a table.

[0050] In this way, by using a correction value for the results of optical device (#1), the results of optical device (#1) can be aligned with those of optical device (#2), and the instrumental difference between optical device (#1) and optical device (#2) for the representative coordinate position of defective area 52 can be eliminated.

[0051] <Modification> In this modified example, the defect coordinate determination unit 12 determines the brightness peak position P1 in the defective area 52 as the representative position coordinate of the defective area 52 and the centroid position P2 of the defective area 52 as the representative position coordinate of the defective area 52 by weighting based on the size SZ of the defective area 52. For example, the defect coordinate determination unit 12 corrects the brightness peak position P1 based on the centroid position P2 and the size SZ of the defective area 52 and determines the representative position coordinate of the defective area 52. This further reduces detection errors between the optical device (#1) and the optical device (#2). The weighting is performed, for example, near a predetermined threshold value for switching between centroid processing and brightness peak processing. Specifically, the defect coordinate determination unit 12 sets a first threshold value and a second threshold value for switching between information processing. The second threshold value is greater than the first threshold value.

[0052] The defect coordinate determination unit 12 performs brightness peak processing when the size SZ of the defective area 52 is equal to or smaller than the first threshold. At this time, the defect coordinate determination unit 12 may perform processing to correct the brightness peak position P1 so as to mitigate differences between devices using the process described in the first embodiment. When the size SZ of the defective area 52 is greater than the second threshold, the defect coordinate determination unit 12 performs centroid processing. When the size SZ of the defective area 52 is greater than the first threshold but equal to or smaller than the second threshold, the defect coordinate determination unit 12 determines the representative position coordinate by weighting according to the size SZ of the defective area 52 using the following equations (3) and (4). Note that the first threshold may be obtained by subtracting the first threshold from the second threshold (second threshold - first threshold). As a result, when the size SZ of the defective area 52 is slightly smaller than the second threshold, the representative position coordinate approaches the centroid position P2 based on the following equations (3) and (4). This ensures the continuity of the representative position coordinate when the size SZ of the defective area 52 is near the second threshold.

[0053] The coordinates (X, Y) in equations (3) and (4) indicate the representative position coordinates after weighting. The coordinates (Xp, Yp) indicate the coordinates of the luminance peak position P1 (e.g., the luminance peak coordinates). The coordinates (Xc, Yc) indicate the coordinates of the centroid position P2. The coordinates (Xp, Yp) of the luminance peak position P1 may be coordinates that have been corrected to reduce instrument differences using the process described in the first embodiment.

[0054] X = Xp + (Xc - Xp) × [(Dsz - first threshold) / first threshold] (3) Y = Yp + (Yc - Yp) × [(Dsz - first threshold) / first threshold] (4)

[0055] In this way, as information processing, when the size SZ of the defective area 52 is equal to or smaller than the first threshold, the defect coordinate determination unit 12 determines the brightness peak position P1 in the defective area 52 as the representative position coordinate of the defective area 52. Note that when the size SZ of the defective area 52 is equal to or smaller than the first threshold, the defect coordinate determination unit 12 may determine the brightness peak position P1 corrected based on the size SZ as the representative position coordinate of the defective area 52. On the other hand, when the size SZ of the defective area 52 is greater than the second threshold, the defect coordinate determination unit 12 determines the centroid position P2 of the defective area 52 as the representative position coordinate of the defective area. When the size SZ of the defective area 52 is greater than the first threshold but equal to or smaller than the second threshold, the defect coordinate determination unit 12 determines the position obtained by correcting the brightness peak position P1 based on the centroid position P2 and the size SZ of the defective area 52 as the representative position coordinate of the defective area.

[0056] Specifically, when the size SZ of the defective area 52 is greater than the first threshold value and equal to or less than the second threshold value, the defect coordinate determination unit 12 determines the position obtained by correcting the brightness peak position P1 in the defective area 52 using a correction value with the centroid position P2 (i.e., Xc and Yc in equations (3) and (4)) and the size SZ of the defective area 52 (i.e., Dsz in equations (3) and (4)) as parameters as the representative position coordinate of the defective area 52. Here, the correction value includes a correction value that increases as the size SZ of the defective area 52 increases. For example, the larger the size SZ of the defective area 52, the more the defect coordinate determination unit 12 corrects the position by an amount that moves the defective area closer to the centroid position P2. Alternatively, the defect coordinate determination unit 12 may correct the defective area 52 by an amount that moves the defective area closer to the brightness peak position P1 as the size SZ decreases. Furthermore, based on equations (3) and (4), when the size SZ of the defective area 52 is slightly larger than the first threshold, the representative position coordinates become closer to the bright spot peak position P1, and the continuity of the representative position coordinates when the size SZ of the defective area 52 is close to the first threshold is ensured. As in this example, the defect coordinate determination unit 12 performs correction with an amount of correction such that the smaller the size SZ of the defective area 52, the closer the position becomes to the bright spot peak position P1.

[0057] Next, an information processing method using the information processing device of this embodiment will be described. Figures 8 and 9 are flow charts illustrating an information processing method according to embodiment 1. As shown in Figures 8 and 9, in step S11, the size SZ of the defect area 52 is acquired. Specifically, the size acquisition unit 11 is caused to acquire the size SZ of the defect area 52 included in the image G50 obtained by capturing the sample 50.

[0058] Next, in step S12, representative position coordinates of the defective area 52 are determined. For example, the defect coordinate determination unit 12 determines the representative position coordinates of the defective area 52 by performing a plurality of different information processes based on the size SZ of the defective area 52. Next, in step S13, the defective area 52 may be associated with the representative position coordinates and stored in the storage unit 13.

[0059] In step S12, defect coordinate determination unit 12 performs information processing such that if size SZ of defective area 52 is equal to or smaller than a predetermined threshold, it performs brightness peak processing, and if size SZ of defective area 52 is larger than the predetermined threshold, it performs centroid processing. If size SZ of defective area 52 is equal to or smaller than the predetermined threshold, defect coordinate determination unit 12 may determine a position obtained by correcting brightness peak position P1 based on size SZ of defective area 52 as the representative position coordinate of defective area 52.

[0060] Furthermore, in step S12, the defect coordinate determination unit 12 may perform brightness peak processing as information processing when the size SZ of the defective area 52 is equal to or smaller than a first threshold, and may perform centroid processing when the size SZ of the defective area 52 is greater than a second threshold. When the size SZ of the defective area 52 is greater than the first threshold but equal to or smaller than the second threshold, the defect coordinate determination unit 12 may determine, as the representative position coordinate of the defective area 52, a position obtained by correcting the brightness peak position P1 based on the centroid position P2 and the size SZ of the defective area 52.

[0061] The information processing device 10 described above may include a computer such as a personal computer or a server. FIG. 10 is a block diagram illustrating the information processing device 10 according to the first embodiment. As shown in FIG. 10, the information processing device 10 further includes a processor PRC, a memory MMR, and a user interface UI. The storage unit 13 stores programs for the processes executed by each component of the information processing device 10. The processor PRC also loads the programs from the storage unit 13 into the memory MMR and executes the programs. As a result, the processor PRC realizes the functions of each component of the information processing device 10, such as the size acquisition unit 11 and the defect coordinate determination unit 12. The user interface UI may include input devices such as a keyboard, a mouse, and an imaging device, and output devices such as a display, a printer, and a speaker.

[0062] Each component of the information processing device 10 may be realized by dedicated hardware. Furthermore, some or all of the components may be realized by general-purpose or dedicated circuits, processor PRCs, etc., or a combination of these. These may be configured by a single chip, or by multiple chips connected via a bus. Some or all of the components may be realized by a combination of the above-mentioned circuits, processor PRCs, etc., and programs. The processor PRC may be a CPU (Central Processing Unit), a GPU (Graphics Processing Unit), an FPGA (Field-Programmable Gate Array), a quantum processor (quantum computer control chip), etc.

[0063] Furthermore, when some or all of the components of the information processing device 10 are realized by a plurality of information processing devices 10, circuits, etc., the plurality of information processing devices 10, circuits, etc. may be centrally or distributed. For example, the information processing devices 10, circuits, etc. may be realized in a form in which they are connected to each other via a communication network by a client-server system, a cloud computing system, etc. Furthermore, the functions of the information processing device 10 may be provided in a SaaS (Software as a Service) format.

[0064] Next, the effects of this embodiment will be described. The information processing device 10 of this embodiment determines the representative position coordinates of the defect area 52 by different information processing based on the size SZ of the defect area 52. Therefore, the defect positions can be managed with high accuracy. For example, when the sample 50 is a mask blank including multiple layers, managing the defect positions with high accuracy makes it possible to more efficiently and accurately perform defect mitigation, which neutralizes defects in the multiple layers with an absorber.

[0065] Furthermore, the information processing device 10 performs brightness peak processing or centroid processing depending on whether the size SZ of the defective area 52 is greater than or equal to a predetermined threshold value, thereby determining the representative position coordinates of the defective area 52. This allows the position of the defect to be managed with even higher accuracy.

[0066] If the size SZ of the defective area 52 is equal to or smaller than a predetermined threshold, the representative position coordinates are corrected using a correction value that uses the size SZ of the defective area 52 as a parameter. Therefore, even if the representative position coordinates of the defective area 52 differ due to differences in the optical device, errors due to differences in the device can be suppressed by using a correction value that takes the differences into account.

[0067] Furthermore, the larger the size SZ of the defective area 52, the larger the correction amount included in the correction value, so that errors due to machine differences can be further reduced.

[0068] <Embodiment 2> Next, an optical device according to a second embodiment will be described. The optical device of this embodiment includes the information processing device 10 described above. The optical device is, for example, a mask inspection device used in a semiconductor manufacturing process. The optical device may also be a review device. FIG. 11 is a configuration diagram illustrating an optical device 1 according to the second embodiment. As shown in FIG. 11, the optical device 1 includes an information processing device 10, an optical system 20, and a detector 30.

[0069] The optical system 20 includes a separating means 21, an objective lens 22, and a condenser lens 23. The optical system 20 may further include other optical components, such as a scanning means. The optical system 20 may also include a light source LS, or may introduce illumination light L1 from a light source LS separate from the optical device 1. The sample 50 is placed on a stage 55. Here, for convenience of explanation of the optical device 1, an αβγ Cartesian coordinate system is introduced. The upper surface of the stage 55 is defined as the αβ plane, and the direction perpendicular to the upper surface of the sample 50 is defined as the γ axis direction. The α axis and the β axis may correspond to the X axis and the Y axis in the image G50.

[0070] Illumination light L1 generated from the light source LS is incident on a separation means 21 such as a half mirror. The separation means 21 transmits part of the incident illumination light L1 and reflects part of it. The illumination light L1 reflected by the separation means 21 is incident on an objective lens 22. The objective lens 22 focuses the incident illumination light L1 on the sample 50. The illumination light L1 focused by the objective lens 22 illuminates the sample 50. Detection light R1 is emitted from the sample 50 illuminated by the illumination light L1.

[0071] The detection light R1 may include at least one of reflected light, scattered light, fluorescence, and luminescence. The reflected light includes light that is illumination light L1 reflected by the sample 50. The scattered light includes light that is illumination light L1 scattered by the sample 50. The fluorescence includes fluorescence from the sample 50 excited by the illumination light L1. The luminescence includes luminescence from the sample 50 excited by the illumination light L1. If the sample 50 includes a defect 51, the detection light R1 includes information about the defect 51 contained in the sample 50.

[0072] The detection light R1 is incident on the objective lens 22. The objective lens 22 collects and transmits the detection light R1. The detection light R1 that has passed through the objective lens 22 is incident on the separation means 21. The separation means 21 transmits a portion of the incident detection light R1 and reflects a portion of it. The detection light R1 that has passed through the separation means 21 is incident on the condenser lens 23. The condenser lens 23 collects the incident detection light R1 onto the detector 30. In this way, the optical system 20 illuminates the sample 50 with the illumination light L1 and collects the detection light R1 from the illuminated sample 50.

[0073] The detector 30 detects the detection light R1. The detector 30 may be, for example, a camera using TDI. The detector 30 outputs the detected detection result to the information processing device 10. The detector 30 may output the detected detection result to a storage device (not shown) separate from the optical device 1. The information processing device 10 may input the detection result directly from the detector 30 or may input the detection result from the storage device. The information processing device 10 performs the operations shown in the first embodiment.

[0074] Next, a method of using the optical device 1 will be described. Fig. 12 is a flow chart illustrating a method of using the optical device 1 according to the second embodiment. As shown in Fig. 12, in step S21, detection light R1 from the sample 50 is collected. Specifically, the sample 50 is illuminated with illumination light L1, and the detection light R1 from the illuminated sample 50 is collected by the optical system 20. Next, in step S22, the detection light R1 is detected by the detector 30. Next, in step S23, the information processing device 10 performs the above-mentioned information processing.

[0075] According to this embodiment, the optical device 1 can process the detection results using the information processing device 10, so that the positions of defects can be managed with high accuracy. Other configurations and effects are included in the description of the first embodiment.

[0076] Although the embodiments of the present disclosure have been described above, the present disclosure includes appropriate modifications that do not impair the objects and advantages thereof, and is not limited to the above-described embodiments. Furthermore, the configurations in embodiments 1 and 2 may be combined as appropriate. The following information processing program for causing a computer to execute the above-described information processing method is also within the scope of the technical concept of the present disclosure.

[0077] (Appendix 1) The size of the defect area included in the sample is acquired by the size acquisition unit; causing a defect coordinate determining unit to determine representative position coordinates of the defect area by different information processing based on the size; An information processing program that causes a computer to perform certain tasks. (Appendix 2) storing the defect area in a storage unit in association with the representative position coordinates; 2. The information processing program according to claim 1, further causing a computer to execute the steps. (Appendix 3) When the defect coordinate determination unit determines the defect coordinates, The defect coordinate determination unit performs the information processing. If the size is equal to or smaller than a predetermined threshold, a luminance peak position in the defective area is determined as the representative position coordinate of the defective area; If the size is larger than the predetermined threshold, the centroid position of the defect area is determined to be the representative position coordinate of the defect area. An information processing program according to appendix 1 or 2. (Appendix 4) When the defect coordinate determination unit determines the defect coordinates, the defect coordinate determination unit, If the size is equal to or smaller than the predetermined threshold, the brightness peak position corrected based on the size is determined as the representative position coordinate of the defect area. An information processing program as described in Appendix 3. (Appendix 5) When the defect coordinate determination unit determines the defect coordinates, the defect coordinate determination unit, If the size is equal to or smaller than the predetermined threshold value, the brightness peak position corrected by the correction value, which uses the size as a parameter and the larger the size, the larger the correction amount, is set as the representative position coordinate of the defective area. An information processing program as described in Appendix 4. (Appendix 6) When the defect coordinate determining unit determines The defect coordinate determination unit performs the following information processing: If the size is equal to or smaller than a first threshold, a luminance peak position in the defective area is determined as the representative position coordinate of the defective area; If the size is greater than a second threshold value that is greater than the first threshold value, the center of gravity of the defect area is determined to be the representative position coordinate of the defect area; When the size is greater than the first threshold value and equal to or less than the second threshold value, a position obtained by correcting the brightness peak position based on the centroid position and the size is determined as the representative position coordinate of the defect area. An information processing program as described in Appendix 1. (Appendix 7) When the defect coordinate determination unit determines the defect coordinates, the defect coordinate determination unit, When the size is greater than the first threshold value and equal to or less than the second threshold value, a position obtained by correcting the brightness peak position using a correction value having the centroid position and the size as parameters, the correction amount increasing as the size increases, is determined as the representative position coordinate of the defective area. An information processing program as described in Appendix 6. (Appendix 8) When the defect coordinate determination unit determines the defect coordinates, the defect coordinate determination unit corrects the defect by the correction amount such that the larger the size, the closer the defect coordinate to the centroid position; An information processing program according to appendix 6 or 7. (Appendix 9) When the defect coordinate determination unit determines the defect coordinates, the defect coordinate determination unit corrects the defect by the correction amount such that the smaller the size, the closer the position to the brightness peak position; An information processing program according to appendix 6 or 7. (Appendix 10) When the defect coordinate determination unit determines the defect coordinates, when the size is equal to or smaller than the first threshold value, causing the defect coordinate determination unit to determine the brightness peak position corrected based on the size as the representative position coordinate of the defect area; An information processing program according to appendix 6 or 7. [Explanation of symbols]

[0078] 1 Optical device 10. Information processing equipment 11 Size acquisition section 12 Defect coordinate determination unit 13 Storage section 20 Optical system 21 Separation means 22 Objective Lens 23 Condenser lens 30 detectors 50 samples 51 Defects 52 Defective Area 53 Borderline 54 Frame 55 Stages G50 Images L1 illumination light MMR Memory P1 Brightness peak position P2 centroid position PRC Processor R1 Detected light SZ size UI User Interface

Claims

1. a size acquisition unit for acquiring the size of a defect area included in the sample; a defect coordinate determination unit that determines representative position coordinates of the defect area by different information processing based on the size; An information processing device comprising:

2. a storage unit that stores the defect area in association with the representative position coordinates; The information processing device according to claim 1 .

3. The defect coordinate determination unit performs the information processing by: If the size is equal to or smaller than a predetermined threshold, the brightness peak position in the defect area is set as the representative position coordinate of the defect area; If the size is larger than the predetermined threshold, the centroid position of the defect area is set as the representative position coordinate of the defect area.

3. The information processing device according to claim 1.

4. The defect coordinate determination unit If the size is equal to or smaller than the predetermined threshold, the brightness peak position corrected based on the size is set as the representative position coordinate of the defect area. The information processing device according to claim 3 .

5. The defect coordinate determination unit If the size is equal to or smaller than the predetermined threshold value, the brightness peak position corrected by the correction value, which uses the size as a parameter and the larger the size, the larger the correction amount, is set as the representative position coordinate of the defective area. The information processing device according to claim 4 .

6. The defect coordinate determination unit performs the following information processing: If the size is equal to or smaller than a first threshold, a luminance peak position in the defective area is set as the representative position coordinate of the defective area; If the size is larger than a second threshold value that is larger than the first threshold value, the centroid position of the defect area is set as the representative position coordinate of the defect area; When the size is greater than the first threshold value and equal to or less than the second threshold value, the position obtained by correcting the brightness peak position based on the centroid position and the size is set as the representative position coordinate of the defect area. The information processing device according to claim 1 .

7. The defect coordinate determination unit When the size is greater than the first threshold value and equal to or less than the second threshold value, a position obtained by correcting the brightness peak position using a correction value that has the centroid position and the size as parameters, the correction amount increasing as the size increases, is set as the representative position coordinate of the defective area. The information processing device according to claim 6 .

8. the defect coordinate determination unit corrects the defect by an amount of correction that brings the defect closer to the centroid position as the size increases; 8. The information processing device according to claim 6 or 7.

9. the defect coordinate determination unit corrects the defect by an amount of correction that brings the defect closer to the brightness peak position as the size decreases; 8. The information processing device according to claim 6 or 7.

10. The defect coordinate determination unit When the size is equal to or smaller than the first threshold value, the brightness peak position corrected based on the size is set as the representative position coordinate of the defect area.

8. The information processing device according to claim 6 or 7.

11. an optical system that illuminates a sample with illumination light and collects detection light from the illuminated sample; a detector that detects the detection light; The information processing device according to claim 1 or 2; An optical device comprising:

12. a step of causing a size acquisition unit to acquire the size of a defect area included in the sample; a step of causing a defect coordinate determining unit to determine representative position coordinates of the defect area by different information processing based on the size; An information processing method comprising:

13. The method further comprises a step of storing the defect area in a storage unit in association with the representative position coordinates. The information processing method according to claim 12.

14. In the step of causing the defect coordinate determining unit to determine the defect coordinates, The defect coordinate determination unit performs the information processing. If the size is equal to or smaller than a predetermined threshold, a luminance peak position in the defective area is determined as the representative position coordinate of the defective area; If the size is larger than the predetermined threshold, the centroid position of the defect area is determined to be the representative position coordinate of the defect area.

14. The information processing method according to claim 12 or 13.

15. In the step of causing the defect coordinate determining unit to determine the defect coordinates, the defect coordinate determination unit, If the size is equal to or smaller than the predetermined threshold, the brightness peak position corrected based on the size is determined as the representative position coordinate of the defect area. The information processing method according to claim 14.

16. In the step of causing the defect coordinate determining unit to determine the defect coordinates, the defect coordinate determination unit, If the size is equal to or smaller than the predetermined threshold value, the brightness peak position corrected by the correction value, which uses the size as a parameter and the larger the size, the larger the correction amount, is set as the representative position coordinate of the defective area. The information processing method according to claim 15.

17. In the step of causing the defect coordinate determining unit to determine the defect coordinates, The defect coordinate determination unit performs the following information processing: If the size is equal to or smaller than a first threshold, a luminance peak position in the defective area is determined as the representative position coordinate of the defective area; If the size is greater than a second threshold value that is greater than the first threshold value, the center of gravity of the defect area is determined to be the representative position coordinate of the defect area; When the size is greater than the first threshold value and equal to or less than the second threshold value, a position obtained by correcting the brightness peak position based on the centroid position and the size is determined as the representative position coordinate of the defect area. The information processing method according to claim 12.

18. In the step of causing the defect coordinate determining unit to determine the defect coordinates, the defect coordinate determination unit, When the size is greater than the first threshold value and equal to or less than the second threshold value, a position obtained by correcting the brightness peak position using a correction value having the centroid position and the size as parameters, the correction amount increasing as the size increases, is determined as the representative position coordinate of the defective area.

18. The information processing method according to claim 17.

19. In the step of causing the defect coordinate determining unit to determine the defect coordinates, the defect coordinate determination unit corrects the defect coordinate by an amount of correction such that the larger the size, the closer the position to the centroid position; 19. The information processing method according to claim 17 or 18.

20. In the step of causing the defect coordinate determining unit to determine the defect coordinates, the defect coordinate determination unit corrects the defect by an amount of correction such that the smaller the size, the closer the position to the brightness peak position; 19. The information processing method according to claim 17 or 18.

21. In the step of causing the defect coordinate determining unit to determine the defect coordinates, when the size is equal to or smaller than the first threshold value, the defect coordinate determination unit determines the brightness peak position corrected based on the size as the representative position coordinate of the defect area; 19. The information processing method according to claim 17 or 18.

22. illuminating a sample with illumination light and collecting detection light from the illuminated sample with an optical system; detecting the detection light with a detector; performing the information processing method according to claim 12 or 13; A method of using an optical device comprising the steps of:

23. The size of the defect area included in the sample is acquired by the size acquisition unit; causing a defect coordinate determining unit to determine representative position coordinates of the defect area by different information processing based on the size; An information processing program that causes a computer to perform certain tasks.

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