Temperature sensor

Abstract

PURPOSE: To provide a temperature sensor in which the number of components is reduced.CONSTITUTION: A temperature sensor S1 includes: a thermoelectric conversion unit 500 made of a material for converting heat into electric power; a first electrode 200a in contact with the thermoelectric conversion unit 500 from a Z'-direction side; and a plurality of second electrodes 200b in contact with the thermoelectric conversion unit 500 from a Z-direction side, the plurality of second electrodes 200b being arranged at intervals in a direction substantially orthogonal to the Z-Z' direction with respect to the first electrode 200a, the voltage difference being generated between the first electrode 200a and each of the plurality of second electrodes 200b in accordance with a temperature gradient generated in the thermoelectric conversion unit 500.SELECTED DRAWING: Figure 1A

Description

[Technical Field]

[0001] The present invention relates to a temperature sensor. [Background technology]

[0002] Patent Document 1 below discloses a conventional temperature sensor. This temperature sensor includes a flexible substrate, a plurality of first electrodes, a plurality of second electrodes, and a plurality of thermoelectric conversion units. The plurality of first electrodes are provided in a row at intervals on the flexible substrate. The plurality of second electrodes are provided in a row at intervals on the flexible substrate. The plurality of first electrodes and the plurality of second electrodes are arranged opposite each other at intervals. The plurality of thermoelectric conversion units are made of a material that converts heat into electricity by the Seebeck effect, and extend from the plurality of first electrodes to the plurality of second electrodes.

[0003] When each first electrode is used as a reference electrode and each second electrode is used as a detection electrode, a voltage difference occurs between each first electrode and each second electrode depending on the temperature gradient of each thermoelectric conversion unit, and the relative temperature near each second electrode is detected based on this voltage difference. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Publication No. 2020-176981 Summary of the Invention [Problem to be solved by the invention]

[0005] Conventional temperature sensors require a plurality of first electrodes, second electrodes, and thermoelectric conversion units. In other words, conventional temperature sensors require the same number of first electrodes and thermoelectric conversion units as the number of second electrodes, resulting in a large number of components.

[0006] An object of the present invention is to reduce the number of parts in a temperature sensor. [Means for solving the problem]

[0007] A temperature sensor according to one embodiment of the present invention includes a thermoelectric conversion unit made of a material that converts heat into electric power, a first electrode in contact with the thermoelectric conversion unit from one side in a first direction, which is the thickness direction of the thermoelectric conversion unit, and a plurality of second electrodes in contact with the thermoelectric conversion unit from one side in the first direction. Each of the second electrodes is spaced apart from the first electrode in a direction substantially perpendicular to the first direction. A voltage difference is generated between the first electrode and each of the second electrodes in response to a temperature gradient generated in the thermoelectric conversion unit. [Effects of the Invention]

[0008] The temperature sensor of the above-described embodiment can reduce the number of parts. The reason for this is as follows: The temperature sensor has a configuration in which the first electrode and the multiple second electrodes are in contact with the thermoelectric conversion unit from one side in the first direction, and a voltage difference occurs between the first electrode and each of the multiple second electrodes in response to a temperature gradient generated in the thermoelectric conversion unit. Therefore, the temperature sensor only needs to include at least one first electrode and one thermoelectric conversion unit. Therefore, this temperature sensor can reduce the number of parts compared to conventional temperature sensors. [Brief explanation of the drawings]

[0009] [Figure 1A] FIG. 1 is a schematic plan view of a temperature sensor according to a first embodiment of the present invention, showing a thermoelectric conversion section of the sensor with a dashed dotted line in a see-through manner. [Figure 1B] FIG. 2 is a schematic bottom view of the temperature sensor according to the first embodiment. [Figure 2A] 2A-2A in FIG. 1A is an end view of the temperature sensor of the first embodiment. [Figure 2B] 2B-2B in FIG. 1A, showing an end view of the temperature sensor of the first embodiment. [Figure 3A] FIG. 10 is a schematic plan view of a temperature sensor according to a second embodiment of the present invention, showing a thermoelectric conversion section of the sensor with a dashed dotted line in a see-through view. [Figure 3B] FIG. 10 is a schematic bottom view of the temperature sensor according to the second embodiment. [Figure 4A] 4A-4A in FIG. 3A of the temperature sensor of Example 2. FIG. [Figure 4B] 4B is an end view of the temperature sensor of the second embodiment taken along line 4B-4B in FIG. 3A. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, several embodiments of the present invention will be described, including Examples 1 and 2 and their design variations. Note that the components of the examples and design variations described below can be combined with each other as long as they are not inconsistent. Also, note that the materials, shapes, dimensions, numbers, and arrangements of the components in each aspect of the examples and design variations described below are merely examples, and that any design changes are possible as long as the same functions can be achieved. [Example]

[0011] A temperature sensor S1 (hereinafter simply referred to as "sensor S1") according to a number of embodiments of the present invention, including a first embodiment and its design variations, will be described below with reference to Figures 1A to 2B. Figures 1A to 2B show the temperature sensor S1 of the first embodiment.

[0012] 1A and 1B show the Y-Y' direction and the X-X' direction. FIG. 2A shows the Z-Z' direction and the X-X' direction. FIG. 2B shows the Z-Z' direction and the Y-Y' direction. The Z-Z' direction (first direction) includes the Z' direction (one of the first directions) and the Z direction (the other of the first directions). The X-X' direction (second direction) is approximately perpendicular to the Z-Z' direction and includes the X direction (one of the second directions) and the X' direction (the other of the second directions). The Y-Y' direction (third direction) is approximately perpendicular to the Z-Z' direction and the X-X' direction and includes the Y direction (one of the third directions) and the Y' direction (the other of the third directions). Hereinafter, a diagonal direction including components in the X and Y directions will be referred to as the "first diagonal direction," a diagonal direction including components in the X and Y' directions will be referred to as the "second diagonal direction," a diagonal direction including components in the X' and Y directions will be referred to as the "third diagonal direction," and a diagonal direction including components in the X' and Y' directions will be referred to as the "fourth diagonal direction."

[0013] The sensor S1 includes an insulating substrate 100. The substrate 100 may be flexible and bendable. If the substrate 100 is flexible, it is made of a film such as a polyethylene terephthalate (PET) film, a polyethylene naphthalate (PEN) film, or a polyimide (PI) film. If the substrate 100 is not flexible, it is made of ceramics, a rigid substrate (single-sided substrate, double-sided substrate, or multilayer substrate), or the like.

[0014] The base 100 has a first main surface 101 on the Z-direction side and a second main surface 102 on the Z'-direction side. The base 100 may have a first portion 110 and a second portion 120 other than the first portion 110. For example, the first portion 110 is an end or intermediate portion on the X'-direction side of the base 100, and the second portion 120 is an end or intermediate portion located on the X-direction side relative to the first portion 110 of the base 100 (see FIGS. 1A to 2). Alternatively, the first portion 110 is an end or intermediate portion on the X-direction side of the base 100, and the second portion 120 is an end or intermediate portion located on the X'-direction side relative to the first portion 110 of the base 100 (not shown). The first main surface 101 of the base 100 has a first region which is the surface on the Z-direction side of the first portion 110, and a second region which is the surface on the Z-direction side of the second portion 120. The second main surface 102 of the base 100 has a third region which is the surface of the first portion 110 on the Z' direction side, and a fourth region which is the surface of the second portion 120 on the Z' direction side.

[0015] The sensor S1 further includes a first electrode 200a (reference electrode) and a plurality of second electrodes 200b (detection electrodes).

[0016] The first electrode 200a is made of a conductive material such as a metal material (e.g., copper or silver) or a carbon material. The first electrode 200a may be made of the metal material and a highly corrosion-resistant material plated or coated on its surface. The first electrode 200a is provided on the first main surface 101 of the base 100. For example, when the first portion 110 and the second portion 120 of the base 100 are provided, the first electrode 200a may be provided on a first region of the first main surface 101 of the base 100.

[0017] In a plan view from the Z direction (hereinafter simply referred to as "plan view"), the first electrode 200a may have a rectangular shape (hereinafter referred to as a "first rectangular shape" (see FIG. 1A)) or an elliptical shape (hereinafter referred to as a "first elliptical shape" (not shown)) in which the dimension in the Y-Y' direction is larger than the dimension in the X-X' direction, or a rectangular shape (hereinafter referred to as a "second rectangular shape" (not shown)) or an elliptical shape (hereinafter referred to as a "second elliptical shape" (not shown)) in which the dimension in the X-X' direction is larger than the dimension in the Y-Y' direction, or a square shape (not shown) or a substantially perfect circle (not shown), but the shape can be set arbitrarily. The first electrode 200a has a first end on the Y direction side and a second end on the Y' direction side.

[0018] The second electrodes 200b are made of a conductive material, similar to the first electrode 200a. The second electrodes 200b may be made of the above-mentioned metal material and a material with excellent corrosion resistance, the surface of which is plated or coated. The second electrodes 200b may have a first rectangular shape (not shown), a first elliptical shape (not shown), a second rectangular shape (not shown), a second elliptical shape (not shown), a square shape (see FIG. 1A), or a substantially perfect circle shape (not shown) in a plan view, but the shape can be set arbitrarily.

[0019] The plurality of second electrodes 200b are provided on the first main surface 101 of the base 100 and are arranged at intervals. Each of the plurality of second electrodes 200b is arranged at intervals in a direction substantially perpendicular to the Z-Z' direction relative to the first electrode 200a.

[0020] For example, the second electrodes 200b may be arranged in a matrix in a plan view (see FIG. 1A). In this case, the second electrodes 200b may be arranged so that the entire second electrodes 200b are rectangular (see FIG. 1A), square, or circular in a plan view, but are not limited thereto. Alternatively, the second electrodes 200b may be arranged in a radial shape (not shown), an annular shape (not shown), an arc shape (not shown), a V-shape (not shown), an L-shape (not shown), a cross shape (not shown), or an X-shape (not shown) in a plan view, or may be arranged in a line spaced apart in the Y-Y' direction, a first oblique direction, or a second oblique direction (not shown).

[0021] When the first portion 110 and the second portion 120 of the base 100 are provided, the multiple second electrodes 200b may be arranged in any of the above-described manners on the second region of the first main surface 101 of the base 100. In this case, the multiple second electrodes 200b are arranged at intervals on the X-direction side (see FIG. 1A) or the X'-direction side (not shown) relative to the first electrode 200a. In other words, the first electrode 200a is arranged at intervals on the X'-direction side (see FIG. 1A) or the X'-direction side (not shown) relative to the multiple second electrodes 200b. The multiple second electrodes 200b include one or more second electrodes 200b located closest to the Y-direction side and one or more second electrodes 200b located closest to the Y'-direction side.

[0022] Hereinafter, a virtual line passing through the Y'-direction side end of one or more second electrodes 200b located furthest to the Y-direction side and extending in the X-X' direction will be referred to as a "first virtual line L1", a virtual line passing through the Y-direction side end of one or more second electrodes 200b located furthest to the Y'-direction side and extending in the X-X' direction will be referred to as a "second virtual line L2", a virtual line passing through the center of one or more second electrodes 200b located furthest to the Y-direction side and extending in the X-X' direction will be referred to as a "third virtual line L3", and a virtual line passing through the Y-direction side end of one or more second electrodes 200b located furthest to the Y-direction side and extending in the X-X' direction will be referred to as a "third virtual line L4". A virtual line extending in the X-X' direction through the center of one or more second electrodes 200b located closest to the Y-direction is defined as a "fourth virtual line L4," a virtual line extending in the X-X' direction through the Y-direction side end of one or more second electrodes 200b located closest to the Y-direction is defined as a "fifth virtual line L5," and a virtual line extending in the X-X' direction through the Y'-direction side end of one or more second electrodes 200b located closest to the Y'-direction is defined as a "sixth virtual line L6" (see FIG. 1A). The linear distance from the first virtual line L1 to the second virtual line L2 in the Y-Y' direction is defined as a "linear distance D1," the linear distance from the third virtual line L3 to the fourth virtual line L4 in the Y-Y' direction is defined as a "linear distance D2," and the linear distance from the fifth virtual line L5 to the sixth virtual line L6 in the Y-Y' direction is defined as a "linear distance D3" (see FIG. 1A).

[0023] The dimension of the first electrode 200a in the Y-Y' direction (the linear distance in the Y-Y' direction from the first end to the second end of the first electrode 200a) can be made larger than the linear distance D1. In this case, the first end of the first electrode 200a is located on the Y-direction side of the first virtual line L1, and the second end of the first electrode 200a is located on the Y'-direction side of the second virtual line L2. For example, the first electrode 200a has any one of the following configurations (1) to (5).

[0024] (1) The dimension of the first electrode 200a in the Y-Y' direction can be greater than the linear distance D1 but less than the linear distance D2 (not shown). In this case, the first end of the first electrode 200a is located between the first virtual line L1 and the third virtual line L3 in the Y-Y' direction, and the second end of the first electrode 200a is located between the second virtual line L2 and the fourth virtual line L4 in the Y-Y' direction; the first end of the first electrode 200a is located on the first virtual line L1, and the second end of the first electrode 200a is located between the second virtual line L2 and the fourth virtual line L4 in the Y-Y' direction; or the first end of the first electrode 200a is located between the first virtual line L1 and the third virtual line L3 in the Y-Y' direction, and the second end of the first electrode 200a is located on the second virtual line L2.

[0025] (2) The dimension of the first electrode 200a in the Y-Y' direction can be the same as the linear distance D2 (not shown). A first end of the first electrode 200a is located on the third virtual line L3, and a second end of the first electrode 200a is located on the fourth virtual line L4.

[0026] (3) The dimension of the first electrode 200a in the Y-Y′ direction can be greater than the linear distance D2 but less than the linear distance D3 (see FIG. 1A ). In this case, the first end of the first electrode 200a is located between the third virtual line L3 and the fifth virtual line L5 in the Y-Y′ direction, and the second end of the first electrode 200a is located between the fourth virtual line L4 and the sixth virtual line L6 in the Y-Y′ direction (see FIG. 1A ). Alternatively, the first end of the first electrode 200a is located on the third virtual line L3, and the second end of the first electrode 200a is located between the fourth virtual line L4 and the sixth virtual line L6 in the Y-Y′ direction (not shown). Alternatively, the first end of the first electrode 200a is located between the third virtual line L3 and the fifth virtual line L5 in the Y-Y′ direction, and the second end of the first electrode 200a is located on the fourth virtual line L4 (not shown).

[0027] (4) The dimension of the first electrode 200a in the Y-Y' direction can be the same as the linear distance D3 (not shown). A first end of the first electrode 200a is located on the fifth virtual line L5, and a second end of the first electrode 200a is located on the sixth virtual line L6.

[0028] (5) The dimension of the first electrode 200a in the Y-Y' direction can be greater than the linear distance D3 (not shown). In this case, the first end of the first electrode 200a is located on the Y-direction side of the fifth virtual line L5 and the second end of the first electrode 200a is located on the Y'-direction side of the sixth virtual line L6; the first end of the first electrode 200a is located on the fifth virtual line L5 and the second end of the first electrode 200a is located on the Y'-direction side of the sixth virtual line L6; or the first end of the first electrode 200a is located on the Y-direction side of the fifth virtual line L5 and the second end of the first electrode 200a is located on the sixth virtual line L6.

[0029] The dimension of the first electrode 200a in the YY' direction may be smaller than the linear distance D1.

[0030] Alternatively, the second electrodes 200b may be arranged in a row at intervals in the X-X' direction in a plan view (not shown). In this case, the dimension of the first electrode 200a in the Y-Y' direction can be the same as, slightly larger than, or slightly smaller than the dimension of each second electrode 200b in the Y-Y' direction, but is not limited to this.

[0031] The sensor S1 may further include a first conductive line 300a, a plurality of second conductive lines 300b, a first terminal 400a, and a plurality of second terminals 400b.

[0032] The first terminal 400a is made of a conductive material, similar to the first electrode 200a. The first terminal 400a may be made of the above-mentioned metal material and a material with excellent corrosion resistance, the surface of which is plated or coated. The first terminal 400a is provided on the first main surface 101 of the base 100. When the first portion 110 and the second portion 120 of the base 100 are provided, the first electrode 200a may be provided on a second region of the first main surface 101 of the base 100 (for example, the end of the second region on the X-direction side (see FIG. 1A), the end of the second region on the X'-direction side (not shown), the end of the second region on the Y-direction side (not shown), or the end of the second region on the Y'-direction side (not shown)). Alternatively, the first electrode 200a may be provided on the first region on the first main surface 101 of the base 100 (not shown).

[0033] The second terminals 400b are made of a conductive material, similar to the first electrode 200a. The second terminals 400b may be made of the above-mentioned metal material and a material having excellent corrosion resistance, the surface of which is plated or coated. The second terminals 400b are provided on the first main surface 101 of the base 100. When the first portion 110 and the second portion 120 of the base 100 are provided, the second terminals 400b may be provided at intervals on a second region of the first main surface 101 of the base 100 (for example, an end of the second region on the X-direction side (see FIG. 1A), an end of the second region on the X'-direction side (not shown), an end of the second region on the Y-direction side (not shown), or an end of the second region on the Y'-direction side (not shown)). Alternatively, the second terminals 400b may be provided on the first region on the first main surface 101 of the base 100 (not shown).

[0034] The first conductive line 300a is made of a conductive material, similar to the first electrode 200a. The first conductive line 300a may be made of the above-mentioned metal material and a material with excellent corrosion resistance, the surface of which is plated or coated. The first conductive line 300a is provided on the first main surface 101 of the base 100 and extends from the first electrode 200a to the first terminal portion 400a.

[0035] The second conductive lines 300b are made of a conductive material, similar to the first electrodes 200a. The second conductive lines 300b may be made of the above-mentioned metal material and a material with excellent corrosion resistance, the surface of which is plated or coated. The second conductive lines 300b are provided on the first main surface 101 of the base 100 and extend from the second electrodes 200b to the second terminals 400b.

[0036] The first conductive line 300a, the plurality of second conductive lines 300b, the first terminal 400a, and the plurality of second terminals 400b may be omitted.

[0037] The sensor S1 further includes a thermoelectric conversion unit 500. The thermoelectric conversion unit 500 is made of a material that converts heat into electricity by the Seebeck effect. The thermoelectric conversion unit 500 may be flexible enough to be bendable, but may not be flexible and may have a rigid configuration. For example, the thermoelectric conversion unit 500 has any one of the following configurations (1) to (5). In FIG. 1A, for convenience of illustration, the thermoelectric conversion unit 500 is indicated by a dashed line. The Z-Z' direction corresponds to the thickness direction of the thermoelectric conversion unit 500.

[0038] (1) The thermoelectric conversion unit 500 is made of a gelled film obtained by adding a gelling agent to a solution in which a redox couple and an additive are dissolved and / or by evaporating water, etc. In this case, the thermoelectric conversion unit 500 has the flexibility described above.

[0039] (2) The thermoelectric conversion unit 500 is configured as a film obtained by adding a polymer, cellulose, or other film-forming agent to a solution in which a redox couple and an additive are dissolved, and then cooling and / or drying, etc. In this case, the thermoelectric conversion unit 500 has the above-mentioned flexibility.

[0040] (3) The thermoelectric conversion unit 500 can be configured as a plate that is solidified by adding a film-forming agent to a solution in which a redox couple and an additive are dissolved, and then cooling and / or drying, etc. In this case, the thermoelectric conversion unit 500 is thicker than the above-mentioned film, is not flexible, and has a rigid configuration.

[0041] (4) The thermoelectric conversion unit 500 is made of a resin or gel obtained by adding a monomer to a solution in which a redox couple and an additive are dissolved, and then polymerizing the monomer. In this case, the thermoelectric conversion unit 500 has the flexibility described above.

[0042] Examples of the redox couple that can be used include lithium (Li) and lithium (Li) ions, iron (II) and iron (III) ions, cobalt (II) and cobalt (III) ions, iodide (I-) and triiodide ions, ferrocyanide ions (potassium ferrocyanide, KFe(CN)) and ferricyanide ions (potassium ferricyanide, KFe(CN)), and cobalt tris(bipyridine)(II) and cobalt tris(bipyridine)(III). Examples of the additive include an ionic liquid added to the solvent to adjust the conductivity of the gel. The additive can be omitted. Examples of the solution include an aqueous solution, an alcohol-based solvent such as glycerin or ethylene glycol, or a glyme-based solvent (glycol ether) such as tetraglyme or triglyme.

[0043] (5) The thermoelectric conversion unit 500 may be made of any one of a silicon-based compound, an aluminum-based compound, a metal oxide, a carbon material, and an organic conductive material, or may be made of a combination of two or more of these materials. In this case, the thermoelectric conversion unit 500 may have the flexibility described above, or may have the rigid structure described above.

[0044] Examples of silicon-based compounds that can be used include tellurium-based compounds such as Bi-Te compounds, Pb-Te compounds, and Sb-Te compounds; antimony-based compounds such as Co-Sb compounds, Fe-Sb compounds, Zn-Sb compounds, and skutterudite compounds; Fe-Si compounds, Ge-Si compounds, Mn-Si compounds, and Mg-Si compounds.

[0045] As the aluminum-based compound, for example, boron compounds such as hexaborides, gallium-based compounds such as clathrate compounds, Heusler compounds, Al clathrate compounds, etc. can be used.

[0046] As the metal oxide, for example, a tin-based or rare earth-based compound such as a half-Heusler intermetallic compound, Co oxide, Ti oxide, V oxide, Zn oxide, or the like can be used.

[0047] The carbon material may be, for example, one or a combination of the following: graphite, carbon nanotubes, carbon black, graphene nanoplates, graphene, etc. The carbon material may be modified by introducing a substituent group as needed, or may be used in the presence of a compound capable of promoting charge transfer.

[0048] Examples of the organic conductive material that can be used include organic low-molecular-weight materials, organic conductive polymers, polymer composite materials, etc. Examples of the organic conductive material that can be used include low-molecular-weight materials such as polymers having thiophene and its derivatives as a skeleton, polymers having phenylene vinylene and its derivatives as a skeleton, polymers having aniline and its derivatives as a skeleton, oligomers and polymers having pyrrole and its derivatives as a skeleton, oligomers and polymers having acetylene and its derivatives as a skeleton, polymers having heptadiene and its derivatives as a skeleton, phthalocyanines and their derivatives, diamines, phenyldiamines and their derivatives, pentacene and its derivatives, porphyrin and its derivatives, cyanine, quinone, naphthoquinone, etc.

[0049] The thermoelectric conversion unit 500 is provided on the first main surface 101 of the base 100 and covers the first electrode 200a and the multiple second electrodes 200b from the Z direction side. The first electrode 200a and the multiple second electrodes 200b abut against the thermoelectric conversion unit 500 from the Z' direction side. When the thermoelectric conversion unit 500 is in a gel state, the thermoelectric conversion unit 500 is in close contact with (abuts against) the first electrode 200a and the multiple second electrodes 200b. When the object to be measured comes into contact with or approaches the thermoelectric conversion unit 500 and / or the thermoelectric conversion unit 500 is affected by the ambient temperature of the gas (e.g., air or gas) in the area to be measured, a temperature gradient is generated between the portion of the thermoelectric conversion unit 500 where the first electrode 200a abuts and each of the portions where the multiple second electrodes 200b abut. In response to the temperature gradient generated in the thermoelectric conversion unit 500, a voltage difference occurs between the first electrode 200a and each of the plurality of second electrodes 200b.

[0050] When the first portion 110 and the second portion 120 of the base 100 are provided, the thermoelectric conversion portion 500 has a first portion 510 and a second portion 520. The first portion 510 is provided on the first portion 110 of the base 100 and covers the first electrode 200a from the Z direction side. The first electrode 200a abuts against the first portion 510 of the thermoelectric conversion portion 500 from the Z' direction side. The second portion 520 is provided on the second portion 120 of the base 100 and covers the multiple second electrodes 200b from the Z direction side. The multiple second electrodes 200b abut against the second portion 520 of the thermoelectric conversion portion 500 from the Z' direction side.

[0051] The second portion 120 of the base 100 and the second portion 520 of the thermoelectric conversion unit 500 are portions that come into contact with or are close to the object to be measured and / or are portions that are located within the area to be measured, while the first portion 110 of the base 100 and the first portion 510 of the thermoelectric conversion unit 500 are portions that do not come into contact with or are close to the object to be measured and / or are portions that are located outside the area to be measured. When the object to be measured comes into contact with or comes close to the second portion 520 of the thermoelectric conversion unit 500 and / or when the second portion 520 of the thermoelectric conversion unit 500 is affected by the ambient temperature of the gas (e.g., air or gas) in the area to be measured, a temperature gradient occurs in the thermoelectric conversion unit 500 in the X-X' direction. Specifically, a temperature gradient occurs between the portion of the thermoelectric conversion unit 500 where the first electrode 200a contacts and each of the portions where the multiple second electrodes 200b contact. In response to the temperature gradient generated in the thermoelectric conversion unit 500, a voltage difference occurs between the first electrode 200a and each of the plurality of second electrodes 200b.

[0052] When the first conductive line 300a and the plurality of second conductive lines 300b are provided, the thermoelectric conversion unit 500 also covers the first conductive line 300a and the plurality of second conductive lines 300b from the Z direction side.

[0053] When the first terminal 400a and the plurality of second terminals 400b are provided, the thermoelectric conversion unit 500 may or may not cover the first terminal 400a and the plurality of second terminals 400b from the Z direction side. In the latter case, the first terminal 400a and the plurality of second terminals 400b are located outside the thermoelectric conversion unit 500.

[0054] In addition, when the thermoelectric conversion unit 500 is made of any of the above-mentioned materials that is susceptible to corrosion by some metal materials such as copper and silver, the first electrode 200a, the plurality of second electrodes 200b, the first conductive line 300a (only if provided), the plurality of second conductive lines 300b (only if provided), the first terminal 400a (only if covered by the thermoelectric conversion unit 500), and the plurality of second terminals 400b (only if covered by the thermoelectric conversion unit 500) that are covered by the thermoelectric conversion unit 500 may be made of a carbon material, or a metal material and a material with excellent corrosion resistance whose surface is plated or coated, but are not limited to these.

[0055] The sensor S1 may further include a sensing unit RS. The sensing unit RS is provided near the first electrode 200a on the first main surface 101 of the base 100. When the first portion 110 and the second portion 120 of the base 100 are provided, the sensing unit RS is provided on a first region of the first main surface 101 of the base 100 and may be arranged on the Y direction side (see FIG. 1A), the Y' direction side (not shown), the X direction side (not shown), or the X' direction side (not shown) of the first electrode 200a. The sensing unit RS has a first end on the Y direction side and a second end on the Y' direction side.

[0056] The sensing unit RS is configured to generate or change a signal depending on the ambient temperature near the first electrode 200a. For example, the sensing unit RS is configured with a thermocouple, a thermistor, or the like. When the sensing unit RS is configured with a thermocouple, a voltage difference (the signal) occurs in the thermocouple depending on the temperature near the first electrode 200a. When the sensing unit RS is configured with a thermistor, the resistance value (the signal) of the thermistor changes depending on the temperature near the first electrode 200a.

[0057] The sensing unit RS can be omitted.

[0058] The sensor S1 may further include at least one heat insulating part TI, which includes at least one of a first heat insulating part TI1 and a second heat insulating part TI2.

[0059] The first heat insulating unit TI1 is provided at the boundary between the first portion 510 and the second portion 520 of the thermoelectric conversion unit 500. The first heat insulating unit TI1 can have, for example, a slit 530 provided in the thermoelectric conversion unit 500 and air insulation within the slit 530, but is not limited to this configuration. The slit 530 may penetrate the thermoelectric conversion unit 500 in the Z-Z' direction (see FIGS. 2A and 2B), or may be closed on the Z-direction side (not shown). The first heat insulating unit TI1 is located between the first electrode 200a and the plurality of second electrodes 200b. When the sensing unit RS is provided, the first heat insulating unit TI1 may be located between the first electrode 200a and the sensing unit RS and the plurality of second electrodes 200b. The first heat insulating unit TI1 has a first end on the Y-direction side and a second end on the Y'-direction side.

[0060] The second heat insulating unit TI2 is provided at the boundary between the first section 110 and the second section 120 of the base 100. The second heat insulating unit TI2 can have, for example, a slit 130 provided in the base 100 and air insulation within the slit 130, but is not limited to this configuration. The slit 130 may penetrate the base 100 in the Z-Z' direction (see FIGS. 2A and 2B), or the Z'-direction side may be closed (not shown). The second heat insulating unit TI2 is located between the first electrode 200a and the plurality of second electrodes 200b. When the sensing unit RS is provided, the second heat insulating unit TI2 may be located between the first electrode 200a and the sensing unit RS and the plurality of second electrodes 200b. The second heat insulating unit TI2 has a first end on the Y-direction side and a second end on the Y'-direction side.

[0061] The first heat insulating portion TI1 and / or the second heat insulating portion TI2 may extend in the Y-Y' direction. The first heat insulating portion TI1 and / or the second heat insulating portion TI2 may have at least one of the following configurations (1) to (8), but are not limited to these.

[0062] (1) The dimension in the Y-Y' direction of the first heat insulating member TI1 (the linear distance in the Y-Y' direction from the first end of the first heat insulating member TI1 to the second end of the first heat insulating member TI1) and / or the dimension in the Y-Y' direction of the second heat insulating member TI2 (the linear distance in the Y-Y' direction from the first end of the second heat insulating member TI2 to the second end of the second heat insulating member TI2) is the same as the dimension in the Y-Y' direction of the first electrode 200a (not shown). In this case, the first end of the second heat insulating member TI2 is located at the same position in the Y-Y' direction as the first end of the first electrode 200a, and the second end of the second heat insulating member TI2 is located at the same position in the Y-Y' direction as the second end of the first electrode 200a.

[0063] (2) The dimension of the first heat insulating portion TI1 in the YY' direction and / or the dimension of the second heat insulating portion TI2 in the YY' direction is larger than the dimension of the first electrode 200a in the YY' direction (see FIG. 1A). In this case, the first end of the second insulating unit TI2 is located on the Y-direction side relative to the first end of the first electrode 200a, and the second end of the second insulating unit TI2 is located on the Y'-direction side relative to the second end of the first electrode 200a (see Figure 1A), the first end of the second insulating unit TI2 is located at the same position as the first end of the first electrode 200a in the Y-Y' direction, and the second end of the second insulating unit TI2 is located on the Y'-direction side relative to the second end of the first electrode 200a (not shown), or the first end of the second insulating unit TI2 is located on the Y-direction side relative to the first end of the first electrode 200a, and the second end of the second insulating unit TI2 is located at the same position as the second end of the first electrode 200a in the Y-Y' direction (not shown).

[0064] (3) When the sensing unit RS is disposed on the Y-direction side of the first electrode 200a, the dimension of the first heat insulating unit TI1 in the Y-Y' direction and / or the dimension of the second heat insulating unit TI2 in the Y-Y' direction is the same as the linear distance in the Y-Y' direction from the first end of the sensing unit RS to the second end of the first electrode 200a (not shown). In this case, the first end of the second heat insulating unit TI2 is located at the same position as the first end of the sensing unit RS in the Y-Y' direction, and the second end of the second heat insulating unit TI2 is located at the same position as the second end of the first electrode 200a in the Y-Y' direction.

[0065] (4) When the sensing unit RS is disposed on the Y'-direction side of the first electrode 200a, the dimension of the first heat insulating unit TI1 in the Y-Y' direction and / or the dimension of the second heat insulating unit TI2 in the Y-Y' direction is the same as the linear distance in the Y-Y' direction from the first end of the first electrode 200a to the second end of the sensing unit RS (not shown). In this case, the first end of the second heat insulating unit TI2 is located at the same position as the first end of the first electrode 200a in the Y-Y' direction, and the second end of the second heat insulating unit TI2 is located at the same position as the second end of the sensing unit RS in the Y-Y' direction.

[0066] (5) When the sensing unit RS is positioned on the Y-direction side of the first electrode 200a, the dimension of the first insulating unit TI1 in the Y-Y' direction and / or the dimension of the second insulating unit TI2 in the Y-Y' direction is greater than the straight-line distance in the Y-Y' direction from the first end of the sensing unit RS to the second end of the first electrode 200a (see Figure 1A). In this case, the first end of the second insulating unit TI2 is located on the Y-direction side relative to the first end of the sensing unit RS and the second end of the second insulating unit TI2 is located on the Y'-direction side relative to the second end of the first electrode 200a (not shown), the first end of the second insulating unit TI2 is located at the same position in the Y-Y' direction as the first end of the sensing unit RS and the second end of the second insulating unit TI2 is located on the Y'-direction side relative to the second end of the first electrode 200a (see Figure 1A), or the first end of the second insulating unit TI2 is located on the Y-direction side relative to the first end of the sensing unit RS and the second end of the second insulating unit TI2 is located at the same position in the Y-Y' direction as the second end of the first electrode 200a (not shown).

[0067] (6) When the sensing unit RS is positioned on the Y' direction side relative to the first electrode 200a, the dimension of the first insulating unit TI1 in the Y-Y' direction and / or the dimension of the second insulating unit TI2 in the Y-Y' direction is greater than the straight-line distance in the Y-Y' direction from the first end of the first electrode 200a to the second end of the sensing unit RS (not shown). In this case, the first end of the second insulating unit TI2 is located on the Y-direction side relative to the first end of the first electrode 200a and the second end of the second insulating unit TI2 is located on the Y'-direction side relative to the second end of the sensing unit RS; the first end of the second insulating unit TI2 is located at the same position as the first end of the first electrode 200a in the Y-Y' direction and the second end of the second insulating unit TI2 is located on the Y'-direction side relative to the second end of the sensing unit RS; or the first end of the second insulating unit TI2 is located on the Y-direction side relative to the first end of the first electrode 200a and the second end of the second insulating unit TI2 is located at the same position as the second end of the sensing unit RS in the Y-Y' direction.

[0068] (7) The dimension of the first heat insulating portion TI1 in the Y-Y' direction and / or the dimension of the second heat insulating portion TI2 in the Y-Y' direction is the same as the linear distance D3 (not shown). In this case, the first end of the second heat insulating portion TI2 is located on the fifth virtual line L5, and the second end of the second heat insulating portion TI2 is located on the sixth virtual line L6.

[0069] (8) The dimension of the first heat insulating portion TI1 in the Y-Y′ direction and / or the dimension of the second heat insulating portion TI2 in the Y-Y′ direction is greater than the linear distance D3 (see FIG. 1A ). In this case, the first end of the second heat insulating portion TI2 is located on the Y-direction side of the fifth imaginary line L5 and the second end of the second heat insulating portion TI2 is located on the Y′-direction side of the sixth imaginary line L6 (not shown), the first end of the second heat insulating portion TI2 is located on the fifth imaginary line L5 and the second end of the second heat insulating portion TI2 is located on the Y′-direction side of the sixth imaginary line L6 (not shown), or the first end of the second heat insulating portion TI2 is located on the Y-direction side of the fifth imaginary line L5 and the second end of the second heat insulating portion TI2 is located on the sixth imaginary line L6 (see FIG. 1A ).

[0070] When both the second insulating section TI2 and the first insulating section TI1 are provided, the dimension of the first insulating section TI1 in the Y-Y' direction may be the same as the dimension of the second insulating section TI2 in the Y-Y' direction (see Figure 2B), or they may be different (not shown).

[0071] The second heat insulating portion TI2 and the first heat insulating portion TI1 can be omitted.

[0072] The sensor S1 may further include a detection unit IC. The detection unit IC is a logic circuit such as an IC, and is electrically connected to the first electrode 200a and the plurality of second electrodes 200b. When the first terminal unit 400a and the plurality of second terminal units 400b are provided, the detection unit IC is electrically connected to the first terminal unit 400a and the plurality of second terminal units 400b (see FIG. 1A). When the sensing unit RS is provided, the detection unit IC is also electrically connected to the sensing unit RS. Note that the detection unit IC is only shown in FIG. 1A.

[0073] The detection unit IC is configured to sequentially detect the voltage difference generated between the first electrode 200a and each of the multiple second electrodes 200b one by one, and sequentially detect the relative temperature near each of the multiple second electrodes 200b (the temperature difference between the vicinity of the first electrode 200a and the vicinity of each of the multiple second electrodes 200b) based on the voltage difference.

[0074] When the sensing unit RS is provided, the detection unit IC has one of the following configurations: The detection unit IC further has a configuration for detecting the temperature (reference temperature) near the first electrode 200a based on the signal (voltage difference or resistance value) of the sensing unit RS each time a voltage difference is detected sequentially (before and after), and a configuration for detecting the absolute temperature near each of the plurality of second electrodes 200b based on the detected reference temperature and the detected relative temperature (temperature difference). Alternatively, the detection unit IC further has a configuration for detecting the temperature (reference temperature) near the first electrode 200a based on the signal (voltage difference or resistance value) of the sensing unit RS and recording the temperature in an internal or external memory of the detection unit IC, and a configuration for detecting the absolute temperature near each of the plurality of second electrodes 200b based on the reference temperature in the memory and the detected relative temperature (temperature difference) each time a voltage difference is detected sequentially.

[0075] The detection unit IC may further have a configuration for detecting the temperature distribution of the relative temperature or absolute temperature after detecting the relative temperature or absolute temperature as described above, but this configuration can be omitted.

[0076] The detection unit IC can be omitted. In this case, the sensor S1 can be electrically connected to an external control unit (for example, a logic circuit such as an IC of a device in which the sensor S1 is installed, or software processed by the logic circuit, etc.). The control unit has a configuration similar to that of the detection unit IC described above.

[0077] The temperature sensor S1 as described above has the following technical features and effects (1) to (7).

[0078] Technical Features and Effects (1) The sensor S1 can reduce the number of components. The reason is as follows: The sensor S1 has a configuration in which the first electrode 200a and the plurality of second electrodes 200b are in contact with the thermoelectric conversion unit 500 from the Z' direction side, and a voltage difference is generated between the first electrode 200a and each of the plurality of second electrodes 200b in accordance with a temperature gradient generated in the thermoelectric conversion unit 500. Therefore, the sensor S1 is only required to include at least one first electrode 200a and one thermoelectric conversion unit 500. Therefore, the sensor S1 can reduce the number of components compared to the above-described conventional temperature sensor that requires a plurality of first electrodes, second electrodes, and thermoelectric conversion units.

[0079] Technical Features and Effects (2) When the detection unit IC or external control unit of the sensor S1 is configured to detect the temperature distribution of the relative temperature or absolute temperature near each of the multiple second electrodes 200b, the sensor S1 can detect the temperature distribution of the relative temperature or absolute temperature more accurately than the conventional temperature sensors described above. The reason for this is as follows: Because conventional temperature sensors have the same number of first electrodes as multiple second electrodes, they can only detect the temperature distribution of the relative temperature or absolute temperature near each of the multiple second electrodes using the multiple first electrodes as a reference. On the other hand, the sensor S1 has at least one first electrode 200a for each of the multiple second electrodes 200b, so it can detect the temperature distribution of the relative temperature or absolute temperature near each of the multiple second electrodes 200b using at least one first electrode 200a as a reference.

[0080] Technical Features and Effects (3) When the plurality of second electrodes 200b are arranged in a matrix and the first electrode 200a has any of the configurations (1) to (5) above, the distances from the first electrode 200a to each of the plurality of second electrodes 200b (all of the second electrodes) in each column in the X-X' direction can be set to be approximately the same. As a result, when the temperature gradient from the portion of the thermoelectric conversion unit 500 where the first electrode 200a abuts to each of the portions of the thermoelectric conversion unit 500 where the plurality of second electrodes 200b abuts in each column is approximately the same, the detection unit IC or an external control unit can detect the relative temperature or absolute temperature of each of the plurality of second electrodes 200b in each column at approximately the same value. Note that even when the multiple second electrodes 200b are arranged in a radial (not shown), annular (not shown), arcuate (not shown), V-shaped (not shown), L-shaped (not shown), cross-shaped (not shown), or X-shaped (not shown) configuration in a plan view and the first electrode 200a has any of the configurations (1) to (5) above, the distances from the first electrode 200a to all of the second electrodes 200b located at approximately the same position in the X-X' direction (some of all of the second electrodes) can be set to be approximately the same. Even when the multiple second electrodes 200b are arranged in a row spaced apart in the Y-Y' direction in a plan view and the first electrode 200a has any of the configurations (1) to (5) above, the distances from the first electrode 200a to each of the multiple second electrodes 200b can be set to be approximately the same.

[0081] Technical Features and Effects (4) When the first heat insulating unit TI1 is provided, the first heat insulating unit TI1 can suppress the propagation of heat from the second unit 520 to the first unit 510 of the thermoelectric conversion unit 500, thereby reducing the influence of the heat on the first electrode 200a that contacts the first unit 510. This is because the first heat insulating unit TI1 is provided at the boundary between the first unit 510 and the second unit 520 of the thermoelectric conversion unit 500 and is located between the first electrode 200a and the multiple second electrodes 200b. When the sensing unit RS is provided and the first heat insulating unit TI1 is located between the first electrode 200a and the sensing unit RS and the multiple second electrodes 200b, the first heat insulating unit TI1 suppresses the propagation of heat from the second unit 520 to the first unit 510 of the thermoelectric conversion unit 500, thereby reducing the influence of the heat not only on the first electrode 200a but also on the sensing unit RS. When the first heat insulating section TI1 has at least one of the configurations (1) to (8) above, the propagation of heat from the second section 520 to the first section 510 of the thermoelectric conversion section 500 can be further suppressed.

[0082] Technical Features and Effects (5) When the second heat insulating unit TI2 is provided, the second heat insulating unit TI2 can suppress the propagation of heat from the second section 120 of the base 100 to the first section 110, and as a result, the influence of the heat on the first electrode 200a on the first section 110 can be reduced. This is because the second heat insulating unit TI2 is provided at the boundary between the first section 110 and the second section 120 of the base 100 and is located between the first electrode 200a and the multiple second electrodes 200b. When the sensing unit RS is provided and the second heat insulating unit TI2 is located between the first electrode 200a and the sensing unit RS and the multiple second electrodes 200b, the second heat insulating unit TI2 suppresses the propagation of heat from the second section 120 of the base 100 to the first section 110, thereby reducing the influence of the heat not only on the first electrode 200a but also on the sensing unit RS. When the second heat insulating portion TI2 has at least one of the configurations (1) to (8) above, the propagation of heat from the second portion 120 to the first portion 110 of the base 100 can be further suppressed.

[0083] Technical Features and Effects(6) When the sensing unit RS is provided, the detection unit IC or an external control unit can detect a reference temperature near the first electrode 200a based on the signal (voltage difference or resistance value) of the sensing unit RS, and can detect an absolute temperature near each of the multiple second electrodes 200b based on the reference temperature and the relative temperature near each of the multiple second electrodes 200b.

[0084] Technical Features and Effects(7) When both the base body 100 and the thermoelectric conversion part 500 have flexibility that allows bending, a sensor S1 having flexibility that allows bending is obtained. [Example]

[0085] A temperature sensor S2 (not shown) according to multiple embodiments of the present invention, including a second embodiment and its design variations, will be described below with reference to FIGS. 3A to 4B. FIGS. 3A to 4B show the temperature sensor S2 of the second embodiment. The temperature sensor S2 has the same configuration as the temperature sensor S1 described above, except for the following differences: (1) the first conductive line 300a, the plurality of second conductive lines 300b, the first terminal 400a, and the plurality of second terminals 400b are provided on the second main surface 102 of the base 100, rather than on the first main surface 101 of the base 100; and (2) the sensor S2 further includes a first connecting portion 600a and a plurality of second connecting portions 600b. Below, only the differences will be described in detail, and redundant explanations will be omitted.

[0086] 3A, the thermoelectric conversion unit 500 is indicated by a dashed line, as in FIG. 1A. In FIGS. 3A and 3B, the Y-Y' direction and the X-X' direction are indicated, as in FIGS. 1A and 1B. In FIG. 4A, the Z-Z' direction and the X-X' direction are indicated, as in FIG. 2A. In FIG. 4B, the Z-Z' direction and the Y-Y' direction are indicated, as in FIG. 2B.

[0087] The first terminal portion 400a is provided on the second main surface 102 of the base 100. When the first portion 110 and the second portion 120 of the base 100 are provided, the first electrode 200a may be provided on a fourth region of the second main surface 102 of the base 100 (for example, the end portion of the fourth region on the X-direction side (see FIG. 3A ), the end portion of the fourth region on the X-direction side (not shown), the end portion of the fourth region on the Y-direction side (not shown), or the end portion of the fourth region on the Y′-direction side (not shown)), or the like), or may be provided on a third region of the second main surface 102 of the base 100 (not shown).

[0088] The first conductive line 300a is provided on the second main surface 102 of the base 100 and extends from the first connection portion 600a to the first terminal portion 400a.

[0089] The first connection portion 600a is provided inside the base 100. For example, the first connection portion 600a may be configured as a through-hole (see FIGS. 3A and 3B) that penetrates from the first main surface 101 to the second main surface 102 of the base 100, or the first connection portion 600a may be configured to have a plurality of via holes provided inside the base 100 and at least one conductive line that is provided inside the base 100 and connects two of the plurality of via holes. In either case, the first connection portion 600a electrically connects the first electrode 200a and the first conductive line 300a.

[0090] The plurality of second terminal portions 400b are provided on the second main surface 102 of the base 100. When the first portion 110 and the second portion 120 of the base 100 are provided, the plurality of second terminal portions 400b may be provided at intervals on a fourth region of the second main surface 102 of the base 100 (for example, an end portion of the fourth region on the X-direction side (see FIG. 3A), an end portion of the fourth region on the X-direction side (not shown), an end portion of the fourth region on the Y-direction side (not shown), or an end portion of the fourth region on the Y'-direction side (not shown)), or the like), or may be provided on a third region of the second main surface 102 of the base 100 (not shown).

[0091] The plurality of second conductive lines 300b are provided on the second main surface 102 of the base 100 and extend from the plurality of second connection portions 600b to the plurality of second terminal portions 400b.

[0092] The plurality of second connection portions 600b are provided inside the base 100. For example, the plurality of second connection portions 600b may be configured as through holes (see FIGS. 3A to 4A) that penetrate from the first main surface 101 to the second main surface 102 of the base 100, or the plurality of second connection portions 600b may be configured to include a plurality of via holes provided inside the base 100 and at least one conductive line that is provided inside the base 100 and connects two of the plurality of via holes. In either case, the plurality of second connection portions 600b electrically connect the plurality of second electrodes 200b and the plurality of second conductive lines 300b.

[0093] The sensor S2 as described above has the same technical features and effects as the technical features and effects (1) to (7) of the temperature sensor S1.

[0094] Moreover, in the sensor S2, the first conductive line 300a, the plurality of second conductive lines 300b, the first terminal 400a, and the plurality of second terminals 400b are provided on the second main surface 102 of the base 100. Therefore, when the object to be measured comes into contact with or approaches the thermoelectric conversion unit 500 and / or when the thermoelectric conversion unit 500 is affected by the ambient temperature of the gas (e.g., air or gas) in the area to be measured, at least one of the first conductive line 300a, the plurality of second conductive lines 300b, the first terminal 400a, and the plurality of second terminals 400b is less susceptible to the influence of heat. Furthermore, since the first conductive line 300a, the multiple second conductive lines 300b, the first terminal portion 400a, and the multiple second terminal portions 400b are not provided on the first main surface 101 of the base 100, the effective space for arranging the first electrode 200a, the multiple second electrodes 200b, etc. on the first main surface 101 of the base 100 is increased.

[0095] The temperature sensor described above is not limited to the above embodiment, and can be modified in any way within the scope of the claims.

[0096] When the base 100 has a first portion 110 and a second portion 120, the first portion 110 may be any portion of the base 100, and the second portion 120 may be any portion of the base 100 other than the first portion 110. For example, the second portion 120 may be a portion of the base 100 located on the Y-direction side or the Y'-direction side of the first portion 110.

[0097] The first portion 110 and the second portion 120 of the base 100 can be omitted. In this case, the first portion 510 and the second portion 520 of the thermoelectric conversion portion 500 are also omitted.

[0098] Each of the plurality of second electrodes 200b may be arranged at intervals relative to the first electrode 200a in a direction substantially perpendicular to the Z-Z' direction. For example, each of the plurality of second electrodes 200b may be arranged at intervals relative to the first electrode 200a on the Y direction side, the Y' direction side, the first diagonal direction side, the second diagonal direction side, the third diagonal direction side, or the fourth diagonal direction side.

[0099] The base 100 can be omitted. In this case, the design of the temperature sensor S1 may be modified as follows. The thermoelectric conversion unit 500 has any of the above-described configurations except for being rigid. The first electrode 200a and the plurality of second electrodes 200b are provided and arranged on the main surface of the thermoelectric conversion unit 500 on the Z'-direction side, as described above. The first electrode 200a and the plurality of second electrodes 200b abut against the thermoelectric conversion unit 500 from the Z'-direction side. When the first conductive line 300a and the plurality of second conductive lines 300b are provided, the first conductive line 300a and the plurality of second conductive lines 300b are provided and arranged on the main surface of the thermoelectric conversion unit 500, as described above. When the first terminal 400a and the plurality of second terminals 400b are provided, the first terminal 400a and the plurality of second terminals 400b are provided and arranged on the main surface of the thermoelectric conversion unit 500 as described above. When the sensing unit RS is provided, the sensing unit RS is provided on the main surface of the thermoelectric conversion unit 500 and arranged in the vicinity of the first electrode 200a as described above. The first heat insulating unit TI1 may be provided in the thermoelectric conversion unit 500 as described above, but does not have to be provided.

[0100] The thermoelectric conversion section 500 is not limited to being made of a material that converts heat into electricity by the Seebeck effect, but may be made of any material that converts heat into electricity.

[0101] Although the first electrode 200a is the reference electrode and the plurality of second electrodes 200b are the detection electrodes, the reverse may be true. [Explanation of symbols]

[0102] S1, S2: Temperature sensors 100: Base 101: First main surface 102: Second main surface 110: First section 120: Second section 130: Slit 200a: 1st electrode 200b: 2nd electrode 300a: First conductive line 300b: Second conductive line 400a: First terminal part 400b: Second terminal part 500: Thermoelectric conversion unit 510: Part 1 520: Part 2 530: Slit 600a: First connection part 600b: Second connection part IC: Detector RS: Sensing section TI: Insulation section TI1: First insulation section TI2: Second insulation section

Claims

1. a thermoelectric conversion unit made of a material that converts heat into electricity; a first electrode that contacts the thermoelectric conversion unit from one side in a first direction that is a thickness direction of the thermoelectric conversion unit; a plurality of second electrodes in contact with the thermoelectric conversion unit from one side in the first direction, each of the plurality of second electrodes is disposed at an interval relative to the first electrode in a direction substantially perpendicular to the first direction; A temperature sensor in which a voltage difference occurs between the first electrode and each of the plurality of second electrodes in response to a temperature gradient generated in the thermoelectric conversion portion.

2. 2. The temperature sensor according to claim 1, The device further includes an insulating substrate, the base has a first main surface on the other side in the first direction, the first electrode and the plurality of second electrodes are provided on the first main surface of the base, The thermoelectric conversion portion is provided on the first main surface of the base body and covers the first electrode and the plurality of second electrodes.

3. 3. The temperature sensor according to claim 1, the plurality of second electrodes are arranged on one side in a second direction or on the other side in the second direction with respect to the first electrode, the plurality of second electrodes include one or more second electrodes located closest to one side in a third direction and one or more second electrodes located closest to the other side in the third direction, the first electrode has a first end on one side in the third direction and a second end on the other side in the third direction, the second direction is a direction substantially perpendicular to the first direction, and the third direction is a direction substantially perpendicular to the first direction and the second direction, a dimension of the first electrode in the third direction is greater than a linear distance in the third direction from a first virtual line to a second virtual line; the first end of the first electrode is located on one side of the first virtual line in the third direction, and the second end of the first electrode is located on the other side of the second virtual line in the third direction, the first virtual line extends in the second direction through an end on the other side in the third direction of one or more second electrodes that are located closest to one side in the third direction, A temperature sensor in which the second virtual line extends in the second direction through an end on one side in the third direction of one or more second electrodes that are located furthest on the other side in the third direction.

4. 2. The temperature sensor according to claim 1, the thermoelectric conversion unit has a first portion and a second portion, the first electrode is in contact with the first portion of the thermoelectric conversion unit, The temperature sensor has the plurality of second electrodes in contact with the second portion of the thermoelectric conversion unit.

5. 3. The temperature sensor according to claim 2, the substrate has a first portion and a second portion; the first main surface of the base has a first region which is a surface of the first part of the base on the other side in the first direction, and a second region which is a surface of the second part of the base on the other side in the first direction, the thermoelectric conversion unit has a first portion provided on the first portion of the base and a second portion provided on the second portion of the base, the first electrode is provided on the first region of the first main surface of the base and is covered by the first portion of the thermoelectric conversion unit, The plurality of second electrodes are provided on the second region of the first main surface of the base and are covered by the second portion of the thermoelectric conversion portion.

6. 5. The temperature sensor according to claim 4, Further comprising at least one thermal insulator, The at least one insulating section includes a first insulating section, The first heat insulating portion is a temperature sensor provided at the boundary between the first portion and the second portion of the thermoelectric conversion portion and positioned between the first electrode and the plurality of second electrodes.

7. 7. The temperature sensor according to claim 6, The sensor further includes a sensing unit, the sensing unit is configured to generate or change a signal in response to a temperature in the vicinity of the first electrode, The first heat insulating portion is a temperature sensor located between the first electrode and the sensing portion and the plurality of second electrodes.

8. 6. The temperature sensor according to claim 5, Further comprising at least one thermal insulator, The at least one heat insulating section includes at least one of a first heat insulating section and a second heat insulating section, the first heat insulating portion is provided at a boundary between the first portion and the second portion of the thermoelectric conversion portion and is located between the first electrode and the plurality of second electrodes, The second heat insulating portion is provided at the boundary between the first portion and the second portion of the base and is located between the first electrode and the plurality of second electrodes.

9. 9. The temperature sensor according to claim 8, The sensor further includes a sensing unit, the sensing unit is configured to generate or change a signal in response to a temperature in the vicinity of the first electrode, the first heat insulating unit is located between the first electrode and the sensing unit and the plurality of second electrodes, The second heat insulating portion is a temperature sensor located between the first electrode and the sensing portion and the plurality of second electrodes.

10. 3. The temperature sensor according to claim 2, The device further includes a first conductive line, a plurality of second conductive lines, a first terminal portion, and a plurality of second terminal portions, the first terminal portion is provided on the first main surface of the base, the first conductive line is provided on the first main surface of the substrate and extends from the first electrode to the first terminal portion; the plurality of second terminals are provided on the first main surface of the base, The plurality of second conductive lines are provided on the first main surface of the substrate and extend from the plurality of second electrodes to a plurality of second terminal portions.

11. 3. The temperature sensor according to claim 2, The semiconductor device further includes a first conductive line, a plurality of second conductive lines, a first connection portion, a plurality of second connection portions, a first terminal portion, and a plurality of second terminal portions, the base further has a second main surface on one side in the first direction, the first connection portion is provided inside the base body and electrically connects the first electrode and the first conductive line; the first terminal portion is provided on the second main surface of the base, the first conductive line is provided on the second main surface of the base and extends from the first connection portion to the first terminal portion; the plurality of second connection portions are provided inside the base and electrically connect the plurality of second electrodes and the plurality of second conductive lines; the plurality of second terminals are provided on the second main surface of the base, The plurality of second conductive lines are provided on the second main surface of the base and extend from the plurality of second connection portions to the plurality of second terminal portions.

12. 2. The temperature sensor according to claim 1, The thermoelectric conversion part has flexibility so that it can be bent.

13. 3. The temperature sensor according to claim 2, The temperature sensor has flexibility such that the thermoelectric conversion portion and the base body are bendable.

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