Flat panel manufacturing system and robot control device used for the same

Abstract

To provide a flat panel manufacturing system capable of appropriately calculating a positional relationship between a transfer robot and a sensor installed in the transfer robot and appropriately grasping the inside of a chamber using the sensor, and provide a robot control device used for the flat panel manufacturing system.SOLUTION: A flat panel manufacturing system 1 includes: a first sensor device 30 that is disposed at a tip end part of a holding part 22 of a transfer robot 20 that holds a workpiece W and senses an inside of a chamber PC by a sensor 31; marks 51 and 52 that are disposed at one of the first sensor device 30 and a main body side of the transfer robot 20 to which the holding part 22 of the transfer robot 20 is attached; a second sensor device 40 that is disposed at the other different from the one and detects the marks 51 and 52 disposed at the one; and sensor position calculation means 130 that calculates the position of the sensor 31 based on the positions of the marks 51 and 52 detected by the second sensor device 40.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] The present invention relates to a flat panel manufacturing system and a robot controller used therein. [Background technology]

[0002] In recent years, industrial robots have become widespread in the industrial world, including large-scale manufacturing systems for processing glass substrates for large flat panels, including flat panel displays (FPDs) such as liquid crystal displays and organic electroluminescence (EL) displays.

[0003] In such large-scale manufacturing systems, multiple process chambers are arranged to perform various processes on workpieces such as glass substrates. Furthermore, a transfer robot (transfer device) is arranged in the transfer chamber, and the transfer robot (transfer device) transports the workpiece to a desired position in each process chamber.

[0004] In Patent Document 1, the transfer device is equipped with an optical sensor at the tip of a support pick, and by moving the support pick upward in the transfer chamber and irradiating light toward the tip, the transfer device identifies the upper end position of the opening between the transfer chamber and the load lock chamber. Furthermore, in the load lock chamber, the support pick is moved upward and rotated while irradiating light toward the tip and downward, thereby identifying the upper end position / side wall position of the buffer (groove). Then, the operation of the transfer device is corrected based on the identified upper end position of the opening and the upper end position / side wall position of the buffer (groove). In this way, Patent Document 1 automatically adjusts the operating position of the transfer device. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Publication No. 2019-220588 Summary of the Invention [Problem to be solved by the invention]

[0006] However, in the conveying device disclosed in Patent Document 1, unless the optical sensor provided at the tip of the support pick is attached in a predetermined appropriate position, the optical sensor cannot accurately grasp the inside of the chamber.

[0007] It is conceivable to provide an attachment mechanism on the support pick of the conveying device so that the optical sensor can be attached in the appropriate position, but the attachment position may shift, and the user may replace the support pick with a different one.

[0008] Therefore, an object of the present invention is to provide a flat panel manufacturing system and a robot control device used therein that can properly calculate the positional relationship between a transport robot and a sensor installed on the transport robot and properly grasp the inside of a chamber using the sensor. [Means for solving the problem]

[0009] A flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels and has a plurality of chambers, a transport robot that transports workpieces between the plurality of chambers, and a robot control device that controls the operation of the transport robot, and is equipped with a first sensor device that is arranged at the tip of the holding part of the transport robot that holds the workpiece and senses the inside of the chamber using a sensor, a marker that is arranged either on the first sensor device or on the main body side of the transport robot to which the holding part of the transport robot is attached, a second sensor device that is arranged on the other side different from the first sensor device and detects the marker arranged on the one side, and a sensor position calculation means that calculates the position of the sensor based on the position of the marker detected by the second sensor device.

[0010] According to this aspect, the first sensor device is disposed at the tip of the holder of the transfer robot and senses the inside of the chamber with the sensor, the marker is disposed either on the first sensor device or on the main body side of the transfer robot, and the second sensor device is disposed on the other side different from the first sensor device and detects the marker disposed on the first sensor device. The sensor position calculation means calculates the position of the sensor based on the position of the marker detected by the second sensor device. This makes it possible to appropriately calculate the positional relationship between the transfer robot and the sensor and appropriately grasp the inside of the chamber using the sensor.

[0011] In the above aspect, at least two or more markers may be arranged, and the second sensor device may have cameras corresponding to the two or more markers, respectively.

[0012] According to this aspect, the two or more marks can be properly detected by cameras corresponding to the two or more marks, and the position and inclination of the first sensor device can be properly determined based on the two or more marks. As a result, the positional relationship between the transfer robot and the sensor can be more properly calculated, and the inside of the chamber can be properly determined using the sensor.

[0013] In the above aspect, the main body side of the transport robot may be a hand holder to which the holding portion is attached.

[0014] According to this aspect, a mark is placed on either the first sensor device or the hand holder of the transport robot, and the second sensor device is placed on the other. This allows the mark or the second sensor device to be placed on the main body side of the transport robot while avoiding a position that would affect the operation of the transport robot, and allows the mark to be properly detected by the second sensor device.

[0015] In the above aspect, the main body side of the transport robot may be a base that supports a hand holder to which the holding portion is attached.

[0016] According to this aspect, a mark is placed on either the first sensor device or the base of the transport robot, and the second sensor device is placed on the other. This allows the mark or the second sensor device to be placed on the main body side of the transport robot while avoiding a position that would affect the operation of the transport robot, and allows the mark to be properly detected by the second sensor device.

[0017] In the above aspect, the mark may be spherical.

[0018] According to this aspect, since the mark has a spherical shape, the second sensor device can appropriately detect the mark without depending on the positional relationship (angle) between the mark and the second sensor device.

[0019] Another flat panel manufacturing system according to one embodiment of the present invention is a flat panel manufacturing system that manufactures flat panels and has a plurality of chambers, a transport robot that transports workpieces between the plurality of chambers, and a robot control device that controls the operation of the transport robot, and is equipped with a first sensor device that is arranged at the tip of the holding part of the transport robot that holds the workpiece and senses the inside of the chamber using a sensor, a first mark arranged on the first sensor device, a second mark arranged on the main body side of the transport robot to which the holding part of the transport robot is attached, a second sensor device that is arranged in the chamber and detects the first mark and the second mark, and a sensor position calculation means that calculates the position of the sensor based on the positions of the first mark and the second mark detected by the second sensor device.

[0020] According to this aspect, the first sensor device is disposed at the tip of the holder of the transfer robot and senses the inside of the chamber with a sensor, and the second sensor device is disposed in the chamber and detects a first mark disposed on the first sensor device and a second mark disposed on the main body of the transfer robot. The sensor position calculation means calculates the position of the sensor based on the positions of the first mark and the second mark detected by the second sensor device. This makes it possible to appropriately calculate the positional relationship between the transfer robot and the sensor and appropriately grasp the inside of the chamber using the sensor.

[0021] A robot control device according to one embodiment of the present invention is used in a flat panel manufacturing system for manufacturing flat panels, and is a robot control device that controls the operation of a transport robot that transports workpieces between multiple chambers, and is equipped with a mark detection means that detects a mark placed on either a first sensor device that senses the inside of the chamber with a sensor or on the main body side of the transport robot where the holding part of the transport robot is attached, using a second sensor device placed on the other side different from the first sensor device, a sensor position calculation means that calculates the position of the sensor based on the position of the mark, a sensing means that senses the inside of the chamber with a sensor while operating the holding part of the transport robot to enter the chamber, an object detection means that detects an object by being sensed by the sensing means, and an object position calculation means that calculates the position of the object detected by the object detection means based on the sensor position calculated by the sensor position calculation means.

[0022] According to this aspect, the mark detection means detects a mark disposed on either the first sensor device that senses the inside of the chamber with a sensor or on the main body side of the transfer robot with a second sensor device disposed on the other side, and the sensor position calculation means calculates the position of the sensor based on the position of the mark. Then, with respect to an object detected by sensing with the sensing means, the object position calculation means calculates the position of the object detected by the object detection means based on the position of the sensor calculated by the sensor position calculation means. As a result, the inside of the chamber can be appropriately grasped using the sensors. [Effects of the Invention]

[0023] According to the present invention, it is possible to provide a flat panel manufacturing system and a robot control device used therein that can properly calculate the positional relationship between a transport robot and a sensor installed on the transport robot and properly grasp the inside of a chamber using the sensor. [Brief explanation of the drawings]

[0024] [Figure 1] 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 2] 1 is a plan view showing the internal structure of a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 3] 1 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 4] 1 is a schematic diagram showing a state in which a first sensor device 30 and a second sensor device 40 are arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 5] 1 is a functional block diagram showing each function of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to an embodiment of the present invention. [Figure 6] FIG. 10 is a schematic diagram showing a state in which the transfer robot 20 senses the inside of the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. [Figure 7] 1 is a schematic diagram showing a state in which a mark is placed on the main body side of a transfer robot 20 and a second sensor device 40 is placed on a first sensor device 30. FIG. DETAILED DESCRIPTION OF THE INVENTION

[0025] Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings. Note that the embodiment described below is merely a specific example for carrying out the present invention and is not intended to limit the present invention. Furthermore, to facilitate understanding of the description, the same components in each drawing will be assigned the same reference numerals as much as possible, and duplicate descriptions may be omitted.

[0026] <One embodiment> [Flat panel manufacturing system configuration] Fig. 1 is an external perspective view showing an overview of a flat panel manufacturing system 1 according to one embodiment of the present invention, and Fig. 2 is a plan view showing the internal structure of the flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in Fig. 1 and Fig. 2, the flat panel manufacturing system 1 is a large multi-chamber system that includes a transfer chamber TC in the center and multiple process chambers PC and load lock chambers LLC arranged to surround the transfer chamber TC.

[0027] The flat panel manufacturing system 1 is a vacuum processing system for processing glass substrates for large flat panels including flat panel displays (FPDs) such as liquid crystal displays and organic EL displays.

[0028] The load lock chamber LLC is a chamber for transferring workpieces W (such as glass substrates) between the outside and the process chambers PC before and after processing in the process chambers PC, allowing the process chambers PC to maintain a vacuum state without being exposed to the outside atmosphere. The transfer chamber TC can also maintain a vacuum state.

[0029] The transfer chamber TC is configured to be able to maintain a vacuum state as described above, and is equipped with a transfer robot 20. The transfer robot 20 has a transfer mechanism (hand holders and fingers) that transfers the workpiece W between each process chamber PC and the load lock chamber LLC.

[0030] The multiple process chambers PC are configured to be able to maintain a vacuum state as described above, and are equipped with a mounting table on which the workpiece W transferred by the transfer robot 20 arranged in the transfer chamber TC is placed. The mounting table may be configured, for example, to be provided with multiple support pins so that the workpiece W is supported by the support pins. Then, in each process chamber PC, with the workpiece W placed thereon, plasma processing such as CVD (Chemical Vapor Deposition), etching, ashing, or film formation under vacuum conditions may be performed on the workpiece W. Note that the same type of processing may be performed in each process chamber PC, or different types of processing may be performed in each process chamber.

[0031] [Transport robot system configuration] 3 is a schematic diagram showing the configuration of a transfer robot system 10 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 3, the transfer robot system 10 includes a transfer robot 20, a robot control device 100, and a teaching pendant TP.

[0032] 1 and 2, the transfer robot 20 is disposed in the transfer chamber TC in the flat panel manufacturing system 1, and transfers the workpiece W between each process chamber PC and the load lock chamber LLC. The transfer robot 20 is a horizontal articulated robot intended for transporting, for example, glass substrates, and is a clean transfer robot used for transport in clean environments in the manufacture of semiconductor devices and flat panel displays, the medical and food industries, etc.

[0033] The transfer robot 20 is, for example, of a two-axis or three-axis cylindrical coordinate type, and has a hand holder 21 and fingers (holding parts) 22 as end effectors. The hand holder 21 is supported on a base 23, and is capable of vertical movement and rotational movement, and further, is configured to be movable in the direction in which the fingers 22 attached to the hand holder 21 extend (horizontal direction).

[0034] In this embodiment, a case will be described in which a workpiece W (for example, a glass substrate) is transported while being held by fingers 22 attached to a hand holder 21.

[0035] The robot control device 100 is a device that controls the operation of the transfer robot 20. For example, the robot control device 100 is connected to an operating device such as a teaching pendant TP and can acquire operation instruction information input via the operating device. Based on the operation instruction information, the robot control device 100 starts and stops the transfer robot 20, and operates each axis, arm, and hand holder 21 (fingers 22) of the transfer robot 20 to take out, transport, and place a workpiece W in each process chamber PC and load lock chamber LLC.

[0036] The teaching pendant TP is an operating device operated by an operator, and receives input from the operator regarding operation instruction information for the transport robot 20, such as the transport work of transporting the workpiece W. Typically, the operator uses an operating device such as the teaching pendant TP to input appropriate instruction information, for example, for starting and stopping the transport robot 20, as well as for setting the transport robot 20, operating the arm and hand holder 21 (fingers 22), and registering teaching points.

[0037] Furthermore, regarding the registration of teaching points, an operator may sequentially register teaching points on the movement path of the transfer robot 20 using an operating device such as a teaching pendant TP while operating the transfer robot 20, or teaching points may be automatically registered by automatic teaching. Automatic teaching is effective in environments or situations where an operator cannot enter the interior and cannot grasp the state inside each chamber from the outside, such as the flat panel manufacturing system 1.

[0038] Here, there is a situation in which the transfer robot 20 installed in the transfer chamber TC inserts its fingers 22 into the load lock chamber LLC, removes the workpiece W placed there using the fingers 22, and transfers it to a mounting table in the process chamber PC while it is held by the fingers 22. The transfer robot 20 operates the arm and hand holder 21 (fingers 22) based on operation instruction information from the robot control device 100, removes the workpiece W from the load lock chamber LLC, and transfers it to the process chamber PC as the transfer destination.

[0039] At this time, the finger 22 holding the workpiece W advances from the transfer chamber TC toward the load lock chamber LLC or the process chamber PC, and proceeds inside the load lock chamber LLC or the process chamber PC. For example, the finger 22 attached to the hand holder 21 of the transfer robot 20 must proceed while avoiding collision with the support pins or wall surfaces inside the transfer chamber TC or the process chamber PC, and place the workpiece W held by the finger 22 at the target position.

[0040] As mentioned above, in the flat panel manufacturing system 1, it is difficult for the operator to directly check the state inside each chamber, so it is important to properly grasp the state inside each chamber, for example, using a sensor device placed on the finger 22.

[0041] Here, the robot control device 100 needs to properly grasp the position of the sensor device disposed on the finger 22 in order to grasp the state inside each chamber with high accuracy. If the position of the sensor device disposed on the finger 22 is misaligned in the first place, the position of the support pins or wall surfaces inside each chamber grasped using the sensor device may also be inaccurate, and as a result, it may be impossible to properly place the workpiece W at the target position. In other words, it is important to properly grasp the position of the sensor device disposed on the finger 22 and then use the sensor device to sense the inside of the transfer chamber TC or the process chamber PC.

[0042] 4 is a schematic diagram showing a state in which a first sensor device 30 and a second sensor device 40 are arranged on a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 4, the first sensor device 30 is arranged at the tip of a finger 22 attached to a hand holder 21 in the transfer robot 20, and the second sensor device 40 is arranged on the hand holder 21.

[0043] The first sensor device 30 includes a sensor 31. For example, the sensor 31 may be a two-dimensional laser sensor that is attached to the front surface, back surface, or side surface of the first sensor device 30 in the traveling direction and is capable of sensing only a predetermined range in a direction perpendicular to the traveling direction of the finger 22 of the transfer robot 20.

[0044] The first sensor device 30, to which the sensor 31 is attached, is placed and held at the tip of the finger 22 of the transport robot 20, and is configured so that the sensor 31 can sense the direction of movement of the finger 22 of the transport robot 20 and the downward direction inside the load lock chamber LLC and the process chamber PC.

[0045] As a result, as the finger 22 advances toward the load lock chamber LLC and the process chamber PC, the sensor 31 can sequentially sense the downward direction inside the load lock chamber LLC and the process chamber PC within the above-mentioned specified range (sensing range) of the two-dimensional laser sensor, and detect markers such as support pins.

[0046] Although one sensor 31 is disposed in the center of the first sensor device 30, this is not limiting. For example, as long as it is possible to detect support pins and the like disposed inside the load lock chamber LLC and the process chamber PC and to ascertain their positions, a sensor may be disposed at an end of the first sensor device 30, or two or more sensors may be disposed.

[0047] Furthermore, a distance measuring sensor capable of sensing the distance from the tip of the finger 22 to the inner wall surface and / or the side wall surface in a direction along the moving direction of the finger 22 and / or a lateral direction perpendicular to the moving direction and horizontally may be disposed in the first sensor device 30. This makes it possible to grasp the positions of the inner wall surface and / or the side wall surface inside the load lock chamber LLC and the process chamber PC.

[0048] Furthermore, the sensor disposed in the first sensor device 30 is not limited to a two-dimensional laser sensor, and may be, for example, a stereo camera, a LiDAR, or the like.

[0049] Two marks 51 and 52 are arranged on the first sensor device 30. The two marks 51 and 52 are detectable by the second sensor device 40 and are typically spherical.

[0050] The second sensor device 40 has two sensor devices 41 and 42, and the two sensor devices 41 and 42 are fixed and installed on the hand holder 21 of the transport robot 20. In other words, the robot control device 100 accurately grasps the position of the second sensor device 40 (two sensor devices 41 and 42) on the transport robot 20 in advance.

[0051] The two sensor devices 41 and 42 correspond to the two marks 51 and 52 arranged on the first sensor device 30, respectively, and are arranged so that the relative positions of the sensor device 41 and the sensor device 42 can be detected with high accuracy relative to the mark 51 and the mark 52, respectively. The two sensor devices 41 and 42 are typically configured as stereo cameras, and the angle of view and focal length of the sensor device 41 are adjusted relative to the mark 51, and the angle of view and focal length of the sensor device 42 are adjusted relative to the mark 52.

[0052] Furthermore, since the two marks 51, 52 are spherical, the two sensor devices 41, 42 arranged on the hand holder 21 of the transport robot 20 can appropriately detect the two marks 51, 52, respectively, regardless of the detection (measurement) angle.

[0053] By using the two sensor devices 41, 42 to appropriately detect the two marks 51, 52 arranged on the first sensor device 30, the second sensor device 40 can appropriately detect the position and inclination of the first sensor device 30. As a result, the position and inclination of the sensor 31 arranged on the first sensor device 30 can also be grasped with high accuracy.

[0054] In this way, the position (robot coordinate system) of the sensor 31 located on the first sensor device 30 held at the tip of the finger 22 relative to the transport robot 20 is calibrated, so the robot control device 100 can accurately grasp the positions of support pins, wall surfaces, etc. within the chamber sensed by the sensor 31.

[0055] Furthermore, the first sensor device 30 and the second sensor device 40 may each include a control unit and a communication unit, and may notify the robot control device 100 of the information they have detected, for example.

[0056] [Robot control device configuration] 5 is a functional block diagram showing the functions of a robot control device 100 that controls the operation of a transfer robot 20 used in a flat panel manufacturing system 1 according to one embodiment of the present invention. As shown in FIG. 5, the robot control device 100 includes a robot control means 110, a mark detection means 120, a sensor position calculation means 130, a sensing means 140, an object detection means 150, and an object position calculation means 160, and controls the operation of the transfer robot 20.

[0057] A mark placed on the first sensor device 30 held at the tip of the finger 22 of the transport robot 20 is detected by the second sensor device 40 fixed to the main body of the transport robot 20. As a result, the robot control device 100 grasps the position (robot coordinate system) of the first sensor device 30 (including the sensor 31 placed on the first sensor device 30) based on the relative positions of the transport robot 20 and the first sensor device 30.

[0058] 3, the robot control device 100 is connected to the transport robot 20, and further has many functions for performing various controls and processes based on operation instruction information from an operating device such as a teaching pendant TP, or automatic control (automatic teaching). Here, the robot control device 100 is mainly shown to have a calibration function for grasping the position of the first sensor device 30 (including the sensor 31 arranged on the first sensor device 30) held at the tip of the finger 22 of the transport robot 20, but it also has other configurations and functions.

[0059] The robot control means 110 operates the transport robot 20. For example, the transport robot 20 is in a state where the first sensor device 30 is held by the fingers 22, and the robot control means 110 operates each axis, arm, and hand holder 21 (fingers 22) of the transport robot 20.

[0060] The mark detection means 120 detects the marks 51, 52 included in the first sensor device 30 arranged at the tip of the finger 22 of the transfer robot 20. For example, the marks 51, 52 are detected by the second sensor device 40 (stereo cameras 41, 42) fixedly arranged on the main body side (e.g., hand holder 21) of the transfer robot 20. The mark detection means 120 may detect the marks 51, 52 based on image information acquired by the second sensor device 40, for example, by image matching or the like.

[0061] The sensor position calculation means 130 calculates the position of the sensor 31 attached to the first sensor device 30 based on the positions of the marks 51 and 52 detected by the mark detection means 120. For example, the first sensor device 30 is provided with a sensor 31 and two marks 51 and 52, and the positional relationship between them may be known in advance, and the sensor position calculation means 130 calculates the position of the sensor 31 based on the positions of the two marks 51 and 52. The sensor position calculation means 130 calculates the position (coordinates) of the sensor 31 in the robot coordinate system based on the relative positions of the two marks 51 and 52 with respect to the main body side (second sensor device 40) of the transfer robot 20.

[0062] The sensing means 140 senses the inside of the load lock chamber LLC (process chamber PC) by a sensor 31 attached to a first sensor device 30 held at the tip of the finger 22 while operating the finger 22 of the transfer robot 20. The sensor 31 may be, for example, a two-dimensional laser sensor, a stereo camera, a LiDAR, a distance measurement sensor, or the like.

[0063] The object detection means 150 detects the object by being sensed by the sensing means 140. For example, the object detection means 150 may detect a support pin arranged in the load lock chamber LLC (process chamber PC) and / or a back wall surface and / or a side wall surface in the load lock chamber LLC (process chamber PC).

[0064] The object position calculation means 160 calculates the position of the object detected by the object detection means 150 based on the position of the sensor 31 calculated by the sensor position calculation means 130. The robot control device 100 detects the object by sensing with the sensor 31 calibrated in the robot coordinate system, and calculates the position of the object. That is, the position (coordinates) of the object can be appropriately grasped in the robot coordinate system.

[0065] In this way, by appropriately grasping the positions (coordinates) of the support pins within the load lock chamber LLC (process chamber PC) and / or the rear wall surface and / or side wall surface within the load lock chamber LLC (process chamber PC), the robot control device 100 may, for example, calculate the target position for placing the workpiece W within the load lock chamber LLC (process chamber PC) based on the positions of the support pins and / or the rear wall surface and / or side wall surface, or adjust the direction of travel (inclination) of the fingers 22 of the transport robot 20.

[0066] Specifically, the robot control device 100 may calculate the center position within the load lock chamber LLC (process chamber PC) based on the positions of multiple support pins and the back wall surface and / or side wall surface, and set the center position as a target position so that the TCP (Tool Center Point) of the transfer robot 20 reaches the center position. Also, based on the positions of the support pins arranged within the load lock chamber LLC (process chamber PC) and / or the back wall surface and / or side wall surface within the load lock chamber LLC (process chamber PC), the robot control device 100 may adjust the fingers 22 to avoid collision with the support pins or adjust the moving direction of the fingers 22 to follow the side wall surface.

[0067] 6 is a schematic diagram showing the state in which the transfer robot 20 senses the inside of the process chamber PC while advancing from the transfer chamber TC toward the process chamber PC. As shown in FIG. 6, while the finger 22 of the transfer robot 20 advances toward the process chamber PC, the inside of the process chamber PC is sensed by the sensor 31 attached to the first sensor device 30 held at the tip of the finger 22.

[0068] As described above, the position of the sensor 31 attached to the first sensor device 30 is calibrated (robot coordinate system) by detecting the marks 51 and 52 arranged on the first sensor device 30 using the stereo cameras 41 and 42 fixed to the hand holder 21. That is, the position of the object (support pin or wall surface) sensed by the sensor 31 inside the process chamber PC can be properly grasped.

[0069] As described above, in the flat panel manufacturing system 1, transfer robot system 10, and robot control device 100 according to one embodiment of the present invention, the marks 51 and 52 are arranged on the first sensor device 30 held at the tip of the finger 22 of the transfer robot 20, and the stereo cameras 41 and 42 arranged on the hand holder 21 detect the marks 51 and 52. The sensor position calculation means 130 calculates the position (robot coordinates) of the sensor 31 attached to the first sensor device 30 based on the positions of the marks 51 and 52 detected by the stereo cameras 41 and 42. This allows the positional relationship between the transfer robot 20 and the sensor 31 to be properly determined, and therefore the interior of the process chamber PC sensed by the sensor 31 (the positions of the support pins and the rear and / or side wall surfaces) to be properly determined.

[0070] For example, even if the user replaces an end effector (tool) such as the finger 22, changes the first sensor device 30 or the sensor 31, or their mounting positions are displaced, the positional relationship (robot coordinate system) between the transport robot 20 and the sensor 31 can be properly grasped. In other words, the position of the sensor 31 can be grasped as a relative position (robot coordinate system) in the transport robot 20 without being affected by the situation or environment.

[0071] In this embodiment, the first sensor device 30 is provided with two marks 51 and 52, but the number of marks is not limited to two. As long as the second sensor device 40 can appropriately detect the position and tilt of the first sensor device 30, the number of marks may be one or three or more. Furthermore, the shape of the marks is not limited to a sphere, and may be, for example, a rectangular parallelepiped, a cube, a cylinder, a cone, or other polygonal prism or pyramid shape. As long as the second sensor device 40 can appropriately detect the positions of the vertices of these marks, the position and tilt of the first sensor device 30 can be determined with high accuracy.

[0072] In addition, in this embodiment, the second sensor device 40 (sensor devices 41, 42) each consisted of two stereo cameras, but this is not limited to this and may be, for example, an optical sensor or LiDAR, as long as it can properly detect the marks 51, 52 placed on the first sensor device 30.

[0073] Furthermore, in this embodiment, the second sensor device 40 is disposed on the hand holder 21, but the location of the second sensor device 40 is not limited thereto and may be disposed on another part of the main body of the transport robot 20 excluding a user-replaceable tool (e.g., the finger 22 as an end effector). For example, the second sensor device 40 may be disposed on the base 23 of the transport robot 20, or may be disposed on another position on the main body of the transport robot 20 as long as the marks 51 and 52 disposed on the first sensor device 30 can be detected. When the second sensor device 40 is disposed on the base 23 of the transport robot 20, the marks 51 and 52 may be disposed on the back side of the first sensor device 30 so that the marks 51 and 52 can be easily detected by the second sensor device 40, thereby more appropriately avoiding positions that may affect the operation of the transport robot 20.

[0074] Furthermore, with regard to the positional relationship between the marks 51, 52 and the second sensor device 40, the marks 51, 52 that were located on the first sensor device 30 may be located on the main body side of the transport robot 20, and the second sensor device 40 that was located on the main body side of the transport robot 20 may be located on the first sensor device 30.

[0075] 7 is a schematic diagram showing a state in which marks are placed on the main body side of the transport robot 20 and a second sensor device 40 is placed on the first sensor device 30. As shown in FIG. 7, two marks 51 and 52 are placed on the hand holder 21 of the transport robot 20, and a sensor device 41 corresponding to the mark 51 and a sensor device 42 corresponding to the mark 52 are placed on the first sensor device 30.

[0076] The two sensor devices 41, 42 are fixed and arranged in advance on the first sensor device 30, and detect two marks 51, 52 arranged on the main body side of the transport robot 20 from the first sensor device 30 in a state where it is held at the tip of the finger 22 of the transport robot 20. This makes it possible to grasp the positional relationship (position and inclination) between the first sensor device 30 and the transport robot 20.

[0077] Furthermore, the position (robot coordinate system) of the sensor 31 pre-attached to the first sensor device 30 relative to the transport robot 20 can be properly grasped, and the same effects as those described in the embodiments of the present invention can be achieved.

[0078] Alternatively, four stereo cameras (second sensor devices) may be arranged in the transfer chamber TC, two markers may be arranged on the first sensor device 30, and two markers may be arranged on the main body side (hand holder 21) of the transport robot 20. The four stereo cameras correspond to the two markers arranged on the first sensor device 30 and the two markers arranged on the hand holder 21 of the transport robot 20, respectively, and the angle of view and focal length are adjusted so that each can be detected appropriately.

[0079] By properly understanding the positional relationship between the transport robot 20 and the first sensor device 30 based on the positions of the four landmarks detected by the four stereo cameras (second sensor device), the position (robot coordinate system) of the sensor 31 pre-attached to the first sensor device 30 relative to the transport robot 20 can be properly understood, thereby achieving the same effects as those described in the embodiments of the present invention.

[0080] In this embodiment, the situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the process chamber PC has been described as an example, but the present invention is not limited to this. For example, the present invention can be similarly applied to a situation in which the hand holder 21 (fingers 22) of the transfer robot 20 advances from the transfer chamber TC toward the load lock chamber LLC.

[0081] The above-described embodiments are intended to facilitate understanding of the present invention and are not intended to limit the present invention. The elements of the embodiments, as well as their arrangement, materials, conditions, shapes, sizes, etc., are not limited to those illustrated and can be modified as appropriate. Furthermore, configurations shown in different embodiments can be partially substituted or combined with each other. [Explanation of symbols]

[0082] 1...flat panel manufacturing system, 10...transport robot system, 20...transport robot, 21...hand holder, 22...finger, 23...base, 30, 40...sensor device, 31...sensor, 41, 42...stereo camera, 51, 52...mark, 100...robot control device, 110...robot control means, 120...mark detection means, 130...sensor position calculation means, 140...sensing means, 150...object detection means, 160...object position calculation means, TC...transfer chamber, PC...process chamber, LLC...load lock chamber, TP...teaching pendant, W...work

Claims

1. 1. A flat panel manufacturing system for manufacturing flat panels, comprising: a plurality of chambers; a transfer robot for transferring workpieces between the plurality of chambers; and a robot control device for controlling the operation of the transfer robot, a first sensor device that is disposed at a tip of a holder of the transfer robot that holds the workpiece and that senses the inside of the chamber with a sensor; a mark disposed on either the first sensor device or a main body side of the transport robot to which a holding unit of the transport robot is attached; a second sensor device disposed on another device different from the one device and configured to detect the mark disposed on the one device; and a sensor position calculation means for calculating a position of the sensor based on a position of the mark detected by the second sensor device. Flat panel manufacturing system.

2. At least two or more of the marks are arranged, the second sensor device has a camera corresponding to each of the two or more landmarks; The flat panel manufacturing system of claim 1 .

3. The main body side of the transport robot is a hand holder to which the holding unit is attached. The flat panel manufacturing system of claim 1 .

4. The main body side of the transport robot is a base that supports a hand holder to which the holding unit is attached. The flat panel manufacturing system of claim 1 .

5. The mark is spherical. The flat panel manufacturing system of claim 1 .

6. 1. A flat panel manufacturing system for manufacturing flat panels, comprising: a plurality of chambers; a transfer robot for transferring workpieces between the plurality of chambers; and a robot control device for controlling the operation of the transfer robot, a first sensor device that is disposed at a tip of a holder of the transfer robot that holds the workpiece and that senses the inside of the chamber with a sensor; a first mark disposed on the first sensor device; a second mark disposed on a main body side of the transport robot to which a holding portion of the transport robot is attached; a second sensor device disposed in the chamber and configured to detect the first mark and the second mark; and a sensor position calculation means for calculating a position of the sensor based on the positions of the first mark and the second mark detected by the second sensor device. Flat panel manufacturing system.

7. 1. A robot control device used in a flat panel manufacturing system for manufacturing flat panels, the robot control device controlling the operation of a transfer robot that transfers workpieces between a plurality of chambers, a mark detection means for detecting a mark disposed on either a first sensor device that senses the inside of the chamber with a sensor or a main body side of the transport robot to which a holding part of the transport robot is attached, by a second sensor device disposed on the other side different from the first sensor device; a sensor position calculation means for calculating a position of the sensor based on the position of the mark; a sensing unit that senses the inside of the chamber using the sensor while operating a holding unit of the transfer robot to advance into the chamber; an object detection means for detecting an object by being sensed by the sensing means; an object position calculation means for calculating a position of the object detected by the object detection means based on the position of the sensor calculated by the sensor position calculation means, Robot control device.

Images