Conveying device and conveying method

Abstract

To convey a work while fixing the work.SOLUTION: A conveying device 1 comprises: a conveyance mechanism 10 which includes a plurality of pallets 20 arranged along the conveying direction to support a work W, a plurality of support members 11 for supporting each pallet 20, and a track rail 12 for setting the track of the support member 11 and conveys the pallets 20 along the conveying direction; and a vacuum pressure supply mechanism 100 for supplying a vacuum pressure which is lower than the atmospheric pressure. The support members 11 have a vacuum pressure room 110 whose pressure is reduced when the room communicates with the vacuum pressure supply mechanism 100, and the pallets 20 convey the work W while suctioning the work with the vacuum pressure supplied by the vacuum pressure room 110 when the pallets are supported by the support members 11.SELECTED DRAWING: Figure 5

Description

[Technical Field]

[0001] The present invention relates to a transport device and a transport method for transporting a workpiece. [Background technology]

[0002] Patent Document 1 discloses a coating machine that unwinds a substrate wound in a roll on an unwinder, transports the substrate by winding it around a plurality of transport rolls, and applies a coating process to the surface of the substrate. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-270787 Summary of the Invention [Problem to be solved by the invention]

[0004] However, in the coating machine described in Patent Document 1, when processing such as coating is performed on the substrate or a workpiece placed on the substrate while the substrate is being transported, there is a risk that the workpiece may move.

[0005] The present invention has been made in consideration of the above problems, and has as its object to transport a workpiece while fixing it. [Means for solving the problem]

[0006] According to one aspect of the present invention, a conveying device for conveying a workpiece in a conveying direction includes a plurality of pallets arranged along the conveying direction to support the workpiece, a plurality of support members arranged to support each of the pallets, and track rails that set the track of the support members, and is also equipped with a conveying mechanism for conveying the pallets along the conveying direction, and a vacuum pressure supply mechanism that supplies a vacuum pressure lower than atmospheric pressure, wherein the support members have a vacuum pressure chamber that is reduced in pressure when connected to the vacuum pressure supply mechanism, and when the pallet is supported by the support members, it conveys the workpiece while adsorbing it using the vacuum pressure supplied from the vacuum pressure chamber.

[0007] According to one aspect of the present invention, in a transport method for transporting a workpiece in a transport direction, a plurality of pallets are provided along the transport direction and support the workpieces, and the pallets are transported along a track rail while being supported by support members. When the pallets are supported by the support members, the pallets adsorb the workpieces and transport them by vacuum pressure supplied from a vacuum pressure chamber of the support members. [Effects of the Invention]

[0008] In these embodiments, a plurality of pallets are provided along the conveying direction and support the workpieces, and are conveyed along the track rail while being supported by support members. Furthermore, when supported by the support members, the pallets convey the workpieces while adsorbing them using vacuum pressure supplied from the vacuum pressure chambers of the support members. Therefore, the workpieces can be conveyed while being fixed in place by the vacuum pressure supplied from the vacuum pressure chambers of the support members through the pallets. [Brief explanation of the drawings]

[0009] [Figure 1] FIG. 1 is a front view showing the overall configuration of a conveying device according to an embodiment of the present invention. [Figure 2] FIG. 2 is an enlarged view of part II in FIG. [Figure 3] FIG. 3 is a cross-sectional view taken along line III-III in FIG. [Figure 4] FIG. 4 is a diagram illustrating the configuration of the vacuum pressure supply mechanism. [Figure 5] FIG. 5 is a diagram illustrating the supply of vacuum pressure to the vacuum pressure chamber of the support member by the vacuum pressure supply mechanism. [Figure 6] FIG. 6 is a perspective view showing an example of the configuration of a pallet. [Figure 7] FIG. 7 is a cross-sectional view showing an example of the configuration of the first to third valve mechanisms. DETAILED DESCRIPTION OF THE INVENTION

[0010] Hereinafter, a conveying device 1 according to an embodiment of the present invention will be described with reference to the drawings. Note that in each drawing, the scale of each component has been appropriately changed for the sake of convenience of explanation, and the illustration is not necessarily precise. Furthermore, for multiple identical components, only some of them may be assigned reference numerals, and the reference numerals may be omitted for the rest.

[0011] First, the overall configuration of the conveying device 1 will be described with reference to Fig. 1 to Fig. 3. Fig. 1 is a front view showing the overall configuration of the conveying device 1. Fig. 2 is an enlarged view of part II in Fig. 1. Fig. 3 is a cross-sectional view taken along the line III-III in Fig. 2.

[0012] In the following, as shown in FIG. 1 etc., three orthogonal axes are set as absolute coordinate axes, with the X-axis direction being the "front-rear direction," the Y-axis direction being the "left-right direction," and the Z-axis direction being the "up-down direction." The front-rear and left-right directions are directions parallel to the horizontal. The up-down direction is a direction along the vertical axis. Furthermore, as a direction based on the workpiece W, the direction in which the workpiece W is transported is also referred to as the "transport direction" or "longitudinal direction," and the direction defining the thickness of the workpiece W is also referred to as the "thickness direction." The longitudinal direction corresponds to the transport direction of the workpiece W, and corresponds to the aforementioned front-rear direction. In this embodiment, the width direction perpendicular to the transport direction and thickness direction always coincides with the left-right direction of the transport device 1, and therefore the width direction of the workpiece W is also referred to as the left-right direction.

[0013] 1, the conveying device 1 conveys workpieces W supplied from upstream in a conveying direction. More specifically, when conveying the workpieces W intermittently placed on the conveying path, the conveying device 1 adsorbs the workpieces W to a pallet 20 by vacuum pressure, enabling the workpieces W to be conveyed while being fixed.

[0014] The conveying device 1 includes a conveying mechanism 10, a plurality of pallets 20, pallet guide rails 25 (see Figure 3), a driving mechanism 30, a pitch adjustment mechanism 40, an upstream conveying mechanism 81, a downstream conveying mechanism 82, a vacuum pressure supply mechanism 100 (see Figure 4), a connecting pipe 140 (see Figure 4), and a vacuum pressure generating source 150 (see Figure 4).

[0015] The transport mechanism 10 has a plurality of support members 11, a track rail 12, a driving sprocket 14 as a first sprocket, and a driven sprocket 15 as a second sprocket. The transport mechanism 10 transports the support members 11 along the transport direction in a part of the transport path for the workpieces W.

[0016] As shown in FIG. 3, a pair of transport mechanisms 10 are provided at a predetermined distance in the left-right direction. The pair of transport mechanisms 10 operate in synchronization with each other. A single transport mechanism 10 may be provided on only one of the transport mechanisms 10. Even when a pair of transport mechanisms 10 are provided, it is sufficient that the vacuum pressure supply mechanism 100 is provided on at least one of the transport mechanisms 10. Since the pair of transport mechanisms 10 have the same configuration, only one of the transport mechanisms 10 will be described below.

[0017] 1 and 2, a plurality of support members 11 are provided along the conveying direction in which the workpieces W are conveyed, and support the workpieces W via pallets 20. A plurality of support members 11 are provided along the track rail 12 even in positions where the workpieces W are not being conveyed. All of the support members 11 are connected to adjacent support members 11 by connecting members 51 and link members 52, which will be described later, and are arranged in a ring shape around the outer periphery of the track rail 12.

[0018] The upper surface of the support member 11 is formed flat so as to come into contact with the pallet 20. The lower end of the support member 11 is formed in a U-shape and branches out in the left and right directions (see FIG. 3). The support member 11 has a first roller 17, a second roller 18, and a positioning pin 19 (see FIG. 3). In addition, the support member 11 is provided with a link mechanism 50 of the pitch adjustment mechanism 40, which will be described later.

[0019] The first rollers 17 are arranged with their rotation axes facing in the left-right direction and run on the outer circumferential surface of the track rail 12. A pair of first rollers 17 are provided in the conveying direction of one support member 11. As shown in FIG. 3, the first rollers 17 are provided on the left and right sides of the support member 11, respectively. The left and right first rollers 17 are rotatably supported by support shafts 17a extending in the left-right direction.

[0020] 1 and 2, the second roller 18 is arranged with its rotation axis facing the left-right direction, and runs on the inner circumferential surface of the track rail 12. A single second roller 18 is provided between a pair of first rollers 17 in the conveying direction of one support member 11. As shown in FIG. 3, the second roller 18 is also provided on each of the left and right sides of the support member 11. The left and right second rollers 18 are rotatably supported by support shafts 18a extending in the left-right direction.

[0021] In this way, by providing the first roller 17 and the second roller 18, the support member 11 is supported by the track rail 12 even at the opposite position (here, below) opposite to the position along the conveying path of the pallet 20 on the track rail 12 (see Figure 1).

[0022] The positioning pins 19 protrude upward from the upper surface of the support member 11. The positioning pins 19 are inserted into the positioning holes 24 of the pallet 20 transported from the upstream transport mechanism 81. The positioning pins 19 determine the relative positions of the support member 11 and the pallet 20 in the front-to-back and left-to-right directions. By inserting the positioning pins 19 into the positioning holes 24, the support member 11 and the pallet 20 are transported together by the transport device 1. The positioning pins 19 come out of the positioning holes 24 at a position where the pallet 20 is handed over to the downstream transport mechanism 82.

[0023] As shown in FIG. 1 , the track rail 12 sets the track for the support member 11. The track rail 12 defines an endless circulation path 13. The track rail 12 forms a track that approaches the pallets 20 at the end of the upstream conveying mechanism 81. The track rail 12 forms a track that moves away from the pallets 20 just before the start of the downstream conveying mechanism 82. This allows the conveying mechanism 10 to receive and convey the pallets 20 conveyed by the upstream conveying mechanism 81, and then hand over the pallets 20 conveyed by the conveying mechanism 10 to the downstream conveying mechanism 82.

[0024] 3, the track rails 12 are provided on the left and right sides of the support member 11. The track rails 12 are fixed to the device body 2.

[0025] As shown in Fig. 1, the drive sprocket 14 is provided at one end (here, the downstream end) in the conveying direction of the circulation path 13. The drive sprocket 14 is driven to rotate by an electric motor 31, which will be described later. As the drive sprocket 14 rotates, the multiple support members 11, which are connected in an annular shape, move along the track rail 12.

[0026] The driven sprocket 15 is provided at the other end (here, the upstream end) in the conveying direction of the circulation path 13. The driven sprocket 15 rotates as the rotation of the drive sprocket 14 is transmitted via a plurality of support members 11 connected in an annular shape.

[0027] As shown in FIG. 1, a plurality of pallets 20 are provided so as to be movable in a tangential direction of the circulation path 13. The pallets 20 move from left to right in FIG. 1. That is, the left side of FIG. 1 is the upstream side in the conveying direction of the pallets 20, and the right side of FIG. 1 is the downstream side in the conveying direction of the pallets 20. The pallets 20 are guided from an upstream conveying mechanism 81 onto a track that follows the circulation path 13. The pallets 20 are guided from the track that follows the circulation path 13 to a downstream conveying mechanism 82.

[0028] In this way, the support members 11 that travel along the endless circulation path 13 support the pallets 20 that are provided in multiple positions so as to be movable in the tangential direction of the circulation path 13. Therefore, the support members 11 support the pallets 20 that are supplied from the tangential direction of the circulation path 13 only in a partial section of the circulation path 13, and while the support members 11 are supporting the pallets 20, the conveying pitch between the support members 11 can be changed, allowing continuous processing such as coating and surface treatment to be performed.

[0029] The transfer pitch between the support members 11 is the distance between adjacent support members 11 in the transfer direction. The transfer pitch between the support members 11 is the same as the transfer pitch of the pallet 20 and the transfer pitch between the workpieces W.

[0030] The pallets 20 are each supported by a support member 11 and support the workpiece W. That is, the support member 11 supports the workpiece W via the pallets 20. The pallets 20 transport the workpiece W while adsorbing it using negative pressure supplied from the support member 11. This prevents the workpiece W from deviating from its trajectory, allowing stable processing such as coating and surface treatment. The pallets 20 are guided by pallet guide rails 25 (see FIG. 3).

[0031] The pallet 20 is formed to have approximately the same size as the workpiece W in the front-rear and left-right directions.

[0032] As shown in FIG. 3, the pallet 20 has a first roller 21, a second roller 22, a third roller 23, and a positioning hole 24.

[0033] The first rollers 21 are arranged with their rotation axes facing in the left-right direction, and run on the upper surface of the pallet guide rails 25. A plurality of first rollers 21 are provided at intervals in the conveying direction of one pallet 20 (not shown). The first rollers 21 are provided on the left and right sides of the pallet 20, respectively.

[0034] The second rollers 22 are arranged with their rotation axes facing the left-right direction, and run on the underside of the pallet guide rails 25. A plurality of second rollers 22 are provided at intervals in the conveying direction of one pallet 20 (not shown). The second rollers 18 are provided on the left and right sides of the pallet 20, respectively.

[0035] The third rollers 23 are arranged with their rotation axes facing in the vertical direction, and run on the inner surfaces of a pair of pallet guide rails 25 facing each other in the left-right direction. A plurality of third rollers 23 (not shown) are provided at intervals in the conveying direction of one pallet 20. The third rollers 23 are provided on the left and right sides of the pallet 20, respectively.

[0036] In this way, by providing the first roller 21, the second roller 22, and the third roller 23, the pallet 20 is supported by the pallet guide rail 25 at a position on the track rail 12 along the conveyance path of the pallet 20.

[0037] The positioning holes 24 are formed in a concave shape on the lower surface of the pallet 20. The positioning pins 19 are inserted into the positioning holes 24. The positioning holes 24 are formed in substantially the same shape as the positioning pins 19.

[0038] The pallet guide rails 25 are provided at both ends of the width direction of the pallet 20. The pallet guide rails 25 are provided linearly across a position where the pallet is transported by the upstream transport mechanism 81, a position where the pallet is supported and transported by the support members 11, and a position where the pallet is transported by the downstream transport mechanism 82. The pallet guide rails 25 guide the multiple pallets 20 to move linearly.

[0039] 1, the drive mechanism 30 moves the support member 11 along the circulation path 13. The drive mechanism 30 has an electric motor 31.

[0040] The electric motor 31 rotates the drive sprocket 14. The electric motor 31 may also rotate the driven sprocket 15, or may rotate both the drive sprocket 14 and the driven sprocket 15. In other words, the electric motor 31 rotates at least one of the drive sprocket 14 and the driven sprocket 15.

[0041] The pitch adjustment mechanism 40 adjusts the conveying pitch between adjacent support members 11. The pitch adjustment mechanism 40 has a pitch setting rail 41 and a link mechanism 50.

[0042] The pitch setting rail 41 is provided along the track rail 12. The distance between the pitch setting rail 41 and the track rail 12 varies. The pitch setting rail 41 has a pair of first rail portions 41a and a plurality (four in this example) of second rail portions 41b.

[0043] The first rail portion 41a has a varying distance from the track rail 12. The first rail portion 41a is provided at an incline such that the distance from the track rail 12 increases as the first rail portion 41a moves away from the second rail portion 41b.

[0044] The second rail portion 41b maintains a state in which the distance from the track rail 12 is smaller than that of the first rail portion 41a. The second rail portion 41b is provided between the pair of first rail portions 41a in the conveying direction.

[0045] Specifically, the first rail portion 41a, which is disposed upstream of the second rail portion 41b, has a distance from the track rail 12 that is substantially the same as that of the second rail portion 41b at a position adjacent to the second rail portion 41b. The distance from the first rail portion 41a to the track rail 12 gradually increases as the first rail portion 41a moves away from the second rail portion 41b toward the upstream side. On the other hand, the first rail portion 41a, which is disposed downstream of the second rail portion 41b, has a distance from the track rail 12 that is substantially the same as that of the second rail portion 41b at a position adjacent to the second rail portion 41b. The distance from the first rail portion 41a to the track rail 12 gradually increases as the first rail portion 41a moves away from the second rail portion 41b toward the downstream side.

[0046] The conveying pitch of the support member 11 gradually decreases as the support member 11 moves along the upstream first rail portion 41a due to the inclination of the first rail portion 41a. The conveying pitch of the support member 11 does not change as the support member 11 moves along the second rail portion 41b. The conveying pitch of the support member 11 gradually increases as the support member 11 moves along the downstream first rail portion 41a due to the inclination of the first rail portion 41a.

[0047] That is, the conveying pitch of the support member 11 becomes smaller when the support member 11 moves from a position along one of the first rail portions 41a to a position along the second rail portion 41b, and becomes larger when the support member 11 moves from a position along the second rail portion 41b to a position along the other first rail portion 41a.

[0048] As a result, when the support members 11 move along the upstream first rail portion 41a, the conveying pitch can be gradually reduced, and when the support members 11 move along the downstream first rail portion 41a, the conveying pitch can be gradually increased. Therefore, the conveying pitch of the support members 11 can be changed smoothly.

[0049] The conveying pitch of the support member 11 will be explained in detail later when explaining the link mechanism 50.

[0050] As shown in FIG. 2, a reference distance between the first rail portion 41a and the second rail portion 41b and the track rail 12 is set by a position adjustment shaft 43.

[0051] The position adjustment shaft 43 is provided perpendicular to the fixed plate 3 attached to the device body 2. The position adjustment shaft 43 is a screw shaft that screws into the fixed plate 3. The position adjustment shaft 43 adjusts the positions of the first rail portion 41a and the second rail portion 41b relative to the fixed plate 3 depending on the screw engagement position of the position adjustment shaft 43 relative to the fixed plate 3.

[0052] The link mechanism 50 is provided on the support member 11 and operates in conjunction with the pitch setting rail 41. The link mechanism 50 makes the conveying pitch smaller when the support member 11 moves along the second rail portion 41b than when the support member 11 moves along the first rail portion 41a. The link mechanism 50 has a connecting member 51 and a link member 52.

[0053] The connecting member 51 connects adjacent support members 11 via link members 52. Specifically, one end of the connecting member 51 is rotatably connected to a support shaft 18a that supports the second roller 18 of the support member 11. The connecting member 51 is disposed between a pair of link members 52 provided in the left-right direction (see FIG. 3). The other end of the connecting member 51 is rotatably connected to a connecting shaft 54 ​​of the link member 52, which will be described later.

[0054] The angle of the connecting member 51 changes in accordance with changes in the conveying pitch between the support members 11. When the conveying pitch between the support members 11 is at its maximum, the connecting member 51 is pulled by the front support member 11 via the link member 52, thereby maintaining a substantially horizontal state. When the conveying pitch between the support members 11 becomes smaller, the connecting shaft 54 ​​moves upward as the link member 52 rotates, causing the other end of the connecting member 51 to move upward, increasing the angle.

[0055] The link member 52 connects the support member 11 and the other end of the connecting member 51. The link member 52 is provided between the left and right branched portions of the U-shaped lower end of the support member 11 (see FIG. 3). The link member 52 has a contact roller 53 and a connecting shaft 54. The link member 52 has a portion that abuts against the pitch setting rail 41. Specifically, the contact roller 53 of the link member 52 abuts against the pitch setting rail 41.

[0056] The link member 52 is formed in the shape of a substantially triangular plate. A pair of link members 52 are provided in the left-right direction. A support shaft 18a, a contact roller 53, and a connecting shaft 54 ​​are provided at each vertex of the triangle of the link member 52. The link member 52 rotates when pressed toward the support member 11 from the first rail portion 41a via the contact roller 53.

[0057] As shown in Fig. 3, the contact roller 53 is provided between a pair of link members 52. The pair of contact rollers 53 are provided side by side in the left-right direction. As shown in Fig. 2, when the support member 11 moves along the pitch setting rails 41, the contact roller 53 comes into contact with the pitch setting rails 41 and runs on the pitch setting rails 41. The contact roller 53 is pressed by the pitch setting rails 41 to rotate the link members 52.

[0058] The connecting shaft 54 ​​rotatably supports the other end of the connecting member 51. The connecting shaft 54 ​​rotatably connects the connecting member 51 and the link member 52 together.

[0059] The link member 52 changes the angle of the connecting member 51 so as to reduce the conveying pitch between the support members 11 when the support members 11 move along the first rail portion 41a. The link member 52 maintains the angle of the connecting member 51 so as to maintain the conveying pitch by being pressed by the second rail portion 41b toward the support members 11.

[0060] Specifically, when the conveying pitch between the support members 11 is at its maximum, the link member 52 is pulled by the front support member 11 and also pulls the rear support member 11 via the connecting member 51, thereby maintaining the support shaft 18a and the connecting shaft 54 ​​in a substantially horizontal state. When the contact roller 53 abuts against the upstream first rail portion 41a, the contact roller 53 moves upward as the first rail portion 41a inclines, causing the link member 52 to rotate about the support shaft 18a. When the conveying pitch between the support members 11 decreases, the connecting shaft 54 ​​moves upward as the link member 52 rotates, causing the other end to move upward and increasing the angle.

[0061] In this way, a pitch setting rail 41 is provided which has a first rail portion 41a whose distance from the track rail 12 changes and a second rail portion 41b whose distance from the track rail 12 remains smaller than that of the first rail portion 41a, and in conjunction with the pitch setting rail 41, the conveying pitch between adjacent support members 11 becomes smaller when the support members 11 move along the first rail portion 41a. Therefore, by providing the pitch setting rail 41, the conveying pitch between the support members 11 is changed, and so the conveying pitch can be changed while the workpiece W is being conveyed.

[0062] This makes it possible to transport workpieces W that are intermittently placed on the transport path by reducing the distance between adjacent workpieces W and arranging the workpieces W continuously in the transport direction, thereby enabling continuous processing such as coating and surface treatment.

[0063] Furthermore, when the connecting member 51 having the contact roller 53 that contacts the pitch setting rail 41 is pressed by the first rail portion 41a and rotates, the angle of the connecting member 51 changes so that the conveying pitch of the support member 11 becomes smaller. Therefore, by providing the link mechanism 50, the conveying pitch can be changed while the workpiece W is being conveyed.

[0064] 1, the upstream conveying mechanism 81 moves the pallet 20 linearly along the conveying direction of the workpiece W. The pallet 20 conveyed by the upstream conveying mechanism 81 is delivered to the support member 11 at the end of the upstream conveying mechanism 81. The upstream conveying mechanism 81 is configured by, for example, a linear motor.

[0065] The downstream conveying mechanism 82 moves the pallet 20 linearly along the conveying direction of the workpiece W. The pallet 20 conveyed by the support member 11 is handed over to the downstream conveying mechanism 82 at the starting end of the downstream conveying mechanism 82. The downstream conveying mechanism 82 is configured by, for example, a linear motor.

[0066] The upstream conveying mechanism 81 and the downstream conveying mechanism 82 may be a single continuous conveying mechanism. In this case, while the support member 11 is supporting the pallet 20, the conveying force of the single conveying mechanism is weakened so that the pallet 20 is conveyed by the conveying mechanism 10.

[0067] Next, the vacuum pressure supply mechanism 100 applied to the transfer device 1 will be described with reference to Fig. 4 to Fig. 6. Fig. 4 is a diagram illustrating the configuration of the vacuum pressure supply mechanism 100. Fig. 5 is a diagram illustrating the supply of vacuum pressure to the vacuum pressure chamber 110 of the support member 11 by the vacuum pressure supply mechanism 100. Fig. 6 is a perspective view showing an example of the configuration of the pallet 20.

[0068] As shown in FIG. 4, the vacuum pressure supply mechanism 100 supplies a vacuum pressure lower than atmospheric pressure. The vacuum pressure supply mechanism 100 is provided on the driven sprocket 15. A plurality of vacuum pressure supply mechanisms 100 are provided at equal angular intervals around the circumference of the driven sprocket 15. The interval between adjacent vacuum pressure supply mechanisms 100 is the same as the interval between the support members 11 located on the outer periphery of the driven sprocket 15. The plurality of vacuum pressure supply mechanisms 100 are arranged radially from the center of the driven sprocket 15 to the outer periphery. The vacuum pressure supply mechanisms 100 rotate together with the driven sprocket 15, and supply vacuum pressure to a vacuum pressure chamber 110 (described later) of the support member 11 that has moved to the outer periphery of the driven sprocket 15.

[0069] As a result, the support member 11 moves around the outer periphery of the driven sprocket 15 and supports the pallet 20 immediately after the vacuum pressure chamber 110 is connected to the vacuum pressure supply mechanism 100 and depressurized. Therefore, since the transport of the workpiece W begins when the pressure in the vacuum pressure chamber 110 is low, the workpiece W can be transported while being stably adsorbed and fixed.

[0070] The vacuum pressure supply mechanism 100 may be provided on the drive sprocket 14, or may be provided on both the drive sprocket 14 and the driven sprocket 15. That is, the vacuum pressure supply mechanism 100 is provided on at least one of the drive sprocket 14 and the driven sprocket 15.

[0071] In this way, the vacuum pressure supply mechanism 100 is provided on at least one of the drive sprocket 14 and the driven sprocket 15, so that when the support member 11 moves along the endless circulation path 13, it communicates with the vacuum pressure supply mechanism 100 once per revolution to reduce the pressure inside the vacuum pressure chamber 110. Therefore, the pressure inside the vacuum pressure chamber 110 of the support member 11 is periodically reduced, so that the workpiece W can be transported while being stably attracted and fixed.

[0072] The vacuum pressure supply mechanism 100 supplies vacuum pressure generated by a vacuum pressure generation source 150. Specifically, the vacuum pressure supply mechanism 100 supplies vacuum pressure to a communication hole 26a (see FIG. 6), which will be described later, of the pallet 20 via a vacuum pressure chamber 110 (see FIG. 5) of the support member 11, thereby adsorbing and supporting the workpiece W on the pallet 20. The vacuum pressure supply mechanism 100 has a first communication passage 101 and a first valve mechanism 102.

[0073] As shown in Figure 5, the first communication passage 101 is provided along the radial direction of the driven sprocket 15. The first communication passage 101 communicates with the vacuum pressure generation source 150 via a pipe 153 drawn from the center of the driven sprocket 15. The first communication passage 101 opens toward the outer periphery of the driven sprocket 15, and communicates with the second communication passage 121 when the support member 11 moves toward the outer periphery of the driven sprocket 15. In other words, the first communication passage 101 communicates between the vacuum pressure generation source 150 and the vacuum pressure chamber 110 of the support member 11.

[0074] The first valve mechanism 102 is provided in the first communication passage 101. The first valve mechanism 102 is in an open state only when the support member 11 is positioned on the outer periphery of the driven sprocket 15. Details of the first valve mechanism 102 will be described later with reference to FIG. 7. The first valve mechanism 102 has a first pushing member 103.

[0075] The first pushing member 103 is pushed by the support member 11 located on the outer periphery of the driven sprocket 15 to open the first valve mechanism 102. That is, when the first pushing member 103 is pushed into the first valve mechanism 102, it changes the first communication passage 101 from a closed state to an open state. The first pushing member 103 is provided inside the vacuum pressure supply mechanism 100.

[0076] The support member 11 has a vacuum pressure chamber 110, a second communication passage 121, a second valve mechanism 122, a third communication passage 131, and a third valve mechanism 132.

[0077] The vacuum pressure chamber 110 is defined within the support member 11. The vacuum pressure chamber 110 is connected to the vacuum pressure chamber 110 of another adjacent support member 11 via a connecting pipe 140. When the vacuum pressure chamber 110 is connected to the vacuum pressure supply mechanism 100, the vacuum pressure chamber 110 is connected to a vacuum pressure generation source 150 and is depressurized.

[0078] The second communication passage 121 is provided inside the support member 11 along the height direction of the support member 11. The second communication passage 121 communicates with the vacuum pressure chamber 110. The second communication passage 121 opens to the surface of the support member 11 facing the driven sprocket 15, and communicates with the first communication passage 101 when the support member 11 moves to the outer periphery of the driven sprocket 15. In other words, the second communication passage 121 communicates between the vacuum pressure chamber 110 and the first communication passage 101.

[0079] The second valve mechanism 122 is provided in the second communication passage 121. The second valve mechanism 122 is in an open state only when the support member 11 is positioned on the outer periphery of the driven sprocket 15. The second valve mechanism 122 will be described in detail later with reference to Figure 7. The second valve mechanism 122 has a second pushing member 123.

[0080] When the support member 11 is positioned on the outer periphery of the driven sprocket 15, the second pushing member 123 is pushed by the driven sprocket 15 to open the second valve mechanism 122. That is, when the second pushing member 123 is pushed into the second valve mechanism 122, it changes the second communication passage 121 from a closed state to an open state. The second pushing member 123 is provided so as to protrude from the tip of the vacuum pressure supply mechanism 100 (the outer periphery of the driven sprocket 15). Alternatively, the second pushing member 123 may be provided integrally with the second valve mechanism 122 on the support member 11 side.

[0081] The third communication passage 131 is provided inside the support member 11 along the height direction of the support member 11. The third communication passage 131 communicates with the vacuum pressure chamber 110. The third communication passage 131 opens to the surface of the support member 11 facing the pallet 20, and communicates with the communication hole 26a of the pallet 20 when the support member 11 supports the pallet 20. In other words, the third communication passage 131 communicates between the vacuum pressure chamber 110 and the communication hole 26a.

[0082] The third valve mechanism 132 is provided in the third communication passage 131. The third valve mechanism 132 is opened only when the support member 11 supports the pallet 20. The third valve mechanism 132 will be described in detail later with reference to FIG. 7. The third valve mechanism 132 has a third pushing member 133.

[0083] When the support member 11 supports the pallet 20, the third pushing member 133 is pushed by the pallet 20 to open the third valve mechanism 132. That is, when the third pushing member 133 is pushed into the third valve mechanism 132, it changes the third communication passage 131 from a closed state to an open state. The third pushing member 133 is provided to protrude from the underside of the pallet 20. Alternatively, the third pushing member 133 may be provided integrally with the third valve mechanism 132 on the support member 11 side.

[0084] When supported by the support member 11, the pallet 20 transports the workpiece W while adsorbing it by the vacuum pressure supplied from the vacuum pressure chamber 110 of the support member 11. Therefore, the workpiece W can be transported while being fixed by the vacuum pressure supplied from the vacuum pressure chamber 110 of the support member 11 through the pallet 20.

[0085] As shown in FIG. 6, the pallet 20 has a block portion 26, a case portion 27, and a through hole .

[0086] The block portion 26 is formed in a substantially rectangular parallelepiped shape. The block portion 26 has a plurality of communication holes 26a that communicate at least in the vertical direction. The block portion 26 is formed of a porous material having the communication holes 26a. Alternatively, the block portion 26 may have a plurality of communication holes that communicate linearly in the vertical direction.

[0087] The communication holes 26a transmit vacuum pressure to the support surface 20a that supports the workpiece W. The communication holes 26a are arranged so as to open to the entire surface of the support surface 20a of the block portion 26.

[0088] The case 27 is made of a metal plate and closes the bottom and side surfaces of the block 26. This prevents the degree of vacuum inside the block 26 from decreasing due to outside air being drawn in through the bottom and side surfaces of the block 26, which are made of a porous material.

[0089] The through-hole 28 is formed to penetrate the bottom surface of the case portion 27 in the height direction. The through-hole 28 is provided singly at approximately the center of the bottom surface of the case portion 27. The through-hole 28 connects the block portion 26 and the vacuum pressure chamber 110.

[0090] As described above, the pallet 20 has the block portion 26 formed of a porous material having the communication holes 26a and communicating with the vacuum pressure chamber 110. Therefore, the vacuum pressure supplied from the vacuum pressure chamber 110 can be distributed over the entire support surface 20a of the pallet 20.

[0091] 4, the connecting pipe 140 connects the vacuum pressure chambers 110 of adjacent support members 11. The connecting pipe 140 sequentially connects the vacuum pressure chambers 110 of all support members 11 arranged in a ring shape along the circulation path 13 to form a vacuum pressure tank 141.

[0092] In this way, the vacuum pressure chambers 110 of all the support members 11 arranged in a ring are connected in sequence to form the vacuum pressure tank 141. Therefore, even if a support member 11 moves to a position away from the vacuum pressure supply mechanism 100, the pressure inside the vacuum pressure chamber 110 of that support member 11 remains the same as the pressure inside the vacuum pressure chamber 110 of the support member 11 connected to the vacuum pressure supply mechanism 100. This makes it possible to maintain negative pressure inside the vacuum pressure chambers 110 of all the support members 11. Therefore, the workpiece W can be transported while being stably adsorbed and fixed.

[0093] The vacuum pressure generation source 150 has a compressor 151, a vacuum generator 152, and piping 153. The compressor 151 is driven by an electric motor (not shown) and compresses air drawn in from the atmosphere. The vacuum generator 152 generates vacuum pressure using the air compressed by the compressor 151. The vacuum generator 152 is connected to each vacuum pressure supply mechanism 100 via piping 153.

[0094] Next, an example of the configuration of the first valve mechanism 102, the second valve mechanism 122, and the third valve mechanism 132 will be described with reference to Fig. 7. Fig. 7 is a cross-sectional view showing an example of the configuration of the first valve mechanism 102, the second valve mechanism 122, and the third valve mechanism 132. Since the first valve mechanism 102, the second valve mechanism 122, and the third valve mechanism 132 have the same configuration, only the first valve mechanism 102 will be described below.

[0095] As shown in FIG. 7, the first valve mechanism 102 has a main body 201, a valve 202, a sphere support member 205, a spring 206 as a biasing member, and a pressing member 207.

[0096] The main body 201 defines a first chamber 201a on one side and a second chamber 201b on the other side, with the valve 202 sandwiched therebetween.

[0097] When the valve 202 is in an open state, it connects the first chamber 201 a and the second chamber 201 b. When the valve 202 is in a closed state, it blocks communication between the first chamber 201 a and the second chamber 201 b. The valve 202 has a seat 203 and a spherical body 204.

[0098] The seating portion 203 is formed so as to seat the sphere 204. The seating portion 203 is formed to have a diameter smaller than the diameter of the sphere 204.

[0099] When the sphere 204 is seated on the seating portion 203, the sphere 204 is in line contact with the seating portion 203 in an annular shape, and no gap is formed between the sphere 204 and the seating portion 203. The sphere 204 is biased toward the seating portion 203 by a spring 206 via a sphere support member 205.

[0100] The sphere support member 205 is formed in a substantially cylindrical shape. One end of the sphere support member 205 supports the sphere 204. The sphere support member 205 is biased by a spring 206 provided on the outer periphery. The sphere support member 205 biases the sphere 204 against the seating portion 203 by the biasing force of the spring 206.

[0101] The spring 206 is housed in a compressed state inside the main body 201. The set load of the spring 206 is set so that the valve 202 will not be in an open state unless it is pressed by the pressing member 207, even if the pressure in the other-side chamber 201b is reduced to a vacuum pressure.

[0102] One end of the pressing member 207 abuts against the first pushing member 103, and the other end abuts against the sphere 204. When the first pushing member 103 is pushed in, the pressing member 207 presses against the sphere 204, switching the valve 202 from a closed state to an open state. This allows the one side chamber 201a and the other side chamber 201b to communicate with each other. In other words, the pressing member 207 switches the one side chamber 201a and the other side chamber 201b between a communication state and a blocked state.

[0103] The configuration of the first valve mechanism 102 has been described above, but this configuration is merely an example and the present invention is not limited to this specific configuration.

[0104] Next, the operation of the transport device 1 will be described.

[0105] As shown in Fig. 4, when the support member 11 approaches the outer periphery of the driven sprocket 15, the support member 11 is positioned on the outer periphery of the vacuum pressure supply mechanism 100. As a result, as shown in Fig. 5, the first pushing member 103 provided inside the vacuum pressure supply mechanism 100 pushes in the sphere 204 of the first valve mechanism 102 against the biasing force of the spring 206, thereby opening the first valve mechanism 102. Furthermore, the second pushing member 123 provided to protrude from the tip of the vacuum pressure supply mechanism 100 pushes in the sphere 204 of the second valve mechanism 122 against the biasing force of the spring 206, thereby opening the second valve mechanism 122. Therefore, the first communication passage 101 and the second communication passage 121 are opened, and the vacuum pressure supply mechanism 100 and the vacuum pressure chamber 110 are connected to each other.

[0106] As shown in FIG. 4, the vacuum pressure supply mechanism 100 rotates together with the driven sprocket 15 over approximately half a circumference, and supplies vacuum pressure to the vacuum pressure chamber 110 of the support member 11 that has moved to the outer periphery of the driven sprocket 15.

[0107] In this way, the vacuum pressure supply mechanism 100 rotates together with the driven sprocket 15. Therefore, the vacuum pressure chamber 110 of the support member 11 that has moved to the outer periphery of the driven sprocket 15 is always in communication with the vacuum pressure supply mechanism 100 while the support member 11 is positioned on the outer periphery of the driven sprocket 15. This makes it possible to lengthen the time it takes to reduce the pressure inside the vacuum pressure chamber 110. Furthermore, since multiple support members 11 are positioned on the outer periphery of the driven sprocket 15 and multiple (seven in FIG. 4 ) vacuum pressure chambers 110 are always in communication with the vacuum pressure supply mechanism 100, the degree of vacuum inside the vacuum pressure tank 141 formed by the connecting pipe 140 can be maintained.

[0108] At this time, the support member 11 does not support the pallet 20, so the third valve mechanism 132 remains closed.

[0109] When the support member 11 moves away from the driven sprocket 15, the support member 11 moves away from the outer periphery of the vacuum pressure supply mechanism 100. As a result, as shown in FIG. 5 , the first pushing member 103 moves out of the first valve mechanism 102, the ball 204 is pressed by the biasing force of the spring 206 and seats on the seating portion 203, and the first valve mechanism 102 is closed. The second pushing member 123 moves out of the second valve mechanism 122, and the ball 204 is pressed by the biasing force of the spring 206 and seats on the seating portion 203, and the second valve mechanism 122 is closed. At this time, the third valve mechanism 132 remains closed. Thus, the first valve mechanism 102, the second valve mechanism 122, and the third valve mechanism 132 are all closed. Therefore, the vacuum pressure chamber 110 is blocked from communication with atmospheric pressure by the second valve mechanism 122 and the third valve mechanism 132. Furthermore, the vacuum pressure chamber 110 is connected to the vacuum pressure chamber 110 of the support member 11 located on the outer periphery of the driven sprocket 15 by the connecting pipe 140, so that the degree of vacuum is maintained.

[0110] Next, when the support member 11 supports the pallet 20, the third pushing member 133 provided to protrude from the underside of the pallet 20 pushes the sphere 204 of the third valve mechanism 132 against the biasing force of the spring 206, thereby opening the third valve mechanism 132. This opens the third communication passage 131. Therefore, the vacuum pressure chamber 110 and the communication hole 26a of the pallet 20 communicate with each other, and the pallet 20 adsorbs the workpiece W by vacuum pressure supplied from the vacuum pressure chamber 110.

[0111] In this way, the conveying device 1 that conveys the workpiece W in the conveying direction has a plurality of pallets 20 arranged along the conveying direction to support the workpiece W, a plurality of support members 11 arranged to support each of the pallets 20, and track rails 12 that set the track of the support members 11.The conveying device 10 also has a conveying mechanism 10 that conveys the pallets 20 along the conveying direction, and a vacuum pressure supply mechanism 100 that supplies a vacuum pressure lower than atmospheric pressure.The support member 11 has a vacuum pressure chamber 110 that is depressurized when connected to the vacuum pressure supply mechanism 100, and when the pallet 20 is supported by the support member 11, it conveys the workpiece W while adsorbing it using the vacuum pressure supplied from the vacuum pressure chamber 110.

[0112] As a result, the pallets 20, which are provided in plurality along the conveying direction and support the workpieces W, are conveyed along the track rail 12 while being supported by the support members 11. Furthermore, when supported by the support members 11, the pallets 20 convey the workpieces W while adsorbing them by the vacuum pressure supplied from the vacuum pressure chamber 110 of the support members 11. Therefore, the workpieces W can be conveyed while being fixed by the vacuum pressure supplied from the vacuum pressure chamber 110 of the support members 11 through the pallets 20.

[0113] At this time, since the support member 11 is not positioned on the outer periphery of the driven sprocket 15, the first valve mechanism 102 and the second valve mechanism 122 remain in the closed state.

[0114] Subsequently, when the support member 11 moves away from the pallet 20, the third pushing member 133 comes out of the third valve mechanism 132, the sphere 204 is pressed by the biasing force of the spring 206 and seats on the seating portion 203, and the third valve mechanism 132 enters a closed state. At this time, the second valve mechanism 122 remains closed. In this manner, the second valve mechanism 122 and the third valve mechanism 132 enter a closed state. Therefore, the second valve mechanism 122 and the third valve mechanism 132 block communication between the vacuum pressure chamber 110 and atmospheric pressure. In addition, the vacuum pressure chamber 110 is connected to the vacuum pressure chamber 110 of the support member 11 located on the outer periphery of the driven sprocket 15 by the connecting pipe 140, so that the degree of vacuum is maintained.

[0115] The effects of this embodiment will be summarized below.

[0116] The conveying device 1 that conveys the workpiece W in the conveying direction has a plurality of pallets 20 arranged along the conveying direction to support the workpiece W, a plurality of support members 11 arranged to support each of the pallets 20, and track rails 12 that set the track of the support members 11.The conveying device 1 is also equipped with a conveying mechanism 10 that conveys the pallets 20 along the conveying direction, and a vacuum pressure supply mechanism 100 that supplies a vacuum pressure lower than atmospheric pressure.The support member 11 has a vacuum pressure chamber 110 that is depressurized when connected to the vacuum pressure supply mechanism 100, and when the pallet 20 is supported by the support member 11, it conveys the workpiece W while adsorbing it using the vacuum pressure supplied from the vacuum pressure chamber 110.

[0117] In addition, in a transport method for transporting the workpiece W in the transport direction, pallets 20, which are provided in multiple locations along the transport direction and support the workpiece W, are transported along the track rail 12 while being supported by support members 11, and when the pallets 20 are supported by the support members 11, the pallets 20 adsorb the workpiece W and transport it by using the vacuum pressure supplied from the vacuum pressure chamber 110 of the support members 11.

[0118] In addition, the track rail 12 defines an endless circulation path 13, and the pallet 20 is arranged to be movable in a tangential direction of the circulation path 13, and further includes a drive mechanism 30 that causes the support member 11 to travel along the circulation path 13.

[0119] In these configurations, a plurality of pallets 20 are provided along the conveying direction and support the workpieces W, and are conveyed along the track rail 12 while being supported by the support members 11. When supported by the support members 11, the pallets 20 convey the workpieces W while adsorbing them by the vacuum pressure supplied from the vacuum pressure chamber 110 of the support members 11. Therefore, the workpieces W can be conveyed while being fixed by the vacuum pressure supplied from the vacuum pressure chamber 110 of the support members 11 through the pallets 20.

[0120] The transfer device 1 further includes a connecting pipe 140 that connects the vacuum pressure chambers 110 of adjacent support members 11. The connecting pipe 140 sequentially connects the vacuum pressure chambers 110 of all support members 11 that are arranged in a ring shape along the circulation path 13 to form a vacuum pressure tank 141.

[0121] According to this configuration, the vacuum pressure chambers 110 of all the support members 11 arranged in a ring are connected in sequence to form the vacuum pressure tank 141. Therefore, even if a support member 11 moves to a position away from the vacuum pressure supply mechanism 100, the pressure inside the vacuum pressure chamber 110 of that support member 11 remains the same as the pressure inside the vacuum pressure chamber 110 of the support member 11 connected to the vacuum pressure supply mechanism 100. This makes it possible to maintain negative pressure inside the vacuum pressure chambers 110 of all the support members 11. Therefore, the workpiece W can be transported while being stably adsorbed and fixed.

[0122] The conveying mechanism 10 has a drive sprocket 14 provided at one end of the circulation path 13 in the conveying direction, and a driven sprocket 15 provided at the other end of the circulation path 13 in the conveying direction, and the vacuum pressure supply mechanism 100 is provided on at least one of the drive sprocket 14 and the driven sprocket 15.

[0123] According to this configuration, the vacuum pressure supply mechanism 100 is provided on at least one of the drive sprocket 14 and the driven sprocket 15, so that when the support member 11 moves along the endless circulation path 13, it communicates with the vacuum pressure supply mechanism 100 once per revolution to reduce the pressure inside the vacuum pressure chamber 110. Therefore, the pressure inside the vacuum pressure chamber 110 of the support member 11 is periodically reduced, so that the workpiece W can be transported while being stably attracted and fixed.

[0124] The drive sprocket 14 is provided at the downstream end of the circulation path 13 in the conveying direction of the pallets 20, the drive mechanism 30 drives and rotates the drive sprocket 14, and the vacuum pressure supply mechanism 100 is provided on the driven sprocket 15.

[0125] According to this configuration, the vacuum pressure supply mechanism 100 is provided on the driven sprocket 15, which is provided at the upstream end in the conveying direction of the pallet 20. Therefore, the support member 11 moves on the outer periphery of the driven sprocket 15, and supports the pallet 20 immediately after the vacuum pressure chamber 110 is communicated with the vacuum pressure supply mechanism 100 and depressurized. Therefore, since conveyance of the workpiece W begins when the pressure in the vacuum pressure chamber 110 is low, the workpiece W can be conveyed while being stably adsorbed and fixed.

[0126] The vacuum pressure supply mechanism 100 rotates together with the driven sprocket 15 and supplies vacuum pressure to the vacuum pressure chamber 110 of the support member 11 that has moved to the outer periphery of the driven sprocket 15 .

[0127] With this configuration, the vacuum pressure supply mechanism 100 rotates together with the driven sprocket 15. Therefore, the vacuum pressure chamber 110 of the support member 11 that has moved to the outer periphery of the driven sprocket 15 is always in communication with the vacuum pressure supply mechanism 100 while the support member 11 is positioned on the outer periphery of the driven sprocket 15. Therefore, the time required to reduce the pressure inside the vacuum pressure chamber 110 can be extended.

[0128] The pallet 20 has communication holes 26a for transmitting vacuum pressure to a support surface 20a that supports the workpiece W. The pallet 20 has a block portion 26 formed of a porous material having the communication holes 26a, a case portion 27 that closes the bottom and side surfaces of the block portion 26, and a through hole 28 that is formed to penetrate the case portion 27 in the height direction and that connects the block portion 26 to the vacuum pressure chamber 110.

[0129] According to this configuration, the pallet 20 has a block portion 26 formed of a porous material having communication holes 26a and communicating with the vacuum pressure chamber 110. Therefore, the vacuum pressure supplied from the vacuum pressure chamber 110 can be spread over the entire support surface 20a of the pallet 20.

[0130] The vacuum pressure supply mechanism 100 has a first communication passage 101 that connects a vacuum pressure generating source 150 that generates vacuum pressure with the vacuum pressure chamber 110 of the support member 11, and a first valve mechanism 102 that is provided in the first communication passage 101 and is open only when the support member 11 is positioned on the outer periphery of the driven sprocket 15. The support member 11 has a second communication passage 121 that connects the vacuum pressure chamber 110 with the first communication passage 101, a second valve mechanism 122 that is provided in the second communication passage 121 and is open only when the support member 11 is positioned on the outer periphery of the driven sprocket 15, a third communication passage 131 that connects the vacuum pressure chamber 110 with the communication hole 26a, and a third valve mechanism 132 that is provided in the third communication passage 131 and is open only when the support member 11 supports the pallet 20. The first valve mechanism 102 has a first pushing member 103 that is pushed by a support member 11 located on the outer periphery of the driven sprocket 15 to open the first communication passage 101, the second valve mechanism 122 has a second pushing member 123 that is pushed by the driven sprocket 15 when the support member 11 is located on the outer periphery of the driven sprocket 15 to open the second communication passage 121, and the third valve mechanism 132 has a third pushing member 133 that is pushed by the pallet 20 when the support member 11 supports the pallet 20 to open the third communication passage 131.

[0131] According to this configuration, when the support member 11 is positioned on the outer periphery of the driven sprocket 15, the first valve mechanism 102 is opened by the first pushing member 103, and the second valve mechanism 122 is opened by the second pushing member 123. Therefore, when the support member 11 is positioned on the outer periphery of the driven sprocket 15, the first communication passage 101 and the second communication passage 121 are opened, allowing communication between the vacuum pressure supply mechanism 100 and the vacuum pressure chamber 110. At this time, the support member 11 is not supporting the pallet 20, so the third valve mechanism 132 remains closed.

[0132] Furthermore, when the support member 11 supports the pallet 20, the third valve mechanism 132 is opened by the third pushing member 133. Therefore, when the support member 11 supports the pallet 20, the third communication passage 131 is opened, connecting the vacuum pressure chamber 110 to the communication hole 26a of the pallet 20, thereby allowing the workpiece W to be sucked. At this time, since the support member 11 is not positioned on the outer periphery of the driven sprocket 15, the first valve mechanism 102 and the second valve mechanism 122 remain closed.

[0133] Although the embodiments of the present invention have been described above, the above embodiments merely illustrate some of the application examples of the present invention, and it is not intended that the technical scope of the present invention be limited to the specific configurations of the above embodiments.

[0134] For example, in the above embodiment, the vacuum pressure chambers 110 of adjacent support members 11 are connected via the connecting pipe 140. However, the vacuum pressure chambers 110 of each support member 11 may be provided independently without providing the connecting pipe 140. In this case, too, the workpiece W can be transported while being fixed by the vacuum pressure supplied from the vacuum pressure chambers 110 of the support members 11 via the pallet 20, as in the above embodiment. [Explanation of symbols]

[0135] 1. Conveyor device 10. Conveying mechanism 11 Support member 12 Track rail 13 Circulation Route 14 Drive sprocket (first sprocket) 15 Driven sprocket (second sprocket) 20 palettes 20a Support surface 26 Block section 26a Communication hole 27 Case part 28 Through Hole 30 Drive mechanism 100 Vacuum pressure supply mechanism 101 1st communication passage 102 First valve mechanism 103 First pushing member 110 Vacuum chamber 121 2nd communication passage 122 Second valve mechanism 123 Second pushing member 131 Third communication passage 132 Third valve mechanism 133 Third pushing member 140 Connecting piping 141 Vacuum pressure tank 150 Vacuum pressure source

Claims

1. A conveying device that conveys a workpiece in a conveying direction, a plurality of pallets provided along the conveying direction to support the workpieces; a conveying mechanism including a plurality of support members each supporting one of the pallets and a track rail defining a track for the support members, the conveying mechanism conveying the pallet along the conveying direction; a vacuum pressure supply mechanism for supplying a vacuum pressure lower than atmospheric pressure; Equipped with the support member has a vacuum pressure chamber that is decompressed when the support member is in communication with the vacuum pressure supply mechanism; When the pallet is supported by the support member, the pallet conveys the workpiece while suctioning it by vacuum pressure supplied from the vacuum pressure chamber. Conveying device.

2. The conveying device according to claim 1 , the track rail defines an endless circulation path; The pallet is provided so as to be movable in a tangential direction of the circulation path, Further, a drive mechanism is provided to move the support member along the circulation path. Conveying device.

3. The conveying device according to claim 2, further comprising a connecting pipe connecting the vacuum pressure chambers of adjacent support members to each other; Conveying device.

4. The conveying device according to claim 3, the connecting pipe sequentially connects the vacuum pressure chambers of all the support members arranged in a circular pattern along the circulation path to form a vacuum pressure tank. Conveying device.

5. 5. The conveying device according to claim 2, The transport mechanism includes: a first sprocket provided at one end of the circulation path in the conveying direction; a second sprocket provided at the other end of the circulation path in the conveying direction; and The vacuum pressure supply mechanism is provided on at least one of the first sprocket and the second sprocket. Conveying device.

6. The conveying device according to claim 5, the first sprocket is provided at a downstream end of the circulation path in the conveying direction of the pallet, the drive mechanism drives and rotates the first sprocket; The vacuum pressure supply mechanism is provided on the second sprocket. Conveying device.

7. 7. The conveying device according to claim 6, the vacuum pressure supply mechanism rotates together with the second sprocket and supplies vacuum pressure to the vacuum pressure chamber of the support member that has moved to the outer periphery of the second sprocket. Conveying device.

8. 8. The conveying device according to claim 7, The pallet has a communication hole for transmitting vacuum pressure to a support surface that supports the workpiece. Conveying device.

9. 9. The conveying device according to claim 8, The pallet is a block portion formed of a porous material having the communicating holes; a case portion that closes the bottom surface and side surfaces of the block portion; a through hole formed to penetrate the case portion in a height direction and to allow the block portion and the vacuum pressure chamber to communicate with each other; having Conveying device.

10. 9. The conveying device according to claim 8, The vacuum pressure supply mechanism includes: a first communication passage that communicates a vacuum pressure generating source that generates a vacuum pressure with the vacuum pressure chamber of the support member; a first valve mechanism provided in the first communication passage and opened only when the support member is positioned on the outer periphery of the second sprocket; and The support member is a second communication passage that communicates the vacuum pressure chamber with the first communication passage; a second valve mechanism provided in the second communication passage and opened only when the support member is positioned on the outer periphery of the second sprocket; a third communication passage that communicates the vacuum pressure chamber with the communication hole; a third valve mechanism that is provided in the third communication passage and opens only when the support member supports the pallet; having Conveying device.

11. 11. The conveying device according to claim 10, the first valve mechanism includes a first pushing member that is pushed by the support member located on the outer periphery of the second sprocket to open the first communication passage, the second valve mechanism has a second pushing member that is pushed by the second sprocket when the support member is positioned on the outer periphery of the second sprocket to open the second communication passage, the third valve mechanism has a third pushing member that is pushed by the pallet when the support member supports the pallet, thereby opening the third communication passage; Conveying device.

12. A conveying method for conveying a workpiece in a conveying direction, comprising: a plurality of pallets for supporting the workpieces are provided along the conveying direction and conveyed along a track rail while being supported by support members; When the pallet is supported by the support member, the pallet adsorbs and transports the workpiece by vacuum pressure supplied from a vacuum pressure chamber of the support member. Transportation method.

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