Dummy bar manufacturing device and dummy bar manufacturing method

The dummy bar manufacturing apparatus and method address alignment and handling challenges of thin dummy bars by maintaining alignment through precise cutting and loading, enhancing productivity and reducing defects in the LD manufacturing process.

JP2025178906APending Publication Date: 2025-12-09MITSUBISHI ELECTRIC CORP
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Patent Information

Application Number
JP2024085780
Authority / Receiving Office
JP · JP
Patent Type
Applications
Current Assignee / Owner
Filing Date
2024-05-27
Publication Date
2025-12-09

AI Technical Summary

Technical Problem

The manufacturing process of LDs faces challenges in handling and aligning thin dummy bars due to their reduced width and thickness, which complicates the end face coating process and leads to adhesion issues, making it difficult to maintain alignment and increase productivity.

Method used

A dummy bar manufacturing apparatus and method involving a lower mold with a tray and suction block, along with a cutting blade, ensures aligned dummy bars are supplied by maintaining their arrangement through precise cutting and loading onto a tray, using a punching process to handle thin dummy bars effectively.

Benefits of technology

The solution maintains alignment from cutting to placement, facilitating easy supply of aligned dummy bars, improving productivity by reducing thickness and increasing the number of LD bars processed, while minimizing defects and adhesion risks.

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Abstract

To provide a dummy bar manufacturing device and a dummy bar manufacturing method capable of easily supplying aligned dummy bars to a bar-setting device.SOLUTION: A dummy bar manufacturing device comprises: a lower die; a tray which is provided on the lower die and in which an opening is formed; a suction block which is provided on the lower die and protrudes upward from the opening and in which a plurality of dummy bars are mounted on an upper surface thereof; and a blade which cuts the plurality of dummy bars mounted on the suction block along an alignment direction of the plurality of dummy bars. The opening has a length in a direction orthogonal to the alignment direction shorter than lengths of the plurality of cut dummy bars, and the plurality of dummy bars on the suction block can be mounted on the tray by moving the tray upward.SELECTED DRAWING: Figure 9
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Description

[Technical Field]

[0001] The present disclosure relates to a dummy bar manufacturing apparatus and a dummy bar manufacturing method. [Background technology]

[0002] Patent Document 1 discloses an apparatus for aligning laser bars and spacers alternately on a thin film processing holder. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-281390 Summary of the Invention [Problem to be solved by the invention]

[0004] In general, in the manufacturing process of LDs (laser diodes), end face coating is performed to form an anti-reflection material on both end faces of the LD in order to amplify the laser power excited within the LD. End face coating is performed, for example, by vapor deposition or sputtering on an LD bar, which is a series of multiple LDs. During this process, the anti-reflection material may get onto the front and back surfaces of the LD bar, causing the LD bars to stick together. To prevent this, dummy bars are generally inserted between the LD bars, as shown in Patent Document 1, for example.

[0005] The process of combining multiple LD bars and multiple dummy bars by aligning the surfaces of the LD bars and dummy bars is called the bar setting process. Dummy bars are formed by etching a SUS sheet material that has been rolled to a thickness of, for example, 0.05 to 0.1 mm into multiple strips. As another manufacturing method, dummy bars can also be manufactured by dicing silicon with a thickness of, for example, 0.1 mm. Multiple dummy bars are generally supplied to the bar setting process in a separated state. Therefore, it is necessary to align the separated multiple dummy bars in a dedicated tray before the bar setting process.

[0006] In recent years, as the cavity length of LDs has been shortened from 0.2-0.3 mm to 0.15 mm or less, there has been a demand to shorten the width of dummy bars as well. Furthermore, there is a growing demand to improve productivity by reducing the thickness of dummy bars to 0.05 mm or less, thereby increasing the number of LD bars that can be batch processed in the coating process. However, it is extremely difficult to handle such tiny dummy bars manually.

[0007] The present disclosure has been made to solve the above-mentioned problems, and aims to provide a dummy bar manufacturing device and a dummy bar manufacturing method that can easily supply aligned dummy bars to a bar setting device. [Means for solving the problem]

[0008] The dummy bar manufacturing apparatus of the present disclosure comprises a lower mold, a tray provided on the lower mold and having an opening formed therein, a suction block provided on the lower mold, protruding upward from the opening, and having a plurality of dummy bars mounted on its upper surface, and a blade that cuts the plurality of dummy bars mounted on the suction block along the alignment direction of the plurality of dummy bars, wherein the length of the opening in a direction perpendicular to the alignment direction is shorter than the length of the plurality of cut dummy bars, and the plurality of dummy bars on the suction block can be mounted on the tray by moving the tray upward.

[0009] The method for manufacturing a dummy bar according to the present disclosure includes forming a frame having a plurality of dummy bars and tie bars connecting the ends of the plurality of dummy bars, mounting the frame on a suction block of a manufacturing apparatus having a tray with an opening formed therein and a suction block protruding upward from the opening, and while the frame is being sucked by the suction block, cutting the tie bars to separate the plurality of dummy bars, moving the tray upward, and mounting the separated plurality of dummy bars on the tray. [Effects of the Invention]

[0010] The dummy bar manufacturing apparatus and dummy bar manufacturing method according to the present disclosure can maintain alignment of the dummy bars from cutting to placing them on a tray, thereby facilitating the supply of aligned dummy bars to the bar setting device. [Brief explanation of the drawings]

[0011] [Figure 1] 4 is a flowchart showing a method for manufacturing a dummy bar according to the first embodiment. [Figure 2] 4 is a flowchart showing an etching process according to the first embodiment. [Figure 3] 1 is a plan view of a SUS sheet according to a first embodiment. [Figure 4] 1 is a plan view showing a SUS block according to the first embodiment. [Figure 5] 1 is a plan view showing a SUS frame according to a first embodiment. [Figure 6] FIG. 2 is a perspective view of a lower part of a cutting die for cutting a SUS block according to the first embodiment. [Figure 7] FIG. 2 is a diagram showing a state in which a stainless steel block is mounted on a lower mold according to the first embodiment. [Figure 8] FIG. 2 is a perspective view of an upper die of a cutting die for cutting a SUS block according to the first embodiment. [Figure 9] FIG. 2 is a perspective view of a lower die of a cutting jig for cutting tie bars according to the first embodiment. [Figure 10]4 is a view showing a state in which a suction block cover is attached to the cutting jig according to the first embodiment. FIG. [Figure 11] FIG. 2 is a perspective view of an upper die of a cutting jig for cutting tie bars according to the first embodiment. [Figure 12] 3 is a diagram illustrating cutting lines of the SUS frame according to the first embodiment. FIG. [Figure 13] FIG. 2 is a plan view of a lower die of the cutting jig according to the first embodiment. [Figure 14] FIG. 2 is a plan view illustrating the structure of a suction block according to the first embodiment. [Figure 15] FIG. 2 is a perspective view illustrating the structure of a suction block according to the first embodiment. [Figure 16] FIG. 2 is a perspective view of a suction block cover according to the first embodiment. [Figure 17] 3 is a cross-sectional view illustrating the structure of a suction block and a suction block cover according to the first embodiment. FIG. [Figure 18] FIG. 2 is a perspective view of a tray according to the first embodiment. [Figure 19] FIG. 2 is a diagram showing a state in which a SUS bar is placed on the tray according to the first embodiment. [Figure 20] 1 is a diagram showing a state in which an LD bar and a SUS bar are mounted on a bar set receiving plate according to the first embodiment. FIG. [Figure 21] FIG. 2 is a diagram showing a bar set state in which LD bars and SUS bars are alternately arranged according to the first embodiment. [Figure 22] FIG. 10 is a perspective view of a suction block and a suction block cover according to a modification of the first embodiment. [Figure 23] FIG. 10 is a plan view of a suction block according to a modified example of the first embodiment. [Figure 24] FIG. 10 is a plan view of a suction block cover according to a modified example of the first embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] A dummy bar manufacturing apparatus and a dummy bar manufacturing method according to the present embodiment will be described with reference to the drawings. The same or corresponding components are designated by the same reference numerals, and repeated description may be omitted.

[0013] Embodiment 1 FIG. 1 is a flowchart showing a method for manufacturing a dummy bar according to the first embodiment. In this embodiment, an example will be described in which the dummy bar is made of SUS (Steel Use Stainless). For this reason, the dummy bar is sometimes called a SUS bar. Note that the material of the dummy bar is not limited to SUS. Since the dummy bar sandwiches both sides of the LD bar, it is preferable that the dummy bar be made of a material that is difficult to bond with Au on the surface of the LD chip. The dummy bar may be made of metal such as Ni or Cr, or may be made of ceramic such as alumina (Al2O3) or aluminum nitride (AlN).

[0014] First, prepare a cold-rolled product, for example, SUS304-HTA 300x340x0.03mm, conforming to JIS G4303 standards (Step 1). Next, mirror-polish both sides of this SUS sheet (Step 2). Next, grooves are created in the mirror-finished SUS sheet by etching (Step 3). This creates multiple SUS frames in the SUS sheet.

[0015] FIG. 2 is a flowchart showing the etching process according to the first embodiment. The etching process will be described in detail with reference to FIG. 2. It is important to control the surface cleanliness of a mirror-finished SUS sheet. For this reason, the surface of the SUS sheet is first degreased and cleaned (step 31). This removes surface contamination before etching. Next, photoresist sheets are laminated on the front and back surfaces of the SUS sheet (step 32).

[0016] Next, exposure is performed (step 33). That is, a photomask is placed over the photoresist and exposed to light. The photomask is a development mask used to process cutting grooves at equal intervals in the SUS sheet. This exposes the photoresist in the unshielded areas, transferring the pattern of the photomask. Next, development is performed (step 34). Here, the photoresist in the unexposed areas is removed with chemicals. Next, etching is performed (step 35). Here, a chemical that dissolves the SUS material is sprayed from the front and back of the SUS sheet to dissolve the areas not masked by the photoresist. Next, the SUS sheet is immersed in a stripping solution to strip the photoresist (step 36). Next, the SUS sheet is washed with pure water and then dried (step 37).

[0017] FIG. 3 is a plan view of the SUS sheet 10 according to the first embodiment. The SUS sheet 10 is shown in a state after etching in step 3. FIG. 4 is a plan view of the SUS block 11 according to the first embodiment. The SUS sheet 10 is, for example, 300 x 340 x 0.03 mm. The SUS sheet 10 is divided into nine SUS blocks 11, each about 100 x 100 mm. The SUS block 11 has 10 areas, 5 areas x 2 rows, with multiple SUS bars 14 processed in each area.

[0018] FIG. 5 is a plan view showing the SUS frame 12 according to the first embodiment. Five areas on either the top or bottom of the SUS block 11 are referred to as the SUS frame 12. In the etching process of step 3, grooves, for example, 0.25 mm wide, are machined at equal intervals in each area, and 90 to 100 SUS bars 14 are formed in each area. Each area of ​​the SUS frame 12 has a plurality of SUS bars 14 and tie bars 13 that connect the ends of the SUS bars 14 to the SUS frame 12. In other words, the SUS frame 12 has a plurality of areas, each having a plurality of SUS bars 14 and tie bars 13, arranged side by side in the direction in which the SUS bars 14 extend.

[0019] After cleaning and drying in step 37, the first cutting process is carried out (step 4). In the first cutting process, the SUS sheet 10 is cut and separated into nine SUS blocks 11. Next, a visual inspection is performed to ensure that the SUS blocks 11 have been processed correctly. After the inspection, the SUS blocks 11 are packed in clean bags and shipped.

[0020] Each SUS block 11 is marked with a block index mark 11a. The block index mark 11a is a position number indicating a location within the SUS sheet 10. The block index mark 11a is formed in the same photomask as the SUS sheet 10 and patterned in the exposure process of step 33. As described above, the manufacturing method of this embodiment may also include a process of marking the SUS frame 12 with an index mark. The block index mark 11a is, for example, a two-digit number ranging from 0* to 9*. In the SUS blocks 11, *=A in the upper row and *=B in the lower row. The block index marks 11a are displayed symmetrically around the center of the SUS block 11, like the numbers on a deck of cards. After separating the SUS blocks 11 along the cutting line L1, if the upright numbers and letters are positioned to the left, the block index marks 11a can be read until all the SUS bars of the SUS frame 12 are cut.

[0021] If a SUS bar in the SUS block 11 is inspected and a defect is detected, the block index mark 11a and area number corresponding to the defective SUS bar are recorded. The area number is the order of the areas when the upright numbers and letters are placed on the left side as viewed, with the right end of the SUS frame 12 as the top. That is, the area numbers are defined in reverse order, with the top row of the SUS frame 12 being numbered 1 to 5 from the right, and the bottom row being numbered 1 to 5 from the left. Furthermore, the location of the defective SUS bar within the area is recorded. Based on this information, the defective SUS bar can be found and removed after the tie bars 13 are cut. In this embodiment, by providing the block index mark 11a, the location information of the defective bar can be shared between the manufacturer and the recipient.

[0022] Positioning holes 15a, 15b, and 15c are formed in the upper, middle, and lower sections of the SUS block 11, respectively. When the SUS block 11 is divided into two sections along the cutting line L1 in the second cutting process described below, the positioning hole 15b in the middle section becomes semicircular. The SUS frames 12 in the upper and lower sections of one SUS block 11 are symmetrical with respect to the cutting line L1, which is the center line of the SUS block 11, and can be treated as the same SUS frame. The provision of positioning holes 15a, 15b, and 15c also makes it easy to position the SUS frame 12 relative to the cutting jig 30 described below.

[0023] Next, a description will be given of the second cutting step in step 5. In the second cutting step, the SUS block 11 is cut and separated into a plurality of SUS frames 12, thereby forming the SUS frames 12. The SUS block 11 is cut along cutting lines L1.

[0024] Fig. 6 is a perspective view of a lower die 21 of a cutting die that cuts the SUS block 11 according to embodiment 1. Fig. 7 is a view showing a state in which the SUS block 11 is mounted on the lower die 21 according to embodiment 1. Fig. 8 is a perspective view of an upper die 25 of a cutting die that cuts the SUS block 11 according to embodiment 1. The cutting die that cuts the SUS block 11 is made up of the lower die 21 and the upper die 25.

[0025] The lower mold 21 has a groove formed in its center corresponding to the cutting line L1 of the SUS block 11, into which the aluminum lower plate 22 is placed. The lower mold 21 also has a positioning hole 23 and a positioning pin 24. The surface of the upper mold 25 facing the lower mold 21 has an engraving blade 26 formed thereon for cutting the SUS block 11 along the cutting line L1. The engraving blade 26 is made of, for example, high-speed steel, and is hardened and then coated with DLC (Diamond-Like Carbon). A soft resin material 27 is provided on both sides of the engraving blade 26. The upper mold 25 also has a positioning pin 28 formed thereon.

[0026] When cutting the SUS block 11, first, the aluminum lower plate 22 is placed in the groove of the lower mold 21. Next, the positioning holes 15a and 15c of the SUS block 11 are inserted into the positioning pins 24 to position the SUS block 11. Next, the upper mold 25 is lowered toward the lower mold 21, and the engraving blade 26 is placed against the center of the SUS block 11. At this time, the lower mold 21 and the upper mold 25 are aligned using the positioning hole 23 and the positioning pin 28. As a result, the SUS block 11 is cut along the cutting line L1, the SUS block 11 is divided into two, and the SUS frame 12 is formed.

[0027] Next, a third cutting step is carried out to separate the SUS bars 14 (step 6). Fig. 9 is a perspective view of the lower die 31 of the cutting jig 30 that cuts the tie bars 13 according to the first embodiment. Fig. 10 is a view showing a state in which the suction block cover 60 and the presser plate 37 are attached to the cutting jig 30 according to the first embodiment. Fig. 11 is a perspective view of an upper die 70 that corresponds to the lower die 31 and that cuts the tie bars 13 according to the first embodiment.

[0028] A tray 50 is placed on the lower mold 31. As shown in FIG. 18 , an opening 51 is formed in the tray 50. A suction block 40, on whose upper surface a plurality of SUS bars 14 are mounted, is also provided on the lower mold 31. The suction block 40 has dimensions narrower than the opening 51 of the tray 50 so that it can move up and down through the opening 51, and protrudes upward from the opening 51 of the tray 50. Hereinafter, the alignment direction of the plurality of SUS bars 14 on the SUS frame 12 may be referred to as the Y direction, and the direction in which the plurality of SUS bars 14 extend when mounted on the suction block 40 may be referred to as the X direction.

[0029] As shown in Fig. 11, a carving blade 71 is provided on the surface of the upper mold 70 facing the lower mold 31. The carving blade 71 cuts the multiple SUS bars 14 mounted on the suction block 40 as shown in Fig. 10 along the alignment direction of the multiple SUS bars 14 in the SUS frame 12. Fig. 12 is a diagram illustrating a cutting line L2 of the SUS frame 12 according to the first embodiment. The carving blade 71 is formed of, for example, high-speed steel, and is coated with DLC (Diamond-Like Carbon) after hardening.

[0030] The tray 50 is configured so that it can be moved vertically by passing the opening 51 through the suction block 40. This allows the cut SUS bars 14 to be stored on the tray 50. In other words, the cutting jig 30 can load multiple SUS bars 14 on the suction block 40 onto the tray 50 by moving the tray 50 upward after cutting the SUS bars 14. As shown in Figures 18 and 19, the length W2 of the opening 51 of the tray 50 in the alignment direction of the multiple SUS bars 14 on the SUS frame 12, i.e., in the X direction perpendicular to the Y direction, is shorter than the length of the cut SUS bars 14. In other words, when multiple SUS bars 14 are loaded on the suction block 40, the length W2 of the opening 51 of the tray 50 in the extension direction of the multiple SUS bars 14 is shorter than the length of the multiple SUS bars 14.

[0031] 10, in step 6, the SUS frame 12 is first loaded onto the suction block 40. Next, with the SUS frame 12 being sucked by the suction block 40, the engraving blade 71 is pressed against the cutting line L2 of the tie bar 13 to separate the multiple SUS bars 14 from the SUS frame 12. Next, after removing the cutting waste other than the SUS bars 14 and the lower plate receiving stages 32a and 32b, the tray 50 is moved upward and the separated multiple SUS bars 14 are loaded onto the tray 50.

[0032] In this manner, in this embodiment, the aligned state of the multiple SUS bars 14 is maintained from the time the SUS frame 12 is formed until the multiple SUS bars 14 are placed on the tray 50. Therefore, aligned dummy bars can be easily supplied to the bar setting device.

[0033] The structure of the cutting jig 30 will be further described. Metal plate cutting methods generally include shearing, punching, ultrasonic vibration, laser cutting, and water jet cutting. The reason for adopting punching in this embodiment is as follows: In shearing, the path of the engraving blade 71 (cutting blade) must be aligned with the path of the tray 50 as it moves up and down. However, in shearing, it is extremely difficult to provide a cutting blade on the lower mold 31, retract it, and reproduce and ensure the spacing between the upper and lower cutting blades, similar to the relationship between a die and a punch. Furthermore, ultrasonic vibration cutting, which involves applying ultrasonic vibration to a single blade, is difficult to achieve with simple or inexpensive equipment. Furthermore, laser or water jet cutting generally cannot completely remove burrs. For these reasons, this embodiment adopts punching, such as Thomson cutting.

[0034] In punch cutting, the workpiece is placed on the lower plate, and the cutting blade of the upper die presses the workpiece to cut it. Stable cutting is possible for SUS sheets 10 and SUS frames 12 with thicknesses of 0.1 mm or less by using engraving materials made of aluminum for the lower plate and steel such as high-speed steel for the upper die. This configuration can be used in any of the first to third cutting steps. In this embodiment, it is used in the second and third cutting steps from the perspective of cost-effectiveness.

[0035] In this embodiment, the SUS bars 14 are stored in the tray 50 without being disturbed in their arrangement. However, when cutting the tie bars 13, the force of the engraving blade 71 of the upper die 70 pressing downward on the cutting line L2 of the tie bars 13 causes the SUS bars 14 to warp upward, and the force of this warping returning after cutting disrupts the arrangement of the SUS bars 14. To avoid this, the cutting jig 30 has the following features. (1) The soft resin material 72 on the outside of the engraving blade 71 (2) A holding plate 37 that holds the SUS frame 12 and the lower plate 33 together (3) Separation wall 42 of suction block 40 (4) Protrusion 61 of suction block cover 60 (5) Positioning pin 77 of upper die 70 (6) Positioning hole 63 of suction block cover 60

[0036] First, features (1) and (2) will be described. As shown in FIG. 11 , the upper mold 70 has an engraving blade 71 and a soft resin material 72 adjacent to the engraving blade 71. Also, as shown in FIGS. 9 and 10 , lower plates 33 are provided on both sides of the suction block 40 above the lower mold 31, in positions directly below the engraving blade 71 when the multiple SUS bars 14 are cut. The lower plates 33 are made of aluminum. Also, above the mounting position of the multiple SUS bars 14, a presser plate 37 is provided to press down on the multiple SUS bars 14 and the lower plate 33 when the multiple SUS bars 14 are cut. That is, the multiple SUS bars 14 and the presser plate 37 are arranged in this order on the lower plate 33. When the upper mold 70 descends, the soft resin material 72 contacts the presser plate 37, thereby pressing down and fixing the tie bars 13 of the SUS frame 12 from above. This reduces the force that restores the warping of the SUS bars 14 after the tie bars 13 are cut.

[0037] Next, feature (3) will be described. FIG. 13 is a plan view of the lower mold 31 of the cutting jig 30 according to the first embodiment. A plurality of suction grooves 41 and a plurality of separation walls 42 are formed on the upper surface of the suction block 40. The plurality of suction grooves 41 extend in the Y direction. FIG. 14 is a plan view illustrating the structure of the suction block 40 according to the first embodiment. FIG. 15 is a perspective view illustrating the structure of the suction block 40 according to the first embodiment. On the upper surface of the suction block 40, areas A1 where the separation walls 42 are formed and areas A2 where the SUS bars 14 are mounted are alternately arranged in the Y direction. In other words, the plurality of separation walls 42 are arranged so as to separate adjacent SUS bars 14 among the plurality of SUS bars 14. The plurality of separation walls 42 are arranged, for example, in a staggered pattern.

[0038] With this configuration, the separation walls 42 can separate the multiple SUS bars 14. Therefore, even after the SUS bars 14 are cut, their arrangement can be prevented from becoming disorganized. The suction block 40 that vacuum-sucks the SUS frame 12 can be manufactured separately from the lower mold 31, for example, using a 3D printer, in order to incorporate the vacuum suction piping, suction grooves 41, and fine separation walls 42. The spacing between the separation walls 42 is, for example, 0.63 mm or less, and the width of the separation walls 42 is, for example, 0.2 to 0.4 mm.

[0039] Next, feature (4) will be described. FIG. 16 is a perspective view of the suction block cover 60 according to the first embodiment. FIG. 17 is a cross-sectional view illustrating the structure of the suction block 40 and the suction block cover 60 according to the first embodiment. As shown in FIG. 10, the suction block cover 60 sandwiches the multiple SUS bars 14 together with the suction block 40. The suction block cover 60 has a protrusion 61 that faces the suction groove 41 of the suction block 40 when the multiple SUS bars 14 are sandwiched between the suction block 40 and the suction block cover 60. FIG. 15 shows the position of the protrusion 61 on the suction block 40. In the example shown in FIGS. 13 and 16, the suction groove 41 and the protrusion 61 extend along the alignment direction of the SUS bars 14. The height of the protrusion 61 is, for example, 0.3 mm.

[0040] By arranging the protrusions 61 so as to face the suction grooves 41 of the suction block 40, the gap between the protrusions 61 and the suction grooves 41 can be narrowed in the area A3 in Fig. 17. This increases the speed of the airflow drawn into the suction grooves 41, improving the suction force. This allows the SUS bars 14 to be firmly sucked and fixed, preventing the arrangement of the SUS bars 14 from becoming distorted.

[0041] 17, the protrusions 61 and the SUS frame 12 are not in contact with each other. This prevents damage to the mirror-finished surface of the SUS bar 14. For example, by making the thickness of the SUS frame 12 0.03 mm, the height of the separation wall 42 of the suction block 40 0.4 mm, and the height of the protrusions 61 of the suction block cover 60 0.3 mm, contact between the protrusions 61 and the SUS frame 12 can be avoided.

[0042] Next, features (5) and (6) will be described. The positioning pin 77 in FIG. 11, the positioning hole 63 in FIG. 10, and the positioning hole 43 in FIG. 13 are all located in the same position in a plan view. In FIG. 10, the positioning holes 15a and 15b of the frame 12 in the area next to the leading area where the SUS bar 14 to be cut is located are positioned by the positioning pin 35. When the SUS frame 12 is positioned on the suction block 40, the positioning holes 15a and 15b of the leading area of ​​the SUS frame 12 are positioned in approximately the same position as the positioning hole 43 in the suction block 40. When the upper mold 70 descends to cut the SUS bar 14, the positioning pin 77 passes through the positioning holes 63, 43, 15a, and 15b, allowing the tie bar 13 to be cut in the correct position. If the positioning pin 77 and the positioning holes 15a and 15b are misaligned, the engraving blade 71 will be tilted and deviated from the position where the tie bar 13 should be cut. As a result, the SUS bar 14 is cut while still connected to the SUS frame 12, instead of being completely separated from the SUS frame 12 as it should be.

[0043] Next, the operation of the cutting jig 30 will be described in detail with reference to Figures 9 and 10. The SUS frame 12 is mounted on a transport rail 34 provided on the lower mold 31. Lower plate support stages 32a and 32b are provided on both sides of the suction block 40 of the lower mold 31. The lower plate 33 is, for example, an aluminum plate with a thickness of 0.4 mm. The lower plate 33 is mounted at a position where the tie bars of the SUS bars 14 on the lower plate support stages 32a and 32b are positioned, i.e., at a position recessed by the thickness of the lower plate 33. First, as shown in Figure 9, the positioning holes 15 in the area next to the front of the SUS frame 12 are inserted into the positioning pins 35 on the lower plate support stage 32a to position it.

[0044] Next, as shown in FIG. 10, the suction block 40 is sandwiched between the lower plate receiving stages 32a and 32b. In this way, the lower plate receiving stages 32a and 32b are configured to be movable in the X direction. This positions the leading area of ​​the SUS frame 12 on the upper surface of the suction block 40. At this time, the separation wall 42 is positioned in the groove between the SUS bars 14. Also, in the state shown in FIG. 10, a lower plate 33 made of, for example, 0.4 mm thick aluminum is placed at a position on the lower plate receiving stages 32a and 32b that will receive the engraving blade 71. As shown in FIG. 13, the lower plate 33 is positioned by a positioning pin 33a.

[0045] Next, the protrusion 61 of the suction block cover 60 is placed over the suction groove 41. At this time, it is advisable to position the suction block cover 60 so that the center of the positioning hole 63, which has a diameter of, for example, 3.1 mm, of the suction block cover 60 overlaps with the center of the positioning hole 15, which has a diameter of, for example, 3.1 mm, of the SUS frame 12. Alternatively, the positioning hole 43 of the suction block 40 and the center of the positioning hole 15 of the SUS frame 12 may be positioned using a jig or the like. Next, the vacuum suction is turned on to fix the SUS frame 12, and the presser plate 37 is placed on the SUS frame 12.

[0046] Next, the upper die 70 is lowered, and the positioning pins 76 are inserted into the positioning holes 36 of the lower die 31. Then, with the soft resin material 72 holding down the pressure plate 37, the SUS frame 12, and the lower plate 33, the engraving blade 71 is used to cut off the tie bars 13 in the leading area of ​​the SUS frame 12. Specifically, in the initial state in which the SUS frame 12 is placed on the suction block 40, the lower die 31 and the upper die 70 are positioned so that they do not overlap one above the other. From this state, the slide guide (not shown) on which the lower die 31 is placed is moved directly below the upper die 70 attached to the press machine. Next, the upper die 70 is lowered, and the engraving blade is pressed against the tie bars 13 of the SUS frame 12, thereby cutting off the tie bars 13.

[0047] The carving blade 71 of the upper die 70 applies a pressure of, for example, 1.0 ton or more during cutting. To prevent the blade from slipping on the workpiece during cutting, which could result in an inability to cut, or to prevent burrs or other defects from degrading the quality of the cut portion, the height of the carving blade 71 may be set to, for example, 2.0 mm.

[0048] The engraving blade 71 descends to the cutting line L2 of the SUS frame 12 between the presser plate 37 and the suction block cover 60 in a plan view. In other words, the suction block cover 60 fits between the two engraving blades 71 of the upper die 70. If the upper die 70 and the suction block cover 60 come into contact during the cutting process, the suction block cover 60 may be lifted as the upper die 70 rises. For example, if the protrusion 61 of the suction block cover 60 is lifted to a position higher than the separation wall 42, the impact during cutting may cause the cut SUS bar 14 to climb onto the separation wall 42 and become pinched between the separation wall 42 and the suction block cover 60, resulting in deformation. Furthermore, the cut SUS bar 14 may climb over the separation wall 42 and overlap with an adjacent SUS bar 14. Preventing the suction block cover 60 from lifting up reduces deformation and overlap of the SUS bar 14. In order to prevent contact between the upper die 70 and the suction block cover 60, it is necessary to make the thickness of the suction block cover 60 thinner than the height of the engraving blade 71, for example, less than 2 mm.

[0049] Furthermore, even if the suction block cover 60 does not come into contact with the upper die 70, there is a possibility that the suction block cover 60 may be lifted up by the impact when cutting the SUS bar 14. For this reason, for example, the suction block cover 60 may be made of a heavy material or a weight may be added to the suction block cover 60. Alternatively, the suction block cover 60 may be fixed in an appropriate location to prevent it from being lifted up by the impact.

[0050] After cutting the tie bars 13, the lower plate receiving stages 32a and 32b are retracted to both sides so as to be away from the suction block 40. Next, the tie bars 13 and the scrap material with the positioning holes 15 of the SUS frame 12 are removed, leaving only the SUS bars 14 on the suction block 40. Next, the vacuum of the suction block 40 is turned off, and the tray 50 is lifted up to store the SUS bars 14 in the tray.

[0051] Fig. 18 is a perspective view of the tray 50 according to the first embodiment. Fig. 19 is a diagram showing a state in which SUS bars 14 are loaded on the tray 50 according to the first embodiment. The tray 50 is formed with an opening 51 for allowing the suction block 40 to escape and a groove 52 for storing the SUS bars 14. The width W1 of the groove 52 is, for example, a length that is the length of the cut SUS bars 14 with a small margin.

[0052] This completes step 6. Next, the tray 50 loaded with the SUS bars 14 is inserted into an automatic bar setting machine (not shown) (step 7). The automatic bar setting machine arranges the LD bars 80 and the SUS bars 14 alternately with their cross sections facing up. Figure 20 shows the LD bars 80 and the SUS bars 14 mounted on the bar setting plate 90 according to embodiment 1. Figure 21 shows the bar setting state in which the LD bars 80 and the SUS bars 14 are arranged alternately according to embodiment 1. The dimensions of the LD bars 80 are, for example, 14.5 x 0.15 x 0.1 mm, and the dimensions of the SUS bars 14 are, for example, 16.5 x 0.13 x 0.03 mm. At this time, the automatic bar setting device arranges the LD bars 80 and the SUS bars 14 alternately with their 0.1 mm-thick surfaces facing up. That is, the 0.15 mm-thick surfaces of the LD bars 80 and the 0.13 mm-thick surfaces of the SUS bars 14 are in contact with each other. From the above, the SUS bar 14 can be manufactured.

[0053] Next, the effects of this embodiment will be described. In a conventional dummy bar manufacturing method, for example, a SUS sheet rolled to a thickness of 0.05 mm is etched to form multiple dummy bars with widths of 0.9 to 2.5 mm. These dummy bars can be easily cut by bending the tie bars, and are introduced into the manufacturing process in separate pieces. For this reason, it was necessary to align multiple separate dummy bars using a special jig. Furthermore, it is difficult to cut a fine SUS bar 14, for example, 0.13 mm wide x 0.03 mm thick, by bending the tie bars, and the cut portion is generally prone to bending.

[0054] In contrast, by applying this embodiment, the fine SUS bars 14 can be stored in the tray 50 while maintaining their arrangement on the SUS sheet 10. Furthermore, in the series of processes for forming the SUS bars 14 from the SUS sheet 10, the SUS bars 14 do not come into contact with jigs or human hands, so the SUS bars 14 can be supplied to the automatic bar setting machine with extremely low risk of foreign matter adhesion, scratches, or deformation. As a result, by using thin SUS bars, the number of LD bars 80 aligned in the bar setting process can be increased, improving productivity.

[0055] Furthermore, according to the above features (1) to (6), quality defects such as damage and bending of the SUS bars 14 due to disordered arrangement can be suppressed, ensuring stable quality. In addition, good workability can be obtained.

[0056] Furthermore, in the SUS sheet 10 of this embodiment, grooves of a predetermined size are formed at a predetermined pitch, leaving both ends uncut. With this configuration, the tie bar 13 can be cut, leaving a SUS material of a predetermined length and width, to obtain the SUS bar 14. In other words, the SUS bar 14 can be separated directly from the SUS frame 12.

[0057] Furthermore, by providing positioning holes 15 in the SUS frame 12, the SUS frame 12 and the cutting jig 30 can be easily positioned when inserted into the cutting jig 30. Furthermore, by providing block index marks 11a, the position information of defective bars can be shared between the manufacturer and the recipient, and the details of the defects can be identified by dividing them into locations within the SUS sheet 10. Therefore, defective bars can be easily removed, and the details of the defects can be used to improve the etching process, etc.

[0058] Furthermore, the SUS bar and the LD bar are assembled in a tightly contacted state. Therefore, there is a risk that the rolling marks on the surface of the rolled SUS bar are transferred to the surface of the LD bar, causing scratches on the LD bar. In contrast, in this embodiment, by using a mirror-finished SUS sheet 10, scratches on the LD bar 80 can be suppressed.

[0059] Fig. 22 is a perspective view of suction block 240 and suction block cover 260 according to a modified example of embodiment 1. Fig. 23 is a plan view of suction block 240 according to a modified example of embodiment 1. Fig. 24 is a plan view of suction block cover 260 according to a modified example of embodiment 1. Suction block cover 260 has a plurality of flat surfaces 261 that are opposing portions that face the plurality of suction grooves 41 of suction block 240. Suction block cover 260 has openings 262 formed between the plurality of flat surfaces 261.

[0060] As described above, when cutting the tie bars 13, the suction block cover 60 may come into contact with and be attracted to the upper die 70 as the upper die 70 descends, and may then be lifted up along with the upper die 70 as the upper die 70 ascends. At this time, a gap may form between the suction block 40 and the suction block cover 60, and the cut SUS bar 14 may climb over the separation wall 42 of the suction block 40 and overlap with an adjacent SUS bar. This is also called SUS bar separation. Making the suction block cover 60 thin can prevent contact between the suction block cover 60 and the upper die 70. However, making the suction block cover 60 thin may cause warping.

[0061] In contrast, the suction block cover 260 according to the modified example has an opening 262. The suction block cover 260 may lift up along with the upper mold 70 due to contact between the suction block cover 260 and the upper mold 70, creating a vacuum. The opening 262 prevents this vacuum and prevents the suction block cover 260 from lifting up. Furthermore, suction holes 244 connected to the suction grooves 41 are provided at both ends of the suction block 240. The suction block 240 and the suction block cover 260 are tightly attached, and the suction holes 244 are blocked by the suction block cover 260. This allows the suction block cover 260 to be sucked through the suction holes 244, further preventing the suction block cover 260 from lifting up. Even though the suction block cover 260 is lighter than the suction block cover 60, the suction block cover 260 is prevented from moving due to the impact caused by cutting the SUS bar 14. Furthermore, the condition of the SUS bar 14 can be easily observed through the opening 262. For example, it is possible to check whether the SUS bar 14 is stored in the correct position before cutting, and it is also possible to easily find abnormalities such as the SUS bar coming apart after cutting.

[0062] The thickness restrictions for the suction block cover 260 are the same as for the suction block cover 60. The protrusions 61 for the suction block cover 60 are manufactured by cutting. This requires measures to prevent warping due to heat during processing, which may make it difficult to manufacture a cover with a thickness of less than 1 mm. On the other hand, the openings 262 for the suction block cover 260 are formed in the SUS material using a laser. At this time, heat is applied only near the laser irradiated area, so warping hardly occurs even if the cover is less than 1 mm thick.

[0063] The technical features described in this embodiment may be used in appropriate combination.

[0064] Various aspects of the present disclosure are summarized below as appendices. (Appendix 1) Lower mold and a tray provided on the lower mold and having an opening; a suction block provided on the lower mold, protruding upward from the opening, and having a plurality of dummy bars mounted on an upper surface thereof; a blade that cuts the plurality of dummy bars mounted on the suction block along an alignment direction of the plurality of dummy bars; Equipped with the opening has a length in a direction perpendicular to the alignment direction that is shorter than the length of the cut dummy bars; A dummy bar manufacturing apparatus, characterized in that the tray can be moved upward to load the plurality of dummy bars on the suction block onto the tray. (Appendix 2) The dummy bar manufacturing apparatus according to claim 1, characterized in that a plurality of separation walls are provided on the upper surface of the suction block to separate adjacent dummy bars among the plurality of dummy bars. (Appendix 3) The dummy bar manufacturing apparatus according to claim 2, wherein the plurality of separation walls are arranged in a staggered pattern. (Appendix 4) a suction block cover that sandwiches the plurality of dummy bars together with the suction block; The dummy bar manufacturing apparatus of any one of appendices 1 to 3, characterized in that the suction block cover has a convex portion that faces the suction groove of the suction block when the multiple dummy bars are sandwiched between the suction block and the suction block cover. (Appendix 5) The dummy bar manufacturing apparatus according to claim 4, wherein the suction groove and the protrusion extend along the alignment direction. (Appendix 6) a suction block cover that sandwiches the plurality of dummy bars together with the suction block; the suction block cover has a plurality of opposing portions that face the plurality of suction grooves of the suction block when the plurality of dummy bars are sandwiched between the suction block and the suction block cover, 4. The dummy bar manufacturing device according to any one of claims 1 to 3, wherein an opening is formed between the plurality of opposing portions of the suction block cover. (Appendix 7) a lower plate provided on each side of the suction block above the lower die, the lower plate being positioned directly below the blade when the plurality of dummy bars are cut; a presser plate provided above the mounting positions of the plurality of dummy bars, the presser plate pressing the plurality of dummy bars and the lower plate when the plurality of dummy bars are cut; 7. A dummy bar manufacturing apparatus according to any one of claims 1 to 6, comprising: (Appendix 8) A dummy bar manufacturing device according to any one of claims 1 to 7, characterized in that it comprises an upper mold having the blade and a soft resin material adjacent to the blade. (Appendix 9) forming a frame having a plurality of dummy bars and tie bars connecting the ends of the plurality of dummy bars; The frame is mounted on a suction block of a manufacturing apparatus including a tray having an opening and a suction block protruding upward from the opening; With the frame being sucked by the suction block, the tie bars are cut to separate the plurality of dummy bars; a tray being moved upward and the separated plurality of dummy bars being placed on the tray; (Appendix 10) The method for manufacturing a dummy bar described in Appendix 9, characterized in that when the multiple dummy bars are mounted on the suction block, the length of the opening in the direction in which the multiple dummy bars extend is shorter than the length of the multiple dummy bars. (Appendix 11) The method for manufacturing a dummy bar described in Appendix 9 or 10, characterized in that the aligned state of the plurality of dummy bars is maintained from the time the frame is formed until the time the plurality of dummy bars are loaded onto the tray. (Appendix 12) A method for manufacturing a dummy bar described in any one of Appendices 9 to 11, characterized in that a plurality of separation walls are provided on the upper surface of the suction block to separate adjacent dummy bars among the plurality of dummy bars. (Appendix 13) The method for manufacturing a dummy bar according to claim 12, wherein the separation walls are arranged in a staggered pattern. (Appendix 14) the manufacturing apparatus includes a suction block cover that sandwiches the frame together with the suction block; The method for manufacturing a dummy bar described in any one of Appendices 9 to 13, characterized in that the suction block cover has a convex portion that faces the suction groove of the suction block when the frame is sandwiched between the suction block and the suction block cover. (Appendix 15) The method for manufacturing a dummy bar described in Appendix 14, wherein the suction groove and the protrusion extend along the alignment direction of the multiple dummy bars. (Appendix 16) the manufacturing apparatus includes a suction block cover that sandwiches the frame together with the suction block; the suction block cover has a plurality of opposing portions that face the plurality of suction grooves of the suction block when the frame is sandwiched between the suction block and the suction block cover, 14. The method for manufacturing a dummy bar according to any one of claims 9 to 13, wherein an opening is formed between the plurality of opposing portions of the suction block cover. (Appendix 17) The manufacturing apparatus includes: a lower plate provided on each side of the suction block and positioned directly below a blade that cuts the plurality of dummy bars when the plurality of dummy bars are cut; a pressure plate provided above the mounting positions of the plurality of dummy bars; Equipped with A method for manufacturing a dummy bar described in any one of appendices 9 to 16, characterized in that the tie bar is cut with the blade while the frame and the lower plate are held down by the holding plate. (Appendix 18) A method for manufacturing a dummy bar according to any one of claims 9 to 17, characterized in that the tie bars are cut using an upper mold having a blade for cutting the plurality of dummy bars and a soft resin material adjacent to the blade. (Appendix 19) The method for manufacturing a dummy bar described in any one of appendices 9 to 18, characterized in that the frame has an area having the plurality of dummy bars and the tie bars, arranged in a row in the direction in which the plurality of dummy bars extend. (Appendix 20) 20. A method for manufacturing a dummy bar according to any one of claims 9 to 19, characterized in that an index mark is provided on the frame. (Appendix 21) The surface of the sheet is mirror-finished, Etching the mirror-finished sheet to form a plurality of the frames on the sheet; A method for manufacturing a dummy bar according to any one of claims 9 to 20, characterized in that the frames are formed by cutting the sheet and separating it into the plurality of frames. [Explanation of symbols]

[0065] 10 SUS sheet, 11 SUS block, 11a block index mark, 12 SUS frame, 13 tie bar, 14 SUS bar, 15, 15a, 15b, 15c positioning hole, 21 lower die, 22 aluminum lower plate, 23 positioning hole, 24 positioning pin, 25 upper die, 26 engraving blade, 27 soft resin material, 28 positioning pin, 30 cutting jig, 31 lower die, 32a, 32b lower plate support stage, 33 lower plate, 33a positioning pin, 34 transport rail, 35 positioning pin, 36 positioning hole, 37 holding plate, 40 suction block, 41 suction groove, 42 separation wall, 43 positioning hole, 50 tray, 51 opening, 52 groove, 60 suction block cover, 61 convex portion, 63 positioning hole, 70 upper die, 71 engraving blade, 72 Soft resin material, 76 positioning pin, 77 positioning pin, 80 LD bar, 90 bar set receiving plate, 240 suction block, 244 suction hole, 260 suction block cover, 261 flat surface, 262 opening

Claims

1. Lower mold and a tray provided on the lower mold and having an opening; a suction block provided on the lower mold, protruding upward from the opening, and having a plurality of dummy bars mounted on an upper surface thereof; a blade that cuts the plurality of dummy bars mounted on the suction block along an alignment direction of the plurality of dummy bars; Equipped with the opening has a length in a direction perpendicular to the alignment direction that is shorter than the length of the cut dummy bars; A dummy bar manufacturing apparatus, characterized in that the tray can be moved upward to load the plurality of dummy bars on the suction block onto the tray.

2. 2. The dummy bar manufacturing apparatus according to claim 1, wherein a plurality of separation walls are provided on an upper surface of the suction block to separate adjacent dummy bars from each other.

3. 3. The dummy bar manufacturing apparatus according to claim 2, wherein the plurality of separation walls are arranged in a staggered pattern.

4. a suction block cover that sandwiches the plurality of dummy bars together with the suction block; A dummy bar manufacturing apparatus as described in any one of claims 1 to 3, characterized in that the suction block cover has a convex portion that faces the suction groove of the suction block when the multiple dummy bars are sandwiched between the suction block and the suction block cover.

5. The dummy bar manufacturing apparatus according to claim 4 , wherein the suction grooves and the protrusions extend along the alignment direction.

6. a suction block cover that sandwiches the plurality of dummy bars together with the suction block; the suction block cover has a plurality of opposing portions that face the plurality of suction grooves of the suction block when the plurality of dummy bars are sandwiched between the suction block and the suction block cover, 4. The dummy bar manufacturing apparatus according to claim 1, wherein openings are formed between the plurality of opposing portions of the suction block cover.

7. a lower plate provided on each side of the suction block above the lower die, the lower plate being positioned directly below the blade when the plurality of dummy bars are cut; a presser plate provided above the mounting positions of the plurality of dummy bars, the presser plate pressing the plurality of dummy bars and the lower plate when the plurality of dummy bars are cut; The dummy bar manufacturing apparatus according to any one of claims 1 to 3, further comprising:

8. 4. The dummy bar manufacturing apparatus according to claim 1, further comprising an upper mold having the blade and a soft resin material adjacent to the blade.

9. forming a frame having a plurality of dummy bars and tie bars connecting the ends of the plurality of dummy bars; The frame is mounted on a suction block of a manufacturing apparatus including a tray having an opening and a suction block protruding upward from the opening; With the frame being sucked by the suction block, the tie bars are cut to separate the plurality of dummy bars; a tray being moved upward and the separated plurality of dummy bars being placed on the tray;

10. 10. The method for manufacturing a dummy bar according to claim 9, wherein, when the plurality of dummy bars are mounted on the suction block, the length of the opening in the direction in which the plurality of dummy bars extend is shorter than the length of the plurality of dummy bars.

11. 11. The method for manufacturing a dummy bar according to claim 9, wherein the aligned state of the plurality of dummy bars is maintained from the time when the frame is formed until the time when the plurality of dummy bars are mounted on the tray.

12. 11. The method for manufacturing a dummy bar according to claim 9, wherein a plurality of separation walls are provided on an upper surface of the suction block to separate adjacent dummy bars from each other.

13. The method for manufacturing a dummy bar according to claim 12, wherein the plurality of separation walls are arranged in a staggered pattern.

14. the manufacturing apparatus includes a suction block cover that sandwiches the frame together with the suction block; 11. The method for manufacturing a dummy bar according to claim 9, wherein the suction block cover has a convex portion that faces the suction groove of the suction block when the frame is sandwiched between the suction block and the suction block cover.

15. The method for manufacturing a dummy bar according to claim 14, wherein the suction groove and the protrusion extend along the alignment direction of the plurality of dummy bars.

16. the manufacturing apparatus includes a suction block cover that sandwiches the frame together with the suction block; the suction block cover has a plurality of opposing portions that face the plurality of suction grooves of the suction block when the frame is sandwiched between the suction block and the suction block cover, 11. The method for manufacturing a dummy bar according to claim 9, wherein openings are formed between the plurality of opposing portions of the suction block cover.

17. The manufacturing apparatus includes: a lower plate provided on each side of the suction block and positioned directly below a blade that cuts the plurality of dummy bars when the plurality of dummy bars are cut; a pressure plate provided above the mounting positions of the plurality of dummy bars; Equipped with 11. The method for manufacturing a dummy bar according to claim 9, wherein the tie bar is cut by the blade while the frame and the lower plate are held down by the holding plate.

18. 11. The method for manufacturing a dummy bar according to claim 9, wherein the tie bars are cut by an upper mold having a blade for cutting the plurality of dummy bars and a soft resin material adjacent to the blade.

19. 11. The method for manufacturing a dummy bar according to claim 9, wherein the frame has a plurality of areas each having the dummy bars and the tie bars, the areas being arranged in a direction in which the dummy bars extend.

20. 11. The method for manufacturing a dummy bar according to claim 9, further comprising providing an index mark on the frame.

21. The surface of the sheet is mirror-finished, Etching the mirror-finished sheet to form a plurality of the frames on the sheet; 11. The method for manufacturing a dummy bar according to claim 9, wherein the frames are formed by cutting the sheet to separate it into the plurality of frames.

Citation Information

Patent Citations

  • Alignment / separation unit for semiconductor laser devices

    JP2007281390A