Container transfer device

Abstract

To provide a technique for easily positioning a container transfer device for transferring a storage container for storing a substrate with respect to a target apparatus to which the storage container is to be transferred.SOLUTION: A container transfer device 100 includes a main body 1 and a position regulating member 2 attached to the main body 1. The main body 1 includes a cart 11 having traveling wheels 112a and a holding part 12 for holding a storage container 9. The position regulating member 2 has a contact member 21. The contact member 21 is brought into contact with the target apparatus to which the storage container 9 is to be transferred, from a predetermined direction, the main body 1 is positioned at a transfer position P at which the main body 1 is to be arranged when the storage container 9 is transferred between the main body 1 and the target apparatus.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a container transport device for transporting a storage container for storing substrates. [Background technology]

[0002] A highly clean environment is required in semiconductor manufacturing processes and the like. In recent years, mini-environment systems have increasingly been adopted to create clean environments in semiconductor manufacturing plants and the like, replacing the downflow system. The mini-environment system creates a localized clean environment only around the substrate being processed, and can create a highly clean environment at lower cost than the downflow system, which creates a clean environment throughout the entire plant.

[0003] In the mini-environment system, substrates are transported and stored in a containment vessel maintained at a higher level of cleanliness than the external atmosphere. A module called an Equipment Front End Module (EFEM) is used to transfer substrates between the containment vessel that stores the substrates and the processing equipment that performs various processes on the substrates. The EFEM, for example, comprises a transfer chamber that houses a transfer robot and a load port connected to it. The load port is an interface for transferring substrates into and out of the containment vessel, and includes a platform on which the containment vessel is placed. The lid of the containment vessel placed on the platform is removed from the vessel body, connecting the interior of the vessel body to the internal space of the transfer chamber.

[0004] The transport of the containment vessel to the load port is performed using, for example, an AGV (Automated Guided Vehicle) or a PGV (Person Guided Vehicle). An AGV is an unmanned, floor-traveling vehicle that travels on the floor using a power supply. A PGV is a floor-traveling, human-powered vehicle that travels on the floor while being steered and moved by an operator. [Prior art documents] [Patent documents]

[0005] [Patent Document 1] Japanese Patent Application Laid-Open No. 2003-243473 [Patent Document 2] Japanese Patent Application Laid-Open No. 2008-23605 Summary of the Invention [Problem to be solved by the invention]

[0006] In order to properly transfer a containment vessel between a container transport device such as an AGV or PGV and a load port, the container transport device must be positioned sufficiently close to the load port during the transfer. However, if the container transport device gets too close to the load port to transfer the containment vessel, there is a risk of a collision.

[0007] Therefore, in the past, a jig called a docking flange has been used to position a container transport device at a predetermined position (transfer position) sufficiently close to the load port without contacting the load port. As shown in Fig. 13, a docking flange 901 is a jig shaped to be able to engage with an engaging portion 902a provided on a container transport device 902, and is fixed to, for example, the floor surface on which a load port 903 is installed. By engaging the engaging portion 902a with the docking flange 901, the container transport device 902 is positioned relative to the load port 903 and is placed at the predetermined transfer position P.

[0008] However, when using docking flanges to position a container transport device relative to a load port, a docking flange must be installed near each load port of an EFEM connected to each of the numerous processing devices installed in a factory. This requires the preparation of numerous docking flanges, which is costly. Furthermore, when fixing the docking flanges to the floor, precise positioning must be performed to ensure that they are positioned at the correct location relative to the load port. This requires the work of fixing the numerous docking flanges to the floor while adjusting their positions one by one. Furthermore, if the layout of the EFEM is changed due to a change in the factory layout, this work must be redone.

[0009] As described above, the method of positioning the container transport device using the docking flange is costly and time-consuming, and therefore there has been a demand for a technology that can more easily position the container transport device.

[0010] The present invention has been made to solve the above-mentioned problems, and aims to provide a technology that can easily position a container transport device that transports a storage container that stores substrates relative to the target equipment to which the storage container is to be handed over. [Means for solving the problem]

[0011] In order to achieve the above object, the present invention takes the following measures.

[0012] That is, the present invention is a container transport device that transports a storage container in which substrates are stored, and is characterized in that it comprises: a main body portion that includes a carriage having running wheels and a holding portion that holds the storage container; and a position regulating member attached to the main body portion, wherein the position regulating member abuts against a target device to which the storage container is to be transferred from a predetermined direction, thereby positioning the main body portion at a transfer position at which the main body portion should be located when the storage container is transferred between the target device and the main body portion.

[0013] According to this configuration, the main body can be easily positioned relative to the target device by bringing the abutting member into abutment with the target device from a predetermined direction.

[0014] Preferably, in the container transport device, the position regulating member includes a position changing portion that changes the position of the contact member relative to the main body portion in the predetermined direction.

[0015] According to this configuration, by changing the position of the abutting member relative to the main body, it is possible to change the position at which the main body is positioned relative to the target device.

[0016] Preferably, in the container conveying device, the position change unit is characterized by comprising a handle that rotates in response to external operation, and a conversion mechanism that converts the rotation of the handle into linear movement of the abutment member in the specified direction.

[0017] According to this configuration, the operator can change the position of the contact member relative to the main body (and thus the position at which the main body is positioned relative to the target device) by operating the handle.

[0018] Preferably, in the container conveying device, when the target equipment is a load port having a mounting section on which the storage container is placed and a base supporting the mounting section, the abutment member abuts against the base.

[0019] With this configuration, the main body can be positioned safely and accurately relative to the load port.

[0020] Preferably, in the container transport device, the main body includes an elevation drive unit that raises and lowers the holder, and the position restriction member is attached to the holder.

[0021] According to this configuration, when the abutting member is in contact with the target device, the holding portion is positioned with sufficient precision relative to the target device, so that the storage container can be properly handed over to and from the target device. [Effects of the Invention]

[0022] According to the present invention, a container transfer device that transfers a storage container that stores substrates can be easily positioned relative to a target device to which the storage container is to be handed over. [Brief explanation of the drawings]

[0023] [Figure 1] FIG. 1 is a perspective view schematically showing a container transport device according to an embodiment. [Figure 2] FIG. 4 is a perspective view of a position regulating member mounted on the container transporting device. [Figure 3] FIG. 2 is a front view of a position regulating member mounted on the container transport device. [Figure 4] FIG. 10 is a view of a position regulating member mounted on the container transport device as viewed from the right side. [Figure 5] FIG. 2 is a diagram schematically illustrating a transport system including a container transport device and a load port. [Figure 6] 10A and 10B are diagrams for explaining the operation of the container transport device transporting the storage container. [Figure 7] 10A and 10B are diagrams for explaining the operation of the container transport device transporting the storage container. [Figure 8] 10A and 10B are diagrams for explaining the operation of the container transport device transporting the storage container. [Figure 9] 10A and 10B are diagrams for explaining the operation of the container transport device transporting the storage container. [Figure 10] 10A and 10B are diagrams for explaining how the holding unit moves up and down; [Figure 11] FIG. 10 is a view of a position restriction member according to a first modified example, viewed from the right side. [Figure 12] FIG. 10 is a view of a position restriction member according to a second modified example, viewed from the right side. [Figure 13] FIG. 10 is a diagram for explaining a positioning mode according to a conventional example. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

[0025] <1. Configuration of the container transport device> The overall configuration of the container conveying device 100 will be described with reference to Fig. 1. Fig. 1 is a perspective view that schematically shows the container conveying device 100.

[0026] The container transfer device 100 is a transfer device that transfers a storage container 9 that stores substrates. The storage container 9 transferred by the container transfer device 100 includes, for example, a container body 91 with one side open and a lid 92 that closes the opening (so-called FOUP (Front Opening Unified Pod)).

[0027] The container transport device 100 includes a main body 1 and a position regulating member 2 attached to the main body 1.

[0028] (a) Main body 1 The main body 1 includes a carriage 11, a holder 12, an elevation drive unit 13, and a control unit .

[0029] (Cart 11) The cart 11 runs on the floor. The cart 11 includes, for example, a base 111 on which the holder 12 and the lifting drive unit 13 are mounted, and casters 112 provided on the underside of the base 111 (for example, at the four corners of the underside). The casters 112 include, for example, running wheels 112a and support parts 112b that support the running wheels 112a. The support parts 112b support the running wheels 112a so that they can roll around a horizontal axle, and support the axle so that they can rotate around a vertical rotation axis. The cart 11 is equipped with a steering handle 113 (for example, a steering handle 113 provided on a lifting shaft 131 (described later) erected on the base 111), and when an operator grasps the steering handle 113 and steers it while pushing or pulling it, the running wheels 112a rotate around the pivot axis and roll around the axle, causing the cart 11 to travel in the direction that it is pushed or pulled.

[0030] (Holding part 12) The holding unit 12 holds the storage container 9. The holding unit 12 is, for example, U-shaped in a plan view and includes a pair of extending portions 121, 121 extending parallel to each other and a base end portion 122 connecting the ends of the pair of extending portions 121, 121 (so-called fork). Each extending portion 121 has an L-shaped cross section intersecting the extension direction and includes a wall portion 121a extending in a vertical plane and a bottom portion 121b projecting inward from its lower end edge (toward the other extending portion 121). The holding unit 12 is cantilevered relative to the elevating shaft 131 at the base end portion 122 in an orientation such that the bottom portions 121b of the extending portions 121 are arranged in the same plane (for example, in a horizontal plane or in a plane slightly inclined relative to the horizontal plane). The holding portion 12 holds the storage container 9 by abutting the bottom portion 121b of each extension portion 121 against each edge portion of the lower surface of the storage container 9 and by abutting the wall portion 121a of each extension portion 121 close to or in contact with the lower end portion of each side surface of the storage container 9.

[0031] (Lifting drive unit 13) The lifting drive unit 13 raises and lowers the holding unit 12. Specifically, the lifting drive unit 13 includes, for example, a lifting shaft 131 that is erected on the base 111 in an orientation extending in the vertical direction. A pair of slits 131a extending in the vertical direction is formed in the wall surface of the lifting shaft 131. A lifting block 132 that is provided so as to be movable (i.e., movable up and down) along the extension direction of the slits 131a is housed inside the lifting shaft 131. The lifting block 132 is connected to the base end portion 122 of the holding unit 12 through each slit 131a. This supports the holding unit 12 so as to be movable up and down relative to the lifting shaft 131. A drive unit 133 that moves the lifting block 132 along the extension direction of the slits 131a (i.e., raises and lowers it) is connected to the lifting block 132. The drive unit 133 raises and lowers the lifting block 132, thereby raising and lowering the holding unit 12 connected thereto. The drive unit 133 can be configured to include, for example, a drive source (e.g., a motor) that receives power from a power source (e.g., a battery) and generates a drive force, and a conversion mechanism (e.g., a ball screw mechanism, a cam mechanism, or a link mechanism) that converts the drive force generated by the drive source into a lifting and lowering operation of the lifting block 132 and transmits the converted drive force. Furthermore, for example, the drive unit 133 may be configured to include a pulley that raises and lowers the lifting block 132 by manual operation of the drive source or an operator.

[0032] (Control unit 14) The control unit 14 is an element that controls the operation of each unit included in the container conveying device 100 and performs various types of arithmetic processing, and is configured, for example, by a general computer having electric circuits, a microcomputer, etc. Specifically, the control unit 14 is configured to include, for example, a processor such as a CPU (Central Processor Unit) as a central processing unit responsible for data processing, a ROM (Read Only Memory) in which basic programs and the like are stored, a RAM (Random Access Memory) used as a working area when the CPU performs predetermined processing (data processing), a storage device configured by a non-volatile storage device such as a flash memory or a hard disk drive, and a bus line connecting these together.

[0033] (b) Position control member 2 The position restricting member 2 will be described with reference to Figures 2 to 4 in addition to Figure 1. In the following, for convenience of explanation, the extension direction of the extending portion 121 in a horizontal plane is referred to as the front-rear direction, and the tip side of the extending portion 121 is referred to as the front side. Furthermore, the direction perpendicular to the front-rear direction in the horizontal plane is referred to as the left-right direction. Figures 2, 3, and 4 are views of the position restricting member 2 mounted on the container conveying device 100, as seen diagonally above the front right, from the front side, and from the right side, respectively.

[0034] The position restricting member 2 includes a contact member 21, a support frame 22, an attachment piece 23, a rail portion 24, and a position changing portion 25.

[0035] (contact member 21) The abutting member 21 is a member that abuts against a device (target device) to which the container conveying device 100 transfers the storage container 9 from a predetermined direction (here, the front-rear direction). The abutting member 21 is preferably formed of a material with relatively low rigidity or elasticity so that the target device is not damaged even when the abutting member 21 abuts against the device. For example, the abutting member 21 may be formed of a resin (e.g., POM resin (Polyoxymethylene)), synthetic rubber (e.g., urethane rubber), natural rubber, or the like. The shape and size of the abutting member 21 can be determined as appropriate. In the example shown in the figure, the abutting member 21 is a flat, rectangular member with a flat main surface, and its longitudinal dimension is approximately the same as the lateral dimension of the lifting shaft 131.

[0036] (Support frame 22) The support frame 22 is a member that supports the abutment members 21. Specifically, the support frame 22 is, for example, U-shaped in a plan view and includes a flat, rectangular support plate portion 221 with a flat main surface, and arm plate portions 222 extending from each longitudinal end of the support plate portion 221 in a direction normal to one of the main surfaces of the support plate portion 221. The abutment members 21 are attached to the other main surface of the support plate portion 221. Specifically, the abutment members 21 are attached to the support plate portion 221 in an orientation such that their main surfaces face the main surface of the support plate portion 221. The support frame 22 is oriented such that the support plate portion 221 extends left and right in front of the lifting shaft 131 and each arm plate portion 222 extends rearward on the left or right side of the lifting shaft 131, and each arm plate portion 222 is attached to the holder 12 via an attachment piece 23 (described later). However, when attached to the holding unit 12, the support frame 22 is oriented such that the normal direction of the main surface of the support plate portion 221 is along the front-rear direction (that is, the main surface is arranged in a vertical plane extending left and right). In other words, when the support frame 22 is attached to the holding unit 12, the abutting member 21 attached to the support plate portion 221 is oriented such that the normal direction (thickness direction) of its main surface is along the front-rear direction.

[0037] (Mounting piece 23) The attachment piece 23 is a member for attaching the position restriction member 2 to the main body 1 (specifically, the holding portion 12). Here, the support frame 22 is attached to the holding portion 12 via the attachment piece 23. That is, on the right side of the lifting shaft 131, the right arm portion 222 is attached to the holding portion 12 via the first attachment piece 23, and on the left side of the lifting shaft 131, the left arm portion 222 is attached to the holding portion 12 via the second attachment piece 23, thereby attaching the support frame 22 to the holding portion 12. Specifically, each attachment piece 23 has, for example, three plate portions (a first plate portion 231, a second plate portion 232 connected thereto, and a third plate portion 233 connected thereto), and is attached to the holding portion 12 at the first plate portion 231 and to the arm portion 222 at the third plate portion 233. That is, the first plate portion 231 has a flat rectangular main surface, is oriented so that its longitudinal direction is aligned vertically, and is attached at its upper end to the rear surface of the base end portion 122 (the portion of the rear surface that protrudes and is exposed to the left or right of the lifting shaft 131). With the first plate portion 231 attached to the rear surface of the base end portion 122, the second plate portion 232 extends rearward from the lower edge of the first plate portion 231. Furthermore, the third plate portion 233 extends downward from the edge of the second plate portion 232 closer to the lifting shaft 131 and is attached to the arm portion 222. However, a rail portion 24 (described later) is provided between the third plate portion 233 and the arm portion 222. That is, the support frame 22 is attached to each mounting piece 23 (and thus to the holding portion 12) via the rail portion 24.

[0038] (Rail part 24) The rail portion 24 supports the support frame 22 (and thus the abutment member 21) so that it can move (slide) in the front-to-rear direction relative to the holding portion 12. The rail portions 24 are provided on the right and left sides of the support frame 22. In the example shown in the figure, one rail portion 24 is provided on the right side of the support frame 22 (between the right arm portion 222 and the right mounting piece 23), and two rail portions 24 are provided on the left side of the support frame 22 (between the left arm portion 222 and the left mounting piece 23). Specifically, the rail portion 24 includes, for example, a movable rail 241 and a support rail 242. The support rail 242 supports the movable rail 241 so that it can move (slide) along the extension direction by having its widthwise edge hooked onto the widthwise edge of the movable rail 241. The movable rail 241 and the support rail 242 are oriented so as to extend in the front-to-rear direction, with one attached to the arm plate portion 222 of the support frame 22 and the other attached to the third plate portion 233 of the mounting piece 23. This allows the support frame 22 to be supported so as to be movable in the front-to-rear direction relative to the mounting piece 23 (and thus the holding part 12).

[0039] (Position change unit 25) The position changer 25 changes the position of the support frame 22 (and therefore the abutment member 21) in the front-rear direction relative to the holding portion 12. The position changer 25 is provided, for example, on only one side of the support frame 22 (the right side in the illustrated example).

[0040] Specifically, the position change unit 25 includes, for example, a handle 251 that rotates in response to an external operation, and a conversion mechanism 252 that converts the rotation of the handle 251 into linear movement of the abutment member 21 in the front-rear direction.

[0041] Handle 251 includes, for example, a disk 251a. One main surface of disk 251a is provided with a gripping protrusion 251b at a position offset from the center.

[0042] The conversion mechanism 252 includes a screw shaft 252a having a spiral groove and a nut member 252b screwed onto the screw shaft 252a. The screw shaft 252a is supported by an attachment member 252c while being allowed to rotate about its axis. The attachment member 252c is attached to the attachment piece 23 (specifically, the second plate portion 232) in an orientation such that the extension direction of the screw shaft 252a supported by the attachment member 252c is along the front-rear direction. A handle 251 is coupled to the rear end of the screw shaft 252a. Specifically, the handle 251 is oriented such that the thickness direction of the disk 251a is along the front-rear direction, and is coupled to the rear end of the screw shaft 252a at the center of the main surface opposite to the main surface on which the gripping protrusion 251b is provided. Meanwhile, the nut member 252b is attached to the support frame 22 (specifically, the arm plate portion 222).

[0043] In this configuration, when the operator operates the handle 251 to rotate it, the conversion mechanism 252 converts the rotation of the handle 251 into linear movement of the support frame 22 (and thus the abutment member 21) in the front-rear direction. Specifically, when the operator grasps the gripping protrusion 251b and rotates it around the center of the disk 251a, the screw shaft 252a rotates around its axis. When the screw shaft 252a rotates around its axis, the nut member 252b moves in the front-rear direction by a distance corresponding to the amount of rotation, and the support frame 22 to which the nut member 252b is attached moves in the front-rear direction while being guided by the rail portion 24. In other words, the position of the support frame 22 in the front-rear direction relative to the attachment piece 23 (and thus the holding portion 12) is changed.

[0044] In the illustrated example, a scale 252d is provided on the mounting member 252c along the extension direction of the screw shaft 252a (i.e., the front-rear direction), and a mark 252e is provided on the nut member 252b to indicate its own position on the scale 252d. In this case, the value on the scale 252d where the mark 252e is located represents the position of the support frame 22 in the front-rear direction relative to the mounting piece 23 (i.e., the position of the abutting member 21 in the front-rear direction relative to the holding portion 12). Therefore, the operator can easily adjust the position of the abutting member 21 in the front-rear direction relative to the holding portion 12 by operating the handle 251 while reading the value on the scale 252d where the mark 252e is located.

[0045] <2. Target devices> The target equipment to which the container transfer device 100 transfers (hands over or receives) the storage container 9 may be any equipment. As an example, the target equipment may be a load port 82. Here, the load port 82, which is an example of the target equipment, will be described with reference to FIG. 5. FIG. 5 is a diagram schematically showing a transfer system SY configured to include the container transfer device 100 and the load port 82.

[0046] (Load port 82 configuration) The load port 82 is an interface for loading and unloading the substrate 90 into and from the storage vessel 9, and is provided, for example, in the EFEM 8. That is, the EFEM 8 has a configuration in which one or more load ports 82 are connected to a transfer chamber 81 that houses a transfer robot (not shown). The EFEM 8 (specifically, the transfer chamber 81) is provided and connected to a processing device (not shown) that performs various processes on the substrate 90.

[0047] The load port 82 includes a base plate 821. The base plate 821 is a flat member (panel member) that is in an upright position and is attached to the wall of the transfer chamber 81 so as to close an opening formed in the wall of the transfer chamber 81, and constitutes a part of the transfer chamber 81 together with the wall.

[0048] A base 821a is provided on one main surface of the base plate 821. The base 821a is a rigid part that, together with the base plate 821, constitutes the frame of the load port 82. A mounting portion 822 is provided on the base 821a. That is, the base 821a serves as a support frame that supports the mounting portion 822. The mounting portion 822 is a flat member, and the storage vessel 9 is mounted on an upper surface (mounting surface) 822a thereof. Specifically, the storage vessel 9 is mounted on the mounting portion 822 with the lid 92 facing the base plate 821. The mounting surface 822a is provided with positioning pins that position the storage vessel 9 at a predetermined position on the mounting surface 822a, locking claws that fix the storage vessel 9 in that position, a gas supply unit that supplies gas into the mounted storage vessel 9, a gas exhaust unit that exhausts gas from the mounted storage vessel 9, and the like. Further, a drive mechanism (not shown) is connected to the placement portion 822, which moves the placement portion 822 along the upper surface of the base 821a in a direction toward or away from the base plate 821.

[0049] An opening 821b is provided in the main surface of the base plate 821 at a position facing the lid 92 of the storage container 9 placed on the placement portion 822. A door portion 823 is provided to close the opening 821b. A drive mechanism (not shown) is connected to the door portion 823, which moves the door portion 823 between a closed position (a position where the door portion 823 closes the opening 821b) and an open position (a position where the door portion 823 opens the opening 821b). The door portion 823 is also provided with a lid holding mechanism (not shown). The lid holding mechanism connects and integrates the door portion 823 and the lid 92, thereby holding the lid 92 on the door portion 823. The lid holding mechanism also latches and releases the container body 91 and the lid 92.

[0050] (Load port 82 operation) An example of the operation of the load port 82 will now be described. When the storage container 9 carried by the container transfer device 100 is placed on the placement section 822, the placed storage container 9 is positioned at a predetermined position on the placement surface 822a by, for example, a positioning pin and fixed in that position by a locking claw. Thereafter, gas is supplied into the storage container 9 through the gas supply section, and the gas inside the storage container 9 is discharged through the gas discharge section, as necessary.

[0051] Next, the placement portion 822 is moved in a direction approaching the base plate 821, and the storage container 9 placed on the placement portion 822 comes into contact with the base plate 821, for example. Specifically, for example, the jaw portion of the container body 91 onto which the lid 92 is fitted comes into contact with the portion of the base plate 821 surrounding the opening 821b. At this stage, the door portion 823 is disposed in the closed position. Therefore, by moving the placement portion 822 in a direction approaching the base plate 821, the lid 92 of the storage container 9 is brought sufficiently close to the door portion 823 that closes the opening 821b. Next, the lid 92 is connected to the door portion 823, and after the latch between the lid 92 and the container body 91 is released, the door portion 823 is moved together with the lid 92 from the closed position to the open position. As a result, the lid 92 is removed from the container body 91, and the interior of the container body 91 communicates with the interior of the transfer chamber 81.

[0052] Thereafter, the substrate 90 stored in the container body 91 is taken out by a transfer robot disposed in the transfer chamber 81 and carried into the processing device. Furthermore, the substrate 90 that has been processed in the processing device is stored in the container body 91 by the transfer robot.

[0053] When a predetermined number of substrates 90 have been stored in the container body 91, the door part 823 is moved from the open position to the closed position together with the lid 92. This attaches the lid 92 to the container body 91, and the interior of the container body 91 is isolated and closed from the interior of the transfer chamber 81. Next, a latch is applied between the lid 92 and the container body 91, and the connection between the lid 92 and the door part 823 is released. Thereafter, the placement part 822 is moved in a direction away from the base plate 821, and the storage container 9 placed on the placement part 822 is received by the container transfer device 100 and carried away.

[0054] <3. Operation of the container transport device> The operation of the container conveying device 100 will be described with reference to Figures 6 to 10. Figures 6 to 9 are diagrams for explaining the operation of the container conveying device 100. Figure 10 is a diagram for explaining how the holder 12 is raised and lowered.

[0055] (a) Adjustment of the position of the contact member 21 Before the container conveying device 100 starts conveying the storage container 9, the position of the abutting member 21 in the front-to-rear direction relative to the main body 1 is adjusted. Specifically, the operator operates the handle 251 to adjust the position of the abutting member 21 in the front-to-rear direction relative to the main body 1 (specifically, the holding part 12).

[0056] The position of the abutting member 21 is adjusted so that, when the abutting member 21 abuts against the target device to which the storage container 9 is to be handed over from the front-to-rear direction, the main body 1 is located at a delivery position P in the front-to-rear direction (i.e., the abutting member 21 abuts against the target device from the front-to-rear direction, so that the main body 1 is positioned at the delivery position P in the front-to-rear direction). Note that the "delivery position P" is the position at which the main body 1 should be located when the storage container 9 is handed over to the target device.

[0057] As an example, the transfer position P is a position where, when the main body 1 is placed there, the holding position of the containment vessel 9 by the holder 12 and the placement position of the containment vessel 9 on the target equipment (when the target equipment is the load port 82, the placement surface 822a) overlap when viewed from above (FIGS. 7 and 8). In this case, the front-rear direction position of the abutting member 21 with respect to the holder 12 is adjusted so as to correspond to the relative positional relationship in the front-rear direction between the placement position on the target equipment and the abutted portion (the portion with which the abutting member 21 abuts). Needless to say, if the type or model number of the target equipment is different, the relative positional relationship between the placement position and the abutted portion is likely to be different. Therefore, whenever the type or model number of the target equipment to which the containment vessel 9 is actually transferred changes, the position of the abutting member 21 is changed (readjusted) as necessary. Conversely, by changing the position of the abutting member 21 depending on the type or model number of the target equipment, it is possible to accommodate various target equipment of different types and model numbers.

[0058] (b) When transferring the containment vessel 9 The operation of the container transfer device 100 when transferring the storage container 9 to the target device (the load port 82 in the following description) will be described.

[0059] In this case, the container transfer device 100 (specifically, the main body 1) is steered and moved by the operator while holding the storage container 9 to be delivered to the load port 82 with the holder 12, and travels on the floor to the installation position of the EFEM 8. Once moved to the vicinity of the installation position of the EFEM 8, the main body 1 is steered and moved by the operator to a position (opposing position) Pi facing the load port 82 to which the storage container 9 is to be delivered in the front-to-rear direction ( FIG. 6 ). Here, the "opposing position Pi" overlaps with the delivery position P in the left-to-right direction and is a position behind the delivery position P in the front-to-rear direction. In other words, at this stage, the container transfer device 100 is aligned with the delivery position P in the left-to-right direction. The operator can simultaneously view the main body 1 and the load port 82 from behind. Therefore, it is considered that alignment in the left-to-right direction is easier for the operator than alignment in the front-to-rear direction, and the operator can relatively easily position the main body 1 at the opposing position Pi.

[0060] For example, to lower the center of gravity of the main body 1 while traveling to the facing position Pi, the holder 12 that holds the storage container 9 may be positioned at a sufficiently low position (lower position) K0. In this case, for example, when the main body 1 is positioned at the facing position Pi, the holder 12 is raised from the lower position K0 to a higher first position K1. The first position K1 is a position where the lower surface of the storage container 9 held by the holder 12 is higher than the mounting surface 822a ( FIG. 10( a) ). As an example, the first position K1 is a position where the clearance between the holder 12 and the mounting portion 822 is 15 mm or more (particularly preferably 20 mm or more). Here, the dimensions of the attachment piece 23, the dimensions of the abutting member 21, and the like are specified so that, when the holder 12 is positioned at the first position K1, the abutting member 21 attached to the holder 12 at least partially overlaps with the base 821a in the height direction (i.e., when viewed along the front-rear direction).

[0061] Next, the main body 1 is pushed forward by the operator and moved forward. As the operator pushes the main body 1 forward to move it forward, at a certain stage the abutting member 21 abuts against (butts against) the base 821a of the load port 82. Here, the position of the abutting member 21 in the front-rear direction relative to the main body 1 is adjusted so that, with the abutting member 21 abutting against the base 821a from the front-rear direction, the main body 1 is located at the delivery position P in the front-rear direction (i.e., the abutting member 21 abuts against the base 821a from the front-rear direction, so that the main body 1 is positioned at the delivery position P in the front-rear direction). Therefore, the operator stops the main body 1 when he or she feels a resistance that the abutting member 21 abuts against the base 821a. As a result, the main body 1 is located at the delivery position P (FIG. 7). If the main body 1 were not provided with a position restriction member 2, the operator would have to rely on visual inspection to locate the main body 1 at the delivery position P so that it would be close to the load port 82 but not in contact with it. To do this, the operator would have to move the main body 1 forward a short distance, stop it, go around to the front of the main body 1, and visually check the distance to the load port 82, a task he or she would have to repeat multiple times. If the main body 1 were provided with a position restriction member 2, the operator could locate the main body 1 at the delivery position P by feel rather than by sight. In other words, the operator could easily locate the main body 1 at the delivery position P by feel alone, without having to go around to the front of the main body 1.

[0062] Here, when the main body 1 is disposed at the delivery position P, the holding position of the storage container 9 by the holder 12 overlaps with the placement surface 822a when viewed from above. At this stage, the holder 12 is disposed at the first position K1, and therefore the storage container 9 held by the holder 12 is disposed directly above the placement surface 822a. When the main body 1 is disposed at the delivery position P, the holder 12 is lowered from the first position K1 to a lower second position K2 (FIG. 8). The second position K2 is a position where the bottom portion 121b of the extension portion 121 is lower than the placement surface 822a and higher than the upper surface of the base 821a (FIG. 10(b)). Therefore, while the holder 12 is being lowered from the first position K1 to the second position K2, the storage container 9 held by the holder 12 is transferred to the placement portion 822. However, the width of the mounting portion 822 in the left-right direction is smaller than the width of the storage container 9 in the left-right direction, and is also smaller than the distance between the bottom portions 121b of the pair of extending portions 121, 121 of the holding portion 12. Therefore, the bottom portion 121b of one extending portion 121 is disposed on the right side of the mounting portion 822, and the bottom portion 121b of the other extending portion 121 is disposed on the left side of the mounting portion 822, so that the holding portion 12 can be disposed at the second position K2 without interfering with the mounting portion 822.

[0063] Thereafter, the main body 1 is pulled backward by the operator, moved backward, and placed again at the facing position Pi (FIG. 9). After being placed at the facing position Pi, the holding part 12 may be lowered to the lower position K0 in order to lower the center of gravity of the main body 1. Thereafter, the main body 1 is moved while being steered by the operator, and travels on the floor to be moved to the next destination, etc.

[0064] (c) When receiving the containment vessel 9 Next, the operation of the container transfer device 100 when receiving the storage container 9 from the load port 82 will be described.

[0065] In this case, the container transfer device 100 (specifically, the main body 1) is moved while being steered by the operator to travel on the floor and is moved to the installation position of the EFEM 8. Once moved to the vicinity of the installation position of the EFEM 8, the main body 1 is moved while being steered by the operator to be placed at an opposing position Pi that faces the load port 82 that is to receive the storage container 9 in the front-to-rear direction (FIG. 9).

[0066] For example, the holding unit 12 may be disposed at the lower position K0 while traveling to the opposing position Pi. In this case, for example, when the main body 1 is disposed at the opposing position Pi, the holding unit 12 is raised from the lower position K0 to a higher second position K2. Here, the dimensions of the attachment piece 23, the dimensions of the abutment member 21, and the like are specified so that the abutment member 21 attached to the holding unit 12 at least partially overlaps with the base 821a in the height direction even when the holding unit 12 is disposed at the second position K2 (i.e., when the holding unit 12 is disposed within the height range from the first position K1 to the second position K2).

[0067] Next, the main body 1 is pushed forward by the operator and moved forward. As the operator pushes the main body 1 forward to move it forward, at a certain stage the abutment member 21 abuts against the base 821a of the load port 82. When the operator feels a sense of resistance as the abutment member 21 abuts against the base 821a, he stops the main body 1. As a result, the main body 1 is placed at the delivery position P (FIG. 8).

[0068] As described above, here, when the main body 1 is disposed at the delivery position P, the holding position of the storage container 9 by the holder 12 overlaps with the placement surface 822a when viewed from above. At this stage, the holder 12 is disposed at the second position K2, and therefore the bottom portion 121b of one extension portion 121 is disposed to the right of the placement portion 822, and the bottom portion 121b of the other extension portion 121 is disposed to the left of the placement portion 822 ( FIG. 10(b) ). In other words, the bottom portion 121b of one extension portion 121 is disposed below the portion of the storage container 9 placed on the placement portion 822 that protrudes to the right of the placement portion 822, and the bottom portion 121b of the other extension portion 121 is disposed below the portion of the storage container 9 placed on the placement portion 822 that protrudes to the left of the placement portion 822. Therefore, when the main body 1 is placed at the delivery position P, the holder 12 is raised from the second position K2 to a higher first position K1 (FIG. 7). As described above, the first position K1 is a position where the lower surface of the storage container 9 held by the holder 12 is higher than the placement surface 822a (FIG. 10(a)). Therefore, while the holder 12 is being raised from the second position K2 to the first position K1, the storage container 9 placed on the placement portion 822 is transferred to the holder 12.

[0069] Thereafter, the main body 1 is pulled backward by the operator, moved backward, and placed again at the facing position Pi (FIG. 6). After being placed at the facing position Pi, the holding part 12 may be lowered to the lower position K0 in order to lower the center of gravity of the main body 1. Thereafter, the main body 1 is moved while being steered by the operator, and travels on the floor to be moved to the next destination, etc.

[0070] <4. Effects> The container conveyance device 100 according to the above embodiment includes a main body 1 and a position restricting member 2 attached to the main body 1. The main body 1 includes a carriage 11 having running wheels 112a and a holder 12 that holds a storage container 9. The position restricting member 2 also includes a contact member 21 that contacts a target device (e.g., a load port 82) to which the storage container 9 is to be transferred from a predetermined direction (e.g., the front-rear direction) to position the main body 1 at a transfer position P (i.e., the transfer position P where the main body 1 should be located when transferring the storage container 9 to and from the target device). This configuration allows the main body 1 to be easily positioned relative to the target device by contacting the contact member 21 with the target device from the front-rear direction (specifically, for example, by an operator pushing the main body 1 to bring it closer to the target device from the front-rear direction and stopping the main body 1 when the operator feels a sense of the contact member 21 contacting the target device). Furthermore, with this configuration, when the main body 1 is brought close to the target device from the front-rear direction, the abutment member 21 first abuts (butts against) the target device, so the main body 1 does not come into contact with the target device. Therefore, it is possible to prevent the main body 1 from coming into contact with the target device and causing damage.

[0071] Furthermore, in the above embodiment, the position restriction member 2 includes a position changer 25 that changes the position of the abutting member 21 relative to the main body 1 in the front-rear direction. With this configuration, it is possible to change the position at which the main body 1 is positioned relative to the target device by changing the position of the abutting member 21 relative to the main body 1. For example, by changing the position of the abutting member 21 depending on the type or model number of the target device, it is possible to appropriately position the main body 1 relative to various target devices of different types or model numbers.

[0072] Furthermore, in the above embodiment, the position change unit 25 includes a handle 251 that rotates in response to an external operation, and a conversion mechanism 252 that converts the rotation of the handle 251 into linear movement in the forward and backward directions of the contact member 21. With this configuration, the operator can change the position of the contact member 21 relative to the main body 1 (and thus the position at which the main body 1 is positioned relative to the target device) by operating the handle 251.

[0073] Furthermore, in the above embodiment, when the target device is a load port 82 having a mounting portion 822 on which the storage container 9 is placed and a base 821a that supports the mounting portion 822, the abutting member 21 abuts against the base 821a. The base 821a is a rigid part that constitutes the frame of the load port 82, and therefore is unlikely to be damaged even when the abutting member 21 abuts against the base 821a, and the base 821a is not pushed by the abutting member 21 and becomes misaligned. Therefore, by abutting the abutting member 21 against the base 821a, the main body 1 can be positioned safely and accurately with respect to the load port 82.

[0074] In the above embodiment, the main body 1 includes an elevation drive unit 13 that raises and lowers the holding unit 12, and the position restriction member 2 is attached to the holding unit 12. With this configuration, when the abutment member 21 is in contact with the target device, the holding unit 12 is positioned with sufficient precision relative to the target device, so that the storage container 9 can be properly handed over to and from the target device.

[0075] Furthermore, in the above embodiment, the abutment member 21 is supported via the rail portion 24 so as to be freely movable in the front-rear direction relative to the holding portion 12. Therefore, for example, even in a configuration in which the position change portion 25 is provided on only one side of the abutment member 21, the abutment member 21 can be stably moved in the front-rear direction while maintaining its posture (specifically, while maintaining a posture in which the surface of the abutment member 21 that abuts against the target device is normal to the front-rear direction).

[0076] <4. Modifications> <4-1. First modified example> A position restricting member 2a according to a first modified example will be described with reference to Fig. 11. Fig. 11 is a view of the position restricting member 2a mounted on the container conveying device 100 as seen from the right side. Note that, in the following, differences from the above embodiment will be described, and explanations of points that do not differ from the above embodiment will be omitted. Furthermore, the elements described in the above embodiment will be denoted by the same reference numerals.

[0077] The position restricting member 2a includes a contact member 21, a support frame 22, an attachment piece 23, a rail portion 24, and a position changing portion 25a. The position restricting member 2a differs from the position restricting member 2 according to the above embodiment in the configuration of the position changing portion 25a.

[0078] The position changer 25a changes the front-rear position of the support frame 22 (and thus the abutment member 21) relative to the holding portion 12. The position changer 25a is provided, for example, on only one side of the support frame 22 (the right side in the illustrated example).

[0079] Specifically, the position change section 25a includes, for example, a pin fixing structure 253. The pin fixing structure 253 includes a first perforated plate 253a, a second perforated plate 253b, and a pin member 253c. The first perforated plate 253a is a long plate-like member that is oriented such that its longitudinal direction is along the front-rear direction and its thickness direction is along the left-right direction, and is attached to the support frame 22 (specifically, the arm plate portion 222). The first perforated plate 253a has a plurality of holes (first hole portion) D1 that penetrate in the thickness direction and are arranged along the extension direction. On the other hand, the second perforated plate 253b is a substantially rectangular plate-like member that is oriented such that its thickness direction is along the left-right direction, and is attached to the attachment piece 23 (specifically, the second plate portion 232). The second perforated plate 253b has, for example, one hole (second hole portion) D2 that penetrates in the thickness direction. The second perforated plate 253b is arranged to overlap the first perforated plate 253a in the left-right direction, and the second hole portion D2 overlaps with one of the multiple first hole portions D1, and a pin member 253c is arranged to pass through the overlapping second hole portion D2 and first hole portion D1 in order.

[0080] In this configuration, the position of the support frame 22 in the front-to-rear direction relative to the attachment piece 23 (and therefore the holding portion 12) is changed by changing the first hole portion D1 through which the pin member 253c is inserted (i.e., the first hole portion D1 that overlaps with the second hole portion D2). For example, with the pin member 253c removed, the operator grasps the support frame 22 and moves it in the front-to-rear direction relative to the holding portion 12 to place the abutting member 21 at a desired position, and then inserts the pin member 253c sequentially through the second hole portion D2 and the first hole portion D1, which overlap each other at that time. This changes the position of the support frame 22 in the front-to-rear direction relative to the attachment piece 23 and fixes it. That is, the position of the abutting member 21 in the front-to-rear direction relative to the holding portion 12 is changed and fixed to the desired position.

[0081] <4-2. Second modified example> A position restricting member 2b according to the second modified example will be described with reference to Fig. 12. Fig. 12 is a view of the position restricting member 2b mounted on the container conveying device 100 as seen from the right side.

[0082] The position restricting member 2b includes a contact member 21, a support frame 22, an attachment piece 23, a rail portion 24, and a position changing portion 25b. The position restricting member 2b differs from the position restricting member 2 according to the above embodiment in the configuration of the position changing portion 25b.

[0083] The position changer 25b changes the position of the support frame 22 (and thus the abutment member 21) in the front-rear direction relative to the holding portion 12. The position changer 25b is provided, for example, on only one side of the support frame 22 (the right side in the illustrated example).

[0084] Specifically, the position changer 25b includes, for example, an interlocking structure 254. The interlocking structure 254 includes a first interlocking plate 254a and a second interlocking plate 254b. The first interlocking plate 254a is a long, plate-like member that is attached to the support frame 22 (specifically, the arm plate portion 222) with its lengthwise direction aligned with the front-rear direction and its thickness direction aligned with the left-right direction. The first interlocking plate 254a is provided, on its downward-facing surface when attached to the arm plate portion 222, with a wave-shaped portion (first wave-shaped portion) M1 in which protrusions (for example, protrusions with a V-shaped cross section) extending in the width direction (left-right direction) repeatedly appear along the extending direction (front-rear direction). Meanwhile, the second interlocking plate 254b is also a long, plate-like member, and is attached to the mounting piece 23 (specifically, the second plate portion 232) with its lengthwise direction aligned with the front-rear direction and its thickness direction aligned with the left-right direction. The second interlocking plate 254b has, on its surface facing upward when attached to the second plate portion 232, a wave-shaped portion (second wave-shaped portion) M2, in which protrusions (for example, protrusions with a V-shaped cross section) extending in the width direction (left-right direction) repeatedly appear along the extension direction (front-rear direction). However, the second interlocking plate 254b is positioned at a height that allows the second wave-shaped portion M2 to interlock with the first wave-shaped portion M1 provided on the first interlocking plate 254a.

[0085] In this configuration, the position of the support frame 22 in the front-rear direction relative to the attachment piece 23 (and thus the holding portion 12) is changed by changing the position at which the first corrugated portion M1 and the second corrugated portion M2 engage. For example, if the operator grasps the support frame 22 and pulls it strongly forward (or pushes it strongly backward), the first corrugated portion M1 and the second corrugated portion M2 elastically deform, changing the position at which they engage. When the operator stops pulling (or pushing) the support frame 22 once the abutment member 21 is positioned at the desired position, the position of the support frame 22 in the front-rear direction relative to the attachment piece 23 is fixed at the position at which the first corrugated portion M1 and the second corrugated portion M2 engage. In other words, the position of the abutment member 21 in the front-rear direction relative to the holding portion 12 is changed and fixed to the desired position.

[0086] <4-3. Other variations> In the above embodiment, the configuration of the position restriction member 2 can be modified as appropriate. For example, the position change unit 25 may be provided on the left side of the support frame 22 instead of the right side, or on both the right and left sides of the support frame 22. The number of rail units 24 provided on each of the left and right sides of the support frame 22 can be modified as appropriate. The rail units 24 do not necessarily have to be provided on both sides of the support frame 22; for example, the rail unit 24 may be omitted on the side where the position change unit 25 is provided. The handle 251 may also be located behind the lifting shaft 131. This configuration makes it easier for the operator to operate the handle 251.

[0087] As described in the above embodiment, if the type, model number, etc. of the target device differs, the position where the abutting member 21 should be placed is likely to differ, and each time the type, model number, etc. of the target device to which the containment vessel 9 is actually transferred changes, the position of the abutting member 21 is changed (readjusted) as necessary. Therefore, for example, labels indicating the types and model numbers of multiple target devices that may be candidates may be affixed to the scale 252d, and the operator may adjust the position of the abutting member 21 by operating the handle 251 so that the mark 252e provided on the nut member 252b is positioned at the position of the label indicating the type and model number of the target device to which the containment vessel 9 is actually transferred.

[0088] In the above embodiment, the position of the abutting member 21 relative to the main body 1 may be configured to be changeable in directions other than the front-rear direction. For example, the position of the abutting member 21 relative to the main body 1 may be configured to be changeable in the left-right direction. Furthermore, for example, the position of the abutting member 21 relative to the main body 1 may be configured to be changeable in the vertical direction.

[0089] In the above embodiment, for example, when the target device to which the storage container 9 is actually handed over is determined (fixed), the position change unit 25 and the rail unit 24 may be omitted. In other words, the abutment member 21 may be fixed so as not to move in the front-rear direction relative to the main body 1.

[0090] In the above embodiment, the position restricting member 2 does not necessarily have to be attached to the holding portion 12. For example, the position restricting member 2 may be attached to the carriage 11.

[0091] In the above embodiment, the abutting member 21 may abut any part of the target device. For example, if the target device is a load port 82, the abutting member 21 may abut against the base plate 821.

[0092] In the above embodiment, the cart 11 may be provided with a mechanism for fixing the cart 11 to the floor surface (for example, a brake that fixes the cart 11 by friction when pressed against the floor surface, a lock that stops the rolling of the running wheels 112a, etc.). In this case, the cart 11 may be fixed to the floor surface with the main body 1 disposed at the delivery position P.

[0093] Although the container transport device 100 according to the above embodiment is described as a device (a so-called PGV) that is steered and moved by an operator and travels on a floor, the container transport device may also be a device (a so-called AGV or autonomous mobile robot) that travels on a floor by receiving a supply of power or the like. In this case, the carriage 11 is equipped with a drive unit that drives the running wheels 112a, and the drive unit drives the running wheels 112a under the control of the control unit 14, thereby controlling the travel direction and travel speed of the container transport device. The drive unit may include, for example, a drive source (e.g., a motor) that receives a supply of power from a power source (e.g., a battery) and generates a driving force, a mechanism (e.g., a gear mechanism) that transmits the driving force generated by the drive source to the running wheels 112a and rotates them about a rotation axis and rolls them about an axle, and the like. If the container transport device is a so-called AGV or an autonomous mobile robot, a sensor may be further provided to detect when the abutment member 21 abuts against the target equipment, and when the sensor detects that the abutment member 21 has abutted against the target equipment, the control unit 14 may stop the rolling of the running wheel 112a (i.e., stop the container transport device).

[0094] In the above embodiment, the target equipment to which the container conveying device 100 transfers the storage container 9 does not necessarily have to be the EFEM 8. For example, the target equipment may be a stocker in which the storage container 9 is stocked, a buffer station in which the storage container 9 is temporarily placed, or the like. Specifically, the stocker, buffer station, or the like may include, for example, a shelf (rack) on which the storage container 9 is placed. As an example, the shelf includes a shelf plate arranged in a horizontal position and a base provided on the shelf plate, and the storage container 9 is placed on the base. In this case, to enable the holder 12 to be lowered to a position lower than the upper surface (mounting surface) of the base without interfering with the base, the width of the base in the left-right direction is smaller than the width of the storage container 9 in the left-right direction and also smaller than the distance between the bottom portions 121b of the pair of extension portions 121, 121 of the holder 12. When the target equipment includes a shelf, the abutting member 21 may abut against, for example, a side surface of the shelf plate. That is, the position of the abutting member 21 may be adjusted so that the main body 1 is disposed at the delivery position P in the front-to-rear direction when the abutting member 21 is in contact with the shelf from the front-to-rear direction. For example, if the shelf is provided in multiple stages, the holder 12 is raised and lowered to a height corresponding to the shelf to which the storage container 9 is to be delivered, and if the position restricting member 2 is attached to the holder 12, the position restricting member 2 also rises and falls together with the holder 12. Therefore, regardless of which of the shelves at different heights the holder 12 delivers the storage container 9 to, the abutting member 21 can be brought into contact with the shelf (and thus the main body 1 can be positioned relative to the shelf).

[0095] In the above embodiment, the substrates 90 stored in the storage container 9 may be, for example, semiconductor wafers, wafers held in tape frames (tape frame wafers), rectangular substrates, etc. Furthermore, the storage container 9 does not necessarily have to be a FOUP, and may be, for example, a FOSB, a cassette, etc.

[0096] Other configurations can also be modified in various ways without departing from the spirit of the present invention. [Explanation of symbols]

[0097] 100 Container conveying device 1 Main body 11 Cart 111 Foundation 112 Caster 112a Running wheel 12 Holding part 121 Extending part 122 Proximal part 13 Lifting drive unit 14 Control Unit 2, 2a, 2b Position control member 21 Contact member 22 Support Frame 23 Mounting piece 24 Rail section 25, 25a, 25b Position change section 251 Handle 252 Conversion Mechanism 8 EFEM 81 Transfer chamber 82 Loading Port 821 Base Plate 821a base 822 Placement section 822a Placement surface 9. Containment vessel

Claims

1. A container transport device that transports a storage container in which substrates are stored, a main body including a carriage having running wheels and a holding part that holds the storage vessel; a position restriction member attached to the main body; Equipped with The position restriction member is an abutment member that abuts against a target device to which the storage container is to be transferred from a predetermined direction, thereby positioning the main body at a transfer position where the main body should be placed when the storage container is transferred between the main body and the target device; A container transport device comprising:

2. 2. The container transport device according to claim 1, The position restriction member is a position changing unit that changes the position of the contact member relative to the main body in the predetermined direction; A container transport device comprising:

3. 3. The container transport device according to claim 2, The position change unit: A handle that rotates in response to external operation, a conversion mechanism that converts the rotation of the handle into a linear movement of the contact member in the predetermined direction; A container transport device comprising:

4. 4. The container transport device according to claim 1, When the target equipment is a load port having a mounting section on which the storage container is mounted and a base supporting the mounting section, the abutment member abuts against the base. A container transport device comprising:

5. 4. The container transport device according to claim 1, The main body portion is an elevation drive unit that raises and lowers the holding unit; Equipped with The position restriction member is attached to the holding portion. A container transport device comprising:

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