Dryers and battery processing equipment

Abstract

The present application discloses a dryer and a battery processing equipment, the dryer is used for drying and crystallizing a material, the dryer includes a vacuum chamber, a crystallization chamber and a heating device, the vacuum chamber forms a first cavity for vacuum drying the material, a second chamber is formed in the crystallization chamber, the first cavity and the second cavity respectively have an input end and an output end, the output end of the first cavity communicates with the input end of the second cavity, such that the first cavity communicates with the second cavity to form a continuous material passage, and a heating device is provided in the crystallization chamber for heating and crystallizing the material in the second cavity.

Description

[Technical field]

[0001] This application relates to the field of solar cell processing, and specifically to dryers and cell processing equipment. [Background technology]

[0002] In the process of processing materials, it is necessary to constantly dry the materials. Generally, the materials are directly fed into the inside of a heating device, and the materials contain volatile solvents, so the process window requirements during the drying process are strict, and problems such as low process reproducibility and stability and reduced product uniformity are likely to occur, which is disadvantageous to large-scale production. Summary of the Invention

[0003] The main objective of the present application is to provide a dryer that aims to solve the problem of poor product uniformity due to the small process window present in conventional dryers.

[0004] In order to achieve the above object, the present application provides a dryer for drying and crystallizing a material, the dryer comprising: a vacuum chamber forming a first cavity for vacuum drying the material; a crystal chamber forming a second cavity, the first cavity and the second cavity each having an input end and an output end, the output end of the first cavity communicating with the input end of the second cavity such that the first cavity communicates with the second cavity to form a continuous material passageway; and a heating device disposed in the crystallization chamber for heating and crystallizing the material in the second cavity.

[0005] By forming a material passage by setting up the first and second cavities, the material is first vacuum-dried in the first cavity, and the volatile solvent in the material is evaporated, so that the material is formed into a relatively stable intermediate state. The continuous material passage does not introduce foreign matter during the vacuum drying and heating crystallization processes, which helps to improve the quality of the product.

[0006] In some examples, the dryer comprises: The apparatus further includes a gas exhaust having an inlet end communicating with the first cavity for exhausting gas within the first cavity.

[0007] When the material is vacuum dried in the first cavity, the volatile solvent in the material evaporates, and the volatile solvent is discharged by the gas exhaust device to maintain the first cavity in a predetermined dry state and prevent the volatile solvent from adversely affecting the material.

[0008] In some examples, the gas discharger further has an outlet end communicating with the second cavity. The gas discharger can be used to suck the volatile solvent in the first cavity into the second cavity, thereby realizing the control of the atmosphere in the second cavity, thereby making the crystallization effect relatively controllable.

[0009] In some examples, the gas discharge device further comprises an outlet end, and the dryer further comprises: A temporary storage device having an inlet end, the outlet end of the gas exhaust device communicating with the inlet end of the temporary storage device.

[0010] By temporarily storing the volatile solvent discharged from the first cavity in a temporary storage device, the volatile solvent can be easily collected and reused, thereby improving the utilization rate of the raw material.

[0011] In some examples, the temporary storage device further has an outlet end in fluid communication with the second cavity.

[0012] By secondary transporting the gas in the temporary storage device to the second cavity, when performing the heating crystallization process, the atmosphere in the second cavity can be adjusted to maintain the same atmosphere during the drying and crystallization of the material, thereby improving the quality of the product.

[0013] In some examples, the first cavity and / or the second cavity are closable cavities. By employing a closable cavity, control over process parameters can be easily achieved, thereby making the reaction process of materials more controllable.

[0014] In some examples, the dryer comprises: a first transition chamber forming a first transition cavity having an input end and an output end; An output end of the first cavity is connected to an input end of the first transition cavity, an output end of the first transition cavity is connected to an input end of the second cavity, and the first cavity, the first transition cavity and the second cavity form the material passage.

[0015] A first transition chamber is provided which cooperates with the vacuum chamber and is used to reduce the air pressure between the vacuum chamber and the crystallization chamber to facilitate the transfer of material into the crystallization chamber.

[0016] In some examples, the first transition cavity is a closable cavity. Forming a closable cavity can provide control and adjustment of process parameters. The first transition cavity can be used to provide a seal between the first cavity and the second cavity to facilitate control of process parameters of the first cavity and the second cavity.

[0017] In some examples, the first transition cavity includes a plurality of first transition subcavities that are sequentially connected, such that a first transition subcavity adjacent to the first cavity is connected to an output end of the first cavity, and a first transition subcavity adjacent to the second cavity is connected to an input end of the second cavity.

[0018] By providing multiple first transition sub-cavities, parameters such as air pressure and / or temperature of each first transition sub-cavity can be set as needed, so that the first transition chamber can provide a transition effect between the vacuum chamber and the crystallization chamber, facilitating the transport of material and allowing the material to transition between the two processes to improve the drying effect of the material.

[0019] In some examples, the dryer comprises: A vacuum device having an inlet end communicating with the first cavity is further included.

[0020] By providing a vacuum device in the dryer, the gas in the first cavity can be easily exhausted as required, thereby creating the necessary negative pressure state in the first cavity.

[0021] In some examples, the inlet end of the vacuum apparatus also communicates with the first transition cavity.

[0022] The vacuum device is used to draw a vacuum in the first transition cavity so as to create a certain degree of negative pressure in the first transition cavity, thereby bringing the pressure in the first transition cavity and the first cavity closer together and facilitating the opening of the seal member between the first transition chamber and the vacuum chamber.

[0023] In some examples, the inlet end of the vacuum device communicates with a first transition subcavity adjacent to the first cavity such that the air pressure in the first transition subcavity adjacent to the first cavity can approach the air pressure of the first cavity, thereby providing an air pressure transition from the first cavity to the second cavity.

[0024] In some examples, the dryer comprises: The vacuum drying apparatus further includes a second transition chamber in which a second transition cavity for vacuum drying a material is formed, the second transition cavity having an input end and an output end, the output end of the second transition cavity communicating with the input end of the first cavity, and the second transition cavity, the first cavity, the first transition cavity and the second cavity forming the material passage.

[0025] By providing a second transition chamber, a transition can be formed at the input end of the first cavity, thereby facilitating control of process parameters of the first cavity.

[0026] In some examples, the dryer comprises: A vacuum device having an inlet end communicating with the second transition cavity is further included.

[0027] By discharging the gas in the second transition cavity with a vacuum device, the second transition cavity becomes a transition cavity between the input end of the first cavity and the outside, so that the first cavity can be easily opened.

[0028] In some examples, the heating device comprises: A first heater is provided in the crystallization chamber for heating and crystallizing the material in the second cavity.

[0029] By providing the first heater and using the rapid heating feature of the first heater, rapid heating of the material can be realized, and rapid thermal crystallization of the material can be achieved.

[0030] In some examples, the dryer comprises: The heating device further includes a conveying device provided in the material passage, the conveying device being formed with a conveying table on which the material is placed, the first heater being an optical heater, and the first heater having a light-emitting side facing the conveying table.

[0031] By providing the first heater facing the transfer table, it is possible to effectively improve the heating efficiency and improve the light utilization rate of the first heater.

[0032] In some examples, there are a plurality of the first heaters, and the plurality of first heaters are distributed at intervals.

[0033] By providing a plurality of first heaters, it is possible to realize a rapid temperature rise in the second cavity and improve the heating efficiency.

[0034] In some examples, the heating device comprises: The crystallization chamber further includes a second heater, the second heater being a circulating heater for heating material in the second cavity.

[0035] The second heater is used to improve the heating efficiency of the second cavity so that the material can be heated quickly, and rapid thermal crystallization of the material can be achieved as required. The second heater provided in the second cavity can be used to realize temperature uniformity control in the second cavity, thereby improving the heating uniformity.

[0036] In some examples, the second heater is an optically transparent material.

[0037] The second heater is made of a light-transmitting material, which allows the position of the second heater to be easily determined as needed, allowing the material to be heated quickly, and allowing it to be installed in any position without affecting the normal use of the first heater.

[0038] In some examples, the second heater is disposed at least partially between the first heater and the material.

[0039] By heating the material from the same side by the first heater and the second heater, the material can be rapidly heated and crystallized.

[0040] In some examples, the second heater is located on a side of the material away from the first heater.

[0041] By heating the material from different directions using the first heater and the second heater, the heating efficiency of the material can be improved and the material can be rapidly heated and crystallized.

[0042] In some examples, the heating device comprises: The crystal chamber further includes a temperature equalization device for reflecting heat emitted by the first heater toward the material.

[0043] The light generated by the first heater is reflected toward the material through the temperature equalizing device to fully utilize the energy generated by the first heater, improve the energy utilization rate, and increase the heating efficiency of the material.

[0044] In some examples, there are a plurality of crystal chambers, each of the crystal chambers being provided with the second cavity, and each of the crystal chambers being provided with the heating device; A plurality of said crystal chambers are connected in series.

[0045] By providing multiple crystallization chambers, the efficiency of annealing and crystallization of materials can be improved through the cooperation of the multiple crystallization chambers. The temperature of the multiple crystallization chambers can be adjusted respectively to match the temperature of the multiple crystallization chambers with the annealing and crystallization temperature of the materials, and the quality of the products can be effectively improved.

[0046] In some examples, the dryer comprises: The material passage further includes a seal member disposed along the material passage for sealing a corresponding location of the material passage.

[0047] By dividing the dryer into multiple functional cavities and using sealing members to open and close the corresponding areas, the vacuum drying process and the heating crystallization process can be set up in relatively independent cavities, and the dryer and the crystallization chamber can operate independently, thereby improving the material processing efficiency and facilitating the control of process parameters for each of the two processes.

[0048] In some examples, the dryer is used to dry and crystallize perovskite battery materials.

[0049] Building on the dryer examples above, the present application further provides examples of battery processing equipment that include a dryer according to any one of the above examples.

[0050] By adopting the above-mentioned dryer to vacuum dry the material and then carrying out heating annealing crystallization, the material has a longer process window, improves the repeatability and stability of the material processing process, helps to improve the quality of the material, and further improves the quality of the solar cell products. [Brief description of the drawings]

[0051] In order to more clearly describe the technical solutions in the embodiments of the present application or the prior art, the drawings necessary for the description of the embodiments or the prior art are briefly described below. Obviously, the drawings in the following description are only some embodiments of the present application, and those skilled in the art can further obtain other drawings based on these drawings without any creative work. [Figure 1] FIG. 2 is a structural schematic diagram of an example of a dryer according to the present application. [Diagram 2] FIG. 2 is a structural schematic diagram of another example of a dryer according to the present application. [Diagram 3] 2a-2a cross-sectional view of FIG. 1. [Figure 4] FIG. 2 is a schematic diagram of the internal structure of another example of a dryer according to the present application.

[0052] The realization of the objectives, functional features and advantages of the present application will be further explained in conjunction with the examples and drawings. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0053] Hereinafter, the technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application. It is obvious that the described embodiments are only some of the embodiments of the present application, and are not all of the embodiments. All other embodiments obtained based on the embodiments of the present application without the need for creative efforts by those skilled in the art are all within the scope of protection of the present application.

[0054] It should be explained that in the embodiments of the present disclosure, when there are directional indications (e.g., up, down, left, right, front, back, etc.), the directional indications are merely for interpreting the relative positional relationships, movement conditions, etc. between each member in a certain posture (as shown in the figure), and if the certain posture changes, the directional indications will change accordingly.

[0055] When there is a description of "first" or "second" in the embodiments of the present application, the description of "first", "second", etc. is used for explanatory purposes only and should not be understood as indicating or implying the relative importance or the number of the indicated technical features. Therefore, a feature defined as "first", "second", etc. may include at least one of the features explicitly or implicitly. In addition, the technical solutions in each embodiment may be combined with each other, but this should be based on the feasibility of a person skilled in the art. When the combination of technical solutions is mutually contradictory or cannot be realized, it should be considered that such combination of technical solutions does not exist and is not included in the scope of protection claimed by the present application.

[0056] Perovskite materials have the characteristics of high optical absorption coefficient, high charge carrier mobility, large charge carrier diffusion length, and adjustable band gap, and can be applied to the production of semiconductor materials, especially solar cell materials, etc. At present, the methods for producing perovskite cells mainly include vacuum deposition, spray coating, printing, spin coating, etc., and in these production methods, solution methods are usually used to produce high-quality perovskite thin films, and high-quality calcium titanate thin films are formed to form solar cells with excellent performance.

[0057] When processing perovskite materials, in order to make the materials have better crystal quality and relatively fine grain size, the perovskite materials are usually placed in an annealing device to change the saturation of the solution through the annealing process, thereby crystallizing the perovskite.

[0058] Due to the volatile solvent dissolved in the solution, in the manufacturing process of perovskite materials, in some cases, during the process of placing the perovskite in an annealing furnace to heat it, the volatilization process of the volatile solvent is synchronous with the crystallization of the perovskite, making the process window time of the crystallization process very short, and the fault tolerance ability of the product very small, which ultimately affects the quality of the battery product.

[0059] The present application proposes a dryer 10 that can be used for the crystallization of perovskite materials to solve the problem of poor product uniformity present in drying equipment, as opposed to the problem of reduced process reproducibility and stability caused by a narrow process window, possibly in manufacturing equipment.

[0060] 1, 2 and 3, in some examples, a dryer 10 for drying and crystallizing a material is disclosed, the dryer 10 includes a vacuum chamber 11, a crystallization chamber 20 and a heating device 22, the vacuum chamber 11 forms a first cavity 111 for vacuum drying the material, the crystallization chamber 20 forms a second cavity 21, the first cavity 111 and the second cavity 21 have an input end and an output end, respectively, the output end of the first cavity 111 communicates with the input end of the second cavity 21 so as to communicate with the first cavity 111 and the second cavity 21 to form a continuous material passage, and the heating device 22 is provided in the crystallization chamber 20 and is used to heat and crystallize the material in the second cavity 21.

[0061] The first cavity 111 in the vacuum chamber 11 can form a negative pressure device as necessary to vacuum-dry the material. When the material enters the first cavity 111, the first cavity 111 is put into a certain negative pressure state, so that the material placed in the first cavity 111 is vacuum-dried. The input end and the output end of the first cavity 111 are respectively opened in the vacuum chamber 11 so that the material enters the first cavity 111 through the input end of the first cavity 111, and after the material is vacuum-dried in the first cavity 111, it is output through the output end of the first cavity 111.

[0062] The crystallization chamber 20 is formed with a second cavity 21, and the crystallization chamber 20 is equipped with a heating device 22 for heating the material in the second cavity 21 so as to heat and crystallize the material. The input end and the output end of the second cavity 21 are respectively opened in the crystallization chamber 20, and the input end of the second cavity 21 is connected to the output end of the first cavity 111, so that the material vacuum-dried in the first cavity 111 enters the second cavity 21, and is annealed and crystallized in the second cavity 21, and then is output through the output end of the second cavity 21.

[0063] The first cavity 111 and the second cavity 21 form a continuous material passage, which means that after the material has gone through the vacuum drying process in the first cavity 111, it can be continuously transported directly into the second cavity 21 for annealing and crystallization without going through any other process. A material passage for placing the material is formed inside the dryer 10, and the material passage can be opened or closed. When the material passage is opened, it can be used to input and output the material. When the material passage is closed, an independent space is formed in the material passage so that the materials can be isolated from each other from the outside of the dryer 10.

[0064] After the material is placed in the first cavity 111, the first cavity 111 is closed so that the materials are isolated from each other from the outside. The gas in the first cavity 111 is sucked using the vacuum device 15, thereby reducing the air pressure in the first cavity 111 and vacuum drying the material in the first cavity 111. In order to form a vacuum negative pressure state in the first cavity 111, after the material enters the first cavity 111, vacuum drying is performed in the first cavity 111. Both the melting point and boiling point of the moisture in the material in the negative pressure state are lowered as the degree of vacuum increases, and the solution such as water in the material obtains sufficient kinetic energy to separate from the surface of the material.

[0065] By forming a negative pressure drying environment, the volatile solvent in the material is volatilized, and the material is put into an intermediate state. The less volatile solvent in the material can form a complex with the material, thereby forming an intermediate state with a stable structure, and the material passage can be kept in a closed state to maintain the stability of the intermediate state. By forming a relatively more stable intermediate state, the time window required for annealing the intermediate state is widened, and even if the intermediate state is left for a long time before annealing, there is still no generation of secondary phases, and at the same time, the annealing window can be extended without affecting the quality of the final product, which helps to improve the fault tolerance ability of the dryer 10, improves production efficiency, and allows the product to maintain a preset quality. The time window required for annealing the intermediate state refers to the time left before intermediate state annealing.

[0066] During the annealing process, the stable intermediate state can make the surface of the annealed material rougher, and by forming an uneven surface, the rough surface can form a suede-like surface, and by performing backlight reflection through the suede, it can play a role in light trapping, and the light absorption efficiency of the material can be made higher, so there is no need to provide an additional backlight reflective suede, which can further help simplify the manufacturing process.

[0067] In this embodiment, the volatile solvent is first discharged by a vacuum drying process, and then the material is heated by the heating device 22 so as to be annealed and crystallized. The volatilization process of the volatile solvent and the annealing crystallization process are carried out independently, so there is no interference between the volatilization process of the volatile solvent and the annealing crystallization process, so that the process window of the volatilization process of the volatile solvent and the annealing crystallization process is relatively wide, and the reproducibility of the product processing process can be effectively improved; and the two processes do not affect each other, so the stability of the two processes is relatively high, which can effectively reduce product defects and improve product quality.

[0068] In some examples, the first cavity 111 and / or the second cavity 21 are closable cavities. The first cavity 111 and the second cavity 21 can be in a closed state, and when performing vacuum drying and heating crystallization, the material passages are both in a closed state, and the materials can be isolated from each other from the external environment, preventing the material from absorbing gases and impurities from the external environment, and avoiding the material interacting with the external impurities during the vacuum drying or annealing crystallization process to affect the quality of the material. When the heating device 22 heats, the closed second cavity 21 is used to place the material, and the heating device 22 can rapidly heat the second cavity 21, thereby easily realizing the rapid heating of the first cavity 111, and when the heating reaches a preset temperature, the first cavity 111 can be kept closed to easily keep the first cavity 111 warm, so that the material can be fully annealed and crystallized. When used to dry materials of different components, the closed first cavity 111 can be used to easily control the environment in the first cavity 111, including air pressure, temperature, humidity, atmosphere, etc., making the dryer 10 better adapted to the drying and crystallization of different materials, thereby ensuring the quality of the materials and improving the adaptability of the dryer 10.

[0069] The first cavity 111 is a closable cavity, and in some examples, the vacuum chamber 11 is provided with a structure such as a gate as a sealing member 16, and when vacuum drying is performed, the first cavity 111, which is a part of the material passage, is closed. The second cavity 21 is a closable structure, and when the inside of the second cavity 21 is heated by the heating device 22, the second cavity 21, which is a part of the material passage, is maintained in a closed state, so that the temperature inside the second cavity 21 can be rapidly increased, and the first cavity 111 and the second cavity 21 are installed independently of each other, and no interference occurs between them. In some examples, the crystallization chamber 20 is provided with a structure such as a gate as a sealing member 16 to close the second cavity 21 when performing heating crystallization. The above-mentioned sealing member 16 may have other structures, and is not limited here. The fact that the first cavity 111 can be connected to the second cavity 21 means that when the sealing member 16 at the connection point between the first cavity 111 and the second cavity 21 is opened, the first cavity 111 and the second cavity 21 are connected, and when the sealing member 16 at the connection point between the first cavity 111 and the second cavity 21 is closed, the first cavity 111 and the second cavity 21 are isolated from each other.

[0070] In this embodiment, the vacuum chamber 11 and the crystallization chamber 20 cooperate to form an overall structure, so that the vacuum-dried material can easily enter the crystallization chamber 20 through the vacuum chamber 11, and the time for placing the material after vacuum drying can be easily controlled, so that the material can easily enter the crystallization chamber 20 within the annealing process window to be annealed and crystallized, so that the product processing consistency is higher, the process process can be easily controlled, and the processing quality of the material can be effectively controlled.

[0071] As can be understood, the vacuum chamber 11 in this example can create a vacuum negative pressure environment in the first cavity 111 so as to perform a vacuum drying operation on the material. The vacuum chamber 11 may further include other functional components for controlling the vacuum drying process. In this example, the heating device 22 is used to create a high temperature environment in the second cavity 21 so that the material is annealed and crystallized in the second cavity 21, and the heating device 22 may realize the heating annealing crystallization of the corresponding material.

[0072] In some examples, a vacuum device 15 is provided outside the dryer 10, and the vacuum device 15 may be a part of the dryer 10, or the vacuum device 15 and the dryer 10 are detachably connected to each other. The vacuum device 15 is used to exhaust gas in the first cavity 111 so as to maintain a certain negative pressure state inside the first cavity 111. The vacuum device 15 has an inlet end and an outlet end, and the inlet end of the vacuum device 15 communicates with the first cavity 111, and the outlet end of the vacuum device 15 can communicate with any space outside the dryer 10, so that the gas in the first cavity 111 can be exhausted.

[0073] The heating device 22 is used to heat and crystallize the material in the second cavity 21. The heating device 22 can directly contact the material to realize heating by contact, and the heating device 22 can also heat the air in the material passage to realize indirect heating by the heated air heating the material.

[0074] In some examples, the heating device 22 is mounted at any position in the first cavity 111 and is used to heat anneal and crystallize the material after the vacuum drying of the material is completed. In some examples, the material is placed in a tray 60, and the heating device 22 can be provided adjacent to the tray 60 so that the heating device 22 can directly heat the material in the tray 60. In some examples, the heating device 22 and the tray 60 are in contact with each other, and transfer heat to the material through the tray 60 to realize the heat annealing and crystallization of the material.

[0075] In some examples, the dryer 10 has a conveying device 30 for conveying the material, and the material moves along a track formed by the conveying device 30. The heating device 22 can be suspended outside the conveying device 30, and the heating device 22 heats a gas surrounding the material to achieve indirect heating of the material, or the heating device 22 can be directly provided on the conveying device 30 to directly heat the material.

[0076] In some examples, the conveying device 30 can drive the material to be conveyed continuously along the material path, and the movement speed of the conveying device 30 can be controlled to control the residence time of the material in the first cavity 111 and / or the second cavity 21. The conveying device 30 can also drive the material to be conveyed intermittently along the material path, such that the material is held in the first cavity 111 for a first preset time, followed by a second preset time that is within the process window time of the annealing crystallization process of the material, before entering the second cavity 21 and being held in the second cavity 21 for a third preset time, completing the annealing crystallization operation.

[0077] In some examples, the crystal chamber 20 is provided with an air pressure valve 80 communicating with the second cavity 21 so as to control the air pressure of the crystal chamber 20 via the air pressure valve 80. In some examples, the output end of the second cavity 21 is provided with a valve 70 for closing the output end of the second cavity 21 so as to control the temperature of the second cavity 21. When the material completes annealing crystallization in the second cavity 21, the valve 70 is opened so as to take out the material from the second cavity 21.

[0078] Continuing to refer to FIG. 1, in some examples, the dryer 10 further includes a gas discharge device 14 having an inlet end, the inlet end of the gas discharge device 14 communicating with the first cavity 111 to discharge gas within the first cavity 111.

[0079] When performing the vacuum drying process, the volatile solvent in the material is volatilized and discharged through the gas discharge device 14, so that the material forms a stable intermediate state during the vacuum drying process, and the process window during annealing crystallization of the material is relatively wide, and the process parameters in the dryer 10 can be easily adjusted within the process window, ensuring the quality of the product and effectively improving the controllability and reproducibility of the drying process. Since the volatile solvent is discharged, it is possible to prevent the volatile solvent from affecting the stability of the intermediate state due to secondary bonding with the material within the process window of heating crystallization of the material.

[0080] The inlet end of the gas discharge device 14 is connected to the first cavity 111, and the gas discharge device 14 may further have an outlet end, which may be connected to the outside of the dryer 10 or to another container so as to recover the volatile solvent.

[0081] The vacuum chamber 11 has a through hole communicating with the first cavity 111, and the gas discharge device 14 has an inlet end and an outlet end, and the inlet end of the gas discharge device 14 communicates with the through hole of the vacuum chamber 11 via a pipeline so that the volatilized solvent can be discharged from the first cavity 111 when the gas discharge device 14 operates. In this example, the vacuum chamber 11 has a plurality of through holes communicating with the first cavity 111, and the inlet end of the gas discharge device 14 communicates with the plurality of through holes respectively so as to suck the volatilized solvent from different positions. Furthermore, the plurality of through holes are provided at intervals along the extension direction of the material passage so as to sufficiently discharge the volatile solvent in the first cavity 111.

[0082] Since the volatile solvent in the first cavity 111 can be discharged, the material in the first cavity 111 can form a relatively stable intermediate state, and the negative pressure environment in the first cavity 111 can be utilized to help improve the stability of the intermediate state, thereby relatively extending the process window before the material enters the crystallization chamber 20, and further adjusting the parameters of the annealing process as needed, so that the controllability and reproducibility of the annealing crystallization process is higher, and the produced products are also relatively more stable, which can effectively improve the quality of the products.

[0083] Furthermore, in some examples, the outlet end of the gas discharge device 14 communicates with the second cavity 21. By sucking the volatilized solvent from the first cavity 111 into the second cavity 21 and refilling it in the second cavity 21, the volatilized solvent can be replenished to the material undergoing the annealing crystallization process in the second cavity 21, thereby effectively ensuring the crystallization quality of the material and realizing the recovery and reuse of the volatile solvent.

[0084] Furthermore, in some examples, the dryer 10 further includes a temporary storage device 90 having an inlet end, and the outlet end of the gas discharge device 14 is in communication with the inlet end of the temporary storage device 90. The temporary storage device 90 is used to store the volatile solvent discharged from the first cavity 111 so as to prevent air pollution. If necessary, the volatile solvent in the temporary storage device 90 can be reused.

[0085] The temporary storage device 90 may be a gas tank or other closable container. The inlet end of the temporary storage device 90 may be an opening formed in the temporary storage device 90 or a pipeline connected to the temporary storage device 90. The temporary storage device 90 has a cavity for containing the volatile solvent, and the volatile solvent enters the temporary storage device 90 through the inlet end and is stored therein.

[0086] Further, in some examples, the temporary storage device 90 further has an outlet end, and the outlet end of the temporary storage device 90 communicates with the second cavity 21. When performing the vacuum drying process, the gas exhaust device 14 exhausts the volatile solvent that has evaporated from the first cavity 111, and the volatile solvent is temporarily stored in the temporary storage device 90. When performing the annealing crystallization process, the volatile solvent in the temporary storage device 90 can be refilled into the second cavity 21, so that the second cavity 21 can be maintained at a preset atmosphere, thereby realizing atmospheric control during the drying process of the material, and making the quality of the material more controllable. In some examples, the crystallization chamber 20 has a through hole that communicates with the second cavity 21, and the outlet end of the temporary storage device 90 communicates with a through hole on the crystallization chamber 20 so that the volatile solvent exhausted from the first cavity 111 can enter the second cavity 21. Furthermore, the crystallization chamber 20 is provided with a plurality of through holes spaced apart along the extension direction of the material passage so as to uniformly deliver the volatile solvent to the material in the second cavity 21 .

[0087] In some examples, the dryer 10 further includes a first transition chamber 13 forming a first transition cavity 131 having an input end and an output end, the output end of the first cavity 111 communicating with the input end of the first transition cavity 131, the output end of the first transition cavity 131 communicating with the input end of the second cavity 21, and the first cavity 111, the first transition cavity 131 and the second cavity 21 forming a material passage.

[0088] The first transition chamber 13 is provided with a first transition cavity 131 as an intermediate transition region between the first cavity 111 and the second cavity 21. The first transition cavity 131 has an input end communicating with the output end of the first cavity 111 and an output end communicating with the second cavity 21, such that the second transition cavity 121, the first cavity 111 and the second cavity 21 form a continuous material passage.

[0089] In some examples, the first transition cavity 131 is a closable cavity. The first transition cavity 131 seals the input end of the first cavity or the input end of the second cavity. In some examples, the input end of the first transition cavity 131 is provided with a seal member 16, so that the seal member 16 of the first transition cavity 131 can have the effect of sealing the corresponding position of the material passage, and the first cavity 111 can maintain a good vacuum state. Optionally, the output end of the first transition cavity 131 is further provided with a seal member 16 so that both the first transition cavity 131 and the first cavity 111 maintain a preset sealed state.

[0090] Referring to FIG. 4, in some examples, the first transition cavity 131 includes a plurality of first transition sub-cavities 131a connected in sequence, where the first transition sub-cavity 131a adjacent to the first cavity 111 communicates with the output end of the first cavity 111, and the first transition sub-cavity 131a adjacent to the second cavity 21 communicates with the input end of the second cavity 21. By forming the plurality of first transition sub-cavities 131a, it is possible to easily transition between the first cavity 111 and the second cavity 21. The transition includes air pressure and / or temperature. The residence time of the material between the plurality of first transition sub-cavities 131a is extended, so that the process window of the material before the second cavity 21 is extended, and the process parameters can be easily controlled and adjusted to easily realize the movement and transition of the material between the first cavity 111 and the second cavity 21.

[0091] In some examples, the first transition subcavities 131a are continuous independent subcavities in the first transition cavity 131. In some examples, the first transition subcavities 131a form intermediate transition regions between the first cavity 111 and the second cavity 21, and the air pressure in the first transition subcavities 131a can be gradually lowered from the vacuum chamber 11 to the crystal chamber 20 to achieve a gradual transition in air pressure to facilitate the opening of the seal member 16. The temperature in the first transition subcavities 131a can be gradually increased from the vacuum chamber 11 to the crystal chamber 20 to gradually increase the temperature of the material.

[0092] In some examples, the dryer 10 further includes a vacuum device 15 having an inlet end, and the inlet end of the vacuum device 15 communicates with the first cavity 111. The first transition cavity 131 is used to vacuum dry the material. The material enters the first cavity 111 to perform vacuum drying, and then the material is conveyed to the first transition cavity 131 to perform secondary vacuum drying, so that the easily volatilized solvent in the material is sufficiently volatilized, so that when the material enters the crystallization chamber 20, the less volatilized solvent in the material can form a stable intermediate state with the material to improve the quality of the product. The first transition cavity 131 can be the transition cavity at the output end of the first cavity 111, so that the material can be gradually vacuum dried, and the easily volatilized solvent in the material can be sufficiently volatilized to avoid affecting the annealing crystallization process.

[0093] The air pressure in the first transition cavity 131 may be greater than the air pressure in the first cavity 111 so as to make the first transition cavity 131 a transition region between the first cavity 111 and the second cavity 21, thereby avoiding the seal member 16 from opening normally due to the pressure difference between the first cavity 111 and the second cavity 21 being too large.

[0094] In some examples, the first transition subcavity 131a is multiple, and the heating device 22 is provided in the first transition subcavity 131a. The first transition subcavity 131a is used to preheat the material. Furthermore, the dryer 10 includes multiple first transition chambers 13 as described in any one of the examples above, and the temperature in the first transition subcavity 131a gradually increases from the vacuum chamber 11 toward the crystallization chamber 20.

[0095] In some examples, there are multiple first transition subcavities 131a, and the inlet end of the vacuum device 15 also communicates with the first transition subcavities 131a, and the vacuum device 15 evacuates the gas in the first transition subcavity 131a that communicates with it, thereby reducing the air pressure in the corresponding first transition subcavity 131a. In some examples, the inlet end of the vacuum device 15 communicates with a first transition subcavity adjacent to the first cavity 111.

[0096] In some examples, the air pressure of the first transition sub-cavity 131a adjacent to the vacuum chamber 11 is lower than that of the first transition sub-cavity 131a adjacent to the crystal chamber 20. Furthermore, in some examples, the air pressure of the plurality of first transition sub-cavities 131a is gradually increased from the vacuum chamber 11 toward the crystal chamber 20, and the gradually increased air pressure realizes a gradual adjustment of the air pressure between the vacuum chamber 11 and the crystal chamber 20, which easily opens the sealing member 16 between the adjacent cavities, and the continuous transport of the material along the material passage can be easily controlled.

[0097] In some examples, the vacuum device 15 is a vacuum pump. In some examples, a one-way valve is provided at the inlet end of the vacuum device 15, and the opening degree of the one-way valve can be controlled to control the flow rate of the corresponding inlet end, so that a single vacuum pump can realize air pressure control of different cavities, so that multiple cavities exhibit different air pressure conditions.

[0098] In some examples, there are multiple first transition subcavities 131a, and the inlet end of the gas discharge device 14 also communicates with the first transition subcavities 131a. The gas discharge device 14 is used to discharge gas in the first transition subcavities 131a connected thereto so that the evaporated solvent is discharged outside the corresponding cavity.

[0099] In some examples, the dryer 10 further includes a second transition chamber 12 in which a second transition cavity 121 for vacuum drying the material is formed, the second transition cavity 121 having an input end and an output end, the output end of the second transition cavity 121 being connected to the input end of the first cavity 111, and the second transition cavity 121, the first cavity 111, the first transition cavity 131 and the second cavity 21 forming a material passage.

[0100] A first cavity 111 as described in any one of the above examples is formed in the vacuum chamber 11 so as to vacuum-dry the material. The vacuum chamber 11 has an input end and an output end communicating with the first cavity 111, and the output end of the first cavity 111 communicates with the input end of the second cavity 21 as described in any one of the above examples so that the vacuum-dried material can be transported into the second cavity 21.

[0101] The second transition chamber 12 is provided at the input end of the first cavity 111, and the second transition chamber 12 has an input end as the input position of the material of the dryer 10 and an output end communicating with the input end of the first cavity 111, so that after the material is vacuum-dried in the second transition chamber 12, it enters the first cavity 111 for secondary vacuum drying.

[0102] In some examples, the input end of the second transition cavity 121 is provided with a seal member 16, which can better maintain a vacuum state in the material passage, and easily realize vacuum drying of the material. Furthermore, optionally in this example, the input end and the output end of the second transition cavity 121 are respectively provided with a seal member 16, so that both the second transition cavity 121 and the first cavity 111 maintain a preset sealed state, and easily realize vacuum drying in the second transition cavity 121.

[0103] The second transition cavity 121, the first cavity 111, the first transition cavity 131 and the second cavity 21 form the above-mentioned material passage, so that the material can be pre-vacuum-dried in the second transition cavity 121, and then vacuum-dried again after entering the first cavity 111, which helps to improve the vacuum drying efficiency. By vacuum-drying the material in the second transition cavity 121, a part of the easily volatile solvent in the material can be volatilized, and after the material enters the first cavity 111, the first cavity 111 can be vacuum-dried to further reduce the easily volatile solvent in the material, so that the less volatile solvent can form a stable intermediate state with the material, so that after the material enters the annealing furnace, the solvent evaporation and the material crystallization can be synchronized to avoid defects such as holes in the material, and the product quality can be improved.

[0104] The air pressure in the second transition cavity 121 may be equal to the air pressure in the first cavity 111, or may be less than the air pressure in the first cavity 111. The second transition chamber 12 may form a cavity for transition to the input end of the vacuum chamber 11, so as to avoid the problem that the seal member 16 of the first cavity 111 does not open due to the pressure difference between the first cavity 111 and the outside being too large.

[0105] In some examples, there are a plurality of second transition chambers 12, and each second transition chamber 12 forms a second transition cavity 121. The plurality of second transition chambers 12 are connected in sequence to form a plurality of transition cavities at the input end of the first cavity 111. In the direction from the second transition cavity 121 toward the first cavity 111, i.e., in the material conveying direction, the air pressure in the second transition cavity 121 formed by the plurality of second transition chambers 12 gradually increases so that the air pressure in the second transition cavity 121 adjacent to the first cavity 111 approaches the air pressure in the first cavity 111, and the seal member 16 of the first cavity 111 can be easily opened.

[0106] The dryer 10 is provided with a gas discharge device 14 as described in any one of the above examples, and the inlet end of the gas discharge device 14 communicates with the second transition cavity 121 so as to discharge the volatile solvent in the second transition cavity 121.

[0107] In this example, the second transition chamber 12 can be provided with a through hole for connecting the inlet end of the gas discharge device 14, so that the gas discharge device 14 can communicate with the second transition cavity 121 through a pipeline. Here, the second transition chamber 12 can be provided with a plurality of through holes so that the inlet end of the gas discharge device 14 can communicate with the second transition cavity 121 from a plurality of positions. Furthermore, the plurality of through holes are provided at intervals in the second transition chamber 12 along the extension direction of the material passage. The extension direction of the material passage described in this example coincides with the material conveying direction in the dry crystallization process.

[0108] In some examples, the dryer 10 includes a vacuum device 15 having an inlet end communicating with the second transition cavity 121. The vacuum device 15 has an inlet end and an outlet end, and creates a negative pressure vacuum environment in the dryer 10 through the vacuum device 15. At positions of the dryer 10 corresponding to the first cavity 111, the second transition cavity 121, and the first transition cavity 131, through holes are opened for connecting the vacuum device 15 so that the inlet end of the vacuum device 15 can communicate with the first cavity 111, the second transition cavity 121, and the first transition cavity 131, respectively. In order to easily control the air pressure in the second transition cavity 121, the first cavity 111 and the first transition cavity 131, in some examples, a throttle valve is provided in each of the pipelines of the vacuum drawing device 15 connecting the second transition cavity 121, the first cavity 111 and the first transition cavity 131, and the flow rate of the corresponding pipeline is controlled to realize the air pressure control of the second transition cavity 121, the first cavity 111 and the first transition cavity 131.

[0109] In some examples, the positions of the dryer 10 corresponding to the second transition cavity 121, the first cavity 111 and the first transition cavity 131 are provided with a plurality of sets of through holes, respectively, so that the vacuum device 15 can communicate with the plurality of positions of the second transition cavity 121, the first cavity 111 and the first transition cavity 131, thereby realizing rapid depressurization of the second transition cavity 121, the first cavity 111 and the first transition cavity 131. The plurality of through holes for connecting the inlet end of the vacuum device 15 can be provided at intervals along the extending direction of the material passage.

[0110] In some examples, the dryer 10 includes the conveying device 30 described in any one of the examples above. In some examples, the dryer 10 further includes a material supply table 40 provided at the input end of the dryer 10 and a material discharge table 50 provided at the output end of the crystallization chamber 20, whereby the material can be placed in a tray 60, and the tray 60 can be placed on the material supply table 40 so that the material can enter the input end of the dryer 10 and be conveyed along the material path by the conveying device 30. After the material is annealed and crystallized through the second cavity 21 in the crystallization chamber 20, the material is output from the material discharge table 50.

[0111] In some examples, the dryer 10 includes a conveying device 30 as described in any one of the examples above. The conveying device 30 can continuously convey the material, and the speed of movement of the conveying device 30 can be controlled to adjust the conveying speed of the material and the residence time of the material in the corresponding cavity. The conveying device 30 can also convey the material intermittently, so that the material resides in each individual cavity for a preset time, and the material can perform a corresponding process operation in the corresponding cavity.

[0112] The heating device 22 is used to increase the temperature in the annealing cavity, thereby performing an annealing crystallization operation on the material. In some examples, the heating device 22 is a first heater 221 provided in the crystallization chamber 20 to heat the material in the second cavity 21.

[0113] In some examples, the first heater 221 may be a light heater that conducts heat by infrared radiation. Take heating with infrared light as an example. When infrared light is irradiated on a material, part of the radiation is reflected back and part is transmitted. When the emitted far-infrared wavelength matches the absorption wavelength of the material, the material absorbs the far-infrared light, and at this time, the molecules and atoms inside the object resonate, and the material molecules generate strong vibration and rotation, which increases the temperature of the material and achieves the purpose of heating. By adopting the infrared heating device 22, it is possible to realize rapid and uniform heating of the material, realize rapid temperature rise, and improve the efficiency of annealing crystallization.

[0114] The material first undergoes a vacuum drying process so that the material forms a stable intermediate state; when undergoing the heating annealing process, the rough surface can form a suede-like surface, and backlight reflection through the suede can further play a role in light trapping, thereby making better use of the energy generated by the first heater 221 and improving the annealing efficiency of the material.

[0115] Furthermore, in some examples, the first heater 221 is located above the material so that the first heater 221 can emit infrared rays from top to bottom to act on the surface of the material. This can avoid blocking of the infrared rays by the tray 60, the conveying device 30, etc., and improve the heating efficiency.

[0116] In some examples, the dryer 10 further includes a conveying device 30 provided in the material passage, the conveying device 30 being located in the material passage, the first heater 221 being an optical heater, the conveying device 30 being formed with a conveying table for placing the material, and the first heater 221 having an emitting side provided facing the conveying table.

[0117] The conveying platform is used to place the material, and the material can move relatively in the material passage as the conveying device 30 operates. The conveying platform may be a platform parallel to the horizontal plane so as to convey the material along the horizontal direction. The conveying platform may also be a platform at an angle to the horizontal plane, so that the material conveying trajectory exhibits a change in the vertical direction during the material conveying process in the material passage, and the material can be conveyed as required.

[0118] The light-emitting side of the first heater 221 faces the carrier bed, so that the light radiation generated by the first heater 221 can directly act on the material and avoid being blocked by the material. When the carrier bed is a platform parallel to the horizontal plane, the first heater 221 is provided above the carrier bed and emits infrared light to the material in a top-to-bottom direction, so as to realize heating by infrared radiation. When the carrier bed is provided at an angle to the horizontal plane, the light-emitting side of the first heater 221 faces the carrier bed, so that the infrared radiation generated by the first heater 221 can directly act on the material on the carrier bed.

[0119] Further, in some examples, the first heater 221 is multiple, and the multiple first heaters 221 are distributed at intervals. When installed, multiple first heaters 221 can be provided along the extension direction of the material passage, and in some examples, the longitudinal direction of the material passage is its extension direction, and multiple first heaters 221 are provided along the width direction of the material passage. By providing multiple first heaters 221, it is possible to easily realize rapid heating of the material passage, and at the same time, the annealing temperature in the material passage can be controlled by maintaining a preset temperature after heating in the material passage, thereby improving the efficiency of the annealing crystallization of the material, and by controlling the annealing crystallization temperature, a relatively stable and uniform state can be formed after the annealing crystallization of the material, and the quality of the product can be improved.

[0120] In some examples, the first heaters 221 can be distributed into multiple sets, each set including multiple first heaters 221, and the multiple first heaters 221 in each set are spaced apart along the extension direction of the material passage, and the multiple sets of first heaters 221 can also be arranged according to other rules to expand the infrared radiation area.

[0121] Furthermore, when the material is transported along a transport table, a plurality of first heaters 221 can be distributed at intervals along the extension direction of the transport table.

[0122] In some examples, the heating device 22 further includes a second heater 222. The second heater 222 is provided in the crystallization chamber 20, and the second heater 222 is a circulating heater for heating the material in the second cavity 21.

[0123] The second heater 222 may be a device having a heating function by electric heating or other heating methods. In addition, in some examples, the second heater 222 has a passage for receiving a fluid medium, and when the fluid medium flows along the second heater 222, the second heater 222 exchanges heat with the material directly or indirectly, thereby realizing heating of the material in the material passage. In some examples, the second heater 222 can absorb a part of the heat generated by the first heater 221, and the second heater 222 can absorb and store a certain amount of heat, and then apply heat to the material through a thermal radiation method, making full use of the energy of the first heater 221 to achieve the effect of keeping the material in the second cavity 21 warm and making the temperature uniform.

[0124] In some examples, the second heater 222 is multiple, and the multiple second heaters 222 are spaced apart. The second heaters 222 are used to heat the material from different locations, and the multiple second heaters 222 are used to increase the temperature of the material passage from different positions, so that the annealing temperature can be reached quickly in the material passage, and the multiple second heaters 222 and the first heater 221 can cooperate to further increase the temperature rise rate of the material passage, so that the crystallization temperature of the material can be reached quickly in the material passage. By providing multiple second heaters 222 to heat different positions of the material, the heating of the material is relatively uniform, thereby improving the crystallization quality of the material.

[0125] In some examples, the second heater 222 is a light-transmitting material. The light-transmitting material means that the second heater 222 can allow at least some frequencies of light to pass through. In this example, the second heater 222 can allow at least infrared light to pass through, so that the second heater 222 does not block the first heater 221. Due to the adoption of the light-transmitting material, the second heater 222 does not affect the first heater 221, so that a different mounting position can be selected according to needs, and the mounting position of the second heater 222 can be closer to the material on the carrier table to make full use of the heat generated by the second heater 222.

[0126] Further, in some examples, the second heater 222 is a light-transmitting material, and the second heater 222 is disposed between the first heater 221 and the material. The second heater 222 and the first heater 221 can heat the material simultaneously, and can rapidly apply heat to the material to realize a rapid temperature rise of the material. When the temperature inside the material passage reaches a preset temperature, the material can be kept warm through the second heater 222 so that the material maintains the crystallization temperature, thereby realizing the annealing and crystallization of the material.

[0127] In some examples, the second heater 222 is located on one side of the material facing away from the first heater 221, so that the first heater 221 and the second heater 222 heat both sides of the carrier respectively, and at the same time, the second heater 222 does not block the first heater 221, so as to fully improve the utilization rate of the energy of the first heater 221. In some examples, the material is placed on the carrier according to any one of the above examples, and the material is rapidly heated by the first heater 221 and the second heater 222 provided on both sides of the carrier, and when the material reaches the annealing crystallization temperature, the material can be kept warm through the second heater 222, so that the material can be fully crystallized. Both sides of the material carrier can be affected by heat, so that the heat of the material is relatively more uniform, which helps to improve the quality of the product.

[0128] In some examples, the first heater 221 and the second heater 222 are located on the same side of the material transport table and the projections of the first heater 221 and the second heater 222 on a horizontal plane are offset from each other to prevent interference with each other, thereby improving energy utilization.

[0129] In order to improve the utilization rate of the infrared radiation by the first heater 221, in some examples, the heating device 22 further includes a temperature equalizing device 223 provided in the crystal chamber 20 to reflect the heat emitted by the first heater 221 toward the material. The temperature equalizing device 223 may be a reflector, the temperature equalizing device 223 has a reflective surface, the infrared radiation generated by the first heater 221 is diffused on the inner wall surface of the second cavity 21, and the temperature equalizing device 223 is used to reflect the infrared radiation toward the material to improve the utilization rate of energy. The infrared radiation generated by the first heater 221 can act more intensively on the material, thereby effectively improving the heating rate of the material. In this example, the temperature equalizing device 223 has a reflective surface that can reflect the infrared radiation, and the reflective surface may be a flat surface, a circular arc surface, or a combination of a flat surface and a circular arc surface.

[0130] Furthermore, in this example, a second heater 222 is further provided in the second cavity 21, and a temperature equalizing device 223 and the second heater 222 are respectively provided on the inner wall surface of the second cavity 21, and the temperature equalizing device 223 and the second heater 222 are offset from each other so that the second heater 222 can be used to rapidly heat the material, and the temperature equalizing device 223 can be used to reflect the infrared radiation generated by the first heater 221 to the material, and the cooperation of multiple components achieves a uniform temperature in the material passage.

[0131] In some examples, there are a plurality of crystal chambers 20, each of which has a second cavity 21 formed therein, and each of which has a heating device 22 provided therein, and the plurality of crystal chambers 20 are connected in series.

[0132] Each of the multiple crystallization chambers 20 has a second cavity 21, and each of the multiple second cavities 21 can be used to anneal and crystallize the material. The crystallization chambers 20 are used to anneal and crystallize the material vacuum-dried in the vacuum chamber 11, so that the multiple crystallization chambers 20 communicate with each other to form multiple second cavities 21 for annealing and crystallization, thereby improving the annealing efficiency of the material. Each of the crystallization chambers 20 is provided with a heating device 22, so that the multiple crystallization chambers 20 can cooperate to exert a heat preservation effect, bring the material to the annealing crystallization temperature, and thereby fully realize the crystallization of the material, which avoids the problem of non-uniformity of the material caused by temperature non-uniformity, and is also helpful in maintaining the quality of the product.

[0133] When used for annealing crystallization of different materials, the temperature in the multiple second cavities 21 can be set to meet the annealing requirements of different materials, thereby controlling the annealing crystallization quality of the materials as needed.

[0134] In some examples, the dryer 10 includes the gas discharge device 14 described in any one of the examples above, and the gas discharged by the gas discharge device 14 is sent to a plurality of second cavities 21, and the amount of gas input into each of the second cavities 21 may be equal or unequal. By inputting the gas discharged by the gas discharge device 14 into the second cavities 21, control of the atmosphere in the plurality of second cavities 21 can be easily achieved.

[0135] Based on any one of the above examples, the dryer 10 further includes a seal member 16 provided along the material passage to seal the corresponding position of the material passage. The seal member 16 may be a gate or other structure capable of realizing sealing of the corresponding port portion. In some examples, the input end and the output end of each cavity of any one of the above examples are provided with a seal member 16, respectively. In some examples, the input end for inputting material into the cavity of the dryer 10 (e.g., the input end of the second transition cavity 121 far from the vacuum chamber 11) is provided with the seal member 16, and the output end for outputting material to the cavity outside the dryer 10 (e.g., the output end of the second cavity 21 far from the vacuum chamber 11) is provided with the seal member 16, and one seal member 16 is provided between adjacent cavities.

[0136] 1, 2 and 3, in some examples, the dryer 10 includes the vacuum chamber 11, the crystallization chamber 20 and the seal member 16 described in any one of the above examples, the vacuum chamber 11 is formed with a first cavity 111 for vacuum drying the material, the inlet end of the vacuum drawing device 15 is connected to the first cavity 111, the crystallization chamber 20 is formed with a second cavity 21, the heating device 22 is provided in the second cavity 21, and the first cavity The first cavity 111 and the second cavity 21 each have an input end and an output end, and the output end of the first cavity 111 is connected to the input end of the second cavity 21 so that the first cavity 111 and the second cavity 21 form a material passage, and a sealing member 16 is provided between the vacuum chamber 11, the crystal chamber 20 and the vacuum chamber 11 and the crystal chamber 20 for opening and closing the material passage corresponding to the first cavity 111 or the second cavity 21.

[0137] The vacuum chamber 11 has a first cavity 111, and a seal member 16 provided in the vacuum chamber 11 is used to close the first cavity 111 so that the first cavity 111 can be in a closed state. The inlet end of the vacuum device 15 communicates with the first cavity 111, so that the vacuum device 15 can exhaust gas within the first cavity 111 to create a certain degree of negative pressure within the first cavity 111.

[0138] Both the vacuum chamber 11 and the crystallization chamber 20 are provided with corresponding sealing members 16, so that the first cavity 111 and the second cavity 21 can both maintain a closed state when performing the corresponding process, and there is no interference between the first cavity 111 and the second cavity 21, so that the material can first undergo a vacuum drying process to remove the easily volatile solvent therein, thereby effectively extending the process window when the material undergoes the annealing crystallization process. The first cavity 111 and the second cavity 21 provided independently of each other can be used to operate the two steps sequentially and perform the two cavities simultaneously, thereby improving the processing efficiency of the material.

[0139] The first cavity 111 and the second cavity 21 form a material passage, so that after the material is vacuum dried in the first cavity 111, it can be directly transported to the second cavity 21, and the material will not come into contact with the external space, thereby avoiding the material from contacting with external impurities and effectively improving the processing quality of the material.

[0140] The vacuum chamber 11 is formed with a seal member 16 for opening and closing the input end and output end of the first cavity 111. By closing the first cavity 111 as necessary, after the material enters the first cavity 111, the solvent in the material that is easily volatile can be evaporated by a vacuum drying method. After the material is vacuum dried, the seal member 16 at the output end of the first cavity 111 is opened, so that the material enters the second cavity 21 along the material passage. In some examples, a seal member 16 is provided between the vacuum chamber 11 and the crystallization chamber 20 to close the output end of the first cavity 111 and the input end of the second cavity 21, so that the first cavity 111 and the second cavity 21 are relatively independent.

[0141] In some examples, the dryer described in any one of the examples above is used to dry and crystallize perovskite cell materials, which may be used in devices such as solar cells.

[0142] Building on the dryer described above, the present application further provides examples of battery processing equipment that includes a dryer according to any one of the above examples.

[0143] It should be noted that the example of the battery processing equipment according to the present application is an example based on the above-mentioned dryer, so the example of the battery processing equipment according to the present application includes all the technical solutions of all the embodiments of the above-mentioned dryer, and the technical effects achieved are also exactly the same, so the description will be omitted here.

[0144] 1-4, in one embodiment of the present application, the dryer 10 includes a material passage for vacuum drying the material, and the material passage may further be used for heating annealing crystallization of the material after the vacuum drying is completed. The material passage is a closable passage, and after the material is vacuum dried, the volatile solvent in the material is volatilized, and the material is formed into a stable intermediate state, which extends the process window when the material is annealed crystallized, so that the process parameters of the annealing crystallization can be determined and adjusted as necessary, the process reproducibility is higher, the process stability is relatively high, and the quality control of the product can be easily realized.

[0145] The dryer 10 includes a second transition chamber 12, a vacuum chamber 11, a first transition chamber 13, and at least two crystallization chambers 20 connected in sequence, and the second transition chamber 12, the vacuum chamber 11, and the first transition chamber 13 form a part of the dryer 10. A second transition cavity 121 is formed in the second transition chamber 12, a first cavity 111 is formed in the vacuum chamber 11, and a first transition cavity 131 is formed in the first transition chamber 13, and a second cavity 21 is formed in each crystallization chamber 20. The input and output ends of the second transition cavity 121 are provided with sealing members 16 for sealing the inlet of the material of the dryer 10 as required, and the input and / or output ends of the first transition cavity 131 are provided with sealing members 16 for sealing the outlet of the material of the dryer 10 as required. The dryer 10 further includes a vacuum device 15 for discharging the gas in the second transition cavity 121, the first cavity 111 and the first transition cavity 131, so that the corresponding cavities form a certain negative pressure state. The material on the material supply table 40 is conveyed through the conveying device 30 to enter the second transition cavity 121, and after performing preliminary vacuum drying, the material is conveyed to the first cavity 111, and performs vacuum drying in the first cavity 111, and then conveys the material to the first transition cavity 131 so as to vacuum dry the material again, and in the vacuum drying process, the easily volatile solvent in the material is volatilized, and the less volatile solvent in the material and the material form a stable intermediate state, which can improve the stability of the material and extend the process window before the material enters the crystallization chamber 20, thereby improving the reproducibility of the processing process of the material and making the product more stable. The vacuum dried material enters the second cavity 21 to be annealed and crystallized. A first heater 221 and a second heater 222 are provided in the second cavity 21 to heat the second cavity 21 so that the material can reach the crystallization temperature quickly. A temperature equalizer 223 may be further provided in the second cavity 21 to reflect the infrared radiation generated by the first heater 221 toward the material to improve the energy utilization rate.In this embodiment, the number of crystallization chambers 20 is at least two, and the crystallization chambers 20 are arranged in series connected in sequence, so that the crystallization temperature can be maintained when the material passes through the multiple second cavities 21 formed by the crystallization chambers 20, thereby improving the uniformity of the product and making the product of higher quality.

[0146] The above description is merely a preferred embodiment of the present application, and does not limit the scope of the claims of the present application. Under the novel concept of the present application, any equivalent modifications made based on the specification and drawings of the present application, or direct / indirect applications in other related technical fields, are included in the protection scope of the present application. [Explanation of symbols]

[0147] 10...dryer, 11...vacuum chamber, 111...first cavity, 12...second transition chamber, 121...second transition cavity, 13...first transition chamber, 131...first transition cavity, 131a...first transition sub-cavity, 14...gas exhaust device, 15...vacuum drawing device, 16...sealing member, 20...crystallization chamber, 21...second cavity, 22...heating device, 221...first heater, 222...second heater, 223...temperature equalization device, 30...conveying device, 40...material supply table, 50...material discharge table, 60...tray, 70...valve, 80...pneumatic valve, 90...temporary storage device.

Claims

1. 1. A dryer for drying and crystallizing a material, said dryer comprising: a vacuum chamber forming a first cavity for vacuum drying the material; a crystal chamber forming a second cavity, the first cavity and the second cavity each having an input end and an output end, the output end of the first cavity communicating with the input end of the second cavity such that the first cavity communicates with the second cavity to form a continuous material passageway; a heating device disposed in the crystallization chamber for heating and crystallizing the material in the second cavity.

2. The dryer is The dryer of claim 1 further comprising a gas exhauster having an inlet end in communication with the first cavity for exhausting gas within the first cavity.

3. The dryer of claim 2 , wherein the gas discharge device further has an outlet end in fluid communication with the second cavity.

4. The gas discharge device further has an outlet end, and the dryer further comprises:

3. The dryer of claim 2, further comprising a temporary storage device having an inlet end, the outlet end of said gas exhaust device communicating with the inlet end of said temporary storage device.

5. 5. The dryer of claim 4, wherein the temporary storage device further has an outlet end in fluid communication with the second cavity.

6. The dryer according to any one of claims 1 to 5, wherein the first cavity and / or the second cavity are closable cavities.

7. The dryer is a first transition chamber forming a first transition cavity having an input end and an output end; The dryer of any one of claims 2 to 6, wherein an output end of the first cavity is connected to an input end of the first transition cavity, an output end of the first transition cavity is connected to an input end of the second cavity, and the first cavity, the first transition cavity and the second cavity form the material passage.

8. The dryer of claim 7 , wherein the first transition cavity is a closable cavity.

9. 8. The dryer of claim 7, wherein the first transition cavity includes a plurality of first transition sub-cavities that are sequentially connected, a first transition sub-cavity adjacent to the first cavity being connected to an output end of the first cavity, and a first transition sub-cavity adjacent to the second cavity being connected to an input end of the second cavity.

10. The dryer is 10. The dryer of claim 9, further comprising a vacuum having an inlet end communicating with the first cavity.

11. The dryer of claim 10 , wherein an inlet end of the vacuum also communicates with the first transition cavity.

12. 12. The dryer of claim 11, wherein an inlet end of the vacuum means communicates with the first transition sub-cavity adjacent the first cavity.

13. The dryer is 13. The dryer of claim 1, further comprising a second transition chamber in which a second transition cavity for vacuum drying a material is formed, the second transition cavity having an input end and an output end, the output end of the second transition cavity communicating with the input end of the first cavity, and the second transition cavity, the first cavity, the first transition cavity and the second cavity forming the material passage.

14. The dryer is The dryer of claim 13 further comprising a vacuum having an inlet end communicating with the second transition cavity.

15. The heating device includes: The dryer of any one of claims 1 to 14, comprising a first heater provided in the crystallization chamber for heating and crystallizing material in the second cavity.

16. The dryer is 16. The dryer of claim 15, further comprising a conveying device provided in the material passage, the conveying device being formed with a conveying platform on which the material is placed, the first heater being an optical heater, and the first heater having a light-emitting side facing the conveying platform.

17. The dryer according to claim 15 or 16, wherein the first heater is provided in plurality, and the first heaters are distributed at intervals.

18. The heating device includes:

18. The dryer of claim 15, further comprising a second heater provided in the crystallization chamber, the second heater being a circulation heater for heating material in the second cavity.

19. 20. The dryer of claim 18, wherein the second heater is a light-transmitting material.

20. 20. The dryer of claim 19, wherein the second heater is disposed at least partially between the first heater and the material.

21. 20. The dryer of claim 18, wherein the second heater is located on a side of the material away from the first heater.

22. The heating device includes: The dryer of any one of claims 15 to 21, further comprising a temperature equalization device provided in the crystal chamber for reflecting heat emitted by the first heater towards the material.

23. The crystallization chamber is provided in a plurality of chambers. A dryer according to any one of claims 1 to 22, wherein a plurality of the crystal chambers are in series communication with each other.

24. The dryer is The dryer of any one of claims 1 to 23, further comprising sealing members provided along the material passage for sealing corresponding locations of the material passage.

25. The dryer of any one of claims 1 to 24, wherein the dryer is used for drying and crystallizing perovskite battery material.

26. A battery processing device, comprising the dryer according to any one of claims 1 to 25.

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