METHOD FOR ATTACHING TERMINAL TO METAL SUBSTRATE STRUCTURE FOR SEMICONDUCTOR POWER MODULE AND SEMICONDUCTOR POWER MODULE

Abstract

A method for attaching a terminal (4) to a metal substrate structure (3) for a semiconductor power module (10) includes providing at least one terminal (4) and providing the metal substrate structure (3) with a top metal layer (17), a bottom metal layer (19), and an insulating resin layer (18) disposed between the top metal layer (17) and the bottom metal layer (19). The method further includes providing and bonding a buffer structural element (7) to an upper surface (171) of the top metal layer (17) to form a protrusion for the at least one terminal (4). The method further includes bonding the at least one terminal (4) to the buffer structural element (7) by ultrasonic welding such that the buffer structural element (7) is disposed between the top metal layer (17) and the at least one terminal (4) and is materially bonded to the at least one terminal (4).

Description

[Technical field]

[0001] The present disclosure relates to a method for attaching a terminal to a metal substrate structure of a semiconductor power module with an insulating resin sheet, and further to a semiconductor power module for a semiconductor device. [Background technology]

[0002] Conventional insulated metal substrates form a technology for low and medium power semiconductor packages with simultaneously low insulation and low heat resistance requirements. Terminals are attached to the insulated metal substrate, and a reliable connection of the terminals on the insulated metal substrate is required. DE 102012211952 B4 discloses a power semiconductor module with a cooling device or substrate arranged on a base plate. The power semiconductor components are conductively connected with strip conductors. Adjustment elements and connectors are arranged on the strip conductors. A main surface of the adjustment element is fixed adjacent to the connector so that two connection types are formed, and the other main surface of the adjustment element is conductively and firmly bonded by a connection unit. EP 0706221 A2 discloses a further semiconductor arrangement with contact elements. Summary of the Invention [Means for solving the problem]

[0003] Embodiments of the present disclosure relate to a method for attaching terminals to a metal substrate structure, which can contribute to a low-cost metal substrate structure for a semiconductor power module that can function reliably even in high voltage power module applications. Further embodiments of the present disclosure relate to a corresponding semiconductor power module.

[0004] According to one embodiment, a method for attaching a terminal to a metal substrate structure for a semiconductor power module includes providing at least one terminal and providing the metal substrate structure with a top metal layer, a bottom metal layer, and an insulating resin layer disposed between the top metal layer and the bottom metal layer. The method further includes providing and bonding a buffer structure element to an upper surface of the top metal layer to form a protrusion for the at least one terminal. The method further includes bonding the at least one terminal to the buffer structure element by ultrasonic welding using an ultrasonic welding head operating at at least one of an ultrasonic frequency in the range of 10-100 kHz and an amplitude in the range of 10-100 μm and a mechanical pressure in the range of 100-1000 N acting on the terminal, the buffer structure element and / or the metal substrate structure such that the buffer structure element is disposed between the top metal layer and the at least one terminal and is materially bonded to the at least one terminal by a weld joint.

[0005] The described method allows the realization of ultrasonic welded joint connections on insulated metal substrates, which can contribute to a stable and reliable functioning of semiconductor power modules, even in high voltage power module applications. The method contributes, for example, to a reliable and cost-effective attachment of terminals by ultrasonic welding onto insulated metal substrates, while reducing the risk of damage to the insulating resin layer.

[0006] Considering alternative connection processes, ultrasonic welding offers reliability of the ultrasonic weld interface against thermal load cycles, improved heat transfer from the interface, easy manufacturability and throughput. Buffer structural elements allow ultrasonic welding to be used as an established technique also for insulated metal substrate structures. Currently, housings or terminals need to be redesigned.

[0007] Insulated metal substrate structures provide a cost-effective technology for power semiconductor modules with low insulation and low thermal resistance requirements.

[0008] The buffer structures are intentionally formed protrusions that allow protection of the resin layer against mechanical shocks introduced by ultrasonic welding and provide a locally greater thickness or reinforcement of the circuit metallization of the metal top layer at the location of the terminals. In addition, the buffer structures provide protection of the resin layer against thermal shocks. The protrusions provide a longer mechanical and thermal path between the welding location and the resin layer, as well as mechanical reinforcement of the board.

[0009] The thicker or wider the buffer structural element, the smaller the mechanical stresses introduced into the insulated metal substrate structure. In this respect, the height or thickness of the buffer structural element may have a greater influence on the absorption or buffering for stress relief than the width or length of the buffer structural element. Furthermore, to contribute to the stress buffering or absorption, the buffer structural element may, for example, include a gold coating, which allows to reduce frictional forces. However, such a coating also contributes to a reliable and stable attachment of the buffer structural element, for example by sintering.

[0010] An ultrasonic welding process is performed in conjunction with the terminals, the buffer structural element, and the metal substrate structure. For example, the ultrasonic welding process is performed at an ultrasonic frequency of 20 kHz.

[0011] In the context of the present disclosure, it is recognized that conventional insulated metal substrates realize technology for low and medium power semiconductor packages that simultaneously have low insulation and low heat resistance requirements. When the reliability requirements are low, the terminals can be soldered or glued onto the substrate. Usually, welding provides better reliability, but the welding process can be critical to the substrate structure. In consideration of the conventional configuration of such an insulated metal substrate, the corresponding terminals are connected to the top metallization using a welding technique to provide a joint connection that can be critical for a stable process on the substrate and the resin isolation sheet below the metallization. The welding process can lead to damage to the substrate structure, for example, ultrasonic welding has a strong effect of thermal and mechanical stress on the substrate structure due to friction and pressure between the terminal base and the substrate. Here, the resin sheet is strongly endangered by deformation and crack formation. There is also a risk that the metallization will peel off from the resin sheet layer. When applying ultrasonic welding of the terminal base to the circuit metallization of the insulated metal substrate, a corresponding failure mode can occur.

[0012] By using the described method for manufacturing a metal substrate structure with one or more terminals attached, it is possible to counteract the aforementioned negative effects due to buffer structural elements introduced specifically between the terminals and the metal top layer. The protrusions on the upper surface of the metal top layer formed by the buffer structural elements damp or reduce the mechanical and thermal stresses caused by ultrasonic welding, taking into account the lower layers of the metal substrate structure. The buffer structural elements can be formed by separate metal elements on the metal top layer and / or can be formed integrally with the metal top layer. Also, the risk of cracks and damage formation in the resin layer as well as peeling of the metal top layer can be reduced, resulting in a stable semiconductor power module that functions reliably even in high voltage power module applications, for example from 0.5 kV to 10.0 kV.

[0013] According to one embodiment of the method, providing and bonding the buffer structural element includes providing a metal block element separate from the metal top layer and bonding the metal block element to a top surface of the metal top layer by a bonding layer. Alternatively or additionally, providing and bonding the buffer structural element can include providing a metal block protrusion integrally formed with the metal top layer protruding from a top surface of the metal top layer.

[0014] According to a further embodiment of the method, the buffer structural element is provided to form a purposefully positioned protrusion, for example by a metal block or a spring or elastic element having a height of 0.3 mm to 2.0 mm, the height being related to the dimension along the stacking direction of the metal substrate structure and the at least one terminal and can also be referred to as the thickness of the protrusion extending above the adjacent upper surface of the metal top layer.

[0015] The buffer structural elements can be made of or include at least one of copper, copper alloys, aluminum and aluminum alloys, or any other applicable metal or other conductive material. The metal top layer can also be made of or include at least one of copper, copper alloys, aluminum and aluminum alloys, or any other applicable metal or other conductive material. The buffer structural elements and the metal top layer can include different or the same materials having similar or the same thermal expansion coefficients, for example to provide similar or the same thermal expansion.

[0016] According to a further embodiment of the method, the buffer structural element comprises a coating layer on an upper surface configured to face a lower surface of the at least one terminal during ultrasonic welding and / or a coating layer on a lower surface configured to face a top surface of the metal top layer during ultrasonic welding. Alternatively or additionally, there may be a coating layer on the lower surface of the buffer structure configured to face a top surface of the metal top layer intended to facilitate a bonding connection between the buffer element and the substrate metallization.

[0017] Alternatively or additionally, at least one terminal includes a first coating layer on an upper surface configured to face an ultrasonic welding head during ultrasonic welding, and / or a second coating layer on a lower surface configured to face a metal top layer of a metal substrate structure during ultrasonic welding.

[0018] One or more of the aforementioned coating layers of the buffer structure element and the first and second coating layers of the terminals may be made of or contain precious metals, such as nickel and / or silver and / or gold, and / or one or more other metals. Such coatings may contribute to preventing oxidation and / or improving the conditions of the ultrasonic welding process. Each coating may partially or completely cover a given surface of the buffer structure or the terminal. Furthermore, each coating may comprise one or more layers.

[0019] The buffer structure can be bonded to the circuit metallization or metal top layer by at least one of soldering, gluing, sintering, and dry contact, or any other suitable bonding method. The circuit metallization or metal top layer may have a corresponding coating as well. The buffer structure can be realized as a metal block or a spring or elastic element to form a predetermined protrusion. The mounting of the buffer structure on the top surface of the metal substrate structure is provided at the position where the terminal is to be bonded by ultrasonic welding. Furthermore, there can be two or more buffer structures associated with two or more terminals. The buffer structures each contribute to the protection of the resin layer against mechanical and thermal shocks.

[0020] For example, one or more terminals can be directly welded to the respective buffer structure elements, and the buffer structure elements can be directly attached to the upper surface of the metal top layer to form respective copper-copper direct contacts. Instead of direct contact, one or more coating layers can be installed between the mutually facing surfaces. Thus, the coating layer can be installed between the lower surface of the respective terminal and the upper surface or upper surface of the associated buffer structure element. Alternatively or additionally, a coating layer can be installed between the lower surface of the buffer structure element and the upper surface of the metal top layer.

[0021] The buffer structural element may include a material with a yield strength greater than the yield strength of the material of the terminal or one of the joining partners. Alternatively or additionally, the buffer structural element may include a material with a melting point greater than the melting point of the material of the terminal or one of the joining partners. Such a specification of the material of the joining partners may contribute to a robust and reliable ultrasonic welding process.

[0022] The resin layer forms the dielectric layer and can be realized as a prepreg sheet that is assembled between two metal plates, one above the other, which form the metal top layer and the other below. Such a metallization sheet or plate is bonded to the dielectric resin layer, for example by a lamination process. The required metallization structure of the metal top layer can then be carried out by subsequent steps of masking and etching processes to locally remove the conductive metal, creating the final metallization structure. Alternatively, the upper metallization structure can be formed, for example by cutting or stamping, before the formation of the finished metal substrate structure.

[0023] Alternatively, the resin layer can be formed by molding. For such molded dielectric layers, the molding substance realizes a pumpable substance with predetermined material properties. The pumpable substance is a liquid or viscous feedstock of the resin layer to be formed. For example, the molding substance is an epoxy and / or ceramic-based liquid. Alternatively or additionally, the feedstock of the dielectric layer may be a thermosetting or thermoplastic resin material such as polyamide, PBT, PET, etc. Alternatively or additionally, the feedstock of the dielectric layer may include an inorganic filler, for example based on a ceramic material, for improved thermal conductivity and / or CTE adjustment for the metal top layer and / or metal bottom layer. For example, the molded dielectric layer includes a resin-based dielectric material with a ceramic filler material, for example Al2O3, AlN, BN, Si3N4 or SiO2. For example, the dielectric layer is an epoxy with filler. The dielectric layer can also be based on other materials suitable for transfer, injection or compression molding, or other applicable molding techniques, such as bismaleimide, cyanate ester, polyimide and / or silicone. Alternatively or additionally, the dielectric layer may comprise a ceramic material and / or a hydroset material, or a combination of two or more of the aforementioned components.

[0024] By aligning the metal top layer and the metal bottom layer with respect to each other with a predetermined distance between them, the thickness after the molding dielectric layer is substantially predetermined. For example, the thickness is defined along the stacking direction of the metal substrate structure, which may represent the z-direction. However, alignment can also be performed in the perpendicular x- and y-directions, for example for proper positioning of the metal pattern with respect to the x- and y-directions. For example, alignment can be realized by placing the metal top layer on a release film or liner, or by other fixation, for example in a mold chase of a molding tool. This allows the provided metallization structure of the metal top layer to be accurately positioned with respect to the metal bottom layer, which can be useful, for example, when the metal top layer includes separate metal pads due to different operating potentials. In the case of lamination, the thickness of the resin layer is given by the thickness and behavior of the laminated layers.

[0025] The thickness of the insulating resin layer can have a value of 100 μm to 200 μm. The thickness of the metal top layer can have a value of 0.15 mm to 2.00 mm. The height or thickness of the buffer structural element can have a value of, for example, 0.3 to 2.0 mm. The terminal can have an L-shape with a terminal body extending mainly in the stacking direction and a terminal base extending mainly in a transverse direction substantially perpendicular to the stacking direction. The terminal base may form a plate having a thickness of 0.5 mm to 1.5 mm relative to the stacking direction. The thickness of the terminal base and / or the welded area formed by the ultrasonic welding process may be small compared to other parts of the terminal, for example to provide a stress-reduced ultrasonic welding process. The one or more terminals can be made of or include copper or a copper alloy, for example, and can realize a main terminal or an auxiliary terminal for an electrical signal connection of a semiconductor power module.

[0026] At least one terminal or buffer element may also include a structure prepared for improved ultrasonic welding. Such a weld structure may be realized, for example, by one or more slots, grooves, and / or recesses in the terminal base of the terminal, by roughened or thinned areas. Such a weld structure may be fabricated on the top and / or bottom sides of the respective terminal or buffer element. The particular terminal structure may beneficially affect the ultrasonic welding process and may contribute to the formation of a materially bonding weld joint.

[0027] By using the described manufacturing or mounting method and buffer structural elements, it is possible to negate the adverse effects even when using ultrasonic welding processes, thus reducing the risk of crack or damage formation, especially in the insulating resin sheet of the metal substrate structure, and realizing a low-cost and stable semiconductor power module that allows reliable functioning of the semiconductor power module.

[0028] Finally, it is pointed out that all proposed features and methods can be used alone, but also in combination of two or more.

[0029] According to one embodiment, the semiconductor power module comprises a metal top layer, a metal bottom layer, and an insulating resin layer bonded to both the metal top layer and the metal bottom layer and disposed between them. The semiconductor power module further comprises at least one terminal and a buffer structural element bonded to an upper surface of the metal top layer forming a protrusion for the at least one terminal. The at least one terminal is bonded to the buffer structural element by ultrasonic welding with an ultrasonic welding head such that the buffer structural element is materially bonded to the at least one terminal and disposed between the metal top layer and the at least one terminal.

[0030] As a result of the described semiconductor power modules being capable of being manufactured by the above-mentioned method embodiments, the features and characteristics of the methods are also disclosed with respect to the semiconductor power modules, and vice versa. Thus, the present disclosure includes several aspects, and all features described with respect to one of the aspects are also disclosed herein with respect to the other aspects, even if each feature is not expressly mentioned in the context of a particular aspect.

[0031] According to an embodiment of the semiconductor power module, the buffer structure element comprises a metal block element formed separately from the metal top layer and / or a metal block element formed integrally with the metal top layer, each protruding from the top surface of the metal top layer at a predetermined height in cooperation with the ultrasonic welding process performed. The buffer structure element can have a height of 0.3 mm or 0.5 mm to 2.0 mm relative to the adjacent area of ​​the top surface of the metal top layer and the stacking direction of the metal substrate structure and at least one terminal. For example, the buffer structure element can have a height of 0.4 mm, 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm, 1.0 mm, etc., up to 2.0 mm. The respective width and / or length of the buffer structure element and / or terminal corresponding to the lateral direction perpendicular to the stacking direction of the metal substrate structure can have a value of, for example, 2 mm to 4 mm, respectively.

[0032] The semiconductor power module may further comprise a heat sink coupled with the metal bottom layer of the metal substrate structure to dissipate heat during operation of the semiconductor power module. The metal bottom layer forms the base of the metal substrate structure and may be made of or include copper, aluminum, and / or corresponding alloys. Thus, the semiconductor power module may comprise a separate heat sink. Alternatively or additionally, the metal bottom layer of the metal substrate structure may act as a heat sink itself, for example, configured with ribs, fins, or protrusions on the bottom side relative to the stacking direction to provide beneficial heat dissipation. The metal bottom layer may further function as a base plate of the semiconductor power module.

[0033] The semiconductor power module including the metal substrate structure can be further partially or completely encapsulated by a resin or dielectric gel made by molding or potting. The terminals may function as power terminals or as auxiliary terminals used for example for signal wiring. Furthermore, the semiconductor power module can include two or more embodiments of the buffer structure described above. The semiconductor power module can further include electronic devices such as chips, integrated circuits, sensors and / or other discrete devices.

[0034] The proposed process of ultrasonic welding of the terminal base on the buffer structure mounted on the insulated metal substrate has a strong possibility of significantly reducing the mechanical and thermal effects on the resin insulating sheet. A successful ultrasonic welding process is possible without damaging the heat- and pressure-sensitive resin layer, making the use of this relatively cost-effective substrate technology interesting. Such a method of mounting or manufacturing metal substrate structures can be interesting for large power modules with enhanced reliability requirements and for power modules for higher voltage classes. However, the described method also makes it possible to manufacture metal substrate structures and semiconductor power modules that can be applied to miscellaneous products, for example low-voltage industrial and automotive products operating in the voltage range below 0.5 kV. Despite the additional process steps of joining metal blocks at the terminal base location or preparing local parts of the substrate top metallization with enhanced thickness, significant cost reductions can be possible when replacing the standard configuration of a ceramic substrate soldered to a base plate with an insulated metal substrate. On the one hand, material costs can be reduced and on the other hand, some other process steps such as the joining process between the substrate and the base plate in the power module assembly are not required.

[0035] Exemplary embodiments are described below with the aid of schematic diagrams and reference numbers. [Brief description of the drawings]

[0036] [Figure 1] 1 is a side view of one embodiment of a method for attaching terminals to a metal substrate structure of a semiconductor power module. [Diagram 2] 11 is a side view of a further embodiment of a method for attaching a terminal to a metal substrate structure of a semiconductor power module. [Diagram 3] 4 is a flow chart of a method for attaching one embodiment of a terminal to a metal substrate structure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0037] The accompanying drawings are included to provide further understanding. It should be understood that the embodiments shown in the figures are illustrative representations and are not necessarily drawn to scale. The same reference numbers indicate elements or components having the same functions. Insofar as the elements or components correspond to each other with respect to their functions in different figures, the description thereof will not be repeated for each of the following figures. For clarity, elements may not be labeled with corresponding reference numbers in all figures in some cases.

[0038] 1 shows a side view of one embodiment of method steps for attaching a terminal base or terminal 4 to a metal substrate structure 3 of a semiconductor power module 10 for a semiconductor device. The semiconductor power module 10 comprises a metal substrate structure 3 having a top metal layer 17, a bottom metal layer 19, and an insulating resin layer 18 arranged between the top metal layer 17 and the bottom metal layer 19 with respect to the stacking direction A.

[0039] The semiconductor power module 10 further comprises a cooler or heat sink 1 having a rib structure bonded to a metal substrate structure 3 by a bonding layer 2 and / or a layer of thermal interface material. With respect to the illustrated stacking direction A, the terminals 4 should be bonded to the top metal layer 17 and below the heat sink 1 are bonded to the bottom metal layer 19 via the bonding layer 2.

[0040] In this regard, terms such as "above," "under," "top," "upper," and "bottom" refer to the orientation or direction as shown in the figures and relative to the stacking direction A. Thus, the height or thickness of a described element is relative to the stacking direction A, and the transverse direction B is oriented perpendicular to the stacking direction A (see Figures 1 and 2).

[0041] The thickness of the insulating resin layer 18 can be, for example, 100-200 μm. The thickness of the circuit metallization formed by the metal top layer 17 can be 0.15-2.00 mm. The thickness of the metal bottom layer 19, which can realize a base plate, can be 2-5 mm and can be configured to dissipate heat from the metal substrate structure 3 and the semiconductor power module 10. The resin layer 18 can include an epoxy resin material, but other types of resins are also possible, such as other thermosetting or thermoplastic resins. The resin layer 18 can be formed as a resin sheet or as a prepreg sheet that is assembled or laminated between the two metal layers 17, 19.

[0042] Alternatively or additionally, the metal substrate structure 3 comprises a resin layer 18 formed by molding, for example by injection, transfer or compression molding. The resin of the resin layer may contain inorganic fillers, ceramic materials such as AlN, Si3N4, BN, Al2O3 or SiO2. The metal bottom layer 19 may be made of or may contain copper and / or aluminum and / or corresponding alloys. The circuit metallization formed by the metal top layer 17 may be made of or may contain copper and / or aluminum and / or corresponding alloys. Furthermore, the metal top layer 17 may be partially or completely coated, the corresponding coating of the circuit metallization being made of or may contain precious metals such as nickel and / or gold and / or silver, and / or other metals.

[0043] The semiconductor power module 10 further comprises a buffer structural element formed as a metal block element 7 made of or including copper, aluminum, and / or corresponding alloys, and / or corresponding alloys or other applicable conductive materials or metals. The metal block element 7 is configured to be attached to the upper surface 171 of the metal top layer 17 to form a protrusion for the terminal 4 having a predetermined height H. The terminal 4 and the metal block element 7 are adapted to be connected by ultrasonic welding using an ultrasonic welding head 6 such that the metal block element 7 is disposed between the metal top layer 17 and the terminal 4 and is materially bonded to the terminal 4.

[0044] The metal block element 7 is configured to form a protrusion on the upper surface 171 of the metal top layer 17 that allows the resin layer 18 to be protected from mechanical and thermal shocks during the ultrasonic welding process. The metal block element 7 can be formed as a separate element attached to the metal top layer 17 by the bonding layer 11 (see FIG. 1). Alternatively, the metal block element 7 can be integrally formed with the metal top layer 17 (see FIG. 2). Alternatively, the semiconductor power module 10 can comprise both metal block elements 7 formed as separate elements and those integrally formed with the metal top layer 17. For example, a separate metal block element 7 can be attached to the integral one. Respectively, the metal block element 7 realizes a locally greater thickness or reinforcement of the circuit metallization of the metal top layer 17 at the location where the terminal 4 is to be attached. The metal block element 7 can be made of or include copper, aluminum and / or corresponding alloys and / or corresponding alloys or any other applicable conductive material or metal.

[0045] The metal block element 7 comprises a coating layer 8 arranged on the upper face or top surface 71 of the metal block element 7, which partially or completely covers the top surface 71. Alternatively or additionally, a coating may be present on the bottom surface of the metal block element 7, at least when formed as a separate element. The metal block coating 8 may improve the ultrasonic welding process and / or may be used for example for protection against oxidation, but may also contribute to a secure and reliable mounting of the metal block element 7 onto the circuit metallization of the metal top layer 17 of the metal substrate structure 3. The metal block coating layer 8 may be made of or may include noble metals such as nickel, silver and / or gold, and / or other metals. The respective coating may be formed to include a single layer or a stack of multiple layers. In that case, the metal block element 7 is formed as a separate element that can be connected to the top surface 171 of the metal top layer 17 by soldering, sintering, gluing, dry contact and / or other applicable joining methods.

[0046] The terminal 4 may be made of or may include copper, aluminum and / or corresponding alloys and may realize a main or auxiliary terminal of the semiconductor power module 10. Furthermore, the terminal 4 may comprise a first coating layer 5 partially or completely covering the upper surface 41 of the terminal 4. The terminal 4 may further comprise a second coating layer 9 partially or completely covering the lower surface 42 of the terminal 4. The first and second coating layers 5, 9 may favorably affect the ultrasonic welding process and / or protect the surface of the terminal 4 from oxidation and may be made of or include precious metals such as nickel, gold, silver and / or other metals. The lower second coating layer 9 may also be useful for attaching the terminal 4 to the metal block element 7.

[0047] The method steps for attaching a terminal 4 to a metal substrate structure 3 may follow the flow chart shown in Figure 3. For example, according to the embodiment shown in Figure 1, in step S1 at least one terminal 4 is provided. The terminal 4 may be provided with a first and / or second coating layer 5, 9 on its upper surface 41 and / or lower surface 42.

[0048] In step S2, the metal substrate structure 3 is provided with a metal top layer 17, a metal bottom layer 19 and an insulating resin layer 18 disposed therebetween. A coating layer may also be available, at least locally, on the surface of the metal substrate structure 3.

[0049] In step S3, the metal block elements 7 are provided, for example as separate elements, and joined to the metallization of the metal top layer 17 at the intended terminal locations to form protrusions for the terminals 4 on the top surface 171 of the metal top layer 17. Alternatively or additionally, the metal block elements 7 may be provided integrally formed with the metallization of the metal top layer 17. The metal block elements 7 may be provided with a coating layer 8 on their top surface 71. Alternatively or additionally, if formed as separate elements, there may be a coating on the respective back side metal block elements 7.

[0050] In a further step S4, the terminal 4 is welded to the metal block element 7 and thereby joined to the metal top layer 17 of the metal substrate structure 3 by ultrasonic welding using the ultrasonic welding head 6. The welding process forms a weld joint between the terminal 4 and the metal block element 7, firmly materially bonding the terminal 4 and the metal block element 7.

[0051] If the metal block element 7 is formed integrally with the metal top layer 17 (see FIG. 2), it realizes a given thicker portion of the circuit metallization of the metal top layer 17 with a predetermined thickness or height H. In this case, the metal block element 7 is provided and is already bonded to the metal top layer 17 in step S2 or even available. In this case, the protrusion is realized in the manufacture of the metal top layer 17 itself. In step S3, a coating layer 8 can be provided, for example, on the upper surface 71 of the metal block element 7. This can also be realized in step 2, where the provided metal substrate structure 3 also has a coating layer.

[0052] The placement of the metal block element 7 between the circuit metallization or metal top layer 17 and the terminals 4 provides protection for the resin layer 18 and also allows for an improvement in the ultrasonic welding process. The metal block element 7 may have a thickness or height H from 0.3 mm to 2.0 mm.

[0053] The described embodiment relates to ultrasonic welding of power and auxiliary terminals 4 on an insulated metal substrate or insulated metal base plate realized by a metal substrate structure 3. The insulated metal substrate can be prepared by lamination or forming techniques, for example using stamped metal sheets for the circuit metallization forming the metal top layer 17. It is therefore also realizable on substrate structures based on alternative insulated metal substrate technologies, such as stamped and formed metal substrates. The ultrasonic welding process is facilitated by a buffer structure including a metal block element 7 arranged between the top metallization of the insulated metal substrate and the base of the terminals 4.

[0054] In contrast to conventional substrates based on ceramic insulating sheets, the insulated metal substrate consists of a relatively thick metal base, mostly made of aluminum or copper or a corresponding alloy, an insulating sheet based on a resin material, and a circuit metallization, also made of aluminum or copper or a corresponding alloy. The resin material used for the insulating resin layer 18 is, for example, an epoxy resin containing a thermally conductive inorganic filler material. Such a filler material can consist of ceramic particles prepared from aluminum nitride (AlN), silicon nitride (Si3N4), boron nitride (BN), and / or aluminum oxide (Al2O3).

[0055] The mechanical and thermal effects of the ultrasonic welding process on the resin insulating layer 17 are reduced or suppressed by the implementation of a buffer structure in the form of a metal block element 7 between the top surface 171 of the metal substrate structure 3 and the base of the terminal 4. A welded connection is then prepared between the base of the terminal 4 and the metal block element 7, so that mechanical stresses and heat occur mostly in the metal block element and the terminal base, but not, or at least very little, in the metal substrate structure 3 itself. The metal block element 7 is bonded to the top surface 171 of the circuit metallization of the metal top layer 17, for example, before the ultrasonic welding of the main or auxiliary terminal 4. To fix the metal block element 7 on the top surface 171, soldering, gluing, sintering, dry contact, or any other applicable bonding method may be used. Alternatively, the metal block element 7 can be bonded to the top surface 171 of the circuit metallization of the metal top layer 17 after the ultrasonic welding of the main or auxiliary terminal 4 to the metal block element 7, in order to prevent mechanical shocks to the insulating resin layer 18.

[0056] Instead of using an additional metal block element 7 used as a buffer structure as shown in Fig. 1, a specific modification of the circuit metallization of the metal top layer 17 of the insulated metal substrate structure 3 is also possible. Here, the buffer structure between the circuit metallization and the base of the terminals 4 is realized by a locally thicker substrate metallization at the location of the terminals 4 (see Fig. 2). As in the first embodiment, the locally thicker part of the circuit metallization also realizes an integrally formed metal block element 7.

[0057] 1-2 above represent improved metal substrate structures 3, semiconductor power modules 10, and manufacturing methods, and therefore do not constitute an exhaustive list of all embodiments. Actual arrangements and methods may differ from the embodiments shown, for example, for the metal substrate structures 3 and semiconductor power modules 10. [Explanation of symbols]

[0058] Reference sign 1 Heatsink 2 Bonding Layer 3 Metal substrate structure 4 Terminals 41 Top of terminal 42 Bottom surface of terminal 5 First Coating Layer 6 Ultrasonic Welding Head 7 Buffer structural elements / metal blocks / protrusions 71 Top surface of metal block element 8 Metal Block Coating Layer 9 Second Coating Layer 10. Semiconductor power modules 11 Bonding layer 17 Metal Top Layer 171 Top surface of top metal layer 18 Resin layer 19 Metal Bottom Layer A Stacking direction B. Horizontal H Height of the buffer structure S(i) Steps of a method for manufacturing a metal substrate structure for a semiconductor power module

Claims

1. A method for attaching a terminal (4) to a metal substrate structure (3) for a semiconductor power module (10), comprising the steps of: Providing at least one terminal (4); Providing the metal substrate structure (3) with a top metal layer (17), a bottom metal layer (19), and an insulating resin layer (18) disposed between the top metal layer (17) and the bottom metal layer (19); providing a buffer structural element (7) and bonding it to a top surface (171) of said metal top layer (17) to form a protrusion for said at least one terminal (4); bonding said at least one terminal (4) to said buffer structure element (7) by ultrasonic welding using an ultrasonic welding head (6) operating at at least one of an ultrasonic frequency in the range of 10-100 kHz and an amplitude in the range of 10-100 μm and a mechanical pressure in the range of 100-1000 N acting on said terminal (4), said buffer structure element (7) and / or said metal substrate structure (3) such that said buffer structure element (7) is disposed between said metal top layer (17) and said at least one terminal (4) and is materially bonded to said at least one terminal (4) by a weld joint; A method comprising:

2. Providing and coupling said buffer structure element (7) comprises: providing a metal block element separate from said metal top layer (17); bonding said metal block element to said top surface (171) of said metal top layer (17) by a bonding layer (11); The method of claim 1 , comprising:

3. Providing and coupling said buffer structure element (7) comprises: providing a metal block protrusion integrally formed with said metal top layer (17) protruding from said top surface (171) of said metal top layer (17); The method of claim 1 or 2, comprising:

4. 10. The method according to any one of the preceding claims, wherein the buffer structural element (7) is provided with a height (H) of 0.3 to 2.0 mm in a stacking direction (A) of the metal substrate structure (3) and the at least one terminal (4) relative to an adjacent area of ​​the top surface (171) of the metal top layer (17).

5. 10. The method according to any one of the preceding claims, wherein the buffer structural element (7) and the metallic top layer (17) are provided comprising at least one of copper, a copper alloy, aluminium and an aluminium alloy.

6. Providing said buffer structure element (7) comprises: Providing said buffer structural element (7) with a coating layer (8) on an upper surface (71) configured to face a lower surface (42) of said at least one terminal (4) during ultrasonic welding, and / or a coating layer (11) on a lower surface configured to face said upper surface (171) of said metal top layer (17) during ultrasonic welding.

2. The method of any one of the preceding claims, comprising:

7. Providing the at least one terminal (4) Providing said at least one terminal (4) with a first coating layer (5) on a top surface (41) configured to face said ultrasonic welding head (6) during ultrasonic welding, and / or a second coating layer (9) on a bottom surface (42) configured to face said metal top layer (17) of said metal substrate structure (3) during ultrasonic welding.

2. The method of any one of the preceding claims, comprising:

8. 8. The method according to claim 6 or 7, wherein at least one of the coating layer (8) of the buffer structural element (7) and the first coating layer (5) of the terminal (4) and the second coating layer (9) of the terminal (4) comprises nickel and / or silver and / or gold.

9. 10. The method according to any one of the preceding claims, wherein the buffer structural element (7) is bonded to the metallic top layer (17) by at least one of soldering, sintering, gluing and dry contact.

10. 10. The method according to any one of the preceding claims, wherein the buffer structural element (7) comprises a material with a yield strength greater than a yield strength of a material of the terminals (4) or of the metallic top layer (17).

11. 10. The method according to any one of the preceding claims, wherein the buffer structural element (7) comprises a material with a melting point higher than the melting point of a material of the terminals (4) or the metallic top layer (17).

12. A metal substrate structure (3) having a metal top layer (17), a metal bottom layer (19), and an insulating resin layer (18) bonded between both the metal top layer (17) and the metal bottom layer (19); At least one terminal (4); a buffer structure element (7) bonded to an upper surface (171) of the metal top layer (17) forming a protrusion for the at least one terminal (4), the at least one terminal (4) being bonded to the buffer structure element (7) by ultrasonic welding using an ultrasonic welding head (6) operated with at least one of an ultrasonic frequency in the range of 10-100 kHz and an amplitude in the range of 10-100 μm and a mechanical pressure in the range of 100-1000 N acting on the terminal (4), the buffer structure element (7) and / or the metal substrate structure (3) such that the buffer structure element (7) is materially bonded to the at least one terminal (4) arranged between the metal top layer (17) and the at least one terminal (4) by a weld joint; A semiconductor power module (10).

13. 13. The semiconductor power module (10) according to claim 12, wherein the buffer structure elements (7) comprise metal block elements formed separately from the metal top layer (17) and / or metal block protrusions formed integrally with the metal top layer (17), each protruding from the top surface (171) of the metal top layer (17).

14. 14. The semiconductor power module (10) according to claim 12 or 13, wherein the buffer structure element (7) is provided at a height (H) of 0.3 to 2.0 mm in a stacking direction (A) of the metal substrate structure (3) and the at least one terminal (4) relative to an adjacent area of ​​the top surface (171) of the metal top layer (17).

15. 15. The semiconductor power module (10) according to any one of claims 12 to 14, wherein at least one of the buffer structural elements (7), the terminals (4) and the metal top layer (17) comprises a coating layer (5, 8, 9, 11) on a respective upper surface (41, 71, 171) configured to face the ultrasonic welding head (6) during ultrasonic welding and / or on a respective lower surface (42) configured to face the metal top layer (17) of the metal substrate structure (3) during ultrasonic welding.

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