Wafer Container Purge Port Assembly

Abstract

A purge port assembly for a wafer container includes a purge module configured to allow the entry of purge gas and a transition section disposed above an intermediate outlet of the purge module. The transition section includes a receiver configured to receive purge gas exhausted from the purge module, an outlet connector configured to attach to a diffuser, and an intermediate conduit. The intermediate conduit connects the receiver to the outlet connector and extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver. The intermediate conduit has a length that spaces the outlet connector from the receiver. The wafer container includes a shell and a purge port assembly. The shell includes an interior space. The purge port assembly extends through an opening in the shell into the interior space.

Description

[Technical field]

[0001] The present disclosure relates to a purge port in a wafer container, and more particularly, to a purge port assembly in a front-opening integrated pod. [Background technology]

[0002] Semiconductor devices may be fabricated from a wafer substrate. The wafer substrate, or simply wafer, undergoes a series of fabrication steps. For example, the fabrication steps may include, but are not limited to, material layer deposition, doping, etching, or chemically or physically reacting materials of the substrate. One or more wafers may be stored and transported in a wafer container, such as a front-opening integrated pod ("FOUP"), before, during, or after fabrication. In some fabrication steps, the wafers may be processed while still inside the wafer container. The wafer container may include one or more purge ports for supplying a purge gas to the interior of the wafer container. For example, the purge gas may be a gas supplied to keep the interior of the FOUP at a positive pressure (e.g., higher than the pressure of the external environment and higher than atmospheric pressure) while the FOUP is open. Summary of the Invention

[0003] In one embodiment, the purge port assembly is for a wafer container. The purge port assembly includes a purge module and a transition portion disposed over an intermediate outlet of the purge module. The purge module is configured to allow an inflow of purge gas. The transition portion is disposed over the intermediate outlet of the purge module. The transition portion includes a receiver, an outlet connector, and an intermediate conduit. The receiver has an inlet opening configured to receive purge gas exhausted from the purge module. The outlet connector is configured to attach to a diffuser. The intermediate conduit connects the receiver to the outlet connector. The intermediate conduit extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver. The intermediate conduit has a length that spaces the outlet connector from the receiver.

[0004] In one embodiment, the wafer container includes a shell and a purge port assembly. The shell includes an interior space. The purge port assembly extends through an opening in the shell into the interior space. The purge port assembly includes a purge module and a transition section. The module is disposed within the opening in the shell and configured to allow an inflow of purge gas. The transition section includes a receiver, an outlet connector, and an intermediate conduit. The receiver has an inlet opening configured to receive purge gas exhausted from the purge module. The outlet connector is configured to attach to the diffuser. The intermediate conduit connects the receiver to the outlet connector. The intermediate conduit extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver. The intermediate conduit has a length that spaces the outlet connector from the receiver.

[0005] In one embodiment, a purge port assembly for a wafer container includes a purge module configured to allow the inflow of purge gas and a transition section disposed above an intermediate outlet of the purge module. The transition section includes a receiver having an inlet opening configured to receive purge gas exhausted from the purge module, an outlet connector configured to attach to a diffuser, and an intermediate conduit connecting the receiver to the outlet connector. The intermediate conduit has a tubular shape extending from the receiver to the outlet connector and a length spacing the outlet connector from the receiver.

[0006] In one embodiment, the minimum internal cross-sectional area of ​​the intermediate conduit is at least 13 mm 2 It is.

[0007] In one embodiment, the pressure drop across the middle passage is less than 20 kPa at a purge gas flow rate of 100 SLPM.

[0008] In one embodiment, the intermediate conduit extends from the receiver at an acute angle relative to the axis of the inlet opening of the receiver, hi one embodiment, the acute angle is between 15 and 35 degrees.

[0009] In one embodiment, the intermediate conduit includes a bend, hi one embodiment, the bend is continuous along the length of the intermediate conduit.

[0010] In one embodiment, the intermediate conduit extends such that the outlet connector is completely spaced from the receiver when the purge port assembly is viewed in plan.

[0011] In one embodiment, the portion of the intermediate conduit that protrudes from the top surface of the receiver has a width that is less than half the diameter of the body of the receiver.

[0012] In one embodiment, the ratio of the area of ​​the inlet opening of the receiver to the smallest cross-sectional area of ​​the intermediate conduit is greater than or equal to 23:1.

[0013] In one embodiment, the portion of the intermediate conduit that projects above the upper surface of the receiver is disposed entirely to one side of the centerline of the receiver.

[0014] In one embodiment, the transition portion is integrally formed with the outlet connector.

[0015] In one embodiment, the purge module and transition portion are configured to be disposed within an opening in a shell of the wafer container, the opening extending through a bottom surface of the shell of the wafer container, and the purge port assembly is configured to block the opening in the shell. In one embodiment, the transition portion is configured to extend from the opening into the interior space of the wafer container.

[0016] In one embodiment, a wafer container includes a shell including an interior space, a purge port assembly extending through an opening in the shell into the interior space, the purge port assembly including a purge module disposed in the opening in the shell, the purge module including a check valve configured to admit purge gas, and a transition portion disposed above the purge module in the opening in the shell. The transition portion includes a receiver having an inlet opening configured to receive purge gas exhausted from the purge module, an outlet connector configured to attach to a diffuser, and an intermediate conduit connecting the receiver to the outlet connector. The intermediate conduit has a tubular shape extending from the receiver to the outlet connector and a length spacing the outlet connector from the receiver.

[0017] In one embodiment, the transition portion extends from an opening in the shell into the interior space of the shell, the transition portion receiver is disposed in the opening in the shell, the transition portion outlet connector is disposed in the interior space of the shell, and the intermediate conduit extends from the opening in the shell into the interior space of the shell.

[0018] In one embodiment, the intermediate conduit extends at an acute angle relative to the axis of the inlet opening of the receiver, hi one embodiment, the acute angle is in the range of 15 to 35 degrees.

[0019] In one embodiment, the wafer container is a front-opening integrated pod, where the shell includes a front opening and a door configured to be disposed within the front opening.

[0020] In one embodiment, the wafer container further includes a diffuser, the diffuser having a column shape and including an end that is matingly connected to the outlet connector. [Brief description of the drawings]

[0021] [Figure 1A] FIG. 1 illustrates a front perspective view of one embodiment of a wafer container. [Figure 1B]FIG. 1B is a front perspective view of the wafer container of FIG. 1A when open, in one embodiment. [Diagram 2] FIG. 1C is a cross-sectional view of the wafer container of FIG. 1B, according to one embodiment. [Diagram 3] FIG. 3 is an enlarged view of a purge port assembly of the wafer container of FIG. 2. [Figure 4] FIG. 1 is a cross-sectional view of one embodiment of a purge port assembly. [Diagram 5] FIG. 5 is a cross-sectional perspective view of a transition portion of the purge port assembly of FIG. 4. [Figure 6] 1 is a cross-sectional view of a conventional transition portion of a purge port assembly. [Figure 7A] FIG. 1 illustrates a perspective view of a purge port assembly according to one embodiment. [Figure 7B] FIG. 7B is a cross-sectional view of the purge port assembly of FIG. 7A. [Figure 8A] FIG. 1 illustrates a perspective view of a purge port assembly according to one embodiment. [Figure 8B] FIG. 8B is a cross-sectional view of the purge port assembly of FIG. 8A. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] Like numbers refer to like features.

[0023] The present disclosure relates to a wafer container and a purge port assembly within the wafer container.

[0024] As used herein, a portion of a channel is defined as "curved" if the centerline of the channel, which is in the center of the cross-sectional area and perpendicular to the plane of the cross section at the cross-sectional area, traces out an arc having a radius between the portions of the channel. A channel may be defined as "curved" if it includes one or more portions that are curved as defined herein, and the one or more curved portions include at least one-quarter of the length of the channel.

[0025] 6 is a cross-sectional view of an example of a conventional transition section 540 of a purge port assembly. The transition section 540 includes a receiver 542 and an outlet connector 562. The receiver 540 and the outlet connector 562 are formed in the transition section 540 so as to be in direct contact with each other. For example, the top end 542 of the receiver 540 and the bottom end 563 of the outlet connector 562 are in direct contact with each other. In particular, the outlet opening in the top end 542 of the receiver 540 and the inlet opening in the bottom end 563 of the outlet connector 562 are the same opening 590. For example, the opening 590 is a window formed at the intersection of the receiver 540 and the outlet connector 562. The receiver 540 and the outlet connector 562 are formed in the conventional transition section 540 so as not to be spaced apart from each other.

[0026] 1A and 1B are front perspective views of one embodiment of a wafer container 1. In the illustrated embodiment, the wafer container 1 is a front opening integrated pod ("FOUP"). The container 1 includes a shell 4 and a door 6. The shell 4 includes an opening 8 (e.g., a front opening). The door 6 is coupled to the shell 4 and covers the front opening 8, forming an interior space 10. This interior space 10 may also be referred to as a closed space of the wafer container 1. For example, the door 6 may be coupled to the shell 4 by being mechanically latched or suction fitted into a corresponding opening in the shell 4. For example, the door 6 in one embodiment may be coupled to the shell 4 (e.g., via a hinge) on one of the top, bottom, or either side of the opening 8 of the shell 4. The door 6 covers the opening 8, and the container 1 may be accessed by moving (e.g., opening, removing) the door 6. FIG. 1A shows the wafer container 1 when closed (e.g., with the door 6 covering the opening 8). FIG. 1B shows the wafer container 1 in an open state (eg, with the door 6 removed / uncoupled).

[0027] FIG. 2 is a partial cross-sectional view of the wafer container 1 shown in FIG. 1B according to one embodiment. The wafer container 1 includes a purge port assembly 20 that forms a purge port in the wafer container 1 for supplying purge gas into the interior space 10. The purge port is formed in the bottom 12 of the shell 4. The purge port assembly 20 extends through the shell 4 into the wafer container 1. The container 1 may include one or more purge ports. For example, the container 1 in FIG. 2 includes four purge ports (e.g., two purge ports are hidden in FIG. 2). In another embodiment, the container 1 may include a different number of purge ports (e.g., one, two, three, five, etc.). As shown in FIG. 2, the purge port assembly 20 may be used for a rear purge port of the container 1 that is closer to the rear than the front of the shell 4 (e.g., closer to the rear than the front opening 8).

[0028] The vessel 1 is configured to hold one or more semiconductor substrates (not shown) within its interior space 10. In one embodiment, the vessel 1 is configured to hold a plurality of semiconductor substrates. The purge port assembly 20 is for supplying a purge gas into the interior space 10 of the vessel 1. For example, the purge gas supplied through the purge port may generally include, but is not limited to, an inert gas (e.g., nitrogen), filtered air (e.g., clean dry air), and the like. FIG. 2 includes dashed arrows illustrating the general flow of the purge gas through the purge port assembly 20.

[0029] FIG 3 is a partial enlarged view of the wafer container 1 of FIG 2. In particular, FIG 3 shows an enlarged view of the purge port assembly 20 shown in FIG 2. As shown in FIG 3, the purge port assembly 20 extends through the bottom 12 of the shell 4. The shell 4 includes an opening 14 in its bottom 12 that extends through the bottom 12 to the interior space 10. The purge port assembly is disposed in the opening 14 in the shell 4. The purge port assembly 20 is configured to block the opening 14 such that fluid can only pass through the opening 14 and enter the interior space 10 by flowing through the purge port assembly 20.

[0030] The purge port assembly 20 includes a purge module 22, a transition section 40, and a diffuser 80. The purge module 22 is configured to block ambient air and allow purge gas to flow into the purge port assembly 20. For example, a purge nozzle (not shown) is configured to supply purge gas to the purge module 22. The purge module 22 may include a check valve 24 that opens to allow purge gas to flow into and through the purge port assembly 20, and in some embodiments, a grommet configured to form an interface with the purge nozzle. The check valve 24 prevents ambient air from flowing into the purge port assembly 20. In one embodiment, the check valve 24 may be configured to be actuated open by the pressure of the purge gas (e.g., greater than ambient pressure). In one embodiment, the check valve 24 may be configured to be actuated open by the purge nozzle physically contacting and pushing the check valve 24 onto the check valve 24.

[0031] 4 is a cross-sectional view of the purge port assembly 20 without the diffuser 80. Purge gas flows through the purge port assembly 20 by entering through the exterior inlet 26 in the purge module 22 and exiting through the diffuser 80. The purge gas flows from the purge module 22 to the transition portion 40 and from the transition portion 40 to the diffuser 80. The purge port assembly 20 may also include a filter 38 disposed between the purge module 22 and the transition portion 40. The filter 38 is configured to remove, for example, solid particulates from the purge gas as it flows through the purge port assembly 20.

[0032] The purge module 22 is disposed within the opening 14 in the shell 4. The purge module 22 includes an exterior inlet 26 and a first intermediate outlet 28. Purge gas enters the purge module 22 via the exterior inlet 26, flows through the purge module 22, and then exits the purge module 22 via the (first) intermediate outlet 28. The purge gas exiting the purge module 22 then flows into a transition section 40. In one embodiment, the purge gas may pass through a filter 38 as it flows from the purge module 22 to the transition section 40, as shown in FIG. 3 .

[0033] As shown in FIG. 3 , the transition portion 40 is disposed above the outlet of the purge module 22 (e.g., the intermediate outlet 28). The transition portion 40 includes a receiver 42, an outlet connector 52, and an intermediate conduit 62. The transition portion 40 is disposed within the opening 14 in the shell 4. The transition portion 40 is superimposed on the purge module 22 within the opening 14 in the shell 4. For example, the transition portion 40 is disposed above the purge module 22 within the opening 14. The intermediate conduit 62 extends from the opening 14 in the shell 4 into the interior space 10. The outlet connector 52 is disposed within the shell 4 (e.g., within the interior space 10 of the shell 4).

[0034] 4, the transition section 40 is formed as a single, integral piece. For example, in the illustrated embodiment, the transition section 40 is a single, integral piece formed by polymer injection molding. The receiver 42 includes an inlet opening 44 configured to receive purge gas discharged from the purge module 22. The inlet opening 44 is disposed above the outlet 28 of the purge module 22 such that the purge gas discharged from the purge module 22 flows into the receiver 42 of the transition section 40 through the inlet opening 44.

[0035] The outlet connector 52 is configured to attach to a diffuser 80 (shown in FIGS. 2 and 3). The purge gas flows through the diffuser into the interior space 10 of the wafer container 1. An end of the diffuser 80 may be matingly connected onto the outlet connector 52. In the illustrated embodiment, the outlet connector 52 has barbs configured to connect and hold the diffuser 80 on the outlet connector 52. In alternative embodiments, the outlet connector 52 may use a different structure and / or configuration to connect the outlet connector 52 and the diffuser 80. The purge port assembly 20 exhausts the purge gas from the diffuser 80 into the interior space 10. In the illustrated embodiment, the diffuser 80 has a column shape (e.g., as shown in FIG. 2). However, it should be understood that in other embodiments, the diffuser 80 may have a different shape (disk shape, cap shape, etc.).

[0036] 5 shows a perspective view of the transition section 40. The intermediate conduit 62 connects the receiver 42 to the outlet connector 52. Purge gas flows from the receiver 42 through the intermediate conduit 62 to the outlet connector. The intermediate conduit 62 has a tubular shape. In the illustrated embodiment, the tubular shape of the intermediate conduit 62 is circular (e.g., the cross section of the tubular shape is circular). It should be understood that the tubular shape of the intermediate conduit 62 can be of different shapes. In another embodiment, the tubular shape of the intermediate conduit 62 can be elliptical, rectangular, hexagonal, etc.

[0037] The intermediate conduit 62 is 13 mm 2 The purge gas passes through the minimum internal cross-sectional area A2 of the intermediate conduit 62 (e.g., the cross-sectional area is the cross-sectional area of ​​the inner open cross section of the intermediate conduit 62). In one embodiment, the minimum internal cross-sectional area A2 of the intermediate conduit 62 is 15 mm 2 In one embodiment, the minimum internal cross-sectional area A2 of the intermediate conduit 62 is 18 mm 25, the minimum internal cross-sectional area A3 of the outlet connector 52 is at least equal to the minimum cross-sectional area A2 of the intermediate conduit 62. For example, the "internal cross-sectional area" refers to the cross-sectional area of ​​the open portion through which the purge gas flows (e.g., the cross-sectional area along a plane perpendicular to the flow direction of the purge gas).

[0038] As shown in FIG. 4 , the intermediate conduit 62 extends from the receiver 42 at an acute angle α relative to the axis 46 of the inlet opening 44 of the receiver 42. The axis 42 of the receiver 42 is offset from the axis 54 of the outlet connector 52. At least a portion of the outlet connector 52 does not vertically overlap the receiver 42 (e.g., the right outer wall 53 of the outlet connector 52 does not vertically overlap the receiver 42). For example, the vertical may be a direction perpendicular to the bottom of the purge module 22 (e.g., perpendicular to the bottom 12 of the shell 4). In one embodiment, the acute angle α at which the intermediate conduit 62 extends from the receiver 42 is 15-35 degrees relative to the axis 46 of the inlet opening 44 of the receiver 42. In one embodiment, the acute angle α at which the intermediate conduit 62 extends from the receiver 42 is 20-30 degrees. For example, the axis of the opening is an axis extending through the opening (e.g., a vertical axis in the direction of flow of the purge gas into the opening).

[0039] The intermediate conduit 62 has a length L that spaces the outlet connector 52 from the receiver 42. The intermediate conduit 62 has a length L that is greater than an inner width W of the conduit 62. The inner width W is the width measured between the interior sides of the conduit (e.g., the smallest inner diameter of a circular tubular inner conduit, etc.). For example, the inner width W extends in a direction perpendicular to the length L of the intermediate conduit. In one embodiment, the inner width W is the smallest inner width of the intermediate conduit 62. In one embodiment, the inner width W is the largest inner width of the intermediate conduit 62.

[0040] The pressure drop across the intermediate conduit is less than 20 kPa at a purge gas flow rate of 100 standard liters per minute (SLPM). For example, the pressure drop may be measured from the pressure of the purge gas in the receiver 42 to the pressure of the purge gas in the outlet connector 52. The purge gas used to measure the pressure drop may be air.

[0041] FIG. 5 is a perspective view of a cross section of the transition portion 40 of FIG. 4. The receiver 42 of the transition portion 40 includes a first intermediate inlet 48, a second intermediate outlet 49, a side wall 50, and an end wall 54. The first intermediate inlet 48 forms an inlet opening 44 of the receiver 42. Purge gas enters the receiver 42 through the (first) intermediate inlet 48 and exits the receiver 42 through the (second) intermediate outlet 49. The inlet opening 44 and the (first) intermediate inlet 48 are formed by one or more side walls 50. For example, the left and right side walls 50 of the receiver may be formed by a continuous wall having a tubular shape (e.g., a circular wall). The end walls 51 and the inlet opening 44 are disposed at opposite ends of the receiver 42 (e.g., the top and bottom of the receiver 42). One of the side walls 50 (e.g., the left side wall 50 in FIG. 5) extends from the end wall 51. The end wall 51 may connect one or more of the side walls 50 to the intermediate conduit 62 (e.g., the left side wall 50 in FIG. 5). The second intermediate outlet 49 is formed by an end of one of the side walls 50 (e.g., the right side wall 50 in FIG. 5) and an end of the end wall 51. The second intermediate outlet 49 faces at an angle (e.g., not facing vertically downward, not facing parallel to the axis 54, and not facing parallel to the axis 46). The second intermediate outlet 49 may extend between an end of one of the side walls 50 (e.g., the right side wall in FIG. 4) and an end of the end wall 51, at an angle to the side wall 50 and at an angle to the end wall 51 (e.g., not parallel to the end wall 51 and not parallel to the right side wall in FIG. 4).

[0042] The outlet connector 52 includes a second intermediate inlet 56. Purge gas flows into the outlet connector 52 from an intermediate conduit 62 through the (second) intermediate inlet 56. The intermediate conduit 62 extends from the (second) intermediate outlet 49 of the receiver 42 to the (second) intermediate inlet 56 of the outlet connector 52. The intermediate conduit 62 fluidly connects the outlet 49 of the receiver 42 to the (second) intermediate inlet 56 of the outlet connector 52. The (second) intermediate outlet 49 of the receiver 42 is spaced from the (second) intermediate inlet 56 of the outlet connector 52 by the length L of the outlet connector 52. The intermediate inlet 56 of the outlet connector 52 extends at an angle (e.g., not facing vertically downward, not facing parallel to the axis 54, not facing parallel to the axis 46). For example, the discharge from the intermediate conduit 62 through the intermediate inlet 56 into the outlet connector 52 at least partially overlaps the side wall 53 of the outlet connector 52 .

[0043] The acute angle α may be the angle of the interior side 64 of the intermediate conduit 62 extending from the end wall 51 of the receiver. In one embodiment, the angle β between the end wall 51 of the receiver 42 and the interior side 64 of the intermediate conduit 62 is 105-125 degrees or about 105-125 degrees. In one embodiment, the angle β between the end wall 51 of the receiver 42 and the interior side 64 of the intermediate conduit 62 is 110-120 degrees or about 110-120 degrees. In one embodiment, the angle of the interior side 64 of the intermediate conduit 62 relative to the bottom of the purge module 22 is 105-125 degrees or about 105-125 degrees. In one embodiment, the angle of the interior side 64 of the intermediate conduit 62 relative to the bottom of the purge module 22 is 110-120 degrees or about 110-120 degrees.

[0044] In one embodiment, the ratio of area A1 of inlet opening 44 of receiver 42 to smallest internal cross-sectional area A2 of intermediate conduit 62 (area A1:smallest internal cross-sectional area A2) is 23:1 or greater. In one embodiment, the ratio of area A1 of inlet opening 44 of receiver 42 to smallest internal cross-sectional area A2 of intermediate conduit 62 (area A1:smallest internal cross-sectional area A2) is 19.5:1 or greater.

[0045] In one embodiment, the ratio of the smallest internal cross-sectional area A3 of the inlet connector 52 to the smallest cross-sectional area A2 of the intermediate conduit 62 (smallest internal cross-sectional area A3:smallest cross-sectional area A2) is 2.5:1 or less. In one embodiment, the ratio of the smallest internal cross-sectional area A3 of the inlet connector 52 to the smallest cross-sectional area A2 of the intermediate conduit 62 (smallest internal cross-sectional area A3:smallest cross-sectional area A2) is 2.5:1 or less. In one embodiment, the ratio of the smallest internal cross-sectional area A3 of the inlet connector 52 to the smallest cross-sectional area A2 of the intermediate conduit 62 (smallest internal cross-sectional area A3:smallest cross-sectional area A2) is 1.5:1 or less. For example, in the illustrated embodiment, the ratio of the smallest internal cross-sectional area A3 of the inlet connector 52 to the smallest cross-sectional area A2 of the intermediate conduit 62 is 1.5:1.

[0046] 7A is a perspective view of a purge port assembly according to one embodiment. The purge port assembly 68 includes a transition bracket 70. The transition bracket 70 includes a receiver 72, an intermediate conduit 74, and an outlet connector 76. The receiver 72 and intermediate conduit 74 are configured to reduce the profile of the portion of the intermediate conduit 74 that extends above an upper surface 78 of the receiver 72. The intermediate conduit 74 may be configured such that the portion of the intermediate conduit 74 that protrudes from the upper surface 78 has a width that is less than half the diameter of the body of the receiver 72 that is outside of the interface with the outlet connector 76. The intermediate conduit 74 may be positioned such that the entire portion of the intermediate conduit 74 that protrudes above the upper surface 78 is disposed to one side of a centerline C of the receiver 72. The reduced profile of the intermediate conduit 74 may reduce or eliminate interference between the transition bracket 70 and wafers or other substrates stored in a container that includes the purge port assembly 68, and / or with automation used to handle such wafers or other substrates. The intermediate conduit 74 may be configured to extend such that the outlet connector 76 is completely offset from the receiver 72. In one such embodiment, when the transition bracket 70 is viewed in plan view, the outlet connector 76 is completely spaced apart from the receiver 72 and does not overlap the receiver. The outlet connector 76 may be a separate piece, such as a cap, attached to the intermediate conduit 74 by any suitable connection. A non-limiting example of such a suitable connection is welding. In one embodiment, a standard cap for a transition bracket may be combined with the receiver 72 and intermediate conduit 74 of one embodiment. In one embodiment, the intermediate conduit 74 may include a portion configured to receive the outlet connector 76. For example, as shown in FIG. 7A, a portion of the intermediate conduit 74 may be flared to a size suitable for the contact surface with the outlet connector 76. In another embodiment, the outlet connector 76 may be integrally formed with the receiver 72 and the intermediate conduit 74. The outlet connector 76 may include any suitable mechanism for enabling attachment of a diffuser (not shown) to the outlet connector 76, including, for example, barbs 77 to enable mechanical attachment of the diffuser in the outlet connector 76.

[0047] FIG. 7B is a cross-sectional view of the purge port assembly of FIG. 7A. The intermediate conduit 74 is shaped to define a channel 80 and an outlet connector transition 82. The channel 80 may extend straight through the intermediate conduit 74. The channel 80 may be at an acute angle α with respect to a central axis A of the receiver 72. In one embodiment, the acute angle α is in the range of 15-35 degrees. In one embodiment, the channel 80 may be tubular in shape. In one embodiment, the channel 80 may have a circular cross-sectional shape. In one embodiment, the channel 80 may have a non-circular cross-sectional shape, such as an elliptical shape. In one embodiment, the channel 80 may have a consistent inner diameter D. The channel 80 may be configured to allow the purge from the receiver 72 to pass through the intermediate conduit 74 to the outlet connector 76 with an acceptable pressure differential even as the outer width and profile of the intermediate conduit 74 narrows. The channel 80 may feed into an outlet connector transition 82 also formed in the intermediate conduit 74. Outlet connector transition 82 may be a space configured to receive flow from channel 80 and transition to a size such that outlet connector 76 can form an interface with intermediate conduit 74. In one embodiment, intermediate conduit 74 has a cross-sectional area at outlet connector 76 that corresponds to a cross-section of the connector portion of the barb cap.

[0048] 8A is a perspective view of a purge port assembly according to one embodiment. The purge port assembly 84 includes a transition bracket 86. The transition bracket 86 includes a receiver 88, an intermediate conduit 90, and an outlet connector 92. The receiver 88 and intermediate conduit 90 are configured to reduce the profile of the portion of the intermediate conduit 90 that extends above a top surface 94 of the receiver 88. The intermediate conduit 90 may be configured such that the portion of the intermediate conduit 90 that protrudes from the top surface 94 has a width that is less than half the diameter of the body of the receiver 88. The reduced profile of the intermediate conduit 90 may reduce or eliminate interference between the transition bracket 86 and wafers or other substrates stored in a container that includes the purge port assembly 84, and / or with automation used to handle such wafers or other substrates. The intermediate conduit 90 may be configured to extend such that the outlet connector 92 is completely offset from the receiver 88. In one such embodiment, when the transition bracket 86 is viewed in plan view, the outlet connector 92 is completely spaced from and does not overlap the receiver 88. The outlet connector 92 may be a separate piece, such as a cap, attached to the intermediate conduit 90 by any suitable connection. A non-limiting example of such a suitable connection is welding. In the embodiment shown in FIG. 8A, the outlet connector may be a cap configured to correspond to the size of the intermediate conduit 90, such as by having the same width. In one embodiment, the outlet connector 92 may be integrally formed with the intermediate conduit 90. The outlet connector 92 may include features that allow for any suitable attachment of a diffuser (not shown) to the outlet connector 92, such as barbs 93 to allow for mechanical attachment of the diffuser in the outlet connector 92.

[0049] FIG. 8B is a cross-sectional view of the purge port assembly of FIG. 8A. The intermediate conduit 90 is shaped to define a channel 96. The channel 96 may extend the entire distance from the receiver 88 to the outlet connector 92. The channel 96 may curve as it extends from the receiver 88 to the outlet connector 92. In one embodiment, the channel 96 may be tubular in shape. In one embodiment, the channel 96 may have a circular cross-sectional shape. In one embodiment, the channel 96 may have a non-circular cross-sectional shape, for example, an elliptical shape. In one embodiment, the channel 96 may have a consistent inner diameter D. In one embodiment, the channel 96 may increase in diameter D as it moves from the receiver 88 toward the outlet connector 92. In one embodiment, the intermediate conduit 90 is joined to the outlet connector 92 at a weld 98. In another embodiment, the intermediate conduit 90 and the outlet connector 92 are integrally formed with one another, and the weld 98 is not present. In embodiments that include a weld 98 , the end of the intermediate conduit 90 to which the outlet connector 92 is joined may be shaped to facilitate welding at the weld 98 .

[0050] Aspects: Any of aspects 1 to 14 may be combined with any of aspects 15 to 20, 21 to 34, or 35 to 40. Any of aspects 15 to 20 may be combined with any of aspects 21 to 34, or 35 to 40. Any of aspects 21 to 34 may be combined with any of aspects 35 to 40.

[0051] Aspect 1. A purge port assembly for a wafer container comprising: a purge module configured to permit the inflow of purge gas; and a transition portion disposed above an intermediate outlet of the purge module, the transition portion including a receiver having an inlet opening configured to accept purge gas exhausted from the purge module, an outlet connector configured to attach to a diffuser, and an intermediate conduit connecting the receiver to the outlet connector, the intermediate conduit extending from the receiver at an acute angle relative to an axis of the inlet opening of the receiver, and the intermediate conduit having a length spacing the outlet connector from the receiver.

[0052] Aspect 2. The minimum internal cross-sectional area of ​​the intermediate conduit is at least 13 mm 2 2. The purge port assembly of embodiment 1, wherein

[0053] Aspect 3. The purge port assembly of aspect 1 or 2, wherein the pressure drop across the intermediate passage is less than 20 kPa at a purge gas flow rate of 100 SLPM.

[0054] Aspect 4. The purge port assembly of any one of aspects 1 to 3, wherein the acute angle is 15 to 35 degrees.

[0055] Aspect 5. A purge port assembly as described in any one of aspects 1 to 4, wherein the purge module includes a first intermediate outlet, the receiver includes a first intermediate inlet and a second intermediate outlet, the first intermediate outlet of the purge module is fluidly connected to the first intermediate inlet of the receiver, the first intermediate inlet forms an inlet opening of the receiver, the outlet connector includes a second intermediate inlet, and the intermediate conduit extends from the second intermediate outlet of the receiver to the second intermediate inlet of the outlet conduit.

[0056] Embodiment 6. A purge port assembly as described in any one of embodiments 1 to 5, wherein the receiver includes one or more side walls and an end wall, the end walls and the inlet opening are disposed at opposing ends of the receiver, and the intermediate conduit extends from one of the one or more side walls of the receiver and the top wall of the receiver.

[0057] Embodiment 7. The purge port assembly of embodiment 6, wherein the angle between the end wall of the receiver and the interior side of the intermediate conduit is at or about 105-125 degrees.

[0058] Embodiment 8. The purge port assembly of any one of embodiments 1 to 7, wherein the ratio of the area of ​​the inlet opening of the receiver to the smallest cross-sectional area of ​​the intermediate conduit is 23:1 or greater.

[0059] Embodiment 9. The purge port assembly of any one of embodiments 1 to 8, wherein the intermediate conduit has a tubular shape extending from the receiver to the outlet connector.

[0060] Embodiment 10. The purge port assembly of any one of embodiments 1 to 9, further comprising a filter disposed between the purge module and the receiver.

[0061] Embodiment 11. A purge port assembly according to any one of embodiments 1 to 10, further comprising a diffuser, the diffuser having a column shape with an end matingly connected to the outlet connector of the transition section.

[0062] Embodiment 12. The purge port assembly of any one of embodiments 1 to 11, wherein the transition portion is formed as a single, integral piece.

[0063] Aspect 13. The purge port assembly of any one of aspects 1 to 12, wherein the purge module and transition portion are configured to be disposed within an opening in a shell of the wafer container, the opening extending through a bottom surface of the shell of the wafer container, and the purge port assembly is configured to block the opening in the shell.

[0064] Embodiment 14. The purge port assembly of embodiment 13, wherein the transition portion is configured to extend from the opening into the interior space of the wafer container.

[0065] Aspect 15. A wafer container comprising: a shell including an interior space; a purge port assembly extending through an opening in the shell into the interior space, the purge port assembly including: a purge module disposed in the opening in the shell, the purge module including a check valve configured to admit purge gas; and a transition portion disposed above the purge module in the opening in the shell, the transition portion including: a receiver having an inlet opening configured to accept purge gas discharged from the purge module; an outlet connector configured to attach to a diffuser; and an intermediate conduit connecting the receiver to the outlet connector, the intermediate conduit extending at an acute angle to an axis of the inlet opening of the receiver, and the intermediate conduit having a length spacing the outlet connector from the receiver.

[0066] Embodiment 16. The wafer container of embodiment 15, wherein the transition portion extends from the opening in the shell into the interior space of the shell.

[0067] Aspect 17. A wafer container as described in aspect 16, wherein the receiver of the transition portion is disposed within an opening in the shell, the outlet connector of the transition portion is disposed within the interior space of the shell, and the intermediate conduit extends from the opening in the shell into the interior space of the shell.

[0068] Embodiment 18. The wafer container of any one of embodiments 15 to 17, wherein the intermediate conduit is configured to extend at an angle of 15 to 35 degrees relative to the axis of the opening in the shell.

[0069] Aspect 19. A wafer container according to any one of aspects 15 to 18, wherein the wafer container is a front-opening integrated pod, the shell including a front opening and a door configured to be disposed within the front opening.

[0070] Embodiment 20. The wafer container of any one of embodiments 15 to 19, further comprising a diffuser, the diffuser having a column shape and including an end matingly connected to the outlet connector.

[0071] Aspect 21. A purge module configured to allow an inflow of a purge gas; a transition portion disposed above the intermediate outlet of the purge module; and a transition portion comprising: a receiver having an inlet opening configured to receive purge gas exhausted from the purge module; an outlet connector configured to attach to the diffuser; an intermediate conduit connecting the receiver to the outlet connector; Including, A purge port assembly for a wafer container, wherein an intermediate conduit has a tubular shape extending from a receiver to an outlet connector, and the intermediate conduit has a length spacing the outlet connector from the receiver.

[0072] Aspect 22. The minimum internal cross-sectional area of ​​the intermediate conduit is at least 13 mm 2 22. The purge port assembly of embodiment 21, wherein

[0073] Aspect 23. The purge port assembly of aspect 21 or 22, wherein the pressure drop across the intermediate passage is less than 20 kPa at a purge gas flow rate of 100 SLPM.

[0074] Embodiment 24. The purge port assembly of any of embodiments 21 to 23, wherein the intermediate conduit extends from the receiver at an acute angle relative to the axis of the inlet opening of the receiver.

[0075] Embodiment 25. The purge port assembly of embodiment 24, wherein the acute angle is between 15 and 35 degrees.

[0076] Embodiment 26. A purge port assembly according to any of embodiments 21 to 23, wherein the intermediate conduit comprises a bend.

[0077] Embodiment 27. The purge port assembly of embodiment 26, wherein the curved portion is continuous along the length of the intermediate conduit.

[0078] Embodiment 28. A purge port assembly according to any of embodiments 21 to 27, wherein the intermediate conduit extends such that the outlet connector is completely spaced away from the receiver when the purge port assembly is viewed in plan view.

[0079] Embodiment 29. A purge port assembly according to any of embodiments 21 to 28, wherein a portion of the intermediate conduit that protrudes from the upper surface of the receiver has a width that is less than half the diameter of the body of the receiver.

[0080] Aspect 30. The purge port assembly of any of aspects 21 to 29, wherein the ratio of the area of ​​the inlet opening of the receiver to the smallest cross-sectional area of ​​the intermediate conduit is 23:1 or greater.

[0081] Aspect 31: A purge port assembly described in any of aspects 21 to 30, wherein a portion of the intermediate conduit that protrudes above the upper surface of the receiver is disposed entirely on one side of the centerline of the receiver.

[0082] Embodiment 32. A purge port assembly according to any of embodiments 21 to 31, wherein the transition portion is integrally formed with the outlet connector.

[0083] Aspect 33. A purge port assembly as described in any of aspects 21 to 32, wherein the purge module and transition portion are configured to be disposed within an opening in a shell of the wafer container, the opening extending through a bottom surface of the shell of the wafer container, and the purge port assembly is configured to block the opening in the shell.

[0084] Embodiment 34. The purge port assembly of embodiment 33, wherein the transition portion is configured to extend from the opening into the interior space of the wafer container.

[0085] 35. A shell including an interior space. a purge port assembly extending through an opening in the shell and into the interior space; a purge port assembly comprising: a purge module disposed within the opening in the shell, the purge module including a check valve configured to admit a purge gas; a transition portion disposed above the purge module within the opening in the shell; and a transition portion comprising: a receiver having an inlet opening configured to receive purge gas exhausted from the purge module; an outlet connector configured to attach to the diffuser; an intermediate conduit connecting the receiver to the outlet connector; wherein the intermediate conduit has a tubular shape extending from the receiver to the outlet connector, and the intermediate conduit has a length spacing the outlet connector from the receiver.

[0086] Aspect 36. A transition portion extends from an opening in the shell into an interior space of the shell; a transition portion receiver disposed within the opening in the shell; a transition portion outlet connector disposed within the interior space of the shell; 36. The wafer container of embodiment 35, wherein the intermediate conduit extends from an opening in the shell into the interior space of the shell.

[0087] Embodiment 37. The wafer container of embodiment 35 or 36, wherein the intermediate conduit extends at an acute angle relative to the axis of the inlet opening of the receiver.

[0088] Embodiment 38. The wafer container of embodiment 35 to 36, wherein the intermediate conduit comprises a curved portion.

[0089] Aspect 39. A wafer container according to any of aspects 35 to 38, wherein the wafer container is a front-opening integrated pod, the shell including a front opening and a door configured to be disposed within the front opening.

[0090] Embodiment 40. The wafer container of any of embodiments 35 to 39, further comprising a diffuser, the diffuser having a column shape and including an end matingly connected to the outlet connector.

[0091] The examples disclosed in this application should be considered in all respects as illustrative and not restrictive. In one embodiment, the above-mentioned "connect" and "connecting" may refer to "direct connection". The scope of the present invention is indicated by the appended claims, rather than the foregoing description, and all changes that come within the meaning and range of equivalence of the claims are intended to be embraced therein.

Claims

1. a purge module configured to allow an inflow of a purge gas; a transition portion disposed above the intermediate outlet of the purge module; 1. A purge port assembly for a wafer container, the transition portion comprising: a receiver having an inlet opening configured to receive the purge gas exhausted from the purge module; an outlet connector configured to attach to the diffuser; an intermediate conduit connecting the receiver to the outlet connector; the intermediate conduit having a tubular shape extending from the receiver to the outlet connector and having a length spacing the outlet connector from the receiver. Purge port assembly.

2. The minimum internal cross-sectional area of ​​the intermediate conduit is at least 13 mm ２ 2. The purge port assembly of claim 1 , wherein:

3. 10. The purge port assembly of claim 1, wherein the pressure drop across the intermediate passage is less than 20 kPa at a purge gas flow rate of 100 SLPM.

4. The purge port assembly of claim 1 , wherein the intermediate conduit extends from the receiver at an acute angle relative to an axis of the inlet opening of the receiver.

5. The purge port assembly of claim 4, wherein said acute angle is between 15 and 35 degrees.

6. The purge port assembly of claim 1 , wherein the intermediate conduit includes a bend.

7. The purge port assembly of claim 6 , wherein the curved portion is continuous along the length of the intermediate conduit.

8. The purge port assembly of claim 1 , wherein the intermediate conduit extends such that the outlet connector is completely spaced from the receiver when the purge port assembly is viewed in plan.

9. 2. The purge port assembly of claim 1, wherein the portion of the intermediate conduit that protrudes from a top surface of the receiver has a width that is less than half the diameter of a body of the receiver.

10. 2. The purge port assembly of claim 1, wherein a ratio of an area of ​​the inlet opening of the receiver to a minimum cross-sectional area of ​​the intermediate conduit is greater than or equal to 23:

1.

11. 2. The purge port assembly of claim 1, wherein the portion of the intermediate conduit that projects above the upper surface of the receiver is disposed entirely to one side of a centerline of the receiver.

12. The purge port assembly of claim 1 , wherein the transition portion is integrally formed with the outlet connector.

13. 2. The purge port assembly of claim 1, wherein the purge module and the transition portion are configured to be disposed within an opening in a shell of the wafer container, the opening extending through a bottom surface of the shell of the wafer container, and the purge port assembly is configured to block the opening in the shell.

14. The purge port assembly of claim 13 , wherein the transition portion is configured to extend from the opening into an interior space of the wafer container.

15. a shell including an interior space; a purge port assembly extending through an opening in the shell and into the interior space; 1. A wafer container comprising: a purge module disposed in the opening in the shell, the purge module including a check valve configured to admit a purge gas; a transition portion disposed above the purge module within the opening in the shell; and wherein the transition portion comprises: a receiver having an inlet opening configured to receive the purge gas exhausted from the purge module; an outlet connector configured to attach to the diffuser; an intermediate conduit connecting the receiver to the outlet connector; wherein the intermediate conduit has a tubular shape extending from the receiver to the outlet connector and has a length spacing the outlet connector from the receiver.

16. the transition portion extends from the opening in the shell into the interior space of the shell; the receiver of the transition portion is disposed within the opening in the shell; the outlet connector of the transition portion is disposed within the interior space of the shell; 16. The wafer container of claim 15, wherein the intermediate conduit extends from the opening in the shell into the interior space of the shell.

17. 16. The wafer container of claim 15, wherein the intermediate conduit extends at an acute angle relative to the axis of the inlet opening of the receiver.

18. The wafer container of claim 15 , wherein the intermediate conduit includes a bend.

19. 16. The wafer container of claim 15, wherein the wafer container is a front-opening integrated pod, the shell including a front opening and a door configured to be disposed within the front opening.

20. 16. The wafer container of claim 15, further comprising the diffuser, the diffuser having a column shape and including an end matingly connected to the outlet connector.

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