Microscope Objective Adapters for Testing Semiconductors and Thin Film Materials

Abstract

An objective lens adapter is provided that includes a frame, a frame cover, an opening for inserting an objective lens, and a platen. A manipulator that receives a probe tip is disposed on the platen. The probe tip is used to perform electrical, mechanical, optical, chemical, and structural measurements on thin film materials and semiconductors. The objective lens adapter is adapted to be attached to a microscope, including microscopes manufactured by other companies.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS

[0001] This application claims priority to U.S. Provisional Patent Application No. 63 / 362,095, filed March 29, 2022, which is incorporated by reference in its entirety herein. [Technical field]

[0002] The present disclosure relates generally to microscope objective lens adapters for testing semiconductor and thin film materials. [Background technology]

[0003] Optical, electron, and scanning probe microscopes are used to observe the structure and topography of samples. These microscopes are routinely adapted to various modalities such as electron dispersive X-ray spectroscopy systems, atomic force microscope adaptors, nanoprobing systems, and many more. These adaptations allow for correlative measurements, increasing the value and cost of testing these microscopes. Summary of the Invention [Problem to be solved by the invention]

[0004] The present disclosure is generally directed to an objective lens adapter for testing semiconductor and thin film material samples. The objective lens adapter is attached to an objective lens, which is connected to a microscope to allow observation of the sample. A manipulator can be disposed on a platen of the objective lens adapter. A probe head may be integrated with the manipulator. Thus, the objective lens adapter and manipulator may be used to position the probe head to probe the sample with the probe tip, while both the sample and the probe tip are observed through the objective lens. Probing the sample allows a wide variety of measurements, such as electrical, mechanical, optical, chemical, and structural measurements of thin film materials and semiconductors. [Means for solving the problem]

[0005] According to one aspect, an objective lens adapter is provided, the objective lens adapter comprising at least a frame, a frame cover, an opening for inserting an objective lens, and at least a platen.

[0006] According to one aspect, the platen is made of a material that attracts magnets or magnetic materials.

[0007] According to one aspect, the platen is made of a non-magnetic material.

[0008] According to one embodiment, the non-magnetic material of the platen is steel, nickel, cobalt, neodymium, or combinations thereof.

[0009] According to one aspect, the magnets are embedded in the platen.

[0010] According to one embodiment, the platen is made from a material such as plastic, ceramic, acrylonitrile butadiene styrene (ABS), polylactic acid (PLA), or a combination thereof.

[0011] According to one aspect, a manipulator is disposed above the platen.

[0012] According to one aspect, the base of the manipulator is magnetic.

[0013] According to one aspect, the base of the manipulator is vacuum operated.

[0014] According to one embodiment, the manipulator includes at least one linear stage, or at least one rotational stage, or at least one tilt stage, or a combination thereof.

[0015] According to one aspect, the probe head is integrated with the manipulator.

[0016] According to one aspect, a probe substrate is inserted into a probe head.

[0017] According to one aspect, a probe tip is attached to a probe substrate.

[0018] According to one aspect, the probe tip includes at least a probe tip.

[0019] According to one aspect, the frame and the frame cover are fused together to form a fused frame.

[0020] According to one embodiment, the objective lens is inserted into a fused frame.

[0021] According to one aspect, the objective lens is inserted between the frame and the frame cover.

[0022] According to one embodiment, the objective lens is directly connected to the microscope.

[0023] According to one aspect, the objective lens is connected to an objective lens connector.

[0024] According to one aspect, the objective lens connector is connected to a microscope.

[0025] According to one embodiment, the dovetail is connected to a first end of the objective lens connector, and the second end of the objective lens connector is directly connected to the microscope.

[0026] According to one embodiment, one end of the objective lens is connected to a dovetail.

[0027] According to one aspect, a dovetail on the objective lens is connected to a dovetail portion of the objective lens connector.

[0028] According to one embodiment, a magnet or magnetic material is connected to a first end of the objective connector, and a second end of the objective connector is directly connected to the microscope.

[0029] According to one embodiment, one end of the objective lens is connected to a magnet or magnetic material.

[0030] According to one embodiment, a magnet or magnetic material connected to a first end of the objective lens connector is attracted to a second magnet or second magnetic material connected to one end of the objective lens.

[0031] According to one embodiment, a second magnet or second magnetic material connected to one end of the objective lens is attracted to the magnet or magnetic material connected to the first end of the objective lens connector.

[0032] It should be understood that all combinations of the above concepts and additional concepts described in more detail below (provided that such concepts are not mutually inconsistent) are considered to be part of the inventive subject matter disclosed herein. In particular, all combinations of claimed subject matter appearing at the end of this disclosure are considered to be part of the inventive subject matter disclosed herein. It should also be understood that the terms explicitly used in this specification, which may also appear in any disclosure incorporated by reference, should be given the meaning most consistent with the specific concepts disclosed herein.

[0033] These and other aspects of the invention will be apparent from and elucidated with reference to the embodiments described hereinafter.

[0034] The present invention will be more fully understood and appreciated from the following detailed description taken in conjunction with the accompanying drawings, in which: [Brief description of the drawings]

[0035] [Figure 1] FIG. 1 is a perspective view of a microscope integrated with an objective lens adapter according to the present invention. [Figure 2A] FIG. 2A is a close-up view of an objective lens adapter according to the present disclosure. [Figure 2B] FIG. 2B is a perspective view of an objective lens adapter according to the present disclosure. [Diagram 3] FIG. 3 is a perspective view of an objective lens adapter connected to an objective lens according to the present disclosure and a manipulator disposed on the adapter. [Figure 4A] FIG. 4A is a perspective view of a manipulator according to the present disclosure. [Figure 4B] FIG. 4B is a perspective view of a manipulator according to the present disclosure. [Figure 4C] FIG. 4C is a perspective view of a probe substrate having a probe tip according to the present disclosure. [Figure 4D] FIG. 4D is a perspective view of a probe tip according to the present disclosure. [Figure 4E] FIG. 4E is a perspective view of a probe tip according to the present disclosure. [Figure 5A] FIG. 5A is a close-up view of a manipulator according to the present disclosure. [Figure 5B] FIG. 5B is a close-up view of a manipulator according to the present disclosure. [Figure 6A] FIG. 6A is a perspective view of a manipulator disposed on an objective lens adapter according to the present disclosure. [Figure 6B] FIG. 6B is a perspective view of a manipulator disposed on an objective lens adapter in accordance with the present disclosure. [Figure 7A] FIG. 7A is a perspective view of a microscope integrated with an objective lens adapter according to the present disclosure. [Figure 7B] FIG. 7B is a perspective view of a microscope integrated with an objective lens adapter according to the present disclosure. [Figure 8A] FIG. 8A is a perspective view of an objective lens adapter having multiple platens according to the present disclosure. [Figure 8B] FIG. 8B is a perspective view of an objective lens adapter having multiple platens according to the present disclosure. [Figure 8C] FIG. 8C is a perspective view of an objective lens adapter integrated with an objective lens and multiple manipulators in accordance with the present disclosure. [Figure 8D] FIG. 8D is a perspective view of a microscope integrated with an objective lens adapter and multiple manipulators according to the present disclosure. [Figure 9A] FIG. 9A is a perspective view of an objective lens connected to a dovetail in accordance with the present disclosure. [Figure 9B] FIG. 9B is a perspective view of an objective lens connector connected to a dovetail according to the present disclosure. [Figure 9C] FIG. 9C is a perspective view of an objective lens connector connected to an objective lens according to the present disclosure. [Figure 9D] FIG. 9D is a perspective view of a microscope integrated with an objective lens adapter according to the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0036] This disclosure describes various embodiments of objective lens adapters for testing semiconductor and thin film material samples that enable detailed study of the electrical, mechanical, optical, and chemical responses of semiconductor and thin film materials by positioning a probe tip in contact with a sample while the sample is viewed by a microscope objective.

[0037] FIG. 1 shows a perspective view of a microscope 100 integrated with an objective lens adapter according to the present disclosure.

[0038] FIG. 2A shows an objective lens adapter 200A. The frame 202 has holes 204 that receive the screws 206. The frame cover 208 has holes that receive the screws 206. The screws 206 ensure that the cover 208 is securely connected to the frame 202. There is an opening 210 where the objective lens is inserted. The platen 212 is where the manipulator can be placed. The platen 212 can be made of a magnetic or non-magnetic material. If the platen 212 is made of a non-magnetic material such as plastic, a magnet 214 is embedded in the platen 212. The magnet 214 serves to attract manipulators with a magnetic base. The magnet 214 is fixed to the platen 212, and the magnet cover 216 is fixed to the platen 212 with a screw 218.

[0039] 2A, in another embodiment, the platen 212 has embedded therein a magnet 214. The magnet 214 may be on the inside, top, or bottom of the platen 212.

[0040] 2A, in another embodiment, the entire frame 202 and platen 212 are made from a material that attracts magnets or magnetic materials. Examples of such materials are steel, nickel, cobalt, neodymium, or combinations thereof.

[0041] 2A, in another embodiment, the entire frame 202 and platen 212 are made of a material that does not attract magnets (non-magnetic material). Examples of such materials are plastic, ceramic, acrylonitrile butadiene styrene (ABS), polylactic acid (PLA), or combinations thereof.

[0042] 2B is an objective lens adapter 200B in another embodiment. The frame 202 and the frame cover 208 are fused or integrated as a single part. The fused frame has an opening 210. The opening 210 is designed and manufactured to fit the objective lens snugly. Furthermore, a screw 220 can be inserted into the fused frame to press the objective lens and securely fix the objective lens to the fused frame.

[0043] With reference to FIGS. 2A and 2B, objective lens adapters 200A and 200B can be fabricated using computer numerically controlled (CNC) machining, 3D printing, molding, and the like.

[0044] 3 shows a perspective view of the objective lens adapter 200A with the objective lens 302 inserted into the opening 210. A manipulator 400A having a magnetic base is disposed on the platen 212. In some examples, the manipulator 400A is used to position a probe tip 428 (see FIG. 4A ) relative to the sample during observation with the objective lens 302. In some examples, the manipulator 400A brings the probe tip 428 into contact with the sample.

[0045] Referring to FIG. 3, in another embodiment, objective lens adapter 200A can connect to objective lenses of scanning electron microscopes, scanning transmission electron microscopes, scanning laser microscopes, and optical microscopes.

[0046] Referring to FIG. 3, in another embodiment, objective lens adapter 200A can be connected to an atomic force microscope or a scanning tunneling microscope.

[0047] With reference to FIG. 3, details regarding manipulator 400A can be found in International Patent Application PCT / US22 / 72768 (which claims priority to U.S. Provisional Patent Application No. 63 / 202,548), the entirety of which is incorporated herein by reference.

[0048] FIG. 4A shows a perspective view of the manipulator 400A. The manipulator 400A includes an X (402), Y (404), and Z (406) linear stage. The linear stages 402, 404, 406 can be actuated manually, semi-automatically, or automatically. The linear stages 402, 404, 406 can be piezoelectric, motorized, or a combination thereof. The X-stage 402 is attached above the Y-stage 404 using a screw. An L-shaped bracket 408 connects to the top of the X-stage 402 using a screw 410. The Z-stage 406 is connected to the L-shaped bracket 408. In certain applications, an additional Z-stage (412) can be connected to the Z-stage 406. The Z-stage 412 can provide incremental movements in the attometer to micrometer or millimeter range. The Z-stage 412 can be a piezoelectric stage. A plate 414 serves as an interface between the Z-stage 406 and the Z-stage 412. Plate 414 is screwed to Z stage 406 using screws 416 , and Z stage 412 is screwed to plate 414 .

[0049] 4A, an L-shaped bracket 418 connects a probe head 420 to the Z-stage 412. The L-shaped bracket 418 is connected to the Z-stage 412 by a screw 422. A screw 424 connects the probe head 420 to the L-shaped bracket 418.

[0050] 4A, a probe substrate 426 is inserted into the probe head 420. The probe substrate 426 houses a probe tip 428. The probe tip 428 includes a single probe tip or an array of monolithically integrated probe tips. The probe tip 428 may be used to perform a wide range of measurements by contacting a sample, such as electrical, mechanical, optical, chemical, and structural measurements.

[0051] Referring to FIG. 4A, the Y stage 404 is connected to a base plate 430, and a micro vernier 432 can be used to manually move the X (402), Y (404), and Z (406) stages.

[0052] Figure 4B shows a perspective view of a manipulator 400B, according to one embodiment. The manipulator 400B of Figure 4B is a variation of the manipulator 400A of Figure 4A, in which the Z-stage 406 has been removed from the overall manipulator assembly. As shown in Figure 4B, the Z-stage 412 of the manipulator 400B is directly connected to the L-shaped bracket 408.

[0053] 4A and 4B, the linear stages 402, 404, 406 may be configured to be positionally interchangeable. As an example, the X-stage 402 can be used as the Y-stage 404, and vice versa.

[0054] 4A and 4B, in another embodiment, X (402), Y (404), Z (406) linear stages as well as rotational and / or tilt stages may be integrated into manipulators 400A and 400B.

[0055] 4C shows a probe tip 428 connected to a probe substrate 426, according to one embodiment. Wire bonds 434 may be used to electrically connect the probe tip 428 to the probe substrate 426. Alternatively, flip chip bonding can be used to electrically connect the probe tip 428 to the probe substrate 426. The probe substrate 426 may be a printed circuit board.

[0056] Figure 4D shows a probe tip 428, according to one embodiment. The probe tip includes one or more probe tips 436, as shown in the enlarged view of Figure 4E. Details of the probe tip 428 can be found in International Patent Application PCT / US22 / 72768 (which claims priority to U.S. Provisional Patent Application No. 63 / 202,548), which is incorporated herein by reference in its entirety.

[0057] 4A and 4B, in another embodiment, the X (402), Y (404), and Z (406) stages can be combined into a single scanner. The stages 402, 404, 406 and the scanner can be made piezoelectric or motor driven. The scanner can be operated in an open or closed loop. The scanner is similar to those used in scanning probe microscopes such as atomic force microscopes and scanning tunneling microscopes.

[0058] Figure 5A shows an expanded version of the manipulator 400A of Figure 4A. The magnet 502 is fixed to a base plate 430. The base plate 430 is fixed to the bottom of the Y-stage 404. Screws (not shown) can be used to fix the base plate 430 to the bottom of the Y-stage 404.

[0059] Figure 5B shows an expanded version of the manipulator 400B of Figure 4B. The magnet 502 is fixed to a base plate 430. The base plate 430 is fixed to the bottom of the Y-stage 404. Screws (not shown) can be used to fix the base plate 430 to the bottom of the Y-stage 404.

[0060] 5A and 5B, the base plate 430 can be made of a material that attracts magnets or magnetic materials, in which case the magnet 502 is not required.

[0061] 5A and 5B, the manipulators 400A and 400B can have a vacuum-actuated base plate 430. In such an embodiment, the magnet 502 is not required. When the vacuum is turned on, the manipulators 400A and 400B can be securely seated on the platen 212 of the objective lens adapter.

[0062] 6A and 6B, manipulators 400A and 400B are positioned on platen 212 in objective lens adapters 600A, 600B, respectively. Objective lens 302 is inserted into objective lens adapters 600A, 600B to view probe tip 436 (not shown) on probe tip 428.

[0063] 6A and 6B, in another embodiment, the linear Y-stage 404 can be fixed or screwed to the platen 212, rendering the entire manipulators 400A and 400B non-rotatable.

[0064] As shown in FIG. 7A, according to one embodiment, the microscope 702 is integrated with the objective lens adapter 300. The objective lens connector 704 facilitates the connection of the objective lens 302 to the microscope 702 or the turret 706 of the microscope 702. The objective lens connector 704 can be custom designed to attach to existing third-party microscopes and turrets. The manipulator 400A is rotated away from the objective lens 302 during installation and removal of the probe substrate 426. The camera 708 is used to capture live images of the wafer 710 or device under test (DUT). The microscope 702 includes a light source 712 to provide illumination to the DUT. The Z-knob 714 can be rotated to move the DUT in and out of focus of the camera. The DUT can be moved using the knob 716.

[0065] Referring to FIG. 7A, the objective lens connector 704 can be designed with one or more threads so that the objective lens 302 can be screwed into it.

[0066] Referring to FIG. 7A, the objective lens connector 704 can be designed such that the objective lens 302 magnetically connects to it.

[0067] 7A, the objective lens connector 704 can be designed such that the objective lens 302 is inserted therein. Both ends of the objective lens connector 704 and the objective lens 302 have complementary dovetails to allow for insertion.

[0068] Referring to FIG. 7A, in another embodiment, the objective lens 302 is connected directly to the microscope 702 or turret 706 without the need for an objective lens connector 704.

[0069] Referring to FIG. 7A, details of the microscope assembly can be found in International Patent Application PCT / US22 / 72768 (which claims priority to U.S. Provisional Patent Application No. 63 / 202,548), the entirety of which is incorporated herein by reference.

[0070] 7B, according to one embodiment, the microscope 702 is integrated with the objective lens adapter 300. The manipulator 400A rotates on the platen 212 to bring the probe tip 436 (not shown) under the objective lens 302. The probe tip 436 contacts the DUT by (1) turning the Z-knob 714 to raise the DUT, or (2) using a software program to instruct the Z-stage 412 to lower the probe tip 436, or (3) turning the micro vernier 432 to lower the tip, or (4) performing any combination of the above.

[0071] Referring to FIG. 7B, the objective lens 302, along with the camera 708, can view the probe tip 436 and the DUT 710 simultaneously.

[0072] As shown in FIG. 8A, according to one embodiment, the objective lens adapter 800A can be designed to have multiple platens 212.

[0073] As shown in FIG. 8B, according to one embodiment, the objective lens adapter 800B can be designed to have multiple platens 212, and the frame 202 and frame cover 208 can be fused into a single piece.

[0074] As shown in FIG. 8C, according to one embodiment, multiple manipulators 400A are positioned on the platen 212 of the objective adapter 800C.

[0075] As shown in Figure 8D, according to one embodiment, the microscope 702 is integrated with an objective lens adapter 800C shown in Figure 8C. A plurality of manipulators 400A are disposed on the platen 212 of the objective lens adapter 800C.

[0076] 9A, according to one embodiment, objective lens 302 is connected to a dovetail 902. The top of objective lens 302 can have threads that can screw into threaded dovetail 902.

[0077] 9B is an objective connector 704 according to one embodiment. Both ends of the objective connector 704 can be threaded 904. A threaded dovetail 906 connects to one end of the objective connector 704, and the other end of the objective connector 704 can connect directly to the microscope 702 or turret 706. The objective connector 704 and dovetail 906 can also be designed and manufactured as a single piece.

[0078] 9A and 9B, the dovetails 902 and 906 may be replaced with a magnetic material that allows the objective lens 302 to magnetically connect to the objective lens connector 704.

[0079] FIG. 9C illustrates how dovetails 902 and 906 are inserted into one another according to one embodiment.

[0080] 9D, according to one embodiment, the microscope 702 is integrated with the objective lens adapter 600A. A dovetail 902 connected to the objective lens 302 is inserted into a dovetail 906 connected to the objective lens connector 704.

[0081] It should be noted that there are several ways to attach the objective lens adapter to the objective lens and the microscope. The attachment techniques described in this application do not act to limit the integration of the objective lens adapter into the microscope.

[0082] All definitions defined and used herein should be understood to govern any dictionary definitions, definitions in documents incorporated by reference, and / or ordinary meanings of the defined terms.

[0083] The indefinite articles "a" and "an," as used in the specification and claims, unless clearly indicated otherwise, should be understood to mean "at least one."

[0084] The term "and / or" as used in the specification and claims should be understood to mean "either or both" of the elements so conjoined, i.e., elements that are conjunctive in some cases and disjunctive in other cases. Multiple elements listed with "and / or" should be construed in the same manner, i.e., "one or more" of the elements so conjoined. Other elements other than the elements specifically identified by the "and / or" clause may optionally be present, whether related or unrelated to those elements specifically identified.

[0085] As used herein and in the claims, "or" should be understood to have the same meaning as "and / or" as defined above. For example, when separating listed items, "or" or "and / or" shall be interpreted as being inclusive, i.e., including at least one of the listed elements or elements, but also including more than one, and optionally including additional unlisted items. Only terms clearly indicated to the contrary, such as "only one of" or "exactly one of," or when used in the claims, "consisting of," refer to the inclusion of exactly one element of the listed elements or elements. In general, the term "or" as used herein shall only be interpreted as indicating exclusive alternatives (i.e., "one or the other but not both") when preceded by terms of exclusivity, such as "either," "one of," "only one of," or "exactly one of."

[0086] As used herein and in the claims, the phrase "at least one" in connection with a list of one or more elements means at least one element selected from any one or more of the listed elements, but does not necessarily include at least one of each and every element specifically listed in the list of elements, and does not necessarily exclude any combination of elements in the list of elements. This definition also allows for the optional presence of elements other than those specifically identified in the list of elements to which the phrase "at least one" refers, whether or not related to the specifically identified elements.

[0087] It should also be understood that, unless expressly indicated to the contrary, in any method claimed herein that includes more than one step or act, the order of the method steps or acts is not necessarily limited to the order in which the method steps or acts are recited.

[0088] In the claims, as well as in the above specification, all transitional phrases such as "comprising," "including," "carrying," "having," "containing," "accompanying," "holding," "comprising," and the like, are to be understood to be open-ended, i.e., to mean including but not limited to. Only the transitional phrases "consisting of" and "consisting essentially of" shall be closed or semi-closed transitional phrases, respectively.

[0089] Although various embodiments have been described and illustrated herein, those skilled in the art will readily envision various other means and / or structures for performing the functions described herein and / or obtaining one or more of the results and / or advantages described herein, and each such variation and / or modification is deemed to be within the scope of the embodiments described herein. More generally, those skilled in the art will readily appreciate that all parameters, dimensions, materials, and configurations described herein are meant to be exemplary, and that the actual parameters, dimensions, materials, and / or configurations will depend on the particular application for which the teachings are used. Those skilled in the art will recognize or be able to ascertain, without more than routine experimentation, many equivalents to the specific embodiments described herein. Thus, the foregoing embodiments are presented by way of example only, and it will be understood that within the scope of the appended claims and their equivalents, the embodiments may be practiced otherwise than as specifically described and claimed. The embodiments of the present disclosure are directed to each individual feature, system, article, material, kit, and / or method described herein. In addition, any combination of two or more such features, systems, articles, materials, kits, and / or methods is included within the scope of the present disclosure, if such features, systems, articles, materials, kits, and / or methods are not mutually inconsistent.

Claims

1. An objective lens adapter, At least the frame, Frame cover and an opening for inserting an objective lens; An objective lens adapter comprising at least a platen.

2. The objective lens adapter of claim 1 , wherein the platen is made of a material that attracts magnets or magnetic materials.

3. The objective lens adapter of claim 2 , wherein the material of the platen is steel, nickel, cobalt, neodymium, or a combination thereof.

4. The objective lens adapter of claim 1 , wherein the platen is made of a non-magnetic material.

5. The objective lens adapter of claim 4 , wherein a magnet is embedded in the platen.

6. 5. The objective lens adapter of claim 4, wherein the non-magnetic material of the platen is plastic, ceramic, acrylonitrile butadiene styrene (ABS), polylactic acid (PLA), or a combination thereof.

7. The objective lens adapter according to claim 1 , wherein a manipulator is disposed above the platen.

8. The objective lens adapter of claim 7 , wherein the base of the manipulator is magnetic.

9. 8. The objective lens adapter of claim 7, wherein the base of the manipulator is vacuum operated.

10. 8. The objective lens adapter of claim 7, wherein the manipulator comprises at least one linear stage, or at least one rotation stage, or at least one tilt stage, or a combination thereof.

11. The objective lens adapter of claim 7 , wherein a probe head is integral with the manipulator.

12. The objective lens adapter of claim 11 , wherein a probe base is inserted into the probe head.

13. The objective lens adapter of claim 12 , wherein a probe tip is attached to the probe base.

14. The objective lens adapter of claim 13 , wherein the probe tip includes at least a probe tip.

15. 2. The objective lens adapter of claim 1, wherein the frame and the frame cover are fused together to form a fused frame.

16. 16. The objective lens adapter of claim 15, wherein an objective lens is inserted into the fused frame.

17. 2. The objective lens adapter of claim 1, wherein an objective lens is inserted between the frame and the frame cover.

18. 20. The objective lens adapter of claim 17, wherein the objective lens is directly connected to a microscope.

19. 20. The objective lens adapter of claim 17, wherein the objective lens is connected to an objective lens connector.

20. 20. The objective lens adapter of claim 19, wherein the objective lens connector is connected to a microscope.

21. 20. The objective lens adapter of claim 19, wherein a dovetail is connected to a first end of the objective connector, and a second end of the objective connector is connected directly to a microscope.

22. 20. The objective lens adapter of claim 17, wherein one end of the objective lens is connected to a dovetail.

23. 23. The objective lens adapter of claim 22, wherein the dovetail is connected to a dovetail portion of an objective connector.

24. 20. The objective lens adapter of claim 19, wherein a magnet or magnetic material is connected to a first end of the objective lens connector, and a second end of the objective lens connector is connected directly to a microscope.

25. 18. The objective lens adapter of claim 17, wherein one end of the objective lens is connected to a magnet or a magnetic material.

26. 25. The objective lens adapter of claim 24, wherein the magnet or magnetic material connected to the first end of the objective lens connector is attracted to a second magnet or second magnetic material connected to one end of the objective lens.

27. 25. The objective lens adapter of claim 24, wherein a second magnet or second magnetic material connected to one end of the objective lens is attracted to the magnet or magnetic material connected to the first end of the objective lens connector.

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