Water-cooled jacket device and single crystal furnace

Abstract

The present disclosure discloses a water-cooled jacket device and a single crystal furnace. The water-cooled jacket device includes a cylindrical body, and a regulating sleeve is provided at the bottom of the cylindrical body, which is connected to the inside of the cylindrical body. The regulating sleeve includes a first end connected to the cylindrical body and a second end opposite to the first end. From the first end to the second end, the regulating sleeve gradually reduces the cross-sectional area in the radial direction of the cylindrical body. The arrangement of the regulating sleeve prevents heat transfer from the bottom of the cylindrical body to the internal space of the water-cooled jacket, and effectively prevents bottom-up dissipation of heat. And the regulating sleeve gradually reduces the cross-sectional area in the radial direction of the cylindrical body, so that when the inert gas flow blows through the regulating sleeve from the top of the crystal pulling furnace, the flow rate increases, ensuring sufficient contact between the inert gas flow and the crystal rod, increasing the cooling rate of the crystal rod, and well adjusting the temperature gradient in the vertical and radial directions of the crystal rod, controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and pulling different types of crystal rods.

Description

[Technical field]

[0001] (CROSS REFERENCE TO RELATED APPLICATIONS) This disclosure claims priority to Chinese Patent Application No. 202210544317.6, filed in China on May 18, 2022, the entire contents of which are incorporated herein by reference. TECHNICAL FIELD The present disclosure relates to the field of single crystal silicon product manufacturing, and in particular to a water-cooled jacket apparatus and single crystal furnace. [Background technology]

[0002] With the continuous improvement of advanced semiconductor processes, the requirements for semiconductor wafer quality are getting higher and higher. The impact of the crystal pulling process on the wafer core quality is very large, such as oxygen content, bulk micro defects (BMD), stacking faults, crystal originated particles (COPs), flow pattern defects (FPD), laser scattering tomography defects (LTDs), etc. are all closely related to the crystal pulling process.

[0003] The thermal history experienced during the growth of the crystal bar has a great influence on the overall quality of the crystal bar, which is mainly affected by the temperature gradient in the longitudinal and axial directions of the crystal bar, and the structural components of the crystal pulling furnace have a great influence on the temperature gradient, among which one of the most important components is the water-cooling jacket, which greatly changes the temperature gradient in the longitudinal and lateral directions of the crystal bar, increases the cooling rate of the crystal bar, and further affects the pulling speed of the crystal bar.

[0004] In the related art, the water-cooled jacket is cylindrical, which greatly limits the temperature control of the crystal bar in the axial and longitudinal directions, and the crystal defects of the crystal bar cannot be well controlled, for example, the control ability is limited and the heat in the center of the crystal bar cannot be transferred well, which leads to the accumulation of excessive internal stress, resulting in the generation of dislocations, which has a significant impact on the quality of the crystal bar. Especially for epitaxial products, when carrying out the epitaxial deposition process, stacking faults will cause uneven deposition and even cause deposition failure. Summary of the Invention

[0005] In order to solve the above technical problems, the present disclosure provides a water-cooled jacket device and a single crystal furnace that solves the problem of limited temperature control in the axial and longitudinal directions of the crystal bar.

[0006] In order to achieve the above object, the technical solution according to the embodiment of the present disclosure includes: A water-cooled jacket device includes a cylindrical body, a bottom of which is provided with an adjustment sleeve communicating with the inside of the cylindrical body, the adjustment sleeve including a first end connected to the cylindrical body and a second end opposite to the first end, and from the first end to the second end, the cross-sectional area of ​​the adjustment sleeve in the radial direction of the cylindrical body gradually decreases.

[0007] Optionally, the inner surface of the adjustment sleeve is curved.

[0008] Optionally, the cross-sectional shape of the adjustment sleeve in the axial direction of the tubular body is parabolic.

[0009] Optionally, in the axial direction of the tubular body, the adjustment sleeve includes a first portion adjacent to the tubular body and a second portion adjacent to the first portion, the outer surface of the second portion being recessed to form a recess.

[0010] Optionally, the inner surface of the adjustment sleeve is provided with a heat absorbing layer.

[0011] Optionally, the heat absorption layer includes a first layer adjacent to the adjustment sleeve and a second layer away from the adjustment sleeve, the first layer being a transition layer formed by a chemical reaction between a graphite material and an inner wall of the adjustment sleeve.

[0012] Optionally, the first layer is a C+SiC composite transition coating layer and the second layer is a SiC coating layer.

[0013] Optionally, the heat absorbing layer has a thickness of 130±15 microns.

[0014] Optionally, an outer surface of the adjustment sleeve is provided with a thermal insulating layer.

[0015] Optionally, the insulating layer includes a third layer adjacent to the adjusting sleeve and a fourth layer away from the adjusting sleeve, the third layer being a transition layer formed by a graphite material chemically reacting with the outer wall of the adjusting sleeve.

[0016] Optionally, the third layer is a C+SiC composite transition coating layer and the fourth layer is a SiC coating layer.

[0017] Optionally, the thickness of the insulating layer is 160±15 microns.

[0018] Optionally, the cylindrical body includes an inner tube and an outer tube located outside the inner tube, the bottom of the outer tube includes a first region for supporting the inner tube and a second region adjacent to the first region, the first region is arranged adjacent to a side wall of the outer tube, and a flange is provided on the upper part of the adjustment sleeve, the flange being connected to the second region.

[0019] An embodiment of the present disclosure further provides a single crystal furnace including the water-cooled jacket apparatus described above.

[0020] The present disclosure has the following beneficial effects: the arrangement of the adjusting sleeve prevents heat transfer from the bottom of the cylindrical body to the inner space of the water-cooling jacket, effectively preventing bottom-up dissipation of heat; and the adjusting sleeve gradually reduces the cross-sectional area of ​​the cylindrical body in the radial direction, so that when the inert gas flows from the top of the crystal pulling furnace through the adjusting sleeve, the flow rate increases, ensuring sufficient contact between the inert gas flow and the crystal rod, increasing the cooling rate of the crystal rod, and well adjusting the temperature gradient in the longitudinal and radial directions of the crystal rod, controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and pulling different types of crystal rods. [Brief description of the drawings]

[0021] [Figure 1] FIG. 2 is a structural schematic diagram of a water-cooled jacket device according to an embodiment of the present disclosure. [Diagram 2] FIG. 2 is a structural schematic diagram of an adjustment sleeve in an embodiment of the present disclosure. [Diagram 3] FIG. 2 is a schematic diagram of the structure of an inner cylinder in an embodiment of the present disclosure. [Figure 4] FIG. 2 is a structural schematic diagram of an outer cylinder in an embodiment of the present disclosure. [Diagram 5] FIG. 1 is a schematic structural diagram of a lift lever in an embodiment of the present disclosure (part 1). [Figure 6] FIG. 2 is a schematic diagram of the structure of a lift lever in an embodiment of the present disclosure (part 2). [Figure 7] FIG. 2 is a structural schematic diagram of a connection portion in an embodiment of the present disclosure. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0022] In order to make the objectives, technical solutions and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be described below in a clear and complete manner in conjunction with the drawings of the embodiments of the present disclosure. Obviously, the described embodiments are not all the embodiments, but only some of the embodiments of the present disclosure. Based on the described embodiments of the present disclosure, all other embodiments obtained by those skilled in the art belong to the protection scope of the present disclosure.

[0023] In describing the present disclosure, the orientations and positional relationships indicated by the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," "outer," etc., are based on the orientations and positional relationships shown in the drawings, and are merely for the purpose of facilitating and simplifying the description of the present disclosure, and do not indicate or imply that a specified device or element must have a particular orientation, be configured or operated in a particular orientation, and therefore cannot be understood as a limitation on the present disclosure. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only, and are not understood to indicate or imply relative importance.

[0024] As shown in Figures 1 and 2, this embodiment provides a water-cooled jacket apparatus, which includes a cylindrical body, and an adjustment sleeve 6 is provided at the bottom of the cylindrical body and communicates with the inside of the cylindrical body, and the adjustment sleeve 6 includes a first end connected to the cylindrical body and a second end opposite to the first end, and from the first end to the second end, the cross-sectional area of ​​the adjustment sleeve 6 in the radial direction of the cylindrical body gradually decreases.

[0025] The arrangement of the adjusting sleeve 6 prevents the heat transfer from the bottom of the cylindrical body to the inner space of the water-cooling jacket, effectively preventing the bottom-up dissipation of heat. The adjusting sleeve 6 gradually reduces the cross-sectional area of ​​the cylindrical body in the radial direction, so that when the inert gas flows from the top of the crystal pulling furnace through the adjusting sleeve, the flow rate increases, ensuring sufficient contact between the inert gas flow and the crystal rod, increasing the cooling rate of the crystal rod, and well adjusting the temperature gradient in the longitudinal and radial directions of the crystal rod, thereby controlling the reaction rate of defects in the crystal rod, adjusting the defect distribution, and pulling different types of crystal rods.

[0026] Exemplarily, the inner surface of the adjustment sleeve 6 is curved.

[0027] Exemplarily, the cross-sectional shape of the adjustment sleeve 6 in the axial direction of the tubular body is parabolic.

[0028] Exemplarily, in the axial direction of the tubular body, the adjustment sleeve 6 includes a first portion adjacent to the tubular body and a second portion adjacent to the first portion, and the outer surface of the second portion is recessed to form a recess 61.

[0029] The water-cooled jacket is located above the crucible, and the arrangement of the recess 61 allows the heat from below to be reflected toward the graphite member below the water-cooled jacket or the surface of the silicon melt, thereby maintaining a stable temperature field below.

[0030] Exemplarily, the inner surface of the adjustment sleeve 6 is provided with a heat absorbing layer.

[0031] The heat absorption layer has a heat absorption effect, the bonding strength between the heat absorption layer and the adjusting sleeve 6 is high, the thermal stress at the heat absorption layer interface (the connection surface between the heat absorption layer and the adjusting sleeve 6) can be effectively relieved, and the thermodynamic performance is stable. The adjusting sleeve 6 can effectively carry away the heat transmitted by the crystal rod in real time, so as to greatly improve the cooling rate of the crystal rod, increase the pulling speed, and increase the crystal pulling efficiency.

[0032] For example, the heat absorption layer includes a first layer adjacent to the adjustment sleeve 6 and a second layer away from the adjustment sleeve, and the first layer is a transition layer formed by a chemical reaction between a graphite material and the inner wall of the adjustment sleeve 6.

[0033] The material of the adjusting sleeve is a carbon fiber composite material, the first layer is a C+SiC composite transition coating layer (thickness 80±10 microns), and the second layer is a SiC coating layer (thickness 50±5 microns). This coating layer structure (the bonding method between the heat absorption layer and the adjusting sleeve) has characteristics such as high bonding strength and high induced density. It can protect the matrix and extend its life.

[0034] Illustratively, the heat absorbing layer has a thickness of 130±15 microns.

[0035] Exemplarily, the outer surface of the adjustment sleeve 6 is provided with a heat insulating layer.

[0036] The heat insulating layer has the functions of heat reflection and heat shielding, and prevents external heat from being transferred from the adjusting sleeve 6 to the inside of the water-cooled jacket, thereby maintaining the temperature inside the water-cooled jacket constant.

[0037] For example, the insulating layer includes a third layer adjacent to the adjustment sleeve 6 and a fourth layer away from the adjustment sleeve, and the third layer is a transition layer formed by a chemical reaction between a graphite material and the outer wall of the adjustment sleeve.

[0038] The material of the adjusting sleeve is a carbon fiber composite material, the third layer is a C+SiC composite transition coating layer (thickness 80±10 microns), and the fourth layer is a SiC coating layer (thickness 50±5 microns). This coating layer structure (the bonding method between the heat insulating layer and the adjusting sleeve) has characteristics such as high bonding strength and high induced density, which can protect the matrix and extend its life.

[0039] Illustratively, the thickness of the insulating layer is 160±15 microns.

[0040] For example, the cylindrical body includes an inner tube 2 and an outer tube 1 located outside the inner tube 2, the bottom of the outer tube 1 includes a first region for supporting the inner tube and a second region adjacent to the first region, the first region is arranged adjacent to the side wall of the outer tube 1, and a flange (third flange 62) is provided on the upper part of the adjustment sleeve 6, and the flange is connected to the second region.

[0041] As shown in FIGS. 1, 3 and 4, the inner cylinder 2 exemplarily has an inverted tapered structure.

[0042] Compared with a single straight cylinder structure, this embodiment adopts a double structure of sleeved inner and outer cylinders, the outer cylinder adopts a straight cylinder structure, the outer cylinder plays the role of heat insulation, and the inner cylinder adopts a reverse taper structure, which can achieve the effect of vertical gradient water cooling. The temperature gradient in the vertical direction of the crystal bar (i.e., the axial direction of the crystal bar) exhibits a gradient change (the bottom end is hot and the top end is cold, the end close to the silicon melt is the bottom end, and the end away from the silicon melt is the top end), so the heat of the crystal bar is mainly transferred to the surrounding object with a low temperature by radiation, and the intensity of radiation heat transfer is The temperature gradient is inversely proportional to the cube of the distance, i.e., the closer the distance, the stronger the radiation heat transfer, and the better the water cooling effect. The inner cylinder has an inverse taper shape, and the distance between the inner wall of the inner cylinder and the crystal rod in the radial direction of the crystal rod exhibits a gradient change along the vertical direction, which can realize the gradient water cooling effect, i.e., the vertical asymmetric effect, thereby achieving the gradient change of the radial and axial gradient temperature, greatly improving the axial and radial heat dissipation of the crystal rod, reducing the internal heat accumulation, changing the thermal history of the crystal rod, reducing the occurrence of dislocations and other crystal defects, and improving the quality of the crystal rod. According to the needs of the pulling process, the inclination angle of the inner wall of the inner cylinder can be adjusted, and the vertical (i.e., axial) and radial temperature gradient of the crystal rod can be greatly adjusted, which can control the reaction speed of defects in the crystal rod and adjust the defect distribution.

[0043] Exemplarily, the inner diameter of the upper part of the inner cylinder is 450 mm, and the inner diameter of the bottom part of the inner cylinder is 390 mm, but is not limited thereto.

[0044] A second flange 22 is provided on the upper part of the inner tube, a first flange 11 is provided on the upper part of the outer tube, and a stepped groove 13 is provided on the side of the first flange 11 close to the inner tube, and the second flange 22 is suspended within the stepped groove 13.

[0045] A first surface of the second flange 22 facing away from the bottom of the inner cylinder and a second surface of the first flange 11 facing away from the bottom of the inner cylinder are positioned in the same plane.

[0046] The bottom of the inner cylinder has a first through hole, the bottom of the outer cylinder has a second through hole 12, and the orthogonal projection of the center of the first through hole onto the bottom of the outer cylinder 1 overlaps with the center of the second through hole 12.

[0047] For example, an annular protrusion 14 is provided on the edge of the second through hole 12 so as to protrude toward the upper part of the outer cylinder 1, and the annular protrusion 14 functions as a wall for stopping the inner cylinder 2.

[0048] Exemplarily, a tooth-like corrugated structure 21 is provided on the inner wall of the inner cylinder 2 along the axial direction of the inner cylinder 2 .

[0049] The arrangement of the tooth-like corrugated structure 21 can increase the surface area of ​​the inner wall of the inner cylinder, that is, the heat absorption area of ​​the water-cooled jacket can be increased. Compared with a smooth surface, such a surface has a better heat absorption effect and a good cooling crystal rod effect.

[0050] The toothed corrugated structure 21 includes a plurality of annular teeth extending in the circumferential direction of the inner tube 2, and the plurality of annular teeth are arranged along the axial direction of the inner tube 2, and the cross-sectional shape of a single annular tooth may be triangular, trapezoidal, arc-shaped, etc.

[0051] For example, in the direction from the top end of the inner cylinder 2 to the bottom end of the inner cylinder 2, the thickness of the tooth-like corrugated structure 21 in the radial direction of the inner cylinder 2 gradually increases.

[0052] For example, the inner wall of the inner cylinder 2 is provided with a heat absorbing coating layer.

[0053] The heat-absorbing coating layer is provided on the side of the toothed corrugated structure 21 facing away from the outer tube 1, and the shape of the heat-absorbing coating layer matches the shape of the toothed corrugated structure 21, that is, the connection surface between the heat-absorbing coating layer and the inner tube 2, and the inner surface opposite to the connection surface are both toothed corrugated structures 21.

[0054] The endothermic coating layer has a heat absorbing effect, the bonding strength between the endothermic coating layer and the inner cylinder 2 is high, the thermal stress at the interface of the endothermic coating layer (the connection surface between the endothermic coating layer and the inner cylinder 2) can be effectively relieved, and the thermodynamic performance is stable. The inner cylinder 2 can effectively carry away the heat transmitted by the crystal bar in real time, so as to greatly improve the cooling speed of the crystal bar, increase the pulling speed, and increase the crystal pulling efficiency.

[0055] Exemplarily, in the direction from the top end of the inner cylinder 2 to the bottom end of the inner cylinder 2, the thickness of the heat absorbing coating layer in the radial direction of the inner cylinder 2 gradually increases.

[0056] Exemplarily, the heat absorbing coating layer is made of ceramic, but is not limited thereto.

[0057] Exemplarily, the thickness of the heat absorbing coating layer is 200±25 microns.

[0058] Exemplarily, the outer wall of the inner cylinder 2 and / or the inner wall of the outer cylinder 1 are provided with a heat insulating coating layer.

[0059] The heat insulating coating layer has the functions of heat reflection and heat shielding, preventing external heat from being transferred from the outer cylinder 1 to the inside of the water-cooled jacket (i.e., the inside of the inner cylinder 2), and maintaining a constant temperature inside the water-cooled jacket.

[0060] For example, an insulating coating layer is provided on the outer wall of the inner tube 2, and the thickness of the insulating coating layer in the radial direction of the inner tube 2 gradually increases in the direction from the top end of the inner tube 2 to the bottom end of the inner tube 2.

[0061] Illustratively, the thermal barrier coating layer is made using high temperature insulating zirconia ceramics.

[0062] Exemplarily, but not limited to, the thickness of the thermal barrier coating layer is 100±25 microns.

[0063] Exemplarily, the water-cooling duct 3 is spirally distributed around the outer wall of the inner cylinder 2 along the axial direction of the inner cylinder 2 .

[0064] The water-cooling duct 3 may be provided on the outer wall of the inner cylinder 2 or on the inner wall of the outer cylinder 1 .

[0065] The specific structural form of the water-cooled duct 3 is not limited thereto, but for example, the water-cooled duct 3 can be serpentine and distributed on the outer wall of the inner tube 2, and the water-cooled duct 3 can be serpentine and include a plurality of straight ducts 3 extending along the axial direction of the inner tube 2, and a bent duct 3 provided between two adjacent straight ducts 3.

[0066] Exemplarily, in the direction from the top end of the inner cylinder 2 to the bottom of the inner cylinder 2, the diameter of the water-cooled duct 3 gradually increases.

[0067] According to the above embodiment, the water-cooling effect of the water-cooling duct 3 exhibits a gradient change along the axial direction of the inner cylinder 2, which is advantageous for adjusting the radial and axial gradient temperatures.

[0068] Exemplarily, the diameter of the water cooling duct is 5mm-10mm, but is not limited thereto.

[0069] For example, the circumferential interval of the water-cooled duct in the direction from the top end of the inner cylinder 2 to the bottom end of the inner cylinder 2 is 48 mm.

[0070] As shown in FIG. 1 and FIG. 5 to FIG. 7, exemplarily, in this embodiment, the water-cooled jacket device further includes a lifting structure for controlling the lifting and lowering of the cylindrical main body, The cylindrical body includes an inner cylinder 2 and an outer cylinder 1 located outside the inner cylinder 2, The lifting structure includes two lifting sections 4 arranged opposite each other on either side of the tubular body, each of the lifting sections 4 including a driving member and a transmission member, and the transmission member is connected to the outer tube 1 via a connecting structure so that the two lifting sections 4 can move asynchronously to tilt the tubular body by a predetermined angle.

[0071] The lifting structure is arranged to control the lifting of the cylindrical body, and the two lifting parts 4 are independently driven so that the two lifting parts 4 can move asynchronously, so that the cylindrical body can be tilted within a certain angle range to form an asymmetric water cooling effect, and the large gradient change can accelerate the transfer of heat from the crystal bar to the water cooling jacket, improve the heat transfer efficiency, and accelerate the axial and radial heat dissipation of the crystal bar. According to the needs of the pulling process, the longitudinal temperature gradient and radial temperature gradient of the crystal bar can be greatly adjusted, the reaction speed of the defects in the crystal bar can be controlled, and the defect distribution can be adjusted, so that the crystal bar with a good cooling rate and different defect types (such as stacking fault-free crystal bar, BMD crystal bar) can be pulled.

[0072] The crystal rods required for different process parameters need to match different water cooling effects, and the asynchronous moving water cooling jacket device can make corresponding adjustments according to demand to obtain the appropriate cooling effect.

[0073] The purpose of the asynchronous movement is to bring about radial asymmetric effect and enhance the water cooling effect. The function of the lifting mechanism is as follows: when pulling up epitaxial crystal rods, they need to be pulled up at a high pulling speed, so they move to the liquid surface through the water cooling jacket to increase the cooling effect, thereby increasing the pulling speed; when pulling up defect-free polished crystal rods, the water cooling jacket is moved up to suppress the formation of COP; when pulling up BMD crystal rods, the nucleation and growth of BMD is promoted; by adjusting the movement of the water cooling jacket, BMD can be nucleated at a low temperature of 650℃-700℃, while for the high temperature region, the asynchronous movement adjustment expands the crystal rod section within the temperature range of 750℃-1100℃, thereby promoting the high temperature nucleation of BMD.

[0074] Furthermore, by virtue of the action of the lifting structure, the two opposing lifting units 4 work together to tilt and raise the tubular body. In other words, the two lifting units 4 tilt the tubular body by a predetermined angle through asynchronous movement, and then the synchronous movement of the two lifting units 4 can be controlled to raise and lower the tubular body in an inclined state.

[0075] In addition, the number of the lifting sections 4 included in the lifting structure is not limited, and two lifting sections 4 are provided on opposite sides of the cylindrical main body, and the two opposing lifting sections 4 form a set, and the lifting structure can include multiple sets of the lifting sections 4, and each set of the lifting sections 4 can realize inclination of the cylindrical main body in one direction. Therefore, multiple sets of the lifting sections 4 can be installed according to actual needs, thereby flexibly controlling the inclination direction of the cylindrical main body to better control the water cooling effect.

[0076] In addition, the two opposing lifting units 4 work together to tilt and lift the water-cooled jacket body, and the tilt angle can be set according to actual needs, for example, from 0 degrees to 17 degrees, but is not limited to this.

[0077] Exemplarily, the transmission member includes a lift lever 41 and a transmission gear 42. The lift lever 41 extends along the axial direction of the outer cylinder 1, and a rack structure 411 is provided on the outer surface of the lift lever 41. The transmission gear 42 is engaged with the rack structure 411 to be transmission-connected to the lift lever 41 .

[0078] In this embodiment, a system is adopted in which the transmission gear 42 and the lifting lever 41 work together, so that the transmission gear 42 rotates and the lifting lever 41 transmits the lifting action of the cylindrical body.

[0079] Exemplarily, the driving member of each of the lifting units 4 may be a driving motor.

[0080] For example, the outer surface of one of the lifting levers 41 includes a first region that is spaced apart from the other of the lifting levers 41, the first region being recessed to form a connection surface, and the rack structure 411 is provided on the connection surface.

[0081] The connection surface is a plane parallel to the axial direction of the outer cylinder 1, and the rack structure 411 is provided on the connection surface to facilitate cooperation between the rack structure 411 and the transmission gear 42.

[0082] Exemplarily, the rack structure 411 includes a plurality of parallel racks protruding from the connection surface, the racks being arranged side by side along the axial direction of the outer tube 1, and forming a tooth groove between two adjacent racks.

[0083] The extending direction of the rack is perpendicular to the axial direction of the outer tube 1, the axial direction of the transmission gear 42 is parallel to the extending direction of the rack, and the teeth of the transmission gear 42 correspond to the tooth grooves, whereby the transmission gear 42 rotates to raise and lower the lifting lever 41, thereby raising and lowering the cylindrical body.

[0084] Illustratively, the rack is a threaded rack, which has the characteristics of high precision and large load.

[0085] For example, a stopper base 43 is provided at the end of the lift lever 41 that is separated from the outer cylinder 1 .

[0086] The positioning of the stopper base 43 prevents the transmission gear 42 and the lift lever 41 from coming apart, and the stopper base 43 may have a circular structure, and the area of ​​the stopper base 43 in the radial direction of the lift lever 41 is larger than the cross-sectional area of ​​the end face of the lift lever 41.

[0087] The stopper base 43 may be integral with the lifting lever 41, or may be connected through a process such as welding, or may be formed in synchronization with the formation of the connection surface, and the first region may be located in the center of the lifting lever 41, and the first region is recessed to form a groove, the bottom surface of the groove being the connection surface, and thus, in the axial direction of the lifting lever 41, a first side wall at the end of the groove away from the outer tube 1 forms the stopper base 43, and a second side wall opposite to the first side wall of the groove forms a limiting stopper wall for regulating the movement stroke of the transmission gear 42.

[0088] For example, in the axial direction of the outer tube 1, the length of the first region is shorter than the length of the lifting lever 41, and the first region is located at the end of the lifting lever 41 that is away from the outer tube 1.

[0089] For example, the length of the first region in the axial direction of the outer cylinder 1 is greater than half the length of the lift lever 41 .

[0090] For example, the connection portion 5 includes a retainer ring 51 that is sleeved onto the outside of the outer tube 1, and two protrusions 52 are protruded from opposite sides of the retainer ring 51, and each of the protrusions 52 is provided with a connection through hole 521 for connecting to the corresponding lifting lever 41.

[0091] For example, a connecting ring 44 is provided at the end of the lifting lever 41 close to the outer cylinder 1, and the connecting ring 44 and the lifting lever 41 are connected by a screw, and the lifting lever 41 and the protrusion 52 are loosely fitted together through a gap, thus making it easy to realize the tilt of the water-cooled jacket when the two lifting levers 41 move asynchronously.

[0092] For example, a first flange 11 is provided on the upper part of the outer cylinder 1 , and the retainer ring 51 is provided on the side of the first flange 11 close to the bottom part of the outer cylinder 1 .

[0093] The retainer ring 51 can reinforce the connection strength between the connection portion 5 and the outer tube 1 by adhering to the first flange 11 via an adhesive layer.

[0094] An embodiment of the present disclosure further provides a single crystal furnace including the water-cooled jacket device, and the single crystal furnace further includes a furnace body and a crucible located in the furnace body, and the cylindrical body is fixed above the crucible by the lifting action of the lifting structure.

[0095] It is understood that the above embodiments are merely exemplary embodiments adopted to explain the principles of the present disclosure, but the present disclosure is not limited thereto. Those skilled in the art can make various modifications and improvements without departing from the spirit and substance of the present disclosure, and these modifications and improvements are also considered to be within the scope of protection of the present disclosure.

Claims

1. A water-cooled jacket device, The device includes a cylindrical body, and an adjustment sleeve is provided at a bottom of the cylindrical body and communicates with the inside of the cylindrical body. the adjustment sleeve includes a first end connected to the tubular body and a second end opposite the first end; A water-cooled jacket apparatus, wherein the cross-sectional area of ​​the adjustment sleeve in a radial direction of the tubular body gradually decreases from the first end to the second end.

2. The water cooling jacket apparatus of claim 1 , wherein the inner surface of the adjustment sleeve is curved.

3. 3. The water-cooling jacket apparatus according to claim 2, wherein a cross-sectional shape of the adjustment sleeve in an axial direction of the cylindrical body is parabolic.

4. 2. The water cooling jacket apparatus of claim 1, wherein in an axial direction of the tubular body, the adjustment sleeve includes a first portion adjacent to the tubular body and a second portion adjacent to the first portion, and an outer surface of the second portion is recessed to form a recess.

5. The water-cooled jacket apparatus according to claim 1 , wherein the inner surface of the adjustment sleeve is provided with a heat absorbing layer.

6. 6. The water-cooled jacket apparatus according to claim 5, wherein the heat absorption layer includes a first layer adjacent to the adjustment sleeve and a second layer away from the adjustment sleeve, and the first layer is a transition layer formed by a chemical reaction between a graphite material and an inner wall of the adjustment sleeve.

7. 7. The water cooling jacket apparatus of claim 6, wherein the first layer is a C+SiC composite transition coating layer and the second layer is a SiC coating layer.

8. 6. The water cooling jacket apparatus of claim 5, wherein the heat absorption layer has a thickness of 130±15 microns.

9. The water cooling jacket apparatus according to claim 1 , wherein an outer surface of the adjustment sleeve is provided with a thermal insulation layer.

10. 10. The water cooling jacket apparatus of claim 9, wherein the insulating layer includes a third layer adjacent to the adjustment sleeve and a fourth layer away from the adjustment sleeve, the third layer being a transition layer formed by a chemical reaction between a graphite material and an outer wall of the adjustment sleeve.

11. The water cooling jacket apparatus of claim 10 , wherein the third layer is a C+SiC composite transition coating layer and the fourth layer is a SiC coating layer.

12. 10. The water cooling jacket apparatus of claim 9, wherein the insulating layer has a thickness of 160±15 microns.

13. 2. The water-cooled jacket apparatus of claim 1, wherein the cylindrical body includes an inner tube and an outer tube located outside the inner tube, the bottom of the outer tube includes a first region for supporting the inner tube and a second region adjacent to the first region, the first region is provided adjacent to a side wall of the outer tube, and a flange is provided on an upper portion of the adjustment sleeve, the flange being connected to the second region.

14. A single crystal furnace comprising a water-cooled jacket device according to any one of claims 1 to 13.

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