Inspection probe and inspection apparatus

Abstract

Provided is an inspection probe. 【Solution means】The inspection probe includes a barrel having a tubular barrel main body portion and a plurality of skirt portions separated from each other by a plurality of slits extending in the longitudinal direction at one end portion of the barrel main body portion, and a plunger accommodated in the barrel main body portion and slidable along the longitudinal direction of the barrel, and having a terminal contact portion extending along the longitudinal direction from the sliding portion and exposed beyond the skirt portion. The skirt portion has a skirt main body portion extending in the longitudinal direction of the barrel main body portion, and a skirt diameter-reducing portion having a facing end portion that bends so as to reduce the diameter in the longitudinal direction of the barrel at the tip region of the skirt main body portion and faces the surface of the terminal contact portion. The sliding portion includes a small-diameter portion having a first diameter located within the skirt main body portion, and a large-diameter portion having a second diameter larger than the first diameter and located within the barrel main body portion.

Description

Technical Field

[0001] The present invention relates to an inspection probe and an inspection apparatus for inspecting the electrical characteristics of a test object such as a semiconductor.

Background Art

[0002] FIG. 1 is a diagram showing a conventional inspection probe 10.

[0003] Referring to FIG. 1, the inspection probe 10 includes a cylindrical barrel 11, a plunger 12 slidably coupled within one side of the barrel 11, a terminal 13 fixedly coupled to the other side of the barrel 11, and a spring 14 interposed between the plunger 12 and the terminal 13 within the barrel 11 to provide an elastic force.

[0004] An inspection signal may be transmitted from the plunger 12 to the terminal 13 via the barrel 11 and the spring 14. More specifically, the inspection signal applied to the plunger 12 is transmitted to the terminal 13 fixed to the other end of the barrel 11 through one end of the barrel 11, the inner wall of the barrel 11, and the spring 14. At this time, an appropriate interval needs to be maintained between the plunger 12 and the barrel 11 for the smooth sliding of the plunger 12. Such an interval causes an unstable contact state during inspection, generates an unstable resistance value as shown in FIG. 2, and there is a problem of misjudging a good test object as a defective one.

[0005] Moreover, the end of the barrel is diameter-reduced so that the sliding plunger does not come out. During inspection, the sliding plunger provides a large load on the sharp end of the barrel, resulting in damage to the plated portion coated on the outer surface of the plunger.

Summary of the Invention

Problems to be Solved by the Invention

[0006] An object of the present invention is to provide an inspection probe and an inspection apparatus capable of enhancing the reliability of inspection by ensuring a stable signal transmission path during inspection.

[0007] Another object of the present invention is to provide an inspection probe and an inspection apparatus having excellent durability.

Means for Solving the Problems

[0008] An inspection probe for achieving the above-described problems is provided. The inspection probe includes a barrel having a tubular barrel main body portion and a plurality of skirt portions separated from each other by a plurality of slits formed longitudinally at one end portion of the barrel main body portion, a sliding portion housed in the barrel main body portion and slidable along the longitudinal direction of the barrel, and a plunger having a terminal contact portion extending longitudinally from the sliding portion and exposed beyond the skirt portion. The skirt portion has a skirt main body portion extending in the longitudinal direction of the barrel main body portion and a skirt diameter-reducing portion having a facing end portion that bends so as to reduce the diameter in the longitudinal direction of the barrel at the tip region of the skirt main body portion and faces the surface of the terminal contact portion. The sliding portion has a small-diameter portion with a first diameter located within the skirt main body portion and a large-diameter portion with a second diameter larger than the first diameter located within the barrel main body portion.

[0009] The plunger may include an inclined contact portion provided between the sliding portion and the terminal contact portion so as to contact the inner surface of the skirt diameter-reducing portion. The inner surface of the skirt diameter-reducing portion may have a linear inclination degree different from the outer surface of the inclined contact portion. Thereby, the contact area between the inner surface of the skirt diameter-reducing portion and the outer surface of the inclined contact portion can be minimized, and damage to the outer surface plating layer of the inclined contact portion due to burrs existing at the inner surface edge of the skirt diameter-reducing portion can be reduced.

[0010] The plunger may include an inclined contact portion provided between the sliding portion and the terminal contact portion so as to contact the inner surface of the skirt reduced diameter portion. The inner surface of the skirt reduced diameter portion may have a curvature different from that of the outer surface of the inclined contact portion. Thereby, the contact area between the inner surface of the skirt reduced diameter portion and the outer surface of the inclined contact portion can be minimized, and damage to the outer surface plating layer of the inclined contact portion due to burrs existing at the inner surface edge of the skirt reduced diameter portion can be reduced.

[0011] The plunger may include an inclined contact portion provided between the sliding portion and the terminal contact portion so as to contact the inner surface of the skirt reduced diameter portion. Either one of the inner surface of the skirt reduced diameter portion and the outer surface of the inclined contact portion may have an inclined surface having a predetermined linear inclination. The other of the inner surface of the skirt reduced diameter portion and the outer surface of the inclined contact portion may have a curved surface having a predetermined curvature. Thereby, the contact area between the inner surface of the skirt reduced diameter portion and the outer surface of the inclined contact portion can be minimized, and damage to the outer surface plating layer of the inclined contact portion due to burrs existing at the inner surface edge of the skirt reduced diameter portion can be reduced.

[0012] At least a part of the section of the terminal contact portion may include a tapered portion whose diameter decreases in the direction toward the sliding portion. Thereby, the durability of the skirt portion can be increased.

[0013] The terminal contact portion may include an extension bar having a constant diameter extending from the tapered portion to the opposite side of the sliding portion. Thereby, only the portion that contacts the facing end portion of the skirt portion forms the skirt portion, and the rest is formed with a constant diameter, so that the durability of the terminal contact portion can be increased.

[0014] The terminal contact portion may include a chip that contacts the terminal of the object to be inspected and a tapered portion whose diameter increases in the direction from the chip toward the sliding portion. Thereby, the contact between the terminal contact portion and the facing end portion of the skirt portion can be reduced, and the durability of the skirt portion can be enhanced.

Advantages of the Invention

[0015] The inspection probe according to an embodiment of the present invention includes a barrel main body portion and a plurality of skirt portions separated by a slit formed longitudinally at one end portion of the barrel main body portion and having a reduced diameter toward the central axis. Since the inner surface of the tip region of each skirt portion contacts the outer surface of the plunger over a predetermined length section, the plunger and the barrel can maintain stable contact during inspection, thereby improving the reliability of the inspection. Further, when a large load is generated at the end portion of the barrel during the sliding operation of the plunger, the skirt portion can expand radially outward to prevent damage to the plated portion of the plunger due to the load.

[0016] Although the skirt portion may have reduced durability because it is separated by a slit, the durability is increased by forming the axial facing length of the facing end portion that contacts the plunger to be longer than the thickness of the skirt reduced diameter portion or the skirt main body portion, and a length enabling chamfering of the edge of the tip can be ensured.

[0017] The edge of the tip of the skirt reduced diameter portion is chamfered, which can prevent the outer surface of the plunger from being damaged.

Brief Description of the Drawings

[0018]

Figure 1

Figure 2

Figure 3

Figure 4

Figure 5

Figure 6

Figure 7

Figure 8

Figure 9

Figure 10

Figure 11

Figure 12

Figure 13

Figure 14

Figure 15

Embodiments for Carrying Out the Invention

[0019] Hereinafter, with reference to the accompanying drawings, an inspection probe 100 according to an embodiment of the present invention will be described in detail.

[0020] For example, an inspection apparatus for inspecting the electrical characteristics of a test object such as a semiconductor includes a plate-shaped probe support (not shown) and an inspection probe 100 supported such that both ends partially protrude from the upper and lower surfaces of the probe support.

[0021] FIG. 3 is a diagram showing an inspection probe 100 according to a first embodiment of the present invention, FIG. 4 is a cross-sectional view of the inspection probe 100 cut along the line A-A of FIG. 3, and FIG. 5 is a diagram showing the contact state between the skirt portion 112 of FIG. 3 and the terminal contact portion 122 of the plunger 120.

[0022] Referring to FIGS. 3 to 5, the inspection probe 100 includes, for example, a cylindrical barrel 110, a plunger 120 slidably coupled within one side of the barrel 110, a terminal 130 fixedly coupled to the other side of the barrel 110, and an elastic body 140 interposed between the plunger 120 and the terminal 130 within the barrel 110 to provide an elastic force.

[0023] The barrel 110 includes a barrel main body portion 111 and a skirt portion 112 separated by a plurality of slits 113 formed at predetermined intervals along the circumferential direction at one end where the plunger 120 is inserted. The number of slits 113 is not limited to three and may be two or four or more. The slits 113 may extend obliquely or spirally with respect to the longitudinal direction of the inspection probe 100. The slits 113 are cut with a constant width.

[0024] The plunger 120 includes a sliding portion 121 housed and slid within the barrel main body portion 111, and a terminal contact portion 122 extending from the sliding portion 121, passing through the skirt portion 112 and exposed to the outside, and contacting the skirt portion 112.

[0025] The sliding portion 121 has a diameter corresponding to the inner diameter of the barrel main body portion 111. The diameter of the sliding portion 121 is set smaller than that of the barrel main body portion 111 so as to be slidable within the barrel main body portion 111.

[0026] The terminal contact portion 122 has a diameter smaller than that of the sliding portion 121. The diameter of the terminal contact portion 122 is set such that the terminal contact portion 122 can pass while facing the tip of the skirt portion 122. The tip portion of the terminal contact portion 122 contacts a terminal (not shown) for inspection.

[0027] The terminal 130 is fixedly coupled to the other end of the barrel 110 by dimpling or caulking. As another example, the terminal 130 may be inserted slidably without being fixed.

[0028] During inspection, the elastic body 140 is compressed and restored by the sliding movement of the plunger 120. The elastic body 140 may be embodied by, for example, a coil spring.

[0029] Referring to FIG. 5, the skirt portion 112 has a skirt main body portion 1121 extending along the barrel main body portion 111 and a skirt diameter-reducing portion 1122 that bends so as to reduce the diameter in the axial direction X of the barrel 110 in the tip region of the skirt main body portion 1121.

[0030] The skirt main body portion 1121 is arranged side by side with the same thickness as the barrel main body portion 111 and extends.

[0031] The skirt diameter-reducing portion 1122 has a facing end portion 1122E facing the surface of the terminal contact portion 122 in the tip region. The facing length L in the axial direction X of the facing end portion 1122E is larger than the thickness d1 of the skirt diameter-reducing portion 1122 and / or the thickness d2 of the skirt main body portion 1121. The thickness d1 of the skirt diameter-reducing portion 1122 and the thickness d2 of the skirt main body portion 1121 are substantially the same.

[0032] The inner diameter of the facing end portion 1122E may be formed by cylindrical cutting along the axial direction X of the barrel.

[0033] The edge of the tip of the skirt diameter-reducing portion 1122 may have a chamfered portion. By setting the axial facing length L to be larger than the thickness d1 of the skirt diameter-reducing portion 1122 and / or the thickness d2 of the skirt main body portion 1121, chamfering of the edge of the tip of the skirt diameter-reducing portion 1122 is possible. If chamfering of the edge of the tip of the skirt diameter-reducing portion 1122 is performed without ensuring sufficient axial facing length L, the facing end portion 1122E becomes sharp, and the surface of the terminal contact portion 122 may be damaged during inspection and the plating layer may be peeled off.

[0034] Also, when pressing the inspection probe 100 for inspection, the terminal contact portion 122 may tilt obliquely. At this time, if there is no skirt portion 112, strong friction may occur between the terminal contact portion 122 and the tip of the barrel 110, and the surface of the terminal contact portion 122 may be damaged and the plating layer may be peeled off. On the other hand, in the present invention, since the skirt portion 112 is deformed in the radial direction, the friction between the terminal contact portion 122 and the tip of the barrel 110 can be reduced.

[0035] FIG. 6 is a diagram showing the inspection probe 100 according to the second embodiment of the present invention.

[0036] Referring to FIG. 6, the skirt portion 112 includes a skirt main body portion 1121 and a skirt diameter-reducing portion 1122 that bends from the skirt main body portion 1121 so as to reduce the diameter in the axial direction X of the barrel 110.

[0037] The skirt main body portion 1121 extends substantially in the longitudinal direction of the barrel main body portion 111.

[0038] The skirt diameter-reducing portion 1122 has a thick portion 1123 that expands radially outward in a region facing the terminal contact portion 122. The thick portion 1123 expands so as to gradually become thicker along the axial direction X of the barrel 110. The thickness d1 of the skirt diameter-reducing portion 1122 is formed to be thicker than the thickness d2 of the skirt main body portion 1121 by the thick portion 1123. The thick portion 1123 may be formed by extrusion.

[0039] The edge of the tip of the skirt diameter-reducing portion 1122 has a chamfered portion 1124. The thick portion 1123 expands the facing length L of the facing end portion 1122E that contacts the contact terminal portion 122, and by forming the chamfered portion 1124, it is possible to prevent the facing length L from becoming smaller and the facing end portion 1122E from becoming sharp.

[0040] FIG. 7 is a diagram showing the inspection probe 100 according to the third embodiment of the present invention. Referring to FIG. 7, the skirt portion 112 includes a skirt main body portion 1121 and a skirt diameter-reducing portion 1122 that bends so as to reduce the diameter in the axial direction X of the barrel 110 from the skirt main body portion 1121.

[0041] The skirt diameter-reducing portion 1222 has a thick portion 1123 that extends radially outward in a region facing the terminal contact portion 122. The thick portion 1123 is formed so as to gradually become thicker and then thinner along the longitudinal direction of the barrel 110. That is, the outer surface of the thick portion 1123 extends along the longitudinal direction of the skirt main body portion 1121 and then extends in a lateral direction substantially perpendicular to the longitudinal direction.

[0042] FIG. 8 is a diagram showing the barrel 110 of the inspection probe according to the fourth embodiment of the present invention.

[0043] Referring to FIG. 8, the barrel 110 includes a skirt portion 112 formed by a slit 113-1. The slit 113-1 has a tapered shape that gradually becomes narrower toward the flange 114. The tapered slit 113-1 is easier to process than the slit 113 having a constant width shown in FIG. 3, and can reduce the burrs remaining on the inner edge of the skirt portion 112.

[0044] FIG. 9 is a diagram showing the barrel 110 of the inspection probe according to the fifth embodiment of the present invention.

[0045] Referring to FIG. 9, the barrel 110 includes a skirt portion 112 formed by a slit 113-1. The skirt portion 112 may be formed with different thicknesses in order to adjust the radial elastic force.

[0046] As shown in FIG. 9(a), the skirt main body portion 1121 may have the same outer diameter d5 as the outer diameter d4 of the barrel main body portion 111. At this time, the inner diameters of the skirt main body portion 1121 and the barrel main body portion 111 are the same.

[0047] As shown in FIG. 9(b), the skirt main body portion 1121 may be processed to have an outer diameter d5 smaller than the outer diameter d4 of the barrel main body portion 111. That is, the outer diameter on the left side may be cut with reference to the flange 114 to reduce the thickness of the skirt portion 112. At this time, the inner diameters of the skirt main body portion 1121 and the barrel main body portion 111 are the same. When the thickness of the skirt main body portion 1121 is reduced, the radial elastic force of the skirt portion 112 decreases.

[0048] As shown in FIG. 9(c), the skirt main body portion 1121 may be processed to have an outer diameter d5 larger than the outer diameter d4 of the barrel main body portion 111. That is, the outer diameter on the right side may be cut with reference to the flange 114 to increase the thickness of the skirt portion 112. At this time, the inner diameters of the skirt main body portion 1121 and the barrel main body portion 111 are the same. When the thickness of the skirt main body portion 1121 is increased, the radial elastic force of the skirt portion 112 increases.

[0049] FIG. 10 is a diagram showing an inspection probe 100 according to a sixth embodiment of the present invention.

[0050] Referring to FIG. 10, the barrel 110 includes, at one end portion, a skirt portion 112 formed by a slit extending in the longitudinal direction. The skirt portion 112 includes a skirt main body portion 1121 extending longitudinally from the barrel main body portion 111 and a skirt diameter-reducing portion 1122 that bends so as to reduce the diameter in the axial direction X of the barrel main body portion 111 from the skirt main body portion 1121.

[0051] The plunger 120 includes a sliding portion 121 inserted into and slid in the barrel main body portion 111, a terminal contact portion 122 that passes through the tip portion of the skirt portion 112 from the sliding portion 121 and is exposed to the outside to contact the terminal of the object to be inspected, and an inclined contact portion 123 between the sliding portion 121 and the terminal contact portion 122.

[0052] The sliding portion 121 has a large-diameter portion 1211 having an outer diameter set to be substantially adjacent to the inner surface of the barrel main body portion 111, and a small-diameter portion 1212 having an outer diameter set such that a predetermined gap G1 is formed from the inner surface of the skirt portion 112. The gap G1 formed by the small-diameter portion 1212 prevents the movement of the sliding portion 212 from being obstructed by the burr remaining on the inner edge of the skirt portion 112 and prevents scratches on the surface.

[0053] The skirt diameter-reducing portion 1122 has an inner inclined surface 1122S having a predetermined linear inclination, and the inclined contact portion 123 has an outer inclined surface 123S having a predetermined bending rate. As a result, the inner inclined surface 1122S and the outer inclined surface 123S have a minimum contact area with each other. This can reduce the damage of the outer inclined surface 123S of the inclined contact portion 123 by the burr remaining on the inner edge of the skirt diameter-reducing portion 1122.

[0054] As a modified embodiment, the skirt diameter-reducing portion 1122 may have an inner inclined surface 1122S having a predetermined bending rate, and the inclined contact portion 123 may have an outer inclined surface 123S having a predetermined linear inclination.

[0055] As a modified embodiment, the skirt diameter-reducing portion 1122 may have an inner inclined surface 1122S having a first linear inclination, and the inclined contact portion 123 may have an outer inclined surface 123S having a second linear inclination different from the first linear inclination. As a modified embodiment, the skirt diameter-reducing portion 1122 may have an inner inclined surface 1122S having a first bending rate, and the inclined contact portion 123 may have an outer inclined surface 123S having a second bending rate different from the first bending rate.

[0056] FIG. 11 is a diagram showing an inspection probe 100 according to the seventh embodiment of the present invention.

[0057] Referring to FIG. 11, the barrel 110 includes, at one end, a skirt portion 112 formed by a longitudinally extending slit. The skirt portion 112 includes a skirt main body portion 1121 that extends longitudinally from the barrel main body portion 111, and a skirt diameter-reducing portion 1122 that bends so as to reduce the diameter in the axial direction X of the barrel main body portion 111 from the skirt main body portion 1121.

[0058] The plunger 120 includes a sliding portion 121 that is inserted into and slides within the barrel main body portion 111, a terminal contact portion 122 that passes through the tip of the skirt portion 112 from the sliding portion 121 and is exposed to the outside to contact the terminal of the object to be inspected, and an inclined contact portion 123 between the sliding portion 121 and the terminal contact portion 122.

[0059] The terminal contact portion 122 includes a first tapered portion 1221 whose outer diameter gradually decreases toward the inclined contact portion 123 in at least a partial section. The first tapered portion 1221 can contact the facing end portion 1122E provided at the tip of the skirt diameter-reducing portion 1122 with no contact or a minimum contact force before the plunger 120 slides in the arrow direction for inspection. When the plunger 120 slides in the arrow direction for inspection, the first tapered portion 1221 can contact the facing end portion 1122E of the skirt diameter-reducing portion 1122 with a stronger contact force. This can prevent elastic degradation of the skirt portion 122 caused by the facing end portion 1122E of the skirt portion 122 constantly pressing the terminal contact portion 122 in the standby state where no inspection is being performed.

[0060] FIG. 12 is a diagram showing the inspection probe 100 according to the eighth embodiment of the present invention.

[0061] Referring to FIG. 12(a), the barrel 110 includes a skirt portion 112 formed by a longitudinally extending slit at one end.

[0062] The plunger 120 includes a sliding portion 121 that is inserted into and slides within the barrel main body portion 111, and a terminal contact portion 122 that passes through the facing end portion 1122E of the skirt portion 112 from the sliding portion 121 and is exposed to the outside.

[0063] The terminal contact portion 122 includes an extension bar 1222 that extends integrally from the sliding portion 121, a chip 1223 that contacts the terminal of the object to be inspected, and a second tapered portion 1224 provided between the extension bar 1222 and the chip 1223. The second tapered portion 1224 extends obliquely so that the diameter gradually decreases toward the chip 1223.

[0064] As shown in FIG. 12(b), the terminal contact portion 122 of the plunger 120 passes through the facing end portion 1122E of the skirt portion 112 and is exposed to the outside as shown in FIG. 12(c). At this time, when the terminal contact portion 122 abuts against the inner surface of the skirt portion 112 and an impact is applied, the skirt portion 112 may be deformed. To prevent this, a second tapered portion 1224 having a predetermined inclination is provided adjacent to the chip 1223, thereby preventing the terminal contact portion 122 from contacting and pressing the inner surface of the skirt portion 112 and being deformed.

[0065] FIG. 13 is a schematic diagram showing a method of manufacturing the barrel 110 of FIG. 3.

[0066] The first step is to form a cylindrical pipe member 110M made of a conductive material as shown in FIG. 13(a). The pipe member 110M may include a flange 114.

[0067] The second step is to form a reduced-diameter portion 1122M at one end of the pipe member 110M by forging using, for example, a mold as shown in FIG. 13(b). The reduced-diameter portion 1122M has a shape in which the diameter decreases along the axial direction X of the pipe member 110M.

[0068] In the third step, as shown in Fig. 13(c), a facing end portion 1122E is formed on the tip surface of the reduced-diameter portion 1122M. The facing end portion 1122E is formed substantially along the longitudinal direction of the pipe member 110M. For example, the facing end portion 1122E may be formed by cylindrically machining the inner surface of the tip of the reduced-diameter portion 1122M along the axial direction X of the barrel using a drill.

[0069] In the fourth step, as shown in Fig. 13(d), a chamfered portion 1122C is formed on the edge of the tip of the reduced-diameter portion 1122M. The chamfered portion 1122C may be formed by chamfering so as to have an obtuse angle with respect to the facing end portion 1122E.

[0070] In the fifth step, as shown in Fig. 13(e), three slits 113 are formed along the longitudinal direction in a part of the reduced-diameter portion 1122M and the pipe member 110M shown in Fig. 13(d). The three slits 113 are formed at intervals of 120° in the circumferential direction, forming three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 may be formed by machining using a drill, for example, with a constant width or gradually widening along the open end.

[0071] Fig. 14 is a schematic diagram showing a method for manufacturing the barrel 110 of Fig. 6.

[0072] In the first step, as shown in Fig. 14(a), a cylindrical pipe member 110M made of a conductive material is formed. The pipe member 110M may include a flange 114.

[0073] In the second step, as shown in Fig. 14(b), a reduced-diameter portion 1122M is formed at one end of the pipe member 110M by forging using a mold, for example. The reduced-diameter portion 1122M has a diameter that decreases along the axial direction X of the pipe member 110M. The reduced-diameter portion 1122M has a shape in which the thickness gradually increases. The thickness of the reduced-diameter portion 1122M is thicker than the thickness of the pipe member 110M.

[0074] The third step is to form the facing end portion 1122E on the tip surface of the reduced diameter portion 1122M as shown in FIG. 14(c). The facing end portion 1122E is formed substantially along the longitudinal direction of the pipe member 110M. For example, the facing end portion 1122E may be formed by cylindrically machining the inner surface along the longitudinal direction of the barrel using a drill.

[0075] The fourth step is to form the chamfered portion 1122C on the edge of the tip of the reduced diameter portion 1122M as shown in FIG. 14(d). The chamfered portion 1122C may be formed by chamfering so as to have an obtuse angle with respect to the facing end portion 1122E.

[0076] The fifth step is to form three slits 113 along the longitudinal direction in a part of the reduced diameter portion 1122M and the pipe member 110M shown in FIG. 14(d) as shown in FIG. 14(e). The three slits 113 are formed at intervals of 120° in the circumferential direction, forming three skirt portions 112. The number of the slits 113 is not limited to three. The slits 113 may be formed by cutting using a drill, for example, with a constant width or gradually widening toward the open end.

[0077] FIG. 15 is a schematic diagram showing a method of manufacturing the barrel 110 of FIG. 7.

[0078] The first step is to form a cylindrical pipe member 110M made of a conductive material as shown in FIG. 15(a). The pipe member 110M may include a flange 114.

[0079] The second step is to form a reduced diameter portion 1122M at one end of the pipe member 110M by forging using, for example, a mold as shown in FIG. 15(b). The reduced diameter portion 1122M has a diameter that decreases along the axial direction X of the pipe member 110M. The reduced diameter portion 1122M has a shape in which the thickness gradually increases and then decreases. The reduced diameter portion 1122M is thicker than the thickness of the pipe member 110M.

[0080] In the third step, as shown in Fig. 15(c), a facing end portion 1122E is formed on the tip surface of the reduced-diameter portion 1122M. The facing end portion 1122E is formed substantially along the longitudinal direction of the pipe member 110M. For example, the facing end portion 1122E may be formed by cylindrically machining the inner surface of the tip of the reduced-diameter portion 1122M along the axial direction using a drill. The reduced-diameter portion 1122M has a first outer surface substantially parallel to the facing end portion 1122E and a second outer surface substantially perpendicular thereto.

[0081] In the fourth step, as shown in Fig. 15(d), a chamfered portion 1122C is formed on the edge of the tip of the reduced-diameter portion 1122M. The chamfered portion 1122C may be formed by chamfering so as to have an obtuse angle with respect to the facing end portion 1122E.

[0082] In the fifth step, as shown in Fig. 15(e), three slits 113 are formed longitudinally in a part of the reduced-diameter portion 1122M and the pipe member 110M shown in Fig. 15(d). The three slits 113 are formed at intervals of 120° in the circumferential direction, forming three skirt portions 112. The number of slits 113 is not limited to three. The slits 113 may be formed by cutting using a drill, for example, with a constant width or gradually widening toward the open end.

[0083] The preferred embodiments of the present invention have been illustrated and described above. However, the present invention is not limited to the specific embodiments described above, and it goes without saying that various modifications can be made by those having ordinary knowledge in the technical field to which the present invention pertains without departing from the gist of the present invention claimed in the claims. Those modified embodiments should not be understood as departing from the technical idea or prospect of the present invention.

Explanation of Reference Numerals

[0084] 100: Inspection probe 110: Barrel 111: Barrel main body portion 112: Skirt portion 1121: Skirt main body portion 1122: Skirt reduced-diameter portion 1122E: Opposite end 1123: Thick part 1124: Chamfered part 113, 113-1: Slit 114: Flange 120: Plunger 121: Sliding part 122: Terminal contact part 1221: First tapered part 1222: Extension bar 1223: Chip 1224: Second tapered part 130: Terminal 140: Elastomer

Claims

1. A barrel having a tubular barrel body and a plurality of skirt portions separated from each other by a plurality of slits formed in a longitudinal direction at one end of the barrel body; a plunger having a sliding portion accommodated within the barrel body portion and slidable along a longitudinal direction of the barrel, and a terminal contact portion extending from the sliding portion along the longitudinal direction and exposed beyond the skirt portion; the skirt portion has a skirt main body portion extending in the longitudinal direction of the barrel main body portion, and a skirt reduced diameter portion bent in a tip region of the skirt main body portion so as to reduce in diameter in the longitudinal direction of the barrel and having a facing end portion facing the surface of the terminal contact portion, The sliding portion has a small diameter portion of a first diameter located within the skirt body portion and a large diameter portion of a second diameter located within the barrel body portion, the second diameter being larger than the first diameter. Inspection probe.

2. the plunger includes an inclined contact portion provided between the sliding portion and the terminal contact portion so as to contact an inner surface of the skirt reduced diameter portion; the inner surface of the skirt reduction portion has a different linear slope than the outer surface of the sloped contact portion; 2. The test probe of claim 1.

3. the plunger includes an inclined contact portion provided between the sliding portion and the terminal contact portion so as to contact an inner surface of the skirt reduced diameter portion; an inner surface of the skirt reduced diameter portion having a different curvature than an outer surface of the inclined contact portion; 2. The test probe of claim 1.

4. the plunger includes an inclined contact portion provided between the sliding portion and the terminal contact portion so as to contact an inner surface of the skirt reduced diameter portion; one of the inner surface of the skirt reduced diameter portion and the outer surface of the inclined contact portion has an inclined surface having a predetermined linear inclination degree; The other of the inner surface of the skirt reduced diameter portion and the outer surface of the inclined contact portion has a curved surface having a predetermined curvature.

2. The test probe of claim 1.

5. The inspection probe according to claim 1 , wherein at least a portion of the terminal contact portion includes a tapered portion whose diameter decreases in a direction toward the sliding portion.

6. The test probe of claim 5 , wherein the terminal contact portion includes an extension bar of a constant diameter extending from the tapered portion to an opposite side of the sliding portion.

7. 2. The inspection probe according to claim 1, wherein the terminal contact portion includes a tip that contacts a terminal of a device under test, and a tapered portion whose diameter increases in a direction from the tip toward the sliding portion.

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