Spring-loaded seal cover band for protecting substrate support

Abstract

A spring-loaded seal band for protecting an adhesive layer on a substrate support includes an annular body having a first length when the spring-loaded seal band is in an uncompressed state. The annular body includes a first annular body portion, an annular arm, and a flexible neck portion connecting the first annular body portion and the annular arm. The spring-loaded seal band is configured to surround the substrate support between a lower surface of a top plate and an upper surface of a base plate. The lower surface of the top plate and the upper surface of the base plate are separated by a second length. The first length is longer than the second length. The flexible neck portion is configured to flex when the spring-loaded seal band is in an installed, compressed state.

Description

[Technical Field]

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS This application claims the benefit of U.S. Provisional Application No. 63 / 407,468, filed September 16, 2022, and U.S. Provisional Application No. 63 / 427,311, filed November 22, 2022. The entire disclosure of each of the above applications is incorporated herein by reference.

[0002] The present disclosure relates to substrate processing systems, and more particularly to a spring-loaded seal cover band that covers a seal that protects an adhesive layer between a plate and a base plate of a substrate support. [Background technology]

[0003] The background art provided herein is intended to provide a general background to the present disclosure, and the work of the inventors named herein, to the extent described in this background art, along with aspects of the description that would not normally be considered prior art at the time of filing, are not admitted expressly or impliedly as prior art to the present disclosure.

[0004] Substrate processing systems may be utilized to process substrates, such as semiconductor wafers. Substrate processing may include deposition, etching, cleaning, and other processes. The substrate is positioned on a substrate support within a processing chamber. During processing, a gas mixture may be introduced into the processing chamber using a showerhead or other gas delivery device, and a plasma may be used to initiate a chemical reaction.

[0005] The substrate support may comprise an electrostatic chuck (ESC) including a base plate, an adhesive layer, and a top plate. The substrate is supported on the top plate during plasma processing. The top plate is typically formed of ceramic and is attached to the base plate by an adhesive layer. As the substrate support is positioned in the processing chamber, it is exposed to the plasma. Over time, the plasma erodes the radially outer edge of the adhesive layer, necessitating replacement. Typically, the adhesive layer fails before the end of the ESC's life, requiring downtime for repair / replacement. Summary of the Invention

[0006] A substrate support for a substrate processing system includes a base plate having an upper body portion and a lower body portion. An adhesive layer bonds the plate to the base plate. The seal includes a first annular body disposed around a radially outer edge of the upper body portion and adhesive layer of the base plate and between a lower surface of the plate and an upper surface of the lower body portion of the base plate. The spring-biased seal coverband includes a second annular body. The spring-biased seal coverband is disposed around the seal between the lower surface of the plate and the upper surface of the lower body portion of the base plate. The spring-biased seal coverband has a first length that is longer than a second length defined between the lower surface of the plate and the upper surface of the lower body portion of the base plate. A portion of the spring-biased seal coverband is configured to flex when installed to bias the spring-biased seal coverband toward the upper surface of the lower body portion of the base plate and the lower surface of the plate.

[0007] In other features, the second annular body includes a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE). The first length is within a predetermined range from 1.02 times the second length to 1.2 times the second length. The second annular body includes a first body portion, a neck, and an annular arm extending from the first body portion. The neck is disposed between the annular arm and the first body portion.

[0008] In other features, the annular arm extends from the first body portion at a predetermined angle ranging from 105° to 165°. The annular arm extends from the first body portion at a predetermined angle ranging from 125° to 155°. The annular arm has a length ranging from 5% to 50% of the first length. The annular arm has a length ranging from 5% to 30% of the first length. The spring-biased seal cover band includes an annular inner member and an outer layer disposed on the annular inner member, the outer layer including a plasma-resistant material. The annular inner member includes a spring metal. The outer layer is selected from the group consisting of perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), and ceramic.

[0009] In other features, the first body portion is disposed above the annular arm, which extends radially outward when placed around the seal, and the first body portion is disposed below the annular arm, which extends radially inward when placed around the seal.

[0010] In other features, the first body portion is disposed below the annular arms, which extend radially outward when installed around the seal. The second annular body includes an intermediate body portion, a first annular arm extending from a first end of the intermediate body portion, and a second annular arm extending from a second end of the intermediate body portion.

[0011] In other features, the first and second annular arms extend radially outward when installed around the seal. The first and second annular arms extend radially inward when installed around the seal. The second annular body includes a first body portion, a first annular arm extending radially outward from a first end of the first body portion, and a second annular arm extending radially inward from the first end of the first body portion.

[0012] In other features, the second annular body comprises a first body portion, a second body portion, and a "V" shaped portion disposed between the first body portion and the second body portion.

[0013] In another feature, the "V" shaped cavity faces one of radially outward when placed around the seal and radially inward when placed around the seal.

[0014] In other features, the first annular body comprises a first body portion, a second body portion, a third body portion, a first "V" shaped portion disposed between the first body portion and the second body portion, and a second "V" shaped portion disposed between the first body portion and the second body portion.

[0015] In other features, the seal-facing surface of the first body portion is "V" shaped. The seal-facing surface of the first body portion is "D" shaped. The second annular body includes a first body portion, an annular arm extending from the first body portion, and a "V" shaped cavity located on a radially outer surface of the first body portion between the first body portion and the annular arm.

[0016] In other features, the center of the "V" shaped cavity is located in the range of 5% to 50% of the length of the spring biased seal cover band. In other features, the center of the "V" shaped cavity is located in the range of 5% to 30% of the axial length of the spring biased seal cover band.

[0017] In other features, the sides of the "V" shaped cavity form first and second predetermined angles with respect to the center of the "V" shaped cavity, the first and second predetermined angles being in the range of 25° to 55°, and the first predetermined angle being different from the second predetermined angle.

[0018] A substrate support for a substrate processing system includes a base plate having upper and lower body portions, a plate, an adhesive layer for adhering the plate to the base plate, and a spring-biased seal band having a second annular body. The spring-biased seal band is disposed around the base plate between a lower surface of the plate and an upper surface of the lower body portion of the base plate. The spring-biased seal band has a first length that is longer than a second length defined between the upper surface of the lower body portion of the base plate and the lower surface of the plate. A portion of the spring-biased seal band bends when installed to bias the spring-biased seal band toward the upper surface of the lower body portion of the base plate and the lower surface of the plate.

[0019] A spring-loaded seal band for protecting an adhesive layer of a substrate support includes an annular body having a first length when the spring-loaded seal band is in an uncompressed state. The annular body includes a first annular body portion, an annular arm, and a flexible neck portion connecting the first annular body portion and the annular arm. The spring-loaded seal band is configured to surround a substrate support between a lower surface of a top plate and an upper surface of a base plate, the lower surface of the top plate and the upper surface of the base plate being separated by a second length. The first length is longer than the second length. The flexible neck portion is configured to bend when the spring-loaded seal band is in an installed, compressed state and biased toward the upper surface of the base plate and the lower surface of the top plate, the first length being shorter when the spring-loaded seal band is in the installed, compressed state.

[0020] In other features, the annular body comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE). In other features, the first length is 1.02 to 1.2 times the second length in the uncompressed state. In other features, the annular arms extend from the first annular body portion at an angle ranging from 105° to 165° in the uncompressed state. In other features, the annular arms extend from the first annular body portion at an angle ranging from 125° to 155° in the uncompressed state. The annular arms have a length ranging from 5% to 50% of the first length. The annular arms have a length ranging from 5% to 30% of the first length.

[0021] In other features, a spring-biased seal band includes an inner annular member and an outer layer on the inner annular member, the outer layer including a plasma-resistant material.

[0022] In other features, the annular inner member comprises a spring metal. The outer layer is selected from the group consisting of perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), and ceramic. The seal-facing surface of the first annular body portion has a shape selected from the group consisting of a "V" shape and a "D" shape. The angle decreases from 1° to 25° when in the installed, compressed state. The angle decreases from 3° to 15° when in the installed, compressed state.

[0023] A spring-loaded seal band for protecting an adhesive layer of a substrate support includes an annular body having a first length when the spring-loaded seal band is in an uncompressed state. The annular body includes a first annular body portion, an annular arm, and a "V"-shaped cavity between the first annular body portion and the annular arm. The spring-loaded seal band is configured to surround the substrate support between a lower surface of a plate and an upper surface of a base plate, the lower surface of the plate and the upper surface of the base plate being separated by a second length. The first length is longer than the second length. At least one of the first annular body portion and the annular arm of the spring-loaded seal band is configured to bend in an installed, compressed state to bias the spring-loaded seal band toward the upper surface of the base plate and the lower surface of the plate, the first length being shorter when the spring-loaded seal band is in the installed, compressed state.

[0024] In other features, the annular body comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE). The first length is within a predetermined range of 1.02 to 1.2 times the second length. The center of the "V" shaped cavity is located within a range of 5% to 50% of the length of the spring-loaded seal band. The center of the "V" shaped cavity is located within a range of 5% to 30% of the length of the spring-loaded seal band. The sides of the "V" shaped cavity form first and second angles with respect to the center of the "V" shaped cavity, the first and second angles being within a range of 25° to 55°. The annular arms have lengths within a range of 5% to 50% of the first length. The annular arms have lengths within a range of 5% to 30% of the first length.

[0025] In other features, a spring-biased seal band includes an annular inner member and an outer layer on the annular inner member, the outer layer including a plasma-resistant material, the annular inner member including a spring metal, and the outer layer is selected from the group consisting of perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), and ceramic.

[0026] In other features, the seal-facing surface of the first annular body portion has a shape selected from the group consisting of a "V" shape and a "D" shape. The sum of the first angle and the second angle decreases in the installed, compressed state from a range of 1° to 25°. The sum of the first angle and the second angle decreases in the installed, compressed state from a range of 3° to 15°.

[0027] A substrate support for a substrate processing system includes a base plate having upper and lower body portions, a plate, an adhesive layer for adhering the plate to the base plate, a spring-biased seal having a first annular body disposed around radially outer edges of the upper body portion and adhesive layer of the base plate and between a lower surface of the plate and an upper surface of the lower body portion of the base plate, and a seal cover band having a second annular body, the seal cover band being disposed around the spring-biased seal between the lower surface of the plate and the upper surface of the lower body portion of the base plate, the spring-biased seal including a first spring configured to flex when installed to urge a first arm of the spring-biased seal toward the lower surface of the plate, and a second spring configured to flex when installed to urge a second arm of the spring-biased seal toward the upper surface of the lower body portion of the base plate.

[0028] In other features, the spring-biased seal has a first length greater than a second length defined between the lower surface of the plate and the upper surface of the lower body portion of the base plate. In other features, the seal cover band comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

[0029] In other features, the first spring has a length in the range of 5% to 40% of the first length, the second spring has a length in the range of 5% to 40% of the first length, and the first annular body has a length in the range of 10% to 80% of the first length.

[0030] In other features, the first arm has a surface having a length in the range of 5% to 40% of the first length, and the second arm has a surface having a length in the range of 5% to 40% of the first length. In other features, the first annular body has a first thickness, the first spring has a thickness in the range of 10% to 90% of the first thickness, and the second spring has a thickness in the range of 10% to 90% of the first thickness.

[0031] In other features, the seal cover band includes a first protrusion defined between the second annular body and the first extension of the seal cover band, the first protrusion being adjacent to a first spring of the spring-biased seal when installed, and a second protrusion defined between the second annular body and the second extension of the seal cover band, the second protrusion being adjacent to a second spring of the spring-biased seal when installed.

[0032] A substrate support for a substrate processing system includes a base plate having upper and lower body portions, a plate, an adhesive layer for adhering the plate to the base plate, and a spring-biased seal including an annular body disposed around radially outer edges of the upper body portion and adhesive layer of the base plate and between a lower surface of the plate and an upper surface of the lower body portion of the base plate, the spring-biased seal including a curved arm extending from a bottom surface of the annular body, the curved arm configured to bend when installed to bias an upper surface of the spring-biased seal toward the lower surface of the plate.

[0033] In other features, the spring-biased seal has a first length greater than a second length defined between a lower surface of the plate and an upper surface of the lower body portion of the base plate. In other features, the spring-biased seal includes a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

[0034] In other features, the height of the annular body is in the range of 10% to 90% of the first length. In other features, the annular body has a first width and the width of the curved arms is in the range of 5% to 50% of the first width. In other features, the curved arms have a curvature of at least 90°.

[0035] A substrate support for a substrate processing system includes a base plate having upper and lower body portions, a plate, an adhesive layer for adhering the plate to the base plate, a spring-biased seal including an annular body disposed around a radially outer edge of the upper body portion and adhesive layer of the base plate and between a lower surface of the plate and an upper surface of the lower body portion of the base plate, and an O-ring seal, the spring-biased seal including an arm extending from a lower surface of the annular body to define a pocket region between the arm, the lower surface of the annular body, the upper surface of the lower body portion of the base plate, and the radially outer surface of the upper body portion of the base plate, the O-ring seal being within the pocket region, the arm of the spring-biased seal configured to flex when installed to urge the upper surface of the annular body toward the lower surface of the plate.

[0036] In other features, the spring-biased seal has a first length greater than a second length defined between a lower surface of the plate and an upper surface of the lower body portion of the base plate. In other features, the spring-biased seal includes a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

[0037] In other features, the arms of the spring-loaded seal have a length ranging from 50% to 95% of the diameter of the O-ring seal. In other features, the annular body has a first width and the diameter of the O-ring seal is less than or equal to 125% of the first width.

[0038] Further areas of applicability of the present disclosure will become apparent from the detailed description, claims, and drawings. The detailed description and specific examples are intended for purposes of illustration only and are not intended to limit the scope of the present disclosure. [Brief explanation of the drawings]

[0039] The present disclosure will become more fully understood from the detailed description and accompanying drawings set forth below.

[0040] [Figure 1] 1 is a functional block diagram illustrating an example of a substrate processing system including a substrate support with a base plate, a plate, an adhesive layer, a seal, and a sealing cover band according to the present disclosure.

[0041] [Figure 2] 1 is a partial cross-sectional side view illustrating an example base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure.

[0042] [Figure 3] 10 is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure. [Figure 4] 10 is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure. [Figure 5] 10 is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure. [Figure 6] 10 is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure.

[0043] [Figure 7A] 10 is a partial cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure.

[0044] [Figure 7B] 7B is a top view of the seal and seal cover band shown in FIG. 7A.

[0045] [Figure 7C] 7C is a cross-sectional side view of the seal and seal cover band taken along line AA of FIG. 7B.

[0046] [Figure 8] 10 is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure. [Figure 9] 10 is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, seal, and seal cover band according to the present disclosure.

[0047] [Figure 10A] 10 is a cross-sectional side view of another example of a seal cover band according to the present disclosure;

[0048] [Figure 10B] FIG. 2 is a partial enlarged cross-sectional side view showing the base plate, adhesive layer, plate, O-ring seal, and seal cover band according to the present disclosure.

[0049] [Figure 11A] FIG. 2 is a partial cross-sectional side view illustrating an example base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band according to the present disclosure.

[0050] [Figure 11B] 11B is a side cross-sectional view of the annular spring-biased seal cover band of FIG. 11A.

[0051] [Figure 12] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 13] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 14]10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 15] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 16] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 17] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 18] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure.

[0052] [Figure 19A] 1 is a side cross-sectional view of an annular spring-biased seal cover band with annular arms in accordance with the present disclosure;

[0053] [Figure 19B] 19B is a partial enlarged cross-sectional side view showing another example of the base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band of FIG. 19A in a partially installed position. [Figure 19C] 19B is a partial enlarged cross-sectional side view showing another example of the base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band of FIG. 19A in an installed position;

[0054] [Figure 19D] FIG. 19D is a top view of the seal and annular spring-biased seal cover band of FIGS. 19B and 19C.

[0055] [Figure 19E] FIG. 19E is a cross-sectional side view of the seal and annular spring-biased seal cover band at BB of FIG. 19D.

[0056] [Figure 20A] 1 is a side cross-sectional view of an annular spring-biased seal cover band with a cavity in accordance with the present disclosure;

[0057] [Figure 20B] 20B is a partial enlarged cross-sectional side view showing another example of the base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band of FIG. 20A in a partially installed position. [Figure 20C] 20B is a partial enlarged cross-sectional side view showing another example of the base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band of FIG. 20A in an installed position.

[0058] [Figure 21A] 1 is a side cross-sectional view of an annular spring-biased seal cover band with annular arms in accordance with the present disclosure;

[0059] [Figure 21B] 21B is a partial enlarged cross-sectional side view showing another example of the base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band of FIG. 21A in a partially installed position. [Figure 21C] 21B is a partial enlarged cross-sectional side view showing another example of the base plate, adhesive layer, plate, seal, and annular spring-biased seal cover band of FIG. 21A in an installed position.

[0060] [Figure 22] 1 is a cross-sectional side view of an annular spring-biased seal cover band having an inner member formed of spring metal and an outer coating in accordance with the present disclosure;

[0061] [Figure 23] 10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure. [Figure 24]10A-10C are partial enlarged cross-sectional side views illustrating other examples of base plates, adhesive layers, plates, seals, and / or annular spring-biased seal cover bands according to the present disclosure.

[0062] [Figure 25A] 1 is a cross-sectional side view of an annular spring-loaded seal having two annular spring portions in accordance with the present disclosure;

[0063] [Figure 25B] 25B is a side cross-sectional view of an annular seal cover band for contacting the annular spring-biased seal of FIG. 25A;

[0064] [Figure 25C] 25B is a partial enlarged cross-sectional side view of another example of a base plate, adhesive layer, plate, and annular spring-biased seal of FIG. 25A and annular seal cover band of FIG. 25B in an installed position.

[0065] [Figure 25D] FIG. 25D is a top view of the annular spring-biased seal and seal cover band of FIGS. 25A-25C.

[0066] [Figure 25E] 25D is a cross-sectional side view of the annular spring-biased seal and seal cover band at CC.

[0067] [Figure 26A] 1 is a side cross-sectional view of an annular spring-loaded seal with an annular spring arm according to the present disclosure;

[0068] [Figure 26B] 26B is a partial enlarged cross-sectional side view showing another example of a base plate, adhesive layer, plate, and annular spring-biased seal of FIG. 26A in an installed position.

[0069] [Figure 26C] FIG. 26C is a top view of the annular spring-loaded seal of FIGS. 26A and 26B.

[0070] [Figure 26D]FIG. 26D is a cross-sectional side view of the annular spring-loaded seal at DD in FIG. 26C.

[0071] [Figure 27A] FIG. 10 is a partial enlarged cross-sectional side view illustrating another example of a base plate, adhesive layer, plate, annular spring-biased seal, and elastomer according to the present disclosure.

[0072] [Figure 27B] 27B is a top view of the annular spring-loaded seal of FIG. 27A.

[0073] [Figure 27C] FIG. 27C is a cross-sectional side view of the annular spring-loaded seal at EE of FIG. 27B.

[0074] In the drawings, the same numbers may be used to identify similar and / or identical elements. DETAILED DESCRIPTION OF THE INVENTION

[0075] A substrate support (such as an electrostatic chuck (ESC)) includes a base plate and a plate disposed on top of the base plate. An adhesive layer adheres the plate to the top surface of the base plate. In addition to mechanically coupling the plate to the base plate, the adhesive layer also provides a vacuum seal and thermal insulation between the plate and the base plate. Unless protected, the radially outer edge of the adhesive layer is exposed to the plasma and is susceptible to plasma erosion. This resulting adhesive layer failure limits the lifetime to less than 100 RF hours.

[0076] A seal is used to protect the radially outer edge of the adhesive layer. The seal is formed of a plasma-resistant material and is disposed around the radially outer edge of the adhesive layer. In some examples, the seal is formed of an elastomer, such as a fluoroelastomer polymer (hereinafter, an elastomer seal or E-seal). Examples of elastomers include fluoroelastomer polymers, such as perfluoroelastomers (FFKM) or fluorocarbon-based fluoroelastomers (FKM), although other plasma-resistant materials may also be used.

[0077] Although the lifespan of the elastomer seal (E-seal) is shorter than that of the ESC, the E-seal is field replaceable at a relatively low cost. The E-seal provides a seal against the plate (e.g., ceramic plate) and base plate to protect the radially outer edge of the adhesive layer during plasma processing.

[0078] When seals are designed, trade-offs are made. For example, a seal with a larger radial thickness provides better protection for the bond line but increases the risk of cracking. A seal with a smaller radial thickness has a shorter lifespan and requires more frequent replacement. This trade-off becomes more difficult as higher RF power levels are used in next-generation tools.

[0079] The present disclosure relates to a seal coverband disposed around a seal to protect it, and various seal / seal coverband assemblies. The seal coverband protects and mechanically supports a seal at the radially outer edge of a substrate support. The seal coverband improves the plasma resistance of the seal, resulting in longer mean time between cleanings (MTBC) and less frequent replacement. The seal coverband provides mechanical support to the seal, which relaxes dimensional constraints on the seal (e.g., aspect ratio, i.e., height divided by radial thickness) and allows for the use of edge ring materials that reduce the risk of arcing.

[0080] The seal coverband separates the functions of edge adhesion protection and plasma resistance. The seal provides sealing and adhesion layer protection, and the seal coverband protects the seal from plasma exposure. As a result, the seal can be made of a softer material that provides a more effective seal against the plate and base plate without excessive compressive force against the plate (which can accommodate thin ceramic plates). The seal coverband can be retrofitted to existing substrate supports with seals without modifying the substrate support or seal design.

[0081] In another example, an O-ring seal is used to protect the radially outer edge of the adhesive layer, and the seal cover band is configured to protect the O-ring seal.

[0082] Referring now to FIG. 1 , an example substrate processing system 100 for performing processes such as etching using RF plasma is shown. While etching is shown, a sealing cover band may be utilized with the substrate support for other types of plasma-assisted substrate processing. The substrate processing system 100 includes a process chamber 102 that houses the other components of the substrate processing system 100 and confines the RF plasma. The substrate processing system 100 includes an upper electrode 104 and a substrate support 106 (such as an electrostatic chuck (ESC)). During operation, a substrate 108 is positioned on the substrate support 106.

[0083] By way of example only, the upper electrode 104 may comprise a showerhead 109 for introducing and dispersing process gases within the processing chamber 102. The showerhead 109 may comprise a stem portion with one end connected to the top surface of the processing chamber. The base portion is generally cylindrical and flares radially outward from the opposite end of the stem portion away from the top surface of the processing chamber. The substrate-facing surface, or faceplate, of the showerhead base portion comprises a plurality of holes through which process or purge gases flow. Alternatively, the upper electrode 104 may comprise a conductive plate, and process gases may be introduced in another manner.

[0084] The substrate support 106 may comprise an electrostatic chuck (ESC) including a base plate 110 that is electrically conductive and functions as a lower electrode. A plate 112 is disposed on the base plate 110. The plate 112 may correspond to a ceramic multi-zone heating plate. An adhesive layer 114 attaches the plate 112 to the base plate 110 and provides a mechanical bond, a vacuum seal, and / or thermal insulation. The base plate 110 may include one or more channels 116 for the flow of a fluid (e.g., a coolant).

[0085] As will be described in more detail below, a seal / seal coverband assembly 115 according to the present disclosure includes a seal 117 disposed about the base plate 110 between the plate 112 and a radially protruding lower portion of the base plate 110. The seal 117 protects the adhesive layer 114. The seal / seal coverband assembly 115 further includes a seal coverband 118 disposed about the seal 117 to protect the seal 117 from the effects of plasma and / or other chemicals.

[0086] The RF generation system 120 generates and outputs an RF voltage to one of the upper electrode 104 and the lower electrode (e.g., the base plate 110 of the substrate support 106). The other of the upper electrode 104 and the base plate 110 may be DC grounded, AC grounded, or floating. By way of example only, the RF generation system 120 may include an RF voltage generator 122 that generates an RF voltage supplied to the upper electrode 104 or the base plate 110 by a matching / distribution network 124. In other examples, the plasma may be generated inductively or remotely. Although the RF generation system 120 corresponds to a capacitively coupled plasma (CCP) system, the principles of the present disclosure may also be implemented in other plasma processing systems, such as a transformer coupled plasma (TCP) system, an inductively coupled plasma (ICP) system, or other types of plasma processing systems.

[0087] The gas delivery system 130 includes one or more gas sources 132-1, 132-2, ..., and 132-N (collectively, gas sources 132), where N is an integer greater than zero. The gas sources 132 supply one or more precursors, etching gases, carrier gases, purge gases, and mixtures thereof to the processing chamber 102. Vaporized precursors may also be used. The gas sources 132 are connected to a manifold 140 by valves 134-1, 134-2, ..., and 134-N (collectively, valves 134) and mass flow controllers 136-1, 136-2, ..., and 136-N (collectively, mass flow controllers 136). The output of the manifold 140 is connected to a gas supply within the processing chamber 102.

[0088] The temperature controller 142 may be connected to a plurality of heating elements 144 (e.g., thermal control elements, or TCEs) disposed on the plate 112. For example, the heating elements 144 may include, but are not limited to, macro-heating elements corresponding to each section of the multi-zone heating plate and / or an array of micro-heating elements disposed across the sections of the multi-zone heating plate. The plate 112 may further include one or more conductors (not shown) for engaging and disengaging with the substrate 108 using electrostatic forces. The temperature controller 142 is used to adjust the output of the plurality of heating elements 144 to control the temperature of the substrate support 106 and the substrate 108. The temperature controller 142 may also be in communication with a coolant assembly 146 for controlling the flow of coolant through the flow passages 116. For example, the coolant assembly 146 may include a coolant pump and a reservoir. The temperature controller 142 operates the coolant assembly 146 to selectively flow coolant through the flow passages 116 to cool the substrate support 106.

[0089] A valve 148 and a pump 149 may be used to control the pressure and evacuate reactants from the process chamber 102. A system controller 150 may be used to control the components of the substrate processing system 100. Although shown as a separate controller, the temperature controller 142 may be implemented by the system controller 150.

[0090] 2, base plate 110 includes upper body portion 152 and lower body portion 154. Upper body portion 152 has a cylindrical shape and a first radius. Lower body portion 154 of base plate 110 is also cylindrical and has a second radius that is larger than the first radius of upper body portion 152.

[0091] 2, the radially outer edge 216 of the plate 112 extends outward from the upper body portion 152 of the base plate 110 by approximately the same distance (e.g., distance d1) as the lower body portion 154 extends. However, the radially outer edge 216 of the plate 112 may extend from the upper body portion 152 a distance that is less or greater than the distance that the lower body portion 154 extends from the upper body portion 152. A distance d2 is defined between the lower horizontal surface 157 of the plate 112 and the upper horizontal surface 155 of the lower body portion 154. The adhesive layer 114 is disposed between the plate 112 and the base plate 110.

[0092] The seal / seal cover band assembly 205 includes a seal 210 having an annular body 211 disposed around the radially outer surface of the adhesive layer 114 against the radially outer surface 218 of the upper body portion 152 of the base plate 110 and the lower horizontal surface 157 of the plate 112. In some examples, the seal 210 is formed of an elastomer, although other materials may be used. In some examples, the seal 210 is slightly compressed between the lower horizontal surface 157 of the plate 112 and the upper horizontal surface 155 of the lower body portion 154 of the base plate 110. A further example of a seal 210 can be found in commonly assigned U.S. Pat. No. 9,868,392, issued January 16, 2018, entitled "Edge Seal for Lower Electrode Assembly," which is incorporated herein by reference in its entirety.

[0093] In some examples, a distance d3 (corresponding to the radial thickness of seal 210) is defined between radially inner surface 212 of seal 210 and radially outer surface 214 of seal 210. In some examples, distance d3 is less than distance d1.

[0094] The seal / seal cover band assembly 205 further includes a seal cover band 220 including an annular body 221 disposed adjacent to and in contact with the radially outer surface 214 of the seal 210. In some examples, the radial thickness of the seal cover band 220 (between the radially inner surface 222 and the radially outer surface 224 of the seal cover band 220) is equal to the distance d4. In some examples, the distance d4 is in a range of 10 to 100 mils, although other thicknesses may be used. In some examples, the distance d4 is in a range of 10 to 50 mils, although other thicknesses may be used. In some examples, the distance d4 is in a range of 10 to 20 mils, although other thicknesses may be used.

[0095] In some examples, distance d3 is within a first predetermined range of 60% to 80% of distance d1. In some examples, distance d4 is within a second predetermined range of 15% to 40% of distance d1. In some examples, the height of seal cover band 220, when uncompressed, is within a range of 95% to 105% of distance d2. In some examples, the height of seal cover band 220, when uncompressed, is within a range of 98% to 102% of distance d2. In some examples, the height of seal cover band 220, when uncompressed, is within a range of 99% to 101% of distance d2.

[0096] In some examples, the seal cover band 220 is formed of a material that can stretch around the radially outer edge 216 of the plate 112 during installation. In some examples, the seal cover band 220 is formed of a material that can withstand exposure to plasma erosion and / or other chemicals used in the processing chamber 102. In some examples, the seal cover band 220 is formed of a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE). In some examples, the seal cover band 220 is rolled or cast. In some examples, the seal cover band includes more than 60%, 70%, 80%, or 90% PFA. In some examples, the seal cover band includes more than 60%, 70%, 80%, or 90% PTFE.

[0097] 3-9, further examples of seal / seal coverband assemblies 205 are shown. Different seal / seal coverband assemblies have different physical arrangements between the seal and the seal coverband. In FIG. 3, a lower edge 232 of a seal coverband 230 (including annular body 231) is spaced from an upper horizontal surface 155 of a lower body portion 154 of a base plate 110. An upper edge 234 of the seal coverband 230 contacts a lower horizontal surface 157 of the plate 112.

[0098] 4, the lower edge 242 of the seal cover band 240 (including the annular body 241) contacts the upper horizontal surface 155 of the lower body portion 154 of the base plate 110. The upper edge 244 of the seal cover band 240 is spaced from the lower horizontal surface 157 of the plate 112.

[0099] 5, a lower edge 252 of the seal cover band 250 (including the annular body 251) is spaced from an upper horizontal surface 155 of the lower body portion 154 of the base plate 110. An upper edge 254 of the seal cover band 250 is spaced from a lower horizontal surface 157 of the plate 112.

[0100] In some instances, providing a gap on one or both sides can be helpful when attempting to remove and replace the seal cover band.

[0101] 3-5, the radially inner surface 212 and the radially outer surface 214 of the seal 210 are substantially parallel to the axial direction. Similarly, the radially inner surface 222 and the radially outer surface 224 of the seal cover bands 220, 230, 240, and 250 are substantially parallel to the axial direction. As used in this context, substantially parallel means that the surfaces are within + / - 3° of parallel. In some examples, both the seal and the seal cover band maintain their respective positions relative to the base plate by applying radially inward compression when assembled for operation.

[0102] 6A , seal 310 includes an annular body 311, and seal cover band 320 disposed around seal 310 includes an annular body 321. Seal 310 includes a radially inner surface 312 extending in the axial direction and a radially outer surface 314 that is inclined relative to the axial direction. Seal cover band 320 includes a radially inner surface 332 that is inclined relative to the axial direction and a radially outer surface 334 that is inclined (or extends in the axial direction and / or has another profile). Radially outer surface 314 of seal 310, radially inner surface 332 of seal cover band 320, and / or radially outer surface 334 of seal cover band 320 are inclined at an angle α relative to the axial direction. In some examples, α is greater than 0° and less than 15°. In other examples, α is greater than 0° and less than 10°. In other examples, α is greater than zero and less than 5°.

[0103] In some examples, the first body portion 322 of the seal 310 positioned adjacent to the plate 112 is wider than the second body portion 324 of the seal 310 positioned adjacent to the lower body portion 154 of the base plate 110. The wider first body portion 322 provides more protection for the adhesive layer, while the narrower second body portion 324 provides sufficient friction to hold the seal 310 in place while reducing overall material costs. In some examples, the outer surface 314 of the seal 310 slopes continuously from the first body portion 322 to the second body portion 324. In other examples, the width of the seal 310 decreases monotonically from a position near the plate 112 to a position near the lower body portion 154 of the base plate 110. In some examples, the outer surface 314 of the seal 310 is stepped from the first body portion 322 to the second body portion 324.

[0104] In some examples, the radially inner surface 332 and / or the radially outer surface 334 of the seal cover band 320 have a continuous slope (adjacent the first body portion 322 to the second body portion 324) and are substantially parallel to one another. In some examples, the distance between the radially outer surface 218 of the upper body portion 152 and the radially inner surface 332 of the seal cover band 320 decreases continuously or monotonically from a position near the plate 112 to a position near the lower body portion 154 of the base plate 110. In some examples, the radially inner surface 332 and the radially outer surface 334 of the seal cover band 320 are stepped mating surfaces.

[0105] In Figure 6A, the seal cover band 320 extends completely between the lower horizontal surface 157 of the plate 112 and the upper horizontal surface 155 of the lower body portion 154 of the base plate 110. As can be appreciated, one or both of the edges 342 and 344 of the seal cover band 320 may be spaced apart similarly to that shown in Figures 3-5. As can be appreciated, the seal 310 and seal cover band 320 provide additional compressive force and / or material to protect the radially outer edge of the adhesive layer 114, thereby lengthening the MTBC.

[0106] In FIG. 6B, a seal cover band 350 is disposed around a seal 352. The seal cover band 350 comprises an annular body 360 including a first body portion 362 having a smaller inner and / or outer radius than a lower body portion 364 of the annular body 360. In some examples, the radial thickness is uniform in the axial direction. In other examples, the radial thickness varies in the axial direction. The seal cover band 350 has an axial length that is greater than the distance d2 between the lower surface of the plate 112 and the upper surface of the lower body portion 154 of the base plate 110. The radially inner surface of the seal cover band 350 and the radially outer surface of the seal 352 may be complementary, as shown in FIG. 6A, or may not be complementary, as shown in FIG. 6B.

[0107] 7A, seal 410 (with annular body 411) and seal cover band 420 (with annular body 421) each include alignment mating surfaces 415 and 416. Alignment mating surfaces 415 and 416 serve to initially position seal cover band 420 and maintain the relative positions of seal cover band 420, seal 410, plate 112, and lower body portion 154 of base plate 110.

[0108] For example, alignment mating surface 415 comprises a cavity formed in radially outer surface 414 of annular body 411. Radially inner surface 412 of annular body 411 extends axially. Alignment mating surface 416 comprises a protrusion on radially inner surface 432 of annular body 421. When seal cover band 420 is installed over seal 410, alignment mating surfaces 415 and 416 assist in proper positioning of seal cover band 420 relative to seal 410. In other words, as seal cover band 420 is installed over plate 112 and the top edge of seal cover band 420 passes the bottom edge of the plate, alignment mating surface 416 aligns and engages with alignment mating surface 415. Alignment mating surfaces 415 and 416 resist further movement of seal cover band 420 relative to seal 410.

[0109] The radially outer surface 434 of the annular body 421 extends axially, although other profiles may be used. In some examples, the cavity is "V" shaped and the protrusion is "V" shaped, although other shapes may be used. As can be appreciated, the cavity may be located on the seal cover band 420 and the protrusion may be located on the seal 410.

[0110] In some examples, a first portion 422 of the seal 410, disposed adjacent the plate 112, and a second portion 424 of the seal 410, disposed adjacent the lower body portion 154 of the base plate 110, are wider than a third portion 426 of the seal 410 disposed therebetween. In some examples, the outer surface 414 of the seal 410 slopes inward continuously, monotonically, or stepwise from the first portion 422 to the third portion 426, and from the second portion 424 to the third portion 426. The radially inner surface 432 of the seal cover band 420 comprises first and second linear portions, although one or more curved surfaces may be used, as shown in FIG. 8 .

[0111] The radially outer surface 414 of the seal 410 and the radially inner surface 432 of the seal cover band 420 are inclined at an angle β relative to the axial direction. In some instances, β is greater than 0° and less than 15°. In other instances, β is greater than 0° and less than 10°. In other instances, β is greater than zero and less than 5°.

[0112] In Figure 7A, the sealing cover band 420 extends completely between the plate 112 and the lower body portion 154 of the base plate 110. As can be appreciated, one or both of the edges 436 and 438 of the sealing cover band 420 may be spaced apart similarly to that shown in Figures 3-5.

[0113] 7B is a top view of the seal 410 and seal cover band 420 shown in FIG. 7A. As shown in FIG. 7B, the seal 410 and seal cover band 420 may each have a generally circular shape. The diameters of the seal 410 and seal cover band 420 may correspond to each other. For example, the inner diameter of the seal cover band 420 may correspond to the outer diameter of the seal 410.

[0114] The inner diameter of seal 410 may correspond, for example, to radially outer surface 218 of upper body portion 152 of base plate 110. In some example embodiments, the inner diameter of seal 410 may be slightly smaller than the diameter of radially outer surface 218 to allow seal 410 to stretch around upper body portion 152 and remain in place.

[0115] The inner diameter of seal cover band 420 may be slightly smaller than the outer diameter of seal 410 to allow seal cover band 420 to be stretched around seal 410 and stay in place. Figure 7C is a side cross-sectional view of seal 410 and seal cover band 420 at AA in Figure 7B.

[0116] 8 , seal 510 (with annular body 511) and seal cover band 520 (with annular body 521) are shown, respectively. Seal 510 and seal cover band 520 include alignment mating surfaces 515 and 516, respectively. Seal 510 includes a first portion 522, a second portion 524, and a third portion 526. In some examples, the width of seal 510 decreases continuously, monotonically, or stepwise from first portion 522 near plate 112 to third portion 526. In some examples, the width of seal 510 decreases continuously, monotonically, or stepwise from second portion 524 near lower body portion 154 to third portion 526.

[0117] For example, the radially inner surface 512 of the seal 510 extends axially, and the radially outer surface 514 of the seal 510 is fully or partially arcuate to define a cavity (or protrusion). The radially inner surface 532 of the seal cover band 520 is fully or partially arcuate to define a protrusion (or cavity) that is received by the cavity of the seal 510. In some examples, the radially outer surface 534 of the seal cover band 520 extends axially, although other profiles may be used.

[0118] In Figure 8, the sealing cover band 520 extends completely between the plate 112 and the lower body portion 154 of the base plate 110. As can be appreciated, one or both of the edges 542 and 544 of the sealing cover band 520 may be spaced apart similarly to that shown in Figures 3-5.

[0119] 9, seal 610 (with annular body 611) and seal cover band 620 (with annular body 621) are shown. Seal 610 includes surfaces 622 and 626 extending axially from a location near plate 112 and a location near base plate lower body portion 154, respectively. Seal 610 further includes sloped or curved surfaces 624 and 625 extending between surfaces 622 and 626.

[0120] In some examples, a first portion 632 of seal 610 disposed below adjacent plate 112 and a second portion 634 of seal 610 disposed above adjacent lower body portion 154 of base plate 110 are radially wider than a third portion 636 of seal 610 disposed therebetween (e.g., near the junction of surfaces 624 and 625 and / or the center of seal 610). Although surfaces 624 and 625 of seal cover band 620 are shown as generally linear, one or more curved surfaces may be used.

[0121] Sealing cover band 620 includes surfaces 642 and 646 extending axially from below and adjacent plate 112 and from below and adjacent lower body portion 154 of base plate 110, respectively. Sealing cover band 620 further includes sloped or curved surfaces 644 and 645 extending between surfaces 642 and 646. An outer surface 650 of sealing cover band 620 may extend axially, although other profiles may be used.

[0122] 9, the sealing cover band 620 extends completely between the plate 112 and the lower body portion 154 of the base plate 110. As can be appreciated, one or both of the edges 652 and 654 of the sealing cover band 620 may be spaced apart similarly to that shown in FIGS.

[0123] Seal 610 and seal cover band 620 include abutting surfaces (622 and 642, 625 and 645, 624 and 644, and 626 and 646). Surfaces 622 and 642 and 626 and 646 are inclined at an angle δ relative to the axial direction. In some examples, δ is greater than zero and less than 15°. In other examples, δ is greater than zero and less than 10°. In other examples, δ is greater than zero and less than 5°. Although abutting surfaces 622 and 642, 625 and 645, 624 and 644, and 626 and 646 are shown as linear segments, one or more curved segments may be used.

[0124] 10A and 10B, a seal cover band 710 is shown that can be used with an O-ring seal (FIG. 10B). The seal cover band 710 includes an annular body 711, a radially inner surface 714, a radially outer surface 716, and an upper surface 724. A protrusion 725 is disposed between the upper surface 724 and one end of an inclined surface 728. A lower protrusion 732 is disposed between the opposite end of the inclined surface 728 and the radially inner surface 714. In some examples, the inclined surface 728 extends toward the radially inner surface 714, and the protrusion 732 is omitted. If utilized, the lower protrusion helps to define a pocket area 770 (FIG. 10B) and / or provides mechanical rigidity to the seal.

[0125] 10B , O-ring / seal cover band assembly 705 includes O-ring seal 750 disposed between lower horizontal surface 157 of plate 112, radially outer surface 218 of upper body portion 152 of base plate 110, and angled surface 728 of seal cover band 710. Seal / seal cover band assembly 705 further includes seal cover band 710 forming an annular seal at sealing locations 754, 756, 758, 760, and 762. Sealing location 754 is located between lower surface 718 of seal cover band 710 and upper horizontal surface 155 of lower body portion 154. Sealing location 756 is located between angled surface 728 of seal cover band 710 and O-ring seal 750.

[0126] Sealing location 758 is located between radially outer surface 218 of upper body portion 152 and O-ring seal 750. Sealing location 760 is located between lower horizontal surface 157 of plate 112 and O-ring seal 750. Sealing location 762 is located between lower horizontal surface 157 of plate 112 and protrusion 725 of sealing cover band 710. In some examples, sealing cover band 710 is rotated slightly clockwise during installation to apply pressure on sealing locations 754, 756, 758, 760, and 762. In some examples, sealing locations 758 and 760 provide a vacuum seal, and the remaining sealing locations 754, 756, and 762 provide redundant seals to protect adhesive layer 114 and O-ring seal 750. In some examples, O-ring seal 750 may be formed of PFA or PTFE or may include an outer coating of PFA or PTFE.

[0127] The angled surface 728, the protrusion 725, and / or the protrusion 732 (if utilized) define a pocket area 770 around the seal. The pocket area is sized to allow sufficient room for the O-ring seal 750 to be positioned within while biasing the O-ring seal 750 inward. In other words, the seal limits the movement of the O-ring seal 750. The protrusion 725 and the upper surface 724 provide a sealing surface that is parallel to and biased toward the lower horizontal surface of the plate 112 and has sufficient rigidity to reduce the likelihood of plasma passing through the seal and entering the pocket area 770. The protrusion 725 has a radial thickness that is wide enough to provide the mechanical rigidity and support necessary for the seal to contact and seal with both the seal locations 762 and 754 (thereby reducing the likelihood of plasma entering the pocket area 770).

[0128] The additional protection provided by the seal cover band allows for an extended seal life so that seal defects do not inhibit MTBC for applications such as conductor etch (CE). Instead of replacing the seal at every MTBC period, the seal can be used for several MTBC periods in many dielectric etch (DE) applications where seal erosion is minimal. This change translates into reduced costs and increased tool productivity.

[0129] The seal cover band also provides additional mechanical support to seals made of softer materials, mitigating the risk of buckling. This allows for the use of seals with higher aspect ratios (corresponding to the seal height divided by the seal thickness). Higher aspect ratio seals are necessary for ESCs used in some applications, such as next-generation DEs.

[0130] Because the compressive forces of the seals and seal cover bands are partially or fully additive, lower compressive forces can be applied individually by the seals and seal cover bands. As a result, there is a much lower risk of ceramic warping and adhesive delamination when utilizing seals and seal cover bands according to the present disclosure.

[0131] In other aspects, the present disclosure relates to an annular spring-biased seal band and an annular spring-biased seal cover band, as described in more detail below. The annular spring-biased seal cover band can be used in conjunction with a seal as described above. Alternatively, the annular spring-biased seal band can be used with or without a seal, and is more generally referred to herein as an annular spring-biased seal band, due to the improved plasma seal.

[0132] The annular spring-biased seal band is compressed between the lower surface of the upper plate and the upper surface of the lower body portion of the base plate. In some examples, the annular spring-biased seal band includes an annular body, an annular arm extending from the annular body at an angle, and a neck disposed between the annular body and the annular arm. When the annular spring-biased seal band is installed and bent at the neck and / or arm, a spring force is generated. The spring force biases the ends of the annular spring-biased seal band against the lower surface of the upper plate and the upper surface of the lower body portion of the base plate to create a plasma seal. In some examples, the annular arm bends toward the annular body when installed, but does not contact the annular body.

[0133] In some examples, the annular spring-biased seal band includes an annular body with a "V"-shaped annular cavity disposed vertically along the radially outer surface of the annular body. In some examples, the "V"-shaped annular cavity is disposed near a first end of the spring-biased cover band, distal from a second end of the spring-biased cover band, which is disposed adjacent the lower surface of the upper plate when installed. Locating the annular arms and / or the "V"-internal annular cavity closer to the base plate helps minimize variations in spring pressure near the bond layer, which is the structure primarily to be protected from plasma erosion.

[0134] The annular spring-biased seal band is configured to bend at the neck, annular arms, and / or "V"-shaped annular cavity to provide a spring force that biases the annular spring-biased seal band against the lower surface of the upper plate and the upper surface of the lower body portion of the base plate. In some examples, the seal provides a plasma barrier (the seal may or may not provide an airtight seal). As can be appreciated, if sufficient spring force is not provided, the spring-biased seal cover band may not be able to create a plasma-barrier seal, and premature corrosion of the seal and / or adhesive layer may occur. If too much spring force is provided, the spring-biased seal cover band may cause delamination of the upper plate from the base plate at the adhesive layer. In some examples, the spring-biased cover band provides a force that is sufficient to provide a plasma seal and is no more than one-third of the delamination pressure required to delaminate the upper plate from the base plate at the adhesive layer. In some examples, the axial height of the spring-loaded seal cover band is in the range of 3 / 16" to 1", although higher or lower vertical heights may be used. As can be appreciated, it can be difficult to obtain the desired amount of spring force with a small axial thickness.

[0135] While some deformation is desired, excessive deformation and / or plastic deformation is less desirable. The annular spring-biased seal band is exposed to on-off cycling of heat, plasma, and / or chemicals. Therefore, a balance between spring force, deformation, and / or plastic deformation is achieved to ensure the life of the spring-biased seal band and adhesive layer.

[0136] 11A-13, an annular spring-biased seal band 810 is shown. In FIGS. 11A and 11B, the annular spring-biased seal band 810 is configured to flex or deform during installation and bias its opposite ends against the surface 238 of the upper plate 112 and the surface 236 of the base plate 110, respectively, to form a plasma seal. The annular spring-biased seal band 810 comprises an annular body 812 including a first body portion 813 and an annular arm 814 extending from the first body portion 813 at an angle β3. A neck 816 is disposed between the first body portion 813 and the annular arm 814.

[0137] The annular spring-loaded seal band 810 is configured to flex at the neck 816 and / or the annular arm 814 upon installation such that spring forces are applied in first and second opposing directions against the surface 238 of the upper plate 112 and the surface 236 of the base plate 110, respectively. The spring forces are selected to be sufficient to shut off the plasma without causing delamination.

[0138] In some examples, the annular spring-biased seal band 810 has an overall length d5 ​​when uncompressed, the first body portion 813 has a length d6, and the annular arm 814 has a length d7. In some examples, the length d5 ​​is longer than the length d2 (between the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110). In some examples, d5 is within the range of 102% of d2 to 120% of d2. In some examples, β3 is within the range of 105° to 165°. In some examples, β3 is within the range of 125° to 155°. In some examples, β3 is reduced by a range of 1° to 25° when in the installed, compressed state. In some examples, β3 is reduced by a range of 3° to 15° when in the installed, compressed state.

[0139] In some examples, the length d7 of the annular arm 814 is in the range of 5%*d5 to 50%*d5. In some examples, the length d7 of the annular arm 814 is in the range of 5%*d5 to 30%*d5. In some examples, the annular spring-biased seal band 810 is at least partially deformed at the neck 816 and the annular arm 814 without significant plastic deformation during installation.

[0140] The annular spring-biased seal band 810 can be installed in different orientations. In FIG. 11A , the annular arms 814 are disposed below the first body portion 813, with the annular arms 814 extending radially outward from the first body portion 813. In FIG. 12 , the annular arms 814 are disposed above the first body portion 813, with the annular arms 814 extending radially outward from the first body portion 813. In some embodiments, the inner diameter surface of the annular spring-biased seal band 810 has a contour or shape that mates with or is complementary to the radially outer contour or shape of the seal 210. In FIG. 13 , the annular arms 814 are disposed above the annular body 812, with the annular arms 814 extending radially inward from the first body portion 813 toward the seal 210.

[0141] 14A-18, further examples of annular spring-biased seal bands are shown. In FIGS. 14A and 14B, annular spring-biased seal band 850 is shown. Annular spring-biased seal band 850 includes an annular body 852 with an intermediate body portion 853 disposed between first and second annular arms 854 and 858. First and second annular arms 854 and 858 extend from intermediate body portion 853 at an angle β2 to define necks 860 and 862 between intermediate body portion 853 and first and second annular arms 854 and 858, respectively. Annular spring-biased seal band 850 is configured to flex during installation such that spring forces are applied in opposing first and second directions relative to lower surface 238 of upper plate 112 and upper surface 236 of base plate 110.

[0142] In some examples, the annular spring-loaded seal band 850 has an overall length d5* when uncompressed, the intermediate body portion 853 has a length d6*, and the first and second annular arms 854 and 858 have a length d7*. In some examples, the length d5* is longer than the length d2* between the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110. In some examples, d5* is in the range of 102% of d2 to 120% of d2.

[0143] In some examples, angle β2 is in the range of 105° to 165°. In some examples, angle β2 is in the range of 125° to 155°. In some examples, β2 decreases in the range of 1° to 25° when in the installed compressed state. In some examples, β2 decreases in the range of 3° to 15° when in the installed compressed state.

[0144] 14A and 14B, the first and second annular arms 854 and 858 are configured to have the same angle. However, the first and second annular arms 854 and 858 may extend from the intermediate body portion 853 at different angles. In some examples, the length d7* of the first and second annular arms 854 and 858 is within the range of 5%*d5* to 30%*d5*. In some examples, the length d7* of the first and second annular arms 854 and 858 is within the range of 5%*d5* to 20%*d5*. In some examples, the length d6* of the intermediate body 853 is within the range of 10%*d5* to 40%*d5*. In some examples, the annular spring-biased seal band 850 flexes at one or both of the necks 860 and 862 and / or at one or both of the first and second annular arms 854 and 858 during installation without significant plastic deformation. Excessive plastic deformation may prevent the spring-biased seal cover band from producing a plasma seal during installation or after use. Also, very high plastic deformation may cause failure / cracking of the annular spring-biased seal band around the neck region, thereby shortening the useful life of the seal band.

[0145] Annular spring-biased seal band 810 can be installed in different orientations. In FIG. 14A, first and second annular arms 854 and 858 extend radially inward from intermediate body portion 853. In FIG. 15, first and second annular arms 854 and 858 extend radially outward from intermediate body portion 853. In some embodiments, the inner diameter surface of annular spring-biased seal band 810 in FIG. 15 has a contour or shape that mates with or is complementary to the radially outer contour or shape of seal 210.

[0146] 16, an annular spring-biased seal band 900 is shown. The annular spring-biased seal band 900 includes a first body portion 912 and a first end of the first body portion 912 spaced apart at an angle β5 (or alternatively, different angles β5 and β 5’ 110)。 The first and second annular arms 914 and 916 define neck portions 918 and 919 between the first body portion 912 and the first and second annular arms 914 and 916, respectively. The first and second annular arms 914 and 916 and / or neck portions 918 and 919 of the annular spring-biased seal band 900 are configured to flex and deform during installation such that forces are applied in opposite first and second directions relative to the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110.

[0147] 17 and 18, another example of an annular spring-biased seal band 930 is shown. The annular spring-biased seal band 930 comprises an annular body having first and second body portions 932 and 934 and a "V"-shaped annular body portion 936 connected between the first and second body portions 932 and 934. In some examples, the first and second body portions 932 and 934 extend in parallel directions and / or along the same line when in an uncompressed state. The "V"-shaped annular body portion 936 has a neck portion 937 disposed between the "V"-shaped annular body portion 936 and the first and second body portions 932 and 934, and the neck portion 937 is spaced apart by an angle β6 (or different angles β6 and β6). 6’ Annular spring-loaded seal band 930 is configured to flex during installation such that sufficient spring force is applied in opposing first and second directions against lower surface 238 of upper plate 112 and upper surface 236 of base plate 110.

[0148] The annular spring-biased seal band 930 can be installed in different orientations. In FIG. 17, the cavity in the "V"-shaped annular body portion 936 faces radially outward. In FIG. 18, the cavity in the "V"-shaped annular body portion 936 faces radially inward. In some embodiments, the inner diameter surface of the annular spring-biased seal band 930 in FIG. 17 has a contour or shape that mates with or is complementary to the radially outer contour or shape of the seal 210.

[0149] In some examples, angle β6 (or different angles β6 and β 6’ ) is in the range of 105° to 165°. In some examples, angle β6 (or different angles β6 and β 6’ ) is in the range of 125° to 155°. In some examples, β6 and / or β 6’ is reduced in the range of 1° to 25° when in the installed compressed state. In some examples, β6 and / or β 6’ is reduced in the range of 3° to 15° when in the installed compressed state.

[0150] In some examples, the legs of the “V” shaped annular body portion 936 are within the range of 5% to 20% of the length of the annular spring biased seal band 930 .

[0151] 19A-19C, another example of an annular spring-biased seal band 940 is shown. In FIG. 19A, the annular spring-biased seal band 940 is in an uncompressed state (uninstalled). In FIG. 19B, the annular spring-biased seal band 940 is in a partially or fully compressed state (partially installed). In FIG. 19C, the annular spring-biased seal band 940 is in a fully compressed state with its seal-facing surface 948 abutting the radially outer surface of the seal 210. When in the installed, compressed state (e.g., FIG. 19C), in some examples, the inner diameter (inner surface) of the annular spring-biased seal band 940 does not contact the outer diameter (outer surface) of the seal 210. In some examples, the seal-facing surface 948 of the annular spring-biased seal band 940 has a contour or shape that mates with (or has a complementary contour to) the radially outer surface of the seal 210. For example, the seal counter surface 948 in FIG. 19A is "V" shaped.

[0152] Annular spring-biased seal band 940 comprises an annular body 942 including a first body portion 943 and an annular arm 944 that extends from first body portion 943 at an angle β7 when in an uncompressed state as shown in FIG. 19A. A neck 945 is disposed between annular arm 944 and first body portion 943. When partially or fully seated as shown in FIGS. 19B and 19C, respectively, annular arm 944 bends under compression and extends from first body portion 943 at an angle β 7* where β 7* is smaller than β7. In some examples, β7 is in the range of 105° to 165°. In some examples, β7 is in the range of 125° to 155°. In some examples, β7 and β 7* The difference between β and β is in the range of 1° to 25°. 7* The difference between the angles is in the range of 3° to 20°.

[0153] In some examples, the annular arm 944 does not contact the first body portion 943. In some examples, the annular spring-biased seal band 940 is installed without the seal 210 when a sufficient plasma seal is created by the annular spring-biased seal band 940. In some examples where the seal 210 is not utilized, the annular arm 944 may or may not contact the first body portion 943 when partially or fully installed.

[0154] The annular body 942 tapers in both directions from its center 949. The annular spring-biased seal band 940 has a thickness d8 at the center 949 that is greater than the thickness at either end of the annular body 942. The annular spring-biased seal band 940 is configured to flex or deform during installation such that spring forces are applied in first and second opposing directions against the surface 238 of the upper plate 112 and the surface 236 of the base plate 110.

[0155] In some examples, the annular spring-loaded seal band 940 has an overall length d11 when uncompressed, the annular body 942 has a length d9, and the annular arms 944 have a length d10. In some examples, the length d11 is longer than the length d2 between the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110. In some examples, d11 is in the range of 102% of d2 to 120% of d2.

[0156] In some examples, the length d10 of the annular arm 944 is within a range of 5%*d11 to 50%*d11. In some examples, the length d10 of the annular arm 944 is within a range of 5%*d11 to 30%*d11. In some examples, the thickness d10* of the end of the annular arm is within a range of d8 / 1.5 to d8 / 8. In some examples, the thickness d10* of the end of the annular arm is within a range of d8 / 2 to d8 / 6. In some examples, the thickness of the spring-loaded seal cover band tapers from the center to both ends.

[0157] In some examples, the annular spring-loaded seal band 940 is flexible and is at least partially deformed at the neck 945 and the annular arm 944 without significant plastic deformation upon installation. As can be appreciated, dimensions selected in these ranges allow for tuning of the spring force to provide sufficient force to shut off the plasma while remaining below the spring force that could cause delamination (e.g., in some examples, less than one-third to one-half the spring force that would cause delamination).

[0158] 19B and 19C. As shown in FIG. 19D, the seal 210 and the annular spring-biased seal band 940 may each have a generally circular shape. The diameters of the seal 210 and the annular spring-biased seal band 940 may correspond to one another. For example, the inner diameter of the annular spring-biased seal band 940 may correspond to the outer diameter of the seal 210.

[0159] The inner diameter of seal 210 may correspond, for example, to the radially outer surface 218 of upper body portion 152 of base plate 110. In some example embodiments, the inner diameter of seal 210 may be slightly smaller than the diameter of radially outer surface 218 to allow seal 210 to stretch around upper body portion 152 and remain in place.

[0160] The inner diameter of the annular spring-biased seal band 940 may be slightly smaller than the outer diameter of the seal 210 to allow the annular spring-biased seal band 940 to stretch around the seal 210 and stay in place. Figure 19E is a side cross-sectional view of the seal 210 and the annular spring-biased seal band 940 at BB in Figure 19D.

[0161] 20A-20C, another example of an annular spring-biased seal band 950 is shown. In FIG. 20A, the annular spring-biased seal band 950 is in an uncompressed state (when not deployed). In FIG. 20B, the annular spring-biased seal band 950 is in a partially compressed state (when partially deployed). In FIG. 20C, the annular spring-biased seal band 950 is in a compressed state (when deployed). When in the deployed, compressed state (e.g., FIG. 20C), in some examples, the inner diameter (inner surface) of the annular spring-biased seal band 950 does not contact the outer diameter (outer surface) of the seal 210. In some examples, the seal-facing surface 960 of the annular spring-biased seal band 950 has a contour or shape that mates with or is complementary to the radially outer contour or shape of the seal 210. For example, the seal counter surface 960 in FIG. 20A has a curved, arcuate, or “D” shaped profile to match the profile of the radially outer surface of the seal 210 .

[0162] The annular spring-biased seal band 950 includes an annular body 954 having a first body portion 952, an annular cavity 958 disposed on a radially outer surface of the annular spring-biased seal band 950, and annular arms 956. In some examples, the annular body 954 tapers in both directions from a center 955. The annular spring-biased seal band 950 has a thickness at the center 955 that is greater than the thickness at either end of the annular body 954. The annular spring-biased seal band 950 is configured to flex such that forces are applied in opposite first and second directions relative to the surface 238 of the upper plate 112 and the surface 236 of the base plate 110.

[0163] In some examples, the annular spring-loaded seal band 950 has an overall length d15, and the center of the annular cavity 958 is located a length d12 from one end of the annular body 954 and a length d13 from the opposite end of the annular body 954. The annular cavity 958 is arched, curved, or "D" shaped and extends a length d14 along the radially outer surface. The edges of the annular cavity 958, when uncompressed in FIG. 20A , form first and second angles β8 and β9 with respect to a horizontal line at the midpoint of the annular cavity 958. In some examples, β8 is greater than β9. In some examples, β8 is less than β9. In some examples, β8 = β9. In some examples, β8 and β9 are within the range of 15° to 75°. In some examples, β8 and β9 are within the range of 25° to 55°. In some instances, β8<β9 (eg, β8 equals 30° and β9 equals 45°).

[0164] During compression in FIG. 20C, the total angle of β8 and β9 (β in FIG. 20C) 8+9 ) is reduced by the compression during introduction. In some cases, the sum of the angles β8 and β9 before compression and the angle β after compression 8+9 In another example, the difference between the sum of angles β8 and β9 before compression and the sum of angles β9 after compression is in the range of 1° to 25°. 8+9 The difference between is in the range of 3° to 15°. In some instances, the sides of the cavity flex but do not touch when in compression.

[0165] In some examples, the annular arm 956 does not contact the annular body 954 when compressed. In some examples, the annular spring-biased seal band 950 is installed without the seal 210 if a sufficient plasma seal is created by the annular spring-biased seal band 950. In some examples where the seal 210 is not utilized, the annular arm 956 may or may not contact the annular body 954 (i.e., both sides of the annular cavity 958 may or may not contact) when the annular spring-biased seal band 950 is compressed during installation.

[0166] The length d15 is greater than the length d2 between the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110 when uncompressed. In some examples, d15 is in the range of 102% of d2 to 120% of d2.

[0167] In some examples, the length d13 of the annular arm 956 (on the short side of the annular body 954) is in the range of 5%*d15 to 50%*d15. In some examples, the length d13 of the annular arm 956 (on the short side of the annular body 954) is in the range of 5%*d15 to 30%*d15.

[0168] In some examples, the length d14 of the annular cavity 958 is in the range of 5%*d15 to 25%*d15. In some examples, the thickness of the annular spring-biased seal band 950 tapers from the center 955 to both ends. In some examples, the annular spring-biased seal band 950 flexes at the annular cavity 958 and / or the annular arms 956 without significant plastic deformation. As can be appreciated, dimensions selected in these ranges allow for tuning of the spring force to provide sufficient force to shut off the plasma while remaining below the spring force that could cause delamination (e.g., in some examples, less than one-third to one-half the force that would cause delamination).

[0169] 21A-21C, another example of an annular spring-biased seal band 980 is shown. In FIG. 21A, the annular spring-biased seal band 980 is in an uncompressed state (uninstalled). In FIG. 21B, the annular spring-biased seal band 980 is in a partially compressed state (partially installed). In FIG. 21C, the annular spring-biased seal band 980 is in a compressed state with its seal-facing surface 988 abutting the radially outer surface of the seal 210. When in the installed, compressed state (e.g., FIG. 21C), in some examples, the inner diameter (inner surface) of the annular spring-biased seal band 950 does not contact the outer diameter (outer surface) of the seal 210. In some examples, the seal-facing surface 988 of the annular spring-biased seal band 980 has a contour or shape that mates with (or has a complementary contour to) the radially outer surface of the seal 210. For example, the seal counter surface 988 in FIG. 21A is "D" shaped.

[0170] The annular spring-biased seal band 980 is spaced apart from the first body portion 983 by an angle β when uncompressed as in FIG. 21A. 10 21B and 21C, when partially or fully deployed, respectively, the annular arms 944 bend under compression and form an angle β from the first body portion 943. 10* where β 10* is β 10 is smaller than.

[0171] In some examples, β 10 is in the range of 105° to 165°. In some examples, β 10 is in the range of 105° to 165°. In some examples, β 10 is in the range of 125° to 155°. In some examples, β 10 and β 10* The difference between β is in the range of 1° to 25°. 10 and β 10*The difference between the annular arms is in the range of 3° to 20°. In some examples, the annular arms do not contact the body. In some examples, the annular spring-loaded seal band 980 is installed without the seal 210 if a sufficient plasma seal is created. In some examples where the seal 210 is not utilized, the annular arms 944 contact the first body portion upon compression.

[0172] A neck portion 986 is disposed between the first body portion 983 and the annular arm 984. The annular body 982 tapers in both directions from a center 989 of the annular body 982. The annular spring-biased seal band 980 has a thickness d16 at the center 989. The annular spring-biased seal band 980 is configured to flex during installation such that spring forces are applied in first and second opposing directions against the surface 238 of the upper plate 112 and the surface 236 of the base plate 110.

[0173] In some examples, the annular spring-loaded seal band 980 has an overall length d19 when uncompressed, with the annular body 982 having a length d17 and the annular arms 984 having a length d18. In some examples, the length d19 is longer than the length d2 between the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110. In some examples, d19 is in the range of 102% of d2 to 120% of d2.

[0174] In some examples, the length d18 of the annular arm 944 is in the range of 5%*d19 to 50%*d19. In some examples, the length d18 of the annular arm 944 is in the range of 5%*d19 to 30%*d19.

[0175] In some examples, the thickness d18* of the end of the annular arm 944 is in the range of d16 / 1.5 to d16 / 8. In some examples, the thickness d18* of the end of the annular arm is in the range of d16 / 2 to d16 / 6. In some examples, the thickness of the spring-loaded seal cover band tapers from the center to both ends.

[0176] In some examples, the annular spring-loaded seal band 980 is flexible and can be at least partially deformed at the neck portion 986 and the annular arms 984 without significant plastic deformation. As can be appreciated, dimensions selected in these ranges allow for tuning of the spring force to provide sufficient force to shut off the plasma while remaining below the spring force that could cause delamination (e.g., in some examples, less than one-third of the force that would cause delamination).

[0177] Referring now to FIG. 22, another example of an annular spring-biased seal band is shown. Some of the example seal bands described herein are formed from a single material or group of materials that are machined to the desired final surface dimensions. In FIG. 22, an annular spring-biased seal band 990 includes an annular inner member 992 formed from a first type of material. An outer layer 994 is formed on the annular inner member 992 and is formed from a second type of material. In some examples, the first type of material of the inner member includes a spring metal such as titanium. In some examples, the outer layer 994 includes a coating material such as PFA, PTFE, ceramic, or other plasma-resistant material.

[0178] 23 and 24, another example of an annular spring-biased seal band 1030 is shown. The annular spring-biased seal band 1030 comprises an annular body having first, second, and third body portions 1034, 1038, and 1042, and first and second "V"-shaped annular body portions 1036 and 1040 connected between the first, second, and third body portions 1034, 1038, and 1042, respectively. The "V"-shaped annular body portions 1036 and 1040 have neck portions disposed between the first and second "V"-shaped annular body portions 1036 and 1040 and the first, second, and third body portions 1034, 1038, and 1042, respectively, that define an angle β6 (or a different angle β6). β6 and β 6’) The annular spring-biased seal band 1030 is configured to flex during installation so that sufficient spring force is applied in opposing first and second directions against the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110. The additional "V" shaped annular body portion also helps distribute plastic deformation over a larger volume. Although not shown, in some embodiments, the inner diameter surface of the annular spring-biased seal band 1030 has a contour or shape that mates with or is complementary to the radially outer contour or shape of the seal 210.

[0179] The annular spring-loaded seal band 1030 can be installed in different orientations. In Figure 23, the cavities in the "V"-shaped annular body portions 1036 and 1040 extend radially inward. In Figure 24, the cavities in the "V"-shaped annular body portions 1036 and 1040 extend radially outward.

[0180] In some examples, angle β6 (or different angles β6 and β 6’ ) is in the range of 105° to 165°. In some examples, angle β6 (or different angles β6 and β 6’ ) is in the range of 125° to 155°. In some examples, arms 1037 and 1041 of "V" shaped annular body portions 1036 and 1040 are in the range of 5% to 20% of the length of annular spring biased seal band 930.

[0181] 23 and 24 , another example of an annular spring-biased seal band 1030 is shown. The annular spring-biased seal band 1030 includes first, second, and third body portions 1034, 1038, and 1042. First and second “V”-shaped annular body portions 1036 and 1040 are connected between the first and second body portions 1034 and 1038 and between the second and third body portions 1038 and 1042, respectively. The first and second “V”-shaped annular body portions 1036 and 1040 include arms 1037 and 1041, respectively. In some examples, the first, second, and third body portions 1034, 1038, and 1042 extend in parallel directions and / or along the same line when uncompressed.

[0182] The first "V" shaped annular body portion 1036 has an angle β6 (or different angles β6 and β) at a neck portion disposed between the arms 1037 of the first "V" shaped annular body portion 1036 and the first and second body portions 1034 and 1038. 6’ The second "V" shaped annular body portion 1040 forms an angle β6 (or different angles β6 and β) at a neck portion disposed between the arms 1041 of the second "V" shaped annular body portion 1040 and the second and third body portions 1038 and 1042. 6’ ) is formed.

[0183] The annular spring-biased seal band 1030 is configured to flex during installation such that sufficient spring force is applied in first and second opposing directions against the lower surface 238 of the upper plate 112 and the upper surface 236 of the base plate 110. The first and second "V"-shaped annular body portions 1036 and 1040 are configured to distribute any deformation or plastic deformation that occurs over a larger volume of the annular spring-biased seal band 1030, which may improve reliability.

[0184] The annular spring-biased seal band 1030 can be installed in different orientations. In Figure 23, the cavities in the first and second "V"-shaped annular bodies 1036 and 1040 face radially outward. In Figure 24, the cavities in the first and second "V"-shaped annular bodies 1036 and 1040 face radially inward.

[0185] In some examples, angle β6 (or different angles β6 and β 6’ ) is in the range of 105° to 165°. In some examples, angle β6 (or different angles β6 and β 6’ ) is in the range of 125° to 155°. In some examples, the legs of the first and second "V" shaped annular bodies 1036 and 1040 are in the range of 5% to 20% of the length of the annular spring biased seal band 1030.

[0186] 25A, there is shown an annular spring biased seal 1110. The annular spring biased seal 1110 includes a first arm 1116 and a second arm 1118. A first spring 1112 is defined between the first arm 1116 and an annular body 1120 of the annular spring biased seal 1110. A second spring 1114 is defined between the second arm 1118 and the annular body 1120.

[0187] FIG. 25B is a side cross-sectional view of an annular seal cover band 1140 configured to contact the annular spring-biased seal 1110. The annular seal cover band 1140 includes a first extension 1142, a second extension 1144, and a body portion 1150. A first protrusion 1146 is defined between the first extension 1142 and the body portion 1150, and a second protrusion 1148 is defined between the second extension 1144 and the body portion 1150. In some embodiments, the annular seal cover band 1140 has a cylindrical outer surface that defines the outer diameter of the annular seal cover band 1140. In such embodiments, the cylindrical outer surface can be flat such that the outer diameter is uniform from the top to the bottom of the annular seal cover band 1140. In other examples, the outer diameter of the cylindrical outer surface is not uniform from the top to the bottom of the annular seal cover band 1140. One or more concave or convex features may be disposed along the cylindrical outer surface.

[0188] The pattern on the inner surface of the annular seal cover band 1140 may correspond to the shape of the outer surface of the annular spring-loaded seal 1110 so that the annular spring-loaded seal 1110 and the annular seal cover band 1140 complement each other when installed between the upper plate 112 and the upper horizontal surface 155 of the lower body portion 154 of the base plate 110.

[0189] For example, the annular spring-biased seal 1110 may be disposed between the surface 238 of the upper plate 112 and the surface 236 of the base plate 110 such that the radially inner surface 1108 of the annular spring-biased seal 1110 contacts the radially outer surface 218 of the upper body portion 152 of the base plate 110. In some embodiments, the first arm 1116 may press against the surface 238 (e.g., via the first spring 1112) and the second arm 1118 may press against the surface 236 (e.g., via the second spring 1114), such that the annular spring-biased seal 1110 is configured to flex or deform and bias its ends when installed to form a plasma seal.

[0190] The annular seal cover band 1140 may be disposed around the annular spring-biased seal 1110 such that the first protrusion 1146 fits into the gap left by the first spring 1112 and the second protrusion 1148 fits into the gap left by the second spring 1114. In some examples, when the annular seal cover band 1140 and the annular spring-biased seal 1110 are installed, the first protrusion 1146 is configured to contact the first spring 1112 and the second protrusion is configured to contact the second spring 1114. The first protrusion 1146 may press against the curved portion 1115 of the first arm 1116 to improve the level of sealing of the first arm 1116 against the surface 238 of the upper plate 112 (e.g., by the first protrusion 1146 applying a horizontal force against the curved portion 1115). Similarly, the second protrusion 1148 may press against the curved portion 1117 of the second arm 1118 to improve the level of sealing of the second arm 1118 against the surface 236 of the base plate 110 (e.g., by the second protrusion 1148 applying a horizontal force against the curved portion 1117).

[0191] In some examples, the first protrusion 1146 and the second protrusion 1148 are not configured to contact the corresponding first spring 1112 and second spring 1114, respectively, when the annular seal cover band 1140 and the annular spring-biased seal 1110 are installed. In some examples, the horizontal widths of the first protrusion 1146 and the second protrusion 1148 are the same, in which case the inner diameter of the annular seal cover band 1140 is defined by both the first protrusion 1146 and the second protrusion 1148. The equal protrusion lengths of 1146 and 1148 reduce the possibility of the annular seal cover band 1140 rotating counterclockwise during operation. In some examples, the horizontal widths of the first protrusion 1146 and the second protrusion 1148 are different, in which case only one of the first protrusion 1146 or the second protrusion 1148 defines the inner diameter of the annular seal cover band 1140. In some cases, such an example may be preferable if the annular seal cover band 1140 is constructed of a material that is less likely to cause rotation or has other features to prevent rotation.

[0192] Similar to the first protrusion 1146 and the second protrusion 1148, in various embodiments, the body portion 1150 may or may not contact the annular body 1120 of the annular spring-biased seal 1110 due to manufacturing tolerances, etc. In some examples, at least one of the protrusions 1146 and 1148 contact the annular spring-biased seal 1110, but the body portion 1150 does not contact the annular spring-biased seal 1110.

[0193] In some examples, the first protrusion 1146 and the second protrusion 1148 may contact the first spring 1112 and the second spring 1114, respectively. In some examples, the first extension 1142 may contact the first arm 1116 and the second extension 1144 may contact the second arm 1118, respectively.

[0194] The height of the annular spring-biased seal 1110 may be greater than the height of the annular seal cover band 1140. For example, as shown in FIG. 25C , the annular spring-biased seal 1110 may contact the surface 238 of the upper plate 112 and the surface 236 of the base plate 110 to compress and form a seal. The annular seal cover band 1140 may not contact the surface 238 of the upper plate 112 and the surface 236 of the base plate 110 to inhibit or prevent compression of the annular seal cover band 1140.

[0195] The annular seal cover band 1140 may protect the annular spring-biased seal 1110 during substrate processing. For example, the annular seal cover band 1140 may be a sacrificial outer PTFE material to improve the life of the annular spring-biased seal 1110 (which may also include a PFTE material).

[0196] The first spring 1112 and the second spring 1114 may have a mirror image arrangement with respect to the annular body 1120 to enable the annular spring-biased seal 1110 to apply equal pressure to the surface 238 of the upper plate 112 and the surface 236 of the base plate 110 and to prevent rotation of the annular spring-biased seal 1110. When installed, approximately 60-90% of the inner surface of the annular spring-biased seal 1110 may be in direct contact with the radially outer surface 218 of the upper body portion 152 of the base plate 110. The annular seal cover band 1140 may press against the annular spring-biased seal 1110 to improve the spring sealing force of the annular spring-biased seal 1110.

[0197] In some examples, when the annular seal cover band 1140 presses against the annular spring-loaded seal 1110, the first extension 1142 may or may not contact the surface 238 of the upper plate 112, and the second extension 1144 may or may not contact the surface 236 of the base plate 110. For example, in some embodiments, the region of corrosion may not extend all the way to the surface 238 (or surface 236). The region of concern for the high corrosion area may begin at a height below the surface 238 and extend up to around the midpoint of the annular seal cover band 1140. Therefore, there may not be a need for the first extension 1142 to extend all the way to contact the surface 238 or the second extension 1144 to extend all the way to contact the surface 236, since little or no corrosion occurs at the locations of the surfaces 238 and 236.

[0198] Important attributes of the annular seal cover band 1140 include providing a sacrificial layer that can be replaced more easily and frequently than the annular spring-biased seal 1110, while optionally providing additional horizontal force against the curved portions 1115 and 1117 to improve sealing of the annular spring-biased seal 1110. When the first and second extensions 1142 and 1144 are designed to contact the surfaces 238 and 236, respectively, insufficient engagement of the first and second extensions 1142 and 1144 with the flat surfaces 238 and 236, such as due to manufacturing tolerances, can lead to tilting of the annular seal cover band 1140 and improper alignment of the annular seal cover band 1140 with the annular spring-biased seal 1110.

[0199] The sealing contact areas (e.g., where first arm 1116 contacts surface 238 and second arm 1118 contacts surface 238) may be positioned deep within a groove defined between surfaces 236 and 238 to reduce or avoid corrosion of annular spring-biased seal 1110. Positioning first spring 1112 and second spring 1114 deep within the grooves may also reduce or avoid corrosion.

[0200] In some examples, the annular spring-loaded seal 1110 has a height of 200% of d22 when uncompressed, and a thickness from the radially inner surface 1108 to the end of the first arm 1116 is d26 when uncompressed. The height of the end face of the first arm 1116 is d23, the length of the gap defined by the first spring 1112 is d24, and the height of the annular body 1120 is d25. The thickness of the first spring 1112 is d27, and the distance from the surface of the first spring 1112 to the surface of the end of the first arm 1116 is d28.

[0201] In some examples, the thickness d27 of the first spring 1112 can be at least 10% of d26 to allow the first spring to generate enough force to provide a seal with the first arm 1116. The distance d28 can be at least 10% of d26 to allow the first arm 1116 to apply enough pressure to the surface 238 to provide adequate sealing.

[0202] In some examples, the height d23 of the end face of the first arm 1116 is at least 5% of d22 (or 10% of the total height of the annular spring-biased seal 1110), and the height d24 of the gap defined by the first spring 1112 is at least 5% of d22 (or at least 10% of the total height of the annular spring-biased seal 1110). The height d25 of the annular body 1120 is at least 10% of d22 (e.g., at least 20% of the total height of the annular spring-biased seal 1110).

[0203] FIG. 25D is a top view of the annular spring biased seal 1110 and the annular seal cover band 1140 of FIGS. 25A-25C. As shown in FIG. 25D, the annular spring biased seal 1110 and the annular seal cover band 1140 may each have a generally circular shape. The diameters of the annular spring biased seal 1110 and the annular seal cover band 1140 may correspond to one another. For example, the outer diameter of the annular spring biased seal 1110 may correspond to the inner diameter of the annular seal cover band 1140.

[0204] The inner diameter of the annular spring-biased seal 1110 may correspond, for example, to the radially outer surface 218 of the upper body portion 152 of the base plate 110. In some embodiments, the inner diameter of the annular spring-biased seal 1110 may be slightly smaller than the diameter of the radially outer surface 218 when not installed to allow the annular spring-biased seal 1110 to stretch around the upper body portion 152 and apply a radially inward bias to keep the seal in place. The annular spring-biased seal 1110 is formed of a resilient or flexible material, such as PTFE.

[0205] The inner diameter of the annular seal cover band 1140 may be slightly smaller than the outer diameter of the annular spring biased seal 1110 to allow the annular seal cover band 1140 to be stretched around the annular spring biased seal 1110 and apply a radially inward bias to maintain the cover band 1140 in place. Figure 25E is a side cross-sectional view of the annular spring biased seal 1110 and the annular seal cover band 1140 at CC in Figure 25D.

[0206] 26A is a cross-sectional side view of an annular spring-biased seal 1210 comprising an annular body 1212 and an annular spring arm 1214. The annular spring arm 1214 extends from the annular body 1212 and biases the annular spring-biased seal 1210 when the annular spring-biased seal 1210 is installed in a groove as shown in FIG.

[0207] For example, the radially inner surface 1208 of the annular body 1212 may contact the radially outer surface 218 of the upper body portion 152 of the base plate 110, and the upper surface of the annular body 1212 may contact the surface 238 of the upper plate 112. The annular spring arm 1214 contacts the surface 236 of the base plate 110. In some embodiments, the annular spring arm 1214 has a substantially uniform thickness. In some embodiments, the annular spring arm 1214 has a greater thickness closer to the annular body 1212 and a lesser thickness closer to the distal end of the annular spring arm 1214. In some embodiments, the annular spring arm 1214 has a greater thickness at the distal end of the annular spring arm 1214 compared to a region having a lesser thickness near the annular body 1212.

[0208] The annular spring biased seal 1210 is configured to flex or deform when installed, biasing the annular spring arms 1214 and the top surface of the annular body 1212 to form a plasma seal. When installed, the annular spring arms 1214 bias downward and away from the radially outer surface 218. The annular spring arms 1214 may inhibit or prevent rotation of the annular spring biased seal 1210.

[0209] For example, the annular spring-biased seal 1210 may have a tendency to rotate clockwise in FIG. 26B . At that time, the right edge of the top of the annular spring-biased seal 1210 moves downward, away from the surface 238 of the upper plate 112. Most of the sealing provided by the annular spring-biased seal 1210 may occur near the upper left corner of the annular spring-biased seal 1210 in FIG. 26B . If the annular spring-biased seal 1210 comprises a material that is more metallic than elastomer, it may be desirable to have a high force to conform the annular spring-biased seal 1210 to the groove surface 238. A large area of ​​surface contact is also desirable to improve sealing. The downward rotation of the annular spring-biased seal 1210 reduces the force applied to the surface 238 by the top of the annular spring-biased seal 1210 and reduces the contact area between the top of the annular spring-biased seal 1210 and the surface 238.

[0210] When the annular spring-biased seal 1210 is stretched and installed in the groove, it may naturally rotate due to its mechanical properties; the annular spring arms 1214 impede rotation by providing an upward force to prevent clockwise rotation of the annular spring-biased seal 1210. The annular spring arms 1214 are designed to apply a force in a desired direction to prevent rotation; depending on the shape of the annular body 1212 of the annular spring-biased seal 1210, various shapes of the annular spring arms 1214 may be more or less effective at preventing rotation. Therefore, the specific dimensions of the annular spring arms 1214 may be selected to optimize the direction and amount of force to prevent rotation. In general, all disclosed seal and cover band embodiments are designed to reduce the tendency to rotate while improving service life. These seals are designed to withstand extreme wafer manufacturing conditions over many RF hours. Once the seals become corroded to a certain extent, they will require replacement. The novel shape and geometry of the disclosed seal not only allows the seal to prevent rotation (after multiple cycles of extreme temperature / pressure changes), but also ensures that sufficient material is packed around the plasma attack area to extend useful life.

[0211] 26A and 26B illustrate the annular spring arms 1214 as bending inward beyond the midpoint of the annular body 1212, in other examples, the annular spring arms 1214 may have other shapes. For example, the annular spring arms 1214 may bend in the opposite direction, extend further than in the examples shown in FIGS. 26A and 26B, have a sharper or gentler curve, extend from the opposite side of the annular body 1212, etc. When the annular spring arms 1214 extend from the opposite side of the annular body 1212, the annular spring arms 1214 may be biased downward and toward the radially outer surface 218.

[0212] In some examples, the annular spring-loaded seal 1210 has a height d29 when uncompressed, the annular body 1212 has a height d30 and a width d32, and the annular spring arm 1214 has a width d31. In some examples, the height d30 is at least 10% of d29 and the width d31 is at least 5% of d32.

[0213] 26A and 26B. As shown in FIG. 26C, the annular spring-biased seal 1210 may have a generally circular shape. The inner diameter of the annular spring-biased seal 1210 may correspond to, for example, the radially outer surface 218 of the upper body portion 152 of the base plate 110.

[0214] In some example embodiments, the inner diameter of the annular spring-biased seal 1210 may be slightly smaller than the diameter of the radially outer surface 218 to allow the annular spring-biased seal 1210 to stretch around the upper body portion 152 and remain in place. Figure 26D is a side cross-sectional view of the annular spring-biased seal band 1310 at DD in Figure 26C.

[0215] 27A, there is shown an annular spring-biased seal band 1310 that can be used with an O-ring seal 1330. The annular spring-biased seal band 1310 includes an annular body having a radially inner surface 1308, a radially outer surface 1312, and a protrusion 1314. The protrusion 1314 may define a pocket area for the O-ring seal 1330 and / or provide mechanical rigidity to the annular spring-biased seal band 1310. In this example, the O-ring seal 1330 may push straight up against the annular spring-biased seal band 1310 to prevent rotation of the annular spring-biased seal band 1310 by providing a sealing force.

[0216] For example, the radially inner surface 1308 of the annular spring-biased seal band 1310 contacts the radially outer surface 218 of the upper body portion 152 of the base plate 110, the upper surface of the annular spring-biased seal band 1310 contacts the surface 238 of the upper plate 112, and the lower surface of the protrusion 1314 contacts the surface 236 of the base plate 110. The annular spring-biased seal band 1310 is configured to flex or deform during installation and bias its opposite ends against the surface 238 of the upper plate 112 and the surface 236 of the base plate 110, respectively, to form a plasma seal.

[0217] The O-ring seal 1330 is disposed in a pocket area of ​​the annular spring-loaded seal band 1310 between the lower surface 1316 of the annular body of the annular spring-loaded seal band 1310 and the surface 236 of the base plate 110, and between the protrusion 1314 of the annular spring-loaded seal band 1310 and the radially outer surface 218 of the upper body portion 152 of the base plate 110.

[0218] In some examples, the annular spring-biased seal band 1310 is rotated slightly clockwise during installation to apply pressure to the sealing location of the annular spring-biased seal band 1310 and / or the O-ring seal 1330. In some examples, various portions of the annular spring-biased seal band 1310 may provide a vacuum seal or redundant seal to protect the adhesive layer 114 and the O-ring seal 1330. In some examples, the O-ring seal 1330 may be formed of PFA or PTFE (e.g., an elastomer) or may include an outer coating of PFA or PTFE (e.g., an elastomer).

[0219] The protrusions 1314 define a pocket area around the O-ring seal 1330. The pocket area is sized to allow sufficient room for the O-ring seal 1330 to be positioned within while biasing the O-ring seal 1330 inward. In other words, the protrusions 1314 of the annular spring-biased seal band 1310 limit movement of the O-ring seal 1330. The protrusions 1314 and lower surface 1316 provide a sealing surface that is parallel to and biased toward the lower surface 236 of the base plate 110 and have sufficient rigidity to reduce the likelihood of plasma passing through the annular spring-biased seal band 1310 and entering the pocket area.

[0220] The protrusion 1314 has a radial thickness that is wide enough to provide the necessary mechanical rigidity and support (thereby reducing the possibility of plasma entering the pocket region) for the annular spring-loaded seal band 1310. While FIG. 27A shows the protrusion 1314 as including a neck portion that protrudes from the lower surface 1316, in other examples, the protrusion 1314 may have other shapes, such as a continuous surface extension of the outer surface 1312 of the annular body of the annular spring-loaded seal band 1310.

[0221] In some examples, the annular body of the annular spring-loaded seal band 1310 has a width d35 when uncompressed, the protrusion 1314 has a length d33 from the lower surface 1316 to the end of the protrusion 1314 when the protrusion 1314 is uncompressed, and the O-ring seal 1330 has a diameter d34.

[0222] In some examples, d33 is within a range of 50% of d34 to 95% of d34, which allows the annular spring-biased seal band 1310 to exert compression on the O-ring seal 1330 when the annular spring-biased seal band 1310 and the O-ring seal 1330 are installed. In some examples, d34 is less than or equal to 125% of d35, which allows the O-ring seal 1330 to exert pressure against the annular spring-biased seal when the annular spring-biased seal band 1310 and the O-ring seal 1330 are installed, thereby maintaining the sealing function of the surface of the annular spring-biased seal band 1310.

[0223] The additional protection provided by the seal cover band allows for an extended seal life so that seal defects do not inhibit MTBC for applications such as conductor etch (CE). Instead of replacing the seal at every MTBC period, the seal can be used for several MTBC periods in many dielectric etch (DE) applications where seal erosion is minimal. This change translates into reduced costs and increased tool productivity.

[0224] The seal cover band also provides additional mechanical support to seals made of softer materials, mitigating the risk of buckling. This allows for the use of seals with higher aspect ratios (corresponding to the seal height divided by the seal thickness). Higher aspect ratio seals are necessary for ESCs used in some applications, such as next-generation DEs.

[0225] Figure 27B is a top view of the annular spring-biased seal band 1310 of Figure 27A. As shown in Figure 27B, the annular spring-biased seal band 1310 may have a generally circular shape. The inner diameter of the annular spring-biased seal band 1310 may correspond to, for example, the radially outer surface 218 of the upper body portion 152 of the base plate 110.

[0226] In some example embodiments, the inner diameter of the annular spring-biased seal band 1310 may be slightly smaller than the diameter of the radially outer surface 218 to allow the annular spring-biased seal band 1310 to stretch and stay in place around the upper body portion 152. Figure 27C is a side cross-sectional view of the annular spring-biased seal band 1310 at EE in Figure 27B.

[0227] Figures 3-18 show various spring / bending mechanisms for the seal and cover band in straightforward representation, while Figures 19-21 and 25-27 show embodiments of spring / bending mechanisms included or integrated into example seals and cover bands.

[0228] The foregoing description is merely exemplary in nature and is not intended to limit the disclosure, its applications, or uses. The broad teachings of the present disclosure may be embodied in a variety of forms. Accordingly, while the present disclosure includes specific examples, the true scope of the disclosure is not limited to those examples, as other variations will become apparent from a study of the drawings, the specification, and the following claims. It should be understood that one or more steps within a method may be performed in a different order (or simultaneously) without altering the principles of the present disclosure. Furthermore, although each embodiment is described as having particular features, any one or more of the features described with respect to any embodiment of the present disclosure can be implemented in any of the other embodiments and / or combined with any of the features of the other embodiments, even if the combination is not expressly described. In other words, the above-described embodiments are not mutually exclusive, and substituting one or more embodiments for one another is within the scope of the present disclosure.

[0229] Spatial and functional relationships between elements (e.g., between modules, circuit elements, semiconductor layers) are described using various terms, such as "connected," "engaged," "coupled," "adjacent," "adjacent," "on top of," "above," "below," and "disposed." When describing a relationship between first and second elements in this disclosure, unless expressly stated as "direct," the relationship may be a direct relationship where no other intervening elements exist between the first and second elements, or an indirect relationship where one or more intervening elements exist (spatially or functionally) between the first and second elements. As used herein, the phrase "at least one of A, B, and C" should be interpreted to mean the logical (A or B or C) using a non-exclusive logical OR, and not to mean "at least one of A, at least one of B, and at least one of C."

Claims

1. 1. A substrate support for a substrate processing system, comprising: a base plate having an upper body portion and a lower body portion; Plate and an adhesive layer for adhering the plate to the base plate; a seal including a first annular body disposed around a radially outer edge of the upper body portion of the base plate and the adhesive layer and between a lower surface of the plate and an upper surface of the lower body portion of the base plate; a spring biased seal cover band having a second annular body; Equipped with the spring-loaded seal cover band is disposed around the seal between the lower surface of the plate and the upper surface of the lower body portion of the base plate; the spring-biased seal cover band has a first length greater than a second length defined between the lower surface of the plate and the upper surface of the lower body portion of the base plate; a portion of the spring-biased seal cover band configured to flex when installed to bias the spring-biased seal cover band toward the upper surface of the lower body portion of the base plate and the lower surface of the plate.

2. The substrate support of claim 1 , wherein the second annular body comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

3. 2. The substrate support of claim 1, wherein the first length is within a predetermined range from 1.02 times the second length to 1.2 times the second length.

4. 2. The substrate support of claim 1, wherein the second annular body comprises: a first body portion; Neck and an annular arm extending from the first body portion; Equipped with The substrate support, wherein the neck is disposed between the annular arm and the first body portion.

5. 5. The substrate support of claim 4, wherein the annular arm extends from the first body portion at an angle in the range of 105 degrees to 165 degrees.

6. 5. The substrate support of claim 4, wherein the annular arm extends from the first body portion at an angle in the range of 125 degrees to 155 degrees.

7. 5. The substrate support of claim 4, wherein the annular arm has a length in the range of 5% to 50% of the first length.

8. 5. The substrate support of claim 4, wherein the annular arm has a length in the range of 5% to 30% of the first length.

9. 10. The substrate support of claim 1, wherein the spring-loaded seal cover band comprises an annular inner member and an outer layer disposed on the annular inner member, the outer layer comprising a plasma-resistant material.

10. The substrate support of claim 9 , wherein the annular inner member comprises a spring metal.

11. 10. The substrate support of claim 9, wherein the outer layer is selected from the group consisting of perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), and ceramic.

12. 5. The substrate support of claim 4, the first body portion is disposed on the annular arm; The substrate support, wherein the annular arms extend radially outward when positioned around the seal.

13. 5. The substrate support of claim 4, the first body portion is disposed below the annular arm; The substrate support, wherein the annular arms extend radially inward when positioned around the seal.

14. 5. The substrate support of claim 4, the first body portion is disposed below the annular arm; The substrate support, wherein the annular arms extend radially outward when positioned around the seal.

15. 2. The substrate support of claim 1, wherein the second annular body comprises: an intermediate body portion; a first annular arm extending from a first end of the intermediate body portion; a second annular arm extending from a second end of the intermediate body portion; A substrate support comprising:

16. 16. The substrate support of claim 15, wherein the first annular arm and the second annular arm extend radially outward when positioned around the seal.

17. 16. The substrate support of claim 15, wherein the first annular arm and the second annular arm extend radially inward when positioned around the seal.

18. 2. The substrate support of claim 1, wherein the second annular body comprises: a first body portion; a first annular arm extending radially outward from a first end of the first body portion; a second annular arm extending radially inward from the first end of the first body portion; A substrate support comprising:

19. 2. The substrate support of claim 1, wherein the second annular body comprises: a first body portion; a second body portion; and a "V" shaped portion disposed between the first body portion and the second body portion; A substrate support comprising:

20. 20. The substrate support of claim 19, wherein the "V" shaped cavity comprises: radially outward when positioned around the seal; and a radially inward direction when positioned around the seal.

21. 2. The substrate support of claim 1, wherein the second annular body comprises: a first body portion; a second body portion; and a third body portion; and a first "V" shaped portion disposed between the first body portion and the second body portion; a second "V" shaped portion disposed between the first body portion and the second body portion; A substrate support comprising:

22. The substrate support of claim 4 , wherein the seal facing surface of the first body portion is “V” shaped.

23. The substrate support of claim 4 , wherein the seal facing surface of the first body portion is “D” shaped.

24. 2. The substrate support of claim 1, wherein the second annular body comprises: a first body portion; an annular arm extending from the first body portion; a "V" shaped cavity disposed on a radially outer surface of said first body portion between said first body portion and said annular arm; A substrate support comprising:

25. 25. The substrate support of claim 24, wherein the center of the "V" shaped cavity is located in the range of 5% to 50% of the length of the spring-loaded seal cover band.

26. 25. The substrate support of claim 24, wherein the center of the "V" shaped cavity is located in a range of 5% to 30% of the axial length of the spring-loaded seal cover band.

27. 25. The substrate support of claim 24, wherein sides of the "V" shaped cavity form first and second predetermined angles with respect to a center of the "V" shaped cavity, the first and second predetermined angles being in the range of 25° to 55°.

28. 28. The substrate support of claim 27, wherein the first predetermined angle is different from the second predetermined angle.

29. 1. A substrate support for a substrate processing system, comprising: a base plate having an upper body portion and a lower body portion; Plate and an adhesive layer for adhering the plate to the base plate; a spring-biased seal band having a second annular body; Equipped with the spring-loaded seal band is disposed around the base plate between a lower surface of the plate and an upper surface of the lower body portion of the base plate; the spring-loaded seal band has a first length greater than a second length defined between the upper surface of the lower body portion of the base plate and the lower surface of the plate; A substrate support, wherein a portion of the spring-biased seal band flexes when installed to bias the spring-biased seal band toward the upper surface of the lower body portion of the base plate and the lower surface of the plate.

30. 1. A spring-loaded seal band for protecting an adhesive layer of a substrate support, comprising: the spring-biased sealing band comprises an annular body having a first length when in an uncompressed state; The annular body comprises: a first annular body portion; an annular arm; a flexible neck portion connecting the first annular body portion and the annular arm; Equipped with the spring-loaded seal band is configured to encircle the substrate support between a lower surface of a top plate and an upper surface of a base plate, the lower surface of the top plate and the upper surface of the base plate being separated by a second length; the first length is greater than the second length; the flexible neck portion is configured to bend when the spring-biased seal band is in an installed, compressed state and biased toward the upper surface of the base plate and the lower surface of the top plate, and the first length is shortened when the spring-biased seal band is in the installed, compressed state.

31. 31. The spring biased seal band of claim 30, wherein the annular body comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

32. 31. The spring biased seal band of claim 30, wherein the first length is between 1.02 and 1.2 times the second length in the uncompressed state.

33. 31. The spring biased seal band of claim 30, wherein said annular arms extend from said first annular body portion at an angle ranging from 105 degrees to 165 degrees when in said uncompressed state.

34. 31. The spring biased seal band of claim 30, wherein said annular arms extend from said first annular body portion at an angle of between 125° and 155° when uncompressed.

35. 31. The spring biased seal band of claim 30, wherein the annular arm has a length in the range of 5% to 50% of the first length.

36. 31. The spring biased seal band of claim 30, wherein the annular arm has a length in the range of 5% to 30% of the first length.

37. 31. The spring biased seal band of claim 30, the spring-biased seal band comprises an annular inner member and an outer layer on the annular inner member; A spring-loaded seal band, wherein the outer layer comprises a plasma resistant material.

38. 38. The spring biased seal band of claim 37, the annular inner member comprises a spring metal; A spring-loaded seal band, wherein the outer layer is selected from the group consisting of perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), and ceramic.

39. 31. The spring biased seal band of claim 30, wherein the seal facing surface of said first annular body portion has a shape selected from the group consisting of a "V" shape and a "D" shape.

40. 34. The spring biased seal band of claim 33, wherein the angle decreases in the range of 1 to 25 degrees when in the installed compressed state.

41. 34. The spring biased seal band of claim 33, wherein the angle decreases in the range of 3 degrees to 15 degrees when in the installed compressed state.

42. 1. A spring-loaded seal band for protecting an adhesive layer of a substrate support, comprising: the spring-biased seal band comprises an annular body having a first length when in an uncompressed state; The annular body comprises: a first annular body portion; an annular arm; a "V" shaped cavity between said first annular body portion and said annular arm; Equipped with the spring-loaded seal band is configured to encircle the substrate support between a lower surface of a plate and an upper surface of a base plate, the lower surface of the plate and the upper surface of the base plate being separated by a second length; the first length is greater than the second length; At least one of the first annular body portion and the annular arm of the spring-biased seal band is configured to bend in an installed compressed state to bias the spring-biased seal band toward the upper surface of the base plate and the lower surface of the plate, and the first length is shortened when the spring-biased seal band is in the installed compressed state.

43. 43. The spring biased seal band of claim 42, wherein the annular body comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

44. 43. The spring biased seal band of claim 42, wherein the first length is within a predetermined range of 1.02 to 1.2 times the second length.

45. 43. The spring-loaded seal band of claim 42, wherein the center of the "V" shaped cavity is located in the range of 5% to 50% of the length of the spring-loaded seal band.

46. 43. The spring-loaded seal band of claim 42, wherein the center of the "V" shaped cavity is located in the range of 5% to 30% of the length of the spring-loaded seal band.

47. 43. The spring-biased seal band of claim 42, wherein sides of the "V" shaped cavity form a first angle and a second angle with respect to a center of the "V" shaped cavity, the first angle and the second angle being within a range of 25 degrees to 55 degrees.

48. 43. The spring biased seal band of claim 42, wherein the annular arm has a length in the range of 5% to 50% of the first length.

49. 43. The spring biased seal band of claim 42, wherein the annular arm has a length in the range of 5% to 30% of the first length.

50. 43. The spring biased seal band of claim 42, the spring-biased seal cover band comprises an annular inner member and an outer layer on the annular inner member, the outer layer comprising a plasma resistant material; the annular inner member comprises a spring metal; A spring-loaded seal band, wherein the outer layer is selected from the group consisting of perfluoroalkoxyalkane (PFA), polytetrafluoroethylene (PTFE), and ceramic.

51. 43. The spring biased seal band of claim 42, wherein the seal facing surface of said first annular body portion has a shape selected from the group consisting of a "V" shape and a "D" shape.

52. 48. The spring-biased seal band of claim 47, wherein the sum of the first angle and the second angle decreases in the range of 1° to 25° when in the installed compressed state.

53. 48. The spring-biased seal band of claim 47, wherein the sum of the first angle and the second angle decreases in the range of 3° to 15° when in the installed compressed state.

54. 1. A substrate support for a substrate processing system, comprising: a base plate having an upper body portion and a lower body portion; Plate and an adhesive layer for adhering the plate to the base plate; a spring-biased seal including a first annular body disposed around a radially outer edge of the upper body portion of the base plate and the adhesive layer and between a lower surface of the plate and an upper surface of the lower body portion of the base plate; a seal cover band having a second annular body; Equipped with the seal cover band is disposed around the spring-loaded seal between the lower surface of the plate and the upper surface of the lower body portion of the base plate; 1. A substrate support comprising: a first spring configured to flex when installed to bias a first arm of the spring-loaded seal toward the lower surface of the plate; and a second spring configured to flex when installed to bias a second arm of the spring-loaded seal toward the upper surface of the lower body portion of the base plate.

55. 55. The substrate support of claim 54, wherein the spring-loaded seal has a first length that is greater than a second length defined between the lower surface of the plate and the upper surface of the lower body portion of the base plate.

56. 56. The substrate support of claim 55, wherein the sealing cover band comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

57. 56. The substrate support of claim 55, the first spring has a length in the range of 5% to 40% of the first length; The substrate support, wherein the second spring has a length in the range of 5% to 40% of the first length.

58. 58. The substrate support of claim 57, wherein the first annular body has a length in the range of 10% to 80% of the first length.

59. 59. The substrate support of claim 58, the first arm has a surface having a length in the range of 5% to 40% of the first length; The second arm comprises a surface having a length in the range of 5% to 40% of the first length.

60. 55. The substrate support of claim 54, the first annular body has a first thickness; the first spring has a thickness in the range of 10% to 90% of the first thickness; The substrate support, wherein the second spring has a thickness in the range of 10% to 90% of the first thickness.

61. 55. The substrate support of claim 54, wherein the sealing cover band comprises: a first protrusion defined between the second annular body and a first extension of the seal cover band, the first protrusion being adjacent to the first spring of the spring-loaded seal when installed; a second protrusion defined between the second annular body and the second extension of the seal cover band, the second protrusion being adjacent to the second spring of the spring-loaded seal when installed; and A substrate support comprising:

62. 1. A substrate support for a substrate processing system, comprising: a base plate having an upper body portion and a lower body portion; Plate and an adhesive layer for adhering the plate to the base plate; a spring-loaded seal including an annular body disposed around a radially outer edge of the upper body portion of the base plate and the adhesive layer and between a lower surface of the plate and an upper surface of the lower body portion of the base plate; Equipped with the spring-loaded seal comprises a curved arm extending from a bottom surface of the annular body, the curved arm configured to bend when installed to bias an upper surface of the spring-loaded seal toward the lower surface of the plate.

63. 63. The substrate support of claim 62, wherein the spring-loaded seal has a first length that is greater than a second length defined between the lower surface of the plate and the upper surface of the lower body portion of the base plate.

64. 64. The substrate support of claim 63, wherein the spring-loaded seal comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

65. 64. The substrate support of claim 63, wherein the height of the annular body is in the range of 10% to 90% of the first length.

66. 63. The substrate support of claim 62, the annular body has a first width; The substrate support, wherein the width of the curved arm is in the range of 5% to 50% of the first width.

67. 63. The substrate support of claim 62, wherein the curved arm has a curvature of at least 90 degrees.

68. 1. A substrate support for a substrate processing system, comprising: a base plate having an upper body portion and a lower body portion; Plate and an adhesive layer for adhering the plate to the base plate; a spring-loaded seal including an annular body disposed around a radially outer edge of the upper body portion of the base plate and the adhesive layer and between a lower surface of the plate and an upper surface of the lower body portion of the base plate; an O-ring seal; Equipped with the spring-loaded seal includes arms extending from a lower surface of the annular body to define a pocket area between the lower surface of the annular body, the upper surface of the lower body portion of the base plate, and a radially outer surface of the upper body portion of the base plate; the O-ring seal is in the pocket area; The substrate support, wherein the arms of the spring-loaded seal are configured to flex when installed to urge an upper surface of the annular body toward the lower surface of the plate.

69. 69. The substrate support of claim 68, wherein the spring-loaded seal has a first length that is greater than a second length defined between the lower surface of the plate and the upper surface of the lower body portion of the base plate.

70. 69. The substrate support of claim 68, wherein the spring-loaded seal comprises a material selected from the group consisting of perfluoroalkoxyalkane (PFA) and polytetrafluoroethylene (PTFE).

71. 69. The substrate support of claim 68, wherein the arms of the spring-loaded seal have a length in the range of 50% to 95% of the diameter of the O-ring seal.

72. 72. The substrate support of claim 71, the annular body has a first width; The substrate support, wherein the diameter of the O-ring seal is less than or equal to 125% of the first width.

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