Primary shield plate, secondary shield plate and shield package

Abstract

The present invention relates to a primary shield plate, a secondary shield plate, and a shield package, and the primary shield plate according to the present invention is characterized in that it includes a cooling unit provided inside a chamber unit, having a first opening formed in a direction facing a deposition target, and cooling the primary shield plate with a fluid injected from the outside, and a shield unit provided inside the chamber unit, coupled to the cooling unit, and preventing deposition material from being deposited in a direction away from the deposition target.

Description

[Technical Field]

[0001] The present invention relates to a primary shield plate, a secondary shield plate, and a shield package, and more particularly to a primary shield plate, a secondary shield plate, and a shield package that prevent deposition material from being deposited on a chamber part in a direction away from a deposition target and facilitate replacement of the shield plate part. [Background technology]

[0002] Generally, vapor deposition is the process of heating and evaporating metals or compounds in a vacuum to form a thin film on the surface of an object. Vacuum vapor deposition involves placing the object and evaporation source in a chamber, and heating and vaporizing the evaporation source to form a thin film on the surface of the object.

[0003] The background art of the present invention is disclosed in Korean Patent Publication No. 10-2023-0102455 (published on July 7, 2023, title: Deposition Equipment Maintenance System). Summary of the Invention [Problem to be solved by the invention]

[0004] An object of the present invention is to provide a primary shield plate, a secondary shield plate, and a shield package that protects a chamber portion and facilitates replacement of the shield plates. [Means for solving the problem]

[0005] The primary shield plate according to the present invention includes a cooling unit that is provided inside the chamber unit, has a first opening formed in a direction facing the deposition target, and cools the primary shield plate with a fluid injected from the outside, and a shield unit that is provided inside the chamber unit, is coupled to the cooling unit, and prevents the deposition material from being deposited in a direction away from the deposition target.

[0006] The cooling unit may include an upper plate portion disposed in a direction facing the deposition target, having the first opening formed therein, through which the deposition material passes to be deposited on the deposition target or which blocks the deposition material, and a vertical portion supporting the upper plate portion and allowing the upper plate portion to be cooled by the fluid.

[0007] The upper plate portion may include an upper plate, a fluid injection portion coupled to one end of the upper plate and through which the fluid is injected into the upper plate, a plurality of flow path portions formed inside the upper plate and allowing the injected fluid to move into the upper plate, and a fluid discharge portion allowing the fluid moved through the flow path portions to be discharged outside the upper plate.

[0008] The upper plate portion may further include a flow path guide portion that moves the path of the flow path portion in one direction, and a discharge prevention portion that is formed at an end of the upper plate and prevents the fluid from being discharged outside the upper plate.

[0009] The vertical portion may include a pipe portion coupled to the upper plate and supporting the upper plate, a pipe fluid injection portion formed at one end of the pipe portion and allowing the fluid to be injected into the pipe portion, a pipe flow path portion formed inside the pipe portion and allowing the injected fluid to move into the pipe portion, and a pipe fluid discharge portion allowing the fluid moved through the pipe flow path portion to be discharged outside the pipe portion.

[0010] The deposition chamber may further include a lower plate disposed opposite the upper plate and having a second opening formed therein so that the deposition material can be discharged through the second opening.

[0011] The shielding unit may include a shielding plate frame unit coupled to the cooling unit, and a shielding plate unit detachably attached to the shielding plate frame unit.

[0012] The secondary shield plate according to the present invention includes a chamber portion, a shield plate portion arranged in a direction facing the chamber portion, a fixing portion arranged in front of the chamber portion and to which the shield plate portion is coupled, and a fastening portion fastening the fixing portion and the chamber portion.

[0013] The fixing portion may include a separation portion attached to a front surface of the chamber portion and separating the shield plate portion from the chamber portion, a connection portion formed narrower than the separation portion and to which the shield plate portion is connected, and an additional portion formed narrower than the connection portion and to which an insertion member is connected.

[0014] The shielding plate may further include an insert member coupled to the fixing portion to prevent the shielding plate from coming off.

[0015] The insert member may include a fastening coupling portion formed to fit around the fastening portion, a stepped portion formed wider than the width of the fastening coupling portion, and a joint portion at which the insert member is fixed to the coupling portion.

[0016] The shielding package according to the present invention includes a chamber unit; a cooling unit provided inside the chamber unit, having a first opening formed in a direction facing a deposition target, and cooling a primary shielding plate with a fluid injected from the outside; a primary shielding plate provided inside the chamber unit, coupled to the cooling unit, and including a shielding unit that prevents deposition material from being deposited in a direction away from the deposition target; a shielding plate unit disposed facing the chamber unit; and a secondary shielding plate disposed in front of the chamber unit, including a fixing unit to which the shielding plate unit is connected and a fastening unit that fastens the fixing unit to the chamber unit. [Effects of the Invention]

[0017] The primary shield plate according to the present invention can protect the chamber by preventing deposition from occurring in directions other than the location of the deposition target in the chamber by quickly cooling the primary shield plate using the cooling unit.

[0018] The primary shield plate according to the present invention allows deposition only on the deposition target by the upper plate portion, and the direction where there is no deposition target is quickly cooled by the fluid to prevent deposition.

[0019] The primary shield plate according to the present invention can cool a wider area of ​​the primary shield plate by using the vertical portion that supports the upper plate portion, compared to a case where only the upper plate portion is provided.

[0020] The primary shield plate according to the present invention can allow the deposition material to be quickly cooled on the front surface of the upper plate portion by the plurality of flow passages.

[0021] The secondary shield plate according to the present invention can facilitate the separation of the chamber section and the shield plate section by the fixing section, facilitating replacement of the shield plate section and facilitating maintenance of the chamber section.

[0022] The secondary shield plate according to the present invention can prevent the shield plate portion from being separated from the fixing portion by the insert member, and the shield plate portion can stably prevent the deposition material from being deposited on the chamber portion. [Brief explanation of the drawings]

[0023] [Figure 1] 1 is a perspective view schematically illustrating a configuration of a primary shield plate according to an embodiment of the present invention.

[0024] [Figure 2] FIG. 2 is a perspective view showing a schematic configuration of a cooling unit according to an embodiment of the present invention.

[0025] [Figure 3] FIG. 2 is a cross-sectional view schematically illustrating a configuration of an upper plate according to an embodiment of the present invention.

[0026] [Figure 4] FIG. 2 is a perspective view schematically illustrating a configuration of a vertical section according to an embodiment of the present invention.

[0027] [Figure 5] FIG. 2 is a perspective view showing a schematic configuration of a shield section according to an embodiment of the present invention.

[0028] [Figure 6] FIG. 2 is a front view schematically illustrating the configuration of a secondary shield plate according to an embodiment of the present invention.

[0029] [Figure 7] 1 is a side view schematically illustrating an example of a secondary shield plate in a chamber section according to an embodiment of the present invention.

[0030] [Figure 8] FIG. 2 is a perspective view showing a schematic configuration of a fixing portion according to an embodiment of the present invention.

[0031] [Figure 9a] 1 is a perspective view schematically illustrating a front view of an insert member according to an embodiment of the present invention. [Figure 9b] 1 is a perspective view showing a schematic rear view of an insert member according to an embodiment of the present invention; FIG. DETAILED DESCRIPTION OF THE INVENTION

[0032] Hereinafter, embodiments of a primary shield plate, a secondary shield plate, and a shield package according to the present invention will be described with reference to the accompanying drawings.

[0033] In this process, the thickness of lines and the size of components shown in the drawings may be exaggerated for clarity and convenience of explanation. The terms described below are defined in consideration of the functions in the present invention, and may vary depending on the intentions or practices of users and operators. Therefore, the definitions of such terms should be based on the overall content of this specification.

[0034] In this specification, when a part is said to be "coupled (or connected)" to another part, this includes not only the case where it is "directly coupled (or connected)" but also the case where it is "indirectly coupled (or connected)" with another member interposed therebetween. In this specification, when a part is said to "include (or comprise)" some component, this does not mean that it excludes other components, but that it may further "include (or comprise)" other components, unless otherwise specified.

[0035] The same reference numerals may refer to the same elements throughout this specification. Even if the same or similar reference numerals are not mentioned or described in a particular drawing, the numerals may be described with reference to other drawings. Even if a part in a particular drawing does not have a reference numeral, the part may be described with reference to other drawings. The number, shape, size, and relative differences in size of detailed elements included in the drawings of this application are set for ease of understanding and do not limit the embodiments, and may be embodied in various forms.

[0036] 1 is a perspective view showing a schematic configuration of a primary shield plate according to an embodiment of the present invention. Referring to FIG. 1, the primary shield plate according to this embodiment includes a cooling part 200 and a shield part 300.

[0037] The primary shield plate is a device for primarily preventing deposition material b from being deposited on a portion of the chamber part 100 where there is no deposition target a, which will be described later.

[0038] The chamber unit 100 is equipment having a certain space inside where a deposition process is performed. The chamber unit 100 may be any deposition equipment that performs a deposition process. The chamber unit 100 may be provided with a space containing a deposition target a, i.e., an object on whose surface a deposition material is deposited during the deposition process, and a deposition material b. The chamber unit 100 may perform a process of depositing deposition material b on the deposition target a.

[0039] The cooling unit 200 is installed inside the chamber unit 100 and cools the primary shield plate using a fluid injected from the outside. The cooling unit 200 quickly cools the primary shield plate, preventing deposition of the deposition target in the chamber unit from occurring in a direction other than the intended location, thereby protecting the chamber unit.

[0040] 2 is a perspective view illustrating a cooling unit according to an embodiment of the present invention, in which a cooling unit 200 may include an upper plate portion 210 and a vertical portion 220.

[0041] The upper plate 210 is disposed facing the deposition target a, and has a first opening c formed therein so that the deposition material b can be deposited on the deposition target a. The deposition material b is vaporized and passes through the first opening c of the upper plate 210, and can reach and be deposited on the deposition target a disposed facing the upper plate 210.

[0042] 3 is a cross-sectional view illustrating a configuration of an upper plate according to an embodiment of the present invention. Referring to FIG. 3, the upper plate unit 210 may include an upper plate 211, a fluid inlet unit 212, a fluid channel unit 213, and a fluid outlet unit 214.

[0043] The upper plate 211 constitutes the outer shape of the upper plate part 210, and has a first opening c formed therein so that the deposition material b can pass through to the deposition target a. The upper plate 211 can be made of various materials.

[0044] The fluid injector 212 is coupled to one end of the upper plate 211 and allows fluid to be injected into the upper plate 211. The fluid injected into the fluid injector 212 may be any fluid that cools the upper plate 211. The fluid injector 212 may be configured as a valve, but is not limited to this and may be modified into various other embodiments.

[0045] The flow path unit 213 is formed inside the upper plate 211 and allows the fluid injected from the fluid injection unit 212 to move into the upper plate 211. A plurality of flow path units 213 may be provided in the upper plate 211. A fluid for lowering the temperature of the upper plate 211 is injected from the fluid injection unit 212 into the upper plate 211, and passes through the upper plate 211 via the flow path unit 213, thereby lowering the temperature of the entire upper plate 211. The upper plate 211, whose temperature has been lowered by the fluid, can cool the deposition material b into a solid when the deposition material b comes into contact with the upper plate 211.

[0046] The fluid discharge part 214 may allow the fluid transferred through the flow path part 213 to be discharged to the outside of the upper plate 211. The fluid discharge part 214 may be configured as a valve, but is not limited thereto and may be modified into various embodiments. In FIG. 3, the fluid discharge part 214 is illustrated as being located corresponding to the fluid inlet part 212, but is not limited thereto and may be located in various positions.

[0047] The upper plate portion 210 may further include a flow path guide portion 215 and a discharge prevention portion 216 .

[0048] The flow path guide 215 allows the path of the flow path unit 213 to move in one direction. The flow path guide 215 is provided inside the upper plate 211 and is disposed between the paths of the flow path unit 213 to prevent intersections between multiple flow paths and allow the path to move in one direction. However, the present invention is not limited thereto, and the flow path guide 215 may be disposed in a position and shape different from that shown in FIG.

[0049] The discharge prevention unit 216 is formed at an end of the upper plate 211 to prevent the fluid from being discharged to the outside of the upper plate 211. A hole is formed at the end of the upper plate 211 during a gun drill process to form the flow path unit 213 inside the upper plate 211. The discharge prevention unit 216 is coupled to the end of the upper plate 211 to prevent the fluid injected through the fluid injection unit 212 from being discharged through the hole formed during the gun drill process, thereby preventing the fluid from being discharged to the outside.

[0050] The vertical portion 220 supports the upper plate portion 210 and allows a fluid to be injected thereinto to cool the upper plate portion 210. The vertical portion 220 is disposed at a position perpendicular to the upper plate portion 210 to support the upper plate portion 210. Although the vertical portion 220 is illustrated as a square pillar in FIG. 2, it is not limited thereto and may be modified into various shapes. Because the vertical portion 220 allows the deposition material b to be cooled in a direction perpendicular to the vertical direction, the primary shield plate can be cooled over a wider area than if only the upper plate portion 210 were provided.

[0051] 4 is a perspective view illustrating a configuration of a vertical unit according to an embodiment of the present invention. Referring to FIG. 4, the vertical unit 220 may include a pipe unit 221, a pipe fluid inlet unit 222, a pipe flow path unit 223, and a pipe fluid outlet unit 224.

[0052] The pipe portion 221 is connected to the upper plate 211 and supports the upper plate 211. A plurality of pipe portions 221 may be connected to the upper plate 211, but the present invention is not limited thereto and various modifications are possible. The pipe portion 221 may be made of various materials capable of supporting the upper plate 211.

[0053] The pipe fluid injector 222 is formed at one end of the pipe portion 221 and allows a fluid to be injected into the pipe portion 221. The fluid injected into the pipe fluid injector 222 may be any fluid that cools the pipe portion 221. The pipe fluid injector 222 may be configured as a valve, but may be modified into various other embodiments.

[0054] The pipe flow path 223 is formed inside the pipe part 221, and allows the fluid injected from the pipe fluid injector 222 to move inside the pipe part 221. A fluid that lowers the temperature of the pipe part 221 is injected from the pipe fluid injector 222 into the pipe flow path 223, and the temperature of the pipe part 221 can be lowered overall through the pipe part 221 via the pipe flow path 223. The pipe part 221, whose temperature is lowered by the fluid, can cool the deposition material b into a liquid or solid when the deposition material b comes into contact with the pipe part 221. Therefore, the deposition material b can also be cooled when it comes into contact with the upper plate part 210 in a direction perpendicular to the upper plate part 210, and the deposition material b can be cooled more quickly over a wider area than when only the upper plate part 210 is provided.

[0055] The pipe fluid discharge part 224 may allow the fluid transferred through the pipe flow path part 223 to be discharged to the outside of the pipe part 221. The pipe fluid discharge part 224 may be formed of a valve, but is not limited thereto and may be formed of other materials. In FIG. 4, the pipe fluid discharge part 224 is illustrated as being at a position that does not correspond to the pipe fluid inlet part 222, but is not limited thereto and may be disposed at various positions.

[0056] FIG. 5 is a perspective view schematically showing the configuration of a shielding section according to an embodiment of the present invention.

[0057] The shield unit 300 is provided inside the chamber unit 100 and coupled to the cooling unit 200 to prevent deposition material b from being deposited in a direction away from the deposition target a. A plurality of shield units 300 may be coupled to a surface other than the upper plate unit 210. The shield units 300 are cooled by the cooling unit 200 and can quickly block the deposition material b.

[0058] Referring to FIG. 5, the shield part 300 includes a shield plate frame part 310 and a shield plate part 320 .

[0059] The shield plate frame part 310 is coupled to the cooling part 200, and is coupled to a shield plate part 320, which will be described later. The shield plate frame part 310 may be made of various materials, and although shown in FIG. 5 as having a rectangular shape, it is not limited thereto and may have various shapes.

[0060] The shield plate unit 320 is detachably attached to the shield plate frame unit 310. The shield plate unit 320 prevents the deposition material b from being deposited in the chamber unit 100 in a direction away from the deposition target a. The shield plate unit 320 is attached to the shield plate frame unit 310 at an angle to prevent the deposition material b from leaking. If a large amount of deposition material b adheres to the shield plate unit 320, the shield plate unit 320 can be separated from the shield plate frame unit 310, the deposition material b attached to the shield plate unit 320 can be removed, and the shield plate unit 320 can be reattached to the shield plate frame unit 310 for reuse.

[0061] Referring to FIG. 5, the primary shield plate may further include a lower plate portion 400 .

[0062] The lower plate 400 is installed facing the upper plate 211 and has a second opening d formed therein, through which the deposition material b is discharged. The lower plate 400 has the second opening d formed therein facing the deposition target a, so that the deposition material b can be deposited in the direction in which the deposition target a is placed, and the absence of the second opening can prevent the deposition material b from being deposited in the direction away from the deposition target a.

[0063] FIG. 6 is a front view schematically showing the configuration of a secondary shield plate according to an embodiment of the present invention, and FIG. 7 is a side view schematically showing an example of a secondary shield plate according to an embodiment of the present invention.

[0064] The secondary shield plate is a device for secondarily preventing deposition material b from being deposited on areas of the chamber part 100 where there is no deposition target a.

[0065] 6 and 7, the chamber part 100 may include a shield plate part 110, a fixing part 120, and a fastening part .

[0066] The shield plate 110 is disposed on the front surface of the chamber 100, i.e., facing the side of the chamber 100 on which the deposition material b is provided, to prevent the deposition material b from being deposited on the chamber 100 where no deposition target a is present. The shield plate 110 may be attached to one surface of the chamber 100 or multiple surfaces of the chamber 100. The shield plate 110 is attached to one or multiple surfaces of the chamber 100 to prevent the deposition material b that has passed through the first opening c of the upper plate 210 from being deposited on the chamber 100 where no deposition target a is present, and to prevent the deposition material b from being deposited on the chamber 100 when the shield 300 is unable to prevent the deposition material b from passing through. An operator can easily perform maintenance on the chamber 100 by replacing the shield plate 110. While the shield plate 110 is illustrated as a rectangular plate in FIG. 6, it is not limited thereto and can be modified into various shapes.

[0067] The fixing part 120 is disposed in front of the chamber part 100, and the shield plate part 110 is coupled thereto to fix the chamber part 100 and the shield plate part 110 at a predetermined distance from each other. The fixing part 120 may be in the form of a number of circles with different diameters as shown in Fig. 8, but is not limited thereto and may be modified into various shapes.

[0068] 8 is a perspective view illustrating a configuration of a fixing part according to an embodiment of the present invention. Referring to FIG. 8, the fixing part 120 may include a separating part 121, a connecting part 122, and an additional part 123.

[0069] The separator 121 is attached to the front surface of the chamber 100 and separates the shield plate 110 from the chamber 100 by a predetermined distance. Because the shield plate 110 and the chamber 100 are separated by the separator 121, the user can easily separate the shield plate 110, which makes it easy to replace the shield plate 110.

[0070] The coupling portion 122 is formed narrower than the width of the separating portion 121 and is the portion to which the shielding plate portion 110 is coupled. Since the coupling portion 122 is formed narrower than the width of the separating portion 121, a space is formed between the separating portion 121 and the coupling portion 122, allowing the shielding plate portion 110 to be easily coupled.

[0071] The additional portion 123 is formed narrower than the width of the coupling portion 122, and a fixing member, i.e., a member that prevents the shield plate 110 from separating, may be coupled to the additional portion 123. The additional portion 123 is formed narrower than the width of the coupling portion 122, and an insert member may be additionally coupled to the additional portion 123, thereby preventing the shield plate 110 from separating from the coupling portion 122. The shape of the additional portion 123 is made circular in Fig. 8, but is not limited thereto and may be modified into various shapes.

[0072] The fastening portion 130 fastens the chamber portion 100 and the fixing portion 120 to prevent the fixing portion 120 from being separated from the chamber portion 100. A hole may be formed in the front surface of the chamber portion 100 and a hole may be formed in the center of the fixing portion 120 to connect the fastening portion 130. The fastening portion 130 passes through the hole between the chamber portion 100 and the fixing portion 120 to prevent the fixing portion 120 from being separated from the chamber portion 100. The fastening portion 130 may be, but is not limited to, a bolt and may be replaced with various other fixing means.

[0073] Figure 9(a) is a perspective view showing a schematic front view of an insert member according to one embodiment of the present invention, and Figure 9(b) is a perspective view showing a schematic rear view of an insert member according to one embodiment of the present invention.

[0074] The insert member 140 is coupled to the fixed part 120 to prevent the shield plate part 110 from coming off. The insert member 140 may be coupled to the additional part 123, but is not limited thereto, and may be coupled to various positions on the fixed part 120.

[0075] Referring to FIG. 9, the insert 140 may include a fastening joint 141, a step 142, and a joint 143.

[0076] The fastening coupling portion 141 is formed to fit around the fastening portion 130, and as shown in FIG. 6, the fastening portion 130 is fixed to fit into the fastening coupling portion 141, thereby preventing the insertion member 140 from coming off.

[0077] The step portion 142 is formed to be wider than the width of the fastening coupling portion, so that the fastening portion 130 can be inserted through the wide step portion 142 to easily couple the fastening portion 130 to the insert member 140. As shown in FIG. 6, the user can first insert the fastening portion 130 into the wide step portion 142 and then firmly secure it with the fastening coupling portion 141.

[0078] The joint portion 143 is formed on the rear surface of the insert member 140 and may have a plurality of protrusions. The joint portion 143 is made of an elastic material, and when the joint portion 143 is coupled to the additional portion 123, the elastic force of the joint portion 143 allows the insert member 140 to be fixed to the fixing portion 120. The joint portion 143 is attached to the shield plate portion 110 to prevent the insert member 140 from slipping.

[0079] While the present invention has been described with reference to the embodiments illustrated in the drawings, this is by way of example only, and those skilled in the art will recognize that various modifications and equivalent alternative embodiments are possible.

[0080] Therefore, the technical scope of protection of the present invention should be defined by the following claims.

Claims

1. a cooling unit provided inside the chamber unit, the cooling unit having a first opening formed in a direction facing the deposition target, and configured to cool the primary shield plate by a fluid injected from the outside; a shield part provided inside the chamber part and coupled to the cooling part, the shield part preventing deposition material from being deposited in a direction away from the deposition target.

2. The cooling unit is an upper plate portion disposed in a direction facing the deposition target, the upper plate portion having the first opening and configured to allow the deposition material to pass through and be deposited on the deposition target or to block the deposition material; The primary shield plate according to claim 1 , further comprising: a vertical portion supporting the upper plate portion and allowing the upper plate portion to be cooled by the fluid.

3. The upper plate portion is An upper plate, a fluid injection unit coupled to one end of the upper plate through which the fluid is injected into the upper plate; a plurality of flow channels formed inside the upper plate to allow the injected fluid to move into the upper plate; The primary shield plate of claim 2 , further comprising: a fluid discharge portion configured to discharge the fluid transferred through the flow path portion to the outside of the upper plate.

4. The upper plate portion is a flow path guide portion that moves the path of the flow path portion in one direction; The primary shield plate of claim 3 , further comprising: a discharge prevention portion formed at an end of the upper plate to prevent the fluid from being discharged outside the upper plate.

5. The vertical portion is a pipe portion coupled to the upper plate and supporting the upper plate; a pipe fluid injection part formed at one end of the pipe part to inject the fluid into the pipe part; a pipe flow path formed inside the pipe portion to allow the injected fluid to move inside the pipe portion; The primary shield plate according to claim 3 , further comprising: a pipe fluid discharge portion configured to discharge the fluid transferred through the pipe flow passage portion to the outside of the pipe portion.

6. 4. The primary shield plate of claim 3, further comprising: a lower plate portion installed in a direction opposite to the upper plate, the lower plate portion having a second opening formed therein, through which the deposition material is discharged.

7. The shield portion is a shield plate frame portion coupled to the cooling portion; The primary shield plate according to claim 1 , further comprising: a shield plate portion detachably attached to the shield plate frame portion.

8. A chamber portion; a shield plate portion disposed in a direction facing the chamber portion; a fixing portion disposed in front of the chamber portion and to which the shield plate portion is coupled; A secondary shield plate comprising: a fastening portion for fastening the fixing portion and the chamber portion.

9. The fixing portion is a spacing portion attached to a front surface of the chamber portion and spacing the shield plate portion from the chamber portion; a coupling portion formed narrower than the separating portion and to which the shield plate portion is coupled; 9. The secondary shield plate according to claim 8, further comprising: an additional portion formed narrower than the width of the coupling portion and to which an insert member is coupled.

10. The secondary shield plate according to claim 8, further comprising an insert member coupled to the fixing portion to prevent the shield plate portion from being separated.

11. The insert member is a fastening coupling formed to fit around the fastening portion; a step portion formed wider than the width of the fastening coupling portion; The secondary shield plate according to claim 10, further comprising a joint portion at which the insert member is fixed to the coupling portion.

12. A chamber portion; a cooling unit provided inside the chamber unit, the cooling unit having a first opening facing the deposition target, and configured to cool the primary shield plate by a fluid injected from the outside; a primary shield plate including a shield part that is provided inside the chamber part and coupled to the cooling part, and that prevents deposition material from being deposited in a direction away from the deposition target; a shield plate portion disposed in a direction facing the chamber portion; a fixing portion disposed in front of the chamber portion and to which the shield plate portion is coupled; a secondary shield plate including a fastening portion that fastens the fixing portion and the chamber portion.

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