Contact intermediate product and method of cutting contact intermediate product

Abstract

To provide a contact intermediate product capable of easily peeling a contact from a substrate without damaging the contact, and a method for manufacturing the contact intermediate product.SOLUTION: A contact intermediate product according to the present invention includes: a linear contact; and a rectangular tab to which one end portion of the contact is connected, wherein the tab has a rectangular main body portion to which the contact is connected and a tongue piece portion protruding from the main body portion. A method of manufacturing a contactor intermediate product according to the present invention includes bringing a stopper for peeling into contact with one end of a tab, moving the tab to a side where the stopper for peeling is brought into contact, rotating the tab with a contact point between the stopper for peeling and the tab as a fulcrum, cutting a fixed tab fixed on a substrate by a force generated by the rotation of the tab, and separating the tab and the fixed tab.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a contact intermediate product and a method for cutting the contact intermediate product. [Background technology]

[0002] The probes are fabricated on the substrate using MEMS (Micro Electro Mechanical System) technology. The probes fabricated using MEMS technology are formed on the substrate and connected to tabs.

[0003] Patent Document 1 describes a vertical probe that has been peeled off from a substrate. The probe is peeled off from the substrate either manually or mechanically by using a dedicated gripping device to separate the probe from the substrate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2014-16205 Summary of the Invention [Problem to be solved by the invention]

[0005] However, as in the conventional method, a relatively strong force is applied when peeling the probe from the substrate, which causes a problem that the probe may be damaged or broken.

[0006] Therefore, in view of the above-mentioned problems, the present invention aims to provide a contact intermediate product and a method for cutting the contact intermediate product that can easily peel the contact from the substrate without damaging the contact. [Means for solving the problem]

[0007] In order to solve such problems, the first contact intermediate product of the present invention comprises (1) a linear contact and (2) a rectangular tab to which one end of the contact is connected, and (3) the tab has a rectangular main body portion to which the contact is connected and a tongue portion protruding from the main body portion.

[0008] The second method for manufacturing a contact intermediate product according to the present invention is a method for manufacturing a contact intermediate product, which comprises a linear contact and a rectangular tab to which one end of the contact is connected, and which peels the contact intermediate product from a substrate, and is characterized in that a peel stopper is brought into contact with one end of the tab, the tab is moved toward the side where the peel stopper is brought into contact, the tab rotates around the contact point between the peel stopper and the tab as a fulcrum, and the fixing tab fixed to the substrate is cut by the force generated by the rotation of the tab, thereby separating the tab from the fixing tab. [Effects of the Invention]

[0009] According to the present invention, the contacts can be easily peeled off from the substrate without being damaged. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a diagram showing the configuration of a contact intermediate product on a substrate according to an embodiment; [Figure 2] FIG. 2 is a diagram illustrating a configuration of a contact intermediate product according to an embodiment. [Figure 3] 1A to 1C are explanatory views for explaining a method for peeling off a contact intermediate product according to an embodiment (part 1). [Figure 4] 10 is an explanatory view for explaining the method for peeling off the intermediate contact product according to the embodiment (part 2). FIG. [Figure 5] 10 is an explanatory diagram (part 3) for explaining the peeling method of the intermediate contact product according to the embodiment. FIG. [Figure 6] 10A and 10B are diagrams showing the configuration of a contact intermediate product according to a modified embodiment; DETAILED DESCRIPTION OF THE INVENTION

[0011] (A) Main embodiment DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of a contact intermediate product and a method for cutting the contact intermediate product according to the present invention will be described in detail with reference to the drawings.

[0012] (A-1) Overview For example, in order to check whether each of a plurality of semiconductor integrated circuits formed on a semiconductor wafer has specified electrical characteristics, electrical testing is required for each semiconductor integrated circuit.

[0013] For electrical testing, a probe card (also called an "electrical connection device") having multiple probes (also called "electrical contacts" or "contactors") is attached to the test head of a testing device (tester), and the tips of the corresponding probes are brought into electrical contact with the electrode terminals of each semiconductor integrated circuit.The testing device then supplies test signals to the electrode terminals of the semiconductor integrated circuit via the probes, and the semiconductor integrated circuit outputs electrical signals in response to the test signals, which are then supplied to the testing device via the probes.

[0014] In this way, the testing device can check whether the electrical characteristics of the semiconductor integrated circuit are as specified by determining the electrical signal output by the semiconductor integrated circuit in response to the test signal.

[0015] As semiconductor integrated circuits become increasingly miniaturized and highly integrated, the number of probes provided on a probe card increases, and the probe pitch must be narrowed, resulting in a demand for miniaturized probes.

[0016] There are various methods for manufacturing probes, but one method for achieving miniaturization of probes is to form multiple probes integrated on a substrate using MEMS technology.

[0017] When using the probes, each probe must be peeled off from the substrate one by one, but because the probes are ultra-small, they must be handled with care.

[0018] Conventionally, when a probe is formed on a substrate, a gripping portion (called a "tab") that is integrally connected to the probe is also formed, and the tab is manually or mechanically picked up using a special gripping device, making it easier to peel the probe that is integrally connected to the tab from the substrate.

[0019] However, the peeling operation using the dedicated gripping device requires precision, and when the dedicated gripping device grips the tab, a relatively strong force may be applied, which may damage the probe.

[0020] Furthermore, depending on the type of probe, the probe formed on the substrate has a front surface and a back surface, and when using the probe, it is necessary to set the probe while distinguishing between the front and back surfaces.

[0021] Furthermore, when setting the probe, the probe must be handled for the next process after being peeled off the board, so easy handling is required. For example, if a damaged probe is inserted into a micro-hole in the probe head and used, the probe may break at the damaged point and come into contact with adjacent pins, causing a short circuit, or fragments of the broken needle may remain inside the probe head, causing a short circuit. If burrs remain on the probe, they may come into contact with adjacent pins and cause a short circuit.

[0022] Therefore, in this embodiment, in order to solve the above-mentioned problems, an attempt is made to provide a simpler and more accurate peeling (cutting) method.

[0023] (A-2) Intermediate product of contacts on board 1 is a diagram showing the configuration of a contact intermediate product on a substrate according to an embodiment. In FIG. 1, the substrate on which a plurality of contact intermediate products are formed is referred to as an "intermediate product on a substrate 100."

[0024] In FIG. 1, a substrate intermediate product 100 has a plurality of contact intermediate products 1 formed on a substrate 10 for manufacturing.

[0025] The substrate intermediate product 100 has a contact intermediate product 1 formed on a substrate 10 by, for example, a manufacturing technique for semiconductor integrated circuits or a manufacturing technique specific to MEMS, such as deep etching.

[0026] In addition, for ease of explanation, Figure 1 illustrates an example in which one contact intermediate product 1 is formed on the substrate 10, but the number of contact intermediate products 1 is not limited, and multiple contact intermediate products 1 may be formed on the substrate 10.

[0027] The structure of each contact intermediate product 1 on the substrate 10 will be described. The contact intermediate product 1 has a main tab 20 and a probe (contactor) 11, and the main tab 20 and the probe 11 are integrally connected. The main tab 20 and the probe 11 are formed by MEMS technology.

[0028] The probe 11 electrically contacts the electrode terminal of a device under test (semiconductor integrated circuit) when testing the device under test. In this embodiment, the probe 11 is a vertical probe that extends linearly. One end of the linear probe 11 is connected to the main tab 20 at a connecting portion 40.

[0029] The probe 11 and a second tab 22 (described later) extend along the upper surface of the substrate 10 while being spaced apart from the substrate 10.

[0030] (A-3) Composition of intermediate contact products 2 is a diagram showing the configuration of the contact intermediate product 1 of the embodiment. Each of the plurality of contact intermediate products 1 has the same configuration.

[0031] The main tab 20 is formed as a plate-like member and has a generally cylindrical first tab (hereinafter also referred to as a "fixed tab") 21 fixed on the substrate 10, a generally L-shaped second tab (hereinafter also referred to simply as a "tab") 22, and a connecting portion 30 connecting the first tab 21 and the second tab 22.

[0032] The first tab 21 is a portion that serves as a fixed end when the probe 11 is peeled off from the substrate 10. The first tab 21 is also called a round tab.

[0033] Although the first tab 21 has a substantially cylindrical shape, the shape of the first tab 21 is not limited to this. The shape of the first tab 21 may be square or rectangular when viewed from above (in a plan view) the substrate 10.

[0034] However, as will be described later, when the probe 11 is peeled off, the L-shaped second tab 22 is rotated to break the thin-diameter connecting portion 30, so it is desirable that the first tab 21 has a shape that does not interfere with the rotating second tab 22.

[0035] The second tab 22 has a relatively wide rectangular main body 26 and a rectangular tongue portion 24 formed to protrude from the main body 26 in the opposite direction to the extension direction of the probe, and has an overall shape that is approximately L-shaped.

[0036] In other words, second tab 22 has cutout portion 27 formed by cutting out one corner of a rectangular member in a rectangular shape. Rectangular cutout portion 27 is formed in a plan view so that first tab 21 fixed on substrate 10 can be placed therein.

[0037] The shape of the cutout portion 27 is not limited to the rectangular shape shown in the figure, and it may be a substantially fan-shaped or substantially triangular shape as long as the first tab 21 can be arranged in the space of the cutout portion 27. By arranging the first tab 21 in the space of the cutout portion 27, it is possible to prevent the second tab 22 and the first tab 21 from interfering with each other when the second tab 22 is moved by an external force. Furthermore, for example, when a plurality of contact intermediate products 1 are arranged vertically in the X-axis direction on the substrate 10, it is possible to prevent contact between adjacent first tabs 21.

[0038] The second tab 22 is cut at the small diameter connecting portion 30 while still connected to the probe 11, and the second tab 22 and the probe 11 are peeled off from the substrate 10 while still connected to each other.

[0039] Here, the positional relationship between the first tab 21 and the probe 11 will be described. As illustrated in Fig. 2, a center line P passing through the axis of the probe 11 passes through the center C of the first tab, which has a substantially cylindrical shape. In other words, the first tab 21 and the probe 11 are arranged coaxially. By arranging the probe 11 and the first tab 21 coaxially, deformation of the probe 11 due to the influence of heat can be suppressed.

[0040] The probe 11 and the first tab 21 are not limited to being arranged coaxially.

[0041] (A-4) Peeling method for intermediate contact products 3 to 5 are explanatory diagrams illustrating a peeling method (cutting method) of the intermediate contact product 1 according to the embodiment.

[0042] When the probe 11 is to be peeled off, the connecting portion 30 between the first tab 21 and the second tab 22 is cut while the probe 11 and the second tab 22 are still connected, and the probe 11 and the second tab 22 are peeled off.

[0043] 3, a peeling stopper 50 is used when peeling off the probe 11. A method for peeling off the probe 11 using the peeling stopper 50 will be described.

[0044] First, the peeling stopper 50 is brought into contact with the tip corner 25 of the tongue portion 24 of the L-shaped second tab 22. The peeling stopper 50 is brought into contact with the tip corner 25 of the tongue portion 24 while being slightly tilted.

[0045] Next, the second tab 22 is slid in the direction of the arrow F (X direction).

[0046] For example, the second tab 22 can be handled with even less force by manually or mechanically grasping the surface (either one side or both sides) of the second tab 22 with a grasping member 55 using a dedicated grasping device and sliding it.

[0047] As a result, the contact point between the tip corner 25 of the tongue portion 24 and the peeling stopper 50 becomes a fulcrum, causing the second tab 22 to rotate, cutting the thin-diameter connecting portion 30, and peeling off the probe 11 and the second tab 22 while they remain connected (see Figures 4 and 5).

[0048] In other words, by contacting the peeling stopper 50 with the tip corner 25 of the tongue portion 24 and moving the part away from the contact point (the probe side) in the F direction, i.e., in a direction intersecting the P axis, the contact point becomes a fulcrum, and by utilizing the principle of leverage, the probe 11 and the second tab 22 can be peeled off from the first tab 21.

[0049] As a result, the probe 11 can be peeled off with a weaker force than before, and damage to the probe 11 can be prevented.

[0050] Furthermore, the probe 11 is peeled off while still connected to the second tab 22. Therefore, when handling the probe 11, the second tab 22 functions as a part to be gripped, allowing for reliable handling. In other words, damage to the probe 11 can be prevented.

[0051] In this embodiment, an example is given of using a peeling stopper 50 to peel the probe 11 and the second tab 22 from the first tab 21 using the principle of leverage, but the connecting portion between the second tab 22 and the first tab 21 (for example, the connecting portion 30) may also be cut by irradiating it with a laser beam or the like.

[0052] (A-5) Effects of the embodiment As described above, according to this embodiment, when the first tab and the second tab are connected, the peeling stopper is brought into contact with the tip corner of the second tab and the second tab is moved in a predetermined direction relative to the first tab, causing the second tab to rotate and be separated from the first tab. This makes it possible to easily peel the second tab from the first tab and produce a semi-finished contactor (semi-finished probe).

[0053] Furthermore, according to the embodiment, the second tab can be stably peeled off from the first tab, so that the intermediate contact product (semi-finished probe product) and thus the probe can be manufactured inexpensively.

[0054] Furthermore, because the second tab is L-shaped and asymmetrical, it is easy to determine whether the probe is upside down. As a result, the probe can be correctly attached to the probe head, preventing short circuits.

[0055] Furthermore, since the second tab after peeling can function as a gripping portion, safe handling is possible, and as a result, damage to the probe can be prevented.

[0056] (B) Other embodiments Although various modified embodiments have been mentioned in the above-described embodiment, the present invention can also be applied to the following modified embodiments.

[0057] (B-1) FIGS. 6(A) to 6(F) are diagrams showing the configuration of a contact intermediate product according to a modified embodiment.

[0058] 6(A) to 6(F) show modified examples in which the first tab 21 and the probe 11 are not positioned on the same straight line. In this way, even when the first tab 21 and the probe 11 are not positioned on the same straight line, the same effect as in the above-described embodiment can be obtained.

[0059] Fig. 6(A) shows a modified example in which the connecting portion 30 between the first tab 21 and the second tab 22A is located inside the tongue portion 24 of the second tab 22A. Fig. 6(B) shows a modified example in which the connecting portion 30 is located further outward (on the left side in the figure). Fig. 6(C) shows a modified example in which the connecting portion 30 is connected at two points.

[0060] 6(D) to 6(F), the second tab 22B has a first tongue portion 24A and a second tongue portion 24B on the opposite side. Even in this case, the second tab 22B has an asymmetric shape, so the same effects as those of the above-described embodiment can be obtained.

[0061] Fig. 6(D) is a modified example in which the connecting portion 30 between the first tab 21 and the second tab 22A is located inside the tongue portion 24 of the second tab 22A. Fig. 6(E) is a modified example in which the connecting portion 30 is located further outward (on the left side in the figure). Fig. 6(F) is a modified example in which the connecting portion 30 is connected at two points. [Explanation of symbols]

[0062] 1: contact intermediate product, 10: substrate, 11: probe, 12: fixing portion, 20: main tab, 21: first tab, 22: second tab, 23: through hole, 24: tongue portion, 25: tip corner portion, 26: main body portion, 27: notch portion, 30: connecting portion, 40: connecting portion, 42a and 42b: claw portion, 50: peeling stopper, 100: intermediate product on substrate.

Claims

1. A linear contact; a rectangular tab to which one end of the contact is connected, The tab has a rectangular body portion to which the contact is connected and a tongue portion protruding from the body portion. A contact intermediate product characterized by:

2. The tab is formed in an L-shape by the main body and the tongue portion.

2. The intermediate contact product according to claim 1.

3. On the inner side of the L-shaped tab The fixing tabs are connected to the board.

3. The intermediate contact product according to claim 2.

4. The tab has a notch formed by cutting out one corner, 2. The intermediate contact product according to claim 1, wherein the notch is formed so that a fixing tab to be fixed onto a substrate can be placed therein when viewed from above.

5. When an external force is applied to the tab in a direction intersecting the axial direction of the contact, the tab is severed from the securing tab; 5. The intermediate contact product according to claim 3 or 4.

6. 6. The intermediate contact product according to claim 5, wherein the tab and the fixing tab are disposed in a positional relationship such that they do not interfere with each other when the tab is moved by the external force.

7. The tab is a plate-like member that is asymmetrical, and the fixing tab is disposed near the outer side of the asymmetrical tab.

5. The intermediate contact product according to claim 3 or 4.

8. A method for cutting a contact intermediate product, which comprises cutting a contact intermediate product having a linear contact and a rectangular tab to which one end of the contact is connected, from a fixing tab formed on a substrate, the method comprising: A peeling stopper is brought into contact with the corner of the tab, Moving the tab in a direction in which the tab rotates around the corner portion as a fulcrum; The rotational force generated in the tab separates the tab from the fixing tab.

10. A method for cutting an intermediate contact product.

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