Sensor

Abstract

To provide a sensor capable of improving characteristics.SOLUTION: According to one embodiment, a sensor includes a base body, first to fourth fixed parts, first and second element parts, first to fourth connection parts, a first other-connection part, and a fourth other-connection part. The first to fourth fixing portions are fixed to the base. The first connection portion is supported by the first fixed portion and supports the first element portion. The second connection portion is supported by the second fixed portion and supports the first element portion. The first other-connection portion is supported by the first fixed portion and supports the second element portion. The third connection portion is supported by the third fixed portion and supports the second element portion. The fourth connection portion is supported by the fourth fixed portion and supports the first element portion. The fourth other-connection portion is supported by the fourth fixed portion and supports the second element portion. The first and second connection portions pass a first current flowing through the first conductive member. The first connection portion passes a first other current flowing through the first other conductive member. The first other-connection portion passes a second current flowing through the second conductive member.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] FIELD OF THE INVENTION An embodiment of the present invention relates to a sensor. [Background technology]

[0002] For example, there are sensors using MEMS (Micro Electro Mechanical Systems) elements, etc. Improvement of the characteristics of sensors is desired. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Application Laid-Open No. 2016-75597 Summary of the Invention [Problem to be solved by the invention]

[0004] The embodiments provide sensors that allow for improved performance. [Means for solving the problem]

[0005] According to an embodiment, the sensor includes a base, a first fixing portion, a second fixing portion, a third fixing portion, a fourth fixing portion, a first element portion, a second element portion, a first connecting portion, a second connecting portion, a third connecting portion, a fourth connecting portion, a first other connecting portion, and a fourth other connecting portion. The first fixing portion is fixed to the base. The second fixing portion is fixed to the base. The third fixing portion is fixed to the base. The fourth fixing portion is fixed to the base. The first element portion includes a first conductive member and a first other conductive member. The second element portion includes a second conductive member. The first connecting portion is supported by the first fixing portion and supports the first element portion. The second connecting portion is supported by the second fixing portion and supports the first element portion. The first other connecting portion is supported by the first fixing portion and supports the second element portion. The third connecting portion is supported by the third fixing portion and supports the second element portion. The fourth connection portion is supported by the fourth fixed portion and supports the first element portion. The fourth other connection portion is supported by the fourth fixed portion and supports the second element portion. The first connection portion and the second connection portion are configured to pass a first current flowing through the first conductive member. The first connection portion is configured to pass a first other current flowing through the first other conductive member. The first other connection portion is configured to pass a second current flowing through the second conductive member. [Brief explanation of the drawings]

[0006] [Figure 1] FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 2] 2A and 2B are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 3] 3A, 3B, and 3C are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 4] FIG. 4 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 5] FIG. 5 is a schematic plan view illustrating the sensor according to the first embodiment. [Figure 6]6(a), 6(b), and 6(c) are schematic cross-sectional views illustrating the sensor according to the first embodiment. [Figure 7] 7A and 7B are schematic plan views illustrating the sensor according to the first embodiment. [Figure 8] FIG. 8 is a schematic plan view illustrating the sensor according to the second embodiment. [Figure 9] FIG. 9 is a schematic plan view illustrating the sensor according to the third embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0007] Hereinafter, embodiments of the present invention will be described with reference to the drawings. The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as those in reality. Even when the same part is shown, the dimensions and ratios may be different depending on the drawing. In this specification and in each drawing, elements similar to those previously described with reference to the previous drawings are designated by the same reference numerals, and detailed descriptions thereof will be omitted where appropriate.

[0008] (First embodiment) FIG. 1 is a schematic plan view illustrating the sensor according to the first embodiment. 2A and 2B are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 2(a) is a cross-sectional view taken along line X1-X2 in Fig. 1. Fig. 2(b) is a cross-sectional view taken along line X3-X4 in Fig. 1. 3A, 3B, and 3C are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 3(a) is a cross-sectional view taken along line Y1-Y2 in Fig. 1. Fig. 3(b) is a cross-sectional view taken along line Y3-Y4 in Fig. 1. Fig. 3(c) is a cross-sectional view taken along line Y5-Y6 in Fig. 1. 4 and 5 are schematic plan views illustrating the sensor according to the first embodiment.

[0009] 1, 2(a), 2(b), 3(a), 3(b), and 3(c), a sensor 110 according to this embodiment includes a base 50s, a first fixing portion 31, a second fixing portion 32, a third fixing portion 33, a fourth fixing portion 34, a first element portion 10A, and a second element portion 10B. The sensor 110 further includes a first connecting portion 31c, a second connecting portion 32c, a first other connecting portion 31Ac, a third connecting portion 33c, a fourth connecting portion 34c, and a fourth other connecting portion 34Ac.

[0010] The first fixed portion 31 is fixed to the base body 50s. The second fixed portion 32 is fixed to the base body 50s. The third fixed portion 33 is fixed to the base body 50s. The fourth fixed portion 34 is fixed to the base body 50s. The fifth fixed portion 35 is fixed to the base body 50s. The sixth fixed portion 36 is fixed to the base body 50s.

[0011] The first element portion 10A includes a first conductive member 11 and a first other conductive member 21. The second element portion 10B includes a second conductive member 12. The second element portion 10B may further include a second other conductive member 22.

[0012] The first connecting portion 31c is supported by the first fixing portion 31 and supports the first element portion 10A. The second connecting portion 32c is supported by the second fixing portion 32 and supports the first element portion 10A. The first other connecting portion 31Ac is supported by the first fixing portion 31 and supports the second element portion 10B. The third connecting portion 33c is supported by the third fixing portion 33 and supports the second element portion 10B. The fourth connecting portion 34c is supported by the fourth fixing portion 34 and supports the first element portion 10A. The fourth other connecting portion 34Ac is supported by the fourth fixing portion 34 and supports the second element portion 10B.

[0013] 2(a), the first connection portion 31c and the second connection portion 32c are configured to pass a first current i1 flowing through the first conductive member 11. The first connection portion 31c is configured to pass a first other current iA1 flowing through the first other conductive member 21. In this example, the second connection portion 32c is configured to pass the first other current iA1.

[0014] 3(c), the first other connection portion 31Ac is configured to pass the second current i2 that flows through the second conductive member 12. In this example, the third connection portion 33c is configured to pass the second current i2.

[0015] The sensor 110 may be provided with a control unit 70. The control unit 70 may be included in the sensor 110. The control unit 70 may also be provided separately from the sensor 110. The control unit 70 is configured to supply the above current. The control unit 70 is configured to apply a voltage corresponding to the above current.

[0016] For example, the control unit 70 is configured to supply a first current i1 to the first conductive member 11. The control unit 70 is configured to supply a first other current iA1 to the first other conductive member 21. The control unit 70 is configured to supply a second current i2 to the second conductive member 12.

[0017] In the sensor 110, the state of the detection object around the first element portion 10A and the second element portion 10B is detected by a value corresponding to the difference between the first electrical resistance of the first conductive member 11 when the first other current iA1 flows through the first other conductive member 21 and the second electrical resistance of the second conductive member 12.

[0018] The detection target is, for example, a gas. For example, when a first other current iA1 flows through the first other conductive member 21, the temperature of the first element unit 10A rises. This causes a change in the first electrical resistance R1 of the first conductive member 11. The temperature of the first element unit 10A changes depending on the state of the detection target. This is thought to be due, for example, to changes in heat dissipation depending on the state of the detection target. On the other hand, the temperature of the second element unit 10B does not substantially change. For example, the second electrical resistance R2 of the second conductive member 12 is not substantially affected by the detection target.

[0019] For example, the first element unit 10A is a sensor element. The second element unit 10B is, for example, a reference element. By detecting the difference between the first electrical resistance R1 and the second electrical resistance R2, the state of the detection target can be detected with higher accuracy. The sensor 110 is, for example, a resistance change sensor. The control unit 70 may be configured to detect a signal (such as a voltage) obtained from the element unit. The control unit 70 may be configured to detect a value (signal) corresponding to the electrical resistance.

[0020] In the embodiment, the first element unit 10A is supported by the first connecting portion 31c, the second connecting portion 32c, and the fourth connecting portion 34c. As described above, the first current i1 flowing through the first conductive member 11 flows through the first connecting portion 31c and the second connecting portion 32c. The first other current iA1 flowing through the first other conductive member 21 flows through the first connecting portion 31c and the second connecting portion 32c. The first element unit 10A is supported by the fourth connecting portion 34c in addition to the two connecting portions that form the current path. This allows the first element unit 10A to be supported more stably.

[0021] In the embodiment, the second element unit 10B is supported by the first other connection portion 31Ac, the third connection portion 33c, and the fourth other connection portion 34Ac. As described above, the second current i2 flowing through the second conductive member 12 flows through the first other connection portion 31Ac and the third connection portion 33c. The second element unit 10B is supported by the fourth other connection portion 34Ac in addition to the two connection portions that form the current path. This allows the second element unit 10B to be supported more stably.

[0022] In the embodiment, the first element portion 10A and the second element portion 10B are stably supported. The characteristics of the first element portion 10A and the second element portion 10B are stable. The signals obtained from the first element portion 10A and the second element portion 10B are stable. Stable, highly accurate detection results are obtained. According to the embodiment, a sensor capable of improving characteristics can be provided.

[0023] The first current i1, the first other current iA1, and the second current i2 do not pass through the fourth connecting portion 34c and the fourth other connecting portion 34Ac.

[0024] As shown in Fig. 2(a), a first gap g1 is provided between the base body 50s and the first element portion 10A. As shown in Fig. 3(c), a second gap g2 is provided between the base body 50s and the second element portion 10B. The first element portion 10A and the second element portion 10B have a MEMS structure.

[0025] 2(a), a first direction D1 from the base 50s to the first fixing portion 31 is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.

[0026] 1, a second direction D2 from the first fixed portion 31 to the third fixed portion 33 intersects with the first direction D1. The second direction D2 may be, for example, the X-axis direction. A third direction D3 from the first fixed portion 31 to the second fixed portion 32 intersects with a plane including the first direction D1 and the second direction D2. The third direction D3 may be, for example, the Y-axis direction.

[0027] 1, the sensor 110 may further include a fifth fixing portion 35, a sixth fixing portion 36, a fifth connecting portion 35c, and a sixth connecting portion 36c. The fifth fixing portion 35 is fixed to the base 50s. The sixth fixing portion 36 is fixed to the base 50s. The fifth connecting portion 35c is supported by the fifth fixing portion 35 and supports the first element portion 10A. The sixth connecting portion 36c is supported by the sixth fixing portion 36 and supports the second element portion 10B.

[0028] In this example, the direction from the fifth fixed portion 35 to the fourth fixed portion 34 is along the second direction D2. The direction from the sixth fixed portion 36 to the fourth fixed portion 34 is along the third direction D3. For example, at least a portion of the first element portion 10A is between the fifth fixed portion 35 and the fourth fixed portion 34 in the second direction D2. For example, at least a portion of the second element portion 10B is between the sixth fixed portion 36 and the fourth fixed portion 34 in the third direction D3.

[0029] The first current i1, the first other current iA1, and the second current i2 do not pass through the fourth connection portion 34c, the fourth other connection portion 34Ac, the fifth connection portion 35c, and the sixth connection portion 36c.

[0030] The first element unit 10A is supported by two connection parts through which current passes and two connection parts through which current does not pass. By being supported by four connection parts, the first element unit 10A is supported more stably. The second element unit 10B is supported by two connection parts through which current passes and two connection parts through which current does not pass. By being supported by four connection parts, the second element unit 10B is supported more stably. The signals obtained from these support parts become more stable. The characteristics are further improved.

[0031] In the embodiment, the fourth fixing portion 34 supports the fourth connecting portion 34c and the fourth other connecting portion 34Ac. For example, the fourth fixing portion 34 is shared by the first element portion 10A and the second element portion 10B. This allows the size of the sensor 110 to be reduced. For example, a smaller "footprint" can be obtained. For example, the distance between the first element portion 10A and the second element portion 10B can be shortened. For example, the temperature difference between these elements can be reduced. The difference in characteristics can be reduced.

[0032] 1, the second element portion 10B may further include a second other conductive member 22. The second other conductive member 22 does not need to be supplied with a current.

[0033] 2(a), the first element portion 10A may further include a first insulating member 11i. At least a portion of the first insulating member 11i is provided between the first conductive member 11 and the first other conductive member 21. The first element portion 10A is, for example, membrane-shaped.

[0034] 3(c), the second element portion 10B may further include a second insulating member 12i. At least a portion of the second insulating member 12i is provided around the second conductive member 12. At least a portion of the second insulating member 12i may be provided between the second conductive member 12 and the second other conductive member 22. The second element portion 10B may be, for example, membrane-shaped.

[0035] 1, the sensor 110 may further include a first electrode 51, a first other electrode 51A, a second electrode 52, a second other electrode 52A, and a third electrode 53. As shown in FIG. 4, the first electrode 51 is connected to a portion of the first conductive member 11 via a first connection portion 31c. The first other electrode 51A is connected to a portion of the first other conductive member 21 via the first connection portion 31c. The second electrode 52 is connected to another portion of the first conductive member 11 via a second connection portion 32c. The second other electrode 52A is connected to another portion of the first other conductive member 21 via the second connection portion 32c.

[0036] For example, the third electrode 53 is connected to a part of the second conductive member 12 via the third connection portion 33c. The first electrode 51 is connected to another part of the second conductive member 12 via the first other connection portion 31Ac. The above-mentioned current is supplied via these electrodes. The sensor 110 may further include a third other electrode 53A. The third other electrode 53A may be used when supplying current to the second other conductive member 22, etc.

[0037] As shown in FIG. 1, in this example, the sensor 110 further includes a seventh fixing portion 37, a third element portion 10C, a fourth element portion 10D, a third other connection portion 33Ac, a seventh connection portion 37c, a fourth opposing other connection portion 34Cc, a second other connection portion 32Ac, a seventh other connection portion 37Ac, and a fourth opposing other connection portion 34Dc.

[0038] The seventh fixed portion 37 is fixed to the base 50s. The third element portion 10C includes a third conductive member 13 and a third other conductive member 23. The fourth element portion 10D includes a fourth conductive member 14. The fourth element portion 10D may further include a fourth other conductive member 24.

[0039] The third other connecting portion 33Ac is supported by the third fixed portion 33 and supports the third element portion 10C. The seventh connecting portion 37c is supported by the seventh fixed portion 37 and supports the third element portion 10C. The fourth opposing connecting portion 34Cc is supported by the fourth fixed portion 34 and supports the third element portion 10C.

[0040] The second other connection portion 32Ac is supported by the second fixed portion 32 and supports the fourth element portion 10D. The seventh other connection portion 37Ac is supported by the seventh fixed portion 37 and supports the fourth element portion 10D. The fourth opposing other connection portion 34Dc is supported by the fourth fixed portion 34 and supports the fourth element portion 10D.

[0041] As shown in Fig. 2(b), the third other connection portion 33Ac and the seventh connection portion 37c are configured to pass a third current i3 flowing through the third conductive member 13. The third other connection portion 33Ac and the seventh connection portion 37c are configured to pass a third other current iA3 flowing through the third other conductive member 23. As shown in Fig. 3(a), the second other connection portion 32Ac and the seventh other connection portion 37Ac are configured to pass a fourth current i4 flowing through the fourth conductive member 14.

[0042] These currents may be provided by the controller 70. Voltages corresponding to these currents may be provided by the controller 70.

[0043] The third element unit 10C is supported by the fourth opposing connection unit 34Cc in addition to the two connection units that form the current path. This allows the third element unit 10C to be supported more stably. The fourth element unit 10D is supported by the fourth opposing other connection unit 34Dc in addition to the two connection units that form the current path. This allows the fourth element unit 10D to be supported more stably. This further improves the characteristics.

[0044] 1, the sensor 110 may further include an eighth fixed portion 38, a ninth fixed portion 39, an eighth connecting portion 38c, and a ninth connecting portion 39c. The eighth fixed portion 38 is fixed to the base 50s. The ninth fixed portion 39 is fixed to the base 50s. The eighth connecting portion 38c is supported by the eighth fixed portion 38 and supports the third element portion 10C. The ninth connecting portion 39c is supported by the ninth fixed portion 39 and supports the fourth element portion 10D.

[0045] The current that flows through the third element unit 10C does not need to flow through the eighth connection unit 38c. The third element unit 10C is further supported by the eighth connection unit 38c, through which no current flows. This further stabilizes the third element unit 10C.

[0046] The current that flows through the fourth element unit 10D does not need to flow through the ninth connection portion 39c. The fourth element unit 10D is further supported by the ninth connection portion 39c, through which no current flows. This further stabilizes the fourth element unit 10D.

[0047] As shown in FIG. 1 , the fourth fixed portion 34 is provided between the fifth fixed portion 35 and the eighth fixed portion 38 in the second direction D2. The first element portion 10A is provided between the fifth fixed portion 35 and the fourth fixed portion 34 in the second direction D2. The third element portion 10C is provided between the fourth fixed portion 34 and the eighth fixed portion 38 in the second direction D2. The second element portion 10B is provided between the first fixed portion 31 and the third fixed portion 33 in the second direction D2. The fourth element portion 10D is provided between the second fixed portion 32 and the seventh fixed portion 37 in the second direction D2.

[0048] As shown in FIG. 1 , the fourth fixed portion 34 is provided between the sixth fixed portion 36 and the ninth fixed portion 39 in the third direction D3. The second element portion 10B is provided between the sixth fixed portion 36 and the fourth fixed portion 34 in the third direction D3. The fourth element portion 10D is provided between the fourth fixed portion 34 and the ninth fixed portion 39 in the third direction D3. The first element portion 10A is provided between the first fixed portion 31 and the second fixed portion 32 in the third direction D3. The third element portion 10C is provided between the third fixed portion 33 and the seventh fixed portion 37 in the third direction D3.

[0049] With this configuration, the four element portions can be efficiently provided in a small footprint area.

[0050] 1, the sensor 110 may further include a third electrode 53, a third other electrode 53A, a fourth electrode 54, and a fourth other electrode 54A. The third electrode 53 is connected to a portion of the third other conductive member 13 via a third other connection portion 33Ac. The third other electrode 53A is connected to a portion of the third other conductive member 23 via a third other connection portion 33Ac.

[0051] The fourth electrode 54 is connected to another part of the third conductive member 13 via the seventh connection portion 37c. The fourth other electrode 54A is connected to another part of the third other conductive member 23 via the seventh connection portion 37c. The above-mentioned current is supplied via these electrodes.

[0052] For example, the state of the detection target around the third element unit 10C and the fourth element unit 10D is detected by a value corresponding to the difference between the third electrical resistance R3 of the third conductive member 13 and the fourth electrical resistance R4 of the fourth conductive member 14 when a third other current iA3 flows through the third other conductive member 23. For example, when the third other current iA3 flows through the third other conductive member 23, the temperature of the third element unit 10C rises. This causes the third electrical resistance R3 of the third conductive member 13 to change. The temperature of the third element unit 10C changes depending on the state of the detection target. This is thought to be due, for example, to changes in heat dissipation depending on the state of the detection target. On the other hand, for example, the temperature of the fourth element unit 10D does not substantially change. For example, the fourth electrical resistance R4 of the fourth conductive member 14 is not substantially affected by the detection target.

[0053] For example, the third element unit 10C is a sensor element. The fourth element unit 10D is a reference element. By detecting the difference between the third electrical resistance R3 and the fourth electrical resistance R4, the state of the detection target can be detected with higher accuracy.

[0054] The fourth fixed portion 34 is shared by the first element portion 10A, the second element portion 10B, the third element portion 10C, and the fourth element portion 10D, which allows the size of the sensor 110 to be reduced.

[0055] As shown in Fig. 3(b), a third gap g3 is provided between the base body 50s and the third element unit 10C. As shown in Fig. 3(a), a fourth gap g4 is provided between the base body 50s and the fourth element unit 10D. The third element unit 10C and the fourth element unit 10D have a MEMS structure.

[0056] The fourth element portion 10D may further include a fourth other conductive member 24. The fourth other conductive member 24 does not need to be supplied with a current.

[0057] The third element portion 10C may further include a third insulating member 13i. At least a portion of the third insulating member 13i is provided between the third conductive member 13 and the third other conductive member 23. The third element portion 10C has, for example, a membrane shape. The fourth element portion 10D may further include a fourth insulating member 14i. At least a portion of the fourth insulating member 14i is provided around the fourth conductive member 14. At least a portion of the fourth insulating member 14i may be provided between the fourth conductive member 14 and the fourth other conductive member 24. The fourth element portion 10D has, for example, a membrane shape.

[0058] The control unit 70 is configured to supply a third current i3 to the third conductive member 13. The control unit 70 is configured to supply a third other current iA3 to the third other conductive member 23. The control unit 70 is configured to supply a fourth current i4 to the fourth conductive member 14.

[0059] At least one of the first conductive member 11, the first other conductive member 21, and the second conductive member 12 may include at least one selected from the group consisting of Ti, Al, TiN, Pt, and Au. At least one of the third conductive member 13, the third other conductive member 23, and the fourth conductive member 14 may include at least one selected from the group consisting of Ti, Al, TiN, Pt, and Au.

[0060] At least one of the first conductive member 11, the first other conductive member 21, and the second conductive member 12 may have a meander structure. At least one of the third conductive member 13, the third other conductive member 23, and the fourth conductive member 14 may have a meander structure. In FIG. 1, these conductive members are depicted in a simplified form to make the drawing easier to understand.

[0061] In an embodiment, the detection target may be detected by a first detection result based on signals obtained from the first element unit 10A and the second element unit 10B. In an embodiment, the detection target may be detected by a second detection result based on signals obtained from the third element unit 10C and the fourth element unit 10D. The detection target may be detected based on the first detection result and the second detection result. In an embodiment, detection may be performed by applying a bridge circuit. Higher accuracy detection results can be obtained.

[0062] 4, for example, a voltage VB+ is applied to the second electrode 52. A voltage VB- is applied to the third electrode 53. In this example, the second electrode 52 is electrically connected to another part of the first conductive member 11 via the second connection portion 32c. The part of the first conductive member 11 is electrically connected to a part of the second conductive member 12 via the first connection portion 31c and the first other connection portion 31Ac. The other part of the second conductive member 12 is electrically connected to the third electrode 53 via the third connection portion 33c.

[0063] The first conductive member 11 and the second conductive member 12 are electrically connected in series. Voltages VB+ and VB- are applied to these conductive members. Currents based on these voltages flow through these conductive members. A first current i1 flows through the first conductive member 11. A second current i2 flows through the second conductive member 12. The first current i1 flowing through the first conductive member 11 flows through the second conductive member 12 as the second current i2. The second current i2 flowing through the second conductive member 12 flows through the first conductive member 11 as the first current i1. These currents correspond to currents for detecting the electrical resistance of these conductive members.

[0064] In this example, the second electrode 52 is electrically connected to a portion of the fourth conductive member 14 via the second other connection portion 32Ac. Another portion of the fourth conductive member 14 is electrically connected to a portion of the third conductive member 13 via the seventh connection portion 37c and the seventh other connection portion 37Ac. Another portion of the third conductive member 13 is electrically connected to the third electrode 53 via the third other connection portion 33Ac.

[0065] The fourth conductive member 14 and the third conductive member 13 are electrically connected in series. Voltages VB+ and VB- are applied to these conductive members. Currents based on these voltages flow through these conductive members. A third current i3 flows through the third conductive member 13. A fourth current i4 flows through the fourth conductive member 14. The third current i3 flowing through the third conductive member 13 flows through the fourth conductive member 14 as the fourth current i4. The fourth current i4 flowing through the fourth conductive member 14 flows through the third conductive member 13 as the third current i3. These currents correspond to currents for detecting the electrical resistance of these conductive members.

[0066] A first circuit including the first conductive member 11 and the second conductive member 12 is electrically connected in parallel with a circuit including the third conductive member 13 and the fourth conductive member 14. This forms a bridge circuit.

[0067] The first electrode 51 is electrically connected to a portion of the first conductive member 11 and a portion of the second conductive member 12. An output Vout- of the bridge circuit is obtained from the first electrode 51. The fourth electrode 54 is electrically connected to a portion of the third conductive member 13 and a portion of the fourth conductive member 14. Another output Vout+ of the bridge circuit is obtained from the fourth electrode 54.

[0068] As shown in FIG. 5, the first other electrode 51A is electrically connected to a portion of the first other conductive member 21. The second other electrode 52A is electrically connected to another portion of the first other conductive member 21. The third other electrode 53A is electrically connected to a portion of the third other conductive member 23. The fourth other electrode 54A is electrically connected to another portion of the third other conductive member 23. A voltage H- is applied to the first other electrode 51A and the third other electrode 53A. A voltage H+ is applied to the second other electrode 52A and the fourth other electrode 54A. These voltages cause other currents to flow through these other conductive members.

[0069] A first other current iA1 is supplied to the first other conductive member 21. The first element unit 10A is heated. A third other current iA3 is supplied to the third other conductive member 23. The third element unit 10C is heated. These currents correspond to the power for heating.

[0070] 6(a), 6(b), and 6(c) are schematic cross-sectional views illustrating the sensor according to the first embodiment. Fig. 6(a) is a cross-sectional view corresponding to line Y1-Y2 in Fig. 1. Fig. 6(b) is a cross-sectional view corresponding to line Y3-Y4 in Fig. 1. Fig. 6(c) is a cross-sectional view corresponding to line Y5-Y6 in Fig. 1. As shown in these figures, in the sensor 111 according to this embodiment, the first element portion 10A further includes a first film 11f. Except for this, the configuration of the sensor 111 may be similar to the configuration of the sensor 110.

[0071] In this example, the first conductive member 11 is provided between the substrate 50s and the first film 11f. The first film 11f contains, for example, at least one selected from the group consisting of Pt and Pd. These materials function, for example, as a catalyst. Higher sensitivity can be obtained.

[0072] The second element portion 10B may further include a second film 12f. In this example, the second conductive member 12 is provided between the base body 50s and the second film 12f. The second film 12f includes, for example, at least one selected from the group consisting of Pt and Pd.

[0073] The third element portion 10C may further include a third film 13f. For example, the third conductive member 13 is provided between the base body 50s and the third film 13f. The third film 13f includes, for example, at least one selected from the group consisting of Pt and Pd.

[0074] The fourth element portion 10D may further include a fourth film 14f. For example, the fourth conductive member 14 is provided between the base body 50s and the fourth film 14f. The fourth film 14f includes, for example, at least one selected from the group consisting of Pt and Pd. The sensor 111 is, for example, a catalytic combustion type sensor.

[0075] 7A and 7B are schematic plan views illustrating the sensor according to the first embodiment. As shown in these figures, the third element unit 10C and the fourth element unit 10D are omitted from the sensor 112 according to the embodiment. The remaining configuration of the sensor 112 may be the same as the configuration of the sensor 110 or the sensor 111.

[0076] The sensor 112 includes a base 50s, a first fixing portion 31, a second fixing portion 32, a third fixing portion 33, a fourth fixing portion 34, a first element portion 10A, and a second element portion 10B. The first fixing portion 31, the second fixing portion 32, the third fixing portion 33, and the fourth fixing portion 34 are fixed to the base 50s. The first element portion 10A includes a first conductive member 11 and a first other conductive member 21. The second element portion 10B includes a second conductive member 12. The second element portion 10B may further include a second other conductive member 22.

[0077] The sensor 112 further includes a first connecting portion 31c, a second connecting portion 32c, a first other connecting portion 31Ac, a third connecting portion 33c, a fourth connecting portion 34c, and a fourth other connecting portion 34Ac. The first connecting portion 31c is supported by the first fixing portion 31 and supports the first element portion 10A. The second connecting portion 32c is supported by the second fixing portion 32 and supports the first element portion 10A. The first other connecting portion 31Ac is supported by the first fixing portion 31 and supports the second element portion 10B. The third connecting portion 33c is supported by the third fixing portion 33 and supports the second element portion 10B. The fourth connecting portion 34c is supported by the fourth fixing portion 34 and supports the first element portion 10A. The fourth other connecting portion 34Ac is supported by the fourth fixing portion 34 and supports the second element portion 10B.

[0078] As shown in FIG. 7(a), the first connection portion 31c and the second connection portion 32c are configured to pass a first current i1 flowing through the first conductive member 11. As shown in FIG. 7(b), the first connection portion 31c is configured to pass a first other current iA1 flowing through the first other conductive member 21. As shown in FIG. 7(a), the first other connection portion 31Ac is configured to pass a second current i2 flowing through the second conductive member 12. As shown in FIG. 7(b), the fourth connection portion 34c is configured to pass the first other current iA1.

[0079] For example, the first other current iA1 increases the temperature of the first conductive member 11 (first element portion 10A). For example, the first current i1 detects the first electrical resistance R1 of the first conductive member 11. For example, the second current i2 detects the second electrical resistance R2 of the second conductive member 12. The detection target can be detected by detecting the difference between these electrical resistances.

[0080] In the sensor 112, the first element unit 10A is held by three connection parts that serve as current paths. This allows for stable holding. The first connection part 31c serves as a current path through which the first current i1 and the first other current iA1 pass. By using the same current path, a small footprint can be achieved.

[0081] The second element portion 10B is held by the fourth other connection portion 34Ac in addition to the two connection portions (the first other connection portion 31Ac and the third connection portion 33c) that form the current path, allowing for stable holding.

[0082] In the sensor 112, the second element section 10B may further include a second other conductive member 22. The second other conductive member 22 may not be supplied with a current.

[0083] In sensor 112, third direction D3 from first fixed portion 31 to second fixed portion 32 intersects with second direction D2 from first fixed portion 31 to third fixed portion 33. In this example, the direction from first element portion 10A to fourth fixed portion 34 is along second direction D2. The direction from second element portion 10B to fourth fixed portion 34 is along third direction D3.

[0084] The direction from the first fixed portion 31 to the second fixed portion 32 may be inclined with respect to the direction from the first fixed portion 31 to the third fixed portion 33. For example, in the direction from the third fixed portion 33 to the second fixed portion 32, at least a portion of the first element portion 10A may be provided between the third fixed portion 33 and the second fixed portion 32. For example, in the direction from the third fixed portion 33 to the second fixed portion 32, at least a portion of the second element portion 10B may be provided between the third fixed portion 33 and the second fixed portion 32.

[0085] (Second embodiment) FIG. 8 is a schematic plan view illustrating the sensor according to the second embodiment. As shown in FIG. 8 , the sensor 120 according to the embodiment includes a base 50s, a first fixing portion 31, a second fixing portion 32, a third fixing portion 33, a fourth fixing portion 34, a fifth fixing portion 35, a sixth fixing portion 36, and a seventh fixing portion 37. The first fixing portion 31, the second fixing portion 32, the third fixing portion 33, the fourth fixing portion 34, the fifth fixing portion 35, the sixth fixing portion 36, and the seventh fixing portion 37 are fixed to the base 50s. The sensor 120 includes a first element portion 10A and a second element portion 10B. The first element portion 10A includes a first conductive member 11 and a first other conductive member 21. The second element portion 10B includes a second conductive member 12.

[0086] The sensor 120 includes a first connecting portion 31c, a second connecting portion 32c, a third connecting portion 33c, a fourth connecting portion 34c, a fifth connecting portion 35c, a sixth connecting portion 36c, a seventh connecting portion 37c, and a fifth other connecting portion 35Ac. The first connecting portion 31c is supported by the first fixing portion 31 and supports the first element portion 10A. The second connecting portion 32c is supported by the second fixing portion 32 and supports the first element portion 10A. The third connecting portion 33c is supported by the third fixing portion 33 and supports the second element portion 10B. The fourth connecting portion 34c is supported by the fourth fixing portion 34 and supports the second element portion 10B. The fifth connecting portion 35c is supported by the fifth fixing portion 35 and supports the first element portion 10A. The sixth connecting portion 36c is supported by the sixth fixing portion 36 and supports the first element portion 10A. The seventh connecting portion 37c is supported by the seventh fixing portion 37, and supports the second element portion 10B. The fifth other connecting portion 35Ac is supported by the fifth fixing portion 35, and supports the second element portion 10B.

[0087] In the sensor 120, a first current i1 flowing through the first conductive member 11 passes through the first connection portion 31c and the second connection portion 32c. A first other current iA1 flowing through the first other conductive member 21 passes through the fifth connection portion 35c and the sixth connection portion 36c. A second current i2 flowing through the second conductive member 12 passes through the third connection portion 33c and the fourth connection portion 34c.

[0088] For example, the first electrode 51 is electrically connected to a part of the first conductive member 11 via the first connection portion 31c. The second electrode 52 is electrically connected to another part of the first conductive member 11 via the second connection portion 32c. For example, the third electrode 53 is electrically connected to a part of the second conductive member 12 via the third connection portion 33c. The fourth electrode 54 is electrically connected to another part of the second conductive member 12 via the fourth connection portion 34c.

[0089] The second element portion 10B may further include a second other conductive member 22. The second other conductive member 22 does not need to be supplied with a current.

[0090] The fifth fixed portion 35 is located between the sixth fixed portion 36 and the seventh fixed portion 37 in the second direction D2 that intersects with the first direction D1 (see FIG. 2(a)) from the base 50s to the first fixed portion 31. The first element portion 10A is located between the sixth fixed portion 36 and the fifth fixed portion 35 in the second direction D2. The second element portion 10B is located between the fifth fixed portion 35 and the seventh fixed portion 37 in the second direction D2.

[0091] The first element portion 10A is located between the first fixed portion 31 and the second fixed portion 32 in a third direction D3 that intersects with the first direction D1 and the second direction D2. The second element portion 10B is located between the third fixed portion 33 and the fourth fixed portion 34 in the third direction D3.

[0092] In the sensor 120, the fifth fixing portion 35 is shared by the first element portion 10A and the second element portion 10B. Stable support is obtained. The size of the sensor 120 can be reduced. For example, a small "footprint" can be obtained.

[0093] A first gap g1 is provided between the base body 50s and the first element portion 10A (see FIG. 2(a)). A second gap g2 is provided between the base body 50s and the second element portion 10B (see FIG. 3(c)).

[0094] In the sensor 120, a conductive member (wiring) electrically connected to the first conductive member 11 may pass through the sixth connection portion 36c and the fifth connection portion 35c. In this case, a conductive member (wiring) electrically connected to the first other conductive member 21 may pass through the first connection portion 31c and the second connection portion 32c. A conductive member (wiring) electrically connected to the second conductive member 12 may pass through the fifth other connection portion 35Ac and the seventh connection portion 37c.

[0095] (Third embodiment) FIG. 9 is a schematic plan view illustrating the sensor according to the third embodiment. 9, a sensor 210 according to the embodiment includes a sensor according to the first or second embodiment (e.g., sensor 110) and another sensor. The other sensor includes at least one of a capacitive gas sensor 141 (e.g., a capacitive hydrogen sensor), a capacitive humidity sensor 142, a temperature sensor 143, a gas flow sensor 144, and a catalytic combustion sensor 145. The sensor according to the first embodiment (e.g., sensor 110) includes, for example, a thermal conduction gas sensor. The sensor 210 is, for example, a sensor system.

[0096] Various types of sensors may be provided in the sensor 210. Highly accurate and convenient sensors may be provided. In an embodiment, the detection results of one sensor of a different type may be used to correct the detection results of two other sensors.

[0097] The embodiments may include the following technical solutions. (Technical proposal 1) a substrate; a first fixed portion fixed to the base; a second fixing portion fixed to the base; a third fixed portion fixed to the base; a fourth fixed portion fixed to the base; a first element portion including a first conductive member and a first other conductive member; a second element portion including a second conductive member; a first connection portion supported by the first fixed portion and supporting the first element portion; a second connection portion supported by the second fixed portion and supporting the first element portion; a first other connection portion supported by the first fixed portion and supporting the second element portion; a third connection portion supported by the third fixed portion and supporting the second element portion; a fourth connection portion supported by the fourth fixed portion and supporting the first element portion; a fourth other connection portion supported by the fourth fixed portion and supporting the second element portion; Equipped with the first connection portion and the second connection portion are configured to pass a first current flowing through the first conductive member; the first connection portion is configured to pass a first other current flowing through the first other conductive member; The sensor, wherein the first other connection portion is configured to pass a second current through the second conductive member.

[0098] (Technical proposal 2) the second connection portion is configured to pass the first other current; The sensor according to Technical Solution 1, wherein the third connection portion is configured to pass the second current.

[0099] (Technical proposal 3) a second direction from the first fixed portion to the third fixed portion intersects with a first direction from the base to the first fixed portion, A sensor described in Technical Solution 1 or 2, wherein a third direction from the first fixed portion to the second fixed portion intersects with a plane including the first direction and the second direction.

[0100] (Technical proposal 4) The sensor described in Technical Solution 3, wherein the first current, the first other current, and the second current do not pass through the fourth connection portion and the fourth other connection portion.

[0101] (Technical proposal 5) a fifth fixed portion fixed to the base; a sixth fixed portion fixed to the base; a fifth connection portion supported by the fifth fixed portion and supporting the first element portion; a sixth connection portion supported by the sixth fixed portion and supporting the second element portion; Furthermore, a direction from the fifth fixed portion to the fourth fixed portion is along the second direction; The sensor described in Technical Solution 3, wherein the direction from the sixth fixed portion to the fourth fixed portion is along the third direction.

[0102] (Technical proposal 6) The sensor described in Technical Solution 5, wherein the first current, the first other current, and the second current do not pass through the fourth connection portion, the fourth other connection portion, the fifth connection portion, and the sixth connection portion.

[0103] (Technical proposal 7) a first gap is provided between the base and the first element portion; The sensor according to any one of Technical Schemes 3 to 6, wherein a second gap is provided between the base and the second element portion.

[0104] (Technical proposal 8) A sensor described in any one of technical proposals 3 to 7, wherein the state of the detection object around the first element portion and the second element portion is detected by a value corresponding to the difference between the first electrical resistance of the first conductive member when the first other current flows through the first other conductive member and the second electrical resistance of the second conductive member.

[0105] (Technical proposal 9) further comprising a first electrode, a first other electrode, a second electrode, a second other electrode, and a third electrode; the first electrode is connected to a part of the first conductive member via the first connection portion; the first other electrode is connected to a part of the first other conductive member via the first connection portion, the second electrode is connected to another part of the first conductive member via the second connection portion, the second other electrode is connected to another part of the first other conductive member via the second connection portion, the third electrode is connected to a part of the second conductive member via the third connection portion, The sensor according to any one of Technical Solutions 3 to 8, wherein the first electrode is connected to another part of the second conductive member via the first other connection part.

[0106] (Technical proposal 10) a seventh fixed portion fixed to the base; a third element portion including a third conductive member and a third other conductive member; a fourth element portion including a fourth conductive member; a third other connection portion supported by the third fixed portion and supporting the third element portion; a seventh connection portion supported by the seventh fixed portion and supporting the third element portion; a fourth opposing connection portion supported by the fourth fixed portion and supporting the third element portion; a second other connection portion supported by the second fixed portion and supporting the fourth element portion; a seventh other connection portion supported by the seventh fixed portion and supporting the fourth element portion; a fourth opposing other connection portion supported by the fourth fixed portion and supporting the fourth element portion; The sensor according to Technical Solution 5 or 6, further comprising:

[0107] (Technical proposal 11) the third other connection portion and the seventh connection portion are configured to pass a third current flowing through the third conductive member; the third other connection portion and the seventh connection portion are configured to pass a third other current flowing through the third other conductive member; The sensor described in Technical Solution 10, wherein the second other connection portion and the seventh other connection portion are configured to pass a fourth current flowing through the fourth conductive member.

[0108] (Technical proposal 12) an eighth fixed portion fixed to the base; a ninth fixed portion fixed to the base; an eighth connection portion supported by the eighth fixed portion and supporting the third element portion; a ninth connection portion supported by the ninth fixed portion and supporting the fourth element portion; The sensor according to Technical Solution 11, further comprising:

[0109] (Technical proposal 13) the fourth fixed portion is provided between the fifth fixed portion and the eighth fixed portion in the second direction, the first element portion is provided between the fifth fixed portion and the fourth fixed portion in the second direction, the third element portion is provided between the fourth fixed portion and the eighth fixed portion in the second direction, the second element portion is provided between the first fixed portion and the third fixed portion in the second direction, the fourth element portion is provided between the second fixed portion and the seventh fixed portion in the second direction, the fourth fixed portion is provided between the sixth fixed portion and the ninth fixed portion in the third direction, the second element portion is provided between the sixth fixed portion and the fourth fixed portion in the third direction, the fourth element portion is provided between the fourth fixed portion and the ninth fixed portion in the third direction, the first element portion is provided between the first fixed portion and the second fixed portion in the third direction, The sensor described in Technical Proposal 12, wherein the third element portion is provided between the third fixed portion and the seventh fixed portion in the third direction.

[0110] (Technical proposal 14) further comprising a third electrode, a third other electrode, a fourth electrode, and a fourth other electrode; the third electrode is connected to a part of the third conductive member via the third other connection portion, the third other electrode is connected to a part of the third other conductive member via the third other connection portion, the fourth electrode is connected to another part of the third conductive member via the seventh connection portion, The sensor according to any one of Technical Solutions 10 to 13, wherein the fourth other electrode is connected to another part of the third other conductive member via the seventh connection portion.

[0111] (Technical proposal 15) the second element portion further includes a second other conductive member, The sensor according to any one of Technical Schemes 1 to 14, wherein no current is supplied to the second other conductive member. (Technical proposal 16) the first element portion further includes a first insulating member, at least a portion of the first insulating member is provided between the first conductive member and the first other conductive member; the second element portion further includes a second insulating member, The sensor according to any one of Technical Schemes 1 to 15, wherein at least a portion of the second insulating member is provided around the second conductive member.

[0112] (Technical proposal 17) A sensor described in any one of technical proposals 1 to 16, wherein at least one of the first conductive member, the first other conductive member, and the second conductive member includes at least one selected from the group consisting of Ti, Al, TiN, Pt, and Au. (Technical proposal 18) The sensor according to any one of Technical Schemes 1 to 17, wherein at least one of the first conductive member, the first other conductive member, and the second conductive member has a meander structure.

[0113] (Technical proposal 19) The sensor described in Technical Solution 1, wherein the fourth connection portion is configured to pass the first other current.

[0114] (Technical proposal 20) a substrate; a first fixed portion fixed to the base; a second fixing portion fixed to the base; a third fixed portion fixed to the base; a fourth fixed portion fixed to the base; a fifth fixed portion fixed to the base; a sixth fixed portion fixed to the base; a seventh fixed portion fixed to the base; a first element portion including a first conductive member and a first other conductive member; a second element portion including a second conductive member; a first connection portion supported by the first fixed portion and supporting the first element portion; a second connection portion supported by the second fixed portion and supporting the first element portion; a third connection portion supported by the third fixed portion and supporting the second element portion; a fourth connection portion supported by the fourth fixed portion and supporting the second element portion; a fifth connection portion supported by the fifth fixed portion and supporting the first element portion; a sixth connection portion supported by the sixth fixed portion and supporting the first element portion; a fifth other connection portion supported by the fifth fixed portion and supporting the second element portion; a seventh connection portion supported by the seventh fixed portion and supporting the second element portion; Equipped with the first connection portion and the second connection portion are configured to pass a first current flowing through the first conductive member; the fifth connection portion and the sixth connection portion are configured to pass a first other current flowing through the first other conductive member; the third connection portion and the fourth connection portion are configured to pass a second current flowing through the second conductive member; the fifth fixed portion is located between the sixth fixed portion and the seventh fixed portion in a second direction intersecting a first direction from the base to the first fixed portion, the first element portion is located between the sixth fixed portion and the fifth fixed portion in the second direction, the second element portion is located between the fifth fixed portion and the seventh fixed portion in the second direction, the first element portion is located between the first fixed portion and the second fixed portion in a third direction intersecting the first direction and the second direction; The sensor, wherein the second element portion is located between the third fixed portion and the fourth fixed portion in the third direction.

[0115] According to the embodiment, a sensor capable of improving characteristics can be provided.

[0116] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the elements included in the sensor, such as the substrate, element unit, and control unit, are within the scope of the present invention as long as a person skilled in the art can implement the present invention in a similar manner and obtain similar effects by appropriately selecting them from known ranges.

[0117] Furthermore, any combination of two or more elements of each specific example within the scope of technical feasibility is also included within the scope of the present invention as long as it includes the gist of the present invention.

[0118] In addition, all sensors that can be implemented by a person skilled in the art by appropriately modifying the design based on the sensor described above as an embodiment of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.

[0119] In addition, within the scope of the concept of the present invention, a person skilled in the art may come up with various modifications and alterations, and it will be understood that these modifications and alterations also fall within the scope of the present invention.

[0120] Although several embodiments of the present invention have been described, these embodiments are presented as examples and are not intended to limit the scope of the invention. These novel embodiments can be embodied in various other forms, and various omissions, substitutions, and modifications can be made without departing from the spirit of the invention. These embodiments and their modifications are included within the scope and spirit of the invention, and are also included in the scope of the invention and its equivalents as defined in the claims. [Explanation of symbols]

[0121] 10A to 10D: first to fourth element portions, 11 to 14: first to fourth conductive members, 11f to 14f: first to fourth films, 11i to 14i: first to fourth insulating members, 21 to 24: first to fourth other conductive members, 31 to 39: first to ninth fixing portions, 31Ac to 35Ac: first to fifth other connecting portions, 31c to 39c: first to ninth connecting portions, 34Cc: fourth opposing connecting portion, 34Dc: fourth opposing other connecting portion, 37Ac: seventh other connecting portion, 50s: base, 51 to 54: first to fourth electrodes, 51A to 54A: first to fourth other electrodes, 70: control portion, 110, 111, 112, 120, 210: sensor, 141: capacitive gas sensor, 142: Capacitive humidity sensor, 143: Temperature sensor, 144: Gas flow sensor, 145: Catalytic combustion sensor, D1 to D3: 1st to 3rd directions, H+, H-: Voltage, VB+, VB-: Voltage, Vout+, Vout-: Output, g1 to g4: 1st to 4th gaps, i1 to i4: 1st to 4th currents, iA1, iA3: 1st, 3rd and other currents

Claims

1. a substrate; a first fixed portion fixed to the base; a second fixing portion fixed to the base; a third fixed portion fixed to the base; a fourth fixed portion fixed to the base; a first element portion including a first conductive member and a first other conductive member; a second element portion including a second conductive member; a first connection portion supported by the first fixed portion and supporting the first element portion; a second connection portion supported by the second fixed portion and supporting the first element portion; a first other connection portion supported by the first fixed portion and supporting the second element portion; a third connection portion supported by the third fixed portion and supporting the second element portion; a fourth connection portion supported by the fourth fixed portion and supporting the first element portion; a fourth other connection portion supported by the fourth fixed portion and supporting the second element portion; Equipped with the first connection portion and the second connection portion are configured to pass a first current flowing through the first conductive member; the first connection portion is configured to pass a first other current flowing through the first other conductive member; The sensor, wherein the first other connection portion is configured to pass a second current through the second conductive member.

2. the second connection portion is configured to pass the first other current; The sensor of claim 1 , wherein the third connection is configured to pass the second current.

3. a second direction from the first fixed portion to the third fixed portion intersects with a first direction from the base to the first fixed portion, The sensor according to claim 1 , wherein a third direction from the first fixed portion to the second fixed portion intersects with a plane including the first direction and the second direction.

4. The sensor according to claim 3 , wherein the first current, the first other current, and the second current do not pass through the fourth connection portion and the fourth other connection portion.

5. a fifth fixed portion fixed to the base; a sixth fixing portion fixed to the base; a fifth connection portion supported by the fifth fixed portion and supporting the first element portion; a sixth connection portion supported by the sixth fixed portion and supporting the second element portion; Furthermore, a direction from the fifth fixed portion to the fourth fixed portion is along the second direction; The sensor according to claim 3 , wherein a direction from the sixth fixed portion to the fourth fixed portion is along the third direction.

6. A sensor as described in any one of claims 3 to 5, wherein the state of the detection object around the first element portion and the second element portion is detected by a value corresponding to the difference between a first electrical resistance of the first conductive member when the first other current flows through the first other conductive member and a second electrical resistance of the second conductive member.

7. a seventh fixing portion fixed to the base; a third element portion including a third conductive member and a third other conductive member; a fourth element portion including a fourth conductive member; a third other connection portion supported by the third fixed portion and supporting the third element portion; a seventh connection portion supported by the seventh fixed portion and supporting the third element portion; a fourth opposing connection portion supported by the fourth fixed portion and supporting the third element portion; a second other connection portion supported by the second fixed portion and supporting the fourth element portion; a seventh other connection portion supported by the seventh fixed portion and supporting the fourth element portion; a fourth opposing other connection portion supported by the fourth fixed portion and supporting the fourth element portion; The sensor of claim 5 further comprising:

8. the third other connection portion and the seventh connection portion are configured to pass a third current flowing through the third conductive member; the third other connection portion and the seventh connection portion are configured to pass a third other current flowing through the third other conductive member, The sensor according to claim 7 , wherein the second other connection portion and the seventh other connection portion are configured to pass a fourth current flowing through the fourth conductive member.

9. The sensor of claim 1 , wherein the fourth connection is configured to pass the first other current.

10. a substrate; a first fixed portion fixed to the base; a second fixing portion fixed to the base; a third fixed portion fixed to the base; a fourth fixed portion fixed to the base; a fifth fixed portion fixed to the base; a sixth fixing portion fixed to the base; a seventh fixing portion fixed to the base; a first element portion including a first conductive member and a first other conductive member; a second element portion including a second conductive member; a first connection portion supported by the first fixed portion and supporting the first element portion; a second connection portion supported by the second fixed portion and supporting the first element portion; a third connection portion supported by the third fixed portion and supporting the second element portion; a fourth connection portion supported by the fourth fixed portion and supporting the second element portion; a fifth connection portion supported by the fifth fixed portion and supporting the first element portion; a sixth connection portion supported by the sixth fixing portion and supporting the first element portion; a fifth other connection portion supported by the fifth fixed portion and supporting the second element portion; a seventh connection portion supported by the seventh fixed portion and supporting the second element portion; Equipped with the first connection portion and the second connection portion are configured to pass a first current flowing through the first conductive member; the fifth connection portion and the sixth connection portion are configured to pass a first other current flowing through the first other conductive member; the third connection portion and the fourth connection portion are configured to pass a second current flowing through the second conductive member; the fifth fixed portion is located between the sixth fixed portion and the seventh fixed portion in a second direction intersecting a first direction from the base to the first fixed portion, the first element portion is located between the sixth fixed portion and the fifth fixed portion in the second direction, the second element portion is located between the fifth fixed portion and the seventh fixed portion in the second direction, the first element portion is located between the first fixed portion and the second fixed portion in a third direction intersecting the first direction and the second direction, The sensor, wherein the second element portion is located between the third fixed portion and the fourth fixed portion in the third direction.

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