Storage case

Abstract

To provide a storage case capable of preventing a board from being lifted when stored.SOLUTION: An accommodation case (100) is provided with a base member (110) having a recessed section (111) capable of accommodating a silicon substrate (1), a cover member (130) for covering the recessed section (111) of the base member (110), and a hinge member (130) for rotatably connecting the base member (110) and the cover member (120), wherein the base member (110) has the recessed section (111) formed such that an extension line of a diagonal line (L1) connecting a pair of corners of the recessed section (111) and the rotation axis (Lc) of the hinge member (120) intersect each other at an angle of not less than 60 ° but not more than 90 °. The pedestal portions 112a to 112d that support the corners of the silicon substrate 1 are formed at the respective corners of the recessed portion 111, and the cover member 120 is formed with the protrusion-shaped pressing portions 121a and 121c that face the pedestal portion 112d and the 112c at the other pair of corners of the recessed portion 111 of the base member 110 excluding the pedestal portion 112a closest to the hinge member 130 in the closed state.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a storage case for storing and transporting a substrate such as an aperture for shaping an electron beam. [Background technology]

[0002] For example, a storage case that can store and transport substrates such as photomasks and photomask blanks used in the manufacture of semiconductor devices one by one is known from the following Patent Document 1. This storage case has an upper lid and a lower lid connected via a hinge so that they can be opened and closed freely, and has support parts at each corner of the inside of the upper and lower lids that support each corner of the substrate, and is equipped with a locking mechanism that can keep the upper and lower lids closed.

[0003] In such a storage case, when each corner of the substrate is placed on the support parts of the lower lid and the top lid is closed, the support parts of the upper lid together with the support parts of the lower lid clamp each corner of the substrate, thereby holding the substrate without directly pressing on the front or back of the substrate. Therefore, the storage case prevents the front or back of the substrate from being damaged during storage, and prevents the substrate from being rubbed against the surface and rear of the substrate from being generated by dust due to vibration during transport, which could contaminate the front or rear of the substrate. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2005-088921 Summary of the Invention [Problem to be solved by the invention]

[0005] It is being considered to utilize the structure of the storage case for substrates such as photomasks and photomask blanks as described above to create a storage case for square silicon substrates such as apertures that shape electron beams. Incidentally, silicon substrates such as apertures are thinner (about 0.6 mm) and lighter (about 4 g) than substrates such as photomasks and photomask blanks, which are thicker (about 6 mm) and heavier (about 325 g).

[0006] Therefore, when applied to a storage structure for silicon substrates such as apertures, as the top cover is closed, the support parts at the two corners on the hinge side begin to clamp the substrate before the support parts at the other two corners, causing the other two corners of the substrate to be lifted, which could damage the substrate.

[0007] In view of the above, an object of the present invention is to provide a storage case that can prevent a substrate from being lifted up when stored. [Means for solving the problem]

[0008] In order to solve the above-mentioned problems, the storage case of the present invention is a storage case for storing a square-shaped substrate, comprising: a base member having a recess capable of accommodating the substrate; a cover member that covers the recess of the base member; and a hinge member that rotatably connects the base member and the cover member so that the cover member can be opened and closed relative to the recess of the base member, wherein the recesses of the base member are formed with corners that abut corresponding to each corner of the substrate, the recesses of the base member are formed so that an extension of a diagonal line connecting the pair of corners of the recesses intersects with the rotation axis of the hinge member at an angle of 60° or more and 90° or less, and pedestal portions that support the corners of the substrate are formed at each of the corners of the recesses, and the cover member is formed with protruding pressing portions that face the pedestal portions of at least the other pair of corners of the recesses of the base member, excluding the pedestal portion closest to the hinge member, when in a closed state.

[0009] Furthermore, it is preferable that the storage case of the present invention is the above-described storage case, wherein the pressing portions of the cover member are each arranged to face all of the base portions except for the base portion closest to the hinge member when the cover member is in a closed state.

[0010] Furthermore, in the storage case according to the present invention, it is preferable that, in the above-described storage case, the base member has gaps formed at the corners of the recesses to avoid contact with corners of the substrate.

[0011] Furthermore, in the storage case according to the present invention, it is preferable that the base member has a recess formed between adjacent corners of the recess, the recess communicating with the recess.

[0012] Furthermore, the storage case according to the present invention is preferably the above-described storage case, further comprising a locking means for holding the base member and the cover member in a closed state. [Effects of the Invention]

[0013] The storage case according to the present invention can prevent the substrate from being lifted up when storing or removing the substrate, thereby significantly reducing contamination and damage to the substrate. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is a perspective view showing the appearance of a storage case according to a main embodiment of the present invention; [Figure 2] FIG. 2 is a plan view of the storage case of FIG. [Figure 3] FIG. 3 is a view seen from the direction of the arrow III in FIG. 2. [Figure 4] 4 is a view seen from the direction of the arrow IV in FIG. 2. [Figure 5] FIG. 2 is a perspective view showing the storage case of FIG. 1 in an open state. [Figure 6] 6 is an enlarged view of the portion indicated by the arrow XI in FIG. 5. [Figure 7]FIG. 6 is a plan view of the inner surface of the base member of FIG. 5. [Figure 8] 6 is a plan view of the inner surface of the cover member of FIG. 5. FIG. [Figure 9] 6 is a perspective view of the storage case of FIG. 5 in the middle of opening and closing. FIG. [Figure 10] FIG. 3 is an internal perspective view of FIG. 2. DETAILED DESCRIPTION OF THE INVENTION

[0015] The following describes embodiments of the storage case according to the present invention with reference to the drawings. Note that the present invention is not limited to the following embodiments described with reference to the drawings, and various technical matters described in each embodiment can be appropriately combined or substituted as needed.

[0016] [Main embodiment] Main embodiments of a storage case according to the present invention will be described with reference to FIGS.

[0017] [Overall configuration of the storage case] 1 to 5, the storage case according to this embodiment is a storage case 100 for storing a square silicon substrate such as an aperture, and includes a base member 110 having a recess 111 capable of storing the substrate, a cover member 120 that covers the recess 111 of the base member 110, and a hinge member 130 that rotatably connects the base member 110 and the cover member 120 so that the cover member 120 can be opened and closed relative to the recess 111 of the base member 110. Furthermore, the storage case 100 includes a locking mechanism 140 that is a locking means for holding the base member 110 and the cover member 120 in a closed state.

[0018] [Base member 110] 5 to 7, 9, and 10, a square recess 111 for detachably accommodating a silicon substrate 1, which is a square silicon substrate such as an aperture, is formed in the center of the inner surface of base member 110, which is a rectangular flat plate. This recess 111 has corners that abut against each corner of silicon substrate 1, and is formed in base member 110 so that an extension of a diagonal line L1 connecting a pair of corners is perpendicular to the rotation axis Lc of hinge member 130 (see FIG. 10).

[0019] At each corner of the recess 111 of the base member 110, pedestals 112a to 112d for supporting the corners of the silicon substrate 1 are formed, and gaps 113a to 113d for avoiding contact with the corners of the silicon substrate 1 are also formed. Between adjacent corners of the recess 111 of the base member 110, recesses 114a to 114d that communicate with the recess 111 are formed.

[0020] [Cover member 120] 5, 8 to 10, protruding pressing portions 121a to 121c are formed on the inner surface of cover member 120, which has a rectangular flat plate shape, so that when cover member 120 is closed to fit with base member 110, protruding pressing portions 121a to 121c face all of pedestal portions 112a to 112c except for pedestal portion 112d that is closest to hinge member 130 and press the corners of silicon substrate 1. In other words, pressing portions 121a to 121c are formed near the other side surfaces 120a to 120c of cover member 120 except for the side surface 120d to which hinge member 130 is attached. These pressing portions 121a to 121c are triangular prism-shaped and correspond to the corners of recess 111 of base member 110.

[0021] [Hinge member 130] As shown in FIGS. 1 to 3, one blade 132 of hinge member 130 is fixed to side surface 120d of cover member 120 with a screw 134. The other blade 131 of hinge member 130 is fixed to side surface 110d of base member 110, which is paired with side surface 120d of cover member 120, with a screw 134. A spindle 133 is inserted into tubular portions 131a and 132a of blades 131 and 132. In other words, hinge member 130 connects base member 110 and cover member 120 via blades 131 and 132 so that they can rotate about spindle 133 as the rotation axis between a closed state (rotation angle 0° / see FIG. 1) and an open state (rotation angle 180° / see FIG. 5).

[0022] [Locking mechanism 140] 1 to 4 and 9, a slide rail 141 is provided on side surface 110b opposite side surface 110d of base member 110 to which hinge member 130 is attached, with the longitudinal direction facing the direction connecting the other side surfaces 110a and 110c. Slide rail 141 is missing near one end (near the left end in FIG. 9).

[0023] A slide rail 142 is provided on side surface 120b opposite side surface 120d of cover member 120 to which hinge member 130 is attached, with the longitudinal direction facing the direction connecting the other side surfaces 120a, 120c. Slide rail 142 is set to a size and position that compensates for the missing portion of slide rail 141 when base member 110 and cover member 120 are in a closed state.

[0024] A slide knob 143 that is slidable along the slide rail 141 is engaged with the slide rail 141. When the base member 110 and the cover member 120 are in a closed state, the slide knob 143 is engaged with both slide rails 141, 142 to lock the base member 110 and the cover member 120 in the closed state. On the other hand, when the slide knob 143 is engaged only with the slide rail 141, it is unlocked so that the base member 110 and the cover member 120 can be opened.

[0025] [Action and effect] In the storage case 100 according to this embodiment, when the silicon substrate 1 is stored in the recess 111 of the base member 110, the pedestals 112a to 112d support the corners of the silicon substrate 1. Therefore, the silicon substrate 1 can be supported without the central portion of the silicon substrate 1 coming into direct contact with the base member 110, which significantly reduces contamination and damage to the central portion of the silicon substrate 1. Furthermore, because the gaps 113a to 113d are formed at the corners of the recess 111, it is possible to prevent the corners of the silicon substrate 1 from colliding with the base member 110, which significantly reduces damage to the corners of the silicon substrate 1.

[0026] Next, cover member 120 is closed so as to align base member 110 and cover member 120. Accordingly, first, pressing portions 121a and 121c of cover member 120 come into contact with two corners of silicon substrate 1 on pedestal portions 112a and 112c located on a diagonal line within recess 111 of base member 110, respectively, and simultaneously press down the two diagonal corners of silicon substrate 1.

[0027] As cover member 120 continues to be closed, silicon substrate 1 remains stationary without being lifted, and pressing portion 121b of cover member 120 comes into contact with the corners of silicon substrate 1 on pedestal portion 112b of base member 110. As a result, three corners of silicon substrate 1 are pressed against pedestal portions 112a to 112c, and silicon substrate 1 is held without being damaged.

[0028] Finally, the slide knob 143 of the locking mechanism 140 is slid to engage with both slide rails 141 and 142, thereby holding the base member 110 and the cover member 120 in a closed state, thereby enabling the silicon substrate 1 to be stored or transported.

[0029] On the other hand, when removing the silicon substrate 1 from the storage case 100, the slide knob 143 of the locking mechanism 140 is slid to disengage from the slide rail 142. This releases the lock so that the base member 110 and the cover member 120 can be opened. When the base member 110 and the cover member 120 are opened, the base member 110 and the cover member 120 can be rotated to a flat state (rotation angle 180° / see FIG. 5), allowing the storage case 100 to be handled in a stable state.

[0030] At this time, the two corners of the silicon substrate 1 on the pedestal portions 112a, 112c located on a diagonal line within the recess 111 of the base member 110 are finally released from the pressure exerted by the pressing portions 121a, 121c of the cover member 120. Therefore, just as when closing the cover member 120, the cover member 120 can be opened while the silicon substrate 1 is left in a stationary state without being lifted, and contamination and damage to the silicon substrate 1 can be significantly suppressed.

[0031] Next, by inserting fingers into depressions 114a to 114d of base member 110 and holding the sides of silicon substrate 1, silicon substrate 1 can be removed from recess 111 of base member 110 without touching the center portion of silicon substrate 1.

[0032] Therefore, according to the storage case 100 of this embodiment, the silicon substrate 1 can be prevented from rising when stored in or taken out, and contamination, damage, etc. of the silicon substrate 1 can be significantly suppressed.

[0033] [Other embodiments] In the above-described embodiment, the storage case 100 is described as having a base member 110 formed so that the extension of the diagonal line L1 connecting a pair of corners of the recess 111 is perpendicular to the rotation axis Lc of the hinge member 130. However, the present invention is not limited to this. Any storage case including a base member in which a recess is formed so that the diagonal line L1 and the rotation axis Lc intersect at an angle of 60° to 90° (more preferably 75° to 90°, and most preferably 90°) and a cover member having a corresponding pressing portion can provide the same effects as those of the above-described embodiment.

[0034] In the above-described embodiment, the storage case 100 is provided with the cover member 120 in which the pressing portions 121a to 121c are formed facing all of the base portions 112a to 112c except for the base portion 112d that is closest to the hinge member 130. However, the present invention is not limited to this. As another embodiment, for example, it is also possible to provide a storage case provided with a cover member in which the pressing portions 121a and 121c are formed facing the base portions 112a and 112c, further excluding the base portion 112b that is farthest from the hinge member 130.

[0035] In other words, if the storage case is provided with a cover member having pressing portions 121a, 121c formed to face at least the base portions 112a, 112c at the other pair of corners of the recess 111, excluding the base portion 112d closest to the hinge member 130, when in the closed state, the same effects as those in the above-described embodiment can be obtained.

[0036] In the above-described embodiment, the storage case 100 is provided with the cover member 120 having the triangular prism-shaped retaining portions 121a to 121c, but the present invention is not limited to this. As another embodiment, it is also possible to provide a storage case provided with a cover member having retaining portions that are cylindrical, in addition to other polygonal prism shapes such as a square prism or a cylindrical shape.

[0037] In the above-described embodiment, the storage case 100 employs the hinge member 130 in which the blades 131, 132 are fixed to the base member 110 and the cover member 120 with screws 134, but the present invention is not limited to this. As other embodiments, it is possible to employ a storage case employing a hinge member in which the blades are fixed to the base member 110 and the cover member 120 with an adhesive, or a hinge member in which the blades are integrally formed with the base member and the cover member.

[0038] In the above-described embodiment, the storage case 100 is described as having a rectangular base member 110 and a rectangular cover member 120, but the present invention is not limited to this. In other embodiments, the storage case may have a circular or triangular base member and a rectangular cover member. [Industrial Applicability]

[0039] The storage case of the present invention can prevent the substrate from lifting up when storing or removing it, and can significantly reduce contamination and damage to the substrate, making it extremely useful in various industries including the semiconductor device manufacturing industry. [Explanation of symbols]

[0040] 1. Silicon substrate 100 storage cases 110 Base member 110a~110d Side 111 recess 112a~112d Pedestal 113a~113d void area 114a~114d depression 120 Cover member 120a~120d Side 121a~121c Holding part 130 Hinge member 131,132 Feather body 131a,132a Cylindrical part 133 Mandrel 134 Bis 140 Locking mechanism 141,142 Slide rail 143 Slide knob

Claims

1. A storage case for storing a square substrate, a base member having a recess capable of accommodating the substrate; a cover member that covers the recess of the base member; a hinge member that rotatably connects the base member and the cover member so that the cover member can be opened and closed relative to the recess of the base member; Equipped with the recessed portion of the base member has corners formed therein that correspond to and abut against corners of the substrate; the base member has recesses formed such that an extension of a diagonal line connecting the pair of corners of the recesses intersects with a rotation axis of the hinge member at an angle of 60° to 90°, and pedestals for supporting the corners of the substrate are formed at the corners of the recesses, The cover member has protruding pressing portions formed on the cover member in a closed state, the pressing portions facing the pedestal portions at the corners of at least the other pair of the recesses of the base member, excluding the pedestal portion closest to the hinge member. A storage case characterized by:

2. The pressing portions of the cover member are provided so as to face all of the base portions except for the base portion closest to the hinge member when the cover member is in a closed state.

2. The storage case according to claim 1.

3. The base member has gaps formed at the corners of the recesses to prevent contact with the corners of the substrate.

2. The storage case according to claim 1.

4. The base member has a recess formed between the adjacent corners of the recess, the recess communicating with the recess.

2. The storage case according to claim 1.

5. A locking means is provided to hold the base member and the cover member in a closed state.

2. The storage case according to claim 1.

Images