Cryopump transfer support instrument and method of using the same

Abstract

To provide a technique for supporting attachment or detachment of a cryopump to or from a vacuum chamber.SOLUTION: A cryopump transfer support apparatus 10 for attaching or detaching a cryopump 200 to or from a vacuum chamber 102 is provided. The cryogenic pump transportation support instrument 10 includes a base 12 that is detachably installed below the vacuum chamber 102 and is configured to guide the cryogenic pump 200 from a first position P1 on the base 12 where the cryogenic pump 200 is carried in or out to a second position P2 on the base 12 facing the opening 104 of the vacuum chamber 102 or from the second position P2 to the first position P1, and a jack 20 that raises the cryogenic pump 200 to the opening 104 or lowers the cryogenic pump 200 from the opening 104 when the cryogenic pump 110 is at the second position.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] The present invention relates to a cryopump transport support tool and a method for using the cryopump transport support tool. [Background technology]

[0002] A cryopump is a vacuum pump that captures gas molecules by condensation or adsorption on cryopanels cooled to extremely low temperatures and then exhausts them. Cryopumps are installed, for example, in the vacuum chamber of a vacuum processing device to provide a vacuum environment within the vacuum chamber. An example of a vacuum processing device is a semiconductor manufacturing device for processing semiconductor wafers. [Prior art documents] [Patent documents]

[0003] [Patent Document 1] Japanese Patent Publication No. 2022-83523 Summary of the Invention [Problem to be solved by the invention]

[0004] For cryopump maintenance, the cryopump may be removed from the vacuum chamber. A new cryopump that has been maintained is then installed in the vacuum chamber. This cryopump installation and removal work is typically performed manually. However, cryopumps are quite heavy, weighing tens of kilograms, and the vacuum process equipment is surrounded by various other related equipment, limiting the work space, making this a significant burden for the worker. Nevertheless, from the perspective of improving productivity, it is desirable to complete the installation and removal work of cryopumps as quickly as possible to minimize downtime of vacuum process equipment.

[0005] It is an exemplary object of an embodiment of the present invention to provide a technique to assist in the installation or removal of a cryopump from a vacuum chamber. [Means for solving the problem]

[0006] According to one aspect of the present invention, there is provided a cryopump transfer support tool for installing or removing a cryopump in a vacuum chamber. The cryopump transfer support tool includes: a base removably installed below the vacuum chamber, the base configured to guide the cryopump from a first position on the base where the cryopump is loaded or unloaded to a second position on the base facing an opening of the vacuum chamber, or from the second position to the first position; and a jack for raising or lowering the cryopump to or from the opening when the cryopump is in the second position.

[0007] According to one aspect of the present invention, there is provided a method of using a cryopump transfer support tool. The cryopump transfer support tool includes a base and a jack. The method includes temporarily installing the cryopump transfer support tool below a vacuum chamber, loading the cryopump into a first position on the base, guiding the cryopump from the first position to a second position on the base opposite an opening of the vacuum chamber, and lifting the cryopump to the opening with the jack when the cryopump is in the second position.

[0008] According to one aspect of the present invention, there is provided a method of using a cryopump transport support tool. The cryopump transport support tool includes a base and a jack. The method includes temporarily installing the cryopump transport support tool below a vacuum chamber, lowering the cryopump from an opening of the vacuum chamber to a second position on the base of the cryopump transport support tool using the jack, guiding the cryopump from the second position to a first position on the base, and removing the cryopump from the first position. [Effects of the Invention]

[0009] According to the present invention, a technique for assisting in the installation or removal of a cryopump in a vacuum chamber can be provided. [Brief explanation of the drawings]

[0010] [Figure 1] 1 is a side view schematically showing a cryopump transportation support tool according to an embodiment. FIG. [Figure 2] 2 is a front view schematically showing a part of the cryopump transportation support tool shown in FIG. 1. FIG. [Figure 3] 1A to 1C are schematic diagrams illustrating a method of using a cryopump transportation support tool according to an embodiment. [Figure 4] FIG. 10 is a side view schematically showing another example of a cryopump transportation support tool according to an embodiment. [Figure 5] FIG. 5 is a top view schematically showing the cryopump transportation support tool shown in FIG. 4. [Figure 6] FIG. 10 is a schematic diagram showing another example of a cryopump transportation support tool according to the embodiment. [Figure 7] FIG. 10 is a schematic diagram showing another example of a cryopump transportation support tool according to the embodiment. [Figure 8] FIG. 10 is a schematic diagram showing another example of a cryopump transportation support tool according to the embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0011] Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the description and drawings, identical or equivalent components, parts, and processes are designated by the same reference numerals, and redundant explanations will be omitted as appropriate. The scale and shape of each part shown in the drawings are set for convenience to facilitate explanation, and should not be interpreted as limiting unless otherwise specified. The embodiments are merely examples and do not limit the scope of the present invention in any way. All features and combinations thereof described in the embodiments are not necessarily essential to the invention.

[0012] Fig. 1 is a side view schematically showing a cryopump transportation support tool 10 according to an embodiment. Fig. 2 is a front view schematically showing a part of the cryopump transportation support tool 10 shown in Fig. 1. The cryopump transportation support tool 10 is used for installing or removing a cryopump 200 in a vacuum chamber 102 of a vacuum process apparatus 100.

[0013] The vacuum process apparatus 100 may be, for example, a film formation apparatus such as a physical vapor deposition (PVD) apparatus, an ion implantation apparatus, or other semiconductor manufacturing apparatus. A vacuum chamber 102 of the vacuum process apparatus 100 is installed above a floor surface 110 by an appropriate support structure (not shown). The vacuum chamber 102 is provided with an opening 104 to which a cryopump 200 is attached. In this embodiment, the opening 104 is provided on the lower surface of the vacuum chamber 102 so as to face the floor surface 110. A gate valve may be provided in the opening 104.

[0014] In addition, a storage box 106 for storing wiring and piping associated with the vacuum process apparatus 100 is installed on the floor 110. Equipment associated with the vacuum process apparatus 100, such as a power supply unit, may be placed on or inside the storage box 106. An arrangement space 108 for placing equipment associated with the vacuum process apparatus 100, such as a cryopump 200, is formed between the vacuum chamber 102 of the vacuum process apparatus 100 and the storage box 106. The arrangement space 108 can be used for attaching and detaching the cryopump 200 to and from the opening 104 of the vacuum chamber 102, as described below.

[0015] The cryopump 200 is attached to the vacuum chamber 102 of the vacuum process apparatus 100 and is used to increase the degree of vacuum inside the vacuum chamber 102 to a level required for a desired vacuum process. The cryopump 200 includes a cryopanel vessel 202, a connecting vessel 204, and a refrigerator 206. The cryopanel vessel 202 and the connecting vessel 204 constitute the vacuum vessel of the cryopump 200.

[0016] The cryopanel vessel 202 has a cylindrical shape with one open end and the other closed end. An inlet flange 208 is provided at the open end of the cryopanel vessel 202. The inlet flange 208 is attached to the opening 104 of the vacuum chamber 102. A cryopanel is housed in the cryopanel vessel 202 together with a low-temperature section of a refrigerator 206.

[0017] In this embodiment, the cryopump 200 is a so-called horizontal cryopump, and the connecting vessel 204 extends from the side of the cryopanel vessel 202 along the radial direction of the inlet flange 208. The connecting vessel 204 connects the cryopanel vessel 202 to a refrigerator 206.

[0018] The refrigerator 206 extends into the connecting vessel 204 from the end of the connecting vessel 204 opposite the cryopanel vessel 202 and is connected to the cryopanel inside the cryopanel vessel 202. The refrigerator 206 is typically a two-stage GM (Gifford-McMahon) refrigerator, but may be other cryogenic refrigerators such as a pulse tube refrigerator. The refrigerator 206 cools the cryopanel to a cryogenic temperature (e.g., 10 K to 20 K). Gas inside the vacuum chamber 102 enters the cryopanel vessel 202 through the opening 104 and is captured on the cryopanel by condensation or adsorption.

[0019] The cryopump 200 can be installed in the vacuum chamber 102 in various orientations at the site where it is used. In this embodiment, the cryopump 200 is installed in the vacuum chamber 102 in the illustrated horizontal orientation, i.e., with the inlet flange 208 facing upward. In this configuration, the bottom of the cryopanel vessel 202 is positioned below the inlet flange 208. The connecting vessel 204 and the refrigerator 206 extend in a direction parallel to the floor surface 110 (i.e., horizontally) between the inlet flange 208 and the bottom of the cryopanel vessel 202.

[0020] The weight of the cryopump 200 depends on the size and performance, but can reach several tens of kg (for example, about 20 kg to 100 kg). Therefore, to make it easier for an operator to attach and detach the cryopump 200 to and from the vacuum chamber 102, a cryopump transfer support tool 10 is used.

[0021] The cryopump transport support tool 10 includes a base 12 that is removably installed below the vacuum chamber 102 , and a jack 20 that raises and lowers the cryopump 200 relative to the base 12 .

[0022] The base 12 is configured to guide the cryopump 200 from a first position P1 to a second position P2 on the base 12, or from the second position P2 to the first position P1. The first position P1 is a position on the base 12 where the cryopump 200 is loaded into or unloaded from the base 12. The second position P2 is a position on the base 12 opposite the opening 104 of the vacuum chamber 102.

[0023] In FIG. 1, the cryopump 200, shown by a solid line, is at a first position P1 on the base 12. For ease of understanding, the cryopump 200 is shown by a two-dot chain line when it is at a second position P2 on the base 12. The guiding direction of the cryopump 200 on the base 12 (i.e., the direction from the first position P1 to the second position P2, or from the second position P2 toward the first position P1) is schematically indicated by arrow A1 in FIG. 1. Furthermore, when the cryopump 200 is at the second position P2, the jack 20 raises or lowers the cryopump 200 toward or from the opening 104. The raising and lowering (i.e., vertical movement) of the cryopump 200 by the jack 20 is schematically indicated by arrow A2 in FIG. 1.

[0024] 1 , the base 12 is installed between the vacuum chamber 102 and the storage box 106 of the vacuum process apparatus 100, with a portion of the base 12 being located in the placement space 108 of the vacuum process apparatus 100 and the remaining portion being located outside the vacuum process apparatus 100. A first position P1 on the base 12 is located outside the vacuum process apparatus 100. A second position P2 on the base 12 is located within the placement space 108.

[0025] The height at which the base 12 is installed relative to the floor surface 110 is set so that the cryopump 200 can be received between the second position on the base 12 and the opening 104 of the vacuum chamber 102. In other words, the height from the base 12 to the opening 104 of the vacuum chamber 102 is greater than the height of the cryopanel container 202 of the cryopump 200.

[0026] The base 12 may be foldable or disassembled to make it easier for an operator to carry when placing the base 12 below the vacuum chamber 102 .

[0027] The base 12 includes a base body 14 , at least one guide rail 16 , and at least one cryopump pedestal 18 .

[0028] The base body 14 is a plate, frame, or stage that supports the guide rails 16 and extends horizontally when the base 12 is placed below the vacuum chamber 102. In this embodiment, a first position P1 is defined on one half of the top surface of the base body 14, and a second position P2 is defined on the other half. The guide rails 16 are attached to the top surface of the base body 14. The base body 14 is formed of a metal material such as stainless steel or other appropriate material.

[0029] The guide rail 16 extends between a first position P1 and a second position P2 on the base 12. That is, the guide rail 16 extends from the first position P1 to the second position P2. A plurality of (e.g., two or three) guide rails 16 may be attached to the base body 14, and these guide rails 16 extend parallel to each other from the first position P1 to the second position P2. The guide rail 16 may include a rail fixed to the base body 14 and a slider provided on the rail so as to be movable along the rail. A commercially available guide rail can be used as the guide rail 16 as appropriate.

[0030] The cryopump pedestal 18 is provided on the guide rails 16 and is movable along the guide rails 16 between a first position P1 and a second position P2. The cryopump pedestal 18 may be attached to a slider on the guide rails 16, thereby allowing it to move along the guide rails 16. An operator can manually move the cryopump pedestal 18 along the guide rails 16. By moving the cryopump pedestal 18 along the guide rails 16 relative to the base body 14, the base 12 can guide the cryopump 200 from the first position P1 to the second position P2 on the base 12, or from the second position P2 to the first position P1. A jack 20 is also built into the cryopump pedestal 18.

[0031] In this embodiment, a first cryopump pedestal 18a that supports a cryopanel vessel 202 and a second cryopump pedestal 18b that supports a refrigerator 206 are provided. Fig. 2 shows the first cryopump pedestal 18a as viewed along the guide direction of the cryopump 200 on the base 12 (i.e., the direction of arrow A1). To help understand the internal structure of the cryopump pedestal 18, a cross section of the first cryopump pedestal 18a is shown.

[0032] 2, the first cryopump pedestal 18a includes a jack 20, a tray 22, and a pad 24. The tray 22 is fixed to a slider of the guide rail 16. The pad 24 is held by the tray 22 so as to be movable in the vertical direction relative to the tray 22. The jack 20 is disposed between the tray 22 and the pad 24 so as to be able to raise and lower the pad 24 relative to the tray 22.

[0033] The jack 20 may be, for example, an air jack. As schematically shown in FIG. 2, the jack 20 may include an air cushion 20a, a hose 20b, and a pump 20c. The air cushion 20a is disposed between a tray 22 and a pad 24. The hose 20b connects the air cushion 20a to the pump 20c. The pump 20c is an air supply source for the air cushion 20a. The pump 20c may be a hand pump that can be operated manually.

[0034] The pad 24 of the first cryopump pedestal 18a comes into contact with the cryopanel vessel 202. Therefore, the upper surface of the pad 24 of the first cryopump pedestal 18a may have a shape that fits the lower surface of the cryopanel vessel 202. For example, if the cryopanel vessel 202 has a flat surface, the upper surface of the pad 24 that comes into contact with it may also be flat. If the cryopanel vessel 202 has a curved surface, the upper surface of the pad 24 that comes into contact with it may also be curved. To avoid damage to the surface of the cryopump 200 due to contact, the pad 24 may be made of a material that is softer than the cryopump 200, such as a synthetic resin material.

[0035] When air is supplied to the air cushion 20a from the pump 20c and the air cushion 20a expands, the jack 20 can lift the pad 24 and the cryopanel vessel 202. When air is discharged from the air cushion 20a and the air cushion 20a deflates, the jack 20 can lower the pad 24 and the cryopanel vessel 202.

[0036] Similar to the first cryopump pedestal 18a, the second cryopump pedestal 18b also includes a jack 20, a tray 22, and a pad 24. The pad 24 of the second cryopump pedestal 18b comes into contact with the refrigerator 206. Therefore, the upper surface of the pad 24 of the second cryopump pedestal 18b may have a shape that fits the lower surface of the refrigerator 206. By supplying and discharging air to and from the air cushion 20a, the jack 20 can raise and lower the pad 24 and the refrigerator 206.

[0037] Incidentally, the installation space 108 of the vacuum process apparatus 100 tends to be narrow and has little room because various pieces of equipment related to the vacuum process apparatus 100 are arranged therein. Therefore, when a sufficient height is ensured between the opening 104 and the base 12 to accommodate the cryopump 200, the height of the installation space 108 remaining for installing the base 12 may be very small.

[0038] The guide structure using the guide rails 16 and cryopump pedestal 18 according to the embodiment is advantageous in that it can be easily adapted to such spatial constraints. For example, guide rails 16 with small height dimensions are readily available. In addition, the air cushions 20a are also thin. Therefore, the height of the guide structure can be reduced.

[0039] It should be noted that it is not essential for the cryopump support 18 to have the pad 24. If the pad 24 is not provided, the jack 20 may be in direct contact with the cryopump 200. If the jack 20 is an air jack, the air cushion 20a may be in contact with the cryopump 200. In this case, the air cushion 20a can conform to the shape of the contact surface of the cryopump 200 by being deformed by the air supplied inside. By omitting the pad 24, the height of the guide structure can be further reduced.

[0040] 1 , the base 12 includes a plurality of support legs 26. These support legs 26 are attached to the underside of the base body 14. The support legs 26 extend from the underside of the base body 14 toward a floor surface 110. The base 12 may be supported on the floor surface 110 by the support legs 26. Alternatively, as shown in the figure, some of the plurality of support legs 26 may support the base 12 on the floor surface 110, and the remaining support legs 26 may support the base 12 on the storage box 106. In this way, the support legs 26 may be arranged at different heights to allow the base 12 to be installed horizontally, and the length of the support legs 26 may be adjustable.

[0041] Casters may be provided at the tips of the support legs 26, thereby allowing the base 12 to move relative to the floor surface 110. This is advantageous as it makes it easy to adjust the position of the cryopump transport support tool 10 relative to the vacuum process apparatus 100.

[0042] In the illustrated example, the support legs 26 extend straight downward (i.e., vertically) from the base 12, but this is not limiting. For example, to prevent the cryopump transportation support tool 10 from tipping over, the support legs 26 may extend obliquely from the base 12 so that the tips of the support legs 26 are located outside the base 12 when the base 12 is viewed from above. Alternatively, the support legs 26 may be provided with outriggers.

[0043] 3 is a schematic diagram showing a method of using the cryopump transportation support tool 10 according to the embodiment. First, with reference to FIG. 3, a method of removing the cryopump 200 from the vacuum chamber 102 using the cryopump transportation support tool 10 will be described.

[0044] The removal method starts with the cryopump 200 attached to the opening 104 of the vacuum chamber 102 (S10). The cryopump transfer support tool 10 is not installed while the vacuum process apparatus 100 and the cryopump 200 are in operation. For convenience, the floor 110 and the storage box 106 of the vacuum process apparatus 100 are not shown in Figure 3.

[0045] When maintenance is performed on the vacuum process apparatus 100, or when it is permitted to remove the cryopump 200 from the vacuum chamber 102, the cryopump transport support tool 10 is installed (S11). The installation of the cryopump transport support tool 10 is temporary, and once the installation and removal work of the cryopump 200 is completed as described below, the cryopump transport support tool 10 is removed.

[0046] The cryopump transfer support tool 10 is installed below the vacuum chamber 102 so that the second position P2 on the base 12 faces the opening 104 of the vacuum chamber 102. At this time, the first position P1 on the base 12 is located outside the vacuum process apparatus 100, as described above. In addition, the cryopump transfer support tool 10 is installed so that the cryopump 200 can be received between the second position on the base 12 and the opening 104 of the vacuum chamber 102.

[0047] Typically, the cryopump transport support tool 10 is installed and used so that the guiding direction of the cryopump 200 is parallel to the central axis of the refrigerator 206. In this case, the cryopump 200 is moved on the base 12 along the central axis of the refrigerator 206. However, if the cryopump 200 may interfere with equipment attached to the vacuum process apparatus 100, such as a power supply unit, during guiding of the cryopump 200, the cryopump transport support tool 10 may be installed in another position to avoid such interference. For example, the cryopump transport support tool 10 may be installed and used so that the guiding direction of the cryopump 200 is at a certain angle from the central axis of the refrigerator 206. In this case, the cryopump 200 is moved on the base 12 in a direction oblique to the central axis of the refrigerator 206.

[0048] In preparation for supporting the cryopump 200 with the cryopump transportation support tool 10, the two cryopump pedestals 18 are moved to the second position P2 on the guide rails 16. The jacks 20 are operated to bring the cryopump pedestals 18 into contact with the cryopump 200. As described with reference to FIG. 2 , air is supplied to the air cushions 20a, thereby lifting the pads 24. This brings the first cryopump pedestal 18a into contact with the cryopanel vessel 202, and the second cryopump pedestal 18b into contact with the refrigerator 206. Then, the opening 104 and the intake port flange 208 are released from their fastening positions, and the cryopump 200 is removed from the vacuum chamber 102.

[0049] Next, the cryopump 200 is lowered by the jack 20 from the opening 104 of the vacuum chamber 102 to a second position P2 on the base 12 (S12). As described with reference to FIG. 2, air is discharged from the air cushion 20a, and the cryopump 200 is lowered together with the pad 24. The cryopump 200 moves away from the opening 104.

[0050] Next, the cryopump 200 is guided from the second position P2 to the first position P1 (S13). Because the cryopump 200 is mounted on the cryopump pedestal 18, the operator can move the cryopump 200 together with the cryopump pedestal 18 along the guide rails 16 from the second position P2 to the first position P1, thereby transporting the cryopump 200 from the second position P2 to the first position P1.

[0051] Then, the cryopump 200 is carried out from the first position P1 (S14). In this way, the worker can complete the work of removing the cryopump 200 from the vacuum chamber 102. Thereafter, the cryopump transport support tool 10 may be removed. Alternatively, the cryopump transport support tool 10 may be used to install a new cryopump 200 in the vacuum chamber 102.

[0052] The method of installing the cryopump 200 in the vacuum chamber 102 using the cryopump transfer support tool 10 can be performed in the reverse order of the removal method described above, as shown by the dashed arrow in Figure 3. Referring again to Figure 3, first, the cryopump transfer support tool 10 is temporarily installed below the vacuum chamber 102 (S14). The cryopump 200 is loaded into a first position P1 on the base 12 (S13). The cryopump 200 is guided from the first position P1 to a second position P2 (S12). When the cryopump 200 is at the second position P2, the cryopump 200 is raised by the jack 20 to the opening 104 (S11). The cryopump 200 is attached to the opening 104, and the cryopump transfer support tool 10 is removed (S10).

[0053] In this way, the cryopump transport support tool 10 can support the installation or removal of the cryopump 200 in the vacuum chamber 102. The cryopump 200 can be raised and lowered and moved horizontally relative to the opening 104 of the vacuum chamber 102 while being supported by the cryopump transport support tool 10. This reduces the workload on the worker and improves workability compared to when the work is done manually without using the cryopump transport support tool 10.

[0054] In the above-described embodiment, the first position P1 and the second position P2 are separated on the base 12 in the guiding direction of the cryopump 200, but this is not essential. As shown in Fig. 4, the first position P1 and the second position P2 may partially overlap in the guiding direction of the cryopump 200. In this way, the length of the base 12 can be shortened, making the cryopump transportation support tool 10 compact and easy to carry.

[0055] Fig. 4 is a side view schematically showing another example of the cryopump transportation support tool 10 according to the embodiment. Fig. 5 is a top view schematically showing the cryopump transportation support tool 10 shown in Fig. 4.

[0056] As shown in FIG. 5, a first guide rail 16a and a second guide rail 16b are attached to the base body 14 and extend between a first position P1 and a second position P2. In this example, two first guide rails 16a and one second guide rail 16b are provided. The two first guide rails 16a are parallel to each other. The second guide rail 16b is disposed in the middle of the two first guide rails 16a and is parallel to them. The first guide rail 16a extends to a position closer to the end of the base body 14 on the second position P2 side than the second guide rail 16b. Furthermore, the second guide rail 16b extends to a position closer to the end of the base body 14 on the first position P1 side than the first guide rail 16a.

[0057] The first cryopump pedestal 18a is provided on the first guide rail 16a and is movable along the first guide rail 16a between a first position P1 and a second position P2. The second cryopump pedestal 18b is provided on the second guide rail 16b and is movable along the second guide rail 16b between the first position P1 and the second position P2. The first cryopump pedestal 18a supports a cryopanel vessel 202, and the second cryopump pedestal 18b supports a refrigerator 206. A jack 20 is incorporated into each of the first cryopump pedestal 18a and the second cryopump pedestal 18b.

[0058] 4 and 5, the cryopump 200 can be attached to and detached from the vacuum process apparatus 100 in the same manner as described with reference to FIG.

[0059] The present invention has been described above based on examples. It will be understood by those skilled in the art that the present invention is not limited to the above-described embodiments, and that various design changes and modifications are possible, and that such modifications are also within the scope of the present invention. Various features described in relation to one embodiment can also be applied to other embodiments. A new embodiment created by combining embodiments will have the combined effects of the respective combined embodiments.

[0060] In the above-described embodiment, the base 12 utilizes the guide rails 16 and the cryopump pedestal 18 to guide the cryopump 200, but it is not essential that the base 12 include the guide rails 16 and the cryopump pedestal 18. The base 12 may have other configurations.

[0061] 6, for example, the base 12 may include a sliding surface 28 that guides the cryopump 200 by sliding it between the first position P1 and the second position P2. At least a portion of the upper surface of the base body 14 may be this sliding surface 28. The sliding surface 28 may be formed by, for example, a coating of a fluororesin material such as polytetrafluoroethylene or other low-friction material.

[0062] 7, as another example, the base 12 may include a plurality of bearings or rollers that guide the cryopump 200 between the first position P1 and the second position P2. For example, the base 12 may include a large number of free bearings 30, which may be arranged on the base 12 in a grid pattern (or other arrangement) when viewed from above. The free bearings 30 can rotate to guide the cryopump 200 in any direction on the base 12. In other words, the free bearings 30 can not only guide linear movement between the first position P1 and the second position P2, but also guide the cryopump 200 in directions different from this movement direction.

[0063] In the above embodiment, an air jack is used as the jack 20, but this is not essential. Instead of an air jack, the jack 20 may be a jack of another type, such as a mechanical type or a hydraulic type.

[0064] Furthermore, the jack 20 does not have to be incorporated into the cryopump pedestal 18. As shown in FIG. 8, for example, the jack 20 may be installed on the floor surface 110. In this case, the jack 20 may contact the cryopump 200 through an opening 32 provided in the base 12 (e.g., the first cryopump pedestal 18a) and raise and lower the cryopump 200 relative to the base 12. Such a jack 20 may be applied to the examples of FIGS. 6 and 7 described above. Note that, as shown in the figure, the jack 20 may be incorporated into the other cryopump pedestal 18 (e.g., the second cryopump pedestal 18b).

[0065] The present invention has been described using specific terms based on the embodiments, but the embodiments merely illustrate one aspect of the principles and applications of the present invention, and many modifications and changes in arrangement are permitted to the embodiments as long as they do not deviate from the concept of the present invention as defined in the claims. [Explanation of symbols]

[0066] 10 cryopump transport support equipment, 12 base, 16 guide rail, 18 cryopump support base, 18a first cryopump support base, 18b second cryopump support base, 20 jack, 102 vacuum chamber, 104 opening, 200 cryopump, P1 first position, P2 second position.

Claims

1. A cryopump transport support tool for mounting or removing a cryopump to or from a vacuum chamber, comprising: a base that is removably installed below the vacuum chamber, the base being configured to guide the cryopump from a first position on the base where the cryopump is loaded or unloaded to a second position on the base that faces an opening of the vacuum chamber, or from the second position to the first position; a jack for raising or lowering the cryopump to or from the opening when the cryopump is in the second position.

2. The base is at least one guide rail extending between the first position and the second position; 2. The cryopump transportation support tool of claim 1, further comprising: at least one cryopump support provided on the at least one guide rail and movable between the first position and the second position along the at least one guide rail.

3. 3. The cryopump transportation support tool according to claim 2, wherein the jack comprises an air jack provided on the at least one cryopump pedestal.

4. the at least one guide rail includes a first guide rail and a second guide rail extending between the first position and the second position; The at least one cryopump pedestal comprises: a first cryopump pedestal provided on the first guide rail and movable along the first guide rail between the first position and the second position; 4. The cryopump transportation support tool of claim 2, further comprising a second cryopump support provided on the second guide rail and movable between the first position and the second position along the second guide rail.

5. A method of using a cryopump transport support tool, the cryopump transport support tool comprising a base and a jack, the method comprising: temporarily installing the cryopump transfer support device below a vacuum chamber; loading a cryopump into a first position on the base; guiding the cryopump from the first position to a second position on the base opposite an opening of the vacuum chamber; and lifting the cryopump into the opening with the jack when the cryopump is in the second position.

6. A method of using a cryopump transport support tool, the cryopump transport support tool comprising a base and a jack, the method comprising: temporarily installing the cryopump transfer support device below a vacuum chamber; lowering the cryopump from the opening of the vacuum chamber to a second position on the base of the cryopump transfer support tool with the jack; guiding the cryopump from the second position to a first position on the base; and removing the cryopump from the first location.

Images