Noble metal coated plasmonic waveguide blocker for heat assisted magnetic recording head

Abstract

To provide improved thermal spot confinement in a heat assisted magnetic recording (HAMR) write head.SOLUTION: The HAMR write head 400 comprises a main pole 402, a wave guide core 410, bi-layer transducers disposed between the main pole 402 and the wave guide core 410, a dielectric spacer layer disposed adjacent to the wave guide core 410, parabolic wave guide blockers (PWBs) 416, and a noble metal layer 414 disposed between the PWB416 and the dielectric spacer layer, wherein the noble metal layer 414 is 20-100 nanometers thick and comprises any of ruthenium (Ru), iridium (Ir), platinum (Pt), gold (Au) and alloys thereof.SELECTED DRAWING: Figure 4

Description

[Technical Field]

[0001] (CROSS-REFERENCE TO RELATED APPLICATIONS) This application claims priority to U.S. Patent Application No. 18 / 783,286, filed July 24, 2024, which is incorporated herein by reference in its entirety. (Technical field) FIELD OF THE INVENTION Embodiments of the present invention relate to the field of electromechanical data storage devices, and more particularly to the field of heat-assisted magnetic recording (HAMR) write heads for hard disk drives (HDDs). [Background technology]

[0002] Volumes of digital data can be stored on disk drives, such as hard disk drives (HDDs). Disk drives may include heads that interact with a magnetic recording medium (e.g., a disk) and can read and write magnetic data on the disk. For example, a disk drive may include a write head that is positioned near the disk and can change the magnetization of the disk as it passes directly underneath.

[0003] Disk drives can utilize a variety of techniques to write to the disk. For example, thermally assisted magnetic recording (HAMR) can temporarily reduce the switching field required to align the magnetization of media grains by converting optical power into localized heating within the magnetic recording medium. Steep thermal gradients, which translate into high magnetic gradients, can enable higher data storage densities than those achievable with other magnetic recording techniques. Because the heat spot size can be made much smaller than the diffraction limit of light, favorable confinement of optical heating can be achieved by using plasmonic structures, also known as near-field transducers (NFTs). Summary of the Invention

[0004] The present embodiments relate to a noble metal coating on a parabolic waveguide blocker surface for future thermal gradient improvement in HAMR heads, which can provide improved heat spot containment over other designs. More specifically, the present embodiments relate to components within a near-field transducer (NFT) made of a metallic parabolic waveguide blocker having a noble metal coating on the waveguide blocker (PWB) surface. The designs described herein may include a noble metal coating (e.g., Au, Rh, Ir, Pt, or aluminum (Al)) that can enable plasmonic effects on the PWB surface to improve HAMR thermal gradients.

[0005] In a first exemplary embodiment, a heat-assisted magnetic recording (HAMR) write head is provided. The HAMR write head may include a main pole, a waveguide core, and a two-layer transducer disposed between the main pole and the waveguide core. The HAMR write head may also include a dielectric spacer layer disposed adjacent to the waveguide core and a parabolic waveguide blocker (PWB). The HAMR write head may also include a noble metal layer disposed between the PWB and the dielectric spacer layer.

[0006] In some examples, the noble metal layer has a thickness of 20 to 100 nanometers. In some examples, the noble metal layer includes any of ruthenium (Ru), iridium (Ir), platinum (Pt), gold (Au), and alloys thereof.

[0007] In some examples, the noble metal layer includes a parabolic shape that matches the shape of the PWB, and the PWB includes a taper angle relative to the ABS normal that is in the range of about 10 to 90 degrees. In some examples, the dielectric spacer layer comprises either silicon oxide (SiOx), aluminum oxide (AlOx), titanium oxide (TiOx), or magnesium oxide (MgOx), and the waveguide core comprises a high refractive index material such as niobium oxide (NbOx) or tantalum oxide (TaOx).

[0008] In another exemplary embodiment, a device is provided. The device may include a waveguide core, a dielectric spacer layer disposed adjacent to the waveguide core, and a waveguide blocker. The device may also include a noble metal layer disposed between the waveguide blocker and the dielectric spacer layer.

[0009] In some examples, the device may also include a main pole and a double-layer transducer disposed between the main pole and the waveguide core. In some examples, the waveguide blocker is a triangular prism shape or a parabolic shape.

[0010] In some examples, the noble metal layer has a thickness of 20 to 100 nanometers. In some examples, the noble metal layer includes any of ruthenium (Ru), iridium (Ir), platinum (Pt), gold (Au), and alloys thereof.

[0011] In some examples, the noble metal layer includes a parabolic shape that matches the shape of the PWB, and the PWB includes a taper angle relative to the ABS normal of about 10 to 90 degrees. In another exemplary embodiment, a method for fabricating a parabolic-shaped waveguide blocker having a noble metal layer is provided. The method may include depositing the metal layer over a leading shield. The method may also include applying a first photoresist (PR) mask over at least a portion of the metal layer. The method may also include etching a portion of the metal layer to form a tapered edge of the metal layer having a taper angle.

[0012] The method may also include applying a second PR mask over at least a portion of the leading shield. The method may also include depositing a noble metal layer over the metal layer and the second PR mask. The method may also include depositing a first oxide layer over the noble metal layer. The method may also include depositing a second oxide layer over the first oxide layer to function as a waveguide core.

[0013] In some examples, the metal layer includes ruthenium (Ru). In some examples, the method may also include shaping the first PR mask into a parabolic shape and shaping the second PR mask into a parabolic shape.

[0014] In some examples, etching of a portion of the metal layer is performed by an ion beam etching (IBE) process, and the taper angle is in the range of about 10 to 90 degrees relative to the ABS normal angle.

[0015] In some examples, the method may also include removing the first PR mask. In some examples, the method may also include removing the second PR mask. In some examples, the noble metal layer includes any of ruthenium (Ru), iridium (IR), gold (Au), and alloys thereof, and the thickness of the noble metal layer is between 20 and 80 nanometers.

[0016] In some examples, the method may also include planarizing the second oxide layer using a chemical mechanical planarization (CMP) process. In some examples, the first oxide layer comprises either silicon oxide (SiOx), aluminum oxide (AlOx), titanium oxide (TiOx), or magnesium oxide (MgOx), and the waveguide core comprises a high refractive index material such as niobium oxide (NbOx) or tantalum oxide (TaOx).

[0017] Other features and advantages of embodiments of the present invention will be apparent from the accompanying drawings and from the detailed description that follows. Embodiments of the present invention are illustrated by way of example, and not by way of limitation, in the figures of the accompanying drawings in which like reference numerals indicate similar elements and in which: [Brief explanation of the drawings]

[0018] [Figure 1] FIG. 1 is a cross-sectional view of a prior art HAMR NFT design. [Figure 2]FIG. 1 is a diagram of an exemplary prior art waveguide blocker. [Figure 3A] 1A-1D illustrate top and 3D views of an exemplary PWB, according to some embodiments. [Figure 3B] 1A-1D illustrate top and 3D views of an exemplary PWB, according to some embodiments. [Figure 4] 1 shows an exemplary cross-sectional view of a write head having a waveguide blocker coated with a noble metal, according to some embodiments. [Figure 5] 5A and 5B show exemplary diagrams of a PWB, according to some embodiments. [Figure 6] 1 shows an exemplary diagram of the near electric field distribution of an NFT, according to some embodiments. [Figure 7] 1 is a graphical representation of an exemplary focal length versus thermal gradient for a PWB structure, according to some embodiments. [Figure 8] 1 is a graphical representation of an exemplary focal length versus ADC (Tbpsi) for a PWB structure according to some embodiments. [Figure 9] 1 is a graphical representation of the effect of the focal length of an exemplary parabolic waveguide blocker on HAMR head performance, according to some embodiments. [Figure 10A] 10 is a graphical representation of an exemplary effect of Au film thickness on a parabolic waveguide blocker, according to some embodiments. [Figure 10B] 10 is a graphical representation of an exemplary effect of Au film thickness on a parabolic waveguide blocker, according to some embodiments. [Figure 11A] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11B] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11C]1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11D] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11E] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11F] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11G] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 11H] 1 shows a diagram of a process flow for making a parabolic shaped waveguide blocker with a noble metal coating, according to some embodiments. [Figure 12A] 1 illustrates another exemplary approach for precious metal coating processing, according to some embodiments. [Figure 12B] 1 illustrates another exemplary approach for precious metal coating processing, according to some embodiments. [Figure 12C] 1 illustrates another exemplary approach for precious metal coating processing, according to some embodiments. DETAILED DESCRIPTION OF THE INVENTION

[0019] Disk drives can utilize various technologies to write to the disk. For example, perpendicular magnetic recording (PMR) can involve magnetic bits on the disk being oriented perpendicular (e.g., either up or down) to the disk surface. PMR recording can increase storage density on the disk by aligning the poles of the magnetic elements on the disk perpendicular to the surface of the disk.

[0020] The disk drive head may further include a main pole (MP) having a tip configured to be positioned near the surface of the disk. The distance between the main pole tip and the disk can be controlled by a dynamic fly height (DFH) writer heater. In particular, the DFH writer heater can heat a portion of the head to expand or contract the MP, thereby changing the distance between the main pole tip and the disk. Electrical energy can be supplied to either the DFH writer heater or the MP tip via electrical pads to form a circuit within the head.

[0021] Thermally assisted magnetic recording (HAMR) is a promising next-generation magnetic recording technology capable of recording at data densities of 1–10 Tb / inch² (1.55–15.5 Pb / m²). By exploiting the temperature dependence of coercivity, HAMR can convert optical power into localized heating in magnetic recording media, temporarily reducing the switching field required to align the magnetization of media grains. The steep thermal gradients, which translate into high magnetic gradients, can enable higher data storage densities than those achievable with other magnetic recording technologies. Because the heat spot size can be much smaller than the diffraction limit of light, plasmonic structures, also known as near-field transducers (NFTs), can be used to achieve the desired confinement of optical heating.

[0022] In a HAMR recording head, near-field surface plasmon resonance on the NFT is excited by the waveguide, heating the recording medium. Although most of the optical energy is coupled into the NFT, there is still some uncoupled optical energy that ultimately radiates into the recording medium as background. This uncoupled light can reduce the confinement of the heat spot and further cause a reduction in the thermal gradient.

[0023] Suppressing the optical background can be important for improving the thermal gradient generated by NFT. While most of the energy in the waveguide core can be coupled to the NFT, there is still some uncoupled light propagating within the waveguide. This uncoupled electromagnetic radiation can travel through the waveguide and be emitted in the form of radiant energy, heating the recording medium as a background that coexists with the main heat source generated by the NFT. This background can reduce the overall thermal gradient along both the recording track and cross-track directions. The first design, shown in Figure 1, shows a metal blocker in front of the waveguide core to suppress this background radiant energy to the medium. Figure 1 is a cross-sectional view of a prior art waveguide design. As shown in Figure 1, the design 100 may include a main pole 102, a two-layer transducer 104, a waveguide 106, and a waveguide blocker 108.

[0024] 2 is a diagram of an exemplary prior art waveguide blocker 202. The waveguide blocker may include a triangular prism with a tilt angle WGBa, a width in the cross-track direction WGBw, and a thickness in the down-track direction WGBt, which are shown in FIG.

[0025] Other designs may include a parabolic shaped waveguide blocker (PWB), which may include a parabolic metallic mirror surface to directionally guide uncoupled light to prevent this background from entering the recording medium. Figures 3A-3B show both top and 3D views of example PWBs 300A-300B.

[0026] This embodiment relates to a noble metal coating on the surface of a parabolic waveguide blocker for future thermal gradient improvements in HAMR heads, which can provide improved thermal spot containment over other designs. More specifically, this embodiment relates to a component in a near-field transducer (NFT) made of a metallic parabolic waveguide blocker with a noble metal coating on the waveguide blocker (PWB) surface. The NFT may include a first part (plasmon generator) consisting of a metallic bilayer structure (e.g., an upper layer made of a highly thermomechanically stable material such as rhenium (Rh), iridium (Ir), or platinum (Pt), and gold (Au) on the lower layer) that may be disposed on a dielectric waveguide core. The second part may include the optical delivery of the HAMR head using a dielectric waveguide. In front of the waveguide core, the PWB may include a metal structure that may be directly exposed to the air bearing surface (ABS), as shown in FIG. 4. The designs described herein may include a noble metal coating (e.g., Au, Rh, Ir, Pt, or aluminum (Al), etc.) that can enable plasmonic effects on the PWB surface to improve the HAMR thermal gradient.

[0027] This embodiment provides a noble metal coating on the parabolic waveguide blocker to enhance field focusing and improve thermal gradients by exciting the plasmonic effect. By improving the thermal gradient of the NFT, the areal density capacity (ADC) of the HAMR head can be further increased. The highly confined energy in the NFT can create a smaller heat spot in the recording medium, thereby improving the thermal gradient and further improving the areal density capability of the HAMR head.

[0028] FIG. 4 illustrates an exemplary cross-sectional view of a write head 400 having a waveguide blocker coated with a noble metal. As shown in FIG. 4, the write head 400 may include a main pole 402 and a first gold layer 404 disposed adjacent to the main pole 402. A metal layer 406 (e.g., including Rh, Ir, or Pt) may be disposed between the first gold layer 404 and a second gold layer 408. A waveguide core 410 may be disposed adjacent to the second gold layer 408 and a dielectric spacer 412. A noble metal coating 414 may be disposed between the dielectric spacer 412 and a PWB 416. In a structure such as that shown in FIG. 4, the noble metal coating may comprise a first thin film deposited on the PWB to a thickness ranging from 20 to 100 nm and photolithographically patterned to the same shape as the PWB with an offset. The parabolic shape may be maintained at the bottom of the coating, as shown in FIGS. 5A-5B, for example.

[0029] 5A and 5B show exemplary diagrams of PWBs 500A-500B. For example, FIG. 5A shows PWB 500A without a coating, and FIG. 5B shows PWB 500B with an Au coating.

[0030] The write head structure described herein may have a parabolic waveguide blocker (PWB) fabricated from a highly thermomechanically stable material, such as Rh or Ru, and positioned in front of the waveguide core near the ABS. The parabolic shape can be defined by a focal length PWB_focal, a height WGBh2 of the waveguide blocker in the ABS direction, and a width WGBw of the waveguide blocker. From a 3D view, the PWB may have a taper angle forming a tilt angle on the waveguide blocker defined by WGBa and a thickness WGBt. On the PWB, a noble metal thin film of Rh, Ir, Pt, or Au can be deposited on the PWB, and then patterned with the same parabolic shape offset relative to the parabolic shape on the top surface of the waveguide blocker.

[0031] Due to their excellent plasmonic optical properties, noble metal coatings can support surface plasmon polaritons (SPPs) that can travel on the graded metal-dielectric interface of the waveguide blocker. Unlike other HAMR designs, these SPPs can be excited by uncoupled light in the waveguide, while the majority of the electromagnetic energy can be coupled into the NFT's PPG to generate a hot spot for writing on the media. Surface plasmon resonance in noble metals can be a highly confined localized surface energy, and while this secondary SPP excitation may not interfere with the main SPP field on the NFT PEG, by absorbing background energy, it can help prevent this energy from leaking into the media, which can create a thermal background and reduced thermal gradients in the HAMR head.

[0032] 6 shows an example diagram 600 of the near-field distribution of an NFT. As shown in FIG. 6, an NFT 602 may be disposed on an Au layer 604. Furthermore, a waveguide core 606 may be disposed adjacent to the Au layer 604 and a dielectric spacer 608. A second gold layer 610 may be disposed between the dielectric spacer 608 and a PWB 612.

[0033] Figure 6 shows the near-field distribution inside the NFT around the waveguide core in the simulation. Incident light from the waveguide can excite two propagating surface plasmon polaritons. One strong field (614) propagates on the bottom Au interface of the NFT, while another weaker field (616) travels on the top inclined surface above the Au-coated waveguide blocker. This propagating SPP on the coated PWB surface can utilize uncoupled waveguide energy and background NFT scattering, which efficiently absorbs and reduces background in the recording medium. Due to the reduced thermal background, local heating is primarily from the NFT PEG, which has a very small area. Under highly confined optical energy, the thermal gradient within the recording layer can be improved.

[0034] Table 1 below summarizes the thermal gradients of the HAMR head in the down-track direction (DTTG) and cross-track direction (CTTG) using the triangular prism-shaped waveguide blocker and the parabolic-shaped waveguide blocker described above, compared with the Au-coated parabolic waveguide blocker of the present invention.

[0035] [Table 1]

[0036] 7 is a graphical representation 700 of an exemplary focal length versus thermal gradient for a PWB structure. Figure 7 shows the effect of PWB_focal on the thermal gradient of a hot spot in the recording layer when an Au coating is applied. The head thermal gradient can be optimized at a focal length of 225 nm, where both the down-track gradient and the cross-track gradient are maximized.

[0037] FIG. 8 is a graphical representation 800 of an exemplary focal length versus ADC (Tbpsi) for a PWB structure. FIG. 8 illustrates the effect of PWB_focal on ADC. It can also be seen that the areal density capacity (ADC) of the HAMR head increases as PWB_focal increases from 50 nm to 225 nm, and then gradually decreases as the focal length continues to increase to 600 nm or greater. These results indicate that background electromagnetic radiation can be controlled by varying the parabolic focal length on the waveguide blocker. The reduced background can help eliminate thermal background in the recording medium, thus improving thermal gradients.

[0038] 9 is a graphical representation 900 of the effect of the focal length of an exemplary parabolic waveguide blocker on HAMR head performance. Figure 9 shows the effect of changing PWB_focal on NFT efficiency, plotted as the laser power (mW) required to enable HAMR writing to the recording layer in NFT. Lower laser power required in NFT can mean higher NFT system efficiency, which is preferable in HAMR heads for reliability considerations.

[0039] Thin film coatings using noble metals such as Au, Rh, Pt, and Ir can enable plasmonic effects that can improve light coupling from the waveguide. Figures 10A-10B provide graphical representations 1000A-1000B of an exemplary effect of Au film thickness on a parabolic waveguide blocker. Figure 10A shows an exemplary effect of ADC versus Au thickness, and Figure 10B shows the effect of the downtrack thermal gradient (K / nm). Figures 10A-10B show the effect of Au coating thickness on ADC and thermal gradient. Noble metal coatings can increase the thermal gradient and reduce the required operating laser power, known as Ieff.

[0040] 11A-11G show process flows 1100A-1100G for fabricating a parabolic-shaped waveguide blocker with a noble metal coating. For example, in FIG. 11A, an entire ruthenium (Ru) layer 1102 can be placed on top of a leading shield (LS) 1104. In FIG. 11B, a photoresist (PR) 1106 mask can be placed on top of the Ru layer 1102. The resist can be formed into a parabolic shape, and then ion beam etching (IBE) can be performed to create tapered features with an approximate taper angle of WGBa (ADC is optimized with WGBa=45 degrees).

[0041] In Figure 11C, the first resist layer (1106) can be removed to form a parabolic-shaped waveguide blocker. In Figure 11D, a second PR layer 1108 can be applied over the surface of the waveguide blocker, which can be shaped into a parabolic shape. In Figure 11E, a noble metal layer 1110 (such as gold (Au), rhodium (Rh), or iridium (Ir)) can be deposited over the blocker. The thickness of the noble metal can be in the range of 20 to 80 nanometers.

[0042] In Figure 11F, the second resist layer 1108 can be removed to create a noble metal coating over the blocker. In Figure 11G, a full film of silicon dioxide (SiO2) 1112, followed by deposition of tantalum oxide (TaOx) 1114, can serve as the waveguide (WvG) core. In Figure 11H, the TaOx topography can be planarized by chemical mechanical planarization (CMP) to ensure a smooth and uniform surface. The final product can include a recording head write structure with a waveguide, waveguide blocker, NFT, and magnetic device, as shown in the previous figures. The approach in Figures 11A-11H focuses on patterning the noble metal coating by selectively removing the noble metal within the field using a lift-off process.

[0043] Another exemplary approach for fabricating a noble metal coating is shown in Figures 12A-12C. As shown in Figure 12A, the first diagram 1200A shows an intact film of a noble metal 1204, such as gold (Au), rhodium (Rh), or iridium (Ir), on a waveguide blocker (e.g., Ru 1202). The thickness of the noble metal may be in the range of 20-80 nanometers. In Figure 12B, the second diagram 1200B may show that a resist 1206 is disposed on the surface of the noble metal coating layer 1204. The resist may be shaped into a parabolic shape. Ion beam etching (IBE) may then be performed to selectively mill the noble metal from the field region, leaving the remaining portion intact. In Figure 12C, the third diagram 1200C may show that the resist has been removed to expose the noble metal coating on top of the blocker, while retaining the parabolic shape. This approach may focus on first depositing a noble metal and then selectively removing it using ion beam etching to produce the desired coating.

[0044] In a first exemplary embodiment, a heat-assisted magnetic recording (HAMR) write head is provided. The HAMR write head may include a main pole, a waveguide core, and a two-layer transducer disposed between the main pole and the waveguide core. The HAMR write head may also include a dielectric spacer layer disposed adjacent to the waveguide core and a parabolic waveguide blocker (PWB). The HAMR write head may also include a noble metal layer disposed between the PWB and the dielectric spacer layer.

[0045] In some examples, the noble metal layer comprises a thickness of 20 to 100 nanometers. In some examples, the noble metal layer includes any of ruthenium (Ru), iridium (Ir), platinum (Pt), or gold (Au).

[0046] In some examples, the noble metal layer includes a parabolic shape that matches the shape of the PWB, and the PWB includes a taper angle relative to the ABS normal in the range of about 10 to 90 degrees. In some examples, the dielectric spacer layer comprises a material such as silicon oxide (SiOx), aluminum oxide (AlOx), titanium oxide (TiOx), or magnesium oxide (MgOx), and the waveguide core comprises a high refractive index material such as niobium oxide (NbOx) or tantalum oxide (TaOx).

[0047] In another exemplary embodiment, a device is provided. The device may include a waveguide core, a dielectric spacer layer disposed adjacent to the waveguide core, and a waveguide blocker. The device may also include a noble metal layer disposed between the waveguide blocker and the dielectric spacer layer.

[0048] In some examples, the device may also include a main pole and a double-layer transducer disposed between the main pole and the waveguide core. In some examples, the waveguide blocker is a triangular prism shape or a parabolic shape.

[0049] In some examples, the noble metal layer has a thickness of 20 to 100 nanometers. In some examples, the noble metal layer includes any of ruthenium (Ru), iridium (Ir), platinum (Pt), or gold (Au).

[0050] In some examples, the noble metal layer includes a parabolic shape that matches the shape of the PWB, and the PWB includes a taper angle relative to the ABS normal of about 10 to 90 degrees. In another exemplary embodiment, a method for fabricating a parabolic-shaped waveguide blocker having a noble metal layer is provided. The method may include depositing the metal layer over a leading shield. The method may also include applying a first photoresist (PR) mask over at least a portion of the metal layer. The method may also include etching a portion of the metal layer to form a tapered edge of the metal layer having a taper angle.

[0051] The method may also include applying a second PR mask over at least a portion of the leading shield. The method may also include depositing a noble metal layer over the metal layer and the second PR mask. The method may also include depositing a first oxide layer over the noble metal layer. The method may also include depositing a second oxide layer over the first oxide layer to function as a waveguide core.

[0052] In some examples, the metal layer includes ruthenium (Ru). In some examples, the method may also include shaping the first PR mask into a parabolic shape and shaping the second PR mask into a parabolic shape.

[0053] In some examples, etching of a portion of the metal layer is performed by an ion beam etching (IBE) process, and the taper angle is about 10 to 90 degrees relative to the ABS normal angle. In some examples, the method may also include removing the first PR mask.

[0054] In some examples, the method may also include removing the second PR mask. In some examples, the noble metal layer comprises any of ruthenium (Ru), iridium (IR), or gold (Au), and the thickness of the noble metal layer is between 20 and 80 nanometers.

[0055] In some examples, the method may also include planarizing the second oxide layer using a chemical mechanical planarization (CMP) process. In some examples, the first oxide layer comprises a material such as silicon oxide (SiOx), aluminum oxide (AlOx), titanium oxide (TiOx), or magnesium oxide (MgOx), and the waveguide core comprises a high refractive index material such as niobium oxide (NbOx) or tantalum oxide (TaOx).

[0056] In some instances, a full film of SiO2 is disposed on top of the ruthenium layer. As used herein, terms such as "top," "bottom," "up," "down," and x-, y-, and z-directions will be understood as terms of convenience that indicate the spatial relationship of parts relative to one another, rather than specific spatial or gravitational directions. These terms are therefore intended to encompass an assembly of components, regardless of whether the assembly is oriented in the specific orientation shown in the drawings and described in the specification, whether it is oriented upside down from that orientation, or in any other rotational orientation.

[0057] It will be understood that the term "the present invention," as used herein, should not be interpreted to mean that only a single invention having a single essential element or group of elements is presented. Likewise, it will be understood that the term "the present invention" encompasses several separate innovations, each of which can be considered a separate invention. While the present invention has been described in detail with reference to preferred embodiments and drawings thereof, it will be apparent to those skilled in the art that various adaptations and modifications of the embodiments of the present invention can be made without departing from the spirit and scope of the invention. Accordingly, it will be understood that the above detailed description and accompanying drawings are not intended to limit the breadth of the present invention, but that the invention should be inferred solely from the appended claims and their appropriately interpreted legal equivalents.

Claims

1. 1. A thermally assisted magnetic recording (HAMR) write head, comprising: A main pole, a waveguide core; a double-layer transducer disposed between the main pole and the waveguide core; a dielectric spacer layer disposed adjacent to the waveguide core; a parabolic waveguide blocker (PWB); a noble metal layer disposed between the PWB and the dielectric spacer layer.

2. 2. The HAMR write head of claim 1, wherein the noble metal layer has a thickness of 20 to 100 nanometers.

3. 2. The HAMR write head of claim 1, wherein the noble metal layer comprises any of ruthenium (Ru), iridium (Ir), platinum (Pt), gold (Au), and alloys thereof.

4. 2. The HAMR write head of claim 1, wherein the noble metal layer includes a parabolic shape that matches the shape of the PWB, the PWB including a taper angle relative to an ABS normal in the range of approximately 10 to 90 degrees.

5. The write head of claim 1 , wherein the dielectric spacer layer comprises a dielectric material and the waveguide core comprises a high refractive index material.

6. 6. The HAMR write head of claim 5, wherein the dielectric material comprises one of silicon oxide (SiOx), aluminum oxide (AlOx), titanium oxide (TiOx), or magnesium oxide (MgOx), and the high refractive index material comprises one of niobium oxide (NbOx) or tantalum oxide (TaOx).

7. a waveguide core; a dielectric spacer layer disposed adjacent to the waveguide core; a waveguide blocker; a noble metal layer disposed between the waveguide blocker and the dielectric spacer layer.

8. A main pole, The device of claim 7 further comprising a double-layer transducer disposed between the main pole and the waveguide core.

9. The device of claim 7 , wherein the waveguide blocker is a triangular prism or a parabolic shape.

10. The device of claim 7, wherein the noble metal layer has a thickness of 20 to 100 nanometers.

11. 8. The device of claim 7, wherein the noble metal layer comprises any of ruthenium (Ru), iridium (Ir), platinum (Pt), gold (Au), and alloys thereof.

12. 2. The HAMR write head of claim 1, wherein the noble metal layer includes a parabolic shape that matches the shape of the PWB, the PWB including a taper angle relative to an ABS normal of about 10 to 90 degrees.

13. 1. A method for fabricating a parabolic shaped waveguide blocker having a noble metal layer, comprising: depositing a metal layer over the leading shield; applying a first photoresist (PR) mask over at least a portion of the metal layer; Etching a portion of the metal layer to form a tapered edge of the metal layer having a tapered angle; applying a second PR mask onto at least a portion of the leading shield; depositing a noble metal layer over the metal layer and the second PR mask; depositing a first oxide layer over the noble metal layer; depositing a second oxide layer over the first oxide layer to serve as a waveguide core.

14. The method of claim 13 , wherein the metal layer comprises ruthenium (Ru).

15. shaping the first PR mask into a parabolic shape; The method of claim 13 , further comprising: shaping the second PR mask into a parabolic shape.

16. 14. The method of claim 13, wherein etching the portion of the metal layer is performed by an ion beam etching (IBE) process, and the taper angle is in the range of about 10 to 90 degrees relative to an ABS normal angle.

17. The method of claim 13 further comprising removing the first PR mask.

18. The method of claim 13 further comprising removing the second PR mask.

19. 14. The method of claim 13, wherein the noble metal layer comprises any of ruthenium (Ru), iridium (IR), gold (Au), and alloys thereof, and the thickness of the noble metal layer is between 20 and 80 nanometers.

20. 14. The method of claim 13, further comprising planarizing the second oxide layer using a chemical mechanical planarization (CMP) process.

21. The method of claim 13 , wherein the first oxide layer comprises a dielectric material and the waveguide core comprises a high refractive index material.

22. 22. The method of claim 21 , wherein the first oxide layer comprises one of silicon oxide (SiOx), aluminum oxide (AlOx), titanium oxide (TiOx), or magnesium oxide (MgOx), and the high refractive index material comprises one of niobium oxide (NbOx) or tantalum oxide (TaOx).

Images