Link device and transfer robot including the same

Abstract

To provide a structure suitable for miniaturizing a driving part in a link device in which two parallel link mechanisms are interlocked.SOLUTION: The link device includes a support body 2, a first parallel link mechanism 3, a second parallel link mechanism, and drive parts 5, 6. The first parallel link mechanism 3 includes a first link arm 31 supported by the support body 2 so as to be rotatable about a perpendicular axis v1, and a second link arm 32 supported by the support body 2 so as to be rotatable about the perpendicular axis v2. By interlocking the first parallel link mechanism 3 and the second parallel link mechanism, the moving member is linearly moved. The drive part 5 is supported by the support body 2 with the vertical shaft v1 as a center line, the first link arm 31 is connected to the drive part 5 and driven by the drive part 5, the drive part 6 is supported by the support body 2 with the vertical shaft v2 as a center line, and the second link arm 32 is connected to the drive part 6 and driven by the drive part 6.SELECTED DRAWING: Figure 3

Description

[Technical Field]

[0001] The present disclosure relates to a link device and a transport robot including the same. [Background technology]

[0002] An example of a transport robot that linearly moves a flat workpiece, which is a transport object, is disclosed in Patent Document 1 below. The transport robot disclosed in this document includes two parallel link mechanisms (a first parallel link mechanism and a second parallel link mechanism). The first parallel link mechanism includes a pair of link arms and an intermediate member connected to the pair of link arms. The second parallel link mechanism includes a pair of link arms that can swing around the intermediate member as a fixed joint, and a moving member connected to the pair of link arms. The moving member is configured to move forward and backward linearly by interlocking the first parallel link mechanism and the second parallel link mechanism. A hand member is fixed to the moving member, and a workpiece placed on the hand member can be moved linearly.

[0003] In the transport robot having the above configuration, a drive motor is connected to one of the link arms of the first parallel link mechanism. When the one link arm is swung by the drive motor, the other link arm follows while maintaining a parallel posture to the one link arm. In this way, one link arm functions as a drive arm, and the other link arm functions as a driven arm. In such a configuration, since one drive motor is required to operate two parallel link mechanisms, the drive motor tends to be large. [Prior art documents] [Patent documents]

[0004] [Patent Document 1] Japanese Patent Application Laid-Open No. 2007-15023 Summary of the Invention [Problem to be solved by the invention]

[0005] The present disclosure was conceived under these circumstances, and its main objective is to provide a structure suitable for miniaturizing the drive unit in a link device in which two parallel link mechanisms are linked. [Means for solving the problem]

[0006] In order to solve the above problems, the present disclosure employs the following technical solutions.

[0007] A link device provided by a first aspect of the present disclosure includes a first parallel link mechanism including a support body, a first link arm supported rotatably about a first vertical axis relative to the support body, a second link arm supported rotatably about a second vertical axis relative to the support body, and an intermediate member rotatably connected to the first link arm and the second link arm so that the first link arm and the second link arm are parallel to each other; a third link arm and a fourth link arm rotatably supported on the intermediate member, and a second parallel link mechanism including a third link arm and a fourth link arm rotatably connected to the third link arm and the front link arm so that the third link arm and the fourth link arm are parallel to each other; The fourth link arm is provided with a second parallel link mechanism including a movable member rotatably connected to the fourth link arm, a first drive unit, and a second drive unit, and is configured so that the movable member moves linearly by interlocking the first parallel link mechanism and the second parallel link mechanism, the first drive unit is supported on the support body with the first vertical axis as its center line, and the first link arm is connected to the first drive unit and driven by the first drive unit, and the second drive unit is supported on the support body with the second vertical axis as its center line, and the second link arm is connected to the second drive unit and driven by the second drive unit.

[0008] In a preferred embodiment, the support body has a housing portion that accommodates at least a portion of the first drive portion and the second drive portion, the first link arm has a first upper plate portion that is located vertically above the housing portion, the second link arm has a second upper plate portion that is located vertically above the housing portion, the first drive portion includes a first motor and a first reducer having a first input shaft connected to the output shaft of the first motor and a first output shaft connected to the first upper plate portion, and the second drive portion includes a second motor and a second input shaft connected to the output shaft of the second motor and a second reducer having a second output shaft connected to the second upper plate portion.

[0009] In a preferred embodiment, the housing portion has a first wall portion and a second wall portion located lower in the vertical direction than the first wall portion, the first reducer and the second reducer are arranged to pass through the first wall portion, the first link arm has a first lower plate portion located lower in the vertical direction than the second wall portion, the second link arm has a second lower plate portion located lower in the vertical direction than the second wall portion, the first upper plate portion is supported rotatably around the first vertical axis with respect to the first wall portion, the first lower plate portion is supported rotatably around the first vertical axis with respect to the second wall portion, the second upper plate portion is supported rotatably around the second vertical axis with respect to the first wall portion, and the second lower plate portion is supported rotatably around the second vertical axis with respect to the second wall portion.

[0010] In a preferred embodiment, the motor further includes a first seal unit attached to the first reducer and the first wall portion, and a second seal unit attached to the second reducer and the first wall portion, and the second wall portion is formed with a first opening located below the first motor in the vertical direction, and a second opening located below the second motor in the vertical direction, and the housing portion is hermetically sealed by the first seal unit and the second seal unit, a first hermetic seal provided in the first opening, and a second hermetic seal provided in the second opening.

[0011] A transport robot provided by a second aspect of the present disclosure includes the link device provided by the first aspect of the present disclosure and a hand fixed to the moving member. [Effects of the Invention]

[0012] According to the link device of the present disclosure, the first link arm and the second link arm can be driven by the first drive unit 5 and the second drive unit 6, respectively. This allows the first drive unit and the second drive unit to be made smaller, and the vertical length of each of the first drive unit and the second drive unit can be shortened.

[0013] Other features and advantages of the present disclosure will become more apparent from the following detailed description taken in conjunction with the accompanying drawings. [Brief explanation of the drawings]

[0014] [Figure 1] 1 is an overall perspective view showing an example of a transport robot equipped with a link device according to the present disclosure; [Figure 2] FIG. 2 is a plan view of the transport robot shown in FIG. [Figure 3] FIG. 3 is a partially enlarged cross-sectional view taken along line III-III in FIG. 2. [Figure 4] FIG. 4 is a partially enlarged cross-sectional view taken along line IV-IV in FIG. 2. [Figure 5] FIG. 3 is a partially enlarged cross-sectional view taken along line VV in FIG. 2. DETAILED DESCRIPTION OF THE INVENTION

[0015] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings.

[0016] Terms such as "first," "second," etc. in this disclosure are used merely as labels and are not necessarily intended to dictate any ordering of their objects.

[0017] 1 to 5 show an example of a transport robot equipped with a link device according to the present disclosure. The transport robot B1 of this embodiment is for transporting thin plate-like workpieces (not shown), such as glass substrates for liquid crystal display panels, in a linear manner along the horizontal direction. The transport robot B1 includes a fixed base 1, a pair of link devices A1 and A2, and a hand 8. A support 2, which will be described later, is supported so as to be rotatable about a vertical rotation axis Os relative to the fixed base 1. The support 2 can also be raised and lowered along the vertical direction relative to the fixed base 1.

[0018] In the example illustrated in this embodiment, the vertical direction z is the direction corresponding to the vertical direction when the transfer robot B1 is placed in a predetermined transfer chamber (not shown) or the like, and corresponds to the "vertical direction" in the present disclosure. In the following description, the upper side of the vertical direction z will be referred to as the "z1 side of the vertical direction z" as appropriate, and the lower side of the vertical direction z will be referred to as the "z2 side of the vertical direction z" as appropriate. The z1 side of the vertical direction z corresponds to the "upper side in the vertical direction" in the present disclosure, and the z2 side of the vertical direction z corresponds to the "lower side in the vertical direction" in the present disclosure. The transfer chamber in which the transfer robot B1 is placed is adjusted to, for example, either an atmospheric atmosphere or a vacuum atmosphere.

[0019] In this embodiment, the pair of link devices A1 and A2 have substantially the same configuration. In the following, one of the link devices A1 will be specifically described, and the other link device A2 will be omitted from the description, with the same elements as those of the link device A1 being assigned the same reference numerals.

[0020] 1 to 4, the link device A1 includes a support body 2, a first parallel link mechanism 3, a second parallel link mechanism 4, a first drive unit 5, and a second drive unit 6. The first parallel link mechanism 3 includes a first link arm 31, a second link arm 32, and an intermediate member 33. The intermediate member 33 is rotatably connected to the tip ends of the first link arm 31 and the second link arm 32 so that the first link arm 31 and the second link arm 32 are parallel to each other.

[0021] As shown in FIGS. 2 to 4, a base end of the first link arm 31 is supported to be rotatable about a first vertical axis v1 relative to the support body 2. In this embodiment, the first link arm 31 is connected to a first drive unit 5. The first drive unit 5 is supported by the support body 2 with the first vertical axis v1 as its center. The first link arm 31 is driven by the first drive unit 5.

[0022] As shown in FIGS. 3 and 4 , the support body 2 has a housing portion 21 that accommodates at least a portion of the first drive unit 5 and the second drive unit 6. In this embodiment, the first drive unit 5 has a first motor 51 and a first reducer 52. The first reducer 52 is located on the z1 side of the first motor 51 in the vertical direction z. The first reducer 52 has a first input shaft 521 and a first output shaft 522. The first input shaft 521 is connected to the output shaft 511 of the first motor 51. The first output shaft 522 is located on the z1 side of the first input shaft 521 in the vertical direction z. In the illustrated example, the first motor 51 and a portion of the first reducer 52 are accommodated in the housing portion 21.

[0023] The first link arm 31 has a first upper plate portion 311 and a first lower plate portion 312. The first upper plate portion 311 and the first lower plate portion 312 are provided at the base end portion of the first link arm 31. The first upper plate portion 311 is located on the z1 side in the vertical direction z with respect to the housing portion 21. The first upper plate portion 311 is connected to a first output shaft 522 of the first reducer 52.

[0024] The housing 21 has a first wall 211 and a second wall 212. The second wall 212 is located on the z2 side of the first wall 211 in the vertical direction z. The first wall 211 has an opening at an appropriate position, and the first reducer 52 is disposed so as to pass through the opening of the first wall 211. In the illustrated example, a first seal unit 71 is attached to the first wall 211.

[0025] The first seal unit 71 is fitted onto a portion of the first reducer 52 and provides an airtight seal inside the housing portion 21. The first seal unit 71 is attached to the first reducer 52 and allows rotation of the first input shaft 521 and the first output shaft 522. A magnetic fluid seal unit, for example, can be used as this first seal unit 71. However, the configuration of the first seal unit 71 is not limited to this. The first upper plate portion 311 (first link arm 31) is supported by the first wall portion 211 (housing portion 21, support body 2) via the first seal unit 71 and the first reducer 52 so as to be rotatable about a first vertical axis v1.

[0026] The first lower plate portion 312 of the first link arm 31 is located on the z2 side in the vertical direction z relative to the second wall portion 212 of the housing portion 21. In the example shown, the first lower plate portion 312 is supported by the second wall portion 212 via a bearing. This allows the first lower plate portion 312 to be rotatable about a first vertical axis v1 relative to the second wall portion 212 (housing portion 21, support body 2).

[0027] A first opening 212a is formed in the second wall 212 of the housing 21. The first opening 212a is located on the z2 side of the first motor 51 in the vertical direction z. A first hermetic seal 73 is provided in the first opening 212a. The first hermetic seal 73 airtightly seals the interior of the housing 21. For example, a power line (not shown) that supplies driving power to the first motor 51 and a signal line (not shown) that transmits signals to the first motor 51 are led to the outside of the housing 21 through the first hermetic seal 73. Furthermore, when the transfer robot B1 (link device A1) is placed in a vacuum atmosphere, the interior of the housing 21 is in an atmospheric atmosphere. When a sensor or the like is present in the vacuum atmosphere, the first hermetic seal 73 can be used to transmit power and signals from the vacuum-side sensor or the like to the atmospheric side (for example, the inside of the housing 21) or to release static electricity accumulated in the hand 8 to the housing 21 side (the support 2 side).

[0028] 2 and 3, the base end of the second link arm 32 is supported to be rotatable about a second vertical axis v2 relative to the support body 2. In this embodiment, the second link arm 32 is connected to a second drive unit 6. The second drive unit 6 is supported by the support body 2 with the second vertical axis v2 as its center. The second link arm 32 is driven by the second drive unit 6.

[0029] As shown in FIG. 3 , a portion of the second drive unit 6 is accommodated in the housing unit 21. The second drive unit 6 has a second motor 61 and a second reducer 62. The second reducer 62 is located on the z1 side of the second motor 61 in the vertical direction z. The second reducer 62 has a second input shaft 621 and a second output shaft 622. The second input shaft 621 is connected to the output shaft 611 of the second motor 61. The second output shaft 622 is located on the z1 side of the second input shaft 621 in the vertical direction z. In the illustrated example, the second motor 61 and a portion of the second reducer 62 are accommodated in the housing unit 21.

[0030] The second link arm 32 has a second upper plate portion 321 and a second lower plate portion 322. The second upper plate portion 321 and the second lower plate portion 322 are provided at the base end portion of the second link arm 32. The second upper plate portion 321 is located on the z1 side in the vertical direction z with respect to the housing portion 21. The second upper plate portion 321 is connected to a second output shaft 622 of the second reducer 62.

[0031] The first wall portion 211 of the housing portion 21 has an opening at an appropriate position, and the second reducer 62 is disposed so as to pass through the opening of the first wall portion 211. In the illustrated example, a second seal unit 72 is attached to the first wall portion 211.

[0032] The second seal unit 72 is fitted onto a portion of the second reducer 62 and provides an airtight seal inside the housing portion 21. The second seal unit 72 is attached to the second reducer 62 and allows rotation of the second input shaft 621 and the second output shaft 622. As such a second seal unit 72, for example, a magnetic fluid seal unit can be used. However, the configuration of the second seal unit 72 is not limited to this. The second upper plate portion 321 (second link arm 32) is supported by the second seal unit 72 and the second reducer 62 to be rotatable about the second vertical axis v2 relative to the first wall portion 211 (housing portion 21, support body 2).

[0033] The second lower plate portion 322 of the second link arm 32 is located on the z2 side in the vertical direction z relative to the second wall portion 212 of the housing portion 21. In the example shown, the second lower plate portion 322 is supported by the second wall portion 212 via a bearing. As a result, the second lower plate portion 322 is supported rotatably about the second vertical axis v2 with respect to the second wall portion 212 (housing portion 21, support body 2).

[0034] A second opening 212b is formed in the second wall 212 of the housing 21. The second opening 212b is located on the z2 side of the second motor 61 in the vertical direction z. A second hermetic seal 74 is provided in the second opening 212b. The second hermetic seal 74 airtightly seals the interior of the housing 21. For example, a power line (not shown) that supplies driving power to the second motor 61 and a signal line (not shown) that transmits signals to the second motor 61 are led to the outside of the housing 21 through the second hermetic seal 74. Furthermore, when the transfer robot B1 (link device A1) is placed in a vacuum atmosphere, the interior of the housing 21 is in an atmospheric atmosphere. When a sensor or the like is present in the vacuum atmosphere, the second hermetic seal 74 can be used to transmit power and signals from the vacuum-side sensor or the like to the atmospheric side (for example, the inside of the housing 21) or to release static electricity accumulated in the hand 8 to the housing 21 side (the support 2 side).

[0035] As shown in Fig. 5, a shaft 313 is provided at the tip of the first link arm 31. The shaft 313 is supported by the intermediate member 33 via a bearing and is rotatable around a third vertical axis v3 relative to the intermediate member 33. A gear 331 is fixed to the lower end of the shaft 313. Furthermore, a shaft 323 is provided at the tip of the second link arm 32. The shaft 323 is supported by the intermediate member 33 via a bearing and is rotatable around a fifth vertical axis v5 relative to the intermediate member 33. A gear 333 is fixed to the lower end of the shaft 323.

[0036] In the first parallel link mechanism 3 configured as described above, when the first link arm 31 rotates about the first vertical axis v1 and the second link arm 32 rotates about the second vertical axis v2, the intermediate member 33 moves in parallel, following the respective tip ends of the first link arm 31 and the second link arm 32. At this time, the first link arm 31 and the second link arm 32 rotate relative to the intermediate member 33 about the third vertical axis v3 and the fifth vertical axis v5, and in response, the gears 331, 333 rotate about the third vertical axis v3 and the fifth vertical axis v5.

[0037] 1, 2, and 5, the second parallel link mechanism 4 includes a third link arm 41, a fourth link arm 42, and a moving member 43. The moving member 43 is rotatably connected to the tip ends of the third link arm 41 and the fourth link arm 42 so that the third link arm 41 and the fourth link arm 42 are parallel to each other.

[0038] As shown in Figures 1 and 5, the third link arm 41 and the fourth link arm 42 are positioned on the z1 side in the vertical direction z of the first link arm 31 and the second link arm 32 so as to form a three-dimensional intersection with the first link arm 31 and the second link arm 32.

[0039] As shown in FIG. 5 , a shaft 411 is provided at the base end of the third link arm 41. The shaft 411 is supported by the intermediate member 33 via a bearing and is rotatable around a fourth vertical axis v4 relative to the intermediate member 33. A connecting portion 335 is fixed to the lower end of the shaft 411, and a gear 332 is fixed to the lower end of the connecting portion 335. The gear 332 meshes with the gear 331. Furthermore, a shaft 421 is provided at the base end of the fourth link arm 42. The shaft 421 is supported by the intermediate member 33 via a bearing and is rotatable around a sixth vertical axis v6 relative to the intermediate member 33. A connecting portion 336 is fixed to the lower end of the connecting portion 336, and a gear 334 is fixed to the lower end of the connecting portion 336. The gear 334 meshes with the gear 333.

[0040] 2, a shaft 412 is provided at the tip of the third link arm 41. The shaft 412 is supported rotatably about a seventh vertical axis v7 with respect to the moving member 43. In addition, a shaft 422 is provided at the tip of the fourth link arm 42. The shaft 422 is supported rotatably about an eighth vertical axis v8 with respect to the moving member 43.

[0041] 1 and 2, the hand 8 is fixed to the lower part of the movable member 43. In the illustrated example, the hand 8 has a shape suitable for placing a thin plate-like workpiece such as a glass substrate. However, the shape of the hand 8 is not particularly limited. In the other link device A2, the hand 8 is fixed to the upper part of the movable member 43. As a result, the hand 8 fixed to the movable member 43 of the link device A2 is located higher (on the z1 side in the vertical direction z) than the hand 8 fixed to the movable member 43 of the link device A1.

[0042] The first link arm 31 and the second link arm 32, and the third link arm 41 and the fourth link arm 42 are all the same length. In addition, the inter-axial distances between the first vertical axis v1 and the third vertical axis v3, the second vertical axis v2 and the fifth vertical axis v5, the fourth vertical axis v4 and the seventh vertical axis v7, and the sixth vertical axis v6 and the eighth vertical axis v8 are all the same.

[0043] The link device A1 (first parallel link mechanism 3 and second parallel link mechanism 4) configured as described above moves the moving member 43 and the hand 8 fixed to the moving member 43 in a linear manner by linking the first parallel link mechanism 3 and the second parallel link mechanism 4.

[0044] Specifically, in FIG. 2, for example, when the first link arm 31 and the second link arm 32 are rotated clockwise around the first vertical axis v1 and the second vertical axis v2, the gears 331 and 333 rotate clockwise around the third vertical axis v3 and the fifth vertical axis v5. Then, the gears 332 and 334 meshing with the gears 331 and 333 rotate counterclockwise around the fourth vertical axis v4 and the sixth vertical axis v6, causing the third link arm 41 and the fourth link arm 42 to rotate counterclockwise. Then, the third link arm 41 and the fourth link arm 42 rotate while remaining parallel to each other, and the moving member 43 and the hand 8 move forward straight in a predetermined direction (in FIG. 2, the moving member 43 and the hand 8 move away from the support 2). The rotational movement of the first link arm 31 and the second link arm 32 is performed by synchronously driving the first drive unit 5 and the second drive unit 6. Conversely, when the first link arm 31 and the second link arm 32 are rotated counterclockwise around the first vertical axis v1 and the second vertical axis v2, the gears 331 and 333 rotate counterclockwise around the third vertical axis v3 and the fifth vertical axis v5. This causes the gears 332 and 334 meshing with the gears 331 and 333 to rotate clockwise around the fourth vertical axis v4 and the sixth vertical axis v6, causing the third link arm 41 and the fourth link arm 42 to rotate clockwise. The third link arm 41 and the fourth link arm 42 then rotate while remaining parallel to each other, causing the movable member 43 and the hand 8 to retreat straight along a predetermined direction (in FIG. 2, the direction in which the movable member 43 and the hand 8 approach the support body 2).

[0045] In addition to this linear forward and backward movement of the hand 8, the support body 2 and the entire link device A1 (A2) supported thereby can rotate and move up and down, allowing the transport robot B1 to pick up a workpiece at a predetermined forward stop position by scooping it up from below with the hand 8. Furthermore, the transport robot B1 can transport the workpiece to a forward stop position other than the predetermined forward stop position by retracting the hand 8 to a predetermined backward stop position with a workpiece placed on the hand 8, and then rotating the entire link device A1 (A2) in a predetermined direction and moving the hand 8 forward.

[0046] Next, the operation of this embodiment will be described.

[0047] The transport robot B1 (link device A1) includes a support body 2, a first parallel link mechanism 3, a second parallel link mechanism 4, a first drive unit 5, and a second drive unit 6. The first parallel link mechanism 3 includes a first link arm 31, a second link arm 32, and an intermediate member 33. The intermediate member 33 is rotatably connected to the tip ends of the first link arm 31 and the second link arm 32 so that the first link arm 31 and the second link arm 32 are parallel to each other. The second parallel link mechanism 4 includes a third link arm 41, a fourth link arm 42, and a moving member 43. The moving member 43 is rotatably connected to the tip ends of the third link arm 41 and the fourth link arm 42 so that the third link arm 41 and the fourth link arm 42 are parallel to each other. In the transfer robot B1 (link device A1), the first parallel link mechanism 3 and the second parallel link mechanism 4 are interlocked to linearly move the movable member 43 and the hand 8 fixed to the movable member 43. The first drive unit 5 is supported by the support 2 around a first vertical axis v1. The first link arm 31 is connected to the first drive unit 5 and driven by the first drive unit 5. The second drive unit 6 is supported by the support 2 around a second vertical axis v2. The second link arm 32 is connected to the second drive unit 6 and driven by the second drive unit 6.

[0048] According to this configuration, the first link arm 31 and the second link arm 32 can be driven by the first drive unit 5 (first motor 51) and the second drive unit 6 (second motor 61), respectively. This allows the first drive unit 5 (first motor 51) and the second drive unit 6 (second motor 61) to be made smaller than when two link arms are rotated by one drive unit (motor), and it is possible to shorten the length in the vertical direction z of each of the first drive unit 5 and the second drive unit 6. As a result, the height in the vertical direction z of the transport robot B1 (link device A1) equipped with the first drive unit 5 and the second drive unit 6 can be kept low.

[0049] The support body 2 has a housing portion 21 that accommodates at least a portion of each of the first driving portion 5 and the second driving portion 6. The first link arm 31 has a first upper plate portion 311 located on the z1 side of the housing portion 21 in the vertical direction z, and the second link arm 32 has a second upper plate portion 321 located on the z1 side of the housing portion 21 in the vertical direction z. The first driving portion 5 includes a first motor 51 and a first reducer 52 having a first input shaft 521 connected to an output shaft 511 of the first motor 51 and a first output shaft 522 connected to the first upper plate portion 311. The second driving portion 6 includes a second motor 61 and a second reducer 62 having a second input shaft 621 connected to the output shaft 611 of the second motor 61 and a second output shaft 622 connected to the second upper plate portion 321. According to this configuration, the first drive unit 5 and the second drive unit 6 can be efficiently arranged at the base end of each of the first link arm 31 and the second link arm 32. This is preferable in terms of reducing the size of the first drive unit 5 and the second drive unit 6.

[0050] The housing 21 has a first wall 211 and a second wall 212 located on the z2 side of the first wall 211 in the vertical direction z. The first reducer 52 and the first reducer 52 are disposed to penetrate the first wall 211. The first link arm 31 has a first lower plate 312 located on the z2 side of the second wall 212 in the vertical direction z, and the second link arm 32 has a second lower plate 322 located on the z2 side of the second wall 212 in the vertical direction z. The first upper plate 311 (first link arm 31) is supported rotatably about a first vertical axis v1 relative to the first wall 211 (housing 21, support body 2). The first lower plate 312 is supported rotatably about the first vertical axis v1 relative to the second wall 212 (housing 21, support body 2). The second upper plate 321 (second link arm 32) is supported rotatably about the second vertical axis v2 relative to the first wall 211 (housing 21, support 2). The second lower plate 322 is supported rotatably about the second vertical axis v2 relative to the second wall 212 (housing 21, support 2). With this configuration, the base ends of the first link arm 31 and the second link arm 32 are supported by the housing 21 (support 2) so as to sandwich the housing 21 (first wall 211 and second wall 212) from both the upper and lower sides. This reduces the moment load acting on the base ends of the first link arm 31 and the second link arm 32.

[0051] The transfer robot B1 (link device A1) includes a first seal unit 71 and a second seal unit 72. The first seal unit 71 is attached to the first reducer 52 and a first wall portion 211, and the second seal unit 72 is attached to the second reducer 62 and the first wall portion 211. The second wall portion 212 is formed with a first opening 212a located on the z2 side of the first motor 51 in the vertical direction z, and a second opening 212b located on the z2 side of the second motor 61 in the vertical direction z. The housing portion 21 is hermetically sealed by the first seal unit 71 and the second seal unit 72, a first hermetic seal 73 provided in the first opening 212a, and a second hermetic seal 74 provided in the second opening 212b. With this configuration, even when the transport robot B1 (link device A1) is placed in a vacuum atmosphere, the inside of the housing portion 21 can be maintained at an atmospheric atmosphere, and the first motor 51 and the second motor 61 in the housing portion 21 can be driven appropriately.

[0052] The link device and the transport robot according to the present disclosure are not limited to the above-described embodiment, and the specific configurations of the link device and the transport robot according to the present disclosure can be freely designed in various ways. [Explanation of symbols]

[0053] B1: transport robot, A1, A2: link device, 2: support, 21: housing portion, 211: first wall portion, 212: second wall portion, 212a: first opening, 212b: second opening, 3: first parallel link mechanism, 31: first link arm, 311: first upper plate portion, 312: first lower plate portion, 32: second link arm, 321: second upper plate portion, 322: second lower plate portion, 33: intermediate member, 4: second parallel link mechanism, 41: third link arm, 42: fourth link arm, 43: Moving member, 5: first driving unit, 51: first motor, 511: output shaft, 52: first reducer, 521: first input shaft, 522: first output shaft, 6: second driving unit, 61: second motor, 611: output shaft, 62: second reducer, 621: second input shaft, 622: second output shaft, 71: first seal unit, 72: second seal unit, 73: first hermetic seal, 74: second hermetic seal, 8: hand, v1: first vertical axis, v2: second vertical axis, z: vertical direction

Claims

1. A support; a first parallel link mechanism including: a first link arm supported to be rotatable about a first vertical axis relative to the support body; a second link arm supported to be rotatable about a second vertical axis relative to the support body; and an intermediate member rotatably connected to the first link arm and the second link arm so that the first link arm and the second link arm are parallel; a second parallel link mechanism including a third link arm and a fourth link arm rotatably supported on the intermediate member, and a moving member rotatably connected to the third link arm and the fourth link arm so that the third link arm and the fourth link arm are parallel to each other; a first drive unit and a second drive unit, The first parallel link mechanism and the second parallel link mechanism are interlocked to linearly move the moving member, the first drive unit is supported by the support body with the first vertical axis as a center line, and the first link arm is connected to the first drive unit and driven by the first drive unit; A link device, wherein the second drive unit is supported by the support body with the second vertical axis as a center line, and the second link arm is connected to the second drive unit and driven by the second drive unit.

2. the support body has a housing portion that houses at least a portion of each of the first drive portion and the second drive portion; the first link arm has a first upper plate portion located vertically above the housing portion, the second link arm has a second upper plate portion located above the housing portion in the vertical direction, the first drive unit includes a first motor, a first reducer having a first input shaft connected to an output shaft of the first motor, and a first output shaft connected to the first upper plate portion, 2. The link device according to claim 1, wherein the second drive unit includes a second motor, a second input shaft connected to the output shaft of the second motor, and a second reducer having a second output shaft connected to the second upper plate portion.

3. the housing portion has a first wall portion and a second wall portion located lower than the first wall portion in the vertical direction, the first reducer and the second reducer are disposed so as to penetrate the first wall portion, the first link arm has a first lower plate portion located lower than the second wall portion in the vertical direction, the second link arm has a second lower plate portion located lower than the second wall portion in the vertical direction, the first upper plate portion is supported rotatably about the first vertical axis relative to the first wall portion, the first lower plate portion is supported rotatably about the first vertical axis relative to the second wall portion, the second upper plate portion is supported rotatably about the second vertical axis relative to the first wall portion, The link device according to claim 2 , wherein the second lower plate portion is supported rotatably about the second vertical axis relative to the second wall portion.

4. a first seal unit attached to the first reducer and the first wall portion; a second seal unit attached to the second reducer and the first wall portion, The second wall portion is formed with a first opening located below the first motor in the vertical direction and a second opening located below the second motor in the vertical direction, 4. The link device according to claim 3, wherein the housing portion is hermetically sealed by the first seal unit and the second seal unit, a first hermetic seal provided in the first opening, and a second hermetic seal provided in the second opening.

5. A transport robot comprising: a link device according to claim 1; and a hand fixed to the moving member.

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