Deposition apparatus for display device and method of replacing magnet plate thereof

Abstract

To provide a vapor deposition apparatus for a display device capable of improving adhesion between a mask and a substrate, and to provide a method for replacing a magnet plate of the same.SOLUTION: A deposition apparatus for a display device includes a chamber 100, a deposition source 200 in the chamber 100, a stage 250 on the deposition source 200, a mask structure 340 on the stage 250, a magnet plate 800 on the mask structure 340, and a first driving mechanism 910 connected to the magnet plate 800, wherein the magnet plate 800 is detachably connected to the first driving mechanism 910. 400.SELECTED DRAWING: Figure 1

Description

[Technical Field]

[0001] One embodiment relates to a deposition apparatus for a display device, and more particularly to a deposition apparatus for a display device that can improve adhesion between a mask and a substrate, and a method for replacing a magnet plate of the deposition apparatus. [Background technology]

[0002] Organic light emitting diode (OLED) displays have self-luminous properties and, unlike liquid crystal displays (LCDs), do not require a separate light source, which allows for reduced thickness and weight. Furthermore, OLED displays are attracting attention as next-generation display devices for portable electronic devices due to their high-quality characteristics, such as low power consumption, high brightness, and fast response speed. Summary of the Invention [Problem to be solved by the invention]

[0003] An object of one embodiment is to provide a deposition apparatus for a display device and a method for replacing a magnet plate thereof, which can improve adhesion between a mask and a substrate.

[0004] The objectives of the present invention are not limited to those described above, and other technical objectives not mentioned herein will be clearly understood by those skilled in the art from the following description. [Means for solving the problem]

[0005] To achieve the above object, one embodiment of a deposition apparatus for a display device includes a chamber, a deposition source in the chamber, a stage above the deposition source, a mask structure on the stage, a magnetic plate above the mask structure, and a first driving mechanism connected to the magnetic plate, wherein the magnetic plate is detachably connected to the first driving mechanism.

[0006] According to one embodiment of the present invention, a method for replacing a magnet plate in a deposition apparatus for a display device includes the steps of: moving a first carrier along a transport track to load it into a chamber; pushing the first carrier with a pusher disposed on the transport track to lower the first carrier and a support member of the first carrier; placing a first magnet plate attached to a driving mechanism in an opening of the first carrier; moving the pusher to an original position to raise the first carrier and the support member of the first carrier, thereby supporting the first magnet plate and loading the first magnet plate onto the first carrier; and separating the first magnet plate loaded on the first carrier from the driving mechanism. moving a first carrier carrying a magnet plate along the transport track to unload it outside the chamber; moving a second carrier carrying a second magnet plate along the transport track to load it into the chamber; attaching the drive mechanism and the second magnet plate to each other; pushing the second carrier with the pusher to lower the second carrier and the support member of the second carrier, thereby releasing the binding force of the support member of the second carrier on the second magnet plate; moving the drive mechanism to which the second magnet plate is attached to separate the second magnet plate from the second carrier; and moving the second carrier along the transport track to unload it outside the chamber.

[0007] Specific details of other embodiments are included in the detailed description and drawings. [Effects of the Invention]

[0008] According to an embodiment of the deposition apparatus for a display device and the method for replacing a magnet plate therewith, the adhesive force between the mask and the substrate can be improved.

[0009] Additionally, according to one embodiment, the carrier allows for easy replacement of the magnet plates.

[0010] It should be noted that the effects obtained from the present invention are not limited to those described above, and other effects not mentioned will be clearly understood by those having ordinary skill in the technical field to which the present invention pertains from the following description. [Brief explanation of the drawings]

[0011] [Figure 1] 1 is a schematic diagram of a vapor deposition apparatus according to an embodiment. [Figure 2] FIG. 2 is a plan view of a first surface of the magnet plate of FIG. 1. [Figure 3] FIG. 2 is a plan view of the second surface of the magnet plate of FIG. 1. [Figure 4] FIG. 2 is a perspective view of a carrier disposed on a transport track. [Figure 5] FIG. 5 is an enlarged view of the A1 region in FIG. [Figure 6] 5 is a diagram for explaining that a magnetic plate is coupled to the carrier of FIG. 4. FIG. [Figure 7] FIG. 7 is an enlarged view of the A2 region in FIG. [Figure 8] FIG. 10 is a diagram illustrating the separation between the carrier and the magnet plate. [Figure 9] FIG. 10 is a diagram illustrating the separation between the carrier and the magnet plate. [Figure 10] 10A to 10C are diagrams illustrating a method for replacing a magnet plate in a deposition apparatus according to an embodiment. [Figure 11] 10A to 10C are diagrams illustrating a method for replacing a magnet plate in a deposition apparatus according to an embodiment. [Figure 12] 10A to 10C are diagrams illustrating a method for replacing a magnet plate in a deposition apparatus according to an embodiment. [Figure 13] 10A to 10C are diagrams illustrating a method for replacing a magnet plate in a deposition apparatus according to an embodiment. DETAILED DESCRIPTION OF THE INVENTION

[0012] The advantages and features of the present invention, as well as methods for achieving them, will become clearer with reference to the following detailed embodiments in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, and can be realized in various different forms. The present embodiments are provided solely for the purpose of complete disclosure of the present invention and to fully convey the scope of the invention to those skilled in the art to which the present invention pertains. The present invention is defined solely by the scope of the claims.

[0013] When elements or layers are referred to as being "on" other elements or layers, this includes all cases where other layers or elements are directly on or between the other elements. The same reference numerals refer to the same components throughout the specification. The shapes, sizes, ratios, angles, numbers, etc. disclosed in the drawings for explaining the embodiments are merely examples, and the present invention is not limited to the details shown in the drawings.

[0014] Although terms such as "first" and "second" are used to describe various components, it is understood that these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, it is understood that a "first" component referred to below may be a "second" component within the technical concept of the present invention.

[0015] The features of the various embodiments of the present invention may be partially or wholly combined or combined with one another, and may be technically interlocked and driven in various ways, and each embodiment may be implemented independently of the others or in conjunction with one another.

[0016] Hereinafter, specific embodiments will be described with reference to the accompanying drawings.

[0017] Fig. 1 is a schematic diagram of a deposition apparatus according to one embodiment, Fig. 2 is a plan view of a first surface of a magnet plate 800 in Fig. 1, and Fig. 3 is a plan view of a second surface of the magnet plate 800 in Fig. 1. Note that in Figs. 1 to 3, the direction opposite to the third direction DR3 (hereinafter referred to as the third opposite direction) is the direction of gravity.

[0018] As shown in FIG. 1, a deposition apparatus for a display device according to one embodiment may include a chamber 100, a deposition source 200, a stage 250, a mask structure 340, a substrate tray 700, a magnet plate 800, a transfer track 500, a carrier 600, and a driving mechanism 900.

[0019] The chamber 100 may define a deposition space in which a deposition process is performed. A film deposition process for manufacturing an organic light-emitting display device is performed inside the chamber 100. The chamber 100 may be a vacuum chamber 100. The deposition source 200, the stage 250, the driving mechanism 900, and a portion of the transport track 500 are disposed inside the chamber 100. Note that, during the deposition process, the deposition source 200, the stage 250, the mask structure 340, the substrate 50, the substrate tray 700, the magnet plate 800, a portion of the transport track 500, and the driving mechanism 900 may also be disposed inside the chamber 100.

[0020] The deposition source 200 is disposed within the chamber 100. For example, the deposition source 200 is disposed between the first inner wall 101 of the chamber 100 and the stage 250. The deposition source 200 provides a deposition material. The deposition material moves from the deposition source 200 through the opening of the stage 250 toward the mask structure 340. Specifically, the deposition source 200 heats and vaporizes a deposition material, such as an organic material or an electrode material, at a high temperature. The vaporized deposition material may then be deposited on the substrate 50 through the pattern holes of the mask structure 340. The organic material may be, for example, a material for fabricating a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer disposed between an anode electrode and a cathode electrode of an organic light-emitting diode (OLED). The substrate 50 may be, for example, a substrate used in a display device including an organic light-emitting diode (OLED).

[0021] The stage 250 is disposed on the deposition source 200. For example, the stage 250 is disposed between the deposition source 200 and the mask structure 340. The stage 250 is fixedly disposed inside the chamber 100. The stage 250 may be tilted toward the deposition source 200. For example, the stage 250 may be tilted in a direction opposite to the second direction DR2 (hereinafter, referred to as the second opposite direction) with respect to the third direction DR3. Therefore, an acute angle may be formed between one side of the stage 250 facing the deposition source 200 and the ground on which the stage 250 is disposed (e.g., the bottom surface of the chamber 100). In this case, a support protruding from the underside of the stage 250 may be disposed below the stage 250. The stage 250 may have a rectangular frame shape with a hole in the center. For example, the stage 250 may have an opening in the center.

[0022] The mask structure 340 is disposed on the stage 250. For example, the mask structure 340 is disposed between the stage 250 and the substrate tray 700. The mask structure 340 may be disposed on a support base of the stage 250. In this case, since the stage 250 is tilted, the mask structure 340 is disposed in an inclined state on the stage 250. The mask structure 340 may include a frame 300 and a mask 400.

[0023] The frame 300 is disposed on the stage 250. For example, the frame 300 is disposed between the stage 250 and the mask 400. The frame 300 may have a rectangular frame shape with a hole in the center. For example, the frame 300 may have an opening in the center. Grooves 30 are disposed on both side edges of the frame 300. The frame 300 may include a magnetic material. For example, the frame 300 may include a material (e.g., iron (Fe)) that can be attached to a magnet.

[0024] The mask 400 is placed on the frame 300. For example, the mask 400 is placed between the frame 300 and the substrate tray 700. The mask 400 is placed on the frame 300 so as to cover the opening of the frame 300. The edge of the mask 400 is attached to the frame 300. For example, the mask 400 can be attached to the frame 300 by welding. The mask 400 may be a fine metal mask (FMM).

[0025] The mask 400 may include multiple sub-masks (410, or mask sticks). Each of the sub-masks 410 may have a rectangular shape extending in the third direction DR3. The sub-masks 410 are arranged along the first direction DR1. Adjacent sub-masks 410 may contact each other. The portions of each sub-mask 410, excluding both edges, are disposed over the opening of the frame 300. Although not shown in the drawings, each sub-mask 410 may have multiple pattern holes penetrating the respective sub-mask 410 in the second direction DR2. The deposition material may be deposited onto the substrate 50 from the deposition source 200 through the pattern holes of each sub-mask 410. Each sub-mask 410 may be made of a material containing a magnetic material (e.g., iron (Fe)). For example, each sub-mask 410 may contain a material that is attracted to a magnet.

[0026] The substrate tray 700 is disposed on the mask structure 340. For example, the substrate tray 700 is disposed between the mask 400 and the magnet plate 800 of the mask structure 340. The substrate tray 700 carries the substrate 50. At this time, the substrate tray 700 can attract the substrate 50 by electrostatic force. For example, the substrate tray 700 can provide a surface on which the substrate 50 is placed and also function as an electrostatic chuck that attracts and fixes the substrate 50 to one surface of the substrate tray 700. The substrate tray 700 is made of a material including ceramic or titanium.

[0027] The magnet plate 800 is disposed on the substrate tray 700. For example, the magnet plate 800 is disposed between the substrate tray 700 and the driving mechanism 900. The magnet plate 800 is disposed on the substrate tray 700 so as to face the substrate tray 700. The magnet plate 800 provides a magnetic force. For example, the magnet plate 800 can provide a magnetic force such that the metal mask 400 is tightly attached to the substrate 50.

[0028] The magnet plate 800 may include a base member 810 and a plurality of magnets 820 arranged on the base member 810. For example, the magnets 820 are arranged on the base member 810. As a specific example, when one side surface of the base member 810 facing the substrate tray 700 is defined as a first surface 881, the magnets 820 are arranged on the first surface 881 of the base member 810. Each magnet 820 may include, for example, a permanent magnet.

[0029] The magnet 820 has a north pole 821 and a south pole 822. The magnets 820 arranged along the first direction DR1 may be arranged such that the opposite poles face each other in the first direction DR1. The magnets 820 arranged along the second direction DR2 may be arranged such that the opposite poles face each other.

[0030] When the surface opposite to the first surface 881 of the base member 810 is defined as the second surface 882 of the base member 810, a plurality of magnetic bodies 830 are disposed on the second surface 882 of the base member 810. For example, the plurality of magnetic bodies 830 may be disposed in the coupling groove of the base member 810 on the second surface (882). For example, the magnetic bodies 830 may include a material that can be attached to a magnet (e.g., iron (Fe)).

[0031] At least one groove 80 is disposed on the edge of the base member 810. For example, as shown in FIGS. 2 and 3, a groove 80 may be disposed near each corner of the rectangular base member 810. Specifically, the base member 810 may have four grooves 80, where two of the four grooves 80 may be disposed on the upper and lower sides of the first side 11 of the base member 810, respectively, and the remaining two grooves 80 may be disposed on the upper and lower sides of the second side 22 of the base member 810, respectively. The first side 11 and the second side 22 of the base member 810 are disposed to face each other. The grooves 80 disposed on different sides and facing each other may have shapes concave toward each other.

[0032] The drive mechanism 900 may include a first drive mechanism 910 and a second drive mechanism 920 .

[0033] The first drive mechanism 910 is disposed between the magnet plate 800 and the second drive mechanism 920. For example, the first drive mechanism 910 is disposed between the base member 810 of the magnet plate 800 and the second drive mechanism 920. The first drive mechanism 910 may include a magnet 89. For example, the magnet 89 may be disposed on the opposite side of the first drive mechanism 910 to the side connected to the first drive shaft 911. The magnet 89 of the first drive mechanism may be disposed to correspond to (or overlap) the magnetic body 830 of the magnet plate 800. The magnet 89 may include a permanent magnet.

[0034] The magnet plate 800 is detachably attached to a first driving mechanism 910. For example, the base member 810 of the magnet plate 800 can be detachably attached to the magnet 89 of the first driving mechanism 910. In other words, the magnetic material 830 of the base member 810 can be attached to the magnet 89 of the first driving mechanism 910 by magnetic force from the magnet 89 of the first driving mechanism 910. The first driving mechanism 910 moves toward the deposition source 200 or in the opposite direction within the chamber 100. For example, the first driving mechanism 910 can move along a second reverse direction or a second direction DR2. To this end, according to one embodiment, the first driving mechanism 910 can be connected to a first driving shaft 911 that extends along the second reverse direction or retracts along the second direction DR2. The first driving shaft 911 is connected to an external driving unit via a hole 90 of the second driving mechanism 920 and a hole 21 of the chamber 100. The first driving mechanism 910 can also move further in the first direction DR1, the direction opposite to the first direction DR1 (hereinafter referred to as the first opposite direction), the third direction DR3, or the third opposite direction. In this case, the first driving shaft 911 can also move further in the first direction DR1, the first opposite direction, the third direction DR3, or the third opposite direction. The movement of the first driving mechanism 910 can control the movement of the magnet plate 800 attached to the first driving mechanism 910.

[0035] The second driving mechanism 920 is disposed between the first driving mechanism 910 and the second inner wall 102 of the chamber 100. The second driving mechanism 920 may include a permanent electromagnet 92. The substrate tray 700 is attached to the second driving mechanism 920. For example, the magnetic material 70 of the substrate tray 700 may be attached to the second driving mechanism 920 by attaching the magnetic material 70 of the substrate tray 700 to the permanent electromagnet 92 of the second driving mechanism 920. The permanent electromagnet 92 is disposed on both side edges of the second driving mechanism 920. The magnetic material 70 is disposed on both side edges of the substrate tray 700 to correspond to the permanent electromagnet 92. The magnetic material 70 may include a magnetic material that is attached to a magnet, such as iron (Fe).

[0036] The second driving mechanism 920 may include an electromagnet instead of the permanent electromagnet 92. The second driving mechanism 920 moves toward or away from the deposition source 200 within the chamber 100. For example, the second driving mechanism 920 may move along a second reverse direction or a second direction DR2. To this end, according to one embodiment, the second driving mechanism 920 may be connected to a second driving shaft 921 that extends along the second reverse direction or retracts along the second direction DR2. The second driving mechanism 920 may also move in the first direction DR1, the first reverse direction, the third direction DR3, or the third reverse direction. In such a case, the second driving shaft 921 may also move in the first direction DR1, the first reverse direction, the third direction DR3, or the third reverse direction. The movement of the second driving mechanism 920 may control the movement of the substrate tray 700 attached to the second driving mechanism 920. The second driving mechanism 920 can perform an alignment operation between the substrate 50 on the substrate tray 700 and the mask structure 340 by controlling the position of the substrate tray 700 attached thereto.

[0037] The transfer track 500 is arranged inside and outside the chamber 100 so as to pass through, for example, a first gate G1 and a second gate G2 of the chamber 100. The transfer track 500 may extend along a first direction DR1. The first gate G1 and the second gate G2 are arranged to face each other.

[0038] The carrier 600 moves along the transport track 500. For example, the carrier 600 can move along the transport track 500 by magnetic levitation. The carrier 600 transports the magnet plate 800.

[0039] As described above, the stage 250 may have its upper side tilted toward the deposition source 200. Therefore, the mask structure 340, substrate tray 700, substrate 50, magnet plate 800, first driving mechanism 910, second driving mechanism 920, transfer track 500, and carrier (1600 or 2600) may also be tilted at the same angle as the stage 250. This allows particles generated during the deposition process on the substrate 50 to fall in the direction of gravity without adhering to the substrate 50. Therefore, contamination of the substrate 50 by particles can be prevented.

[0040] Fig. 4 is a perspective view of the carrier 600 arranged on the transport track 500, Fig. 5 is an enlarged view of the A1 area of ​​Fig. 4, Fig. 6 is a diagram for explaining that the magnet plate 800 is coupled to the carrier 600 of Fig. 4, and Fig. 7 is an enlarged view of the A2 area of ​​Fig. 6. Here, Fig. 4 is a perspective view of the carrier 600 arranged on the transport track 500 of Fig. 1.

[0041] The carrier 600 moves along the transport track 500. The transport track 500 may include a lower track 501 and an upper track 502 arranged to face each other in the third direction DR3. The lower track 501 may have a U-shaped cross section, and the upper track 502 may have a bar shape. The carrier 600 is disposed between the lower track 501 and the upper track 502. The carrier 600 moves along the transport track 500 between the lower track 501 and the upper track 502.

[0042] The carrier 600 may have a square frame shape as shown in Fig. 4. However, the shape of the carrier 600 is not limited thereto and may be modified into various shapes.

[0043] Carrier 600 may include a plurality of bars 601, 602, 603, 604 and a plurality of support members 610, 620, 630. For example, carrier 600 may include a first bar 601, a second bar 602, a third bar 603, and a fourth bar 604 that are connected to one another. A magnet plate 800 is disposed in a region (e.g., opening 88) defined by first bar 601, second bar 602, third bar 603, and fourth bar 604. Here, third bar 603 may have a U-shaped cross section.

[0044] The first bar 601 and the second bar 602 face each other in the first direction DR1. The third bar 603 and the fourth bar 604 face each other in the third direction DR3. The first bar 601 is disposed between one end of the third bar 603 and one end of the fourth bar 604. The second bar 602 is disposed between the other end of the third bar 603 and the other end of the fourth bar 604.

[0045] The plurality of support members 610, 620, 630 may include at least one first support member 610 extending from the first bar 601, at least one second support member 620 extending from the second bar 602, and at least one third support member 630 extending from the third bar 603. For example, two first support members 610 may extend toward the second bar 602 on one side and the other side of the first bar 601, respectively. For example, two first support members 610 may extend along the first direction DR1 on one side and the other side of the first bar 601, respectively. Two second support members 620 may extend toward the first bar 601 on one side and the other side of the second bar 602, respectively. For example, two second support members 620 may extend along the second opposite direction on one side and the other side of the second bar 602, respectively. The two third support members 630 may extend toward the fourth bar 604 on one side and the other side of the third bar 603, respectively. For example, the two third support members 630 may extend along the third direction DR3 on one side and the other side of the third bar 603, respectively. The two first support members 610 and the two second support members 620 are arranged to face each other.

[0046] As shown in FIG. 5 , the first support member 610 may include an extension 611 and a plurality of protrusions 612. One side of the extension 611 is connected to the first bar 601. The extension 611 may extend from the first bar 601 toward the second bar 602. A plurality of protrusions 612 (e.g., two protrusions 612) are disposed on the other side of the extension 611. The plurality of protrusions 612 are rotatably connected to the other side of the extension 611. For example, each of the plurality of protrusions 612 rotates along the periphery of a circle tangent to a tangent extending along the second direction DR2. The plurality of protrusions 612 are disposed to face each other in the second direction DR2. Each of the plurality of protrusions 612 may have a cylindrical shape. However, the shape of the protrusions 612 is not limited thereto and may be changed to various shapes.

[0047] The second support member 620 may have the same configuration as the above-described first support member 610. However, the extension of the second support member 620 may extend from the second bar 602 toward the first bar 601.

[0048] The third support member 630 may include an extension 631, a protrusion 632, and a projection 633. One side of the extension 631 is connected to the third bar 603. The extension 631 may extend from the third bar 603 toward the fourth bar 604. The projection 632 is disposed on the other side of the extension 631. The projection 633 is disposed on one side of the projection 632. The projection 633 may be rotatably connected to one side of the projection 632. For example, the projection 633 rotates along the periphery of a circle tangent to a line extending along the first direction DR1. The projection 633 may have a cylindrical shape. However, the shape of the projection 633 is not limited thereto and may be changed to various shapes.

[0049] 6 and 7, the first support member 610, the second support member 620, and the third support member 630 support the magnet plate 800. For example, the first support member 610, the second support member 620, and the third support member 630 support the base member 810 of the magnet plate 800.

[0050] The first support members 610 each support a first side 11 of the base member 810. For example, the first side 11 of the base member 810 is supported by being disposed between the protrusions 612 of the first support members 610. At this time, the protrusions 612 of the first support members 610 may come into contact with the first side 11.

[0051] The second support members 620 each support the second side 22 of the base member 810. For example, the second side 22 of the base member 810 is supported by being disposed between the protrusions of the second support members 620. At this time, the protrusions of the second support members 620 may come into contact with the second side 22.

[0052] The third support members 630 each support the third side 33 of the base member 810. For example, the third side 33 of the base member 810 is supported by being placed on the protrusions 633 of the third support members 630. At this time, the protrusions 633 of the third support members 630 may come into contact with the third side 33.

[0053] 8 and 9 are diagrams for explaining the separation between the carrier 600 and the magnet plate 800. FIG.

[0054] The deposition apparatus of one embodiment may further include a pusher (55). The pusher 55 is disposed on the carrier 600. For example, as shown in FIG. 8 , the pusher 55 is disposed on a fourth bar 604 of the carrier 600. Specifically, the pusher 55 faces the fourth bar 604 via an opening 60 in the upper track 502. The pusher 55 and the opening 60 in the upper track 502 are disposed within the chamber 100.

[0055] The pusher 55 moves toward the fourth bar 604 or moves in the opposite direction. For example, the pusher 55 moves along the third reverse direction or the third direction DR3. The pusher 55 can move a first step distance and a second step distance along the third reverse direction. Here, the second step distance is greater than the first step distance. Here, when the pusher 55 descends the second step distance along the third reverse direction, the lower track 501 also descends along the third reverse direction. For example, when the pusher 55 descends the second step distance, the pusher 55 and the lower track 501 both descend in the same direction.

[0056] When the pusher 55 descends in the third reverse direction by a first step, the pusher 55 may come into contact with the carrier 600. The carrier 600 may descend in the third reverse direction due to pressure applied by the pusher 55. At this time, the lower track 501 remains unchanged without descending, thereby reducing the gap between the carrier 600 and the lower track 501. Therefore, the carrier 600 may be stably disposed on the lower track 501 within the chamber 100. Here, when the pusher 55 descends by the first step, the descending distance is short, so that even if the carrier 600 descends due to pressure applied by the pusher 55, the magnetic plate 800 housed in the carrier 600 can maintain a state of being supported by the support members 610, 620, and 630 of the carrier 600.

[0057] When the pusher 55 descends the second-stage distance, the lower track 501 simultaneously descends along the third reverse direction along with the pusher 55. In other words, the pusher 55 and the lower track 501 can simultaneously descend along the third reverse direction. Therefore, the carrier 600 and the lower track 501 can descend along the third reverse direction. At this time, the gap between the carrier 600 and the lower track 501 may be substantially the same as the gap between the carrier 600 and the lower track 501 when the pusher 55 descends the first-stage distance. Therefore, the first support member 610, the second support member 620, and the third support member 630 each move in the third reverse direction, so that the protrusions 612 of the first support members 610 and the protrusions of the second support members 620 face each other across the grooves 80 of the magnet plate 800. In other words, the protrusions 612 of each first support member 610 do not contact the first edge 11 of the magnet plate 800, and the protrusions 612 of each second support member 620 do not contact the second edge 22 of the magnet plate 800. As described above, as the pusher 55 moves the carrier 600 downward in the third reverse direction, the third support member 630 and the magnet plate 800 become spaced apart from each other. For example, as the protrusions 612 of the second support member 620 and the third edge 33 of the magnet plate 800 become spaced apart from each other, the protrusions 613 of the third support member 630 do not come into contact with the third edge 33. Therefore, the magnet plate 800 is no longer supported by the carrier 600. Therefore, the magnet plate 800 can be easily moved in the second direction DR2 and the second reverse direction without interference with the carrier 600.

[0058] A mover 550 is disposed inside the lower track 501. The mover 550 may have a screw shape. A plurality of permanent magnets are disposed on the outer circumferential surface of the mover 550. A permanent magnet may also be disposed inside the lower track 501, and a permanent magnet may also be disposed on each of the opposing surfaces of the upper track 502 and the fourth bar 604 of the carrier 600. The rotation of the permanent magnets and the mover 550 causes the carrier 600 to move along the transport track 500 by magnetic levitation. For example, the movement direction of the carrier 600 disposed on the transport track 500 can be controlled depending on the rotation direction of the mover 550. Specifically, when the mover 550 rotates clockwise, the carrier 600 moves along the transport track 500 in a first direction DR1. When the mover 550 rotates counterclockwise, the carrier 600 can move along the transport track 500 in a first reverse direction DR1.

[0059] A deposition method using the deposition apparatus according to an embodiment having the above configuration will now be described in detail.

[0060] First, the deposition source 200, the stage 250, the first driving mechanism 910, and the second driving mechanism 920 are arranged inside the chamber 100. In this case, the magnet plate 800 is attached to the first driving mechanism 910. Furthermore, the first driving mechanism 910 and the second driving mechanism 920 are arranged between the transfer track 500 and the second inner wall 102 of the chamber 100 so as not to overlap with the transfer track 500.

[0061] Thereafter, the first carrier carrying the mask structure 340 is loaded into the chamber 100 along the transport track 500. For example, the first carrier carrying the mask structure 340 passes through the first gate G1 of the chamber 100 along the transport track 500 and is loaded (or placed) into the chamber 100. The first carrier is placed in the chamber 100 such that the mask structure 340 is aligned with the stage 250 between the stage 250 and the drive mechanism 900.

[0062] Next, the driving mechanism 900 moves toward the first carrier. At this time, the electro-permanent magnet 92 of the second driving mechanism 920 and the frame 300 of the mask structure 340 come into contact with each other, thereby attaching the mask structure 340 to the second driving mechanism 920. For example, the electro-permanent magnet 92 of the second driving mechanism 920 is inserted into the groove 30 of the frame 300, and the frame 300 can be attached to the second driving mechanism 920 by the magnetic force of the electro-permanent magnet 92. In other words, the frame 300 of the mask structure 340 and the mask structure 340 in the first carrier can be attached to the second driving mechanism 920.

[0063] Next, with the mask structure 340 attached to the second drive mechanism 920, the pusher 55 presses the first carrier in the third reverse direction. This removes the restraining force of the support member of the first carrier on the mask structure 340, allowing the mask structure 340 to remain movable from the first carrier in the second direction DR2 and the second reverse direction.

[0064] Next, the driving mechanism 900 moves further in the second reverse direction. In other words, the driving mechanism 900 can move toward the stage 250. As a result, the mask structure 340 attached to the second driving mechanism 920 is separated from the first carrier in the second reverse direction and can move along the second reverse direction along the second driving mechanism 920 to be removed from the transport track 500. Thereafter, the driving mechanism 900 with the mask structure 340 attached thereto moves further in the second reverse direction toward the stage 250 to place the mask structure 340 on the stage 250. Once the mask structure 340 is placed on the stage 250, the second driving mechanism 920 and the mask structure 340 are separated from each other. For example, the magnetic force of the permanent electromagnet 92 of the second driving mechanism 920 is released, thereby separating the mask structure 340 from the second driving mechanism 920.

[0065] The driving mechanism 900 then moves in the second direction DR2. For example, the driving mechanism 900 passes through the opening of the first carrier along the second direction DR2. The driving mechanism 900 is then positioned between the transfer track 500 and the second inner wall 102 of the first chamber 100.

[0066] Next, the pusher 55 rises and moves back to its original position. As a result, the first carrier (e.g., the empty first carrier) that has transferred the mask structure 340 rises and moves back to its original position. Thereafter, the first carrier (e.g., the empty first carrier) passes through the second gate G2 of the chamber 100 along the transfer track 500 and is unloaded to the outside of the chamber 100.

[0067] Thereafter, a second carrier carrying a substrate tray (700, e.g., a substrate tray 700 on which a substrate 50 is disposed) is loaded into the chamber 100 along the transport track 500. For example, the second carrier carrying the substrate tray 700 passes through the first gate G1 of the chamber 100 along the transport track 500 and is loaded (or disposed) into the chamber 100. For example, the second carrier is disposed in the chamber 100 such that the substrate tray 700 is aligned with the mask structure 340 between the mask structure 340 and the drive mechanism 900.

[0068] Next, the driving mechanism 900 moves toward the second carrier. In this case, the electro-permanent magnet 92 of the second driving mechanism 920 and the magnetic body 70 of the substrate tray 700 come into contact with each other, thereby allowing the substrate tray 700 to be attached to the second driving mechanism 920. For example, the substrate tray 700 can be attached to the second driving mechanism 920 by the magnetic force of the electro-permanent magnet 92.

[0069] Next, with the substrate tray 700 attached to the second drive mechanism 920, the pusher 55 presses the second carrier in the third reverse direction. This removes the restraining force of the support member of the second carrier on the substrate tray 700, thereby allowing the substrate tray 700 to remain movable from the second carrier in the second direction DR2 and the second reverse direction.

[0070] Next, the driving mechanism 900 moves further along the second reverse direction. In other words, the driving mechanism 900 moves toward the mask structure 340 on the stage 250. As a result, the substrate tray 700 attached to the second driving mechanism 920 is separated from the second carrier in the second reverse direction, and can move away from the transport track 500 by moving in the second reverse direction along the second driving mechanism 920. Thereafter, the driving mechanism 900 with the substrate tray 700 attached thereto moves further in the second reverse direction toward the mask structure 340 on the stage 250, and places the substrate tray 700 on the mask structure 340.

[0071] Next, the first driving mechanism 910 moves further in the second reverse direction toward the substrate tray 700. As a result, the magnet plate 800 attached to the first driving mechanism 910 can approach or contact the substrate tray 700. Then, the mask structure 340 is attracted toward the magnets 820 of the magnet plate 800 by the magnetic force of the magnet plate 800. This can improve the adhesion between the substrate 50 on the substrate tray 700 and the mask structure 340.

[0072] Thereafter, the deposition material is deposited from the deposition source 200 onto the substrate 50 through the pattern holes of the mask structure 340. For example, a deposition process for the substrate 50 is performed. According to one embodiment, during the deposition process for the substrate 50, the magnet plate 800 is disposed on the substrate tray 700 without being loaded on the carrier 600, so that the magnet plate 800 is disposed closer to the substrate tray 700. In other words, since the thickness of the carrier 600 (e.g., the size of the carrier 600 in the second direction DR2) is greater than the thickness of the magnet plate 800 (e.g., the size of the magnet plate 800 in the second direction DR2), when the magnet plate 800 is disposed on the substrate tray 700 while separated from the carrier 600, as in the embodiment, the magnet plate 800 can be disposed closer to the substrate tray 700. As a result, the distance between the mask structure 340 and the magnet plate 800 may be further reduced, and the magnetic force provided from the magnet plate 800 to the mask structure 340 may be further increased. This may improve the adhesion between the mask structure 340 and the substrate 50. Therefore, better alignment between the mask 400 of the mask structure 340 and the substrate 50 is achieved.

[0073] When the deposition process on the substrate 50 is completed, the first driving mechanism 910 to which the magnet plate 800 is attached moves along the second direction DR2, thereby weakening the adhesive force between the mask structure 340 and the substrate 50.

[0074] The driving mechanism 900 then moves in the second direction DR2. At this time, the substrate tray (700, for example, the substrate tray 700 on which the substrate 50 for which the deposition process has been completed is placed) attached to the second driving mechanism 920 also moves in the second direction DR2. The substrate tray 700 attached to the second driving mechanism 920 may be recoupled (or loaded) to the second carrier (for example, an empty second carrier). For example, the substrate tray 700 may be placed in the opening of the second carrier 600 by the movement of the driving mechanism 900. At this time, the pusher 55 that was pushing the second carrier 600 may rise in the third direction DR3 and return to its original position, causing the support member of the second carrier and the substrate tray 700 to come into contact with each other again. As a result, the substrate tray (700, for example, the substrate tray 700 on which the substrate 50 for which the deposition process has been completed is placed) may be recoupled to the second carrier 600. After the substrate tray 700 is recoupled to the second carrier 600, the second driving mechanism 920 and the substrate tray 700 are separated from each other. For example, the magnetic force of the permanent electromagnet 92 of the second driving mechanism 920 is released, thereby separating the second driving mechanism 920 and the substrate tray 700 from each other.

[0075] Next, the driving mechanism 900 further moves in the second direction DR2, whereby the driving mechanism 900 can be disposed between the transfer track 500 and the second inner wall 102 of the first chamber 100.

[0076] Next, the second carrier loaded with a substrate tray (700, for example, a substrate tray 700 on which a substrate 50 on which the deposition process has been completed is placed) passes through the second gate G2 of the chamber 100 along the transport track 500 and is unloaded outside the chamber 100.

[0077] Note that when the first driving mechanism 910 moves during the deposition process described above, the first driving mechanism 910 can also move together with the second driving mechanism 920. Similarly, when the second driving mechanism 920 moves during the deposition process, the second driving mechanism 920 can move together with the first driving mechanism 910. For example, if the first driving mechanism 910 is located on the movement path along which the second driving mechanism 920 moves, the second driving mechanism 920 and the first driving mechanism 910 can move together. In this case, the first driving mechanism 910 can move together while being disposed within the second driving mechanism 920. For example, as shown in FIG. 1 , the second driving mechanism 920 has a cross section that surrounds the first driving mechanism 910 (e.g., a cross section in the shape of a square), and therefore the first driving mechanism 910 can move together with the second driving mechanism 920 while being disposed within the second driving mechanism 920 so as to be surrounded by the second driving mechanism 920.

[0078] When the magnet plate 800 becomes worn, damaged, or is replaced with a new magnet plate 800, the magnet plate 800 is replaced with a new magnet plate 800. The method for replacing the magnet plate 800 will be described in detail below.

[0079] 10, 11, 12, and 13 are diagrams illustrating a method for replacing the magnet plate 800 of the vapor deposition apparatus according to one embodiment.

[0080] First, although not shown in the drawings, an empty carrier (hereinafter referred to as a third carrier (e.g., 600)) is loaded into the chamber 100 along the transfer track 500. In other words, the third carrier with nothing inside is loaded into the chamber 100. At this time, the drive mechanism 900 inside the chamber 100 is disposed between the transfer track 500 and the second inner wall 102 of the chamber 100.

[0081] Then, the pusher 55 presses the third carrier in the third reverse direction. For example, the pusher 55 may be lowered a first distance to press the third carrier. This allows the third carrier 600 to be stably positioned on the transfer track within the chamber 100.

[0082] Next, the lower track 501 is lowered, and the third carrier 600 is further lowered (e.g., lowered a second distance) by the pusher 55. In this state, the first drive mechanism 910, to which the magnetic plate to be replaced (hereinafter, the first magnetic plate) is attached, moves in the second reverse direction toward the third carrier, and the first magnetic plate is placed in the opening (e.g., 88) of the third carrier. In this case, because the support member of the third carrier is lowered by the pusher 55, when the first magnetic plate moves in the second reverse direction toward the opening of the third carrier, the support member of the third carrier passes through the groove (e.g., 80) of the first magnetic plate. Therefore, the first magnetic plate can move in the second reverse direction and be placed in the opening of the third carrier without interference with its support member.

[0083] Then, as the pusher 55 moves upward in the third direction DR3 to its original position, the pressure of the pusher 55 on the third carrier is released. This allows the third carrier to move upward in the third direction DR3. In other words, the third carrier can move to its original position. This allows the support member of the third carrier to move to its original position. Then, the support member of the third carrier and the first magnet plate in the third carrier may come into contact with each other, thereby allowing the first magnet plate to be supported by the support member. For example, the first magnet plate is loaded onto the third carrier.

[0084] Next, with the first magnet plate loaded on the third carrier, the first driving mechanism 910 moves along the second direction DR2. As a result, the first magnet plate is separated from the first driving mechanism 910.

[0085] Next, the third carrier carrying the first magnet plate passes through the second gate G2 along the transfer track 500 and is unloaded to the outside of the chamber 100.

[0086] 10, a carrier (600, hereinafter referred to as the fourth carrier 600) carrying a new magnet plate (800, hereinafter referred to as the second magnet plate 800) is loaded into the chamber 100 along the transfer track 500. For example, the fourth carrier 600 carrying the second magnet plate 800 passes through the first gate G1 of the chamber 100 along the transfer track 500 and is loaded (or placed) into the chamber 100. At this time, the drive mechanism 900 in the chamber 100 is disposed between the transfer track 500 and the second inner wall 102 of the chamber 100.

[0087] Next, the pusher 55 presses the fourth carrier 600 in the third reverse direction. For example, the pusher 55 may be lowered a first distance to press the fourth carrier 600. This allows the fourth carrier 600 to be stably disposed on the transfer track 500 within the chamber 100.

[0088] 11, the first driving mechanism 910 disposed between the transfer track 500 and the second inner wall 102 of the chamber 100 moves toward the fourth carrier 600 and comes into contact with the second magnet plate 800 inside the fourth carrier 600. Then, the second magnet plate 800 is attached to the first driving mechanism 910 by the magnetic force from the first driving mechanism 910.

[0089] 12, with the second magnet plate 800 attached to the first driving mechanism 910, the pusher 55 presses the fourth carrier 600 in the third reverse direction by a second step distance, and the lower track 501 descends in the third reverse direction. Therefore, the restraining force of the support members 610, 620, 630 of the fourth carrier 600 on the second magnet plate 800 is removed, and the second magnet plate 800 can remain movable in the second direction DR2 and the second reverse direction from the fourth carrier 600.

[0090] 13, the first driving mechanism 910 moves along the second direction DR2. In other words, the first driving mechanism 910 can move toward the second inner wall (102 or the second driving mechanism 920) of the chamber 100. This allows the second magnet plate 800 attached to the first driving mechanism 910 to also move toward the second inner wall (102 or the second driving mechanism 920) of the chamber 100. Therefore, the driving mechanism 900 and the second magnet plate 800 can be disposed between the transfer track 500 and the second inner wall 102 of the chamber 100.

[0091] Next, the fourth carrier (600, for example, the empty fourth carrier 600) that has transferred the second magnet plate 800 passes through the second gate G2 of the chamber 100 along the transport track 500 and is unloaded to the outside of the chamber 100.

[0092] Thus, according to one embodiment, the magnet plate is detachably attached to the first drive mechanism 910, so that the magnet plate 800 can be easily replaced via the carrier 600.

[0093] The above-mentioned magnetic plate replacement work is carried out, for example, after the deposition process on the substrate 50 is completed, or before a series of deposition processes on the substrate 50.

[0094] In addition, when an intermediate chamber for controlling the pressure of the chamber 100 is connected to the chamber 100, the magnetic plate 800 can be replaced without performing a separate venting operation for the chamber 100. In this case, the operating rate of the deposition apparatus can be improved.

[0095] Those skilled in the art will understand that the present specification can be embodied in other specific forms without changing the technical spirit or essential features thereof. Therefore, the above-described embodiments should be understood to be illustrative in all respects and not limiting. The scope of the present specification is defined by the claims below, rather than the above detailed description, and all modifications and variations derived from the meaning and scope of the claims and their equivalents should be construed as being within the scope of the present specification.

[0096] In addition, the present specification and drawings disclose preferred embodiments of the present specification, and specific terms are used, but these are used in a general sense merely to easily explain the technical content of the present specification and to aid in understanding the invention, and are not intended to limit the scope of the present specification. It is obvious to a person skilled in the art to which the present specification pertains that, in addition to the embodiments disclosed herein, other modifications based on the technical idea of ​​the present specification can be implemented. [Explanation of symbols]

[0097] 100 Chambers 200 Deposition source 101 First Inner Wall 102 Second Inner Wall 250 stages 340 Mask Structure 300 frames 400 masks 410 Submask 700 PCB Tray 50 boards 900 Drive Mechanism 910 First drive mechanism 920 Second drive mechanism 600 Carriers 500 transport trucks 800 magnetic plate 810 Base material 820 Magnet 70 Magnetic material 92 Permanent electromagnet 88 Magnet 30 grooves G1 Gate 1 G2 2nd Gate 830 Magnetic material 90 holes 24 holes 21 holes DR1 1st direction DR2 2nd direction DR3 3rd direction

Claims

1. Chamber, a deposition source within the chamber; a stage above the deposition source; a mask structure on the stage; a magnetic plate on the mask structure; and a first drive mechanism connected to the magnet plate; The deposition device for a display device, wherein the magnet plate is detachably connected to the first driving mechanism.

2. The deposition apparatus for a display device according to claim 1 , wherein the magnet plate is attached to a magnet of the first driving mechanism.

3. The deposition apparatus for a display device according to claim 2 , wherein the magnet of the first driving mechanism includes a permanent magnet.

4. The magnet plate is Base member, a magnet on a first surface of the base member; and The vapor deposition device for a display device according to claim 2 , further comprising a magnetic body disposed on the second surface of the base member and attached to the magnet of the first driving mechanism.

5. The deposition apparatus for a display device according to claim 1 , further comprising a substrate tray disposed between the mask structure and the magnet plate.

6. The deposition apparatus for a display device according to claim 5 , further comprising a second driving mechanism connected to the substrate tray.

7. The deposition apparatus for a display device according to claim 6 , wherein the substrate tray is attached to a permanent electromagnet of the second driving mechanism.

8. The deposition apparatus for a display device according to claim 7 , wherein the substrate tray includes a magnetic material attached to a permanent electromagnet of the second driving mechanism.

9. The deposition apparatus for a display device according to claim 1 , further comprising a transfer track that passes through the first gate of the chamber and the second gate of the chamber and is disposed inside and outside the chamber.

10. The deposition apparatus for a display device according to claim 9 , further comprising a carrier movable along the transport track.

11. The transport truck is the lower track, and The deposition apparatus for a display device according to claim 10 , further comprising an upper track on the lower track.

12. The deposition apparatus for a display device according to claim 11 , wherein the carrier is disposed between the lower track and the upper track.

13. The carrier is First bar, a second bar disposed opposite the first bar; a third bar disposed on the lower track; a fourth bar disposed below the upper track and facing the third bar; an opening surrounded by the first bar, the second bar, the third bar, and the fourth bar; a first support member extending from the first bar toward the second bar; a second support member extending from the second bar toward the first bar; and The deposition apparatus for a display device according to claim 12 , further comprising a third support member extending from the third bar toward the fourth bar.

14. The first support member is an extension extending from the first bar; and The deposition apparatus for a display device according to claim 13 , further comprising a protrusion rotatably connected to one side of the extension.

15. The third support member is an extension extending from the third bar; a protrusion disposed on one side of the extension; and The deposition apparatus for a display device according to claim 14 , further comprising a protrusion rotatably disposed on one side of the protruding portion.

16. The deposition apparatus for a display device according to claim 13 , further comprising: a pusher disposed to face the fourth bar through the opening of the upper track and movable toward the fourth bar.

17. The deposition apparatus for a display device according to claim 13 , wherein the carrier transports the magnet plate.

18. The deposition apparatus for a display device according to claim 17 , wherein the magnet plate includes grooves disposed adjacent to the first support member and the second support member.

19. moving the first carrier along the transfer track to load it into the chamber; a pusher disposed on the transport track pushes the first carrier to lower the first carrier and the support member of the first carrier; a first magnetic plate attached to a drive mechanism is disposed in the opening of the first carrier; The pusher is moved to its original position to raise the first carrier and the support member of the first carrier, thereby supporting the first magnetic plate and loading the first magnetic plate onto the first carrier; Separating the first magnet plate loaded on the first carrier from the drive mechanism; moving the first carrier carrying the first magnet plate along the transport track to unload it outside the chamber; a second carrier carrying a second magnet plate is moved along the transport track and loaded into the chamber; attaching the drive mechanism and the second magnet plate to each other; the pusher pushes the second carrier to lower the second carrier and the support member of the second carrier, thereby releasing the binding force of the support member of the second carrier against the second magnet plate; Moving a drive mechanism to which the second magnet plate is attached to separate the second magnet plate from the second carrier; and a second carrier being moved along the transport track and unloaded to the outside of the chamber;

20. 20. The method of replacing a magnet plate in a deposition apparatus for a display device according to claim 19, wherein the driving mechanism and the first magnet plate or the second magnet plate are attached to each other by a magnetic force of the driving mechanism.

Images